JP2009008585A - Inspection jig and inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection jig facilitating assembly even when a probe diameter is reduced. <P>SOLUTION: The inspection jig 1 includes: a tip-side support 2 in which a tip-side insertion through-hole having a probe guide direction directed toward an inspection object is formed; a rear-end-side support 3 in which a rear-end-side insertion through-hole arranged at a prescribed spacing S with respect to be tip-side support 2 and including a probe guide direction inclined with respect to the probe guide direction of the tip-side insertion through-hole; and the probe 5 including a tip-side part inserted through the tip-side insertion through-hole so that the tip is protruded/receded at the side of the inspection object and a rear-end-side part inserted through the rear-end-side insertion through-hole. The tip-side part of the probe 5 is arranged at a position shifted to a side so as to be inclined in the probe guide direction of the rear-end-side insertion through-hole with respect to the rear-end-side part. In the inspection jig 1, the thickness T2 of the rear-end-side support 3 is larger than the spacing S between the tip-side support 2 and the rear-end-side support 3. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an inspection jig used for electrical inspection of a circuit board, an electronic component, and the like, and an inspection apparatus including the inspection jig.

  In general, an inspection jig including a plurality of probes that are in conductive contact with an inspection target is used for electrical inspection to detect an abnormality such as a short circuit or disconnection of an integrated circuit such as a circuit board wiring pattern or an IC. As this type of inspection jig, a front end side support body that supports front end side portions of a plurality of probes, and a rear end side that supports a rear end side portion of the plurality of probes that are arranged behind the front end side support bodies with a gap. There is known an inspection jig that includes a support and an electrode that is disposed behind the rear end side support and is in contact with a rear end side portion of the probe (see, for example, Patent Document 1).

  In the inspection jig described in Patent Document 1, a front end side insertion hole is formed in the front end side support body in a direction orthogonal to the facing surface facing the inspection target, and a front end side insertion hole is formed in the rear end side support body. A rear end side insertion hole is formed in a direction inclined with respect to the direction. The rear end side insertion hole is inclined with respect to the front end side insertion hole so that the distal end side of the probe inserted through the rear end side insertion hole is directed toward the front end side insertion hole.

  In this inspection jig, when the tip portions of a plurality of probes come into contact with the object to be inspected, the intermediate portion of the probe disposed in the gap between the front end side support plate and the rear end side support plate is bent. Further, since the intermediate portion of the probe is bent, all the probes are simultaneously brought into contact with the inspection object with an appropriate contact pressure.

  Further, when assembling the inspection jig, a probe is inserted from the rear side of the rear end side support. The distal end side of the probe inserted from the rear of the rear end side support is guided in an oblique direction toward the front end insertion hole along the rear end insertion hole, and is supported by the rear end insertion hole. , It passes through the gap between the front end side support body and the rear end side support body. Further, the distal end side of the probe that has passed through the gap between the distal end side support body and the rear end side support body reaches the distal end side support body and is inserted into the distal end side insertion hole.

JP 2005-338065 A

  In recent years, with the increasing complexity of wiring patterns on circuit boards to be inspected and the high integration of integrated circuits, the arrangement pitch of probes for inspection jigs has become narrower. Along with the narrow pitch of the probe arrangement, there is a need to reduce the diameter of the probe. For example, it is necessary to make the probe diameter as small as 30 μm.

  However, as the probe diameter decreases, the probe stiffness decreases. Therefore, as described in Patent Document 1, when assembling the inspection jig by inserting the probe obliquely from the rear side of the rear end side support body, the front end side of the probe is supported by the rear end side insertion hole. There may occur a situation in which the distal end side of the probe that has passed through the gap between the side support and the rear end support is not properly inserted into the distal end insertion hole. As a result, when the diameter of the probe is reduced, in an inspection jig that performs assembly by inserting the probe in an oblique direction from the rear side of the rear end side support body, it may be difficult to assemble the probe.

  Accordingly, an object of the present invention is to provide an inspection jig that can be easily assembled even if the diameter of a probe is reduced, and an inspection apparatus that includes the inspection jig.

  In order to solve the above problems, an inspection jig according to the present invention includes a distal end side support body in which a distal end side insertion hole having a probe guide direction facing an inspection target is formed, and a predetermined clearance with respect to the distal end side support body. A rear end side support body in which a rear end side insertion hole having a probe guide direction inclined with respect to the probe guide direction of the front end side insertion hole is formed, and the front end can be projected and retracted on the inspection object side A probe having a distal end side portion inserted through the distal end side insertion hole and a rear end side portion inserted through the rear end side insertion hole, and the distal end side portion of the probe is inserted into the rear end side portion with respect to the rear end side portion. It is arranged at a position shifted to the side of the hole inclined toward the probe guiding direction, and the thickness of the rear end side support is larger than the gap between the front end side support and the rear end side support. To do.

  In the inspection jig of the present invention, the probe guide direction of the rear end side insertion hole is inclined with respect to the probe guide direction of the front end side insertion hole, and the distal end side portion of the probe is It is arranged at a position shifted to the inclined side in the probe guide direction. Therefore, the probe guide direction of the rear end side insertion hole coincides with the inclination direction of the probe to be mounted. Further, in the inspection jig of the present invention, the thickness of the rear end side support is larger than the gap between the front end side support and the rear end side support. For this reason, when the probe is mounted, the length of the support portion of the probe supported by the rear end side insertion hole is longer than the length of the front end side portion of the probe passing through the gap. Therefore, even if the diameter of the probe is reduced, the probe can be supported by the rear end side insertion hole so that the front end side portion of the probe is inserted through the front end side insertion hole. As a result, it is possible to easily insert the probe in an oblique direction from the rear side of the rear end side support, and it is possible to easily assemble the inspection jig.

  In the present invention, the diameter of the probe is, for example, 40 μm or less. When the diameter of the probe is 40 μm or less, the above-described problem is particularly likely to occur. However, by adopting the configuration of the present invention, the above-described problem can be solved.

  The inspection jig of the present invention can be used in an inspection apparatus including an electrical inspection unit that is conductively connected to an electrode that is in contact with the rear end portion of the probe. In this inspection apparatus, since the inspection jig can be easily assembled, the inspection apparatus can also be assembled.

  As described above, easy assembly is possible with the inspection jig and the inspection apparatus of the present invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Configuration of inspection jig)
FIG. 1 is a schematic perspective view showing an inspection jig 1 according to an embodiment of the present invention. FIG. 2 is a longitudinal sectional view of the inspection jig 1 shown in FIG. FIG. 3 is an enlarged cross-sectional view showing a cross-sectional structure of the distal end side support 2 shown in FIG. 4 is an enlarged cross-sectional view showing a cross-sectional structure of the rear end side support 3 shown in FIG. FIG. 5 is an enlarged perspective view showing a conductive contact state between the rear end portion 5 f of the probe 5 shown in FIG. 2 and the electrode 7.

  As described later, the inspection jig 1 of this embodiment is mounted and used in an inspection apparatus 30 that performs an electrical inspection of an inspection object W such as a printed wiring board or a semiconductor integrated circuit (see FIG. 6). As shown in FIGS. 1 and 2, the inspection jig 1 includes a front end side support body 2 and a rear end side support body 3 disposed with a predetermined gap S with respect to the front end side support body 2. ing. The front end side support body 2 and the rear end side support body 3 are connected and fixed by four support columns 4. That is, the support column 4 forms a space corresponding to the gap S between the front end side support body 2 and the rear end side support body 3.

  The front end side support body 2 and the rear end side support body 3 are each configured in a plate shape, and are arranged so that their surfaces are parallel to each other. A plurality of probes 5 are inserted through the front end side support body 2 and the rear end side support body 3. The tip of the probe 5 protrudes slightly on the surface of the tip side support 2. For example, the tip of the probe 5 protrudes from the surface of the tip side support 2 by 100 μm to 200 μm. The protruding amount of the tip of the probe 5 from the surface of the tip side support 2 may be 100 μm or less (for example, 50 μm).

  An electrode support 6 is attached behind the rear end side support 3. As shown in FIG. 2, a plurality of electrodes 7 that are in conductive contact with the probe 5 are fixed to the electrode support 6. In FIG. 2, only one probe 5 and one electrode 7 are shown, but actually, a plurality of probes 5 and electrodes 7 are arranged in a plane direction (that is, the front end side support body 2 and the rear end side support body 3. In the direction along the surface). In FIG. 2, illustration of a later-described front end side insertion hole 13 and rear end side insertion hole 20 formed in the front end side support body 2 and the rear end side support body 3 is also omitted.

  The probe 5 is formed of a metal such as tungsten, high-speed steel (SKH), beryllium copper (Be-Cu) or other conductors, and is formed in a wire shape having a bendable elasticity. The probe 5 of this embodiment includes a conductive wire 5a made of the conductor as described above and an insulating coating 5b that covers the outer peripheral surface of the conductive wire 5a. The insulating coating 5b is formed of an insulator such as a synthetic resin. The insulating coating 5b may be an insulating coating formed by applying an insulating coating to the surface of the conductive wire 5a.

  The diameter of the probe 5 of this embodiment is very small. For example, the diameter of the probe 5 is 30 μm or 40 μm. The length of the probe 5 is 20 mm, for example. The diameter of the probe 5 may be less than 30 μm, or may exceed 40 μm. Further, the length of the probe 5 may be less than 20 mm or more than 20 mm. For example, the length of the probe 5 may be 30 mm.

  As shown in FIGS. 3 and 4, the conductive wire 5 a is exposed at the front end side portion 5 c and the rear end side portion 5 d of the probe 5. Further, the front end portion 5e and the rear end portion 5f of the probe 5 are formed in a spherical shape as shown in the drawing. In addition, it is preferable that a surface layer for enhancing or maintaining the conductive contact characteristic (contact property) is formed on the surface of the front end part 5e or the rear end part 5f by plating or the like. Examples of such a surface layer include a plating layer in which a layer of gold, palladium, rhodium or the like is laminated on a nickel layer.

  The front-end-side support body 2 is configured by laminating a plurality (three in this embodiment) of support plates 10, 11, and 12 in order from the side (upper side in the drawing) on which the inspection object is arranged. These support plates 10 to 12 are fixed to each other by fixing means such as bolts. As shown in FIG. 3, through holes 10a, 11a, and 12a are formed in the support plates 10, 11, and 12, respectively. These through holes 10a, 11a, and 12a constitute one distal end side insertion hole 13 through which the distal end side portion 5c of the probe 5 is inserted.

  The distal end side insertion hole 13 has a guide direction (vertical direction in the figure) of the probe 5 orthogonal to the opposing surface (upper surface in the figure) 2a facing the inspection target of the distal end side support 2. That is, the distal end side insertion hole 13 is formed in a direction orthogonal to the facing surface 2a. Therefore, the probe 5 can be brought into contact with the surface of the inspection object perpendicularly, and a stable contact resistance can be obtained without damaging the inspection object. The tip side insertion holes 13 are formed as many as the number of probes 5 included in the inspection jig 1. Moreover, the front end side insertion hole 13 is arrange | positioned so as to correspond to arrangement | positioning of the pattern for a test formed in test object.

  The three through holes 10a, 11a, and 12a are formed concentrically. Specifically, the through hole 10a includes a small diameter hole 10b and a large diameter hole 10c larger in diameter than the small diameter hole 10b, and the through hole 12a has a large diameter hole 12c larger in diameter than the small diameter hole 12b and the small diameter hole 12b. It consists of and. The small-diameter hole 10b and the small-diameter hole 12b are formed to have an inner diameter slightly larger than the outer diameter of the conductive wire 5a and slightly smaller than the outer diameter of the probe 5 in the insulating coating 5b.

  The edge 5g of the insulating coating 5b on the distal end side of the probe 5 is disposed behind the small diameter hole 12b of the distal end side insertion hole 13, as shown in FIG. As described above, the small-diameter hole 12b is formed with an inner diameter slightly smaller than the outer diameter of the probe 5 in the insulating coating 5b. Therefore, the end edge 5g of the insulating coating 5b can be brought into contact with the open edge 12d of the small diameter hole 12b. In other words, the end edge 5g and the open edge 12d serve as a retaining portion for preventing the probe 5 from falling off to the inspection object side.

  The rear end side support body 3 is configured by laminating a plurality of (in this embodiment, five) support plates 15, 16, 17, 18, and 19 in order from the front end side support body 2 side. These support plates 15 to 19 are fixed to each other by fixing means such as bolts. As shown in FIG. 4, through holes 15 a, 16 a, 17 a, 18 a, and 19 a are formed in the support plates 15 to 19, respectively. These through holes 15a to 19a constitute one rear end side insertion hole 20 through which the rear end side portion 5d of the probe 5 is inserted.

  The rear end side insertion hole 20 has a probe guide direction V that is inclined with respect to the probe guide direction of the front end side insertion hole 13 (that is, the direction orthogonal to the facing surface 2a). That is, the five through holes 15a to 19a are formed in a state where the respective centers are slightly shifted, and the entire rear end side insertion hole 20 is inclined with respect to the orthogonal direction of the facing surface 2a. Specifically, as shown in FIG. 4, five through holes 15 a to 19 a are formed in a state where the centers of the through holes 15 a to 19 a are slightly shifted in the right direction in the drawing. Therefore, the probe guiding direction V is inclined by an angle θ in the counterclockwise direction of FIG. 4 with respect to the normal line n orthogonal to the surface of the rear end side support 3. Further, the rear end side insertion holes 20 are formed as many as the number of probes 5 included in the inspection jig 1.

  The through hole 15a includes a small diameter hole 15b and a large diameter hole 15c having a larger diameter than the small diameter hole 15b. Similarly, the through hole 16a is composed of a small diameter hole 16b and a large diameter hole 16c, the through hole 17a is composed of a small diameter hole 17b and a large diameter hole 17c, and the through hole 18a is composed of a small diameter hole 18b and a large diameter. The through hole 19a includes a small diameter hole 19b and a large diameter hole 19c. The small-diameter hole 19b is formed with an inner diameter slightly larger than the outer diameter of the conductive wire 5a and slightly smaller than the outer diameter of the probe 5 in the insulating coating 5b, and the small-diameter holes 15b to 18b are formed by the insulating coating 5b. The inner diameter of the probe 5 is slightly larger than the outer diameter of the probe 5.

  In each probe 5, the front end side portion 5 c inserted through the front end side insertion hole 13 is inclined in the probe guide direction V of the rear end side insertion hole 20 relative to the rear end side portion 5 d inserted through the rear end side insertion hole 20. It is arranged at a position shifted to. That is, the opening position on the rear end side of the distal end side insertion hole 13 through which the distal end side portion 5c of a certain probe 5 is inserted (that is, the opening position of the through hole 12a of the support plate 12) is as shown in FIG. When viewed from the rear end side insertion hole 20 through which the rear end side portion 5d of the probe 5 is inserted, the rear end side insertion hole 20 is disposed on the inclined side in the probe guide direction V.

  In addition, the direction of inclination of the probe guide direction V of the rear end side insertion hole 20 may or may not be the same in all the rear end insertion holes 20.

  The rear end portion 5f of the probe 5 is formed in a spherical shape as described above. Therefore, even if the rear end side portion 5d of the probe 5 is inclined along the rear end side insertion hole 20 having the inclined probe guide direction V, as shown in FIG. 5, the rear end portion 5f and the surface 7a of the electrode 7 are provided. This does not affect the conductive contact state.

  As shown in FIG. 2, the electrode support 6 is configured by stacking support plates 22 and 23 in which a plurality of electrodes 16 are embedded, and a support plate 25 that holds wirings 24 that are conductively connected to the electrodes 7. Yes. The wiring 24 is connected to a control unit 31 of the inspection apparatus 30 described later. The electrode support 6 is detachably fixed to the rear end support 3 by a fixing means such as a bolt.

  In the inspection jig 1 of this embodiment, as shown in FIG. 2, the thickness T <b> 2 of the rear end side support 3 is larger than the gap S between the front end side support 2 and the rear end side support 3. For example, when the diameter of the probe 5 is 30 μm and the length of the probe 5 is 20 mm, the gap S is 6.6 mm and the thickness T2 is 10 mm. Further, in this embodiment, the thickness T1 of the distal end side support body 2 is smaller than the gap S. For example, in addition to the above conditions, when the protruding amount of the tip of the probe 5 from the surface of the tip side support 2 is 100 μm, the thickness T1 of the tip side support 2 is 3.3 mm.

  In the inspection jig 1 configured as described above, an intermediate portion of the probe 5 between the front end side support body 2 and the rear end side support body 3 extends along the rear end side insertion hole 20 and the rear end side portion 5d. Is inclined and extended in the inclined direction, and is inserted into the distal end side insertion hole 13 as it is. For this reason, when the distal end portion 5e of the probe 5 is pushed in contact with the inspection object, the intermediate portion of the probe 5 in the inclined posture is easily bent (bent). The bending direction of the intermediate portion at this time is a direction corresponding to the inclination direction of the probe 5.

  Moreover, the inspection jig 1 configured as described above is assembled as follows. That is, first, the front end side support body 2 and the rear end side support body 3 are connected and fixed by the support columns 4.

  Thereafter, the plurality of probes 5 are inserted through the front end side support body 2 and the rear end side support body 5. Specifically, from the rear side of the rear end side support body 3 in a state where the support plate 19 is removed, until the end edge 5g of the insulating coating 5b on the front end side contacts the opening edge 12d of the small diameter hole 12b. Plug in. That is, the probe 5 is passed through the rear end side insertion hole 20, the space between the front end side support body 2 and the rear end side support body 3, and the front end side insertion hole 13 in order. Plug in. Thereafter, the support plate 19 is fixed. The small diameter hole 19b is formed with an inner diameter larger than the outer diameter of the probe 5 in the insulating coating 5b, and the probe 5 is inserted from the rear of the rear end side support body 3 with the support plate 19 attached. May be.

  Thereafter, the electrode support 6 is fixed to the rear end support 3 to complete the inspection jig 1.

(Configuration of inspection equipment)
FIG. 6 is a schematic configuration diagram illustrating an inspection apparatus 30 on which the inspection jig 1 illustrated in FIG. 1 is mounted.

  As shown in FIG. 6, the inspection jig 1 of this embodiment is mounted on an inspection apparatus 30 that performs an electrical inspection (specifically, inspection of disconnection, short circuit, etc.) of an inspection target W of a printed wiring board or a semiconductor integrated circuit. Have been used. The inspection apparatus 30 of this embodiment has an electrical pattern of a fine semiconductor integrated circuit (for example, a semiconductor integrated circuit formed by 10 mm to 15 mm square) that has a test pattern formed at a fine pitch and is mounted on a mobile phone or the like. Suitable for inspection. In addition, the inspection apparatus 30 can perform an electrical inspection of a plurality of semiconductor integrated circuits at a time.

  As shown in FIG. 6, the inspection device 30 includes a control unit 31 as an electrical inspection unit including an inspection circuit that determines the conduction state of the inspection target W, a drive unit 32 connected to the control unit 31, and a drive unit. And an inspection mechanism 33 driven by 32.

  The inspection mechanism 33 relatively includes a first support plate 34 to which the inspection jig 1 is attached, a second support plate 35 disposed opposite to the first support plate 34, and the first support plate 34 and the second support plate 35. And a moving mechanism 36 that moves in a detachable manner. The moving mechanism 36 is configured by a ball screw mechanism, a hydraulic mechanism, or the like, and is driven by the driving unit 32.

  The electrode 7 of the inspection jig 1 attached and fixed to the first support board 34 is connected to the wiring 37 through the wiring 24 and is conductively connected to the control unit 31 through the wiring 37. Further, the inspection target W is placed on the second support plate 35 in a positioned state. And the drive part 32 drives the moving mechanism 36 with the control signal of the control part 31, the 1st support disk 34 approaches toward the 2nd support disk 35, and presses the test | inspection jig 1 against the test object W with predetermined pressure. When the inspection jig 1 is pressed against the inspection object W, each probe 5 of the inspection jig 1 comes into contact with the inspection object W and becomes conductive. In this state, when the control unit 31 supplies a predetermined signal to the inspection jig 1 via the wiring 37 or receives a potential detected by the inspection jig 1, an electrical test of the inspection object W is performed. Done.

(Effect of this embodiment)
As described above, in this embodiment, the probe guide direction V of the rear end side insertion hole 20 is inclined with respect to the probe guide direction of the front end side insertion hole 13, and the front end side portion 5e of the probe 5 is the rear end side portion 5f. In contrast, the rear end side insertion hole 20 is disposed at a position shifted to the inclined side in the probe guide direction V. Therefore, the probe guide direction V of the rear end side insertion hole 20 coincides with the inclination direction of the probe 5 to be mounted at the time of assembly.

  Further, the thickness T <b> 2 of the rear end side support body 3 is larger than the gap S between the front end side support body 2 and the rear end side support body 3. Therefore, when the probe 5 is mounted, the length of the support portion of the probe 5 supported by the rear end side insertion hole 5f is longer than the length of the front end side portion 5e of the probe 5 passing through the gap S. Therefore, for example, even if the diameter of the probe 5 is as small as 40 μm or less, the probe 3 is inserted into the probe 3 at the rear end side insertion hole 20 so that the tip side portion 5e of the probe 5 is properly inserted into the tip end insertion hole 13. Can be supported.

  From the above, in this embodiment, the probe 5 can be easily inserted from the rear of the rear end side support 3. As a result, in this embodiment, the inspection jig 1 can be easily assembled. In addition, the inspection apparatus 30 can be easily assembled.

  Further, in this embodiment, the gap S between the front end side support body 2 and the rear end side support body 3 is smaller than the thickness T2 of the rear end side support body 3, and the gap S is relatively small. Therefore, the amount of bending of the probe 5 in the gap S can be reduced. As a result, even if the diameter of the probe 5 is small, the probe 5 can be brought into contact with the inspection object with an appropriate load.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the rear end side support body 3 is configured by the five support plates 15 to 19. In addition to this, for example, the rear end side support 3 may be configured by four or less support plates, or may be configured by six or more support plates. Similarly, in the above-described embodiment, the tip side support body 3 is configured by the three support plates 10 to 12, but the tip side support body 3 is configured by two or less support plates or four or more support plates. May be.

It is a schematic perspective view which shows the inspection jig concerning embodiment of this invention. It is a longitudinal cross-sectional view of the inspection jig shown in FIG. It is an expanded sectional view which shows the cross-section of the front end side support body shown in FIG. It is an expanded sectional view which shows the cross-section of the rear end side support body shown in FIG. FIG. 3 is an enlarged perspective view showing a conductive contact state between a rear end portion of the probe shown in FIG. 2 and an electrode. It is a schematic block diagram which shows the inspection apparatus carrying the inspection jig shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection jig 2 Front end side support body 3 Rear end side support body 5 Probe 5c Front end side part 5d Rear end side part 7 Electrode 13 Front end side insertion hole 20 Rear end side insertion hole 30 Inspection apparatus 31 Control part (electrical inspection means)
S Clearance T2 Thickness of rear end support V Probe guide direction W Inspection target

Claims (3)

A distal end side support body in which a distal end side insertion hole having a probe guide direction facing the inspection object is formed;
A rear end side support body that is disposed with a predetermined gap with respect to the front end side support body and has a rear end side insertion hole having a probe guide direction that is inclined with respect to the probe guide direction of the front end side insertion hole. When,
A probe having a front end side portion inserted through the front end side insertion hole and a rear end side portion inserted through the rear end side insertion hole so that the front end can be projected and retracted on the inspection object side;
The tip side portion of the probe is disposed at a position shifted to a side inclined to the probe guide direction of the rear end side insertion hole with respect to the rear end side portion,
The thickness of the said back end side support body is larger than the clearance gap between the said front end side support body and the said back end side support body, The inspection jig characterized by the above-mentioned.   The inspection jig according to claim 1, wherein a diameter of the probe is 40 μm or less.   3. An inspection apparatus comprising: the inspection jig according to claim 1; and an electrical inspection unit that is conductively connected to an electrode that contacts the rear end side portion of the probe.

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