JP3245917U - Probe module applicable to a measurement target unit with inclined conductive contacts, measurement target unit, and its measurement system - Google Patents

Abstract

A probe module, a unit to be measured, and a measurement system therefor are provided, which are applied to a unit to be measured that has an inclined conductive contact that effectively fixes a probe. A probe module 20 includes a probe holder 30 and divergent probe units 40A and 40B each including probes 50 arranged in a row. The inner extensions 512 of the two outer probes of the diverging probe unit diverge diagonally from the inner probe diverging surface 34 of the probe holder. The unit to be measured has conductive contacts arranged in a row. The two furthest outer contacts of the conductive contacts extend diagonally from one end toward the first edge to the other end toward the second edge. When the probe module measures the unit to be measured, the first edge of the unit to be measured is closer to the inner probe divergence surface than the second edge. The angle of inclination of the outer probe is smaller than the angle of inclination of the outer contact of the unit to be measured. [Selection diagram] Figure 3

Description

The present invention relates to a probe module of a probe card, and more specifically, to a probe module applied to a measurement target unit having inclined conductive contacts, a measurement target unit, and a measurement system thereof.

In a probe module applied to a plurality of units to be measured having inclined conductive contacts disclosed in Patent Document 1, as shown in FIG. 1, a unit under test (UUT) having inclined conductive contacts is used. 10 is an unpackaged die or a packaged chip. The measurement target unit 10 has a plurality of first conductive contacts 11 for signal export arranged in one row or in a plurality of rows, and a plurality of second conductive contacts 12 for signal import arranged in one row. Specifically, in the measurement target unit 10, the plurality of first conductive contacts 11 are arranged in three rows from the first long side 131 to the second long side 132 of the substrate 13. The plurality of second conductive contacts 12 are arranged in a line along the second long side 132 of the substrate 13 . The three rows of first conductive contacts 11 and the one row of second conductive contacts 12 are parallel to the temporary boundary line L perpendicular to the first long side 131 and the second long side 132. In particular, the long side 111 of the first conductive contacts 11 and the long side 112 of the second conductive contacts 12 in the row near the temporary boundary line L (see intermediate block 14 in FIG. 1) are parallel to the temporary boundary line L. The first conductive contacts 11 and the second conductive contacts 12 in the row far from the temporary boundary line L are inclined conductive contacts, and one end of the first long side 131 of the substrate 13 (i.e., the upper end in FIG. 1) A slanted conductive contact that is closer is closer to the temporary boundary line L than a slanted conductive contact that is farther from one end of the first long side 131 of the substrate 13 (ie, the lower end in FIG. 1). In other words, as shown in FIG. 1, the inclined conductive contacts are arranged obliquely from top to bottom and from inside to outside, and the farther from the temporary boundary line L, the more the first conductive contact 11 and the second conductive contact The angle of the contact point 12 with respect to the temporary boundary line L increases. In particular, as shown in FIG. 1, the inclination angle θ of the long side 111 of the first conductive contact 11 and the long side 112 of the second conductive contact 12 in the two outer blocks 15 and 16 with respect to the temporary boundary line L is the largest.

In Patent Document 1, a measurement target unit 10 performs measurement using a cantilever probe card. The probe card is arranged corresponding to one or several rows of first conductive contacts 11 and second conductive contacts 12 or all first conductive contacts 11 and second conductive contacts 12. As shown in FIG. 1, the cantilever portion 171 of the probe 17 corresponding to the third row of first conductive contacts 11 in the outer blocks 15 and 16 is located above the outside of the first long side 131 of the unit to be measured 10. It extends from the holder 18 to above the conductive contacts. A touch portion (not shown in the figure) formed by extending downward from the end of the cantilever portion 171 of the probe 17 of the first conductive contact 11 touches the corresponding conductive contact. Specifically, the cantilever part 171 of the probe 17 has a fixed part 172 fixed to the probe holder 18, an inner extension part 173 extending from the probe holder 18 to the measurement target unit 10, and an inner extension part 173 extending in the opposite direction. It has an outer extending portion 174 that extends outwardly. The touch portion is formed extending downward from the end of the inner extension portion 173. The cantilevered portions 171 of the probes 17 are placed at the same angle as the corresponding conductive contacts, so that the angle of the cantilevered portions 171 of the outermost probes 17 is maximum.

When attaching the probe 17 to the probe holder 18, the probe 17 is first set at a predetermined angle, and the fixing part 172 of the cantilever part 171 of the probe 17 is fixed with black resin. When the installation of the probe 17 is completed, the black resin becomes part of the probe holder 18. The outer extending portion 174 of the cantilever portion 171 of the probe 17 is bent at a predetermined angle depending on the location where it connects to the distal end thereof. However, when a conventional probe card is actually installed, not only is the process of fixing the probe 17 to the probe holder 18 difficult, but also the problem arises that the set probe 17 shifts from its original installation position and angle. do.

Furthermore, if the measurement target unit 10 is minute, the corresponding probe 17 distribution range is small. As shown in FIG. 1, among the probes 17 in the same row, the outermost plurality of probes 17 have a small interval, and each outer extension portion 174 extends to a certain distance from the probe holder 18, and then the interval decreases. Therefore, the outer extending portions 174 of the probe 17 tend to intersect and overlap vertically. In particular, the phenomenon in which the outer extension portions 174 of the probes 17 attached to the probe holder 18 at different heights and placement positions intersect and overlap vertically becomes a serious problem. Therefore, in subsequent steps of the probe card manufacturing process, it becomes difficult to determine the placement position of the probes 17 and to electrically connect the probes 17 and the circuit board.

Taiwan Patent No. I704357

SUMMARY OF THE INVENTION In view of the shortcomings of the prior art, the main objective of the present invention is to provide a probe module applicable to a measurement target unit with inclined conductive contacts. The probe of the probe module applied to a unit to be measured having inclined conductive contacts is effectively fixed by a fixing device during the probe mounting process.

Specifically, as shown in FIG. 1 of the present invention, when the step of setting the plurality of probes 17 on the probe holder 18 at a predetermined position and angle in the mounting process of the probes 17 is completed, the outer extending portions of the plurality of probes 17 174 intersect at a certain distance away from the probe holder 18, so if a temporary fixing device is placed between the probe holder 18 and the intersection of the outer extension portions 174 of the plurality of probes 17, the probes 17 can be It can be effectively stabilized. Subsequently, the fixing part 172 of the probe 17 is fixed to the probe holder 18 with black resin, and when the fixing work of the probe 17 is completed, the fixing device is removed. The above-mentioned technical feature makes it possible to solve the problem that the set probe 17 is deviated from its original mounting position and angle.

In view of the shortcomings of the prior art, the present invention solves the difficulty in determining the placement position of the probe due to the fact that the outer extensions of the probe intersect and overlap vertically, and the present invention solves the problem of the difficulty in determining the placement position of the probe. The main purpose is to provide a probe module that can be applied to

To solve the above-mentioned problems, a probe module applied to a measurement target unit having inclined conductive contacts can measure one or more measurement target units. The unit to be measured has a first edge, a second edge, two side edges connecting the first edge and the second edge, a plurality of conductive contacts, and a central axis. The plurality of electrically conductive contacts have a first end toward the first edge and a second end toward the second edge. The central axis passes through the first edge and the second edge. The plurality of conductive contacts are arranged in one or more rows, and the conductive contacts in the same row closest to the two side edges are the outer contacts. The two outer contacts each form an oblique angle relative to the central axis with the first end being closer to the central axis than the second end. The probe module includes a probe holder and one or more probe units. The probe unit has multiple probes. The plurality of probes includes two furthest outer probes, each having a cantilever site and a touch site. The cantilever portion has a fixed part fixed to the probe holder, and an inner extending part and an outer extending part connected to both ends of the fixed part and extending from the probe holder. The inner extension has a first end connected to the probe holder and a second end connected to the touch site. The probe module has a reference center axis. The touch parts of the probes of the same probe unit are arranged in a line perpendicular to the reference center axis, and touch the conductive contacts in the same line of the same measurement target unit. The probe holder has an inner probe divergence surface. When the probe module performs a measurement on the unit to be measured, the first edge of the unit to be measured is closer to the inner probe divergence surface than the second edge. The one or more probe units include one or more divergent probe units. The inner extension of the probe of the diverging probe unit has a first end connected to the inner probe diverging surface. The inner extension of the outer probe of the diverging probe unit has a first end closer to the reference center axis than a second end thereof, and is inclined relative to the reference center axis to form an inclined angle. The tilt angle of the outer probe of the one or more diverging probe units is smaller than the tilt angle of the outer contact of the unit to be measured.

In the process of attaching the probe to the probe holder, if the angles of the outer extending part, fixed part, and inner extending part of the cantilever part of the probe are the same, the outer probe of the diverging probe unit forms an inclined angle, so the outer extending part The parts intersect.
The inclination angle of the outer probe of the divergent probe unit is smaller than the inclination angle of the outer contact of the unit to be measured, and the crossing position is far from the probe holder. Therefore, a space is secured between the crossing position and the probe holder so that a fixing device can be placed. The probe can be effectively immobilized.

In order to solve another problem mentioned above, a probe module applied to a measurement target unit having an inclined conductive contact includes a probe holder and a plurality of probe units. Each probe unit has multiple probes. The plurality of probes includes two furthest outer probes, each having a cantilever site and a touch site. The cantilever portion has a fixed part fixed to the probe holder, and an inner extending part and an outer extending part connected to both ends of the fixed part and extending from the probe holder. The inner extension has a first end connected to the probe holder and a second end connected to the touch portion. The probe module has a reference center axis. The touch sites of the probes of the same probe unit are arranged in a line perpendicular to the reference center axis. The probe holder has an inner probe divergence surface. The plurality of probe units includes two divergent probe units. The inner extension of the probe of each diverging probe unit is connected at a first end to the inner probe diverging surface. The inner extension of the outer probe of each diverging probe unit is inclined relative to the reference center axis such that the first end is closer to the reference center axis than the second end to form an oblique angle. The two divergent probe units are a low-rise divergent probe unit and a high-rise divergent probe unit that is higher than the position of the low-rise divergent probe unit. The length of the touch region of the probe of the high-rise diverging probe unit is greater than the length of the touch region of the probe of the low-rise divergence probe unit. The outer extension of each probe has an inner end connected to a probe holder. For each probe unit, the distance between the inner ends of the outer extensions of the two outer probes is defined as the outer extension distance. The outer extension distance of the low-rise diverging probe unit is greater than the outer extension distance of the high-rise divergence probe unit.

Due to the above-mentioned structural features, the outer extension distance of the low-rise diverging probe unit is relatively large, which can not only smoothly install the fixation device, but also improve the problem of the outer extension part of the probe intersecting and overlapping one above the other. . That is, when electrically connecting the outer extension portion of the probe and the circuit board in a subsequent process, it becomes easy to determine the arrangement and mounting position of the probe.

In a relatively preferred case, the probe holder has a holder body, a high colloidal member and a low colloidal member arranged one above the other in sequence on the lower surface of the holder body along a vertical axis. The diverging probe unit of the probe module includes a lower diverging probe unit and a diverging probe unit higher than the position of the lower diverging probe unit. The low layer diverging probe unit is fixed with a low layer colloid member. The high-rise diverging probe unit is fixed with a high-rise colloid member. The length of the touch region of the probe of the high-rise diverging probe unit is greater than the length of the touch region of the probe of the low-rise divergence probe unit. The width of the lower colloidal member is defined as being parallel to the reference central axis. The distance between the first end of the inner extension of the outer probe of the low-rise diverging probe unit and the second end of the inner extension of the outer probe of the high-rise diverging probe unit, with respect to the outer probe located on the same side as the reference center axis. is defined as the reference distance parallel to the reference center axis. The width of the low layer colloid member is smaller than the reference distance.

In a relatively preferred case, the probe module has a high diverging probe unit and a low diverging probe unit depending on the conductive contacts of different units to be measured or different rows of the same unit to be measured. The reference distance is determined based on the unit to be measured. The width of the low layer colloid member is smaller than the reference distance. Due to the above-mentioned structural features, the width of the high-rise colloidal member is smaller than conventional ones. Furthermore, since the width of the holder body is slightly smaller than the width of the high-layer colloidal member, it is possible to solve the problem that the force to support the probe is insufficient due to the protrusion of the high-layer colloidal member and the low-layer colloidal member into the holder body. Due to the above-mentioned structural features, the widths of the high-layer colloidal member and the low-layer colloidal member are smaller than the conventional ones, and the outer extensions of the probe extend a greater distance from the colloidal member than the conventional ones, so that the outer extensions of the probe cross each other. , it is possible to improve the problem of vertical overlapping. Further, if the high-rise colloidal member is reduced, the distance between the intersecting position of the outer extending portion of the probe and the probe holder increases, so that the fixing device can be installed smoothly.

In a relatively preferred case, the holder body is defined with a width parallel to the reference central axis and a thickness extending along the vertical axis. The width of the holder body is 1/2 or less than the thickness of the holder body. Further, the thickness of the holder body is determined depending on the measuring instrument. The width of the higher colloidal member and the width of the lower colloidal member correspond to each other to create a force sufficient to support the probe. Therefore, as long as the width of the holder body can be reduced to 1/2 or less of the thickness of the holder body and enough force to support the probe can be maintained, the width of the high layer colloid member and the width of the low layer colloid member can be further reduced. , the distance that the outer extension of the probe extends from the colloidal member can be increased. The above-mentioned technical features can solve the problem of the outer extensions of the probe intersecting and overlapping, and the fixing device can be smoothly installed.

In a relatively preferred case, the width of the lower colloidal member is 3 mm or less. Due to the above-mentioned structural features, if the distance that the outer extension of the probe extends from the colloid member is increased while the high-layer colloidal member and the low-layer colloid member maintain sufficient force to support the probe, the outer extension of the probe can cross. This solves the problem of vertical overlapping and allows the fixation device to be installed smoothly.

In a relatively preferred case, the diverging probe unit of the probe module includes a low diverging probe unit and a high diverging probe unit higher than the position of the low diverging probe unit. The length of the touch region of the probe of the high-rise diverging probe unit is greater than the length of the touch region of the probe of the low-rise divergence probe unit. The outer extension of each probe has an inner end connected to a probe holder. For each probe unit, the distance between the inner ends of the outer extensions of the two outer probes is defined as the outer extension distance. The outer extension distance of the low-rise diverging probe unit is greater than the outer extension distance of the high-rise divergence probe unit. Due to the above-mentioned structural features, the outer extension distance of the low-rise diverging probe unit is relatively large, which can improve the problem of the outer extension parts of the probes intersecting and overlapping, and the fixing device can be smoothly installed.

In a relatively preferred case, the diverging probe unit of the probe module includes a low diverging probe unit and a high diverging probe unit higher than the position of the low diverging probe unit. The length of the touch region of the probe of the high-rise diverging probe unit is greater than the length of the touch region of the probe of the low-rise divergence probe unit. The tilt angle of the outer probe of the low-rise diverging probe unit is greater than or equal to the tilt angle of the outer probe of the high-rise diverging probe unit.

Compared to the low-rise diverging probe unit, the outer probe of the high-rise diverging probe unit has a relatively large total length of the fixing part and the extending part, so the outer extending part intersects with a region near the probe holder. Due to the above-mentioned structural features, the inclination angle of the outer probe of the high-rise diverging probe unit is smaller than the inclination angle of the outer contact of the unit to be measured, so that the probe can be effectively fixed by the fixing device during the probe mounting process. Further, the inclination angle of the outer probe of the low-rise diverging probe unit may be relatively large as long as the probe can be effectively fixed by the fixing device. For example, the tilt angle of the outer probe of the low-rise diverging probe unit is the same as the tilt angle of the outer contact of the unit to be measured, or between it and the tilt angle of the outer probe of the high-rise diverging probe unit. Or, if the inclination angle of the outer probe of the low-rise diverging probe unit is the same as the inclination angle of the outer probe of the high-rise diverging probe unit, the probe traces match.

In a relatively preferred case, the difference between the tilt angle of the outer probe of the low-rise diverging probe unit and the tilt angle of the outer probe of the high-rise diverging probe unit is 6 degrees or less. Specifically, if the inclination angle of the outer probe of the high-rise diverging probe unit is 12 degrees, the inclination angle of the outer probe of the low-rise diverging probe unit is either 12 degrees or between 12 degrees and 18 degrees. The above-described structural features allow the probe to be effectively fixed by the fixing device during the probe mounting process.

In a relatively preferred case, the probe holder has an inner probe converging surface opposite an inner probe diverging surface. When the probe module performs a measurement on the unit to be measured, the second edge of the unit to be measured is closer to the inner probe convergence surface than the first edge. The one or more probe units include one or more focusing probe units. The inner extension of the probe of the focusing probe unit is coupled at a first end to the inner probe focusing surface. The inner extension of the outer probe of the convergent probe unit has a second end closer to the reference center axis than the first end thereof and is oblique with respect to the reference center axis to form an inclined angle. The tilt angle of the outer probe of the converging probe unit is the same as the tilt angle of the outer probe of the diverging probe unit.

In a relatively preferred case, the probe module extends from two opposing inner surfaces of the probe holder in opposite directions to the unit to be measured, in order to accommodate conductive contacts of different units to be measured or different rows of the same unit to be measured. It has a divergent probe unit and a convergent-divergent probe unit arranged as follows. The above-mentioned structural features make it possible to eliminate the problem of probes concentrated on the same side of the probe holder intersecting and overlapping one above the other. Since the probe inclination angles of the divergent probe unit and the convergent probe unit are the same, the traces of the probes match.

In a relatively preferred case, the probes of the same probe unit constitute a plurality of needle layers of different heights on the probe holder. The sizes of the touch sites of the probes of different needle layers of the same probe unit gradually decrease from the second end of the inner extension part to the same position downwardly, and extend downwardly different distances. Two adjacent probes of the same probe unit are probes of different needle layers. Two adjacent probes of the same probe unit have different lengths of touch sites, which gradually decrease. Due to the above-mentioned structural features, the distance between adjacent probes is relatively small, making it possible to accommodate fine pitch measurements.

In a relatively preferred case, two adjacent probes of the same probe unit are not probes of adjacent needle layers. The difference between two adjacent probes of the same probe unit is not the height of one needle layer, but the height of two or more needle layers. Due to the above-described structural features, the distance between adjacent probes is relatively small, making it possible to support fine-pitch measurements.

The invention further provides a measurement system. The measurement system includes a platform and a probe card. The platform is used to place the unit to be measured. The probe card includes the probe module, and the probes of the probe module touch conductive contacts of the one or more units to be measured, thereby establishing electrical connection with the one or more units to be measured.

The detailed structure, characteristics, assembly or usage method of the probe module, the measurement object unit and its measurement system applied to the measurement object unit with inclined conductive contacts according to the present invention will be clearly explained through the detailed description of the embodiments below. do. In addition, it should be noted that the following detailed description and the embodiments presented by the present invention are merely examples for explaining the present invention, and those having common sense in the field related to the present invention will understand that the scope of claims of the present invention cannot be limited. If so, you should be able to understand it.

FIG. 2 is a top plan view of a measurement target unit having inclined conductive contacts, a probe holder, and a plurality of probes. FIG. 2 is a top plan view of a probe holder, a plurality of probes, and a fixing device. 1 is a top plan view of a probe module according to a first embodiment of the present invention; FIG. 1 is a sectional view showing a probe module according to a first embodiment of the present invention; FIG. 1 is a top plan view of a probe module and two measurement target units according to a first embodiment of the present invention; FIG. FIG. 7 is a top plan view of a probe module and four measurement target units according to a second embodiment of the present invention; FIG. 3 is a top plan view of a probe module according to a second embodiment of the present invention; FIG. 3 is a cross-sectional view of a probe module according to a second embodiment of the present invention. FIG. 3 is a perspective view of a probe holder of a probe module according to a second embodiment of the present invention. It is a schematic diagram showing the needle layer of the probe module in this invention. FIG. 2 is a schematic diagram showing a probe of a portion of a probe module and a conductive contact of a portion of a unit to be measured in the present invention. FIG. 2 is a schematic diagram showing a measurement system and a unit to be measured in the present invention.

Hereinafter, a probe module according to the present invention applied to a measurement target unit having inclined conductive contacts will be described with reference to the drawings. Note that in the specification and drawings, directional terms are expressed based on the direction in the drawings. The same reference numerals indicate structural features of the same or similar parts. For ease of explanation, the parts and their structures in the figures are not drawn to scale and numbers. Where the embodiments are practicable, the features of the different embodiments correspond to each other.

(First embodiment)
As shown in FIGS. 3 and 4, the probe module 20 according to the first embodiment includes a probe holder 30 and two probe units 40A and 40B. Probe units 40A and 40B each have a plurality of probes 50 including outer probes 50A and 50B.

The probe module according to the present invention is applicable to measuring a single unit or multiple units to be measured. In this embodiment, two measurement target units 60 are simultaneously measured by the probe module 20. As shown in FIG. 5, the measurement target unit 60 is the same as the measurement target unit 10 posted by the prior art (see FIG. 1). In order to clarify the features of the present invention, the parts of the measurement target unit 60 are indicated by different symbols from those in FIG. 1, and the explanation will be continued.

As shown in FIG. 5, the measurement target unit 60 has a first edge part 61 and a second edge part 62 (i.e., the X-axis of the long side) that are opposite in direction, and a first edge part 61 and a second edge part that are opposite in direction. 62, a plurality of conductive contacts 65 including an outer contact 65a, and a central axis 66. The plurality of conductive contacts 65 have a first end 651 toward the first edge 61 and a second end 652 toward the second edge 62 . The central axis 66 passes through the first edge 61 and the second edge 62 along the Y-axis. The plurality of conductive contacts 65 of the same measurement target unit 60 are arranged in one or more rows along the X axis. As shown in FIG. 5, the plurality of conductive contacts 65 of the same measurement target unit 60 are arranged in four rows. The same row of conductive contacts 65 includes the outer contacts 65a closest to the two side edges 63,64. The two outer contacts 65a each have a first end 651 closer to the central axis 66 than a second end 652, and are obliquely opposed to the central axis 66 to form an inclination angle θ1.

For convenience of explanation, the probe holder 30 is shown as a rectangular housing as shown in FIGS. 3 and 5. As shown in FIG. 4, the structure of the probe holder 30 is displayed based on a proportional relationship close to the actual object. In this embodiment, the probe holder 30 has a holder main body 31 with a rectangular frame, and a colloidal member 32 with a rectangular frame disposed on the lower surface 312 of the holder main body 31. The probe 50 is fixed to the holder main body 31 with a colloid member 32. Specifically, when fixing the probe 50 to the holder main body 31, the probe 50 with the same needle layer is set at a predetermined position at a predetermined angle, and the probe 50 is fixed with a black molten adhesive. Subsequently, the black molten adhesive is dried using a heater to form a portion of the colloid member 32. When the needle layers are stacked in the same manner and all the probes 50 are attached, the black adhesive of all the needle layers is combined to form the colloid member 32.

Each probe 50 is manufactured by mechanically bending a wire made of a conductive material such as metal, and has a cantilever portion 51 and a touch portion 52. The cantilever part 51 includes a fixing part 511 fixed to the colloid member 32 of the probe holder 30, an inner extending part 512 connected to one end of the fixing part 511 and extending from the probe holder 30 through the internal passage 33, and a fixing part. 511 and an outer extending portion 513 extending outward from the probe holder 30. Inner extension 512 has a first end 514 connected to probe holder 30 and a second end 515 opposite first end 514 . Touch portion 52 is coupled to second end 515 of inner extension 512 . As shown in FIG. 4, the touch region 52 of the probe 50 extends downward and diagonally from the second end 515 of the inner extension 512 at the same angle, or is not limited to this. It may be perpendicular to and extend downward. Therefore, as shown in FIG. 4, the touch portions 52 of the probes 50 of the same probe units overlap. As shown in FIGS. 3 and 5, the inner extension portion 512, fixed portion 511, and outer extension portion 513 of each probe 50 are arranged in a straight line. Specifically, in the probe 50 mounting process, after all the probes 50 are mounted, the shape of the colloid member 32 is adjusted, and it is dried with a heater, the inner extension portion 512 and fixed portion 511 of the cantilever portion 51 of each probe 50 are removed. After maintaining the straight line, the outer extension 513 is bent according to the actual situation, and the free end of the outer extension 513 (not shown in the figure) and the conductive contact (not shown in the figure) of the circuit board 81 (see FIG. 12) ), the circuit board 81 and probe module 20 are combined to form a probe card 80.

Probe module 20 has a reference center axis 22 . Since the second ends 515 of the inner extension portions 512 of the probes 50 of the same probe units 40A, 40B are arranged in a line perpendicular to the reference central axis 22, the touch portions 52 of the probes 50 of the same probe units 40A, 40B are The conductive contacts 65 are arranged in a row perpendicular to the reference central axis 22 and are then touched on the same row of conductive contacts 65 of the same unit 60 to be measured. Due to the above-mentioned technical feature, the farther the conductive contact 65 is away from the central axis 66 of the unit to be measured 60, the greater the inclination angle with respect to the central axis 66. The angle with respect to the portion 511 changes accordingly. That is, the farther the probe 50 is away from the reference central axis 22 of the probe module 20, the greater the inclination angle of the inner extension part 512 and the fixed part 511 toward the reference central axis 22.

In the present invention, the touch parts of the probes of the same probe unit are arranged in a line perpendicular to the reference center axis, but the invention is not limited thereto. Specifically, the touched parts of the probes of the same probe unit are not necessarily arranged in a straight line without being disturbed. The touch sites of the probes of the same probe unit are considered to be arranged in a line perpendicular to the reference central axis because their ends are within the range corresponding to the conductive contacts of the same row.

Next, we will proceed with the explanation by giving an example. In order to simplify the drawing and facilitate explanation, FIG. 11 shows six conductive contacts 65 of the conductive contacts 65 in the same row of the same unit to be measured and the touch portion of the probe that touches the six conductive contacts 65. Only the end of 52 is displayed. Since it is difficult to arrange probes at the same height because the distance between the same probe units is too small, the probes of the same probe unit are arranged in two rows, one above and the other, intersecting each other. The end of the touch site 52 is still within the range corresponding to the same row of conductive contacts 65 of the same unit to be measured. As shown in FIG. 11, the conductive contact 65 of the unit to be measured is very small and the corresponding probe is also very small, so that the touch part 52 of the probe of the same probe unit is connected to the conductive contact point 65 of the same column of the same unit to be measured. Within the range corresponding to the contact point 65, it is considered that the touch parts 52 of the probes of the same probe unit are lined up in a line perpendicular to the reference center axis. That is, in the present invention, the touch parts 52 of the probes of the same probe unit are arranged in a line perpendicular to the reference center axis.

Probe holder 30 has an inner probe divergent surface 34 and an inner probe convergent surface 35 opposite inner probe divergent surface 34 . When the probe module 20 performs measurement on the unit to be measured 60, the touch portions 52 of the probes 50 of the same probe units 40A and 40B are located above the conductive contacts 65 in the same row of the same unit to be measured 60. As shown in FIG. 5 , the first edge 61 of the unit to be measured 60 is closer to the inner probe divergence surface 34 than the second edge 62 . The second edge 62 of the unit to be measured 60 is closer to the inner probe convergence surface 35 than the first edge 61 . The inner extension portion 512 of the probe 50 of the probe unit 40A extends from the inner probe divergence surface 34 of the probe holder 30 and spreads to the inner probe divergence surface 34 corresponding to the inclined conductive contact 65 of the measurement target unit 60. Probe unit 40A becomes a divergent probe unit. In contrast, the inner extension portion 512 of the probe 50 of the probe unit 40B extends from the inner probe convergence surface 35 of the probe holder 30 and gradually reaches the inner probe convergence surface 35 corresponding to the inclined conductive contact 65 of the measurement target unit 60. Since the probe unit 40B is convergent, it becomes a convergent probe unit.

As shown in FIG. 3, a first end 514 of the inner extension portion 512 of the probe 50 of the diverging probe unit 40A is connected to the inner probe diverging surface 34. The inner extension portions 512 of the two furthest outer probes 50A of the probes 50 of the divergent probe unit 40A are diagonally opposite to the reference center axis 22 such that the first end 514 is closer to the reference center axis 22 than the second end 515. and forms an inclination angle θ2. The tilt angle θ2 is the maximum tilt angle of the divergent probe unit 40A. The inner extension 512 of the probe 50 of the focusing probe unit 40B has a first end 514 connected to the inner probe focusing surface 35. The inner extension portions 512 of the two farthest outer probes 50B of the probes 50 of the convergent probe unit 40B are obliquely opposed to the reference center axis 22 such that the second end 515 is closer to the reference center axis 22 than the first end 514. and forms an inclination angle θ3. The tilt angle θ3 is the maximum tilt angle of the convergent probe unit 40B.

When the probe module 20 simultaneously measures the fourth row of conductive contacts 65 of the two measurement target units 60 using the probe units 40A and 40B, the probe module 20 moves along the Z axis of the circuit board 81 (see FIG. 12) together with the circuit board. The conductive contact 65 is touched at the distal end of the touch portion 52 of the probe 50 while moving toward the measurement target unit 60 along the probe 50 . Since the probe module according to the present invention is applicable to measurement of a single or multiple measurement target units 60, a single row of conductive contacts 65 of a single measurement target unit 60 can be measured by a single probe unit, or multiple conductive contacts 65 can be measured by a single probe unit. It is also possible to measure multiple rows of conductive contacts 65 of a single unit to be measured 60 using the probe unit. That is, the number of probe units and the number of units to be measured in the probe module according to the present invention are not particularly limited. The probe units may be arranged according to the number of conductive contacts and the number of rows and columns of the unit to be measured.

A technical feature of the present invention is that the inclination angle θ2 (see FIG. 3) of the outer probe 50A of the divergent probe unit 40A is smaller than the inclination angle θ1 (see FIG. 5) of the outer contact 65a of the measurement target unit 60. Specifically, the inclination angle θ1 of the outer contact 65a of the measurement target unit 60 is 18 degrees. The inclination angle θ2 of the outer probe 50A of the divergent probe unit 40A is 18 degrees or less. In order to ensure that the probe does not deviate from the conductive contact and reliably touches the conductive contact when the probe touches the conductive contact, the inclination angle θ2 is preferably 12 degrees or larger. When the inclination angle θ2 is 12 degrees, the effect is significant. If the inclination angle θ3 of the outer probe 50B of the convergent probe unit 40B is the same as the inclination angle θ2 of the outer probe 50A of the divergent probe unit 40A, the traces of the probes match.

As shown in FIG. 3, in the process of attaching the probe 50 to the probe holder 30, the outer extending portion 513, the fixing portion 511, and the inner extending portion 512 of the cantilever portion 51 of the probe 50 have the same angle. As shown in FIG. 2, the outer extension portion 513 of the probe 50 of the diverging probe unit 40A gradually converges from the outer surface 36 of the probe holder 30 and intersects with it, so that the inclination angle θ2 of the outer probe 50A is It is smaller than the inclination angle θ1 of the outer contact 65a. The intersecting position 42 of the diverging probe unit 40A is spaced apart from the outer surface 36 of the probe holder 30, maintaining a sufficient distance between the probe holder 30 and the fixing device 70. In order to concisely explain the situation of the crossed outer extensions 513 and the action of the fixing device 70, FIG. 2 does not correspond to FIG. 3, but is created based on proportional relationships such as the actual size or distance of each part. isn't it. When attaching the probe 50 to the probe holder 30, the outer extension part 513 of the probe 50 is temporarily fixed with the fixing device 70, and then the fixing part 511 of the probe 50 is fixed with black adhesive. The probe 50 set at the mounting position can be prevented from deviating from the position. Once all the probes 50 have been attached, the fixing device 70 is removed. The fixing device 70 is disposed between the intersection point 42 of the probe 50 and the probe holder 30, and produces a good fixing effect on the probe 50. That is, in the process of attaching the probe 50 to the probe module 20, the fixing device 70 can effectively fix the probe 50.

(Second embodiment)
As shown in FIGS. 6 to 8, the differences between the probe module 20' according to the second embodiment and the probe module 20 according to the first embodiment are as follows. In the second embodiment, the probe module 20' has four probe units corresponding to the four measurement target units 60, namely two divergent probe units 40A, 40A' and two convergent probe units 40B, 40B'.

For convenience of explanation, the probe holder 30 is shown as a rectangular housing as shown in FIGS. 6 and 7. As shown in FIG. 8, the structure of the probe holder 30 is displayed based on a proportional relationship close to the actual object. As shown in FIG. 9, in this embodiment, the probe holder 30 includes a holder body 31 with a rectangular frame, and a high-rise colloid layer arranged in a stacked manner on the lower surface 312 of the holder body 31 along the vertical axis (i.e., the Z axis). It has a member 37 and a low-layer colloid member 38. The formation method and function of the high-layer colloid member 37 and the low-layer colloid member 38 are the same as those of the colloid member 32 in the first embodiment.

The divergent probe unit of the probe module 20' includes a high-rise divergent probe unit 40A fixed with a high-rise colloid member 37 and a low-rise divergent probe unit 40A' fixed with a low-rise colloid member 38. The focusing probe unit of the probe module 20' includes a high-rise focusing probe unit 40B fixed with a high-rise colloid member 37 and a low-rise focusing probe unit 40B' fixed with a low-layer colloid member 38. The high-rise divergent probe unit 40A and the high-rise convergent probe unit 40B are located relatively higher than the low-rise diverging probe unit 40A' and the low-rise convergent probe unit 40B', and the fixed part 511 and the inner extension part 512 of the cantilever part 51 of the probe 50 are relatively high. The relatively large total length allows it to extend to the center of the internal passageway 33 of the probe holder 30. Furthermore, since the touch portions 52 of the probes 50 of the high-rise divergent probe unit 40A and the high-rise convergent probe unit 40B are relatively long, the high-rise divergent probe unit 40A, the low-rise divergent probe unit 40A', the high-rise convergent probe unit 40B, and the low-rise convergent probe unit 40B' The ends of the touch sites 52 of the probes 50 can be located at the same height.

In this embodiment, the high diverging probe unit and the low diverging probe unit or the high rise converging probe unit and the low converging probe unit, ie different probe units correspond to measuring different rows of conductive contacts 65. The needle layer, ie the same probe unit corresponding to the measurement of the same row of conductive contacts 65, may be divided into multiple needle layers. For example, in the first embodiment and the second embodiment, the probes 50 of the same probe unit have needle layers 71 to 77 of different heights on the probe holder 30. As shown in FIGS. 8 and 10, the touch portions 52 of the probes 50 of the needle layers 71 to 77 of the same probe unit at different heights are located at the same size and lower height. The distance it extends downward varies. The above-described structural features allow the distal ends of the touch sites 52 of the probe 50 to be located at the same height.

As shown in FIG. 10, seven adjacent probes 50 of the same probe unit are not arranged in the order of needle layers 71 to 77, but are located separately in needle layers 71 to 77. Two adjacent probes 50 are not probes 50 in adjacent needle layers. Specifically, the difference between the cantilever sections 51 of two adjacent probes 50 is the height of two or more needle layers. For example, if the second probe 50 from the left is located on the third needle layer 73, the first and third probes 50 adjacent to the second probe 50 are located on the second needle layer adjacent to the third needle layer 73. It is not in the layer 72 and the fourth needle layer 74, but in the sixth needle layer 76 and the seventh needle layer 77, which are three and four different from the third needle layer 73. Due to the above-mentioned structural characteristics, in two adjacent probes 50, the height of the cantilever portion 51 of the probe 50 with a relatively low needle layer is compared with the touch portion 52 of the probe 50 with a relatively high needle layer. Corresponds to narrow areas. In other words, since the distance between adjacent probes 50 is relatively small, it is possible to support fine pitch measurements. The effects described above cannot necessarily be achieved by the configuration shown in FIG. The same probe unit is not necessarily divided into seven needle layers. The difference between the cantilever sections 51 of adjacent probes 50 is not necessarily the height of two or more needle layers. In other words, if the same probe unit is divided into two or more needle layers and two adjacent probes 50 are located in different needle layers, the intermediate distance between the probes 50 can be reduced to a certain extent.

To summarize the above, the main technical feature of the present invention is the diverging probe unit. As shown in FIGS. 6 and 7, in this embodiment, the inclination angle θ2' of the outer probe 50A' of the low-rise diverging probe unit 40A' is the same as the inclination angle θ2 of the outer probe 50A of the high-rise diverging probe unit 40A. That is, the inclination angles θ2 and θ2' are smaller than the inclination angle θ1 (see FIG. 5) of the outer contact 65a of the measurement target unit 60. Due to the above-mentioned structural features, in the process of mounting the probe 50 on the probe holder 30, the high-rise diverging probe unit 40A and the low-rise diverging probe unit 40A' are located between the intersecting position of the outer extension portion 513 of the probe 50 and the probe holder 30, respectively. To provide sufficient spacing, the probe 50 can be effectively fixed by placing a fixing device 70 therebetween, as shown in FIG.

As shown in FIGS. 6 and 7, the outer extension 513 of each probe 50 has an inner end 516 connected to the probe holder 30. As shown in FIGS. For each probe unit, the distance between the inner ends of the outer extensions of the outer probes is defined as the outer extension distance. That is, the outer extension distance d1 of the low-rise diverging probe unit 40A' is the distance between the inner ends 516 of the outer extension parts 513 of the outer probe 50A'. The outer extension distance d2 of the high-rise diverging probe unit 40A is the distance between the inner ends 516 of the outer extensions 513 of the outer probe 50A. In this embodiment, the outer extension distance d1 of the low-rise diverging probe unit 40A' is greater than the outer extension distance d2 of the high-rise divergence probe unit 40. The intersection position of the outer probe 50A' of the low-rise diverging probe unit 40A' is farther from the outer surface 36 of the probe holder 30 than the high-rise diverging probe unit 40A. Due to the above-mentioned structural features, as shown in FIG. 2, the probe 50 is effectively fixed by the fixing device 70, and the inclination angle θ2' of the outer probe 50A' of the low-rise diverging probe unit 40A' is lower than that of the high-rise diverging probe unit. It can be ensured that the inclination angle θ2 of the outer probe 50A of 40A is greater than the inclination angle θ2 or the same as the inclination angle θ1 of the outer contact 65a of the measurement target unit 60. Specifically, the inclination angle θ1 of the outer contact 65a of the measurement target unit 60 is 18 degrees. The inclination angle θ2 of the outer probe 50A of the divergent probe unit 40A is 18 degrees or less, and most preferably 12 degrees. The above-mentioned structural features not only allow the probe to touch the conductive contacts reliably, but also allow the fixing device to effectively fix the probe 50 and position it in the best possible condition. It is preferable that the difference between the inclination angle θ2' of the outer probe 50A' of the low-rise diverging probe unit 40A' and the inclination angle θ2 of the outer probe 50A of the high-rise diverging probe unit 40A is 6 degrees or less. The inclination angle θ2 is from 12 degrees to 18 degrees, or from more than 12 degrees to less than 18 degrees. In this embodiment, the inclination angle θ2' and the inclination angle θ2 are the same, and the traces of the probe can be matched. The inclination angle θ3 of the outer probe 50B of the high-rise convergent probe unit 40B and the inclination angle θ3' of the outer probe 50B' of the low-rise convergent probe unit 40B' are the same as the inclination angle θ2, and the traces of the probes can be matched.

As shown in FIG. 8, the width W1 of the low-layer colloidal member 38 is defined to be parallel to the reference central axis 22 (ie, the Y-axis). The width W2 of the high-rise colloidal member 37 is defined as being parallel to the reference central axis 22. With respect to the outer probe located on the same side as the reference central axis 22, the first end 514 of the inner extension 512 of the outer probe 50A' of the low-rise diverging probe unit 40A' and the inner extension of the outer probe 50A of the high-rise diverging probe unit 40A. 512 and the second end 515, that is, the reference distance D is defined as being parallel to the reference central axis 22. The reference distance D is defined with the leftmost or rightmost outer probe 50A, 50A' in FIGS. 6 and 7 as a reference. As shown in FIG. 8, a reference distance D is defined based on the outer probe 50A located at the lowest needle layer 77 of the probe unit 40A. The reference distance D is not the actual distance between the first end 514 of the outer probe 50A' and the second end 515 of the outer probe 50A, but is the distance to a vector parallel to the reference central axis 22 (i.e., a vector on the Y axis). . In this embodiment, the width W1 of the low layer colloid member 38, the width W2 of the high layer colloid member 37, and the width W3 of the holder body 31 are not the entire width of the low layer colloid member 38, the high layer colloid member 37, and the holder body 31, but are each a single width. This is the actual width of one probe unit with respect to the fixing portion 511 of the probe 50 (that is, the portion having a supporting effect other than the internal passage 33).

The reference distance D is determined based on the measurement target unit 60. The width W1 of the low-layer colloidal member 38 corresponds to the width W2 of the high-rise colloidal member 37, which is smaller than the conventional one, and is also smaller than the reference distance D. The width W3 of the holder body 31 is slightly smaller than the width W2 of the high-rise colloid member 37. With the above-described structural features, it is possible to solve the problem that the force to support the probe 50 is insufficient due to the protrusion of the high-layer colloidal member 37 and the low-layer colloidal member 38 into the holder body 31. In this embodiment, the width W1 of the low-layer colloid member 38 is smaller than the reference distance D, so even if the width W3 of the holder body 31 is smaller than the conventional one, the problem of insufficient force to support the probe 50 can be solved. . Furthermore, if the measurement target unit 60 is extremely small, the distance between the outer probes of the corresponding probe module is small, and the distance that the outer extension part 513 of the probe 50 of the diverging probe units 40A, 40A' protrudes from the probe holder 30 (i.e., the outer Since the extending distances d1, d2) are even smaller, the problem that the outer extending portions 513 of the probe 50 intersect and overlap vertically is likely to occur. Therefore, a problem arises in that it is difficult to judge the placement position of the probe 50 in the subsequent stage of the probe card manufacturing process, which hinders the work of electrically connecting the probe 50 and the circuit board 81 (see FIG. 12). do. In contrast, in the present invention, the width W2 of the high layer colloid member 37 and the width W1 of the low layer colloid member 38 are smaller than the conventional ones, and the outer extending distances d1 and d2 are larger than the conventional ones. The problem of crossing and overlapping can be improved. Further, by reducing the width W2 of the high-layer colloid member 37 and the width W1 of the low-layer colloid member 38, the distance between the intersection position of the outer extension portion 513 of the probe 50 and the probe holder 30 is increased, and the fixing device 70 can be smoothly attached. can do. Further, since the outer extension distance d1 is larger than the outer extension distance d2, the phenomenon in which the outer extension portions 513 of the probes 50 intersect and overlap vertically in the low-rise diverging probe unit 40A' rarely occurs.

The width W1 of the low-layer colloid member 38 is 3 mm or less. Due to the above-mentioned structural features, the outer extensions extending from the higher layer colloid member 37 and the lower layer colloid member 38 of the outer extension portion 513 of the probe 50 are maintained so that the high layer colloid member 37 and the lower layer colloid member 38 can sufficiently support the probe 50. By increasing the distances d1 and d2, the problem of the outer extensions 513 of the probe 50 intersecting and overlapping vertically can be solved, and the fixing device can be smoothly installed.

In this embodiment, the width W3 of the holder body 31 is 1/2 of the thickness T of the holder body 31 or less. Further, the thickness T of the holder main body 31 is determined depending on the measuring instrument. The width W2 of the high-layer colloid member 37, the width W1 of the low-layer colloid member 38, and the width W3 of the holder body 31 correspond to each other and generate a force that sufficiently supports the probe 50. In other words, as long as the width W3 of the holder body 31 can be reduced to 1/2 or less of the thickness T of the holder body 31 and the force to sufficiently support the probe 50 can be maintained, the width W2 of the high-rise colloid member 37 and The width W1 of the low-layer colloid member 38 can be reduced, and the distance that the outer extension portion 513 of the probe 50 extends from the high-layer colloid member 37 and the low-layer colloid member 38 (i.e., the outer extension distances d1 and d2) can be increased. The above-mentioned technical features can solve the problem of the outer extensions 513 of the probe 50 intersecting and overlapping, and the fixing device can be smoothly installed.

As shown in FIG. 12, in the present invention, the probe modules 20 and 20' are applied to a probe card 80 and used to measure the measurement target unit 60. In contrast, the present invention further provides a measurement system. The measurement system includes a pedestal 83 on which a probe card 80 and one or more units to be measured 60 are placed, and when the probes 50 of the probe modules 20, 20' touch the conductive contacts 65 of the unit to be measured 60, the probe card 80 is mounted. and the unit to be measured 60 are electrically connected to perform measurement.

The present invention further provides a measurement method for a unit to be measured having inclined conductive contacts. The measurement method includes the following steps (a) to (c).

Step (a) is to provide a probe module 20, 20'.

Step (b) is to prepare one or more units 60 to be measured. Components in FIG. 12 are simplified to simplify the drawing and facilitate explanation. The structures of the probe modules 20, 20 and the unit to be measured 60 are clearly displayed as shown in FIGS. 1 to 11, and therefore their description will be omitted.

Step (c) is to electrically connect the probe modules 20, 20' and the unit to be measured 60 by touching the conductive contacts 65 of the unit to be measured 60 with the probe modules 20, 20'.

Specifically, the probe card 80 is composed of probe modules 20, 20' and a circuit board 81. The unit to be measured 60 is placed on a platform 83 . The platform 83 and/or the probe card 80 are moved by a moving device (not shown in the figure). In other words, the moving device moves the probe card 80 without moving the unit to be measured 60, moves the unit to be measured 60 without moving the probe card 80, or moves both. When performing measurement, the position of the end of the touch part 52 of the probe 50 is aligned along the vertical axis direction with the conductive contact 65 of the unit to be measured 60, and the probe card 80 and the unit to be measured 60 are aligned along the vertical axis direction. and bring them closer together. Next, by touching the end of the touch part 52 of the probe 50 to the conductive contact 65 of the measurement target unit 60, the conductive contact 65 of the measurement target unit 60 and the probe 50 of the probe module 20, 20' are electrically connected. do. A circuit board 81 of the probe card 80 is electrically connected to a tester (not shown in the figure). Subsequently, the test signal from the tester is transmitted to the conductive contacts 65 of the unit to be measured 60 via the circuit board 81 and the probe 50, and then from the conductive contacts 65 of the unit to be measured 60 to the probe 50 and the circuit board 81. If the signal is transmitted to the tester via the tester, the unit 60 to be measured can be measured.

As described above, the present invention is not limited to the above-described embodiments, and can be implemented in various forms without departing from the spirit of the invention.

10: Unit to be measured 11: First conductive contact 12: Second conductive contact 13: Substrate 131: First long side 132: Second long side 14: Intermediate block 15, 16: Outer block 17: Probe 171: Cantilever Part 172: Fixed part 173: Inner extension part 174: Outer extension part 18: Probe holder L: Temporary boundary line θ: Inclination angle 20, 20': Probe module 22: Reference center axis 30: Probe holder 31: Holder body 312: Lower surface 32: Collagen member 33: Internal passage 34: Inner probe divergence surface 35: Inner probe convergence surface 36: Outer surface 37: High-rise colloid member 38: Low-layer colloid member 40A: High-rise divergence probe unit 40A': Low-rise divergence probe unit 40B: High-rise convergence probe unit 40B': Low-rise convergence probe unit 42: Intersection position 50: Probe 50A, 50A', 50B, 50B': Outer probe 51: Cantilever part 511: Fixed part 512: Inner extension part 513: Outer extension part 514: First end 515: Second end 516: Inner end 52: Touch area 60: Unit to be measured 61: First edge 62: Second edge 63, 64: Side edge 65: Conductive Contact 65a: Outside contact 651: First end 652: Second end 66: Center axis 70: Fixing device 71 to 77: Needle layer 80: Probe card 81: Circuit board 83: Mounting table θ1, θ2, θ2', θ3, θ3': Inclination angle d1, d2: Outward extension distance D: Reference distance W1: Width of low layer colloid member W2: Width of high layer colloid member W3: Width of holder body T: Thickness of holder body

Claims (19)

A probe module that is applied to a measurement target unit having an inclined conductive contact and measures one or more of the measurement target units, the probe module comprising:
The unit to be measured has a first edge, a second edge, two side edges connecting the first edge and the second edge, a plurality of conductive contacts, and a center axis. and the plurality of conductive contacts have a first end toward the first edge and a second end toward the second edge, and the central axis is between the first edge and the second edge. The plurality of electrically conductive contacts are arranged in one or more rows extending through the edges, the electrically conductive contacts in the same row including the two outer contacts closest to the two side edges, each of the outer contacts is inclined relative to the central axis such that the first end is closer to the central axis than the second end, forming an oblique angle;
The probe module includes a probe holder and one or more probe units;
The one or more probe units have a plurality of probes, the plurality of probes including two furthest outer probes, each having a cantilever portion and a touch portion. The cantilever part has a fixing part fixed to the probe holder, and an inner extending part and an outer extending part connected to both ends of the fixing part and extending from the probe holder, and the inner extending part has a fixing part fixed to the probe holder. a first end connected to a holder, and a second end connected to the touch site;
The probe module has a reference center axis, and the touch parts of the probes of the same probe unit are arranged in a line perpendicular to the reference center axis, and the touch parts of the probes of the same probe unit are arranged in a line perpendicular to the reference center axis, and Touch the sexual contact point,
The probe holder has an inner probe divergence surface, and when the probe module measures the measurement target unit, the first edge of the measurement target unit is closer to the inner probe divergence surface than the second edge. close to,
The one or more probe units include one or more diverging probe units, and the inner extension of the probe of the diverging probe unit has the first end connected to the inner probe diverging surface, and The inner extending portion of the outer probe is inclined with respect to the reference center axis so that the first end is closer to the reference center axis than the second end, forming an inclined angle.
The inclination angle of the outer probe of one or more of the diverging probe units is smaller than the inclination angle of the outer contact of the unit to be measured, the probe being applied to a unit to be measured having an inclined conductive contact. module. The probe holder has a holder body, a high colloidal member and a low colloidal member disposed in sequence on a lower surface of the holder body along a vertical axis;
The diverging probe unit of the probe module includes a low-rise divergent probe unit and a high-rise diverging probe unit higher than the position of the low-rise divergent probe unit, and the low-rise divergent probe unit is fixed with the low-rise colloid member, and the high-rise divergent probe unit is fixed to the low-rise diverging probe unit. the unit is fixed with the high-rise colloidal member;
the length of the touch region of the probe of the high-rise diverging probe unit is greater than the length of the touch region of the probe of the low-rise divergence probe unit;
The width of the low-layer colloid member is defined as being parallel to the reference central axis,
With respect to the outer probe located on the same side as the reference center axis, the first end of the inner extension of the outer probe of the low-rise diverging probe unit and the inner extension of the outer probe of the high-rise diverging probe unit. and the second end is defined as a reference distance parallel to the reference center axis;
The probe module according to claim 1, wherein the width of the low-layer colloid member is smaller than the reference distance. The divergent probe unit of the probe module includes a low-rise divergent probe unit and a high-rise divergent probe unit higher than the position of the low-rise divergent probe unit,
the length of the touch region of the probe of the high-rise diverging probe unit is greater than the length of the touch region of the probe of the low-rise divergence probe unit;
the outer extension of each probe has an inner end connected to the probe holder;
Each of the probe units is defined such that the distance between the inner ends of the outer extensions of the two outer probes is an outer extension distance;
The probe module as claimed in claim 1, wherein the outer extension distance of the low-rise diverging probe unit is greater than the outer extension distance of the high-rise diverging probe unit. The divergent probe unit of the probe module includes a low-rise divergent probe unit and a high-rise divergent probe unit higher than the position of the low-rise divergent probe unit,
the length of the touch region of the probe of the high-rise diverging probe unit is greater than the length of the touch region of the probe of the low-rise divergence probe unit;
The inclined conductor according to claim 1, wherein the tilt angle of the outer probe of the low-rise diverging probe unit is the same as or larger than the tilt angle of the outer probe of the high-rise diverging probe unit. A probe module that is applied to a measurement target unit that has sexual contacts. The probe holder has an inner probe convergence surface opposite to the inner probe divergence surface, and when the probe module measures the measurement target unit, the second edge of the measurement target unit is aligned with the first side. closer to the inner probe convergence surface than the edge;
The one or more probe units include one or more focusing probe units, and the inner extension of the probe of the focusing probe unit has the first end connected to the inner probe focusing surface, and the inner extension of the probe of the focusing probe unit has the first end connected to the inner probe focusing surface, and The inner extending portion of the outer probe has the second end closer to the reference center axis than the first end, and is oblique with respect to the reference center axis to form the inclination angle;
The measuring object unit with inclined conductive contacts according to claim 1, wherein the tilt angle of the outer probe of the converging probe unit is the same as the tilt angle of the outer probe of the diverging probe unit. Probe module applicable to. A probe module applied to a measurement target unit having inclined conductive contacts and comprising a probe holder and a plurality of probe units, the probe module comprising:
Each of the probe units has a plurality of probes, each of the plurality of probes includes two outermost probes, each having a cantilever part and a touch part, and the cantilever part has a fixing part fixed to the probe holder. and an inner extending portion and an outer extending portion connected to both ends of the fixing portion and extending from the probe holder, the inner extending portion having a first end connected to the probe holder and the touch portion. a second end connected to the
The probe module has a reference center axis, and the touch parts of the probes of the same probe unit are arranged in a line perpendicular to the reference center axis,
the probe holder has an inner probe divergence surface;
The plurality of probe units includes two diverging probe units, and the inner extension of the probe of each of the diverging probe units has the first end connected to the inner probe diverging surface, and The inner extending portion of the outer probe is inclined with respect to the reference center axis so that the first end is closer to the reference center axis than the second end, forming an inclined angle.
The two divergent probe units include a low-rise divergent probe unit and a high-rise divergent probe unit that is higher than the position of the low-rise divergent probe unit, and the length of the touch region of the probe of the high-rise divergent probe unit is greater than the length of the touch part of the probe of the high-rise divergent probe unit. greater than the length of the touch portion of the probe of the unit;
the outer extension of each probe has an inner end connected to the probe holder;
Each of the probe units is defined such that the distance between the inner ends of the outer extensions of the two outer probes is an outer extension distance;
The outer extension distance of the low-rise diverging probe unit is larger than the outer extension distance of the high-rise diverging probe unit. The probe holder has a holder body, a high-layer colloidal member and a low-layer colloidal member arranged one on top of the other on the lower surface of the holder body along a vertical axis, and the width of the low-layer colloidal member is parallel to the reference center axis. Then it is defined,
the low-rise diverging probe unit is fixed with the low-rise colloid member, the high-rise diverging probe unit is fixed with the high-rise colloid member,
With respect to the outer probe located on the same side as the reference center axis, the first end of the inner extension of the outer probe of the low-rise diverging probe unit and the inner extension of the outer probe of the high-rise diverging probe unit. and the second end is defined as a reference distance parallel to the reference center axis;
The probe module according to claim 6, wherein the width of the low-layer colloid member is smaller than the reference distance. The holder body is defined to have a width parallel to the reference central axis and a thickness extending along a vertical axis, and the width of the holder body is 1/2 or less than the thickness of the holder body. A probe module applied to a measurement target unit having an inclined conductive contact according to claim 2 or 7. 8. The probe module according to claim 2 or 7, wherein the width of the low-layer colloid member is 3 mm or less. 7. The measurement target unit with inclined conductive contacts according to claim 6, wherein the inclination angle of the outer probe of the low-rise diverging probe unit is larger than the inclination angle of the outer probe of the high-rise diverging probe unit. Probe module applicable to. the probe holder has an inner probe converging surface opposite the inner probe diverging surface;
The one or more probe units include one or more focusing probe units, and the inner extension of the probe of the focusing probe unit has the first end connected to the inner probe focusing surface, and the inner extension of the probe of the focusing probe unit has the first end connected to the inner probe focusing surface, and The inner extending portion of the outer probe has the second end closer to the reference center axis than the first end, and is oblique with respect to the reference center axis to form the inclination angle;
7. The measurement target unit with inclined conductive contacts according to claim 6, wherein the inclination angle of the outer probe of the converging probe unit is the same as the inclination angle of the outer probe of the diverging probe unit. Probe module applicable to. The probes of the same probe unit constitute a plurality of needle layers with different heights on the probe holder, and the size of the touch region of the probes of the different needle layers of the same probe unit is different from the size of the touch region of the inner extension portion, respectively. 2. The probes have different heights downward from the second end to the same position, extend downwardly at different distances, and two adjacent probes of the same probe unit are probes of different needle layers. A probe module applied to a measurement target unit having an inclined conductive contact according to claim 1 or claim 6. 13. The probe module according to claim 12, wherein two adjacent probes of the same probe unit are not probes of adjacent needle layers. 3. The difference between the inclination angle of the outer probe of the low-rise diverging probe unit and the inclination angle of the outer probe of the high-rise diverging probe unit is 6 degrees or less. A probe module applied to a measurement target unit having an inclined conductive contact according to claim 4 or claim 6. The inclination angle of the outer probe of the high-rise diverging probe unit is 12 degrees, and the inclination angle of the outer probe of the low-rise diverging probe unit is 12 degrees, or between 12 degrees or more and 18 degrees or less, or 18 degrees. The probe module applied to a measurement target unit having an inclined conductive contact according to claim 14. The inclination angle of the outer probe of one or more of the diverging probe units is 12 degrees or more than 12 degrees and less than 18 degrees, having an inclined conductive contact as claimed in claim 1 or 6. Probe module applied to the unit to be measured. The probe module according to claim 16, wherein the inclination angle of the outer probe of one or more of the diverging probe units is 12 degrees. A first edge, a second edge, two side edges connecting the first edge and the second edge, a plurality of electrically conductive edges being tested by the probe module of claim 1; A unit to be measured having a sexual contact point and a central axis,
The plurality of conductive contacts have a first end toward the first edge and a second end toward the second edge,
The central axis passes through the first edge and the second edge,
The plurality of electrically conductive contacts are arranged in one or more rows, and the electrically conductive contacts in the same row include two outer contacts closest to the two side edges, and the two outer contacts are each adjacent to the second outer contact. The first end is closer to the central axis than the other ends and is oblique with respect to the central axis to form an inclined angle;
The unit to be measured, wherein the inclination angle of the outer contact point is larger than the inclination angle of the outer probe of one or more of the diverging probe units of the probe module. A measurement system capable of measuring one or more units to be measured and comprising a platform and a probe card,
The platform is for mounting one or more of the units to be measured,
The probe card has a probe module according to claim 1, and the probe module is configured to connect the probe card and the one or more measurement targets by touching the conductive contacts of the one or more measurement target units. A measurement system characterized by electrical connection with a unit.

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