CN110346616A - Probe card device and probe base - Google Patents
Probe card device and probe base Download PDFInfo
- Publication number
- CN110346616A CN110346616A CN201810288294.0A CN201810288294A CN110346616A CN 110346616 A CN110346616 A CN 110346616A CN 201810288294 A CN201810288294 A CN 201810288294A CN 110346616 A CN110346616 A CN 110346616A
- Authority
- CN
- China
- Prior art keywords
- guide plate
- width
- length
- section
- rectangle hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The present invention discloses a kind of probe card device and probe base, and the probe base includes the first guide plate, the second guide plate and the multiple rectangular probes for being arranged in the first guide plate and the second guide plate.The first positioning section and the second positioning section that each rectangular probe extends with the deformation section between the first guide plate and the second guide plate and respectively from deformation section opposite end.Multiple first positioning sections are located in multiple first rectangle hole walls of the first guide plate, and multiple second positioning sections are located in multiple second rectangle hole walls of the second guide plate.Each first rectangle hole wall has length offset and width deviations with corresponding second rectangle hole wall, to oppress in corresponding first positioning section and the second positioning section, and making deformation section stress in bending and deformation shape, length offset is divided by the ratio of width deviations between 1~10.
Description
Technical field
The present invention relates to a kind of probe card more particularly to a kind of probe card devices and probe base.
Background technique
When semiconductor chip is tested, test equipment be electrically connected by a probe card device and determinand, and
By signal transmission and signal analysis, to obtain the test result of determinand.Existing probe card device is equipped with corresponding determinand
Electrical contact and multiple probes for arranging, with by above-mentioned multiple probes, the corresponding of point contact determinand is electrically connected with simultaneously
Point.
In more detail, the probe of existing probe card device includes with MEMS
Rectangular probe manufactured by (Microelectromechanical Systems, MEMS) technology, external form can be needed according to designer
It asks and shapes.However, being bent or shape when the partial sector of the rectangular probe bears strength in length direction and width direction
When change, the stress tune of above-mentioned rectangular probe is also easy to produce stress and concentrates and be broken.
It then, is the special utilization for concentrating on studies and cooperating the principles of science, finally inventors believe that drawbacks described above can improve
It is proposed that a kind of design is reasonable and is effectively improved the present invention of drawbacks described above.
Summary of the invention
The embodiment of the present invention is designed to provide a kind of probe card device and probe base, can effectively improve existing spy
The issuable defect of needle card device institute.
The embodiment of the present invention discloses a kind of probe card device, including a probe base and a pinboard.Probe base definition has phase
A mutually vertical length direction, a width direction and a short transverse, the probe base include one first guide plate, one second lead
Plate and multiple rectangular probes, the first guide plate are formed with multiple first rectangle hole walls；Wherein, the one of each first rectangle hole wall
Long wall surface is parallel to the length direction, and a shortwall face of each first rectangle hole wall is parallel to the width side
To；Second guide plate is set in distance in the short transverse with first guide plate, and second guide plate be formed with it is more
A second rectangle hole wall；Wherein, the position of multiple second rectangle hole walls corresponds respectively to multiple first rectangle hole walls
Position；One first positioning section that multiple rectangular probes respectively have a deformation section, extend respectively from the deformation section opposite end
With one second positioning section, one first contact-segment extended from first positioning section away from deformation section direction and from institute
State one second contact-segment that the second positioning section extends away from deformation section direction；Wherein, times of each deformation section
One position sectional area having the same, multiple deformation sections are located substantially between first guide plate and second guide plate；
Multiple first positioning sections are located in multiple first rectangle hole walls of first guide plate, and multiple described second is fixed
Position section is located in multiple second rectangle hole walls of second guide plate, and multiple first contact-segments are located at more
The outside of a first rectangle hole wall, and multiple second contact-segments are located at the outer of multiple second rectangle hole walls
Side；Wherein, each first rectangle hole wall has one with the corresponding second rectangle hole wall in the length direction
Length offset simultaneously has a width deviations in the width direction, to oppress in described the first of the corresponding rectangular probe
Positioning section and second positioning section, and make the deformation section stress and be in bending and deformation shape；Wherein, the length offset is removed
With the ratio of the width deviations between 1~10；One pinboard, abutting are fixed on described the first of multiple rectangular probes and connect
Touch section, and second contact-segment of multiple rectangular probes be used to flexibly and separably contact in a determinand.
Preferably, each first rectangle hole wall is formed with one first outer peritreme simultaneously in the outer plate surface of first guide plate
Peritreme in one first is formed in the inner plate surface of first guide plate；In each first positioning section and corresponding described first
Among one first cross section of outer peritreme, first positioning section is in rectangle and includes one first length and one first width,
The length of length and first length and the described first outer peritreme that first length is less than the described first outer peritreme has
Less than a length difference of the length offset, first width is less than the width of the described first outer peritreme and described first wide
Degree and the width of the described first outer peritreme have the width differential less than the width deviations.
Preferably, the length difference is between 5 microns~35 microns, and the width differential is micro- between 5 microns~35
Rice.
Preferably, in each rectangular probe and its corresponding first rectangle hole wall, first positioning section
Contact is in peritreme in the described first outer peritreme and described first each other oblique two opposite corner portions.
Preferably, each second rectangle hole wall is formed with one second outer peritreme simultaneously in the outer plate surface of second guide plate
Peritreme in one second is formed in the inner plate surface of second guide plate；In each second positioning section and corresponding described second
Among one second cross section of outer peritreme, second positioning section is in rectangle and includes one second length and one second width,
And second length is equal to first length, and second width is equal to first width；In each rectangle
In probe and its corresponding second rectangle hole wall, the second positioning section contact is in the described second outer peritreme and described second
Interior peritreme is each other in oblique two opposite corner portions；In each rectangular probe, the first positioning section institute contact
The corner portions of peritreme are adjacent to described in peritreme in described the second of the second positioning section institute contact in described first
Corner portions.
Preferably, probe card device further comprises having one be held between first guide plate and second guide plate
Spacing board, and the spacing board is formed with an accommodating hole, and multiple deformation sections are set to the spacing board at each interval
The accommodating hole in.
Preferably, in each rectangular probe, first contact-segment includes a limiting section, and the limiting section is adjacent
It is bordering on first positioning section, and the limiting section support peaks at the outer plate surface of first guide plate.
Preferably, the length offset is further defined to divided by the ratio of the width deviations between 1~3.
The embodiment of the present invention also discloses a kind of probe base, definition have an orthogonal length direction, a width direction and
One short transverse, the probe base include one first guide plate, one second guide plate and multiple rectangular probes.First guide plate is formed with more
A first rectangle hole wall；Wherein, a long wall surface of each first rectangle hole wall is parallel to the length direction, and each
One shortwall face of the first rectangle hole wall is parallel to the width direction；Second guide plate and first guide plate are in the height
It is set in distance on direction, and second guide plate is formed with multiple second rectangle hole walls, and multiple second rectangles
The position of hole wall corresponds respectively to the position of multiple first rectangle hole walls；Multiple rectangular probes respectively have a deformation section and divide
One first positioning section and one second positioning section not extended from the deformation section opposite end；Wherein, each deformation section
Any position sectional area having the same, multiple deformation sections be located substantially at first guide plate and second guide plate it
Between, multiple first positioning sections are located in multiple first rectangle hole walls of first guide plate, and multiple described
Two positioning sections are located in multiple second rectangle hole walls of second guide plate；Wherein, each first rectangular opening
Wall and the corresponding second rectangle hole wall have a length offset and in the width direction in the length direction
With a width deviations, to oppress first positioning section and second positioning section in the corresponding rectangular probe, and
Make the deformation section stress and is in bending and deformation shape；Wherein, the length offset is divided by the ratio of the width deviations between 1
~10.
Preferably, each first rectangle hole wall is formed with one first outer peritreme simultaneously in the outer plate surface of first guide plate
Peritreme in one first is formed in the inner plate surface of first guide plate；In each first positioning section and corresponding described first
Among one first cross section of outer peritreme, first positioning section is in rectangle and includes one first length and one first width,
The length of length and first length and the described first outer peritreme that first length is less than the described first outer peritreme has
Less than a length difference of the length offset, first width is less than the width of the described first outer peritreme and described first wide
Degree and the width of the described first outer peritreme have the width differential less than the width deviations.
In conclusion probe card device disclosed in the embodiment of the present invention and probe base, by adjusting above-mentioned length offset
With width deviations, so that the deformation section of rectangular probe is in appropriate deformation range and not easy to break, and then promoted
The reliability and service life of probe base (or probe card device).It further says, when the probe base (or probe card device)
Multiple second contact-segments when being connected to determinand with a pressure, the deformation section of the present embodiment rectangular probe can be by adjusting length
Degree offset and width deviations, the case where so as to making the deformation section for bearing above-mentioned pressure be not likely to produce fracture.
For that can be further understood that feature and technology contents of the invention, please refer to the following detailed descriptions related to the present invention
With attached drawing, but these explanations are only used to illustrate the present invention with attached drawing, rather than make any limitation to protection scope of the present invention.
Detailed description of the invention
Fig. 1 is the schematic top plan view of probe base of the present invention.
Fig. 2 is schematic cross-sectional view of the Fig. 1 along hatching line II-II.
Fig. 3 is the schematic cross-sectional view of probe card device of the present invention.
Fig. 4 is the perspective cross-sectional schematic diagram (one) of rectangular probe of the present invention and the first guide plate.
Fig. 5 is the perspective cross-sectional schematic diagram (two) of rectangular probe of the present invention and the first guide plate.
Fig. 6 is the perspective cross-sectional schematic diagram (one) of rectangular probe of the present invention and the second guide plate.
Fig. 7 is the perspective cross-sectional schematic diagram (two) of rectangular probe of the present invention and the second guide plate.
Fig. 8 is stereoscopic schematic diagram when rectangular probe of the present invention is not oppressed by the first guide plate and the second guide plate.
Fig. 9 is stereoscopic schematic diagram when rectangular probe of the present invention is oppressed by the first guide plate and the second guide plate.
Specific embodiment
Fig. 1 to Fig. 9 is please referred to, is the embodiment of the present invention, need to first be illustrated, mentioned by the present embodiment respective figure
Correlated measure and external form, only be used to specifically describe embodiments of the present invention, in order to understand the contents of the present invention, rather than
For limiting to protection scope of the present invention.
As shown in Figure 1 to Figure 3, the present embodiment discloses a kind of probe card device 1000, includes a probe base 100 and supports
It is connected to a pinboard 200 for above-mentioned 100 side of probe base (such as: 100 top side of probe base in Fig. 3), and the probe base 100
The other side (such as: 100 bottom side of probe base in Fig. 3) can be used to test a determinand (not shown go out, such as: semiconductor wafer).
Wherein, though the probe base 100 of the present embodiment is the reality of the probe base 100 to arrange in pairs or groups and be described in the pinboard 200
Border application is not limited to this.
Need to first it illustrate, in order to facilitate understanding the present embodiment, so the part of probe card device 1000 is only presented in attached drawing
Construction, in order to which the various components construction and connection relationship of probe card device 1000 is clearly presented.It below will difference place of matchmakers
State the various components construction and its connection relationship of probe base 100.
For ease of illustration of the present embodiment, the definition of probe base 100 has orthogonal length direction L, a width side
To W and a height direction H.As shown in Figure 1 to Figure 3, the probe base 100 includes one first guide plate 1 (upper die), one
Second guide plate 2 (lower die), the spacing board 3 and multiple rectangles being held between above-mentioned first guide plate 1 and the second guide plate 2
Probe 4.That is, second guide plate 2 is roughly parallel to the first guide plate 1, and second guide plate 2 and first of the present embodiment
Guide plate 1 can be set in distance in the height direction H by above-mentioned spacing board 3, but the present invention is not only restricted to this.Citing comes
Say, in the unshowned other embodiments of the present invention, second guide plate 2 and the first guide plate 1 can also by other means and
It is set in distance in height direction H.
First guide plate 1 is formed with multiple first rectangle hole walls 11 in rectangular arrangement, and above-mentioned each first
The encirclement of rectangle hole wall 11 is formed with a perforation.Second guide plate 2 is formed with multiple second rectangle hole walls in rectangular arrangement
21, and above-mentioned each second rectangle hole wall 21 also surrounds and is formed with a perforation.Wherein, above-mentioned multiple second rectangle hole walls 21
Position corresponds to the position of multiple first rectangle hole walls 11 one to one respectively, and each second rectangle hole wall 21 is formed by
Perforation is less than any of the above-described the first rectangle hole wall 11 and is formed by perforation.
It further says, the one of a long wall surface of each first rectangle hole wall 11 and each second rectangle hole wall 21
Long wall surface is all parallel to above-mentioned length direction L (such as: Fig. 1), and a shortwall face of each first rectangle hole wall 11 and each
One shortwall face of two rectangle hole walls 21 is all parallel to the width direction W (such as: Fig. 1).Furthermore as shown in Fig. 2, each first square
Shape hole wall 11 in the outer plate surface 12 of above-mentioned first guide plate 1 is formed with one first outer peritreme 111 and in the inner panel of first guide plate 1
Face 13 is formed with peritreme 112 in one first.And each second rectangle hole wall 21 is formed in the outer plate surface 22 of second guide plate 2
One second outer peritreme 211 is simultaneously formed with peritreme 212 in one second in the inner plate surface 23 of second guide plate 2.
As depicted in figs. 1 and 2, above-mentioned multiple rectangular probes 4 are substantially in rectangular arrangement, and multiple rectangular probes 4
One end is pierced by multiple first rectangle hole walls 11 of the first guide plate 1 respectively, and the other end of multiple rectangular probes 4 is pierced by second respectively
Multiple second rectangle hole walls 21 of guide plate 2.That is, each rectangular probe 4 is sequentially to be arranged in above-mentioned first guide plate 1
Corresponding first rectangle hole wall 11, spacing board 3 and the second guide plate 2 corresponding second rectangle hole wall 21.Wherein, due to described
Spacing board 3 and the correlation of improvement emphasis of the invention are lower, so the construction of following not elaborate spacing boards 3.
The rectangular probe 4 is in this present embodiment strip columnar structure electrically conductive and with pliability.The present embodiment is visited
Needle card device 1000 is to limit to use e.g. with rectangular probe 4 manufactured by MEMS (MEMS) technology, so this implementation
Example is to exclude the completely different circular probe of manufacturing process.In other words, the rectangular probe 4 of the present embodiment is compared to circular probe
For, since two manufacturing processes are completely different, so not with the presence of the motivation referred to each other.
Since the construction of multiple rectangular probes 4 of the present embodiment probe base 100 is all roughly the same, so under for purposes of illustration only,
It states and its specific configuration was introduced with single rectangular probe 4 before this, but the present invention is not only restricted to this.For example, the present invention not
In the other embodiments shown, multiple rectangular probes 4 of the probe base 100 are also possible to construction different each other.
As depicted in figs. 1 and 2, the rectangular probe 4 has a deformation section 41, respectively from 41 opposite end of deformation section
One first positioning section 42 and one second positioning section 43 that (such as: 41 top of deformation section and bottom end in Fig. 2) extends, from described first
Positioning section 42 away from 41 direction of deformation section (such as: upward) extend one first contact-segment 44 and from it is described second positioning
Section 43 away from 41 direction of deformation section (such as: upward) extend one second contact-segment 45.
Wherein, any position sectional area having the same of the deformation section 41, that is to say, that outside the deformation section 41
Any convex block or groove is not formed in edge, so then non-for this in any rectangular probe that deformation section is formed with convex block or groove
The rectangular probe 4 of embodiment meaning.Furthermore first contact-segment 44 includes a limiting section 441, and the limiting section 441 is adjacent
It is bordering on above-mentioned first positioning section 42, and the limiting section 441 is resisted against the outer plate surface 12 (such as: Fig. 1) of first guide plate 1；
First contact-segment 44 and the first positioning section 42 are collectively formed a crosswise structure (such as: Fig. 9) in this present embodiment, but this
Invention is not limited.The end structure of second contact-segment 45 be then can according to designer demand and adjusted change
Change (such as: planar, cone-shaped or groove-like).
As depicted in figs. 1 and 2, multiple deformation sections 41 of above-mentioned probe base 100 are located substantially at first guide plate 1 and second
Between guide plate 2, that is to say, that multiple deformation sections 41 of the present embodiment are to be set to the formation of spacing board 3 at each interval
In one accommodating hole 31.Above-mentioned multiple first positioning sections 42 are located in multiple first rectangle hole walls 11 of first guide plate 1,
Multiple second positioning sections 43 are located in multiple second rectangle hole walls 21 of second guide plate 2.Multiple first contact-segments 44
It is located at the outside of multiple first rectangle hole walls 11, and the pinboard 200 abuts and is fixed on the of multiple rectangular probes 4
One contact-segment 44, and multiple second contact-segments 45 are located at the outside of the multiple second rectangle hole wall 21, and above-mentioned more
Second contact-segment 45 of a rectangular probe 4 is for flexibly and separably contact in a determinand.
Further say, multiple first rectangle hole walls 11 of first guide plate 1 respectively with the second guide plate 2 multiple second
Rectangle hole wall 21 is arranged in relative dislocation.Wherein, each first rectangle hole wall 11 is with corresponding second rectangle hole wall 21 in institute
Stating with a length offset SL on length direction L and on the width direction W has a width deviations SW (it is, described
First guide plate 1 generates above-mentioned length offset SL and width deviations SW relative to the second guide plate 2), to pass through above-mentioned first rectangular opening
Wall 11 oppresses the first positioning section 42 and the second positioning section in the corresponding rectangular probe 4 with the second rectangle hole wall 21 respectively
43, and make 41 stress of deformation section and (structure of the rectangular probe 4 before and after stress deformation is substantially in bending and deformation shape
As shown in Figure 8 and Figure 9).
Wherein, divided by the ratio of the width deviations SW between 1~10, above-mentioned ratio preferably limits the length offset SL
Due to 1~3.And in this present embodiment, the length offset SL is and the width between 30 microns (μm)~1500 microns
Offset SW is between 5 microns~1500 microns, but invention is not limited thereto.
As shown in Figure 1, Figure 2 and shown in Fig. 4, the one the of above-mentioned each first positioning section 42 and corresponding first outer peritreme 111
Among one cross section, first positioning section 42 is in rectangle and includes one first length L42 and one first width W42, and
Above-mentioned first length L42 is less than the length L111 of the described first outer peritreme 111, and the above-mentioned outer peritreme of first length L42 and first
A length difference DL of 111 length L111 is preferably less than the length offset SL, and above-mentioned first width W42 is less than described first
The width W111 of outer peritreme 111, and a width differential DW of the outer 111 width W111 of peritreme of above-mentioned first width W42 and first compared with
It is good to be less than the width deviations SW.
It further says, as shown in Fig. 1 and Fig. 4, generates above-mentioned length relative to the second guide plate 2 in first guide plate 1
During deviating SL, first positioning section 42 first by the first rectangle hole wall 11 elapse above-mentioned length difference DL distance it
Afterwards, the first positioning section 42 is by the compressing by the first rectangle hole wall 11, and the length offset SL and length difference DL it
Between a difference, then be the distance that substantially the first positioning section 42 is oppressed by the first rectangle hole wall 11 in the length directionl.According to
This, in this present embodiment, the length difference DL is preferably between 5 microns (μm)~35 microns, but the present invention is not only restricted to this.
Furthermore as shown in Fig. 1 and Fig. 4, above-mentioned width deviations SW is generated relative to the second guide plate 2 in first guide plate 1
During, after first positioning section 42 is first elapsed the distance of above-mentioned width differential DW by the first rectangle hole wall 11, first
Positioning section 42 is by the compressing by the first rectangle hole wall 11, and one between the width deviations SW and the width differential DW is poor
Value, then be the distance that substantially the first positioning section 42 is oppressed on width direction W by the first rectangle hole wall 11.Accordingly, Yu Ben
In embodiment, the width differential DW is preferably between 5 microns~35 microns, but the present invention is not only restricted to this.
Furthermore as shown in fig. 7, one second in above-mentioned each second positioning section 43 and corresponding second outer peritreme 211 is horizontal
Among section, second positioning section 43 is in rectangle and includes one second length L43 and one second width W43, and described
Second length L43 is equal to above-mentioned first length L42, and the second width W43 is equal to above-mentioned first width W42, but the present invention is not
It is limited to this.
Additional description is needed, in the unshowned other embodiments of the present invention, the first length L42 and the first exit orifice
111 length L111 of edge can be roughly the same, and the first width W42 is also possible to the first outer 111 width W111 of peritreme
It is roughly the same, so the first positioning section 42 can be equivalent to by the distance that the first rectangle hole wall 11 is oppressed in the length directionl
Length offset SL, and the first positioning section 42 can be equivalent on width direction W by the distance that the first rectangle hole wall 11 is oppressed
Width deviations SW.
Accordingly, the probe base 100 of the present embodiment is by adjusting above-mentioned length offset SL and width deviations SW, so that the square
It is interior and not easy to break that the deformation section 41 of shape probe 4 is at appropriate deformation range, and then effectively promotes probe base 100
The reliability and service life of (or probe card device 1000).It further says, when (or the probe card device of the probe base 100
1000) when multiple second contact-segments 45 are connected to determinand with a pressure, the deformation section 41 of the present embodiment rectangular probe 4 can
By adjusting length offset SL and width deviations SW, so as to making the deformation section 41 for bearing above-mentioned pressure be not likely to produce the feelings of fracture
Condition.
Viewed another way, it please refers to shown in Fig. 2, Fig. 4 and Fig. 5, in each rectangular probe 4 and its corresponding first square
In shape hole wall 11,42 contact of the first positioning section is tiltedly opposite each other in peritreme 112 in the described first outer peritreme 111 and first
On two corner portions (such as: the lower left corner in upper right corner and Fig. 5 in Fig. 4).It please refers to shown in Fig. 2, Fig. 6 and Fig. 7,
In each rectangular probe 4 and its corresponding second rectangle hole wall 21,43 contact of the second positioning section is in second exit orifice
Tiltedly opposite two corner portions are (such as: the upper right in lower left corner and Fig. 6 in Fig. 7 each other for peritreme 212 in edge 211 and second
Corner) on.In each rectangular probe 4 of the present embodiment, 42 contacts of the first positioning section first in peritreme 112 angle
Fall the corner of position peritreme 212 in the second of second 43 contacts of positioning section (such as the lower left corner in Fig. 5) (such as: figure
Upper right corner in 6) position.
Accordingly, the first positioning section 42 of the present embodiment rectangular probe 4 can be with the first rectangle hole wall 11 of above-mentioned first guide plate 1
It supports, and the second positioning section 43 can be supported with the second rectangle hole wall 21 of the second guide plate 2, so that the deformation of rectangular probe 4
Can have preferable support effect at the opposite end of section 41.
[technical effect of the embodiment of the present invention]
In conclusion probe card device 1000 and probe base 100 disclosed in the embodiment of the present invention, by adjusting above-mentioned length
Degree offset SL and width deviations SW, so that the deformation section 41 of rectangular probe 4 is in appropriate deformation range and is not easy
Fracture, and then promote the reliability and service life of probe base 100 (or probe card device 1000).It further says, when described
When multiple second contact-segments 45 of probe base 100 (or probe card device 1000) are connected to determinand with a pressure, the present embodiment
The deformation section 41 of rectangular probe 4 can be by adjusting length offset SL and width deviations SW, so as to bear above-mentioned pressure
The case where deformation section 41 is not likely to produce fracture.
Furthermore probe card device 1000 and probe base 100 disclosed in the embodiment of the present invention, the first of rectangular probe 4
Positioning section 42 can be supported with the first rectangle hole wall 11 of above-mentioned first guide plate 1, and the second positioning section 43 can be with the second guide plate 2
Second rectangle hole wall 21 supports, so as to can have preferable support at the opposite end of the deformation section 41 of rectangular probe 4
Effect.
The foregoing is merely preferred possible embodiments of the invention, are not used to limit to protection scope of the present invention, it is all according to
The equivalent changes and modifications that the invention patent range is done should all belong to the protection scope of claims of the present invention.
Claims (10)
1. a kind of probe card device, which is characterized in that the probe card device includes:
One probe base, definition have an orthogonal length direction, a width direction and a short transverse, and the probe base includes
Have:
One first guide plate is formed with multiple first rectangle hole walls；Wherein, a long wall surface of each first rectangle hole wall is parallel
The width direction is parallel in a shortwall face of the length direction, and each first rectangle hole wall；
One second guide plate is set in distance in the short transverse with first guide plate, and second guide plate is formed
There are multiple second rectangle hole walls；Wherein, the position of multiple second rectangle hole walls corresponds respectively to multiple first rectangles
The position of hole wall；And
Multiple rectangular probes, respectively with a deformation section, respectively from the deformation section opposite end extend one first positioning section with
One second positioning section, one first contact-segment extended from first positioning section away from deformation section direction and described in
One second contact-segment that second positioning section extends away from deformation section direction；Wherein, any of each deformation section
Position sectional area having the same, multiple deformation sections are located substantially between first guide plate and second guide plate；It is more
A first positioning section is located in multiple first rectangle hole walls of first guide plate, multiple second positioning
Section is located in multiple second rectangle hole walls of second guide plate, and multiple first contact-segments are located at multiple
The outside of the first rectangle hole wall, and multiple second contact-segments are located at the outer of multiple second rectangle hole walls
Side；
Wherein, each first rectangle hole wall has one with the corresponding second rectangle hole wall in the length direction
Length offset simultaneously has a width deviations in the width direction, to oppress in described the first of the corresponding rectangular probe
Positioning section and second positioning section, and make the deformation section stress and be in bending and deformation shape；Wherein, the length offset is removed
With the ratio of the width deviations between 1~10；And
One pinboard abuts and is fixed on first contact-segments of multiple rectangular probes, and multiple rectangular probes
Second contact-segment be used to flexibly and separably contact in a determinand.
2. probe card device according to claim 1, which is characterized in that each first rectangle hole wall is described first
The outer plate surface of guide plate is formed with one first outer peritreme and is formed with peritreme in one first in the inner plate surface of first guide plate；Every
Among one first cross section of a first positioning section and the corresponding first outer peritreme, first positioning section is in rectangle
And include one first length and one first width, first length is less than the length and described first of the described first outer peritreme
The length of length and the described first outer peritreme has the length difference less than the length offset, and first width is less than institute
It states the width of the first outer peritreme and first width and the width of the described first outer peritreme has less than the width deviations
One width differential.
3. probe card device according to claim 2, which is characterized in that the length difference between 5 microns~35 microns,
And the width differential is between 5 microns~35 microns.
4. probe card device according to claim 2, which is characterized in that in each rectangular probe and its corresponding institute
It states in the first rectangle hole wall, the first positioning section contact is tiltedly opposite each other in peritreme in the described first outer peritreme and described first
Two corner portions on.
5. probe card device according to claim 4, which is characterized in that each second rectangle hole wall is described second
The outer plate surface of guide plate is formed with one second outer peritreme and is formed with peritreme in one second in the inner plate surface of second guide plate；Every
Among one second cross section of a second positioning section and the corresponding second outer peritreme, second positioning section is in rectangle
It and include one second length and one second width, and second length is equal to first length, second width
Equal to first width；In each rectangular probe and its corresponding second rectangle hole wall, second positioning
Section contact is in peritreme in the described second outer peritreme and described second each other oblique two opposite corner portions；In each square
In shape probe, the first positioning section institute contact described first in peritreme the corner portions adjacent to it is described second positioning
The corner portions of peritreme in described the second of section institute contact.
6. probe card device according to claim 1, which is characterized in that the probe card device further comprises having clamping
A spacing board between first guide plate and second guide plate, and the spacing board is formed with an accommodating hole, it is multiple
The deformation section is set at each interval in the accommodating hole of the spacing board.
7. probe card device according to claim 1, which is characterized in that in each rectangular probe, described first
Contact-segment includes a limiting section, the limiting section adjacent to first positioning section, and the limiting section support peak at it is described
The outer plate surface of first guide plate.
8. probe card device according to claim 1, which is characterized in that the length offset is divided by the width deviations
Ratio is further defined between 1~3.
9. a kind of probe base, definition has an orthogonal length direction, a width direction and a short transverse, feature to exist
In the probe base includes:
One first guide plate is formed with multiple first rectangle hole walls；Wherein, a long wall surface of each first rectangle hole wall is parallel
The width direction is parallel in a shortwall face of the length direction, and each first rectangle hole wall；
One second guide plate is set in distance in the short transverse with first guide plate, and second guide plate is formed
There are multiple second rectangle hole walls, and the position of multiple second rectangle hole walls corresponds respectively to multiple first rectangular openings
The position of wall；And
Multiple rectangular probes, respectively with a deformation section and respectively from the deformation section opposite end extend one first positioning section with
One second positioning section；Wherein, any position sectional area having the same of each deformation section, multiple deformation sections are substantially
Between first guide plate and second guide plate, multiple first positioning sections are located at the more of first guide plate
In a first rectangle hole wall, multiple second positioning sections are located at multiple second rectangles of second guide plate
In hole wall；
Wherein, each first rectangle hole wall has one with the corresponding second rectangle hole wall in the length direction
Length offset simultaneously has a width deviations in the width direction, to oppress in described the first of the corresponding rectangular probe
Positioning section and second positioning section, and make the deformation section stress and be in bending and deformation shape；Wherein, the length offset is removed
With the ratio of the width deviations between 1~10.
10. probe base according to claim 9, which is characterized in that each first rectangle hole wall is led described first
The outer plate surface of plate is formed with one first outer peritreme and is formed with peritreme in one first in the inner plate surface of first guide plate；Each
Among one first cross section of first positioning section and the corresponding first outer peritreme, first positioning section in rectangle simultaneously
It include one first length and one first width, first length is less than the length of the described first outer peritreme and first length
The length of degree and the described first outer peritreme has the length difference less than the length offset, and first width is less than described
The width of first outer peritreme and first width and the width of the described first outer peritreme have one less than the width deviations
Width differential.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810288294.0A CN110346616B (en) | 2018-04-03 | 2018-04-03 | Probe card device and probe base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810288294.0A CN110346616B (en) | 2018-04-03 | 2018-04-03 | Probe card device and probe base |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110346616A true CN110346616A (en) | 2019-10-18 |
| CN110346616B CN110346616B (en) | 2021-06-15 |
Family
ID=68172573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810288294.0A Active CN110346616B (en) | 2018-04-03 | 2018-04-03 | Probe card device and probe base |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110346616B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111351970A (en) * | 2020-05-08 | 2020-06-30 | 沈阳圣仁电子科技有限公司 | Vertical probe card for making multiple probes have uniform elasticity |
| CN113721051A (en) * | 2020-05-26 | 2021-11-30 | 旺矽科技股份有限公司 | Probe head with linear probe |
Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5585675A (en) * | 1994-05-11 | 1996-12-17 | Harris Corporation | Semiconductor die packaging tub having angularly offset pad-to-pad via structure configured to allow three-dimensional stacking and electrical interconnections among multiple identical tubs |
| JPH09281139A (en) * | 1996-09-13 | 1997-10-31 | Furukawa Electric Co Ltd:The | Manufacture of prober |
| US5977787A (en) * | 1997-06-16 | 1999-11-02 | International Business Machines Corporation | Large area multiple-chip probe assembly and method of making the same |
| JP2000035443A (en) * | 1998-07-15 | 2000-02-02 | Japan Electronic Materials Corp | Probe card |
| US6417684B1 (en) * | 1997-11-05 | 2002-07-09 | Feinmetall Gmbh | Securement of test points in a test head |
| JP2007113972A (en) * | 2005-10-18 | 2007-05-10 | Tokyo Cathode Laboratory Co Ltd | Probe device |
| EP1816481A1 (en) * | 2006-02-07 | 2007-08-08 | Feinmetall GmbH | Electrical contact device and electrical contact method |
| CN101310190A (en) * | 2005-11-16 | 2008-11-19 | 日本电产理德株式会社 | Jig for inspecting substrate, and inspection probe |
| JP2010066051A (en) * | 2008-09-09 | 2010-03-25 | Hioki Ee Corp | Probe unit and inspecting apparatus |
| CN201845029U (en) * | 2010-11-08 | 2011-05-25 | 港建日置股份有限公司 | Test probe |
| JP2011137663A (en) * | 2009-12-26 | 2011-07-14 | Nidec-Read Corp | Inspection jig, connector of inspection jig, and method of manufacturing the same |
| CN102998493A (en) * | 2011-06-03 | 2013-03-27 | 日置电机株式会社 | Probe unit, circuit board inspection apparatus and method for manufacturing probe unit |
| US20140352460A1 (en) * | 2013-06-03 | 2014-12-04 | Mpi Corporation | Probe Needle and Probe Module Using the Same |
| CN104884963A (en) * | 2012-10-31 | 2015-09-02 | 佛姆法克特股份有限公司 | Probes with spring mechanisms for impeding unwanted movement in guide-holes |
| CN205263143U (en) * | 2015-12-29 | 2016-05-25 | 苏州韬盛电子科技有限公司 | A grip block for probe |
| CN105738663A (en) * | 2014-12-24 | 2016-07-06 | 旺矽科技股份有限公司 | Vertical probe device with positioning sheet |
| CN107037243A (en) * | 2016-02-03 | 2017-08-11 | 京元电子股份有限公司 | Probe card assembling structure, assembling method thereof and method for taking out broken pins |
| CN107533084A (en) * | 2015-03-13 | 2018-01-02 | 泰克诺探头公司 | The measuring head with Vertrical probe being correctly held in the improved sliding motion in respective guide hole and under different operating conditions by probe in measuring head |
| CN107580681A (en) * | 2015-05-07 | 2018-01-12 | 泰克诺探头公司 | Measuring head application, that there is vertical probe particularly for reducing pitch |
| WO2018019866A1 (en) * | 2016-07-28 | 2018-02-01 | Technoprobe S.P.A. | Testing head of an apparatus for testing electronic devices and corresponding probe head |
| WO2018019863A1 (en) * | 2016-07-28 | 2018-02-01 | Technoprobe S.P.A. | Probe card for electronic devices |
| US20180059140A1 (en) * | 2016-08-24 | 2018-03-01 | Chunghwa Precision Test Tech. Co., Ltd. | Probe device of vertical probe card |
| US20180088150A1 (en) * | 2016-09-28 | 2018-03-29 | Kabushiki Kaisha Nihon Micronics | Probe, probe card and contact inspection device |
-
2018
- 2018-04-03 CN CN201810288294.0A patent/CN110346616B/en active Active
Patent Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5585675A (en) * | 1994-05-11 | 1996-12-17 | Harris Corporation | Semiconductor die packaging tub having angularly offset pad-to-pad via structure configured to allow three-dimensional stacking and electrical interconnections among multiple identical tubs |
| JPH09281139A (en) * | 1996-09-13 | 1997-10-31 | Furukawa Electric Co Ltd:The | Manufacture of prober |
| US5977787A (en) * | 1997-06-16 | 1999-11-02 | International Business Machines Corporation | Large area multiple-chip probe assembly and method of making the same |
| US6417684B1 (en) * | 1997-11-05 | 2002-07-09 | Feinmetall Gmbh | Securement of test points in a test head |
| JP2000035443A (en) * | 1998-07-15 | 2000-02-02 | Japan Electronic Materials Corp | Probe card |
| JP2007113972A (en) * | 2005-10-18 | 2007-05-10 | Tokyo Cathode Laboratory Co Ltd | Probe device |
| CN101310190A (en) * | 2005-11-16 | 2008-11-19 | 日本电产理德株式会社 | Jig for inspecting substrate, and inspection probe |
| EP1816481A1 (en) * | 2006-02-07 | 2007-08-08 | Feinmetall GmbH | Electrical contact device and electrical contact method |
| JP2010066051A (en) * | 2008-09-09 | 2010-03-25 | Hioki Ee Corp | Probe unit and inspecting apparatus |
| JP2011137663A (en) * | 2009-12-26 | 2011-07-14 | Nidec-Read Corp | Inspection jig, connector of inspection jig, and method of manufacturing the same |
| CN201845029U (en) * | 2010-11-08 | 2011-05-25 | 港建日置股份有限公司 | Test probe |
| CN102998493A (en) * | 2011-06-03 | 2013-03-27 | 日置电机株式会社 | Probe unit, circuit board inspection apparatus and method for manufacturing probe unit |
| CN104884963A (en) * | 2012-10-31 | 2015-09-02 | 佛姆法克特股份有限公司 | Probes with spring mechanisms for impeding unwanted movement in guide-holes |
| US20140352460A1 (en) * | 2013-06-03 | 2014-12-04 | Mpi Corporation | Probe Needle and Probe Module Using the Same |
| CN105738663A (en) * | 2014-12-24 | 2016-07-06 | 旺矽科技股份有限公司 | Vertical probe device with positioning sheet |
| CN107533084A (en) * | 2015-03-13 | 2018-01-02 | 泰克诺探头公司 | The measuring head with Vertrical probe being correctly held in the improved sliding motion in respective guide hole and under different operating conditions by probe in measuring head |
| CN107580681A (en) * | 2015-05-07 | 2018-01-12 | 泰克诺探头公司 | Measuring head application, that there is vertical probe particularly for reducing pitch |
| CN205263143U (en) * | 2015-12-29 | 2016-05-25 | 苏州韬盛电子科技有限公司 | A grip block for probe |
| CN107037243A (en) * | 2016-02-03 | 2017-08-11 | 京元电子股份有限公司 | Probe card assembling structure, assembling method thereof and method for taking out broken pins |
| WO2018019866A1 (en) * | 2016-07-28 | 2018-02-01 | Technoprobe S.P.A. | Testing head of an apparatus for testing electronic devices and corresponding probe head |
| WO2018019863A1 (en) * | 2016-07-28 | 2018-02-01 | Technoprobe S.P.A. | Probe card for electronic devices |
| US20180059140A1 (en) * | 2016-08-24 | 2018-03-01 | Chunghwa Precision Test Tech. Co., Ltd. | Probe device of vertical probe card |
| US20180088150A1 (en) * | 2016-09-28 | 2018-03-29 | Kabushiki Kaisha Nihon Micronics | Probe, probe card and contact inspection device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111351970A (en) * | 2020-05-08 | 2020-06-30 | 沈阳圣仁电子科技有限公司 | Vertical probe card for making multiple probes have uniform elasticity |
| CN113721051A (en) * | 2020-05-26 | 2021-11-30 | 旺矽科技股份有限公司 | Probe head with linear probe |
| CN113721051B (en) * | 2020-05-26 | 2023-12-01 | 旺矽科技股份有限公司 | Probe head with linear probe |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110346616B (en) | 2021-06-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI638168B (en) | Probe card device and probe head | |
| TWI689727B (en) | Contact probe and corresponding testing head of an apparatus for testing electronic devices | |
| KR20190117015A (en) | Improved probe card for high frequency applications | |
| US7815473B2 (en) | Contact and connecting apparatus | |
| CN109283371B (en) | Probe apparatus | |
| US8547127B2 (en) | Probe block | |
| KR101662937B1 (en) | Test Contact Device with Space Transform Function | |
| KR101845652B1 (en) | Hybrid probe card for component mounted wafer test | |
| CN110389243B (en) | Probe card device | |
| CN109073677B (en) | Probe card | |
| US20210063478A1 (en) | High-performance probe card in high-frequency | |
| CN110346616A (en) | Probe card device and probe base | |
| TW202020460A (en) | Probe card device and impedance adjustable probe thereof | |
| WO2019129585A1 (en) | Probe head having vertical probes with respectively opposite scrub directions | |
| KR102631577B1 (en) | Probe card device and spring-like probe | |
| KR101506624B1 (en) | Probe Structure and probe card having the same | |
| JP4455940B2 (en) | Electrical connection device | |
| JP2020504309A (en) | Vertical probe head shield | |
| CN109839522A (en) | Probe card device and its signal converting module | |
| KR20110093242A (en) | Probe block assembly | |
| US20230266365A1 (en) | Probe card | |
| JP6407239B2 (en) | Probe holder for vertical probe module | |
| JP2007101455A (en) | Probe card | |
| JP2007057447A (en) | Guide plate for probe card and processing technique thereof | |
| CN111208327B (en) | Probe card device and adjustable probe thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |