KR102207791B1 - Probe unit, method of manufacturing probe unit and method of inspecting - Google Patents

Abstract

In order to realize weight reduction, a probe pin 2 and a support portion 3 for supporting the probe pin 2 are provided, and the support portion 3 is a band-shaped arm 11 arranged in a state of being spaced apart from each other and facing each other. , 12), the holding portion 13 holding the base end portions 21a, 22a of each arm 11, 12, and the connecting portion connecting the tip portions 21b, 22b of each arm 11, 12 A four-fold link mechanism is provided that has a functioning probe pin 2 and allows direct or approximate linear movement of the probe pin 2, and each of the arms 11 and 12 has a portion on the tip side slightly than the base end, and Through-holes (H1a, H1b, H2a, H2b) are formed in a portion on the base end side slightly than the tip portion, and intermediate portions 21c, 22c between each through-hole function as each link constituting a four-fold link mechanism. In addition, each through hole formation portion (P1a, P1b, P2a, P2b) is configured to function as a joint constituting a four-fold link mechanism.

Description

A probe unit, a method of manufacturing a probe unit, and an inspection method {PROBE UNIT, METHOD OF MANUFACTURING PROBE UNIT AND METHOD OF INSPECTING}

The present invention relates to a probe unit having a probe pin and a support portion for supporting the probe pin, a probe unit manufacturing method for manufacturing the probe unit, and an inspection method for inspecting a substrate using the probe unit.

As this type of probe unit, a probe disclosed by the applicant in the following Patent Document 1 is known. This probe is provided with a probe main body and a fixture. The fixture includes a probe fixing portion for fixing the probe body, an attachment portion for attaching to the probe guide mechanism, and a pair of connecting arms connecting the probe fixing portion and the attachment portion. In this case, a point where the connecting arm is cut in an arc shape in the thickness direction (up-down direction) is formed at the connecting point with the attachment portion and the connecting portion with the probe fixing portion in each of the connecting arms. In this probe, a four-fold rotation mechanism that allows direct or approximate linear movement of the probe pin in a direction opposite to the direction of probing is configured by the probe fixing part, the attachment part, the connecting arm and each point in the fixture. . For this reason, in this probe, when the attachment portion is further lowered from the state in which the tip of the probe body is in contact with the surface of the probe object, the occurrence of contact marks due to the movement of the tip of the probe body on the surface of the probe body is suppressed to a small extent. It becomes possible.

Japanese Patent No. 4717144 (Page 5-6, Fig. 1)

However, the conventional probe described above has the following problems to be improved. That is, in this probe, a point is formed by cutting each connecting arm in the thickness direction. In this case, in order to function as a point, it is necessary to sufficiently lower the stiffness of the notched portion compared to other portions, and for this purpose, it is necessary to make the thickness of the notched portion and other portions (not cutout) clearly different. have. For this reason, in the conventional probe, it is necessary to increase the thickness of the connecting arm (thickness of the uncut portion) to some extent. On the other hand, during probing, dents are formed on the contact object due to the contact between the tip end of the probe body and the contact object. In this case, the larger the mass of the entire probe, the larger the dents are produced. For this reason, in order to make the dents small, it is necessary to reduce the mass of the entire probe. However, in the conventional probe, as described above, since it is necessary to increase the thickness of the connecting arm to some extent, it is difficult to reduce weight, and improvement in this point is required.

The present invention has been made in view of such a problem, and its main purpose is to provide a probe unit capable of reducing weight, a method of manufacturing a probe unit, and an inspection method capable of realizing the effects of the probe unit.

In order to achieve the above object, the probe unit of claim 1 is a probe unit including a probe pin and a support portion for supporting the probe pin, wherein the support portions are each other along a direction of probing when probing the probe pin. The first arm and the second arm in a strip shape arranged in a state of being spaced apart and facing each other, a holding part for holding each base end of each arm, and the probe pin are configured to be attachable, and each tip part of each arm A four-fold link mechanism is provided that includes a connecting portion to connect, and allows direct or approximate linear movement of the probe pin in a direction opposite to the direction of the probing, and each arm is a portion on the front end side slightly than the base end portion. And a through hole is formed in a portion on the base end side slightly than the tip end, and the intermediate portion between the through holes functions as each link constituting the section 4 link mechanism, and the formation portion of each through hole. Is configured to function as a joint constituting the above section 4 link mechanism.

The probe unit according to claim 2, in the probe unit according to claim 1, wherein the arm has a width of the edge portion between the end of the arm in the width direction and the through hole, along the length direction of the arm. It is formed to widen as it is separated from the middle part.

The probe unit according to claim 3, in the probe unit according to claim 2, wherein the arm has the two edge portions facing each other through the through hole, passing through the center of the arm in the width direction. It is formed so as to have a line-symmetric shape with the center line along the longitudinal direction as the axis of symmetry.

The probe unit of claim 4 is configured such that, in the probe unit of claim 1, the probe pin is fixed to the distal end of the first arm and the distal end of the second arm so that the probe pin functions as the connection part. have.

The probe unit of claim 5 is configured such that, in the probe unit of claim 2, the probe pin is fixed to the tip of the first arm and the tip of the second arm so that the probe pin functions as the connection part. have.

The probe unit of claim 6 is configured such that, in the probe unit of claim 3, the probe pin is fixed to the distal end of the first arm and the distal end of the second arm so that the probe pin functions as the connection part. have.

The probe unit according to claim 7 is a probe unit according to claim 1, wherein each of the arms includes a rib formed in the intermediate portion along the length direction of the arm.

The probe unit according to claim 8, in the probe unit according to claim 1, includes a pair of probe pins, and includes a pair of the first arm and the second arm, respectively, and the holding portion includes the pair of second arms. The proximal end portions of each of the first arms are maintained with the first arm extending adjacently, and the proximal end portions of the respective second arms are maintained with the pair of second arms extending adjacently.

The probe unit according to claim 9, in the probe unit according to claim 8, wherein each of the first arms maintains a positional relationship when the proximal end portions of the respective first arms are held by the holding unit. After the respective first arms are integrally fabricated, the respective first arms are configured by separating a distance from at least the vicinity of the proximal end to the distal end in the respective first arm in a state held by the holding unit, Each of the second arms is, after the respective second arms are integrally manufactured while maintaining the positional relationship when the respective proximal ends of the respective second arms are held by the holding unit, the respective proximal ends are In the state held by the holding part, it is comprised by separating between at least the vicinity of the said base end part to the said tip part in the said 2nd arm.

The probe unit of claim 10, in the probe unit of claim 9, wherein each of the first arms has non-conductive properties and is integrally manufactured in a state in which the base ends are connected, and the respective base ends are maintained in a connected state. It is held by a part, and each of the second arms has non-conductive properties and is integrally manufactured in a state in which the base ends are connected, and is held by the holding part while the base ends are connected.

The probe unit according to claim 11, in the probe unit according to claim 1, has conductivity provided through an insulator on the side of the arm located on the probing target side during the probing, on a surface side opposite to the probing target. It is equipped with a shield plate.

The probe unit manufacturing method of claim 12 is a probe unit manufacturing method for manufacturing the probe unit of claim 8, wherein the positional relationship when the proximal ends of the pair of first arms are held by the holding unit is maintained. In the state, after the first arms are integrally fabricated, each first arm is manufactured by separating the distance from at least the vicinity of the base end to the distal end of each of the first arms, and the pair of second arms After the second arms are integrally fabricated while maintaining the positional relationship when the respective base ends of the arms are held by the holding unit, the distal ends of the respective second arms are at least in the vicinity of the base ends. By separating the gaps up to, each second arm is manufactured to manufacture the probe unit.

A method for manufacturing a probe unit as described in claim 13, in the method for manufacturing a probe unit as described in claim 12, wherein the unity is in a state in which the positional relationship when the base ends of the pair of first arms are held by the holding unit is maintained. While holding the base end portions of each of the first arms manufactured with the holding portion, separate the distance between at least the vicinity of the base end portion and the tip end portion of the respective first arms, and the integrally manufactured each agent 2 The probe unit is manufactured by separating the distance from at least the vicinity of the proximal end to the distal end of each second arm in a state in which the proximal end portions of the arms are held in the holding unit.

The inspection method described in claim 14 is an inspection method for inspecting a substrate, wherein the probe pin of the probe unit according to any one of claims 1 to 11 is probed to the substrate as the probing target, and input/output is performed through the probe pin. The board is inspected based on the electrical signal.

In the probe unit as described in claim 1, through holes are formed in a portion on the side of the proximal end slightly more than the proximal end of the band-shaped first arm and the second arm, and in a portion on the proximal end side slightly than the distal end, respectively, and the middle between each through-hole. A four-fold link mechanism in which the portion functions as each link and the portion where each through hole is formed functions as a joint is constituted by the support portion. In other words, in this probe unit, through holes are formed in each arm of the strip shape, and the formation portion of the through hole is easily elastically deformed, so that the formed portion functions as a joint. For this reason, according to this probe unit, compared with the conventional configuration in which the arm is cut in the thickness direction and the portion functions as a joint (a certain amount of thickness is required for the arm), each arm can be sufficiently thinned. As a result of being able to sufficiently lighten the arm, it is possible to sufficiently lighten the probe unit. Therefore, according to this probe unit, it is possible to suppress sufficiently small dents generated on the probing object due to the contact of the probe pin with the probing object during probing.

According to the probe unit described in claim 2, the arm is formed so that the width of the edge portion between the end portion in the width direction of the arm and the through hole becomes wider as it is separated from the middle portion along the length direction of the arm. Since the concentration of stress generated at the edge portion can be suppressed to a small extent, damage of the edge portion due to concentration of stress can be reliably prevented.

According to the probe unit as described in claim 3, by forming an arm in a shape of line symmetry with the center line passing through the center in the width direction of the arm as the axis of symmetry, the two edge portions facing each other with the through hole interposed therebetween, Since the stress generated at the two edge portions facing each other with the center line as the axis of symmetry becomes linearly symmetric, the concentration of the stress at the edge portion can be suppressed to a smaller extent, resulting in more reliably preventing damage to each edge portion can do.

In addition, according to the probe unit of claims 4 to 6, by configuring the probe unit to function as a connection part with the probe pin, compared to a configuration in which a connection part of a member separate from the probe pin is provided, the probe unit can be further reduced in weight. have.

In addition, according to the probe unit of claim 7, the arm is provided with a rib formed in the middle portion of the arm along the length direction of the arm, so that the rigidity of the intermediate portion is different by the rib (especially, the portion where the through hole is formed). ), it is possible to make it easier to elastically deform each through hole. Therefore, according to this probe unit, it is possible to further suppress the dents generated on the object to be probed during probing.

In addition, in the probe unit of claim 8, a pair of probe pins is provided, a pair of first arms and a second arm are provided, and the holding portion holds each base end portion of the pair of first arms, and a pair of Maintain each proximal end of the second arm. That is, in this probe unit, a pair of probe pins is supported by the support portion. For this reason, according to this probe unit, this probe unit can be suitably used for measurement and inspection by the four-terminal method or the four-terminal pair method in which two probe pins are probed for one probing site in the probing target. In addition, it is possible to suppress sufficiently small dents caused by hitting the probe pin during probing.

Further, in the probe unit according to claim 9, each first arm and each second arm are integrated with each other while maintaining the positional relationship when each base end portion of the pair of first arms and the pair of second arms is held by the holding unit. After fabrication, each first arm and each second arm are configured by separating the distance from the vicinity of the base end to the distal end in a state held by the holding part. For this reason, according to this probe unit, since a pair of first arms and a pair of second arms can be manufactured at the same time under the same manufacturing conditions (material of the same material or the same processing conditions using the same portion of the same material), Variations in specifications such as dimensions and modulus of elasticity in each arm due to variations or differences in conditions can be suppressed to a small extent. In addition, according to this probe unit, each first arm and each second arm can be held in the holding portion while maintaining the positional relationship when each first arm and each second arm are integrally manufactured. When each first arm and each second arm are held in the holding portion, it is possible to reliably prevent the occurrence of positional shift of the respective first arms and the respective second arms. Therefore, according to this probe unit, accurate probing can be realized.

In addition, in the probe unit of claim 10, each of the first arm and the second arm is non-conductive and is manufactured integrally with each of the proximal ends connected, and is held by the holding unit while the proximal ends are connected. . For this reason, according to this probe unit, as a result of holding each of the first arms and each of the second arms at once in the holding portion, the assembly efficiency can be sufficiently improved.

Further, according to the probe unit of claim 11, by providing a conductive shield plate provided through an insulator on the side of the arm located on the probing target side, which faces the probing target during probing, the gap between the arm and the probing target is provided. Since the floating capacity of can be sufficiently reduced, it is possible to reliably prevent a decrease in inspection accuracy due to the floating capacity.

In addition, according to the probe unit manufacturing method described in claim 12, after the first arms are integrally manufactured while maintaining the positional relationship when the pair of first arms are held, the distance from the vicinity of the proximal end to the distal end is separated. Each first arm is manufactured by making the second arm, and after the two second arms are integrally manufactured while maintaining the positional relationship when the pair of second arms are held, the distance from the vicinity of the base end to the distal end is separated. By fabricating the arms, it is possible to fabricate a pair of first arms and a pair of second arms at one time, respectively, under the same production conditions (material of the same material or the same processing conditions using the same portion of the same material). For this reason, according to this probe unit manufacturing method, it is possible to reduce variations in specifications such as dimensions and elastic modulus in each arm due to variations in material or conditions, thereby manufacturing a probe unit capable of accurate probing. I can.

In addition, according to the method for manufacturing the probe unit as described in claim 13, each first arm and each second arm are held in the holding unit while maintaining the positional relationship when each first arm and each second arm are integrally manufactured. Since it can be held, it is possible to reliably prevent the occurrence of positional displacement of each of the first arms and each of the second arms when holding each of the first arms and each of the second arms in the holding portion. Therefore, according to this probe unit manufacturing method, a probe unit capable of more accurate probing can be manufactured.

In addition, according to the inspection method described in claim 14, the probe pin of the probe unit is probed to a substrate as a probing target, and the substrate is inspected based on an electrical signal input/output through the probe pin. It is possible to suppress sufficiently small dents generated on the substrate due to the contact of the pins.

1 is a perspective view showing a configuration of a probe unit 1.
2 is a side view of the probe unit 1 fixed to the moving mechanism 300.
3 is a plan view of the probe unit 1.
4 is a bottom view of the probe unit 1.
5 is a first explanatory diagram for explaining the operation of the probe unit 1.
6 is a second explanatory diagram illustrating the operation of the probe unit 1.
7 is a perspective view showing the configuration of the probe unit 101.
8 is a first explanatory diagram illustrating a method of manufacturing the arm 111.
9 is a second explanatory diagram illustrating a method of manufacturing the arm 111.
10 is a first explanatory diagram illustrating a method of manufacturing the arm 112.
11 is a second explanatory view illustrating a method of manufacturing the arm 112.
12 is a plan view showing the configuration of the arm 501.
13 is a cross-sectional view taken along the line X-X in FIG. 12.
14 is a cross-sectional view showing another example of the configuration of the rib 511 in the arm 501.
15 is a plan view showing the configuration of the arm 502.
16 is a cross-sectional view taken along the line Y-Y in FIG. 15.
17 is a cross-sectional view showing another example of the configuration of the rib 512 in the arm 502.
18 is a plan view of the probe unit 1A.
Fig. 19 is a plan view showing a configuration in the vicinity of the through hole H1Aa in the arm 11A.
Fig. 20 is a plan view showing a configuration in the vicinity of the through hole H1Ab in the arm 11A.
21 is a bottom view of the probe unit 1A.
22 is a plan view showing a configuration in the vicinity of the through hole H2Aa in the arm 12A.
Fig. 23 is a plan view showing the configuration of the arm 12A in the vicinity of the through hole H2Ab.
24 is a side view of the probe unit 1B.
25 is a perspective view showing the configuration of the probe unit 601.
26 is a first explanatory diagram illustrating a method of manufacturing the probe unit 601.
27 is a second explanatory diagram illustrating a method of manufacturing the probe unit 601.
28 is a third explanatory diagram illustrating a method of manufacturing the probe unit 601.
29 is a fourth explanatory diagram illustrating a method of manufacturing the probe unit 601.

Hereinafter, an embodiment of a probe unit, a probe unit manufacturing method, and an inspection method will be described with reference to the accompanying drawings.

First, the configuration of the probe unit 1 shown in Fig. 1 as an example of the probe unit will be described. As shown in the figure, the probe unit 1 is configured with a probe pin 2 and a support portion 3.

As for the probe pin 2, as shown in FIG. 1, the tip 2a is formed in a sharp columnar shape. When the probe unit 1 is moved by the movement mechanism 300 (refer to FIG. 2), the probe pin 2 is attached to the probing target (for example, the substrate 200 shown in the drawing) with a tip 2a. Is probed (contacted).

The support part 3 is comprised so that the probe pin 2 can be supported. Specifically, as shown in Figs. 1 and 2, the support portion 3 is configured with an arm 11 (first arm), an arm 12 (second arm), and a holding portion 13 .

The arms 11 and 12 are formed in a strip shape (a long thin plate shape), respectively, as shown in Figs. 1 to 4. In this case, the arms 11 and 12 are formed of metal, as an example, and have conductivity. In addition, the arms 11 and 12 are spaced apart from each other along the probing direction (downward in Fig. 2) when probing the probe pin 2, and are arranged in a state in which the respective surfaces face each other. In addition, the arms 11 and 12 hold the base ends 21a and 22a by the holding portion 13.

In addition, as shown in Figs. 2 to 4, a through hole H1a is formed in a portion of the arm 11 on the side of the tip end 21b slightly than the base end 21a, and the through hole H1a is formed in the arm 11 A through hole H1b is formed in a site slightly closer to the base end 21a than the distal end 21b. In addition, a through hole H2a is formed in a portion of the arm 12 on the side of the tip portion 22b a little more than the base portion 22a, and a base end portion 22a slightly than the tip portion 22b of the arm 12 A through hole H2b is formed in the side portion. In addition, in the following description, when each through hole (H1a, H1b, H2a, H2b) is not distinguished, it is also referred to as "through hole H".

Here, by forming the through hole H in the arms 11 and 12, the formation sites P1a, P1b, P2a, P2b of each through hole H (see Figs. 1 to 4): Hereinafter, when not distinguishing The rigidity of the "formation site P") is sufficiently lowered than the rigidity of the other sites in the arms 11 and 12, and accordingly, elastic deformation easily occurs in each of the forming sites P.

In addition, as shown in Figs. 2 to 4, insertion holes 21d for inserting and fixing the proximal end 2b of the probe pin 2 into each of the distal ends 21b and 22b of the arms 11 and 12, 22d) are formed respectively.

As shown in Figs. 1 and 2, the holding portion 13 is constituted by three holding members 31 to 33, and holds the base end portions 21a and 22a of the arms 11 and 12. In this case, as shown in FIG. 2, the holding part 13 inserts the arm 11 between the holding members 31 and 32, and the arm 12 is inserted between the holding members 32 and 33. The base end portions 21a and 22a of each arm 11 and 12 are inserted by inserting and inserting the fixing screw 34 into the insertion hole of each holding member 32 and 33 and screwing it into the screw hole of the holding member 31. ). Further, the holding member 31 is formed with a fixing hole 31a for fixing the probe unit 1 to the moving mechanism 300.

In this probe unit 1, as shown in FIG. 2, the proximal end 2b side of the probe pin 2 is fixed to the respective distal ends 21b, 22b of each arm 11, 12, and the probe pin Each of the distal ends 21b and 22b is connected by (2). That is, in this probe unit 1, the probe pin 2 is configured to function as a connecting portion. In this case, as a method of fixing the proximal end 2b side of the probe pin 2 to the distal ends 21b and 22b of each arm 11, 12, a method of bonding with a conductive adhesive, soldering or welding using a laser. Various methods such as a method of performing a method and a method of pressing the proximal end portion 2b of the probe pin 2 into the insertion holes 21d and 22d of the arms 11 and 12 can be adopted.

Next, an example of the dimensions of each component constituting the probe unit 1 will be described with reference to the drawings. The probe pin 2 has a total length of 4 mm and a diameter of 0.2 mm. In addition, as shown in FIG. 2, the probe pin 2 is in the insertion holes 21d and 22d respectively formed in the distal ends 21b and 22b of the arms 11 and 12 in the support part 3, respectively. The proximal end portion 2b is inserted, the portion inserted into the insertion hole 21d (the upper end in the drawing), and the portion inserted into the insertion hole 21d of the arm 12 (in the drawing It is fixed to each of the distal ends 21b and 22b in a state where the distance of the middle part in the vertical direction) becomes 2 mm.

The arm 11 of the support part 3 is formed to have a total length of 12.7 mm, a width of 1 mm, and a thickness of 0.05 mm. In addition, the length of the portion of the arm 11 extending from the distal end (right end in FIG. 1) of the holding member 31 in the support 3 is defined as 6 mm. Further, the through-holes H1a and H1b of the arm 11 are each formed in a substantially rectangular shape of 0.6 mm each side. Further, the through hole H1a is formed at a position such that the distance between the tip end of the holding member 31 and the edge portion located on the tip side of the holding member 31 is 0.2 mm. In addition, the through hole H1b is located on the side of the insertion hole 21d (see Fig. 2) and the insertion hole 21d through which the probe pin 2 formed in the tip portion 21b of the arm 11 is inserted. It is formed at a position where the distance between the edges is 0.3mm.

The arm 12 of the support part 3 is formed to have a total length of 13 mm, a width of 1 mm, and a thickness of 0.05 mm. In addition, the length of the portion of the arm 12 extending from the distal end (right end in FIG. 1) of the holding member 33 in the support portion 3 is defined as 10 mm. Further, the through-holes H2a and H2b of the arm 12 are each formed in a substantially rectangular shape with each side being 0.6 mm. Further, the through hole H2a is formed at a position where the distance between the tip end of the holding member 33 and the edge portion located on the tip side of the holding member 33 is 0.2 mm. In addition, the through hole H2b is located on the side of the insertion hole 22d (see Fig. 2) and the insertion hole 22d through which the probe pin 2 formed in the tip portion 22b of the arm 12 is inserted. It is formed at a position where the distance between the edges is 0.3mm. In addition, the dimensions of each of the above-described constituent elements are examples and can be appropriately changed.

Here, in this probe unit 1, as described above, the arms 11 and 12 are easily elastically deformed in each formation portion P of each through hole H. For this reason, in the probe unit 1, as shown in FIG. 5, in the state where the holding part 13 is fixed to the moving mechanism 300, the direction of probing with respect to the tip part 2a of the probe pin 2 and When a force is applied in the reverse direction (upward in the figure), each formation site P is used as a point, and the middle portion 21c of the arm 11, the middle portion 22c of the arm 12, Each of the distal ends 21b and 22b of the arms 11 and 12 and the probe pin 2 rotate (moves). In the rotational operation of each component of the probe unit 1, as shown in Fig. 6, the intermediate portions 21c and 22c function as links (knocks), and the respective formation portions P are joints. It is the same as the rotational motion of the four-fold link mechanism (four-fold rotation mechanism) functioning as a joint or point). That is, in this probe unit 1, a four-fold link mechanism is constituted by the arms 11 and 12, the holding portion 13, and the probe pin 2 functioning as a connecting portion. In addition, in this probe unit 1, when a force is applied to the probe pin 2 in a direction opposite to the probing direction (upward in the drawing), as shown in the drawing, the probe pin 2 The lengths of the arms 11 and 12 (the intermediate portions 21c and 22c, and the spacing between the arms 11 and 12 are defined so that the tip 2a of the is allowed to move linearly or approximate linearly.

Further, in this probe unit 1, the through hole H is formed in the arms 11 and 12 formed in a band shape, and the formation portion P of the through hole H is easily elastically deformed. The part P is functioning as a joint. For this reason, in this probe unit 1, compared with the conventional configuration in which the arm is cut in the thickness direction and the portion functions as a joint, that is, the arm 11, 12 As a result of being able to reduce the weight of the arms 11 and 12 since it can be sufficiently thinned, it becomes possible to reduce the weight of the probe unit 1 by that amount.

Next, using the probe unit 1, an inspection method for inspecting the substrate 200 as an example of an object to be probed, and an operation of the probe unit 1 during probing will be described in detail with reference to the drawings.

In this probe unit 1, as shown in FIG. 2, the fixing screw 301 is inserted into the fixing hole 31a formed in the holding member 31 of the holding portion 13, and the moving mechanism It is fixed to the moving mechanism 300 by screwing the fixing screw 301 into the screw hole of 300.

When a probing instruction is given to the moving mechanism 300, the moving mechanism 300 moves the probe unit 1 above the substrate 200 as a probing object. Next, the movement mechanism 300 moves the probe unit 1 down (moves downward). Subsequently, as the probe unit 1 descends, as shown in FIG. 2, the tip portion 2a of the probe pin 2 comes into contact with the surface 201 of the substrate 200.

Next, the moving mechanism 300 lowers the probe unit 1 further, as shown in FIG. 5. Accordingly, the tip portion 2a of the probe pin 2 presses the surface 201 of the substrate 200 downward. Further, the reaction force of the pressing force is applied upward to the tip portion 2a of the probe pin 2. At this time, as shown in the figure, with the formation portions P of the arms 11 and 12 as points, the middle portion 21c of the arm 11, the middle portion 22c of the arm 12, and Each of the distal ends 21b and 22b of the arms 11 and 12 and the probe pin 2 rotate in the same operation as the four-fold link mechanism. Specifically, the intermediate portion 21c rotates with the formation portion P1a as a point, and rotates in a left rotation (counterclockwise direction) in the figure, and the intermediate portion 22c is the formation portion P2a as a point. , Rotate by turning left in the drawing. Further, the tip portions 21b and 22b connected by the probe pin 2 and the probe pin 2 rotate in a right rotation (clockwise direction) in the same figure with the formation sites P1b and P2b as points.

Subsequently, the movement mechanism 300 stops the descending at the time when the probe unit 1 is descended by a predetermined distance.

In this case, in this probe unit 1, as described above, the length of the arms 11 and 12 so that the tip 2a of the probe pin 2 allows direct or approximate linear movement (see Fig. 6), The spacing of the arms 11 and 12 is defined. For this reason, between the tip 2a of the probe pin 2 coming into contact with the surface 201 of the substrate 200 until the descending of the probe unit 1 stops, the state located at the initial contact position is maintain. For this reason, in this probe unit 1, it becomes possible to reliably prevent the occurrence of a wound by moving the tip portion 2a of the probe pin 2 on the surface 201 of the substrate 200.

Further, in this probe unit 1, as described above, by making the arms 11 and 12 thinner and sufficiently lightweight, it becomes possible to reduce the weight of the probe unit 1. For this reason, it becomes possible to sufficiently suppress the dents generated on the surface 201 of the substrate 200 by contacting the tip portion 2a of the probe pin 2 with the substrate 200 (probing target) during probing. .

Next, a substrate inspection apparatus other than the drawing performs inspection of the substrate 200 based on an electrical signal input/output through the probe pin 2.

Subsequently, when the inspection is finished and an instruction to terminate probing is given to the moving mechanism 300, the moving mechanism 300 raises the probe unit 1 (holding portion 13). Accordingly, the pressure of the probe pin 2 against the surface 201 of the substrate 200 is released, and the reaction force of the pressing force applied upward to the tip portion 2a of the probe pin 2 is released. At this time, the intermediate portions 21c and 22c of the arms 11 and 12, the tip portions 21b and 22b of the arms 11 and 12, and the probe pin 2 operate as a four-fold link mechanism, that is, It rotates in a direction opposite to the above-described probing direction, and returns to the initial state shown in FIG. 2 from the state shown in FIG. 5.

As a result, probing and de-probing of the probe pin 2 of the probe unit 1 with respect to the substrate 200 are ended.

As described above, in this probe unit 1, a portion on the side of the proximal end portion 21b slightly than the proximal end portion 21a of the band-shaped arms 11 and 12, and a portion on the side of the proximal end portion 21a slightly than the distal end portion 21b. Each through-hole (H) is formed in, and the intermediate portions (21c, 22c) between each through-hole (H) function as each link, and each formed portion (P) of each through-hole (H) is A four-fold link mechanism functioning as a joint is constituted by the support portion 3. That is, in this probe unit 1, the through hole H is formed in the band-shaped arms 11 and 12, and the formation site P of the through hole H is easily elastically deformed, so that the formed site (P) is functioning as a joint. For this reason, according to this probe unit 1, compared with the conventional configuration in which the arm is cut in the thickness direction and the portion functions as a joint (a certain amount of thickness is required for the arm), the arms 11 and 12 are Since the thickness can be sufficiently reduced, the arms 11 and 12 can be sufficiently reduced in weight, and the probe unit 1 can be sufficiently reduced in weight. Therefore, according to this probe unit 1, it is possible to suppress sufficiently small dents generated on the probing object due to the contact of the probe pin 2 with the probing object (substrate 200) during probing.

In addition, according to the probe unit 1, by configuring the probe unit 1 to function as a connecting portion, the probe pin 2 is compared with a configuration in which a connecting portion of a member separate from the probe pin 2 is provided. The unit 1 can be further reduced in weight. For this reason, according to this probe unit 1, dents generated on the probing object due to the contact of the probe pin 2 with the probing object (substrate 200) during probing can be further suppressed.

In addition, in this inspection method, by inspecting the substrate 200 as a probing object using the probe unit 1 described above, each of the effects of the probe unit 1, that is, a mark that occurs on the substrate 200 during probing. It is possible to realize the effect of being able to suppress sufficiently small.

Next, the configuration of the probe unit 101 shown in Fig. 7 as another example of the probe unit will be described. Incidentally, in the following description, the same components as those of the above-described probe unit 1 are denoted by the same reference numerals, and overlapping descriptions are omitted.

As shown in FIG. 7, the probe unit 101 includes a pair of probe pins 2 and a support part 103. The support part 103 is comprised with a pair of arms 111 (first arm), a pair of arms 112 (second arm), and a holding part 113. Each of the arms 111 and 112 is similar to the arms 11 and 12 of the probe unit 1 and is formed in a strip shape of metal, respectively. Further, in each of the arms 111 and 112, a through hole H is formed in the same manner as the arms 11 and 12.

As shown in FIG. 7, the holding part 113 is composed of three holding members 131 to 133, and each arm 111 is adjacent and extended in parallel (arranged adjacent to one virtual plane). In the disposition state), while maintaining the proximal end portion 121a of each arm 111, and in a state in which each arm 112 extends in parallel (adjacent to one virtual plane) Each base end 122a of the arm 112 is held. Further, in the holding member 131, a fixing hole 131a for fixing the probe unit 101 to the moving mechanism 300 is formed.

In this probe unit 101, a pair of probe pins 2 are supported by a support part 103. For this reason, this probe unit 101 can be used suitably for measurement or inspection by the four-terminal method or the four-terminal pair method in which two probe pins 2 are probed for one probing site in the probing target. I can. In addition, the probe unit 101 also has the same effect as the above-described probe unit 1, that is, prevention of the occurrence of wounds due to movement of the probe pin 2 during probing, and the probe pin 2 during probing. It is possible to realize suppression of dents caused by hitting of Further, also in the inspection method using the probe unit 101, the same effect as the inspection method using the probe unit 1 described above can be realized.

Next, a method of manufacturing the probe unit for manufacturing the above-described probe unit 101 will be described focusing on the method of manufacturing the arms 111 and 112. When manufacturing the arm 111 used for this probe unit 101, as shown in FIG. 8, first, the intermediate body 401 which integrated the pair of arms 111 is manufactured. As shown in the figure, the intermediate body 401 is in a state in which the positional relationship (refer to FIG. 7) when each base end portion 121a of the pair of arms 111 is held by the holding portion 113 is maintained. , Each arm 111 has a shape connected by a connecting portion 411. In this case, as a manufacturing method of the intermediate body 401, a manufacturing method by means of an electric mold, a method by pressing, a manufacturing method by shaving, and the like can be adopted.

Next, the connecting portion 411 of the intermediate body 401 (each arm 111 as a unit) is cut out at a point indicated by a broken line in Fig. 8, and then, as shown in Fig. 9, each arm Isolate (111). Accordingly, a pair of arms 111 is manufactured.

In addition, when manufacturing the arm 112, as shown in FIG. 10, the intermediate body 402 in which the pair of arms 112 were integrated is manufactured by the same manufacturing method as the manufacturing method of the intermediate body 401. As shown in the figure, the intermediate body 402 maintains the positional relationship (refer to FIG. 7) when each base end portion 122a of the pair of arms 112 is held by the holding portion 113. , Each arm 112 has a shape connected by a connecting portion 412.

Subsequently, the connecting portion 412 of the intermediate body 402 (each arm 112 as a unit) is cut out at a point of the broken line shown in Fig. 10, and then, as shown in Fig. 11, each arm 112 Separate Accordingly, a pair of arms 112 are manufactured.

Next, the proximal ends 121a and 122a of each of the arms 111 and 112 are held by the holding portions 113. Subsequently, the probe pin 2 is fixed to the distal ends 121b and 122b of each of the arms 111 and 112. The probe unit 101 is manufactured by the above.

According to this manufacturing method, by manufacturing the arms 111 and 112 by the above manufacturing method, the pair of arms 111 can be manufactured under the same manufacturing conditions, and the pair of arms 112 can be manufactured under the same manufacturing conditions. Specifically, for example, in the case of manufacturing the arms 111 and 112 by electroforming, each arm 111 and each arm 112 can be manufactured at once under the same electroforming conditions using the same electroforming material. For example, in the case of fabricating the arms 111 and 112 by pressing or shaving, each arm (with the same pressing conditions or the same cutting conditions) using the same portion of the material (metal plate or metal block) to be processed ( 111) and each arm 112 can each be manufactured at once. For this reason, according to this manufacturing method, as a result of reducing variations in specifications such as dimensions and elastic modulus in each arm 111, 112 due to variations in material or different conditions, a probe unit capable of accurate probing (101) can be manufactured. Moreover, according to the inspection method using this probe unit 101, accurate probing can be performed.

In addition, in the above example, the intermediate body 401, 402 (each arm 111, 112 as a unit) is cut and separated into a pair of arms 111 and a pair of arms 112, and then each arm 111 The probe unit 101 is manufactured by holding each of the base ends 121a and 122a of the, 112 on the holding unit 113, and the probe unit 101 may be manufactured as follows. First, after the intermediate bodies 401 and 402 are produced, only the portions of the intermediate bodies 401 and 402 on the sides of the base ends 121a and 122a of the arms 111 and 112 are separated. Next, while maintaining that state (a state in which parts other than the respective base end portions 121a and 122a are connected and each arm 111 and 112 are integrated, respectively), each base end portion 121a, 122a is held in a holding portion ( 113). Next, in that state, the space between the proximal end portions 121a and 122a of the intermediate bodies 401 and 402 to the distal end portions 121b and 122b is separated. That is, at this point, each of the arms 111 and 112 is separated from each of the base ends 121a and 122a to each of the tip ends 121b and 122b. In the probe unit 101 manufactured in this way, each arm 111 and each arm 111 and each arm 111 are in a state in which the positional relationship of each arm 111 and each arm 112 when the intermediate bodies 401 and 402 are formed is maintained. Since the arm 112 can be held in the holding part 113, each arm 111 and each arm 112 when holding each arm 111 and each arm 112 in the holding part 113 It is possible to reliably prevent the occurrence of misalignment. For this reason, according to this manufacturing method, the probe unit 101 capable of more accurate probing can be manufactured. Further, according to the inspection method using the probe unit 101, more accurate probing can be performed.

In addition, the probe unit, the probe unit manufacturing method, and the inspection method are not limited to the above configuration and method. For example, instead of the arms 11 and 12 (arms 111 and 112), a configuration and method using the arms 501 and 502 shown in Figs. 12 and 15, respectively, may be adopted. The arm 501 (first arm) is provided with a rib 511 formed along the length direction of the arm 501 at an intermediate portion 521c between each through hole H, as shown in FIG. Consists of. In this case, as an example, the rib 511 is formed in a semi-cylindrical shape (semi-elliptical cylindrical shape) whose cross-sectional shape protrudes upwardly and has a diameter of 0.3 mm, as shown in FIG. 13. In addition, as an example, the arm 501 is formed to have a width of 1 mm, and as shown in FIG. 12, the rib 511 is formed in the center portion of the arm 501 in the width direction. Therefore, each length from both ends of the rib 511 in the width direction to both edges of the arm 501 in the width direction is 0.35 mm. Further, as shown in Fig. 14, the rib 511 can also be formed in a semi-cylindrical (semi-elliptical) cross-sectional shape.

In addition, as shown in FIG. 15, the arm 502 (second arm) includes a rib 512 formed along the length direction of the arm 502 in the intermediate portion 522c between each through hole H. It is equipped and constructed. In this case, the rib 512 is, as an example, a semi-cylindrical (semi-elliptical cylindrical) shape having a diameter of 0.3 mm protruding upward, similar to the rib 511 of the arm 501, as shown in FIG. Is formed. In addition, as an example, the arm 502 is formed to have a width of 1 mm, and as shown in FIG. 15, the rib 512 is formed in the center portion of the arm 502 in the width direction. Therefore, each length from both ends of the rib 512 in the width direction to both edges of the arm 502 in the width direction is 0.35 mm. Further, as shown in Fig. 17, the rib 512 can also be formed in a semi-cylindrical (semi-elliptical) cross-sectional shape. According to this configuration, the rigidity of the intermediate portions 521c and 522c is different by the ribs 511 and 512 formed in the intermediate portions 521c and 522c (particularly, the formation portion P of the through hole H) Since it can be higher than that, each formation portion P in which each through hole H is formed can be more easily elastically deformed. Therefore, according to this configuration, it is possible to further reduce dents generated on the object to be probed during probing.

In addition, a configuration in which the probe pin 2 is directly fixed to the tip portions 21b, 22b (tip portions 121b, 122b) of the arms 11, 12 (arms 111, 112), that is, the probe pin 2 As described above for a configuration example in which the base end 2b side of the connector functions as a connection part, it is formed separately from the probe pin 2 and is formed so that the probe pin 2 can be attached (removed), and the distal ends 21b and 22b It is also possible to adopt a configuration including a connecting portion for connecting (tip portions 121b and 122b).

Moreover, the probe unit 1A shown in FIG. 18 can be adopted. In the following description, the same components as those of the above-described probe units 1 and 101 are denoted by the same reference numerals, and overlapping descriptions are omitted.

In this probe unit 1A, as shown in Figs. 18 to 20, the side end portions 21Ae and 21Af (ends in the width direction) of the arm 11A constituting the support part 3A, and the arm 11A. The width W of the edge portions E1a and E1b between the through-holes H1Aa formed in the portion on the side of the tip portion 21Ab slightly more than the base portion 21Aa in the length direction of the arm 11A (each It is formed so as to widen along the left-right direction in the figure) as it is spaced apart from the intermediate part 21Ac (as it approaches the base end part 21Aa). Specifically, in this probe unit 1A, as an example, the width W at the portion closest to the intermediate portion 21Ac in the edge portions E1a and E1b is 0.1 mm, and the edge portion E1a , E1b) is formed so that the width W at the portion farthest from the intermediate portion 21Ac is 0.15 mm. In this case, the edge portions E1a, E1b (two edge portions facing each other with the through hole H1Aa interposed therebetween) are the center line 21Ag along the longitudinal direction passing through the center in the width direction of the arm 11A. ) Is the axis of symmetry, and it is formed in a line symmetrical shape.

In addition, in this probe unit 1A, as shown in Figs. 18 to 20, the base end portion 21Aa slightly more than the side end portions 21Ae and 21Af of the arm 11A and the tip end portion 21Ab of the arm 11A. As the width (W) of the edge portions (E1c, E1d) between the through-holes (H1Ab) formed in the portion on the side of the arm (11A) is separated from the middle portion (21Ac) along the length direction of the arm (11A) (the tip portion It is formed to widen (as it approaches 21Ab). Specifically, in this probe unit 1A, as an example, the width W at the portion closest to the intermediate portion 21Ac in the edge portions E1c and E1d is 0.1 mm, and the edge portion E1c , E1d), it is formed so that the width W in the part which is farthest from the intermediate part 21Ac is 0.15 mm. In this case, the edge portions E1c and E1d (two edge portions facing each other with the through hole H1Ab sandwiched between them) are formed to have a line symmetrical shape with the center line 21Ag of the arm 11A as the axis of symmetry. .

Similarly, in this probe unit 1A, as shown in FIGS. 21 to 23, the side end portions 22Ae and 22Af (ends in the width direction) of the arm 12A constituting the support portion 3A, and the arm 12A ), the width W of the edge portions E2a and E2b between the through holes H2Aa formed in the portion on the side of the tip portion 22Ab slightly than the base portion 22Aa in the length direction of the arm 12A It is formed so as to expand (as it approaches the base end 22Aa) as it is spaced apart from the intermediate part 22Ac along (the left-right direction in each figure). Specifically, in this probe unit 1A, as an example, the width W at the portion closest to the intermediate portion 22Ac in the edge portions E2a and E2b is 0.1 mm, and the edge portion E2a , E2b) is formed so that the width W at the portion farthest from the intermediate portion 22Ac is 0.15 mm. In this case, the edge portions E2a, E2b (two edge portions facing each other with the through hole H2Aa interposed therebetween) are the center line 22Ag along the longitudinal direction passing through the center in the width direction of the arm 12A. ) Is the axis of symmetry, and it is formed in a line symmetrical shape.

In addition, in this probe unit 1A, as shown in Figs. 21 to 23, the base end portion 22Aa slightly more than the side end portions 22Ae and 22Af of the arm 12A and the tip end portion 22Ab of the arm 12A. Edges (E2c, E2d) between the through-holes (H2Ab) formed in the portion on the) side (hereinafter, referred to as ``through-holes H'' when the through-holes (H1Aa, H1Ab, H2Aa, H2Ab) are not distinguished) (Hereinafter, when the edges (E1a to E1d, E2a to E2d) are not distinguished, it is also referred to as ``edge E'').The width W is separated from the middle part 22Ac along the length direction of the arm 12A. It is formed so that it may become wider as it approaches (as it approaches to the tip part 22Ab). Specifically, in this probe unit 1A, as an example, the width W at the portion closest to the intermediate portion 22Ac in the edge portions E2c and E2d is 0.1 mm, and the edge portion E2c , E2d), it is formed so that the width W in the part which is farthest from the intermediate part 22Ac is 0.15 mm. In this case, the edge portions E2c and E2d (two edge portions facing each other with the through hole H2Ab sandwiched between them) are formed to have a line-symmetric shape with the center line 22Ag of the arm 12A as the axis of symmetry. .

In this probe unit 1A, as shown in Figs. 18 to 23, by making the shape of each through hole H substantially trapezoidal, the width W and shape of each edge portion E meet the above-described conditions. Arms 11A and 12A are formed to be satisfied.

In this probe unit 1A, arms 11A and 12A are formed so that the width W of each edge portion E widens as it is spaced apart from the intermediate portions 21Ac and 22Ac, so that each edge portion ( The concentration of stress generated in E) can be suppressed to a small extent. Specifically, in a girder-shaped member such as the arms 11A and 12A, when the shape and area of the cross-section are constant at any position in the length direction of the arms 11A and 12A, the stress generated during probing As the distance from the intermediate portions 21Ac and 22Ac (the closer to the proximal ends 21Aa and 22Aa on the proximal ends 21Aa and 22Aa side, the closer to the distal ends 21Ab and 22Ab on the distal ends 21Ab and 22Ab). The more) it gets bigger. Therefore, in a configuration in which the width W of each edge portion E is constant, the stress generated in each edge portion E increases as the distance from the intermediate portions 21Ac and 22Ac increases, and from the intermediate portions 21Ac and 22Ac The stress is concentrated in the farthest spaced area. In contrast, in this probe unit 1A, the arms 11A and 12A are formed so that the width W of each edge portion E widens as it is separated from the intermediate portions 21Ac and 22Ac. The concentration of stress in the portion E can be suppressed to be small. For this reason, according to the probe unit 1A and the inspection method using the probe unit 1A, it is possible to reliably prevent damage to each edge portion E due to concentration of stress.

In addition, in this probe unit 1A, the two edge portions E facing each other with each through hole H sandwiched between them are linearly symmetric with the center lines 21Ag and 22Ag of the arms 11A and 12A as the axis of symmetry. Since the arms 11A and 12A are formed in a shape, the stress distribution generated in the two edge portions E facing each other with each through hole H sandwiched between them is determined by taking the center lines 21Ag and 22Ag as the axis of symmetry. It becomes a line symmetry. That is, the stress distribution generated in the two edge portions E facing each other through the through holes H becomes equal in the vertical direction in FIGS. 18 to 23. For this reason, according to the probe unit 1A and the inspection method using the probe unit 1A, the concentration of the stress in each edge portion E can be suppressed to a smaller extent. As a result, each edge portion E ) Can be prevented more reliably.

Moreover, the probe unit 1B shown in FIG. 24 can also be adopted. In the following description, the same components as those of the above-described probe units 1, 101 and 1A are denoted by the same reference numerals, and overlapping descriptions are omitted.

As shown in FIG. 24, this probe unit 1B is constituted with an insulating sheet 41 and a shield plate 42 in addition to each of the components included in the probe unit 1 described above. . The insulating sheet 41 is an example of an insulator, and is formed in a sheet shape from a material having non-conductive (insulation) properties such as resin. The shield plate 42 is formed in the shape of a thin plate made of, for example, a conductive metal such as copper or aluminum. As shown in the figure, the shield plate 42 faces the substrate 200 in the arm 12 positioned on the side of the substrate 200 as a probing target during probing among the arms 11 and 12 It is installed through an insulating sheet 41 (in a state insulated from the arm 12) on the side (lower surface in the drawing: hereinafter also referred to as "facing surface"), and to the fixing screw 35 By this, it is fixed to the holding part 13 (holding members 31, 32). Further, the shield plate 42 is connected to, for example, a ground potential (reference potential) through wirings other than the drawing.

In this case, in the configuration without the shield plate 42, since the arm 12 is formed of metal, the floating capacity between the arm 12 and the object to be probed may increase. There is a fear that the inspection accuracy may decrease. In contrast, according to the probe unit 1B, by providing the shield plate 42 on the opposite surface side of the arm 12, the floating capacity between the arm 12 and the object to be probed can be sufficiently reduced. For this reason, according to the probe unit 1B and the inspection method using the probe unit 1B, it is possible to reliably prevent a decrease in inspection accuracy due to floating capacitance. In addition, even if the fixing screws 35 used for fixing the shield plate 42 are made of metal, since the shield plate 42 and the fixing screws 35 are in conduction, the fixing screws 35 The floating capacity can also be canceled. In addition, since the shield plate 42 is formed in a thin plate shape, a sufficient clearance can be ensured between the arm 12 during probing and the object to be probed, thereby avoiding a situation that may hinder probing. have.

In addition, the example of using the arms 11, 12 (arms 111, 112) formed of metal was described above, but a configuration using a resin arm (first arm and second arm) formed by injection molding or the like. You can also hire. In this case, when using a resin-made arm, by forming a conductive film (conductive layer) on the entire or part of the surface of the arm, the gap between the probe pin 2 and the holding portion 13 (holding portion 113) is It is also possible to adopt a configuration that is electrically connected through a conductive film. In addition, as in the above-described probe unit 101, when using a resin-made arm in a probe unit including a pair of probe pins 2, a pair of arms (in the probe unit 101) When removing the pair of arms 111 and the pair of arms 112, cut off only the space between the proximal end of each arm and the distal end, and keep the proximal ends connected to the holding unit. It is also possible to adopt a configuration held by this (an example of a configuration that separates the space from at least the vicinity of the base end portion to the tip end portion in each arm). As a specific example employing this configuration, the probe unit 601 shown in Fig. 25 will be described below. Further, the same components as those of the above-described probe units 1, 101, 1A, and 1B are denoted by the same reference numerals, and redundant descriptions are omitted.

As shown in FIG. 25, this probe unit 601 is comprised with the pair of probe pins 2 and the support part 603. As shown in FIG. The support portion 603 is configured with a pair of arms 611 (first arm), a pair of arms 612 (second arm), and a holding portion 613. As shown in Fig. 27, each arm 611 is made of a material having non-conductive (insulating property) and is integrally manufactured in a state in which the base ends 621a are connected. Also referred to as "intermediate body 701"), as shown in Fig. 25, is held by the holding portion 613 with the base end portions 621a connected thereto. In addition, each arm 611 maintains the positional relationship when each base end portion 621a is held by the holding portion 613 and after the both arms 611 are integrally manufactured (intermediate body 701 After fabrication), the distance from the vicinity of the base end portion 621a to the tip end portion 621b is separated and configured while each base end portion 621a is held by the holding portion. In this case, in this probe unit 601, as shown in the figure, the positional relationship of each arm 611 when held by the holding portion 613 is a virtual plane in which each arm 611 is As each arm 611 is adjacent to the image and goes from the proximal end 621a to the distal end 621b, the positional relationship is close to each other. In addition, as shown in Fig. 27, a conductor pattern 641 for electrically connecting the probe pin 2 to a substrate inspection apparatus other than the drawing is formed on the arm 611.

As shown in FIG. 29, each arm 612 is integrally manufactured with the base ends 622a connected to each other by a material having non-conductive properties (integrating each arm 612 is referred to as ``intermediate body 702 )”), as shown in FIG. 25, is held by the holding portion 613 while the base end portions 622a are connected. In addition, each arm 612 is the same as each arm 611, and the both arms 612 are integrally maintained while maintaining the positional relationship when each base end portion 622a is held by the holding portion 613. After fabrication (after fabrication of the intermediate body 702), the distance from the vicinity of the base end portion 622a to the tip end portion 622b is separated and configured while each base end portion 622a is held by the holding portion. In this case, as shown in the figure, the positional relationship of each arm 612 when held by the holding portion 613 is that each arm 612 is adjacent to one virtual plane, and each arm ( As the 612 moves from the base end portion 622a to the tip end portion 622b, they are in a positional relationship close to each other. In addition, as shown in Fig. 29, the arm 612 is provided with a conductor pattern 642 for electrically connecting the probe pin 2 to a substrate inspection apparatus other than the drawing.

Next, a method of manufacturing the probe unit 601 will be described. First, as shown in FIG. 26, the intermediate body 701 is fabricated using a material having non-conductive properties (insulation properties) such as resin. The intermediate body 701 is in a state in which the positional relationship (refer to Fig. 25) when each base end portion 621a of the pair of arms 611 is held by the holding portion 613 is maintained, and each arm 611 is a connecting portion. It is connected by (631a, 631b). As a manufacturing method of the intermediate body 701, a manufacturing method by injection molding, a manufacturing method by shaving, and a manufacturing method using a 3D printer can be employed. Subsequently, as shown in FIG. 27, a conductor pattern 641 is formed from the base end portion 621a of each arm 611 in the intermediate body 701 to the tip end portion 621b.

Subsequently, as shown in FIG. 28, the intermediate body 702 is produced by the same production method as that of the intermediate body 701 using a material having non-conductive properties such as resin. The intermediate body 702 maintains the positional relationship (refer to FIG. 25) when the base end portions 622a of the pair of arms 612 are held by the holding portions 613, and the arms 611 It is connected by (632a, 632b). Next, as shown in FIG. 29, a conductor pattern 642 is formed from the base end portion 622a of each arm 612 in the intermediate body 702 to the tip end portion 622b.

Next, the base end side (connecting portions 631a, 632a) of the intermediate bodies 701 and 702 are held by the holding portions 613. Subsequently, the connecting portions 631b and 632b on the distal ends side of the intermediate bodies 701 and 702, that is, the distal ends 621b and 622b of the arms 611 and 612 are cut at the locations of the broken lines shown in Figs. It is cut off and separated from the vicinity of the base ends 621a and 622a of the arms 611 and 612 to the tip ends 621b and 622b. As described above, the probe unit 601 is manufactured.

In this probe unit 601, as described above, each arm 611 and each arm 612 are manufactured integrally with each of the base ends 621a and each base end 622a connected, and each base end It is held by the holding part 613 while the 621a and each base end 622a are connected. For this reason, according to this probe unit 601, each arm 611 and each arm 611 are in a state in which the positional relationship between each arm 611 and each arm 612 when held by the holding unit 613 is maintained. The 612 can be fabricated, and the positional relationship at the time of fabrication can be reliably maintained on the holding portion 613 (attached). For this reason, according to this probe unit 601, each arm 611 and each arm 612 due to material variation or differences in manufacturing conditions when manufacturing each arm 611 and each arm 612 In addition to being able to suppress variations in specifications such as dimensions and modulus of elasticity, each arm 611 and each arm 611 when holding each arm 611 and each arm 612 in the holding unit 613 612) can be reliably prevented from occurring. As a result, according to the probe unit 601 and the inspection method using the probe unit 601, more accurate probing can be performed. In addition, according to this probe unit 601, since the pair of arms 611 and the pair of arms 612 can be held in the holding portion 613 at once, the assembly efficiency of the probe unit 601 can be sufficiently improved. have.

1, 1A, 1B, 101, 601: probe unit 2: probe pin
3, 3A, 103, 603: support 11, 11A, 111, 501, 611: arm
12, 12A, 112, 502, 612: arm 13, 113, 613: maintenance part
21a, 21Aa, 121a, 621a: proximal end 22a, 22Aa, 122a, 622a: proximal end
21b, 21Ab, 121b, 621b: tip 22b, 22Ab, 122b, 622b: tip
21c, 22c, 21Ac, 22Ac, 521c, 522c: middle region
21Ae, 21Af, 22Ae, 22Af: side end 21Ag, 22Ag: center line
41: insulation sheet 42: shield plate
401, 402, 701, 702: intermediate 411, 631a, 631b, 711: connection
412, 632a, 632b, 712: connection part 511, 512: rib
E1a~E1d, E2a~E2d: Edge H1a, H1b, H1Aa, H1Ab: Through hole
H2a, H2b, H2Aa, H2Ab: through hole P1a, P1b, P2a, P2b: formation site
W: width

Claims (14)

A probe unit having a probe pin and a support portion for supporting the probe pin,
The support portion holds a first arm and a second arm in a band shape arranged to face each other along a direction of probing when probing the probe pin to a probing object, and each base end portion of each arm. A four-fold link mechanism comprising a holding part and a connection part configured to attach the probe pin and connecting each tip of each arm, and allowing a direct movement of the probe pin in a direction opposite to the direction of the probing. Configure,
Each of the arms has a through hole formed at a portion closer to the proximal end portion and a portion at the proximal end side of the proximal end portion, and an intermediate portion between the through holes constitutes the four-fold link mechanism. In addition to functioning, the formation portion of each through hole is configured to function as a joint constituting the four-fold link mechanism, and the width of the edge portion between the end portion in the width direction of each arm and the through hole This, along the length direction of each arm, is formed to widen as it is spaced apart from the intermediate portion, and the two edge portions facing each other with the through hole interposed therebetween, the center of the width direction of each arm A probe unit formed to have a line-symmetric shape with a center line along the longitudinal direction passing through as an axis of symmetry. A probe unit having a probe pin and a support portion for supporting the probe pin,
The support portion holds a first arm and a second arm in a band shape arranged to face each other along a direction of probing when probing the probe pin to a probing object, and each base end portion of each arm. A four-fold link mechanism comprising a holding part and a connection part configured to attach the probe pin and connecting each tip of each arm, and allowing a direct movement of the probe pin in a direction opposite to the direction of the probing. Configure,
Each of the arms has a through hole formed at a portion closer to the proximal end portion and a portion at the proximal end side of the proximal end portion, and an intermediate portion between the through holes constitutes the four-fold link mechanism. In addition to the function, the formation portion of each of the through holes is configured to function as a joint constituting the four-fold link mechanism, and further, a rib formed in the intermediate portion along the length direction of each arm is provided. , Probe unit. A probe unit having a probe pin and a support portion for supporting the probe pin,
The support portion holds a first arm and a second arm in a band shape arranged to face each other along a direction of probing when probing the probe pin to a probing object, and each base end portion of each arm. A four-fold link mechanism comprising a holding part and a connection part configured to attach the probe pin and connecting each tip of each arm, and allowing a direct movement of the probe pin in a direction opposite to the direction of the probing. Configure,
In addition to having a pair of probe pins, each of the first arm and the second arm is provided with a pair,
The holding portion holds the proximal end portions of each of the first arms with the pair of first arms extending adjacently, and the second arm of the second arm with the pair of second arms extending adjacently. Maintaining each of the proximal ends,
Each of the arms has a through hole formed at a portion closer to the proximal end portion and a portion at the proximal end side of the proximal end portion, and an intermediate portion between the through holes constitutes the four-fold link mechanism. In addition to functioning, the probe unit is configured such that the formation portion of each through hole functions as a joint constituting the four-fold link mechanism. A probe unit having a probe pin and a support portion for supporting the probe pin,
The support portion holds a first arm and a second arm in a band shape arranged to face each other along a direction of probing when probing the probe pin to a probing object, and each base end portion of each arm. A four-fold link mechanism comprising a holding part and a connection part configured to attach the probe pin and connecting each tip of each arm, and allowing a direct movement of the probe pin in a direction opposite to the direction of the probing. Configure,
Each of the arms has a through hole formed at a portion closer to the proximal end portion and a portion at the proximal end side of the proximal end portion, and an intermediate portion between the through holes constitutes the four-fold link mechanism. In addition to functioning, the formation portion of each through hole is configured to function as a joint constituting the four-section link mechanism,
A probe unit comprising a conductive shield plate provided through an insulator on a surface side of an arm positioned on the probing object side of each of the arms that faces the probing object during the probing. A probe unit having a probe pin and a support portion for supporting the probe pin,
The support portion holds a first arm and a second arm in a band shape arranged to face each other along a direction of probing when probing the probe pin to a probing object, and each base end portion of each arm. A four-fold link mechanism comprising a holding part and a connection part configured to attach the probe pin and connecting each tip of each arm, and allowing a direct movement of the probe pin in a direction opposite to the direction of the probing. Configure,
Each arm is formed in the shape of a thin plate having a uniform thickness between the base end and the tip, and a through hole is formed in a portion on the side of the tip portion than on the base end portion and a portion on the side of the base end portion than the tip portion, respectively. A probe unit, wherein an intermediate portion between the balls functions as each link constituting the four-fold link mechanism, and the forming portion of each through-hole is configured to function as a joint constituting the four-fold link mechanism. As an inspection method for inspecting a substrate,
6. An inspection method, wherein the probe pin of the probe unit according to any one of claims 1 to 5 is probed to the substrate as the probing target, and the substrate is inspected based on an electrical signal input/output through the probe pin. delete delete delete delete delete delete delete delete

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