JP2007127488A - Probe card - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To acquire a surer scrubbing effect in a probe card formed by inserting flexible probe pins into a plurality of guide holes of a board. <P>SOLUTION: This probe card for guiding a plurality of probes 6 by the board, having the plurality of guide holes, is equipped with top board parts 1A, 1B; 11A, 11B having the plurality of guide holes 51, bottom board parts having the plurality of guide holes, spacers 2; 12, and the plurality of flexible probe pins 6 inserted into each corresponding guide hole 51 of the top board parts and each corresponding guide hole of the bottom board parts. At least either the top board parts or the bottom board parts are equipped with two boards 3A, 3B; 13A, 13B having the plurality of guide holes, and each position of corresponding guide holes 52, 53 of the two boards is deviated, and the inserted probe pin 6 is projected in slanted manner from the vertical direction, relative to the surface of the probe card. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a probe card for connecting an electrode of an object to be inspected and a terminal of the tester in order to perform an electrical test of the object to be inspected by a tester, and is particularly applicable to a plurality of guide holes of a board arranged at intervals. The present invention relates to a probe card through which a flexible probe pin is inserted.

  Many semiconductor devices, for example, semiconductor integrated circuits (ICs) are formed on a wafer, and an operation test is performed at the stage of formation on the wafer, and defective ones are excluded from the subsequent assembly process. The operation inspection is also performed at the stage where the IC module is assembled.

  A prober is a device that holds a wafer that is an object to be inspected and connects the electrode pads of each IC formed on the wafer and the terminals of a tester, and has a probe group that contacts the electrodes of the object to be measured. A probe card is provided. Some probe cards have cantilever-type probes and some have spring probes. However, it is possible to narrow the pitch at a low manufacturing cost. A probe card in which a flexible probe pin is inserted is known, and is described in Patent Documents 1 and 2, for example.

  In the probe cards described in Patent Documents 1 and 2, the probe pins are bent between the boards arranged at an interval to absorb variations in the tip positions of the probe pins, and the probe pins and the object to be measured ( For example, variation in contact pressure with an electrode of a chip formed on a wafer) or an electrode connected to a terminal of a tester is reduced.

  Patent Document 1 describes a configuration example in which the direction of a probe pin protruding from a probe board is a vertical direction. Even in the configuration example described in Patent Document 2, the direction of the probe pin protruding from the probe board is the vertical direction. However, Patent Document 2 describes the difference between the diameter of the guide hole of the board through which the probe pin is inserted and the diameter of the probe pin. Because of the (clearance), when the probe pin bends, force is applied to the contact portion between the probe pin and the electrode in a direction substantially orthogonal to the axial direction of the probe pin, improving the contact state and reducing the contact resistance. Is described. If a force is also applied to the contact portion between the probe pin and the electrode in a direction substantially orthogonal to the axial direction of the probe pin, it is considered that the probe pin slides on the electrode and the contact state is improved. This is known as a scrub effect in a cantilever type probe or the like. Patent Document 1 does not describe the scrub effect, but since the probe pin is bent, it is considered that the scrub effect occurs when there is a clearance.

Japanese Patent Laid-Open No. 10-96747 JP 2002-90410 A

  However, Patent Document 1 and Patent Document 2 describe a configuration in which the direction of the probe pin protruding from the probe board is a substantially vertical direction, and the amount of inclination of the probe pin depends on the diameter of the guide hole and the probe pin. This is only due to the difference in diameter (clearance), and a sufficient scrub effect cannot be obtained.

  In the configurations described in Patent Literature 1 and Patent Literature 2, the arrangement of the probe pins on both sides of the probe card is the same. In other words, the electrode arrangement of the object to be measured which the probe pins contact is the same as the arrangement of the electrodes connected to the terminals of the tester, and the arrangement pitch of the probe pins on both sides is the same. In recent years, the miniaturization of semiconductor devices has further progressed, and accordingly, the electrode arrangement of the object to be measured has become narrower. On the other hand, it is not preferable that the electrodes connected to the terminals of the tester have a very narrow pitch in view of ease of manufacture. Therefore, it is desirable that the probe pins have different arrangements on both sides of the probe card, and the probe card has a function of converting the arrangement of the electrodes. However, in the configurations described in Patent Document 1 and Patent Document 2, such a configuration is required. There was a problem that the request could not be answered.

  The present invention solves such a problem, and a more reliable scrub effect can be obtained in a probe card in which flexible probe pins are inserted through a plurality of guide holes of a board arranged at intervals. A first object is to make the probe card have an electrode array conversion function.

  In order to achieve the above object, the probe card of the present invention is configured such that at least one of the top board and the bottom board is composed of two boards having a plurality of guide holes, and the positions of the corresponding guide holes of the two boards are determined. When the probe pins are inserted through the corresponding guide holes of the two boards, the probe pins are inclined and protrude from the vertical direction with respect to the surface of the probe card.

  That is, the probe card of the present invention guides a plurality of probes whose one end is in contact with the electrode of the object to be inspected and whose other end is connected to the terminal of the tester with a board having a plurality of guide holes. A top board portion having a plurality of guide holes, a bottom board portion having a plurality of guide holes, a spacer for regulating a distance between the top board portion and the bottom board portion, and the plurality of the top board portions. And a plurality of flexible probe pins arranged so as to be inserted into corresponding guide holes of the plurality of guide holes of the bottom board portion, and at least one of the top board portion and the bottom board portion Is provided with two boards having a plurality of guide holes, and the positions of the corresponding guide holes of the two boards are shifted. The probe pin is inserted into the guide hole, and wherein the protruding inclined from the vertical direction with respect to the surface of the probe card.

  FIG. 1 is a diagram showing a basic configuration of a probe card of the present invention. As shown in FIG. 1, the probe card of the present invention includes a top board portion composed of first and second top boards 1A and 1B, and a bottom composed of first and second bottom boards 3A and 3B. It has a board part and the spacer 2 which controls the space | interval of a top board part and a bottom board part. These are positioned by the positioning pins 4 and fixed and assembled by fastening means (screws or the like) not shown. Each of the first and second top boards 1A and 1B has a plurality of guide holes 51, and the positions of the corresponding guide holes 51 coincide. Further, the first and second bottom boards 3A and 3B have a plurality of guide holes 52 and 53, respectively, and the positions of the corresponding guide holes 52 and 53 are shifted. After assembling the first and second top boards 1A and 1B, the spacer 2, and the first and second bottom boards 3A and 3B, the flexible probe pins 6 are inserted through the corresponding guide holes. The inserted probe pin is inclined and protrudes from the vertical direction with respect to the surface of the probe card (second bottom board 3B). The inserted probe pin 6 is locked by contact with the guide hole and does not fall off.

  In FIG. 1, the top board portion is composed of the first and second top boards 1A and 1B. However, the top board portion may be composed of a single board.

  In FIG. 1, since the arrangement of the plurality of guide holes of the first and second top boards 1A and 1B is matched, the probe pin 6 protrudes substantially vertically from the first top board 1A. A certain amount of scrub effect can be obtained depending on the difference (clearance) between the guide hole diameter of the first and second top boards 1A and 1B and the diameter of the probe pin 6. In that case, even if the clearance is slightly increased, the probe pin 6 is locked by the shifted guide holes of the first and second bottom boards 3A and 3B, so that it does not fall out and the scrub effect is increased. it can. Of course, the positions of the corresponding guide holes of the first and second top boards 1A and 1B are shifted so that the inserted probe pins protrude from the vertical direction with respect to the surface of the first top board 1A. Also good.

  According to the present invention, since the probe pin protrudes with a certain inclination from the vertical direction with respect to the surface of the probe card, the scrub effect can be obtained more reliably.

  In the configuration of the present invention, since the probe pins are inclined with respect to at least one of the top board portion and the bottom board portion, the arrangement pitch of the plurality of guide holes in the top board portion and the bottom board portion through which the probe pins pass Can be easily different.

  In order to prevent the plurality of probe pins from conducting due to contact between the top board portion and the bottom board portion, it is desirable that the intermediate portion is covered with an insulating material.

  In FIG. 1, for ease of explanation, the positions of the guide holes 51 of the top board portion and the guide holes 52 of the first bottom board 3 </ b> A are shown to be greatly shifted, but in actuality, they are illustrated. You don't have to tilt as much. In addition, the position of the guide hole 52 of the first bottom board 3A and the position of the guide hole 53 of the second bottom board 3B are greatly shifted, and the probe pin is shown to be greatly inclined. However, the necessary scrub effect can be obtained.

  According to the present invention, a more reliable scrub effect can be obtained in a probe card in which flexible probe pins are inserted through a plurality of guide holes of a board arranged at intervals. Furthermore, according to the present invention, in the probe card in which the flexible probe pins are inserted into the plurality of guide holes of the board arranged at intervals, the probe card has an electrode array conversion function.

  FIG. 2 is a perspective view showing an appearance of the probe card 10 according to the embodiment of the present invention. Since an actual probe card is attached to a card holder or the like, a member for attachment is provided, but since it is not directly related to the present invention, illustration is omitted.

  As shown in FIG. 2, the probe card 10 has a rectangular parallelepiped box shape, and the probe pin group 21 protrudes from the upper and lower surfaces. Reference numeral 21 is a positioning pin for assembly, and 31 is a hole in which a screw of a fastening member is provided. The probe pin group 21 includes, for example, 400 to thousands of probe pins.

  FIG. 3 is a diagram showing a board constituting the probe card 10 and an assembling method thereof. As shown in FIG. 3, the probe card 10 includes a first top board 11A, a second top board 11B, a spacer 12, a first bottom board 13A, and a second bottom board 13B. . Each board and spacer have holes 31, 33, 35, 38, and 40 through which screws for fastening pass, and holes 32, 34, 36, 39, and 41 through which the positioning pins 4 pass. The spacer 12 further has a hole 37 in the center. It should be noted that the fastening method and the like are described in Patent Document 2 and the like and are easily understood by those skilled in the art, so detailed description and illustration are omitted.

  4A shows the arrangement of the guide holes 51 of the first top board 11A and the second top board 11B, and FIG. 4B shows the arrangement of the guide holes 52 of the first bottom board 13A. FIG. 4C shows the arrangement of the guide holes 53 of the second bottom board 13B. The diameter of the guide hole 51 is a diameter corresponding to the diameter of the probe pin, that is, a diameter slightly larger than the diameter of the probe pin. The arrangement pitch of the guide holes 52 in the first direction (the horizontal direction in the figure) is different from the arrangement pitch of the guide holes 51. Further, the position of the guide hole 53 is slightly shifted in the first direction with respect to the position of the corresponding guide hole 52. The probe pin is bent inside the probe card 10 to be pressed and locked to the edges of the guide holes 52 and 53 as shown in FIG. The diameters of the guide holes 52 and 53 are preferably slightly larger than the diameter of the guide hole 51.

  By assembling the first and second top boards 11A and 11B, the spacer 12, and the first and second bottom boards 13A and 13B, a structure excluding the probe pin 6 can be obtained in the structure shown in FIG. . However, as described above, in FIG. 1, for ease of explanation, the positions of the guide holes 51 of the top board portion and the guide holes 52 of the first bottom board 3 </ b> A are shown to be greatly shifted. Actually, for a probe card having a thickness of about 30 mm, the positional deviation between the guide hole 51 of the top board portion and the guide hole 52 of the first bottom board 3A may be about 1 mm at the maximum. In addition, a sufficient scrub effect can be obtained even if the inclination of the probe pin from the vertical direction due to the displacement of the guide hole 52 of the first bottom board 3A and the guide hole 53 of the second bottom board 3B is 10 degrees or less. Accordingly, the positional deviation between the guide hole 52 of the first bottom board 3A and the guide hole 53 of the second bottom board 3B is set according to the inclination for obtaining the required scrub effect.

  FIG. 5 is a diagram showing the shape of the probe pin 6. The probe pin 6 is a conducting wire 61 made of tungsten or the like having a diameter of about 70 μm, and a Teflon (registered trademark) electrodeposition film 62 is formed in a central portion excluding about 10 percent of both ends. As described above, with respect to the probe card having a thickness of about 30 mm, the positional deviation between the guide hole 51 of the top board portion and the guide hole 52 of the first bottom board 3A is about 1 mm at the maximum. All of the same length are used, and the difference in the distance between the corresponding guide holes in the second top board 11B and the first bottom board 13A is absorbed by the difference in the deflection amount of the probe pin 6.

  FIG. 6 shows a state in which the probe pin 6 is attached to a structure including the assembled first and second top boards 11A and 11B, the spacer 12, and the first and second bottom boards 13A and 13B. As shown in the figure, after inserting the probe pin 6 into the guide hole 53 from the second bottom board 13B side and passing through the guide hole 52 of the first bottom board 13A, the tip is the first and second tops. Guide through the guide holes 52 of the boards 11A and 11B.

  Although the embodiments of the present invention have been described above, various modifications are possible. For example, in the embodiment, the guide pins of the two bottom boards are shifted so that the probe pins are inclined. The probe pins may be inclined by shifting the guide holes of the two top boards, or both may be inclined.

  The present invention can be applied to any probe card as long as a flexible probe pin is inserted into a plurality of guide holes of a board arranged at intervals.

It is a figure explaining the principle structure of this invention. It is an external view of the probe card of the Example of this invention. It is a figure explaining the component of the probe card of an Example, and the assembly method. It is a figure which shows the arrangement | sequence of the guide hole in each board. It is a figure which shows the probe pin used in an Example. It is a figure explaining the assembly method of a probe card.

Explanation of symbols

1A, 11A 1st top board 1B, 11B 2nd top board 2, 12 Spacer 3A, 13A 1st bottom board 3B, 13B 2nd bottom board 4 Positioning pin 6 Probe pin

Claims (3)

A probe card that guides a plurality of probes whose one end is in contact with an electrode of an object to be inspected and whose other end is connected to a terminal of a tester with a board having a plurality of guide holes,
A top board portion having a plurality of guide holes;
A bottom board portion having a plurality of guide holes;
A spacer for regulating an interval between the top board part and the bottom board part;
A plurality of flexible probe pins arranged so as to be inserted into the corresponding guide holes of the plurality of guide holes of the top board portion and the plurality of guide holes of the bottom board portion;
At least one of the top board part and the bottom board part includes two boards having a plurality of guide holes, and the positions of the corresponding guide holes of the two boards are shifted, The probe card, wherein the probe pin inserted through the corresponding guide hole protrudes from the vertical direction with respect to the surface of the probe card.   The probe card according to claim 1, wherein an arrangement pitch of the plurality of guide holes in the top board portion in at least one direction is different from an arrangement pitch of the plurality of guide holes of the two boards in the bottom board portion.   The probe card according to claim 1 or 2, wherein the plurality of probe pins are covered with an insulating material at an intermediate portion.

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