JP2008249460A - Inspection tool equipped with probe - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection tool equipped with a probe having no dispersion of the length of a tip side of the probe 34 projecting from the second housing on the inspection object side, having no dispersion of abutting force when the tip is allowed to abut thereon, and having few manufacturing processes. <P>SOLUTION: Flat probe holes 22, 24 are bored respectively on a straight line tilted a little obliquely from an interval direction on first and second housings 18, 20 disposed in parallel at an interval. A probe 34 manufactured by being punched from a conductive metal plate is inserted into the probe holes 22, 24 of the first and second housings 18, 20 from the first housing 18 side with an attitude regulated by flatness, and the tip side is projected to the outside from the second housing 20 at a step part 36 on the tip side of the probe 34, and insertion is regulated in the state where the rear end side is a little projected to the outside from the first housing 18. A connection substrate 26 is laminated and disposed on the outside of the first housing 18, to thereby bend the probe 34 in the plate thickness direction. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an inspection jig provided with a probe for inspecting the electrical characteristics of an inspection object by bringing the tip of the probe into contact with the inspection object.

As shown in Japanese Patent No. 3505495, a probe in a conventional inspection jig equipped with a probe is formed by cutting a conductive wire into an appropriate length, sharpening one end, and surrounding the axial intermediate portion. Insulating material is coated.
Japanese Patent No. 3505495

  An example of a conventional inspection jig provided with such a probe will be briefly described with reference to FIG. FIG. 6 is a diagram illustrating a manufacturing process of an example of a conventional inspection jig provided with a probe. The long conductive wire shown in FIG. 6 (a) is cut into an appropriate length as shown in FIG. 6 (b), and the tip 10a is sharpened and the rear end 10b is shown in FIG. 6 (c). The conductor 10 is formed by rounding. Then, an insulating material 12 is coated on the intermediate portion in the axial direction of the conductor 10 as shown in FIG. 6D to form a probe 14. Here, due to the coating thickness of the insulating material 12, a stepped portion 16 having a narrow tip side is formed due to the difference in outer diameter between the portion not coated on the tip side and the coated portion on the middle side. As shown in FIG. 6E, the probe 14 having such a configuration is arranged in the gap direction between the first housing 18 on the side of the connection board and the second housing 20 on the side of the object to be inspected which are arranged in parallel with a gap. Are inserted from the first housing 18 side into the probe holes 22 and 24 respectively drilled on a straight line inclined slightly. The step portion 16 formed at the distal end portion of the probe 14 is set so as not to be able to pass through the probe hole 24 drilled in the second housing 20, so that the probe 14 moves its distal end from the second housing 20. Insertion is restricted with the rear end protruding slightly outward from the first housing 18 by protruding outward. Further, as shown in FIG. 6 (f), the connection board 26 is laminated on the outside of the first housing 18. Then, the portion of the probe 14 that protrudes slightly at the rear end is pushed into the first housing 18 and is bent slightly. Here, since the probe 14 is inserted into the first housing 18 and the second housing 20 in a direction slightly inclined with respect to the interval direction, bending also occurs in this inclined direction. Accordingly, the multiple probes 14, 14... Are all bent in the same direction. When the tips of the probes 14, 14 ... are brought into contact with the object to be inspected, the probes 14, 14 ... are further bent, but the deflections are in the same direction so that the probes 14, 14 ... contact each other. There is nothing. Note that the probes 14, 14... Are installed at intervals of a pitch of 0.1 mm as an example.

  In the structure of the conventional inspection jig having the probe as described above, the length for cutting the wire, the variation in the processing accuracy of the front end 10a and the rear end 10b, and the position where the insulating material 12 is coated on the conductor 10 There is a possibility that the length of the front end side of the conductor 10 protruding from the second housing 20 may vary due to the variation of the above. Further, there is a possibility that the bending between the first and second housings 18 and 20 may vary. Therefore, when the tip 10a of the conductor 10 is brought into contact with the object to be inspected, there is a possibility that the force with which the tip 10a comes into contact with the object to be inspected varies. Furthermore, in the above conventional structure, the manufacturing of the probe 14 requires cutting of the wire, processing of both ends, coating of the insulating material, and three steps, and the manufacturing cost must be high.

  The present invention has been made in view of the circumstances of the structure of a conventional inspection jig provided with a probe as described above, and there is no variation in the length of the front end side of the conductor protruding from the housing, and the object to be inspected is An object of the present invention is to provide an inspection jig provided with a probe in which the contact force does not vary when the tip of the conductor is brought into contact, and the number of manufacturing steps is small.

  In order to achieve such an object, an inspection jig provided with the probe of the present invention has a first housing on the connection board side and a second housing on the inspection object side arranged in parallel with a gap therebetween, A probe hole is formed in each of the first and second housings on a straight line that is slightly inclined from the interval direction, and at least one of the probe holes is flattened in a direction that is inclined obliquely. The probe manufactured by punching from the plate is inserted from the first housing side into the probe hole of the first and second housings with the flat hole restricted in its posture, and on the distal end side of the probe. The step is provided so that the tip protrudes outward from the second housing and the rear end slightly protrudes outward from the first housing to restrict further insertion. And, wherein the first of said probe by stacking disposing the connecting board on the outside of the housing is configured to flex in its thickness direction.

  Then, the probe is manufactured by punching from a material in which at least one surface of the conductive metal plate is provided with a portion where the insulating material is not coated and a portion where the insulating material is not coated, so that the tip portion becomes the non-coated portion, and the insulating material is not coated. You may comprise so that the said level | step-difference part may be formed with the difference in the thickness of the thickness direction of the part made into the part.

  Further, the probe may be manufactured by punching from a conductive metal plate, and the stepped portion may be formed at the distal end portion by a difference in the width direction in which the width on the distal end side is narrow.

  Further, the first and second housings may be configured by laminating and arranging a plurality of plate members each having a probe hole formed therein by sequentially shifting in the obliquely inclined direction.

  The inspection jig having the probe according to claim 1 is manufactured by punching the probe from the conductive metal plate, so that the number of manufacturing steps is small. Since at least one of the probe holes drilled in the first and second housings is flattened, the posture in which the probe is inserted is restricted. Moreover, since the step is provided on the distal end side of the probe to restrict insertion, the length of the distal end side of the probe protruding outward from the second housing is constant. In addition, due to the restriction of insertion by the stepped portion, the length that the rear end protrudes slightly outward from the first housing becomes constant, and the connection board is disposed on the outside of the first housing so that the probe is arranged in the plate thickness direction. When bent, the bending becomes constant. Therefore, when the tip of the probe is brought into contact with the object to be inspected, the contact force does not vary.

  In the inspection jig provided with the probe according to claim 2, the probe is made of a material in which at least one surface of the conductive metal plate is provided with a portion where the insulating material is not coated and a portion where the tip portion is not coated. This is suitable for mass production using a punching die.

  In the inspection jig provided with the probe according to claim 3, the probe is manufactured by being punched from a conductive metal plate, and a step portion is formed at the tip portion due to a difference in the width direction in which the tip side is narrow. Therefore, similarly to claim 2, it is suitable for mass production using a punching die.

  In the inspection jig provided with the probe according to claim 4, the first and second housings are arranged by laminating and arranging a plurality of plate materials each having a probe hole formed therein little by little. The probe hole can be easily provided in a slanting direction.

  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram showing a manufacturing process of a first embodiment of an inspection jig provided with the probe of the present invention. FIG. 2 is a diagram showing a structure in which probe holes are formed on straight lines that are slightly inclined in the first and second housings of FIG. 1 and 2, the same or equivalent members as those shown in FIG.

  In the first embodiment of the present invention, as shown in FIG. 1 (b), the conductive metal plate provided with a portion not coated with the insulating material 12 on one side as shown in FIG. A probe 34 having a length is punched out by pressing or the like and formed as shown in FIG. Here, the insulating material 12 is not coated on the distal end side of the probe 34, and the intermediate portion side is coated, and a stepped portion 36 having a thin distal end side in the plate thickness direction is formed depending on the coating thickness of the insulating material 12. . The leading end 34a is sharpened and the trailing end 34b is rounded. Then, as shown in FIG. 1D, the probe 34 is connected to the first housing 18 on the side of the connection board and the second housing 20 on the side of the object to be inspected in the gap direction. Are inserted from the first housing 18 side into the probe holes 22 and 24 respectively drilled on a straight line inclined slightly.

  The first housing 18 and the second housing 20 are each provided with a plurality of insulating plates stacked, and each insulating plate has a slightly flat square hole 38, 38... Shown in FIG. As shown in the plan view of FIG. 2 (b) and the longitudinal sectional view of FIG. 2 (c), the plurality of insulating plates are sequentially shifted in a flat direction. Accordingly, the first housing 18 and the second housing 20 are provided with probe holes 22 and 24 that are respectively drilled on a straight line that is slightly inclined from the interval direction. These probe holes 22 and 24 are flat in a shifted direction, and the probe 34 is inserted with its posture regulated.

  Then, the probe 34 inserted into the probe holes 22 and 24 of the first housing 18 and the second housing 20 from the first housing 18 side has a stepped portion 36 formed at the tip thereof as the second housing. By setting so that the probe hole 24 drilled in 20 cannot be inserted, the probe 34 protrudes outward from the second housing 20 at the front end side, and the rear end side is slightly outward from the first housing 18. The insertion is restricted in a state of protruding in the direction. Therefore, as shown in FIG. 1E, when the connection board 26 is laminated on the outside of the first housing 18, the probe 34 has a slightly protruding portion on the rear end side in the first housing 18. It is pushed in and is in a slightly bent state. Here, since the probe 34 is inserted into the first housing 18 and the second housing 20 with the posture being regulated with the direction inclined slightly from the interval direction as the plate thickness direction, the deflection is also in the plate thickness direction. Occurs in this tilted direction. Therefore, all of the multiple probes 34, 34... Bend in the same direction. When the tips of the probes 34, 34 ... are brought into contact with the object to be inspected, the probes 34, 34 ... are further bent, but the bending is also in the same direction so that the probes 34, 34 ... are in contact with each other. There is nothing. The probes 34, 34,... Are installed at intervals of, for example, 0.1 mm, as in the conventional example.

  In the inspection jig provided with the probe of the present invention by such a manufacturing process, the probe 34 is manufactured by punching from a conductive metal plate coated with the insulating material 12 on one side, so that the manufacturing process is few, and press working or the like. Therefore, it is suitable for mass production using a mold. Since the probe holes 22 and 24 drilled in the first housing 18 and the second housing 20 on the straight lines slightly inclined from the interval direction are flattened in the inclined direction, the probe 34 is inserted. The posture is restricted to a posture in which the flattened direction of the inclined direction is the plate thickness direction. In addition, since the step portion 36 is provided on the distal end side of the probe 34 to restrict the insertion, the length at which the distal end side of the probe 34 protrudes outward from the second housing 20 is constant, and the first end on the rear end side is constant. The length that protrudes slightly from the housing 18 is also constant, and when the connection board 26 is laminated on the outside of the first housing 20 and the probe 34 is bent in the thickness direction, the bending becomes constant. Therefore, when the tip of the probe 34 is brought into contact with the object to be inspected, the contact force does not vary. In addition, the first housing 18 and the second housing 20 are formed by stacking a plurality of insulating plates each having a square hole 38 formed by sequentially shifting and forming the probe holes 22 and 24. Therefore, the probe holes 22 and 24 in the obliquely inclined direction can be easily drilled.

  FIG. 3 is a view showing another structure in which a probe hole is formed on a straight line slightly inclined in the first and second housings of FIG. In the structure of FIG. 3, instead of the square hole 38 of the structure of FIG. 2, a plurality of insulating plates are respectively provided with round holes 40 as shown in FIG. Are gradually shifted and arranged in layers to form the first housing 18 and the second housing 20. The round holes 40 may be drilled in each insulating plate by pressing or the like, but can also be drilled with a drill or the like. A plurality of insulating plates having such round holes 40 are arranged so as to be sequentially shifted little by little, so that the longitudinal sectional view of FIG. 3C rather than the dimension b shown in the plan view of FIG. The dimension c shown in FIG. 5 becomes smaller, and b> c, and flat probe holes 22 and 24 are formed.

  Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 4 is a diagram showing a manufacturing process of the second embodiment of the inspection jig provided with the probe of the present invention. In FIG. 4, the same or equivalent members as those shown in FIGS. 1 to 3 and FIG.

  In the second embodiment of the present invention, a probe 44 having an appropriate length and shape as shown in FIG. 4B is punched out from the conductive metal plate shown in FIG. It is formed as shown in 4 (c). Here, a stepped portion 46 is formed on the tip side of the probe 44 in the width direction and narrow on the tip side. The front end 44a is sharpened and the rear end 44b is rounded. Each probe 44 is coated with the insulating material 12 on one side, as shown in the longitudinal sectional view seen from the plane of FIG. 4D and the longitudinal sectional view seen from the side of FIG. Probe holes drilled on straight lines that are slightly inclined with respect to the direction of the interval between the first housing 18 on the side of the connection board and the second housing 20 on the side of the object to be inspected, which are arranged in parallel at intervals. 22 and 24 are inserted from the first housing 18 side.

  Then, the probe 44 inserted into the probe holes 22 and 24 of the first housing 18 and the second housing 20 from the first housing 18 side has a stepped portion 46 formed at the tip thereof as the second housing. By setting so that the probe hole 24 drilled in 20 cannot be inserted, the probe 44 protrudes the tip side outward from the second housing 20, and the rear end side slightly outside the first housing 18. The insertion is restricted in a state of protruding in the direction. Therefore, when the connection board 26 is stacked on the outside of the first housing 18, the probe 44 is pushed slightly into the first housing 18 at the rear end side so that the probe 44 is slightly bent. Become.

  In the inspection jig provided with the probe of the second embodiment of the present invention by such a manufacturing process, the probe 44 is manufactured by punching out from the conductive metal plate, so that the manufacturing process is small, and the die is formed by press working or the like. It is suitable for mass production. Then, the insulating material 12 is coated after punching, but this coating does not act so that the length of the tip end of the probe 44 protruding outward from the second housing 20 is constant, and the coating position varies. There is no problem even if there is. Further, since the stepped portion 46 is provided on the distal end side of the probe 44 to restrict insertion, the length of the distal end side of the probe 44 protruding outward from the second housing 20 is surely constant, and the rear end side first The length slightly protruding outward from one housing 18 is also constant. In addition, the insulating material 12 is not peeled off and the length protruding outward from the second housing 20 does not change.

  Furthermore, a third embodiment of the present invention will be described with reference to FIG. FIG. 5 is a diagram showing a manufacturing process of the third embodiment of the inspection jig provided with the probe of the present invention. In FIG. 5, the same or equivalent members as those shown in FIGS. 1 to 4 and FIG.

  In the third embodiment of the present invention, from the conductive metal plate provided with a portion not coated with the insulating material 12 on one side shown in FIG. A probe 54 having a length and a shape is punched out by pressing or the like and formed as shown in FIG. Here, the insulating material 12 is not coated on the distal end side of the probe 54, and the intermediate side is coated. Here, a stepped portion 56 is formed on the tip side of the probe 54 in the width direction and narrow on the tip side. The front end 54a is sharpened and the rear end 54b is rounded. Then, as shown in the longitudinal sectional view seen from the plane of FIG. 5D and the longitudinal sectional view seen from the side of FIG. Probe holes 62 and 64 drilled in the first housing 58 on the substrate side and the second housing 60 on the object side to be inspected, with the positions slightly shifted so as to be on a straight line slightly inclined from the interval direction. And inserted from the first housing 58 side. Note that the first housing 58 and the second housing 60 of the third embodiment are each provided with flat rectangular probe holes 62 and 64 as shown in FIG. 2 in one insulating plate.

  In the inspection jig provided with the probe of the third embodiment of the present invention by such a manufacturing process, the probe 54 is manufactured by punching from a conductive metal plate coated with the insulating material 12 on one side, and therefore the manufacturing process is small. It is suitable for mass production using a mold by press working or the like. Since the stepped portion 56 is provided on the distal end side of the probe 54 to restrict insertion, the length of the distal end side of the probe 54 protruding outward from the second housing 60 is surely constant, and the rear end side first The length slightly protruding outward from one housing 58 is also constant. In addition, each of the first housing 58 and the second housing 60 is composed of a single insulating plate, and the probe holes 62 and 64 are formed in the respective insulating plates so as to be shifted in position. And its structure is simpler.

  In each of the first to third embodiments, the insulating material 12 is coated on one side of the probes 34, 44 and 54, but may be coated on both sides. Further, in both the second and third embodiments, if there is no possibility that the probes 44 and 54 come into contact with each other when the tips of the probes 44 and 54 are bent against the object to be measured, insulation The coating of the material 12 may not be provided. Furthermore, in the above embodiment, the probe holes 22, 24, 62, 64 drilled in any of the first housing 18, 58 and the second housing 20, 60 are also flat, but the first housing 18, The probe holes 22, 62 or 24, 64 drilled in at least one of the 58 and the second housing 20, 60 need only be flat, and can be inserted through the one flat probe hole 22, 62 or 24, 64. It suffices if the postures of the probes 34, 44, and 54 can be regulated.

It is a figure which shows the manufacture process of 1st Example of the inspection jig provided with the probe of this invention. It is a figure which shows the structure which drills a probe hole on the 1st and 2nd housing of FIG. It is a figure which shows the other structure which drills a probe hole on the 1st and 2nd housing of FIG. It is a figure which shows the manufacture process of 2nd Example of the inspection jig provided with the probe of this invention. It is a figure which shows the manufacture process of 3rd Example of the inspection jig provided with the probe of this invention. It is a figure which shows the manufacturing process of an example of the conventional inspection jig provided with the probe.

Explanation of symbols

12 Insulating material 14, 34, 44, 54 Probe 16, 36, 46, 56 Stepped portion 18, 58 First housing 20, 60 Second housing 22, 24, 62, 64 Probe hole 26 Connection board

Claims (4)

A first housing on the side of the connection board and a second housing on the side of the object to be inspected are arranged in parallel with a gap, and the first and second housings are on a straight line slightly inclined from the gap direction. A probe hole is formed in each of them, and at least one of the probe holes is flattened in a direction that is inclined obliquely, and the probe is manufactured by punching from a conductive metal plate from the first housing side. The probe hole of the second housing is inserted into the probe hole with its posture regulated by the flat hole, and the tip protrudes outward from the second housing by the step portion provided on the tip end side of the probe and the rear end Restricting the further insertion in a state of slightly projecting outward from the first housing, and stacking the connection board on the outside of the first housing Lobe test jig provided with a probe which is characterized by being configured to deflect in its thickness direction. 2. An inspection jig comprising the probe according to claim 1, wherein the probe is made of a material provided with a portion not coated with an insulating material on at least one surface of a conductive metal plate so that a tip portion is a portion not coated. An inspection jig provided with a probe, wherein the step portion is formed by a difference in thickness in a thickness direction of a portion which is manufactured by punching into a portion and is not coated with the insulating material. 2. An inspection jig comprising the probe according to claim 1, wherein the probe is manufactured by punching from a conductive metal plate, and the stepped portion is formed at a tip portion by a difference in a width direction in which a tip side width is narrow. An inspection jig provided with a probe characterized by the above. The inspection jig provided with the probe according to any one of claims 1 to 3, wherein the first and second housings each include a plurality of plate members each having a probe hole formed in the obliquely inclined direction. An inspection jig provided with a probe, wherein the probe is characterized by being sequentially stacked and arranged.