JP6584816B2 - Probe unit and probe unit manufacturing method - Google Patents

Description

  The present invention relates to a probe unit including a probe pin and a support portion that supports the probe pin, and a probe unit manufacturing method for manufacturing the probe unit.

  As this type of probe unit, a probe disclosed by the applicant in Patent Document 1 below is known. This probe includes a probe main body and a fixture. The fixture includes a probe fixing portion that fixes the probe main body, an attachment portion that is attached to the probe guide mechanism, and a pair of connecting arms that connect the probe fixing portion and the attachment portion. In this case, a fulcrum in which the connecting arm is cut out in an arc shape in the thickness direction (vertical direction) is formed at the connecting portion with the mounting portion and the connecting portion with the probe fixing portion in each connecting arm. This probe has a four-bar rotation mechanism that allows linear or approximate linear movement of the probe pin in the direction opposite to the direction of probing due to the probe fixing part, mounting part, connecting arm and each fulcrum in the fixture. Composed. For this reason, in this probe, when the mounting part further descends from the state in which the tip of the probe body is in contact with the surface to be probed, contact marks are generated due to the tip of the probe body moving on the surface to be probed. It is possible to keep it low.

Japanese Patent No. 4717144 (page 5-6, Fig. 1)

  However, the above-described conventional probe has the following problems to be improved. That is, in this probe, the fulcrum is formed by notching each connecting arm in the thickness direction. In this case, in order for the notched portion to function as a fulcrum, it is necessary to sufficiently lower the rigidity of the notched portion than the other portions. For this purpose, the notched portion and the other portion (not notched) It is necessary to make the thickness different from that of the portion. For this reason, in the conventional probe, it is necessary to increase the thickness of the connecting arm (thickness of the notched portion) to some extent. On the other hand, at the time of probing, a dent is generated on the contact target due to the contact between the tip of the probe body and the contact target. In this case, the larger the mass of the entire probe, the larger the dent. For this reason, in order to make a dent small, it is necessary to make the mass of the whole probe small. However, in the conventional probe, as described above, since it is necessary to increase the thickness of the connecting arm to some extent, it is difficult to reduce the weight, and improvement of this point is desired.

  This invention is made | formed in view of this subject, and it aims at providing the probe unit which can implement | achieve weight reduction, and a probe unit manufacturing method.

In order to achieve the above object, the probe unit according to claim 1 is a probe unit comprising a probe pin and a support part for supporting the probe pin, wherein the support part is used for probing the probe pin. A belt-shaped first arm and second arm that are disposed in a state of being opposed to each other along the direction of the arm, a holding portion that holds each base end portion of each arm, and the probe pin can be attached. And a connecting portion for connecting the tip portions of the arms, and a four-bar linkage mechanism that allows linear movement or approximate linear movement of the probe pin in a direction opposite to the direction of the probing. Each arm has a thickness of each arm at a first portion closer to the distal end than the base end and a second portion closer to the distal end than the first portion. Bending portions that protrude in the direction and bend so that the protruding amount continuously changes along the length direction of each arm and have lower rigidity than other portions in each arm are formed. An intermediate portion between each bending portion functions as each link constituting the four-bar linkage mechanism, and a formation portion of each bending portion is configured to function as a joint constituting the four-bar linkage mechanism , The probe pin is fixed to the distal end portion of the first arm and the distal end portion of the second arm so that the probe pin functions as the connecting portion .

The probe unit according to claim 2 is formed in the probe unit according to claim 1 Symbol placement, the at least one of the first arm and said second arm, said intermediate portion along the length of the at least one arm It is comprised with the made rib.

The probe unit according to claim 3, wherein, in the probe unit according to claim 1 or 2, wherein, with comprises a pair of the probe pins, the first arm and the second arm of a pair with each of said holding portion of said pair While holding the base ends of the first arms in a state where the first arms extend adjacent to each other, the pair of second arms extends in the state where the pair of second arms extend adjacent to each other. Hold each proximal end.

The probe unit according to claim 4 is the probe unit according to claim 3 , wherein each first arm maintains a positional relationship when each base end portion of each first arm is held by the holding portion. In this state, after each first arm is integrally manufactured, the base end portion is held by the holding portion, and at least from the vicinity of the base end portion to the tip end portion in the first arm. The second arms are integrated with each second arm while maintaining the positional relationship when the base ends of the second arms are held by the holding portions. After the production, each base end portion is configured to be separated from at least the vicinity of the base end portion to the tip end portion of each second arm in a state in which each base end portion is held by the holding portion.

The probe unit according to claim 5 is the probe unit according to claim 4 , wherein each of the first arms has a non-conductivity and is integrally manufactured with the base ends connected to each other. The respective base ends are held by the holding portion in a connected state, and the second arms have non-conductivity and are integrally manufactured with the base ends connected to each other. And the said base end part is hold | maintained by the said holding | maintenance part with the state connected.

The probe unit according to claim 6 is the probe unit according to any one of claims 1 to 5 , wherein a surface of the arm located on the probing target side among the arms faces the probing target. A conductive shield plate is provided on the side through an insulator.

Probe unit manufacturing method according to claim 7, there is provided a probe unit manufacturing method for manufacturing a probe unit according to claim 3, wherein, when the respective base end portions of said pair of first arm is held by the holding portion The first arms are integrally manufactured in a state where the positional relationship is maintained, and then the first arm is separated from at least the vicinity of the base end portion to the tip end portion of each first arm. After the two second arms are integrally manufactured while maintaining the positional relationship when the respective base end portions of the pair of second arms are held by the holding portion, The probe unit is manufactured by manufacturing each second arm by separating at least the vicinity of the base end portion to the tip end portion.

The probe unit manufacturing method according to claim 8 is the probe unit manufacturing method according to claim 7 , wherein the positional relationship when the respective base end portions of the pair of first arms are held by the holding portion is maintained. Then, in a state where the base end portions of the integrally manufactured first arms are held by the holding portion, the space from at least the vicinity of the base end portion to the tip end portion of each first arm is separated. In the state where the base end portions of the second arms manufactured integrally are held by the holding portion, the distance from at least the vicinity of the base end portion to the tip end portion of the second arms is separated. The probe unit is manufactured.

In the probe unit according to claim 1, the first portion on the distal end side of the base end portion of the first arm and the second arm in the band shape and the second portion on the distal end side of the first portion are arranged in the other portions of the arms. Each of the curved parts with lower rigidity than the part is formed, and the intermediate part between the curved parts functions as each link, and the four-joint link mechanism in which the formed part of each curved part functions as a joint is the support part. Consists of. That is, in this probe unit, a curved portion is formed in each belt-like arm, and the forming portion of the bending portion is made to be easily elastically deformed, so that the forming portion functions as a joint. For this reason, according to this probe unit, each arm is sufficiently thin compared to the conventional configuration in which the arm is cut out in the thickness direction and the portion functions as a joint (a certain thickness is required for the arm). Since each arm can be reduced in weight sufficiently, the probe unit can be reduced in weight sufficiently. Therefore, according to this probe unit, it is possible to sufficiently suppress the dent generated on the probing target due to the contact of the probe pin with the probing target during probing.

Further, by constructing the probe unit to function flop Robupin as connecting portion, and the probe pin compared to the configuration in which the connecting portion of another member, it is possible to further reduce the weight of the probe unit.

According to the probe unit according to claim 2, wherein, by forming the ribs in the middle portion of the arm along at least one of the longitudinal direction of the first arm and the second arm, the formation of the curved portion of the rigidity of the intermediate portion Since it can raise rather than a site | part, it can make it easier to elastically deform the formation site | part of each bending part. Therefore, according to this probe unit, the four-bar linkage mechanism in which the intermediate portion of the arm functions as a link and each forming portion of each bending portion functions as a joint is used. As a result, it is possible to more reliably prevent the occurrence of scratches due to the tip of the probe pin moving on the surface to be probed during probing.

According to a third aspect of the present invention, the probe unit includes a pair of probe pins, a pair of first arms and a second arm, and a holding unit holds each base end of the pair of first arms, Each base end of the second arm is held. That is, in this probe unit, the pair of probe pins is supported by the support portion. For this reason, according to this probe unit, this probe unit is suitably used in the measurement and inspection by the four-terminal method or the four-terminal pair method performed by probing two probe pins with respect to one probing site in the probing target. In addition, the dent caused by the probe pin hitting during probing can be suppressed sufficiently small.

According to a fourth aspect of the present invention, in the probe unit according to the fourth aspect , the first arms and the first arms are maintained in a state where the base ends of the pair of first arms and the pair of second arms are held by the holding portion. After the two arms are integrally manufactured, each first arm and each second arm are configured by separating the vicinity from the proximal end portion to the distal end portion with each proximal end portion held by the holding portion. Yes. For this reason, according to this probe unit, the pair of first arms and the pair of second arms can be manufactured at the same time under the same manufacturing conditions (the same processing conditions using the same material or the same part of the same material). Thus, variations in dimensions such as dimensions and elastic modulus of each arm due to variations in materials and differences in conditions can be reduced. In addition, according to this probe unit, the first arm and the second arm can be held by the holding portion in a state where the positional relationship when the first arm and the second arm are integrally manufactured is maintained. Therefore, it is possible to reliably prevent the positional deviation between the first arms and the second arms when the first arm and the second arm are held by the holding portion. Therefore, according to this probe unit, accurate probing can be realized.

Further, in the probe unit according to claim 5 , each first arm and second arm are integrally formed in a state where the respective base end portions are connected to each other and have non-conductivity, and each base end portion Are held by the holding portion in a connected state. For this reason, according to this probe unit, each 1st arm and each 2nd arm can be hold | maintained to a holding | maintenance part at once, As a result, assembly efficiency can fully be improved.

The probe unit according to claim 6 further includes a conductive shield plate disposed via an insulator on a surface side facing the probing target in an arm located on the probing target side during probing. As a result, the stray capacitance between the arm and the probing target can be sufficiently reduced, so that a drop in inspection accuracy due to the stray capacitance can be reliably prevented.

According to the probe unit manufacturing method of the seventh aspect , after the first arms are integrally manufactured while maintaining the positional relationship when the pair of first arms are held, the distal end from the vicinity of the proximal end portion From the vicinity of the base end after making both the first arm in a state where the first arm is made by separating the space between the two parts and maintaining the positional relationship when the pair of second arms are held By producing each second arm by separating the distance to the tip, the pair of first arms and the pair of second arms have the same production conditions (the same processing using the same material or the same part of the same material). Therefore, according to this probe unit manufacturing method, variations in specifications such as dimensions and elastic modulus of each arm due to material variations and differences in conditions are reduced. DOO can result, it is possible to produce a probe unit capable of accurate probing.

According to the probe unit manufacturing method of claim 8 , each first arm and each second arm are held in a state in which the positional relationship when the respective first arm and each second arm are integrally manufactured is maintained. Since the first arms and the second arms can be held by the holding portion, it is possible to reliably prevent the occurrence of positional deviation between the first arms and the second arms. . Therefore, according to this probe unit manufacturing method, a probe unit capable of more accurate probing can be manufactured.

2 is a perspective view showing a configuration of a probe unit 1. FIG. 2 is an exploded perspective view of the probe unit 1. FIG. 3 is a side view of the probe unit 1 in a state of being fixed to a moving mechanism 300. FIG. 2 is a plan view of the probe unit 1. FIG. 2 is a bottom view of the probe unit 1. FIG. FIG. 3 is a first explanatory diagram explaining the operation of the probe unit 1. FIG. 6 is a second explanatory diagram for explaining the operation of the probe unit 1. 2 is a perspective view showing a configuration of a probe unit 101. FIG. 6 is a first explanatory view illustrating a method for manufacturing the arm 111. FIG. 6 is a second explanatory diagram illustrating a method for manufacturing the arm 111. FIG. FIG. 10 is a first explanatory view illustrating a method for manufacturing the arm 112. FIG. 10 is a second explanatory view explaining the method for manufacturing the arm 112. It is a side view of probe unit 1A. 4 is a perspective view showing a configuration of a probe unit 601. FIG. FIG. 10 is a first explanatory view explaining the method for manufacturing the probe unit 601. FIG. 10 is a second explanatory view explaining the method for manufacturing the probe unit 601. FIG. 10 is a third explanatory view explaining the method for manufacturing the probe unit 601. FIG. 11 is a fourth explanatory view explaining the method for manufacturing the probe unit 601. It is a perspective view which shows the structure of the probe unit 1B. It is a perspective view which shows the structure of 1 C of probe units. It is a perspective view which shows the structure of probe unit 1D.

  Hereinafter, embodiments of a probe unit and a probe unit manufacturing method will be described with reference to the accompanying drawings.

  First, the configuration of the probe unit 1 shown in FIG. 1 as an example of the probe unit will be described. The probe unit 1 includes a probe pin 2 and a support portion 3 as shown in FIG. 2 and FIG.

  As shown in FIGS. 1 and 2, the probe pin 2 is formed in a cylindrical shape with a sharp tip 2 a. When the probe unit 1 is moved by the moving mechanism 300 (see FIG. 3), the probe pin 2 is probing (contacted) with the probing target (for example, the substrate 200 shown in FIG. 3).

  The support portion 3 is configured to be able to support the probe pin 2. Specifically, as shown in FIGS. 1 to 3, the support portion 3 includes an arm 11 (first arm), an arm 12 (second arm), and a holding portion 13.

  As shown in FIGS. 1 to 5, the arms 11 and 12 are each formed in a band shape (long and thin plate shape). In this case, for example, the arms 11 and 12 are made of metal and have conductivity. The arms 11 and 12 are arranged in a state where the surfaces are opposed to each other along the probing direction (downward in FIG. 3) when probing the probe pin 2. In addition, the arms 11 and 12 are held at the base end portions 21 a and 22 a by the holding portion 13.

  As shown in FIGS. 3 to 5, a curved portion C <b> 1 a is formed in a portion (first portion) on the distal end portion 21 b side slightly from the proximal end portion 21 a in the arm 11, and from the distal end portion 21 b in the arm 11. A curved portion C1b is formed at a portion slightly closer to the proximal end portion 21a (a second portion closer to the distal end portion 21b than the first portion). Further, a curved portion C2a is formed at a portion (first portion) on the distal end portion 22b side slightly from the proximal end portion 22a in the arm 12, and a portion (on the proximal end portion 22a side slightly from the distal end portion 22b in the arm 12 ( A curved portion C2b is formed in the second portion (on the tip portion 22b side of the first portion). In the following description, when the curved portions C1a, C1b, C2a, and C2b are not distinguished, they are also referred to as “curved portions C”. In this case, as shown in FIGS. 3 to 5, each bending portion C is bent in the thickness direction of each arm 11, 12 (upward in FIG. 3) and extends in the width direction of each arm 11, 12. It is formed as follows. Specifically, each bending portion C protrudes upward, and the protruding amount continuously changes along the length direction of each arm 11 and 12 (for example, as shown in FIG. It is formed in a semicircular arc shape (or a semi-elliptical arc shape).

  As shown in FIGS. 3 and 4, ribs 21 e are formed at intermediate portions 21 c between the curved portions C <b> 1 a and C <b> 1 b of the arm 11. In this case, as an example, the rib 21e has a semi-cylindrical shape (semi-elliptical cylindrical shape) whose cross-sectional shape protrudes upward (upward in FIG. 3: a direction away from the arm 12). It is formed so as to extend along. As shown in FIGS. 3 and 5, a rib 22 e is formed at an intermediate portion 22 c between the curved portions C <b> 2 a and C <b> 2 b of the arm 12. In this case, as an example, the rib 22e has a semi-cylindrical shape (semi-elliptical cylindrical shape) whose cross-sectional shape protrudes upward (upward in FIG. 3: a direction approaching the arm 11), and extends along the length direction of the arm 12. It is formed to extend.

  Here, since the bending portions C are formed on the arms 11 and 12, the forming portions P1a, P1b, P2a, and P2b of the respective bending portions C (refer to FIGS. 1 to 5: hereinafter referred to as “forming portion P” when not distinguished from each other). )) Is sufficiently smaller than the cross-sectional secondary moments of the other parts of the arms 11 and 12 (that is, the rigidity of the formation part P is sufficiently lower than the rigidity of the other parts) This facilitates elastic deformation at each formation site P. Further, in this probe unit 1, the ribs 21e and 22e are formed in the intermediate portions 21c and 22c of the arms 11 and 12, so that the rigidity of the intermediate portions 21c and 22c is changed to other portions (particularly, the formation portion P of the bending portion C). ), The formation portions P where the curved portions C are formed are more easily elastically deformed.

  As shown in FIGS. 3 to 5, insertion holes 21 d and 22 d for inserting and fixing the base end portion 2 b of the probe pin 2 are formed in the distal end portions 21 b and 22 b of the arms 11 and 12, respectively. Has been. As shown in FIGS. 3 to 5, insertion holes 21 f through which the fixing screws 301 used when the probe unit 1 is fixed to the moving mechanism 300 are inserted into the base end portions 21 a and 22 a of the arms 11 and 12. , 22f are formed.

  As shown in FIGS. 1 and 3, the holding unit 13 holds the base end portions 21 a and 22 a of the arms 11 and 12. In this case, as shown in FIG. 3, the base end portion 21a of the arm 11 is fixed to the upper surface of the holding portion 13 using an adhesive or the like. Further, the base end portion 22a of the arm 12 is fixed to the lower surface of the holding portion 13 using an adhesive or the like. As shown in FIGS. 2 and 3, the holding portion 13 communicates with the insertion hole 21 f of the arm 11 and the insertion hole 22 f of the arm 12 to fix the probe unit 1 to the moving mechanism 300. An insertion hole 31 through which the screw 301 is inserted is formed.

  In the probe unit 1, as shown in FIG. 3, the proximal end 2 b side of the probe pin 2 is fixed to the distal ends 21 b and 22 b of the arms 11 and 12, and the distal ends 21 b and 22 b are secured by the probe pin 2. They are linked together. That is, the probe unit 1 is configured so that the probe pin 2 functions as a connecting portion.

  Here, in the probe unit 1, as described above, the arms 11 and 12 are easily elastically deformed at each forming portion P of each bending portion C. For this reason, in the probe unit 1, as shown in FIG. 6, in the state where the holding portion 13 is fixed to the moving mechanism 300, the probing direction is opposite to the tip portion 2 a of the probe pin 2 (in FIG. 6, When an upward force is applied, the intermediate portion 21c of the arm 11, the intermediate portion 22c of the arm 12, the distal end portions 21b and 22b of the arms 11 and 12, and the probe pin 2 are rotated (with each forming portion P as a fulcrum) Moving. As shown in FIG. 7, the rotating operation of each component of the probe unit 1 is such that the intermediate portions 21c and 22c function as links (nodes) and the forming portions P serve as joints (joints or fulcrums). This is the same as the rotating operation of the functioning four-bar linkage mechanism (four-bar rotation mechanism). That is, in this probe unit 1, a four-bar linkage mechanism is configured by the arms 11 and 12, the holding portion 13, and the probe pin 2 that functions as a connecting portion. Further, in this probe unit 1, when a force is applied to the probe pin 2 in the direction opposite to the probing direction (upward in the figure), as shown in the figure, the tip 2a of the probe pin 2 is The length of the arms 11 and 12 (intermediate portions 21c and 22c) and the interval between the arms 11 and 12 are defined so as to allow linear motion or approximate linear motion.

  Moreover, in this probe unit 1, the curved part C is formed in the arms 11 and 12 formed in the band shape, and the formation part P of the curved part C is easily elastically deformed, so that the formation part P functions as a joint. I am letting. For this reason, in this probe unit 1, the arms 11 and 12 are sufficiently compared with the conventional configuration in which the arm is cut out in the thickness direction and the portion functions as a joint, that is, the arm requires a certain thickness. Since the arms 11 and 12 can be reduced in weight, the probe unit 1 can be reduced in weight accordingly.

  Next, the operation of the probe unit 1 during probing will be described in detail with reference to the drawings. As an example, the operation when the probe 200 of the probe unit 1 is probed to the substrate 200 to be probed and the substrate 200 is inspected by the substrate inspection apparatus (not shown) will be described.

  As shown in FIG. 3, the probe unit 1 is fixed to an insertion hole 22 f formed in the arm 12, an insertion hole 31 formed in the holding portion 13, and an insertion hole 21 f formed in the arm 11. The screw 301 is inserted, and the fixing screw 301 is screwed into the screw hole 300 a of the moving mechanism 300 to be fixed to the moving mechanism 300.

  When the probing instruction is given to the moving mechanism 300, the moving mechanism 300 moves the probe unit 1 above the substrate 200 as a probing target. Next, the moving mechanism 300 lowers (moves downward) the probe unit 1. Subsequently, as the probe unit 1 is lowered, the tip 2a of the probe pin 2 is brought into contact with the surface 201 of the substrate 200 as shown in FIG.

  Next, the moving mechanism 300 further lowers the probe unit 1 as shown in FIG. Accordingly, the tip 2a of the probe pin 2 presses the surface 201 of the substrate 200 downward. Further, a reaction force of the pressing force is applied upward to the distal end portion 2 a of the probe pin 2. At this time, as shown in the figure, with the forming portions P of the arms 11 and 12 as fulcrums, the intermediate portion 21c of the arm 11, the intermediate portion 22c of the arm 12, the tip portions 21b and 22b of the arms 11 and 12, and The probe pin 2 rotates by the same operation as the four-bar linkage mechanism. Specifically, the intermediate part 21c rotates counterclockwise (counterclockwise) in the figure with the formation part P1a as a fulcrum, and the intermediate part 22c rotates counterclockwise in the figure with the formation part P2a as a fulcrum. To do. Further, the tip portions 21b and 22b and the probe pin 2 connected by the probe pin 2 rotate clockwise (clockwise) in the drawing with the formation sites P1b and P2b as fulcrums.

  Subsequently, the moving mechanism 300 stops the descent when the probe unit 1 is lowered by a predetermined distance.

  In this case, in the probe unit 1, as described above, the lengths of the arms 11 and 12 and the arm 11 are set so that the distal end portion 2a of the probe pin 2 permits linear motion or approximate linear motion (see FIG. 7). , 12 are defined. For this reason, the state in which the probe pin 2 is located at the first contact position is maintained after the tip 2a of the probe pin 2 comes into contact with the surface 201 of the substrate 200 until the probe unit 1 stops descending. Therefore, in this probe unit 1, it is possible to reliably prevent the occurrence of scratches due to the tip 2 a of the probe pin 2 moving on the surface 201 of the substrate 200.

  Moreover, in this probe unit 1, as mentioned above, it is possible to reduce the weight of the probe unit 1 by thinning the arms 11 and 12 to sufficiently reduce the weight. For this reason, it is possible to sufficiently suppress a dent generated on the surface 201 of the substrate 200 due to the contact of the tip 2a of the probe pin 2 with the substrate 200 (probing target) during probing.

  Next, a substrate inspection apparatus (not shown) performs an inspection of the substrate 200 based on an electrical signal input / output via the probe pins 2.

  Subsequently, when the inspection is completed and the moving mechanism 300 is instructed to end probing, the moving mechanism 300 raises the probe unit 1 (holding unit 13). Along with this, the pressing of the probe pin 2 against the surface 201 of the substrate 200 is released, and the reaction force of the pressing force applied upward to the distal end portion 2a of the probe pin 2 is released. At this time, the intermediate portions 21c and 22c of the arms 11 and 12, the distal end portions 21b and 22b of the arms 11 and 12 and the probe pin 2 operate as a four-bar linkage mechanism, that is, the above-described probing direction. Are rotated in opposite directions to return from the state shown in FIG. 6 to the initial state shown in FIG.

  As described above, the probing and the probing release of the probe pin 2 of the probe unit 1 with respect to the substrate 200 are completed.

  Thus, in this probe unit 1, the part (first part) on the tip part 21b side slightly from the base end part 21a in the belt-like arms 11 and 12 and the part on the base end part 21a side slightly from the tip part 21b ( The curved portions C are respectively formed in the second portion on the tip portion 21b side than the first portion, and the intermediate portions 21c and 22c between the curved portions C function as links, and each of the curved portions C A four-bar linkage mechanism in which the formation site P functions as a joint is configured by the support portion 3. That is, in this probe unit 1, the curved portion C is formed in the belt-like arms 11 and 12, and the forming portion P of the bending portion C is easily elastically deformed, so that the forming portion P functions as a joint. . For this reason, according to this probe unit 1, compared with the conventional structure which cuts out an arm in the thickness direction and makes the part function as a joint (a certain thickness is required for an arm), the arms 11 and 12 are sufficient. Therefore, the arms 11 and 12 can be sufficiently reduced in weight. As a result, the probe unit 1 can be sufficiently reduced in weight. Therefore, according to this probe unit 1, the dent which arises in the probing object by contact of the probe pin 2 with respect to the probing object (substrate 200) at the time of probing can be suppressed sufficiently small.

  Further, according to the probe unit 1, the probe unit 1 is configured so that the probe pin 2 functions as a connecting portion, so that the probe unit 1 is compared with a configuration in which a connecting portion separate from the probe pin 2 is provided. 1 can be further reduced in weight.

  In addition, according to the probe unit 1, the ribs 21e and 22e are formed in the intermediate portions 21c and 22c of the arms 11 and 12 along the length direction of the arms 11 and 12, whereby the rigidity of the intermediate portions 21c and 22c is increased. Since it can raise rather than the formation part P of the bending part C, the formation part P can be made to be further elastically deformed further. Therefore, according to the probe unit 1, the four-bar linkage mechanism in which the intermediate portions 21c and 22c of the arms 11 and 12 function as links and the formation portions P of the curved portions C function as joints has the probe pin 2 As a result, the tip 2a of the probe pin 2 moves on the surface 201 of the substrate 200 during probing as a result of the smooth movement so that the tip 2a of the probe moves linearly (or approximately linearly). It can prevent more reliably.

  Next, the configuration of the probe unit 101 shown in FIG. 8 as another example of the probe unit will be described. In the following description, the same components as those of the above-described probe unit 1 are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 8, the probe unit 101 includes a pair of probe pins 2 and a support portion 103. The support portion 103 includes a pair of arms 111 (first arm), a pair of arms 112 (second arm), and a holding portion 113. Each of the arms 111 and 112 is formed in a strip shape from metal, similarly to the arms 11 and 12 of the probe unit 1. Each arm 111 and 112 is formed with a curved portion C in the same manner as the arms 11 and 12. In addition, ribs 121e and 122e are formed in the intermediate portions 121c and 122c of the arms 111 and 112 in the same manner as the arms 11 and 12, respectively.

  As shown in FIG. 8, the holding unit 113 is configured so that the base ends of the arms 111 are arranged in a state where the arms 111 are adjacently extended in parallel (arranged in a state of being arranged adjacent to one virtual plane). 121a is held. In addition, the holding unit 113 holds the base end portions 122a of the arms 112 in a state where the arms 112 are adjacently extended in parallel (arranged in an adjacent state on one virtual plane). In this case, as shown in the figure, the base end portion 121a of the arm 111 is fixed to the upper surface of the holding portion 113 using an adhesive or the like. Further, the base end portion 122a of the arm 112 is fixed to the lower surface of the holding portion 113 using an adhesive or the like. As shown in the figure, the holding unit 113 communicates with the insertion hole 121f of the arm 111 and the insertion hole 122f of the arm 112 to fix the probe unit 1 to the moving mechanism 300 (see FIG. 3). An insertion hole 131 through which the fixing screw 301 to be used (see the same figure) is inserted is formed.

  In the probe unit 101, the pair of probe pins 2 is supported by the support portion 103. For this reason, this probe unit 101 can be suitably used in the measurement and inspection by the four-terminal method or the four-terminal pair method performed by probing two probe pins 2 with respect to one probing part in the probing target. The probe unit 101 also has the same effect as the probe unit 1 described above, that is, the generation of scratches due to the movement of the probe pin 2 during probing, and the strike caused by the probe pin 2 being hit during probing. Suppression of traces can be realized.

  Next, a probe unit manufacturing method for manufacturing the above-described probe unit 101 will be described focusing on a method for manufacturing the arms 111 and 112. When the arm 111 used for the probe unit 101 is manufactured, as shown in FIG. 9, first, an intermediate body 401 in which a pair of arms 111 are integrated is manufactured. As shown in the figure, the intermediate 401 maintains the positional relationship (see FIG. 8) when the base ends 121a of the pair of arms 111 are held by the holding portion 113, and the arms 111 A shape connected by the connecting portion 411 is formed. In this case, as a manufacturing method of the intermediate 401, a manufacturing method by electroforming, a method by pressing, a manufacturing method by cutting, or the like can be employed.

  Next, the connecting portion 411 of the intermediate body 401 (the arms 111 integrated with each other) is cut and cut at a position indicated by a broken line in FIG. 9, and then the arms 111 are separated as shown in FIG. Thereby, a pair of arms 111 are produced.

  Further, when the arm 112 is manufactured, as illustrated in FIG. 11, an intermediate body 402 in which a pair of arms 112 are integrated is manufactured by a manufacturing method similar to the manufacturing method of the intermediate body 401. As shown in the drawing, the intermediate body 402 is in a state in which each arm 112 is in a state where the positional relationship (see FIG. 8) when the base end portions 122a of the pair of arms 112 are held by the holding portion 113 is maintained. A shape connected by the connecting portion 412 is formed.

  Subsequently, the connecting portion 412 of the intermediate body 402 (each arm 112 integrated) is cut and separated at a broken line shown in FIG. 11, and then each arm 112 is separated as shown in FIG. Thereby, a pair of arms 112 are produced.

  Next, as shown in FIG. 8, the base end portions 121 a and 122 a of the arms 111 and 112 are fixed to the holding portion 113. Subsequently, the probe pin 2 is fixed to the tip portions 121b and 122b of the arms 111 and 112, respectively. Thus, the probe unit 101 is manufactured.

  According to this manufacturing method, by manufacturing the arms 111 and 112 by the above manufacturing method, the pair of arms 111 can be manufactured under the same manufacturing conditions, and the pair of arms 112 can be manufactured under the same manufacturing conditions. Specifically, for example, when the arms 111 and 112 are produced by electroforming, each arm 111 and each arm 112 can be produced at the same time under the same electroforming conditions using the same electroforming material. When the arms 111 and 112 are manufactured by pressing or cutting, each arm 111 and each arm 112 are manufactured at the same time under the same pressing conditions and the same cutting conditions using the same portion of the material to be processed (metal plate or metal block). can do. For this reason, as a result of minimizing variations in dimensions and elastic modulus of the arms 111 and 112 due to material variations and conditions, the probe unit 101 capable of accurate probing is manufactured. Can do.

  In the above example, after the intermediate bodies 401 and 402 (the integrated arms 111 and 112) are cut and separated into the pair of arms 111 and the pair of arms 112, the base ends of the arms 111 and 112 are separated. Although the probe unit 101 is manufactured by holding 121a and 122a on the holding unit 113, the probe unit 101 can also be manufactured as follows. First, after manufacturing the intermediate bodies 401 and 402, only the base end portions 121a and 122a side portions of the arms 111 and 112 in the intermediate bodies 401 and 402 are separated. Next, the base end portions 121a and 122a are attached to the holding portion 113 in this state (a state where the portions other than the base end portions 121a and 122a are connected and the arms 111 and 112 are respectively integrated). Hold. Next, in this state, the space between the vicinity of the base ends 121a and 122a of the intermediate bodies 401 and 402 to the tips 121b and 122b is separated. That is, at this time, the arms 111 and 112 are separated from the base ends 121a and 122a to the tips 121b and 122b. In the probe unit 101 manufactured in this way, each arm 111 and each arm 112 is held by the holding unit 113 while maintaining the positional relationship between each arm 111 and each arm 112 when the intermediate bodies 401 and 402 are formed. As a result, it is possible to reliably prevent the occurrence of positional deviation between the arms 111 and the arms 112 when the arms 111 and 112 are held by the holding portion 113. As a result, more accurate probing can be achieved. Can be manufactured.

  The probe unit and the probe unit manufacturing method are not limited to the above configuration and method. For example, a configuration in which the probe pin 2 is directly fixed to the distal end portions 21b and 22b (leading end portions 121b and 122b) of the arms 11 and 12 (arms 111 and 112), that is, the base end portion 2b side of the probe pin 2 is used as a connecting portion. Although the configuration example to function is described above, it is formed separately from the probe pin 2 and is formed so that the probe pin 2 can be attached (detached) to connect the tip portions 21b and 22b (tip portions 121b and 122b). It is also possible to adopt a configuration provided with a section.

  Moreover, the probe unit 1A shown in FIG. 13 can also be employed. In the following description, the same components as those of the above-described probe units 1 and 101 are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 13, the probe unit 1 </ b> A includes an insulating sheet 41 and a shield plate 42 in addition to the components included in the probe unit 1 described above. The insulating sheet 41 is an example of an insulator, and is formed into a sheet shape with a non-conductive (insulating) material such as a resin. Further, the insulating sheet 41 is formed with an insertion hole 41a through which the fixing screw 301 (see FIG. 3) is inserted. The shield plate 42 is formed in a thin plate shape with a conductive metal such as copper or aluminum. The shield plate 42 is formed with an insertion hole 42a through which the fixing screw 301 is inserted. As shown in FIG. 13, the shield plate 42 is a surface of the arms 11, 12 facing the substrate 200 in the arm 12 positioned on the substrate 200 side as a probing target during probing (the lower surface in the figure: Hereinafter, it is also disposed on the side (also referred to as “opposing surface”) via an insulating sheet 41 (insulated with respect to the arm 12). In this case, the insulating sheet 41 and the shield plate 42 are fixed to the holding unit 13 with an adhesive, for example. Further, the shield plate 42 is connected to, for example, a ground potential (reference potential) via a wiring not shown.

  In this case, in the configuration without the shield plate 42, the arm 12 is made of metal, so that the stray capacitance between the arm 12 and the probing target may be increased, and the inspection accuracy is reduced by this stray capacitance. There is a risk. On the other hand, according to the probe unit 1A, the stray capacitance between the arm 12 and the probing target can be sufficiently reduced by arranging the shield plate 42 on the opposite surface side of the arm 12. Therefore, it is possible to reliably prevent a decrease in inspection accuracy due to stray capacitance. Further, since the shield plate 42 is formed in a thin plate shape, a sufficient clearance between the arm 12 and the probing target during probing can be ensured, so that a situation in which probing is hindered can be avoided.

  Moreover, although the example using the arms 11 and 12 (arms 111 and 112) formed of metal has been described above, a configuration using resin arms (first arm and second arm) formed by injection molding or the like is adopted. You can also. In this case, when a resin arm is used, a conductive film (conductive layer) is formed on the whole or a part of the surface of the arm, so that the conductive property is established between the probe pin 2 and the holding part 13 (holding part 113). A configuration in which electrical connection is made through a film can also be adopted. In addition, when a resin arm is used in a probe unit having a pair of probe pins 2 as in the above-described probe unit 101, a pair of integrally manufactured arms (a pair of arms 111 in the probe unit 101 and a pair of arms) When separating the arms 112), only the portion from the vicinity of the proximal end portion to the distal end portion of each arm is separated and held by the holding portion while the respective proximal end portions are connected to each other (in each arm An example of a configuration that separates at least the vicinity of the proximal end portion to the distal end portion may also be employed. As a specific example employing this configuration, a probe unit 601 shown in FIG. 14 will be described below. In addition, about the same component as above-mentioned probe unit 1,101,1A, the same code | symbol is attached | subjected and the overlapping description is abbreviate | omitted.

  As shown in FIG. 14, the probe unit 601 includes a pair of probe pins 2 and a support portion 603. The support portion 603 includes a pair of arms 611 (first arm), a pair of arms 612 (second arm), and a holding portion 613. As shown in FIG. 16, each arm 611 is integrally manufactured in a state where base end portions 621 a are connected to each other by a material having non-conductivity (insulation) (one in which each arm 611 is integrated). 14 is also referred to as “intermediate body 701”), as shown in FIG. 14, each base end portion 621a is held by the holding portion 613 while being connected. In addition, each arm 611 is manufactured after the arms 611 are integrally manufactured (after the intermediate body 701 is manufactured) while maintaining the positional relationship when the base end portions 621a are held by the holding portions 613. In a state where the end portion 621a is held by the holding portion, the space from the vicinity of each base end portion 621a to each tip end portion 621b is separated from each other. In this case, in this probe unit 601, as shown in the figure, the positional relationship of each arm 611 when held by the holding unit 613 is such that each arm 611 is adjacent to one virtual plane and each arm 611 is The positional relationship becomes closer to each other as it goes from the base end 621a to the front end 621b. The arm 611 is formed with a conductor pattern (not shown) for electrically connecting the probe pin 2 to a board inspection apparatus (not shown).

  As shown in FIG. 18, each arm 612 is manufactured integrally with each base end portion 622a being connected to each other by a non-conductive material (the “intermediate body of each arm 612 is integrated”). 702 ”), as shown in FIG. 14, each base end portion 622a is held by the holding portion 613 while being connected. In addition, each arm 612 is similar to each arm 611, after both arms 612 are integrally manufactured (intermediate body 702) while maintaining the positional relationship when each base end portion 622 a is held by the holding portion 613. In the state in which each base end portion 622a is held by the holding portion, the space from the vicinity of each base end portion 622a to each tip end portion 622b is separated from each other. In this case, as shown in the figure, the positional relationship of each arm 612 when held by the holding portion 613 is such that each arm 612 is adjacent to one virtual plane and each arm 612 is distal to the proximal end portion 622a. The positions are closer to each other toward the portion 622b. The arm 612 is formed with a conductor pattern (not shown) for electrically connecting the probe pin 2 to a substrate inspection apparatus or the like (not shown).

  Next, a method for manufacturing the probe unit 601 will be described. First, as shown in FIG. 15, an intermediate 701 is manufactured using a non-conductive (insulating) material such as a resin. In the intermediate body 701, the arms 611 are connected by the connecting portions 631a and 631b in a state where the positional relationship (see FIG. 14) when the base end portions 621a of the pair of arms 611 are held by the holding portion 613 is maintained. ing. As a manufacturing method of the intermediate body 701, a manufacturing method by injection molding, a manufacturing method by cutting, a manufacturing method using a 3D printer, or the like can be employed. Next, a conductor pattern (not shown) is formed from the base end portion 621 a to the tip end portion 621 b of each arm 611 in the intermediate body 701.

  Next, as illustrated in FIG. 17, the intermediate body 702 is manufactured using the same manufacturing method as the intermediate body 701 using a non-conductive material such as a resin. In the intermediate body 702, the arms 611 are connected by the connecting portions 632a and 632b while maintaining the positional relationship (see FIG. 14) when the base end portions 622a of the pair of arms 612 are held by the holding portions 613. ing. Next, a conductor pattern (not shown) is formed from the base end portion 622a to the tip end portion 622b of each arm 612 in the intermediate body 702.

  Next, the base end side (connecting parts 631 a and 632 a) of the intermediate bodies 701 and 702 are fixed to the holding part 613. Subsequently, as shown in FIGS. 16 and 18, the connecting portions 631 b and 632 b on the distal end side of the intermediate bodies 701 and 702, that is, on the distal end portions 621 b and 622 b side of the arms 611 and 612 are broken lines shown in FIGS. In this manner, the arm 611, 612 is separated from the vicinity of the proximal end portions 621a, 622a to the distal end portions 621b, 622b. Thus, the probe unit 601 is manufactured.

  In the probe unit 601, as described above, the arms 611 and the arms 612 are integrally formed in a state where the base end portions 621a and base end portions 622a are connected to each other, and the base end portions 621a. They are held by the holding portion 613 while the base ends 622a are connected to each other. Therefore, according to this probe unit 601, each arm 611 and each arm 612 can be manufactured while maintaining the positional relationship between each arm 611 and each arm 612 when held by the holding unit 613, and the manufacturing is performed. Can be held (attached) to the holding portion 613 in a state where the positional relationship is reliably maintained. Therefore, according to the probe unit 601, the dimensions and the elastic modulus of the arms 611 and the arms 612 due to material variations and manufacturing conditions when the arms 611 and 612 are manufactured. Variations in specifications can be suppressed to a small extent, and occurrence of positional deviation between the arms 611 and the arms 612 can be reliably prevented when the arms 611 and the arms 612 are held by the holding portion 613. As a result, more accurate probing can be performed. Further, according to the probe unit 601, since the pair of arms 611 and the pair of arms 612 can be held by the holding portion 613 at once, the assembly efficiency of the probe unit 601 can be sufficiently improved.

  In addition, the example (see FIG. 3) in which the bending portions (C1a, C1b, C2a, C2b) are formed to be bent upward has been described above, but the bending portion may be formed to be bent downward. In this case, one of the curved portions C1a and C1b in the arm 11 can be formed to bend upward, and the other can be formed to bend downward. Similarly, one of the curved portions C2a and C2b of the arm 12 can be formed to bend upward, and the other can be formed to bend downward. Further, both of the curved portions C in either one of the arms 11 and 12 are formed to bend upward, and each of the curved portions C in the other of the arms 11 and 12 are formed to be curved downward. You can also.

  In addition, although the example in which the ribs (21e, 22e, 121e, 122e) are formed in a semi-cylindrical shape (see FIG. 3) protruding upward has been described above, the ribs may be formed in a semi-cylindrical shape protruding downward. Further, it is possible to adopt a configuration in which a shape other than the semi-cylindrical shape, for example, a semi-columnar or prismatic rib is formed so as to protrude upward or downward. In addition, a configuration is adopted in which the rib in one of the first arm and the second arm is formed to protrude upward, and the rib in the other of the first arm and the second arm is formed to protrude downward. You can also.

  In addition, the configuration example in which the ribs (21e, 22e, 121e, 122e) are provided on both the arms (the first arm and the second arm) has been described above, but the following configuration may be employed. In addition, about the same component as the above-mentioned probe unit 1, the same code | symbol is attached | subjected and the overlapping description is abbreviate | omitted. First, as shown in FIG. 19, it is possible to employ a probe unit 1B in which a rib 21e is provided only on the arm 11 (first arm). Further, as shown in FIG. 20, a probe unit 1C in which ribs 22e are provided only on the arm 12 (second arm) can be employed. Further, as shown in FIG. 21, a probe unit 1D in which no rib is provided on both the arms 11 and 12 (first arm and second arm) can be employed.

1, 1A, 1B, 1C, 1D, 601 Probe unit 2 Probe pin 3 Support part 11, 12, 111, 112, 611, 612 Arm 13, 113, 613 Holding part 21a, 22a, 121a, 122a, 621a, 622a End portion 21b, 22b, 121b, 122b, 621b, 622b End portion 21e, 22e, 121e, 122e Rib 401, 402, 701, 702 Intermediate C1a, C1b, C2a, C2b Curved portion

Claims (8)

A probe unit comprising a probe pin and a support part for supporting the probe pin,
The support portion includes first and second belt-like arms arranged in a state of being opposed to each other along a probing direction when probing the probe pin, and base ends of the arms. A holding portion for holding the probe pin and a connecting portion for connecting the tip portions of the arms to each other, the probe pin being placed in a direction opposite to the probing direction. Configure a four-bar linkage that allows motion or approximate linear motion,
Each arm protrudes in the thickness direction of each arm in the first portion closer to the distal end than the base end and the second portion closer to the distal end than the first portion, and the amount of protrusion is Curved portions that are curved so as to continuously change along the length direction of the arm and have lower rigidity than the other portions of the respective arms are formed, and intermediate portions between the curved portions are formed. While functioning as each link constituting the four-bar linkage mechanism, the forming portion of each bending portion is configured to function as a joint constituting the four-bar link mechanism ,
The probe pin is configured to be fixed to the tip portion of the first arm and the tip portion of the second arm so that the probe pin functions as the connecting portion . At least one of the first arm and the second arm, the at least one arm along the longitudinal direction of the is configured to include a rib formed on the intermediate site and claim 1 Symbol placement probe unit. A pair of the probe pins and a pair of the first arm and the second arm,
The holding portion holds the base end portions of the first arms with the pair of first arms extending adjacent to each other, and the pair of second arms extends adjacent to each other. The probe unit according to claim 1 or 2 , wherein the base end portions of the second arms are held. Each of the first arms is manufactured by integrally manufacturing each of the first arms while maintaining a positional relationship when the base ends of the first arms are held by the holding unit. In the state where the end portion is held by the holding portion, the first arm is configured to be separated from at least the vicinity of the base end portion to the tip end portion,
Each of the second arms is manufactured by integrally manufacturing each of the second arms while maintaining a positional relationship when the base ends of the second arms are held by the holding unit. 4. The probe unit according to claim 3 , wherein the probe unit is configured to separate at least the vicinity of the base end portion to the tip end portion of each second arm in a state where the end portion is held by the holding portion. Each of the first arms is non-conductive and is integrally manufactured in a state where the base ends are connected to each other, and is held by the holding portion while the base ends are connected. ,
Each of the second arms has non-conductivity and is integrally manufactured in a state where the base ends are connected to each other, and is held by the holding portion while the base ends are connected. The probe unit according to claim 4 . 2. A conductive shield plate is provided on an arm located on a probing target side of each of the arms, on a surface side facing the probing target, with an insulator interposed therebetween. To 5. The probe unit according to any one of 5 to 5 . A probe unit manufacturing method for manufacturing the probe unit according to claim 3 ,
After the first arms are integrally manufactured while maintaining the positional relationship when the base end portions of the pair of first arms are held by the holding portion, at least the bases in the first arms are formed. Each of the first arms is manufactured by separating between the vicinity of the end and the tip.
After the two second arms are integrally manufactured while maintaining the positional relationship when the base end portions of the pair of second arms are held by the holding portion, at least the bases in the second arms are formed. A probe unit manufacturing method for manufacturing the probe unit by manufacturing each second arm by separating the vicinity from the end to the tip. While maintaining the positional relationship when the respective base end portions of the pair of first arms are held by the holding portion,
In the state where each base end portion of each integrally manufactured first arm is held by the holding portion, at least the vicinity of the base end portion of each first arm to the tip end portion is separated,
In the state where each base end portion of each of the second arms manufactured integrally is held by the holding portion, the distance between at least the vicinity of the base end portion and the tip end portion of each second arm is separated. The probe unit manufacturing method according to claim 7 , wherein the probe unit is manufactured.

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