JPH0658955A - Probe head for four-terminal resistance measurement - Google Patents

Abstract

PURPOSE:To provide a probe head for measuring four-terminal resistance, being employed when the resistance of a printed wiring board or the like is measured by four-terminal method, which allows measurement of resistance even of a high density printed wiring board or a printed wiring board having irregularities on the surface. CONSTITUTION:The probe head comprises a pair of probes 1A, 1B for supplying current and for measuring voltage, respectively. Each of the pair of probes 1A, 1B is a conductive and resilient linear body having a plane extending in the longitudinal direction and a pointed end. on the tip side of the probes, the planes oppose slidingly each other while being insulated and alinged at the tips of the probes. Each of the probes 1A, 1B penetrates through a hole 2a made through a first dielectric board 2 and can move in the direction along the hole 2a. On the base side of the probe, both probes are spaced apart from each other by bending the probes at different central parts in same direction and the probes are secured, at the base parts thereof, to a second dielectric board 3 so that the first and second dielectric boards 2, 3 are secured each other.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe head for four-terminal resistance measurement used when the resistance of a printed wiring board or the like is measured by the four-terminal method.

In recent years, the density of printed wiring boards has been increasing, and it is necessary to precisely measure the conductor resistance which greatly affects the speed of signal propagation between wirings. Therefore, there is a demand for a four-terminal resistance measurement probe head that has a structure that can be accurately contacted regardless of the surface shape of the substrate to be measured, and that can cope with a highly densified substrate.

[0003]

2. Description of the Related Art A spring contact probe, a probe card, or the like has been used as a conventional probe for measuring conductor resistance.

[0004]

However, in the above-mentioned spring contact probe, when the two-terminal method is used for measurement, the measurement accuracy is poor due to the variation in the contact resistance between the object to be measured and the probe tip, and when the four-terminal method is used for the measurement. Is 1
There are problems such as the need for two probes at the location, and the difficulty of bringing the two probes into contact with the minute conductors of the high-density substrate. Further, in the probe card, it is difficult to arrange the probes at a high density, and since there are few strokes in the pressing direction, there is a problem in that good contact cannot be obtained with unevenness on the substrate surface.

The present invention relates to a probe head for four-terminal resistance measurement, which is used when the resistance of a printed wiring board or the like is measured by the four-terminal method. An object of the present invention is to provide a probe head for four-terminal resistance measurement that enables measurement even when there is.

[0006]

In order to achieve the above object, a probe head for four-terminal resistance measurement according to the present invention comprises:
The probe has a pair of probes, one of which supplies current and the other of which measures voltage, and each probe of the pair has a linear conductive elastic body having a flat surface along the longitudinal direction and having a sharp tip. At the tip side of the pair of probes, the planes are insulated by the interposition of an insulating film and slidably face each other so that the tips of both probes are aligned, and penetrate the hole of the first insulating plate in the facing form. The tip of each probe is movable in the direction along the hole, and the base side of the pair of probes is bent in the same direction between the probes at different positions in the middle of each probe. Are separated by, and the base of each probe is fixed to the second insulating plate in the separated form,
The first insulating plate and the second insulating plate are fixed to each other.

[0007]

Since the pair of probes, one of which is for supplying current and the other of which is for measuring voltage, are configured as described above, the tip for supplying current and the tip for measuring voltage can be brought close to each other, and the fine conductor It is possible to bring both tips into contact with each other. In addition, it is possible to make the pressing stroke of each tip large due to the bending of the base side of each probe, and it is possible to bring each tip into good contact with the conductor without being influenced by the surface shape of the measured substrate. Become.

As a result, the present probe head enables measurement by the four-terminal method even when the substrate to be measured has unevenness on the surface or has a high density.

[0009]

Embodiments of the present invention will be described below with reference to FIGS. 1 is a side view of the first embodiment, and FIG. 2 is a side view of the second embodiment.

In FIG. 1, 1A and 1B are a pair of probes, one for supplying current and the other for measuring voltage, 2 is a first insulating plate, 3 is a second insulating plate, and 4 is a pipe. Each of the pair of probes 1A and 1B is a linear conductive elastic body having a plane along the longitudinal direction and having a pointed tip,
Here, the cross-sectional shape is a semicircle, and the material is beryllium copper (BeCu). The cross-sectional shape does not have to be a semicircle,
The material also need not be limited to beryllium copper.

On the tip side of the pair of probes 1A and 1B, the above-mentioned planes are insulated by the interposition of an insulating film and slidably face each other so that the tips of both probes 1A and 1B are aligned with each other, and the first insulating plate is in the facing form. The tips of the probes 1A and 1B are movable in the direction along the hole 2a through the two holes 2a.

On the base side of the pair of probes 1A and 1B, the space between both probes 1A and 1B is the respective probe 1A, 1B.
Are separated by L-shaped bends 5 in the same direction at different positions in the middle of the
The base portions of A and 1B are fitted into the pipe 4 and fixed to the second insulating plate 3.

The insulating film for insulating between the probes 1A and 1B is a film in which the tip portions of the probes 1A and 1B to the bend 5 are insulation-coated, and the pipe 4 is
It is made of a conductor and defines a free length from the bent portion 5 of the probe 1A or 1B to the base portion.

The first insulating plate 2 and the second insulating plate 3 are fixed to each other. In the above structure, the probe 1
Each of A and 1B can independently increase the pressing stroke of the tip by bending the portion of bending 5 with respect to the fixing of the base portion, and both tips are still close to each other. Further, the stiffness with respect to the pressurizing stroke depends on the free length, and can be adjusted depending on the length of the pipe 4.

From this fact, this probe head can bring both ends of the probes 1A and 1B into contact with the minute conductor by bringing the first insulating plate 2 close to the substrate to be measured in use. It is possible to bring each tip into good contact with the conductor without being influenced by the surface shape of the substrate to be measured.

In FIG. 2 showing the second embodiment, this probe head is an example in which the probes are arranged in accordance with the arrangement of the probe contact points on the substrate to be measured. 6A and 6 in the figure
B, 7A and 7B, 8A and 8B, 9A and 9B correspond to the pair of probes 1A and 1B in the first embodiment, and 10 and 11 are the same as the first insulating plate 2 and the second insulating plate 3. Corresponding first insulating plate and second insulating plate, 12
Is a pipe corresponding to the pipe 4, 13 is a bend corresponding to the bend 5, and 14 and 15 are fixing plates for fixing the first insulating plate 10 and the second insulating plate 11 to each other.

The pair of probes 6A and 6B to 9A and 9B are arranged in a line, and 9 sets of the arranged lines are arranged in parallel, and the array of the tips of the probes protruding from the first insulating film 10 is arranged at the probe contact point of the substrate to be measured. It is adapted to the arrangement of. Also, since the arrangement of this tip is relatively tight, the bending angle of bending 13 is set to 4
It is set to 5 degrees so that the arrangement of the probe bases in the second insulating film 11 does not become unreasonable.

The probe head of the second embodiment is also
Since both tips of the pair of probes are close to each other and each probe functions in the same manner as the probe of Example 1, Example 1
Similar to the probe head of 1), even if the substrate to be measured has unevenness on the surface or is densified, measurement by the four-terminal method becomes possible.

[0019]

As described above, according to the present invention, there is provided a 4-terminal resistance measuring probe head used when the resistance of a printed wiring board or the like is measured by the 4-terminal method. A probe head for 4-terminal resistance measurement that enables measurement even when the density is high is provided, and it has an effect of stabilizing the measurement by the 4-terminal method for a high-density printed wiring board. .

[Brief description of drawings]

FIG. 1 is a side view of the first embodiment.

FIG. 2 is a front view and a side view of the second embodiment.

[Explanation of symbols]

 1A, 1B, 6A, 6B-9A, 9B Probe 2,10 1st insulating plate 2a hole 3,11 2nd insulating plate 4,12 Pipe 5,13 Bending 14,15 Fixing plate

Claims (1)

[Claims] 1. A pair of probes, one of which is for supplying current and the other of which is for measuring voltage, each of the probes of the pair having a plane along the longitudinal direction and having a pointed linear shape. And the tips of the pair of probes are slidably opposed to each other by the interposition of an insulating film so that the tips of both the probes are aligned. Through each of the holes, the tip of each probe is movable in a direction along the hole, and the base side of the pair of probes is located between the two probes at different positions in the middle of each probe. The probes are separated by bending in the same direction, and the bases of the probes are fixed to the second insulating plate in the separated form, and the first insulating plate and the second insulating plate are fixed to each other. Characteristic 4-terminal resistance measurement probe head.