JP2009162483A - Electrical connection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable reliable displacement of a second plate-shaped member disposed in the middle to one side in the horizontal direction and also to maintain the second plate-shaped member in this state, even when an electrical connection device has a large number of contacts. <P>SOLUTION: The electrical connection device includes the first, second and third plate-shaped members which have respectively first holes in a plurality piercing plate-shaped parts in the direction of the thickness thereof and at least one second hole formed in a place spaced from the first hole in a first direction in the horizontal direction, and includes the contacts in a plurality which are passed respectively through the first holes, and a rod-shaped member which is inserted into the second hole. The second hole in the second plate-shaped member is slotted to be long in the first direction, and the second-plate shaped member is maintained by the rod-shaped member in a state that it is displaced in the first direction in relation to the first and third members so that the contacts are curved between the first and third plate-shaped members. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an electrical connection apparatus such as a probe card used for electrical testing of an object to be inspected, such as a semiconductor device such as an integrated circuit.

  An object to be inspected such as a semiconductor device is subjected to an electrical test (inspection) to determine whether its internal circuit operates according to the specification. Such an electrical test is an electrical test such as a probe card in which a plurality of contacts such as probes whose needle tips are pressed against the electrodes of an object to be inspected are arranged on the lower side of the substrate such as a wiring board or a probe board. This is done using an automatic connection device.

  As one of the electrical connection devices of this type, first and third plate-like members (upper and lower plates) are arranged at intervals in the vertical direction, and a sheet-like second member is disposed between the first and third plates. A plurality of contacts such as probe needles, which penetrate the first, second and third plate members (upper plate, middle plate and lower plate) in the vertical direction And then assembled to those plate-like members, with the plate-like members stacked in the vertical direction and the lower end of each contact (ie, the tip of the needle) protruding downward from the third plate-like member, There is a vertical type disposed below a substrate such as a probe substrate (for example, Patent Document 1).

  In the above-described conventional electrical connection device, the contact includes the first and third contacts when the second plate-like member is displaced to one side in the horizontal direction with respect to the first and third plate-like members. Between the first and third plate-like members by bending the lower end (needle tip) against the electrode of the device under test during the electrical test. And further curved in the same direction as described above. Thereby, adjacent contacts are prevented from contacting each other.

  The above-described conventional electrical connection device is cheaper because the assembly work of the probe is easier than the conventional general device in which the probe needle bent in an L-shape is assembled to the substrate in a cantilever shape. In addition, since the arrangement density of the probe, and hence the tip of the needle can be increased, it is suitable for an energization test of a high-density object to be inspected with a large number of electrodes.

  In the above conventional electrical connection device, a spacer is provided between the first and third plate-like members, a guide having a screw hole is attached to the spacer, and the second plate-like member is displaced to one side in the horizontal direction. The second plate-like member is displaced to one side in the horizontal direction by a screw member that is supported by the guide and penetrates the spacer and screwed into the screw hole of the guide. For this reason, when each contactor is curved, a repulsive force due to the spring force of each contactor acts on the screw member via the second plate member.

  In the structure in which the second plate-like member is displaced to one side in the horizontal direction by the screw member screwed into the screw hole of the guide as in the above vertical type device, even if the spring force of each contactor is small, The sum of the spring forces of all the contacts increases as the number of contacts provided in the electrical connecting device increases. Those spring forces act as a repulsive force on the screw member via the second plate member.

  On the other hand, recent electrical connection devices are required to have thousands, or in some cases, more than 10,000 contacts. However, even if the conventional electrical connecting device is applied to a device having a large number of contacts as described above, the total repulsive force corresponding to the sum of the spring forces of all the provided contacts becomes too large. Therefore, it is difficult to greatly displace the second plate member.

  One reason for this is that the conventional electrical connection device has a structure in which the second plate-like member is displaced to one side in the horizontal direction by the screw member. As a result, the conventional electrical connection device cannot be applied to a device having a large number of contacts.

  As another reason, if the second plate-like member is a thin film such as a polyimide film, even if the film is pushed from one side to the other, the film itself is wavy due to the repulsive force of the contact. Can be curved and not displaced in the first direction. If the film itself is so curved, the film will only be bent into a large wave and not displaced in the first direction.

JP 2002-202337 A

  The object of the present invention is to make it possible to reliably displace the second plate-like member disposed in the middle to one side in the horizontal direction even in an electrical connection device having a large number of contacts. This is to maintain the plate-like member in that state.

  The electrical connection device according to the present invention is a first, second, and third plate-like members having plate-like portions spaced from each other in the thickness direction, each of the plate-like portions in the thickness direction. A plurality of first holes penetrating through the first hole, and at least one second hole formed at a location spaced from the first hole in the first direction in the horizontal direction. A third plate-like member, a plurality of contacts each passed through the first hole of the first, second and third plate-like members, and the first, second and third plates And a rod-like member inserted into the second hole of the shaped member.

  The second hole of the second plate-like member is a long hole that is long in the first direction, and the second plate-like member is the first plate with respect to the first and third plate-like members. The rod-shaped member is maintained in a state of being displaced in the direction of 1 and bending the contact between the first and third plate-shaped members.

  The second plate-like member may protrude to one side in the first direction with respect to the first and third plate-like members.

  At least one of the first and third plate-like members has the first, second, and third positions of the second member relative to the first and third plate-like members in the first direction. You may have the wall which controls to the position where the said 1st hole of a plate-shaped member aligns.

  The second hole of the first and second plate-like members may be a through hole that penetrates the plate-like portion in the thickness direction, and the second hole of the third plate-like member. The hole may be a through-hole penetrating the plate-like portion in the thickness direction or a so-called bottomed hole extending from the upper side to the lower side of the plate-like portion.

  The first and third plate-like members may be coupled to each other so that the second holes are aligned.

  The first hole of the second plate-shaped member may be displaced in the first direction with respect to the first hole of the first and third plate-shaped members.

  The second plate-shaped member may have an inner surface portion of the second hole in the first direction in contact with the rod-shaped member.

  The rod-like member may include a pin member inserted into the second hole of the first, second, and third plate-like members.

  The rod-shaped member includes a screw member inserted into at least the second hole of the first and second plate-shaped members and screwed into at least the second hole of the third plate-shaped member. Can do.

  The rod-shaped member is a screw member that is inserted into the second hole of the first and second plate-shaped members and passed through a part of the second hole of the third plate-shaped member. A screw member screwed into the remaining part of the second hole of the third plate-like member may be included.

  The electrical connection device according to the present invention further includes a wiring board having a plurality of internal wirings, and is disposed on the lower surface of the wiring board, and the first, second and third plate-like members are supported on the lower surface. The connection board may include a connection board having a plurality of connection portions that electrically connect an upper end portion of the contact and the internal wiring of the wiring board.

  Each of the first, second, and third plate-like members includes at least two third holes penetrating them in the thickness direction thereof, and the third plate-like member of the first plate-like member is provided. The hole is a through-hole penetrating the first plate-like member in the thickness direction, the third hole of the second plate-like member is a long hole long in the first direction, and the third The third hole of the plate-like member is a through-hole penetrating the second plate-like member in the thickness direction or a bottomed hole extending downward from above the plate-like portion, and the first and second holes And the 3rd plate-shaped member may be suppressed the relative displacement in the said horizontal direction with the pin inserted in those said 3rd holes.

  In the present invention, the second hole of the second plate-like member is a long hole that is long in the first direction, and the second plate-like member is the second hole with respect to the first and third plate-like members. The rod-shaped member inserted in the second hole is maintained in a state of being displaced in the direction of 1 and bending the contact between the first and third plate-shaped members.

  For this reason, in the electrical connection device of the present invention, the second plate member is pulled into the first and third plate members by pulling the second plate member in the longitudinal direction of the second hole. On the other hand, each contact can be easily displaced in the first direction to bend in the same direction between the first and third plate-like members.

  As a result, according to the present invention, the second plate-like member can be easily and reliably displaced to one side in the horizontal direction even if a large number of contacts are provided, and the second plate The shaped member can be maintained in that state.

  When the second plate-like member protrudes to one side in the first direction with respect to the first and third plate-like members, the protruding portion of the second plate-like member is like pliers. By pulling the second plate member while being sandwiched between the tools, the second plate member can be easily and more reliably displaced on one side in the horizontal direction.

  At least one of the first and third plate-like members has a position in the first direction of the second member with respect to the first and third plate-like members, and the first, second, and third plate-like members have the first positions. If the first plate has a wall that regulates at a position where the holes are aligned, the contact can be inserted into the first hole in a state where the second plate-like member is regulated at such a position. The arrangement | positioning operation | work of the contactor to the 1st, 2nd and 3rd plate-shaped member becomes easy.

  [Explanation of terms]

  In the present invention, the extending direction of each contact, that is, the thickness direction of the first, second, and third plate members through which the contact passes (the wiring board side in FIG. The downward direction) is called the vertical direction, and the direction perpendicular to the vertical direction is called the horizontal direction. In the present invention, the moving direction of the second plate-like member described later in FIG. 1 is referred to as the left-right direction (first direction), and the paper back direction is referred to as the front-rear direction.

  However, the vertical direction and the horizontal direction in the present invention differ depending on the posture of the object to be inspected during the electrical test with respect to the tester.

  Therefore, the vertical direction referred to in the present invention is the vertical direction, the opposite direction, the actual horizontal direction, and the inclination direction inclined with respect to the actual horizontal plane, depending on the posture of the object to be inspected during the actual electrical test. It is determined to be in either direction.

  Similarly to the above, the horizontal direction in the present invention is determined so as to be any one of a vertical plane extending in the vertical direction, a horizontal plane extending in the actual horizontal direction, and an inclined plane inclined with respect to the horizontal plane.

  [Description of Examples]

  Referring to FIGS. 1 to 5, an electrical connection apparatus 10 includes a large number of integrated circuits, and the semiconductor wafer shown in FIG. 1 is a test object 12, and a large number of integrated circuits on the test object 12 are simultaneously connected. Or it is used as a probe card to test in multiple times. Each device under test 12 has a rectangular shape, and has a plurality of electrodes 14 spaced in the direction of the sides of the rectangle on each side of the rectangle.

  The electrical connection device 10 includes a disk-shaped wiring board 20, a connection board 22 assembled on the lower surface of the wiring board 20, and a probe assembly 24 assembled on the lower side of the connection board 22.

  The wiring board 20 is manufactured in a disk shape using an electrically insulating material such as an epoxy resin containing glass or a ceramic material. The wiring board 20 has a plurality of tester lands 26 electrically connected to the tester in the peripheral region on the upper surface, and a plurality of internal wirings 28 electrically connected to the tester lands 26 at the upper end. In the central region.

  The tester land 26 and the internal wiring 28 can be formed by an appropriate method such as a printed wiring technique. Each tester land 26 is exposed on the upper surface of the wiring board 20, and the lower end of each internal wiring 28 is exposed on the lower surface of the wiring board 20.

  The connection board 22 is manufactured in the form of a plate having a rectangular planar shape that is slightly larger than the central region of the wiring board 20 with an electrically insulating material such as polyimide, and is screwed into the wiring board 20 through the connection board 22. The plurality of screw members 30 are assembled to the lower surface of the wiring board 20.

  The connection substrate 22 has a plurality of internal wirings 32. The upper end of each internal wiring 32 is exposed on the upper surface of the connection substrate 22 and is pressed against the lower end of the internal wiring 28 of the wiring substrate 20. Thereby, each internal wiring 32 is electrically connected to the internal wiring 28 of the wiring board 20 in a one-to-one manner. The lower end of each internal wiring 32 is exposed on the lower surface of the connection substrate 22.

  The probe assembly 24 includes first, second and third plate-like members 34, 36 and 38, each made of an electrically insulating material. The probe assembly 24 is formed in a rectangular parallelepiped shape having a rectangular planar shape slightly smaller than the connection substrate 22 by the plate-like members 34, 36 and 38.

  Each of the first and third plate-like members 34 and 38 has a rectangular planar shape having the same size. The first plate member 34 has a rectangular recess 40 that opens downward, and the third plate member 38 has a rectangular recess 42 that opens upward. The bottoms of the recesses 40 and 42 act as plate-like parts 44 and 46 spaced in the vertical direction.

  The first and third plate-like members 34 and 38 are in a state in which the recesses 40 and 42 communicate with each other via the second plate-like member 36, and the first plate-like member 34 is on the upper side and the third In the state where the plate-like member 38 is on the lower side, the frame portions 48 and 50 around the plate-like portions 44 and 46 are overlapped with each other.

  The first and third plate members 34 and 38 pass through the frame portion 48 of the first plate member 34 and are screwed into the frame portion 50 of the third plate member 38. Are connected to each other. The third (or first) plate-like member 38 (or 34) is opened to the upper (or lower) and the recess 42 (or 40) to move in the first direction (left-right direction) in the horizontal plane. A pair of extending grooves 54 are provided in the frame 50 (or 48).

  The second plate-like member 36 is manufactured in a plate-like or sheet-like shape having a rectangular planar shape, and is received by the groove 54 at each edge in the width direction so as to be movable in the left-right direction. The left end wall of each groove 54 acts as a positioning wall 56 that regulates the leftmost end position of the second plate member 36 with respect to the first and third plate members 34 and 38.

  The width dimension of the second plate member 36 in the front-rear direction is slightly smaller than the dimension of the groove 54 in the front-rear direction. However, the length dimension in the left-right direction of the second plate member 36 is longer than the dimension in the left-right direction of the first and third plate members 34 and 38.

  The central region of the second plate-like member 36 has a plate-like shape of the first and third plate-like members 34 and 38 because the second plate-like member 36 has a plate-like or sheet-like shape as a whole. It acts as a plate-like part 58 spaced in the vertical direction with respect to the parts 44 and 46.

  The first, second, and third plate members 34, 36, and 38 are plates that act as a central region even though the third plate member 36 is superimposed on the first plate member 34. The vertical portions 44 and 46 and the plate-shaped portion 58 are spaced apart in the vertical direction.

  The first, second, and third plate-like members 34, 36, and 38 each have a plurality of first holes 60 that penetrate the plate-like portions 44, 46, and 58 in the thickness direction, and a first hole. 60, at least one second hole 62 formed at a position spaced from one side in the left-right direction and at least two second holes penetrating the corresponding plate-like members 34, 36, and 38 in the thickness direction. 3 holes 64 are provided.

  In the illustrated example, each of the first holes 60 of the first, second, and third plate-like members 34, 36, and 38 is a through hole having a circular planar shape and the same diameter dimension. Each of the second holes 62 and the third holes 64 of the first and third plate-like members 34 and 38 is a through hole having a circular planar shape. Each of the second hole 62 and each third hole 64 of the second plate-like member 36 is a long hole that is long in the left-right direction.

  The width dimension in the front-rear direction of the second and third holes 62 and 64 of the second plate-shaped member 36 is the diameter dimension of the second and third holes 62 and 46 of the first plate-shaped member 34, respectively. The same.

  The second hole 62 of the third plate-shaped member 38 has an upper area having the same diameter as the second hole 62 of the first plate-shaped member 34 and a diameter dimension smaller than the diameter dimension of the upper area. And a lower region (see FIG. 5).

  The first and third plate-like members 34 and 38 are coupled so that their first holes 60 are in the same position in the left-right direction and the front-rear direction (that is, aligned). The position of the second plate member 36 in the front-rear direction is the same position as the first hole 60 of the first and third plate members 34 and 38.

  The second plate-like member 36 is displaced to one side (right side in the illustrated example) in the left-right direction with respect to the first and third plate-like members 34 and 38. Thereby, the first hole 60 of the second plate-like member 36 is displaced in the same direction with respect to the first holes 60 of the first and third plate-like members 34 and 38.

  The probe assembly 24 also includes a plurality of contacts 66 that are respectively passed through the first holes 60 of the first, second, and third plate-like members 34, 36, and 38; In the rod-like member 68 inserted into the second hole 62 of the third plate-like members 34, 36 and 38, and in the third hole 64 of the first, second and third plate-like members 34, 36 and 38 And a plurality of inserted pins 70.

  Each contact 66 is made in the shape of a needle that can be elastically deformed by a conductive metal fine wire such as a tungsten wire, and the first, second, and third plate-like members 34, 36, and 38 have first contacts. The lower end (needle tip) protrudes downward from the third plate-like member 38 through a state having a slight play in the hole 60.

  The upper end surface of each contactor 66 is inserted into the first hole 60 of the first plate member 34 so that the upper end portion of the contactor 66 can move in the vertical direction. The upper surface is at a height position and is in contact with the lower end surface of the wiring 32.

  In each contact 66, the first hole 60 of the second plate-like member 36 is displaced to one side in the left-right direction with respect to the first holes 60 of the first and third plate-like members 34 and 38. Thus, the first and third plate-like members 34 and 38 are curved to one side in the same direction.

  The repulsive force of each contact 66 acts to return the second plate-like member 36 to the base position with respect to the first and third plate-like members 34 and 38, and the second plate-like member 36 has a second repulsive force. The inner surface of the second hole 62 is in contact with the rod-shaped member 68. For this reason, the rod-shaped member 68 is maintaining the state which curved the contactor 66 to the one side in the left-right direction in cooperation with the 2nd plate-shaped member 36. FIG.

  In the illustrated example, the rod-like member 68 is detachably fitted in the second holes 62 of the first and second plate-like members 36 and 36 and the second plate-like member 38 of the third plate-like member 38. The upper region of the hole 62 is removably fitted. As such a rod-shaped member 68, a pin member having the same diameter dimension can be used.

  Each pin 70 has a diameter dimension substantially the same as the diameter dimension of the third hole 64 of the first and third plate members 34 and 38, and the first and third plate members 34 and 38. The third hole 64 is removably fitted.

  As a result, each pin 70 suppresses the displacement of the first and third plate-like members 34 and 38 in the left-right direction, and the first, second, and third holes 60, 62, and 64 in the left-right direction. The first, second, and third holes 60, 62, and 64 are aligned with each other and suppressed from displacement in the front-rear direction of the first, second, and third plate members 34, 36, and 38. The positions in the front-rear direction are aligned.

  For example, the probe assembly 24 can be assembled as follows.

  First, as shown in FIG. 5, after the second plate member 36 is disposed in the groove 54 of the third plate member 38, the pin 70 is inserted into the third hole 64, and the first and The third plate members 34 and 38 are coupled by the screw member 52. Thereby, the 1st and 3rd plate-shaped members 34 and 38 are maintained in the state in which those 1st holes 60 and 3rd holes 64 were aligned.

  Next, as shown in FIG. 5, the second plate member 36 is moved to the leftmost position with respect to the first and third plate members 34 and 38. As a result, the second hole 62 of the second plate member 36 is aligned with the second hole 62 of the first and third plate members 34 and 38.

  As a result of the above, the first, second and third holes 60, 62 and 64 of the second plate member 36 are the first, second and third holes of the first and third plate members 34 and 38, respectively. Aligned with the third holes 60, 62 and 64.

  Next, as shown in FIG. 6, in the above state, each contact 66 is inserted into the first hole 60 of the first, second and third plate-like members 34, 36 and 38.

  Next, as shown in FIG. 7, the second plate until the second hole 62 of the second plate-like member 36 is aligned with the second hole 62 of the first and third plate-like members 34 and 38. The member 36 is pulled to the right with respect to the first and third plate members 34 and 38.

  Next, as shown in FIG. 8, in the above state, after the rod-like member 68 is inserted into the second hole 62, the right side of the second plate-like member 36 with respect to the first and third plate-like members 34 and 38. The pull to the direction is released. Thereby, all the contacts 66 are bent rightward by the second plate-like member 36 and the rod-like member 68, and the adjacent contacts 66 are maintained in a state where they are not in electrical contact with each other.

  The above pulling operation can be performed by holding the right end portion of the second plate-like member 36 with a tool such as pliers and pulling it to the right. The plate-like member 36 can be easily and reliably displaced rightward, and the rod-like member 68 can be inserted into the second hole 62 in this state, so that the second plate-like member 36 is in that state. Can be easily maintained.

  In the illustrated example, the probe assembly 24 assembled as described above passes through the connection board 22 with the upper ends of the contacts 66 in contact with the lower ends of the internal wirings 32 of the connection board 22. The plurality of screw members 72 shown in FIG. 3 screwed into the frame portion 48 of one plate-like member 34 are assembled to the lower surface of the connection substrate 22.

  The connection board 22 assembled with the probe assembly 24 as described above is assembled to the electrical connection apparatus 10 by the plurality of screw members 30 already described on the lower surface of the wiring board 20.

  However, the procedure for assembling the probe assembly 24 to the connection board 22 and the procedure for assembling the connection board 22 to the wiring board 20 are not limited to the above embodiment.

  In the electrical connection device 10 assembled as described above, each contact 66 is electrically connected to the tester land 26 via the internal wirings 32 and 28. Further, in a state where the electrical connection device 10 is assembled to the tester, each contact 66 is electrically connected to an electrical circuit of a tester (not shown) via the internal wirings 32 and 28 and the tester land 26. .

  In the state in which the electrical connecting device 10 is assembled to the tester, first, as shown in FIG. 9, the lower end of each contact 66 is brought into contact with the electrode 14 of the device under test 12.

  Next, as shown in FIG. 10, the electrical connection device 10 presses the lower end of each contact 66 against the device under test 12. As a result, each contact 66 is further bent to the right by the overdrive acting thereon, and the second plate member 36 is moved further to the right with respect to the first and third plate members 34 and 38. Displace. Due to this displacement, the adjacent contacts 66 do not come into electrical contact with each other.

  In the above state, a test electrical signal is supplied from the electrical circuit of the tester to the device under test 12, and an electrical signal from the device under test 12 is supplied to the electrical circuit of the tester, whereby the test of the device under test 12 is performed. Is called.

  In the electrical connection device 10, the second plate member 36 is pulled in the longitudinal direction of the second hole 62, thereby pulling the second plate member 36 into the first and third plate members 34 and 38. Therefore, each contactor 66 can be bent in the same direction between the first and third plate-like members 34 and 38.

  Further, all the contacts 66 are bent in the same direction in advance, and even if an overdrive acts on the contacts 66, all the contacts 66 are bent in the same direction.

  As shown in FIG. 11, the rod-like member 68 is inserted into the second hole 62 of the first and second plate-like members 36 and 36, and the lower end portion is made third as shown in FIG. A screw member screwed into the upper region of the second hole 62 of the plate-like member 38 may be used.

  As shown in FIG. 12, the rod-shaped member 68 is inserted into the upper region of the second hole 62 of the first and second plate members 36 and 36 and the second hole 62 of the third plate member 38. In this case, the lower end portion may be a screw member screwed into the lower region of the second hole 62 of the third plate-like member 38.

  Instead of providing the internal wirings 28 and 32 on the wiring board 20 and the connection board 22, respectively, a plurality of external wirings penetrating the wiring board 20 and the connection board 22 in the thickness direction are provided. You may make it contact | abut to the lower end of wiring.

  Each of the second hole 62 and the third hole 64 of the third plate-like member 38 may be a bottomed hole that extends the corresponding plate-like portion 50 downward from above. On the contrary, the second hole 62 and the third hole 64 of the third plate-like member 38 are both through-holes, and the second hole 62 and the third hole of the first plate-like member 34 are used. Each of the holes 64 may be a bottomed hole extending from the lower side to the upper side of the plate-like portion 44.

  In the latter case, the rod-like member 68 is inserted from the third plate-like member 38 side to the second and first plate-like members 36 and 34 side.

  The groove 54 may be provided in the first plate member 34 instead of being provided in the third plate member 38. Further, the groove 54 may be provided in the first and third plate members 34 and 38 so as to be formed jointly by the first and third plate members 34 and 38.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit described in the claims.

It is a front view which shows one Example of the electrical connection apparatus which concerns on this invention. It is a bottom view of the electrical connection apparatus shown in FIG. It is sectional drawing obtained along the 3-3 line in FIG. FIG. 4 is a plan view of the probe assembly obtained along line 4-4 in FIG. 1. FIG. 5 is a cross-sectional view of the probe assembly obtained along the line 5-5 in FIG. 3, and is a cross-sectional view of the probe assembly in a state in which no contact is arranged to show an embodiment of the assembly procedure of the electrical connection device. . It is sectional drawing which shows one Example of the assembly procedure following FIG. 5 of the electrical connection apparatus shown in FIG.1 and FIG.2. It is sectional drawing which shows one Example of the assembly procedure following FIG. 6 of the electrical connection apparatus shown in FIG.1 and FIG.2. FIG. 8 is a cross-sectional view illustrating an example of an assembly procedure subsequent to FIG. 7 of the electrical connection device illustrated in FIGS. 1 and 2. It is sectional drawing which shows the completed probe assembly with a connection board | substrate. It is sectional drawing shown in the state which pressed the contact of the completed probe assembly to the electrode of to-be-inspected object. It is sectional drawing which shows the Example of the probe assembly using another rod-shaped member. It is sectional drawing which shows the Example of the probe assembly which uses another rod-shaped member.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Electrical connection apparatus 12 Test object 14 Electrode of test object 20 Wiring board 22 Connection board 24 Probe assembly 28, 32 Internal wiring 34, 36, 38 1st, 2nd, 3rd plate-shaped member 40, 42 Recess 44, 46, 58 Plate portion 48, 50 Frame portion 54 Groove 56 Positioning wall 60, 62, 64 First, second and third holes 66 Contact of first, second and third plate members Child 68 Bar-shaped member 70 Pin

Claims (12)

First, second, and third plate-like members having plate-like portions spaced from each other in the thickness direction, each of the plurality of first holes penetrating the plate-like portion in the thickness direction; First, second, and third plate-like members each including at least one second hole formed at a location spaced from the first hole in the first direction in the horizontal direction, A plurality of contacts passed through the first holes of the first, second, and third plate-like members and inserted into the second holes of the first, second, and third plate-like members. A bar-shaped member,
The second hole of the second plate-shaped member is a long hole extending in the first direction;
The second plate-like member is displaced in the first direction with respect to the first and third plate-like members to cause the contact to bend between the first and third plate-like members. An electrical connection device that is maintained by the rod-like member in a closed state.   2. The electrical connection device according to claim 1, wherein the second plate-like member protrudes to one side in the first direction with respect to the first and third plate-like members.   At least one of the first and third plate-like members has the first, second, and third positions of the second member relative to the first and third plate-like members in the first direction. The electrical connecting device according to claim 2, further comprising a wall that restricts the first hole of the plate-like member to a position where the first hole is aligned.   The second hole of the first and second plate-like members is a through-hole penetrating the plate-like portion in the thickness direction, and the second hole of the third plate-like member is the The electrical connection device according to any one of claims 1 to 3, wherein the electrical connection device is a through-hole penetrating the plate-like portion in a thickness direction or a bottomed hole extending from above to the plate-like portion downward.   5. The electrical connection device according to claim 1, wherein the first and third plate-like members are coupled to each other so that at least the second holes thereof are aligned. 6.   The first hole of the second plate-like member is displaced in the first direction with respect to the first hole of the first and third plate-like members. The electrical connection apparatus of any one of Claims.   The electrical connection according to any one of claims 1 to 6, wherein the second plate-shaped member makes an inner surface portion of the second hole in the first direction abut on the rod-shaped member. apparatus.   The electrical connecting device according to any one of claims 1 to 7, wherein the bar-like member includes a pin member inserted into the second hole of the first, second, and third plate-like members.   The rod-shaped member includes a screw member inserted into at least the second hole of the first and second plate-shaped members and screwed into at least the second hole of the third plate-shaped member. The electrical connection apparatus of any one of Claim 1 to 7.   The rod-shaped member is a screw member that is inserted into the second hole of the first and second plate-shaped members and passed through a part of the second hole of the third plate-shaped member. The electrical connection device according to claim 1, further comprising a screw member screwed into the remaining part of the second hole of the third plate-like member.   A wiring board having a plurality of internal wirings, and a connection board disposed on the lower surface of the wiring board and having the first, second and third plate-like members supported on the lower surface; 11. The electrical connection device according to claim 1, further comprising: a connection substrate having a plurality of connection portions that electrically connect the portion and the internal wiring of the wiring substrate. Each of the first, second and third plate-like members includes at least two third holes penetrating them in the thickness direction;
The third hole of the first plate-like member is a through-hole penetrating the first plate-like member in the thickness direction;
The third hole of the second plate-shaped member is a long hole extending in the first direction;
The third hole of the third plate-like member is a through hole that penetrates the second plate-like member in the thickness direction or a bottomed hole that extends downward from the plate-like portion,
The first, second, and third plate-like members are restrained from relative displacement in the horizontal direction by pins inserted into the third holes. The electrical connection device according to Item 1.

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