TWI825133B - Measuring device - Google Patents

Abstract

A measuring device 100 includes a first contact 1 and a second contact 2 which are respectively pressed against a measurement target T, a main body 10 in which the first contact 1 and the second contact 2 are installed, and a transmission substrate 60 provided with a high frequency transmission line (microstrip line) to which the first contact 1 and the second contact 2 are electrically connected. The main body 10 includes a base portion 20, a holding portion 30 for holding the first contact 1 and the second contact 2, and a support portion 40 installed to the base portion 20 and supporting the holding portion 30. The holding portion 30 moves relatively to the base portion 20 along with the first contact 1 and the second contact 2 being pressed against the measuring target T.

Description

Measuring device

The invention relates to a measuring device.

Japanese Patent Application Laid-Open JP2005-223170A discloses a high-frequency characteristic measuring device. The high-frequency characteristic measuring device has: an elevating workpiece table for placing a wafer having a plurality of integrated circuits that is a measurement object; and measuring High-frequency probe device for high-frequency characteristics of integrated circuits. This high-frequency probe device has a probe composed of signal pins and ground pins arranged side by side on substantially the same plane at a predetermined interval.

In the above-mentioned measuring device, the workpiece table is first raised to bring the tip of the probe (contact member) into contact with the measurement object, and then the workpiece table is raised again, thereby bending the probe and bringing it into contact with the measurement object in a stable posture. object contact.

However, with the above-mentioned measuring device, during the bending process of the probe, the tip of the probe may move on the measurement object, and there is a concern that contact traces may occur on the measurement object. Furthermore, the greater the bending amount of the probe, the greater the transmission loss. Therefore, the above-mentioned measuring device may have a concern that the measurement accuracy of the high-frequency characteristics is reduced due to the bending of the probe.

The present invention was developed in view of the above-mentioned problems, and its purpose is to suppress the occurrence of contact marks on the measurement object and to improve the measurement accuracy of the measurement device.

According to one aspect of the present invention, the measuring device is provided with: a plurality of contact pieces, each of which is pressed against the measurement object; a body portion equipped with a plurality of contact pieces; and a transmission substrate that is electrically connected to A high-frequency transmission line with a plurality of contacts; wherein, the body part has: a base part; a holding part that holds a plurality of contacts; a support part that is installed on the base part and supports the holding part; and the holding part follows As the plurality of contact pieces are pressed against the measurement object, the base portion is relatively moved.

According to this aspect, since the holding portion moves relative to the base portion as the plurality of contacts are pressed against the measurement object, each of the contacts held by the holding portion also faces each other in the direction of the pressing. The base part moves relatively. Therefore, excessive movement of the contact piece pressed against the measurement object is suppressed, and the occurrence of contact traces in the measurement object is suppressed. In addition, since excessive movement of the contacts pressed against the measurement object is suppressed, it is not necessary to greatly bend the plurality of contacts. Therefore, the increase in transmission loss due to the bending of the plurality of contacts is limited. inhibition. Therefore, the occurrence of contact marks on the measurement object can be suppressed, and the measurement accuracy of the measurement device can be improved.

1. 101: First contact piece

1a, 2a: Bottom surface

1b, 2b: top surface

1c, 1d, 2c, 2d: side

1e, 2e: first slope

1f, 2f: second slope

1g, 2g: third slope

1h, 2h: step difference surface

2. 102: Second contact piece

3. 103: Third contact piece

10, 120: Body part

11:The first body part

15:Second body part

19:The third body part

20, 130: Base part

20a: Bolt

21:First base part

25:Second base part

29:Third base part

30:Maintenance Department

31:First maintenance department

32: First insertion hole

32a, 37a: Stopping surface

35:Second maintenance part

37:Second insertion hole

39:Third maintenance department

40:Support Department

41:First Support Department

42, 43, 46, 47, 151, 155: Connection part

42a, 43a, 46a, 47a, 152, 156: Rod

42b, 42c, 43b, 43c, 46b, 46c, 47b, 47c: joint part

45:Second Support Department

49:Third Support Department

60, 110: Transmission substrate

60a, 110a, 110b, 260b, 260c: slit

61, 111: Base material

61a: concave part

62, 112: signal line

63: Ground wire

64, 64a, 64b: connection layer

65:The first part

66: The second part

66a, 68a: Through hole

67, 69: penetration layer

68:The third part

100, 100A, 200, 300: Measuring device

113:First ground wire

114: Second ground wire

140:Maintenance Department

150:Support Department

153, 154, 157, 158: joints

160: Elastic component

260:Elastic Structure Department

260a: Gap

261:Base

265:First Transformation Department

266:Second Transformation Department

267:Third Transformation Department

268:Deformation Department

P:Front end

R: base plane

T: Measurement object

Th:Thickness

Ts: contact surface

W: Width

Figure 1 is a perspective view showing a measuring device according to a first embodiment of the present invention.

Figure 2 is a front view showing the measuring device of the first embodiment.

FIG. 3 is a side view showing the first body part of the measuring device according to the first embodiment.

FIG. 4 is a perspective view showing the first contact member of the measuring device according to the first embodiment.

FIG. 5 is a top view showing the transmission substrate of the measuring device according to the first embodiment.

FIG. 6 is a bottom view showing the transmission substrate of the measuring device according to the first embodiment.

FIG. 7 is a top view showing a contact member according to a modified example of the first embodiment.

Fig. 8 is a perspective view of a measuring device showing a modification of the first embodiment.

FIG. 9 is a top view of a transmission substrate showing a modification of the first embodiment.

Figure 10 is a perspective view showing the measuring device of the second embodiment from above.

FIG. 11 is a side view showing the measuring device of the second embodiment.

FIG. 12 is a perspective view showing the measuring device of the second embodiment from below.

Figure 13 is a top view of the transmission substrate of the measuring device according to the second embodiment.

Fig. 14 is a perspective view showing the main body of the measuring device according to the third embodiment.

Fig. 15 is a perspective view showing the measuring device of the third embodiment from below.

FIG. 16 is a perspective view of a main body of a measuring device according to a modification of the third embodiment.

(First implementation type)

Hereinafter, the measurement device 100 according to the first embodiment of the present invention will be described with reference to the drawings.

The measuring device 100 is an inspection device (not shown) used for electrically inspecting a circuit board, for example. The measuring device 100 measures the high-frequency characteristics of electromagnetic waves generated by a measurement object T (see FIG. 3 ) included in a circuit board, which is a semiconductor wafer or an electronic circuit on which a wiring pattern is printed. Substrates, electronic circuit mounting substrates on which semiconductor wafers or electronic circuit substrates are mounted, etc.

As shown in Figures 1 and 2, the measuring device 100 is provided with: a first contact 1 and a second contact 2 as a plurality of contacts each pressed against the measurement object T; The body portion 10 of the component 1 and the second contact component 2; and the transmission substrate 60 provided with a high-frequency transmission line electrically connected to the first contact component 1 and the second contact component 2.

The first contact 1 and the second contact 2 are electrodes to be pressed against the measurement object T and to input high-frequency signals from the measurement object T. The first contact piece 1 and the second contact piece 2 are pressed against the measurement object T from a direction perpendicular to the contact surface Ts (see FIG. 3 ) with the measurement object T. The first contact piece 1 and the second contact piece 2 are made of sintered metal formed by sintering, more specifically, they are made of tool steel.

As shown in Figures 2 and 3, the first contact piece 1 and the second contact piece 2 are installed at a predetermined interval, extend parallel to each other, and are inclined to the contact surface Ts of the measurement object T. Main body part 10. The first contact piece 1 and the second contact piece 2 are pins having a rectangular cross section, and their front ends are formed in a tapered shape to contact the measurement object T. The base ends of the first contact 1 and the second contact 2 are connected to the transmission substrate 60 . The first contact piece 1 and the second contact piece 2 have the same shape. Therefore, the specific structure will be described below by taking the first contact 1 as an example, and the detailed description of the structure of the second contact 2 will be appropriately omitted. The symbols in parentheses in FIG. 4 show the configuration of the second contact 2 corresponding to the respective configurations of the first contact 1 .

As shown in FIG. 4 , the width W and thickness Th of the front end portion of the first contact 1 gradually increase as the front end P moves away from the front end P in contact with the measurement object T toward the base end side. Among them, "width" refers to the left-right direction in Figure 2 and is the length in the direction in which the first contact piece 1 and the second contact piece 2 are adjacent (adjacent direction). In addition, "thickness" refers to the length perpendicular to the direction in which the first contact member 1 and the second contact member 2 extend (the extension direction) and the adjacent direction.

Hereinafter, the surface of the first contact 1 that is in contact with the transmission substrate 60 will be called the "bottom surface 1a", the surface that is parallel to the bottom surface 1a will be called the "top surface 1b", and the surface that is perpendicular to the bottom surface 1a and the top surface 1b will be called "bottom surface 1a". The surfaces that are parallel to each other are called "side 1c" and "side 1d" respectively. The side surface 1 c is an opposing surface facing the second contact piece 2 .

The front end P of the first contact 1 is located at the center of the first contact 1 in the adjacent direction as shown in FIGS. 2 and 4 . As the first contact member 1 moves away from the front end P, the width W increases, and the thickness increases toward the bottom surface 1a. The front end portion of the first contact piece 1 is formed with: a first inclined surface 1e connected to the bottom surface 1a and inclined with respect to the contact surface Ts of the measurement object T; each is connected to the side surfaces 1c and 1d with an inclination, and is connected with the first inclined surface 1e The connected second inclined surface 1f and the third inclined surface 1g. The front end P is formed by the top surface 1b, the first inclined surface 1e, the second inclined surface 1f and the third inclined surface 1g.

Like the first contact 1, the front end portion of the second contact 2 is formed with a first inclined surface 2e inclined with respect to the contact surface Ts; and each is connected to the side surfaces 2c and 2d by being inclined and connected to the first inclined surface 2e. The second slope 2f and the third slope 2g. The front end P of the second contact piece 2 is also formed by the top surface 2b, the first inclined surface 2e, the second inclined surface 2f and the third inclined surface 2g. The width W of the second contact member 2 also increases as it moves away from the front end P, and the thickness Th increases toward the bottom surface 2a.

In this way, each of the first contact piece 1 and the second contact piece 2 has a front end portion with a shape in which the cross-sectional area gradually decreases toward the front end P, so the front end P can easily come into contact with the measurement object T. In addition, the bottom surfaces 1a and 2a of the first contact piece 1 and the second contact piece 2 are formed with first slopes 1e and 2e that are inclined away from the measurement object T, so that the first contact piece 1 and 2 outside the front end P can be avoided. Contact (interference) between the second contact piece 2 and the measurement object T.

As shown in Figures 1 to 3, the body part 10 has: a base part 20; a holding part 30 that holds the first contact piece 1 and the second contact piece 2; and a holding part that is supported and installed on the base part 20. 30's support section 40's.

As shown in FIG. 1 , the base portion 20 is composed of a first base portion 21 and a second base portion 25 that are coupled to each other with bolts 20 a. The base portion 20 moves in the vertical up-and-down direction (the direction perpendicular to the contact surface Ts of the measurement object T) by the lifting device (not shown) of the inspection device. By moving the base part 20 up and down, the first contact piece 1 and the second contact piece 2 are brought into contact with and separated from the measurement object T.

The holding part 30 has a first holding part 31 and a second holding part 35 which serve as a plurality of holder parts that individually hold the first contact 1 and the second contact 2 (a plurality of contacts). The first holding part 31 holds the first contact piece 1 . The second holding part 35 holds the second contact piece 2 . In addition, the support part 40 has a first support part 41 and a second support part 45 as a plurality of holding parts that individually support each of the first holding part 31 and the second holding part 35 (a plurality of holder parts). Server Support Department. The first support part 41 is installed on the first base part 21 and supports the first holding part 31. The second support part 45 is installed on the second base part 25 and supports the second holding part 35 .

The first base part 21 , the first holding part 31 and the first supporting part 41 are integrally formed with each other by resin, and constitute the first body part 11 . The second base part 25 , the second holding part 35 and the second supporting part 45 are integrally formed with each other by resin, and constitute the second body part 15 . That is, the main body 10 is composed of the first main body 11 and the second main body 15 .

As shown in FIG. 2 , the first body part 11 and the second body part 15 are provided adjacent to each other with a predetermined interval (gap) therebetween. The first body part 11 and the second body part 15 have a symmetrical structure with respect to an imaginary reference plane R that is parallel to the first contact piece 1 and the second contact piece 2 and located between them. Therefore, the following description will mainly focus on the specific structure of the first body part 11 , and the detailed description of the structure of the second body part 15 will be appropriately omitted. The symbols in parentheses in FIG. 3 indicate the components of the second body part 15 corresponding to the components of the first body part 11 .

As shown in FIG. 3 , the first holding portion 31 is formed with a first insertion hole 32 into which the first contact 1 is inserted. The first insertion hole 32 is formed in a notch shape that opens toward the surface of the first holding part 31 that faces the second holding part 35 . A stopper surface 32 a is formed on the inner periphery of the first insertion hole 32 as a first restricting portion that contacts the step surface 1 h formed on the first contact 1 . The stop surface 32a is in contact with the step surface 1h of the first contact member 1, thereby restricting the first contact member 1 such as the front end P from moving toward the first insertion hole 32, in other words, restricting the first contact member 1 from being separated from the measurement object T. movement in the direction. In this way, the first contact piece 1 will be in contact with the blocking surface 32a and positioned.

To hold the first contact 1 by the first holding portion 31 , first, the first contact 1 is inserted into the first insertion hole 32 from the base end portion to be contacted with the transmission substrate 60 . The first contact piece 1 is inserted into the first insertion hole 32 from the base end until the step surface 1 h contacts the stop surface 32 a. In this state, the adhesive is applied to the first contact 1 and the first holding part 31 to bond the first contact 1 and the first holding part 31 . Therefore, the first contact piece 1 is held by the first holding portion 31 in a state where the front end P protrudes toward the measurement object T from the first holding portion 31 .

In addition, like the first holding part 31 , the second holding part 35 is formed with a second insertion hole 37 into which the second contact 2 is inserted. A stopper surface 37 a is formed on the inner periphery of the second insertion hole 37 as a second restricting portion that contacts the step surface 2 h formed on the second contact 2 . The stop surface 37a contacts the step surface 2h of the second contact member 2, thereby restricting the movement of the second contact member 2 such as the front end P toward the second insertion hole 37.

The first support part 41 is composed of a connection mechanism having a pair of connection parts 42 and 43 . The pair of connecting portions 42 and 43 each extend parallel to the contact surface Ts and are arranged in a perpendicular direction to the contact surface Ts of the measurement object T. One connection part 42 has a rod part 42a, a joint part 42b and a joint part 42c. The rod part 42a has a rectangular cross section. The joint part 42b connects one end of the rod part 42a and the first holding part 31. The joint part 42c The other end of the rod part 42a is connected to the first base part 21. Similarly, the other connecting part 43 has a rod part 43a, a joint part 43b and a joint part 43c. The rod part 43a has a rectangular cross section. The joint part 43b connects one end of the rod part 43a and the first holding part 31. The joint part 43c connects the other end of the rod part 43a and the first base part 21. The rod portion 42a of one connecting portion 42 is formed shorter than the rod portion 43a of the other connecting portion 43.

A semicircular groove is formed between the rod portion 42a of one of the connecting portions 42, the first base portion 21, and the first holding portion 31. Similarly, a semicircular groove is formed between the rod portion 43 a of the other connecting portion 43 and the first base portion 21 and the first holding portion 31 . Each groove is parallel to the contact surface Ts of the measurement object T and extends perpendicularly to the longitudinal direction (the left-right direction in Figure 3). Thereby, joint parts 42b, 42c, 43b, 43c are provided between the rod parts 42a, 43a, the first base part 21, and the first holding part 31. The cross-sectional area of each joint portion 42b, 42c, 43b, and 43c perpendicular to the longitudinal direction of the rod portions 42a and 43a is smaller than that of the rod portions 42a and 43a, and is configured to be elastically deformed more easily than the rod portions 42a and 43a. .

When the first base portion 21 is moved downward in the vertical direction and the first contact piece 1 is pressed against the measurement object T, it receives the reaction force of the measurement object T (hereinafter also referred to as "pressure reaction force"). The joint portions 42b and 42c of the connecting portion 42 and the joint portions 43b and 43c of the connecting portion 43 are elastically deformed, and each rod portion 42a and 43a is tilted (relatively rotated) relative to the first holding portion 31 and the first base portion 21 . Taking the other connecting part 42 as an example, the other connecting part 42 will rotate the rod part 42a relative to the first holding part 31 with the one joint part 42b as the center, and with the other joint part 42c as the center. The rod part 42a is caused to rotate relative to the first base part 21. In this way, when the first contact piece 1 is pressed against the measurement object T, the first supporting part 41 will be deformed, thereby allowing the relative movement of the first base part 21 and the first holding part 31 in the vertical direction. In addition, one of the rod portions 42a is shorter than the other rod portion 43a, so the first base portion 21 and the first holding portion 31 can be relatively moved in the vertical direction more linearly.

Like the first support part 41 , the second support part 45 is composed of a connection mechanism having a pair of connection parts 46 and 47 . One connection part 46 has a rod part 46a, a joint part 46b, and a joint part 46c. The rod part 46a has a rectangular cross section. The joint part 46b connects one end of the rod part 46a and the second holding part 35. The joint part 46c is The other end of the rod part 46a and the second base part 25 are connected. The other connecting part 47 has a rod part 47a, a joint part 47b, and a joint part 47c. The rod part 47a has a rectangular cross section. The joint part 47b connects one end of the rod part 47a and the second holding part 35. The joint part 47a has a rectangular cross section. 47c connects the other end of the rod part 47a and the second base part 25.

When the second contact piece 2 is pressed against the measurement object T, like the first support part 41 , the second support part 45 will be elastically deformed, and the vertical position of the second holding part 35 and the second base part 25 will be allowed. relative movement in direction. The first support part 41 and the second support part 45 are independently connected to the first base part 21 and the second base part 25 with a gap between them, so the first holding part 31 and the second holding part 35 Can move independently of each other.

In addition, when the first contact piece 1 and the second contact piece 2 are pressed against the measurement object T, the first support part 41 and the second support part 45 will elastically deform preferentially relative to the first contact piece 1 and the second contact piece 2 . In other words, the durability of the first contact piece 1 and the second contact piece 2 is such that when pressed against the measurement object T, the first supporting part 41 and the second supporting part 45 will preferentially elastically deform.

The transmission substrate 60 is a flexible strip-shaped flexible printed substrate. The transmission substrate 60 can be deformed by external force. As shown in FIGS. 1 and 2 , a first contact 1 and a second contact 2 are connected to one end of the transmission substrate 60 (the upper end in FIG. 5 ). The other end of the transmission substrate 60 (not shown) is electrically connected to a coaxial cable (not shown) through a connector (not shown) that moves together with the base portion 20 . The electrical signals input from the first contact 1 and the second contact 2 are transmitted through the high-frequency transmission line of the transmission substrate 60 and input to the control device through the coaxial cable.

The transmission substrate 60 serves as a high-frequency transmission line and has a multilayer structure in which a microstrip line is formed. In the transmission substrate 60, as shown in Figures 5 and 6, a signal line 62 belonging to the conductor layer is printed on one side (surface) of the base material 61 which is an insulating layer, and a conductor layer is printed on the other side (back). Layer 63 ground wire.

The transmission substrate 60 has a first connecting portion 65 and a second connecting portion 66 as a plurality of connecting portions to which the first contact 1 and the second contact 2 are respectively connected. The first contact piece 1 is connected to the first connecting portion 65 . The second contact piece 2 is connected to the second connecting portion 66 . A slit 60 a extending along the longitudinal direction of the transmission substrate 60 is formed between the first connecting portion 65 and the second connecting portion 66 . The first joint part 65 and the second joint part 66 are separated by the slit 60a and are configured to be movable (deformable) independently of each other.

The base material 61 is made of a flexible material. As shown in Fig. 6, a plurality of rectangular recessed portions 61a for exposing the base material 61 are regularly arranged on the back surface of the transmission substrate 60. In other words, the ground wire 63 on the back side of the transmission substrate 60 is arranged in a grid shape (mesh shape). Therefore, compared with the case where the ground wire 63 is provided on the entire back surface, the transmission substrate 60 becomes easier to bend.

The signal line 62 is provided at the center of the transmission substrate 60 in the width direction (the left-right direction in FIG. 5 ), has a predetermined width, and extends along the longitudinal direction. One end portion 62 a of the signal line 62 is located on the first connecting portion 65 . One end portion 62 a of the signal line 62 on the first connecting portion 65 is disposed wider than other portions and is electrically connected to the first contact 1 . The first contact piece 1 is in a state of being electrically connected to the signal line 62 and is adhered to the first connecting portion 65 through an adhesive.

A connection layer 64 electrically connected to the ground wire 63 is provided on the surface of the second connecting portion 66 . The second joint portion 66 is provided with through holes 66 a opening on the front and back surfaces. A through layer 67 is provided on the inner peripheral surface of the through hole 66 a to electrically connect the connection layer 64 on the surface of the second contact portion 66 and the ground line 63 on the back surface. The second contact piece 2 is electrically connected to the connection layer 64 of the second connecting portion 66 and is adhered to the second connecting portion 66 by an adhesive. The second contact member 2 passes through the connecting layer 64 and the through layer 67 and is electrically connected to the ground wire 63 .

Next, the function of the measurement device 100 will be described.

In the measurement device 100 of this embodiment, in order to measure the high-frequency characteristics of the measurement object T, the base portion 20 is moved vertically (in the vertical direction in this embodiment) relative to the measurement object T, and The first contact piece 1 and the second contact piece 2 are brought into contact with the contact surface Ts of the measurement object T. From this state, the base portion 20 is further moved downward, whereby the first contact piece 1 and the second contact piece 2 are pressed against the measurement object T by a predetermined pressing force and are electrically connected. As the first contact piece 1 and the second contact piece 2 are further pressed from the state of contact with the measurement object T, the first support portion 41 and the second support portion 45 will take priority over the first contact piece 1 and the second contact piece 2 . The two contact pieces 2 elastically deform, causing the first holding part 31 and the second holding part 35 to move relative to the first base part 21 and the second base part 25 . In this way, the first holding part 31 and the second holding part 35 will move relative to the first base part 21 and the second base part 25, so the first contact piece 1 held in the first holding part 31 is not held in the first holding part 31. Each of the second contact pieces 2 of the two holding parts 35 will move relative to the first base part 21 and the second base part 25 . Therefore, even if the first contact piece 1 and the second contact piece 2 are not elastically deformed (bent deformation), the first contact piece 1 and the second contact piece 2 can be pressed against the measurement object T as the base portion 20 moves. , to suppress the movement of the respective front ends on the measurement object T due to the bending of the first contact piece 1 and the second contact piece 2. In this way, excessive movement of the first contact piece 1 and the second contact piece 2 pressed against the measurement object T will be suppressed, so the occurrence of contact marks in the measurement object T will be suppressed. In addition, excessive movement of the first contact piece 1 and the second contact piece 2 pressed against the measurement object T is suppressed, and the first contact piece 1 and the second contact piece 2 do not need to be greatly bent, so the cause of the problem is suppressed. The transmission loss increases due to the bending of the first contact 1 and the second contact 2 . Therefore, the occurrence of contact marks on the measurement object T can be suppressed, and the measurement precision of the measurement device 100 can be improved.

In addition, the conventional measuring device has the following technical means: by actively bending the spring-like contact piece, it is pressed against the measurement object with a predetermined pressing force, so as to obtain good contact between the contact piece and the measurement object. contact status. However, in such a measuring device, spring properties are required of the contacts, so it is difficult to increase the hardness of the contacts to improve durability.

In this regard, in the measurement device 100 of this embodiment, the elastic deformation of the first support part 41 and the second support part 45 generates elastic force, thereby ensuring that the first contact piece 1 and the second contact piece 2 are pressed against each other. The pressing force to the measurement object T. Since the first support part 41 and the second support part 45 will preferentially elastically deform the first contact piece 1 and the second contact piece 2 to ensure the pressing force, there is no need to actively move the first contact piece 1 and the second contact piece 2 The contact piece 2 is elastically deformed. Therefore, the degree of freedom in selecting the materials of the first contact piece 1 and the second contact piece 2 is increased. In the measuring device 100, since the first contact piece 1 and the second contact piece 2 are made of tool steel which is a sintered metal, they have high durability.

In addition, generally speaking, the measurement target of the measurement device may have a height difference (concave-convex) on the measurement surface. In particular, when the measurement object is an electronic circuit substrate, larger unevenness is more likely to occur than when it is a semiconductor wafer. When the measurement object has a height difference, there is a concern that one contact piece will first contact the relatively high part, while the other contact piece will not fully contact the relatively low height part. In this way, when the measurement object is uneven, the contact state between the first contact piece and the second contact piece and the measurement object will become uneven, and there is a concern that a good contact state cannot be obtained.

On the other hand, in the measuring device 100, the first holding part 31 holding the first contact 1 and the second holding part 35 holding the second contact 2 are configured to be movable independently of each other. Moreover, the transmission substrate 60 is configured to be deformable, so it does not prevent the first contact 1 and the second contact 2 from moving independently. Therefore, according to the measuring device 100, even when the measurement object (especially the circuit board) has unevenness, one of the first contact 1 and the second contact 2 can be brought into contact with the measurement object T, and the other can be moved and contacted with the measurement object T. Measurement object T contacts. That is, the first contact piece 1 and the second contact piece 2 can move independently with different movement amounts, and can tolerate the height difference of the measurement object T, so the first contact piece 1 and the second contact piece 2 can be The contact state with the measurement object T becomes equal. Therefore, the first contact piece 1 and the second contact piece 2 can be pressed against the measurement object T with a predetermined pressing force, and a good contact state can be obtained.

Next, a modification of the above-described first embodiment will be described. As the following modifications are also within the scope of the present invention, the following modifications may be combined with each configuration of the above-described first embodiment, or the following modifications may be combined with each other. In addition, the modifications disclosed in the above description of the first embodiment can also be arbitrarily combined with other modifications. In addition, the above-mentioned first embodiment and the modifications of the first embodiment disclosed below can also be combined with the second and third embodiments and the modifications described below within the scope of technical possibility.

In the above-described first embodiment, the transmission substrate 60 is a flexible printed substrate. In this regard, the transmission substrate 60 may also be a flexible-rigid (FLEX RIGID) substrate including flexible parts and non-flexible parts. Furthermore, when the first contact member 1 and the second contact member 2 are not allowed to move independently, the base material 61 of the transmission substrate 60 may also be a hard rigid substrate without flexibility.

In addition, in the above-mentioned first embodiment, the main body part 10 is a divided structure composed of the first main body part 11 and the second main body part 15. The first main body part 11 and the second main body part 15 have mutually symmetrical structures. . In addition, the first contact piece 1 and the second contact piece 2 can move independently of each other. In this regard, in order to improve the durability of the first contact piece 1 and the second contact piece 2, the body part 10 may also be integrally formed without being a divided structure, so that the first contact piece 1 and the second contact piece 2 cannot be independent. Move. In the measuring device 100, in order to improve the durability of the first contact piece 1 and the second contact piece 2, if the first contact piece 1 and the second contact piece 2 are pressed against the measurement object T, the support The portion 40 can be elastically deformed.

In addition, in the above-described first embodiment, the support portion 40 (the first support portion 41 and the second support portion 45) is composed of a connection mechanism. In this regard, under the condition that the support portion 40 (the first support portion 41, the second support portion 45) elastically deforms prior to the first contact 1 and the second contact 2, the structure of the support portion 40 is not limited to a connection mechanism. Can be set to any configuration.

In addition, in the above-mentioned first embodiment, the first contact member 1 and the second contact member 2 are square columnar terminals with a rectangular cross section. In this regard, the first contact 1 and the second contact 2 are not limited to this. For example, they may be formed as a cylinder having a circular cross-section or a corner post (polygonal post) having a polygonal cross-section other than a square. In any case, it is preferable that the front end portion has a tapered shape as in the above-mentioned embodiment.

In addition, in the above-mentioned first embodiment, the first contact piece 1 and the second contact piece 2 have the same shape. The front ends P of the first contact 1 and the second contact 2 are provided at the centers in the respective width directions (adjacent directions). In this regard, the first contact 1 and the second contact 2 are not limited to having the same shape, but may have any shape. The front ends P of the first contact 1 and the second contact 2 are not limited to the center in the width direction. For example, as shown in FIG. 7(a) , the respective front ends P can also be arranged close to each other on the side surfaces facing each other. 1c, 2c (opposing surfaces), or as shown in Figure 7(b), the respective front ends P can also be arranged on the side surfaces 1d, 2d in a manner separated from each other. In the shape shown in Figure 7(a) or Figure 7(b), the first contact piece 1 and the second contact piece 2 form a structure that is symmetrical with respect to the reference plane R.

In addition, in the first embodiment described above, the high-frequency transmission line is a microstrip line. In this regard, the high-frequency transmission line may also be a coplanar line or a strip line or other lines. The measuring device 100 may be configured to include a number of contacts corresponding to the type of high-frequency transmission line. That is, the measuring device 100 may also have three or more contacts according to the type of high-frequency transmission line. In addition, the main body 10 of the measuring device 100 can also be divided into structures that can move independently according to the number of contact pieces.

In addition, in the above-mentioned first embodiment, the high-frequency transmission line is a microstrip line, and the measuring device 100 is provided with two contacts, which are first contacts electrically connected to the signal line 62 1 and the second contact 2 electrically connected to the ground wire 63 . In this regard, when a microstrip line is used as a high-frequency transmission line, the measuring device can also be equipped with three contacts. Hereinafter, a measurement device 100A according to a modified example will be described in detail with reference to FIGS. 8 and 9 .

As shown in FIG. 8 , a measurement device 100A according to the modified example has a first contact 1 electrically connected to the signal line 62 , and a second contact 2 and a third contact 3 electrically connected to the ground line 63 .

The main body part 10 of the measuring device 100A has a first main body part 11 , a second main body part 15 and a third main body part 19 . The first body part 11 and the second body part 15 have the same structure as the above-mentioned embodiment. The third body portion 19 on which the third contact piece 3 is mounted is arranged so as to sandwich the first body portion 11 together with the second body portion 15 . The third body part 19 has the same structure as the first body part 11 and the second body part 15 . Therefore, detailed description and illustration are omitted. The third body part 19 has a third base part 29 , a third holding part 39 and a third supporting part 49 . The third holding part 39 holds the third contact 3 The third support part 49 is a holder support part that movably supports the third holding part 39 . The first base part 21, the second base part 25 and the third base part 29 are connected by bolts 20a to form the base part 20. The third holding part 39 forms the holding part 30 together with the first holding part 31 and the second holding part 35 . The third support part 49 forms the support part 40 together with the first support part 41 and the second support part 45 and movably supports the third contact 3 independently of the first contact 1 and the second contact 2 .

In the transmission substrate 60, similarly to the above-described first embodiment, the signal line 62 belonging to the conductor layer is printed on one side (surface) of the base material 61 which is the insulating layer, and the signal line 62 belonging to the conductor layer is printed on the other side (back surface). Layer 63 ground wire.

As shown in FIG. 9 , the transmission substrate 60 has a first bonding portion 65 , a second bonding portion 66 , and a third bonding portion 68 as a plurality of bonding portions. The first bonding portion 65 contacts the first contact 1 . The second connecting portion 66 contacts the second contact member 2 , and the third connecting portion 68 contacts the third contact member 3 . A slit 60 a extending along the longitudinal direction of the transmission substrate 60 is formed between the first bonding portion 65 and the second bonding portion 66 and between the second bonding portion 66 and the third bonding portion 68 . The first joint part 65 , the second joint part 66 and the third joint part 68 are separated from each other by the slits 60 a and are configured to be independently movable (deformable).

The second connecting portion 66 has a connection layer 64a (corresponding to the connection layer 64 in the above-described embodiment), a through hole 66a and a through layer 67, similarly to the above-described first embodiment. The second contact 2 is electrically connected to the connection layer 64a of the second connecting portion 66, and is adhered to the second connecting portion 66 by an adhesive. The second contact member 2 is electrically connected to the ground wire 63 through the connection layer 64a and the through layer 67.

The third joint part 68 has a connection layer 64b, a through hole 68a and a through layer 69 like the second joint part 66. The connection layer 64b is electrically connected to the ground wire 63, and the through hole 68a is open on the front and back surfaces. , the through layer 69 is provided on the inner peripheral surface of the through hole 68 a, and electrically connects the connection layer 64 b on the surface of the third connecting portion 68 and the ground line 63 on the back surface. The third contact piece 3 is electrically connected to the connection layer 64b of the third connecting portion 68 and is adhered to the third connecting portion 68 through an adhesive. The third contact member 3 is electrically connected to the ground wire 63 through the connection layer 64b and the through layer 69.

Even in the above-mentioned modified example, the same effect as that of the above-mentioned first embodiment is exerted.

(Second implementation type)

Hereinafter, the measuring device 200 according to the second embodiment of the present invention will be described with reference to FIGS. 10 to 13 .

The measuring device 200 is an inspection device (not shown) used for electrically inspecting a circuit board, for example. The measuring device 200 measures the high-frequency characteristics of the electromagnetic wave generated by the measurement object T (see FIG. 11) included in the circuit board, which is a semiconductor wafer or an electronic circuit on which a wiring pattern is printed. Substrates, electronic circuit mounting substrates on which semiconductor wafers or electronic circuit substrates are mounted, etc.

As shown in FIGS. 10 to 12 , the measuring device 200 is provided with: a first contact 101 , a second contact 102 and a third contact 103 as a plurality of contacts each pressed against the measurement object T. ; Provided with a high-frequency transmission line and a flexible transmission substrate 110; and a body portion 120 on which the first contact 101, the second contact 102 and the third contact 103 are installed.

The first contact 101 , the second contact 102 and the third contact 103 are electrodes to be pressed against the measurement object T and to input high-frequency signals from the measurement object T respectively. The first contact 101 , the second contact 102 and the third contact 103 are formed into the same cylindrical shape as shown in FIGS. 12 and 13 , and are disposed at one end of the transmission substrate 110 in the longitudinal direction. .

The transmission substrate 110 is a strip-shaped flexible printed substrate with flexibility and can be deformed by external force.

As shown in FIGS. 12 and 13 , the transmission substrate 110 is provided with coplanar lines as high-frequency transmission lines. Specifically, in the transmission substrate 110, a single signal line 112 belonging to the conductor layer and two signal lines 112 belonging to the conductor layer are provided on the lower surface (the surface facing the measurement object T) of the base material 111 which is a flexible insulating layer. A ground wire. In the following, one of the two ground lines is called the "first ground line 113" and the other is called the "second ground line 114".

As shown in FIG. 13 , the signal line 112 has a predetermined width (length in the left-right direction in FIG. 13 ) and extends along the longitudinal direction of the transmission substrate 110 (up-and-down direction in FIG. 13 ). The first ground line 113 and the second ground line 114 each have a predetermined width and extend along the longitudinal direction of the transmission substrate 110 . The widths of the signal line 112 , the first ground line 113 and the second ground line 114 are equal in the longitudinal direction. In this way, the signal line 112, the first ground line 113 and the second ground line 114 are arranged to extend parallel to each other.

The signal line 112 is provided between the first ground line 113 and the second ground line 114 with a predetermined interval between the first ground line 113 and the second ground line 114 respectively. The respective widths and mutual intervals of the signal line 112 , the first ground line 113 and the second ground line 114 are set so that the characteristic impedance of the high-frequency transmission line matches the specific impedance of the measurement object T.

The signal line 112 is electrically connected to the first contact 101 . The first contact 101 is formed on the signal line 112 by laminating plating (for example, nickel plating) applied to the surface of the signal line 112 . Therefore, the first contact 101 and the signal line 112 are integrally formed. In other words, a part of the signal line 112 functions as the first contact 101 .

The first ground wire 113 is electrically connected to the second contact 102 . Like the first contact 101 , the second contact 102 is formed on the first ground line 113 by laminating the plating applied to the first ground line 113 .

The second ground wire 114 is electrically connected to the third contact 103 . Like the first contact 101 and the second contact 102 , the third contact 103 is formed on the second ground line 114 by laminating the plating applied to the second ground line 114 .

In the above manner, the first contact piece 101, the second contact piece 102 and the third contact piece 103 are integrally provided with the corresponding signal line 112, the first ground line 113 and the second ground line 114 respectively. Transmission loss between the contacts 101, 102, 103 and the high-frequency transmission line of the transmission substrate 110. From another point of view, the first contact 101, the second contact 102, and the third contact 103 in this embodiment are not contact members that are prone to bending like needle-shaped contacts. The concern about the increase in transmission loss is low and the transmission loss can be suppressed. Therefore, the transmission characteristics of high-frequency transmission lines are improved.

The first contact 101 , the second contact 102 and the third contact 103 are arranged on a straight line perpendicular to the longitudinal direction of the transmission substrate 110 . That is, the first contact 101 , the second contact 102 and the third contact 103 are arranged on an imaginary straight line orthogonal to the signal line 112 , the first ground line 113 and the second ground line 114 extending parallel to each other. superior. The first contact piece 101 , the second contact piece 102 and the third contact piece 103 will be pressed against the measurement object T from a direction perpendicular to the contact surface Ts with the measurement object T (refer to FIG. 11 ).

The other end of the transmission substrate 110 (not shown) is electrically connected to a controller (not shown). The high-frequency signals input from the first contact 101 , the second contact 102 and the third contact 103 are transmitted through the high-frequency transmission lines of the transmission substrate 110 and then input to the control device.

As shown in Figures 10 to 12, the body part 120 has a base part 130, a holding part 140 and a supporting part 150. The holding part 140 holds the first contact piece 101, the second contact piece 102 and the third contact piece. The support part 150 is installed on the base part 130 and supports the holding part 140. The base part 130, the holding part 140 and the supporting part 150 are integrally formed with each other by resin. The holding part 140 , the supporting part 150 , and the base part 130 are arranged along the longitudinal direction of the transmission substrate 110 .

The base portion 130 is formed in a rectangular parallelepiped shape and moves in the vertical up-and-down direction (the direction perpendicular to the contact surface Ts of the measurement object T) by a lifting device (not shown) of the inspection device. By the up and down movement of the base part 130, the first contact piece 101, the second contact piece 102 and the third contact piece 103 come into contact with and separate from the measurement object T. As shown in FIG. 11 , the middle portion of the transmission substrate 110 separated from one end in the longitudinal direction is attached to the bottom surface of the base portion 130 (the surface facing the measurement object T). The transmission substrate 110 is mounted on the base portion 130 without applying tension.

The holding part 140 is formed in a rectangular parallelepiped shape, and a part thereof protrudes toward the measurement object T from the bottom surface of the base part 130 . An elastic member 160 is provided on the bottom surface of the holding portion 140 protruding from the base portion 130 (the surface facing the measurement object T). The elastic member 160 serves as a first contact that allows the pressure toward the measurement object T. A movement allowing portion for the member 101, the second contact member 102 and the third contact member 103 to move independently of each other.

The elastic member 160 is made of rubber, for example, and can expand and contract upon receiving external force. The elastic member 160 is adhered to the bottom surface of the holding part 140 with an adhesive. As shown in FIGS. 11 and 12 , the elastic member 160 is connected to one end of the transmission substrate 110 , and the first contact 101 , the second contact 102 and the third contact 103 are installed across the transmission substrate 110 . The first contact 101 , the second contact 102 and the third contact 103 are opposite to the elastic member 160 across the transmission substrate 110 . That is, the holding part 140 holds the transmission substrate 110 and the first contact 101, the second contact 102 and the third contact 103 provided on the transmission substrate 110 via the elastic member 160.

The elastic member 160 is preferably made of a material that is easier to elastically deform than the first contact member 101 , the second contact member 102 and the third contact member 103 . In addition, the elastic member 160 preferably has priority over the first contact member 101 , the second contact member 102 and the third contact member 103 when pressing the first contact member 101 , the second contact member 102 and the third contact member 103 against the measurement object T. The third contact member 103 is deformed.

As shown in FIG. 2 , the support part 150 is mainly composed of a connection mechanism having a pair of connection parts 151 and 155 . The pair of connecting portions 151 and 155 each extend in parallel with the contact surface Ts of the measurement object T and are arranged in a direction perpendicular to the contact surface Ts.

One connection part 151 has a rod part 152, a joint part 153 and a joint part 154. The rod part 152 has a rectangular cross section. The joint part 153 connects one end of the rod part 152 and the holding part 140. The joint part 154 connects the rod. The other end of the part 152 and the base part 130. Similarly, the other connecting part 155 has a rod part 156, a joint part 157 and a joint part 158. The rod part 156 has a rectangular cross section. The joint part 157 connects one end of the rod part 156 and the holding part 140. The joint part 156 has a rectangular cross section. The portion 158 connects the other end of the rod portion 156 and the base portion 130 .

Semicircular grooves are formed between the rod portions 152 and 156, the base portion 130 and the holding portion 140. Each groove is parallel to the contact surface Ts of the measurement object T and extends perpendicularly to the longitudinal direction of the rod portions 152 and 156 (the left-right direction in FIG. 2). Therefore, joint portions 153, 154, 157, and 158 are provided between the rod portions 152 and 156, the base portion 130, and the holding portion 140. The cross-sectional area of each joint part 153, 154, 157, 158 perpendicular to the longitudinal direction of the rod parts 152, 156 is smaller than that of the rod parts 152, 156, and is configured to be elastically deformed more easily than the rod parts 152, 156.

When the base portion 130 is moved downward in the vertical direction and the first contact piece 101 , the second contact piece 102 and the third contact piece 103 are pressed against the measurement object T, the reaction force of the pressing force (hereinafter, also referred to as (called "pressure reaction force") to elastically deform the joint parts 153 and 154 of the connecting part 151 and the joint parts 157 and 158 of the connecting part 155, and each rod part 152 and 156 will be relative to the holding part 140 and the base part 130 Tilt (relative rotation).

Taking one connecting part 151 as an example, the joint part 153 of one side is used as the center so that the rod part 152 rotates relative to the holding part 140, and the other joint part 154 is used as the center so that the rod part 152 rotates relative to the base part. 130 relative rotation. In this way, when the first contact piece 101, the second contact piece 102 and the third contact piece 103 are pressed against the measurement object T, the support part 150 will be elastically deformed, thereby allowing the base part 130 to be held along the vertical direction. relative movement of the part 140. In addition, the support part 150 is composed of a connection mechanism, so the base part 130 and the holding part 140 can move relatively linearly in the vertical direction.

Next, the function of the measurement device 200 will be described.

For the measurement of the high-frequency characteristics of the measurement object T, the base portion 130 is moved vertically (in the vertical direction in this embodiment) relative to the measurement object T, and the first contact piece 101 and the second contact piece are moved 102 and the third contact member 103 are in contact with the contact surface Ts of the measurement object T. From this state, the base portion 130 is further moved downward, whereby the first contact piece 101 , the second contact piece 102 and the third contact piece 103 are pressed against the measurement object T by a predetermined pressing force and are electrically connected. . As the first contact piece 101 , the second contact piece 102 and the third contact piece 103 are moved from the state of contact with the measurement object T, the first contact piece 101 , the second contact piece 102 and the third contact piece 103 are further pressed, causing the support part 150 to elastically deform, and causing the holding part 140 to press against the base part. 130 for relative movement. In this way, the holding part 140 will move relative to the base part 130, so the first contact piece 101, the second contact piece 102 and the third contact piece 103 held in the holding part 140 will also move relative to the base part 130. Therefore, excessive movement of the first contact piece 101 , the second contact piece 102 and the third contact piece 103 pressed against the measurement object T is suppressed, and the occurrence of contact traces in the measurement object T is suppressed. In addition, the pressing force for pressing the first contact piece 101 , the second contact piece 102 and the third contact piece 103 against the measurement object T is ensured by the elastic force generated by the elastic deformation of the support part 150 . That is, as the first contact piece 101, the second contact piece 102 and the third contact piece 103 are pressed against the measurement object T, the support portion 150 is elastically deformed, so that it can be connected with the signal line 112, the first ground line 113 and the The second ground wire 114 is formed into an integrated cylindrical shape to form the first contact piece 101 , the second contact piece 102 and the third contact piece 103 , which can suppress the faults caused by the first contact piece 101 , the second contact piece 102 and the third contact piece 103 . The bending of the third contact member 103 causes transmission loss, and can be brought into contact with the measurement object T by a predetermined pressure. Therefore, the occurrence of contact marks on the measurement object T can be suppressed, and the measurement precision of the measurement device 200 can be improved.

In addition, measurement devices generally have a structure in which a printed circuit board provided with contacts is attached to the tip of an irreversible semi-rigid coaxial cable. In such a measuring device, when the contact piece is pressed against the measurement object with a predetermined pressing force, the coaxial cable will be deformed, thereby causing the characteristic impedance of the coaxial cable to change. Therefore, in such a measuring device, there is a concern that the transmission loss due to the coaxial cable increases and the measurement accuracy of the high-frequency characteristics due to the measuring device decreases.

In contrast, in the measurement device 200, the transmission substrate 110 is a flexible printed circuit board with flexibility, so it is subject to elastic deformation of the support portion 150 (relative movement in the vertical direction between the base portion 130 and the holding portion 140). bend. Specifically, the transmission substrate 110 is deformed in such a manner that one end portion attached to the holding portion 140 moves up and down (in the up and down direction in FIG. 11 ) relative to an intermediate portion attached to the base portion 130 . During such deformation of the transmission substrate 110, the relative positional relationship (spacing) of the signal line 112, the first ground line 113 and the second ground line 114 does not change. Therefore, even if the transmission substrate 110 deforms as the support portion 150 deforms, the characteristic impedance of the transmission substrate 110 does not change, and the transmission loss of the transmission substrate 110 is suppressed. Therefore, the measurement precision of the measurement device 200 can be improved.

In addition, in general, in the measurement object, there may be a difference in level (concavity and convexity) on the measurement surface. In particular, when the measurement object is an electronic circuit substrate, larger unevenness is likely to occur compared to a semiconductor wafer, for example. When the measurement object has a height difference, there may be a concern that a certain contact piece contacts the relatively high height part first, while other contact pieces will not fully contact the relatively low height part. In this way, when the measurement object has a height difference (concave-convexity), the contact state between the contact piece and the measurement object becomes uneven, and there is a concern that a good contact state cannot be obtained.

In contrast, in the measuring device 200 , the first contact 101 , the second contact 102 and the third contact 103 are mounted on the holding part 140 via the elastic member 160 . In addition, the first contact member 101, the second contact member 102 and the third contact member 103 are provided on the flexible transmission substrate 110. Therefore, when the first contact member 101 , the second contact member 102 and the third contact member 103 come into contact with the measurement object T, the elastic member 160 opposite to the contact member will be compressed and deform the transmission substrate 110 . Therefore, even if a certain contact piece comes into contact with the measurement object T first, the holding part 140 can be further moved toward the measurement object T together with other contact pieces through the deformation of the elastic member 160 and the transmission substrate 110 .

In this way, in the measuring device 200, the first contact piece 101, the second contact piece 102, and the third contact piece 103 can move independently (in other words, move relative to each other) with different movement amounts, thereby allowing the height of the object T to be measured. difference. Therefore, the contact states of the first contact 101, the second contact 102, and the third contact 103 with the measurement object T can be equalized. Thereby, the first contact piece 101, the second contact piece 102, and the third contact piece can be pressed against the measurement object T with a predetermined pressing force, and a good contact state can be obtained.

(Third implementation type)

Next, a third embodiment of the present invention will be described with reference to Figures 14 and 15. The following description will focus on differences from the second embodiment, and the same components as those in the second embodiment will be designated by the same reference numerals and descriptions will be omitted.

In the second embodiment described above, the movement allowing portion that allows the first contact 101 , the second contact 102 and the third contact 103 to move independently of each other is provided in the elastic member 160 of the holding portion 140 . In the second embodiment described above, the elastic member 160 expands and contracts to cause the first contact member 101 , the second contact member 102 and the third contact member 103 to move independently of each other.

On the other hand, in the measurement device 300 of the third embodiment, the movement allowing portion is the elastic structure portion 260 that is integrally formed with the holding portion 140 .

The elastic structure part 260 has a base part 261 and a plurality of deformation parts. The base part 261 is connected to the holding part 140. The plurality of deformation parts are bent and deformed (elastically deformed) independently of each other with the base part 261 as a fulcrum.

As shown in FIGS. 14 and 15 , the deformation portions are provided with a number corresponding to the contacts (three in this embodiment), and first contacts 101 are installed on each of the deformation portions across the transmission substrate 110 . , the second contact piece 102 and the third contact piece 103. In the following, the deformation part to which the first contact 101 is attached will be called the "first deformation part 265", the deformation part to which the second contact 102 will be attached will be called the "second deformation part 266", and the deformation part to which the third contact 102 will be attached will be called the "second deformation part 266". The deformation part of the contact piece 103 is called the "third deformation part 267". The first deformation part 265, the second deformation part 266 and the third deformation part 267 are each formed by bending the proximal end side from the base part 261, and extend parallel to the measurement object T from the proximal end side. The front end portions of the first deformation portion 265, the second deformation portion 266, and the third deformation portion 267 are configured as free ends.

As shown in FIG. 14 , a gap 260 a is mainly formed between the first deformation part 265 , the second deformation part 266 and the third deformation part 267 and the holding part 140 . By providing the gap 260a, the first deformation part 265, the second deformation part 266 and the third deformation part 267 are prevented from colliding with the holding part 140.

In addition, slits 260b and 260c are formed between the first deformation part 265, the second deformation part 266 and the third deformation part 267 to separate each other. The base portion 261, the first deformation portion 265, the second deformation portion 266, and the third deformation portion 267 are integrally molded with resin together with the holding portion 140.

As shown in FIG. 15, the transmission substrate 110 is formed with slits 110a and 110b. The slits 110a and 110b are between the signal line 112 and the first ground line 113 and between the signal line 112 and the second ground line 114. extending along the long side. The first contact piece 101, the second contact piece 102 and the third contact piece 103 are separated from each other by the slits 110a and 110b, so they become easy to move independently.

The first deformation part 265, the second deformation part 266 and the third deformation part 267 are bendable and deformable, so that each of the free ends can move up and down in the vertical direction using the base part 261 as a fulcrum. In other words, the first deformation part 265, the second deformation part 266, and the third deformation part 267 are bendable and deformable with the base part 261 as a fulcrum. In addition, the first deformation part 265, the second deformation part 266 and the third deformation part 267 are separated by slits 260b and 260c, and can deform independently from each other. Therefore, the first contact piece 101, the second contact piece 102 and the third contact piece 103 installed on the first deformation part 265, the second deformation part 266 and the third deformation part 267 can also move independently of each other. In this fourth embodiment, similarly to the above-described third embodiment, the height difference of the measurement object T can be tolerated, and the first contact 101, the second contact 102, and the third contact 103 can be connected to each other. The contact state of the measurement object T becomes equal. Therefore, even if the measurement object T has a height difference, a good contact state between the first contact piece 101 , the second contact piece 102 and the third contact piece 103 and the measurement object T can be achieved.

In addition, similar to the second embodiment described above, the measuring device 300 may be configured such that the slits 110 a and 110 b are not provided in the transmission substrate 110 . In this case, instead of providing a plurality of slits 260b and 260c to provide a deformation portion (the configuration of FIG. 14), as shown in FIG. 16, a single deformation portion 268 is connected to the base portion 261, and The first contact 101 , the second contact 102 , and the third contact 103 are attached to the deformation portion 268 .

On the contrary, in the above-mentioned second embodiment, the slit 110a that separates the first contact 101, the second contact 102 and the third contact 103 can also be provided in the transmission substrate 110 in the same manner as the third embodiment. ,110b. When the slits 110a and 110b are provided in the transmission substrate 110, as described above, the first contact member 101, the second contact member 102 and the third contact member 103 can easily move independently. On the other hand, when the transmission substrate 110 is not provided with the slits 110a and 110b, no slits are formed between the signal line 112 and the first ground line 113 and between the signal line 112 and the second ground line 114. The air layer created by the slits 110a and 110b. Therefore, when the slits 110 a and 110 b are not provided in the transmission substrate 110 , the characteristic impedance of the high-frequency transmission line and the characteristic impedance of the measurement object T can be easily matched. Whether to provide the slits 110a and 110b in the transmission substrate 110 may be determined by considering the characteristic impedance of the high-frequency transmission line.

As described above, in the third embodiment in which the elastic structure portion 260 belonging to the movement allowing portion is bent and deformed independently of each other using the base portion 261 as a fulcrum, the same function as in the second embodiment is exerted. Effect. That is, the movement allowing part may allow independent movement of the contact piece by its own compression (expansion and contraction) as in the above-mentioned second embodiment, or may be as in the above-mentioned third embodiment by using the base part 261 represents the bending deformation of the plurality of deformation portions (the first deformation portion 265, the second deformation portion 266, and the third deformation portion 267) of the fulcrum to allow independent movement of the contact.

Next, modifications of the second and third embodiments will be described. As the following modifications are also within the scope of the present invention, the following modifications may be combined with each configuration of the above-described embodiment, or the following modifications may be combined with each other. In addition, the modifications disclosed in the description of the above embodiments can also be arbitrarily combined with other modifications.

In the above-mentioned second and third embodiments, the high-frequency transmission lines are coplanar lines. In this regard, the high-frequency transmission line may also be a strip line or a microstrip line or other lines.

In addition, in the above-mentioned second and third embodiments, the transmission substrate 110 is a flexible flexible printed substrate. In this regard, the transmission substrate 110 may be a rigid-flexible substrate including a flexible portion and a non-flexible portion. The "flexible transmission substrate" in the scope of the patent application is not limited to a flexible printed substrate that is flexible as a whole, but also includes a soft-hard composite substrate that is partially flexible.

In addition, in the above-mentioned second and third embodiments, the rod portions 152 and 156 of the connecting portions 151 and 155 in the supporting portion 150 have the same length as each other. In this regard, the rod portions 152 and 156 may be configured to have different lengths from each other.

In addition, in the above-mentioned second and third embodiments, the support part 150 is constituted by a connection mechanism having a pair of connection parts 151 and 155 . In this regard, the support portion 150 is not limited to a connection mechanism and may be any structure as long as it is deformed as the first contact 101 , the second contact 102 and the third contact 103 are pressed against the measurement object T. composition.

In addition, in the above-mentioned second and third embodiments, the first contact piece 101, the second contact piece 102, and the third contact piece 103 are formed in a cylindrical shape. It is not limited thereto, and the first contact 101, the second contact 102, and the third contact 103 may be formed in any shape. The first contact 101 , the second contact 102 , and the third contact 103 may also have shapes such as a corner prism, a pyramid, a cone, a pyramid, a truncated cone, or the like.

Next, the functions and effects of each of the above embodiments are summarized and explained.

In the first to third embodiments, the measuring devices 100, 200, and 300 are equipped with: first contact members 1, 101, second contact members 2, 102, and third contact members 3, 103; body parts 10, 120 ; and transmission substrates 60, 110; the first contact 1, 101, the second contact 2, 102, and the third contact 3, 103 are each pressed against the measurement object T; the body portion 10, 120 is installed There are first contacts 1, 101, second contacts 2, 102, and third contacts 3, 103; the transmission substrates 60, 110 are provided with electrically connected to the first contacts 1, 101, and the second contacts 2. 102. The high-frequency transmission line of the third contact 3, 103; wherein, the body part 120 has: a base part 20, 130; a holding part 30, 140; and a supporting part 40, 150; the holding part 30, 140 holds the first contact piece 1, 101, the second contact piece 2, 102, and the third contact piece 3, 103; the support parts 40, 150 are installed on the base parts 20, 130 and support the holding parts 30, 140; The holding portions 30 and 140 move relative to the base portions 20 and 130 as the first contact piece 1, 101, the second contact piece 2, 102, and the third contact piece 3, 103 press against the measurement object T. .

According to the first to third embodiments, since the holding portions 30 and 140 will press against the measurement object T as the first contact piece 1, 101, the second contact piece 2, 102, and the third contact piece 3, 103 The base parts 20 and 130 move relative to each other, so the first contact parts 1 and 101, the second contact parts 2 and 102, and the third contact parts 3 and 103 held by the holding parts 30 and 140 will also move along the The base portions 20 and 130 are relatively moved in the pressing direction. Thereby, excessive movement of the first contact piece 1, 101, the second contact piece 2, 102, and the third contact piece 3, 103 that are pressed against the measurement object T is suppressed, and the contact traces in the measurement object T are suppressed. happen. In addition, since excessive movement of the first contact 1, 101, the second contact 2, 102, and the third contact 3, 103 pressing against the measurement object T is suppressed, the first contact 1, 101, 101, 103, The second contact 2, 102, and the third contact 3, 103 are greatly bent, thereby suppressing the transmission loss caused by the first contact 1, 101, the second contact 2, 102, and the third contact 3, 103. increase. Therefore, the occurrence of contact marks on the measurement object T can be suppressed, and the measurement precision of the measurement devices 100, 200, and 300 can be improved.

In addition, in the first embodiment, the support portion 40 of the measuring device 100 will elastically deform as the first contact piece 1 and the second contact piece 2 press against the measurement object T.

In addition, in the measurement device 100 of the first embodiment, the support portion 40 is configured to have priority over the first contact 1 and the second contact 2 as the first contact 1 and the second contact 2 are pressed against the measurement object T. The contact piece 2 is elastically deformed.

According to such a first embodiment, when the first contact piece 1 and the second contact piece 2 are pressed against the measurement object T, the elastic deformation of the support portion 40 of the body portion 10 can be used to press the first contact piece 1 and the second contact piece 2 with a predetermined pressing force. to bring the first contact piece 1 and the second contact piece 2 into contact. Therefore, there is no need to actively bend the first contact member 1 and the second contact member 2, and the durability of the first contact member 1 and the second contact member 2 can be improved.

In addition, in the measuring device 100 of the first embodiment, the first contact piece 1 and the second contact piece 2 are each formed of sintered metal.

In addition, in the measuring device 100 of the first embodiment, the first contact piece 1 and the second contact piece 2 are each made of tool steel.

According to the first embodiment, the first contact piece 1 and the second contact piece 2 are made of a material with high durability and excellent wear resistance, so the measurement accuracy of the measuring device 100 is suppressed from deteriorating with wear. Reduce this situation.

In addition, in the first embodiment, the holding portion 30 has: a first holding portion 31 that holds the first contact 1 connected to the base portion 20; and a second contact 2 that holds the connection to the base portion 20. The second holding part 35; and the first holding part 31 and the second holding part 35 are movably installed on the base part 20 independently of each other.

According to such a first embodiment, the first contact 1 and the second contact 2 are electrically connected to the transmission substrate 60 and are held by the first holding part 31 and the second holding part 35 that are independently movable to each other. . Thereby, the first contact piece 1 and the second contact piece 2 can move independently of each other. In this way, through the movement of the first holding part 31 and the second holding part 35, the first contact piece 1 and the second contact piece 2 move independently of each other, so the first contact piece 1 and the second contact piece can be greatly ensured. 2 movement amount. Therefore, even if a height difference occurs in the measurement object T, the first contact 1 and the second contact 2 are brought into equal contact with the measurement object T, and a good contact state can be achieved. Therefore, the measurement precision of the measurement device 100 is improved.

In addition, in the first embodiment, the transmission substrate 60 has: a first connecting portion 65 connected to the first contact 1; and a second connecting portion 66 connected to the second contact 2; and the first connecting portion 65 and the second connecting portion 66 are separated by the slit 60a and are configured to move independently of each other.

According to this first embodiment, the first connecting portion 65 and the second connecting portion 66 can move independently, so the relative movement of the first contact 1 and the second contact 2 is suppressed from being hindered by the transmission substrate 60 . Therefore, the first contact piece 1 and the second contact piece 2 can be relatively moved more significantly. Therefore, even if the unevenness of the measurement target T becomes large, the measurement can be performed with good accuracy. That is, according to this embodiment, the allowable amount of unevenness (height difference) of the measurement object T for high-precision measurement is increased.

In addition, in the first embodiment, the body part 10 further has: a first supporting part 41 provided on the base part 20 and supporting the first holding part 31; and a second holding part 35 provided on the base part 20 and supporting the first holding part 31. The second support part 45; and the first support part 41 will elastically deform as the first contact piece 1 is pressed against the measurement object T, and the second support part 45 will follow the second contact piece 2 to the measurement object T. The pressure causes elastic deformation.

According to such a first embodiment, the first support part 41 and the second support part 45 are independent and elastically deformable, so that the first contact piece 1 and the second contact piece 2 can move independently of each other. Therefore, through the elastic deformation of the first support part 41 and the second support part 45, the first contact member 1 and the second contact member 2 can be moved with a larger movement amount than when the first contact member 1 and the second contact member 2 are bent. Part 1 and second contact part 2 move independently. That is, the body part 10 is a larger member than the first contact piece 1 and the second contact piece 2, so it is easy to ensure a movement amount for independent movement.

In addition, in the measurement devices 200 and 300 of the second and third embodiments, the transmission substrate 110 is flexible, and the high-frequency transmission line includes a signal line 112 and a ground line (first ground line 113, second ground line 114), and the first contact piece 101, the second contact piece 102 and the third contact piece 103 are integrally provided with the corresponding signal lines 112 and ground lines (the first ground line 113, the second ground line 114), The support part 150 will elastically deform as the first contact piece 101, the second contact piece 102, and the third contact piece 103 press against the measurement object T.

According to such second and third embodiments, when the first contact piece 101, the second contact piece 102, and the third contact piece 103 are pressed against the measurement object T, the support portion 150 of the body portion 120 can The elasticity changes to bring the first contact piece 101, the second contact piece 102, and the third contact piece 103 into contact with a predetermined pressing force. In addition, the high-frequency transmission line is provided on the flexible transmission substrate 110, so even if the measurement object T is pressed against the first contact 101, the second contact 102, and the third contact 103 and the transmission substrate 110 is deformed, , which can also suppress transmission losses. Therefore, by pressing the first contact piece 101, the second contact piece 102, and the third contact piece 103 against the measurement object T with a predetermined pressing force, the transmission loss can be suppressed, so the measurement precision of the measuring devices 200 and 300 can be improved. Spend.

In addition, the measuring devices 200 and 300 of the second and third embodiments are further equipped with a movement allowing part (elastic member 160, elastic structure part 260). The movement allowing part is provided in the holding part 140 and allows the movement of the moving parts as they move. The first contact piece 101 , the second contact piece 102 , and the third contact piece 103 against which the object T is pressed move independently of each other.

In addition, in the measuring device 200 of the second embodiment, the movement allowing portion is an elastic member 160 having elasticity, and the first contact 101, the second contact 102, and the third contact 103 are configured by the elastic member. 160 degrees of elastic deformation and can move independently of each other.

In addition, in the measurement device 300 of the third embodiment, the movement allowing portion includes: a base portion 261 connected to the holding portion 140; and a plurality of deformation portions (first deformation portion 265) that elastically deform independently of each other with the base portion 261 as a fulcrum. , the second deformation part 266, the third deformation part 267), and the first contact piece 101, the second contact piece 102, the third contact piece 103 are installed on a plurality of corresponding deformation parts (the first deformation part 265, The second deformation part 266, the third deformation part 267), and are configured to be elastically deformed with the base part 261 as a fulcrum by the deformation parts (the first deformation part 265, the second deformation part 266, the third deformation part 267), so as to be mutually accessible to each other. Move independently.

According to the second and third embodiments, the first contact 101, the second contact 102, and the third contact 103 can be moved independently of each other. Therefore, even when a height difference occurs in the measurement object T, the first contact 101, the second contact 102, and the third contact 103 can be moved independently. Each of the first contact 101 , the second contact 102 , and the third contact 103 contacts the measurement object T equally. Therefore, a good contact state between the first contact piece 101 , the second contact piece 102 , and the third contact piece 103 and the measurement object T can be achieved, and the measurement precision of the measurement devices 200 and 300 can be improved.

The embodiments of the present invention have been described above. However, the above-mentioned embodiments only show a part of the application examples of the present invention, and do not limit the technical scope of the present invention to the specific configuration of the above-mentioned embodiments.

This case claims priority based on Japanese Patent Application No. 2018-141831, Japanese Patent Application No. 2018-141832 and Japanese Patent Application No. 2018-141833 filed with the Japan Patent Office on July 27, 2018, which are hereby incorporated by reference. All contents of these applications are incorporated into the patent specification of this invention.

1‧‧‧First contact piece

2‧‧‧Second contact piece

10‧‧‧Main part

11‧‧‧The first body part

15‧‧‧Second body part

20‧‧‧Base part

20a‧‧‧Bolt

21‧‧‧First base part

25‧‧‧Second base part

30‧‧‧Maintenance Department

31‧‧‧First Holding Department

35‧‧‧Second holding part

40‧‧‧Support Department

41‧‧‧First Support Department

45‧‧‧Second Support Department

60‧‧‧Transmission substrate

100‧‧‧Measuring device

Claims (4)

A measuring device, which is provided with: a plurality of contact pieces, each of which is pressed against a measurement object; a main body portion, which is equipped with the aforementioned plurality of contact pieces; and a transmission substrate, which is electrically connected to the aforementioned plurality of contact pieces. A high-frequency transmission line; the aforementioned body part has: a base part; a holding part that holds the plurality of contacts; and a support part that is installed on the base part and supports the holding part; the holding part follows The plurality of contact pieces are pressed against the measurement object to relatively move the base portion; the transmission substrate is flexible, the high-frequency transmission line contains signal lines and ground lines, and the plurality of contact pieces are connected to The corresponding signal lines and the ground wires are integrally provided, and the supporting portion is elastically deformed as the plurality of contacts are pressed against the measurement object; the measuring device further has a movement allowing portion, the movement allowing portion It is provided in the holding part, has the plurality of contacts attached thereto, and allows the plurality of contacts to move independently of each other in response to pressing against the measurement object. The measuring device as claimed in claim 1, wherein the support portion is configured to elastically deform in priority to the plurality of contact members as the plurality of contact members are pressed against the measurement object. The measuring device according to claim 1, wherein the movement allowing portion is an elastic member having elasticity, and the plurality of contacts are configured to move independently of each other by expansion and contraction of the elastic member. The measuring device according to claim 1, wherein the movement-allowing part has: a base part connected to the holding part; and a plurality of deformation parts that are elastically deformed independently of each other with the base part as a fulcrum; The plurality of contact pieces are mounted on the corresponding plurality of deformation portions, and are configured to move independently of each other by bending and deforming the plurality of deformation portions using the base portion as a fulcrum.

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