TWI704358B - Suitable for probe modules with multiple units to be tested with inclined conductive contacts - Google Patents

Abstract

A probe module suitable for multiple units to be tested with inclined conductive contacts, comprising first and second probe holders whose inner sides face opposite directions, and plural first probe holders and plural probe holders respectively arranged on the first and second probe holders. Two probes, each probe includes a cantilever section and a one-point contact section. The cantilever section has a fixed part fixed to the first or second probe holder, and a fixed part connected to the fixed part and from the first or second probe holder The inner side surface extends out of the exposed part, and the point contact section is connected to the exposed part. The probe module can define at least one imaginary probe unit dividing line to divide a plurality of probe units. The same probe unit has only The first or second probes and their point contact ends are all located on the same side of the dividing line of the imaginary probe unit; thereby, the probe module can simultaneously detect more units to be tested and avoid probe interference.

Description

Suitable for probe modules with multiple units to be tested with inclined conductive contacts

The present invention relates to the probe module of the probe card, and particularly relates to a probe module suitable for multi-UUT with inclined conductive contacts.

Please refer to FIG. 1, which shows a unit under test (UUT) with inclined conductive contacts. The unit under test 10 can be an unpackaged die or a packaged chip. The unit under test 10 has a plurality of first conductive contacts 11 arranged in one or more rows for outputting signals, and a plurality of second conductive contacts 12 arranged in a row for inputting signals, such as the one shown in FIG. 1 The unit under test 10 has three rows of first conductive contacts 11 arranged from a first long side 131 of a substrate 13 toward a second long side 132, and a row of first conductive contacts 11 arranged along the second long side 132 of the substrate 13 Two conductive contacts 12, the first and second conductive contacts 11, 12 are arranged in multiple rows, and the arrangement direction of each row is substantially parallel to an imaginary boundary axis L perpendicular to the first and second long sides 131, 132 , And close to the imaginary boundary axis L, such as the one included in a middle block 14 in FIG. 1, wherein the long sides 111, 121 of the first and second conductive contacts 11, 12 are substantially parallel to the imaginary boundary Axis L, and the first and second conductive contacts 11, 12 in the row farther from the imaginary boundary axis L are inclined conductive contacts, which are closer to one end of the first long side 131 of the substrate 13 and closer to the imaginary boundary The axis L is farther from the end of the first long side 131 of the substrate 13 and also farther away from the imaginary boundary axis L, that is, the inclined conductive contact is inclined from top to bottom and from the inside to the outside in the direction of FIG. 1, and The farther the first and second conductive contacts 11, 12 are from the imaginary boundary axis L, the greater the angle relative to the imaginary boundary axis L. For example, the first and second conductive contacts included in the two outer blocks 15, 16 in FIG. The angles θ1 and θ2 of the long sides 111 and 121 of the contacts 11 and 12 with respect to the virtual boundary axis L are the largest.

The aforementioned unit under test 10 can be tested by using a probe card with a cantilever probe. To simplify the diagram, only a probe 17 corresponding to the second conductive contact 12 on the left is schematically shown in FIG. Each conductive contact 11, 12 corresponds to a probe, and the cantilever section 171 of the probe 17 can extend from a probe holder 18 above the second long side 132 of the unit under test 10 to the conductive contact Above 12, one of the touch sections (not shown in the figure) extending downward from the end of the cantilever section 171 of the probe 17 can touch the corresponding conductive contact 12.

However, because the unit under test 10 has inclined conductive contacts with inconsistent tilt angles, it is difficult to arrange the probes required for its detection on the probe holder, especially for the detection of multiple units under test, that is, at least two units to be tested at the same time. In the measurement unit 10, there will be doubts that the probes 17 interfere with each other. Furthermore, in order to improve the detection efficiency, it may be necessary to simultaneously detect four, six, eight or more units under test 10 with the same probe card, which is more likely to cause the problem of the probes 17 interfering with each other.

In view of the above-mentioned deficiencies, the main purpose of the present invention is to provide a probe module, which is suitable for the detection of multiple units under test with inclined conductive contacts similar to the above-mentioned, so as to avoid the interference of the probes and simultaneously detect relatively Multiple units to be tested can produce higher detection efficiency.

To achieve the above object, the probe module provided by the present invention is used to simultaneously detect at least one first unit to be tested and at least one second unit to be tested, each of the first unit to be tested and the second unit to be tested has a row A plurality of conductive contacts in at least one row. The probe module includes a first probe holder, a second probe holder and a plurality of probes. The first probe holder and the second probe holder respectively have an inner side surface, and the inner side surface of the first probe holder and the inner side surface of the second probe holder face substantially opposite directions. The probes include a plurality of first probes arranged on the first probe base and a plurality of second probes arranged on the second probe base, each of the probes includes a cantilever section and a point contact section, each The cantilever section of the first probe has a fixing portion fixedly connected to the first probe holder, and a exposed portion connected to the fixing portion and extending from the inner side surface of the first probe holder. The cantilever section of the second probe has a fixed portion fixedly connected to the second probe base, and a exposed portion connected to the fixed portion and extending from the inner side of the second probe base, each of the probes The touch section of the needle is connected to the exposed part. The probe module can define at least one imaginary probe unit boundary line, the probes are divided into a plurality of probe units by the at least one imaginary probe unit boundary line, and the same probe unit contains only the first probe Or only the second probe is included, and the end of the point contact segments of the probes of the same probe unit are all located on the same side of the dividing line of the imaginary probe unit. When the probe module detects the first unit to be tested and the second unit to be tested, the first probes all touch the conductive contacts of the at least one first unit to be tested with their touch segments, All of the second probes touch the conductive contacts of the at least one second unit to be tested with their touch sections.

In other words, the conductive contacts of the first unit under test touched by the probe module are all touched by the first probe, and all the conductive contacts of the second unit to be tested touched by the probe module are all Touched by the second probe, that is, the conductive contacts of the same unit to be tested are touched by the probes extending from the same probe holder. Therefore, the distribution positions of the first and second units to be tested are obviously In the case of being separable, the first and second probes can also be divided into plural probe units correspondingly. When the probe module detects the first and second units to be tested, the conductive contacts of the first unit to be tested and the conductive contacts of the second unit to be tested are located on different sides of the dividing line of the imaginary probe unit, That is, the probe module of the present invention is mainly used to simultaneously detect the units under test whose distribution positions can be separated by the boundary of the imaginary probe unit. In this way, even if there is still a first unit under test and a second unit under test, The two units to be tested are adjacent, and their corresponding probes extend from the first and second probe holders respectively, so that the problem of probe interference can be avoided. The probe module of the present invention is particularly suitable for detecting a plurality of units to be tested arranged in a matrix. The at least one first unit to be tested and the at least one second unit to be tested may be a part of the units to be tested and are respectively located After the probe module detects the part of the unit under test at the same time in two adjacent rows, it only needs to move a short distance to detect another part of the unit under test located in two adjacent rows, so that the probe module can not only simultaneously To detect more units to be tested, it is also possible to perform sub-tests for a larger number of units to be tested to produce higher detection efficiency.

Regardless of whether the number of the first and second units to be tested at the same time is one or more, a first unit to be tested can be adjacent to a second unit to be tested, even if each unit to be tested is the same as in the prior art For the unit to be tested with inclined conductive contacts, the direction in which the exposed parts of the cantilever sections of the first and second probes extend from the inner sides of the first and second probe holders can still match the corresponding conductive contacts The extension direction of the point to prevent the probe from accidentally sliding onto the non-corresponding conductive contact during point measurement. In this case, it is used to touch the first and second probes of the first and second units under test respectively. Located on different sides of the dividing line of the imaginary probe unit, the problem of mutual interference of the probes can be avoided.

The detailed structure, characteristics, assembly or use of the probe module provided by the present invention, which is suitable for multiple units under test with inclined conductive contacts, will be described in the detailed description of the subsequent embodiments. However, those with ordinary knowledge in the field of the present invention should be able to understand that these detailed descriptions and specific examples for implementing the present invention are only used to illustrate the present invention, and are not intended to limit the scope of the patent application of the present invention.

The applicant first explains here that in the following embodiments and drawings, the same reference numbers indicate the same or similar elements or structural features. It should be noted that the various elements and structures in the drawings are for illustrative purposes and are not drawn based on actual proportions and quantities, and if possible in implementation, the features of different embodiments can be applied interactively.

2-6, the probe module 20 provided by a first preferred embodiment of the present invention mainly includes a first probe holder 21, a second probe holder 22, and a plurality of first probes 30A~ D, and a plurality of second probes 30E~H.

Each of the first and second probes 30A~H is made of a conductive material (for example, metal) by bending a straight needle, as shown in FIG. 6, each of the first and second probes 30A~H includes There is a cantilever section 31 and a one-point contact section 32. The cantilever section 31 has a fixed portion 311 fixedly connected to the first probe holder 21 or the second probe holder 22, and a fixed portion 311 connected to the fixed portion 311 and separated from the first probe holder. An inner side surface 211 of a probe holder 21 or an inner side surface 221 of the second probe holder 22 extends out of the exposed portion 312. As shown in FIGS. 2 to 5, the cantilever sections 31 of the first and second probes 30A~H are not bent so that the fixed portion 311 and the exposed portion 312 are in a straight line, while the first and second probes of the other portion The cantilever sections 31 of the needles 30A-H are bent so that the fixed portion 311 and the exposed portion 312 are not in a straight line. As shown in FIG. 6, the touch section 32 of each of the first and second probes 30A~H extends downward from the end of the exposed portion 312.

The first probe holder 21 and the second probe holder 22 are made of insulating material (for example, vinyl), and the first and second probe holders 21, 22 have their inner sides 211, 221 facing each other. That is, the inner side surfaces 211, 221 of the first and second probe holders 21, 22 are substantially facing opposite directions. In addition, as shown in FIG. 6, the first and second probe holders 21, 22 are usually fixed to the bottom surface 41 of a circuit board 40, so that the circuit board 40, the first and second probe holders 21, 22 and the Wait for the first and second probes 30A~H to combine to form a probe card.

In the embodiment of the present invention, the fixing portion 311 of each of the first and second probes 30A~H is located in the first or second probe holder 21, 22, and the fixing method is to use vinyl to simultaneously apply the same needle layer The probe (detailed below) is set at a predetermined position on the probe base, and then the black glue is baked to fix the probe on the probe base. However, the fixing portion 311 of each of the first and second probes 30A~H can also be fixed on the outer surface of the first or second probe holder 21, 22 by glue. Each of the first and second probes 30A~H may further have a connecting section (not shown in the figure) extending from an outer surface 212 of the first probe holder 21 or an outer surface 222 of the second probe holder 22 (Shown) to electrically connect to the conductive contacts (not shown in the figure) on the bottom surface 41 of the circuit board 40 through the connecting section.

The fixed portion 311 of the inclined probes 30A~H in this embodiment (that is, the first and second probes 30A~H whose exposed portion 312 is inclined) includes an inner section 311a connected to the exposed portion 312 (as shown in FIG. 2 Shown), and an outer section 311b extending from the inner section 311a to the outer surface of the probe base and connected to the aforementioned connecting section. The inner section 311a is aligned with the exposed portion 312 and is inclined, and the outer section Section 311b is in line with the aforementioned connecting section and is perpendicular to the inner and outer sides of the probe holder (that is, parallel to the non-tilted probe). The way the probe is inclined is based on the corresponding conductive connection. Point extension direction D2 (detailed below) Place the linear needle on the probe holder and fix the inner section 311a of the fixing portion 311 with black glue to fix the exposed portion 312 of the probe at a desired angle (That is, parallel to the extension direction D2 of the corresponding conductive contact), at this time the probe has been fixed on the probe base, and the fixing portion 311 is bent so that the outer section 311b and the connecting section are perpendicular to the probe The inner and outer sides of the seat are then fixed with black glue on the outer section 311b. This method can facilitate the bending operation, and the bending angle of the probe can be well fixed and not easy to rebound.

The probe module of the present invention is used to detect multiple units to be tested, that is, to detect multiple units to be tested at the same time. For example, as shown in FIG. 2, the probe module 20 of this embodiment is used to detect eight units at the same time. The unit to be tested includes four first units to be tested 50A~D arranged in a first row C1 and positioned toward the first probe holder 21, and arranged in a second row C2 and positioned toward the second probe Block 22 of the fourth second unit to be tested 50E~H. The unit under test in the embodiment of the present invention is the same as the unit under test 10 (shown in FIG. 1) described in the prior art, but in order to describe the features of the present invention more clearly, a different description is used in the embodiment The way is combined with different component numbers from FIG. 1 to further illustrate the unit under test.

The first unit under test 50D of the eight units under test closest to the second probe holder 22 is adjacent to the second unit under test 50H of the eight units under test closest to the first probe holder 21. More specifically, as shown in FIG. 3, an upper surface 56 of each of the test units 50A~H has first and second main edges 51, 52 (usually long sides) facing opposite directions, connecting the first and second The main edges 51, 52 and the first and second side edges 53, 54 (usually short sides) facing opposite directions, and a plurality of conductive contacts 55, the second main edge 52 and the second side of the first unit under test 50D The intersection of the edge 54 is adjacent to the intersection of the first main edge 51 and the first side edge 53 of the second unit under test 50H. When the probe module 20 detects the waiting units 50A~H, the first probe holder 21 is located above the outer side of the first main edge 51 of the first unit under test 50A, and the second probe holder 22 It is located above the outer side of the second main edge 52 of the second unit under test 50E. In other words, the first main edge 51 of each unit under test 50A~H is closer to the first probe holder than the second main edge 52 21. The second main edge 52 of each unit under test 50A~H is closer to the second probe holder 22 than the first main edge 51, and the probe module 20 is integrally (together with the aforementioned circuit board 40) facing Move down, and then touch the conductive contacts 55 of the waiting unit 50A-H with the end of the touch-contact section 32 of the first and second probes 30A-H.

It should be noted here that the units under test 50A~H of this embodiment respectively have conductive contacts arranged in multiple rows, including multiple rows of conductive contacts close to the first main edge 51 for signal output, and A row of conductive contacts 55 for signal input is provided along the second main edge 52. The probe module 20 of this embodiment mainly only detects the conductive contacts 55 of the row for inputting signals. More specifically, when the probe module 20 detects the first and second test units 50A~ At H, the first probes 30A~D only touch the row of conductive contacts 55 that is the farthest from the first probe holder 21 between the first unit under test 50A~D, and the second probes 30E~H only touch the row of conductive contacts 55 that is closest to the second probe holder 22 of each of the second unit under test 50E~H. Therefore, only the row of conductive contacts is provided in the drawing of the present invention Number 55, other conductive contacts are not numbered, and only the conductive contact 55 is used as a representative in the following to further describe the conductive contact. The shape and configuration of the other conductive contacts are similar to the conductive contact 55.

In addition, the present invention defines the touch direction D1 of the first and second probes 30A~H (as shown in FIG. 6) as downward, and uses this as a reference to describe the directionality of other features (such as up, down, top). , Bottom and other terms), for example, the upper surface 56 of each of the aforementioned units under test 50A~H provided with conductive contacts 55 is the surface facing the opposite direction of the touch direction D1, and the aforementioned circuit board 40 is fixed to the first The bottom surface 41 of the first and second probe holders 21 and 22 is the surface facing the touch direction D1. However, the aforementioned directionality only describes that each feature tends to the touch direction D1 (for example, downward) or the opposite direction of the touch direction D1 (for example, upward), rather than conforms to the touch direction D1 or D1 without error. The direction opposite to the touch direction D1. For example, the touch section 32 of each of the first and second probes 30A~H extends downward from the end of the exposed portion 312, which means that the touch section 32 is directed toward the The touch direction D1 extends, or, as shown in FIG. 6, the touch section 32 is inclined toward the touch direction D1 with respect to the touch direction D1.

In each of the units under test 50A~H, each of the conductive contacts 55 has a first end 551 facing the first main edge 51 and a second end 552 facing the second main edge 52, which is a simplified diagram , Only the first end 551 and the second end 552 are marked on the three conductive contacts 55 in FIG. 3, each of the conductive contacts 55 can define an extension direction from the first end 551 to the second end 552 D2. In this embodiment, each of the units under test 50A~H can define an imaginary demarcation axis A1 (as shown in FIG. 2), and the imaginary demarcation axis A1 of each unit under test 50A~H and the first side edge 53 The extending direction D2 of the conductive contact point 55 between is parallel to the imaginary demarcation axis A1 (for example, the conductive contact point 55 in the middle block 57 marked in FIG. 4) or is close to the first side edge 53 relative to the imaginary The demarcation axis A1 is inclined (for example, the conductive contact 55 located in the left block 58 shown in FIG. 4), the conductive contact 55 between the imaginary demarcation axis A1 of each unit under test 50A~H and the second side edge 54 The extension direction D2 is parallel to the imaginary demarcation axis A1 (for example, the conductive contact 55 in the middle block 57 marked in FIG. 4) or is inclined with respect to the imaginary demarcation axis A1 toward the second side edge 54 ( For example, the conductive contact 55 located in the right block 59 marked in FIG. 4). More specifically, the extension direction D2 of the conductive contact 55 (the conductive contact 55 located in the middle block 57) near the imaginary demarcation axis A1 is parallel to the imaginary demarcation axis A1, and the farther away from the imaginary demarcation axis A1 The greater the degree of inclination of the conductive contact 55 with respect to the imaginary boundary axis A1.

The probe module 20 of this embodiment can define a imaginary probe unit boundary line A2 (as shown in FIG. 2), and most of the first probe holder 21 and the first probes 30A~D are located there. One of the first side (left side) of the imaginary probe unit boundary line A2, and the ends of the touch segments 32 of the first probes 30A~D are all located on the first side of the imaginary probe unit boundary line A2 for point Touch the conductive contacts 55 of the first test units 50A~D; most of the second probe holder 22 and the second probes 30E~H are located at one of the imaginary probe unit boundary lines A2. Side (right side), and the ends of the touch sections 32 of the second probes 30E~H are all located on the second side of the imaginary probe unit dividing line A2, used to touch the second units under test 50E~H The conductive contacts 55.

As shown in FIGS. 2 to 6, the first probes 30A~D are arranged in four rows in an arrangement that substantially corresponds to the conductive contacts 55 of the first units 50A~D to be tested. The probe holder 21 forms the first to fourth needle layers L11~L14 of different heights. The first probes 30A~D of the same needle layer extend to the same row of conductive contacts 55. More specifically, the first needle layer of the same needle layer The vertical distance between the end of the touch section 22 of a probe 30A~D and the inner surface 211 of the first probe holder 21 can be substantially the same, but not necessarily exactly the same, as long as it can be used to touch the same row of conductive contacts. Click it. The first to fourth needle layers L11~L14 of the first probe holder 21 are sequentially arranged from bottom to top. The higher the position of the needle layer, the longer the cantilever section 31 of the first probe and the end of the section 32 The farther the distance from the inner side surface 211 of the first probe holder 21 is, the farther the distance from the first probe holder 21 is, the 50A~D conductive contacts 55 of the first unit under test, that is, the The first to fourth needle layers L11~L14 correspond to the first test units 50A~D, respectively. When the probe module 20 detects the waiting test units 50A~H, the first needle layer L11 The cantilever section 31 of the probe 30A passes over the first main edge 51 of the first unit under test 50A and respectively extends to above the conductive contacts 55 of the first unit under test 50A (as shown in FIG. 2), and then Touch the conductive contacts 55 of the first unit under test 50A with its touch sections 32, and the first probe 30B of the second needle layer L12 passes through the first probe unit of the first unit under test 50A with its cantilever section 31 , The two main edges 51, 52 and the first main edge 51 of the first unit under test 50B respectively extend above the conductive contact 55 of the first unit under test 50B (as shown in FIG. 3), and then use their points The contact segments respectively touch the conductive contacts 55 of the first unit under test 50B, and so on.

Similarly, the second probes 30E~H are arranged in four rows in a substantially corresponding arrangement of the conductive contacts 55 of the second unit to be tested 50E~H, and the second probe base 22 is formed differently. The height of the first to fourth needle layers L21~L24, the second probes 30E~H of the same needle layer extend to the same row of conductive contacts 55, more specifically, the second probes 30E~H of the same needle layer The vertical distance between the end of the point contact section 32 and the inner surface 221 of the second probe holder 22 (for example, the vertical distance d shown in FIG. 6 is the end of the point contact section 32 of the second probe 30E of the first needle layer L21 and The vertical distance of the inner side surface 221 of the second probe holder 22 may be substantially the same, but not necessarily exactly the same, as long as it can be used to touch the same row of conductive contacts. The first to fourth needle layers L21~L24 of the second probe holder 22 are sequentially arranged from bottom to top. The higher the position of the needle layer, the longer the cantilever section 31 of the second probe 30E~H and the touch The farther the distance between the end of the segment 32 and the inner surface 221 of the second probe holder 22 is, the farther the distance from the second probe holder 22 the conductive contact 55 of the second unit under test 50E~H is. That is, the first to fourth needle layers L21~L24 correspond to the second test units 50E~H, respectively. When the probe module 20 detects the waiting test units 50A~H, the first needle layer L21 The second probe 30E has its cantilever section 31 passing over the second main edge 52 of the second unit under test 50E and respectively extends to above the conductive contacts 55 of the second unit under test 50E (as shown in Fig. 2) , And then touch the conductive contacts 55 of the second unit under test 50E with its touch sections 32, and the second probe 30F of the second needle layer L22 passes through the cantilever section 31 of the second unit under test 50E. The first and second main edges 51, 52 and the second main edge 52 of the second unit under test 50F respectively extend above the conductive contacts 55 of the second unit under test 50F (as shown in FIG. 3), and then The touch segments 32 respectively touch the conductive contacts 55 of the second unit under test 50F, and so on.

In this embodiment, the direction in which the exposed portions 312 of each of the first and second probes 30A~H extend from the probe holders 21, 22 substantially corresponds to the points of the first and second probes 30A~H to which they belong The extending direction D2 of the conductive contact 55 to be touched, here referred to as "substantially corresponding", means that the direction in which the exposed portion 312 extends from the probe holder 21, 22 does not necessarily have to be the extending direction of the corresponding conductive contact 55 D2 is the same or opposite, but when viewed from top to bottom (that is, the direction of Fig. 2 to Fig. 5), the exposed portion 312 is almost parallel to the extending direction D2 of the corresponding conductive contact 55, which can avoid the first and second The point contact section 32 of the probes 30A~H deviates from the corresponding conductive contact 55 during point contact, which causes a problem of inaccurate point contact. In other words, the inclination angle configuration of the exposed parts 312 of the first and second probes 30A-H is similar to the inclination angle configuration of the conductive contacts 55.

In detail, as shown in FIG. 2, the first probes 30A~D can define a first imaginary dividing line A3 perpendicular to the inner surface 211 of the first probe holder 21 (and the first The imaginary dividing axis A1 of the measuring units 50A~D coincide), and the direction in which the exposed portions 312 of the first probes 30A~D extend from the inner side surface 211 is parallel to the first imaginary dividing line A3 (for example, the corresponding figure The first probes 30A~D of the middle block 57 marked in 4) or gradually away from the first imaginary boundary line A3 are inclined relative to the first imaginary boundary line A3 (for example, corresponding to the left and right sides marked in FIG. 4) The first probes 30A~D in blocks 58, 59). Similarly, the second probes 30E~H can define a second imaginary boundary line A4 perpendicular to the inner surface 221 of the second probe holder 22 (and the imaginary boundary axis of the second unit under test 50E~H A1 coincides), the direction in which the exposed portions 312 of the second probes 30E~H extend from the inner side surface 221 is parallel to the second imaginary dividing line A4 (for example, corresponding to the middle block 57 marked in FIG. 4 The second probes 30E~H) or approach the second imaginary dividing line A4 and being inclined relative to the second imaginary dividing line A4 (for example, the second probe corresponding to the left and right blocks 58, 59 marked in FIG. 4) Pin 30E~H).

With the probe configuration of the probe module of the present invention, under the premise that so many probes are arranged in the probe holder at an appropriate interval, the aforementioned effect of ensuring the touch of the probe can still be achieved. In addition, in this embodiment, the outer sections 311b of the fixing portions 311 of the first and second probes 30A~H are substantially parallel to each other, which makes it easier to arrange the probes on the probe holder; however, With the probe configuration of the probe module of the present invention, it is also convenient to bend the probe with the fixed part 311 and the exposed part 312 substantially in line (that is, the inclined probe is bent at the connection point of the fixed part and the exposed part, The fixed part is not divided into inner and outer sections but in the same direction as a whole) is arranged on the probe base, which can simplify the bending process of the probe.

More importantly, the probe module of the present invention can be used to detect many units to be tested at the same time, and is particularly suitable for detecting a plurality of units to be tested arranged in a matrix, among which the first and second units to be tested can be A part of the units to be tested are located in two adjacent rows. After the probe module detects the part of the units to be tested at the same time, it only needs to move a short distance to detect another part of the units to be tested in two adjacent rows. Taking the probe module 20 and the units under test 50A~H of this embodiment as an example, and from the direction of FIGS. 2 to 5, the lower side (or even the upper side) of the first unit under test 50A~D and the first The upper side (or even the lower side) of the two units to be tested 50E~H can be provided with other units to be tested, that is, the first row C1 and the second row C2 can respectively have more than the first and second units to be tested 50A~ Units to be tested other than H, and more rows of units to be tested can be provided on the left side of the first row C1 and the right side of the second row C2. The probe module 20 has completed testing the eighth shown in the drawings of this embodiment After one unit under test 50A~H, another eight adjacent units under test can be detected, such as the four units under test on the upper side of the second units under test 50E~H and the four units under test on the right side (not shown in the figure) ), by performing multiple tests in this way, all the units to be tested can be quickly tested to achieve good test efficiency.

The foregoing embodiment takes the simultaneous detection of eight test units 50A~H and only one row of conductive contacts 55 of each test unit 50A~H as an example. Therefore, the total number of needle layers L11~L14, L21~L24 is equal to The number of units 50A~H to be tested is the same, so that the required detection purpose and good detection efficiency can be achieved under the premise of convenient probe configuration. However, the probe module of the present invention can be configured for a single or multiple first unit to be tested and a single or multiple second unit to be tested according to usage requirements, and can also be detected separately by multiple needle layers of the same probe base The plurality of rows of conductive contacts of the same unit to be tested, that is, the total number of pin layers is not necessarily the same as the number of units to be tested, but the same as the number of rows of conductive contacts to be tested.

Regardless of whether the number of the first and second units to be tested at the same time is one or more, the first unit to be tested can be adjacent to the second unit to be tested, and the adjacent state can be the same as the first In the preferred embodiment, the first unit under test 50D and the second unit under test 50H are adjacent to each other, or, as shown in FIGS. 7 and 8, the first unit under test in a second preferred embodiment of the present invention 50D is adjacent to the second unit under test 50H. In the second preferred embodiment, the second side edge 54 of the first unit under test 50D is the same as the first side edge of the second unit under test 50H 53 adjacent to each other, so the extension direction D2 of the conductive contact 55 of the first unit under test 50D adjacent to the second side edge 54 and the extension direction D2 of the conductive contact 55 of the second unit under test 50H adjacent to the first side edge 53 Are close to each other. Even in this case, since the first and second probes used to touch the first and second units to be tested are located on different sides, the cantilever sections of the first and second probes 30A~H The direction in which the exposed portion 312 of 31 extends from the inner side surfaces 211, 221 of the first and second probe holders 21, 22 can still match the extending direction D2 of the corresponding conductive contact 55 without interference of the probes. The problem.

In the foregoing embodiment, the probes of the probe module 20 are only divided into two probe units by a virtual probe unit boundary line A2, that is, the first probe including all the first probes 30A~D The unit 61 and the second probe unit 62 including all the second probes 30E~H are shown in FIGS. 2 and 7 (only part of the probes are shown in FIGS. 2 and 7). However, the present invention can also be applied to the cells under test arranged in three rows in the third and fourth preferred embodiments of the present invention as shown in FIGS. 9 and 10, where the first row C1 and the third row C3 are biased The first unit under test 50A~D of the first probe holder 21, and the second row C2 is the second unit under test 50E~H biased toward the second probe holder 22, that is, the third and fourth preferred implementations The cells to be tested in the example are the cells to be tested in the first and second preferred embodiments respectively plus the cells to be tested in the third row C3 that are the same as the first row C1. In the third and fourth preferred embodiments, the probes of the probe module 20 are divided by a first virtual probe unit boundary A21 and a second virtual probe unit boundary A22 into one that only includes the first The first probe unit 61 of one probe 30A~D (only the first probe 30D is shown in Fig. 9 and Fig. 10), and a first probe unit 61 that contains only the second probe 30E~H (only shown in Fig. 9 and Fig. 10 The second probe unit 62 of the second probe 30H), and a third probe unit 63 that only includes the first probes 30A~D (only the first probe 30D is shown in FIGS. 9 and 10) , That is, the probe module 20 in the third and fourth preferred embodiments is based on the probe module 20 of the first and second preferred embodiments, plus the same as the first probe unit 61 The third probe unit 63. The first probe unit 61 and the second probe unit 62 are respectively located on two sides of the boundary line A21 of the first imaginary probe unit. The second probe unit 62 and the third probe unit The units 63 are respectively located on both sides of the boundary line A22 of the second imaginary probe unit, that is, between the end of the point contact section 32 of the first probe 30A~D of the first probe unit 61 and the second probe unit 62 The ends of the touch sections 32 of the second probes 30E~H are located on different sides of the dividing line A21 of the first imaginary probe unit, and the ends of the touch sections 32 of the second probes 30E~H of the second probe unit 62 The end of the point contact section 32 of the first probe 30A~D of the third probe unit 63 is located on a different side of the boundary line A22 of the second imaginary probe unit, so that the aforementioned effects can also be achieved.

It is conceivable that the present invention can also be applied to units to be tested arranged in more rows in the same arrangement as the aforementioned arrangement, such as the arrangement in the fifth and sixth preferred embodiments of the present invention shown in FIGS. 11 and 12 The four rows of cells to be tested are the cells to be tested in the third and fourth preferred embodiments respectively plus a second cell to be tested 50E~H in the fourth row C4 which is the same as the second row C2. In the fifth and sixth preferred embodiments, the probes of the probe module 20 are divided into four probe units from the first to third imaginary probe unit dividing lines A21~A23, except for the third and The first to third probe units 61 to 63 described in the fourth preferred embodiment are the same as the second probe unit 62 and only include the second probes 30E to H (in FIGS. 11 and 12) Only the fourth probe unit 64 of the second probe 30H) is shown. The third probe unit 63 and the fourth probe unit 64 are respectively located on both sides of the boundary A23 of the third imaginary probe unit, that is, The end of the point contact section 32 of the first probe 30A~D of the third probe unit 63 and the end of the point contact section 32 of the second probe 30E~H of the fourth probe unit 64 are located in the third virtual probe. Different sides of the needle unit dividing line A23, so that the aforementioned effects can also be achieved.

Furthermore, the present invention can also be applied to the units under test arranged in a row in a seventh preferred embodiment of the present invention as shown in FIG. 13. The distribution of the units under test in this embodiment is based on the first preferred embodiment In the example, the first and second test units 50A~H are arranged in two adjacent rows instead of being arranged in the same row. The first and second probes of the probe module 20 of this embodiment can be arranged in parallel to the first , The imaginary probe unit boundary A2 of the inner sides 211, 221 of the two probe holders 21, 22 is divided, and the first probes 30A~D (only the first probe 30D is shown in Figure 13) touch All the ends of the segment 32 are located between the imaginary probe unit dividing line A2 and the first probe holder 21, and the touch sections of the second probes 30E~H (only the second probe 30H is shown in FIG. 13) All ends of 32 are located between the imaginary probe unit dividing line A2 and the second probe holder 22, so that the aforementioned effects can also be achieved.

Furthermore, the probe module 20 of the present invention can also be applied to the eighth preferred embodiment of the present invention as shown in FIG. 14 arranged in a first row C1 and a second row C2 (even more Column) the cells under test 50A~H, the cells under test 50A~H in the first column C1 and the second column C2 are the same as the first and second cells under test 50A~H in the seventh preferred embodiment, respectively Arrangement, and the first row C1 and the second row C2 are separated by a distance greater than the widths W3 and W4 of the first and second units under test 50A~H (W3 and W4 are equal in this embodiment) . Correspondingly, the probe module 20 of this embodiment includes a first probe unit 61 that is the same as the probe distribution of the seventh preferred embodiment, and is used to touch one of the first row C1 test cells 50A~H. And a second probe unit 62, and a third probe unit 63 which is the same as the first probe unit 61 and the second probe unit 62 and is used to touch the second row of C2 test cells 50A~H. The fourth probe unit 64.

In detail, the probe module 20 of this embodiment can define a first imaginary probe unit boundary line A21 parallel to the inner sides 211, 221 of the first and second probe holders 21, 22, and substantially A second virtual probe unit boundary line A22 and a third virtual probe unit boundary line A23 perpendicular to the first virtual probe unit boundary line A21 only include the first probes 30A~D (Figure 14 only It is shown that the first and third probe units 61, 63 of the first probe 30D) are located between the first imaginary probe unit boundary A21 and the first probe holder 21, and only include the second probe 30E ~H (only the second probe 30H is shown in FIG. 14) The second and fourth probe units 62, 64 are located between the first imaginary probe unit dividing line A21 and the second probe holder 22, the Between the second imaginary probe unit boundary line A22 and the third imaginary probe unit boundary line A23, there is a spacing space P at the end of the point contact section without any probe, and the width W5 of the spacing space P is greater than a first The widths W3 and W4 of the first and second test units 50A~H, the first and second probe units 61, 62 and the spacing space P are located on different sides of the second imaginary probe unit boundary line A22, the third and fourth The probe units 63, 64 and the spacing space P are located on different sides of the third imaginary probe unit boundary line A23. More specifically, the spacing space P is located on the right side of the second imaginary probe unit boundary line A22 And the left side of the third virtual probe unit boundary line A23, that is, the spacing space P is located between the second virtual probe unit boundary line A22 and the third virtual probe unit boundary line A23, the first and second probes The tip ends of the probes 30A~H of the needle units 61 and 62 (only the probes 30D and 30H are shown in Figure 14) are all located on the left side of the boundary line A22 of the second imaginary probe unit, the third and fourth probes The touch point ends of the probes 30A~H of the units 63 and 64 (only the probes 30D and 30H are shown in Fig. 14) are all located on the right side of the boundary line A23 of the third imaginary probe unit.

The probe module 20 of this embodiment can not only achieve the aforementioned high detection efficiency and prevent probe interference, but more importantly, another row of units under test 50A~H is actually arranged in the space P, and The left side of the first row of C1 unit to be tested and the right side of the second row of C2 unit to be tested are also provided with more rows of units to be tested 50A~H. The probe module 20 of this embodiment simultaneously detects the first and After the two columns C1 and C2 have a total of sixteen test units 50A~H, just move a short distance to detect the other two columns adjacent to the first and second columns C1 and C2 test units 50A~H. Test units 50A~H, for example, a column of test units 50A~H (not shown in the figure) in the interval space P and a column of test units 50A~H (not shown in the figure) on the right side of the second column C2. In this way, multiple detections can quickly detect all the units to be tested and achieve better detection efficiency.

In the aforementioned preferred embodiment of the present invention, only the probe units containing the first probes 30A~D, such as the aforementioned first and third probe units 61, 63, can be used as the outermost second probe unit. The distance between the fixing portion 311 of a probe (that is, the outermost first probe 30A) is defined as a first fixing portion cloth width W1 (as shown in FIG. 2), and the first fixing portion cloth width W1 is smaller than the The width W3 of the first unit under test 50A~D. In addition, the probe unit that only includes the second probe 30E~H, such as the aforementioned second and fourth probe units 62, 64, can be used as the outermost two of the second probe (that is, the outermost probe). The distance between the fixing portion 311 of the second probe 30H) is defined as a second fixing portion cloth width W2, which is greater than the width W4 of the second unit under test 50E~H (in the present invention In the preferred embodiment, W3 and W4 are equal). Furthermore, the width W2 of the second fixing part is greater than the width W1 of the first fixing part. With the above-mentioned distribution of probe units and the distribution of the above-mentioned probe fixing parts, so many probes can be arranged in the probe holder at appropriate intervals to achieve high detection efficiency and avoid probe interference. The effect.

Finally, it must be explained again that the constituent elements disclosed in the previously disclosed embodiments of the present invention are merely examples and are not intended to limit the scope of the case. Alternatives or changes to other equivalent elements should also be the scope of the patent application for this case. Covered.

[Prior Art]

10: Unit to be tested

11: The first conductive contact

111: long side

12: The second conductive contact

121: long side

13: substrate

131: The first long side

132: second long side

14: Middle block

15, 16: Outer block

17: Probe

171: Cantilever

18: Probe holder

L: imaginary dividing axis

θ1, θ2: angle

[Example]

20: Probe module

21: The first probe holder

211: inside

212: outer side

22: The second probe holder

221: inside

222: outer side

30A~D: the first probe

30E~H: second probe

31: Cantilever section

311: Fixed part

311a: inner section

311b: Outer section

312: Exposed

32: Touch segment

40: circuit board

41: Bottom

50A~D: The first unit to be tested

50E~H: The second unit to be tested

51: First Main Edge

52: Second Main Edge

53: first side edge

54: second side edge

55: Conductive contact

551: first end

552: second end

56: upper surface

57: middle block

58: Left block

59: right block

61: The first probe unit

62: The second probe unit

63: The third probe unit

64: The fourth probe unit

A1: Imaginary dividing axis

A2: Boundary line of imaginary probe unit

A21: The boundary of the first imaginary probe unit

A22: The second imaginary probe unit boundary

A23: The boundary of the third imaginary probe unit

A3: The first imaginary dividing line

A4: The second imaginary dividing line

C1: first column

C2: second column

C3: third column

C4: fourth column

D1: Touch direction

D2: Extension direction

d: vertical distance

L11~L14: the first to fourth needle layers

L21~L24: the first to fourth needle layers

P: Interval

W1: width of the first fixed part

W2: width of the second fixed part

W3, W4, W5: width

Figure 1 is a schematic top view of a unit under test with inclined conductive contacts, a probe and a probe holder. 2 is a schematic top view of a probe module and eight units under test provided by a first preferred embodiment of the present invention, but the probes shown therein are only the first and second probes of the first needle layer. Figure 3 is similar to Figure 2, except that the probes shown are only the first and second probes of the second needle layer. Figure 4 is similar to Figure 3, except that the probes shown are only the first and second probes of the third needle layer. Figure 5 is similar to Figure 4, except that the probes shown are only the first and second probes of the fourth needle layer. 6 is a side view of the probe module, the waiting unit and a circuit board provided by the first preferred embodiment of the present invention. Fig. 7 is similar to Fig. 5, but shows eight DUTs in different arrangements and the corresponding probe module provided by a second preferred embodiment of the present invention. 8 is a side view of the probe module, the waiting unit and a circuit board provided by the second preferred embodiment of the present invention. 9 is a schematic top view of the probe module and twelve units under test provided by a third preferred embodiment of the present invention, but the probes shown are only the first and second probes of the fourth needle layer . 10 is a schematic top view of the probe module and twelve units under test provided by a fourth preferred embodiment of the present invention, but the probes shown are only the first and second probes of the fourth needle layer . 11 is a schematic top view of the probe module and sixteen units under test provided by a fifth preferred embodiment of the present invention, but the probes shown are only the first and second probes of the fourth needle layer . 12 is a schematic top view of the probe module and sixteen units under test provided by a sixth preferred embodiment of the present invention, but the probes shown are only the first and second probes of the fourth needle layer . 13 is a schematic top view of a probe module and eight units under test provided by a seventh preferred embodiment of the present invention, but the probes shown are only the first and second probes of the fourth needle layer. 14 is a schematic top view of a probe module and sixteen units under test provided by an eighth preferred embodiment of the present invention, but the probes shown are only the first and second probes of the fourth needle layer .

21: The first probe holder

211: inside

212: outer side

22: The second probe holder

221: inside

222: outer side

30A: First probe

30E: second probe

31: Cantilever section

311: Fixed part

311a: inner section

311b: Outer section

312: Exposed

50A~D: The first unit to be tested

50E~H: The second unit to be tested

55: Conductive contact

61: The first probe unit

62: The second probe unit

A1: Imaginary dividing axis

A2: Boundary line of imaginary probe unit

A3: The first imaginary dividing line

A4: The second imaginary dividing line

C1: first column

C2: second column

L11, L21: the first needle layer

W1: width of the first fixed part

W3: width

Claims (25)

A probe module suitable for multiple units under test with inclined conductive contacts, which is used to simultaneously detect at least one first unit under test and at least one second unit under test, each of the first unit under test and the second unit under test The unit to be tested has a plurality of conductive contacts arranged in at least one row; the probe module includes: a first probe holder and a second probe holder, each having an inner side surface, inside the first probe holder The side surface and the inner side surface of the second probe holder face in opposite directions; and a plurality of probes, including a plurality of first probes disposed on the first probe holder and a plurality of second probes disposed on the second probe holder Each of the probes includes a cantilever section and a point contact section. The cantilever section of each first probe has a fixed portion fixedly connected to the first probe base, and a fixed portion connected to the fixed portion and separated from the first The inner side surface of the probe holder extends to expose an exposed part, and the cantilever section of each second probe has a fixing part fixedly connected to the second probe holder, and a fixing part connected to the fixing part and extending from the second probe The inner side surface of the needle base extends to an exposed part, and the touch section of each probe is connected to the exposed part; wherein the probe module can define at least one imaginary probe unit boundary line, and the probes It is divided into a plurality of probe units by the boundary line of the at least one imaginary probe unit. The same probe unit contains only the first probe or only the second probe, and the touch segments of the probes of the same probe unit The ends are all located on the same side of the dividing line of the imaginary probe unit; when the probe module detects the first and second units to be tested, the first probes are all touched with their points Touch the conductive contact of the at least one first unit to be tested, and all the second probes touch the conductive contact of the at least one second unit to be tested with their point contact segments; which only includes the first probe The probe unit of the needle can be defined as the width of the first fixed part by the distance between the outermost two of the fixed part of the first probe, and the probe unit containing only the second probe can be defined by its outermost two The distance between the fixing portion of the second probe is defined as a second fixing portion cloth width, and the second fixing portion cloth width is greater than the first fixing portion cloth width. As described in item 1 of the scope of patent application, the probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the plurality of probe units include a first probe unit including all first probes, And a second probe unit including all second probes. As described in item 1 of the scope of the patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the at least one virtual probe unit boundary line includes a first virtual probe unit boundary line and a The second imaginary probe unit boundary line, the plural probe units include a first probe unit including only the first probe, a second probe unit including only the second probe, and a second probe unit including only The third probe unit of the first probe, the first probe unit and the second probe unit are respectively located on two sides of the boundary of the first imaginary probe unit, the second probe unit and the third probe The units are respectively located on two sides of the dividing line of the second imaginary probe unit. As described in item 3 of the scope of patent application, a probe module suitable for multiple units under test with inclined conductive contacts, wherein the at least one virtual probe unit boundary line further includes a third virtual probe unit boundary line, The plurality of probe units further includes a fourth probe unit including only the second probe, and the third probe unit and the fourth probe unit are respectively located on two sides of the boundary of the third virtual probe unit. As described in item 1 of the scope of patent application, it is suitable for a probe module with multiple units to be tested with inclined conductive contacts, wherein the end of the point contact segments of the first probes are all located on the boundary line of the imaginary probe unit and Between the first probe holders, the point contact ends of the second probes are all located between the imaginary probe unit dividing line and the second probe holder. As described in item 1 of the scope of patent application, a probe module suitable for multiple units under test with inclined conductive contacts, wherein the at least one virtual probe unit boundary line includes a first virtual probe unit boundary line, and A second imaginary probe unit boundary line and a third imaginary probe unit boundary line perpendicular to the first imaginary probe unit boundary line, the plurality of probe units include a first probe including only the first probe Needle unit, a second probe unit containing only the second probe, and a second probe unit containing only the second probe A third probe unit of a probe, and a fourth probe unit containing only the second probe, the first probe unit and the third probe unit are located at the boundary of the first imaginary probe unit And the first probe holder, the second probe unit and the fourth probe unit are located between the boundary line of the first imaginary probe unit and the second probe holder, the second imaginary probe There is a space between the unit demarcation line and the third imaginary probe unit demarcation line without any probe at the end of the point contact section. The first probe unit and the second probe unit are located in the space Different sides of the dividing line of the second imaginary probe unit, the third probe unit and the fourth probe unit and the spacing space are located on different sides of the dividing line of the third imaginary probe unit, and the width of the spacing space is Greater than the width of the first and second units to be tested. As described in item 1 of the scope of patent application, it is suitable for a probe module with multiple units under test with inclined conductive contacts, wherein the first probes form a plurality of needle layers of different heights on the first probe base, The second probes form a plurality of needle layers of different heights on the second probe holder; when the probe module detects the first unit to be tested and the second unit to be tested, the same needle layer and the same probe The probes of the unit touch the same row of conductive contacts with their point contact segments. As described in item 7 of the scope of patent application, it is applicable to a probe module with multiple units to be tested with inclined conductive contacts, in which the point contact end of the first probe of the needle layer with the higher position and the first probe The farther the inner surface of the needle holder is, the farther the distance between the end of the point contact section of the second probe of the needle layer and the inner surface of the second probe holder is. As described in item 7 of the scope of patent application, the probe module suitable for multiple units to be tested with inclined conductive contacts is used to simultaneously detect the plurality of first probes arranged in at least one row by the first probes The unit to be tested and the plurality of second units to be tested arranged in at least another row by the second probes; when the probe module detects the first and second units to be tested, the same Needle layer and the first probe of the same probe unit touches the same row of conductive contacts of the same first unit to be tested, the same A needle layer and the second probes of the same probe unit touch the same row of conductive contacts of the same second unit to be tested. As described in item 7 of the scope of patent application, the probe module suitable for multiple units to be tested with inclined conductive contacts is used to simultaneously detect a plurality of the first units to be tested by the first probes and by A plurality of the second units to be tested are detected by the second probes, and the first units to be tested and the second units to be tested are arranged in a row together; when the probe module detects the first units to be tested And the second unit under test, the first probe of the same needle layer touches the same row of conductive contacts of the same first unit under test, and the second probe of the same needle layer touches the same second unit under test Conductive contacts in the same row. As described in item 9 or 10 of the scope of patent application, it is applicable to a probe module with multiple units under test with inclined conductive contacts, wherein when the probe module detects the first unit under test and the second unit under test When unit, the first probes only touch the conductive contacts of each first unit under test that are the farthest from the first probe holder, and the second probes only touch each second unit to be tested The row of conductive contacts of the unit closest to the second probe holder. As described in item 9 of the scope of patent application, the probe module suitable for multiple units to be tested with inclined conductive contacts is used to simultaneously detect eight units to be tested, including four first units to be tested and four The second unit under test, the first unit under test of the eight units under test closest to the second probe holder is adjacent to the second unit under test of the eight units under test closest to the first probe holder . As described in item 1 or 12 of the scope of patent application, a probe module suitable for multiple units under test with inclined conductive contacts, wherein each of the first unit under test and the second unit under test has one of the opposite directions A first main edge and a second main edge, and a first side edge and a second side edge connecting the first main edge and the second main edge and facing opposite directions, a first side edge of the first unit under test An intersection point between the two main edges and the second side edge is adjacent to an intersection point between the first main edge and the first side edge of the second unit under test. As described in item 1 or 12 of the scope of patent application, a probe module suitable for multiple units under test with inclined conductive contacts, wherein each of the first unit under test and the second unit under test has one of the opposite directions A first main edge and a second main edge, and a first side edge and a second side edge connecting the first main edge and the second main edge and facing opposite directions, a first side edge of the first unit under test The two side edges are adjacent to the first side edge of the second unit to be tested. As described in item 1 of the scope of patent application, it is suitable for a probe module with multiple units to be tested with inclined conductive contacts, wherein the first probe of the same probe unit can define a first probe base perpendicular to the The first imaginary boundary line of the inner side surface, the direction in which the exposed portion of the first probe of the same probe unit extends from the inner side surface is parallel to the first imaginary boundary line or gradually away from the first imaginary boundary line It is inclined relative to the first imaginary dividing line; the second probe of the same probe unit can define a second imaginary dividing line perpendicular to the inner surface of the second probe holder, and the second probe of the same probe unit The direction in which the needle exposed portion extends from the inner side surface is parallel to the second imaginary boundary line or is inclined relative to the second imaginary boundary line close to the second imaginary boundary line. As described in item 1 of the scope of patent application, the probe module is suitable for multiple test units with inclined conductive contacts, wherein the width of the first fixed part is smaller than the width of the first test unit, and the second The width of the fixed part cloth is greater than the width of the second unit to be tested. A probe module suitable for multiple units to be tested with inclined conductive contacts, comprising: a first probe holder and a second probe holder, each having an inner side surface, inside the first probe holder The side surface and the inner side surface of the second probe holder face in opposite directions; and a plurality of probes, including a plurality of first probes disposed on the first probe holder and a plurality of second probes disposed on the second probe holder Each of the probes includes a cantilever section and a point contact section. The cantilever section of each first probe has a fixed portion fixedly connected to the first probe base, and a fixed portion connected to the fixed portion and separated from the first The inner side surface of the probe holder extends out of the exposed part, and each cantilever section of the second probe has a A fixing portion fixedly connected to the second probe holder, and an exposed portion connected to the fixing portion and extending from the inner side surface of the second probe holder. The point contact section of each probe is connected to the Exposed part; wherein the probe module can define at least one imaginary probe unit boundary line, the probes are divided into a plurality of probe units by the at least one imaginary probe unit boundary line, and the same probe unit only includes There is a first probe or only a second probe, and the ends of the probes of the same probe unit are all located on the same side of the dividing line of the imaginary probe unit; which only includes the first probe The probe unit can be defined as a width of the first fixed part by the distance between the outermost two of the fixing part of the first probe, and the probe unit containing only the second probe can be defined as the second outermost The distance between the fixing parts of the two probes is defined as a second fixing part cloth width, and the second fixing part cloth width is greater than the first fixing part cloth width. As described in item 17 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the plurality of probe units includes a first probe unit including all first probes, And a second probe unit including all second probes. As described in item 17 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the at least one virtual probe unit boundary line includes a first virtual probe unit boundary line and a The second imaginary probe unit boundary line, the plural probe units include a first probe unit including only the first probe, a second probe unit including only the second probe, and a second probe unit including only The third probe unit of the first probe, the first probe unit and the second probe unit are respectively located on two sides of the boundary of the first imaginary probe unit, the second probe unit and the third probe The units are respectively located on two sides of the dividing line of the second imaginary probe unit. As described in item 19 of the scope of patent application, it is applicable to a probe module with multiple units under test with inclined conductive contacts, wherein the at least one virtual probe unit boundary line further includes a third virtual probe unit boundary line, The plural probe unit further includes a fourth probe unit including only the second probe Yuan, the third probe unit and the fourth probe unit are respectively located on two sides of the boundary of the third imaginary probe unit. As described in item 17 of the scope of patent application, it is applicable to a probe module with multiple units to be tested with inclined conductive contacts, wherein the end of the point contact segments of the first probes are all located on the boundary line of the imaginary probe unit and Between the first probe holders, the point contact ends of the second probes are all located between the imaginary probe unit dividing line and the second probe holder. As described in item 17 of the scope of patent application, a probe module suitable for multiple units under test with inclined conductive contacts, wherein the at least one virtual probe unit boundary line includes a first virtual probe unit boundary line, and A second imaginary probe unit boundary line and a third imaginary probe unit boundary line perpendicular to the first imaginary probe unit boundary line, the plurality of probe units include a first probe including only the first probe Needle unit, a second probe unit containing only the second probe, a third probe unit containing only the first probe, and a fourth probe unit containing only the second probe, the The first probe unit and the third probe unit are located between the boundary line of the first imaginary probe unit and the first probe holder, and the second probe unit and the fourth probe unit are located on the first probe base. Between a imaginary probe unit boundary line and the second probe holder, and between the second imaginary probe unit boundary line and the third imaginary probe unit boundary line, there is a point contacting the end of the point contacting section without any probe The first probe unit and the second probe unit are located on different sides of the boundary of the second imaginary probe unit with the separation space, and the third probe unit and the fourth probe unit are The separation space is located on different sides of the boundary of the third imaginary probe unit. As described in item 17 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the first probes form a plurality of needle layers of different heights on the first probe base, The second probes form a plurality of needle layers of different heights on the second probe holder, and the vertical distance between the end of the touch section of the first probe of the same needle layer and the inner surface of the first probe holder is the same. The vertical distance between the end of the point contact section of the second probe of the needle layer and the inner surface of the second probe holder is the same. As described in item 23 of the scope of patent application, it is suitable for a probe module with multiple units to be tested with inclined conductive contacts, wherein the point contact section end of the first probe of the needle layer with the higher position and the first probe The farther the inner surface of the needle holder is, the farther the distance between the end of the point contact section of the second probe of the needle layer and the inner surface of the second probe holder is. As described in item 17 of the scope of patent application, a probe module suitable for multiple units to be tested with inclined conductive contacts, wherein the first probe of the same probe unit can define a first probe base perpendicular to the first probe base The first imaginary boundary line of the inner side surface, the direction in which the exposed portion of the first probe of the same probe unit extends from the inner side surface is parallel to the first imaginary boundary line or gradually away from the first imaginary boundary line It is inclined relative to the first imaginary dividing line; the second probe of the same probe unit can define a second imaginary dividing line perpendicular to the inner surface of the second probe holder, and the second probe of the same probe unit The direction in which the needle exposed portion extends from the inner side surface is parallel to the second imaginary boundary line or is inclined relative to the second imaginary boundary line close to the second imaginary boundary line.

Images