200815776 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於在檢查被檢查基板時所使用的基板檢查 用治具及該治具之連接電極部之電極構造，更詳細地說， 是關於可使基板檢查用治具接觸器和基板檢查用治具電極 ^ 部的接觸電阻降低之基板檢查用治具的電極構造及具有該 電極構造之檢查治具。 Φ 另外，該發明並不限定於印刷電路基板，例如：可應 用在軟性印刷電路基板、多層電路基板、液晶顯示器或電 漿顯示器用的電極板，及半導體封裝用的封裝基板或輸送 ; 膠片等各種基板之電路配線檢查，該說明書中，是將該等 各種電路基板統一稱爲「基板」。 【先前技術】 以往，設置在電路基板上的電路圖案，必需將電訊號 # 正確傳達至該電路機板所搭載的1C等半導體或電阻器等 電氣、電子零件，因此對於電氣、電子零件組裝前的印刷 ^ 電路基板，或者是半導體晶圓等基板上形成的電路圖案， ^ 進行檢查對象電路圖案上所設置的檢查點間的測定，對其 良否加以判定。 上述的判定檢查是對實施電路圖案的斷線及短路進行 檢查的檢查方法。上述導通或短路的檢查是於設置在檢查 對象電路圖案2處的檢查點，分別抵接著一個測定端子， 於該測定端子間流動指定階級的測定用電流，對該測定端 -5- (2) (2)200815776 子間的電壓値加以測定，將所測出的電壓値和事先訂定的 臨界値進行比較藉此判定良否。 然而，上述方法所使用的基板檢查用治具，在分別於 電路圖案2處的檢查點，各抵接一個測定端子將其做爲測 定用電流的供應和電壓的測定之共用端子時，測定端子和 檢查點之間的接觸電阻會影響到測定電壓，使電阻値的測 定精度降低，導致有檢查結果可靠性降低的不利因素。 特別是，近年來，電路基板上所設置的電路圖案微細 化驅勢，使電路圖案的電阻値變小，導致上述接觸電阻對 該測定値造成的影響變成大問題。 爲解決上述接觸電阻問題，提案有如專利文獻2所揭 示的接觸器。該接觸器，具有可對測定對象電極接觸成大 致垂直的大致垂直狀接觸部，沿著該接觸部長度延伸的一 部份是以不同於該接觸部另一部份的熱膨脹係數材料構 成。藉由該構成，接觸部是成爲雙金屬，所以使接觸部在 指定的環境溫度下大致垂直接觸於測定對象電極，當在該 狀態下執行激勵過度時，該測定對象電極所傳導的環境溫 度熱會造成該接觸部朝以較小熱膨脹係數素材構成的部份 形成彎曲。 然而，即使是使用上述接觸部，但對電極部只可形成 垂直接觸，從接觸穩定性的觀點加以考量時，不能說是具 有充分的接觸穩定性以及具有接觸電阻低的連接。 〔專利文獻1〕日本特開平6-66832號公報 〔專利文獻2〕日本特開2005-345 1 29號公報 200815776 ⑶ 【發明內容】 〔發明欲解決之課題〕 本發明是有鑑於上述實情而爲的發明，目的爲提供一 種能夠降低基板檢查用治具接觸器和基板檢查用治具電極 部之接觸電阻的基板檢查用治具電極構造及具有該構.造的 基板檢查用治具。 〔用以解決課題之手段〕 申請專利範圍第1項記載的發明，其提供的基板檢查 用治具，是一種爲了檢查被檢查基板的導電特性，可在基 板檢查裝置本體和設置在該被檢查基板電路圖案的複數基 板被檢查點之間獲得電導通的基板檢查用治具，其特徵 爲，上述基板檢查用治具，具有：於兩端具有可達到電導 通的端部，一方的端部被壓接於被檢查點之一的具有導電 # 性棒狀接觸器所形成的接觸器群；可對上述接觸器群加以 保持的接觸器保持體；及具備有和上述接觸器群各個接觸 器另一端部成相向配置的連接電極部，連接於上述基板檢 查裝置的連接電極體，當將上述接觸器群的另一端部和上 述連接電極體形成連接時，各個上述另一端部附近的側圍 面至少有一部份是和與其相向的上述連接電極部的一部份 形成接觸藉此成爲電導通狀態。 申請專利範圍第2項記載的發明，其提供的基板檢查 用治具，是於申請專利範圍第1項記載的基板檢查用治具 200815776 (4) 中，其特徵爲，上述連接電極部，具有與其成相向之上述 接觸器的上述另一方端部收容用的構造，並且，上述接觸 器和上述連接電極部的導通狀態，至少是由該接觸器另一 方端部和該連接電極部內部側表面的接觸形成。 ' 申請專利範圍第3項記載的發明，其提供的基板檢查 ' 用治具，是於申請專利範圍第1項或第2項記載的基板檢 查用治具中，其特徵爲，上述連接電極部，其所形成的形 φ 狀是可遊動嵌著與該等成相向之上述接觸器的上述另一方 端部至少一部份。 申請專利範圍第4項記載的發明，其提供的基板檢查 用治具，是於申請專利範圍第1項至第3項任一項記載的 基板檢查用治具中，其特徵爲，上述連接電極部是形成爲 筒狀。 申請專利範圍第5項記載的發明，其提供的基板檢查 用治具，是於申請專利範圍第1項至第4項任一項記載的 • 基板檢查用治具中，其特徵爲，上述連接電極部是針對上 述接觸器的長軸形成爲傾斜或彎曲。 申請專利範圍第6項記載的發明，其提供的基板檢查 用治具，是於申請專利範圍第1項至第5項任一項記載的 基板檢查用治具中，其特徵爲，上述連接電極部具有可朝 上述接觸器出入方向的直角方向滑動的滑行部。 申請專利範圍第7項記載的發明，其提供的基板檢查 用治具，是於申請專利範圍第1項記載的基板檢查用治具 中，其特徵爲，上述接觸器的另一方端部是針對上述接觸 -8- 200815776 (5) 器的長軸形成曲折。 申請專利範圍第8項記載的發明，其提供 用治具，是於申請專利範圍第1項記載的基板 中，其特徵爲，上述接觸器保持體，具有：具 * 一方端部附近保持用第一保持孔的第一保持部 接觸器另一方端部附近保持用第二保持孔的第 上述第二保持部是和上述電極體形成抵接配置 φ 申請專利範圍第9項記載的發明，其提供 用治具，是於申請專利範圍第1項記載的基板 中，其特徵爲，上述接觸器保持體，具有：具 一方端部附近保持用第一保持孔的第一保持部 接觸器另一方端部附近保持用第二保持孔的第 上述第二保持部是和上述電極體隔著指定間隔 申請專利範圍第1 0項記載的發明，其提 查用治具，是於申請專利範圍第1項記載的基 • 具中，其特徵爲，上述接觸器保持體是形成爲 上述接觸器另一方接觸上述連接電極部的使用 接觸器長軸方向滑動使該接觸器形成突出的保: 申請專利範圍第1 1項記載的發明，其提 查用治具，是於申請專利範圍第1項記載的基 具中，其特徵爲，上述另一方端部附近的範圍 接時，成爲上述另一方端部的側圍面至少可接 接電極部的範圍。 申請專利範圍第1 2項記載的發明，其提 的基板檢查 檢查用治具 上述接觸器 :及具上述 二保持部， 〇 的基板檢查 檢查用治具 上述接觸器 :及具上述 二保持部， 开多成配置。 供的基板檢 板檢查用治 具備有：於 時，可朝該 蒦部。 供的基板檢 板檢查用治 是於上述連 觸於上述連 供的連接電 -9 - 200815776 (6) 極部之電極構造’是一*種爲了檢查被檢查基板的導電特 性，爲了在基板檢查裝置本體和設置在該被檢查基板電路 圖案的複數基板被檢查點之間獲得電導通，具有：一端達 到導通接觸而壓接於上述被檢查點的接觸器；及與該接觸 ' 器導通接觸形成和該基板檢查裝置本體連接的連接電極 ' 體，構成可和該接觸器的另一端形成導通接觸的連接電極 部之電極構造，其特徵爲，上述連接電極部是於上述接觸 φ 器另一方端部和該連接電極體的連接時，使上述接觸器的 上述另一方端部附近的側圍面至少有一部份是和與其相向 的上述連接電極部的一*部份形成接觸。 藉由提供上述的發明，能夠完全解決上述課題。 〔發明效果〕 根據申請專利範圍第1項記載的發明時，由於接觸器 群的另一方端部和連接電極體連接時，接觸器另一方端部 # 附近的側圍面至少有一部份是與其相向的連接電極部一部 份形成連接藉此成爲電導通狀態，所以就能夠提供一種可 降低接觸器和連接電極部的接觸電阻値的同時與使用次數 無關具有穩定接觸電阻値的基板檢查用治具。 根據申請專利範圍第2項記載的發明時，由於接觸器 和連接電極部的導通狀態，至少是由接觸器另一方端部和 連接電極部內部側表面的接觸形成，所以就可使接觸器和 連接電極部的接觸面積變大，能夠提供一種可更爲降低接 觸器和連接電極部的接觸電阻値的同時與使用次數無關具 -10- 200815776 (7) 有穩定接觸電阻値的基板檢查用治具。 根據申請專利範圍第3項記載的發明時，由於連接電 極部是形成爲可遊動嵌著接觸器的形狀，所以能夠提供一 種可防止接觸器在出入於連接電極部時承受過多負擔的値 的基板檢查用治具。 根據申請專利範圍第4項記載的發明時，由於連接電 極部是形成爲筒狀，所以能夠均勻形成接觸器接觸的接觸 φ 面，因此能夠提供一種即使接觸任一筒部都能具有穩定接 觸電阻値的基板檢查用治具。 根據申請專利範圍第5項記載的發明時，由於連接電 極部是針對上述接觸器的長軸形成爲傾斜或彎曲，所以在 接觸器出入於連接電極部時，接觸器是一邊磨擦在連接電 極部的內部側表面一邊形成接觸，因此就能夠提供一種可 降低接觸器和連接電極部的接觸電阻値的同時與使用次數 無關具有穩定接觸電阻値的基板檢查用治具。 Φ 根據申請專利範圍第6項記載的發明時，由於連接電 極部具有可朝接觸器出入方向的直角方向滑動的滑行部， ^ 所以於接觸器收容在連接電極部時能夠確實使接觸器和連 k 接電極部形成接觸，因此就能夠提供一種可降低接觸器和 連接電極部的接觸電阻値的同時與使用次數無關具有穩定 接觸電阻値的基板檢查用治具。 根據申請專利範圍第7項記載的發明時，由於接觸器 的另一方是針對該接觸器的長軸形成曲折，所以在接觸器 出入於連接電極部時，接觸器是一邊磨擦在連接電極部的 -11- (8) (8)200815776 內部側表面一邊形成接觸，因此就能夠提供一種可降低接 觸器和連接電極部的接觸電阻値的同時與使用次數無關具 有穩定接觸電阻値的基板檢查用治具。 根據申請專利範圍第8項記載的發明時，由於接觸器 保持體是由二個構件形成，一方的保持部是和連接電極體 形成抵接配置，所以能夠確實將接觸器引導至連接電極 部，因此就能夠提供一種可確實將接觸器引導至連接電極 部的基板檢查用治具。 根據申請專利範圍第9項記載的發明時’由於接觸器 保持體是由二個構件形成，一方的保持部是和連接電極體 隔著指定間隔形成配置，所以可使接觸器彎曲在該指定間 隔形成的空間，在接觸器出入於連接電極部時，接觸器是 一邊磨擦在連接電極部的內部側表面一邊形成接觸，因此 就能夠提供一種可降低接觸器和連接電極部的接觸電阻値 的同時與使用次數無關具有穩定接觸電阻値的基板檢查用 治具。 根據申請專利範圍第1 〇項記載的發明時，由於接觸 器保持體具有接觸器保護用的保護部，所以於接觸器未使 用時能夠有效保護著接觸器，因此能夠提供一種可延長接 觸器使用壽命的基板檢查用治具。 根據申請專利範圍第1 1項記載的發明時，由於另一 方端部附近的範圍，於上述連接時，成爲上述另一方端部 的側圍面至少可接觸於上述連接電極部的範圍，所以就能 夠使接觸器和連接電極部接觸的接觸面積變大，能夠提供 -12- 200815776 (9) 一種可降低接觸器和連接電極部的接觸電阻値的同時與使 用次數無關具有穩定接觸電阻値的基板檢查用治具。 根據申請專利範圍第1 2項記載的發明時，由於在接 觸器另一方端部和連接電極體的接觸時，接觸器另一方端 部附近的側圍面至少有一部份是和與其相向的連接電極部 ~ 的一部份形成接觸，所以就能夠提供一種可降低接觸器和 連接電極部的接觸電阻値的同時與使用次數無關具有穩定 _ 接觸電阻値的基板檢查用治具之連接電極部。 【實施方式】 〔發明之最佳實施形態〕 以下，是對本發明的最佳實施形態進行說明。 第1圖，是表示本發明相關的基板檢查用治具使用狀 況的構成槪略圖。於第1圖，是圖示著：複數的接觸器 1 0 1 ;可使該接觸器1 0 1保持成多針狀的保持體1 02 ;可對 該保持體1 02加以保持的同時具有連接電極部可和接觸器 1〇1接觸成爲導通的之連接電極體103 ;可對所檢測的電 訊號加以處理的檢查訊號處理部104;及可使檢查用接觸 器1 〇 1和檢查訊號處理部1 04形成連接的金屬纜線1 05。 接觸器101是和形成在被檢查基板的電路圖案各檢查點形 成接觸的端子，連接電極體1 0 3是執行接觸器1 0 1和檢查 訊號處理部1 04的間距轉換形成接電。 連接電極體103，具有在保持體1〇2配置側和接觸器 1 〇 1形成接電的連接電極部1 0 6。本發明是藉由對該連接 -13- 200815776 (10) 電極部1 06加以創意設計，以達到能夠降低和接觸器1 0 1 的連接電阻値的同時提供具有穩定性的連接電阻値。 本發明相關一實施形態的基板檢查用治具1，是具有 接觸器2、接觸器保持體3和連接電極體4 (參照第2 圖）。另，連接電極體4是和上述的檢查訊號處理部1 〇4 ' 形成連接但是於該第2圖省略圖示。 接觸器2具有撓性及導電性，形成爲針狀或長形狀等 φ 棒狀。該接觸器2，一方是壓接在被檢查基板的檢查點， 另一方是和下述的連接電極部形成接觸。因此，接觸器2 可將來自於檢查訊號處理部104的電訊號送訊至檢查點的 同時’可將來自於檢查點的電訊號送訊至檢查訊號處理部 104° 該接觸器2因具撓性，所以在下述的接觸器保持體3 內部形成的空間是形成爲接觸器2的長軸方向朝直角方向 彎曲（形成曲折）。因此，當該接觸器2被使用時，承受 Φ 來自被檢查基板檢查點或連接電極部的載重形成彎曲，利 用該彎曲對各接觸部產生推壓力。 接觸器2只要形成如上述的形狀即可並無特別限定， 但也可形成如第3圖所示一實施形態。 該第3圖所示的接觸器2，如第3 ( & )圖所示，形成 爲兩刖端尖細形狀的細長棒狀構件2 1。尖細形狀，可以是 第3 ( a )圖所示的尖銳形狀，也可以是球狀形狀。 該棒狀構件2 1，例如可以是不銹鋼、鈹銅（B e Cu ) 或鎢（W)，但並不限定於此只要是導電物質即可。 -14- 200815776 (11) 該棒狀構件2 1，是以形成爲接觸於下述連接電極部的 接觸面積可承載均勻載重的圓筒狀或圓柱狀爲佳，並無特 別限定。 棒狀構件21的長度或粗細度並無特別限定，可配合 形成在被檢查基板的電路圖案間距或被檢查基板的大小加 ' 以適宜設定。 第3 ( b )圖是表示棒狀構件2 1收容在筒狀構件22內 φ 的狀態。該筒狀構件22具有撓性及導電性。棒狀構件21 是插入在該筒狀構件22。於第3(b)圖，筒狀構件22的 一方前端即一端22a和另一方前端即另一端22b相比時， 從一端22a突出的棒狀構件21的長度是設定成比從另一 端22b突出的棒狀構件21的長度還長。 上述的狀況是構成爲一端22a接觸於連接電極部，另 一端22b接觸於被檢查基板的檢查點。如上述將配置的長 度加以變化，能夠使棒狀構件2 1和連接電極部形成接觸 • 的接觸面積變大，此外，棒狀構件21從另一端22b突出 的長度是設定成較短，所以在接觸器接觸於凸塊等檢查點 時，能夠防止筒狀構件22使棒狀構件2 1需求以上貫入至 檢查點達到暫時性止動件功能的同時，對於球狀凸塊等檢 查點也能夠形成穩定接觸。又加上，能夠不用仰賴棒狀構 件2 1前端形狀的加工性，就可達到筒狀構件22和棒狀構 件2 1對檢查點的接觸。 另外，該另一端22b側的棒狀構件21突出量，如上 述，能夠設定成比一端22a還短的同時，如上述說明也可 -15- 200815776 (12) 設定成的貫入至檢查點的貫入量（長度）。 該筒狀構件2 2只要構成爲能夠將棒狀構件2 1收容在 內部，並且可和棒狀構件21成電導通狀態的大小即可並 無特別限定。 筒狀構件22和棒狀構件2 1是彼此形成電性連接。因 此，於棒狀構件2 1插入在筒狀構件22的狀態[第3 ( b ) 圖所示狀態]下，全體施有電鍍或化學鍍形成。 φ 另一方法，是於筒狀構件.2 2內部複數設有突狀部 (未圖示），使筒狀構件22具有可推壓嵌合著棒狀構件 21的構造藉此形成接觸成爲電導通。 第3 ( c )圖是圖示著棒狀構件2 1和筒狀構件22形成 一體，於筒狀構件22的周圍表面設有絕緣部23。該絕緣 部23的形成位置，如第3 ( c )圖所示是形成在接觸器2 一方端和另一端以外的位置。此外，由該絕緣部2 3和筒 狀構件22形成的段差24，是做爲接觸器2配置在下述接 # 觸器保持體3時的卡止部使用。 該絕緣部23，於接觸器2彎曲時，可防止相鄰的接觸 器2即使接觸也不會形成短路。 該絕緣部23是可採用聚氨酯，並無特別限定。 上述說明，是說明了使用棒狀構件21和筒狀構件22 和絕緣部23構成接觸器2的例子，但也可採用由棒狀構 件2 1和絕緣部23構成的接觸器，接觸器的構造並不限定 於上述。 另，本說明書是將收容在連接電極部4 1的接觸器2 -16- 200815776 (13) 其一部份以圖號2A來說明，但該接觸器2的收容g 是接觸器2未形成有絕緣部23的一端。例如：從接 的前端至段差24爲止的接觸器2 —部份（長度 份）。該部份L，雖然是不用全部都收容在連接電 但還是以盡可能大多部份收容在連接電極部爲佳。 該部份的長度L，是可根據收容在連接電極部 加以適宜設定，但爲成爲足夠的穩定性接觸狀態（ 狀態），還是以2〜5 mm程度爲佳。 接觸器2的該部份是相當於另一方端部，該部 周圍面至少有一部份是和連接電極部4 1形成接觸。 接觸器保持體3，可對由複數接觸器2形成的 群加以保持。該接觸器保持體3，如第2圖所示， 著複數接觸器2，具有第一保持部3 1和第二保持部 第2圖所示的接觸器保持體3，是於圖示上側 第一保持部3 1，於圖示下側配置著第二保持部32 爲第一保持部31是可將接觸器2的前端引導至檢 第二保持部32是可將接觸器2的另一端引導至連 部。 第一保持部31具有將指定的接觸器2引導至 查點用的第一保持孔3 3。該第一保持孔3 3是形成 器2的棒狀構件21或筒狀構件22的外徑還大，但 部23的直徑還小。藉由上述的形成，可防止接觸署 接觸器保持體3的第一保持部3 1脫離。 第二保持部32具有將指定的接觸器2引導至 P 2A > 觸器2 :L部 極部， 的長度 電導通 份的側 接觸器 爲保持 32 ° 配置著 ，構成 查點， 接電極 指定檢 比接觸 比絕緣 I 2從 指定連 -17- 200815776 (14) 接電極部用的第二保持孔34。該第二保持孔34是形成比 接觸器2的棒狀構件21或筒狀構件22的外徑還大，但比 絕緣部23的直徑還小。藉由上述的形成，可防止接觸器2 從接觸器保持體3的第二保持孔32脫離。 如上述藉由第一及第二保持孔33、34的形成，可防 止接觸器2從該接觸器保持體3脫落。 第一保持部31和第二保持部3 2是透過支柱3 5隔著 φ 指定間隔形成配置。因此，由支柱3 5使第一保持部3 1和 第二保持部32之間形成空間，使接觸器2能夠在該空間 內形成彎曲。 該支柱3 5形成的空間長度是根據使用者加以適宜設 定。 第2圖中，第一保持部3 1是由2片板構件形成。該 等板構件是設置成做爲第一保持孔3 3形成用的板構件， 和做爲固定在支柱3 5的螺絲孔用的板構件。該等板構件 # 的數量，並無特別限定，只要至少具有上述功能即使是1 片或2片以上均可。 . 此外，於第2圖中，第二保持部3 2是由3片板構件 形成。該等板構件是設置成做爲第二保持孔3 4形成用的 板構件，和做爲固定在支柱3 5的螺絲孔用的板構件。該 等板構件的數量並無特別限定，只要至少具有上述功能即 使是1片或2片以上均可。 第二保持部32，最好是由複數板構件形成的同時，該 等板構件分別於接觸器2的直角方向（第2圖中爲左右方 -18- 200815776 (15) 向）以指定長度形成錯開配置。 如上述將複數板構件逐漸錯開形成配置，是可使第二 保持孔34形成爲傾斜。因此，當接觸器2被保持在接觸 器保持體3時，可使接觸器2稍微形成彎曲，成爲和板構 件產生接觸阻力，可將接觸器2保持成具有穩定性。 第二保持部32是於接觸器2的連接電極部側，具備 有可朝接觸器2長軸方向滑動的保護部36，使其在將接觸 器2接觸於連接電極部的使用時可使接觸器2形成突出。 該保護部36，如第2圖所示，配置在第二保持部32 的連接電極部側同時，設有彈簧機構3 7使其可朝接觸器2 長軸方向滑動。 該保護部3 6是由指定厚度的板構件形成，於基板檢 查治具未使用時，保護著接觸器2的前端部（和連接電極 部形成接觸的部份）。 例如：第4圖是表示該保護部的動作，第4(a)圖是 表示基板檢查治具未使用時的狀態，第4 ( b )圖是表示基 板檢查治具使用時的狀態。 於第4(a)圖，圖示著基板檢查治具的接觸器2和接 觸器保持體3未連接於連接電極體的狀態，於該狀態下， 接觸器2其對連接電極部形成接觸的端部是由保護部3 6 保護著。另，於圖面，圖示著接觸器2的前端稍微突出的 狀態，但也可以構成爲被收容在保護部3 6的內部。 第4 ( b )圖，圖示著基板檢查治具的接觸器2和接觸 器保持體3連接於連接電極體的狀態。另，於第4 ( b )圖 200815776 (16) 是省略連接電極體4的圖示。於該狀態下，保護部3 6 f 滑動使接觸器2形成突出狀態，使該突出的接觸器2和_ 接電極部形成接觸。 於該狀況時，保護部36是抵接於第二保持部32下^ 的同時，由彈簧機構37的彈簧使其成爲彈推狀態。 外，保護部3 6是形成爲欲返回至第4 ( a )圖所示的 置，但於第4 ( b )圖的狀態連接電極體4和保護部36， 保護部3 6和第二保持部32是分別形成爲抵接狀態。 另於第2圖中，設有二個可使接觸器保持體3和下_ 的連接電極體4形成位置對準的突狀38。 連接電極體4支撐著接觸器保持體3的同時，具備有 可將接觸器2的一部份收容在內部的連接電極部4 1。 該連接電極部41，爲了在內部收容接觸器2，形成爲 從連接電極體4的表面延伸至連接電極體4內部的孔形 狀。藉由將連接電極部41形成爲延伸至連接電極體4內 部的孔形狀，使接觸器2的一部份能夠確實收容在連接電 極部41內部。於該狀況時，接觸器2的一部份是利用連 接電極部41的內部側表面形成著電極部，使接觸器2的 一部份能夠和內部側表面形成接觸。 連接電極部4 1是連接於導線42。該導線42是如上述 連接於檢查訊號處理部。 連接電極部41是以形成可遊動砍者接觸器2的形狀 爲佳。藉由連接電極部4 1可遊動.嵌著接觸器2，將接觸器 2收容在連接電極部4 1時，或從連接電極部4 1拔除接觸 -20 - 200815776 (17) 器2時，都能夠降低接觸器2和連接電極部41的磨擦阻 力，能夠簡單拔掉接觸器2。 連接電極部41是於其內部收容著接觸器2的一部 份，將連接電極部4 1的內部側表面成爲電極部。因此’ 可將連接電極部41形成爲導電性筒狀。於該狀況時’筒 ' 狀的連接電極部41具有可將接觸器2收容在內部的同時 筒狀的內部側表面爲電極部的功能。 φ 另，該連接電極部41是將筒（管）配置成和連接電 極體4表面成平整面。藉由形成上述的配置’使連接電極 體4的表面成爲平整面，當第二保持部32或保護部36抵 接於連接電極體4時，可對連接電極體4成直角配置’使 接觸器2於使用時受到壓接、形成彎曲時，都可使任何接 觸器2承受均勻載重。 ' 連接電極部41，因是構成爲接觸器2可根據使用時或 未使用時出入於連接電極部4 1，所以爲了讓接觸器2確實 # 接觸於連接電極部41，接觸器2長度方向和連接電極部 4 1長度方向最好是配置或形成（相對交叉）。 其具體性的例子，例如：是將連接電極部4 1針對接 觸器2的長軸形成傾斜或彎曲。 藉由將連接電極部4 1形成爲如上述’可使接觸器2 收容在連接電極部41時，——邊磨擦著連接電極部41的內 部側表面一邊收容在連接電極部4 1，能夠確立接觸器2和 連接電極部4 1的確實接觸狀態。特別是，藉由上述構 成，可使內部側表面電極部或接觸器2其表面形成的氧化 -21 - 200815776 (18) 膜破損。 第5圖是圖示著連接電極部一實施形態。第5 ( a )圖 所示的連接電極部41，是沿著連接電極體4的厚度方向平 行形成。即可於上述的狀況，在如上述將接觸器成傾斜配 置時，接觸器2還是能夠一邊磨擦著連接電極部41的內 * 部側表面一邊形成接觸。 第5 ( b )圖是表示連接電極部4 1針對連接電極體4 φ 表面形成以一定角度傾斜的狀況。於該狀況時，接觸器即 使被收容在連接電極體4表面的大致直角方向，還是能夠 一邊磨擦著連接電極部4 1的內部側表面一邊形成接觸。 第5(c)圖是表示連接電極部41形成爲反〈字形的 狀況。於該狀況時，由於接觸器2是可和第5(b)圖狀況 相同地一邊磨擦一邊形成接觸地收容在內部的同時，連接 電極部4 1形成在〈字形頂點部成反方向的傾斜，所以於 該頂點部可使接觸器2確實和內部側表面形成接觸。 # 第5 ( d )圖是表示連接電極部4 1形成彎曲的狀況。 於該狀況時，在接觸器2被收容時，接觸器2是沿著該連 接電極部41的內部側表面一邊彎曲一邊磨擦表面形成接 觸。再加上，於該狀況時’相較於第5 ( c )圖的狀況接觸 器2相關的載重是比較低，所以能夠容易進行接觸器2的 抽出或插入。 該等第· 5圖所示連接電極部41的形狀，並不限定於 上述’可設定使連接電極部4 1的收容方向針對接觸器2 的出入方向形成交叉。藉由將連接電極部41形成爲上 -22- 200815776 (19) 述，能夠讓接觸器2確實接觸於連接電極部4 1內部側表 面的同時’被收容時可一邊磨擦著內部側表面一邊被收 容，所以能夠使接觸器2和連接電極部41的接觸形成接 觸電阻較低的同時接觸電阻値的穩定性高。 此外，另一具體性的例子，如第6圖所示，將收容在 * 連接電極部41內部的接觸器2的前端2A針對接觸器2的 長軸形成曲折。 φ 如上述藉由將接觸器2的前端2A形成爲曲折，可使 接觸器2的前端2A於收容在連接電極部41時，一邊磨擦 著連接電極部4 1內部側表面一邊形成接觸。 該第6圖所τρ：的接觸器2是形成爲接觸器2的前端 2A從接觸器2的中心軸曲折成具有寬度W。該寬度W是 以形成和連接電極部4 1內徑大致相同爲佳。藉由將該寬 度W形成和連接電極部41內徑大致相同，能夠讓接觸器 2確實接觸於內部側表面的同時，還能夠使曲折量（寬 φ 度）變小。 第7圖是圖示著本發明相關的基板檢查用治具的使用 狀態。 於該第7(a)圖，複數接觸器2的收容部2A是收容 在連接電極部41內部。於該第7(a)圖中雖然未加以圖 示，但在接觸器2的收容部2A是形成曲折形狀時，或是 在接觸器2形成爲傾斜配’置時，當接觸器2收容在連接電 極部4 1內時，一邊磨擦著連接電極部4 1內部側表面一邊 形成接觸。另’第7圖是爲了方便圖示而將連線器2位於 -23- 200815776 (20) 連接電極部4 1的大致中央。 當接觸器2被收容在連接電極部41時，以藉由接觸 器保持體3或連接電極體4的相對移動，使接觸器2的收 容部2A確實壓接在連接電極部41的內部側表面爲佳。 第7(b)圖是圖不者藉由將接觸器保持體3和連接電 ' 極體4針對接觸器2的長軸朝直角方向移動’使接觸器2 確實接觸於連接電極部41的內部側表面。例如：如第7 φ (b)圖所示，藉由將連接電極體4朝紙面左方向[第7 (b )圖黑色箭頭符號所示方向]移動，使接觸器2的收容 部2 A壓接在連接電極部4 1的內部側表面。或者是藉由將 接觸器保持體3朝紙面右方向[第7(b)圖白色箭頭符號 所示方向]移動，使接觸器2的收容部2A壓接在連接電極 部41的內部側表面。如上述，藉由將接觸器保持體3及/ 或連接電極體4設有可朝接觸器2出入方向的直角方向滑 動的滑行部，可使接觸器2的收容部2A更爲穩定接觸於 # 連接電極部4 1的內部側表面。 第8圖是表示連接電極體所具有的滑行部一實施形態 圖。該第8圖所示的滑行部是由連接電極體4具有合計爲 3片的第一板構件43、第二板構件44和第三板構件45所 形成。連接電極部41是貫通該等3片的板構件形成。第 一板構件43和第三板構件45是固定構件，第二板構件44 是形成滑動機構。因此，如第8 ( b )圖所示，第二板構件 44是以滑動形成從側面側推壓連接電極部4 1，接著，連 接電極部4 1會形成彎曲形狀從內部側表面推壓接觸器2 -24 - 200815776 (21) 的收容部2A形成接觸。 另，該第8圖所示的連接電極體4，雖是說明使用3 片板構件，但並不限定於3片，也可使用更多的複數板構 件形成滑行部。 ^ 其次，對接觸器2和接觸器保持體3的另一實施形態 進行說明。 第9圖是表示接觸器2和接觸器保持體3的另一實施 φ 形態。於該實施形態所採用的接觸器2的收容部2A，是 針對接觸器2的長軸形成曲折（參照第6圖）。該接觸器 2其收容部2A是形成曲折，但於未使用時是由保護部3 6 (的貫通孔）保持著接觸器2的收容部2A，使接觸器2 保持成一直線形狀。於該實施形態的基板檢查用治具的使 用時，保護部36會被往上推，形成接觸器2突出於保護 部3 6，但此時，因接觸器2的收容部2A是形成曲折，所 以是朝指定方向形成曲折。 • 另，在將該基板檢查用治具安裝於連接電極體4時， 將保護部3 6對準連接電極體4的連接電極部4 1的位置， 在和連接電極體4成接觸的狀態下，使保護部3 6往上 推，所以接觸器2會被收容在連接電極部41的同時，接 觸器2的收容部2A是一邊磨擦著連接電極部4 1的內側表 面一邊形成接觸。 接著，對上述又另一實施形態進行說明。 第1 〇圖表示接觸器2和接觸器保持體3的又另—實 施形態。於該實施形態，圖示著第二保持部32或者保護 -25- 200815776 (22) 部3 6和連接電極體4之間形成有空間S的狀況。[Technical Field] The present invention relates to an electrode structure for a substrate inspection jig and a connection electrode portion of the jig used for inspecting a substrate to be inspected, and more particularly, It is an electrode structure of a jig for substrate inspection which can reduce the contact resistance of the jig for measuring the substrate and the electrode for inspection of the substrate, and an inspection jig having the electrode structure. Φ Further, the invention is not limited to a printed circuit board, and can be applied, for example, to an electrode board for a flexible printed circuit board, a multilayer circuit board, a liquid crystal display or a plasma display, and a package substrate or transport for semiconductor packaging; In the specification, the various circuit boards are collectively referred to as "substrate". [Prior Art] In the past, the circuit pattern provided on the circuit board must be correctly transmitted to the electrical and electronic components such as semiconductors or resistors such as 1C mounted on the circuit board. Therefore, before the assembly of electrical and electronic components. Printing ^ Circuit board or circuit pattern formed on a substrate such as a semiconductor wafer, ^ The measurement between the inspection points set on the inspection target circuit pattern is performed, and the quality is determined. The above-described determination check is an inspection method for inspecting the disconnection and short-circuit of the circuit pattern. The above-described conduction or short-circuit inspection is performed at a checkpoint provided at the inspection target circuit pattern 2, and each of the measurement terminals is connected to one of the measurement terminals, and a measurement current of a predetermined level is flown between the measurement terminals, and the measurement terminal is -5 - (2) (2) The voltage 値 between 200815776 is measured, and the measured voltage 値 is compared with a predetermined threshold 借此 to determine whether it is good or not. However, in the jig for substrate inspection used in the above method, when each of the measurement terminals at the circuit pattern 2 abuts one of the measurement terminals as a common terminal for the supply of the measurement current and the voltage, the measurement terminal is used. The contact resistance between the checkpoint and the checkpoint affects the measured voltage, which reduces the accuracy of the measurement of the resistance ,, resulting in a disadvantage of the reliability of the inspection result being lowered. In particular, in recent years, the circuit pattern provided on the circuit board has been miniaturized, and the resistance 电路 of the circuit pattern has been reduced, which has caused a large problem in the influence of the contact resistance on the measurement enthalpy. In order to solve the above problem of contact resistance, a contactor as disclosed in Patent Document 2 is proposed. The contactor has a substantially vertical contact portion which is substantially perpendicular to the contact electrode of the measuring object, and a portion extending along the length of the contact portion is made of a material having a thermal expansion coefficient different from the other portion of the contact portion. According to this configuration, since the contact portion is a bimetal, the contact portion is brought into substantially perpendicular contact with the measurement target electrode at a predetermined ambient temperature, and when the excitation is excessively performed in this state, the ambient temperature heat transmitted by the measurement target electrode is high. This causes the contact portion to be bent toward a portion composed of a material having a small coefficient of thermal expansion. However, even if the above-mentioned contact portion is used, the electrode portion can be formed only in vertical contact, and when it is considered from the viewpoint of contact stability, it cannot be said that it has sufficient contact stability and has a low contact resistance. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 6-66832 (Patent Document 2) Japanese Laid-Open Patent Publication No. Hei. No. 2005-345 No. 29 No. 200815776 (3) [Problems to be Solved by the Invention] The present invention has been made in view of the above circumstances. The invention aims to provide a substrate inspection jig electrode structure capable of reducing contact resistance between a substrate inspection jig contactor and a substrate inspection jig electrode portion and having the structure. A fixture for substrate inspection. [Means for Solving the Problem] The invention according to the first aspect of the invention is the substrate inspection jig provided for checking the electrical conductivity of the substrate to be inspected, and the substrate inspection device body and the inspection device are installed. A jig for inspecting a substrate on which a plurality of substrates of a substrate circuit pattern are electrically connected between inspection points, wherein the substrate inspection jig has an end portion capable of achieving electrical conduction at both ends, and one end portion a contactor group formed by a conductive rod contactor that is crimped to one of the inspected points; a contactor holder that can hold the contactor group; and a contactor that is provided with the contactor group a connection electrode portion that is disposed to face the other end portion is connected to the connection electrode body of the substrate inspection device, and when the other end portion of the contactor group is connected to the connection electrode body, a side wall near each of the other end portions At least a portion of the surface is in contact with a portion of the connecting electrode portion opposed thereto to be in an electrically conductive state. In the invention, the substrate inspection tool according to the first aspect of the invention is the substrate inspection tool of the first aspect of the invention, wherein the connection electrode portion has the connection electrode portion. a configuration for accommodating the other end portion of the contactor opposite thereto, and the conductive state of the contactor and the connecting electrode portion is at least the other end portion of the contactor and the inner side surface of the connecting electrode portion The formation of the contact. In the invention, the substrate inspection tool according to the first aspect or the second aspect of the invention is characterized in that the connection electrode portion is characterized in that: The shape of the shape φ formed is that at least a portion of the other end portion of the contactor that is opposite to the opposite sides is slidably fitted. The invention of the substrate inspection tool according to any one of claims 1 to 3, wherein the connection electrode is provided in the substrate inspection tool according to any one of claims 1 to 3 The portion is formed into a cylindrical shape. The invention according to claim 5, wherein the substrate inspection jig according to any one of claims 1 to 4, wherein the connection is The electrode portion is formed to be inclined or curved with respect to the long axis of the above contactor. The invention of the substrate inspection tool according to any one of the first to fifth aspects of the invention, wherein the connection electrode is The portion has a sliding portion that can slide in a direction perpendicular to the direction in which the contactor enters and exits. In the jig for inspection of a substrate according to the first aspect of the invention of the invention of the invention of the invention of the present invention, the other end of the contactor is The long axis of the above contact -8- 200815776 (5) forms a tortuous curve. The invention according to claim 8 of the invention, wherein the contactor holding body has a first holding portion near the end portion of the first aspect of the invention. The second holding portion for holding the second holding hole in the vicinity of the other end portion of the holding hole of the holding hole is formed in contact with the electrode body. The invention described in claim 9 is provided. In the substrate according to the first aspect of the invention, the contact holder holding body has a first holding portion contactor having a first holding hole for holding the vicinity of one end portion, and the other end of the first holding portion contactor The second holding portion for holding the second holding hole in the vicinity of the portion is the invention described in claim 10 of the patent application at a predetermined interval from the electrode body, and the jig for the inspection is in the first item of the patent application. In the above-described base device, the contactor holding body is formed such that the other contactor contacts the connecting electrode portion and slides in the longitudinal direction of the contactor to make the contactor shape The invention described in the first aspect of the invention, wherein the jig for the inspection is the base member according to the first aspect of the patent application, characterized in that the range near the other end portion is connected The side surface of the other end portion is at least a range in which the electrode portion can be connected. According to the invention of the first aspect of the invention, the contactor for the substrate inspection inspection tool and the contactor for the substrate inspection inspection tool having the two holding portions, and the second holding portion are provided Open multiple configurations. The inspection for the inspection of the substrate is provided with: at that time, it can be directed toward the crotch. The inspection of the substrate for inspection is based on the above-mentioned connection to the above-mentioned connection. -9 - 200815776 (6) The electrode structure of the pole is 'a kind of one to check the conductivity of the substrate to be inspected, in order to check the substrate. The device body and the plurality of substrates disposed on the circuit pattern of the substrate to be inspected are electrically connected between the inspection points, and have: a contactor that is in contact with one end and is crimped to the point to be inspected; and is in conductive contact with the contact An electrode structure of the connection electrode portion that is connected to the substrate inspection device body and that constitutes a connection electrode portion that can be in conductive contact with the other end of the contactor, wherein the connection electrode portion is at the other end of the contact φ device When the portion is connected to the connecting electrode body, at least a portion of the side wall surface in the vicinity of the other end portion of the contactor is brought into contact with a portion of the connecting electrode portion facing the contact portion. By providing the above invention, the above problems can be completely solved. [Effect of the Invention] According to the invention of the first aspect of the invention, when the other end portion of the contactor group is connected to the connection electrode body, at least a portion of the side wall surface near the other end portion # of the contactor is Since a part of the opposing connection electrode portions is connected to be electrically conductive, it is possible to provide a substrate inspection treatment which can reduce the contact resistance of the contactor and the connection electrode portion and has stable contact resistance regardless of the number of uses. With. According to the invention of claim 2, since the contact state of the contactor and the connection electrode portion is at least formed by contact between the other end portion of the contactor and the inner side surface of the connection electrode portion, the contactor and the contactor can be The contact area of the connection electrode portion is increased, and it is possible to provide a substrate inspection for the contact resistance of the contactor and the connection electrode portion, and the number of times of use is not limited to 10-200815776 (7) With. According to the invention of the third aspect of the invention, since the connection electrode portion is formed in a shape in which the contactor is slidably fitted, it is possible to provide a substrate capable of preventing the contactor from being excessively burdened when entering and exiting the connection electrode portion. Check fixtures. According to the invention of the fourth aspect of the invention, since the connection electrode portion is formed in a tubular shape, the contact φ surface of the contact of the contactor can be uniformly formed, so that it is possible to provide a stable contact resistance even if any one of the cylinder portions is contacted. A jig for substrate inspection. According to the invention of the fifth aspect of the invention, since the connecting electrode portion is formed to be inclined or curved with respect to the long axis of the contactor, the contactor is rubbed at the connecting electrode portion when the contactor enters and exits the connecting electrode portion. Since the inner side surface is in contact with each other, it is possible to provide a substrate inspection jig which can reduce the contact resistance 接触 of the contactor and the connection electrode portion and has stable contact resistance 无关 regardless of the number of uses. Φ According to the invention of the sixth aspect of the invention, the connecting electrode portion has a sliding portion that can slide in a direction perpendicular to the direction in which the contactor enters and exits, so that the contactor and the connector can be surely connected when the contactor is housed in the connecting electrode portion. Since the contact portion of the k is in contact with each other, it is possible to provide a substrate inspection jig which can reduce the contact resistance of the contactor and the connection electrode portion and has a stable contact resistance 无关 regardless of the number of uses. According to the invention of the seventh aspect of the invention, since the other side of the contactor is formed in a meandering manner with respect to the long axis of the contactor, when the contactor enters and exits the connecting electrode portion, the contactor is rubbed at the connecting electrode portion. -11- (8) (8) 200815776 The inner side surface is in contact with each other, so that it is possible to provide a substrate inspection treatment which can reduce the contact resistance of the contactor and the connection electrode portion and has stable contact resistance regardless of the number of uses. With. According to the invention of the eighth aspect of the invention, since the contactor holding body is formed of two members, and one of the holding portions is placed in contact with the connecting electrode body, the contactor can be surely guided to the connecting electrode portion. Therefore, it is possible to provide a substrate inspection jig that can reliably guide the contactor to the connection electrode portion. According to the invention of the ninth aspect of the invention, the contactor holder is formed of two members, and one of the holding portions is formed at a predetermined interval from the connection electrode body, so that the contactor can be bent at the predetermined interval. In the space formed, when the contactor enters and exits the connection electrode portion, the contactor forms a contact while rubbing on the inner side surface of the connection electrode portion, so that it is possible to provide a contact resistance 値 which can reduce the contact resistance of the contactor and the connection electrode portion. A jig for substrate inspection having stable contact resistance 无关 regardless of the number of uses. According to the invention described in the first aspect of the patent application, since the contactor holder has the protective portion for contactor protection, the contactor can be effectively protected when the contactor is not in use, so that the use of the extendable contactor can be provided. Fixture for substrate inspection of life. According to the invention of the first aspect of the patent application, the range of the vicinity of the other end portion is such that the side surface of the other end portion is at least in contact with the connection electrode portion at the time of the connection. The contact area of the contactor and the connection electrode portion can be made large, and it is possible to provide a substrate having a stable contact resistance 无关 regardless of the number of uses while reducing the contact resistance 値 of the contactor and the connection electrode portion. Check fixtures. According to the invention of claim 12, when the other end of the contactor is in contact with the connecting electrode body, at least a portion of the side wrapping surface near the other end of the contactor is connected to the opposite side. Since a part of the electrode portion is in contact with each other, it is possible to provide a connection electrode portion of the substrate inspection jig which can reduce the contact resistance 接触 of the contactor and the connection electrode portion and has a stable _ contact resistance 无关 regardless of the number of uses. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, preferred embodiments of the present invention will be described. Fig. 1 is a schematic view showing the configuration of the use of the jig for substrate inspection according to the present invention. In Fig. 1, there is shown a plurality of contactors 1 0 1 ; the contactor 1 0 1 can be held in a multi-needle holder 022; the holder 012 can be held while being connected The electrode portion 103 that can be electrically connected to the contact portion 1〇1, the inspection signal processing unit 104 that can process the detected electrical signal, and the inspection contactor 1 and the inspection signal processing unit 1 04 forms a connected metal cable 1 05. The contactor 101 is a terminal which is in contact with each of the inspection points of the circuit pattern formed on the substrate to be inspected, and the connection electrode body 1 0 3 is formed by performing the pitch switching of the contactor 1 0 1 and the inspection signal processing unit 104. The electrode body 103 is connected to have a connection electrode portion 106 which is electrically connected to the contactor 1 〇 1 on the side of the holder 1 〇 2. The present invention is designed by the connection of the -13-200815776 (10) electrode portion 106 to achieve a stable connection resistance 能够 while reducing the connection resistance 和 of the contactor 1 0 1 . A jig for substrate inspection according to an embodiment of the present invention includes a contactor 2, a contactor holder 3, and a connection electrode body 4 (see Fig. 2). Further, the connection electrode body 4 is connected to the above-described inspection signal processing unit 1 〇 4 ′, but is not shown in the second diagram. The contactor 2 has flexibility and electrical conductivity, and is formed into a needle shape such as a needle shape or a long shape. One of the contactors 2 is a checkpoint that is pressed against the substrate to be inspected, and the other is in contact with a connection electrode portion to be described later. Therefore, the contactor 2 can send the electrical signal from the inspection signal processing unit 104 to the checkpoint while sending the electrical signal from the checkpoint to the inspection signal processing unit 104. The contactor 2 is scratched. Therefore, the space formed inside the contactor holding body 3 described below is formed such that the long axis direction of the contactor 2 is bent in a right angle direction (forming a meander). Therefore, when the contactor 2 is used, it is subjected to bending by the load of the inspection substrate inspection point or the connection electrode portion, and the bending force is applied to each contact portion by the bending. The contactor 2 is not particularly limited as long as it has the above-described shape, but an embodiment as shown in Fig. 3 may be formed. The contactor 2 shown in Fig. 3 is formed as an elongated rod-shaped member 21 having a tapered end shape as shown in the third (&) diagram. The tapered shape may be a sharp shape as shown in Fig. 3(a) or a spherical shape. The rod-shaped member 2 1 may be, for example, stainless steel, beryllium copper (B e Cu ) or tungsten (W), but is not limited thereto as long as it is a conductive material. -14-200815776 (11) The rod-shaped member 2 1 is preferably a cylindrical or cylindrical shape which is formed so as to be in contact with the connecting electrode portion described below to carry a uniform load, and is not particularly limited. The length or thickness of the rod-shaped member 21 is not particularly limited, and can be appropriately set in accordance with the pitch of the circuit pattern formed on the substrate to be inspected or the size of the substrate to be inspected. The third (b) diagram shows a state in which the rod-shaped member 2 1 is housed in the cylindrical member 22 φ. The tubular member 22 has flexibility and electrical conductivity. The rod member 21 is inserted into the tubular member 22. In the third (b), when one end 22a of one end of the tubular member 22 is compared with the other end 22b which is the other end, the length of the rod-shaped member 21 protruding from the one end 22a is set to be larger than that from the other end 22b. The length of the rod member 21 is also long. The above-described situation is such that the one end 22a is in contact with the connection electrode portion, and the other end 22b is in contact with the inspection point of the substrate to be inspected. By changing the length of the arrangement as described above, the contact area between the rod-shaped member 21 and the connection electrode portion can be increased, and the length of the rod-shaped member 21 protruding from the other end 22b can be set to be short. When the contactor is in contact with a check point such as a bump, it is possible to prevent the tubular member 22 from penetrating the rod-shaped member 21 to the checkpoint to reach the function of the temporary stopper, and to form a checkpoint such as a spherical bump. Stable contact. Further, the contact between the tubular member 22 and the rod member 21 to the inspection point can be achieved without relying on the workability of the shape of the front end of the rod member 2 1 . Further, the amount of protrusion of the rod-shaped member 21 on the other end 22b side can be set shorter than the one end 22a as described above, and as described above, the penetration of the rod-shaped member 21 can be penetrated to the inspection point as -15-200815776 (12). Quantity (length). The tubular member 2 2 is not particularly limited as long as it can accommodate the rod-shaped member 21 and can be electrically connected to the rod-shaped member 21. The tubular member 22 and the rod member 21 are electrically connected to each other. Therefore, in a state in which the rod-shaped member 21 is inserted into the tubular member 22 [state shown in Fig. 3 (b)], plating or electroless plating is applied as a whole. φ Another method is in the cylindrical member. 2 2 The inner plurality is provided with a projecting portion (not shown), and the tubular member 22 has a structure in which the rod-shaped member 21 can be press-fitted, whereby the contact is made electrically conductive. In the third (c) diagram, the rod-shaped member 21 and the tubular member 22 are integrally formed, and the insulating portion 23 is provided on the peripheral surface of the tubular member 22. The position at which the insulating portion 23 is formed is formed at a position other than one end and the other end of the contactor 2 as shown in Fig. 3(c). Further, the step 24 formed by the insulating portion 23 and the tubular member 22 is used as a locking portion when the contactor 2 is disposed in the following contactor holding body 3. The insulating portion 23 prevents the adjacent contactors 2 from being short-circuited even if they are in contact when the contactor 2 is bent. The insulating portion 23 is made of polyurethane and is not particularly limited. The above description has been described using the rod member 21 and the tubular member 22 and the insulating portion 23 to constitute the contactor 2. However, a contactor composed of the rod member 21 and the insulating portion 23 may be employed, and the configuration of the contactor may be employed. It is not limited to the above. In addition, in the present specification, a part of the contactor 2-16-200815776 (13) housed in the connection electrode portion 4 1 is illustrated by the reference numeral 2A, but the accommodation g of the contactor 2 is not formed by the contactor 2. One end of the insulating portion 23. For example: contactor 2 - part (length) from the front end of the connection to the step difference 24. It is preferable that the portion L is not necessarily housed in the connection but is mostly housed in the connection electrode portion as much as possible. The length L of the portion can be appropriately set according to the accommodation electrode portion, but it is preferably a stable contact state (state) or 2 to 5 mm. The portion of the contactor 2 corresponds to the other end portion, and at least a portion of the peripheral surface of the portion is in contact with the connecting electrode portion 41. The contactor holder 3 holds the group formed by the plurality of contactors 2. The contactor holding body 3, as shown in Fig. 2, has a plurality of contactors 2, and has a first holding portion 31 and a contact holder 3 shown in Fig. 2 of the second holding portion, which is shown on the upper side of the figure. A holding portion 3 1 is disposed on the lower side of the drawing. The second holding portion 32 is the first holding portion 31. The front end of the contactor 2 can be guided to the second holding portion 32. The other end of the contactor 2 can be guided. To the company. The first holding portion 31 has a first holding hole 33 for guiding the designated contactor 2 to the inspection point. The first holding hole 33 is the rod member 21 of the former 2 or the outer diameter of the tubular member 22 is large, but the diameter of the portion 23 is also small. By the above formation, the first holding portion 31 of the contactor holder 3 can be prevented from being detached. The second holding portion 32 has a side contactor that guides the designated contactor 2 to the P 2A > contactor 2: L pole portion, and the length of the conductive portion is maintained at 32 ° to constitute a check point, and the electrode is designated The comparison contact is insulated from the second holding hole 34 for the electrode portion from the specified connection -17-200815776 (14). The second holding hole 34 is formed to be larger than the outer diameter of the rod member 21 or the tubular member 22 of the contactor 2, but smaller than the diameter of the insulating portion 23. By the above formation, the contactor 2 can be prevented from being detached from the second holding hole 32 of the contactor holding body 3. By the formation of the first and second holding holes 33, 34 as described above, the contactor 2 can be prevented from coming off the contactor holding body 3. The first holding portion 31 and the second holding portion 32 are disposed so as to pass through the pillars 35 and spaced apart by a predetermined interval of φ. Therefore, a space is formed between the first holding portion 31 and the second holding portion 32 by the pillars 35, so that the contactor 2 can be bent in the space. The length of the space formed by the struts 35 is appropriately set according to the user. In Fig. 2, the first holding portion 31 is formed of two plate members. The plate members are provided as a plate member for forming the first holding hole 33, and as a plate member for fixing the screw hole of the column 35. The number of the plate members # is not particularly limited as long as it has at least one or two or more of the above functions. . Further, in Fig. 2, the second holding portion 32 is formed of three plate members. The plate members are plate members provided for forming the second holding holes 34, and plate members for fixing the screw holes of the stays 35. The number of the plate members is not particularly limited, and may be one piece or two or more pieces as long as it has at least the above functions. Preferably, the second holding portion 32 is formed of a plurality of plate members, and the plate members are formed at a predetermined length in the direction perpendicular to the contactor 2 (the right and left sides -18 - 200815776 (15) in Fig. 2). Staggered configuration. The arrangement of the plurality of plate members is gradually shifted as described above, so that the second holding holes 34 can be formed to be inclined. Therefore, when the contactor 2 is held by the contact holder 3, the contactor 2 can be slightly bent to cause contact resistance with the plate member, and the contactor 2 can be maintained to have stability. The second holding portion 32 is provided on the side of the connection electrode portion of the contactor 2 and has a protection portion 36 slidable in the longitudinal direction of the contactor 2 so as to be in contact when the contactor 2 is brought into contact with the connection electrode portion. The device 2 forms a protrusion. As shown in FIG. 2, the protection portion 36 is disposed on the side of the connection electrode portion of the second holding portion 32, and is provided with a spring mechanism 37 so as to be slidable in the longitudinal direction of the contactor 2. The protective portion 36 is formed of a plate member having a predetermined thickness, and protects the distal end portion (portion where the contact electrode portion comes into contact with the contact electrode portion) when the substrate inspection jig is not in use. For example, Fig. 4 is a view showing the operation of the protection unit, Fig. 4(a) is a view showing a state in which the substrate inspection jig is not in use, and Fig. 4(b) is a view showing a state in which the substrate inspection jig is used. In the fourth (a) diagram, the contactor 2 of the substrate inspection jig and the contactor holder 3 are not connected to the connection electrode body. In this state, the contactor 2 is in contact with the connection electrode portion. The end is protected by a protection portion 36. Further, although the front end of the contactor 2 is slightly protruded in the drawing, it may be configured to be housed inside the protective portion 36. Fig. 4(b) is a view showing a state in which the contactor 2 of the substrate inspection jig and the contact holder 3 are connected to the connection electrode body. Further, in the fourth (b) diagram 200815776 (16), the connection electrode body 4 is omitted. In this state, the protecting portion 3 6 f slides to cause the contactor 2 to protrude, and the protruding contactor 2 and the _ electrode portion are brought into contact. In this state, the protection portion 36 abuts against the second holding portion 32, and is spring-loaded by the spring of the spring mechanism 37. Further, the protecting portion 36 is formed to return to the position shown in Fig. 4(a), but the electrode body 4 and the protecting portion 36 are connected in the state of Fig. 4(b), the protecting portion 36 and the second holding The portions 32 are respectively formed in an abutting state. Further, in Fig. 2, two projections 38 are provided which allow the contact holder body 3 and the lower electrode assembly electrode 4 to be aligned. The connection electrode body 4 supports the contact holder 3 and has a connection electrode portion 41 that can accommodate a part of the contactor 2 therein. The connection electrode portion 41 is formed in a hole shape extending from the surface of the connection electrode body 4 to the inside of the connection electrode body 4 in order to accommodate the contactor 2 therein. By forming the connection electrode portion 41 to a shape of a hole extending to the inside of the connection electrode body 4, a part of the contactor 2 can be surely housed inside the connection electrode portion 41. In this case, a part of the contactor 2 is formed with the electrode side portion by the inner side surface of the connecting electrode portion 41, so that a portion of the contactor 2 can come into contact with the inner side surface. The connection electrode portion 41 is connected to the wire 42. The wire 42 is connected to the inspection signal processing unit as described above. It is preferable that the connecting electrode portion 41 is formed in a shape in which the movable cutter contactor 2 is formed. It can be moved by connecting the electrode portion 4 1 . When the contactor 2 is housed, when the contactor 2 is housed in the connection electrode portion 41, or when the contact electrode portion 4 1 is removed from the contact -20 - 200815776 (17) device 2, the contactor 2 and the connection electrode portion 41 can be lowered. The frictional resistance makes it easy to unplug the contactor 2. The connection electrode portion 41 is a portion in which the contactor 2 is housed, and the inner side surface of the connection electrode portion 41 is an electrode portion. Therefore, the connection electrode portion 41 can be formed in a conductive cylindrical shape. In this case, the connection tube portion 41 of the "tube" shape has a function of housing the contactor 2 while the inner side surface of the cylindrical shape is an electrode portion. φ In addition, the connection electrode portion 41 is arranged such that the tube (tube) is flush with the surface of the connection electrode body 4. By forming the above-described arrangement 'the surface of the connection electrode body 4 is a flat surface, when the second holding portion 32 or the protection portion 36 abuts against the connection electrode body 4, the connection electrode body 4 can be disposed at right angles to make the contactor 2 When the device is crimped and bent, the contactor 2 can be subjected to a uniform load. The connection electrode portion 41 is configured such that the contactor 2 can enter and exit the connection electrode portion 4 1 depending on whether it is used or not used. Therefore, in order to make the contactor 2 surely contact the connection electrode portion 41, the length direction of the contactor 2 is The length direction of the connection electrode portion 4 1 is preferably arranged or formed (relatively intersecting). An example of the specificity is, for example, that the connecting electrode portion 4 1 is inclined or curved with respect to the long axis of the contactor 2. When the connection electrode portion 41 is formed as described above, when the contactor 2 is housed in the connection electrode portion 41, the connection electrode portion 41 can be established while being rubbed against the inner side surface of the connection electrode portion 41. The contact state of the contactor 2 and the connection electrode portion 41 is in a true contact state. In particular, by the above configuration, the oxide-21 - 200815776 (18) film formed on the surface of the inner side surface electrode portion or the contactor 2 can be broken. Fig. 5 is a view showing an embodiment in which the electrode portion is connected. The connection electrode portion 41 shown in Fig. 5(a) is formed in parallel along the thickness direction of the connection electrode body 4. In the above-described situation, when the contactor is placed in an inclined manner as described above, the contactor 2 can also make contact while rubbing the inner side surface of the connection electrode portion 41. The fifth (b) is a view showing a state in which the connection electrode portion 4 1 is inclined at a certain angle with respect to the surface of the connection electrode body 4 φ. In this case, the contactor can be brought into contact while being rubbed in the substantially right-angle direction of the surface of the connection electrode body 4 while rubbing the inner side surface of the connection electrode portion 4 1 . Fig. 5(c) is a view showing a state in which the connection electrode portion 41 is formed in a reversed shape. In this case, the contactor 2 is housed in contact with each other while being rubbed in the same manner as in the case of FIG. 5(b), and the connecting electrode portion 41 is formed at an inclination in the opposite direction to the apex of the font. Therefore, the contact portion 2 can be brought into contact with the inner side surface at the apex portion. #5(d) is a view showing a state in which the connection electrode portion 4 1 is bent. In this case, when the contactor 2 is housed, the contactor 2 is bent along the inner side surface of the connecting electrode portion 41 while being rubbed against the surface to form a contact. Further, in this case, the load associated with the conditional contactor 2 in Fig. 5(c) is relatively low, so that the contactor 2 can be easily extracted or inserted. The shape of the connection electrode portion 41 shown in the fifth embodiment is not limited to the above, and the accommodation direction of the connection electrode portion 4 1 can be set so as to intersect the direction in which the contactor 2 is moved. By forming the connection electrode portion 41 as described in the above -22-200815776 (19), the contactor 2 can be surely brought into contact with the inner side surface of the connection electrode portion 4 1 while being held while being rubbed while the inner side surface is being rubbed. Since it is accommodated, the contact between the contactor 2 and the connection electrode portion 41 can be made low in contact resistance and high in contact resistance 値. Further, as another specific example, as shown in Fig. 6, the distal end 2A of the contactor 2 housed inside the connecting electrode portion 41 is formed to be meandered with respect to the long axis of the contactor 2. When the distal end 2A of the contactor 2 is formed in a meandering manner as described above, the distal end 2A of the contactor 2 can be brought into contact while being rubbed against the inner side surface of the connection electrode portion 41 when being accommodated in the connection electrode portion 41. The contactor 2 of τρ: in Fig. 6 is formed such that the front end 2A of the contactor 2 is bent from the central axis of the contactor 2 to have a width W. The width W is preferably such that the inner diameter of the electrode portion 41 is substantially the same. By forming the width W and the inner diameter of the connecting electrode portion 41 substantially the same, the contactor 2 can be surely brought into contact with the inner side surface, and the amount of meandering (width φ) can be made small. Fig. 7 is a view showing the state of use of the jig for substrate inspection according to the present invention. In the seventh (a) diagram, the accommodating portion 2A of the plurality of contactors 2 is housed inside the connecting electrode portion 41. Although not shown in the drawing of Fig. 7(a), when the accommodating portion 2A of the contactor 2 is formed in a meander shape, or when the contactor 2 is formed in a slanting arrangement, when the contactor 2 is housed in When the inside of the electrode portion 4 1 is connected, the contact is made while rubbing the inner side surface of the connection electrode portion 4 1 . In the seventh drawing, the connector 2 is located substantially at the center of the connection electrode portion 41 in -23-200815776 (20) for convenience of illustration. When the contactor 2 is housed in the connection electrode portion 41, the accommodating portion 2A of the contactor 2 is surely crimped to the inner side surface of the connection electrode portion 41 by the relative movement of the contactor holding body 3 or the connection electrode body 4. It is better. Fig. 7(b) is a view in which the contactor 2 is surely brought into contact with the inside of the connecting electrode portion 41 by moving the contactor holder 3 and the connecting electric pole 4 in a direction perpendicular to the long axis of the contactor 2 Side surface. For example, as shown in the seventh φ (b) diagram, the accommodating portion 2 A of the contactor 2 is pressed by moving the connecting electrode body 4 toward the left side of the paper surface [the direction indicated by the black arrow symbol in the seventh (b) diagram]. It is connected to the inner side surface of the connection electrode portion 41. Alternatively, the contact portion 2A of the contactor 2 is pressed against the inner side surface of the connection electrode portion 41 by moving the contactor holder 3 in the right direction of the paper surface [the direction indicated by the white arrow symbol in Fig. 7(b)]. As described above, by providing the contact holder 3 and/or the connecting electrode body 4 with the sliding portion that can slide in the direction perpendicular to the direction in which the contactor 2 enters and exits, the accommodating portion 2A of the contactor 2 can be more stably contacted with # The inner side surface of the electrode portion 41 is connected. Fig. 8 is a view showing an embodiment of a sliding portion provided in the electrode assembly. The sliding portion shown in Fig. 8 is formed by the first plate member 43, the second plate member 44, and the third plate member 45 having a total of three connected electrode bodies 4. The connection electrode portion 41 is formed by penetrating the three plate members. The first plate member 43 and the third plate member 45 are fixing members, and the second plate member 44 is a sliding mechanism. Therefore, as shown in Fig. 8(b), the second plate member 44 is pressed to form the connection electrode portion 41 from the side surface side, and then the connection electrode portion 41 is formed into a curved shape to be pressed from the inner side surface. The accommodating portion 2A of the device 2 - 24 - 200815776 (21) forms a contact. Further, although the connection electrode body 4 shown in Fig. 8 is a three-plate member, it is not limited to three, and a plurality of plural plate members may be used to form the sliding portion. Next, another embodiment of the contactor 2 and the contactor holder 3 will be described. Fig. 9 is a view showing another embodiment of the contactor 2 and the contactor holding body φ. The accommodating portion 2A of the contactor 2 used in the embodiment forms a meandering curve with respect to the long axis of the contactor 2 (see Fig. 6). In the contactor 2, the accommodating portion 2A is formed in a meander shape. However, when it is not in use, the accommodating portion 2A of the contactor 2 is held by the protective portion 36 (the through hole), and the contactor 2 is held in a straight line shape. In the use of the jig for substrate inspection of the embodiment, the protective portion 36 is pushed upward, and the contactor 2 is formed to protrude from the protective portion 36. However, at this time, the accommodating portion 2A of the contactor 2 is formed to be meandering. Therefore, it is a twist in the specified direction. In the case where the substrate inspection jig is attached to the connection electrode body 4, the protection portion 36 is aligned with the connection electrode portion 4 1 of the connection electrode body 4, and is in contact with the connection electrode body 4. When the protection portion 36 is pushed up, the contactor 2 is housed in the connection electrode portion 41, and the accommodation portion 2A of the contactor 2 is brought into contact while rubbing the inner surface of the connection electrode portion 41. Next, still another embodiment will be described. Fig. 1 shows a further embodiment of the contactor 2 and the contactor holder 3. In this embodiment, a state in which the space S is formed between the second holding portion 32 or the protection -25-200815776 (22) portion 36 and the connection electrode body 4 is shown.
於第10圖中，在接觸器保持體3和連接電極體4之 間形成空間S，接觸器2的收容部2A是在被收容在連接 電極部41時於該空間S形成彎曲。如上述由於收容部2A 是可在空間S形成彎曲，所以對於被收容在連接電極部 ' 4 1並且接觸於連接電極部4 1內側表面之位置的收容部2A 是只有承受收容部2A彎曲份量的推壓。因此，能夠讓收 φ 容部2 A穩定接觸於連接電極部4 1內側表面。 此外，於該實施形態，構成爲對連接電極體4加以滑 動（朝箭頭符號方向移動），使接觸器2穩定接觸於連接 電極部41。 上述爲本發明相關的基板檢查用治具的構成說明。 其次，對本發明相關的基板檢查用治具一實施例進行 說明。 第11圖是表示本發明所實施的基板檢查用治具一實 ❿ 施例。 該一實例所示的接觸器2，是以鎢爲素材形成長度30 ^ mm、直徑90 // m的棒狀構件2 1，以收容部2 A的長度爲2 mm形成有絕緣部23。 此外，連接電極部4 1是內徑9 5 // m、外徑1 2 5 // m的 導電管，於該管內側表面施有鍍金處理。 於該第11圖所示一實施例，連接電極體4是由第一 板狀部43、第二板狀部44、第三板狀部45及第四板狀部 46形成的同時，具有可使第二板狀部44朝橫向移動的滑 -26- 200815776 (23) 行部47。該第一板狀部43和第三板狀部45是固定不動的 構件，第四板狀部46是使用做爲基板檢查用治具1 ’的底 座。 連接電極部4 1是形成爲貫通著第一至第三板狀部。 滑行部47，是可使第二板狀部44朝左右移動。該滑 行部47是形成具有左右一對螺絲機構，藉由左右螺絲的 調整就能夠調整第二板狀部44的位置。 Φ 另，於該第1 1 ( a )圖，第二保持部32和保護部36 之間是形成空間’表示未使用時的狀態。 第1 1 ( b )圖是表示基板檢查用治具1 ’的使用狀態。 此時，第二保持部3 2和保護部3 6抵接的同時，接觸器2 的收容部2 A是收容在連接電極部41。接著，該接觸器2 的收容部2 A是形成一邊磨擦著連接電極部4 1內側表面一 邊接觸的狀態，使導通狀態能夠確立形成。 此外，該基板檢查用治具1 ’是於左右具有滑行部 # 47，構成爲在接觸器2的收容部2A收容在連接電極部41 之後，藉由螺絲的調整使連接電極體4的第二板狀部44 朝橫向移動。此時，連接電極部41的第二板狀部44部 份，是配合第二板狀部44的移動成爲彎曲狀態，使連接 電極部4 1的內側表面和接觸器2形成壓接。 該一實施例，由於接觸器2也是形成傾斜保持在接觸 器保持體3，再加上，連接電極體4具有滑行部47，所以 能夠使接觸器2 —邊磨擦著連接電極部4 1內側表面一邊 收容在連接電極部41內的同時能夠形成穩定接觸確定導 -27 - 200815776 (24) 通狀態。 第1 2圖是表示本發明相關的基板檢查用 習知電極構造的基板檢查用治具該等包括接觸 器電阻進行測定後的結果圖表。 於該實驗，基板檢查用治具是配置成使用 ' 將做爲被檢查基板於一面施有鍍金的板載置在 被檢查基板側（收容部2A另一方側），然後 φ 查基板。此時，對連接電極部4 1的導線42和 之間的電阻値進行測定。因此，該電阻値，就 電極部41和接觸器2的接觸電阻；接觸器 阻；及接觸器2和被檢查基板的接觸電阻。 另，第12圖所示的「次數」，是表示被 下壓次數即碰觸次數。 根據該第1 2圖，本發明的基板檢查用治 値爲420〜570ιηΩ範圍（寬度爲0.15Ω )，相 # 有習知連接電極的基板檢查用治具，其電阻値 Ω範圍（寬度爲4 Ω )。由此可知：相較於習 發明的接觸電阻値是極低的同時，碰觸次數增 觸電阻値偏差也極小。 因此，使用本發明的治具，能夠使接觸電 同時，即使是將接觸電阻値做爲修正値來處理 產生碰觸次數增加造成的偏差，所以不需要對 修正，使用時能夠有極爲穩定的接觸電阻。 治具和具有 電阻的接觸 時的狀態， 接觸器2的 下壓該被檢 被檢查基板 包括：連接 2本身的電 檢查基板的 具，其電阻 對於此，具 爲 1 · 5〜5.5 知治具，本 加造成的接 阻値變小的 時，因不會 修正値加以 -28 - 200815776 (25) 【圖式簡單說明】 第1圖爲表示本發明相關的基板檢查用治具使用狀況 的構成槪略圖。 第2圖爲表示本發明相關的基板檢查用治具槪略構成 圖，圖示著接觸器、接觸器保持體和連接電極體的位置構 造。 第3圖爲表示接觸器一實施形態圖，（α )圖爲棒狀 ^ 構件，（b )圖爲棒狀構件和筒狀構件，（c )圖爲棒狀構 件、筒狀構件及絕緣部。 第4圖爲基板檢查用治具其保護部的動作，（a )圖 爲表示基板檢查用治具未使用時的狀態，（b)圖爲表示 基板檢查用治具使用時的狀態。 第5(a)〜第5(d)圖爲分別表示連接電極部一實 施形態圖。 第6圖爲表示接觸器另一實施形態圖。 • 第7圖爲表示本發明相關基板檢查用治具的使用狀態 圖。 第8圖爲表示連接電極體所具有的滑行部一實施形態 圖。 第9圖爲表示本發明相關的接觸器和接觸器保持體的 另一實施形態圖。 第1 0圖爲表示本發明相關的接觸器和接觸器保持體 的又另一實施形態圖。 第11圖爲表示實施本發明的基板檢查用治具一實施 -29- 200815776 (26) 例。 第12圖爲表示本發明相關的基板檢查用治具和具有 習知電極構造的基板檢查用治具該等包括接觸電阻的接觸 器電阻進行測定後的結果圖表。 【主要元件符號說明】 1 :基板檢查用治具In Fig. 10, a space S is formed between the contactor holder 3 and the connection electrode body 4, and the accommodating portion 2A of the contactor 2 is bent in the space S when it is housed in the connection electrode portion 41. As described above, since the accommodating portion 2A is bendable in the space S, the accommodating portion 2A accommodated in the position where the connecting electrode portion '41 is in contact with the inner surface of the connecting electrode portion 41 is only subjected to the bending portion of the accommodating portion 2A. Push. Therefore, the φ-capacity 2A can be stably brought into contact with the inner surface of the connection electrode portion 4 1 . Further, in this embodiment, the connection electrode body 4 is slid (moved in the direction of the arrow symbol), and the contactor 2 is stably brought into contact with the connection electrode portion 41. The above is a description of the configuration of the jig for substrate inspection according to the present invention. Next, an embodiment of the jig for substrate inspection according to the present invention will be described. Fig. 11 is a view showing an embodiment of the jig for substrate inspection carried out by the present invention. The contactor 2 shown in this example is formed of a rod-shaped member 2 having a length of 30 μm and a diameter of 90 // m by using tungsten as a material, and an insulating portion 23 is formed with a length of the housing portion 2 A of 2 mm. Further, the connection electrode portion 4 1 is a conductive tube having an inner diameter of 9 5 // m and an outer diameter of 1 2 5 // m, and a gold plating treatment is applied to the inner surface of the tube. In the embodiment shown in FIG. 11, the connection electrode body 4 is formed of the first plate-shaped portion 43, the second plate-like portion 44, the third plate-like portion 45, and the fourth plate-like portion 46, and has The slide portion -26-200815776 (23) is moved in the lateral direction of the second plate portion 44. The first plate-like portion 43 and the third plate-like portion 45 are fixed members, and the fourth plate-like portion 46 is used as a base for the substrate inspection jig 1'. The connection electrode portion 41 is formed to penetrate the first to third plate-like portions. The sliding portion 47 moves the second plate portion 44 to the left and right. The sliding portion 47 is formed with a pair of left and right screw mechanisms, and the position of the second plate portion 44 can be adjusted by adjusting the left and right screws. Φ Further, in the first 1 (a) diagram, a space ” between the second holding portion 32 and the protective portion 36 indicates a state when it is not in use. Fig. 1 (b) is a view showing a state of use of the jig for substrate inspection. At this time, the second holding portion 3 2 and the protecting portion 36 abut each other, and the accommodating portion 2 A of the contactor 2 is housed in the connecting electrode portion 41. Then, the accommodating portion 2A of the contactor 2 is in a state in which the inner surface of the connecting electrode portion 4 1 is rubbed while being rubbed, and the conductive state can be established. Further, the jig for substrate inspection 1' has a sliding portion #47 on the left and right, and is configured such that after the accommodating portion 2A of the contactor 2 is housed in the connection electrode portion 41, the second electrode of the electrode assembly 4 is connected by adjustment of the screw. The plate portion 44 moves in the lateral direction. At this time, the second plate-like portion 44 of the connection electrode portion 41 is bent in a state in which the movement of the second plate-like portion 44 is made, and the inner surface of the connection electrode portion 41 and the contactor 2 are pressure-bonded. In this embodiment, since the contactor 2 is also formed to be obliquely held by the contactor holding body 3, and the connecting electrode body 4 has the sliding portion 47, the contactor 2 can be rubbed while the inner surface of the connecting electrode portion 4 1 is rubbed. While being accommodated in the connection electrode portion 41, a stable contact determination state can be formed -27 - 200815776 (24). Fig. 1 is a graph showing the results of measurement of the substrate inspection jig of the conventional electrode structure for substrate inspection according to the present invention, including the contact resistance. In this experiment, the jig for the substrate inspection is placed on the side of the substrate to be inspected (the other side of the accommodating portion 2A) on the substrate to be inspected as a substrate to be inspected, and then the substrate is φ. At this time, the electric resistance 値 between the wires 42 connected to the electrode portion 4 1 and the electric resistance was measured. Therefore, the resistance 値 is the contact resistance of the electrode portion 41 and the contactor 2; the contact resistance; and the contact resistance of the contactor 2 and the substrate to be inspected. In addition, the "number of times" shown in Fig. 12 indicates the number of times the number of hits is the number of times of the press. According to the first aspect of the invention, the substrate inspection method of the present invention is in the range of 420 to 570 ιη Ω (width: 0.15 Ω), and the phase of the substrate inspection tool having a conventional connection electrode has a resistance 値 Ω range (width is 4). Ω). From this, it can be seen that the contact resistance 値 is extremely low compared to the conventional invention, and the deviation of the contact resistance 値 is extremely small. Therefore, by using the jig of the present invention, it is possible to make the contact electric power, and even if the contact resistance 値 is used as the correction 値 to deal with the variation caused by the increase in the number of touches, there is no need for correction, and it is possible to have extremely stable contact during use. resistance. The state in which the jig and the contact with the resistor are pressed, and the substrate to be inspected is pressed down by the contactor 2, and includes: an electrical inspection substrate connecting the 2 itself, and the resistance thereof is 1 · 5 to 5.5 When the 値 造成 造成 -28 -28 -28 -28 -28 - 200815776 (25) [Brief Description] FIG. 1 is a view showing the constitution of the use condition of the substrate inspection jig according to the present invention. Sketch map. Fig. 2 is a schematic view showing the structure of the substrate inspection jig according to the present invention, showing the positional configuration of the contactor, the contactor holder, and the connection electrode body. Fig. 3 is a view showing an embodiment of the contactor, wherein (α) is a rod-shaped member, (b) is a rod-shaped member and a cylindrical member, and (c) is a rod-shaped member, a cylindrical member, and an insulating portion. . Fig. 4 is a view showing the operation of the protective portion of the jig for the substrate inspection, wherein (a) is a view showing a state in which the jig for the substrate inspection is not used, and (b) is a view showing a state in which the jig for the substrate inspection is used. Figs. 5(a) to 5(d) are views showing an embodiment of the connection electrode portion, respectively. Fig. 6 is a view showing another embodiment of the contactor. Fig. 7 is a view showing a state of use of the jig for inspection of a substrate according to the present invention. Fig. 8 is a view showing an embodiment of a sliding portion provided in the electrode assembly. Fig. 9 is a view showing another embodiment of the contactor and the contactor holder according to the present invention. Fig. 10 is a view showing still another embodiment of the contactor and the contactor holder according to the present invention. Fig. 11 is a view showing an example of a jig for performing substrate inspection according to the present invention -29-200815776 (26). Fig. 12 is a graph showing the results of measurement of the contact resistance of the substrate inspection jig according to the present invention and the substrate inspection jig having the conventional electrode structure including the contact resistance. [Main component symbol description] 1 : Fixture for substrate inspection
1’ ：基板檢查用治具（另一實施形態） 2 :接觸器 2A :收容部 3 :接觸器保持體 3 1 :第一保持部 32 :第二保持部 4 :連接電極體 4 1 :連接電極部1' : Fixture for substrate inspection (another embodiment) 2 : Contactor 2A : accommodating portion 3 : Contactor holder 3 1 : First holding portion 32 : Second holding portion 4 : Connecting electrode body 4 1 : Connection Electrode part
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