CN110346616B - Probe card device and probe base - Google Patents
Probe card device and probe base Download PDFInfo
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- CN110346616B CN110346616B CN201810288294.0A CN201810288294A CN110346616B CN 110346616 B CN110346616 B CN 110346616B CN 201810288294 A CN201810288294 A CN 201810288294A CN 110346616 B CN110346616 B CN 110346616B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
Abstract
The invention discloses a probe card device and a probe seat. Each rectangular probe is provided with a deformation section positioned between the first guide plate and the second guide plate and a first positioning section and a second positioning section which respectively extend from two opposite ends of the deformation section. The first positioning sections are respectively positioned in the first rectangular hole walls of the first guide plate, and the second positioning sections are respectively positioned in the second rectangular hole walls of the second guide plate. Each first rectangular hole wall and the corresponding second rectangular hole wall have length deviation and width deviation so as to press the corresponding first positioning section and the second positioning section, so that the deformation section is stressed to be bent and deformed, and the ratio of the length deviation to the width deviation is 1-10.
Description
Technical Field
The present disclosure relates to probe cards, and particularly to a probe card apparatus and a probe holder.
Background
When the semiconductor chip is tested, the test equipment is electrically connected with the object to be tested through a probe card device, and the test result of the object to be tested is obtained through signal transmission and signal analysis. The conventional probe card device is provided with a plurality of probes arranged corresponding to the electrical contacts of the object to be tested, so that the probes can simultaneously contact the corresponding electrical contacts of the object to be tested.
More specifically, the probe of the conventional probe card apparatus includes a rectangular probe manufactured by Micro Electro Mechanical Systems (MEMS) technology, and the shape of the rectangular probe can be shaped according to the requirement of the designer. However, when the rectangular probe is partially bent or deformed by a force in the length direction and the width direction, the stressed curved section of the rectangular probe is prone to stress concentration and fracture.
The present inventors have considered that the above-mentioned drawbacks can be improved, and have made intensive studies and use of scientific principles, and finally have proposed the present invention which is designed reasonably and effectively to improve the above-mentioned drawbacks.
Disclosure of Invention
An object of an embodiment of the present invention is to provide a probe card device and a probe base, which can effectively overcome possible defects of the conventional probe card device.
The embodiment of the invention discloses a probe card device, which comprises a probe seat and an adapter plate. The probe seat is defined with a length direction, a width direction and a height direction which are mutually perpendicular, the probe seat comprises a first guide plate, a second guide plate and a plurality of rectangular probes, and a plurality of first rectangular hole walls are formed on the first guide plate; wherein a long wall surface of each of the first rectangular aperture walls is parallel to the length direction and a short wall surface of each of the first rectangular aperture walls is parallel to the width direction; the second guide plate and the first guide plate are arranged at intervals in the height direction, and a plurality of second rectangular hole walls are formed in the second guide plate; wherein the positions of the second rectangular hole walls respectively correspond to the positions of the first rectangular hole walls; each rectangular probe is provided with a deformation section, a first positioning section and a second positioning section which respectively extend from two opposite ends of the deformation section, a first contact section which extends from the first positioning section towards the direction far away from the deformation section, and a second contact section which extends from the second positioning section towards the direction far away from the deformation section; wherein any part of each deformation section has the same cross-sectional area, and a plurality of deformation sections are approximately positioned between the first guide plate and the second guide plate; the first positioning sections are respectively positioned in the first rectangular hole walls of the first guide plate, the second positioning sections are respectively positioned in the second rectangular hole walls of the second guide plate, the first contact sections are respectively positioned on the outer sides of the first rectangular hole walls, and the second contact sections are respectively positioned on the outer sides of the second rectangular hole walls; each first rectangular hole wall and the corresponding second rectangular hole wall have a length deviation in the length direction and a width deviation in the width direction so as to press the first positioning section and the second positioning section of the corresponding rectangular probe, so that the deformation section is stressed to be bent and deformed; wherein the ratio of the length deviation to the width deviation is 1-10; and the second contact sections of the rectangular probes are used for elastically and separably propping against an object to be detected.
Preferably, each of the first rectangular hole walls is formed with a first outer hole edge on an outer plate surface of the first guide plate and a first inner hole edge on an inner plate surface of the first guide plate; in a first cross-section of each of the first positioning segments and the corresponding first outer hole edge, the first positioning segment is rectangular and includes a first length and a first width, the first length is smaller than the length of the first outer hole edge, the length difference between the first length and the length of the first outer hole edge is smaller than the length offset, the first width is smaller than the width of the first outer hole edge, and the width difference between the first width and the width of the first outer hole edge is smaller than the width offset.
Preferably, the length difference is between 5 microns and 35 microns and the width difference is between 5 microns and 35 microns.
Preferably, in each rectangular probe and the corresponding first rectangular hole wall thereof, the first positioning section abuts against two corner portions of the first outer hole edge and the first inner hole edge, which are diagonally opposite to each other.
Preferably, each of the second rectangular hole walls is formed with a second outer hole edge on an outer plate surface of the second guide plate and a second inner hole edge on an inner plate surface of the second guide plate; in a second cross section of each of the second positioning segments and the corresponding second outer hole edge, the second positioning segment is rectangular and includes a second length and a second width, the second length is equal to the first length, and the second width is equal to the first width; in each rectangular probe and the corresponding second rectangular hole wall thereof, the second positioning section is abutted against two corner parts of the second outer hole edge and the second inner hole edge, which are obliquely opposite to each other; in each of the rectangular probes, the corner portion of the first inner hole edge against which the first positioning section abuts is adjacent to the corner portion of the second inner hole edge against which the second positioning section abuts.
Preferably, the probe card apparatus further comprises a partition plate clamped between the first guide plate and the second guide plate, and the partition plate is formed with a receiving hole, and the plurality of deformation sections are arranged in the receiving hole of the partition plate at intervals.
Preferably, in each of the rectangular probes, the first contact section includes a limiting portion, the limiting portion is adjacent to the first positioning section, and the limiting portion abuts against the outer plate surface of the first guide plate.
Preferably, the ratio of the length offset to the width offset is further defined as between 1 and 3.
The embodiment of the invention also discloses a probe seat, which is defined with a length direction, a width direction and a height direction which are mutually perpendicular, and comprises a first guide plate, a second guide plate and a plurality of rectangular probes. The first guide plate is provided with a plurality of first rectangular hole walls; wherein a long wall surface of each of the first rectangular aperture walls is parallel to the length direction and a short wall surface of each of the first rectangular aperture walls is parallel to the width direction; the second guide plate and the first guide plate are arranged at intervals in the height direction, a plurality of second rectangular hole walls are formed on the second guide plate, and the positions of the second rectangular hole walls respectively correspond to the positions of the first rectangular hole walls; the rectangular probes are respectively provided with a deformation section, and a first positioning section and a second positioning section which respectively extend from two opposite ends of the deformation section; any part of each deformation section has the same sectional area, a plurality of deformation sections are approximately positioned between the first guide plate and the second guide plate, a plurality of first positioning sections are respectively positioned in a plurality of first rectangular hole walls of the first guide plate, and a plurality of second positioning sections are respectively positioned in a plurality of second rectangular hole walls of the second guide plate; each first rectangular hole wall and the corresponding second rectangular hole wall have a length deviation in the length direction and a width deviation in the width direction so as to press the first positioning section and the second positioning section of the corresponding rectangular probe, so that the deformation section is stressed to be bent and deformed; wherein the ratio of the length offset to the width offset is 1-10.
Preferably, each of the first rectangular hole walls is formed with a first outer hole edge on an outer plate surface of the first guide plate and a first inner hole edge on an inner plate surface of the first guide plate; in a first cross-section of each of the first positioning segments and the corresponding first outer hole edge, the first positioning segment is rectangular and includes a first length and a first width, the first length is smaller than the length of the first outer hole edge, the length difference between the first length and the length of the first outer hole edge is smaller than the length offset, the first width is smaller than the width of the first outer hole edge, and the width difference between the first width and the width of the first outer hole edge is smaller than the width offset.
In summary, the probe card device and the probe base disclosed in the embodiments of the present invention adjust the length deviation and the width deviation to make the deformation section of the rectangular probe within a suitable deformation range and not easily broken, thereby improving the reliability and the service life of the probe base (or the probe card device). Furthermore, when the second contact sections of the probe holder (or the probe card apparatus) are pressed against the object to be tested by a pressure, the deformation section of the rectangular probe of the embodiment can be shifted by adjusting the length and the width, so that the deformation section bearing the pressure is not easily broken.
For a better understanding of the nature and technical content of the present invention, reference should be made to the following detailed description of the invention and the accompanying drawings, which are provided for illustration purposes only and are not intended to limit the scope of the invention in any way.
Drawings
FIG. 1 is a schematic top view of a probe base according to the present invention.
Fig. 2 is a schematic cross-sectional view of fig. 1 along the sectional line II-II.
Fig. 3 is a schematic cross-sectional view of a probe card apparatus of the present invention.
FIG. 4 is a schematic perspective sectional view of the rectangular probe and the first guide plate according to the present invention.
FIG. 5 is a schematic perspective sectional view of the rectangular probe and the first guide plate according to the present invention (II).
FIG. 6 is a schematic perspective sectional view of a rectangular probe and a second guide plate according to the present invention.
FIG. 7 is a schematic perspective sectional view of the rectangular probe and the second guide plate according to the present invention (II).
FIG. 8 is a perspective view of the rectangular probe of the present invention when not pressed by the first guide plate and the second guide plate.
FIG. 9 is a perspective view of the rectangular probe of the present invention pressed by the first guide plate and the second guide plate.
Detailed Description
Please refer to fig. 1 to 9, which are exemplary embodiments of the present invention, and it should be noted that, in the embodiments, related numbers and shapes mentioned in the accompanying drawings are only used for describing the embodiments of the present invention in detail, so as to facilitate the understanding of the contents of the present invention, and not for limiting the scope of the present invention.
As shown in fig. 1 to 3, the present embodiment discloses a probe card apparatus 1000, which includes a probe holder 100 and an interposer 200 abutting against one side of the probe holder 100 (e.g., the top side of the probe holder 100 in fig. 3), and the other side of the probe holder 100 (e.g., the bottom side of the probe holder 100 in fig. 3) can be used for testing an object (not shown), such as a semiconductor wafer. Although the probe socket 100 of the present embodiment is described by being combined with the interposer 200, the practical application of the probe socket 100 is not limited thereto.
It should be noted that, for the convenience of understanding the present embodiment, the drawings only show a partial structure of the probe card apparatus 1000, so as to clearly show the structure and connection relationship of the various components of the probe card apparatus 1000. The construction of each component of the probe socket 100 and the connection relationship thereof will be described below.
For the convenience of describing the present embodiment, the probe base 100 defines a length direction L, a width direction W and a height direction H perpendicular to each other. As shown in fig. 1 to 3, the probe holder 100 includes a first guide plate 1(upper die), a second guide plate 2(lower die), a spacer 3 clamped between the first guide plate 1 and the second guide plate 2, and a plurality of rectangular probes 4. That is, the second guide 2 is substantially parallel to the first guide 1, and the second guide 2 and the first guide 1 of the present embodiment can be disposed at an interval in the height direction H by the above-described partition plate 3, but the present invention is not limited thereto. For example, in other embodiments of the present invention, which are not shown, the second guide plate 2 and the first guide plate 1 may be arranged at an interval in the height direction H by other methods.
The first guide plate 1 is formed with a plurality of first rectangular hole walls 11 arranged in a matrix shape, and each first rectangular hole wall 11 is surrounded by a through hole. The second guide plate 2 is formed with a plurality of second rectangular hole walls 21 arranged in a matrix shape, and each of the second rectangular hole walls 21 is also surrounded by a through hole. The positions of the second rectangular hole walls 21 correspond to the positions of the first rectangular hole walls 11 one-to-one, and the through hole formed by each second rectangular hole wall 21 is smaller than the through hole formed by any one of the first rectangular hole walls 11.
Further, a long wall of each of the first rectangular hole walls 11 and a long wall of each of the second rectangular hole walls 21 are parallel to the length direction L (see FIG. 1), and a short wall of each of the first rectangular hole walls 11 and a short wall of each of the second rectangular hole walls 21 are parallel to the width direction W (see FIG. 1). Furthermore, as shown in fig. 2, each first rectangular hole wall 11 is formed with a first outer hole edge 111 on the outer plate surface 12 of the first guide plate 1 and a first inner hole edge 112 on the inner plate surface 13 of the first guide plate 1. Each second rectangular hole wall 21 is formed with a second outer hole edge 211 on the outer plate surface 22 of the second guide plate 2 and a second inner hole edge 212 on the inner plate surface 23 of the second guide plate 2.
As shown in fig. 1 and 2, the plurality of rectangular probes 4 are arranged in a substantially matrix shape, and one ends of the plurality of rectangular probes 4 respectively penetrate through the plurality of first rectangular hole walls 11 of the first guide plate 1, and the other ends of the plurality of rectangular probes 4 respectively penetrate through the plurality of second rectangular hole walls 21 of the second guide plate 2. That is, each rectangular probe 4 is sequentially inserted through the corresponding first rectangular hole wall 11 of the first guide plate 1, the partition plate 3 and the corresponding second rectangular hole wall 21 of the second guide plate 2. However, since the partition plate 3 has low relevance to the point of improvement of the present invention, the structure of the partition plate 3 will not be described in detail below.
In the present embodiment, the rectangular probe 4 is a flexible strip-shaped structure capable of conducting electricity. The probe card apparatus 1000 of the present embodiment is limited to use rectangular probes 4 manufactured by, for example, Micro Electro Mechanical Systems (MEMS) technology, so the present embodiment excludes circular probes having distinct manufacturing processes. In other words, the rectangular probe 4 of the present embodiment has no motivation to refer to each other because the manufacturing processes of the two are distinct compared to the circular probe.
Since the plurality of rectangular probes 4 of the probe socket 100 of the present embodiment have substantially the same structure, for convenience of description, the specific structure of a single rectangular probe 4 will be described below, but the present invention is not limited thereto. For example, in other embodiments of the present invention, which are not shown, the plurality of rectangular probes 4 of the probe socket 100 may have different configurations from each other.
As shown in fig. 1 and 2, the rectangular probe 4 has a deformation section 41, a first positioning section 42 and a second positioning section 43 respectively extending from two opposite ends of the deformation section 41 (e.g., the top end and the bottom end of the deformation section 41 in fig. 2), a first contact section 44 extending from the first positioning section 42 in a direction away from the deformation section 41 (e.g., upward), and a second contact section 45 extending from the second positioning section 43 in a direction away from the deformation section 41 (e.g., upward).
Any part of the deformation section 41 has the same cross-sectional area, that is, no bump or groove is formed on the outer edge of the deformation section 41, so any rectangular probe with a bump or groove formed on the deformation section is not the rectangular probe 4 in this embodiment. Furthermore, the first contact section 44 includes a position-limiting portion 441, the position-limiting portion 441 is adjacent to the first positioning section 42, and the position-limiting portion 441 abuts against the outer plate surface 12 of the first guide plate 1 (see fig. 1); the first contact section 44 and the first positioning section 42 together form a cross-shaped structure in the present embodiment (e.g., fig. 9), but the invention is not limited thereto. The configuration of the end of the second contact section 45 can be adjusted and varied according to the needs of the designer (e.g., flat, tapered, or grooved).
As shown in fig. 1 and 2, the deformation sections 41 of the probe socket 100 are substantially located between the first guide plate 1 and the second guide plate 2, that is, the deformation sections 41 of the present embodiment are spaced apart from each other and disposed in a receiving hole 31 formed in the partition plate 3. The first positioning sections 42 are respectively located in the first rectangular hole walls 11 of the first guide plate 1, and the second positioning sections 43 are respectively located in the second rectangular hole walls 21 of the second guide plate 2. The first contact sections 44 are respectively located at the outer sides of the first rectangular hole walls 11, the interposer 200 is abutted and fixed to the first contact sections 44 of the rectangular probes 4, the second contact sections 45 are respectively located at the outer sides of the second rectangular hole walls 21, and the second contact sections 45 of the rectangular probes 4 are elastically and separably abutted against an object to be tested.
Furthermore, the plurality of first rectangular hole walls 11 of the first guide plate 1 and the plurality of second rectangular hole walls 21 of the second guide plate 2 are arranged in a relative offset manner. Each of the first rectangular hole walls 11 and the corresponding second rectangular hole walls 21 has a length offset SL in the length direction L and a width offset SW in the width direction W (that is, the length offset SL and the width offset SW are generated by the first guide plate 1 relative to the second guide plate 2), so that the deformation sections 41 are pressed against the first positioning sections 42 and the second positioning sections 43 of the corresponding rectangular probes 4 through the first rectangular hole walls 11 and the second rectangular hole walls 21, respectively, so that the deformation sections 41 are forced to be bent and deformed (the structures of the rectangular probes 4 before and after being forced to be deformed are substantially as shown in fig. 8 and 9).
The ratio of the length shift SL divided by the width shift SW is between 1 and 10, and the ratio is preferably limited to 1 to 3. In the embodiment, the length offset SL is between 30 micrometers (μm) and 1500 micrometers, and the width offset SW is between 5 micrometers and 1500 micrometers, but the invention is not limited thereto.
As shown in fig. 1, 2 and 4, in a first cross section of each of the first positioning segments 42 and the corresponding first outer hole edge 111, the first positioning segment 42 is rectangular and includes a first length L42 and a first width W42, the first length L42 is smaller than the length L111 of the first outer hole edge 111, a length difference DL between the first length L42 and the length L111 of the first outer hole edge 111 is preferably smaller than the length offset SL, the first width W42 is smaller than the width W111 of the first outer hole edge 111, and a width difference DW between the first width W42 and the width W111 of the first outer hole edge 111 is preferably smaller than the width offset SW.
Further, as shown in fig. 1 and 4, in the process of the length offset SL of the first guide plate 1 relative to the second guide plate 2, after the first positioning section 42 is first pushed by the first rectangular hole wall 11 by the length difference DL, the first positioning section 42 is pressed by the first rectangular hole wall 11, and a difference between the length offset SL and the length difference DL is substantially the distance pressed by the first rectangular hole wall 11 in the length direction L of the first positioning section 42. Accordingly, in the present embodiment, the length difference DL is preferably between 5 micrometers (μm) and 35 micrometers, but the invention is not limited thereto.
As shown in fig. 1 and 4, in the process of generating the width deviation SW of the first guide plate 1 relative to the second guide plate 2, after the first positioning section 42 is pushed by the first rectangular hole wall 11 by the width difference DW, the first positioning section 42 is pressed by the first rectangular hole wall 11, and a difference between the width deviation SW and the width difference DW is substantially a distance of the first positioning section 42 pressed by the first rectangular hole wall 11 in the width direction W. Accordingly, in the present embodiment, the width difference DW is preferably between 5 microns and 35 microns, but the invention is not limited thereto.
Furthermore, as shown in fig. 7, in a second cross section of each of the second positioning segments 43 and the corresponding second outer hole edge 211, the second positioning segment 43 is rectangular and includes a second length L43 and a second width W43, and the second length L43 is equal to the first length L42, and the second width W43 is equal to the first width W42, but the invention is not limited thereto.
It should be noted that, in other embodiments not shown in the present disclosure, the first length L42 and the first outer hole edge 111 length L111 may be substantially the same, and the first width W42 and the first outer hole edge 111 width W111 may also be substantially the same, so that the distance of the first positioning segment 42 pressed by the first rectangular hole wall 11 in the length direction L may correspond to the length offset SL, and the distance of the first positioning segment 42 pressed by the first rectangular hole wall 11 in the width direction W may correspond to the width offset SW.
Accordingly, the probe holder 100 of the present embodiment adjusts the length shift SL and the width shift SW to make the deformation section 41 of the rectangular probe 4 in a suitable deformation range and not easily broken, thereby effectively improving the reliability and the service life of the probe holder 100 (or the probe card apparatus 1000). Further, when the second contact sections 45 of the probe holder 100 (or the probe card apparatus 1000) are pressed against the object to be tested, the deformation section 41 of the rectangular probe 4 of the embodiment can adjust the length shift SL and the width shift SW, so that the deformation section 41 bearing the pressure is not easily broken.
In another perspective, referring to fig. 2, 4 and 5, in each rectangular probe 4 and the corresponding first rectangular hole wall 11, the first positioning section 42 abuts against two corner portions (e.g., the upper right corner in fig. 4 and the lower left corner in fig. 5) of the first outer hole edge 111 and the first inner hole edge 112, which are diagonally opposite to each other. Referring to fig. 2, 6 and 7, in each rectangular probe 4 and the corresponding second rectangular hole wall 21, the second positioning section 43 abuts against two corner portions (e.g., the lower left corner in fig. 7 and the upper right corner in fig. 6) of the second outer hole edge 211 and the second inner hole edge 212, which are diagonally opposite to each other. In each rectangular probe 4 of the present embodiment, the corner (e.g., the lower left corner in fig. 5) of the first inner hole edge 112 against which the first positioning section 42 abuts is adjacent to the corner (e.g., the upper right corner in fig. 6) of the second inner hole edge 212 against which the second positioning section 43 abuts.
Accordingly, the first positioning section 42 of the rectangular probe 4 of the present embodiment can be supported by the first rectangular hole wall 11 of the first guide plate 1, and the second positioning section 43 can be supported by the second rectangular hole wall 21 of the second guide plate 2, so that the opposite ends of the deformation section 41 of the rectangular probe 4 can have better supporting effect.
[ technical effects of embodiments of the present invention ]
In summary, the probe card apparatus 1000 and the probe holder 100 disclosed in the embodiments of the invention adjust the length shift SL and the width shift SW, so that the deformation section 41 of the rectangular probe 4 can be in a suitable deformation range and is not easy to break, thereby improving the reliability and the service life of the probe holder 100 (or the probe card apparatus 1000). Further, when the second contact sections 45 of the probe holder 100 (or the probe card apparatus 1000) are pressed against the object to be tested, the deformation section 41 of the rectangular probe 4 of the embodiment can adjust the length shift SL and the width shift SW, so that the deformation section 41 bearing the pressure is not easily broken.
In the probe card apparatus 1000 and the probe holder 100 according to the embodiment of the present invention, the first positioning section 42 of the rectangular probe 4 can be supported by the first rectangular hole wall 11 of the first guide plate 1, and the second positioning section 43 can be supported by the second rectangular hole wall 21 of the second guide plate 2, so that the opposite ends of the deformation section 41 of the rectangular probe 4 can have better supporting effect.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the present invention, which is defined by the appended claims.
Claims (9)
1. A probe card apparatus, characterized in that the probe card apparatus comprises:
a probe base defining a length direction, a width direction and a height direction perpendicular to each other, the probe base comprising:
the first guide plate is provided with a plurality of first rectangular hole walls; wherein a long wall surface of each of the first rectangular aperture walls is parallel to the length direction and a short wall surface of each of the first rectangular aperture walls is parallel to the width direction;
the second guide plate and the first guide plate are arranged at intervals in the height direction, and a plurality of second rectangular hole walls are formed in the second guide plate; wherein the positions of the second rectangular hole walls respectively correspond to the positions of the first rectangular hole walls; and
the rectangular probes are respectively provided with a deformation section, a first positioning section and a second positioning section which respectively extend from two opposite ends of the deformation section, a first contact section which extends from the first positioning section in the direction far away from the deformation section, and a second contact section which extends from the second positioning section in the direction far away from the deformation section; wherein any part of each deformation section has the same cross-sectional area, and a plurality of deformation sections are approximately positioned between the first guide plate and the second guide plate; the first positioning sections are respectively positioned in the first rectangular hole walls of the first guide plate, the second positioning sections are respectively positioned in the second rectangular hole walls of the second guide plate, the first contact sections are respectively positioned on the outer sides of the first rectangular hole walls, and the second contact sections are respectively positioned on the outer sides of the second rectangular hole walls;
each first rectangular hole wall and the corresponding second rectangular hole wall have a length deviation in the length direction and a width deviation in the width direction so as to press the first positioning section and the second positioning section of the corresponding rectangular probe, so that the deformation section is stressed to be bent and deformed; wherein the ratio of the length deviation to the width deviation is 1-10; and
a transfer board, which is fixed on the first contact sections of the rectangular probes in an abutting manner, and the second contact sections of the rectangular probes are used for elastically and separably abutting against an object to be tested;
each first rectangular hole wall is provided with a first outer hole edge on the outer plate surface of the first guide plate and a first inner hole edge on the inner plate surface of the first guide plate; in each rectangular probe and the corresponding first rectangular hole wall thereof, the first positioning section abuts against two corner parts of the first outer hole edge and the first inner hole edge, which are obliquely opposite to each other.
2. The probe card apparatus of claim 1, wherein in a first cross-section of each of the first positioning segments and corresponding first outer aperture edge, the first positioning segment is rectangular and includes a first length and a first width, the first length being less than the length of the first outer aperture edge and the first length having a length difference with the length of the first outer aperture edge that is less than the length offset, the first width being less than the width of the first outer aperture edge and the first width having a width difference with the width of the first outer aperture edge that is less than the width offset.
3. The probe card apparatus of claim 2, wherein the difference in length is between 5 microns and 35 microns and the difference in width is between 5 microns and 35 microns.
4. The probe card apparatus of claim 2, wherein each of said second rectangular aperture walls defines a second outer aperture edge on an outer plate side of said second guide plate and a second inner aperture edge on an inner plate side of said second guide plate; in a second cross section of each of the second positioning segments and the corresponding second outer hole edge, the second positioning segment is rectangular and includes a second length and a second width, the second length is equal to the first length, and the second width is equal to the first width; in each rectangular probe and the corresponding second rectangular hole wall thereof, the second positioning section is abutted against two corner parts of the second outer hole edge and the second inner hole edge, which are obliquely opposite to each other; in each of the rectangular probes, the corner portion of the first inner hole edge against which the first positioning section abuts is adjacent to the corner portion of the second inner hole edge against which the second positioning section abuts.
5. The probe card apparatus of claim 1, further comprising a spacer sandwiched between the first guide plate and the second guide plate, wherein the spacer is formed with a receiving hole, and a plurality of the deformation segments are disposed in the receiving hole of the spacer at intervals.
6. The probe card apparatus of claim 1, wherein in each of the rectangular probes, the first contact section includes a position-limiting portion, the position-limiting portion is adjacent to the first positioning section, and the position-limiting portion abuts against an outer plate surface of the first guide plate.
7. The probe card apparatus of claim 1, wherein the ratio of the length offset to the width offset is further defined as between 1 and 3.
8. A probe base defining a length direction, a width direction and a height direction that are perpendicular to each other, the probe base comprising:
the first guide plate is provided with a plurality of first rectangular hole walls; wherein a long wall surface of each of the first rectangular aperture walls is parallel to the length direction and a short wall surface of each of the first rectangular aperture walls is parallel to the width direction;
the second guide plate is arranged at intervals with the first guide plate in the height direction, a plurality of second rectangular hole walls are formed on the second guide plate, and the positions of the second rectangular hole walls respectively correspond to the positions of the first rectangular hole walls; and
the rectangular probes are respectively provided with a deformation section, and a first positioning section and a second positioning section which respectively extend from two opposite ends of the deformation section; any part of each deformation section has the same sectional area, a plurality of deformation sections are approximately positioned between the first guide plate and the second guide plate, a plurality of first positioning sections are respectively positioned in a plurality of first rectangular hole walls of the first guide plate, and a plurality of second positioning sections are respectively positioned in a plurality of second rectangular hole walls of the second guide plate;
each first rectangular hole wall and the corresponding second rectangular hole wall have a length deviation in the length direction and a width deviation in the width direction so as to press the first positioning section and the second positioning section of the corresponding rectangular probe, so that the deformation section is stressed to be bent and deformed; wherein the ratio of the length deviation to the width deviation is 1-10;
each first rectangular hole wall is provided with a first outer hole edge on the outer plate surface of the first guide plate and a first inner hole edge on the inner plate surface of the first guide plate; in each rectangular probe and the corresponding first rectangular hole wall thereof, the first positioning section abuts against two corner parts of the first outer hole edge and the first inner hole edge, which are obliquely opposite to each other.
9. The probe holder of claim 8, wherein in a first cross-section of each of the first positioning segments and the corresponding first outer aperture edge, the first positioning segment is rectangular and includes a first length and a first width, the first length is less than the length of the first outer aperture edge and the first length has a length difference with the length of the first outer aperture edge that is less than the length offset, the first width is less than the width of the first outer aperture edge and the first width has a width difference with the width of the first outer aperture edge that is less than the width offset.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810288294.0A CN110346616B (en) | 2018-04-03 | 2018-04-03 | Probe card device and probe base |
Applications Claiming Priority (1)
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| CN111351970B (en) * | 2020-05-08 | 2022-05-10 | 沈阳圣仁电子科技有限公司 | Vertical probe card for making multiple probes have uniform elasticity |
| CN113721051B (en) * | 2020-05-26 | 2023-12-01 | 旺矽科技股份有限公司 | Probe head with linear probe |
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| CN110346616A (en) | 2019-10-18 |
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