CN201845029U - Test probe - Google Patents

Test probe Download PDF

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Publication number
CN201845029U
CN201845029U CN2010205957026U CN201020595702U CN201845029U CN 201845029 U CN201845029 U CN 201845029U CN 2010205957026 U CN2010205957026 U CN 2010205957026U CN 201020595702 U CN201020595702 U CN 201020595702U CN 201845029 U CN201845029 U CN 201845029U
Authority
CN
China
Prior art keywords
perforation
test probe
penetrating hole
probe
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2010205957026U
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Chinese (zh)
Inventor
土屋利彦
堀诚一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TKK HIOKI CO Ltd
Original Assignee
TKK HIOKI CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TKK HIOKI CO Ltd filed Critical TKK HIOKI CO Ltd
Priority to CN2010205957026U priority Critical patent/CN201845029U/en
Application granted granted Critical
Publication of CN201845029U publication Critical patent/CN201845029U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a test probe, which is assembled in a jig. The jig is provided with an upper support and a lower support which are arranged at an interval. The upper support is provided with a first upper supporting plate and a second upper supporting plate which are adjacent to each other vertically and respectively provided with a first penetrating hole and a second penetrating hole; the lower support is provided with a first supporting plate and a second supporting plate which are adjacent to each other vertically and respectively provided with a third penetrating hole and a fourth penetrating hole; and the third penetrating hole and the fourth penetrating hole are arranged in a staggered manner. The test probe is penetratingly arranged and positioned in the first penetrating hole, the second penetrating hole, the third penetrating hole and the fourth penetrating hole, and can deform to the same direction when stressed, thereby avoiding spatial conflict and being capable of reducing arrangement interval of various test probes.

Description

Test probe
Technical field
The relevant a kind of test probe of the utility model provides a kind of and produces beat distortion improperly when avoiding the fixing or test of each test probe assembling to use, and can increase the test probe of these test probe compressive deformation stability.
Background technology
After generally having the making of a plurality of measured points (as the electronic package contact), all need see through a kind of special fixture and be detected, in order to do whether be non-defective unit or have or not breaking phenomena if using affirmation such as printed circuit board (PCB), semiconductor package or wafer etc.Again, by adopting this mode of detection between known industry such as measured objects such as printed circuit board (PCB), semiconductor package or wafers, on the whole as shown in Figure 1, table is provided with some probes 20 on a tool 10, and each tested measuring point (figure does not show) position of these some probes 20 and cooperation measured object 30 bottom surfaces is provided with; In addition, and be provided with at least one joint 11, these joint 11 1 ends electrically connect with probe 20, and these joints 11 in addition end and with the winding displacement (scheming not show) of electric circuit inspection machine conducting is connected.
When detecting measured object 30, winding displacement with the circuit test machine inserts joint 11 in advance, continue measured object 30 correspondences are placed on the probe 20 of tool 10, with after the tested measuring point of measured object 30 bottom surfaces contacts, the circuit test machine can show just whether measured object 30 has and open circuit or phenomenon such as bad by probe 20.Again, when being implemented to press detection by probe 20 in order to make all tested measuring point tool detection certainty of this measured object 30, to reach measured object 30, breakoff phenomenon can not take place in this probe 20 or tested measuring point, but this all probe 20 and setting are the elastic telescopic start.
Be illustrated in figure 2 as and practise the structural representation that tool is arranged, this tool 10 is provided with the last support 12 and the following support 13 of arranged spaced, this 12,13 of upper and lower support is respectively equipped with first, second perforation 121,131, this first, second perforation 121,131 dislocation are disposed, 20 of this probes are arranged in first, second perforation 121,131 and locate, and the rake 21 of these probe 20 middle sections and formation skew.
When contacting with measured object 30, as shown in Figure 3, the impact power that its moment touches is slowed down by the elastic deformation of these probes 20, and these probe 20 pressurizeds absorb when clashing into external force, and its maximum distortion position is the rake 21 at section place therein; Yet the position of commonly using probe 20 main compressive deformations does not have all that suitable member is auxiliary to limit its amplitude of deformation, and then influences probe and wafer stability in contact.Moreover, if angle, the direction of all probe 20 its rake 21 beats can't be unified to limit, the rake 21 of not only adjacent two probes has the anxiety of phase mutual interference, more the spacing of ccontaining each probe of tool institute energy can't be dwindled, its application is restricted, and the necessity that is improved is arranged.
The utility model content
The technical matters that the utility model solved is promptly providing a kind of test probe, and purpose produces beat distortion improperly when avoiding each test probe assembling to fix or testing use, and can increase the test probe of these test probe compressive deformation stability.
The technical solution of the utility model is: a kind of test probe, this test probe is installed in the tool, this tool is provided with the last support and the following support of arranged spaced, should go up support and be provided with neighbouring first, support plate on second, this is first years old, support plate is provided with first on second, second perforation, and this time support is provided with neighbouring first, second time support plate, this is first years old, second time support plate is provided with the 3rd, the 4th perforation, the 3rd, the 4th perforation dislocation configuration, this test probe then is arranged in first, second, the 3rd, locate in the 4th perforation.
Wherein, this test probe has a top and is arranged in first, second perforation, and this test probe has a bottom and is arranged in the 3rd, the 4th perforation, and this test probe and have a middle part and be connected between the upper and lower part, this middle part formation bending.
This bottom further is connected with electrode.
This first, second perforation center contraposition is disposed.
This first, second perforation dislocation is disposed, and the dislocation side-play amount of this first, second perforation is less than the dislocation side-play amount of the 3rd, the 4th perforation.
This second, third perforation dislocation is disposed.
This on first the support plate upper surface further be provided with a counterbore.
The beneficial effects of the utility model are: test probe of the present utility model is installed in the tool, this tool is provided with the last support and the following support of arranged spaced, should go up support and be provided with neighbouring first, support plate on second, this is first years old, support plate is provided with first on second, second perforation, and this time support is provided with neighbouring first, second time support plate, this is first years old, second time support plate is provided with the 3rd, the 4th perforation, the 3rd, the 4th perforation dislocation configuration, this test probe then is arranged in first, second, the 3rd, locate in the 4th perforation, can unify distortion in the same direction when making this test probe pressurized, avoid producing the conflict on the space, and the spacing that can dwindle each test probe.
Description of drawings
Fig. 1 generally detects the schematic perspective view of tool and measured object.
Fig. 2 is for practising the structural representation that probe is arranged.
Fig. 3 is for practising the structural representation that the probe compressive deformation is arranged.
Fig. 4 is the structural representation of test probe first embodiment in the utility model.
Fig. 5 is the structural representation of the test probe first embodiment compressive deformation in the utility model.
Fig. 6 is the structural representation of test probe second embodiment in the utility model.
Fig. 7 is the structural representation of the test probe second embodiment compressive deformation in the utility model.
Figure number explanation: center A1, A2, A3, A4; Tool 10; Joint 11; Last support 12; First perforation 121; Following support 13; Second perforation 131; Probe 20; Rake 21; Measured object 30; Test probe 40; Top 41; Bottom 42; Middle part 43; Electrode 44; Bearing plate 45; Tool 50; Last support 51; Support plate 511 on first; Support plate 512 on second; First perforation 513; Second perforation 514; Counterbore 515; Following support 52; First time support plate 521; Second time support plate 522; The 3rd perforation 523; The 4th perforation 524. 
Embodiment
The utility model test probe, this test probe 40 is installed in the tool 50 equally, this tool 50 is provided with the last support 51 and the following support 52 of arranged spaced, shown in first embodiment of Fig. 4, should go up support 51 and be provided with neighbouring first, support plate 511 on second, 512, this is first years old, support plate 511 on second, 512 are provided with first, second perforation 513,514, and this time support 52 is provided with neighbouring first, second time support plate 521,522, this is first years old, second time support plate 521,522 are provided with the 3rd, the 4th perforation 523,524, this is first years old, second perforation 513,514 center contraposition configurations, the 3rd, the 4th perforation 523,524 dislocation configurations, and this is second years old, the 3rd perforation 514,523 dislocation configurations, as shown in the figure, this is first years old, second perforation 513,514 center A1, A2 is positioned at same axial location, the 3rd, the 4th perforation 523,524 center A3, A4 is positioned at different axial locations, and this is second years old, the 3rd perforation 514,523 center A2, A3 is positioned at different axial locations; This on first support plate 511 upper surfaces can further be provided with a counterbore 515 and can avoid being stained with on the wiring board glutinous foreign matter and pile up, influence probe and moves smooth degree.
This test probe 40 then is arranged in first, second, the 3rd, the 4th perforation 513,514,523, in 524 and locate, this test probe 40 has a top 41 and is arranged in first, second perforation 513, in 514, this test probe 40 has a bottom 42 and is arranged in the 3rd, the 4th perforation 523, in 524, and this test probe 40 and have a middle part 43 and be connected in, bottom 41,42, this middle part 43 forms bending, this bottom 42 further is connected with electrode 44, this electrode 44 is connected conducting in order to the winding displacement (scheming not show) that sees through joint and electric circuit inspection machine, and these electrode 44 places can further be provided with a bearing plate 45, one hundred million bearing plates 45 in order to accept tool 50.
When contacting with measured object 30, as shown in Figure 5, the impact power that its moment touches is slowed down by the elastic deformation of these test probes 40, and these test probe 40 pressurizeds absorb when clashing into external force, its maximum distortion position is the middle part 43 at section place therein, and distortion in the same direction can be unified because of compressive deformation in this middle part 43, avoids producing the conflict on the space, and prevents that the middle part 43 of adjacent two test probes from having the disappearance of phase mutual interference.
Shown in second embodiment of Fig. 6, this is first years old, second perforation 513,514 dislocation configurations, the 3rd, the 4th perforation 523,524 dislocation configurations, and this is second years old, the 3rd perforation 514,523 dislocation configurations, as shown in the figure, this is first years old, second perforation 513,514 center A1, A2 is positioned at different axial locations, the 3rd, the 4th perforation 523,524 center A3, A4 is positioned at different axial locations, this is second years old, the 3rd perforation 514,523 center A2, A3 is positioned at different axial locations, and this first, second perforation 513,514 dislocation side-play amount is less than the 3rd, the 4th perforation 523,524 dislocation side-play amount; Certainly, can unify distortion in the same direction during these test probe 40 compressive deformations equally, as shown in Figure 7.
It is worth mentioning that, the utility model produces improperly beat distortion when habit has test probe can avoid the fixing or test of each test probe assembling to use, and can increase these test probe compressive deformation stability, and can unify in the same direction distortion during these test probe pressurizeds, avoid producing the conflict on the space, and can increase the quantity that arranges.

Claims (7)

1. test probe, it is characterized in that, this test probe is installed in the tool, this tool is provided with the last support and the following support of arranged spaced, should go up support and be provided with support plate on neighbouring first, second, support plate is provided with first, second perforation on this first, second, and this time support is provided with first, second neighbouring following support plate, support plate is provided with the 3rd, the 4th perforation under this first, second, three, the 4th perforation dislocation configuration, this test probe then is arranged in first, second, third, fourth perforation and locatees.
2. test probe as claimed in claim 1, it is characterized in that, this test probe has a top and is arranged in first, second perforation, this test probe has a bottom and is arranged in the 3rd, the 4th perforation, and this test probe and have a middle part and be connected between the upper and lower part, this middle part forms bending.
3. test probe as claimed in claim 2 is characterized in that this bottom further is connected with electrode.
4. as claim 1,2 or 3 described test probes, it is characterized in that this first, second perforation center contraposition is disposed.
5. as claim 1,2 or 3 described test probes, it is characterized in that this first, second perforation dislocation is disposed, and the dislocation side-play amount of this first, second perforation is less than the dislocation side-play amount of the 3rd, the 4th perforation.
6. as claim 1,2 or 3 described test probes, it is characterized in that this second, third perforation dislocation is disposed.
7. as claim 1,2 or 3 described test probes, it is characterized in that, this on first the support plate upper surface further be provided with a counterbore.
CN2010205957026U 2010-11-08 2010-11-08 Test probe Expired - Fee Related CN201845029U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010205957026U CN201845029U (en) 2010-11-08 2010-11-08 Test probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010205957026U CN201845029U (en) 2010-11-08 2010-11-08 Test probe

Publications (1)

Publication Number Publication Date
CN201845029U true CN201845029U (en) 2011-05-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010205957026U Expired - Fee Related CN201845029U (en) 2010-11-08 2010-11-08 Test probe

Country Status (1)

Country Link
CN (1) CN201845029U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103245807A (en) * 2012-02-06 2013-08-14 景美科技股份有限公司 Probe unit structure and manufacturing method thereof
TWI608236B (en) * 2013-02-07 2017-12-11 Hioki Electric Works Probe unit, substrate inspection apparatus, and probe unit combination method
CN110346616A (en) * 2018-04-03 2019-10-18 中华精测科技股份有限公司 Probe card device and probe base

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103245807A (en) * 2012-02-06 2013-08-14 景美科技股份有限公司 Probe unit structure and manufacturing method thereof
CN103245807B (en) * 2012-02-06 2015-11-25 景美科技股份有限公司 Probe unit structure and preparation method thereof
TWI608236B (en) * 2013-02-07 2017-12-11 Hioki Electric Works Probe unit, substrate inspection apparatus, and probe unit combination method
CN110346616A (en) * 2018-04-03 2019-10-18 中华精测科技股份有限公司 Probe card device and probe base
CN110346616B (en) * 2018-04-03 2021-06-15 中华精测科技股份有限公司 Probe card device and probe base

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110525

Termination date: 20161108