TWM457875U - Cantilever probe card - Google Patents

Description

Cantilever probe card

This creation is related to the probe card structure, and more specifically to a cantilever probe card.

According to the method for detecting whether the electrical connection between the precision electronic components of the electronic product is true, a probe card is used as a test signal transmission interface between the detecting machine and the electronic object to be tested.

However, the currently known cantilever type probe card is often subject to miniaturization of electronic products, and the use of functions is increasing, so that the solder balls on the electronically controlled parts of the tested part abutting the probes are coming. The denser it is, the more the probe arrangement and design of many conventional cantilever probe cards can not accurately contact the solder ball, and thus the detection of poor contact or detection error occurs.

In order to improve the above shortcomings, the manufacturer has lengthened all the probe lengths of the cantilever probe card, thereby reducing the gap between the probe front ends and increasing the gap between the probe back ends. Accurately contact the solder ball and prevent the probe from short-circuiting. However, when the probe is lengthened, the probe is easily deformed and cannot accurately and accurately align with the corresponding solder ball.

Further, in addition to the above-described structure, the manufacturer has designed a patent such as Japanese Patent Publication No. JP-H06-222079, which has two probes each having a probe having the same length at the front end and being closer to the probe. The needle body and the virtual plane have a first angle, and the probe needle body farther away from the object to be tested and the virtual plane There is a second angle greater than the first angle, and each set of probe sets has a first angle and a second angle of the same angle. Thereby, the design of the above-mentioned pendulum method is adopted to achieve the purpose of reducing the gap between the probe tips. However, the aforementioned needle design requires more layers of needles to be stacked, and the number of layers is the number of layers in which the probe needs to be placed in the direction of the detector. Of course, the number of layers of the probe indicates the tip of the probe. The longer the length, the above-mentioned needle design can not effectively slow the increase of the probe tip segment, so that the probe group farther away from the object to be tested can not effectively avoid the probe when measuring the electronic object to be tested. The needle produces a situation in which the needle or the electrical contact is poor. Therefore, the design of the conventional cantilever probe card is still not perfect, and there is still room for improvement.

In view of this, the main purpose of the present invention is to provide a cantilever probe card that can accurately contact the solder ball on the tested portion without causing an increase in the volume of the probe card.

In order to achieve the above objective, the cantilever probe card provided by the present invention is used for transmitting a test signal of a test machine to an electronic object to be tested for electrical detection, and defining the direction of the test machine as the upper side. The direction of the electronic object to be tested is the lower side; the cantilever probe card comprises a circuit board, a socket and at least one detecting module; wherein the circuit board is provided with a plurality of signal circuits, and the signal circuit is The detecting device is electrically connected; the needle holder is made of an insulating material and is coupled to the circuit board; the detecting module has an array of signal pins, and the signals are The stylus group is respectively disposed on the socket and is electrically connected to the signal circuit of the circuit board in a manner of being arranged from bottom to top; each of the signal needle sets includes a first probe and a second probe, each of which The needle includes a connecting cantilever segment and a tip segment, the cantilever segment is coupled to the hub, and the tip segment is for contacting the tested portion of the electronic object to be tested; A first probe angle is formed between the cantilever segment and the tip portion; a second probe angle is formed between the cantilever segment of the second probe and the tip portion; according to the above concept, the signal pin group satisfies The following conditions are as follows: 1. The first probe of the same signal needle group and the needle tip segment of the second probe are substantially equal in length; 2. the first probe angle of the same signal needle group is smaller than the second probe The length of each needle tip segment of the signal needle group arranged on the lower side is shorter than the length of each needle tip segment of the signal needle group arranged on the upper side; 4. the signal needle group arranged on the lower side The first probe angle is smaller than the first probe of the signal pin group arranged on the upper side The angle of the second probe of the signal needle group arranged on the lower side is smaller than the angle of the second probe of the signal needle group arranged on the upper side; 6. the second of the signal needle group arranged on the lower side The angle of the probe is smaller than the angle of the first probe of the signal pin group arranged on the upper side.

According to the above concept, the two adjacent signal pin groups, the first probe angle of the signal pin group arranged on the upper side, is greater than the angle of the second probe of the signal pin group arranged on the lower side by more than 1 degree.

According to the above concept, the detection module includes four or more sets of signal pins.

According to the above concept, the gap between the first probe and the second probe of the same signal needle set is less than 80 μm.

Thereby, through the above design, the gap between the needle tip segments can be reduced, and the solder ball on the tested portion can be accurately contacted.

In order to explain the present invention more clearly, the preferred embodiment will be described in detail with reference to the drawings.

Referring to FIG. 1 and FIG. 2, the cantilever probe card of the preferred embodiment of the present invention is used to transmit a test signal of a detector (not shown) to an electronic object to be tested 100 for electrical detection and definition. The direction of the detector is the upper side 101, and the direction of the electronic object 100 to be tested is the lower side 102. In this embodiment, the electronic object to be tested 100 is a processor, and has a plurality of measured parts 110 thereon, and each of the tested parts 110 has a plurality of rows of points 120, and each row of contacts The group 120 has six solder balls 121, of course, in addition to the solder balls, it can also be applied to the electronic object to be tested designed by the pad. The cantilever probe card comprises a circuit board 10, two needle holders 20 and two sets of detection modules 30. among them:

A plurality of signal circuits (not shown) are disposed in the circuit board 10, and the signal circuits are electrically connected to the detecting device. The headers 20 are made of an insulating material and bonded to the circuit board 10. The detailed structure and electrical conduction technology of the circuit board 10 and the needle holder 20 described above are no different from the conventional technology. Said.

The present invention focuses on the design of the detection module 30. In this embodiment, each of the detection modules 30 has six sets of signal pins 31 to 36, which are a first signal pin group 31 to a sixth signal pin group 36, respectively. And the signal pins 31 to 36 are sequentially arranged from the first signal pin group 31 to the sixth signal pin group 36 from the lower side 102 to the upper side 101 direction, and the other signals of the detecting module 30 The needle sets 31 to 36 are respectively disposed on the needle holder 20 in a symmetrical manner, and are electrically connected to the signal circuit of the circuit board 10. In addition, the design of the detection module 30 is not limited thereto. In another embodiment, only one single detection module 30 can be designed, and the other detection module 30 is not required to be symmetric. Structural design.

Furthermore, it should be noted that the probe tail end portion between the needle holder 20 and the circuit board 10 is soldered according to the electrical contact layout of the circuit board 10, and may not necessarily be as shown in FIG. The uniform arrangement, so the position of the probe tail connected to the circuit board 10 is determined according to requirements, and is not limited by the aspect shown in FIG.

Referring to FIG. 3 and FIG. 4 , the first signal pin group 31 is taken as an example for the following description. Each of the signal pin groups 31 includes a first probe 311 and a second probe 312. The probes 311, 312 include a cantilever segment 311a, 312a and a tip segment 311b, 312b. The cantilever segments 311a, 312a are disposed on the needle holder 20, and the needle tip segments 311b, 312b are used to touch the solder balls 121 on the tested portion 110 of the electronic object 100 to be tested. It is worth mentioning that the gap P between the first probe 311 of the same signal group 31 and the tip segments 311b, 312b of the second probe 312 is less than 80 μm. In addition, a first probe angle θ ₁ is formed between the cantilever segment 311 a of the first probe 311 of the signal probe group 31 and the tip segment 311 b , and the cantilever segment 312 a of the second probe 312 is formed. A second probe angle θ ₂ is formed between the tip section 312b and a probe angle is formed between the cantilever section and the tip section of each probe.

The signal pin groups 31~36 of each of the detecting modules 30 satisfy the following conditions:

1. The first probe of the same signal needle set 31~36 and the tip end section of the second probe are substantially equal in length. Of course, when the signal pins 31 to 36 are actually produced, the first probe and the tip segment of the second probe may have errors due to the artificial relationship, but the first probe and the second probe The length error of the needle tip segment can still be maintained within 1 mil. More specifically, referring to FIG. 3 , taking the first signal pin group 31 as an example, the lengths L1 and L2 of the first probe 311 and the tip end segments 311 b and 312 b of the second probe 312 are equal.

2. The angle of the first probe of the same signal needle group 31~36 is smaller than the angle of the second probe.

Referring to FIG. 4 , taking the first signal pin group 31 as an example, the first probe angle θ _{1 of} the signal pin group 31 is smaller than the angle of the second probe angle θ ₂ by 2 degrees or more. In other words, when the first probe angle θ ₁ of the first probe 311 is 146 degrees, the second probe angle θ _{2 of} the second probe 312 is at least 148 degrees.

3. The length of each of the tip segments of the signal pins 31-35 arranged adjacent to the lower side 102 is shorter than the length of each of the pin segments arranged adjacent to the signal pins 32-36 of the upper side 101.

Referring to FIG. 5 , the lengths L1 and L2 of the respective needle tip segments 311 b and 312 b of the first signal pin group 31 adjacent to the lower side 102 are arranged by using the adjacent first and second signal pin groups 31 and 32 as an example. The lengths L3, L4 of the respective tip segments 321b, 322b of the second signal pin group 32 arranged close to the upper side 101 are shorter.

4. The second probe angle of the signal pin groups 31-35 arranged close to the lower side 102 is smaller than the first probe angle of the signal pin groups 32-36 arranged close to the upper side 101.

Referring to FIG. 5, the first probe pin angles θ _2-1 of the second signal pin group 32 disposed near the upper side 101 are also greater than the adjacent first and second signal pin groups 31 and 32. The angle of the second probe angle θ _1-2 of the first signal pin group arranged close to the lower side 102 is 1 degree or more. In more detail, when the second probe angle θ _1-2 of the first signal pin group 31 is 148 degrees, the first probe angle θ _{2-1 of} the second signal pin group 32 has at least 149 degrees.

5. The first probe angle of the signal pin groups 31-35 arranged close to the lower side 102 is smaller than the first probe angle of the signal pin groups 32-36 arranged near the upper side 101.

Referring to FIG. 5, the first probe angles θ _2-1 of the second signal pin group 32 disposed near the upper side 101 are larger than the adjacent first and second signal pin groups 31 and 32. The angle of the first probe angle θ _1-1 of the first signal pin group of the lower side 102 is approached.

6. The second probe angle of the signal pin groups 31-35 arranged near the lower side 102 is smaller than the second probe angle of the signal pin groups 32-36 arranged close to the upper side 101.

Referring to FIG. 5, the second probe pin angles θ _2-2 of the second signal pin group 32 disposed near the upper side 101 are also arranged in the same manner as the adjacent first and second signal pin groups 31 and 32. The angle of the second probe angle θ _1-2 of the first signal pin group 31 near the lower side 102.

Therefore, through the above design, the gap between the tip portions of the probes can be effectively reduced, so that the six sets of signal needles 31~36 in each of the detection modules can be measured in one measurement. The needle tip segment is pressed against the adjacent two row contact point groups 120 in the same tested portion 110, thereby achieving the effect of simultaneously testing whether the twelve solder balls 121 are normal.

In addition, the signal pins 31 to 36 are sequentially arranged from the lower side 102 to the upper side 101, and the probes of the signal pins 31 to 36 are juxtaposed, and it is not necessary to lengthen all the probes to make the first The angle between the angle between the probe and the angle of the second probe is increased from bottom to top, which effectively increases the gap between the cantilever segments of the probes, and is not easy to cause deformation of the probe.

In addition, in actual implementation, the detecting module 30 can add a single probe between the two groups of signal needles above or below the two sets of signal needles according to requirements, so as to perform corresponding electrical properties. Measurement, and the design of such a structure is another feasible embodiment of the present invention.

It should be noted that although the foregoing embodiment shown in FIGS. 4 to 5 is exemplified by a four-column signal pin group, in practice, it is not limited to four columns, as long as four or more columns of signal pins can be used. The aforementioned probe angle relationship is applied. Further, although the number of probes for each of the signal transducer groups is two, in practice, the two probes are not limited, and the three probes or more may be implemented in accordance with the aforementioned probe angle relationship.

For example, when the cantilever probe card has m sets of signal pins (m≧1) and each probe set has a probe (a=2 in this embodiment), each signal is defined. Under the premise that the same probe number is sequentially arranged in the same direction in the needle group, the probe angle of each probe arranged in the signal needle group close to the lower side 102 is smaller than the signal needle group arranged near the upper side 101. The angle of the probe of the probe of the same serial number.

The length of the tip segment of the probe in each of the signal pins is substantially equal, and the length error of the probe tip segment of the same signal pin is maintained within 1 mil.

In the same signal set, the angle difference of the angles of the probes of the adjacent two probes is greater than or equal to 2 degrees. For two adjacent signal pin groups, the minimum of the probe angles arranged in the signal pin group (m+1) near the upper side 101, and the signal pin group arranged on the lower side 102 (the mth group) The absolute value of the angular difference between the maximum values of the probe angles is greater than or equal to 1 degree.

Under the premise that each signal pin group has the same probe number, it is arranged in a signal pin group not closest to the upper side 101, and the absolute value of the angle difference between the adjacent two probes is less than or equal to the uppermost side 101. In the signal pin group, adjacent two probes The angle difference between the angles of the needles.

The adjacent two sets of signal pins define an adjacent angle difference between adjacent needle sets, and the so-called adjacent needle set closest angle difference refers to the adjacent needle set, which is arranged in the signal needle set close to the upper side 101. The minimum probe angle is the difference in angle from the angle of the largest probe that is disposed adjacent to the signal pin set on the underside 102. The absolute value of the adjacent needle group of the adjacent two signal needle groups that are not closest to the upper side 101 is the absolute value of the closest angle difference, which is equal to or less than the absolute difference of the adjacent angle group of the adjacent two signal needle groups closest to the upper side 101. value. In addition, the above description is only a preferred embodiment of the present invention, and is not limited thereto, and the equivalent structural changes of the present invention and the scope of the patent application are included in the scope of the patent.

10‧‧‧ boards

20‧‧‧ needle seat

30‧‧‧Detection module

31~36‧‧‧Signal Needle Set

311‧‧‧First probe

312‧‧‧Second probe

311a, 312a‧‧‧ cantilever segment

311b, 312b, 321b, 322b‧‧‧ needle tip

100‧‧‧Electronic objects to be tested

110‧‧‧Measured parts

120‧‧‧Contact Group

121‧‧‧ solder balls

θ ₁ ‧‧‧first probe angle

θ ₂ ‧‧‧second probe angle

θ _1-1 ‧‧‧first probe angle

θ _2-1 ‧‧‧first probe angle

θ _1-2 ‧‧‧second probe angle

θ _2-2 ‧‧‧second probe angle

101‧‧‧Upper side

102‧‧‧Underside

L1, L2, L3, L4‧‧‧ length

P‧‧‧ gap

FIG. 1 is a structural diagram of a preferred embodiment of the present invention.

Figure 2 reveals the electronic objects that this creation is intended to measure.

3 and FIG. 4 are front and side views of the first signal needle set of the present invention; FIG. 5 is a side view of the first and second signal needle sets of the present invention.

31‧‧‧First Signal Needle Set

32‧‧‧Second Signal Needle Set

311b, 312b, 321b, 322b‧‧‧ needle tip

θ _1-1 ‧‧‧first probe angle

θ _2-1 ‧‧‧first probe angle

θ _1-2 ‧‧‧second probe angle

θ _2-2 ‧‧‧second probe angle

L1, L2, L3, L4‧‧‧ length

101‧‧‧Upper side

102‧‧‧Underside

Claims (9)

A cantilever type probe card is used for transmitting a test signal of a detecting machine to an electronic object to be tested for electrical detection, and defining the direction of the detecting machine as the upper side, and the direction of the electronic object to be tested The cantilever type probe card comprises: a circuit board, which is provided with a plurality of signal circuits, and the signal circuit is electrically connected to the detecting device; a pin holder is an insulating structure and is coupled to the circuit board; a detection module having a complex array of signal pins, and the signal pin groups are respectively disposed on the needle holder from the lower side to the upper side and electrically connected to the plurality of signal circuits of the circuit board; The signal pin set includes at least one first probe and a second probe, each of the probes includes a cantilever segment and a tip segment, the cantilever segment is coupled to the hub, and the tip segment is used Touching a portion to be tested of the electronic object to be tested; in addition, a first probe angle is formed between the cantilever segment of the first probe and the tip portion; the cantilever segment of the second probe and the tip portion Forming a second probe between An angle; wherein the signal pin sets satisfy the following conditions: the lengths of the probe segments of the probes of the same signal pin group are substantially equal; the first probe angle of the same signal pin group is smaller than the second probe The length of the needle pin segment; the length of each of the needle tip segments of the signal pin group arranged near the lower side is shorter than the length of each pin tip segment of the signal pin group arranged near the upper side; and the signal pin group arranged near the lower side a probe angle smaller than the first probe clip of the signal pin group arranged near the upper side An angle of the second probe of the signal pin group arranged near the lower side, smaller than the second probe angle of the signal pin group arranged near the upper side; and a second probe of the signal pin group arranged near the lower side The angle of the needle is smaller than the angle of the first probe of the signal needle set arranged near the upper side. The cantilever type probe card according to claim 1, wherein two adjacent signal pin groups are arranged at an angle of a first probe of the signal pin group adjacent to the upper side, which is larger than the signal pin group arranged near the lower side. The second probe has an angle of 1 degree or more. The cantilever probe card of claim 1, wherein the angle of the first probe of the same signal pin group is less than 2 degrees of the angle of the second probe. The cantilever probe card of claim 1, wherein the at least one detection module is two detection modules, and the signal pin groups of the two detection modules are symmetrically disposed on the needle holder. The cantilever probe card of claim 1, wherein the detection module comprises four or more sets of signal pins. The cantilever probe card of claim 1, wherein a gap between the first probe and the second probe of the same signal pin group is less than 80 μm. The cantilever probe card of claim 1, wherein the length error value of the probe tip segment of the same signal needle set is maintained within 1 mil. The cantilever probe card according to claim 1, wherein an adjacent needle group is defined with an absolute value of an adjacent needle group closest to the angle difference, and the adjacent needle group is closest to the angle difference. Refers to the smallest probe angle of the adjacent needle set, which is arranged on the upper side of the signal needle set, and the signal probe set arranged on the lower side. The absolute value of the angle difference between the largest probe angles; the adjacent needle group of the adjacent two signal needle groups that are not closest to the upper side is the closest absolute value of the angle difference, and is less than or equal to the adjacent two signal needle groups closest to the upper side. The adjacent needle set is closest to the absolute value of the angular difference. The cantilever type probe card according to claim 1, wherein the absolute value of the angle difference between the probes of the adjacent two probes is less than or equal to the signal pin closest to the upper side. In the group, the angle difference between the angles of the probes of the adjacent two probes is an absolute value.