CN110133335A - Probe, probe unit and check device - Google Patents
Probe, probe unit and check device Download PDFInfo
- Publication number
- CN110133335A CN110133335A CN201910102581.2A CN201910102581A CN110133335A CN 110133335 A CN110133335 A CN 110133335A CN 201910102581 A CN201910102581 A CN 201910102581A CN 110133335 A CN110133335 A CN 110133335A
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- China
- Prior art keywords
- probe
- mentioned
- sectional shape
- fitting portion
- supporting part
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06727—Cantilever beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
A kind of probe, probe unit and check device, make the front end of multiple probes close in the state of contact with contact object.Probe is formed as column, and it is configured to contact the contact portion (31) set on front end (21b) with contact object, so as to carry out the input and output of electric signal between contact object, base end part (21a) is formed as the cross sectional shape in the section (C) orthogonal with the central axis of probe (A) in non-circular, contact portion (31) is by utilizing the two outer peripheral surface (F1 of two cutting faces (S2) and front end (21b) for being cut a part of front end (21b) relative to central axis (A) inclined plane and being respectively formed, F4 it) delimit, and it is formed along at the position outstanding central axis (A).
Description
Technical field
The present invention relates to the probe of the input and output for carrying out electric signal between contact object, including the spy of the probe
Survey unit and the check device including the probe unit.
Background technique
As this probe unit, in following patent documents 1 it has been known that there is applicant disclosed in probe unit.Above-mentioned detection
Unit is configured to include: probe, and the probe is for contacting front end with detected object to carry out telecommunications between detected object
Number input and output；And supporting part, the supporting part support probe.At this point, probe is formed as front end in coniform
(front end attenuates) it is cylindric.
Existing technical literature
Patent document
Patent document 1: Japanese Patent Laid-Open 2016-170159 bulletin (page 8, Fig. 1)
Summary of the invention
The technical problems to be solved by the invention
However, there is following technology to be improved in above-mentioned existing probe and probe unit including the probe
Problem.Specifically, above-mentioned probe is formed as front end in coniform cylindric.In this case, this coniform
Front end is formed using the work mechanism of the rotation system of processing such as lathe, therefore, on processing characteristics, the top position of circular cone
In on the central axis of probe.Thus, become at the top of the circular cone on the central axis of probe and probe object contact.Another party
Face, breakage when with the top of the circular cone of probe object contact in order to avoid contacting and be necessary to ensure that sufficient intensity, therefore, compared with
Ideally, rounding (SR) is set at the top of circular cone, and the part is formed as small as possible.Thus, in this probe
In, it is thinner using probe, increase the structure of the angle (being set as obtuse angle) at the top of circular cone.
In this case, for example, as shown in Figure 12 and Figure 13, so that two probes 521 the front end (top of circular cone
Portion) it is close to each other in the state of connect probe 521 and the conductor portion 101 of the substrate 100 as detected object (by contact position)
When touching, need so that the angle at the top of circular cone is bigger, increases each central axis A angulation of each probe 521 (
Reduce tilt angle relative to substrate 100) mode tilt each probe 521 substantially relative to substrate 100.However, passing through
Tilt probe 521 substantially in the above described manner, thus make the position except the front end of probe 521 also close to substrate 100 (i.e.,
Probe 521 is whole close), it (is connect thus, for example, being installed on conductor portion 101 in the electronic component etc. for being installed on substrate 100
Touch position) nearby when, position except the front end of probe 521 may contact with electronic component etc., so that probe 521
Front end is difficult to contact with conductor portion 101.As described above, existing in existing probe and probe unit including the probe
Make to make probe contact the worry become difficult with detected object in the state that the front end of multiple probes is close to each other, it is desirable at this
It improves to some extent on point.
The present invention makees in view of above-mentioned technical problem, and main purpose is to provide can be in the front end for making multiple probes
Probe, probe unit and the check device contacted in the state of with contact object.
Technical scheme applied to solve the technical problem
To achieve the goals above, the probe of first invention is formed as column, and in the state supported to base end part
Under contact the contact portion set on front end with contact object, the input to progress electric signal between above-mentioned contact object is defeated
Out, above-mentioned base end part is formed as with the cross sectional shape in the section of the orthogonality of center shaft of above-mentioned probe in non-circular, above-mentioned contact portion
It is cut by two being cut a part of above-mentioned front end using the plane relative to above-mentioned inclined and being respectively formed
Bevel and two outer peripheral surfaces of above-mentioned front end delimited, to be formed along at above-mentioned central axis position outstanding.
In addition, the probe of the second invention is on the basis of the probe of first invention, above-mentioned contact portion is formed in adjacent
Near each mutual cross section of above-mentioned outer peripheral surface.
In addition, the probe of third invention is on the basis of the probe of the second invention, above-mentioned front end is formed as adjacent
Each above-mentioned outer peripheral surface at right angles to intersects each other.
In addition, it includes the probe of first invention and the bearing that is supported to above-mentioned probe that the probe unit of the 4th invention, which is,
The probe unit in portion, wherein
Above-mentioned supporting part includes fitting portion, and above-mentioned fitting portion is by that can limit the shape of rotation of the above-mentioned probe around above-mentioned central axis
Either realize in the chimeric insertion hole and groove portion of above-mentioned probe and to be formed under state, above-mentioned supporting part be configured to make it is above-mentioned
Above-mentioned probe is supported in the state that probe is chimeric with above-mentioned fitting portion.
In addition, it includes the probe of the second invention and the supporting part that is supported to above-mentioned probe that the probe unit of the 5th invention, which is,
Probe unit, wherein
Above-mentioned supporting part includes fitting portion, and above-mentioned fitting portion is by that can limit the shape of rotation of the above-mentioned probe around above-mentioned central axis
Either realize in the chimeric insertion hole and groove portion of above-mentioned probe and to be formed under state, above-mentioned supporting part be configured to make it is above-mentioned
Above-mentioned probe is supported in the state that probe is chimeric with above-mentioned fitting portion.
In addition, the probe unit of the 6th invention is to include the probe that third is invented and the supporting part supported to above-mentioned probe
Probe unit, wherein
Above-mentioned supporting part includes fitting portion, and above-mentioned fitting portion is by that can limit the shape of rotation of the above-mentioned probe around above-mentioned central axis
Either realize in the chimeric insertion hole and groove portion of above-mentioned probe and to be formed under state, above-mentioned supporting part be configured to make it is above-mentioned
Above-mentioned probe is supported in the state that probe is chimeric with above-mentioned fitting portion.
In addition, the probe unit of the 7th invention is on the basis of the probe unit of the 4th invention, on above-mentioned probe is formed as
Cross sectional shape is stated in rectangle, above-mentioned fitting portion is by having the above-mentioned insert with the shape of the above-mentioned sectional shape complementary of above-mentioned probe
It is formed either in the above-mentioned groove portion of hole and the shape with the above-mentioned sectional shape complementary with above-mentioned probe.
In addition, the probe unit of the 8th invention, on the basis of the probe unit of the 5th invention, above-mentioned probe is formed as above-mentioned section
Face shape is in rectangle, above-mentioned fitting portion by have with the above-mentioned insertion hole of the shape of the above-mentioned sectional shape complementary of above-mentioned probe and
It is formed either in the above-mentioned groove portion of shape with the above-mentioned sectional shape complementary with above-mentioned probe.
In addition, the probe unit of the 9th invention, on the basis of the probe unit of the 6th invention, above-mentioned probe is formed as above-mentioned section
Face shape is in rectangle, above-mentioned fitting portion by have with the above-mentioned insertion hole of the shape of the above-mentioned sectional shape complementary of above-mentioned probe and
It is formed either in the above-mentioned groove portion of shape with the above-mentioned sectional shape complementary with above-mentioned probe.
In addition, the probe unit of the tenth invention, on the basis of the probe unit of the 7th invention, above-mentioned supporting part is configured to
Including wrist, above-mentioned fitting portion by each side of above-mentioned rectangle relative to above-mentioned wrist length direction it is inclined in a manner of be formed in
State the one end side of wrist.
In addition, the probe unit of the 11st invention, on the basis of the probe unit of the 8th invention, above-mentioned supporting part is configured to wrap
Include wrist, above-mentioned fitting portion by each side of above-mentioned rectangle relative to above-mentioned wrist length direction it is inclined in a manner of be formed in it is above-mentioned
The one end side of wrist.
In addition, the probe unit of the 12nd invention, on the basis of the probe unit of the 9th invention, above-mentioned supporting part is configured to wrap
Include wrist, above-mentioned fitting portion by each side of above-mentioned rectangle relative to above-mentioned wrist length direction it is inclined in a manner of be formed in it is above-mentioned
The one end side of wrist.
In addition, the check device of the 13rd invention includes: any one detection unit of the 4th invention into the 12nd invention；
Mobile mechanism, above-mentioned mobile mechanism keeps above-mentioned probe unit mobile, so that above-mentioned probe is contacted with above-mentioned contact object；And inspection
Portion is looked into, above-mentioned inspection portion is executed based on the electric signal via above-mentioned probe input and output to the inspection as above-mentioned contact object
The inspection of object.
Invention effect
In the probe of first invention and the probe unit of the 4th invention, it is in by the cross sectional shape that probe is formed as base end part
It is non-circular, two as made of being cut a part of front end of probe using the plane of the inclined relative to probe
Two outer peripheral surfaces of a cutting face and front end delimited, and contact portion is being constituted along central axis position outstanding.Therefore, according to
Above-mentioned probe and probe unit can be reliably prevented probe compared with the rounded structure of the cross sectional shape of base end part with center
Therefore rotation centered on axis can reliably carry out the positioning of contact portion, and contact portion can be formed in the front end of probe
Slave central axis eccentric position at.Therefore, according to above-mentioned thimble and probe unit, by by two adjacent probe units
Each contact portion of each probe be positioned at each contact portion and make near the contact portion of each front end in the state of opposite position respectively
Outer peripheral surface it is close to each other, so as to make each probe not occur substantially to tilt relative to contact object, make each contact portion each other
It is contacted sufficiently close in the state of with contact object.As a result, being avoided that following according to above-mentioned thimble and probe unit
Situation: position except the contact portion of probe or the supporting part supported to probe are close to contact object, so that such as probe
Contact portion except position or supporting part contacted with the electronic component etc. being installed near contact object and become contact portion
It must be difficult to contact with contact object, thus, it is possible to contact contact portion reliably with contact object.
In addition, according to the probe unit of the probe of the second invention and the 5th invention, by the way that contact portion is formed in front end
The adjacent mutual cross section of each outer peripheral surface near, so as to make two adjacent probe units each probe each front end
The mutual cross section of the outer peripheral surface in portion is close, thus connects in the state of keeping each contact portion closer with contact object
Touching.
In addition, according to the probe unit of the probe of third invention and the 6th invention, by so that adjacent each outer peripheral surface that
This mode at right angles to intersected forms front end, thus when carrying out the processing of cutting front end, it can be accurately to front end
It is positioned and is kept, therefore, contact portion can be accurately formed to the shape for defined.
In addition, according to the check device of the 4th invention any one probe unit into the 6th invention and the 13rd invention,
By to include the side that can realize the chimeric fitting portion of probe in the state of the rotation for limiting probe around central axis
Formula constitutes supporting part, so as to contact portion is reliably positioned in advance by keeping the base end part of probe chimeric with fitting portion
Determining position.
In addition, according to the check device of the 7th invention any one probe unit into the 9th invention and the 13rd invention,
Forming probe in such a way that cross sectional shape is in rectangle, and by having the insertion hole with the shape of the sectional shape complementary of probe
And have and either in the groove portion of the shape of the sectional shape complementary of probe formed fitting portion, thus with such as probe cut
The structure that the cross sectional shape of face shape and insertion hole or groove portion is formed as the polygon on five sides or more is compared, and is easily mastered therefrom
Therefore the position of the contact portion of mandrel bias can be easy to carry out following operation: keeping probe chimeric to be contacted with fitting portion
The positioning in portion.
In addition, being filled according to the inspection of the tenth any one probe unit of invention into the 12nd invention and the 13rd invention
Set, by by each side for making the i.e. rectangle of cross sectional shape of fitting portion relative to wrist length direction it is inclined in a manner of by fitting portion
It is formed in external one end side, to can will contact compared with the structure for the length direction that each side of rectangle is parallel to wrist
Portion is positioned at the position at the width direction center for deviating more from wrist.Therefore, it is filled according to above-mentioned probe unit and inspecting substrate
It sets, by so that corresponding each side of each insertion hole of two adjacent probe units is inclined towards direction opposite each other each other
Mode forms each insertion hole, to can make each detection compared with the structure for the length direction that each side of rectangle is parallel to wrist
It is contacted in the state that each contact portion of each probe of unit is closer with contact object.
Detailed description of the invention
Fig. 1 is the structure chart for indicating the structure of base board checking device 1.
Fig. 2 is the perspective view for indicating the structure of probe unit 2.
Fig. 3 is the perspective view from outer peripheral surface F1 unilateral observation probe 21.
Fig. 4 is the main view from outer peripheral surface F1 unilateral observation probe 21.
Fig. 5 is the side view from outer peripheral surface F3 unilateral observation probe 21.
Fig. 6 is the perspective view from outer peripheral surface F3 unilateral observation probe 21.
Fig. 7 is the perspective view from front end 21b unilateral observation probe 21.
Fig. 8 is the explanatory diagram being illustrated to the structure of the arm 41,42 in supporting part 22.
Fig. 9 is the explanatory diagram being illustrated to inspection method.
Figure 10 is the explanatory diagram being illustrated to the structure of probe unit 121.
Figure 11 is the perspective view for indicating the structure of probe unit 102.
Figure 12 is the first explanatory diagram being illustrated to existing structure.
Figure 13 is the second explanatory diagram being illustrated to existing structure.
Specific embodiment
Hereinafter, being illustrated referring to attached drawing to the embodiment of probe, probe unit and check device.
Initially, the structure of base board checking device 1 shown in FIG. 1 is illustrated.Base board checking device 1 is check device
An example, as shown in Figure 1, include two probe units 2,2, Liang Ge mobile mechanism 3,3, operation portion 4, storage unit 5, display unit 6 with
And processing unit 7, and be configured to execute the substrate shown in Fig. 9 100 of an example as check object (and contact object)
It checks.
Probe unit 2 is an example of probe unit, as shown in Fig. 2, being configured to includes probe 21 and supporting part 22.
As shown in figure 9, probe 21 be for make the contact portion 31 set on front end 21b with as contact object (and inspection
Check as) substrate 100 conductor portion 101 contact, between conductor portion 101 carry out electric signal input and output probe
An example, be formed as column as shown in Fig. 3~Fig. 7.Specifically, probe unit 2 is formed are as follows: in addition to aftermentioned cutting face
From each position except the forming part of S1~S3, from base end part 21a to front end 21b, the section C orthogonal with central axis A
The cross sectional shape of (referring to Fig. 7) is the shape of rectangle (cross sectional shape of base end part 21a is an example that is non-circular and being polygon)
(quadrangular shape).In this case, by being formed as probe 21 to keep the cross sectional shape of base end part 21a (non-circular in rectangle
Shape), so that the shape of the bearing of supported portion 22 can be reliably prevented compared with the rounded structure of the cross sectional shape of base end part 21a
Therefore the rotation of probe 21 under state, centered on central axis A can reliably carry out the positioning of contact portion 31.
In addition, in above-mentioned probe 21, as shown in Fig. 3~Fig. 7, by utilizing relative to the inclined plane of central axis A to preceding
A part (part being represented by dashed line in the various figures) of end 21b cut and formed cutting face S1~S3 (hereinafter,
Two cutting faces S2, S3 in when not distinguishing, also referred to as " cutting face S "), and respectively constituted using the plane in the 21b of front end
Four outer peripheral surface F1~F4 (hereinafter, when not distinguishing, also referred to as " outer peripheral surface F ") in two outer peripheral surfaces F1, F4 delimit, with
Contact portion 31 is being constituted along the position outstanding central axis A.In addition, being formed as adjacent each outer peripheral surface F in above-mentioned probe 21
At right angles to intersect each other, that is, as used the section be formed as shown in dotted line using the front end 21b before flush cut in Fig. 7
Shape is in rectangle, and in adjacent outer peripheral surface F, the cross section of (in this example, outer peripheral surface F1, F4 each other) is formed about and connects each other
Contact portion 31.Thus, in above-mentioned probe 21, with the existing probe for forming contact portion 31 (vertex of circular cone) on central axis A
Difference, from shape at central axis A eccentric position (in this example, the position near the mutual cross section of outer peripheral surface F1, F4)
At contact portion 31.
In addition, by being cut using a part of plane to front end 21b, being connect in above-mentioned probe 21 to be formed
Contact portion 31.That is, using surface grinding machine (Japanese: plane grinding disk), milling machine (Japanese: Off ラ イ in above-mentioned probe 21
ス disk) and the work mechanism of the plane machinings system such as wire electric discharge processing machine (Japanese: ワ イ ヤ discharging processing machine) formed
Contact portion 31.Thus, in above-mentioned probe 21, formed on central axis A with due to using the work mechanism of rotation system of processing
The existing probe of contact portion 31 is different, as described above, can from central axis A eccentric position (in this example, outer peripheral surface F1,
Position near the mutual cross section of F4) at formed contact portion 31.
As shown in Fig. 2, supporting part 22 includes arm 41,42 and interconnecting piece 43,44, and it is configured to prop up probe 21
It holds.
Arm 41,42 is equivalent to wrist, as shown in Fig. 2, being respectively formed as prism-shaped, and with through-thickness (in Fig. 2
Up and down direction) state configuration separated from each other, each base end part 41a, 42a are connected by interconnecting piece 43, and each front end
41b, 42b are connected by interconnecting piece 44.In this case, as shown in Fig. 2, contact portion 31 and substrate in order to make probe 21
Supporting part 22 when 100 conductor portion 101 contacts is whole to be easy to happen flexible deformation, base end part 41a, 42a and interconnecting piece 43
Coupling part and the coupling part of front end 41b, 42b and interconnecting piece 44 form relatively thin.
In addition, as shown in Fig. 2, dividing in interconnecting piece 44 (side each front end 41b, 42b (one end side) of arm 41,42)
The insertion hole H (an example of fitting portion) that Xing Cheng not can insert for probe 21, is inserted through the base end part of the probe 21 of above-mentioned insertion hole H
The side 21a is fixed in arm 41,42.
At this point, insertion hole H has the square complementary with cross sectional shape, the i.e. rectangle of base end part 21a of probe 21 as shown in Figure 8
The cross sectional shape of shape, to be able to achieve the chimeric of base end part 21a.Thus, probe 21 base end part 21a be inserted through insertion hole H with
In the state of keeping the two chimeric, it can be limited around the rotation of central axis A.
In addition, insertion hole H is formed as the cross sectional shape of insertion hole H as shown in Figure 8, i.e. the center of rectangle is located at supporting part
The center (on chain-dotted line B shown in Fig. 8) of width direction, and the length direction (Fig. 8 of each side of rectangle relative to arm 41,42
Shown in chain-dotted line B direction) inclination.In this case, in aforesaid substrate check device 1, as shown in figure 8, with two
Corresponding each side in the cross sectional shape of each insertion hole H of probe unit 2, i.e. each rectangle is tilted towards direction opposite each other each other
Mode form each insertion hole H.By insertion hole H in the above described manner, thus as shown in figure 9, so that in two probe units 2
Each supporting part 22 each interconnecting piece 44 it is close to each other and keep the state separated from each other of each interconnecting piece 43 of each supporting part 22 (each
The arm 41,42 of probe unit 2 in plan view be in V shape state) make probe unit 2 each probe 21 each front end
When 21b is close to each other, it can make to be formed in from each contact portion 31 from the central axis A eccentric position of probe 21 and fully lean on each other
Closely.
Mobile mechanism 3 keeps probe unit 2 mobile according to the control of processing unit 7.Operation portion 4 is configured to carry out various instructions
Operation, and operation signal is exported when carrying out instruction operation.Storage unit 5 to comprising indicate substrate 100 in, as by contact position
Set the substrate including the information of coordinate of conductor portion 101 (referring to Fig. 9) of (position for contacting the contact portion 31 of probe 21) etc.
Data Db is stored.Control of the display unit 6 according to processing unit 7, display inspection result etc..
Processing unit 7 controls each portion for constituting base board checking device 1 according to the operation signal exported from operation portion 4.
In addition, processing unit 7 plays a role as inspection portion, and based on inputted via the probe 21 contact by contact portion with substrate 100,
The electric signal of output executes the inspection of substrate 100.
Then, referring to attached drawing, base to the method for using base board checking device 1 to check substrate 100 and at this time
The movement in each portion of board checking device 1 is illustrated.
Firstly, substrate 100 is fixed on fixed station (not shown), then, operation portion 4 is operated, and indicate to check
Start.At this point, operation portion 4 exports operation signal, processing unit 7 starts inspection processing according to operation signal.
In above-mentioned inspection processing, processing unit 7 reads substrate data Db from storage unit 5.Then, processing unit 7 is based on substrate
The information of coordinate that data Db is included, expression is as the conductor portion 101 in the substrate 100 by contact position, to determine use
In the moving distance for keeping probe unit 2 mobile.
Then, processing unit 7 controls each mobile mechanism 3, and is moved to each probe unit 2 to make each probe unit 2
The contact portion 31 of probe 21 be located at the top of conductor portion 101.Then, processing unit 7 controls each mobile mechanism 3, and makes to visit
It is mobile (decline) to substrate 100 to survey unit 2.At this point, as shown in figure 9, with each probe unit 2 decline, the contact of each probe 21
Portion 31 is contacted with the conductor portion 101 of substrate 100.
In this case, as shown in figure 13, the existing of the vertex of the circular cone as contact portion is formed on central axis A
In probe 521, when so that the contact portion of two probes 521 state close to each other and the conductor portion 101 of substrate 100 contact,
It needs to tilt each probe 521 substantially relative to substrate 100.Thus, the position except contact portion in probe 521 or to probe
The supporting part that position except 521 contact portion is supported close to substrate 100 so that probe 521 or supporting part be installed on
The contact such as electronic component near conductor portion 101, thus in the presence of being difficult to connect the contact portion 31 of probe 521 with conductor portion 101
The worry of touching.
In contrast, in above-mentioned probe 21, as shown in figure 9, probe 21 front end 21b, from central axis A
Contact portion 31 is formed at eccentric position (position near the mutual cross section of outer peripheral surface F1, F4).Thus, in above-mentioned probe
In 21, as shown in figure 9, making each probe 21 when each contact portion 31 for making each probe 21 in two probe units 2 is close to each other
Front end 21b in, the outer peripheral surface F that is formed with contact portion 31 it is close each other (the mutual cross section of outer peripheral surface F1, F4), from
And each probe 21 can be made not occur substantially to tilt relative to substrate 100 (with small size inclination), in each contact for making each probe 21
It is contacted in the state that portion 31 is sufficiently close to each other with the conductor portion 101 of substrate 100.Thus, it, can be reliably in above-mentioned probe 21
Avoid following situation: position except contact portion 31 in probe 21 or the supporting part 22 supported to probe 21 are close to substrate
100, so that position or supporting part 22 except the contact portion of probe 21 and the electronic component etc. being installed near conductor portion 101
Contact, so that the contact portion 31 of probe 21 be made to be difficult to contact with conductor portion 101.
Then, processing unit 7 controls each mobile mechanism 3, and each probe unit 2 is made to decline predetermined distance
Time point, stop decline.Then, processing unit 7 is based on via the electric signal of each probe 21 output detection at this time via each spy
The electric signal that needle 21 inputs executes the inspection (for example, by state of contact position) of substrate 100.Then, processing unit 7 is right
Display unit 6 is controlled, and is shown to inspection result.
Then, processing unit 7 controls each mobile mechanism 3 so that each probe unit 2 towards far from substrate 100 direction
Mobile (rising), to release the contact of each contact portion 31 and substrate 100.Then, processing unit 7 is moved to each probe unit 2 just
Beginning position, and terminate inspection processing.
In this way, in above-mentioned probe 21, probe unit 21 and base board checking device 1, with the cross sectional shape of base end part 21a
Non-circular mode forms probe 21, by using relative to the inclined plane of central axis A by the one of the front end 21b of probe 21
Two outer peripheral surface F of two cutting face S and front end 21b made of part is cut delimited, and along the position outstanding central axis A
Place constitutes contact portion 31.Thus, according to above-mentioned probe 21, probe unit 2 and base board checking device 1, with cutting for base end part 21a
Shape rounded structure in face is compared, and the rotation of the probe 21 centered on central axis A can be reliably prevented, therefore, can be reliable
Ground carries out the positioning of contact portion 31, and can in the front end 21b of probe 21, formed at central axis A eccentric position
Contact portion 31.Thus, according to above-mentioned probe 21, probe unit 2 and base board checking device 1, by determining by each contact portion 31
In the state of 31 relative position of each contact portion of each probe 21 in two adjacent probe units 2, so that respectively
Outer peripheral surface F in the 21b of front end, being formed with contact portion 31 is close to each other, so as to make each contact portion 31 relative to substrate
100 do not occur in the state of substantially tilting and being substantially close to one another each contact portion 31, connect with the conductor portion 101 of substrate 100
Touching.As a result, being avoided that following situation: probe unit according to above-mentioned probe 21, probe unit 2 and base board checking device 1
Position except contact portion 31 in 21 or the supporting part 22 supported to probe 21 are close to substrate 100, so that probe 21
Position or supporting part 22 except contact portion are contacted with the electronic component etc. being installed near conductor portion 101, so that connecing
Contact portion 31 is difficult to contact with conductor portion 101, so as to contact contact portion 31 reliably with the conductor portion 101 of substrate 100.
In addition, according to above-mentioned probe 21, probe unit 2 and base board checking device 1, by the way that contact portion 31 is formed in front end
Near the adjacent mutual cross section of outer peripheral surface F1, F4 in portion 21b, so as to by making two adjacent probe units 2
Each probe 21 each front end 21b the mutual cross section of outer peripheral surface F1, F4 it is close, thus making each contact portion 31 each other
It is contacted in the state of with conductor portion 101.
In addition, according to above-mentioned probe 21, probe unit 2 and substrate sensing units 1, by so that adjacent each outer peripheral surface F
The mode at right angles intersected each other forms front end 21b, so as to front end 21b carry out machining when, to front end
21b is accurately positioned and is kept, and therefore, can be accurately formed contact portion 31 to provide such shape.
In addition, according to above-mentioned probe unit 2 and base board checking device 1, by with include by can limit probe 21 around
Realized in the state of the rotation of central axis A the chimeric insertion hole H-shaped of probe 21 at the mode of fitting portion constitute supporting part, from
And it can be pre- thus, it is possible to which contact portion 31 to be reliably positioned at by making probe be inserted through insertion hole H and keeping it chimeric with insertion hole H
First determining position.
In addition, according to above-mentioned probe unit 2 and base board checking device 1, by being in rectangle with the cross sectional shape of base end part 21a
Mode form the base end part 21a of probe 21, and by having the insertion hole H with the shape of the sectional shape complementary of base end part 21a
Fitting portion is formed, to be formed as the more of five sides or more with the cross sectional shape of such as base end part 21a and the cross sectional shape of insertion hole H
The structure of side shape is compared, therefore following behaviour can be easy to carry out by being easily mastered from the position of the contact portion 31 of central axis A bias
Make: so that the base end part 21a of probe 21 is inserted through insertion hole H, to carry out the positioning of contact portion 31.
In addition, according to above-mentioned probe unit 2 and base board checking device 1, by so that insertion hole H cross sectional shape, that is, rectangle
Length direction inclined mode of each side relative to arm 41,42, by insertion hole H-shaped in front end 41b, 42b of arm 41,42
Side, to can be positioned at contact portion 31 more partially compared with each side of rectangle is parallel to the structure of the length direction of arm 41,42
At the position at the width direction center from arm 41,42.Thus, according to above-mentioned probe unit 2 and base board checking device 1, by with
Make corresponding each side of each insertion hole H of two adjacent probe units 2 each other towards the inclined mode shape in direction opposite each other
At each insertion hole H, to each detection can be kept single compared with each side of rectangle is parallel to the structure of the length direction of arm 41,42
It is contacted in the state that each contact portion 31 of each probe 21 of member 2 is closer with conductor portion 101.
In addition, probe and probe unit are not limited to above structure.For example, describing cutting with base end part 21a above
Face shape in rectangle and cut before front end 21b cross sectional shape in rectangle (the outer peripheral surface F of front end 21b be plane and
Adjacent outer peripheral surface F at right angles intersects each other) mode form the example of probe 21, but can also use with base end part 21a cut
The cross sectional shape of front end 21b before face shape and cutting is (more than triangle and five sides more in the polygon except rectangle
Side shape) the probe that is formed of mode.As an example, probe 121 shown in Fig. 10 can be used.In addition, in the following description, it is right
Identical symbol is marked in structural element identical with above-mentioned probe unit 2 and probe 21, and the repetitive description thereof will be omitted.
In this case, as shown in Figure 10, before probe 121 is formed as base end part 121a cross sectional shape and cutting
The cross sectional shape of front end 121b is (an example of the polygon except rectangle) triangular in shape.In addition, in above-mentioned probe 121, by
Using relative to the inclined plane of central axis A by the cutting of a part (part being represented by dashed line in Figure 10) of front end 121b and
Two cutting faces S4, S5 (hereinafter, when not distinguishing, also referred to as " cutting face S ") for being formed and the front end constituted using plane
Two outer peripheral surfaces F5, F6 in outer peripheral surface F5~F7 (hereinafter, when not distinguishing, also referred to as " outer peripheral surface F ") of 121b delimited, and
Contact portion 131 is being constituted along the position outstanding central axis A.In addition, in above-mentioned probe 121, in adjacent outer peripheral surface F5, F6
Mutual cross section is formed about contact portion 131.
In addition, the example that the outer peripheral surface F for describing front end 21b above is made of plane respectively, but outer peripheral surface F can be used
The structures that are made of curved surface of one or more.
In addition, describing cross sectional shape (the first cross sectional shape) and the side front end 21b of the side base end part 21a above
Cross sectional shape (the second cross sectional shape) forms the example of probe 21,121 in a manner of same shape (non-circular shape), but
The probe formed in such a way that the first cross sectional shape and the second cross sectional shape take on a different shape (non-circular shape) can be used.
As an example, using the first cross sectional shape is set as ellipse (as an example, the second cross sectional shape can be set as polygon
Rectangle) structure.
In addition, describing the length direction with each side of the i.e. rectangle of the cross sectional shape of insertion hole H relative to arm 41,42 above
Inclined mode forms the example of insertion hole H, but can also use so that each side of rectangle is parallel to or is orthogonal to the length of arm 41,42
The mode in degree direction forms the structure of insertion hole H.
In addition, being described above by insertion hole H-shaped that cross sectional shape is rectangle in the example of arm 41,42, but can use
It, will be with the sectional shape complementary when cross sectional shape of the part chimeric with insertion hole H within the probe is in the shape except rectangle
Shape insertion hole H-shaped in the structure of arm 41,42.
In addition, as shown in figure 11, can also use includes replacing insertion hole H-shaped Cheng Yu with groove portion G (another example of fitting portion)
The probe unit 102 of the supporting part 122 of 144 side 144a of interconnecting piece.In this case, groove portion G has the base with probe 21
The cross sectional shape of the cross sectional shape of end 21a, that is, rectangle complementation rectangle, to be able to achieve the chimeric of base end part 21a.Therefore, it is visiting
It surveys in unit 102, by the way that base end part 21a is embedded in groove portion G and keeps the two chimeric, also can reliably limit probe 21 around central axis
The rotation of A.
In addition, can be formed as groove portion G in the cross sectional shape of groove portion G viewed from above, cross sectional shape, that is, rectangle is each
While the length direction relative to arm 41,42 tilts.In this case, by so that two probe units 102 each groove portion G
The corresponding each side of cross sectional shape, that is, each rectangle forms each groove portion G towards the inclined mode in direction opposite each other each other, thus with
When each probe unit 2 of above-mentioned use similarly, can make to be formed in each contact portion from from the central axis A eccentric position of probe 21
31 each other sufficiently close to.
It in addition, being illustrated for listing the base board checking device 1 including two probe units 2, but is including three
Also above-mentioned each effect is able to achieve in the base board checking device of above probe unit 2.
(symbol description)
1 base board checking device；
2 probe units；
3 mobile mechanisms；
7 processing units；
21,121 probe；
21a, 121a base end part；
The front end 21b, 121b；
22 supporting parts；
31,131 contact portion；
41,42 arm；
The front end 41b, 42b；
100 substrates；
101 conductors；
A central axis；
The section C；
F1~F12 outer peripheral surface；
G groove portion；
H insertion hole；
The cutting face S1~S11.
Claims (13)
1. a kind of probe is formed as column, and obtains making the contact portion for being set to front end in the state of bearing and connecing in base end part
Touch object contact between the contact object carry out electric signal input and output,
It is characterized in that,
The base end part is formed as with the cross sectional shape in the section of the orthogonality of center shaft of the probe in non-circular,
The contact portion is distinguished by being cut a part of the front end using the plane relative to the inclined
Two outer peripheral surfaces in two cutting faces and the front end that are formed delimited, to be formed along central axis position outstanding
Place.
2. probe as described in claim 1, which is characterized in that
The contact portion is formed near adjacent each mutual cross section of outer peripheral surface.
3. probe as claimed in claim 2, which is characterized in that
Each outer peripheral surface that the front end is formed as adjacent at right angles to intersects each other.
4. a kind of probe unit, including probe described in claim 1 and the supporting part supported to the probe,
It is characterized in that,
The supporting part includes fitting portion, and the fitting portion can be limited with the rotation in the central axis around the probe
In the state of the chimeric insertion hole and groove portion of the probe in either formed, the supporting part is configured in the spy
The probe is supported in the state that needle is chimeric with the fitting portion.
5. a kind of probe unit, including probe as claimed in claim 2 and the supporting part supported to the probe,
It is characterized in that,
The supporting part includes fitting portion, and the fitting portion is by that can limit the shape of rotation of the probe around the central axis
Either realize in the chimeric insertion hole and groove portion of the probe and to be formed under state, the supporting part be configured to make it is described
The probe is supported in the state that probe is chimeric with the fitting portion.
6. a kind of probe unit, including probe as claimed in claim 3 and the supporting part supported to the probe,
It is characterized in that,
The supporting part includes fitting portion, and the fitting portion is by that can limit the shape of rotation of the probe around the central axis
Either carry out in the chimeric insertion hole and groove portion of the probe being formed under state, the supporting part be configured to make it is described
The probe is supported in the state that probe is chimeric with the fitting portion.
7. probe unit as claimed in claim 4, which is characterized in that
It is in rectangle that the probe, which is formed as the cross sectional shape,
The fitting portion by the shape with the sectional shape complementary with the probe the insertion hole and have and institute
It either states in the groove portion of the shape of the sectional shape complementary of probe and to be formed.
8. probe unit as claimed in claim 5, which is characterized in that
It is in rectangle that the probe, which is formed as the cross sectional shape,
The fitting portion by the shape with the sectional shape complementary with the probe the insertion hole and have and institute
It either states in the groove portion of the shape of the sectional shape complementary of probe and to be formed.
9. probe unit as claimed in claim 6, which is characterized in that
It is in rectangle that the probe, which is formed as the cross sectional shape,
The fitting portion by the shape with the sectional shape complementary with the probe the insertion hole and have and institute
It either states in the groove portion of the shape of the sectional shape complementary of probe and to be formed.
10. probe unit as claimed in claim 7, which is characterized in that
The supporting part is configured to include wrist,
The fitting portion by each side of the rectangle relative to the wrist length direction it is inclined in a manner of be formed in the wrist
The one end side in portion.
11. probe unit as claimed in claim 8, which is characterized in that
The supporting part is configured to include wrist,
The fitting portion by each side of the rectangle relative to the wrist length direction it is inclined in a manner of be formed in the wrist
The one end side in portion.
12. probe unit as claimed in claim 9, which is characterized in that
The supporting part is configured to include wrist,
The fitting portion by each side of the rectangle relative to the wrist length direction it is inclined in a manner of be formed in the wrist
The one end side in portion.
13. a kind of check device characterized by comprising
Probe unit described in any one of claim 4 to 12；
Mobile mechanism, the mobile mechanism keeps the probe unit mobile, so that the probe is contacted with the contact object；With
And
Inspection portion, the inspection portion is based on the electric signal via probe input, output, to the inspection as the contact object
It checks as being checked.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018022122A JP7032167B2 (en) | 2018-02-09 | 2018-02-09 | Probe pins, probe units and inspection equipment |
| JP2018-022122 | 2018-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110133335A true CN110133335A (en) | 2019-08-16 |
Family
ID=67568539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910102581.2A Pending CN110133335A (en) | 2018-02-09 | 2019-02-01 | Probe, probe unit and check device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7032167B2 (en) |
| KR (1) | KR102545415B1 (en) |
| CN (1) | CN110133335A (en) |
| TW (1) | TWI821243B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112730925B (en) * | 2019-10-14 | 2024-03-19 | 台湾中华精测科技股份有限公司 | Staggered probe card |
| TWI709752B (en) * | 2019-10-14 | 2020-11-11 | 中華精測科技股份有限公司 | Staggered-mode probe card |
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Also Published As
| Publication number | Publication date |
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| TW201935012A (en) | 2019-09-01 |
| TWI821243B (en) | 2023-11-11 |
| KR102545415B1 (en) | 2023-06-20 |
| JP7032167B2 (en) | 2022-03-08 |
| JP2019138766A (en) | 2019-08-22 |
| KR20190096810A (en) | 2019-08-20 |
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