CN110389243A - Probe card device and its rectangular probe - Google Patents
Probe card device and its rectangular probe Download PDFInfo
- Publication number
- CN110389243A CN110389243A CN201810347589.0A CN201810347589A CN110389243A CN 110389243 A CN110389243 A CN 110389243A CN 201810347589 A CN201810347589 A CN 201810347589A CN 110389243 A CN110389243 A CN 110389243A
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- China
- Prior art keywords
- guide plate
- positioning region
- dislocation
- probe
- positioning
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The present invention discloses a kind of probe card device and its rectangular probe, and the rectangular probe includes upper positioning section, upper contact-segment, deformation section, lower positioning section and lower contact-segment.The upper positioning section include dislocation, from the first positioning region that dislocation extends in a first direction and from dislocation along the second positioning region that is parallel but extending in contrast to the second direction of first direction.In the width direction of the vertical first direction, the width of the first positioning region is the 95% to 25% of dislocation width, and the width of the second positioning region is the 95% to 25% of dislocation width.Upper contact-segment extends in a first direction to be formed from the first positioning region.The deformation section, lower positioning section and lower contact-segment sequentially extend from the second positioning region in a second direction to be formed.Accordingly, the rectangular probe other than a kind of structure is different from is provided.
Description
Technical field
The present invention relates to a kind of probe more particularly to a kind of probe card device and its rectangular probes.
Background technique
When semiconductor chip is tested, test equipment be electrically connected by a probe card device and determinand, and
By signal transmission and signal analysis, to obtain the test result of determinand.Existing probe card device is equipped with corresponding determinand
Electrical contact and multiple probes for arranging, with by above-mentioned multiple probes, the corresponding of point contact determinand is electrically connected with simultaneously
Point.
In more detail, the probe of existing probe card device includes with MEMS
Rectangular probe manufactured by (Microelectromechanical Systems, MEMS) technology, external form can be needed according to designer
It asks and shapes.However, the R&D direction of existing rectangular probe is limited to by existing structure design, thus it is difficult to provide different
In previous technical effect.
It then, is the special utilization for concentrating on studies and cooperating the principles of science, finally inventors believe that drawbacks described above can improve
It is proposed that a kind of design is reasonable and is effectively improved the present invention of drawbacks described above.
Summary of the invention
The embodiment of the present invention is to provide a kind of probe card device and its rectangular probe, can effectively improve existing rectangle
The issuable defect of probe institute.
The embodiment of the present invention discloses a kind of probe card device, including a upper guide plate unit, a bottom guide and multiple rectangles are visited
Needle.Upper guide plate unit includes one first guide plate and one second guide plate being intervally installed；Bottom guide is spaced on described
Side of second guide plate far from first guide plate, and the distance between the bottom guide and second guide plate are greater than described
The distance between first guide plate and second guide plate；Multiple rectangular probes respectively include positioning section on one, contact-segment, a shape on one
Become section, once positioning section and once contact-segment.Upper positioning section includes a dislocation, prolongs along a first direction from the dislocation
One first positioning region stretched and extend in parallel but in contrast to a second direction of the first direction from the dislocation edge one
Second positioning region, and a central axis of first positioning region of the parallel first direction is underlapped in parallel described the
One central axis of second positioning region in two directions；Wherein, described in a width direction of the vertical first direction
The width of first positioning region is the 95% to 25% of the dislocation width, and the width of second positioning region is the mistake
The 95% to 25% of position portion width；Upper contact-segment is formed from first positioning region along first direction extension；One deformation
Section, once positioning section and once contact-segment are sequentially formed from second positioning region along second direction extension；Wherein,
The upper positioning section of multiple rectangular probes is located in the upper guide plate unit, multiple rectangular probes it is described
Lower positioning section is located in the bottom guide, and the deformation section of multiple rectangular probes be located at second guide plate with
Between the bottom guide；Wherein, described when first guide plate is displaced relative to second guide plate along the width direction
First guide plate and second guide plate respectively in opposite direction contact in each rectangular probe first positioning region with
Second positioning region, and the dislocation of each rectangular probe is located at first guide plate and second guide plate
Between.
Preferably, in each rectangular probe, the central axis of first positioning region and described second
The central axis of positioning region is mutually separated between a dislocation distance, and the dislocation distance is between 3 microns to 280 microns.
Preferably, in each rectangular probe, the dislocation and first positioning region have been collectively formed one the
One corner, and one second corner has been collectively formed in the dislocation and second positioning region；When first guide plate is opposite
When second guide plate is displaced along the width direction, the first guide plate contact is in first corner, and described
Two guide plate contacts are in second corner.
Preferably, in each rectangular probe, the upper contact-segment is in vertical bar shape, and the vertically first direction
The upper contact-segment any section area be all not more than the vertical first direction first positioning region any
The area in section.
Preferably, the inclined direction when the upper guide plate unit relative to the vertical second direction in the bottom guide edge
When being deviated, the upper guide plate unit and the bottom guide oppress the upper positioning section of each rectangular probe with it is described
Lower positioning section so that the deformation section stress of each rectangular probe and in bending and deformation shape.
Preferably, the probe card device includes a pinboard, and pinboard abutting be fixed on it is multiple described
The upper contact-segment of rectangular probe, and the lower contact-segment of multiple rectangular probes is used to flexibly and separably push up
It is butted on a determinand.
Preferably, the upper guide plate unit includes one be held between first guide plate and second guide plate
Fagging, and the support plate inner edge is formed with an accommodating space, and multiple dislocations are located at the accommodating at each interval
In space；Institute's probe card device includes the spacing board being held between second guide plate and the bottom guide, and institute
It states spacing board inner edge and is formed with an accommodating hole, multiple deformation sections are located at the accommodating hole of the spacing board at each interval
It is interior.
The embodiment of the present invention also discloses a kind of rectangular probe of probe card device, including positioning section on one, contact-segment on one,
One deformation section, once positioning section and once contact-segment.Upper positioning section include a dislocation, from the dislocation along a first party
To one first positioning region of extension and from the dislocation along in parallel but in contrast to the extension of a second direction of the first direction
One second positioning region, and a central axis of first positioning region of the parallel first direction is underlapped in parallel institute
State a central axis of second positioning region of second direction；Wherein, in a width direction of the vertical first direction,
The width of first positioning region is the 95% to 25% of the dislocation width, and the width of second positioning region is the mistake
The 95% to 25% of position portion width；Upper contact-segment is formed from first positioning region along first direction extension；One deformation
Section, once positioning section and once contact-segment are sequentially formed from second positioning region along second direction extension.
Preferably, the central axis of first positioning region and the central axis of second positioning region be mutually separated between
One dislocation distance, and the dislocation distance is between 3 microns to 280 microns.
Preferably, first positioning region is formed by a view field, covering office along the second direction orthographic projection
Second positioning region described in portion.
In conclusion probe card device disclosed in the embodiment of the present invention and its rectangular probe, by upper positioning section shape
At have be connected in dislocation and in miss one another setting the first positioning region and the second positioning region so that the rectangular probe is formed
To be different from previous construction, and then the upper positioning section of rectangular probe is made to have the effect of independently being positioned.Further say,
Probe card device disclosed in the embodiment of the present invention, by using the first guide plate and the collocation of the second guide plate in above-mentioned each rectangle
The upper positioning section of probe, so that the rectangular probe can effectively be located in upper guide plate unit.
For that can be further understood that feature and technology contents of the invention, please refer to the following detailed descriptions related to the present invention
With attached drawing, but these explanations are only used to illustrate the present invention with attached drawing, rather than make any limitation to protection scope of the present invention.
Detailed description of the invention
Fig. 1 is the schematic diagram of the rectangular probe of the embodiment of the present invention one.
Fig. 2 is the schematic diagram of the rectangular probe another way of the embodiment of the present invention one.
Fig. 3 is the probe base schematic diagram (one) of the probe card device of the embodiment of the present invention two.
Fig. 4 is the probe base schematic diagram (two) of the probe card device of the embodiment of the present invention two.
Fig. 5 is the partial enlargement diagram in the region V in Fig. 4.
Fig. 6 is the probe base schematic diagram (three) of the probe card device of the embodiment of the present invention two.
Fig. 7 is the probe card device schematic diagram of the embodiment of the present invention two.
Specific embodiment
[embodiment one]
Fig. 1 and Fig. 2 are please referred to, is the embodiment of the present invention one, need to first illustrate, the present embodiment respective figure is mentioned
And correlated measure and external form, only be used to specifically describe embodiments of the present invention, in order to understand the contents of the present invention, and
It is non-to be used to limit to protection scope of the present invention.
The present embodiment discloses a kind of rectangular probe 1, refers in particular to a kind of rectangular probe 1 of probe card device.Wherein, described
Rectangular probe 1 is in this present embodiment strip columnar structure electrically conductive and with pliability.The rectangular probe 1 of the present embodiment is preferable
It is to limit manufactured by MEMS (MEMS) technology of using, so the present embodiment is to exclude the completely different circle of manufacturing process
Probe.In other words, the rectangular probe 1 of the present embodiment compared to circular probe for, due to the two manufacturing process completely not
Together, so not with the presence of the motivation referred to each other.
The rectangular probe 1 include in this present embodiment positioning section 11 on one, from described upper 11 one end of positioning section (such as:
11 top of upper positioning section in Fig. 1) extend one on contact-segment 12 and from upper 11 other end of positioning section (such as: in Fig. 1
Upper 11 bottom end of positioning section) the deformation section 13, once positioning section 14 and once contact-segment 15 that sequentially extend.
In this present embodiment, the upper positioning section 11 includes a dislocation 111, from the dislocation 111 (apical margin)
(such as: one first positioning region 112 that in Fig. 1 upwardly-directed) extends and from the 111 (bottom of dislocation along a first direction D1
Edge) along one second of a parallel but second direction D2 (such as: the downward in Fig. 1) extension in contrast to the first direction D1
Positioning region 113.
Wherein, on a width direction W of the vertical first direction D1, the width W112 of first positioning region 112
It is the 95% to 25% of the 111 width W111 of dislocation, the width W113 of second positioning region 113 is the dislocation
The 95% to 25% of 111 width W111.It should be noted that the 112 width W112 of the first positioning region of the present embodiment is preferably equivalent
In 113 width W113 of the second positioning region, but the present invention is not only restricted to this.
Furthermore a central axis C112 of first positioning region 112 of parallel first direction D1 is underlapped in parallel
One central axis C113 of second positioning region 113 of two direction D2.That is, first positioning region 112 and second
The position of positioning region 113 is compared to dislocation 111 in the setting that misses one another.The central axis C112 of first positioning region 112
And the central axis C113 phase of second positioning region 113 is separated between a dislocation distance Ds, and the dislocation distance Ds
Between 3 microns to 250 microns, but the present invention is not only restricted to this.
It further says, the rectangular probe 1 of the present embodiment includes there are two types of embodiment, as shown in Figure 1, described first is fixed
D2 orthographic projection is formed by a view field in a second direction in position portion 112, be located at second positioning region 113 outside (such as:
50% width W112 of first positioning region 112 is with both 50% width W113's of the second positioning region 113 and is less than above-mentioned
Dislocation distance Ds)；Alternatively, as shown in Fig. 2, D2 orthographic projection is formed by a projection in a second direction for first positioning region 112
Region, covering part second positioning region 113 is (such as: the positioning of 50% width W112 of first positioning region 112 and second
Both 50% width W113's in portion 113 and be greater than above-mentioned dislocation distance Ds).
In addition, one first corner 114, and the dislocation has been collectively formed in the dislocation 111 and the first positioning region 112
One second corner 115 has been collectively formed in portion 111 and the second positioning region 113.Above-mentioned first corner 114 and the second corner 115 are preferably
It is respectively in 90 degree, that is to say, that first positioning region 112 is generally perpendicularly to be connected to above-mentioned dislocation 111, and described
Second positioning region 113 is also generally perpendicularly to be connected to above-mentioned dislocation 111, but invention is not limited thereto.
The upper contact-segment 12 is formed from first positioning region 112 along first direction D1 extension, and vertical described
The area in any section of the upper contact-segment 12 of first direction D1 is all not more than the first positioning region of the vertical first direction D1
The area in 112 any section.Wherein, the upper contact-segment 12 of the present embodiment is preferably in vertical bar shape, that is to say, that the present embodiment
Upper contact-segment 12 be preferably the construction of any standing shape be not formed, but the present invention is not only restricted to this.
The deformation section 13, lower positioning section 14 and lower contact-segment 15 are sequentially from second positioning region 113 along second party
It is formed to D2 extension.That is, the second positioning region 113 of the upper positioning section 11, deformation section 13, lower positioning section 14 and under
The original shape of contact-segment 15 in this present embodiment is linearly and preferably has roughly the same width, but the present invention
It is not only restricted to this.
Accordingly, the rectangular probe 1 is connected in dislocation 111 and sets in missing one another by being formed in upper positioning section 11
The first positioning region 112 and the second positioning region 113 set, so that the rectangular probe 1 is formed as being different from previous construction.
[embodiment two]
It is the embodiment of the present invention two as shown in Fig. 3 to Fig. 7, the present embodiment discloses a kind of probe card device 1000, wraps
Containing a probe base 100 and it is connected to the pinboard of above-mentioned 100 side of probe base (such as: 100 top side of probe base in Fig. 7)
200, and the other side (such as: 100 bottom side of probe base in Fig. 7) of the probe base 100 can (figure be not for testing a determinand
It shows, such as: semiconductor wafer).Wherein, though the probe base 100 of the present embodiment is to arrange in pairs or groups and say in the pinboard 200 work one
It is bright, but the practical application of the probe base 100 is not limited to this.
Need to first it illustrate, in order to facilitate understanding the present embodiment, so the part of probe card device 1000 is only presented in attached drawing
Construction, in order to which the various components construction and connection relationship of probe card device 1000 is clearly presented.It below will difference place of matchmakers
State the various components construction and its connection relationship of probe base 100.
As shown in Figures 3 to 5, the probe base 100 includes a upper guide plate unit 2, is roughly parallel to the upper guide plate
One bottom guide 3 of unit 2, the spacing board 4 being held between the upper guide plate unit 2 and bottom guide 3 and it is arranged in upper guide plate
Multiple rectangular probes 1 of unit 2 and bottom guide 3.Wherein, each rectangular probe 1 of the present embodiment is using such as above-mentioned implementation
Rectangular probe 1 documented by one (as: shown in Fig. 1 and Fig. 2), so not being repeated here herein to the specific configuration of rectangular probe 1.
Furthermore since multiple rectangular probes 1 of the present embodiment probe base 100 construction is all roughly the same, in order to facilitate understanding
The present embodiment, so local structure (three rectangular probes 1 and its corresponding structure of probe card device 1000 is only presented in attached drawing
Make), in order to which the various components construction and connection relationship of probe card device 1000 is clearly presented.However, not showing in the present invention
In other embodiments out, multiple rectangular probes 1 of the probe base 100 are also possible to construction different each other.
As shown in Figures 3 to 5, the upper guide plate unit 2 includes one first guide plate 21, leads with first in this present embodiment
One second guide plate 22 and the support plate being held between first guide plate 21 and the second guide plate 22 that plate 21 is set in distance
23.Wherein, first guide plate 21 is formed with multiple first perforation 211, and second guide plate 22 is formed with multiple second
Perforation 221.The position of the multiple first perforation 211 corresponds to the position of multiple second perforation 221 one to one respectively, and
The size of any of the above-described first perforation 211 is preferably the size for being not less than any one the second perforation 221.
Furthermore the size of first perforation 211 is no less than 111 size of dislocation of above-mentioned rectangular probe 1, to provide
The upper positioning section 11 of above-mentioned rectangular probe 1 passes through the first perforation 211.The size of second perforation 221 is then less than above-mentioned square
111 size of dislocation of shape probe 1, so that the dislocation 111 of above-mentioned rectangular probe 1 can not pass through the second perforation 221.Change an angle
For degree, (such as: the dislocation 111 of vertical first direction D1 is any by the 111 width W111 of dislocation of the present embodiment rectangular probe 1
Width) it is no more than the width W211 of 211 corresponding section of the first perforation and is greater than the width of the second 221 corresponding sections of perforation
W221。
The thickness of the support plate 23 is substantially identical to 111 thickness of dislocation of above-mentioned rectangular probe 1, and support plate 23
Inner edge be formed with an accommodating space 231.Wherein, the support plate 23 is connected to above-mentioned first guide plate 21 and the second guide plate 22,
It is intervally installed so that the first guide plate 21 is able to maintain with the second guide plate 22, and multiple first perforation of above-mentioned first guide plate 21
211 and second guide plate 22 multiple second perforation 221 accommodating space 231 for being all connected to support plate 23.
In addition, though the present embodiment is for being held between first guide plate 21 and the second guide plate 22 with support plate 23
It is bright, but the present invention is not only restricted to this.It for example, can be in first guide plate in the unshowned other embodiments of the present invention
21 part thickeies, with contact in the second guide plate 22, so as to omitting above-mentioned support plate 23；Alternatively, the upper guide plate unit 2 is with one
Third guide plate replaces above-mentioned support plate 23.
As shown in Figures 3 to 5, the bottom guide 3 is formed with multiple lower perforation 31, and each the size of lower perforation 31 compared with
The good size for being no more than any one the second perforation 221.Wherein, it is remote to be spaced on second guide plate 22 for the bottom guide 3
Side (such as: the downside of the second guide plate 22 in Fig. 3) from the first guide plate 21, and between the bottom guide 3 and the second guide plate 22
Distance be greater than the distance between first guide plate 21 and the second guide plate 22.
Furthermore the thickness of the spacing board 4 is substantially identical to 13 length of deformation section of above-mentioned rectangular probe 1, and described
4 inner edge of spacing board is formed with an accommodating hole 41.Wherein, the spacing board 4 be held on second guide plate 22 and bottom guide 3 it
Between, so that the second guide plate 22 is able to maintain with bottom guide 3 and is intervally installed, and multiple second perforation of above-mentioned second guide plate 22
221 are all connected to the accommodating hole 41 of spacing board 4 with multiple lower perforation 31 of bottom guide 3.
In addition, though the present embodiment is to be held between second guide plate 22 and bottom guide 3 to illustrate with spacing board 4,
The present invention is not only restricted to this.In the unshowned other embodiments of the present invention, second guide plate 22 can also lead to bottom guide 3
It crosses other modes and keeps being intervally installed.
As shown in figure 3, above-mentioned each rectangular probe 1 sequentially passes through upper guide plate unit 2, spacing board 4 and bottom guide 3.Wherein,
The upper positioning section 11 of multiple rectangular probes 1 is located in upper guide plate unit 2, and the deformation section of multiple rectangular probes 1 13
(it is, multiple deformation sections 13 are located at the accommodating of the spacing board 4 at each interval between the second guide plate 22 and bottom guide 3
In hole 41), the lower positioning section 14 of multiple rectangular probes 1 is located in bottom guide 3 (lower perforation 31), and multiple rectangular probes
1 upper contact-segment 12 and lower contact-segment 15 are then to be located at the outside of upper guide plate unit 2 and bottom guide 3 away from each other (such as: figure
2 upside of upper guide plate unit and 3 downside of bottom guide in 3).
It further says, the first positioning region 112 of multiple upper positioning sections 11 is located at the multiple of first guide plate 21
In first perforation 211, what the second positioning region 113 of multiple upper positioning sections 11 was located at second guide plate 22 multiple second is worn
In hole 221, and multiple dislocations 111 of the upper positioning section 11 are located at the accommodating space of the support plate 23 at each interval
In 231.
As shown in Figure 4 and Figure 5, when first guide plate 21 is displaced relative to the second guide plate 22 along above-mentioned width direction W,
First guide plate 21 of the present embodiment and the second guide plate 22 respectively in opposite direction contact in the first positioning region of each rectangular probe 1
112 and second positioning region 113, and the dislocation 111 of each rectangular probe 1 is located at first guide plate 21 and the second guide plate 22
Between.
Further say, when first guide plate 21 is displaced relative to the second guide plate 22 along the width direction W, this reality
21 contact of the first guide plate of example is applied in the first corner 114 of above-mentioned each rectangular probe 1, and 22 contact of the second guide plate in
Second corner 115 of each rectangular probe 1；It is led that is, the dislocation 111 of each rectangular probe 1 is held on described first
Between plate 21 and the second guide plate 22.However, in the unshowned other embodiments of the present invention, the dislocation of each rectangular probe 1
111 are also possible to be set on the second guide plate 22, but are not held between first guide plate 21 and the second guide plate 22.
Accordingly, the probe card device 1000 is by using the first guide plate 21 and the collocation of the second guide plate 22 in above-mentioned each square
The upper positioning section 11 of shape probe 1, so that each rectangular probe 1 can effectively be located in upper guide plate unit 2.
Furthermore as shown in fig. 6, working as one of the upper guide plate unit 2 relative to bottom guide 3 along the vertical second direction D2
When inclined direction is deviated (such as: mobile entire upper guide plate unit 2 or mobile bottom guide 3), the upper guide plate unit 2 with
Bottom guide 3 oppresses the upper positioning section 11 and lower positioning section 14 of above-mentioned each rectangular probe 1, so that the deformation of each rectangular probe 1
Section 13 stress and in bending and deformation shape.If that is, the deformation section of rectangular probe and non-stress and be bent (such as: directly
It is configured to bending), then the non-rectangular probe 1 for the present embodiment meaning.Wherein, the inclined direction is preferable in this present embodiment
It is to be located at same level with above-mentioned width direction W and mutually accompany an acute angle, but the present invention is not only restricted to this.
As shown in fig. 7, the pinboard 200 abuts the upper contact-segment 12 for being fixed on above-mentioned multiple rectangular probes 1, and it is described
The lower contact-segment 15 of multiple rectangular probes 1 be used to flexibly and separably contact in a determinand (it is not shown go out, such as: partly leading
Body chip).That is, the upper positioning section 11 of upper guide plate unit 2 and each rectangular probe 1 in the present embodiment is to be adjacent to turn
Fishplate bar 200, thus the present embodiment be preferably exclude the upper positioning section 11 of upper guide plate unit 2 or each rectangular probe 1 adjacent to
The case where surveying object.
[technical effect of the embodiment of the present invention]
In conclusion probe card device 1000 and its rectangular probe 1 disclosed in the embodiment of the present invention, by upper positioning
Section 11, which is formed with, is connected in dislocation 111 and in miss one another the first positioning region 112 and the second positioning region 113 of setting, so that
The rectangular probe 1 is formed as being different from previous construction, and then has the upper positioning section 11 of rectangular probe 1 and independently determined
The effect of position.Further say, probe card device 1000 disclosed in the embodiment of the present invention, by using the first guide plate 21 with
Second guide plate 22 is arranged in pairs or groups in the upper positioning section 11 of above-mentioned each rectangular probe 1, so that the rectangular probe 1 can effectively be determined
Positioned at upper guide plate unit 2.
The foregoing is merely preferred possible embodiments of the invention, are not used to limit to protection scope of the present invention, it is all according to
The equivalent changes and modifications that the invention patent range is done should all belong to the protection scope of claims of the present invention.
Claims (10)
1. a kind of probe card device, which is characterized in that the probe card device includes:
One upper guide plate unit includes one first guide plate and one second guide plate being intervally installed；
One bottom guide is spaced on side of second guide plate far from first guide plate, and the bottom guide and institute
The distance between second guide plate is stated greater than the distance between first guide plate and second guide plate；And
Multiple rectangular probes respectively include:
Positioning section on one, include a dislocation, from the dislocation along one first positioning region that a first direction extends and from
The dislocation is along parallel but in contrast to one second positioning region that a second direction of the first direction extends, and parallel institute
State underlapped second positioning in the parallel second direction of a central axis of first positioning region of first direction
One central axis in portion；Wherein, in a width direction of the vertical first direction, the width of first positioning region is institute
State the 95% to 25% of dislocation width, and the width of second positioning region be the dislocation width 95% to
25%；
Contact-segment on one is formed from first positioning region along first direction extension；And
One deformation section, once positioning section and once contact-segment sequentially extend institute along the second direction from second positioning region
It is formed；
Wherein, the upper positioning section of multiple rectangular probes is located in the upper guide plate unit, multiple rectangles
The lower positioning section of probe is located in the bottom guide, and the deformation section of multiple rectangular probes is positioned at described
Between second guide plate and the bottom guide；
Wherein, when first guide plate is displaced relative to second guide plate along the width direction, first guide plate with
Contact is fixed in first positioning region of each rectangular probe and described second in opposite direction respectively for second guide plate
Position portion, and the dislocation of each rectangular probe is between first guide plate and second guide plate.
2. probe card device according to claim 1, which is characterized in that in each rectangular probe, described first
The central axis of positioning region and the central axis of second positioning region are mutually separated between a dislocation distance, and
The dislocation distance is between 3 microns to 280 microns.
3. probe card device according to claim 1, which is characterized in that in each rectangular probe, the dislocation
One first corner has been collectively formed in portion and first positioning region, and the dislocation is collectively formed with second positioning region
There is one second corner；When first guide plate is displaced relative to second guide plate along the width direction, described first is led
Plate contact is in first corner, and the second guide plate contact is in second corner.
4. probe card device according to claim 1, which is characterized in that in each rectangular probe, it is described on connect
Touching section is in vertical bar shape, and the area in any section of the upper contact-segment of the vertical first direction is all not more than vertical institute
State the area in any section of first positioning region of first direction.
5. probe card device according to claim 1, which is characterized in that when the upper guide plate unit is relative to leading under described
When plate is deviated along an inclined direction of the vertical second direction, the upper guide plate unit and bottom guide compressing are each
The upper positioning section and the lower positioning section of the rectangular probe, so that the deformation section stress of each rectangular probe
And in bending and deformation shape.
6. probe card device according to claim 1, which is characterized in that the probe card device includes a pinboard,
And the pinboard abuts the upper contact-segment for being fixed on multiple rectangular probes, and the institute of multiple rectangular probes
State lower contact-segment be used to flexibly and separably contact in a determinand.
7. probe card device according to claim 1, which is characterized in that the upper guide plate unit include be held on it is described
A support plate between first guide plate and second guide plate, and the support plate inner edge is formed with an accommodating space, it is multiple
The dislocation is located at each interval in the accommodating space；Institute's probe card device include be held on second guide plate with
A spacing board between the bottom guide, and the spacing board inner edge is formed with an accommodating hole, and multiple deformation sections are each other
It is spaced in the accommodating hole of the spacing board.
8. a kind of rectangular probe of probe card device, which is characterized in that the rectangular probe of the probe card device includes:
Positioning section on one, include a dislocation, from the dislocation along one first positioning region that a first direction extends and from
The dislocation is along parallel but in contrast to one second positioning region that a second direction of the first direction extends, and parallel institute
State underlapped second positioning in the parallel second direction of a central axis of first positioning region of first direction
One central axis in portion；Wherein, in a width direction of the vertical first direction, the width of first positioning region is institute
The 95% to 25% of dislocation width is stated, the width of second positioning region is the 95% to 25% of the dislocation width；
Contact-segment on one is formed from first positioning region along first direction extension；And
One deformation section, once positioning section and once contact-segment sequentially extend institute along the second direction from second positioning region
It is formed.
9. the rectangular probe of probe card device according to claim 8, which is characterized in that the center of first positioning region
Axis and the central axis of second positioning region are mutually separated between a dislocation distance, and the dislocation distance is micro- between 3
Rice is to 280 microns.
10. the rectangular probe of probe card device according to claim 8, which is characterized in that first positioning region is along institute
It states second direction orthographic projection and is formed by a view field, covering part second positioning region.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810347589.0A CN110389243B (en) | 2018-04-18 | 2018-04-18 | Probe card device |
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| CN110389243B CN110389243B (en) | 2022-05-06 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113376413A (en) * | 2020-03-10 | 2021-09-10 | 中华精测科技股份有限公司 | Vertical probe head and double-arm probe thereof |
| CN113625019A (en) * | 2020-05-08 | 2021-11-09 | 中华精测科技股份有限公司 | Vertical testing device and sheet probe thereof |
| CN114252665A (en) * | 2021-11-19 | 2022-03-29 | 深圳市顺天祥电子有限公司 | Test probe module for miniature connector of circuit board |
| CN114472252A (en) * | 2020-11-28 | 2022-05-13 | 法特迪精密科技（苏州）有限公司 | Probe fixing method for testing probe cleaning method |
| CN117890770A (en) * | 2024-03-15 | 2024-04-16 | 苏州微飞半导体有限公司 | Multi-arm dislocation type probe and testing device |
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| CN114252665A (en) * | 2021-11-19 | 2022-03-29 | 深圳市顺天祥电子有限公司 | Test probe module for miniature connector of circuit board |
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