JP6534558B2 - Probe unit and probe unit manufacturing method - Google Patents

Description

  The present invention relates to a probe unit provided with a probe pin and a support for supporting the probe pin, and a probe unit manufacturing method for manufacturing the probe unit.

  A probe disclosed by the applicant in Patent Document 1 below is known as this type of probe unit. The probe comprises a probe body and a fixture. The fixture comprises a probe fixing portion for fixing the probe main body, a mounting portion for mounting on the probe guide mechanism, and a pair of connecting arms for connecting the probe fixing portion and the mounting portion. In this case, fulcrums in which the connecting arms are cut in an arc shape in the thickness direction (vertical direction) are respectively formed at the connecting portions with the mounting portions and the connecting portions with the probe fixing portion in each connecting arm. In this probe, a 4-node rotation mechanism that allows linear or approximate linear motion of the probe pin in the direction opposite to the direction of probing by means of the probe fixing portion, mounting portion, connecting arm and supporting point in the fixture Configured For this reason, with this probe, when the attachment portion is further lowered from the state where the tip of the probe main body is in contact with the surface to be probed, generation of contact marks due to movement of the tip of the probe main body on the surface of the probe target It is possible to reduce the number.

Patent 4717144 (page 5-6, FIG. 1)

  However, the above-described conventional probe has the following problems to be improved. That is, in this probe, a fulcrum is formed by cutting out each connecting arm in the thickness direction. In this case, in order for the notch portion to function as a fulcrum, the stiffness of the notch portion needs to be sufficiently reduced compared to the other portions, and for this purpose, the notch portion and the other portion (not cut away) It is necessary to make the thickness clearly different from that of the part). For this reason, in the conventional probe, it is necessary to thicken the thickness of the connecting arm (the thickness of the portion not cut out) to some extent. On the other hand, at the time of probing, the contact object is nicked due to the contact between the tip of the probe body and the contact object. In this case, the larger the mass of the entire probe, the larger the dents. For this reason, in order to make a dent mark small, it is necessary to make mass of the whole probe small. However, in the conventional probe, as described above, it is difficult to reduce the weight because it is necessary to increase the thickness of the connecting arm to some extent, and improvement of this point is desired.

  The present invention has been made in view of such problems, and its main object is to provide a probe unit and a probe unit manufacturing method that can realize weight reduction.

In order to achieve the above object, the probe unit according to claim 1 is a probe unit provided with a probe pin and a support portion for supporting the probe pin, and the support portion is a probe when probing the probe pin. The strip-like first and second arms disposed in a mutually opposing manner along the direction of the direction, a holding portion for holding the respective base end portions of the respective arms, and the probe pin can be attached And a connecting part for connecting the tips of the arms to each other, and a four-bar linkage mechanism which allows linear movement or approximate linear movement of the probe pin in the direction opposite to the direction of the probing. configure, each arm, the intermediate portion between the second portion of the tip side of the first portion and the first portion of the tip side of the base end, the Projection amount curved in the thickness direction of the arm is formed respectively as rib cross-sectional shape continuously changes along the width direction of each of the arms extends the length of the respective arm, the intermediate The portion functions as each link constituting the four-bar linkage mechanism, and the first portion and the each second portion function as a joint constituting the four-bar linkage mechanism.

  The probe unit according to claim 2 is the probe unit according to claim 1, wherein the probe pin is fixed to the tip end of the first arm and the tip end of the second arm, and the probe pin is connected to the connection part It is configured to function as

  The probe unit according to claim 3 is the probe unit according to claim 1 or 2, further comprising a pair of the probe pins and a pair of the first arm and the second arm, and the holding portion is a pair of the pair The base end portions of the first arms are held in a state in which the first arms extend adjacent to each other, and the pair of second arms extend in a state in which the second arms extend adjacent to each other. Hold each proximal end.

  The probe unit according to claim 4 is the probe unit according to claim 3, wherein each of the first arms maintains a positional relationship when the respective base end portions of the respective first arms are held by the holding unit. In the state where the respective first arms are integrally manufactured, the respective proximal end portions are held by the holding portion, and at least between the vicinity of the proximal end portions and the distal end portions in the respective first arms The second arms are integrated with each other while maintaining the positional relationship when the base end portions of the second arms are held by the holding portion. After being manufactured, in a state where each of the base end portions is held by the holding portion, the distance from at least the vicinity of the base end portion to the tip end portion in each of the second arms is separated.

  The probe unit according to claim 5 is the probe unit according to claim 4, wherein each of the first arms has non-conductivity and is integrally manufactured in a state where the respective base end portions are connected to each other. The holding units hold the base end portions in a connected state, and the second arms are non-conductive and are integrally manufactured in a state where the base end portions are connected to each other. And the holding portion holds the respective base end portions in a connected state.

  The probe unit according to claim 6 is the probe unit according to any one of claims 1 to 5, wherein a surface of the arms located on the probing target side during the probing among the arms is opposed to the probing target. It has a conductive shield plate disposed on the side via an insulator.

  The probe unit manufacturing method according to claim 7 is the probe unit manufacturing method for manufacturing the probe unit according to claim 3, wherein the base end portions of the pair of first arms are held by the holding portion. The two first arms are integrally manufactured in a state in which the positional relationship between the two is maintained, and then the respective first arms are separated by separating at least the vicinity of the proximal end from the proximal end in the respective first arms. After the two second arms are manufactured integrally while maintaining the positional relationship when the respective base end portions of the pair of second arms are held by the holding portion, the two second arms are manufactured. The distance between at least the vicinity of the proximal end and the distal end is separated, the second arms are manufactured, and the probe unit is manufactured.

  In the probe unit manufacturing method according to claim 8, in the probe unit manufacturing method according to claim 7, the positional relationship when the base end portions of the pair of first arms are held by the holding unit is maintained. And in a state in which the base end of each first arm produced integrally is held by the holding part, the distance from at least the vicinity of the base end to the tip in each first arm is separated And separating the distance from at least the vicinity of the base end to the tip end of the second arm while keeping the base end of the second arm integrally manufactured by the holding portion. The probe unit is manufactured.

In the probe unit according to claim 1, an intermediate portion between the first portion closer to the distal end than the proximal end of the strip-like first and second arms and the second portion closer to the distal end than the first portion. A rib of a cross-sectional shape which is curved in the thickness direction of each arm and in which the protrusion amount changes continuously along the width direction of each arm is formed so as to extend in the length direction of each arm , A four-bar link mechanism is constituted by the support portion, in which the intermediate portion functions as each link, and each first portion and each second portion function as a joint. That is, in this probe unit, a rib is formed at an intermediate portion of each strip-like arm to facilitate elastic deformation of each first portion and each second portion, thereby jointing each first portion and each second portion. It functions as For this reason, according to this probe unit, each arm is sufficiently thin compared to the conventional configuration in which the arm is notched in the thickness direction and the portion functions as a joint (the arm requires a certain thickness). As a result of being able to reduce the weight of each arm sufficiently, the weight of the probe unit can be reduced sufficiently. Therefore, according to this probe unit, it is possible to sufficiently reduce the dents generated in the probing target due to the contact of the probe pin with the probing target at the time of probing.

  According to the probe unit of the second aspect, by configuring the probe unit to function as the probe pin as the connecting portion, the probe unit can be further reduced in weight as compared with the configuration in which the connecting portion of a member different from the probe pin is provided. Can be

  The probe unit according to claim 3 comprises a pair of probe pins and a pair of first arms and a second arm, wherein the holding portion holds respective proximal end portions of the pair of first arms, and Hold each proximal end of the 2 arms. That is, in this probe unit, the pair of probe pins is supported by the support portion. For this reason, according to this probe unit, this probe unit is suitably used in the measurement or inspection by the four probe method or the four probe pair method in which two probe pins are probed to one probing site in the probing target. In addition to the above, it is possible to keep the dent caused by the impact of the probe pin sufficiently small during probing.

  In the probe unit according to the fourth aspect, each of the first arms and each of the first arms and the first arms is maintained while maintaining the positional relationship when the base end portions of the pair of first arms and the pair of second arms are held by the holding portion. After the two arms are integrally manufactured, the respective first arms and the second arms are configured by separating from the vicinity of the proximal end to the distal end while each proximal end is held by the holding portion. There is. For this reason, according to this probe unit, the pair of first arms and the pair of second arms can be produced at one time under the same production conditions (the same processing conditions using the same material and the same portion of the same material). It is possible to minimize the variation in dimensions such as dimensions and elastic modulus of each arm due to the variation in material and the difference in conditions. Further, according to this probe unit, the holding portions can hold the first arms and the second arms while maintaining the positional relationship when the first arms and the second arms are manufactured integrally. Since this can be performed, it is possible to reliably prevent the occurrence of positional deviation of the first arms and the second arms when holding the first arms and the second arms in the holding portion. Therefore, according to this probe unit, accurate probing can be realized.

  In the probe unit according to claim 5, each of the first arm and the second arm is non-conductive and is integrally manufactured in a state in which the respective base end portions are connected to each other, and each base end portion Are held by the holder in a connected state. For this reason, according to this probe unit, each first arm and each second arm can be held by the holding portion at one time, so that the assembly efficiency can be sufficiently improved.

  According to the probe unit of the sixth aspect, the conductive shield plate is disposed on the side of the arm located on the probing target side at the time of probing opposite to the probing target via the insulator. As a result, since the floating capacity between the arm and the object to be probed can be sufficiently reduced, it is possible to reliably prevent the decrease in inspection accuracy due to the floating capacity.

  Further, according to the probe unit manufacturing method of the seventh aspect, after the first arms are integrally manufactured in a state in which the positional relationship when holding the pair of first arms is maintained, the distal end from the vicinity of the base end portion From the vicinity of the proximal end, the two arms are manufactured integrally while maintaining the positional relationship when the pair of second arms are held while the pair of second arms are held while maintaining the positional relationship when the first arms are separated. By separating the sections up to the tip and manufacturing each second arm, the pair of first arms and the pair of second arms are processed under the same preparation conditions (the same processing using the same material or the same portion of the same material) Each probe unit can be manufactured at one time according to the conditions). Therefore, according to this probe unit manufacturing method, variations in dimensions such as dimensions and elastic moduli in each arm due to material variations and differences in conditions can be reduced. DOO can result, it is possible to produce a probe unit capable of accurate probing.

  Further, according to the method of manufacturing a probe unit according to claim 8, the first arms and the second arms are held while maintaining the positional relationship when the first arms and the second arms are manufactured integrally. Since the first arm and the second arm can be held by the holding portion, the occurrence of positional deviation between the first arms and the second arms can be reliably prevented. . Therefore, according to this probe unit manufacturing method, a probe unit capable of more accurate probing can be manufactured.

FIG. 2 is a perspective view showing the configuration of a probe unit 1; FIG. 2 is an exploded perspective view of the probe unit 1; FIG. 10 is a side view of the probe unit 1 in a state of being fixed to the moving mechanism 300. FIG. 2 is a plan view of the probe unit 1; FIG. 3 is a bottom view of the probe unit 1; It is sectional drawing explaining the structure of rib R1, R2 of arms 11 and 12. FIG. FIG. 6 is a first explanatory view for explaining the operation of the probe unit 1; FIG. 8 is a second explanatory view for explaining the operation of the probe unit 1; FIG. 2 is a perspective view showing a configuration of a probe unit 101. FIG. 2 is an exploded perspective view of a probe unit 101. FIG. 7 is a first explanatory view illustrating the method of manufacturing the arm 111. FIG. 14 is a second explanatory view illustrating the method of manufacturing the arm 111. FIG. 14 is a first explanatory view illustrating the method of manufacturing the arm 112. It is 2nd explanatory drawing explaining the manufacturing method of arm 112. As shown in FIG. It is a side view of probe unit 1A. FIG. 6 is a perspective view showing the configuration of a probe unit 601. FIG. 18 is a first explanatory view illustrating the method of manufacturing the probe unit 601. FIG. 18 is a second explanatory view illustrating the method of manufacturing the probe unit 601. FIG. 18 is a third explanatory view illustrating the method of manufacturing the probe unit 601. FIG. 21 is a fourth explanatory view illustrating the method of manufacturing the probe unit 601. It is sectional drawing explaining the structure of rib R101, R102. It is sectional drawing explaining the structure of rib R201, R202.

  Hereinafter, embodiments of a probe unit and a method of manufacturing a probe unit will be described with reference to the attached drawings.

  First, the configuration of the probe unit 1 shown in FIG. 1 as an example of the probe unit will be described. The probe unit 1 is configured to include a probe pin 2 and a support portion 3 as shown in FIG.

  As shown in FIGS. 1 and 2, the probe pin 2 is formed in a cylindrical shape with a tip end 2 a pointed. When the probe unit 1 is moved by the moving mechanism 300 (see FIG. 3), the tip 2a of the probe pin 2 is probed (contacted) with the object to be probed (for example, the substrate 200 shown in FIG. 3).

  The support portion 3 is configured to be able to support the probe pin 2. Specifically, as shown in FIGS. 1 to 3, the support portion 3 is configured to include an arm 11 (first arm), an arm 12 (second arm), and a holding portion 13.

  The arms 11 and 12 are respectively formed in a band shape (long thin plate shape) as shown in FIGS. In this case, the arms 11 and 12 are made of metal, for example, and have conductivity. Further, the arms 11 and 12 are disposed in a state in which the respective surfaces face each other while being spaced apart from each other along the direction of the probing (downward in FIG. 3) when probing the probe pin 2. The arms 11 and 12 have the base end portions 21 a and 22 a held by the holding portion 13.

  Further, as shown in FIGS. 3 to 5, the first portion P1a on the side of the distal end 21b of the arm 11 and the side of the proximal end 21a of the distal end 21b (the side of the first portion P1a) A rib R1 is formed at an intermediate portion 21c along the longitudinal direction between the second portion P2a and the tip portion 21b). Further, the first portion P1b on the distal end portion 22b side of the proximal end portion 22a of the arm 12 (hereinafter, also referred to as "first portion P1" when not distinguished from the first portion P1a of the arm 11) and the distal end portion 22b Between the second portion P2b (also referred to as “second portion P2” when not distinguished from the second portion P2a of the arm 11) on the proximal end 22a side (the distal end portion 22b side from the first portion P1b) A rib R2 (hereinafter, also referred to as "rib R" when not distinguished from the rib R1 of the arm 11) is formed at an intermediate portion 22c along the longitudinal direction.

  In this case, as shown in FIGS. 1 to 3 and 6, the rib R1 is curved in the thickness direction of the arm 11 (upward in each figure: the direction away from the arm 12) and extends in the length direction of the arm 11 It is formed to be. Specifically, the rib R1 protrudes upward, and the shape in which the amount of projection changes continuously along the width direction of the arm 11 (for example, as shown in FIG. 6, the cross section is semi-cylindrical (or semi-elliptical) Tubular shape). Further, as shown in FIGS. 1 to 3 and 6, the rib R2 is curved in the thickness direction of the arm 12 (upward in each figure: the direction approaching the arm 11) and extends in the length direction of the arm 12 Is formed. Specifically, the rib R2 protrudes upward, and the shape in which the amount of protrusion changes continuously along the width direction of the arm 12 (for example, like the rib R1, the cross section is semi-cylindrical (or semi-elliptical) It has a tubular shape (see FIG. 6)).

  Here, since the rib R is formed on the middle portions 21c and 22c of the arms 11 and 12, the second moment of area of the middle portions 21c and 22c is the other portion excluding the middle portions 21c and 22c in the arms 11 and 12 ( Hereinafter, it will be sufficiently larger than the second moment of area of the cross section) (that is, the rigidity of the intermediate portions 21c and 22c is sufficiently higher than the rigidity of the other portions). In other words, the moment of inertia of area of the other portion is sufficiently smaller than the moment of inertia of area of the intermediate portions 21c and 22c (that is, the rigidity of the other portion is sufficiently higher than the rigidity of the intermediate portions 21c and 22c Is falling). For this reason, in this probe unit 1, the other parts of arms 11 and 12, particularly the boundary parts between intermediate parts 21c and 22c of arms 11 and 12 and the other parts (that is, respective first parts P1 of arms 11 and 12 and Elastic deformation is facilitated at each second portion P2).

  Further, as shown in FIGS. 3 to 5, insertion holes 21 d and 22 d for inserting and fixing the base end 2 b of the probe pin 2 are formed in the respective tip portions 21 b and 22 b of the arms 11 and 12 respectively. It is done. Further, as shown in FIGS. 2 and 3, the arms 11 and 12 are fixed to the holding portion 13 at the base end portions 21 a and 22 a of the arms 11 and 12 (connecting the arms 11 and 12 and the holding portion 13 Through holes 21e and 22e through which the fixing screws 14 used at the time of insertion are inserted. Further, in the base end portions 21a and 22a of the arms 11 and 12, insertion holes 21f and 22f for inserting fixing screws 301 (refer to FIG. 3) used when fixing the probe unit 1 to the moving mechanism 300 are respectively formed. It is done.

  The holding part 13 is comprised by the two holding members 31 and 32, as shown in FIGS. 1-3, and hold | maintains each base end part 21a, 22a of each arm 11,12. In this case, as shown in FIG. 3, the holding portion 13 sandwiches the arm 11 between the holding members 31 and 32 and positions the arm 12 on the lower surface of the holding member 32. The proximal end portions 21a and 22a of the arms 11 and 12 are inserted by screwing the through holes 22e of the 12 through holes 32a of the holding member 32 and the through holes 21e of the arm 11 into the screw holes 31a of the holding member 31. It is configured to hold. Further, as shown in FIGS. 2 and 3, insertion holes 31 b and 32 b for fixing the probe unit 1 to the moving mechanism 300 are respectively formed in the holding members 31 and 32.

  In this probe unit 1, as shown in FIG. 3, the proximal end 2 b side of the probe pin 2 is fixed to the distal ends 21 b and 22 b of the arms 11 and 12, and the distal ends 21 b and 22 b by the probe pins 2. Are connected to each other. That is, in the probe unit 1, the probe pin 2 is configured to function as a connecting portion.

  Here, in the probe unit 1, as described above, the arms 11 and 12 easily undergo elastic deformation at the respective first portions P 1 and the respective second portions P 2. For this reason, in the probe unit 1, as shown in FIG. 7, in the state where the holding portion 13 is fixed to the moving mechanism 300, the direction of probing is opposite to the direction of probing with respect to the tip 2a of the probe pin 2 (in FIG. When a force is applied upward), with each first portion P1 and each second portion P2 as a fulcrum, an intermediate portion 21c of arm 11 (formation portion of rib R1) and an intermediate portion 22c of arm 12 (formation portion of rib R2) , The tip portions 21b and 22b of the arms 11 and 12 and the probe pin 2 rotate (move). As shown in FIG. 8, while the intermediate portions 21c and 22c function as links (nodes), the first portion P1 and the second portions P2 of the probe unit 1 function as the pivoting operation of each component of the probe unit 1 as described above. It is similar to the pivotal movement of a four-bar linkage (four-bar rotation mechanism) that functions as a joint (joint or fulcrum). That is, in the probe unit 1, a four-bar link mechanism is configured by the arms 11 and 12, the holding portion 13, and the probe pin 2 functioning as a connecting portion. In addition, in this probe unit 1, when a force is applied to the probe pin 2 in the direction opposite to the direction of probing (upward in the same figure), the tip 2a of the probe pin 2 The lengths of the arms 11 and 12 (intermediate portions 21c and 22c) and the distance between the arms 11 and 12 are defined so as to allow linear motion or approximate linear motion.

  Further, in the probe unit 1, the ribs R are formed on the arms 11 and 12 formed in a band shape, and each first portion P 1 and each second portion which is a boundary portion between the other portions in the arms 11 and 12 and the rib R By facilitating elastic deformation of the two parts P2, each first part P1 and each second part P2 function as joints. For this reason, in this probe unit 1, the arms 11 and 12 are sufficient compared with the conventional configuration in which the arm is notched in the thickness direction and the portion functions as a joint, that is, the configuration in which the arm requires a certain thickness. As a result of reducing the weight of the arms 11 and 12, the weight of the probe unit 1 can be reduced accordingly.

  Next, the operation of the probe unit 1 at the time of probing will be described in detail with reference to the drawings. As an example, an operation when the probe pins 2 of the probe unit 1 are probed on the substrate 200 as a probing target and the substrate inspection device (not shown) inspects the substrate 200 will be described.

  As shown in FIG. 3, the probe unit 1 has an insertion hole 22 f formed in the arm 12, an insertion hole 32 b formed in the holding member 32 of the holding portion 13, and an insertion hole 21 f formed in the arm 11. And, the fixing screw 301 is inserted into the insertion hole 31 b formed in the holding member 31 of the holding portion 13 and fixed to the moving mechanism 300 by screwing the fixing screw 301 into the screw hole 300 a of the moving mechanism 300. .

  When an instruction for probing is given to the moving mechanism 300, the moving mechanism 300 moves the probe unit 1 above the substrate 200 to be probed. Next, the moving mechanism 300 lowers (moves downward) the probe unit 1. Subsequently, as the probe unit 1 is lowered, as shown in FIG. 3, the tip 2 a of the probe pin 2 is brought into contact with the surface 201 of the substrate 200.

  Next, the moving mechanism 300 further lowers the probe unit 1 as shown in FIG. Along with this, the tip 2 a of the probe pin 2 presses the surface 201 of the substrate 200 downward. Further, the reaction force of the pressing force is applied upward to the distal end portion 2 a of the probe pin 2. At this time, as shown in the same figure, with the first portion P1 and the second portion P2 of the arms 11 and 12 as fulcrums, the middle portion 21c of the arm 11, the middle portion 22c of the arm 12 and the arms 11 and 12 Each tip portion 21b, 22b and the probe pin 2 rotate in the same operation as the four-bar link mechanism. Specifically, the intermediate portion 21c is pivoted counterclockwise (counterclockwise) in the figure with the first portion P1a as a fulcrum, and the intermediate portion 22c is counterclockwise in the figure with the first portion P1b as a fulcrum. Rotate. Further, the tip portions 21b and 22b connected by the probe pin 2 and the probe pin 2 turn clockwise (clockwise) in the same figure with the second portions P2a and P2b as fulcrums.

  Subsequently, the moving mechanism 300 stops the lowering when the probe unit 1 is lowered by a predetermined distance.

  In this case, in the probe unit 1, as described above, the lengths of the arms 11 and 12, the arm 11, and the arm 11 allow the distal end portion 2 a of the probe pin 2 to linearly or approximately linearly move. , 12 intervals are defined. For this reason, from the time when the tip 2a of the probe pin 2 contacts the surface 201 of the substrate 200 until the lowering of the probe unit 1 is stopped, the first contact position is maintained. Therefore, in the probe unit 1, it is possible to reliably prevent the generation of a scratch due to the tip 2 a of the probe pin 2 moving on the surface 201 of the substrate 200.

  Further, in the probe unit 1, as described above, it is possible to reduce the weight of the probe unit 1 by thinning the arms 11 and 12 and sufficiently reducing the weight. For this reason, it is possible to sufficiently reduce the mark formed on the surface 201 of the substrate 200 due to the contact of the tip 2a of the probe pin 2 with the substrate 200 (target for probing) in probing.

  Next, a substrate inspection apparatus (not shown) performs inspection of the substrate 200 based on the electrical signal input / output via the probe pin 2.

  Subsequently, when the inspection is finished and the end instruction of probing is given to the moving mechanism 300, the moving mechanism 300 raises the probe unit 1 (holding unit 13). Along with this, the pressure on the surface 201 of the substrate 200 by the probe pin 2 is released, and the reaction force of the pressing force applied upward to the tip 2 a of the probe pin 2 is released. At this time, the middle portions 21c and 22c of the arms 11 and 12, the tip portions 21b and 22b of the arms 11 and 12 and the probe pin 2 operate as a four-bar link mechanism, that is, the orientation in the above-described probing. 7 and returns to the initial state shown in FIG.

  By the above, the probing of the probe pins 2 of the probe unit 1 with respect to the substrate 200 and the release of probing are completed.

  As described above, in the probe unit 1, the first portion P1 on the side of the distal end 21b or 22b and the proximal end 21a on the distal end 21b or 22b , 22a (the distal end 21b, 22b side relative to the first portion P1), ribs R are respectively formed at intermediate portions 21c, 22c between the second portion P2 and each intermediate portion 21c, 22c as each link The support 3 configures a four-bar linkage that functions and that each first part P1 and each second part P2 function as a joint. That is, in the probe unit 1, the ribs R are formed in the middle portions 21 c and 22 c of the belt-like arms 11 and 12 to facilitate elastic deformation of the first portions P 1 and the second portions P 2. One site P1 and each second site P2 function as a joint. For this reason, according to this probe unit 1, the arms 11 and 12 are sufficient compared with the conventional configuration in which the arm is notched in the thickness direction and the portion functions as a joint (the arm needs a certain thickness). As a result of being able to reduce the weight of the arms 11 and 12 sufficiently, it is possible to reduce the weight of the probe unit 1 sufficiently. Therefore, according to this probe unit 1, it is possible to sufficiently reduce the mark formed on the probing target due to the contact of the probe pin 2 with the probing target (substrate 200) in the probing.

  In addition, according to this probe unit 1, the probe unit 1 is configured to function as the connection portion, so that the probe unit 1 is compared with the configuration in which the connection portion of a member different from the probe pin 2 is provided. 1 can be further reduced in weight.

  Next, the configuration of the probe unit 101 shown in FIG. 9 as another example of the probe unit will be described. In the following description, the same components as those of the above-described probe unit 1 are denoted by the same reference numerals, and redundant description will be omitted.

  The probe unit 101 is configured to include a pair of probe pins 2 and a support portion 103 as shown in FIGS. The support portion 103 includes a pair of arms 111 (first arm), a pair of arms 112 (second arm), and a holding portion 113. Each of the arms 111 and 112 is formed in a band shape of metal in the same manner as the arms 11 and 12 of the probe unit 1. Further, in the middle portions 121c and 122c of the arms 111 and 112, ribs R1 and R2 are respectively formed in the same manner as the arms 11 and 12.

  As shown in FIGS. 9 and 10, the holding portion 113 is configured to include the holding member 131 and the holding member 132, and in a state where the respective arms 111 extend in parallel and adjacent to each other (adjacent to one virtual plane) Each proximal end 121a of each arm 111 is held in the arranged state). Further, the holding portion 113 holds the proximal end portions 122 a of the arms 112 in a state in which the arms 112 are adjacent and extend in parallel (arranged state arranged adjacent to one virtual plane). In this case, the proximal end portions 121a and 122a of the arms 111 and 112 are fixed to the holding portion 113 by the fixing screws 14 (see FIG. 10). Further, as shown in the figure, the holding member 131 and the holding member 132 of the holding portion 113 communicate with the insertion hole 121 f of the arm 111 and the insertion hole 122 f of the arm 112 to move the probe unit 1 to the moving mechanism 300 (FIG. Through holes 31 b and 32 b are formed for inserting fixing screws 301 (refer to the same figure) used for fixing to 3).

  In the probe unit 101, a pair of probe pins 2 is supported by the support portion 103. For this reason, this probe unit 101 can be suitably used in the measurement or inspection by the four probe method or the four probe method performed by probing two probe pins 2 with respect to one probing site in the object to be probed. Also in this probe unit 101, the same effect as the probe unit 1 described above, that is, the generation of flaws due to the movement of the probe pin 2 at the time of probing, and the strike caused by the impact of the probe pin 2 at the time of probing It is possible to realize the suppression of the mark.

  Next, a method of manufacturing a probe unit for manufacturing the above-described probe unit 101 will be described focusing on a method of manufacturing the arms 111 and 112. When manufacturing the arm 111 used for this probe unit 101, first, as shown in FIG. 11, the intermediate body 401 which integrated a pair of arm 111 is produced. As shown in the figure, in the intermediate body 401, each arm 111 maintains the positional relationship (see FIG. 9) when the base end portions 121a of the pair of arms 111 are held by the holding portion 113. It has a shape connected by a connecting portion 411. In this case, as a method for producing the intermediate body 401, a production method by electroforming, a method by pressing, a production method by scraping, or the like can be employed.

  Next, the connecting portion 411 of the intermediate body 401 (each arm 111 integrated) is cut and separated at a portion shown by a broken line in FIG. 11, and then, as shown in FIG. 12, each arm 111 is separated. Thereby, a pair of arms 111 are produced.

  Further, when producing the arm 112, as shown in FIG. 13, an intermediate 402 in which the pair of arms 112 are integrated is produced by the same production method as the production method of the intermediate 401. As shown in the figure, in the intermediate body 402, each arm 112 maintains the positional relationship (see FIG. 9) when the base end portions 122a of the pair of arms 112 are held by the holding portion 113. It has a shape connected by a connecting portion 412.

  Subsequently, the connecting portion 412 of the intermediate body 402 (each arm 112 integrated) is cut off at the broken line shown in FIG. 13 and then the arms 112 are separated as shown in FIG. Thereby, a pair of arms 112 are produced.

  Next, as shown in FIG. 9, the proximal end portions 121a and 122a of the arms 111 and 112 are fixed to the holding portion 113 using the fixing screws 14 (see FIG. 10). Subsequently, the probe pin 2 is fixed to the distal end portions 121 b and 122 b of the arms 111 and 112. The probe unit 101 is manufactured by the above.

  According to this manufacturing method, by manufacturing the arms 111 and 112 by the above manufacturing method, the pair of arms 111 can be manufactured under the same manufacturing conditions, and the pair of arms 112 can be manufactured under the same manufacturing conditions. Specifically, for example, when producing the arms 111 and 112 by electroforming, each arm 111 and each arm 112 can be produced at one time under the same electroforming conditions using the same electroforming material, for example, When manufacturing the arms 111 and 112 by pressing or shaving, each arm 111 and each arm 112 are manufactured at one time under the same pressing conditions and the same cutting conditions using the same portion in the material to be processed (metal plate or metal block) can do. For this reason, as a result of being able to suppress the variation in specifications such as the dimensions and elastic modulus in each arm 111, 112 due to the material variation and the difference in conditions small, manufacturing the probe unit 101 capable of accurate probing. Can.

  In the above example, after the intermediate body 401, 402 (each arm 111, 112 integrated) is cut and separated into a pair of arms 111 and a pair of arms 112, each proximal end of each arm 111, 112 Although the probe unit 101 is manufactured by holding the holders 121a and 122a in the holder 113, the probe unit 101 can also be manufactured as follows. First, after producing the intermediates 401 and 402, only the portions on the proximal end portions 121a and 122a side of the arms 111 and 112 in the intermediates 401 and 402 are separated. Next, the base end portions 121a and 122a are held in the holding portion 113 in that state (the state where the portions other than the base end portions 121a and 122a are connected and the arms 111 and 112 are integrated). Hold it. Next, in this state, the distance from the vicinity of each proximal end 121a, 122a in each of the intermediates 401, 402 to each distal end 121b, 122b is separated. That is, at this time, the arms 111 and 112 are separated from the proximal ends 121a and 122a to the distal ends 121b and 122b. In the probe unit 101 manufactured in this manner, the arms 111 and the arms 112 are held by the holding portion 113 while maintaining the positional relationship between the arms 111 and the arms 112 when the intermediates 401 and 402 are formed. As a result, since the occurrence of positional deviation between the arms 111 and the arms 112 when holding the arms 111 and the arms 112 in the holding portion 113 can be reliably prevented, more accurate probing can be achieved. Can be manufactured.

  The probe unit and the method of manufacturing the probe unit are not limited to the above configuration and method. For example, the probe pin 2 is directly fixed to the tip portions 21b and 22b (tip portions 121b and 122b) of the arms 11 and 12 (arms 111 and 112), that is, the proximal end 2b side of the probe pin 2 is used as a connecting portion Although the configuration example to function is described above, it is formed separately from the probe pin 2 and is formed so as to be attachable (removable) to the probe pin 2 to connect the tip portions 21b and 22b (tip portions 121b and 122b) It is also possible to adopt a configuration provided with a unit.

  Moreover, the probe unit 1A shown in FIG. 15 can also be adopted. In the following description, the same components as those of the above-described probe unit 1 and 101 are denoted by the same reference numerals, and redundant description will be omitted.

  As shown in FIG. 15, the probe unit 1A is configured to include an insulating sheet 41 and a shield plate 42 in addition to the components included in the probe unit 1 described above. The insulating sheet 41 is an example of an insulator, and is formed in a sheet shape of a non-conductive (insulating) material such as a resin. Further, in the insulating sheet 41, an insertion hole 41a for inserting the fixing screw 14 and an insertion hole 41b for inserting the fixing screw 301 (see FIG. 3) are formed. The shield plate 42 is formed in a thin plate shape by a conductive metal such as copper or aluminum. Further, in the shield plate 42, an insertion hole 42a for inserting the fixing screw 14 and an insertion hole 42b for inserting the fixing screw 301 are formed. As shown in FIG. 15, the shield plate 42 is a surface of the arms 12 and 12 facing the substrate 200 in the arm 12 located on the side of the substrate 200 as a probing target at the time of probing (the lower surface in FIG. Hereinafter, it is disposed on the side facing the “facing surface” via the insulating sheet 41 (in a state of being insulated from the arm 12) and fixed to the holding portion 13 by the fixing screw. In addition, the shield plate 42 is connected to, for example, the ground potential (reference potential) via a wire not shown.

  In this case, in the configuration not provided with the shield plate 42, since the arm 12 is formed of metal, the stray capacitance between the arm 12 and the object to be probed may increase, and the stray capacitance lowers the inspection accuracy. There is a risk of On the other hand, according to this probe unit 1A, the stray capacitance between the arm 12 and the object to be probed can be sufficiently reduced by arranging the shield plate 42 on the opposite surface side of the arm 12 The drop in inspection accuracy due to the stray capacitance can be reliably prevented. Even if the fixing screw 14 used for fixing the shield plate 42 is made of metal, since the shield plate 42 and the fixing screw 14 are conducted, the stray capacitance generated by the fixing screw 14 is also cancelled. Can. Further, since the shield plate 42 is formed in a thin plate shape, a sufficient clearance can be secured between the arm 12 and the object to be probed at the time of probing, which can prevent the occurrence of troubles in probing.

  Further, although the example using the arms 11 and 12 (arms 111 and 112) formed of metal has been described above, a configuration using a resin arm (first arm and second arm) formed by injection molding or the like is adopted. You can also. In this case, when a resin arm is used, a conductive film (conductive layer) is formed on all or part of the surface of the arm, so that the probe pin 2 and the holding portion 13 (holding portion 113) are electrically conductive. It is also possible to adopt a configuration in which electrical connection is made via a membrane. When a resin arm is used in a probe unit provided with a pair of probe pins 2 as in the probe unit 101 described above, a pair of arms (a pair of arms 111 in the probe unit 101 and a pair In separating the arms 112), only the portion from the vicinity of the proximal end to the distal end in each arm is separated and held by the holding portion in a state in which the respective proximal ends are connected with each other It is also possible to employ an example of a configuration in which the distance between at least the vicinity of the proximal end and the distal end is separated. As a specific example adopting this configuration, a probe unit 601 shown in FIG. 16 will be described below. The same components as those of the above-described probe units 1, 101, and 1A will be assigned the same reference numerals and overlapping descriptions will be omitted.

  As shown in FIG. 16, this probe unit 601 is configured to include a pair of probe pins 2 and a support portion 603. The support portion 603 is configured to include a pair of arms 611 (first arm), a pair of arms 612 (second arm), and a holding portion 613. As shown in FIG. 18, the respective arms 611 are integrally manufactured in a state in which the respective base end portions 621 a are connected to each other by a non-conductive (insulating) material (in which each arm 611 is integrated) (Also referred to as “intermediate 701”), as shown in FIG. 16, is held by the holding portion 613 in a state in which the respective base end portions 621a are connected. In addition, after the arms 611 are manufactured integrally after maintaining the positional relationship when the base end portions 621a are held by the holding portions 613 (after the intermediate body 701 is manufactured), the respective arms 611 In a state where the end 621a is held by the holding portion, the distance from the vicinity of each proximal end 621a to each tip 621b is separated from each other. In this case, in this probe unit 601, as shown in the figure, the positional relationship of each arm 611 when held by the holding portion 613 is that each arm 611 is adjacent on one virtual plane and each arm 611 is There is a positional relationship in which they approach each other as they go from the proximal end 621a to the distal end 621b. Further, on the arm 611, a conductor pattern (not shown) for electrically connecting the probe pin 2 to a substrate inspection apparatus (not shown) or the like is formed.

  As shown in FIG. 20, the respective arms 612 are integrally manufactured in a state in which the respective proximal end portions 622a are connected by a non-conductive material (the one in which the respective arms 612 are integrated is referred to as “intermediate (Also referred to as “702”), as shown in FIG. 16, the base end portions 622a are held by the holding portion 613 in a connected state. Further, each arm 612 is produced in a similar manner to each arm 611 after both arms 612 are integrally manufactured in a state in which the positional relationship when each base end 622 a is held by the holding portion 613 is maintained (intermediate 702 And each proximal end 622a is held by the holding portion, the distance from the vicinity of each proximal end 622a to each distal end 622b is separated from each other. In this case, as shown in the figure, the positional relationship of each arm 612 when held by the holding portion 613 is such that each arm 612 is adjacent on one virtual plane and each arm 612 is proximal to the proximal end 622a. It becomes a positional relationship which adjoins each other as it goes to the part 622b. Further, on the arm 612, a conductor pattern (not shown) for electrically connecting the probe pin 2 to a substrate inspection apparatus (not shown) or the like is formed.

  Next, a method of manufacturing the probe unit 601 will be described. First, as shown in FIG. 17, an intermediate body 701 is manufactured using a non-conductive (insulating) material such as a resin. In the intermediate 701, the arms 611 are connected by the connecting portions 631a and 631b while maintaining the positional relationship (see FIG. 16) when the base end portions 621a of the pair of arms 611 are held by the holding portion 613. ing. As a method of manufacturing the intermediate body 701, a method of manufacturing by injection molding, a method of manufacturing by shaving, a method of manufacturing using a 3D printer, or the like can be adopted. Next, a conductor pattern (not shown) is formed from the base end portion 621a of each arm 611 to the tip end portion 621b of the intermediate body 701.

  Subsequently, as shown in FIG. 19, using a non-conductive material such as a resin, an intermediate 702 is manufactured by the same manufacturing method as the intermediate 701. In the intermediate 702, the arms 611 are connected by the connecting portions 632a and 632b while maintaining the positional relationship (see FIG. 16) when the base end portions 622a of the pair of arms 612 are held by the holding portion 613. ing. Next, a conductor pattern (not shown) is formed from the proximal end 622 a to the distal end 622 b of each arm 612 in the intermediate 702.

  Next, the base end sides (connection parts 631 a and 632 a) of the intermediates 701 and 702 are fixed to the holding part 613. Subsequently, as shown in FIGS. 18 and 20, broken lines shown in FIGS. 17 and 19 show the end portions of the intermediate bodies 701 and 702, that is, the connecting portions 631b and 632b on the end portions 621b and 622b of the arms 611 and 612, respectively. At the position of (1), the sections from the vicinity of the proximal end portions 621a and 622a of the arms 611 and 612 to the distal end portions 621b and 622b are separated from each other. Thus, the probe unit 601 is manufactured.

  In the probe unit 601, as described above, the arms 611 and the arms 612 are integrally manufactured in a state in which the base end portions 621a and 622a are connected to each other, and the base end portions 621a They are held by the holding portion 613 in a state in which the base end portions 622a are connected to each other. Therefore, according to this probe unit 601, each arm 611 and each arm 612 can be manufactured while maintaining the positional relationship between each arm 611 and each arm 612 when held by the holding portion 613, and manufactured. It is possible to hold (attach) the holding portion 613 in a state where the positional relationship at the time of holding is surely maintained. Therefore, according to this probe unit 601, the dimensions and elastic modulus of each arm 611 and each arm 612 due to the material variation and the difference in the manufacturing condition when manufacturing each arm 611 and each arm 612 And the like, while at the same time reliably preventing the occurrence of positional deviation between the arms 611 and the arms 612 when the arms 611 and the arms 612 are held by the holding portion 613. As a result, more accurate probing can be performed. Further, according to this probe unit 601, since the pair of arms 611 and the pair of arms 612 can be held by the holding portion 613 at one time, the assembly efficiency of the probe unit 601 can be sufficiently improved.

  Also, although the ribs (ribs R1 and R2) are formed into a semicylindrical shape (see FIG. 3) that protrudes upward, the ribs may be formed into a semicylindrical shape that protrudes downward. In this case, a rib on one of the first arm and the second arm is formed to project upward, and a rib on the other of the first arm and the second arm is formed to project downward. It can also be done. Moreover, the rib formed in shapes other than a semi-cylindrical shape is also employable. As one example, as shown in FIG. 21, ribs R101 and R102 formed in a tubular (hollow structure) by joining a bottom plate to the lower part of a semi-cylindrical body, and ribs R201 formed in a semi-cylindrical shape as shown in FIG. R202 can be adopted.

1, 1A, 601 Probe unit 2 Probe pin 3 Support portion 11, 12, 111, 112, 611, 612 Arm 13, 113, 613 Holding portion 21a, 22a, 121a, 122a, 621a, 622a Base end 21b, 22b, 121b, 122b, 621b, 622b, tip portions 21c, 22c, 121c, 122c, intermediate portions R1, R2, R101, R102 ribs 401, 402, 701, 702 intermediates

Claims (8)

A probe unit comprising a probe pin and a support for supporting the probe pin, the probe unit comprising:
The supporting portion is a strip-like first arm and a second arm which are disposed to face each other at a distance from each other along the direction of probing at the time of probing the probe pins, and the base end portions of the respective arms. A holding portion for holding the head, and a connecting portion configured to be capable of attaching the probe pin and connecting the tip end portions of the arms to each other, the probe pin in the direction opposite to the probing direction. Configure a four-bar linkage that allows for dynamic or approximate linear motion,
The respective arms are curved in the thickness direction of the respective arms at an intermediate portion between the first portion closer to the distal end portion than the proximal end portion and the second portion closer to the distal end portion than the first portion. Then, a rib having a cross-sectional shape in which the amount of protrusion changes continuously along the width direction of each arm is formed so as to extend in the length direction of each arm, and the intermediate portion is the four-bar link A probe unit configured to function as each link configuring a mechanism, and to function as a joint configuring the four-bar linkage mechanism, each first portion and each second portion.   The probe unit according to claim 1, wherein the probe pin is fixed to the tip end of the first arm and the tip end of the second arm such that the probe pin functions as the connecting part. A pair of the probe pins and a pair of the first arm and the second arm are provided.
The holding portion holds the base end portions of the respective first arms in a state in which the pair of first arms extend adjacent to each other, and a state in which the pair of second arms extends adjacent to each other The probe unit according to claim 1 or 2, wherein the proximal end portion of each second arm is held. The respective first arms are produced after the respective first arms are integrally manufactured in a state where the positional relationship when the respective base end portions of the respective first arms are held by the holding unit is maintained. In a state where the end portion is held by the holding portion, it is configured to be separated from the vicinity of at least the proximal end portion of each first arm and the distal end portion;
The respective second arms are produced after the respective second arms are integrally manufactured in a state where the positional relationship when the respective base end portions of the respective second arms are held by the holding unit is maintained. 4. The probe unit according to claim 3, wherein a distance from at least the vicinity of the proximal end to the distal end of each of the second arms is separated in a state where the end is held by the holder. Each of the first arms is non-conductive and is integrally manufactured in a state in which the respective base end portions are connected to one another, and is held by the holding portion while the respective base end portions are in a connected state. ,
Each of the second arms is nonconductive and is integrally manufactured in a state in which the respective proximal ends are connected to one another, and is held by the holding portion while the respective proximal ends are in a connected state. The probe unit according to claim 4.   Among the respective arms, a conductive shield plate disposed via an insulator is provided on the side of the arm located on the probing target side at the time of the probing, facing the probing target. The probe unit according to any one of 5. A probe unit manufacturing method for manufacturing the probe unit according to claim 3;
After the two first arms are integrally manufactured while maintaining the positional relationship when the base end portions of the pair of first arms are held by the holding portion, at least the base in the respective first arms is formed. Each of the first arms is manufactured by separating the vicinity of the end from the end to the tip,
After the two second arms are integrally manufactured while maintaining the positional relationship when the base end portions of the pair of second arms are held by the holding portion, at least the base in the respective second arms is maintained. A method of manufacturing a probe unit, comprising: separating each of the second arms by separating a portion from the vicinity of an end portion to the tip end portion to manufacture the probe unit. In a state where the positional relationship when the base end portions of the pair of first arms are held by the holding portion is maintained,
In a state in which the proximal end of each of the first arms produced in one piece is held by the holding portion, the distance from at least the vicinity of the proximal end to the distal end in each first arm is separated;
In a state where the base end portions of the second arms integrally manufactured are held by the holding portion, the distance from at least the vicinity of the base end portion to the tip end portion of each second arm is separated The probe unit manufacturing method according to claim 7, wherein the probe unit is manufactured.

Images