JP2008076268A - Inspection tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection tool for four-terminal measurement, having pairs of contacts where inspecting ends of each pair of contacts are brought into contact with the same inspection point on a wire of a substrate to be inspected, for applying and receiving inspection current and voltage. <P>SOLUTION: The inspecting tool for use of substrate inspection for four-terminal measurements has respective ends of a pair of linear contacts brought into contact with the same inspection point on a wiring pattern of the substrate to be inspected. The tool includes a plurality of pairs of contacts, an electrode-side holder for guiding an end of the contact to an electrode of the inspecting tool electrically connected with an inspecting device for inspecting the substrate and having an electrode-side guide hole provided corresponding to each end of the contact, and an inspection-point-side holder for guiding the other end of the contact to the inspection point and having an inspection-point-side guide hole, provided corresponding to each pair of contacts. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a substrate inspection jig used when inspecting a substrate such as a printed wiring board, and more specifically, to an inspection end portion whose tip contacts an inspection point of a substrate to be inspected, and an inspection control unit. Substrate inspection in which a contact consisting of an electrode end in contact with the electrode part to be connected and a linear part connecting both ends is supported by an inspection-side holding body and an electrode-side holding body arranged at a predetermined interval. With regard to the jig, in particular, contacts are paired, and the inspection end portions of each pair of contacts come into contact with the same inspection point on the wiring of the substrate to be inspected, and are used for the transfer of inspection current and voltage. The present invention relates to an inspection jig for measuring four terminals.
The present invention is not limited to a printed wiring board, but includes, for example, electrical wiring on various substrates such as flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays and plasma displays, and package substrates and film carriers for semiconductor packages. In this specification, these various wiring boards are collectively referred to as “substrates”.

  Conventionally, in the four-terminal measuring jig as described above, the contacts are arranged on the electrode-side end in contact with the electrode part, and on the inspection-side end part in contact with the land or the inspection point in the wiring of the board to be inspected. It was supported by the holding body with the guide hole which guides the edge part of each separately.

For example, in the inspection jig for four-terminal measurement described in Patent Document 1, a technique for bringing two deep needles (contacts) into contact with one land that is an inspection point is disclosed.
In the technique disclosed in Patent Document 1, in order to support two contacts, a technique is shown in which each contact is supported and guided to a predetermined inspection point for each contact (FIG. 4). reference).

JP 2005-315775 A

In the inspection jig for four-terminal measurement disclosed in Patent Document 1 as described above, inspection points on a BG surface (Ball Grid) having a wide inspection point pitch are configured as inspection targets, and thus are supported for each contact. However, in recent years, there has been no problem even if an inspection jig is created. However, with the recent miniaturization of semiconductor chips, the pitch between inspection points has become narrower, and the guide holes for guiding the contacts are extremely close to each other. It has to be formed.
For this reason, in order to create this guide hole, it is necessary to increase the position accuracy with respect to the size of the guide hole itself and the position accuracy of the arrangement of the guide holes.
As a result, such high-precision positioning has caused the manufacturing process to be complicated and the manufacturing cost to increase.
The present invention has been made in view of such circumstances, and provides an inspection jig for four-terminal measurement that can efficiently manufacture a substrate inspection jig.

The invention according to claim 1 is for four-terminal measurement in which each one end of a pair of linear contacts is brought into contact with the same inspection point on the wiring pattern of the substrate to be inspected, and exchanges current and voltage for inspection. In an inspection jig for inspecting a substrate, a plurality of pairs of contacts and the other end of the contacts are connected to an electrode portion of an inspection jig electrically connected to an inspection apparatus for inspecting a substrate to be inspected. In addition to guiding, the electrode portion side holding body having electrode portion side guide holes provided corresponding to each other end of the contact, and one end of the contact are guided to the inspection point, and the pair of contacts There is provided an inspection jig having an inspection point side holding body having an inspection point side guide hole provided corresponding to each child.
According to a second aspect of the present invention, the contact includes a linear conductive portion and a non-conductive covering portion that covers the conductive portion, and one end of the conductive portion is formed in a sharp shape, 2. The inspection jig according to claim 1, wherein the covering portion is covered so that a sharp shape of the conductive portion is exposed.
The invention according to claim 3 is characterized in that the inspection point side guide hole has a shape slightly larger than the cross-sectional size of the pair of contacts. I will provide a.

According to the first aspect of the present invention, each end of the pair of linear contacts that contact the inspection point is guided to the inspection point by the inspection point side guide hole. Even if it is a point, four-terminal measurement can be performed by forming one guide hole to correspond to the inspection point. For this reason, the inspection jig can be manufactured at a lower cost than the conventional inspection jig.
According to the second aspect of the present invention, the contact is formed from the linear conductive portion and the covering portion, one end of the conductive portion is formed in a sharp shape, and the covering portion is exposed to the sharp shape of the conductive portion. Therefore, even if a pair of contacts are accommodated in the guide hole, it is possible to prevent a short circuit between the contacts.
According to the invention described in claim 3, since the inspection point side guide hole has a shape slightly larger than the size of the cross section of the pair of contacts, the contact can be held more stably. .

The best mode for carrying out the present invention will be described.
FIG. 1 is a schematic view showing an embodiment of an inspection jig according to the present invention.
In the embodiment of the inspection jig 1 shown in FIG. 1, a plurality of contacts 2, a holding body 3 that supports these contacts 2 in a multi-needle shape, and holds the holding body 3 and makes contact with the contact 2. Then, the connection electrode body 4 having the electrode part that becomes conductive, the inspection signal processing part 5 that is the inspection signal processing part that processes the detected electric signal, and the wire cable 6 that connects the contact 2 and the inspection signal processing part 5 Is shown.
The contact 2 is a terminal that contacts each inspection point of the wiring pattern formed on the substrate to be inspected, and the connection electrode body 4 is electrically connected by changing the pitch of the contact 2 and the inspection signal processing unit 5. is doing. The wire cable 6 electrically connects the electrode portion of the connection electrode body 4 and the inspection signal processing portion 5 to predetermined positions, and is not limited to a wire cable as long as electrical connection can be made.
In the present specification, the contact 2 of the inspection jig 1 and the holder 3 that supports the probe are referred to as an inspection jig head 11 for convenience of explanation.

FIG. 2 is a cross-sectional view of a schematic side surface of the inspection jig head according to the present invention.
The inspection jig head 11 includes a contact 2 and a holding body 3.
The inspection jig head 11 supports a plurality of contacts 2 arranged in a multi-needle shape by the holding body 3 (in FIG. 2, for convenience of explanation, four contacts are shown. The number of children is not particularly limited).

The contact 2 of the inspection jig head 11 shown in FIG. 2 has an inspection end portion 21 whose tip contacts an inspection point of a substrate to be inspected (not shown), and a substrate inspection apparatus for inspecting the substrate to be inspected. An electrode end portion 22 that contacts an electrode portion (not shown) electrically connected to the inspection control portion 5 (not shown), and a conductive linear portion 23 having an elastic force that connects the both end portions. (See FIG. 3).
As described above, the inspection end portion 21 is in conductive contact with the inspection point of the substrate to be inspected, supplies power for measuring the electrical characteristics to the substrate to be inspected, or detects an electrical signal from the substrate to be inspected. To do.
The electrode end portion 22 is in conductive contact with the electrode portion of the substrate inspection apparatus, supplies electric power for measuring electrical characteristics from the substrate inspection apparatus, and an electric signal detected from the substrate to be inspected to the substrate inspection apparatus. Or send.
The linear portion 23 connects the inspection end portion 21 and the electrode end portion 22 and bends in a curved shape when the contact 2 is used.
When the contactor 2 is used, the inspection end 21 is pressed against the inspection point, the electrode end 22 is pressed against the electrode, and is pressed from the inspection point and the electrode. At this time, since the contact 2 is pressed, the linear portion 23 of the contact 2 is bent and bent. As a result, the electrode end portion 22 of the contact 2 presses the electrode portion with elastic force, and the inspection end portion 21 of the contact 2 presses the inspection point with elastic force.

  The tips of the inspection end 21 and the electrode end 22 are preferably formed in a curved shape or a sharp shape. By forming the inspection end portion 21 and the electrode end portion 22 in a sharp shape or a curved shape, it is possible to reduce dent marks when contacting the electrode portion or the inspection point.

The contact 2 shown in FIG. 3 includes a conductive conductive portion 2a having an inspection end portion 21, an electrode end portion 22 and a linear portion 23, and a covering portion 2b covering the conductive portion 2a.
The conductive portion 2a is formed in a linear shape and is formed of a conductive material. The material of the conductive portion 2a is not particularly limited as long as adopting tungsten (W) or rhenium-tungsten (Re-W) is an electrically conductive and flexible material.
Since the inspection end 21 and the electrode end 22 are formed in a curved shape or a sharp shape (tapered shape) as described above, both ends of the conductive portion 2a are so processed.

The coating | coated part 2b is provided in the surface periphery of the electroconductive part 2a, and is formed with a nonelectroconductive raw material. The material of the covering portion 2b is formed of a fluororesin (for example, PTFE (polytetrafluoroethylene) or the like) that is a synthetic resin material.
As shown in FIG. 3, the covering portion 2b is provided so as to entirely cover the surface of the conductive portion 2a, and the boundary of the covering portion 2b is arranged at the tapered portion at the tip of the conductive portion 2a. Provided. That is, it is formed so that only a part of the tip of the conductive portion 2a is exposed.
In this way, the boundary of the covering portion 2b is formed so as to be disposed at the tapered portion, so that even when the two contactors 2 are accommodated in the inspection point side guide holes described later, they are more reliably connected to each other. Can be prevented from touching the contact.
In FIG. 3, both ends of the contact 2 are formed so that the boundary of the covering portion 2b is tapered, but only the tip on the inspection point side may be formed in this way.

  Since the inspection jig 1 according to the present invention is used for four-terminal measurement, the above-described contactor is implemented by bringing the two contactors 2 into contact with one inspection point. Two contacts are used because four-terminal measurement requires a current supply contact and a voltage detection contact for the test object. For this reason, two contacts are used as a pair of contacts 2A for voltage detection and current supply.

The holding body 2 includes an inspection point side holding body 12, an electrode part side holding body 13, and a support column 14 for connecting these holding bodies.
The inspection point side holding body 12 has an inspection point side guide hole 121 for guiding the inspection end portion 21 of the contact 2 to a predetermined inspection point.
The inspection point side guide hole 121 of the inspection point side holding body 12 guides the pair of contacts 2A simultaneously to the inspection point. That is, the inspection point side guide hole 121 guides the two contacts 2 as a pair of contacts 2A as shown in FIG.
For this reason, although the inspection jig 1 of the present invention is an inspection jig for four-terminal measurement, measurement can be performed by providing one guide hole for the inspection point.

As described above, the inspection point side guide hole 121 holds the pair of contacts 2A, but the inspection point side guide hole 121 has a cross-sectional shape that is substantially the same as or slightly larger than the cross-sectional shape of the pair of contacts 2A. It is preferable. Thus, the pair of contacts 2A can be stably held by forming the inspection point side guide holes 121 in a cross-sectional shape substantially the same as or slightly larger than the cross-sectional shape of the pair of contacts 2A.
As the cross-sectional shape of the inspection point side guide hole 121, a circular shape or an elliptical shape that can accommodate two contacts, a shape in which two circular centers are shifted and overlapped, or a polygon such as a quadrangle The shape can be exemplified. The cross-sectional shape of the inspection point side guide hole 121 is preferably formed so that the two contacts can be accommodated and the two contacts do not rotate.

As shown in FIG. 2, the inspection point side holding body 12 is formed of a plate-like member, but may be formed by laminating a plurality of plate-like members or a single plate-like member. Also good.
The thickness of the inspection point side holding body 12 is not particularly limited, but when the contact 2 is held in the inspection point side guide hole 121, the contact 2 is substantially parallel to the hole direction (indentation direction) of the guide hole. It is preferable to have a length that can be maintained. In this way, the thickness of the inspection point side holding body 12 can be maintained substantially parallel to the hole direction of the inspection point side guide hole 121, so that the pair of contactors 2A can be more reliably maintained without contact. Can guide you.

  When the inspection point side guide hole 121 is manufactured, the center of the inspection point side guide hole 121 is manufactured so as to correspond to the center of the inspection point. Thus, since it is set so that one guide hole is aligned with respect to the inspection point, it is not necessary to manufacture two guide holes with respect to the inspection point, so that a complicated and complicated manufacturing process is performed. The guide hole can be manufactured without any problems.

The electrode part side holding body 13 has an electrode part side guide hole 131 for guiding the electrode end part 22 of the contact 2 to the electrode part.
The electrode part side guide hole 131 of the electrode part side holding body 13 guides one contact 2 to a predetermined electrode part.
Although this electrode part side holding body 13 is formed by a plate-like member similarly to the inspection point side holding body 12, it may be formed by laminating a plurality of plate-like members, or a single plate-like member. You may form by. Further, the thickness of the electrode part side holder 13 is not particularly limited, but when the contact 2 is held in the electrode part side guide hole 131, the contact 2 is substantially in the hole direction (indentation direction) of the guide hole. It preferably has a length that can be maintained in parallel. Thus, since the contact 2 can be maintained substantially parallel to the hole direction of the inspection point side guide hole 131, the thickness of the electrode side holder 13 can be more reliably contacted between the contact 2 and the electrode. It can be made stable.

  The support column 14 is a member that connects the inspection point side holding body 12 and the electrode part side holding body 13. The length of the contact 14 determines the length of the contact 2 and forms a space for the contact 2 to bend. The length of the column 14 is adjusted by the setting as described above.

It is the schematic which shows one Embodiment of the jig | tool for an inspection which concerns on this invention. It is sectional drawing of the schematic side surface of the jig | tool head for an inspection which concerns on this invention. It is a schematic side view of the contact according to the present invention. A conventional inspection tool for four-terminal measurement is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Inspection jig | tool 12 ... Inspection point side holding body 13 ... Electrode part side holding body 2 ... Contact

Claims (3)

One end of the pair of linear contacts is in contact with the same inspection point on the wiring pattern of the substrate to be inspected, and the inspection treatment for the substrate inspection for the four-terminal measurement that transmits and receives the inspection current and voltage. In the ingredients
A plurality of pairs of contacts;
The other end of the contact is guided to an electrode portion of an inspection jig electrically connected to an inspection apparatus for inspecting a substrate to be inspected, and an electrode portion provided corresponding to each other end of the contact An electrode part side holder having a side guide hole;
An inspection treatment comprising: an inspection point side holder having an inspection point side guide hole provided corresponding to each of the pair of contacts while guiding one end of the contact to the inspection point. Ingredients. The contact has a linear conductive portion and a non-conductive covering portion that covers the conductive portion,
One end of the conductive part is formed in a sharp shape,
The inspection jig according to claim 1, wherein the covering portion is covered such that a sharp shape of the conductive portion is exposed.   The inspection jig according to claim 1, wherein the inspection point side guide hole has a shape slightly larger than a cross-sectional size of the pair of contacts.

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