JP2000131340A - Contact probe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a manufacturing cost and to allow a contact resistance of a probe main body against an objet to be probed to be constant. SOLUTION: A contact probe device 1 is provided with a base part 3 to be attached to a probe guiding mechanism, and first and second contact probes 2a and 2b provided while a probe main body Pa, with its base-end part side fixed to the base part 3 respectively, made to contact an object to be probed according to the guide of a probe guiding mechanism being insulated from the tip-end part side each other. Here, both contact probes 2a and 2b are fixed to the base part 3 so that each tip-end part side energizes each other in facing direction. Thus, the tip end part of the probe main body is aligned very easily, reducing a manufacturing cost.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a contact probe device for performing an electrical test by bringing a probe body into contact with an object to be probed, and more particularly to a contact probe device suitable for an electrical test by a four-terminal method. is there.

[0002]

2. Description of the Related Art For example, when an electrical test is performed on the quality of a circuit board by measuring a resistance value between a pair of printed patterns on the circuit board, generally, for example, the resistance between the pair of printed patterns is measured. A pair of contact probes (hereinafter referred to as "probes") for supplying a constant current to a pair of printed patterns, and a pair of probes for measuring a voltage between both ends of the pair of printed patterns, The resistance value is measured by the four-terminal method in a state in which they are brought into contact with each other. In this case, since today's circuit boards are becoming finer and finer, the printed pattern to be inspected is formed with a very narrow width. Therefore, in order to simultaneously contact the current supply probe and the voltage measurement probe with the same pattern on the circuit board, it is necessary to perform probing with the tips of both probes as close as possible. In addition, in order to perform measurement by the four-terminal method, it is necessary that the tips of both probes do not directly contact each other but independently contact the print pattern to be inspected.

[0003] As this kind of contact probe device,
A parallel probe 31 shown in FIG. 8 has been conventionally known. The parallel probe 31 is entirely formed in a plate shape of an insulating resin, and is fixed to the base portion 33 by bolts 5, 5,... Probes 32a and 32b (hereinafter, referred to as "probe 32" when not distinguished) formed in substantially the same shape as each other. In this case, mounting holes 3a, 3a for mounting to the probe guide mechanism are formed in the base portion 33 so as to communicate from the top surface to the bottom surface. Further, the probe 3 in the base portion 33
9 are provided on side surfaces 33a and 33b on the fixed side of 2a and 32b.
As shown in FIG. 3, fixing holes 3b for fastening each bolt 5 are formed.

On the other hand, as shown in FIG. 9, the probe 32 has fixing holes 37, 37 for fixing to the base portion 33.
Is fixed, and the tip Pa (probe 32b
In this case, the head part 35 whose tip Pb) is brought into contact with the probing target body, and the fixed part 3 that allows the head part 35 to move up and down.
4 and is integrally formed with a square rod-shaped arm portion 36 for connection and fixation. In this case, each fixing hole 37 is formed in a horizontally long oval shape. Therefore, when the probe 32 is fixed to the base portion 33, the fixing position of the probe 32a to the base portion 33 can be finely adjusted in the direction of the arrow M1 in FIG. 10 (the arrow M2 in FIG. 10 for the probe 32b). .

At the time of assembling the parallel probe 31, first, the bolts 5 inserted into the fixing holes 37 are lightly tightened into the fixing holes 3b, so that the probe 32
a, 32b are temporarily fixed to the side surfaces 33a, 33b of the base 33, respectively. Next, the probes 32a and 32b with respect to the base portion 33 in the directions of arrows M1 and M2 in FIG. 10 are arranged such that the tips Pa and Pb do not contact each other and are located at positions where they can contact the same print pattern X1. Fine-adjust the fixing position of. Then, in this state, the probes 32a and 32b are fixed to the base 33 by strongly tightening the bolts 5 into the fixing holes 3b. Thus, the probes 32a and 32b and the base 33
Are integrated, and as shown in FIG.
Is completed.

In probing a print pattern X using the parallel probe 31, first, FIG.
As shown in FIGS. 1A and 1B, the tips Pa and Pb of the probes 32a and 32b are respectively positioned above the print pattern X by the probe guide mechanism. Next, the base portion 33 is moved downward in the direction of arrow A in FIG.
The tip Pa, Pb of 32b is the surface X of the print pattern X
a. Next, when the base portion 33 is further moved downward in the direction of arrow A, the probes 32a,
The arms 36, 36 of the 32b are shown in FIGS. 12 (a), (c).
Are elastically deformed in the directions of arrows B and C shown in FIG. 7, and the front ends Pa and Pb are urged toward the print pattern X in the direction of arrow A shown in FIG. This allows
The electrical connection between the tips Pa and Pb and the surface Xa of the print pattern X is completed. Thereafter, for example, the probe 32a in the parallel probe 31 of the same figure and the probe 32a in another parallel probe 31 (not shown)
The measurement current is supplied to the print pattern X through the probe 3 and the probe 3 in the parallel probe 31 shown in FIG.
A predetermined electrical test is executed by measuring the voltage between the print patterns X, X via the probe 32b of the other parallel probe 31 and the probe 2b.

[0007]

However, the conventional parallel probe 31 has the following problems. First
In the conventional parallel probe 31, first, the tips Pa and Pb respectively contact the surface Xa of the print pattern X by lowering the fixing part 34 by the probe guide mechanism as shown in FIG. Next, the fixing portion 34 is further moved downward, so that the arm portion 3 is moved.
6 is elastically deformed as shown by the dashed line,
a, Pb, the surface X of the print pattern X indicated by the dashed line
It is urged to the a side. In the figure, in order to facilitate understanding of the operation principle, the probes 32a, 3
2b and the print pattern X,
Are shown at relative positions with reference to the fixing holes 37, 37, and the illustration of the base portion 33 is omitted.

At this time, the tips Pa and Pb are fixed to the fixing portion 34.
With reference to the position of, as shown by an arrow D, the robot moves along an arc-shaped trajectory centered on the vicinity of the fixing hole 37 on the arm section 36 side. As a result, the front ends Pa and Pb are moved by the distance S on the surface Xa of the print pattern X in the direction of the arrow L from the position where they are first contacted, as shown in FIG. In such a case, the tips Pa and Pb of the probes 32a and 32b move on the surface Xa of the print pattern X in the directions of arrows L1 and L2 shown in FIG.
As a result, the tips Pa and Pb come into contact with each other,
Measurement by the four-terminal method cannot be performed. Therefore, when fixing the probes 32a, 32b to the base 33, the tips Pa, P at the time of probing are fixed.
b must be fixed so as to be as close to each other as possible while preventing contact between them, and the adjustment of the fixing position becomes extremely complicated and difficult. For this reason, this parallel probe 31 has a problem that the manufacturing cost of the apparatus has increased due to the adjustment of the fixed positions of the tips Pa and Pb.

Secondly, in the conventional parallel probe 31, the two arms 36 of the probes 32a and 32b are elastically deformed independently and independently during probing. Due to the positional relationship between the tips Pa and Pb with respect to the base 33 due to the adjustment of the fixed position, the biasing force of the tips Pa and Pb with respect to the print pattern X during probing may vary. In such a case, the contact resistance of each of the tips Pa and Pb with respect to the print pattern X varies, so that it is difficult to perform a predetermined electrical test accurately. When both arms 36 are deformed in the directions of arrows N1 and N2 in FIG.
The non-contact state of Pb with the print pattern X1, or the contact between the tips Pa and Pb may be caused. In such a case, the predetermined electrical test itself cannot be performed. As described above, the conventional parallel probe 31 has various problems due to the fact that both head portions 35 of the probes 32a and 32b move independently and independently of both fixed portions during probing.

Third, in the conventional parallel probe 31, for example, the print patterns X1 and X2 shown in FIG.
A problem arises when measuring the resistance between them by the four-terminal method. That is, the tip P of one of the parallel probes 31
When the a and Pb are brought into contact with the print pattern X1 and the tips Pa and Pb of the other parallel probe 31 are brought into contact with the print pattern X2, the parallel probe 31 is formed wider as a whole. And the other parallel probe 31 cannot be in contact with the print pattern X2. For this reason, the conventional parallel probe 31 has a problem that the parallel probes 31 and 31 may not be able to simultaneously contact each of the adjacent print patterns X1 and X2.

Fourth, in the conventional parallel probe 31, the probe 32 is used for probing as described above.
When the tips Pa and Pb of the a and 32b move on the surface Xa of the print pattern X, a large "C" -shaped contact mark is left on the surface Xa of the print pattern X, thereby impairing the appearance and function of the print pattern X. There is a problem.

Fifth, in the parallel probe 31, when the probe 32 is urged toward the front side of the print pattern X,
a and 32b have small allowable deformation amounts.
In order to prevent the a and 32b from being damaged, the amount of urging must be monitored. For this reason, the conventional parallel probe 31 has a problem that the provision of a monitoring device or the like inevitably increases the size of the device, and also increases the cost of the device.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a contact probe device capable of reducing the manufacturing cost and making the contact resistance of the probe main body to the object to be probed uniform. Main purpose. Another object of the present invention is to provide a contact probe device capable of bringing a plurality of contact probe devices close to each other. In addition, a contact mark at the time of probing is made as small as possible, and damage to the probe body is prevented. It is yet another object to provide a possible contact probe device.

[0014]

According to a first aspect of the present invention, there is provided a contact probe device, wherein a base portion for attaching to a probe guide mechanism is fixed to the base portion, and each base end is fixed to the base portion. A first contact probe and a second contact probe, each of which has a probe body to be brought into contact with the probing target body in accordance with the guidance of the probe guide mechanism and which is disposed in a state of being mutually insulated from each other on the tip side
In the contact probe device including the contact probe, the two contact probes are fixed to the base portion such that the distal ends of the contact probes urge each other in the facing direction.

In this contact probe device, the two probe bodies provided at the distal ends of both contact probes are insulated from each other, and the distal ends of the two contact probes are biased in opposite directions so as to urge each other. The contact probes are fixed to the respective base portions. in this case,
For example, if the two probe bodies disposed on the distal end sides of the contact probes are configured to urge each other via an insulator, the distal ends of the probe main bodies can be aligned extremely easily. On the other hand, when the probe main body is brought into contact with the probing target body according to the guidance of the probe guide mechanism, since the two probe main bodies are biased together, the movement in the direction opposite to the opposite direction of the both probe main bodies. Limited. For this reason, the tip portions of both probe main bodies are reliably brought into contact with the probing target body while being in the close state, and blurring in the direction in which both are opposed to each other is prevented. When the probe body is brought into contact with the probing object, the two probe bodies come into contact with the probing object with substantially the same urging force due to the static frictional force of the urging contact surfaces. For this reason, the contact resistance of the tip of the probe main body to the probing target is made uniform.

A contact probe device according to a second aspect is the contact probe device according to the first aspect,
The two contact probes are fixed to the base portion such that their side surfaces are substantially parallel to each other.

The included angle in the length direction of both contact probes can be appropriately defined. However, if the included angle is defined to be too large, the base ends of both contact probes will be largely separated. For this reason, as a result of the contact probe device being formed wider, it is difficult to bring the plurality of contact probe devices closer to each other. In this contact probe device, both contact probes are fixed to the base so that the side surfaces thereof are substantially parallel to each other. Therefore, the contact probe device can be formed to have a narrow width, so that a plurality of contact probe devices can be brought closer to each other.

According to a third aspect of the present invention, in the contact probe device according to the first or second aspect, each of the contact probes is provided with a fixing portion as a base end portion for fixing to the base portion, and a probe main body. A link mechanism having a head portion provided and a connecting portion for connecting the head portion to the fixed portion so as to be vertically movable,
When the fixed part is moved further in the guide direction of the probe guide mechanism while the tip of the probe body is in contact with the probing target body, the link mechanism guides the link part to the fixed part by elastic deformation of the connecting part. The probe body is characterized in that a linear motion or an approximate linear motion of the distal end of the probe main body in a direction opposite to the direction is allowed.

According to a fourth aspect of the present invention, there is provided the contact probe device according to the third aspect.
The connecting portion is characterized by being provided with two connecting arms for connecting the fixed portion and the head portion via elastically deforming portions formed at both ends of the connecting portion.

In the contact probe device according to the third and fourth aspects, when the tips of both probe bodies are brought into contact with the probing object by the probe guide mechanism, when the tips are further urged in the guide direction, the tips thereof become bent. It linearly moves upward or approximately linearly relatively to the base portion. For this reason, the position of the tip of the probe is prevented from being displaced from the time when the tip of the probe body is first brought into contact with the probing object to the time when the tip is further urged, whereby the contact mark of the probing object is reduced. It becomes possible to make it as small as possible.

According to a fifth aspect of the present invention, there is provided the contact probe device according to the fourth aspect.
The elastically deforming portion is characterized in that it is constituted by an arc-shaped notch fulcrum formed by arcuately cutting a part of a connecting portion in each connecting arm.

As the elastically deformable portion, a structure in which a fulcrum using a hinge fitting and a helical spring is disposed at both ends of the connecting arm may be employed. However, the complexity of the structure leads to an increase in manufacturing cost.
On the other hand, in this contact probe device, since the elastically deformable portion is formed by the arc-shaped notch fulcrum, it can be configured without using any other components. As a result, it is possible to suppress an increase in manufacturing cost. In addition, by appropriately changing the degree of the notch, the elastic deformation amount and the elastic force of the elastic deformation portion can be adjusted to arbitrary sizes.

According to a sixth aspect of the present invention, in the contact probe device according to any one of the third to fifth aspects, the head portion and the probe main body are integrally formed of metal, and both contact probes are formed of a metal. It is characterized in that each of the side faces is fixed to the base portion so that at least a part of the side faces is urged in the opposite direction via an insulator.

Generally, in a circuit board inspection apparatus, for example, as an inspection mechanism, an extremely small type probe body is used in order to perform inspection with high accuracy. Therefore, when connecting the probe main body, the means for supplying the current for inspection to the probing target, and the voltage input means for inputting the measurement voltage by wiring, wiring work for the probe main body becomes extremely complicated work. ing. On the other hand, in this contact probe device, since the head portion and the probe main body are integrally formed of metal, a portion where wiring work can be easily performed is connected to the supply means or the voltage input means, so that an electrical connection is provided between the two. Can be easily connected to On the other hand, when an electrical test is performed on the probing target, for example, a test current is supplied to the probing target and a measurement voltage is input to the probing target via at least the head unit and the probe body. Therefore, as a result of the wiring work being facilitated, it is possible to reduce the manufacturing cost of the inspection mechanism.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which a contact probe device according to the present invention is applied to a circuit board inspection device will be described below with reference to the accompanying drawings. Note that the same components as those of the conventional parallel probe 31 are denoted by the same reference numerals, and redundant description will be omitted.

First, the configuration of the parallel probe 1 corresponding to the contact probe device in the present invention will be described.
This will be described with reference to FIGS.

As shown in FIG. 1, the parallel probe 1 is a metal probe 2a, which is fixed to the base 3 by a bolt 5 and corresponds to the first and second contact probes in the present invention, respectively. 2b (hereinafter referred to as “probe 2” when not distinguished). The probe 2 is, as shown in FIG.
0, a link mechanism RM of a four-bar rotating mechanism integrally formed from the head 11 and the connecting arms 12 and 13 as a whole.
Is configured. In this case, the fixing portion 10 is formed in an L-shape as shown in the figure, and has a fixing hole 18 for fixing the probe 2. The head portion 11 is formed in a tapered shape, and its tip Pa (in the probe 2b, the tip P
b) is sharply cut so as to minimize the contact mark when it is brought into contact with the print pattern X as the probing target. The portions near the tips Pa and Pb in the head 11 correspond to the probe main body in the present invention. Also, the probe 2a of the probe 2b
An insulating film 4 formed in substantially the same shape as the probe 2b to insulate the probes 2a and 2b from each other is provided on the side surface facing the side.

The connecting arm 12 is formed in a long thin plate shape, and is capable of moving up and down with respect to the fixed portion 10 via fulcrums 14 and 15 formed by partially cutting off both ends of the connecting arm 12 in an arc shape. The head 11 is connected. On the other hand, the connecting arm 13
Is formed in a thin plate shape longer than the connecting arm 12,
The head unit 11 is connected to the fixed unit 10 via fulcrums 16 and 17 formed by cutting out a part of both ends in an arc shape so as to be vertically movable.

The base portion 3 is formed of an insulating resin, and as shown in FIG. 4, mounting holes 3a, 3a for fixing to a probe guide mechanism (not shown) are formed so as to communicate from the top surface to the bottom surface. And fixing holes 3b for fixing the probe.
Are formed on the side surfaces 3c and 3d, respectively. The side surfaces 3c and 3d of the base portion 3 are slightly depressed so that the central portion thereof draws a gentle arc.

Next, a method of assembling the parallel probe 1 will be described.

First, a metal plate is punched into a predetermined shape, and then the tips Pa and Pb are cut to obtain the probe 2.
a and 2b are manufactured. Next, the fixing hole 18 of the probe 2
The two probes 2 are temporarily fixed to the base 3 by lightly tightening the bolts 5 through which are inserted into the fixing holes 3 b of the base 3. At this time, the probe 2b and the base 3
And the insulating film 4 is sandwiched between them. Further, for example, by tying a lead wire around the bolt 5 and fastening it, an inspection device (not shown) and the head unit 11 can be electrically connected. Next, as shown in FIG. 1, the bolts 5 are tightened so that the tips Pa and Pb overlap with each other.
The fixing portions 10 and 10 of the probes 2a and 2b are
To the side surfaces 3c and 3d, respectively. At this time, since the fixing portion 10 is brought into close contact with the side surfaces 3c and 3d of the base portion 3, as shown in FIG. Contact in parallel with each other. In this case, since both connecting arms 12 and 13 are elastically deformed in the directions of arrows E and F in the figure, the two head portions 11 and 11 are biased toward each other in the directions of arrows E and F. It is fixed to the base 3.

As described above, in the parallel probe 1, the positions of the tips Pa and Pb can be extremely easily adjusted by urging the probes 2a and 2b together through the insulating film 4. Further, the heads 11 are fixed to the base 3 so as to urge each other via the insulating film 4 by the elastic force of the connecting arms 12 and 13, so that the tips Pa and Pb thereof are provided.
Are uniquely fixed in a positional relationship separated by the thickness of the insulating film 4. For this reason, the tip Pa, Pb
As close as possible.

Next, the operation of the parallel probe 1 during probing will be described with reference to the drawings.

First, the probe guide mechanism shown in FIG.
As shown in (a) and (b), the tips Pa and Pb of the probes 2a and 2b are positioned above the print pattern X. Next, the probe guide mechanism moves the base 3 downward in the direction of arrow A in FIG. Thereby, the probes 2a,
2b moves down together with the base portion 3, and the tips Pa and Pb thereof are brought into contact with the surface Xa of the print pattern X. At this time, in the parallel probe 1, since the tips Pa and Pb are extremely close to each other, even if the print pattern X has a narrow width, the tips Pa and Pb can be surely brought into contact with the pattern width. Next, when the probe guide mechanism further lowers the base portion 3 in the direction of arrow A in the figure, the fulcrums 14 to 17 are elastically deformed as shown in FIG. At this time, the probes 2a and 2b are connected to the fulcrums 14 and 16 on the basis of the position of the fixed portion 10 as a reference.
Are rotated relatively in the directions of arrows G and H, respectively. At the same time, the head 11 moves upward relative to the fixed part 10 in the direction of arrow J in FIG.
The head portion 1 returns to the original state of No. 17
Acts on the front ends Pa and Pb of the first.

In this case, in the parallel probe 1, the heads 11 of the probe 2a are urged by the static frictional force at the contact surface because the two heads 11 are mutually biased.
And the head portion 11 of the probe 2b are moved upward relative to the fixed portion 10 in conjunction with each other. Thereby, the tip P
a and the tip Pb contact the print pattern X with substantially the same urging force. For this reason, the contact resistance of the tips Pa and Pb of the probe 2 to the print pattern X is made uniform. In the link mechanism RM, the connecting arms 12, 1
3 length, length from fulcrum 14 to fulcrum 16, fulcrum 15
From the fulcrum 17 to the tip P, the length from the fulcrum 15 to the tips Pa and Pb of the head 11, and from the fulcrum 17 to the tip P
The lengths up to a and Pb are formed at a predetermined ratio at which the tips Pa and Pb can move directly. For this reason, the tips Pa and Pb of the head portion 11 are equivalently in the same direction as the direction indicated by the arrow A by the probe guide mechanism as shown in FIG. The point Q1 on the dotted line Q is directly or approximately linearly moved from the point Q1 to the point Q2.

Here, the point Q 1 is the tip P of the head 11.
a, Pb indicate the relative positions of the tips Pa, Pb with respect to the fixed portion 10 from when the print pattern X is not in contact with the print pattern X, and the point Q2 is the tip P
2 shows the relative positions of the tips Pa and Pb with respect to the fixed portion 10 when a and Pb are urged toward the print pattern X side. Therefore, the tip P of the head 11
When the restoring forces of the fulcrums 14 to 17 are acting on the a and Pb, the restoring force acts on the tips Pa and Pb to move them from the position of the point Q2 to the position of the point Q1. I do. For this reason, the tips Pa and Pb of the head portion 11 are urged in the direction of arrow A, which is the guide direction, so that the head portions 11 are reliably brought into point contact without moving on the print pattern X.

As described above, in the parallel probe 1, since the tips Pa and Pb can be moved substantially vertically in the vertical direction, the tip Pa and the tip Pb are brought into contact with the print pattern X until the tip is further urged. , Pb on the surface Xa of the print pattern X can be extremely small. Further, since the probes 2a and 2b are biased against each other, it is possible to prevent the probes 2a and 2b from being shaken in the opposite direction, and thereby to make accurate contact with the print pattern X. And the contact mark at that time can be made smaller. Therefore, probing can be performed without impairing the appearance and function of the print pattern X. Thereafter, for example, by supplying a current to the print pattern X via the tip Pa of each parallel probe 1 and measuring the voltage via the tip Pb of each parallel probe 1, the circuit pattern X by the four-terminal method is obtained. , X, etc. can be measured.

Further, in the parallel probe 1, by elastically deforming the fulcrums 14 to 17, the elastically deformable portion of the present invention can be formed without using any other components. Therefore, an increase in manufacturing cost can be suppressed, and the elastic deformation amount and the elastic force can be adjusted to an arbitrary size by appropriately changing the degree of cutout of the fulcrums 14 to 17. Therefore, it is possible to reliably prevent the parallel probe 1 from being damaged.

Further, in the parallel probe 1, as shown in FIG. 3, since the parallel probe 1 is formed to have a narrow width, two print patterns X1,
The parallel probes 1 and 1 can be simultaneously brought into contact with X2. Therefore, the print pattern X1,
The resistance value between the print patterns X1 and X2 can be measured according to the four-terminal method without being limited by the arrangement of X2.

The present invention is not limited to the configuration shown in the above-described embodiment of the present invention. For example, in the embodiment of the present invention, the tips Pa and Pb are formed by sharply sharpening one end of the head portion 11.
By attaching a metal needle-shaped probe main body separate from the main body 1 to the head section 11 and integrating the same, the first embodiment of the present invention is provided.
And a second contact probe. Further, in the embodiment of the present invention, as the link mechanism RM,
The example in which the head unit 11 and the fixed unit 10 are connected by the two connecting arms 12 and 13 has been described.
It is not limited to this. For example, the head portion 11 and the fixing portion 10 may be connected by three connecting arms, and an arc-shaped notch fulcrum may be formed at the connecting portion. Furthermore, in the embodiment of the present invention, an example in which the arc-shaped notch fulcrum is used as the elastic deformation portion has been described, but a hyperbolic notch fulcrum or an elliptical notch fulcrum may be used, and the shape thereof may be appropriately changed. can do.

In the embodiment of the present invention, the first and second contact probes according to the present invention are formed by punching a metal flat plate into a predetermined shape and then cutting the same. Not limited to, for example,
The first and second contact probes of the present invention may be formed by etching. Further, in the embodiment of the present invention, the example using the insulating film 4 has been described, but it goes without saying that an insulating paint or the like may be applied instead of the insulating film 4.

[0042]

As described above, according to the contact probe device of the first aspect, both contact probes are fixed to the base portion so as to urge the tip end sides of both contact probes in the facing direction. This makes it possible to position the tip of the probe body very easily, thereby reducing the manufacturing cost.
Further, when the probe body is brought into contact with the probing target body, both probe bodies come into contact with the probing target body with substantially the same biasing force due to the static frictional force of the contact surfaces that are biased. The contact resistance can be made uniform. Further, since the two probe bodies are biased against each other, it is possible to prevent the two probe bodies from being shaken in the opposite direction, so that the probe bodies can be brought into accurate contact with the probing target object. Can be made smaller.

According to the contact probe device of the second aspect, the contact probe device is formed in a narrow width by fixing both contact probes to the base portion so that the respective side surfaces are substantially parallel to each other. Therefore, a plurality of contact probe devices can be brought close to each other, and when used in a circuit board inspection device, it is possible to quickly and surely inspect a narrow-width printed pattern with a fine pitch. Can be.

Furthermore, according to the contact probe device of the third and fourth aspects, the link mechanism causes the tip of the head portion to linearly or approximately linearly move in the guide direction of the probe guide mechanism, so that the probe body is moved. The length of the contact mark can be minimized.

According to the contact probe device of the fifth aspect, since the elastically deforming portion is formed by the arc-shaped notch fulcrum, the manufacturing cost can be reduced and the degree of the notch can be appropriately changed. In addition, the elastic deformation amount of the link mechanism and the elastic force of the elastic deformation portion can be adjusted to an arbitrary size, thereby reliably preventing the contact probe from being damaged.

Further, according to the contact probe device of the sixth aspect, the wiring work between the contact probe device and the inspection mechanism is facilitated, so that the manufacturing cost of the inspection mechanism can be reduced.

[Brief description of the drawings]

FIG. 1 shows a parallel probe 1 according to an embodiment of the present invention.
It is an external appearance perspective view of.

FIG. 2 shows a parallel probe 1 according to an embodiment of the present invention.
FIG.

FIG. 3 is a top view at the time of probing of the parallel probes 1, 1 according to the embodiment of the present invention.

FIG. 4 is a parallel probe 1 according to the embodiment of the present invention.
FIG. 4 is an exploded perspective view of FIG.

FIG. 5 is a parallel probe 1 according to the embodiment of the present invention.
7A and 7B are diagrams when the tips Pa and Pb in FIG. 7 are positioned above the print pattern X, wherein FIG. 9A is a side view of the parallel probe 1 and FIG.

FIG. 6 shows a parallel probe 1 according to an embodiment of the present invention.
3A is a diagram when the tips Pa and Pb are biased toward the print pattern X side, wherein FIG. 3A is a side view of the parallel probe 1 and FIG. 3B is a front view of the parallel probe 1.

FIG. 7 shows probes 2a and 2b according to the embodiment of the present invention.
FIG. 4 is an explanatory diagram for illustrating the operation of FIG.

FIG. 8 is an external perspective view of a conventional parallel probe 31.

FIG. 9 is a perspective view of a part of a base 33 and a probe 32a in a conventional parallel probe 31.

FIG. 10 is a top view of a conventional parallel probe 31.

FIG. 11 shows a tip P of a conventional parallel probe 31;
FIGS. 7A and 7B are diagrams when a and Pb are positioned above a print pattern X, where FIG. 7A is a side view of a parallel probe 31 and FIG.

FIG. 12 shows a tip P of a conventional parallel probe 31;
FIGS. 4A and 4B are diagrams when a and Pb are urged toward the print pattern X side, wherein FIG. 4A is a side view of the parallel probe 31 and FIG.

FIG. 13 is an explanatory diagram showing the operation of probes 32a and 32b in a conventional parallel probe 31.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Parallel probe 2a probe 2b probe 3 Base part 4 Insulating film 10 Fixed part 11 Head part 12 Connecting arm 13 Connecting arm 14-17 Supporting point Pa Tip Pb Tip RM Link mechanism X Print pattern X1 Print pattern X2 Print pattern

Claims (6)

[Claims] 1. A base for mounting to a probe guide mechanism, and a probe main body having a base end fixed to the base and being brought into contact with an object to be probed in accordance with the guide of the probe guide mechanism. In a contact probe device comprising a first contact probe and a second contact probe which are respectively disposed in a state of being insulated from each other on the distal end side, each of the contact probes has its distal end side disposed A contact probe device, wherein the contact probe devices are fixed to the base portions so as to urge each other in opposite directions. 2. The contact probe device according to claim 1, wherein said both contact probes are fixed to said base portion such that respective side surfaces thereof are substantially parallel to each other. 3. The contact probe according to claim 1, wherein the contact probe includes a fixing portion serving as the base end for fixing to the base portion, a head portion on which the probe body is disposed, and the head portion with respect to the fixing portion. A link mechanism having a connecting portion for connecting the probe body up and down, wherein the linking mechanism is configured such that the fixed portion is connected to the probe guiding mechanism while a tip of the probe body is in contact with the probing target body. When the probe is further moved in the guide direction, the elastic deformation of the connecting portion allows a linear motion or an approximate linear motion of the distal end portion of the probe body in a direction opposite to the guide direction with respect to the fixed portion. 2. The method according to claim 1, wherein
Or the contact probe device according to 2. 4. The connecting section is provided with two connecting arms for connecting the fixed section and the head section via elastically deforming sections formed at both ends of the connecting section. The contact probe device according to claim 3, wherein 5. The arc-shaped notch fulcrum according to claim 4, wherein the elastically deforming portion is formed by arcuately notching a fulcrum of a part of a connecting portion of each of the connecting arms. Contact probe device. 6. The head section and the probe main body are integrally formed of metal, and the contact probes urge at least a part of the side face of the head section in the facing direction via an insulator. 4. The apparatus according to claim 3, wherein the base is fixed to the base.
6. The contact probe device according to any one of claims 1 to 5.