TWI591347B - A probe unit, a substrate inspection apparatus, and a probe unit manufacturing method - Google Patents

Description

Probe unit, substrate inspection device, and probe unit manufacturing method

The present invention relates to a probe unit having a plurality of probes and a support portion for supporting the probes, a substrate inspection device having the probe unit, and a probe unit manufacturing method for manufacturing the probe unit.

Such a probe unit is known as an inspection jig disclosed in Japanese Laid-Open Patent Publication No. 2009-8585. The inspection jig is an inspection jig that is mounted on an inspection device that performs an electrical inspection of an inspection object, and has a probe; a tip side support body that supports the tip end side of the probe; a side support body supporting a rear end side of the probe; and a support column connecting the tip side support body and the rear end side support body. The probe is composed of a conductive wire and an insulating coating formed on an outer peripheral surface of a portion other than the tip end side portion and the rear end side portion of the conductive wire. The tip side support system consists of three support plates stacked. Further, perforations are formed in each of the support plates, and the perforations constitute a tip end side through hole through which the tip end side portion of the probe is inserted. Further, the tip side through hole is formed in a direction perpendicular to the support plate. In this case, the inner diameter of each of the perforation systems is larger than the outer diameter of the tip side portion of the probe, and is smaller than the outer diameter of the formed portion of the insulating coating, so that the perforation is formed (the tip side) Through the hole), prevent the probe from falling out to the side of the inspection object.

The rear side support system consists of five support plates stacked. also, Perforations are formed in each of the support plates, and the perforations constitute end-side through-holes through the rear end side portions through which the probes are inserted. In this case, the rear end side through hole is laminated in a state of being slightly offset from the center of each of the perforations, thereby being formed so as to be formed with respect to the support plate (with respect to the center axis of the tip side through hole) In terms of tilt. When the inspection jig is assembled, first, the tip side support body and the rear end side support body are joined by a support column. Then, in the state in which the rear end side support plate is removed, the rear end side through hole of the rear end side support body is inserted into the tip end side through hole of the tip end side support body, and the probe is inserted to form the insulating coating portion. The tip end portion abuts on the edge portion of the perforation constituting the tip end side through hole. Next, install the rear side support plate. Thereby, the probe is supported by the tip side support and the rear end side support. In this case, since the rear end side through hole is inclined with respect to the tip end side through hole, the probe supported by the tip side support and the rear end side support is inclined at the intermediate portion. Therefore, at the time of inspection, when the tip end portion of the probe abuts against the inspection object, the intermediate portion of the inclined probe may be easily deflected.

[First technical literature]

[Patent Literature]

[Patent Document 1] JP-A-2009-8585 (pages 4-6, 1-4)

In the previous inspection fixture, there are the following problems. In other words, in the inspection jig, the support plates are stacked in a state in which the centers of the perforations formed on the plurality of support plates constituting the rear end side support body are slightly offset, whereby the opposite sides are formed. The end side through hole is inclined after the tip end side through hole. In this situation In the shape, the number of perforations must be the same as the number of probes on the support plate. When a large number of support plates (in the above example, five support plates), a large number of perforations are correctly formed, which requires a long process. time. Further, it is also necessary to highly shift the center of each of the perforations so that the rear end side through hole is inclined to the previously determined inclined direction to laminate the operations of the support plates. Further, in the inspection jig, the rear end side through hole is inclined with respect to the support plate, and the tip end side through hole is perpendicular to the support plate, so when the probe inserted from the rear end side through hole is inserted When the tip end portion penetrates the tip end through hole, it is necessary to perform a complicated operation of being pressed in the state of the tip end portion of the elastic deformation probe. Therefore, it takes a long time to pass through a large number of probes. Therefore, in this inspection jig, there is a problem that the manufacturing cost due to these processes and operations increases.

The present invention has been made in view of the above problems, and its main object is to provide a probe unit, a substrate inspection apparatus, and a probe unit manufacturing method which can reduce manufacturing costs.

The probe unit according to claim 1 for achieving the above object is a probe unit having a plurality of probes for contacting a tip end portion of a conductor portion of a substrate for electrical signal output. And the support portion supporting the probe, wherein the support portion has a first support plate having a first support hole for supporting the tip end portion penetrating the first support hole; and a second support a plate having a second support hole for supporting a base end portion of the probe penetrating the second support hole; and a third support plate having a third support hole for supporting the base end portion penetrating the third support hole And arranged such that the support plates face each other in this order, and are configured such that a spacer is disposed between the first support plate and the second support plate, and each of the support portions is in the second branch The first support plate and the second support plate are separated from each other by the first support plate and the second support plate in a state in which the support plate and the third support plate are in contact with each other, and the first support hole, the second support hole, and the third support are Each of the opening faces of the hole is fixed to the spacer in a direction inclined with respect to a stacking direction of the support plates on a virtual straight line, and the probe maintains the tip end portion along the aforementioned a support hole is extended, and a first through hole that can be penetrated by the first positioning pin and the second positioning pin is formed in the first support plate except that a portion of the tip end portion extends in the oblique direction. Each of the second support plate and the third support plate is formed with a second through hole that can be penetrated by the first positioning pin and a third through hole that can be inserted by the third positioning pin, and the spacers are opposed to each other. a first penetration hole through which the second positioning pin is inserted is formed in a surface of the first support plate, and a second penetration hole through which the third positioning pin can pass is formed on a surface facing the second support plate. 1 through hole and the aforementioned second through hole Each of the opening faces of the first support hole, the second support hole, and the third support hole is formed to face each other on a virtual straight line along a vertical direction perpendicular to the support portions. When the contact or the approaching state is overlapped, the central axis of each of the through holes is a coaxial position, and the first penetration hole is formed in the center of each of the first penetration holes when each of the support plates is in the posture The shaft is coaxial with the central axis of the first through hole, and the third through hole and the second through hole are formed in each of the central axes of the third through holes when the support plates are in the posture The first support plate, the second support plate, and the third support plate are each formed in a quadrangular shape in plan view at a position coaxial with the central axis of each of the second penetration holes, and the first through hole is in the first support One of the diagonal positions of the pair of plates is formed one by one, and the second through hole is One of the pair of diagonal positions of the second support plate facing each of the diagonal positions facing the first support plate is formed, and the third support plate facing each of the diagonal positions of the first support plate One pair of diagonal positions are formed one by one, and the third through hole is formed in one diagonal position different from the diagonal position of the pair of the second support plates, and is formed in the same manner as described above. The other pair of diagonal positions of the pair of the third support plates differing from each other to form a diagonal position.

Further, in the probe unit according to the first aspect of the invention, the probe unit according to the first aspect of the invention, wherein the spacer is formed in a U shape in a plan view around the probes.

Further, the substrate inspection apparatus according to the third aspect of the invention is characterized in that: the probe unit has the probe unit as described in claim 1 or 2; and the inspection portion is based on the probe unit that transmits the conductor portion that is in contact with the substrate. The aforementioned probe checks the aforementioned substrate with an input electrical signal.

Further, in the probe unit manufacturing method according to the fourth aspect of the invention, the probe unit is manufactured, wherein the probe unit has a plurality of probes for bringing the tip end portion into contact with the conductor portion of the substrate to perform electrical And the support portion supporting the probe, wherein the support portion is configured to have a first support plate having a first support hole for supporting the first support hole The second support plate has a second support hole for supporting a base end portion of the probe penetrating the second support hole; and a third support plate having a third support hole for supporting the penetrating portion 3, the base end portion of the support hole; and the support plates are arranged in this order, and the spacer is disposed between the first support plate and the second support plate; Each of the first support plate, the second support plate, and the third support plate is formed in a quadrangular shape in a plan view, and the first positioning pin is inserted through a pair of diagonal positions of the first support plate to form a first through-hole. a hole and a pair of diagonal positions of the pair of second support plates facing the respective diagonal positions of the first support plate are formed at the same time as the third of the diagonal positions facing the first support plate a second through hole is formed in each of the pair of diagonal positions of the support plate, and the opening faces of the first support hole, the second support hole, and the third support hole are maintained, and are along the respective support portions. In the vertical direction of the vertical direction, the support plates are brought into contact with each other or close to each other on the imaginary straight line, and the probe is inserted into the support holes in this state, and then the second support is provided. The first support plate and the second support plate are separated from each other by the first support plate and the second support plate in a state in which the third support plate is in contact with or close to the first support plate, and the first support plate and the second support plate are Between the foregoing spacers, (2) the positioning pin penetrates the first through hole and the first penetration hole formed on the surface of the spacer facing the first support plate, and the third positioning pin penetrates the pair of the pair of the second support plate The other diagonal position of the other pair of angular positions is formed one by one and the third through hole is formed in the other diagonal position different from the diagonal position of the pair of the third support plates. a second penetration hole formed in a surface of the spacer facing the first support plate, wherein each of the support plates is converted into an opening surface of the first support hole, the second support hole, and the third support hole, along The inclined direction of the inclined direction of the support plates is opposite to each other on a virtual straight line. In this state, the support plates are fixed to the spacers, and the tip end portions are along the first support holes. Extending while maintaining the state in which the tip portion extends along the aforementioned oblique direction The probe is described to manufacture the aforementioned probe unit.

The probe unit manufacturing method according to claim 4, wherein the spacer unit having a U-shaped plan view surrounds each of the probes. The ground is disposed between the first support plate and the second support plate.

In the probe unit according to the first aspect of the invention, the substrate inspection device according to the third aspect of the patent application, and the probe unit manufacturing method according to claim 4, wherein the support plates are maintained In this state, the probe is inserted into each of the support holes, and then the support plates are moved to maintain the state, and the probes are held by the support plates. Therefore, in the probe unit, the substrate inspection apparatus, and the probe unit manufacturing method, the positions of the respective support plates are shifted during assembly, whereby the first support hole, the second support hole, and the third support hole can be formed. Each of the opening faces faces on the imaginary straight line along the oblique direction. As a result, it is not necessary to slap the plurality of support plates in a state of offsetting the center of each of the perforations to form a base end side support portion. Thereby, the manufacturing cost of the probe unit and the substrate inspection device can be sufficiently reduced.

Further, in the probe unit, the substrate inspection device, and the probe unit manufacturing method, the base end portion of the probe is supported by only two support plates. In this case, the support plate is formed with a plurality of support holes that are inserted into the probe and supported, so that the manufacturing cost is high. Therefore, when the probe unit, the substrate inspection device, and the probe unit manufacturing method are used, the manufacturing cost can be sufficiently reduced as compared with the configuration and method of using a large number of support plates. Further, in the probe unit, the substrate inspection device, and the probe unit manufacturing method, each support plate is made In the held state, after the probe is inserted into each of the support holes, the support plates are moved to the posture, whereby the tip end side extends along the first support hole, and the portion except the tip end side extends in the oblique direction. In this state, all probes can be temporarily maintained (elastically deformed) to assemble the probe unit. Therefore, the probe inserted into each of the support holes formed by the respective opening faces facing each other in the oblique direction is continuously elastically deformed, and the operation of inserting the support holes of the respective open faces facing each other in the vertical direction is for one set The probe is carried out, and the assembly process can be sufficiently shortened in comparison with the configuration and method of assembling the probe unit. Therefore, according to the probe unit, the substrate inspection apparatus, and the probe unit manufacturing method, the assembly process is shortened, and the manufacturing cost can be sufficiently reduced.

Further, in the probe unit according to the second aspect of the invention, and the probe unit manufacturing method according to claim 5, the first support plate and the second support plate are disposed around each other. The probe is formed in a U-shaped spacer in a plan view, and each of the support plates is fixed to the spacer. Therefore, the support plate can be reliably and easily held in a short time by a simple configuration and method. The manufacturing efficiency of the probe unit is improved, and the manufacturing efficiency of the substrate inspection device can be sufficiently improved.

1‧‧‧Substrate inspection device

2‧‧‧ probe unit

6‧‧‧ Inspection Department

11‧‧‧Probe

12‧‧‧ Body Department

21‧‧‧ tip

22‧‧‧Intermediate

23‧‧‧ base end

31‧‧‧ Tip side support

32‧‧‧ base end support

33‧‧‧ spacers

34a, 34b, 34c‧‧‧ locating pins

41~44‧‧‧Support board

51~54‧‧‧Support hole

61a, 62a, 63a, 64a‧‧‧through holes

65a, 65b‧‧‧ penetration holes

65c‧‧‧ screw hole

100‧‧‧Substrate

FIG. 1 is a configuration diagram showing the configuration of the substrate inspection apparatus 1.

Fig. 2 is a view showing the configuration of the probe unit 2.

Figure 3 is a plan view of the probe 11.

Fig. 4 is an exploded perspective view of the main body portion 12 in a state where the tip end side support portion 31 faces downward.

Fig. 5 is an exploded perspective view of the main body portion 12 in a state where the proximal end side support portion 32 faces downward.

Fig. 6 is a perspective view of the body portion 12.

Fig. 7 is a first explanatory diagram for explaining a method of manufacturing the probe unit 2.

Fig. 8 is a second explanatory view (the Y-sectional cross-sectional view in Fig. 7) illustrating the method of manufacturing the probe unit 2.

Fig. 9 is a third explanatory diagram for explaining the method of manufacturing the probe unit 2.

Fig. 10 is a fourth explanatory view (the X-sectional cross-sectional view in Fig. 6) illustrating the method of manufacturing the probe unit 2.

Hereinafter, embodiments of the probe unit, the substrate inspection device, and the probe unit manufacturing method of the present invention will be described with reference to the drawings.

First, the configuration of the substrate inspection apparatus 1 will be described. As shown in Fig. 1, the substrate inspection device 1 shown in Fig. 1 includes a probe unit 2, a moving mechanism 3, a mount 4, a measuring unit 5, an inspection unit 6, a memory unit 7, and a processing unit. 8. The substrate 100 can be inspected.

As shown in FIG. 2, the probe unit 2 has a plurality of probes 11, a main body portion 12, and an electrode plate 13.

The probe 11 is used to contact a conductor portion such as a conductor pattern in the substrate 100 during inspection to perform electrical signal input and output, and is exemplified by a conductive metal material (for example, beryllium copper alloy, SKH (high-speed tool steel) and tungsten steel, etc., form an elastically deformable cross-sectional shape of a circular rod. Further, as shown in Fig. 3, the tip end portion 21 and the base end portion 23 of the probe 11 are respectively formed in a sharp state. Further, the peripheral surface of the intermediate portion 22 of the probe 11 is formed to have An insulating coating formed of an insulating coating material (for example, a fluorine resin, a polyurethane, a polyester, a polyimide, or the like). Therefore, the diameter L2 of the intermediate portion 22 is larger than the diameter L1 of the tip end portion 21 and the diameter L3 of the base end portion 23. That is, the diameter of the tip end portion 21 and the base end portion 23 of the probe 11 is smaller than the diameter of the intermediate portion 22.

The configuration of the main body portion 12 corresponds to a support portion, and as shown in Fig. 2 and Fig. 4 to Fig. 6, the tip end portion side support portion 31, the base end portion side support portion 32, and the spacer 33 are supported to support the probe portion. Needle 11. The tip end side support portion 31 is a member that supports the tip end portion 21 side of the probe 11 and has a support plate 41 and a support plate 42. In this case, in this configuration example, the first support plates are constituted by the support plates 41, 42.

The support plate 41 is exemplified as a resin material having a non-conductivity, and is formed into a plate shape. Further, as shown in FIGS. 5 and 8, the support plate 41 is formed with a plurality of support holes 51 (first support holes) having a circular shape in plan view (the same number as the probes 11). As shown in Fig. 8, the diameter R1 of the support hole 51 is slightly larger than the diameter L1 of the tip end portion 21 of the probe 11, and is slightly smaller than the diameter L2 of the intermediate portion 22 of the probe 11, and may not penetrate the intermediate portion 22, Only the tip end portion 21 is penetrated.

Further, as shown in FIGS. 5, 8 and 10, a plurality of (for example, two) through holes 61a are formed in the support plate 41, and the through holes 61a can be inserted into the assembly process of the probe unit 2 described below. Locating pins 34a, 34c are used. Further, as shown in Fig. 5, a plurality of (for example, six) fixing holes 61b are formed in the support plate 41, and the fixing holes 61b can be inserted into the bolts 35 used for fixing the support plate 41 and the support plate 42 to the spacers 33.

The support plate 42 is formed into a plate shape by the same material as the support plate 41 (in this example, a resin material having non-conductivity). Further, as shown in FIGS. 4 and 8, the support plate 42 is formed with a plurality of support holes 52 (first support holes) having a circular shape in plan view (the same number as the probes 11). As shown in Fig. 8, the diameter R2 of the support hole 52 is the same as the diameter R1 of the support hole 51 of the support plate 41, and does not penetrate the intermediate portion 22, but only penetrates the tip end portion 21.

Further, as shown in FIGS. 4, 8 and 10, a plurality of (for example, two) through holes 62a are formed in the support plate 42, and the above-mentioned positioning pins 34a, 34c can be inserted into the through holes 62a. Further, as shown in Fig. 4, a plurality of (for example, six) fixing holes 62b are formed in the support plate 42, and the fixing holes 62b can be inserted into the bolts 35 described above.

The base end side support portion 32 is a member that supports the base end portion 23 side of the probe 11, and has a support plate 43 (second support plate) as shown in FIGS. 2, 4, and 5; Support plate 44 (third support plate). The support plate 41 is exemplified as a resin material having a non-conductivity, and is formed into a plate shape. Further, as shown in FIGS. 5 and 8, the support plate 43 is formed with a plurality of support holes 53 (second support holes) having a circular shape in plan view (the same number as the probes 11). As shown in FIG. 8, the diameter R3 of the support hole 53 is slightly larger than the diameter L2 of the intermediate portion 22 of the probe 11, and can penetrate the intermediate portion 22.

Further, as shown in FIGS. 5, 8 and 10, a plurality of (for example, two) through holes 63a and a plurality of (for example, two) through holes 63b, through holes 63a and through are formed in the support plate 43. The hole 63b can be inserted into the positioning pins 34b, 34c used in the assembly process of the probe unit 2. Further, as shown in FIG. 5, a plurality of (for example, six) fixing holes 63c are formed in the support plate 43, and the fixing holes 63c are formed. A bolt 35 for fixing the support plate 43 and the support plate 44 to the spacer 33 can be inserted.

The support plate 44 is formed into a plate shape by the same material as the support plate 43 (in this example, a resin material having non-conductivity). Further, as shown in FIGS. 4 and 8, the support plate 44 is formed with a plurality of support holes 54 (third support holes) having a circular shape in plan view (the same number as the probes 11). In this case, as shown in FIG. 8, the diameter R4 of the support hole 54 is the same as the diameter R1 of the support hole 53 of the support plate 43, and can penetrate the intermediate portion 22.

Further, as shown in FIGS. 4, 8 and 10, a plurality of (for example, two) through holes 64a and a plurality of (for example, two) through holes 64b, through holes 64a and through are formed in the support plate 44. The hole 64b can be inserted into the above-described positioning pins 34b, 34c. Further, as shown in Fig. 4, a plurality of (for example, six) fixing holes 64c are formed in the support plate 44, and the fixing holes 64c can be inserted into the bolts 35 described above.

As shown in FIGS. 4 and 5, the spacer 33 is formed in a U-shape in a plan view, and as shown in FIG. 6, it is disposed between the tip end side support portion 31 and the base end side support portion 32 ( Between the support plate 42 and the support plate 43). The spacer 33 has a function of maintaining the state in which the tip end side support portion 31 including the support plate 41 and the support plate 42 and the base end side support portion 32 including the support plate 43 and the support plate 44 are separated from each other.

Further, as shown in Fig. 5, a penetration hole 65a into which the positioning pin 34a can be inserted is formed on the end surface of the tip end portion side (the upper portion side in Fig. 5) of the spacer 33. Further, as shown in Fig. 4, a penetration hole 65b into which the positioning pin 34b can be inserted is formed on the end surface of the spacer 33 on the proximal end side (the upper portion side in Fig. 4). Moreover, as shown in Figs. 4 and 5, at the tip of the spacer 33 On the side end surface and the end surface side end surface, a plurality of screw holes 65c that can be screwed into the bolts 35 (in this example, six in total, twelve in total) are formed.

In this case, in the probe unit 2, as shown in Fig. 8, the through hole 61a of the support plate 41, the through hole 62a of the support plate 42, the through hole 63a of the support plate 43, and the through hole 64a of the support plate 44 When each of the center axes is in the coaxial state, the positions at which the respective through holes 61a, 62a, 63a, 64a are formed are defined such that the support holes 51 of the support plate 41, the support holes 52 of the support plate 42, and the support plates 43 are each The central axes of the support holes 53 and the support holes 54 of the support plate 44 are in a coaxial state, that is, the respective open faces of the support holes 51 to 54 are perpendicular to the support plates 41 to 44. The direction (hereinafter, simply referred to as "vertical direction") is opposite to each other on the imaginary straight line A1 (portion indicated by a broken line in Fig. 8) (parallel on the imaginary straight line A1).

Further, in the probe unit 2, as shown in Fig. 10, the central axes of the through holes 61a of the support plate 41, the through holes 62a of the support plate 42, and the penetration holes 65a of the spacers 33 are coaxial. Further, when the central axis of each of the through hole 63b of the support plate 43 and the through hole 64b of the support plate 44 and the penetration hole 65b of the spacer 33 is coaxial, each of the through holes 61a, 62a, 65a, 63b, 64b and each penetration The formation positions of the holes 65a, 65b are defined such that the respective opening faces of the respective support holes 51, 52 face each other in the vertical direction on the imaginary straight line A2 (the portion indicated by a broken line in Fig. 10) (in the imaginary straight line A2) Further, the opening faces of the support holes 52, 53, 54 are inclined in the direction of the stacking direction (thickness direction) of each of the support plates 41 to 44 (hereinafter, simply referred to as "inclination direction"). In the imaginary straight line A3 (the portion shown by the center line in Fig. 10), the opposite directions (parallel on the imaginary straight line A3).

Further, in the probe unit 2, as shown in Fig. 2, the support holes 51, 52 of the support plates 41, 42 constituting the tip end side support portion 31 penetrate the tip end portion 21 of the probe 11, and are configured. The probes 11 are supported by the main body portion 12 in a state in which the support holes 53, 54 of the support plates 43, 44 of the base end side support portion 32 penetrate the base end portion 23 of the probe 11. Further, as shown in Fig. 2, the probe 11 is supported by the main body portion 12 such that the tip end portion 21 side extends in the vertical direction, except that the portion on the tip end portion 21 side extends in the oblique direction. In this case, the probe 11 is inclined except for the portion on the side of the tip end portion 21, so that when the entire probe unit 2 moves toward the substrate 100, the tip end portion 21 comes into contact with the conductor portion of the substrate 100, at this time, the tilt The portion is bent in accordance with the application of the pressing force (reaction force) from the conductor portion, whereby the amount of protrusion from the main body portion 12 (the tip end side supporting portion 31) changes (increases or decreases).

The electrode plate 13 is formed into a plate shape by a non-conductive resin material or the like, and is disposed on the upper portion of the proximal end side support portion 32 of the main body portion 12 as shown in FIG. 2 . Further, at the contact portion of the electrode plate 13 with each of the base end portions 23 of the probes 11, a terminal having conductivity is embedded, and at each of the terminals, a probe 11 for electrical connection and measurement are respectively connected. Ministry 5 wire.

The moving mechanism 3 moves the probe unit 2 to the mount 4 (the substrate 100 placed on the mount 4) and away from the mount 4 in accordance with the control of the processing unit 8. The mounting base 4 is configured to mount the substrate 100 and to fix the substrate 100 placed thereon. The measuring unit 5 performs a measurement process of measuring a physical quantity (for example, a resistance value) based on an electrical signal transmitted through the probe 11.

The inspection unit 6 performs the resistance value based on the physical quantity measured by the measurement unit 5 in accordance with the control of the processing unit 8, and checks whether the substrate 100 is good or not (conductor) Check whether there is any disconnection or short circuit in the department. The memory unit 7 temporarily stores the resistance value measured by the measurement unit 5 or the inspection result by the inspection unit 6 in accordance with the control of the processing unit 8. The processing unit 8 controls the respective units constituting the substrate inspection device 1.

Next, a method of manufacturing the probe unit 2 will be described with reference to the drawings.

First, as shown in FIGS. 7 and 8, the support plates 41 to 44 are superposed on each other in a state of being in contact with each other. Next, the alignment is such that the central axes of the respective through holes 61a to 64a of the respective support plates 41 to 44 are coaxial. At this time, as shown in Fig. 8, the respective opening faces of the support holes 51 to 54 of the support plates 41 to 44 face each other on the imaginary straight line A1 in the vertical direction. Next, as shown in the same figure, the positioning pin 34c is inserted through the respective through holes 61a to 64a. Thereby, each of the support plates 41 to 44 is maintained in this posture (they are in contact with each other, and each of the opening faces of the support holes 51 to 54 is in a posture that faces the imaginary straight line A1 in the vertical direction: the first posture).

Next, as shown in FIG. 8, the support hole 54 of the self-supporting plate 44 is inserted into the tip end portion 21 of the probe 11, to penetrate the probe 11 to the support hole 53 of the support plate 43, the support hole 52 of the support plate 42, and the support plate. Support hole 51 of 41. In this case, the diameters R1, R2 of the support hole 51 and the support hole 52 are smaller than the diameter L2 of the intermediate portion 22 in the probe 11, so that only the tip end portion 21 of the probe 11 penetrates through the support holes 51. 52. Next, the probe 11 is inserted through the support holes 51 to 54 in the same manner.

Next, as shown in FIG. 9, the support plate 41 is held in contact with the support plate 42, and the support plate 43 is in contact with the support plate 44, and the support plate 42 and the support plate 43 are separated, and then, from the respective through holes 61a. The positioning pin 34c is pulled out by the 64a, and then the spacer 33 is disposed between the support plate 42 and the support plate 43.

Next, as shown in FIG. 10, the alignment is performed such that the support plate 41 The through hole 61a, the through hole 62a of the support plate 42, and the center hole of the penetration hole 65a of the spacer 33 are coaxial, and then the positioning pin 34a is penetrated to each of the through holes 61a and 62a and the penetration hole 65a. At this time, the opening faces of the support holes 51 of the support plate 41 and the support holes 52 of the support plate 42 are maintained in a state of being opposed to each other on the imaginary straight line A2 in the vertical direction.

Then, the through hole 35 is inserted into the fixing hole 61b of the support plate 41 and the fixing hole 62b of the support plate 42, and the tip end portion of the bolt 35 is screwed into the screw hole 65c formed in the end surface on the tip end side of the spacer 33. Thereby, the support plate 41 and the support plate 42 are fixed to the spacer 33.

Next, as shown in FIG. 10, the alignment is performed so that the central axes of the through holes 64b of the support plate 44, the through holes 63b of the support plate 43, and the penetration holes 65b of the spacers 33 are coaxial, and then the positioning pins are penetrated. 34b to each of the through holes 63b, 64b and the penetration hole 65b. At this time, the support holes 52 of the support plate 42, the support holes 53 of the support plate 43, and the opening faces of the support holes 54 of the support plate 44 are maintained in a state of being opposed to each other on the imaginary straight line A3 in the oblique direction.

Then, the through hole 35 is inserted into the fixing hole 63c of the support plate 43 and the fixing hole 64c of the support plate 44, and the tip end portion of the bolt 35 is screwed into the screw hole 65c formed on the end surface on the proximal end side of the spacer 33. Thereby, the support plate 43 and the support plate 44 are fixed to the spacer 33.

In this state, as shown in FIG. 10, the support plate 41 is maintained in contact with the support plate 42, and the support plate 43 is in contact with the support plate 44, and the support plate 42 and the support plate 43 are separated while maintaining the support hole. 51 and the opening faces of the support holes 52 face each other on the imaginary straight line A2 along the vertical direction, and the opening faces of the support holes 52, the support holes 53 and the support holes 54 are along the oblique direction. Imagine the posture on the straight line A3 (second posture). Next, the electrode plate 13 is fixed to the outside of the proximal end side support portion 32. Thereby, as shown in Fig. 6, the manufacture of the probe unit 2 is completed (in the same drawing, the illustration of the electrode plate 13 is omitted).

In the probe unit 2 and the probe unit manufacturing method, the tip end side support portion 31 formed of only two support plates 41, 42 and the base end side support formed by only two support plates 43, 44 are used. Since the portion 32 is used, the manufacturing cost of the probe unit 2 can be suppressed as compared with the configuration and method in which the support portion is formed by using a large number of support plates. Further, in the probe unit 2 and the probe unit manufacturing method, at the time of assembly, the positions of the support plates 41 to 44 are shifted, whereby the opening faces of the support hole 52, the support hole 53, and the support hole 54 are provided. The opposing directions (the parallel directions of the support holes 52, 53 and 54) are inclined with respect to the stacking direction of the respective support plates 41 to 44. Therefore, in the probe unit 2 and the probe unit manufacturing method, it is not necessary to laminate the support plates to form a difficult technique in a state where the center of each of the perforations is slightly shifted, so that the detection can be suppressed. The manufacturing cost of the needle unit 2. Further, in the probe unit 2 and the probe unit manufacturing method, each of the support plates 41 to 44 is maintained on each of the opening faces of the support holes 51 to 54 along the layer with respect to each of the support plates 41 to 44. In the vertical direction of the product direction, the probe 11 is inserted into each of the support holes 51 to 54 in a state in which the virtual line A1 faces the first posture, and then the support plates 41 to 44 are moved to the second posture. Since the probe unit 2 can be manufactured, the probes 11 inserted into the respective support holes 54, 53 of the proximal end side support portions 32 which are formed in advance in the oblique direction from the respective opening faces are continuously elastically deformed, and inserted into each The operation of the support holes 52, 51 of the tip end side support portion 31 facing the vertical direction in the vertical direction is a probe 11 In comparison with the configuration and method of assembling the probe unit 2, the assembly process can be sufficiently shortened.

Next, a substrate inspection method for performing substrate inspection using the substrate inspection apparatus 1 will be described with reference to the drawings.

First, the probe unit 2 having the tip end side support portion 31 facing downward is fixed to the moving mechanism 3 (see FIG. 1). Next, the mounting substrate 100 is placed on the mounting surface of the mount 4, and then the substrate 100 is fixed to the mount 4 by means of a fixing member outside the drawing. Next, the substrate inspection device 1 is actuated. At this time, the processing unit 8 controls the moving mechanism 3 to move (lower) the probe unit 2 toward the substrate 100 (the mounting surface of the mount 4) (the downward direction in FIG. 1).

Next, the processing unit 8 controls the moving mechanism 3 to stop the movement of the probe unit 2 when it moves only the amount of movement determined in advance. Next, the processing unit 8 controls the measurement unit 5 to perform measurement processing. In this measurement process, the measuring unit 5 measures the resistance value as a physical quantity based on the electrical signal input and output through each probe 11.

Next, the processing unit 8 controls the inspection unit 6 to execute the inspection process. In this inspection process, the inspection unit 6 checks whether or not the conductor portion is broken or short-circuited based on the resistance value measured by the measurement unit 5. Next, the processing unit 8 displays the inspection result on the display unit outside the drawing. Thereby, the inspection of the substrate 100 is completed. Next, when the new substrate 100 is inspected, the new substrate 100 is placed and fixed to the mount 4, and then the substrate inspection device 1 is actuated. At this time, the processing unit 8 executes the above respective processes.

Further, when the portion of the probe 11 disposed on the probe unit 2 is partially broken, the probe 11 is replaced in the following order. First, it is removed from the moving mechanism 3 Probe unit 2. Next, the electrode plate 13 is removed from the main body portion 12 (base end portion side support portion 32). Next, the tip end portion 21 of the damaged probe 11 is pressed into the support plate 44 side. At this time, the base end portion 23 of the probe 11 slightly protrudes from the support plate 44. Next, the protruding base end portion 23 is pinched to be pulled out from the body portion 12.

Next, a new probe 11 is inserted from the support hole 54 of the support plate 44 to penetrate the support hole 53 of the support plate 43, and then, the tip end portion 21 is inserted into the support hole 52 of the support plate 42. In this case, the opening faces of the support holes 54, 53, 52 face each other on the imaginary straight line A3 along the oblique direction, so that the probe 11 is guided by the support hole 54 and the support hole 53, and the tip end portion 21 correctly reaches the support The hole 52 is inserted into the support hole 52. Next, the tip end portion 21 is inserted into the support hole 51 of the support plate 41 by further pressing the probe 11.

In this case, the opening faces of the support holes 51, 52 face each other on the imaginary straight line A2 in the vertical direction, so that the boundary portion of the tip end portion 21 and the intermediate portion 22 is elastically deformed, and the tip end portion 21 extends in the vertical direction except Portions of the tip end portion 21 (the intermediate portion 22 and the base end portion 23) extend in the oblique direction. Next, by further pressing the probe 11, the tip end portion 21 is protruded from the support plate 41, and the replacement of the probe 11 is completed. In this manner, in the probe unit 2, the posture of each of the support plates 41 to 44 can be maintained in the second posture (the posture of each of the support plates 41 to 44 is not shifted to the first posture). Replacement of the probe 11. Next, the electrode plate 13 is mounted to the body portion 12, and then the probe unit 2 is mounted to the moving mechanism 3.

In this manner, in the probe unit 2, the substrate inspection apparatus 1 and the probe unit manufacturing method, the respective opening faces of the support holes 51 to 54 are maintained in the vertical direction, and are abutted against each other on the virtual straight line A1. To make each support plate In the state of the first posture in which 41 to 44 are overlapped, the probe 11 is passed through the support holes 51 to 54, and the support plates 41 and 42 are brought into contact with each other, and the support plates 43 and 44 are brought into contact with each other. The support plates 42 and 43 are separated, and the opening faces of the support holes 52 to 54 are inclined to the second posture on the imaginary straight line A3, and the state is maintained to hold the probes by the support plates 41 to 44. 11. Therefore, in the probe unit 2, the substrate inspection apparatus 1 and the probe unit manufacturing method, the positions of the support plates 41 to 44 are shifted at the time of assembly, whereby the opening faces of the support holes 52 to 54 can be made. And facing each other on the imaginary straight line A3 along the oblique direction, and as a result, it is not necessary to slap the plurality of support plates in a state of shifting the center of each of the perforations to form a base end side support portion, so that The manufacturing cost of the probe unit 2 and the substrate inspection apparatus 1 can be sufficiently reduced.

Further, in the probe unit 2, the substrate inspection device 1, and the probe unit manufacturing method, the base end side support portion 32 formed of only two support plates 43, 44 is used. In this case, such a support plate is formed with a plurality of support holes that are inserted into the probe 11 and supported, so that the manufacturing cost is high. Therefore, when the probe unit 2, the substrate inspection device 1, and the probe unit manufacturing method are used, compared with the configuration and method of using the tip end side support portion or the base end side support portion formed by a large number of support plates Under the reduced part of the support plate, the manufacturing cost can be fully reduced. Further, in the probe unit 2, the substrate inspection device 1, and the probe unit manufacturing method, after the support plates 41 to 44 are maintained in the first posture, the probe 11 is inserted through the support holes 51 to 54. The support plates 41 to 44 are moved to the second posture, whereby the side of the tip end portion 21 extends along the support holes 51, 52, and the portion on the side of the tip end portion 21 extends in the oblique direction. All of the probes 11 are temporarily maintained (elastically deformed) to assemble the probe unit 2. therefore, The probe 11 inserted into each of the support holes 54, 53 from the proximal end side support portion 32, which is formed in advance in the oblique direction from the respective opening faces, is continuously elastically deformed, and is inserted into the support hole 52 of the tip end side support portion 31, The operation of 51 is performed for one probe 11 at a time, and the assembly process can be sufficiently shortened in comparison with the configuration and method of assembling the probe unit 2. Therefore, according to the probe unit 2, the substrate inspection apparatus 1, and the probe unit manufacturing method, the assembly process is shortened, and the manufacturing cost can be sufficiently reduced.

Further, in accordance with the probe unit 2, the substrate inspection apparatus 1, and the probe unit manufacturing method, the positioning pins 34c are inserted into the respective through holes 61a to 64a of the respective support plates 41 to 44 to maintain the respective support plates 41 to 44. In the first posture, the support plates 41 to 44 can be reliably and easily maintained in the first posture by a simple configuration and method. Therefore, the manufacturing efficiency of the probe unit 2 can be sufficiently increased, and the full efficiency can be sufficiently achieved. The manufacturing efficiency of the substrate inspection apparatus 1 is improved.

Further, according to the probe unit 2, the substrate inspection device 1, and the probe unit manufacturing method, spacers 33 are disposed between the support plates 42 and 43 in the second posture, and the support plates 41 to 44 are fixed to the spacers. According to the configuration and method of the present invention, the support plates 41 to 44 can be reliably and easily maintained in the second posture in a short time, so that the manufacturing efficiency of the probe unit 2 can be sufficiently improved. The manufacturing efficiency of the substrate inspection apparatus 1 can be sufficiently improved.

Further, the substrate inspection device and the substrate inspection method are not limited to the above configuration and method. For example, in the first posture, although the configuration and method for maintaining the support plates 41 to 44 in contact with each other are described above, the support plates 41 to 44 may be maintained close to each other in the first posture. The composition and method of the state. Moreover, although the above description is maintained in the second posture, The support plates 41, 42 are abutted against each other, the support plates 43, 44 are abutted against each other, and the configuration and method of separating the support plates 43, 44, but the state in which the support plates 41, 42 are maintained close to each other may be employed. Or, the configuration and method of maintaining the state in which the support plates 43, 44 are close to each other.

Further, in the second posture, the opening faces of the support hole 51 and the support hole 52 are formed to face each other on the virtual straight line A2 along the vertical direction. However, in the second posture, the second posture may be employed. Each of the opening faces is configured to face each other on an imaginary straight line along the oblique direction. In this case, the inclination direction may be the same as or different from the inclination direction of the imaginary straight line A3.

Further, although the first support plate is configured by the two support plates 41 and 42 as described above, the first support plate formed of one plate may be used. In this case, the support hole of the first support plate may be formed to extend in the vertical direction or may be formed to extend in the oblique direction.

Further, in addition to the two support plates 43, 44 (the second support plate and the third support plate), one or more support plates may be added (that is, three or more support plates) The configuration and method of supporting the proximal end portion 23 of the probe 11. In this case, the opening surface of the support hole in the additional support plate is oriented on the virtual straight line A1 in the vertical direction in the first posture similarly to the opening surface of the support hole in the other support plate. In the second posture, the opposite directions are formed on the virtual straight line A3 along the oblique direction, whereby the same effects as the above-described configuration and method can be achieved.

Further, although it is described above that spacers 33 having a U-shape in plan view are disposed between the support plates 42 and 43, so that the support plates 41 to 44 are maintained in the second posture. Although the configuration and method of the potential are used, it is also possible to use a configuration and a method of a spacer having an arbitrary shape such as a cube or a column instead of the spacer 33.

2‧‧‧ probe unit

11‧‧‧Probe

31‧‧‧ Tip side support

32‧‧‧ base end support

33‧‧‧ spacers

34a, 34b‧‧‧ Locating pins

41~44‧‧‧Support board

51~54‧‧‧Support hole

61a, 62a, 63b, 64b‧‧‧through holes

65a, 65b‧‧‧ penetration holes

Claims (5)

A probe unit having: a plurality of probes for contacting a tip end portion to a conductor portion of a substrate for electrical signal input and output; and a support portion for supporting the probe, wherein: the support portion is configured The first support plate has a first support hole for supporting the tip end portion penetrating the first support hole, and the second support plate has a second support hole for supporting the probe penetrating the second support hole a base end portion; and a third support plate having a third support hole for supporting the base end portion penetrating the third support hole; and being configured such that the support plates face each other in this order, and are configured to have a spacer And being disposed between the first support plate and the second support plate, wherein each of the support portions is in contact with or close to the second support plate and the third support plate, and the first support plate and the first support plate are The second support plate is separated, and the opening faces of the first support hole, the second support hole, and the third support hole are inclined in an oblique direction with respect to a stacking direction of the support plates. Opposite posture on an imaginary line In the spacer, the probe is configured to extend the tip end portion along the first support hole, and the first support plate is formed in a state in which the tip end portion extends in the oblique direction. The first through hole through which the first positioning pin and the second positioning pin are inserted is formed in the second support plate and the third support plate, and the second through hole that can be penetrated by the first positioning pin is formed 3 positioning pin The third through hole that is formed in the spacer is formed with a first penetration hole that can be penetrated by the second positioning pin on a surface facing the first support plate, and is formed on a surface facing the second support plate. The second penetration hole penetrated by the third positioning pin, the first through hole and the second through hole are formed in each of the first support hole, the second support hole, and the third support hole When the surfaces are overlapped in a state in which they are perpendicular to each other in the vertical direction with respect to the respective support portions, the central axes of the respective through holes are coaxial, and the first The through hole is formed in a position where the center axis of each of the first penetration holes is coaxial with a central axis of the first through hole, and the third through hole and the second penetration hole are formed when the support plates are in the posture Each of the first support plates and the second support plate is formed at a position where the central axis of each of the third through holes and the central axis of each of the second penetration holes are coaxial with each other when the support plates are in the posture. And the aforementioned third support plate system Each of the first through holes is formed in a pair of diagonal positions in the first support plate, and the second through holes are formed in the respective diagonal positions facing the first support plate. One pair of diagonal positions of the pair of second support plates are formed one by one, and one pair of diagonal positions of the pair of third support plates facing the respective diagonal positions of the first support plate are formed, and the third through-hole is formed. a hole opposite to the aforementioned pair in the second support plate The other diagonal positions of the other pair are formed one by one, and the other diagonal position different from the diagonal position of the pair of the third support plates is formed one at a time. The probe unit according to claim 1, wherein the spacers are formed in a U shape in a plan view around the probes. A substrate inspection device having: a probe unit as described in claim 1 or 2; and an inspection portion for inputting an electrical signal according to the probe passing through the probe unit contacting the conductor portion of the substrate, Check the aforementioned substrate. A probe unit manufacturing method for manufacturing a probe unit, the probe unit having: a plurality of probes for contacting a tip end portion to a conductor portion of a substrate for electrical signal input and output; and a support portion for supporting the probe In the needle, the support portion is configured to have a first support plate having a first support hole for supporting the tip end portion penetrating the first support hole, and a second support plate having a second support a hole for supporting a base end portion of the probe penetrating the second support hole; and a third support plate having a third support hole for supporting the base end portion penetrating the third support hole; Each of the support plates is opposed to each other in this order, and is configured such that a spacer is disposed between the first support plate and the second support plate, and each of the first support plate, the second support plate, and the third support plate is configured Forming a first through hole in which a first positioning pin penetrates a pair of diagonal positions in a pair of the first support plates in a plan view, and a first through hole facing the respective diagonal positions of the first support plate 2 support The diagonal positions of a pair of plates are formed a second through hole is formed in each of the pair of diagonal support positions of the third support plate at each of the diagonal positions facing the first support plate, and the first support hole and the second support hole are maintained. Each of the opening faces of the third support hole is in a state in which the support plates are in contact with each other or are close to each other on a virtual straight line in a direction perpendicular to the vertical direction of each of the support portions. And inserting the probe into the support holes, and then separating the first support plate and the second support plate in a state in which the second support plate and the third support plate abut or close, and extract the first a positioning pin, wherein the spacer is disposed between the first support plate and the second support plate, and the second positioning pin penetrates the first through hole and the surface of the spacer facing the first support plate a first penetration hole is formed, and the third positioning pin is inserted through one of the diagonal positions of the other pair of diagonal positions of the pair of the second support plates, and is formed in the third support plate. The diagonal position of the aforementioned pair is different a third through hole formed in each of the diagonal positions and a second penetration hole formed in a surface of the spacer facing the second support plate, wherein the support plates are converted into the first support holes and the first (2) the support holes of the support holes and the third support holes are inclined in an oblique direction with respect to the stacking direction of the support plates, and the support plates are in this state. The probe is fixed to the spacer, and the tip end portion extends along the first support hole, and the probe is held to manufacture the probe unit except that a portion of the tip end portion extends in the oblique direction. The probe unit manufacturing method according to claim 4, wherein the spacer formed in a U-shape in a plan view is disposed between the first support plate and the second support plate around the probes. .