JP7032167B2 - Probe pins, probe units and inspection equipment - Google Patents

Probe pins, probe units and inspection equipment Download PDF

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JP7032167B2
JP7032167B2 JP2018022122A JP2018022122A JP7032167B2 JP 7032167 B2 JP7032167 B2 JP 7032167B2 JP 2018022122 A JP2018022122 A JP 2018022122A JP 2018022122 A JP2018022122 A JP 2018022122A JP 7032167 B2 JP7032167 B2 JP 7032167B2
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probe pin
probe
contact
cross
central axis
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JP2019138766A (en
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崇裕 小川原
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Hioki EE Corp
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Hioki EE Corp
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Priority to CN201910102581.2A priority patent/CN110133335A/en
Priority to TW108104113A priority patent/TWI821243B/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer

Description

本発明は、接触対象との間で電気信号の入出力を行うためのプローブピン、そのプローブピンを備えたプローブユニット、およびそのプローブユニットを備えた検査装置に関するものである。 The present invention relates to a probe pin for inputting / outputting an electric signal to and from a contact object, a probe unit provided with the probe pin, and an inspection device provided with the probe unit.

この種のプローブユニットとして、下記特許文献１において出願人が開示したプローブユニットが知られている。このプローブユニットは、先端部をプロービング対象に接触させてプロービング対象との間で電気信号の入出力を行うためのプローブピンと、プローブピンを支持する支持部とを備えて構成されている。この場合、プローブピンは、先端部が円錐状をなす（先端部が尖った）円柱状に形成されている。 As a probe unit of this type, the probe unit disclosed by the applicant in Patent Document 1 below is known. This probe unit is configured to include a probe pin for contacting the tip end portion with the probing target to input and output an electric signal to and from the probing target, and a support portion for supporting the probe pin. In this case, the probe pin is formed in a columnar shape having a conical tip (pointed tip).

特開２０１６－１７０１５９号公報（第８頁、第１図）Japanese Unexamined Patent Publication No. 2016-170159 (Page 8, Fig. 1)

ところが、上記した従来のプローブピンおよびこのプローブピンを備えたプローブユニットには、改善すべき以下の課題がある。具体的には、このプローブピンは、先端部が円錐状をなす円柱状に形成されている。この場合、このような円錐状の先端部は、旋盤等の回転加工系の工作機械を用いて形成されるため、加工特性上、プローブピンの中心軸上に円錐の頂部が位置することとなる。このため、プローブピンの中心軸上に位置する円錐の頂部がプロービング対象に接触することとなる。一方、プロービング対象に接触する円錐の頂部は、接触の際の破損を回避するために十分な強度を確保する必要があり、そのためには、円錐の頂部に丸み（ＳＲ）を設けて、その部分をできるだけ小さく形成するのが好ましい。このため、この種のプローブピンでは、プローブピンが細いほど、円錐の頂部の角度を大きくする（鈍角にする）構成が採用されている。 However, the above-mentioned conventional probe pin and the probe unit provided with the probe pin have the following problems to be improved. Specifically, the probe pin is formed in a columnar shape having a conical tip. In this case, since such a conical tip is formed by using a rotary machining machine tool such as a lathe, the top of the cone is located on the central axis of the probe pin due to machining characteristics. .. Therefore, the top of the cone located on the central axis of the probe pin comes into contact with the probing target. On the other hand, the top of the cone that comes into contact with the probing object needs to have sufficient strength to avoid damage during contact, and for that purpose, the top of the cone is provided with a roundness (SR), and that portion is provided. Is preferably formed as small as possible. For this reason, in this type of probe pin, the thinner the probe pin, the larger the angle of the top of the cone (obtuse angle) is adopted.

この場合、例えば、図１２，１３に示すように、プロービング対象としての基板１００の導体部１０１（被接触位置）に２つのプローブピン５２１の先端部（円錐の頂部）を互いに近接させた状態で接触させるときには、円錐の頂部の角度が大きいほど、各プローブピン５２１の各中心軸Ａがなす角度が大きくなるように（基板１００に対する傾斜角度が小さくなるように）、各プローブピン５２１を基板１００に対して大きく傾斜させる必要がある。しかしながら、プローブピン５２１をこのように大きく傾斜させることによってプローブピン５２１の先端部以外の部位も基板１００に近づく（つまり、プローブピン５２１が全体として近づく）ため、例えば、基板１００に実装された電子部品等が導体部１０１（被接触位置）の近傍に実装されているときには、プローブピン５２１が電子部品等に接触して導体部１０１にプローブピン５２１の先端部を接触させることが困難となるおそれがある。このように、従来のプローブピンおよびこのプローブピンを備えたプローブユニットには、複数のプローブピンの先端部を近接させた状態でプロービング対象に接触させることが困難となるおそれがあり、この点の改善が望まれている。 In this case, for example, as shown in FIGS. 12 and 13, the tip portions (tops of the cone) of the two probe pins 521 are in close proximity to the conductor portion 101 (contact position) of the substrate 100 as the probing target. When making contact, the larger the angle of the top of the cone, the larger the angle formed by each central axis A of each probe pin 521 (so that the angle of inclination with respect to the substrate 100 becomes smaller), so that each probe pin 521 is attached to the substrate 100. It is necessary to incline greatly with respect to. However, since the probe pin 521 is tilted so much that the portion other than the tip of the probe pin 521 also approaches the substrate 100 (that is, the probe pin 521 approaches the substrate 100 as a whole), for example, the electrons mounted on the substrate 100. When a component or the like is mounted in the vicinity of the conductor portion 101 (contact position), the probe pin 521 may come into contact with the electronic component or the like, making it difficult to bring the tip of the probe pin 521 into contact with the conductor portion 101 . There is. As described above, it may be difficult for the conventional probe pin and the probe unit provided with the probe pin to come into contact with the probing target in a state where the tips of the plurality of probe pins are close to each other. Improvement is desired.

本発明は、かかる課題に鑑みてなされたものであり、複数のプローブピンの先端部を近接させた状態で接触対象に接触させ得るプローブピン、プローブユニットおよび検査装置を提供することを主目的とする。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a probe pin, a probe unit, and an inspection device capable of contacting a contact target with the tips of a plurality of probe pins in close proximity to each other. do.

上記目的を達成すべく請求項１記載のプローブピンは、柱状に形成されて基端部を支持した状態で先端部に設けられた接触部を接触対象に接触させて当該接触対象との間で電気信号の入出力を行うためのプローブピンであって、前記基端部は、当該プローブピンの中心軸に直交する断面の断面形状が非円形となるように形成され、前記接触部は、前記中心軸に対して傾斜する平面で前記先端部の一部が切り欠かれてそれぞれ形成された２つの切り欠き面と当該先端部の２つの外周面とによって画定されて当該中心軸に沿って突出する部位で構成されて、隣接する当該各外周面同士の交差部分の近傍に形成されている。 In order to achieve the above object, the probe pin according to claim 1 is formed in a columnar shape and has a contact portion provided at the tip portion in a state of supporting the proximal end portion thereof, and is brought into contact with the contact object to be brought into contact with the contact object. A probe pin for inputting / outputting an electric signal, the proximal end portion thereof is formed so that the cross-sectional shape orthogonal to the central axis of the probe pin is non-circular, and the contact portion is the contact portion. A plane inclined with respect to the central axis, defined by two notched surfaces formed by cutting out a part of the tip portion and two outer peripheral surfaces of the tip portion, and projecting along the central axis. It is composed of the parts to be formed, and is formed in the vicinity of the intersecting portion between the adjacent outer peripheral surfaces .

また、請求項２記載のプローブピンは、柱状に形成されて基端部を支持した状態で先端部に設けられた接触部を接触対象に接触させて当該接触対象との間で電気信号の入出力を行うためのプローブピンであって、前記基端部は、当該プローブピンの中心軸に直交する断面の断面形状が非円形となるように形成され、前記接触部は、前記中心軸に対して傾斜する平面で前記先端部の一部が切り欠かれてそれぞれ形成された２つの切り欠き面と当該先端部の２つの外周面とによって画定されて当該中心軸に沿って突出する部位で構成され、前記先端部は、隣接する前記各外周面同士が直角に交差するように形成されている。 Further, the probe pin according to claim 2 is formed in a columnar shape and has a contact portion provided at the tip end in contact with the contact target in a state of supporting the base end portion, so that an electric signal is input to the contact target. A probe pin for outputting, the base end portion is formed so that the cross-sectional shape of the cross section orthogonal to the central axis of the probe pin is non-circular, and the contact portion is formed with respect to the central axis. It is composed of two notched surfaces formed by cutting out a part of the tip portion on a plane inclined in a right angle and a portion defined by two outer peripheral surfaces of the tip portion and projecting along the central axis. The tip portion is formed so that the adjacent outer peripheral surfaces intersect each other at a right angle.

また、請求項３記載のプローブユニットは、請求項１または２記載のプローブピンと、当該プローブピンを支持する支持部とを備えたプローブユニットであって、前記支持部は、前記プローブピンの前記中心軸回りの回動を規制した状態での当該プローブピンの嵌合が可能な挿通孔および溝部のいずれか一方で形成された嵌合部を備えて、当該嵌合部に前記プローブピンを嵌合させた状態で当該プローブピンを支持可能に構成されている。 The probe unit according to claim 3 is a probe unit including the probe pin according to claim 1 or 2 and a support portion that supports the probe pin, and the support portion is the center of the probe pin. The probe pin is fitted into the fitting portion by providing a fitting portion formed in either an insertion hole or a groove portion into which the probe pin can be fitted in a state where rotation around the axis is restricted. It is configured to be able to support the probe pin in the state where it is allowed to support.

また、請求項４記載のプローブユニットは、請求項３記載のプローブユニットにおいて、前記プローブピンは、前記断面形状が矩形となるように形成され、前記嵌合部は、前記プローブピンの前記断面形状と相補的な形状を有する前記挿通孔、および前記プローブピンの前記断面形状と相補的な形状を有する前記溝部のいずれか一方で形成されている。 The probe unit according to claim 4 is the probe unit according to claim 3 , wherein the probe pin is formed so that the cross-sectional shape is rectangular, and the fitting portion is the cross-sectional shape of the probe pin. It is formed in either one of the insertion hole having a shape complementary to the insertion hole and the groove portion having a shape complementary to the cross-sectional shape of the probe pin.

また、請求項５記載のプローブユニットは、請求項４記載のプローブユニットにおいて、前記支持部は、腕部を備えて構成され、前記嵌合部は、前記矩形の各辺が当該腕部の長さ方向に対して傾斜するように当該腕部の一端部側に形成されている。 The probe unit according to claim 5 is the probe unit according to claim 4 , wherein the support portion is configured to include an arm portion, and in the fitting portion, each side of the rectangle is the length of the arm portion. It is formed on one end side of the arm so as to be inclined with respect to the vertical direction.

また、請求項６記載の検査装置は、請求項３から５のいずれかに記載のプローブユニットと、当該プローブユニットを移動させて前記接触対象に前記プローブピンを接触させる移動機構と、前記プローブピンを介して入出力する電気信号に基づいて前記接触対象としての検査対象の検査を実行する検査部とを備えている。 The inspection device according to claim 6 includes the probe unit according to any one of claims 3 to 5 , a moving mechanism for moving the probe unit to bring the probe pin into contact with the contact target, and the probe pin. It is provided with an inspection unit that executes an inspection of an inspection target as a contact target based on an electric signal input / output via the above.

請求項１，２記載のプローブピン、および請求項３記載のプローブユニットでは、基端部の断面形状が非円形となるようにプローブピンが形成され、プローブピンの中心軸に対して傾斜する平面でプローブピンの先端部の一部を切り欠かいた２つの切り欠き面と先端部の２つの外周面とによって画定されて中心軸に沿って突出する部位で接触部が構成されている。このため、このプローブピンおよびプローブユニットによれば、基端部の断面形状が円形の構成と比較して、中心軸を中心としたプローブピンの回動を確実に防止することができるため、接触部の位置決めを確実に行うことができると共に、プローブピンの先端部における中心軸から偏心した位置に接触部を形成することができる。したがって、このプローブピンおよびプローブユニットによれば、隣接する２つのプローブユニットにおける各プローブピンの各接触部がそれぞれ対向する位置に各接触部を位置決めした状態で、各先端部における接触部の近傍の外周面同士を近づけることで、各プローブピンを接触対象に対して大きく傾斜させることなく、各接触部同士を十分に近接させた状態で接触対象に接触させることができる。この結果、このプローブピンおよびプローブユニットによれば、プローブピンにおける接触部以外の部位やプローブピンを支持する支持部が接触対象に近づいて、例えば、接触対象の近傍に実装されている電子部品等にプローブピンや支持部が接触して接触対象に接触部を接触させることが困難となる事態を回避して、接触部を接触対象に確実に接触させることができる。 In the probe pin according to the first and second claims and the probe unit according to the third aspect, the probe pin is formed so that the cross-sectional shape of the base end portion is non-circular, and the probe pin is inclined with respect to the central axis of the probe pin. The contact portion is formed by a portion defined by two notched surfaces in which a part of the tip portion of the probe pin is cut out and two outer peripheral surfaces of the tip portion and projecting along the central axis. Therefore, according to the probe pin and the probe unit, the rotation of the probe pin about the central axis can be reliably prevented as compared with the configuration in which the cross-sectional shape of the base end portion is circular, so that the contact can be made. The positioning of the portion can be reliably performed, and the contact portion can be formed at a position eccentric from the central axis at the tip portion of the probe pin. Therefore, according to this probe pin and probe unit, in a state where each contact portion is positioned at a position where each contact portion of each probe pin in two adjacent probe units faces each other, in a state of positioning each contact portion in the vicinity of the contact portion at each tip portion. By bringing the outer peripheral surfaces close to each other, the probe pins can be brought into contact with the contact object in a state where the contact portions are sufficiently close to each other without being greatly tilted with respect to the contact object. As a result, according to the probe pin and the probe unit, a portion of the probe pin other than the contact portion or a support portion that supports the probe pin approaches the contact target, for example, an electronic component mounted in the vicinity of the contact target, or the like. It is possible to prevent the situation in which the probe pin and the support portion come into contact with each other and make it difficult to bring the contact portion into contact with the contact target, and the contact portion can be reliably brought into contact with the contact target.

また、請求項１記載のプローブピン、および請求項３記載のプローブユニットによれば、先端部における隣接する各外周面同士の交差部分の近傍に接触部を形成したことにより、隣接する２つのプローブユニットの各プローブピンの各先端部における外周面同士の交差部分を近づけることで、各接触部同士をさらに近接させた状態で接触対象に接触させることができる。 Further, according to the probe pin according to claim 1 and the probe unit according to claim 3 , two adjacent probes are formed by forming a contact portion in the vicinity of the intersection of the adjacent outer peripheral surfaces at the tip portion. By bringing the intersecting portions of the outer peripheral surfaces of each tip of each probe pin of the unit closer to each other, the contact portions can be brought into contact with the contact target in a state of being closer to each other.

また、請求項２記載のプローブピン、および請求項３記載のプローブユニットによれば、隣接する各外周面同士が直角に交差するように先端部を形成したことにより、先端部を切り欠く加工を行う際に、先端部を正確に位置決めして保持することができるため、接触部を規定通りの形状に正確に形成することができる。 Further, according to the probe pin according to claim 2 and the probe unit according to claim 3 , the tip portion is cut out by forming the tip portion so that the adjacent outer peripheral surfaces intersect at right angles. Since the tip portion can be accurately positioned and held at the time of performing, the contact portion can be accurately formed into a predetermined shape.

また、請求項３記載のプローブユニット、および請求項６記載の検査装置によれば、プローブピンの中心軸回りの回動を規制した状態でプローブピンの嵌合が可能な嵌合部を備えて支持部を構成したことにより、嵌合部にプローブピンの基端部を嵌合させることで、接触部を予め決められた位置に確実に位置決めすることができる。 Further, according to the probe unit according to claim 3 and the inspection device according to claim 6 , the probe unit is provided with a fitting portion capable of fitting the probe pin in a state where rotation around the central axis of the probe pin is restricted. By forming the support portion, the contact portion can be reliably positioned at a predetermined position by fitting the base end portion of the probe pin to the fitting portion.

また、請求項４記載のプローブユニット、および請求項６記載の検査装置によれば、断面形状が矩形となるようにプローブピンを形成し、プローブピンの断面形状と相補的な形状を有する挿通孔、およびプローブピンの断面形状と相補的な形状を有する溝部のいずれか一方で嵌合部を形成したことにより、例えば、プローブピンの断面形状、および挿通孔または溝部の断面形状が５角以上の多角形に形成された構成と比較して、中心軸から偏心している接触部の位置を把握し易いため、嵌合部にプローブピンを嵌合させて接触部の位置決めをする作業を容易に行うことができる。 Further, according to the probe unit according to claim 4 and the inspection device according to claim 6 , the probe pin is formed so that the cross-sectional shape is rectangular, and the insertion hole has a shape complementary to the cross-sectional shape of the probe pin. , And by forming the fitting portion in one of the grooves having a shape complementary to the cross-sectional shape of the probe pin, for example, the cross-sectional shape of the probe pin and the cross-sectional shape of the insertion hole or the groove are pentagonal or more. Compared to the polygonally formed configuration, it is easier to grasp the position of the contact part that is eccentric from the central axis, so the work of fitting the probe pin to the fitting part and positioning the contact part is easily performed. be able to.

また、請求項５記載のプローブユニット、および請求項６記載の検査装置によれば、嵌合部の断面形状である矩形の各辺が腕部の長さ方向に対して傾斜するように嵌合部を腕部の一端部側に形成したことにより、矩形の各辺が腕部の長さ方向と平行な構成と比較して、接触部を腕部の幅方向の中心からより離間した位置に位置決めすることができる。このため、このプローブユニットおよび検査装置によれば、隣接する２つのプローブユニットの各挿通孔の対応する各辺同士が互いに逆向きに傾斜するように各挿通孔を形成することで、矩形の各辺が腕部の長さ方向と平行な構成と比較して、各プローブユニットの各プローブピンの各接触部同士をより近接させた状態で接触対象に接触させることができる。 Further, according to the probe unit according to claim 5 and the inspection device according to claim 6 , each side of the rectangle which is the cross-sectional shape of the fitting portion is fitted so as to be inclined with respect to the length direction of the arm portion. By forming the portion on one end side of the arm portion, the contact portion is located farther from the center in the width direction of the arm portion as compared with the configuration in which each side of the rectangle is parallel to the length direction of the arm portion. Can be positioned. Therefore, according to this probe unit and the inspection device, each of the rectangular shapes is formed by forming each insertion hole so that the corresponding sides of the insertion holes of the two adjacent probe units are inclined in opposite directions to each other. Compared with the configuration in which the sides are parallel to the length direction of the arm portion, the contact portions of the probe pins of each probe unit can be brought into contact with the contact target in a state of being closer to each other.

基板検査装置１の構成を示す構成図である。It is a block diagram which shows the structure of the substrate inspection apparatus 1. FIG. プローブユニット２の構成を示す斜視図である。It is a perspective view which shows the structure of a probe unit 2. プローブピン２１を外周面Ｆ１側から見た斜視図であるIt is a perspective view which saw the probe pin 21 from the outer peripheral surface F1 side. プローブピン２１を外周面Ｆ１側から見た正面図であるIt is a front view which saw the probe pin 21 from the outer peripheral surface F1 side. プローブピン２１を外周面Ｆ３側から見た側面図であるIt is a side view which saw the probe pin 21 from the outer peripheral surface F3 side. プローブピン２１を外周面Ｆ３側から見た斜視図である。It is a perspective view which saw the probe pin 21 from the outer peripheral surface F3 side. プローブピン２１を先端部２１ｂ側から見た斜視図である。It is a perspective view which saw the probe pin 21 from the tip part 21b side. 支持部２２におけるアーム４１，４２の構成を説明する説明図である。It is explanatory drawing explaining the structure of the arm 41, 42 in the support part 22. 検査方法を説明する説明図である。It is explanatory drawing explaining the inspection method. プローブピン１２１の構成を説明する説明図である。It is explanatory drawing explaining the structure of the probe pin 121. プローブユニット１０２の構成を示す斜視図である。It is a perspective view which shows the structure of a probe unit 102. 従来の構成を説明する第１の説明図である。It is 1st explanatory drawing explaining the conventional structure. 従来の構成を説明する第２の説明図である。It is a 2nd explanatory diagram explaining the conventional structure.

以下、プローブピン、プローブユニットおよび検査装置の実施の形態について、添付図面を参照して説明する。 Hereinafter, embodiments of the probe pin, probe unit, and inspection device will be described with reference to the accompanying drawings.

最初に、図１に示す基板検査装置１の構成について説明する。基板検査装置１は、検査装置の一例であって、同図に示すように、２つのプローブユニット２，２、２つの移動機構３，３、操作部４、記憶部５、表示部６および処理部７を備えて、検査対象（接触対象でもある）の一例としての図９に示す基板１００の検査を実行可能に構成されている。 First, the configuration of the substrate inspection device 1 shown in FIG. 1 will be described. The substrate inspection device 1 is an example of an inspection device, and as shown in the figure, two probe units 2, 2, two moving mechanisms 3, 3, an operation unit 4, a storage unit 5, a display unit 6, and a processing unit. A unit 7 is provided so as to be capable of inspecting the substrate 100 shown in FIG. 9 as an example of an inspection target (which is also a contact target).

プローブユニット２は、プローブユニットの一例であって、図２に示すように、プローブピン２１および支持部２２を備えて構成されている。 The probe unit 2 is an example of a probe unit, and is configured to include a probe pin 21 and a support portion 22 as shown in FIG.

プローブピン２１は、図９に示すように、先端部２１ｂに設けられた接触部３１を接触対象（検査対象でもある）としての基板１００の導体部１０１に接触させて導体部１０１との間で電気信号の入出力を行うためのプローブピンの一例であって、図３～図７に示すように、柱状に形成されている。具体的には、プローブユニット２は、後述する切り欠き面Ｓ１～Ｓ３の形成部位を除く基端部２１ａから先端部２１ｂまでの各部位において、中心軸Ａに直交する断面Ｃ（図７参照）の断面形状が矩形（基端部２１ａの断面形状が非円形でかつ多角形の一例）となる形状（四角柱状）に形成されている。この場合、基端部２１ａの断面形状が矩形（非円形）となるようにプローブピン２１を形成したとしたことにより、基端部２１ａの断面形状が円形の構成と比較して、支持部２２によって支持された状態における中心軸Ａを中心としたプローブピン２１の回動を確実に防止することができるため、接触部３１の位置決めを確実に行うことが可能となっている。 As shown in FIG. 9, the probe pin 21 brings the contact portion 31 provided at the tip portion 21b into contact with the conductor portion 101 of the substrate 100 as a contact target (which is also an inspection target) and is between the probe pin 21 and the conductor portion 101. It is an example of a probe pin for inputting / outputting an electric signal, and is formed in a columnar shape as shown in FIGS. 3 to 7. Specifically, the probe unit 2 has a cross section C (see FIG. 7) orthogonal to the central axis A at each portion from the base end portion 21a to the tip end portion 21b excluding the formation portions of the cutout surfaces S1 to S3 described later. Is formed into a shape (square columnar shape) having a rectangular cross-sectional shape (an example in which the cross-sectional shape of the base end portion 21a is non-circular and polygonal). In this case, since the probe pin 21 is formed so that the cross-sectional shape of the base end portion 21a is rectangular (non-circular), the support portion 22 is compared with the configuration in which the cross-sectional shape of the base end portion 21a is circular. Since it is possible to reliably prevent the probe pin 21 from rotating about the central axis A in the state of being supported by the above, it is possible to reliably position the contact portion 31.

また、このプローブピン２１では、図３～図７に示すように、中心軸Ａに対して傾斜する平面で先端部２１ｂの一部（各図において破線で示す部分）を切り欠くことによって形成された切り欠き面Ｓ１～Ｓ３（以下、区別しないときには「切り欠き面Ｓ」ともいう）のうちの２つの切り欠き面Ｓ２，Ｓ３と、先端部２１ｂにおける平面でそれぞれ構成された４つの外周面Ｆ１～Ｆ４（以下、区別しないときには「外周面Ｆ」ともいう）のうちの２つの外周面Ｆ１，Ｆ４とによって画定されて、中心軸Ａに沿って突出する部位で接触部３１が構成されている。また、このプローブピン２１では、隣接する各外周面Ｆ同士が直角に交差するように、つまり、図７に破線で示すように、平面で切り欠かれる以前の先端部２１ｂの断面形状が矩形となるように形成され、隣接する外周面Ｆ同士（この例では、外周面Ｆ１，Ｆ４同士）の交差部分の近傍に接触部３１が形成されている。したがって、このプローブピン２１では、中心軸Ａ上に接触部３１（円錐の頂点）が形成されている従来のプローブピンとは異なり、中心軸Ａから偏心した位置（この例では、外周面Ｆ１，Ｆ４同士の交差部分の近傍の位置）に接触部３１が形成されている。 Further, as shown in FIGS. 3 to 7, the probe pin 21 is formed by cutting out a part of the tip portion 21b (the portion shown by the broken line in each figure) on a plane inclined with respect to the central axis A. Two notched surfaces S2 and S3 of the notched surfaces S1 to S3 (hereinafter, also referred to as "notch surface S" when not distinguished), and four outer peripheral surfaces F1 each composed of a flat surface at the tip portion 21b. The contact portion 31 is formed by a portion defined by two outer peripheral surfaces F1 and F4 of F4 (hereinafter, also referred to as "outer peripheral surface F" when not distinguished) and projecting along the central axis A. .. Further, in the probe pin 21, the cross-sectional shape of the tip portion 21b before being cut out by the plane is rectangular so that the adjacent outer peripheral surfaces F intersect at right angles, that is, as shown by the broken line in FIG. The contact portion 31 is formed in the vicinity of the intersection of the adjacent outer peripheral surfaces F (in this example, the outer peripheral surfaces F1 and F4). Therefore, unlike the conventional probe pin in which the contact portion 31 (the apex of the cone) is formed on the central axis A, the probe pin 21 is eccentric from the central axis A (in this example, the outer peripheral surfaces F1 and F4). A contact portion 31 is formed at a position near the intersection of the two.

また、このプローブピン２１では、先端部２１ｂの一部を平面で切り欠くことによって接触部３１が形成されている。つまり、このプローブピン２１では、平面研削盤、フライス盤およびワイヤ放電加工機等の平面加工系の工作機械を用いて接触部３１が形成されている。このため、このプローブピン２１では、回転加工系の工作機械を用いること起因して中心軸Ａ上に接触部３１が形成される従来のプローブピンとは異なり、上記したように、中心軸Ａから偏心した位置（この例では、外周面Ｆ１，Ｆ４同士の交差部分の近傍の位置）に接触部３１を形成することが可能となっている。 Further, in the probe pin 21, the contact portion 31 is formed by cutting out a part of the tip portion 21b on a flat surface. That is, in the probe pin 21, the contact portion 31 is formed by using a surface machining machine tool such as a surface grinding machine, a milling machine, and a wire electric discharge machine. Therefore, unlike the conventional probe pin in which the contact portion 31 is formed on the central axis A due to the use of a rotary machining machine tool, the probe pin 21 is eccentric from the central axis A as described above. It is possible to form the contact portion 31 at the position (in this example, the position near the intersection of the outer peripheral surfaces F1 and F4).

支持部２２は、図２に示すように、アーム４１，４２および連結部４３，４４を備えて、プローブピン２１を支持可能に構成されている。 As shown in FIG. 2, the support portion 22 includes arms 41, 42 and connecting portions 43, 44, and is configured to be able to support the probe pin 21.

アーム４１，４２は、腕部に相当し、図２に示すように、角柱状にそれぞれ形成され、厚み方向（同図における上下方向）に沿って互いに離間する状態で配置されて、各々の基端部４１ａ，４２ａが連結部４３によって連結されると共に、各々の先端部４１ｂ，４２ｂが連結部４４によって連結されている。この場合、同図に示すように、基端部４１ａ，４２ａと連結部４３との連結部分、および先端部４１ｂ，４２ｂと連結部４４との連結部分は、プローブピン２１の接触部３１を基板１００の導体部１０１に接触させた際の支持部２２全体の弾性変形をし易くするために肉薄に形成されている。 The arms 41 and 42 correspond to the arm portions, are formed in a prismatic shape as shown in FIG. 2, and are arranged so as to be separated from each other along the thickness direction (vertical direction in the same figure), and the respective bases. The end portions 41a and 42a are connected by the connecting portion 43, and the respective tip portions 41b and 42b are connected by the connecting portion 44. In this case, as shown in the figure, the connecting portion between the base end portions 41a and 42a and the connecting portion 43 and the connecting portion between the tip end portions 41b and 42b and the connecting portion 44 have the contact portion 31 of the probe pin 21 as a substrate. It is thinly formed in order to facilitate elastic deformation of the entire support portion 22 when it comes into contact with the conductor portion 101 of 100.

また、図２に示すように、連結部４４（アーム４１，４２の各先端部４１ｂ，４２ｂ側（一端部側））には、プローブピン２１を挿通可能に挿通孔Ｈ（嵌合部の一例）がそれぞれ形成され、この挿通孔Ｈに挿通されたプローブピン２１の基端部２１ａ側がアーム４１，４２に固定されている。 Further, as shown in FIG. 2, the insertion hole H (an example of the fitting portion) allows the probe pin 21 to be inserted into the connecting portion 44 (the tip portions 41b, 42b side (one end portion side) of the arms 41 and 42). ) Are formed, and the base end portion 21a side of the probe pin 21 inserted into the insertion hole H is fixed to the arms 41 and 42.

この場合、挿通孔Ｈは、図８に示すように、プローブピン２１の基端部２１ａの断面形状である矩形と相補的な矩形の断面形状を有し、基端部２１ａの嵌合が可能となっている。このため、プローブピン２１は、挿通孔Ｈに基端部２１ａが挿通されて両者が嵌合した状態において、中心軸Ａ回りの回動が規制されている。 In this case, as shown in FIG. 8, the insertion hole H has a rectangular cross-sectional shape complementary to the rectangular cross-sectional shape of the proximal end portion 21a of the probe pin 21, and the proximal end portion 21a can be fitted. It has become. Therefore, the probe pin 21 is restricted from rotating around the central axis A in a state where the proximal end portion 21a is inserted into the insertion hole H and both are fitted to each other.

また、挿通孔Ｈは、図８に示すように、挿通孔Ｈの断面形状である矩形の中心が支持部の幅方向の中心（同図に示す一点鎖線Ｂ上）に位置すると共に、矩形の各辺がアーム４１，４２の長さ方向（同図に示す一点鎖線Ｂの方向）に対して傾斜するように形成されている。この場合、この基板検査装置１では、同図に示すように、２つのプローブユニット２の各挿通孔Ｈの断面形状である各矩形における対応する各辺同士が互いに逆向きに傾斜するように各挿通孔Ｈが形成されている。このように挿通孔Ｈを形成することにより、図９に示すように、２つのプローブユニット２における各支持部２２の各連結部４４同士を近接させて、各支持部２２の各連結部４３同士を離間させた状態（各プローブユニット２のアーム４１，４２が平面視Ｖ字状となる状態）でプローブユニット２の各プローブピン２１の各先端部２１ｂ同士を近接させたときに、プローブピン２１の中心軸Ａから偏心した位置に形成されている各接触部３１同士を十分に近接させることが可能となっている。 Further, as shown in FIG. 8, in the insertion hole H, the center of the rectangle which is the cross-sectional shape of the insertion hole H is located at the center in the width direction of the support portion (on the alternate long and short dash line B shown in the figure), and the insertion hole H is rectangular. Each side is formed so as to be inclined with respect to the length direction of the arms 41 and 42 (the direction of the alternate long and short dash line B shown in the figure). In this case, in this substrate inspection device 1, as shown in the figure, each of the corresponding sides of each rectangle, which is the cross-sectional shape of each insertion hole H of the two probe units 2, is inclined in opposite directions. An insertion hole H is formed. By forming the insertion hole H in this way, as shown in FIG. 9, the connecting portions 44 of the supporting portions 22 in the two probe units 2 are brought close to each other, and the connecting portions 43 of the supporting portions 22 are brought close to each other. When the tips 21b of each probe pin 21 of the probe unit 2 are brought close to each other in a state where the arms 41 and 42 of each probe unit 2 are V-shaped in a plan view), the probe pin 21 It is possible to sufficiently bring the contact portions 31 formed at positions eccentric from the central axis A of the above.

移動機構３は、処理部７の制御に従ってプローブユニット２を移動させる。操作部４は、各種の指示操作が可能に構成され、指示操作がされたときに操作信号を出力する。記憶部５は、基板１００における被接触位置（プローブピン２１の接触部３１を接触させる位置）としての導体部１０１（図９参照）の座標を示す情報等を含む基板データＤｂを記憶する。表示部６は、処理部７の制御に従って検査結果等を表示する。 The moving mechanism 3 moves the probe unit 2 according to the control of the processing unit 7. The operation unit 4 is configured to enable various instruction operations, and outputs an operation signal when the instruction operation is performed. The storage unit 5 stores the substrate data Db including information indicating the coordinates of the conductor portion 101 (see FIG. 9) as the contacted position (the position where the contact portion 31 of the probe pin 21 is brought into contact) on the substrate 100. The display unit 6 displays the inspection result or the like according to the control of the processing unit 7.

処理部７は、操作部４から出力される操作信号に従い、基板検査装置１を構成する各部を制御する。また、処理部７は、検査部として機能し、基板１００の被接触部に接触しているプローブピン２１を介して入出力する電気信号に基づいて基板１００の検査を実行する。 The processing unit 7 controls each unit constituting the board inspection device 1 according to the operation signal output from the operation unit 4. Further, the processing unit 7 functions as an inspection unit and executes an inspection of the substrate 100 based on an electric signal input / output via the probe pin 21 in contact with the contacted portion of the substrate 100.

次に、基板検査装置１を用いて、基板１００を検査する方法、およびその際の基板検査装置１の各部の動作について、図面を参照して説明する。 Next, a method of inspecting the substrate 100 using the substrate inspection apparatus 1 and the operation of each part of the substrate inspection apparatus 1 at that time will be described with reference to the drawings.

まず、基板１００を図外の固定台に固定し、次いで、操作部４を操作して、検査の開始を指示する。この際に、操作部４が操作信号を出力し、処理部７が操作信号に従って検査処理を開始する。 First, the substrate 100 is fixed to a fixed base (not shown), and then the operation unit 4 is operated to instruct the start of the inspection. At this time, the operation unit 4 outputs an operation signal, and the processing unit 7 starts the inspection process according to the operation signal.

この検査処理では、処理部７は、記憶部５から基板データＤｂを読み出す。続いて、処理部７は、基板データＤｂに含まれる被接触位置としての基板１００における導体部１０１の座標を示す情報に基づき、プローブユニット２を移動させるべき移動距離を特定する。 In this inspection process, the processing unit 7 reads the board data Db from the storage unit 5. Subsequently, the processing unit 7 specifies the moving distance to which the probe unit 2 should be moved based on the information indicating the coordinates of the conductor unit 101 in the substrate 100 as the contact position included in the substrate data Db.

次いで、処理部７は、各移動機構３を制御して、各プローブユニット２のプローブピン２１の接触部３１が導体部１０１の上方に位置するように各プローブユニット２を移動させる。続いて、処理部７は、各移動機構３を制御して、基板１００に向けてプローブユニット２を移動（下降）させる。この際に、各プローブユニット２の下降に伴い、図９に示すように、各プローブピン２１の接触部３１が基板１００の導体部１０１に接触する。 Next, the processing unit 7 controls each moving mechanism 3 to move each probe unit 2 so that the contact portion 31 of the probe pin 21 of each probe unit 2 is located above the conductor portion 101. Subsequently, the processing unit 7 controls each moving mechanism 3 to move (lower) the probe unit 2 toward the substrate 100. At this time, as each probe unit 2 descends, the contact portion 31 of each probe pin 21 comes into contact with the conductor portion 101 of the substrate 100, as shown in FIG.

この場合、図１３に示すように、中心軸Ａ上に接触部としての円錐の頂点が形成されている従来のプローブピン５２１では、２つのプローブピン５２１の接触部を互いに近接させた状態で基板１００の導体部１０１に接触させる際に、基板１００に対して各プローブピン５２１を大きく傾斜させる必要がある。このため、プローブピン５２１における接触部以外の部位やプローブピン５２１を支持する支持部が基板１００に近づいて、導体部１０１の近傍に実装されている電子部品等にプローブピン５２１や支持部が接触して導体部１０１にプローブピン５２１の接触部３１を接触させることが困難となるおそれがある。 In this case, as shown in FIG. 13, in the conventional probe pin 521 in which the apex of the cone as the contact portion is formed on the central axis A, the substrate is in a state where the contact portions of the two probe pins 521 are close to each other. It is necessary to greatly incline each probe pin 521 with respect to the substrate 100 when the conductor portion 101 of the 100 is brought into contact with the conductor portion 101. Therefore, the portion of the probe pin 521 other than the contact portion and the support portion that supports the probe pin 521 approach the substrate 100, and the probe pin 521 and the support portion come into contact with electronic components mounted in the vicinity of the conductor portion 101. Therefore, it may be difficult to bring the contact portion 31 of the probe pin 521 into contact with the conductor portion 101.

これに対して、このプローブピン２１では、図９に示すように、プローブピン２１の先端部２１ｂにおける中心軸Ａから偏心した位置（外周面Ｆ１，Ｆ４同士の交差部分の近傍の位置）に接触部３１が形成されている。このため、このプローブピン２１では、同図に示すように、２つのプローブユニット２における各プローブピン２１の各接触部３１同士を近接させる際に、各プローブピン２１の先端部２１ｂにおける接触部３１が形成されている外周面Ｆ同士（外周面Ｆ１，Ｆ４同士の交差部分）を近づけることで、各プローブピン２１を基板１００に対して大きく傾斜させることなく（小さな傾斜で）、各プローブピン２１の各接触部３１同士を十分に近接させた状態で基板１００の導体部１０１に接触させることが可能となっている。したがって、このプローブピン２１では、プローブピン２１における接触部３１以外の部位やプローブピン２１を支持する支持部２２が基板１００に近づいて、導体部１０１の近傍に実装されている電子部品等にプローブピン２１や支持部２２が接触して導体部１０１にプローブピン２１の接触部３１を接触させることが困難となる事態を確実に回避することが可能となっている。 On the other hand, as shown in FIG. 9, the probe pin 21 contacts a position eccentric from the central axis A (a position near the intersection of the outer peripheral surfaces F1 and F4) in the tip portion 21b of the probe pin 21. The portion 31 is formed. Therefore, in this probe pin 21, as shown in the figure, when the contact portions 31 of the probe pins 21 in the two probe units 2 are brought close to each other, the contact portion 31 in the tip portion 21b of each probe pin 21 By bringing the outer peripheral surfaces F on which the outer peripheral surfaces F1 and F4 are formed close to each other (intersection portion between the outer peripheral surfaces F1 and F4), each probe pin 21 is not greatly inclined with respect to the substrate 100 (with a small inclination). It is possible to bring the contact portions 31 of the above into contact with the conductor portion 101 of the substrate 100 in a state of being sufficiently close to each other. Therefore, in this probe pin 21, a portion of the probe pin 21 other than the contact portion 31 and a support portion 22 that supports the probe pin 21 approach the substrate 100 and probe to an electronic component or the like mounted in the vicinity of the conductor portion 101. It is possible to reliably avoid a situation in which the pin 21 and the support portion 22 come into contact with each other and it becomes difficult to bring the contact portion 31 of the probe pin 21 into contact with the conductor portion 101.

次いで、処理部７は、各移動機構３を制御して、予め決められた距離だけ各プローブユニット２を下降させた時点で下降を停止させる。続いて、処理部７は、各プローブピン２１を介して検査用の電気信号を出力し、その際に各プローブピン２１を介して入力する電気信号に基づいて基板１００の検査（例えば、被接触位置の導通状態）を実行する。次いで、処理部７は、表示部６を制御して、検査結果を表示させる。 Next, the processing unit 7 controls each moving mechanism 3 to stop the lowering when each probe unit 2 is lowered by a predetermined distance. Subsequently, the processing unit 7 outputs an electrical signal for inspection via each probe pin 21, and inspects the substrate 100 based on the electrical signal input via each probe pin 21 at that time (for example, contacted). Position continuity state) is executed. Next, the processing unit 7 controls the display unit 6 to display the inspection result.

続いて、処理部７は、各移動機構３を制御して、基板１００から離間する向きに各プローブユニット２を移動（上昇）させ、基板１００に対する各接触部３１の接触を解除させる。次いで、処理部７は、各プローブユニット２を初期位置に移動させ、検査処理を終了する。 Subsequently, the processing unit 7 controls each moving mechanism 3 to move (raise) each probe unit 2 in a direction away from the substrate 100, and release the contact of each contact portion 31 with the substrate 100. Next, the processing unit 7 moves each probe unit 2 to the initial position and ends the inspection process.

このように、このプローブピン２１、プローブユニット２および基板検査装置１では、基端部２１ａの断面形状が非円形となるようにプローブピン２１が形成され、中心軸Ａに対して傾斜する平面でプローブピン２１の先端部２１ｂの一部を切り欠いた２つの切り欠き面Ｓと先端部２１ｂの２つの外周面Ｆとによって画定されて中心軸Ａに沿って突出する部位で接触部３１が構成されている。このため、このプローブピン２１、プローブユニット２および基板検査装置１によれば、基端部２１ａの断面形状が円形の構成と比較して、中心軸Ａを中心としたプローブピン２１の回動を確実に防止することができるため、接触部３１の位置決めを確実に行うことができると共に、プローブピン２１の先端部２１ｂにおける中心軸Ａから偏心した位置に接触部３１を形成することができる。したがって、このプローブピン２１、プローブユニット２および基板検査装置１によれば、隣接する２つのプローブユニット２における各プローブピン２１の各接触部３１がそれぞれ対向する位置に各接触部３１を位置決めした状態で、各先端部２１ｂにおける接触部３１が形成されている外周面Ｆ同士を近づけることで、各プローブピン２１を基板１００に対して大きく傾斜させることなく、各接触部３１同士を十分に近接させた状態で基板１００の導体部１０１に接触させることができる。この結果、このプローブピン２１、プローブユニット２および基板検査装置１によれば、プローブピン２１における接触部３１以外の部位やプローブピン２１を支持する支持部２２が基板１００に近づいて、導体部１０１の近傍に実装されている電子部品等にプローブピン２１や支持部２２が接触して導体部１０１に接触部３１を接触させることが困難となる事態を回避して、接触部３１を基板１００の導体部１０１に確実に接触させることができる。 As described above, in the probe pin 21, the probe unit 2, and the substrate inspection device 1, the probe pin 21 is formed so that the cross-sectional shape of the proximal end portion 21a is non-circular, and the probe pin 21 is formed on a plane inclined with respect to the central axis A. The contact portion 31 is formed by a portion defined by two notched surfaces S obtained by cutting out a part of the tip portion 21b of the probe pin 21 and two outer peripheral surfaces F of the tip portion 21b and projecting along the central axis A. Has been done. Therefore, according to the probe pin 21, the probe unit 2, and the substrate inspection device 1, the probe pin 21 rotates about the central axis A as compared with the configuration in which the cross-sectional shape of the base end portion 21a is circular. Since it can be reliably prevented, the contact portion 31 can be reliably positioned, and the contact portion 31 can be formed at a position eccentric from the central axis A in the tip portion 21b of the probe pin 21. Therefore, according to the probe pin 21, the probe unit 2, and the substrate inspection device 1, each contact portion 31 is positioned at a position where the contact portions 31 of the probe pins 21 in the two adjacent probe units 2 face each other. By bringing the outer peripheral surfaces F on which the contact portions 31 of the tip portions 21b are formed close to each other, the contact portions 31 are sufficiently brought close to each other without causing the probe pins 21 to be significantly inclined with respect to the substrate 100. In this state, it can be brought into contact with the conductor portion 101 of the substrate 100. As a result, according to the probe pin 21, the probe unit 2, and the substrate inspection device 1, the portion of the probe pin 21 other than the contact portion 31 and the support portion 22 that supports the probe pin 21 approach the substrate 100, and the conductor portion 101. To avoid a situation in which the probe pin 21 and the support portion 22 come into contact with an electronic component mounted in the vicinity of the conductor portion and it becomes difficult to bring the contact portion 31 into contact with the conductor portion 101, the contact portion 31 is attached to the substrate 100. It can be reliably contacted with the conductor portion 101.

また、このプローブピン２１、プローブユニット２および基板検査装置１によれば、先端部２１ｂにおける隣接する外周面Ｆ１，Ｆ４同士の交差部分の近傍に接触部３１を形成したことにより、隣接する２つのプローブユニット２の各プローブピン２１の各先端部２１ｂにおける外周面Ｆ１，Ｆ４同士の交差部分を近づけることで、各接触部３１同士をさらに近接させた状態で導体部１０１に接触させることができる。 Further, according to the probe pin 21, the probe unit 2, and the substrate inspection device 1, two adjacent outer peripheral surfaces F1 and F4 are formed in the vicinity of the intersection of the adjacent outer peripheral surfaces F1 and F4 in the tip portion 21b. By bringing the intersecting portions of the outer peripheral surfaces F1 and F4 of each tip portion 21b of each probe pin 21 of the probe unit 2 closer to each other, the contact portions 31 can be brought into contact with the conductor portion 101 in a state of being closer to each other.

また、このプローブピン２１、プローブユニット２および基板検査装置１によれば、隣接する各外周面Ｆ同士が直角に交差するように先端部２１ｂを形成したことにより、先端部２１ｂを切り欠く加工を行う際に、先端部２１ｂを正確に位置決めして保持することができるため、接触部３１を規定通りの形状に正確に形成することができる。 Further, according to the probe pin 21, the probe unit 2, and the substrate inspection device 1, the tip portion 21b is formed so that the adjacent outer peripheral surfaces F intersect at a right angle, so that the tip portion 21b is cut out. At that time, since the tip portion 21b can be accurately positioned and held, the contact portion 31 can be accurately formed into a specified shape.

また、このプローブユニット２および基板検査装置１によれば、プローブピン２１の中心軸Ａ回りの回動を規制した状態でプローブピン２１の嵌合が可能な挿通孔Ｈで形成された嵌合部を備えて支持部を構成したことにより、挿通孔Ｈにプローブピンを挿通させて嵌合させることで、接触部３１を予め決められた位置に確実に位置決めすることができる。 Further, according to the probe unit 2 and the substrate inspection device 1, a fitting portion formed by an insertion hole H into which the probe pin 21 can be fitted while the rotation of the probe pin 21 around the central axis A is restricted. By configuring the support portion with the above, the contact portion 31 can be reliably positioned at a predetermined position by inserting the probe pin into the insertion hole H and fitting the probe pin.

また、このプローブユニット２および基板検査装置１によれば、基端部２１ａの断面形状が矩形となるようにプローブピン２１の基端部２１ａを形成し、基端部２１ａの断面形状と相補的な形状を有する挿通孔Ｈで嵌合部を形成したことにより、例えば、基端部２１ａの断面形状および挿通孔Ｈの断面形状が５角以上の多角形に形成された構成と比較して、中心軸Ａから偏心している接触部３１の位置を把握し易いため、挿通孔Ｈにプローブピン２１の基端部２１ａを挿通させて接触部３１の位置決めをする作業を容易に行うことができる。 Further, according to the probe unit 2 and the substrate inspection device 1, the proximal end portion 21a of the probe pin 21 is formed so that the sectional shape of the proximal end portion 21a is rectangular, and is complementary to the cross-sectional shape of the proximal end portion 21a. By forming the fitting portion with the insertion hole H having a different shape, for example, as compared with the configuration in which the cross-sectional shape of the base end portion 21a and the cross-sectional shape of the insertion hole H are formed into a polygon having a pentagon or more. Since it is easy to grasp the position of the contact portion 31 eccentric from the central axis A, it is possible to easily perform the work of inserting the proximal end portion 21a of the probe pin 21 into the insertion hole H to position the contact portion 31.

また、このプローブユニット２および基板検査装置１によれば、挿通孔Ｈの断面形状である矩形の各辺がアーム４１，４２の長さ方向に対して傾斜するように挿通孔Ｈをアーム４１，４２の先端部４１ｂ，４２ｂ側に形成したことにより、矩形の各辺がアーム４１，４２の長さ方向と平行な構成と比較して、接触部３１をアーム４１，４２の幅方向の中心からより離間した位置に位置決めすることができる。このため、このプローブユニット２および基板検査装置１によれば、隣接する２つのプローブユニット２の各挿通孔Ｈの対応する各辺同士が互いに逆向きに傾斜するように各挿通孔Ｈを形成することで、矩形の各辺がアーム４１，４２の長さ方向と平行な構成と比較して、各プローブユニット２の各プローブピン２１の各接触部３１同士をより近接させた状態で導体部１０１に接触させることができる。 Further, according to the probe unit 2 and the substrate inspection device 1, the insertion hole H is provided in the arm 41 so that each side of the rectangle having the cross-sectional shape of the insertion hole H is inclined with respect to the length direction of the arms 41 and 42. By forming the tip portions 41b and 42b of the 42, the contact portion 31 is located from the center of the arms 41 and 42 in the width direction as compared with the configuration in which each side of the rectangle is parallel to the length direction of the arms 41 and 42. It can be positioned at a more distant position. Therefore, according to the probe unit 2 and the substrate inspection device 1, the insertion holes H are formed so that the corresponding sides of the insertion holes H of the two adjacent probe units 2 are inclined in opposite directions to each other. As a result, the conductor portion 101 is in a state where the contact portions 31 of the probe pins 21 of each probe unit 2 are closer to each other as compared with the configuration in which each side of the rectangle is parallel to the length direction of the arms 41 and 42. Can be contacted with.

なお、プローブピンおよびプローブユニットは、上記の構成に限定されない。例えば、基端部２１ａの断面形状が矩形となり、かつ切り欠かれる以前の先端部２１ｂの断面形状が矩形となる（先端部２１ｂの外周面Ｆが平面でかつ隣接する外周面Ｆ同士が直角に交差する）ようにプローブピン２１を形成した例について上記したが、基端部２１ａの断面形状および切り欠かれる以前の先端部２１ｂの断面形状が矩形以外の多角形（３角形および５角以上の多角形）となるように形成したプローブピンを採用することもできる。一例として、図１０に示すプローブピン１２１を採用することができる。なお、以下の説明において、上記したプローブユニット２およびプローブピン２１と同様の構成要素については、同じ符号を付して、重複する説明を省略する。 The probe pin and probe unit are not limited to the above configuration. For example, the cross-sectional shape of the base end portion 21a is rectangular, and the cross-sectional shape of the tip end portion 21b before being cut out is rectangular (the outer peripheral surface F of the tip end portion 21b is flat and the adjacent outer peripheral surfaces F are at right angles to each other. The example in which the probe pin 21 is formed so as to intersect (intersects) has been described above, but the cross-sectional shape of the base end portion 21a and the cross-sectional shape of the tip portion 21b before being cut out are polygons (triangles and pentagons or more) other than rectangles. It is also possible to adopt a probe pin formed so as to have a polygonal shape. As an example, the probe pin 121 shown in FIG. 10 can be adopted. In the following description, the same components as those of the probe unit 2 and the probe pin 21 described above are designated by the same reference numerals, and duplicate description will be omitted.

この場合、プローブピン１２１は、図１０に示すように、基端部１２１ａの断面形状および切り欠かれる以前の先端部１２１ｂの断面形状が３角形（矩形以外の多角形の一例）となるように形成されている。また、このプローブピン１２１では、中心軸Ａに対して傾斜する平面で先端部１２１ｂの一部（同図において破線で示す部分）を切り欠くことによって形成された２つの切り欠き面Ｓ４，Ｓ５（以下、区別しないときには「切り欠き面Ｓ」ともいう）と、平面で構成された先端部１２１ｂの外周面Ｆ５～Ｆ７（以下、区別しないときには「外周面Ｆ」ともいう）のうちの２つの外周面Ｆ５，Ｆ６とで画定されて、中心軸Ａに沿って突出する部位で接触部１３１が構成されている。また、このプローブピン１２１では、隣接する外周面Ｆ５，Ｆ６同士の交差部分の近傍に接触部１３１が形成されている。 In this case, as shown in FIG. 10, the probe pin 121 has a triangular shape (an example of a polygon other than a rectangle) so that the cross-sectional shape of the base end portion 121a and the cross-sectional shape of the tip end portion 121b before being cut out are triangular. It is formed. Further, in the probe pin 121, two notched surfaces S4 and S5 (2) formed by notching a part of the tip portion 121b (the portion shown by the broken line in the figure) on a plane inclined with respect to the central axis A (in the figure). Hereinafter, when not distinguished, it is also referred to as "cutout surface S") and the outer peripheral surface F5 to F7 (hereinafter, also referred to as "outer peripheral surface F" when not distinguished) of the tip portion 121b composed of a flat surface. The contact portion 131 is formed by a portion defined by the surfaces F5 and F6 and protruding along the central axis A. Further, in the probe pin 121, a contact portion 131 is formed in the vicinity of the intersecting portion between the adjacent outer peripheral surfaces F5 and F6.

また、先端部２１ｂの外周面Ｆが平面でそれぞれ構成されている例について上記したが、外周面Ｆの１または複数が曲面で構成されている構成を採用することができる。 Further, although the example in which the outer peripheral surface F of the tip portion 21b is formed of a flat surface is described above, a configuration in which one or more of the outer peripheral surfaces F are formed of a curved surface can be adopted.

また、基端部２１ａ側の断面形状（第１断面形状）と先端部２１ｂ側との断面形状（第２断面形状）とが同じ形状（非円形の形状）となるようにプローブピン２１，１２１を形成した例について上記したが、第１断面形状と第２断面形状とが異なる形状（非円形の形状）となるように形成したプローブピンを採用することもできる。一例として、第１断面形状を楕円形とし、第２断面形状を多角形（一例として、矩形）とする構成を採用することができる。 Further, the probe pins 21 and 121 have the same cross-sectional shape (non-circular shape) between the cross-sectional shape on the base end portion 21a side (first cross-sectional shape) and the cross-sectional shape on the tip end portion 21b side (second cross-sectional shape). Although the above is described for the example in which the above is formed, a probe pin formed so that the first cross-sectional shape and the second cross-sectional shape have different shapes (non-circular shape) can also be adopted. As an example, a configuration in which the first cross-sectional shape is an ellipse and the second cross-sectional shape is a polygon (as an example, a rectangle) can be adopted.

また、挿通孔Ｈの断面形状である矩形の各辺がアーム４１，４２の長さ方向に対して傾斜するように挿通孔Ｈを形成した例について上記したが、矩形の各辺がアーム４１，４２の長さ方向と平行または直交するように挿通孔Ｈを形成した構成を採用することもできる。 Further, although the example in which the insertion hole H is formed so that each side of the rectangle which is the cross-sectional shape of the insertion hole H is inclined with respect to the length direction of the arms 41 and 42 is described above, each side of the rectangle is the arm 41, It is also possible to adopt a configuration in which the insertion hole H is formed so as to be parallel to or orthogonal to the length direction of 42.

また、断面形状が矩形の挿通孔Ｈをアーム４１，４２に形成した例について上記したが、プローブピンにおける挿通孔Ｈに嵌合する部分の断面形状が矩形以外の形状のときには、その断面形状と相補的な形状の挿通孔Ｈをアーム４１，４２に形成する構成を採用することができる。 Further, the example in which the insertion hole H having a rectangular cross-sectional shape is formed in the arms 41 and 42 has been described above. It is possible to adopt a configuration in which the insertion holes H having a complementary shape are formed in the arms 41 and 42.

また、図１１に示すように、挿通孔Ｈに代えて、溝部Ｇ（嵌合部の他の一例）が連結部１４４の側面１４４ａに形成された支持部１２２を備えたプローブユニット１０２を採用することもできる。この場合、溝部Ｇは、プローブピン２１の基端部２１ａの断面形状である矩形と相補的な矩形の断面形状を有し、基端部２１ａの嵌合が可能となっている。このため、プローブユニット１０２においても、溝部Ｇに基端部２１ａを嵌め込んで両者を嵌合させることで、中心軸Ａ回りのプローブピン２１の回動を確実に規制することが可能となっている。 Further, as shown in FIG. 11, instead of the insertion hole H, a probe unit 102 having a support portion 122 having a groove portion G (another example of the fitting portion) formed on the side surface 144a of the connecting portion 144 is adopted. You can also do it. In this case, the groove portion G has a rectangular cross-sectional shape complementary to the rectangular cross-sectional shape of the proximal end portion 21a of the probe pin 21, and the proximal end portion 21a can be fitted. Therefore, also in the probe unit 102, by fitting the base end portion 21a into the groove portion G and fitting the two, it is possible to reliably regulate the rotation of the probe pin 21 around the central axis A. There is.

なお、溝部Ｇの断面形状を上方から見たときに、断面形状である矩形の各辺がアーム４１，４２の長さ方向に対して傾斜するように溝部Ｇを形成することもできる。この場合、２つのプローブユニット１０２の各溝部Ｇの断面形状である各矩形における対応する各辺同士が互いに逆向きに傾斜するように各溝部Ｇを形成することで、上記した各プローブユニット２を用いるときと同様にして、プローブピン２１の中心軸Ａから偏心した位置に形成されている各接触部３１同士を十分に近接させることができる。 When the cross-sectional shape of the groove portion G is viewed from above, the groove portion G can be formed so that each side of the rectangle having the cross-sectional shape is inclined with respect to the length direction of the arms 41 and 42. In this case, the above-mentioned probe units 2 are formed by forming each groove G so that the corresponding sides in each rectangle having the cross-sectional shape of each groove G of the two probe units 102 are inclined in opposite directions to each other. Similar to the case of use, the contact portions 31 formed at positions eccentric from the central axis A of the probe pin 21 can be sufficiently brought into close contact with each other.

また、２つのプローブユニット２を備えた基板検査装置１を例に挙げて説明したが、３つ以上のプローブユニット２を備えた基板検査装置においても上記した各効果を実現することができる。 Further, although the substrate inspection device 1 provided with the two probe units 2 has been described as an example, the above-mentioned effects can be realized even in the substrate inspection device provided with the three or more probe units 2.

１ 基板検査装置
２ プローブユニット
３ 移動機構
７ 処理部
２１，１２１ プローブピン
２１ａ，１２１ａ 基端部
２１ｂ，１２１ｂ 先端部
２２ 支持部
３１，１３１ 接触部
４１，４２ アーム
４１ｂ，４２ｂ 先端部
１００ 基板
１０１ 導体
Ａ 中心軸
Ｃ 断面
Ｆ１～Ｆ１２ 外周面
Ｇ 溝部
Ｈ 挿通孔
Ｓ１～Ｓ１１ 切り欠き面 1 Board inspection device 2 Probe unit 3 Moving mechanism 7 Processing unit 21,121 Probe pin 21a, 121a Base end 21b, 121b Tip 22 Support 31, 131 Contact 41, 42 Arm 41b, 42b Tip 100 Board 101 Conductor A Central axis C Cross section F1 to F12 Outer peripheral surface G Groove H Insertion hole S1 to S11 Notched surface

Claims (6)

柱状に形成されて基端部を支持した状態で先端部に設けられた接触部を接触対象に接触させて当該接触対象との間で電気信号の入出力を行うためのプローブピンであって、
前記基端部は、当該プローブピンの中心軸に直交する断面の断面形状が非円形となるように形成され、
前記接触部は、前記中心軸に対して傾斜する平面で前記先端部の一部が切り欠かれてそれぞれ形成された２つの切り欠き面と当該先端部の２つの外周面とによって画定されて当該中心軸に沿って突出する部位で構成されて、隣接する当該各外周面同士の交差部分の近傍に形成されているプローブピン。 A probe pin that is formed in a columnar shape and supports a base end portion, and a contact portion provided at the tip portion is brought into contact with a contact target to input and output an electric signal to and from the contact target.
The base end portion is formed so that the cross-sectional shape of the cross section orthogonal to the central axis of the probe pin is non-circular.
The contact portion is defined by two notched surfaces formed by cutting out a part of the tip portion on a plane inclined with respect to the central axis and two outer peripheral surfaces of the tip portion. A probe pin that is composed of a portion that protrudes along the central axis and is formed in the vicinity of the intersection of the adjacent outer peripheral surfaces . 柱状に形成されて基端部を支持した状態で先端部に設けられた接触部を接触対象に接触させて当該接触対象との間で電気信号の入出力を行うためのプローブピンであって、
前記基端部は、当該プローブピンの中心軸に直交する断面の断面形状が非円形となるように形成され、
前記接触部は、前記中心軸に対して傾斜する平面で前記先端部の一部が切り欠かれてそれぞれ形成された２つの切り欠き面と当該先端部の２つの外周面とによって画定されて当該中心軸に沿って突出する部位で構成され、
前記先端部は、隣接する前記各外周面同士が直角に交差するように形成されているプローブピン。 A probe pin that is formed in a columnar shape and supports a base end portion, and a contact portion provided at the tip portion is brought into contact with a contact target to input and output an electric signal to and from the contact target.
The base end portion is formed so that the cross-sectional shape of the cross section orthogonal to the central axis of the probe pin is non-circular.
The contact portion is defined by two notched surfaces formed by cutting out a part of the tip portion on a plane inclined with respect to the central axis and two outer peripheral surfaces of the tip portion. It consists of parts that protrude along the central axis.
The tip portion is a probe pin formed so that adjacent outer peripheral surfaces intersect each other at a right angle . 請求項１または２記載のプローブピンと、当該プローブピンを支持する支持部とを備えたプローブユニットであって、
前記支持部は、前記プローブピンの前記中心軸回りの回動を規制した状態での当該プローブピンの嵌合が可能な挿通孔および溝部のいずれか一方で形成された嵌合部を備えて、当該嵌合部に前記プローブピンを嵌合させた状態で当該プローブピンを支持可能に構成されているプローブユニット。 A probe unit including the probe pin according to claim 1 or 2 and a support portion for supporting the probe pin.
The support portion comprises a fitting portion formed in either an insertion hole or a groove portion into which the probe pin can be fitted in a state where the rotation of the probe pin around the central axis is restricted. A probe unit configured to be able to support the probe pin in a state where the probe pin is fitted to the fitting portion. 前記プローブピンは、前記断面形状が矩形となるように形成され、
前記嵌合部は、前記プローブピンの前記断面形状と相補的な形状を有する前記挿通孔、および前記プローブピンの前記断面形状と相補的な形状を有する前記溝部のいずれか一方で形成されている請求項３記載のプローブユニット。 The probe pin is formed so that the cross-sectional shape is rectangular.
The fitting portion is formed of either one of the insertion hole having a shape complementary to the cross-sectional shape of the probe pin and the groove portion having a shape complementary to the cross-sectional shape of the probe pin. The probe unit according to claim 3 . 前記支持部は、腕部を備えて構成され、
前記嵌合部は、前記矩形の各辺が当該腕部の長さ方向に対して傾斜するように当該腕部の一端部側に形成されている請求項４記載のプローブユニット。 The support portion is configured to include an arm portion.
The probe unit according to claim 4 , wherein the fitting portion is formed on one end side of the arm portion so that each side of the rectangle is inclined with respect to the length direction of the arm portion. 請求項３から５のいずれかに記載のプローブユニットと、当該プローブユニットを移動させて前記接触対象に前記プローブピンを接触させる移動機構と、前記プローブピンを介して入出力する電気信号に基づいて前記接触対象としての検査対象の検査を実行する検査部とを備えている検査装置。 Based on the probe unit according to any one of claims 3 to 5 , a moving mechanism for moving the probe unit to bring the probe pin into contact with the contact target, and an electric signal input / output via the probe pin. An inspection device including an inspection unit that executes an inspection of an inspection target as a contact target.
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