JP2020016627A - Measuring apparatus - Google Patents

Abstract

To increase the accuracy of measurement by a measuring apparatus.SOLUTION: A measuring apparatus 100 includes: a flexible transmission substrate 10 provided with a high-frequency transmission line including a signal line 12, a first ground line 13, and a second ground line 14; a first contact maker 1, a second contact maker 2, and a third contact maker 3 formed on the signal line 12, the first ground line 13, and the second ground line 14, respectively, and pressed against a measurement target T; and a body part 20 to which the first contact maker 1, the second contact maker 2, the third contact maker 3, and the transmission substrate 10 are attached. The body part 20 has: a base unit 30; a holding unit 40 holding the first contact maker 1, the second contact maker 2, the third contact maker 3, and the transmission substrate 10; and a supporting unit 50 attached to the base unit 30 for supporting the holding unit 40. The supporting unit 50 is elastically deformed by the pressing of the first contact maker 1, the second contact maker 2, and the third contact maker 3 against the measurement target T.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a measuring device.

  Patent Literature 1 discloses a contact probe including a semi-rigid coaxial cable having a predetermined hardness and irreversible to bending, and a printed wiring board as a probe tip member attached to the tip of the coaxial cable. Is disclosed. A contact electrode, which is a contact portion with a measurement target, is formed on the printed wiring board as a fine coplanar stripline.

JP 2005-223170 A

  In a measuring device that measures high-frequency characteristics, it is desirable that a probe be pressed against a measurement target with a predetermined pressing force in order to obtain a good contact state between the contact and the measurement target.

  However, in the measurement device described in Patent Literature 1, the printed wiring board on which the contact electrodes are provided is attached to the tip of a semi-rigid coaxial cable having irreversibility. Therefore, when the printed wiring board is pressed against the measurement target with a predetermined pressing force, the coaxial cable is deformed, so that the characteristic impedance of the coaxial cable changes. As a result, the transmission loss due to the coaxial cable increases, and the measurement accuracy of the high-frequency characteristics by the measuring device may decrease.

  The present invention has been made in view of the above problems, and has as its object to improve the measurement accuracy of a measuring device.

  According to an embodiment of the present invention, the measuring device includes a plurality of contacts each of which is pressed against an object to be measured, a high-frequency transmission line including a signal line and a ground line, and a flexible transmission board, And a main body on which the transmission board is mounted. The plurality of contacts are provided integrally with the corresponding signal lines and ground lines, respectively. The main body has a base, a holding unit that holds the contact and the transmission board, and a support that is attached to the base and supports the holding unit, and the support presses the contact against a measurement target. It is elastically deformed.

  According to this aspect, when the contact is pressed against the measurement target, the contact can be brought into contact with a predetermined pressing force by elastically deforming the support of the main body. In addition, since the high-frequency transmission line is provided on the flexible transmission substrate, transmission loss can be suppressed even if the transmission substrate is deformed as the contact is pressed against the measurement target. As described above, the contact can be pressed against the measurement target with a predetermined pressing force, and the transmission loss due to the pressing can be suppressed while maintaining the predetermined pressing force, so that the measurement accuracy can be improved.

It is a perspective view showing the measuring device concerning a 1st embodiment of the present invention from the upper part. It is a side view showing the measuring device concerning a 1st embodiment of the present invention. It is a perspective view showing the measuring device concerning a 1st embodiment of the present invention from the bottom. It is a top view of the transmission board of the measuring device concerning a 1st embodiment of the present invention. It is a perspective view showing a main part of a measuring device concerning a 2nd embodiment of the present invention. It is a perspective view showing the measuring device concerning a 2nd embodiment of the present invention from the bottom. It is a perspective view showing a main part of a measuring device concerning a modification of a 2nd embodiment of the present invention.

(1st Embodiment)
Hereinafter, the measuring device 100 according to the first embodiment of the present invention will be described with reference to FIGS.

  The measuring device 100 is used, for example, in an inspection device (not shown) for electrically inspecting a circuit board. The measurement apparatus 100 generates a measurement target T (see FIG. 2) included in a circuit board on a semiconductor wafer or an electronic circuit board on which a wiring pattern is printed, an electronic circuit mounting board on which a semiconductor wafer or an electronic circuit board is mounted, or the like. The high-frequency characteristics of the electromagnetic wave to be measured are measured.

  As shown in FIGS. 1 to 3, the measuring device 100 includes a first contact 1, a second contact 2, and a third contact 3, each of which is pressed against the measurement target T, and a high-frequency transmission. It includes a transmission substrate 10 provided with a line and having flexibility, and a main body 20 to which the first contact 1, the second contact 2, and the third contact 3 are attached.

  The first contact 1, the second contact 2, and the third contact 3 are electrodes that are pressed against the measurement target T and input a high-frequency signal from the measurement target T, respectively. As shown in FIGS. 3 and 4, the first contact 1, the second contact 2, and the third contact 3 are formed in the same cylindrical shape, and are provided at one end in the longitudinal direction of the transmission board 10. Can be

  The transmission board 10 is a strip-shaped flexible printed board having flexibility, and can be deformed by an external force.

  As shown in FIGS. 3 and 4, the transmission board 10 is provided with a coplanar line as a high-frequency transmission line. Specifically, in the transmission board 10, a single signal line 12 as a conductor layer and a conductor layer are formed on the lower surface (the surface facing the measurement target T) of the base material 11 which is a flexible insulating layer. And two ground lines. Hereinafter, one of the two ground lines is referred to as a “first ground line 13”, and the other is referred to as a “second ground line 14”.

  As shown in FIG. 4, the signal line 12 has a predetermined width (length in the horizontal direction in FIG. 4), and extends along the longitudinal direction of the transmission board 10 (vertical direction in FIG. 4). The first ground line 13 and the second ground line 14 each have a predetermined width and extend along the longitudinal direction of the transmission board 10. The widths of the signal line 12, the first ground line 13, and the second ground line 14 are respectively uniform in the longitudinal direction. As described above, the signal line 12, the first ground line 13, and the second ground line 14 are provided to extend in parallel with each other.

  The signal line 12 is provided between the first ground line 13 and the second ground line 14 at a predetermined interval from each of the first ground line 13 and the second ground line 14. The width and the distance between each of the signal line 12, the first ground line 13, and the second ground line 14 are set such that the characteristic impedance of the high-frequency transmission line matches the characteristic impedance of the measurement target T.

  The first contact 1 is electrically connected to the signal line 12. The first contact 1 is formed on the signal line 12 by stacking plating (eg, nickel plating) applied to the surface of the signal line 12. Therefore, the first contact 1 is formed integrally with the signal line 12. In other words, a part of the signal line 12 functions as the first contact 1.

  The second contact 2 is electrically connected to the first ground line 13. Similarly to the first contact 1, the second contact 2 is formed on the first ground line 13 by laminating the plating applied to the first ground line 13.

  The third contact 3 is electrically connected to the second ground line 14. Similarly to the first contact 1 and the second contact 2, the third contact 3 is formed on the second ground line 14 by laminating the plating applied to the second ground line 14.

  As described above, the first contact 1, the second contact 2, and the third contact 3 are provided integrally with the corresponding signal line 12, first ground line 13, and second ground line 14, respectively. Transmission loss between each of the contacts 1, 2, 3 and the high-frequency transmission line of the transmission board 10 is suppressed. Thereby, transmission characteristics in the high-frequency transmission line are improved.

  The first contact 1, the second contact 2, and the third contact 3 are provided side by side on a straight line perpendicular to the longitudinal direction of the transmission board 10. That is, the first contact 1, the second contact 2, and the third contact 3 are arranged on a virtual straight line orthogonal to the signal line 12, the first ground line 13, and the second ground line 14 extending in parallel with each other. Provided. The first contact 1, the second contact 2, and the third contact 3 are pressed against the measurement target T from a direction perpendicular to the contact surface Ts (see FIG. 2) of the measurement target T.

  The other end (not shown) of the transmission board 10 is electrically connected to a controller (not shown). High-frequency signals input from the first contact 1, the second contact 2, and the third contact 3 are transmitted by the high-frequency transmission line of the transmission board 10 and input to the control device.

  As shown in FIGS. 1 to 3, the main body 20 is attached to the base 30, a holder 40 for holding the first contact 1, the second contact 2, and the third contact 3, and attached to the base 30. And a supporting portion 50 that supports the holding portion 40. The base section 30, the holding section 40, and the support section 50 are integrally formed of resin. The holding section 40, the support section 50, and the base section 30 are arranged side by side in the longitudinal direction of the transmission board 10.

  The base portion 30 is formed in a rectangular parallelepiped shape, and is moved vertically (in a direction perpendicular to the contact surface Ts of the measurement target T) by an elevating device (not shown) of the inspection device. As the base unit 30 moves up and down, the first contact 1, the second contact 2, and the third contact 3 come into contact with and separate from the measurement target T. As shown in FIG. 2, an intermediate portion of the transmission board 10 that is separated from one end in the longitudinal direction is attached to the lower surface of the base 30 (the surface facing the measurement target T). The transmission board 10 is attached to the base 30 so that no tension acts.

  The holding unit 40 is formed in a rectangular parallelepiped shape, and a part thereof projects from the lower surface of the base unit 30 toward the measurement target T. The first contact 1, the second contact 2, and the third contact 3 accompanying the pressing against the measurement target T are formed on the lower surface (the surface facing the measurement target T) of the holding unit 40 projecting from the base unit 30. An elastic member 60 is provided as a movement permitting portion that allows independent movement of the member.

  The elastic member 60 is formed of, for example, rubber or the like, and can be expanded and contracted by an external force. The elastic member 60 is adhered to the lower surface of the holding section 40 with an adhesive. 2 and 3, one end of the transmission board 10 is adhered to the elastic member 60, and the first contact 1, the second contact 2, and the third contact 3 are interposed via the transmission board 10. It is attached. The first contact 1, the second contact 2, and the third contact 3 face the elastic member 60 with the transmission board 10 interposed therebetween. That is, the holding unit 40 holds the transmission board 10 and the first contact 1, the second contact 2, and the third contact 3 provided on the transmission board 10 via the elastic member 60.

  The elastic member 60 is preferably made of a material that is more easily elastically deformed than the first contact 1, the second contact 2, and the third contact 3. When the first contact 1, the second contact 2, and the third contact 3 are pressed against the measurement target T, the elastic member 60 causes the first contact 1, the second contact 2, and the third contact It is desirable that the child 3 be deformed preferentially.

  As shown in FIG. 2, the support portion 50 is mainly configured by a link mechanism having a pair of link portions 51 and 55. The pair of link portions 51 and 55 extend in parallel with the contact surface Ts of the measurement target T, and are provided side by side in a direction perpendicular to the contact surface Ts.

  One link portion 51 includes a rod portion 52 having a rectangular cross section, a joint portion 53 connecting one end of the rod portion 52 and the holding portion 40, and a joint portion connecting the other end of the rod portion 52 and the base portion 30. 54. Similarly, the other link portion 55 connects a rod portion 56 having a rectangular cross section, a joint portion 57 connecting one end of the rod portion 56 to the holding portion 40, and a second end of the rod portion 56 and the base portion 30. And a joint portion 58.

  A semicircular notch is formed between the rod portions 52 and 56 and the base portion 30 and the holding portion 40. Each notch extends parallel to the contact surface Ts of the measurement target T and perpendicular to the longitudinal direction of the rod portions 52, 56 (the left-right direction in FIG. 2). Thus, joints 53, 54, 57, 58 are provided between the rods 52, 56 and the base 30 and the holding unit 40. Each of the joints 53, 54, 57, 58 has a cross-sectional area perpendicular to the longitudinal direction of the rods 52, 56 smaller than the rods 52, 56, and is configured to be more easily elastically deformed than the rods 52, 56. You.

  When the first contact 1, the second contact 2, and the third contact 3 are pressed against the measurement target T by moving the base portion 30 downward in the vertical direction, the reaction force (hereinafter, also referred to as "press reaction force") is obtained. ), The joints 53 and 54 of the link 51 and the joints 57 and 58 of the link 55 are elastically deformed, and the rods 52 and 56 are tilted with respect to the holder 40 and the base 30 (relative rotation). ).

  If one link part 51 is described as an example, the rod part 52 rotates relative to the holding part 40 about one joint part 53, and the rod part 52 moves relative to the base part 30 about the other joint part 54. Relative rotation. As described above, when the first contact 1, the second contact 2, and the third contact 3 are pressed against the measurement target T, the support portion 50 is elastically deformed, thereby holding the base portion 30 along the vertical direction. The relative movement with respect to the part 40 is allowed. Further, since the support portion 50 is configured by a link mechanism, the base portion 30 and the holding portion 40 can relatively move substantially linearly in the vertical direction.

  Next, the operation of the measuring device 100 will be described.

  To measure the high-frequency characteristics of the measurement target T, the base unit 30 is moved vertically (in the present embodiment, in the vertical direction) with respect to the measurement target T, and the first contact 1, the second contact 2, and the The three contacts 3 are brought into contact with the contact surface Ts of the measurement target T. By moving the base unit 30 further downward from this state, the first contact 1, the second contact 2, and the third contact 3 are pressed against the measurement target T by a predetermined pressing force to be electrically connected. . As the first contact 1, the second contact 2, and the third contact 3 are further pressed from the state of being in contact with the measurement target T, the support portion 50 is elastically deformed. The pressing force for pressing the first contact 1, the second contact 2, and the third contact 3 against the measurement target T is ensured by the elastic force generated by the elastic deformation of the support portion 50.

  Since the transmission board 10 is a flexible printed circuit board having flexibility, the transmission board 10 is bent by the elastic deformation of the support section 50 (the base section 30 and the holding section 40 move relatively in the vertical direction). Specifically, the transmission board 10 is deformed such that one end attached to the holding section 40 moves vertically (up and down in FIG. 2) with respect to the intermediate section attached to the base section 30. In such a modification of the transmission board 10, the relative positional relationship (interval) of the signal line 12, the first ground line 13, and the second ground line 14 does not change. Therefore, even if the transmission board 10 is deformed along with the deformation of the support portion 50, the characteristic impedance of the transmission board 10 does not change, and the transmission loss in the transmission board 10 is suppressed. Therefore, the measurement accuracy of the measurement device 100 can be improved.

  In addition, in general, in a measurement object, a height difference (irregularities) may occur on a measurement surface. In particular, when the measurement target is an electronic circuit board, large irregularities are likely to occur as compared with a semiconductor wafer or the like. If there is a height difference in the measurement object, a certain contact comes in contact with a relatively high part first, and another contact does not sufficiently contact a relatively low part. There is a risk. As described above, when a height difference (irregularity) occurs in the measurement target, the contact state between the contact and the measurement target becomes nonuniform, and a good contact state may not be obtained.

  On the other hand, in the measuring device 100, the first contact 1, the second contact 2, and the third contact 3 are attached to the holding unit 40 via the elastic member 60. The first contact 1, the second contact 2, and the third contact 3 are provided on a flexible transmission board 10. For this reason, when the first contact 1, the second contact 2, and the third contact 3 come into contact with the measurement target T, the elastic member 60 facing the contact is compressed and the transmission board 10 is deformed. . Therefore, even if a certain contact comes into contact with the measurement target T first, the holding unit 40 can be further moved toward the measurement target T together with the other contacts due to the deformation of the elastic member 60 and the transmission board 10.

  As described above, in the measurement device 100, the first contact 1, the second contact 2, and the third contact 3 are independently moved by different moving amounts so as to allow a difference in the height of the measurement target T. (In other words, relative movement). For this reason, the contact state between the first contact 1, the second contact 2, and the third contact 3 and the measurement target T can be made uniform. Thereby, each of the first contact 1, the second contact 2, and the third contact 3 is pressed against the measurement target T by a predetermined pressing force, and a good contact state can be obtained.

(2nd Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS. Hereinafter, points different from the first embodiment will be mainly described, and the same components as those in the first embodiment will be denoted by the same reference numerals and description thereof will be omitted.

  In the first embodiment, the movement permitting portion that moves the first contact 1, the second contact 2, and the third contact 3 independently of each other is the elastic member 60 provided on the holding portion 40. In the first embodiment, as the elastic member 60 expands and contracts, the first contact 1, the second contact 2, and the third contact 3 move independently of each other.

  On the other hand, in the measuring device 200 according to the second embodiment, the movement permitting part is the elastic structure part 160 formed integrally with the holding part 40.

  The elastic structure section 160 includes a base 161 connected to the holding section 40, and a plurality of deformable portions that flex and deform (elastically deform) independently of each other with the base 161 as a fulcrum.

  As shown in FIGS. 5 and 6, the number of the deformable portions is provided by the number corresponding to the contacts (three in the present embodiment), and the first contact 1 and the second contact 1 are respectively provided via the transmission board 10. 2 and the third contact 3 are attached. Hereinafter, the deformed portion to which the first contact 1 is attached is “first deformed portion 165”, the deformed portion to which the second contact 2 is attached is “second deformed portion 166”, and the deformed portion to which the third contact 3 is attached. The part is also referred to as “third deformation part 167”. Each of the first deformed portion 165, the second deformed portion 166, and the third deformed portion 167 is formed such that the base end is bent from the base 161 and extends from the base end in parallel with the measurement target T. The distal ends of the first deformed portion 165, the second deformed portion 166, and the third deformed portion 167 are configured as free ends.

  A gap 160a is formed between the first deformed portion 165, the second deformed portion 166, and the third deformed portion 167 and the holding portion 40, as mainly shown in FIG. By providing the gap 160a, interference between the first deformed portion 165, the second deformed portion 166, and the third deformed portion 167 and the holding portion 40 is prevented.

  Further, slits 160b and 160c are formed between the first deformed portion 165, the second deformed portion 166, and the third deformed portion 167 to separate each other. The base 161, the first deformed portion 165, the second deformed portion 166, and the third deformed portion 167 are integrally formed with the holding portion 40 by resin.

  As shown in FIG. 6, slits 10a and 10b extending in the longitudinal direction are formed between the signal line 12 and the first ground line 13 and between the signal line 12 and the second ground line 14, as shown in FIG. Is done. Since the first contact 1, the second contact 2, and the third contact 3 are separated from each other by the slits 10a and 10b, they can easily move independently.

  The first deformable portion 165, the second deformable portion 166, and the third deformable portion 167 can be bent and deformed such that their free ends move vertically up and down with the base 161 as a fulcrum. In other words, the first deformable portion 165, the second deformable portion 166, and the third deformable portion 167 can bend and deform using the base 161 as a fulcrum. Further, the first deformed portion 165, the second deformed portion 166, and the third deformed portion 167 are separated by the slits 160b and 160c, and can be deformed independently of each other. Therefore, the first contact 1, the second contact 2, and the third contact 3 attached to the first deformed portion 165, the second deformed portion 166, and the third deformed portion 167 can also move independently of each other. . In the second embodiment, similarly to the first embodiment, the first contact 1, the second contact 2, and the third contact 3 are measured while allowing the height difference of the measurement target T. The contact state with the target T can be made uniform. Therefore, even if there is a height difference between the measurement targets T, the contact state between the first contact 1, the second contact 2, and the third contact 3 and the measurement target T can be improved.

  Note that, similarly to the first embodiment, the measuring apparatus 200 may have a configuration in which the transmission substrate 10 is not provided with the slits 10a and 10b. In this case, a single deformed portion 168 is connected to the base 161 as shown in FIG. 7 without providing the slits 160b and 160c to provide a plurality of deformed portions (the structure of FIG. 5). The first contact 1, the second contact 2, and the third contact 3 may be attached to the portion 168.

  Conversely, in the first embodiment, the slits 10a and 10b separating the first contact 1, the second contact 2, and the third contact 3 may be provided in the transmission board 10 as in the second embodiment. Good. When the slits 10a and 10b are provided in the transmission board 10, as described above, the first contact 1, the second contact 2, and the third contact 3 are easily moved independently. On the other hand, when the transmission board 10 is not provided with the slits 10a and 10b, the air layer generated by the slits 10a and 10b is formed by the signal line 12 and the first ground line 13, and the signal line 12 and the second ground line 14. There is no formation between them. Therefore, when the slits 10a and 10b are not provided in the transmission board 10, the characteristic impedance of the high-frequency transmission line is easily matched to the characteristic impedance of the measurement target T. Whether to provide the slits 10a and 10b in the transmission substrate 10 may be determined in consideration of the characteristic impedance of the high-frequency transmission line.

  As described above, the second embodiment in which the plurality of deformed portions flex and deform independently of each other with the base portion 161 as the fulcrum of the elastic structure portion 160 serving as the movement permitting portion has the same operation and effect as the first embodiment. . In other words, the movement permitting portion may permit independent movement of the contact by its own compression (expansion and contraction) as in the first embodiment, or may use the base 161 as a fulcrum as in the second embodiment. The independent movement of the contact may be allowed by the bending deformation of the plurality of deformed portions (the first deformed portion 165, the second deformed portion 166, and the third deformed portion 167).

  Next, the operation and effect of the above embodiment will be described together.

  In the first and second embodiments, the measuring devices 100 and 200 include the plurality of contacts (first contact 1, second contact 2, and third contact 3) pressed against the measurement target T, and the signal line 12. And a high-frequency transmission line including a ground line (a first ground line 13 and a second ground line 14), and a flexible transmission board 10 and contacts (first contact 1, second contact 2, and second contact 2). A plurality of contacts (first contact 1, second contact 2, and third contact 3) respectively corresponding to signal lines. 12 and a ground line (first ground line 13, second ground line 14), and the main body 20 includes a base 30 and contacts (first contact 1, second contact 2, second contact 2). Holding part 40 for holding three contacts 3) and transmission board 10, and base And a support portion 50 attached to the support 30 to support the holding portion 40. The support portion 50 is a contact (first contact 1, second contact 2, third contact 3) to the measurement target T. Is elastically deformed by pressing.

  According to the first and second embodiments, when the contacts (the first contact 1, the second contact 2, and the third contact 3) are pressed against the measurement target T, the support of the main body 20 is performed. The contact (the first contact 1, the second contact 2, and the third contact 3) can be brought into contact with a predetermined pressing force by the elastic deformation of the portion 50. Since the high-frequency transmission line is provided on the transmission board 10 having flexibility, the transmission is performed as the contacts (first contact 1, second contact 2, and third contact 3) are pressed against the measurement target T. Even if the substrate 10 is deformed, transmission loss can be suppressed. Therefore, the contacts (the first contact 1, the second contact 2, and the third contact 3) can be pressed against the measurement target T with a predetermined pressing force, and transmission loss can be suppressed, so that the measurement accuracy of the measuring device 100 is improved. Can be done.

  The measuring devices 100 and 200 according to the first and second embodiments are provided on the holding unit 40 and include a plurality of contacts (first contact 1, second contact 2, It further includes a movement permitting portion (elastic member 60, elastic structure portion 160) that allows independent movement of the third contacts 3).

  In the measuring device 100 according to the first embodiment, the movement permitting section (elastic structure section 160) is an elastic member 60 having elasticity, and includes a plurality of contacts (first contact 1, second contact 2, The third contacts 3) are configured to be movable independently of each other by the elastic deformation of the elastic member 60.

  In the measuring device 200 according to the second embodiment, the movement permitting unit includes a base 161 connected to the holding unit 40 and a plurality of deforming units (first deforming unit) that elastically deform independently of each other with the base 161 as a fulcrum. 165, a second deformed portion 166, and a third deformed portion 167), and the plurality of contacts (the first contact 1, the second contact 2, and the third contact 3) respectively correspond to the plurality of corresponding contacts. It is attached to the deformed portion (first deformed portion 165, second deformed portion 166, third deformed portion 167), and deformed portion (first deformed portion 165, second deformed portion 166, third deformed portion 167) connects base 161. By elastically deforming as a fulcrum, they can be moved independently of each other.

  According to such first and second embodiments, since the plurality of contacts (the first contact 1, the second contact 2, and the third contact 3) can move independently of each other, the measurement is performed. Even when a height difference occurs in the target T, each contact (the first contact 1, the second contact 2, and the third contact 3) can be uniformly brought into contact with the measurement target T. Therefore, the contact state between each contact (the first contact 1, the second contact 2, and the third contact 3) and the measurement target T can be improved, and the measurement accuracy of the measuring devices 100 and 200 is improved. I do.

  Next, a modified example of each embodiment will be described. The following modified examples are also within the scope of the present invention, and it is also possible to combine the following modified examples with the configurations of the above-described embodiments, or to combine the following modified examples. Similarly, the modifications described in the description of the above embodiment can be arbitrarily combined with other modifications.

  In each of the above embodiments, the high-frequency transmission line is a coplanar line. On the other hand, the high-frequency transmission line may be another type such as a strip line or a microstrip line.

  In each of the above embodiments, the transmission board 10 is a flexible printed board having flexibility. On the other hand, the transmission board 10 may be a flex-rigid board including a portion having flexibility and a portion not having flexibility. The “flexible transmission board” in the claims is not limited to a flexible printed board having flexibility as a whole, but also includes a flex-rigid board partially flexible.

  In the above embodiments, the rod portions 52, 56 of the link portions 51, 55 in the support portion 50 have the same length. On the other hand, the rod portions 52 and 56 may be configured to have different lengths.

  Further, in each of the above embodiments, the support portion 50 is configured by a link mechanism having a pair of link portions 51 and 55. On the other hand, the support unit 50 is not limited to the link mechanism as long as the support unit 50 is configured to be deformed when the first contact 1, the second contact 2, and the third contact 3 are pressed against the measurement target T. Instead, any configuration can be used.

  In each of the above embodiments, the first contact 1, the second contact 2, and the third contact 3 are formed in a cylindrical shape. However, the present invention is not limited thereto, and the first contact 1, the second contact 2, and the third contact 3 can be formed in any shape. The first contact 1, the second contact 2, and the third contact 3 may be formed in a shape such as a prism, a pyramid, a cone, a truncated pyramid, and a truncated cone.

  As described above, the embodiment of the present invention has been described. However, the above embodiment is only a part of an application example of the present invention, and the technical scope of the present invention is not limited to the specific configuration of the above embodiment. Absent.

1 First contact (contact)
2 Second contact (contact)
3 Third contact (contact)
DESCRIPTION OF SYMBOLS 10 Transmission board 12 Signal line 13 First ground line (ground line)
14 Second ground line (ground line)
Reference Signs List 20 main body part 30 base part 40 holding part 50 support part 60 elastic member (movable part)
100 Measurement device 160 Elastic structure (movable part)
161 Base 165 First deformation part (deformation part)
166 Second deformed part (deformed part)
167 Third deformation part (deformation part)
200 measuring device

Claims (4)

A measuring device,
A plurality of contacts each pressed against the object to be measured,
A high-frequency transmission line including a signal line and a ground line is provided, and a flexible transmission substrate,
A body portion to which the plurality of contacts and the transmission board are attached,
The plurality of contacts are provided integrally with the corresponding signal line and ground line, respectively.
The main body is
A base part,
A holding unit that holds the plurality of contacts and the transmission board,
A support portion attached to the base portion and supporting the holding portion,
The support portion is elastically deformed with the pressing of the plurality of contacts on the measurement target,
measuring device. The measuring device according to claim 1,
The plurality of contacts are attached to the holding unit and the plurality of contacts are attached, and further includes a movement allowance unit that allows independent movement of the plurality of contacts with the measurement target.
measuring device. The measuring device according to claim 2,
The movement permitting part is an elastic member having elasticity,
The plurality of contacts are configured to be movable independently of each other by expansion and contraction of the elastic member,
measuring device. The measuring device according to claim 2,
The movement permitting unit includes:
A base connected to the holding unit;
A plurality of deformed portions that are elastically deformed independently of each other with the base as a fulcrum,
The plurality of contacts are attached to the corresponding plurality of deformed portions, respectively, and the plurality of deformed portions are flexibly deformed with the base as a fulcrum, and are configured to be movable independently of each other.
measuring device.

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