CN104297535A - Probe unit and substrate inspection device - Google Patents
Probe unit and substrate inspection device Download PDFInfo
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- CN104297535A CN104297535A CN201410206001.1A CN201410206001A CN104297535A CN 104297535 A CN104297535 A CN 104297535A CN 201410206001 A CN201410206001 A CN 201410206001A CN 104297535 A CN104297535 A CN 104297535A
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- Prior art keywords
- support plate
- probe
- distance piece
- support
- gap
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The invention provides a probe unit and a substrate inspection device, which allow improvement of durability while prevent the base end part of a probe and an electrode from malposition. The probe unit comprises a probe (11), a supporting part (12), and an electrode panel (13) having an electrode (81). The supporting part (12) comprises supporting plates (41, 42) which support the front end part of the probe (11); supporting plates (43, 44) which support the base end part of the probe (11) and are fixed in a way of being abutted against the electrode panel (13); a spacer (33) arranged between the supporting plate (42) and the supporting plate (43); and a gap adjusting mechanism (34) which maintains a situation that a gap (G1) is reserved between the space (33) and the supporting plate (41) in a non-contact state that a contact object and a lower surface (41a) are not in contact, allows the decrease of the gap (G1) in a press state that a probe unit (2) is pressed towards the contact object, and keeps a situation that the base end part of the probe (11) is in contact with the electrode (81) and the front end part does not protrude from the lower surface (41a) not matter in the non-contact state or in the press state.
Description
Technical field
The present invention relates to the probe unit of the support comprising multiple probe and each probe of supporting and comprise the base board checking device of this probe unit.
Background technology
As this probe unit, there will be a known the inspection tool disclosed by Japanese Patent Laid-Open 2012-181186 publication.This inspection tool comprises tool main part, limiting member and electrode body etc. and forms.Tool main part comprises and checks side bearing body and electrode side bearing body and form, this inspection side bearing body has by the front end guidance of contact (probe) to the inspection bullport of checked property, and this electrode side bearing body has the electrode bullport rear end of contact being guided to electrode.Limiting member restriction tool main part moves toward the front.Electrode body has multiple electrode of contacting with the rear end of contact and forms, and is arranged on the rear of electrode side bearing body.In addition, electrode body is provided with the forcing unit that electrode side bearing body is exerted a force toward the front.
Here, the insulation division of the conductor portion that is made up of electric conductor of contact and the outer peripheral face that covers conductor portion is formed.In this case, be provided with the first end not forming insulation division in the front end of contact, be provided with the second end not forming insulation division in the rear end of contact.The first end of contact, when not checking, is positioned at the inspection bullport checking side bearing body, and when checking, also under the state being positioned at the inspection bullport checking side bearing body, its front end contacts with checked property.In addition, between the rear surface and the forward surface of electrode body of electrode side bearing body, form gap when not checking, when checking, this gap reduces (or disappearance).In addition, no matter the rear end of the second end in contact is all contact with the surface of contact of electrode when not checking or when checking.
This inspection tool is when moving towards checked property, and check that the opposite face of side bearing body and checked property abut against, the front end of contact contacts with checked property.In addition, now, check that side bearing body and electrode side bearing body overcome the acting force of forcing unit, towards electrode body relative movement, the rear end of contact is pressed by electrode, and the center section of contact bends.In addition, because this flexure makes the front end of contact contact with checked property with predetermined contact.
Prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open 2012-181186 publication (6-13 page, Fig. 1 ~ Fig. 4)
Summary of the invention
Invent technical matters to be solved
But there are the following problems in existing inspection tool.That is, in this inspection tool, be positioned at electrode bullport by the insulation division of the rear end side making contact, and reduce the inner peripheral surface of electrode bullport and the gap of insulation division, thus the bias of the rear end side of contact is suppressed less.In addition, in this inspection tool, along with the increase and decrease in the gap between the rear surface of electrode side bearing body and the forward surface of electrode body, can increase and decrease from the overhang of the rear end side of the contact that electrode side bearing body is given prominence to.That is, the rear end side of contact knows from experience generation relative movement relative to electrode side bearing.Therefore, in this inspection tool, there are the following problems: the rear end side of contact can be slided relative to the edge part of electrode bullport when mobile, and the insulation division that intensity is lower thus weares and teares, and consequently permanance is lower.In addition, in this inspection tool, generally speaking, contact can be supported under the state tilted relative to electrode side bearing body.Therefore, in above-mentioned inspection tool, when there is increase and decrease from the overhang that electrode side bearing body is outstanding in the rear end side in contact, the rear end of contact can move up in the side parallel with the surface of electrode body (lateral runout), and the leading section of contact also may be caused thus to misplace relative to electrode.
The present invention completes in view of the above problems, and its fundamental purpose can prevent probe unit and base board checking device that dislocation occurs between the base end part of probe and electrode while being to provide permanance to be improved.
[Lesson Questions を Xie Decision The Ru め means]
In order to achieve the above object, probe unit according to claim 1 comprises: multiple probe, and the leading section of the plurality of probe is contacted with contact object for the input and output carrying out electric signal, support, this support supports each probe, and battery lead plate, this battery lead plate has and contacts for multiple electrodes of the input and output carrying out described electric signal between external device (ED) respectively with each base end part of described each probe, described support comprises: the first support plate, this first support plate has the first support holes is inserted into the described probe in this first support holes described leading section with supporting, and a surface of the first support plate described in when making this leading section contact with described contact object contacts with this contact object, second support plate, this second support plate has the second support holes is inserted into described probe in this second support holes described base end part with supporting, and is fixed on this battery lead plate with the state abutted against with described battery lead plate, distance piece, this spacer arrangement is between described first support plate and the second support plate and maintain the separated state of each support plate, and clearance adjustment mechanism, under the contactless state that this clearance adjustment mechanism does not contact with a described surface in described contact object, maintain the state having side's generation gap between described distance piece and described first support plate and between described distance piece and described second support plate at least, and under this contact object and this surface contacts and this probe unit is pushed to the pressed state of this contact object, allow this gap shrinks, described support supports described probe, to make no matter to be under described contactless state or under described pressed state, all maintain described base end part to contact with described electrode and not outstanding from the described surface state in described leading section, and until make described leading section contact with described contact object in the process of described gap disappearance under described pressed state.
In addition, probe unit according to claim 2 is in probe unit according to claim 1, described support is constructed to produce described gap between described distance piece and described first support plate, and described distance piece and described second support plate are fixed into not separated state.
In addition, probe unit according to claim 3 is in probe unit according to claim 1, described clearance adjustment mechanism comprises force section and separates limiting unit and form, this force section exerts a force towards making the direction of this gap enlargement relative to the opposing party for either party generation in the described support plate in described gap and described distance piece, the restriction of this separation limiting unit produces between the described support plate in described gap and described distance piece separates more than predetermined distance, described force section and described separation limiting unit are configured at least one party in the described support plate and described distance piece producing described gap.In addition, probe unit according to claim 4 is in probe unit according to claim 2, described clearance adjustment mechanism comprises force section and separates limiting unit and form, this force section exerts a force towards making the direction of this gap enlargement relative to the opposing party for either party generation in the described support plate in described gap and described distance piece, the restriction of this separation limiting unit produces between the described support plate in described gap and described distance piece separates more than predetermined distance, described force section and described separation limiting unit are configured at least one party in the described support plate and described distance piece producing described gap.
In addition, probe unit according to claim 5 is in probe unit according to claim 1, comprise guide portion, when producing the described support plate in gap and described distance piece under described pressed state during relative movement, described support plate and this distance piece guide towards the direction with a described perpendicular by this guide portion.In addition, probe unit according to claim 6 is in probe unit according to claim 2, comprise guide portion, when producing the described support plate in gap and described distance piece under described pressed state during relative movement, described support plate and this distance piece guide towards the direction with a described perpendicular by this guide portion.In addition, probe unit according to claim 7 is in probe unit according to claim 3, comprise guide portion, when producing the described support plate in gap and described distance piece under described pressed state during relative movement, described support plate and this distance piece guide towards the direction with a described perpendicular by this guide portion.In addition, probe unit according to claim 8 is in probe unit according to claim 4, comprise guide portion, when producing the described support plate in gap and described distance piece under described pressed state during relative movement, described support plate and this distance piece guide towards the direction with a described perpendicular by this guide portion.
In addition, base board checking device according to claim 9 comprises: the probe unit described in any one in claim 1 to 8; And inspection portion, the electric signal that this inspection portion inputs according to the described probe of the described probe unit by contacting with the substrate as described detected object, checks this substrate.
Invention effect
In probe unit according to claim 1 and base board checking device according to claim 9, second support plate of base end part of supporting probe is fixed on battery lead plate, no matter is under contactless state or the state that contacts with electrode of the base end part all maintaining probe under pressed state.That is, in this probe unit and base board checking device, the base end part maintaining probe can not the state of movement in the longitudinal direction.Therefore, according to this probe unit and base board checking device, from the base end part of probe under pressed state from the overhang that the second support plate is given prominence to can occur to increase and decrease and base end part relative to the second support plate can the structure of movement in the longitudinal direction different, can reliably avoid, because of the wearing and tearing of the base end part caused by the slip between the edge part of the second support holes in the second support plate and the base end part of probe, consequently can improving the permanance of probe unit fully.In addition, in this probe unit and base board checking device, because the base end part of probe can not move in the longitudinal direction, therefore, it is possible to reliably avoid misplacing between base end part and electrode.And, in this probe unit and base board checking device, due to the slip these two kinds between the edge part of the slip between the edge part of the second support holes in the second support plate and the base end part of probe and the first support holes in the first support holes and the leading section of probe can be avoided to slide, therefore, it is possible to reliably prevent the phenomenon (stacking) cannot getting back to original state from the state making probe bend because these slide from occurring.
In addition, in probe unit according to claim 2 and base board checking device according to claim 9, support is configured to produce gap between distance piece and the first support plate, and distance piece and the second support plate are fixed into not separated state.In this case, because the second support plate is fixed on battery lead plate, therefore in this probe unit and base board checking device, under pressed state, only has the first support plate relative to battery lead plate generation relative movement.On the other hand, be fixed the first support plate and distance piece and producing in the structure in gap between distance piece and the second support plate, both distance piece and the first support plate are moved relative to battery lead plate.Compared with this structure, in this probe unit and base board checking device, the weight of the part be moved under pressed state can be reduced, therefore, it is possible to detect glibly.
In addition, in probe unit described in claim 3,4 and base board checking device according to claim 9, clearance adjustment mechanism comprises force section and separates limiting unit and form, this force section exerts a force towards making the direction of gap enlargement relative to distance piece for the first support plate, this separation limiting unit limits the separation of the first support plate and distance piece, and force section and separation limiting unit are configured at least one party in the support plate and distance piece producing gap.Therefore, according to this probe unit and base board checking device, in order to exchange probe unload lower electrode plate from support time, separate limiting unit and force section, therefore, it is possible to improve the efficiency of the exchanging operation of probe fully without the need to unloading.
In addition, according to the probe unit described in claim 5 to 8 and base board checking device according to claim 9, comprise guide portion, when under pressed state when the first support plate and distance piece relative movement, first support plate and the distance piece direction towards a perpendicular with the first support plate guides by this guide portion, thus the first support plate and the distance piece movement on laterally (direction surperficial along) when can limit detection.Therefore, according to this probe unit and base board checking device, when can reliably prevent the leading section of probe from contacting with contact object, leading section is relative to the dislocation of contact object.
Accompanying drawing explanation
Fig. 1 is the structural drawing of the structure representing base board checking device 1.
Fig. 2 is the vertical view of probe 11.
Fig. 3 is the stereographic map of the structure representing probe unit 2.
Fig. 4 is the exploded perspective view of probe unit 2.
Fig. 5 is the X face cut-open view in Fig. 3.
Fig. 6 is the key diagram of the action that probe unit 2 is described.
Fig. 7 is the cut-open view of probe unit 102.
Fig. 8 is the key diagram of the action that probe unit 102 is described.
Fig. 9 is the cut-open view of probe unit 202.
Figure 10 is the key diagram of the action that probe unit 202 is described.
Embodiment
Below, be described with reference to the embodiment of accompanying drawing to probe unit and base board checking device.
First, the structure of the base board checking device 1 of an example as base board checking device is described.Base board checking device 1 shown in Fig. 1 is as shown in the drawing, comprises probe unit 2, travel mechanism 3, mounting table 4, determination part 5, inspection portion 6, storage part 7 and handling part 8, is configured to check substrate 100.
Probe unit 2 as shown in Figure 3, comprises multiple probe 11 (with reference to Fig. 2, Fig. 5), support 12 and battery lead plate 13 and forms.
Probe 11 contacts for the input and output carrying out electric signal when checking with the conductor portion such as the conductive pattern in substrate 100, as an example, the cross section utilizing the metal material (such as, beallon, SKH (high speed tool steel) and wolfram steel etc.) with electric conductivity to be formed as elastically deformable is circular bar-shaped (with reference to Fig. 2).In addition, the insulation course formed by the coating material with insulativity (as an example, being fluorine-type resin, polyurethane, polyester and polyimide etc.) is formed at the side face of the pars intermedia 22 of probe 11.Therefore, as shown in the drawing, the diameter L2 of pars intermedia 22 is larger than the diameter L1 of the leading section 21 and diameter L3 of base end part 23.That is, to be formed as the diameter of leading section 21 and base end part 23 less than the diameter of pars intermedia 22 for probe 11.
Support 12 as shown in Figure 3, Figure 4, comprises leading section side electrode support 31, base end part side electrode support 32, distance piece 33 and clearance adjustment mechanism 34, is configured to support probe 11.
Leading section side electrode support 31 is components of side, leading section 21 of supporting probe 11, as shown in Fig. 3 ~ Fig. 5, comprises the support plate 41,42 that is equivalent to the first support plate and forms.
Support plate 41 is as an example, and utilization has dielectric resin material and is formed as tabular.In addition, in support plate 41, as shown in Figure 5, multiple (identical with the quantity of the probe 11) support holes 51 (the first support holes) of overlooking as circle is formed.Support holes 51 is the holes for making the leading section 21 of probe 11 insert to support leading section 21, be formed as diameter R1 (with reference to this figure) slightly larger than the diameter L1 (with reference to Fig. 2) of the leading section 21 of probe 11, and the diameter L2 (with reference to this figure) of pars intermedia 22 than probe 11 is slightly little, leading section 21 only can be made to insert, and do not make pars intermedia 22 insert.
In addition, in support plate 41, as shown in Figure 5, two inserting hole 61a (in Fig. 5, only illustrating) that the leading section 35a being formed with the fixed pin 35 (also with reference to Fig. 4) that can be used in fixed support plate 41 and support plate 42 inserts.In addition, in support plate 41, as shown in Figure 5, two inserting hole 61b (in Fig. 5, only illustrating) that the head 71c being formed with the separation limiting unit described later 71 (also with reference to Fig. 4) that can make in clearance adjustment mechanism 34 inserts.In addition, in this probe unit 2, fixed pin 35, separation limiting unit 71 and guiding force section 72 described later have 2 respectively, but respectively illustrate one in Fig. 4.
Support plate 42 utilizes the material (in this example, for have dielectric resin material) identical with support plate 41 to be formed as tabular.In addition, in support plate 42, as shown in Figure 4, Figure 5, multiple (identical with the quantity of the probe 11) support holes 52 (the first support holes) of overlooking as circle is formed.Support holes 52 is the holes for making the leading section 21 of probe 11 insert to support leading section 21, be formed as diameter R2 (with reference to Fig. 5) identical with the diameter R1 (with reference to this figure) of the support holes 51 of support plate 41, leading section 21 only can be made to insert, and do not make pars intermedia 22 insert.
In addition, in support plate 42, as shown in Figure 4, Figure 5, two inserting hole 62a that the head 35b of above-mentioned fixed pin 35 can be made to insert are formed.In addition, in support plate 42, be formed and only make pars intermedia 71b insert and two the inserting hole 62b not making the head 71c of separation limiting unit 71 insert.In addition, in support plate 42, two inserting hole 62c that the plunger 72b being formed with the guiding force section 72 described later that can make in clearance adjustment mechanism 34 inserts.In this case, under the state of inserting plunger 72b in inserting hole 62c, both can slide over each other, and the internal diameter of regulation inserting hole 62c and the external diameter of plunger 72b touch with the outer peripheral face of the inside surface and plunger 72b that make inserting hole 62c.
Base end part side electrode support 32 is components of base end part 23 side of supporting probe 11, as shown in Fig. 3 ~ Fig. 5, comprises the support plate 43,44 that is equivalent to the second support plate and forms.
Support plate 43 is as an example, and utilization has dielectric resin material and is formed as tabular.In addition, in support plate 43, as shown in Figure 5, multiple (identical with the quantity of the probe 11) support holes 53 (the second support holes) of overlooking as circle is formed.Support holes 53 is the holes for making the base end part 23 of probe 11 insert to support base end part 23, is formed as its diameter R3 slightly larger than the diameter L2 (with reference to Fig. 2) of the pars intermedia 22 of probe 11, pars intermedia 22 can be made to insert.In addition, in support plate 43, as shown in Figure 5, be formed can be used in support plate 43,44, two inserting holes 63 (in Fig. 5, only illustrating) of inserting of the fixed pin 36 (also with reference to Fig. 4) that is fixed under the state that mutually abuts of distance piece 33 and battery lead plate 13.
Support plate 44 utilizes the material (in this example, for have dielectric resin material) identical with support plate 43 to be formed as tabular.In addition, in support plate 44, as shown in Figure 4, Figure 5, multiple (identical with the quantity of the probe 11) support holes 54 (the second support holes) of overlooking as circle is formed.Support holes 54 is the holes for making the base end part 23 of probe 11 insert to support base end part 23, is formed as its diameter R4 identical with the diameter R3 of the support holes 53 of support plate 43, and pars intermedia 22 can be made to insert.In addition, in support plate 44, as shown in Figure 4, Figure 5, two inserting holes 64 that above-mentioned fixed pin 36 can be made to insert are formed.
Distance piece 33 as shown in Figure 4, is C font when being formed as overlooking, and as shown in Fig. 3, Fig. 5, is configured in (between support plate 42 and support plate 43) between leading section side electrode support 31 and base end part side electrode support 32.This distance piece 33 has following function: maintain the leading section side electrode support 31 be made up of support plate 41 and support plate 42, the separated state of base end part side electrode support 32 be made up of support plate 43 and support plate 44.
In addition, as shown in Figure 5, the end face of the side, leading section (lower side of this figure) in distance piece 33, two screw holes 65 (in this figure, only illustrating) that the screw division 71a being formed with above-mentioned separation limiting unit 71 can be screwed into.In addition, as shown in the drawing, at the end face of side, leading section, two recesses 66 (in this figure, only illustrating) that the sleeve 72a of guiding force section 72 can be made to insert are formed.In addition, as shown in Figure 4, Figure 5, the end face of the base end part side (upper side in this figure) in distance piece 33, is formed with two inserting holes 67 that above-mentioned fixed pin 36 can be made to insert.
Clearance adjustment mechanism 34 is (following in the state do not contacted with the lower surface 41a (surface) of support plate 41 as the substrate 100 of contact object, also referred to as " contactless state ") under, maintain the state (with reference to Fig. 5) producing clearance G 1 between above-mentioned distance piece 33 and support plate 42, and allow clearance G1's reduces under the state (hereinafter also referred to as " pressed state ") that substrate 100 contacts with the lower surface 41a of support plate 41 and probe unit 2 is pushed to substrate 100.That is, clearance adjustment mechanism 34 has the function adjusted the size of the clearance G 1 between distance piece 33 and support plate 42.Specifically, clearance adjustment mechanism 34 as shown in Figure 4, Figure 5, comprises and separates limiting unit 71 and guide force section 72 and form.
Separate limiting unit 71 and be configured at distance piece 33, as shown in Figure 4, Figure 5, the head 71c of cylindric (discoideus) in the inserting hole 62b of support plate 42 can not be inserted into and form in the inserting hole 61b comprising the screw division 71a of the screw hole 65 that can be screwed into distance piece 33, the columned pars intermedia 71b in the inserting hole 62b of support plate 42 can be inserted into and can be inserted into support plate 41.This separation limiting unit 71 limits support plate 42 and separates more than predetermined distance (being equivalent to the distance of the length of pars intermedia 71b) with distance piece 33, namely limits the clearance G 1 producing more than predetermined size between support plate 42 and distance piece 33.
Guide force section 72 to be the components also playing guide portion effect playing force section effect while, as shown in Figure 5, be configured at distance piece 33, comprise sleeve 72a, plunger 72b and spring 72c and form.Sleeve 72a is formed as bottomed cylindrical, is configured to the base end part of spring 72c and plunger 72b to be contained in inside.In addition, sleeve 72a is supported by distance piece 33 with the state be inserted in the recess 66 of distance piece 33.
Plunger 72b as shown in Figure 5, is formed as cylindric, and the base end part side of plunger 72b is contained in sleeve 72a in the mode that can occur to slide relative to sleeve 72a, increases and decreases from the overhang that sleeve 72a is outstanding to make side, leading section.In addition, the side, leading section of plunger 72b is inserted in the inserting hole 62c of support plate 42, and end face and the support plate 41 of leading section abut against.In this case, as mentioned above, under the state that plunger 72b is inserted in inserting hole 62c, both can slide mutually, and the outer peripheral face of the inside surface and plunger 72b that are configured to inserting hole 62c touches.Therefore, utilize inserting hole 62c and plunger 72b to carry out the location of distance piece 33 and support plate 41,42 (the first support plate).
Spring 72c as shown in Figure 5, is contained in the bottom side in sleeve 72a, exerts a force towards side, leading section for plunger 72b.In this case, in the example of this figure, sleeve 72a and spring 72c is configured to coaxially, but spring 72c and sleeve 72a not necessarily needs for coaxially, and the state that also can slightly misplace is configured.
This guiding force section 72 utilizes the acting force of spring 72c, and the direction that plunger 72b is expanded towards the clearance G 1 between support plate 42 and distance piece 33 for support plate 41,42 exerts a force.In addition, force section 72 is guided to guide support plate 41,42 and distance piece 33, plunger 72b is slided relative to sleeve 72a, the overhang of side, leading section increases and decreases simultaneously, thus under above-mentioned pressed state, along the perpendicular direction of the lower surface 41a (surface) with support plate 41 the tube length direction of sleeve 72a (be both also be the moving direction of plunger 72b), there is relative movement in support plate 41,42 and distance piece 33.
Battery lead plate 13 as shown in Figure 4, Figure 5, is formed as tabular by having dielectric resin material etc.In addition, in battery lead plate 13, as shown in Figure 5, be embedded with and contact with each base end part 23 of each probe 11 respectively and be connected with these electrodes 81 respectively for the cable carried out outside multiple electrodes 81, figure of the input and output of electric signal between determination part 5 (example of external device (ED)).In addition, in battery lead plate 13, as shown in Figure 4, Figure 5, two inserting holes 82 that above-mentioned fixed pin 36 can be made to insert are formed.
In this probe unit 2, as shown in Figure 5, support plate 41,42 (the first support plate) is fixed be fixed pin 35 of the state abutted against each other.In addition, in probe unit 2, under above-mentioned contactless state, the plunger 72b of the guiding force section 72 of clearance adjustment mechanism 34 exerts a force to support plate 41,42, thus maintains the state producing clearance G 1 between distance piece 33 and support plate 42.
In addition, in this probe unit 2, as shown in Fig. 3, Fig. 5, under the state (not producing the state in gap between battery lead plate 13 and support plate 44) that the support plate 44 of battery lead plate 13 and base end part side electrode support 32 abuts against, distance piece 33, support plate 43,44 and battery lead plate 13 pin 36 that is fixed is fixed.
In addition, in this probe unit 2, as shown in Figure 5, Figure 6, no matter be under contactless state or under pressed state, the electrode 81 of the base end part 23 and battery lead plate 13 that all maintain probe 11 contact and leading section 21 not from the state that the lower surface 41a of support plate 41 is outstanding.In addition, as shown in Figure 6, be configured in the process that the clearance G 1 under pressed state until between support plate 42 and distance piece 33 disappears, the leading section 21 of probe 11 all contacts with substrate 100.
As mentioned above, in this probe unit 2, no matter be under contactless state or under pressed state, the base end part 23 of probe 11 all contacts with the electrode 81 of battery lead plate 13.That is, the base end part 23 maintaining probe 11 can not move the state of (position of the length direction of base end part 23 does not change) in the longitudinal direction.Therefore, this probe unit 2 also can be avoided along with base end part 23 moves in the longitudinal direction and cause the direction on the surface along support plate 44 to be moved (lateral runout).Thus, in order to suppress lateral runout, without the need to using the probe 11 of high cost insulation course being formed to base end part 23, and the probe 11 of usual (low cost) base end part 23 not being formed insulation course can be used in.Consequently, this probe unit 2 can reduce manufacturing cost.
In addition, in this probe unit 2, as shown in Figure 5, being centrally located on the virtual line that tilts relative to each support plate 41 ~ 44 of opening surface of the support holes 51 ~ 54 in support plate 41 ~ 44.Therefore, be inserted into probe 11 in each support holes 51 ~ 54 under the contactless state shown in Fig. 5, be maintained and extend and the posture tilted relative to each support plate 41 ~ 44 along virtual line.
In addition, in this probe unit 2, under the pressed state that clearance G 1 reduces, as shown in Figure 6, the pars intermedia 22 of probe 11 can bend, bending degree is corresponding with the degree of the Distance Shortened between support plate 42 to support plate 43, due to the elastic force of probe 11 now produced, leading section 21 is reliably contacted with substrate 100.
Travel mechanism 3, under the control of handling part 8, performs detection and moves towards close direction and the direction left relative to mounting table 4 (placing is in the substrate 100 of mounting table 4) to make probe unit 2.Mounting table 4 is configured to energy placing substrate 100, and is configured to the substrate 100 fixing institute's placing.Determination part 5, according to the electric signal by probe 11 input and output, performs the mensuration process measuring physical quantity (such as, resistance value).
Inspection portion 6, under the control of handling part 8, performs check processing with the physical quantity measured according to determination part 5 and resistance value, checks substrate 100 whether good (conductor portion is with or without open circuit, short circuit).The resistance value measured by determination part 5, the check result etc. of being undertaken by inspection portion 6, under the control of handling part 8, temporarily store by storage part 7.Handling part 8 controls each portion forming base board checking device 1.
Next, be described with reference to the action of accompanying drawing to the substrate inspecting method and now each portion that use base board checking device 1 to carry out the inspection of substrate 100.
First, the probe unit 2 under leading section side electrode support 31 state is down fixed in travel mechanism 3 (with reference to Fig. 1).Then, placing substrate 100 on the putting surface of mounting table 4, then, utilizes the setting tool outside figure to be fixed on mounting table 4 by substrate 100.Then, base board checking device 1 is made to carry out action.Now, handling part 8 controls travel mechanism 3, makes probe unit 2 relative to substrate 100 (putting surface of mounting table 4) towards close direction (downward in Fig. 1) decline (movement) (performing detection).
In this case, in the probe unit 2 of this state (contactless state), as shown in Figure 5, the electrode 81 of the base end part 23 and battery lead plate 13 that maintain probe 11 contact and leading section 21 not from the state that the lower surface 41a of support plate 41 is outstanding.In addition, in the probe unit 2 of this state, as shown in the drawing, the plunger 72b of the guiding force section 72 of clearance adjustment mechanism 34 exerts a force to support plate 41,42, produces clearance G 1 between distance piece 33 and support plate 42.
Then, when probe unit 2 have dropped predetermined amount of movement, the lower surface 41a of the support plate 41 of the leading section side electrode support 31 of support 12 contacts with substrate 100.Then, by utilizing travel mechanism 3 to make probe unit 2 decline further, thus probe unit 2 presses towards substrate 100.In the probe unit 2 of this state (pressed state), also identical with above-mentioned contactless state, the electrode 81 of the base end part 23 and battery lead plate 13 that maintain probe 11 contact and leading section 21 not from the state that the lower surface 41a of support plate 41 is outstanding.
On the other hand, along with the decline of probe unit 2, due to the reacting force of the pressing force of probe unit 2 pairs of substrates 100, support plate 41,42 overcomes the acting force of guiding force section 72 and moves towards near the direction (upwards) of distance piece 33.In addition, clearance G 1 reduces thereupon gradually, and in the process that clearance G 1 reduces (until in process of clearance G 1 disappearance), the leading section 21 of probe 11 all contacts with substrate 100.In addition, as shown in Figure 6, because the pars intermedia 22 of probe 11 can bend, and bending degree is corresponding with the degree of the Distance Shortened between support plate 42 to support plate 43, and therefore leading section 21 reliably can contact with substrate 100 due to the elastic force because of the bending probe 11 produced.
Here, in this probe unit 2, as mentioned above, no matter be under contactless state or under pressed state, the base end part 23 of probe 11 all contacts with the electrode 81 of battery lead plate 13.That is, the base end part 23 maintaining probe 11 can not move the state of (position of the length direction of base end part 23 does not change) in the longitudinal direction.Therefore, in this probe unit 2, the overhang of giving prominence to from support plate 44 with the base end part 23 of probe when detecting 11 can increase and decrease (, the base end part 23 of probe 11 can relative movement in the longitudinal direction relative to support plate 44) structure different, reliably can avoid the wearing and tearing because of the base end part 23 caused by the slip between the edge part of support holes 54 and the base end part 23 of probe 11.In addition, in this probe unit 2, because the base end part 23 of probe 11 does not move in the longitudinal direction, therefore, it is possible to reliably avoid misplacing between base end part 23 and electrode 81.
Then, handling part 8 controls travel mechanism 3, and the decline of probe unit 2 is stopped, and then, controls determination part 5, performs and measure process.In this mensuration process, determination part 5 measures the resistance value as physical quantity according to the electric signal by the input and output of each probe 11.
Then, handling part 8 controls inspection portion 6 to perform check processing.In this check processing, inspection portion 6, according to the resistance value measured by determination part 5, checks whether conductor portion exists open circuit and short circuit.Then, check result is presented on the display part outside figure by handling part 8.
Then, handling part 8 controls travel mechanism 3, makes probe unit 2 increase.Now, owing to guiding 72 pairs, force section support plate 41,42 (direction that clearance G 1 expands) force downwards, therefore under the state keeping the lower surface 41a of support plate 41 to contact with substrate 100, support plate 43,44, distance piece 33 and battery lead plate 13 start to rise, clearance G 1 expands gradually thereupon.
Then, when support plate 43,44, distance piece 33 and battery lead plate 13 rise (clearance G 1 expands) abut against to the head 71c and support plate 42 that separate limiting unit 71 time, utilize and separate limiting unit 71 and limit the further expansion of clearance G 1, support plate 41,42 and support plate 43,44, distance piece 33 rises together with battery lead plate 13.
Then, when probe unit 2 rises to initial position, handling part 8 controls travel mechanism 3, and the rising of probe unit 2 is stopped.As mentioned above, the inspection of substrate 100 terminates.Then, when checking new substrate 100, new substrate 100 placing being fixed on mounting table 4, then, making base board checking device 1 carry out action.Now, handling part 8 performs above-mentioned each process.
On the other hand, when a part for the probe 11 being configured at probe unit 2 is damaged, probe 11 is exchanged as follows.First, probe unit 2 is unloaded from travel mechanism 3.Then, extract to support plate 43,44, the fixed pin 36 that is fixed of distance piece 33 and battery lead plate 13, unload lower electrode plate 13 from support 12 (support plate 44).Then, catch the base end part 23 of the probe 11 of damage, it is extracted from support 12.Then, insert new probe 11 from the support holes 54 of support plate 44, be inserted in the support holes 53 of support plate 43, then, leading section 21 is inserted in the support holes 52 of support plate 42.
In this case, in this probe unit 2, separate limiting unit 71 and guide force section 72 (forming their each inscape) to be configured at distance piece 33.Therefore, in order to exchange probe 11 unload lower electrode plate 13 from support 12 time, separate limiting unit 71 without the need to unloading and guide force section 72, therefore, it is possible to improve the efficiency of the exchanging operation of probe 11 fully.
Then, battery lead plate 13 is arranged on support 12, then, probe unit 2 is arranged in travel mechanism 3.As mentioned above, the exchanging operation of probe 11 terminates.
Thus, in this probe unit 2 and base board checking device 1, the support plate 43,44 of base end part 23 of supporting probe 11 is fixed on battery lead plate 13, no matter is under contactless state or the state that contacts with electrode 81 of the base end part 23 all maintaining probe 11 under pressed state.That is, in this probe unit 2 and base board checking device 1, the base end part 23 maintaining probe 11 can not the state of movement in the longitudinal direction.Therefore, according to this probe unit 2 and base board checking device 1, can occur increase and decrease and base end part 23 structure of understanding movement in the longitudinal direction relative to support plate 44 is different from the overhang that support plate 44 is outstanding from the base end part 23 of probe 11 under pressed state, can reliably avoid, because of the wearing and tearing of the base end part 23 caused by the slip between the edge part of the support holes 54 in support plate 44 and the base end part 23 of probe 11, consequently can improving the permanance of probe unit 2 fully.In addition, in this probe unit 2 and base board checking device 1, because the base end part 23 of probe 11 does not move in the longitudinal direction, therefore, it is possible to reliably avoid misplacing between base end part 23 and electrode 81.And, in this probe unit 2 and base board checking device 1, due to the slip these two kinds between the edge part of the slip between the edge part of the support holes 54 in support plate 44 and the base end part 23 of probe 11 and the support holes 52 in support plate 42 and the leading section 21 of probe 11 can be avoided to slide, therefore, it is possible to reliably prevent to occur from the phenomenon (stacking) making the bending state of probe 11 get back to original state because these slide.
In addition, in this probe unit 2 and base board checking device 1, support 12 is constructed to produce clearance G 1 between distance piece 33 and support plate 42, and distance piece 33 and support plate 43,44 are fixed into not separated state.In this case, because support plate 43,44 is fixed on battery lead plate 13, therefore in this probe unit 2 and base board checking device 1, under pressed state, only have support plate 41,42 relative to battery lead plate 13, relative movement can occur.On the other hand, be fixed support plate 41,42 and distance piece 33 and producing in the structure of clearance G 1 between distance piece 33 and support plate 43, distance piece 33 and support plate 41,42 all can be moved relative to battery lead plate 13.Compared with this structure, in this probe unit 2 and base board checking device 1, the weight of the part that can be moved under pressed state can be reduced, therefore, it is possible to detect glibly.
In addition, in this probe unit 2 and base board checking device 1, clearance adjustment mechanism 34 is formed by guiding force section 72 and separation limiting unit 71, this guiding force section 72 exerts a force towards the direction making clearance G 1 expand relative to distance piece 33 for support plate 41,42, this separation limiting unit 71 limits the separation between support plate 41,42 and distance piece 33, guides force section 72 and separate limiting unit 71 to be configured at distance piece 33.Therefore, according to this probe unit 2 and base board checking device 1, in order to exchange probe 11 unload lower electrode plate 13 from support 12 time, separate limiting unit 71 without the need to unloading and guide force section 72, therefore, it is possible to improve the efficiency of the exchanging operation of probe 11 fully.
In addition, according to this probe unit 2 and base board checking device 1, comprise and guide force section 72, support plate 41,42 and distance piece 33 guide towards the direction that the lower surface 41a with support plate 41 is perpendicular when pressed state lower support plate 41,42 and distance piece 33 relative movement by this guiding force section 72, thus the movement on laterally (direction along lower surface 41a) of support plate 41,42 when can limit detection and distance piece 33.Therefore, according to this probe unit 2 and base board checking device 1, when can reliably prevent the leading section 21 of probe 11 from contacting with substrate 100, leading section 21 is relative to the dislocation of substrate 100.
In addition, base board checking device and substrate inspecting method are not limited to said structure and method.Such as, the probe unit 102 shown in Fig. 7, Fig. 8 can also be adopted.In addition, in the following description, for the textural element with the function identical with above-mentioned probe unit 2, mark identical label, and the repetitive description thereof will be omitted.This probe unit 102, as shown in two figure, comprises support 112 and battery lead plate 113 to replace above-mentioned support 12 and battery lead plate 13 and to be formed.
Support 112 as shown in Figure 7, comprises the leading section side electrode support 131 of the support plate 141,142 had as the first support plate, has and form as the base end part side electrode support 132 of the support plate 143,144 of the second support plate and distance piece 133.
In this support 112, as shown in Figure 7, under distance piece 133 and support plate 141,142 do not have separated state, distance piece 133 and support plate 141,142 utilize fixed pin 135 to be fixed.In addition, under the state that battery lead plate 113 and support plate 144 abut against, support plate 143,144 and battery lead plate 113 utilize fixed pin 136 to be fixed.And, in this support 112, be configured to produce clearance G 2 between distance piece 133 and support plate 143.
In addition, support 112 comprises the clearance adjustment mechanism 34 of separation the limiting unit 71 and guiding force section 72 having and be configured at distance piece 133 and forms.In this case, under the contactless state that clearance adjustment mechanism 34 does not contact with the lower surface 141a (surface) of support plate 141 at substrate 100, maintain the state producing clearance G 2 between distance piece 133 and support plate 143, and as shown in Figure 8, under the pressed state that substrate 100 contacts with the lower surface 141a of support plate 141 and probe unit 102 presses towards substrate 100, allow clearance G2 reduces.
Specifically, clearance adjustment mechanism 34 as shown in Figure 7, separation limiting unit 71 limits between support plate 143 and distance piece 133 separates more than predetermined distance, and the direction guiding force section 72 to expand towards the clearance G 2 between support plate 143 and distance piece 133 for support plate 143,144 exerts a force.In addition, force section 72 is guided to guide support plate 143,144 and distance piece 133, to make under pressed state, there is relative movement along the direction that the lower surface 141a (surface) with support plate 141 is perpendicular in support plate 143,144 and distance piece 133.
In this probe unit 102, the support plate 143,144 of base end part 23 of supporting probe 11 is also fixed on battery lead plate 113, no matter is under contactless state or the state that contacts of the electrode 181 of the base end part 23 and battery lead plate 113 that also all maintain probe 11 under pressed state.That is, this probe unit 102 and the base board checking device that comprises probe unit 102 also maintain the base end part 23 of probe 11 can not the state of movement in the longitudinal direction.Therefore, according to this probe unit 102 and base board checking device, can occur increase and decrease and base end part 23 structure of understanding movement in the longitudinal direction relative to support plate 144 is different from the overhang that support plate 144 is outstanding from the base end part 23 of probe 11 under pressed state, can reliably avoid, because of the wearing and tearing of the base end part 23 caused by the slip between the edge part of the support holes 54 in support plate 44 and the base end part 23 of probe 11, consequently can improving the permanance of probe unit 102 fully.In addition, in this probe unit 102 and base board checking device 1, because the base end part 23 of probe 11 can not move in the longitudinal direction, therefore, it is possible to reliably avoid misplacing between base end part 23 and electrode 181.
In addition, the probe unit 202 shown in Fig. 9, Figure 10 can also be adopted.In addition, in the following description, for having the textural element with above-mentioned probe unit 2,102 identical functions, mark identical label, and the repetitive description thereof will be omitted.This probe unit 202, as shown in two figure, comprises support 212 and battery lead plate 213 to replace above-mentioned support 12,112 and battery lead plate 13,113 and to be formed.
Support 212 as shown in Figure 9, comprises the leading section side electrode support 231 of the support plate 241,242 had as the first support plate, has and form as the base end part side electrode support 232 of the support plate 243,244 of the second support plate and distance piece 233.
In this support 212, as shown in Figure 9, under distance piece 233 with the not separated state of support plate 241,242, distance piece 233 and support plate 241,242 utilize fixed pin 235 to be fixed.In addition, under the state that battery lead plate 213 and support plate 244 abut against, support plate 243,244 and battery lead plate 213 utilize fixed pin 236 to be fixed.And, in this support 212, be configured to produce clearance G 2 between distance piece 233 and support plate 243.
In addition, support 212 comprises clearance adjustment mechanism 34 and forms, and this clearance adjustment mechanism 34 has the separation limiting unit 71 that is configured at distance piece 233 and is configured in battery lead plate 213 and the guiding force section 72 between base end part side electrode support 232 and distance piece 233.In this case, under the contactless state that clearance adjustment mechanism 34 does not contact with the lower surface 241a (surface) of support plate 241 at substrate 100, maintain the state producing clearance G 2 between distance piece 233 and support plate 243, and as shown in Figure 10, under the pressed state that substrate 100 contacts with the lower surface 241a of support plate 241 and probe unit 202 presses towards substrate 100, allow clearance G2 reduces.
Specifically, clearance adjustment mechanism 34 as shown in Figure 9, separation limiting unit 71 limits between support plate 243 and distance piece 233 separates more than predetermined distance, and the direction guiding force section 72 to expand towards the clearance G 2 between support plate 243 and distance piece 233 for distance piece 233 exerts a force.In addition, force section 72 is guided to guide support plate 243,244 and distance piece 233, to make under pressed state, there is relative movement along the direction that the lower surface 141a (surface) with support plate 241 is perpendicular in support plate 243,244 and distance piece 233.
In this probe unit 202, the support plate 243,244 of base end part 23 of supporting probe 11 is also fixed on battery lead plate 213, no matter is under contactless state or the state that contacts of the electrode 281 of the base end part 23 and battery lead plate 213 that also all maintain probe 11 under pressed state.That is, this probe unit 202 and the base board checking device that comprises probe unit 202 also maintain the base end part 23 of probe 11 can not the state of movement in the longitudinal direction.Therefore, according to this probe unit 202 and base board checking device, can occur increase and decrease and base end part 23 structure of understanding movement in the longitudinal direction relative to support plate 244 is different from the overhang that support plate 244 is outstanding from the base end part 23 of probe 11 under pressed state, can reliably avoid, because of the wearing and tearing of the base end part 23 caused by the slip between the edge part of the support holes 54 in support plate 244 and the base end part 23 of probe 11, consequently can improving the permanance of probe unit 202 fully.In addition, in this probe unit 202 and base board checking device 1, because the base end part 23 of probe 11 can not move in the longitudinal direction, therefore, it is possible to reliably avoid misplacing between base end part 23 and electrode 281.
In addition, also can adopt the probe unit comprised as Lower bearing portions, this support is configured to all produce gap between distance piece and the first support plate and between distance piece and the second support plate under contactless state, to replace above-mentioned support 12,112,212.In this structure, also the second support plate of the base end part 23 of supporting probe 11 is fixed on battery lead plate, no matter be under contactless state or the state that contacts with the electrode of battery lead plate of the base end part 23 also all maintaining probe 11 under pressed state, thus can realize with above-mentioned probe unit 2,102,202 identical effects.
In addition, above regard to the structure example comprised as the two panels support plate 41,42 of the first support plate and be illustrated, but also can adopt the structure only comprising a slice first support plate or comprise more than three the first support plates.In addition, above regard to the structure example comprised as the two panels support plate 43,44 of the second support plate and be illustrated, but also can adopt the structure only comprising a slice second support plate or comprise more than three the second support plates.
In addition, on regard to the opening surface being configured to each support holes 51 ~ 54 (the first support holes and the second support holes) the example be centrally located on the virtual line that tilts relative to each support plate 41 ~ 44 be illustrated, but also can be configured to being centrally located on the straight line perpendicular with each support plate 41 ~ 44 of the opening surface of each support holes 51 ~ 54.In addition, also can be configured to being centrally located on the straight line perpendicular with each support plate 41 ~ 44 of opening surface of the first support holes of the leading section 21 of supporting probe 11, and support being centrally located on the virtual line that tilts relative to each support plate 41 ~ 44 of the opening surface of the second support holes of the base end part 23 of probe 11.In this case, when adopting the structure only comprising a slice first support plate or the structure only comprising a slice second support plate, the first support holes tilted relative to the first support plate can be formed, or form the second support holes tilted relative to the second support plate.
In addition, following structure can be adopted: use the distance piece of the arbitrary shape such as rectangular-shaped, cylindric to replace the distance piece 33 overlooked as C font.
In addition, above regard to and use the example with the guiding force section 72 of both guide portion and force section function to be illustrated, but also can adopt the structure being provided separately guide portion and force section.
In addition, in above-mentioned example, as Fig. 6, Fig. 8, shown in Figure 10, make probe unit 2, 102, 202 decline until clearance G 1, till G2 disappears (till support plate 42 contacts with distance piece 33, or till support plate 142 contacts with distance piece 133, or till support plate 242 contacts with distance piece 233), but also can in generation clearance G 1, under the state of G2 (before support plate 42 contacts with distance piece 33, or before support plate 142 contacts with distance piece 133, or before support plate 242 contacts with distance piece 233) leading section 21 of probe 11 is when contacting with substrate 100, probe unit 2 is made in this moment, 102, the decline of 202 stops.
In addition, in above-mentioned probe unit 2, by separation limiting unit 71 with guide force section 72 to be configured at distance piece 33, but also one or both in them can be configured at support plate 41,42 (producing the example of at least one party in the support plate in gap and distance piece).In addition, one or both separation in limiting unit 71 and guiding force section 72 can be configured at distance piece 33, and also be configured at support plate 41,42.In addition, identical therewith, also can by the separation limiting unit 71 being configured at distance piece 33 in probe unit 102 and guide in force section 72 one or both be configured at support plate 143,144 (producing an example of at least one party in the support plate in gap and distance piece), also one or both separation in limiting unit 71 and guiding force section 72 can be configured at distance piece 133, and also be configured at support plate 143,144.
Label declaration
1 base board checking device
2,102,202 probe units
6 inspection portions
11 probes
12,112,212 supports
13,113,213 battery lead plates
21 leading sections
23 base end parts
33,133,233 distance pieces
34,134,234 clearance adjustment mechanisms
41,42,141,142,241,242 support plates
41a, 141a, 241a lower surface
43,44,143,144,243,244 support plates
51,52 support holes
53,54 support holes
71 separate limiting unit
72 guide force section
81,181,282 electrodes
100 substrates
G1, G2 gap
Claims (9)
1. a probe unit, comprising: multiple probe, and the leading section of the plurality of probe is contacted with contact object for the input and output carrying out electric signal; Support, this support supports each probe; And battery lead plate, this battery lead plate has and contacts respectively for multiple electrodes of the input and output carrying out described electric signal between external device (ED) with each base end part of described each probe, it is characterized in that,
Described support comprises:
First support plate, this first support plate has the first support holes is inserted into the described probe in this first support holes described leading section with supporting, and a surface of the first support plate described in when making this leading section contact with described contact object contacts with this contact object;
Second support plate, this second support plate has the second support holes is inserted into described probe in this second support holes described base end part with supporting, and is fixed on this battery lead plate with the state abutted against with described battery lead plate;
Distance piece, this spacer arrangement is between described first support plate and the second support plate and maintain the separated state of each support plate; And
Clearance adjustment mechanism, under the contactless state that this clearance adjustment mechanism does not contact with a described surface in described contact object, maintain the state having side's generation gap between described distance piece and described first support plate and between described distance piece and described second support plate at least, and to contact on this contact object and this surface and this probe unit allows this gap shrinks under being pushed to the pressed state of this contact object
Described support supports described probe to make no matter to be under described contactless state or under described pressed state, all maintain described base end part to contact with described electrode and not outstanding from the described surface state in described leading section, and under described pressed state until described in the process that disappears of described gap, leading section contacts with described contact object.
2. probe unit as claimed in claim 1, is characterized in that,
Described support is configured to produce described gap between described distance piece and described first support plate, and described distance piece and described second support plate are fixed into not separated state.
3. probe unit as claimed in claim 1, is characterized in that,
Described clearance adjustment mechanism comprises force section and separates limiting unit, this force section exerts a force towards making the direction of this gap enlargement relative to the opposing party for either party generation in the described support plate in described gap and described distance piece, the restriction of this separation limiting unit produces between the described support plate in described gap and described distance piece separates more than predetermined distance
Described force section and described separation limiting unit are configured at least one party in the described support plate and described distance piece producing described gap.
4. probe unit as claimed in claim 2, is characterized in that,
Described clearance adjustment mechanism comprises force section and separates limiting unit, this force section exerts a force towards making the direction of this gap enlargement relative to the opposing party for either party generation in the described support plate in described gap and described distance piece, the restriction of this separation limiting unit produces between the described support plate in described gap and described distance piece separates more than predetermined distance
Described force section and described separation limiting unit are configured at least one party in the described support plate and described distance piece producing described gap.
5. probe unit as claimed in claim 1, is characterized in that,
Comprise guide portion, when producing the described support plate in gap and described distance piece under described pressed state during relative movement, described support plate and this distance piece guide towards the direction with a described perpendicular by this guide portion.
6. probe unit as claimed in claim 2, is characterized in that,
Comprise guide portion, when producing the described support plate in gap and described distance piece under described pressed state during relative movement, described support plate and this distance piece guide towards the direction with a described perpendicular by this guide portion.
7. probe unit as claimed in claim 3, is characterized in that,
Comprise guide portion, when producing the described support plate in gap and described distance piece under described pressed state during relative movement, described support plate and this distance piece guide towards the direction with a described perpendicular by this guide portion.
8. probe unit as claimed in claim 4, is characterized in that,
Comprise guide portion, when producing the described support plate in gap and described distance piece under described pressed state during relative movement, described support plate and this distance piece guide towards the direction with a described perpendicular by this guide portion.
9. a base board checking device, comprising:
Probe unit described in any one in claim 1 to 8; And
Inspection portion, the electric signal that this inspection portion inputs according to the described probe of the described probe unit by contacting with the substrate as described detected object, checks this substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-147223 | 2013-07-16 | ||
| JP2013147223A JP2015021726A (en) | 2013-07-16 | 2013-07-16 | Probe unit and substrate inspection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104297535A true CN104297535A (en) | 2015-01-21 |
Family
ID=52317345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410206001.1A Pending CN104297535A (en) | 2013-07-16 | 2014-05-15 | Probe unit and substrate inspection device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2015021726A (en) |
| KR (1) | KR20150009427A (en) |
| CN (1) | CN104297535A (en) |
| TW (1) | TWI591344B (en) |
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| CN105988027A (en) * | 2015-03-23 | 2016-10-05 | 风琴针株式会社 | Jig for linear probes |
| CN108982933A (en) * | 2018-08-07 | 2018-12-11 | 深圳市芽庄电子有限公司 | Printed circuit board test fixture |
| CN110133335A (en) * | 2018-02-09 | 2019-08-16 | 日置电机株式会社 | Probe, probe unit and check device |
| CN110389243A (en) * | 2018-04-18 | 2019-10-29 | 中华精测科技股份有限公司 | Probe card device and its rectangular probe |
| CN110716072A (en) * | 2018-07-13 | 2020-01-21 | 日本电产理德股份有限公司 | Probe, inspection tool, and inspection device |
| CN113015913A (en) * | 2018-12-21 | 2021-06-22 | 株式会社友华 | Inspection jig support, and inspection jig |
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| JP6559470B2 (en) * | 2015-06-02 | 2019-08-14 | 日置電機株式会社 | Probe unit and measuring device |
| JP6495121B2 (en) * | 2015-07-01 | 2019-04-03 | 日置電機株式会社 | Probe unit and inspection device |
| JP6615680B2 (en) * | 2016-04-08 | 2019-12-04 | 株式会社日本マイクロニクス | Probe card |
| JP6768411B2 (en) * | 2016-08-26 | 2020-10-14 | 日置電機株式会社 | Board inspection equipment |
| CN110573889B (en) * | 2017-04-27 | 2022-04-05 | 日本电产理德股份有限公司 | Inspection jig and substrate inspection apparatus |
| KR102002702B1 (en) * | 2017-11-09 | 2019-07-22 | 이영희 | Probe card |
| CN109557438B (en) * | 2018-12-14 | 2024-02-27 | 北京天智航医疗科技股份有限公司 | Probe error detection device |
| JP7271283B2 (en) * | 2019-04-16 | 2023-05-11 | 株式会社日本マイクロニクス | Inspection connection device |
| KR20230152314A (en) * | 2022-04-27 | 2023-11-03 | (주)티에스이 | Probe head with adjustable protrusion length of probe |
| KR102475883B1 (en) * | 2022-11-09 | 2022-12-08 | 윌테크놀러지(주) | Needle block with variable spacer for adjusting the length of needle tip |
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| CN105988027B (en) * | 2015-03-23 | 2020-02-21 | 风琴针株式会社 | Jig for linear probe |
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| CN110389243A (en) * | 2018-04-18 | 2019-10-29 | 中华精测科技股份有限公司 | Probe card device and its rectangular probe |
| CN110389243B (en) * | 2018-04-18 | 2022-05-06 | 台湾中华精测科技股份有限公司 | Probe card device |
| CN110716072A (en) * | 2018-07-13 | 2020-01-21 | 日本电产理德股份有限公司 | Probe, inspection tool, and inspection device |
| CN108982933A (en) * | 2018-08-07 | 2018-12-11 | 深圳市芽庄电子有限公司 | Printed circuit board test fixture |
| CN113015913A (en) * | 2018-12-21 | 2021-06-22 | 株式会社友华 | Inspection jig support, and inspection jig |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI591344B (en) | 2017-07-11 |
| JP2015021726A (en) | 2015-02-02 |
| KR20150009427A (en) | 2015-01-26 |
| TW201512663A (en) | 2015-04-01 |
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Application publication date: 20150121 |