JP2019135493A - Probe unit, probe unit manufacturing method and inspection method - Google Patents

Abstract

To achieve weight reduction.SOLUTION: The probe unit comprises: a probe pin 2; and a support part 3 for supporting the probe pin 2, therein the support part 3 includes: band-shaped arms 11, 12 disposed in a state of being isolated from and opposed to each other; a holding part 13 for holding respective base end parts (21a, 22a) of the respective arms 11, 12; and a probe pin 2 functioning as a connection part for connecting respective top end parts (21b, 22b) of the respective arms 11, 12, and a quadric link mechanism allowing linear motion or approximate linear motion of the probe pin 2 is configured, and the respective arms 11, 12 are formed with through-holes (H1a, H1b, H2a, H2b) at sites on the top end part sides slightly from the base end parts, and at sites on the base end part sides slightly from the top end parts, and intermediate sites 21c, 22c of the respective through-holes function as respective links configuring the quadric link mechanism, and formation sites (P1a, P1b, P2a, P2b) of the respective through-holes function as joints configuring the quadric link mechanism.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a probe unit including a probe pin and a support portion that supports the probe pin, and a probe unit manufacturing method for manufacturing the probe unit.

  As this type of probe unit, a probe disclosed by the applicant in Patent Document 1 below is known. This probe includes a probe main body and a fixture. The fixture includes a probe fixing portion that fixes the probe main body, an attachment portion that is attached to the probe guide mechanism, and a pair of connecting arms that connect the probe fixing portion and the attachment portion. In this case, a fulcrum in which the connecting arm is cut out in an arc shape in the thickness direction (vertical direction) is formed at the connecting portion with the mounting portion and the connecting portion with the probe fixing portion in each connecting arm. This probe has a four-bar rotation mechanism that allows linear or approximate linear movement of the probe pin in the direction opposite to the direction of probing due to the probe fixing part, mounting part, connecting arm and each fulcrum in the fixture. Composed. For this reason, in this probe, when the mounting part further descends from the state in which the tip of the probe body is in contact with the surface to be probed, contact marks are generated due to the tip of the probe body moving on the surface to be probed. It is possible to keep it low.

Japanese Patent No. 4717144 (page 5-6, Fig. 1)

  However, the above-described conventional probe has the following problems to be improved. That is, in this probe, the fulcrum is formed by notching each connecting arm in the thickness direction. In this case, in order for the notched portion to function as a fulcrum, it is necessary to sufficiently lower the rigidity of the notched portion than the other portions. For this purpose, the notched portion and the other portion (not notched) It is necessary to make the thickness different from that of the portion. For this reason, in the conventional probe, it is necessary to increase the thickness of the connecting arm (thickness of the notched portion) to some extent. On the other hand, at the time of probing, a dent is generated on the contact target due to the contact between the tip of the probe body and the contact target. In this case, the larger the mass of the entire probe, the larger the dent. For this reason, in order to make a dent small, it is necessary to make the mass of the whole probe small. However, in the conventional probe, as described above, since it is necessary to increase the thickness of the connecting arm to some extent, it is difficult to reduce the weight, and improvement of this point is desired.

  This invention is made | formed in view of this subject, and it aims at providing the probe unit which can implement | achieve weight reduction, and a probe unit manufacturing method.

  In order to achieve the above object, the probe unit according to claim 1 is a probe unit comprising a probe pin and a support part for supporting the probe pin, wherein the support part is used for probing the probe pin. A belt-shaped first arm and second arm that are disposed in a state of being opposed to each other along the direction of the arm, a holding portion that holds each base end portion of each arm, and the probe pin can be attached. And a connecting portion for connecting the tip portions of the arms, and a four-bar linkage mechanism that allows linear movement or approximate linear movement of the probe pin in a direction opposite to the direction of the probing. Each arm has a through hole formed in a portion slightly closer to the distal end than the proximal end and in a portion slightly proximal to the distal end. The intermediate portion between the through-holes functions as each link constituting the four-bar linkage mechanism, and the formation portion of each through-hole functions as a joint constituting the four-bar linkage mechanism. It is configured.

  The probe unit according to claim 2 is the probe unit according to claim 1, wherein the arm has a width of an edge between the end in the width direction of the arm and the through-hole in the length direction of the arm. Is formed so as to become wider as the distance from the intermediate portion increases.

  The probe unit according to claim 3 is the probe unit according to claim 2, wherein the arm has the two edge portions that face each other across the through hole, and the length of the arm passes through the center in the width direction. It is formed so as to have a line-symmetric shape with a center line along the direction as a symmetry axis.

  The probe unit according to claim 4 is the probe unit according to any one of claims 1 to 3, wherein the probe pin is fixed to the tip portion of the first arm and the tip portion of the second arm. A probe pin is configured to function as the connecting portion.

  The probe unit according to claim 5 is the probe unit according to any one of claims 1 to 4, wherein each of the arms includes a rib formed at the intermediate portion along a length direction of the arm. Has been.

  The probe unit according to claim 6 is the probe unit according to any one of claims 1 to 5, wherein the probe unit includes a pair of the probe pins, the pair of the first arm and the second arm, and the holding unit includes: , Holding the base ends of the first arms in a state where the pair of first arms extend adjacent to each other, and each of the first arms in a state where the pair of second arms extend adjacent to each other. The base ends of the two arms are held.

  The probe unit according to claim 7 is the probe unit according to claim 6, wherein each first arm maintains a positional relationship when each base end portion of each first arm is held by the holding portion. In this state, after each first arm is integrally manufactured, the base end portion is held by the holding portion, and at least from the vicinity of the base end portion to the tip end portion in the first arm. The second arms are integrated with each second arm while maintaining the positional relationship when the base ends of the second arms are held by the holding portions. After the production, each base end portion is configured to be separated from at least the vicinity of the base end portion to the tip end portion of each second arm in a state in which each base end portion is held by the holding portion.

  The probe unit according to claim 8 is the probe unit according to claim 7, wherein each of the first arms has non-conductivity and is integrally formed with the base ends connected to each other. The respective base ends are held by the holding portion in a connected state, and the second arms have non-conductivity and are integrally manufactured with the base ends connected to each other. And the said base end part is hold | maintained by the said holding | maintenance part with the state connected.

  The probe unit according to claim 9 is the probe unit according to any one of claims 1 to 8, wherein a surface of the arm located on the probing target side among the arms is opposed to the probing target. A conductive shield plate is provided on the side through an insulator.

  The probe unit manufacturing method according to claim 10 is the probe unit manufacturing method for manufacturing the probe unit according to claim 6, wherein the base end portions of the pair of first arms are held by the holding portion. The first arms are integrally manufactured in a state where the positional relationship is maintained, and then the first arm is separated from at least the vicinity of the base end portion to the tip end portion of each first arm. After the two second arms are integrally manufactured while maintaining the positional relationship when the respective base end portions of the pair of second arms are held by the holding portion, The probe unit is manufactured by manufacturing each second arm by separating at least the vicinity of the base end portion to the tip end portion.

  The probe unit manufacturing method according to claim 11 is the probe unit manufacturing method according to claim 10, wherein the positional relationship is maintained when the respective base end portions of the pair of first arms are held by the holding portion. In the state where the base end portions of the first arms manufactured integrally with the holding portion are held by the holding portion, at least the vicinity of the base end portions of the first arms to the tip end portions are separated, In the state where each base end portion of each of the second arms manufactured integrally is held by the holding portion, the distance between at least the vicinity of the base end portion and the tip end portion of each second arm is separated. Produce a probe unit.

  The inspection method according to claim 12 is an inspection method for inspecting a substrate, wherein the probe pin of the probe unit according to any one of claims 1 to 9 is probed to the substrate as the probing target, and the probe The board is inspected based on electrical signals input / output via pins.

  In the probe unit according to claim 1, the through holes are respectively formed in a part of the belt-like first arm and the second arm that is slightly closer to the distal end than the proximal end and a part that is slightly proximal to the distal end. A four-bar link mechanism in which an intermediate portion between each through hole functions as each link and a formation portion of each through hole functions as a joint is configured by the support portion. In other words, in this probe unit, through-holes are formed in each belt-shaped arm, and the formation site of the through-hole is easily elastically deformed, so that the formation site functions as a joint. For this reason, according to this probe unit, each arm is sufficiently thin compared to the conventional configuration in which the arm is cut out in the thickness direction and the portion functions as a joint (a certain thickness is required for the arm). Since each arm can be reduced in weight sufficiently, the probe unit can be reduced in weight sufficiently. Therefore, according to this probe unit, it is possible to sufficiently suppress the dent generated on the probing target due to the contact of the probe pin with the probing target during probing.

  According to the probe unit of claim 2, the width of the edge portion between the end portion in the width direction of the arm and the through hole becomes wider as the distance from the intermediate portion increases along the length direction of the arm. Since the stress concentration generated in each edge portion during probing can be suppressed to a small value, damage to the edge portion due to the stress concentration can be reliably prevented.

  According to the probe unit of the third aspect, the arm is formed such that two edge portions facing each other with the through hole interposed therebetween have a line-symmetric shape with a center line passing through the center in the width direction of the arm as a symmetry axis. As a result, the stress generated at the two edges facing each other across the through-hole is axisymmetric with the center line as the axis of symmetry, so that the stress concentration at the edges can be further reduced, resulting in damage to each edge. Can be prevented more reliably.

  According to the probe unit of the fourth aspect, the probe unit is configured so that the probe pin functions as the connecting portion, so that the probe unit is compared with the configuration in which the connecting portion is provided as a separate member from the probe pin. Further, the weight can be reduced.

  According to the probe unit of the fifth aspect, since the arm is configured by including the rib formed at the intermediate portion of the arm along the length direction of the arm, the rigidity of the intermediate portion is reduced by the rib to the other portion. Since it can be higher than (particularly, the formation site of the through hole), the formation site of each through hole can be further easily elastically deformed. Therefore, according to this probe unit, it is possible to further reduce the dents generated in the probing target during probing.

  According to a sixth aspect of the present invention, the probe unit includes a pair of probe pins, a pair of first arms and a second arm, and a holding portion that holds each base end portion of the pair of first arms and a pair of first arms. Each base end of the second arm is held. That is, in this probe unit, the pair of probe pins is supported by the support portion. For this reason, according to this probe unit, this probe unit is suitably used in the measurement and inspection by the four-terminal method or the four-terminal pair method performed by probing two probe pins with respect to one probing site in the probing target. In addition, the dent caused by the probe pin hitting during probing can be suppressed sufficiently small.

  In the probe unit according to claim 7, each first arm and each first arm in a state in which the base end portions of the pair of first arms and the pair of second arms are held by the holding portion are maintained. After the two arms are integrally manufactured, each first arm and each second arm are configured by separating the vicinity from the proximal end portion to the distal end portion with each proximal end portion held by the holding portion. Yes. For this reason, according to this probe unit, the pair of first arms and the pair of second arms can be manufactured at the same time under the same manufacturing conditions (the same processing conditions using the same material or the same part of the same material). Thus, variations in dimensions such as dimensions and elastic modulus of each arm due to variations in materials and differences in conditions can be reduced. In addition, according to this probe unit, the first arm and the second arm can be held by the holding portion in a state where the positional relationship when the first arm and the second arm are integrally manufactured is maintained. Therefore, it is possible to reliably prevent the positional deviation between the first arms and the second arms when the first arm and the second arm are held by the holding portion. Therefore, according to this probe unit, accurate probing can be realized.

  Further, in the probe unit according to claim 8, each first arm and second arm are integrally formed in a state where the respective base end portions are connected to each other and have non-conductivity, and each base end portion Are held by the holding portion in a connected state. For this reason, according to this probe unit, each 1st arm and each 2nd arm can be hold | maintained to a holding | maintenance part at once, As a result, assembly efficiency can fully be improved.

  The probe unit according to claim 9 further includes a conductive shield plate disposed via an insulator on a surface side facing the probing target in an arm located on the probing target side during probing. As a result, the stray capacitance between the arm and the probing target can be sufficiently reduced, so that a drop in inspection accuracy due to the stray capacitance can be reliably prevented.

  According to the probe unit manufacturing method of claim 10, after the first arms are integrally manufactured while maintaining the positional relationship when the pair of first arms are held, the distal end from the vicinity of the proximal end portion From the vicinity of the base end after making both the first arm in a state where the first arm is made by separating the space between the two parts and maintaining the positional relationship when the pair of second arms are held By producing each second arm by separating the distance to the tip, the pair of first arms and the pair of second arms have the same production conditions (the same processing using the same material or the same part of the same material). Therefore, according to this probe unit manufacturing method, variations in dimensions such as dimensions and elastic modulus of each arm due to material variations and differences in conditions are minimized. The results can, it is possible to manufacture a probe unit capable of accurate probing.

  According to the probe unit manufacturing method of the eleventh aspect, the first arm and the second arm are held in a state where the positional relationship when the first arm and the second arm are integrally manufactured is maintained. Since the first arms and the second arms can be held by the holding portion, it is possible to reliably prevent the occurrence of positional deviation between the first arms and the second arms. . Therefore, according to this probe unit manufacturing method, a probe unit capable of more accurate probing can be manufactured.

  Further, according to the inspection method of claim 12, by probing the probe pin of the probe unit to a substrate as a probing target, and inspecting the substrate based on an electric signal input / output via the probe pin, A dent formed on the substrate due to the contact of the probe pin with the substrate during probing can be suppressed sufficiently small.

2 is a perspective view showing a configuration of a probe unit 1. FIG. 3 is a side view of the probe unit 1 in a state of being fixed to a moving mechanism 300. FIG. 2 is a plan view of the probe unit 1. FIG. 2 is a bottom view of the probe unit 1. FIG. FIG. 3 is a first explanatory diagram explaining the operation of the probe unit 1. FIG. 6 is a second explanatory diagram for explaining the operation of the probe unit 1. 2 is a perspective view showing a configuration of a probe unit 101. FIG. 6 is a first explanatory view illustrating a method for manufacturing the arm 111. FIG. 6 is a second explanatory diagram illustrating a method for manufacturing the arm 111. FIG. FIG. 10 is a first explanatory view illustrating a method for manufacturing the arm 112. FIG. 10 is a second explanatory view explaining the method for manufacturing the arm 112. 3 is a plan view showing a configuration of an arm 501. FIG. It is the XX sectional view taken on the line in FIG. FIG. 12 is a cross-sectional view showing another configuration example of the rib 511 in the arm 501. 3 is a plan view showing a configuration of an arm 502. FIG. It is the YY sectional view taken on the line in FIG. FIG. 10 is a cross-sectional view showing another configuration example of the rib 512 in the arm 502. It is a top view of probe unit 1A. It is a top view which shows the structure of through-hole H1Aa vicinity in the arm 11A. It is a top view which shows the structure of through-hole H1Ab vicinity in arm 11A. It is a bottom view of probe unit 1A. It is a top view which shows the structure of through-hole H2Aa vicinity in arm 12A. It is a top view which shows the structure of through-hole H2Ab vicinity in arm 12A. It is a side view of the probe unit 1B. 4 is a perspective view showing a configuration of a probe unit 601. FIG. FIG. 10 is a first explanatory view explaining the method for manufacturing the probe unit 601. FIG. 10 is a second explanatory view explaining the method for manufacturing the probe unit 601. FIG. 10 is a third explanatory view explaining the method for manufacturing the probe unit 601. FIG. 11 is a fourth explanatory view explaining the method for manufacturing the probe unit 601.

  Hereinafter, embodiments of a probe unit and a probe unit manufacturing method will be described with reference to the accompanying drawings.

  First, the configuration of the probe unit 1 shown in FIG. 1 as an example of the probe unit will be described. As shown in the figure, the probe unit 1 includes a probe pin 2 and a support portion 3.

  As shown in FIG. 1, the probe pin 2 is formed in a columnar shape with a sharp tip 2a. When the probe unit 1 is moved by the moving mechanism 300 (see FIG. 2), the probe pin 2 is probed (contacted) with the probing target (for example, the substrate 200 shown in FIG. 2).

  The support portion 3 is configured to be able to support the probe pin 2. Specifically, as shown in FIGS. 1 and 2, the support unit 3 includes an arm 11 (first arm), an arm 12 (second arm), and a holding unit 13.

  As shown in FIGS. 1 to 4, the arms 11 and 12 are each formed in a strip shape (long and thin plate shape). In this case, for example, the arms 11 and 12 are made of metal and have conductivity. The arms 11 and 12 are arranged in a state where the surfaces are opposed to each other along the probing direction (downward in FIG. 2) when probing the probe pin 2. In addition, the arms 11 and 12 are held at the base end portions 21 a and 22 a by the holding portion 13.

  As shown in FIGS. 2 to 4, a through hole H <b> 1 a is formed in a portion of the arm 11 that is slightly closer to the distal end portion 21 b than the proximal end portion 21 a, and a slightly proximal end portion than the distal end portion 21 b of the arm 11. A through hole H1b is formed in a portion on the 21a side. Further, a through hole H2a is formed in a portion of the arm 12 that is slightly closer to the distal end portion 22b than the proximal end portion 22a, and a through hole H2b is formed in a portion of the arm 11 that is slightly proximal to the proximal end portion 22b. Is formed. In the following description, when the through holes H1a, H1b, H2a, and H2b are not distinguished, they are also referred to as “through holes H”.

  Here, by forming the through holes H in the arms 11 and 12, the formation sites P1a, P1b, P2a, and P2b of the respective through holes H (see FIGS. 1 to 4; hereinafter referred to as “formation site P” when not distinguished) The rigidity of the other portions of the arms 11 and 12 is sufficiently lower than that of the other portions of the arms 11 and 12, which facilitates elastic deformation at each forming portion P.

  As shown in FIGS. 2 to 4, insertion holes 21 d and 22 d for inserting and fixing the base end portion 2 b of the probe pin 2 are formed in the distal end portions 21 b and 22 b of the arms 11 and 12, respectively. Has been.

  As shown in FIGS. 1 and 2, the holding unit 13 includes three holding members 31 to 33 and holds the base end portions 21 a and 22 a of the arms 11 and 12. In this case, as shown in FIG. 2, the holding unit 13 sandwiches the arm 11 between the holding members 31 and 32, sandwiches the arm 12 between the holding members 32 and 33, and attaches the fixing screw 34 to each holding member. The base end portions 21 a and 22 a of the arms 11 and 12 are held by being inserted into the insertion holes 32 and 33 and screwed into the screw holes of the holding member 31. The holding member 31 has a fixing hole 31 a for fixing the probe unit 1 to the moving mechanism 300.

  In the probe unit 1, as shown in FIG. 2, the proximal end 2 b side of the probe pin 2 is fixed to the distal ends 21 b and 22 b of the arms 11 and 12, and the distal ends 21 b and 22 b are secured by the probe pin 2. They are linked together. That is, the probe unit 1 is configured so that the probe pin 2 functions as a connecting portion. In this case, as a method of fixing the base end portion 2b side of the probe pin 2 to the distal end portions 21b and 22b of the arms 11 and 12, a method of bonding with a conductive adhesive, welding using brazing or laser, etc. Various methods such as a method and a method of press-fitting the base end portion 2b of the probe pin 2 into the insertion holes 21d and 22d of the arms 11 and 12 can be employed.

  Next, an example of the dimension of each component which comprises the probe unit 1 is demonstrated with reference to drawings. The probe pin 2 has a total length of 4 mm and a diameter of 0.2 mm. Further, as shown in FIG. 2, the probe pin 2 has a base end portion 2b inserted through insertion holes 21d and 22d formed in the tip portions 21b and 22b of the arms 11 and 12 in the support portion 3, respectively. In a state where the distance between the portion inserted through the hole 21d (the upper end portion in the figure) and the portion inserted through the insertion hole 21d of the arm 12 (the middle portion in the vertical direction in the drawing) is 2 mm. It is being fixed to each front-end | tip part 21b and 22b.

  The arm 11 of the support portion 3 has a total length of 12.7 mm, a width of 1 mm, and a thickness of 0.05 mm. Further, the arm 11 is defined to have a length of 6 mm at a portion projecting from the distal end portion (right end portion in FIG. 1) of the holding member 31 in the support portion 3. The through holes H1a and H1b of the arm 11 are each formed in a substantially rectangular shape with each side being 0.6 mm. In addition, the through hole H1a is formed at a position where the distance between the distal end portion of the holding member 31 and the edge portion located on the distal end side of the holding member 31 is 0.2 mm. Further, the through hole H1b has a distance between the insertion hole 21d (see FIG. 2) through which the probe pin 2 formed in the distal end portion 21b of the arm 11 is inserted and the edge portion located on the insertion hole 21d side is 0. It is formed at a position of 3 mm.

  The arm 12 of the support part 3 is formed with a total length of 13 mm, a width of 1 mm, and a thickness of 0.05 mm. In addition, the length of the portion of the arm 12 that protrudes from the distal end portion (right end portion in FIG. 1) of the holding member 33 in the support portion 3 is defined as 10 mm. The through holes H2a and H2b of the arm 12 are each formed in a substantially rectangular shape with each side being 0.6 mm. The through hole H2a is formed at a position where the distance between the tip of the holding member 33 and the edge located on the tip of the holding member 33 is 0.2 mm. Further, the through hole H2b has a distance between the insertion hole 22d (see FIG. 2) through which the probe pin 2 formed in the distal end portion 22b of the arm 12 is inserted and an edge portion positioned on the insertion hole 22d side of 0. It is formed at a position of 3 mm. In addition, the dimension of each above-mentioned component is an example, Comprising: It can change suitably.

  Here, in the probe unit 1, as described above, the arms 11 and 12 are easily elastically deformed at each formation site P of each through hole H. For this reason, in the probe unit 1, as shown in FIG. 5, in the state where the holding portion 13 is fixed to the moving mechanism 300, the probing direction is opposite to the tip portion 2 a of the probe pin 2 (in FIG. 5). When an upward force is applied, the intermediate portion 21c of the arm 11, the intermediate portion 22c of the arm 12, the distal end portions 21b and 22b of the arms 11 and 12, and the probe pin 2 are rotated (with each forming portion P as a fulcrum) Moving. As shown in FIG. 6, the rotating operation of each component of the probe unit 1 is such that the intermediate portions 21c and 22c function as links (nodes) and the forming portions P serve as joints (joints or fulcrums). This is the same as the rotating operation of the functioning four-bar linkage mechanism (four-bar rotation mechanism). That is, in this probe unit 1, a four-bar linkage mechanism is configured by the arms 11 and 12, the holding portion 13, and the probe pin 2 that functions as a connecting portion. Further, in this probe unit 1, when a force is applied to the probe pin 2 in the direction opposite to the probing direction (upward in the figure), as shown in the figure, the tip 2a of the probe pin 2 is The length of the arms 11 and 12 (intermediate portions 21c and 22c) and the interval between the arms 11 and 12 are defined so as to allow linear motion or approximate linear motion.

  Moreover, in this probe unit 1, the formation site P functions as a joint by forming the through-hole H in the belt-shaped arms 11 and 12 and making the formation site P of the through-hole H easily elastically deformed. I am letting. For this reason, in this probe unit 1, the arms 11 and 12 are sufficiently compared with the conventional configuration in which the arm is cut out in the thickness direction and the portion functions as a joint, that is, the arm requires a certain thickness. Since the arms 11 and 12 can be reduced in weight, the probe unit 1 can be reduced in weight accordingly.

  Next, an inspection method for inspecting a substrate 200 as an example of a probing target using the probe unit 1 and an operation of the probe unit 1 during probing will be described in detail with reference to the drawings.

  As shown in FIG. 2, the probe unit 1 has a fixing screw 301 inserted through a fixing hole 31 a formed in the holding member 31 of the holding unit 13, and the fixing screw 301 is inserted into the screw hole of the moving mechanism 300. Is fixed to the moving mechanism 300.

  When the probing instruction is given to the moving mechanism 300, the moving mechanism 300 moves the probe unit 1 above the substrate 200 as a probing target. Next, the moving mechanism 300 lowers (moves downward) the probe unit 1. Subsequently, as the probe unit 1 is lowered, the tip 2a of the probe pin 2 is brought into contact with the surface 201 of the substrate 200 as shown in FIG.

  Next, the moving mechanism 300 further lowers the probe unit 1 as shown in FIG. Accordingly, the tip 2a of the probe pin 2 presses the surface 201 of the substrate 200 downward. Further, a reaction force of the pressing force is applied upward to the distal end portion 2 a of the probe pin 2. At this time, as shown in the figure, with the forming portions P of the arms 11 and 12 as fulcrums, the intermediate portion 21c of the arm 11, the intermediate portion 22c of the arm 12, the tip portions 21b and 22b of the arms 11 and 12, and The probe pin 2 rotates by the same operation as the four-bar linkage mechanism. Specifically, the intermediate part 21c rotates counterclockwise (counterclockwise) in the figure with the formation part P1a as a fulcrum, and the intermediate part 22c rotates counterclockwise in the figure with the formation part P2a as a fulcrum. To do. Further, the tip portions 21b and 22b and the probe pin 2 connected by the probe pin 2 rotate clockwise (clockwise) in the drawing with the formation sites P1b and P2b as fulcrums.

  Subsequently, the moving mechanism 300 stops the descent when the probe unit 1 is lowered by a predetermined distance.

  In this case, in the probe unit 1, as described above, the lengths of the arms 11 and 12 and the arm 11 are set so that the distal end portion 2a of the probe pin 2 permits linear motion or approximate linear motion (see FIG. 6). , 12 are defined. For this reason, the state in which the probe pin 2 is located at the first contact position is maintained after the tip 2a of the probe pin 2 comes into contact with the surface 201 of the substrate 200 until the probe unit 1 stops descending. For this reason, in this probe unit 1, it is possible to reliably prevent the occurrence of scratches due to the tip 2 a of the probe pin 2 moving on the surface 201 of the substrate 200.

  Moreover, in this probe unit 1, as mentioned above, it is possible to reduce the weight of the probe unit 1 by thinning the arms 11 and 12 to sufficiently reduce the weight. For this reason, it is possible to sufficiently suppress a dent generated on the surface 201 of the substrate 200 due to the contact of the tip 2a of the probe pin 2 with the substrate 200 (probing target) during probing.

  Next, a substrate inspection apparatus (not shown) performs an inspection of the substrate 200 based on an electrical signal input / output via the probe pins 2.

  Subsequently, when the inspection is completed and the moving mechanism 300 is instructed to end probing, the moving mechanism 300 raises the probe unit 1 (holding unit 13). Along with this, the pressing of the probe pin 2 against the surface 201 of the substrate 200 is released, and the reaction force of the pressing force applied upward to the distal end portion 2a of the probe pin 2 is released. At this time, the intermediate portions 21c and 22c of the arms 11 and 12, the distal end portions 21b and 22b of the arms 11 and 12 and the probe pin 2 operate as a four-bar linkage mechanism, that is, the above-described probing direction. Are rotated in opposite directions to return from the state shown in FIG. 5 to the initial state shown in FIG.

  As described above, the probing and the probing release of the probe pin 2 of the probe unit 1 with respect to the substrate 200 are completed.

  Thus, in this probe unit 1, the through-holes H are respectively formed in a portion of the belt-like arms 11 and 12 that is slightly closer to the distal end portion 21b than the proximal end portion 21a and a portion that is slightly proximal to the distal end portion 21b. The four-part link mechanism in which the intermediate portions 21c and 22c between the through holes H are formed and function as links and the formation portions P of the through holes H function as joints is formed by the support portion 3. . That is, in this probe unit 1, the through-hole H is formed in the belt-like arms 11 and 12, and the formation site P of the through-hole H is made to be easily elastically deformed so that the formation site P functions as a joint. . For this reason, according to this probe unit 1, compared with the conventional structure which cuts out an arm in the thickness direction and makes the part function as a joint (a certain thickness is required for an arm), the arms 11 and 12 are sufficient. Therefore, the arms 11 and 12 can be sufficiently reduced in weight. As a result, the probe unit 1 can be sufficiently reduced in weight. Therefore, according to this probe unit 1, the dent which arises in the probing object by contact of the probe pin 2 with respect to the probing object (substrate 200) at the time of probing can be suppressed sufficiently small.

  Further, according to the probe unit 1, the probe unit 1 is configured so that the probe pin 2 functions as a connecting portion, so that the probe unit 1 is compared with a configuration in which a connecting portion separate from the probe pin 2 is provided. 1 can be further reduced in weight. For this reason, according to this probe unit 1, the dent which arises in a probing object by contact of the probe pin 2 with respect to the probing object (board | substrate 200) in the case of probing can further be suppressed.

  Further, in this inspection method, by inspecting the substrate 200 as a probing target using the probe unit 1 described above, the above-described effects of the probe unit 1, that is, the dents generated on the substrate 200 during probing are sufficient. The effect that it can be suppressed to a small value can be realized.

  Next, the configuration of the probe unit 101 shown in FIG. 7 as another example of the probe unit will be described. In the following description, the same components as those of the above-described probe unit 1 are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 7, the probe unit 101 includes a pair of probe pins 2 and a support portion 103. The support portion 103 includes a pair of arms 111 (first arm), a pair of arms 112 (second arm), and a holding portion 113. Each of the arms 111 and 112 is formed in a strip shape from metal, similarly to the arms 11 and 12 of the probe unit 1. Each arm 111 and 112 is formed with a through hole H in the same manner as the arms 11 and 12.

  As shown in FIG. 7, the holding unit 113 includes three holding members 131 to 133, and the arms 111 are adjacent and extend in parallel (arranged adjacent to one virtual plane). In the arrangement state, each arm 111 is held in the base end portion 121a, and each arm 112 is adjacent and extends in parallel (arrangement state arranged adjacent to one virtual plane). Each proximal end 122a of 112 is held. The holding member 131 is formed with a fixing hole 131 a for fixing the probe unit 101 to the moving mechanism 300.

  In the probe unit 101, the pair of probe pins 2 is supported by the support portion 103. For this reason, this probe unit 101 can be suitably used in the measurement and inspection by the four-terminal method or the four-terminal pair method performed by probing two probe pins 2 with respect to one probing part in the probing target. The probe unit 101 also has the same effect as the probe unit 1 described above, that is, the generation of scratches due to the movement of the probe pin 2 during probing, and the strike caused by the probe pin 2 being hit during probing. Suppression of traces can be realized. Also in the inspection method using the probe unit 101, the same effect as the inspection method using the probe unit 1 described above can be realized.

  Next, a probe unit manufacturing method for manufacturing the above-described probe unit 101 will be described focusing on a method for manufacturing the arms 111 and 112. When the arm 111 used in the probe unit 101 is manufactured, as shown in FIG. 8, first, an intermediate body 401 in which a pair of arms 111 are integrated is manufactured. As shown in the figure, the intermediate 401 maintains the positional relationship (see FIG. 7) when the base ends 121a of the pair of arms 111 are held by the holding portion 113, and the arms 111 A shape connected by the connecting portion 411 is formed. In this case, as a manufacturing method of the intermediate 401, a manufacturing method by electroforming, a method by pressing, a manufacturing method by cutting, or the like can be employed.

  Next, the connecting portion 411 of the intermediate body 401 (the arms 111 integrated with each other) is cut and separated at a location indicated by a broken line in FIG. 8, and then, as shown in FIG. 9, the arms 111 are separated. Thereby, a pair of arms 111 are produced.

  Further, when the arm 112 is manufactured, as illustrated in FIG. 10, an intermediate body 402 in which a pair of arms 112 is integrated is manufactured by a manufacturing method similar to the manufacturing method of the intermediate body 401. As shown in the figure, the intermediate body 402 maintains the positional relationship (see FIG. 7) when the base ends 122a of the pair of arms 112 are held by the holding portion 113, and the arms 112 A shape connected by the connecting portion 412 is formed.

  Subsequently, the connecting portion 412 of the intermediate body 402 (each integrated arm 112) is cut and separated at a broken line shown in FIG. 10, and then each arm 112 is separated as shown in FIG. Thereby, a pair of arms 112 are produced.

  Next, the base end portions 121 a and 122 a of the arms 111 and 112 are held by the holding portion 113. Subsequently, the probe pin 2 is fixed to the tip portions 121b and 122b of the arms 111 and 112, respectively. Thus, the probe unit 101 is manufactured.

  According to this manufacturing method, by manufacturing the arms 111 and 112 by the above manufacturing method, the pair of arms 111 can be manufactured under the same manufacturing conditions, and the pair of arms 112 can be manufactured under the same manufacturing conditions. Specifically, for example, when the arms 111 and 112 are produced by electroforming, each arm 111 and each arm 112 can be produced at the same time under the same electroforming conditions using the same electroforming material. When the arms 111 and 112 are manufactured by pressing or cutting, each arm 111 and each arm 112 are manufactured at the same time under the same pressing conditions and the same cutting conditions using the same portion of the material to be processed (metal plate or metal block). can do. For this reason, according to this manufacturing method, variations in specifications such as dimensions and elastic modulus in the arms 111 and 112 due to material variations and differences in conditions can be suppressed, and accurate probing is possible. The probe unit 101 can be manufactured. Further, according to the inspection method using the probe unit 101, accurate probing can be performed.

  In the above example, after the intermediate bodies 401 and 402 (the integrated arms 111 and 112) are cut and separated into the pair of arms 111 and the pair of arms 112, the base ends of the arms 111 and 112 are separated. Although the probe unit 101 is manufactured by holding 121a and 122a on the holding unit 113, the probe unit 101 can also be manufactured as follows. First, after manufacturing the intermediate bodies 401 and 402, only the base end portions 121a and 122a side portions of the arms 111 and 112 in the intermediate bodies 401 and 402 are separated. Next, the base end portions 121a and 122a are attached to the holding portion 113 in this state (a state where the portions other than the base end portions 121a and 122a are connected and the arms 111 and 112 are respectively integrated). Hold. Next, in this state, the space between the vicinity of the base ends 121a and 122a of the intermediate bodies 401 and 402 to the tips 121b and 122b is separated. That is, at this time, the arms 111 and 112 are separated from the base ends 121a and 122a to the tips 121b and 122b. In the probe unit 101 manufactured in this way, each arm 111 and each arm 112 is held by the holding unit 113 while maintaining the positional relationship between each arm 111 and each arm 112 when the intermediate bodies 401 and 402 are formed. Therefore, it is possible to reliably prevent the occurrence of positional deviation between the arms 111 and the arms 112 when the arms 111 and the arms 112 are held by the holding portion 113. For this reason, according to this manufacturing method, the probe unit 101 capable of more accurate probing can be manufactured. Further, according to the inspection method using the probe unit 101, more accurate probing can be performed.

  The probe unit, the probe unit manufacturing method, and the inspection method are not limited to the above configuration and method. For example, instead of the arms 11 and 12 (arms 111 and 112), a configuration and a method using the arms 501 and 502 shown in FIGS. As shown in FIG. 12, the arm 501 (first arm) includes ribs 511 formed along the length direction of the arm 501 at intermediate portions 521 c between the through holes H. In this case, as an example, the ribs 511 are formed in a semi-cylindrical shape (semi-elliptical cylindrical shape) having a diameter of 0.3 mm protruding upward as shown in FIG. Further, as an example, the arm 501 has a width of 1 mm, and the rib 511 is formed at the center in the width direction of the arm 501 as shown in FIG. Therefore, each length from the both ends of the rib 511 in the width direction to both edges in the width direction of the arm 501 is 0.35 mm. In addition, as shown in FIG. 14, the rib 511 can also be formed in the cross-sectional shape of a semicylindrical shape (semi-elliptical prism shape).

  Further, as shown in FIG. 15, the arm 502 (second arm) includes a rib 512 formed along the length direction of the arm 502 at an intermediate portion 522 c between the through holes H. . In this case, as an example, as shown in FIG. 16, the rib 512 is formed in a semi-cylindrical shape (semi-elliptical cylindrical shape) with a cross-sectional shape protruding upwards, like the rib 511 of the arm 501. Has been. Further, as an example, the arm 502 has a width of 1 mm, and the rib 512 is formed at the center in the width direction of the arm 502 as shown in FIG. Therefore, each length from the both ends of the rib 512 in the width direction to both edges in the width direction of the arm 502 is 0.35 mm. In addition, as shown in FIG. 17, the rib 512 can also be formed in the cross-sectional shape of a semi-cylindrical shape (semi-elliptical column shape). According to this configuration, the ribs 511 and 512 formed in the intermediate portions 521c and 522c can increase the rigidity of the intermediate portions 521c and 522c more than other portions (particularly, the formation portion P of the through hole H). Each formation site P in which the through hole H is formed can be further easily elastically deformed. Therefore, according to this configuration, it is possible to further reduce the dents generated in the probing target during probing.

  Further, the probe pin 2 is directly fixed to the distal end portions 21b and 22b (leading end portions 121b and 122b) of the arms 11 and 12 (arms 111 and 112), that is, the base end portion 2b side of the probe pin 2 is used as a connecting portion. Although the configuration example to function is described above, it is formed separately from the probe pin 2 and is formed so that the probe pin 2 can be attached (detached) to connect the tip portions 21b and 22b (tip portions 121b and 122b). It is also possible to adopt a configuration provided with a section.

  Moreover, the probe unit 1A shown in FIG. 18 can be employed. In the following description, the same components as those of the above-described probe units 1 and 101 are denoted by the same reference numerals, and redundant description is omitted.

  In this probe unit 1A, as shown in FIGS. 18 to 20, the side end portions 21Ae and 21Af (end portions in the width direction) of the arm 11A constituting the support portion 3A and the base end portion 21Aa in the arm 11A are slightly more than. The width W of the edge portions E1a and E1b between the through hole H1Aa formed at the tip 21Ab side portion is separated from the intermediate portion 21Ac along the length direction of the arm 11A (the left-right direction in each figure). In accordance with (approaching the base end portion 21Aa). Specifically, in the probe unit 1A, as an example, the width W at the portion closest to the intermediate portion 21Ac in the edge portions E1a and E1b is 0.1 mm, and the portion that is the farthest from the intermediate portion 21Ac in the edge portions E1a and E1b. The width W is formed to be 0.15 mm. In this case, the edges E1a and E1b (two edges facing each other across the through hole H1Aa) are symmetrical with respect to the center line 21Ag along the length direction passing through the center in the width direction of the arm 11A. It is formed to become.

  Further, in the probe unit 1A, as shown in FIGS. 18 to 20, the side end portions 21Ae and 21Af of the arm 11A and the proximal end portion 21Aa side of the distal end portion 21Ab of the arm 11A are formed. The width W of the edge portions E1c and E1d between the through hole H1Ab is formed so as to increase as the distance from the intermediate portion 21Ac increases (as the tip portion 21Ab approaches) along the length direction of the arm 11A. Specifically, in this probe unit 1A, as an example, the width W of the portion closest to the intermediate portion 21Ac in the edge portions E1c and E1d is 0.1 mm, and the portion that is the most spaced from the intermediate portion 21Ac in the edge portions E1c and E1d The width W is formed to be 0.15 mm. In this case, the edges E1c and E1d (two edges facing each other across the through hole H1Ab) are formed to have a line-symmetric shape with the center line 21Ag of the arm 11A as the axis of symmetry.

  Similarly, in this probe unit 1A, as shown in FIGS. 21 to 23, side end portions 22Ae and 22Af (end portions in the width direction) of the arm 12A constituting the support portion 3A and a base end portion of the arm 12A. The width W of the edge portions E2a and E2b between the through hole H2Aa formed in the portion on the tip end 22Ab side slightly from 22Aa is an intermediate portion along the length direction of the arm 12A (the left-right direction in each figure) It forms so that it may become wide as it leaves | separates from 22Ac (as approaching base end part 22Aa). Specifically, in this probe unit 1A, as an example, the width W of the portion closest to the intermediate portion 22Ac in the edge portions E2a and E2b is 0.1 mm, and the portion that is farthest from the intermediate portion 22Ac in the edge portions E2a and E2b. The width W is formed to be 0.15 mm. In this case, the edges E2a and E2b (two edges facing each other across the through hole H2Aa) are symmetrical with respect to the center line 22Ag along the length direction passing through the center in the width direction of the arm 12A. It is formed to become.

  Further, in this probe unit 1A, as shown in FIGS. 21 to 23, the side end portions 22Ae and 22Af of the arm 12A and the proximal end portion 22Aa side of the distal end portion 22Ab of the arm 12A are formed. Distinguish between edges E2c and E2d (hereinafter referred to as edges E1a to E1d and E2a to E2d) between through holes H2Ab (hereinafter also referred to as “through holes H” when the through holes H1Aa, H1Ab, H2Aa, and H2Ab are not distinguished) When not, the width W of the “edge portion E”) is formed so as to increase as the distance from the intermediate portion 22Ac increases (as the tip portion 22Ab approaches) along the length direction of the arm 12A. Specifically, in the probe unit 1A, as an example, the width W at the portion closest to the intermediate portion 22Ac in the edge portions E2c and E2d is 0.1 mm, and the portion that is the farthest from the intermediate portion 22Ac in the edge portions E2c and E2d The width W is formed to be 0.15 mm. In this case, the edges E2c and E2d (two edges facing each other across the through hole H2Ab) are formed to have a line-symmetric shape with the center line 22Ag of the arm 12A as the axis of symmetry.

  In this probe unit 1A, as shown in FIGS. 18 to 23, the shape of each through hole H is substantially trapezoidal so that the width W and shape of each edge E satisfy the above-described conditions. 12A is formed.

  In this probe unit 1A, since the arms 11A and 12A are formed so that the width W of each edge E becomes wider as the distance from the intermediate portions 21Ac and 22Ac increases, the concentration of stress generated in each edge E during probing Can be kept small. Specifically, in a beam-like member such as the arms 11A and 12A, when the cross-sectional shape and area are constant at any position in the length direction of the arms 11A and 12A, the stress generated during probing is As the distance from the intermediate portions 21Ac, 22Ac increases (the closer to the proximal end portions 21Aa, 22Aa on the proximal end portions 21Aa, 22Aa side, the closer to the distal end portions 21Ab, 22Ab side, the closer to the distal end portions 21Ab, 22Ab). For this reason, in the configuration in which the width W of each edge E is constant, the stress generated in each edge E increases as the distance from the intermediate portions 21Ac and 22Ac increases, and the stress is applied to the portion farthest from the intermediate portions 21Ac and 22Ac. Concentrate. On the other hand, in this probe unit 1A, the arms 11A and 12A are formed so that the width W of each edge E becomes wider as the distance from the intermediate portions 21Ac and 22Ac increases. Concentration can be kept small. For this reason, according to this probe unit 1A and the inspection method using this probe unit 1A, it is possible to reliably prevent breakage of each edge E due to stress concentration.

  Further, in this probe unit 1A, the arms 11A, 12A are arranged so that the two edge portions E facing each other through the through holes H have a line-symmetric shape with the center lines 21Ag, 22Ag of the arms 11A, 12A as symmetry axes. Therefore, the stress distribution generated at the two edge portions E facing each other with the through holes H interposed therebetween is line symmetric with respect to the center lines 21Ag and 22Ag. That is, the stress distribution generated in the two edge portions E facing each other with the through holes H interposed therebetween is uniform in the vertical direction in FIGS. For this reason, according to this probe unit 1A and the inspection method using this probe unit 1A, the stress concentration at each edge E can be further reduced, and as a result, damage to each edge E can be prevented more reliably. can do

  Moreover, the probe unit 1B shown in FIG. 24 can also be employed. In the following description, the same components as those of the above-described probe units 1, 101, 1A are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 24, the probe unit 1B includes an insulating sheet 41 and a shield plate 42 in addition to the components included in the probe unit 1 described above. The insulating sheet 41 is an example of an insulator, and is formed into a sheet shape with a non-conductive (insulating) material such as a resin. The shield plate 42 is formed in a thin plate shape with a conductive metal such as copper or aluminum. As shown in the figure, the shield plate 42 is a surface of the arms 11 and 12 that faces the substrate 200 in the arm 12 positioned on the substrate 200 side as a probing target during probing (the lower surface in the drawing: Hereinafter, it is disposed on the side (also referred to as “opposing surface”) via the insulating sheet 41 (insulated with respect to the arm 12), and is fixed to the holding portion 13 (holding members 31 and 32) by the fixing screw 35. It is fixed. Further, the shield plate 42 is connected to, for example, a ground potential (reference potential) via a wiring not shown.

  In this case, in the configuration without the shield plate 42, the arm 12 is made of metal, so that the stray capacitance between the arm 12 and the probing target may be increased, and the inspection accuracy is reduced by this stray capacitance. There is a risk. On the other hand, according to the probe unit 1B, the stray capacitance between the arm 12 and the probing target can be sufficiently reduced by providing the shield plate 42 on the opposite surface side of the arm 12. For this reason, according to this probe unit 1B and the inspection method using this probe unit 1B, the fall of the test | inspection precision by stray capacitance can be prevented reliably. Even if the fixing screw 35 used for fixing the shield plate 42 is made of metal, since the shield plate 42 and the fixing screw 35 are electrically connected, the stray capacitance generated by the fixing screw 35 is also canceled. Can do. Further, since the shield plate 42 is formed in a thin plate shape, a sufficient clearance between the arm 12 and the probing target during probing can be ensured, so that a situation in which probing is hindered can be avoided.

  Moreover, although the example using the arms 11 and 12 (arms 111 and 112) formed of metal has been described above, a configuration using resin arms (first arm and second arm) formed by injection molding or the like is adopted. You can also. In this case, when a resin arm is used, a conductive film (conductive layer) is formed on the whole or a part of the surface of the arm, so that the conductive property is established between the probe pin 2 and the holding part 13 (holding part 113). A configuration in which electrical connection is made through a film can also be adopted. In addition, when a resin arm is used in a probe unit having a pair of probe pins 2 as in the above-described probe unit 101, a pair of integrally manufactured arms (a pair of arms 111 in the probe unit 101 and a pair of arms) When separating the arms 112), only the portion from the vicinity of the proximal end portion to the distal end portion of each arm is separated and held by the holding portion while the respective proximal end portions are connected to each other (in each arm An example of a configuration that separates at least the vicinity of the proximal end portion to the distal end portion may also be employed. As a specific example employing this configuration, a probe unit 601 shown in FIG. 25 will be described below. In addition, about the same component as the above-mentioned probe unit 1,101,1A, 1B, the same code | symbol is attached | subjected and the overlapping description is abbreviate | omitted.

  The probe unit 601 includes a pair of probe pins 2 and a support portion 603 as shown in FIG. The support portion 603 includes a pair of arms 611 (first arm), a pair of arms 612 (second arm), and a holding portion 613. As shown in FIG. 27, each arm 611 is manufactured integrally with each base end portion 621a being connected to each other by a non-conductive (insulating) material (integrated each arm 611). Is also held by the holding portion 613 while the base end portions 621a are connected as shown in FIG. In addition, each arm 611 is manufactured after the arms 611 are integrally manufactured (after the intermediate body 701 is manufactured) while maintaining the positional relationship when the base end portions 621a are held by the holding portions 613. In the state where the end portion 621a is held by the holding portion, the portion from the vicinity of the base end portion 621a to the tip end portion 621b is separated. In this case, in this probe unit 601, as shown in the figure, the positional relationship of each arm 611 when held by the holding unit 613 is such that each arm 611 is adjacent to one virtual plane and each arm 611 is The positional relationship becomes closer to each other as it goes from the base end 621a to the front end 621b. As shown in FIG. 27, the arm 611 is formed with a conductor pattern 641 for electrically connecting the probe pin 2 to a substrate inspection apparatus or the like not shown.

  As shown in FIG. 29, each arm 612 is integrally formed in a state where the base end portions 622a are connected to each other by a non-conductive material. 702 ”), as shown in FIG. 25, each base end portion 621a is held by the holding portion 613 while being connected. In addition, each arm 612 is similar to each arm 611, after both arms 612 are integrally manufactured (intermediate body 702) while maintaining the positional relationship when each base end portion 622 a is held by the holding portion 613. After the manufacturing process, a portion from the vicinity of the base end portion 622a to the tip end portion 622b is separated with each base end portion 622a being held by the holding portion. In this case, as shown in the figure, the positional relationship of each arm 612 when held by the holding portion 613 is such that each arm 612 is adjacent to one virtual plane and each arm 612 is distal to the proximal end portion 622a. The positions are closer to each other toward the portion 622b. As shown in FIG. 29, the arm 612 is formed with a conductor pattern 642 for electrically connecting the probe pin 2 to a substrate inspection apparatus or the like not shown.

  Next, a method for manufacturing the probe unit 601 will be described. First, as shown in FIG. 26, an intermediate 701 is manufactured using a non-conductive (insulating) material such as a resin. In the intermediate body 701, each arm 611 is connected by the connecting portions 631a and 631b in a state where the positional relationship (see FIG. 25) when the base end portions 621a of the pair of arms 611 are held by the holding portion 613 is maintained. ing. As a manufacturing method of the intermediate body 701, a manufacturing method by injection molding, a manufacturing method by cutting, a manufacturing method using a 3D printer, or the like can be employed. Next, as shown in FIG. 27, a conductor pattern 641 is formed from the base end portion 621a to the tip end portion 621b of each arm 611 in the intermediate body 701.

  Subsequently, as illustrated in FIG. 28, an intermediate 702 is manufactured using a non-conductive material such as a resin by the same manufacturing method as the intermediate 701. In the intermediate body 702, each arm 611 is connected by the connecting portions 632a and 632b while maintaining the positional relationship (see FIG. 25) when the base end portions 622a of the pair of arms 612 are held by the holding portion 613. ing. Next, as shown in FIG. 29, a conductor pattern 642 is formed from the base end portion 622a to the tip end portion 622b of each arm 612 in the intermediate body 702.

  Next, the base end side (connecting portions 631 a and 632 a) of the intermediate bodies 701 and 702 is held by the holding portion 613. Subsequently, the connecting portions 631b and 632b on the distal end side of the intermediate bodies 701 and 702, that is, the distal end portions 621b and 622b side of the arms 611 and 612 are cut and separated at the broken lines shown in FIGS. Each arm 611, 612 is separated from the vicinity of the base ends 621a, 622a to the tips 621b, 622b. Thus, the probe unit 601 is manufactured.

  In the probe unit 601, as described above, the arms 611 and the arms 612 are integrally formed in a state where the base end portions 621a and base end portions 622a are connected to each other, and the base end portions 621a. They are held by the holding portion 613 while the base ends 622a are connected to each other. Therefore, according to this probe unit 601, each arm 611 and each arm 612 can be manufactured while maintaining the positional relationship between each arm 611 and each arm 612 when held by the holding unit 613, and the manufacturing is performed. Can be held (attached) to the holding portion 613 in a state where the positional relationship is reliably maintained. Therefore, according to the probe unit 601, the dimensions and elastic modulus of the arms 611 and the arms 612 due to material variations and manufacturing conditions when the arms 611 and 612 are manufactured. In addition, it is possible to reliably prevent the occurrence of misalignment between the arms 611 and the arms 612 when the arms 611 and the arms 612 are held by the holding portion 613. it can. As a result, according to the probe unit 601 and the inspection method using the probe unit 601, more accurate probing can be performed. Further, according to the probe unit 601, since the pair of arms 611 and the pair of arms 612 can be held by the holding portion 613 at once, the assembly efficiency of the probe unit 601 can be sufficiently improved.

1, 1A, 1B, 101, 601 Probe unit 2 Probe pin 3, 3A, 103, 603 Support part 11, 11A, 111, 501, 611 Arm 12, 12A, 112, 502, 612 Arm 13, 113, 613 Holding part 21a, 21Aa, 121a, 621a Base end portion 22a, 22Aa, 122a, 622a Base end portion 21b, 21Ab, 121b, 621b Tip end portion 22b, 22Ab, 122b, 622b Tip end portion 21c, 22c, 21Ac, 22Ac, 521c, 522c Intermediate Part 21Ae, 21Af, 22Ae, 22Af Side end 21Ag, 22Ag Center line 41 Insulating sheet 42 Shield plate 401, 402, 701, 702 Intermediate 411, 631a, 631b, 711 Connecting portion 412, 632a, 632b, 712 Connecting portion 11,512 ribs E1a~E1d, E2a~E2d edge H1a, H1b, H1Aa, H1Ab through holes H2a, H2b, H2Aa, H2Ab holes P1a, P1b, P2a, P2b formed part W width

The present invention relates to a probe unit including a probe pin and a support portion that supports the probe pin, a probe unit manufacturing method for manufacturing the probe unit , and an inspection method for inspecting a substrate using the probe unit .

The present invention has been made in view of the above problems , and has as its main object to provide a probe unit that can realize weight reduction , a probe unit manufacturing method , and an inspection method that can realize the effects of the probe unit. To do.

In order to achieve the above object, the probe unit according to claim 1 is a probe unit including a probe pin and a support portion that supports the probe pin, and the support portion causes the probe pin to be probed to a probing target . First and second arms in the form of strips that are spaced apart from each other along the direction of probing at the time and that each main surface is orthogonal to the direction of probing, and each of the arms A holding portion that holds the base end portion, and a connecting portion that is configured to be attachable to the probe pin and that connects the distal end portions of the arms, and that is in a direction opposite to the direction of the probing. Consists of a four-bar linkage mechanism that allows linear movement or approximate linear movement of the probe pin, and each of the arms is slightly more distal than the proximal end Through-holes are formed in the part on the base end side slightly from the part and the tip part, and the intermediate part between the through-holes functions as each link constituting the four-bar linkage mechanism, Each of the through-hole formation portions functions as a joint constituting the four-bar linkage mechanism.

The probe unit according to claim 7, the holding in the probe unit according to claim 6, wherein each of the first arm, the front Symbol holder in a state where each other the respective proximal ends has a non-conductive is connected are, each second arm is held by the front Symbol holder in the a non-conductive state in which the respective base end portions are connected.

The probe unit according to claim 8, wherein, in the probe unit according to any of claims 1 to 7, facing the probing target in arm positioned in the probing target side during the probing of said each arm A conductive shield plate is provided on the surface side via an insulator.

The probe unit manufacturing method according to claim 9 is a probe unit manufacturing method for manufacturing the probe unit according to claim 6, wherein the base end portions of the pair of first arms are held by the holding portion. The first arms are integrally manufactured in a state where the positional relationship is maintained, and then the first arm is separated from at least the vicinity of the base end portion to the tip end portion of each first arm. After the two second arms are integrally manufactured while maintaining the positional relationship when the respective base end portions of the pair of second arms are held by the holding portion, The probe unit is manufactured by manufacturing each second arm by separating at least the vicinity of the base end portion to the tip end portion.

The probe unit manufacturing method according to claim 10 is the probe unit manufacturing method according to claim 9 , wherein the positional relationship when the respective base end portions of the pair of first arms are held by the holding portion is maintained. Then, in a state where the base end portions of the integrally manufactured first arms are held by the holding portion, the space from at least the vicinity of the base end portion to the tip end portion of each first arm is separated. In the state where the base end portions of the second arms manufactured integrally are held by the holding portion, the distance from at least the vicinity of the base end portion to the tip end portion of the second arms is separated. The probe unit is manufactured.

The inspection method according to claim 11 is an inspection method for inspecting a substrate, wherein the probe pin of the probe unit according to any one of claims 1 to 8 is probed to the substrate as the probing target, and the probe The board is inspected based on electrical signals input / output via pins.

Further, the probe unit according to claim 7, each of the first arm and the second arm is held by the hold unit in a state where the base end portions with a non-conductive is connected. For this reason, according to this probe unit, each 1st arm and each 2nd arm can be hold | maintained to a holding | maintenance part at once, As a result, assembly efficiency can fully be improved.

The probe unit according to claim 8 further includes a conductive shield plate disposed via an insulator on a surface side facing the probing target in an arm located on the probing target side during probing. As a result, the stray capacitance between the arm and the probing target can be sufficiently reduced, so that a drop in inspection accuracy due to the stray capacitance can be reliably prevented.

According to the probe unit manufacturing method of claim 9 , after the first arms are integrally manufactured while maintaining the positional relationship when the pair of first arms are held, the distal end from the vicinity of the proximal end portion From the vicinity of the base end after making both the first arm in a state where the first arm is made by separating the space between the two parts and maintaining the positional relationship when the pair of second arms are held By producing each second arm by separating the distance to the tip, the pair of first arms and the pair of second arms have the same production conditions (the same processing using the same material or the same part of the same material). Each of them can be manufactured at a time under the conditions) . For this reason, according to this probe unit manufacturing method, it is possible to suppress variations in specifications such as dimensions and elastic modulus in each arm due to variations in material and differences in conditions . In addition, according to the probe unit manufactured by this probe unit manufacturing method, the first arm and the second arm are maintained in the state where the positional relationship when the first arm and the second arm are integrally manufactured is maintained. Since the holding portion can hold the first arm and the second arm, the first arm and the second arm can be reliably prevented from being displaced when the first arm and the second arm are held by the holding portion. Can do. Therefore, according to this probe unit manufacturing method, a probe unit capable of accurate probing can be manufactured.

According to the probe unit manufacturing method of claim 10 , each first arm and each second arm are held in a state where the positional relationship when each first arm and each second arm are integrally manufactured is maintained. Since the first arms and the second arms can be held by the holding portion, it is possible to reliably prevent the occurrence of positional deviation between the first arms and the second arms. . Therefore, according to this probe unit manufacturing method, a probe unit capable of more accurate probing can be manufactured.

Further, according to the inspection method of claim 11, by probing the probe pin of the probe unit to the substrate as a probing target, and inspecting the substrate based on an electric signal input / output through the probe pin, A dent formed on the substrate due to the contact of the probe pin with the substrate during probing can be suppressed sufficiently small.

Hereinafter, embodiments of a probe unit , a probe unit manufacturing method, and an inspection method will be described with reference to the accompanying drawings.

As shown in FIGS. 2 to 4, a through hole H <b> 1 a is formed in a portion of the arm 11 that is slightly closer to the distal end portion 21 b than the proximal end portion 21 a, so A through hole H1b is formed in a portion on the 21a side. Further, at a portion slightly distal portion 22b side of the base end portion 22a of the arm 12, through holes H2a are formed, at a portion slightly of the base end portion 22a side of the distal end portion 22b of the arm 1 2, through-holes H2b is formed. In the following description, when the through holes H1a, H1b, H2a, and H2b are not distinguished, they are also referred to as “through holes H”.

Further, in this probe unit 1A, the arms 11A, 12A are arranged so that the two edge portions E facing each other through the through holes H have a line-symmetric shape with the center lines 21Ag, 22Ag of the arms 11A, 12A as symmetry axes. Therefore, the stress distribution generated at the two edge portions E facing each other with the through holes H interposed therebetween is line symmetric with respect to the center lines 21Ag and 22Ag. That is, the stress distribution generated in the two edge portions E facing each other with the through holes H interposed therebetween is uniform in the vertical direction in FIGS. For this reason, according to this probe unit 1A and the inspection method using this probe unit 1A, the stress concentration at each edge E can be further reduced, and as a result, damage to each edge E can be prevented more reliably. it can be.

As shown in FIG. 29, each arm 612 is integrally formed in a state where the base end portions 622a are connected to each other by a non-conductive material. also referred to as 702 "), as shown in FIG. 25, are held by the left holder 613 in a state where the base end portion 622 a is connected. In addition, each arm 612 is similar to each arm 611, after both arms 612 are integrally manufactured (intermediate body 702) while maintaining the positional relationship when each base end portion 622 a is held by the holding portion 613. After the manufacturing process, a portion from the vicinity of the base end portion 622a to the tip end portion 622b is separated with each base end portion 622a being held by the holding portion. In this case, as shown in the figure, the positional relationship of each arm 612 when held by the holding portion 613 is such that each arm 612 is adjacent to one virtual plane and each arm 612 is distal to the proximal end portion 622a. The positions are closer to each other toward the portion 622b. As shown in FIG. 29, the arm 612 is formed with a conductor pattern 642 for electrically connecting the probe pin 2 to a substrate inspection apparatus or the like not shown.

Claims (12)

A probe unit comprising a probe pin and a support part for supporting the probe pin,
The support unit includes strip-shaped first and second arms arranged in a state of being opposed to each other along a probing direction when probing the probe pin to be probed, and each base of each arm. The probe in a direction opposite to the direction of the probing, comprising: a holding portion that holds an end portion; and a connecting portion that is configured to be attachable to the probe pin and connects the tip portions of the arms. Configure a four-bar linkage that allows linear or approximate linear movement of the pin,
Each of the arms has a through hole formed in a portion slightly closer to the distal end than the base end and a portion closer to the proximal end than the distal end, and an intermediate portion between the through holes. Functions as each link constituting the four-bar link mechanism, and the probe unit is configured such that the formation portion of each through-hole functions as a joint constituting the four-bar link mechanism.   The arm is formed such that the width of the edge between the end in the width direction of the arm and the through hole becomes wider as the arm is separated from the intermediate portion along the length direction of the arm. The probe unit according to claim 1.   The arm has a line-symmetric shape in which two edges facing each other across the through-hole have a center line along the length direction passing through the center in the width direction of the arm as a symmetry axis. The probe unit according to claim 2 formed.   The probe pin is fixed to the tip portion of the first arm and the tip portion of the second arm, and the probe pin functions as the connecting portion. The probe unit described.   5. The probe unit according to claim 1, wherein each arm includes a rib formed at the intermediate portion along a length direction of the arm. A pair of the probe pins and a pair of the first arm and the second arm,
The holding portion holds the base end portions of the first arms with the pair of first arms extending adjacent to each other, and the pair of second arms extends adjacent to each other. The probe unit according to claim 1, wherein the base end portions of the second arms are held. Each of the first arms is manufactured by integrally manufacturing each of the first arms while maintaining a positional relationship when the base ends of the first arms are held by the holding unit. In the state where the end portion is held by the holding portion, the first arm is configured to be separated from at least the vicinity of the base end portion to the tip end portion,
Each of the second arms is manufactured by integrally manufacturing each of the second arms while maintaining a positional relationship when the base ends of the second arms are held by the holding unit. The probe unit according to claim 6, wherein the probe unit is configured to separate at least the vicinity of the base end portion to the tip end portion of each second arm in a state where the end portion is held by the holding portion. Each of the first arms is non-conductive and is integrally manufactured in a state where the base ends are connected to each other, and is held by the holding portion while the base ends are connected. ,
Each of the second arms has non-conductivity and is integrally manufactured in a state where the base ends are connected to each other, and is held by the holding portion while the base ends are connected. The probe unit according to claim 7.   A conductive shield plate is provided on an arm located on the probing target side of each of the arms, on a surface side facing the probing target, with an insulator interposed therebetween. The probe unit according to any one of 1 to 8. A probe unit manufacturing method for manufacturing the probe unit according to claim 6,
After the first arms are integrally manufactured while maintaining the positional relationship when the base end portions of the pair of first arms are held by the holding portion, at least the bases in the first arms are formed. Each of the first arms is manufactured by separating between the vicinity of the end and the tip.
After the two second arms are integrally manufactured while maintaining the positional relationship when the base end portions of the pair of second arms are held by the holding portion, at least the bases in the second arms are formed. A probe unit manufacturing method for manufacturing the probe unit by manufacturing each second arm by separating the vicinity from the end to the tip. The base end portions of the first arms, which are integrally manufactured, are held by the holding portion while maintaining the positional relationship when the base end portions of the pair of first arms are held by the holding portion. In the state of being allowed to separate at least between the vicinity of the base end portion to the tip end portion in each first arm,
In the state where each base end portion of each of the second arms manufactured integrally is held by the holding portion, the distance between at least the vicinity of the base end portion and the tip end portion of each second arm is separated. The probe unit manufacturing method according to claim 10, wherein the probe unit is manufactured. An inspection method for inspecting a substrate,
10. An inspection method in which the probe pin of the probe unit according to claim 1 is probed on the substrate as the probing target, and the substrate is inspected based on an electric signal input / output via the probe pin. .

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