JP2011133354A - Contact probe and probe unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact probe and a probe unit for controlling direction in which deflections are generated by a load, for readily assembling when being unitized, and performing efficient maintenance, after being unitized. <P>SOLUTION: The width in a prescribed direction of an elastic buckling section 22, elastically buckled by a load is changed along a longitudinal direction of the elastic buckling section 22 and offset, is performed so that a plane passing through a load application point T of a first contact point 21, along the longitudinal direction of the elastic buckling section 22 does not pass a middle point M of the width, at a spot having a large width change in a prescribed direction of the elastic buckling section 22; and an arm section 24, extending flat in the direction orthogonal to a columnar section, including the elastic buckling section 22, is provided. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a contact probe and a probe unit that transmit and receive electrical signals by contacting electrodes and terminals of an electronic component when conducting a conduction state inspection or an operation characteristic inspection in an electronic component such as a semiconductor integrated circuit or a liquid crystal panel. .

  Conventionally, when conducting a conduction state inspection or an operation characteristic inspection of an inspection target such as a semiconductor integrated circuit or a liquid crystal panel, an electrical connection is made between the inspection target and a signal processing device that outputs an inspection signal. A probe unit that accommodates a plurality of conductive contact probes is used. The probe unit can be applied to highly integrated and miniaturized inspection objects by narrowing the pitch between contact probes with the progress of high integration and miniaturization of semiconductor integrated circuits and liquid crystal panels in recent years. Possible technologies are progressing.

  As a technique for narrowing the pitch between contact probes, for example, a technique related to a wire-type contact probe having elasticity that can be bent according to a load from the outside of the contact probe is known. Wire-type contact probes are easier to reduce in diameter than pin-type contact probes that use springs. However, if the direction of deflection is not uniform when a load is applied, adjacent contact probes contact each other. Or the contact with the contacted object may vary. For this reason, in the wire-type contact probe, various devices for uniformly aligning the direction of bending due to the load are applied (for example, see Patent Documents 1 to 4).

  Among these, Patent Documents 1 and 2 disclose a technique in which the shape of the probe is curved. Further, Patent Document 3 discloses a technique for making the shape of the probe bent into a dogleg shape. In Patent Document 4, both ends of a linear contact probe are inserted into through holes of two different plates, respectively, and then one plate is shifted in a direction perpendicular to the extending direction of the contact probe. On the other hand, a technique for aligning the deflection direction of the contact probe by forcibly applying an initial deflection is disclosed.

JP 52-155388 A JP 2007-113972 A JP-A-8-304460 JP 2001-50982 A

  However, the conventional techniques described in Patent Documents 1 to 3 described above have a problem that it takes time to attach the contact probe to the probe holder because the contact probe is curved or bent from the beginning. In addition, it is not easy to perform repair work for exchanging contact probes, and maintenance cannot be performed efficiently.

  Further, in the conventional technique described in Patent Document 4 described above, there is a problem in that it takes time to assemble the probe unit because the plate that shifts when the initial deflection is applied to the contact probe must be aligned with high accuracy. there were. Furthermore, since the probe unit has to be disassembled when performing repair work, maintenance efficiency is poor.

  The present invention has been made in view of the above, and can control the direction in which deflection occurs due to a load, can be easily assembled when unitized, and is efficient for maintenance after unitization. An object is to provide a contact probe and a probe unit which can be performed well.

  In order to solve the above-described problems and achieve the object, a contact probe according to the present invention is in contact with two different circuit structures at both ends, and electrically connects the two circuit structures. A first contact portion having a columnar shape with one end sharpened, and a substantially columnar shape extending from the other end of the first contact portion along the longitudinal direction of the first contact portion, and a direction orthogonal to the extending direction. While the width of at least one direction of the material changes along the extending direction, the width of the direction orthogonal to the one direction is constant along the extending direction, and elastic buckling that causes elastic buckling by the load And a connection portion extending in a column shape from the end portion in the direction in which the elastic buckling portion extends and different from the end portion connected to the first contact portion along the extending direction, and the connection portion From the above Projecting in a direction perpendicular to the end face from the end face located farthest with respect to the sharpened end of the first contact portion of the arm portion, and an arm portion extending in a plate shape along one direction A second contact portion having a sharp tip, and a columnar shape in a direction perpendicular to the end surface from the end surface closest to the sharpened end of the first contact portion of the end surface of the arm portion. A protruding columnar part, passing through a sharpened one end of the first contact part and parallel to the extending direction, and the width of the elastic buckling part in the one direction in the direction in the direction It is different from a plane parallel to the extending direction through the midpoint of the width having the largest difference from the maximum width of the first contact portion.

  In the contact probe according to the present invention, in the above invention, the elastic buckling portion may have a shape in which a cross section including the width in the one direction is recessed on the side where the arm portion extends. Features.

  Further, in the contact probe according to the present invention, in the above invention, the elastic buckling portion has a shape in which a cross section including a width in the one direction is recessed on a side opposite to the side on which the arm portion extends. It is characterized by being.

  The contact probe according to the present invention is characterized in that, in the above invention, the columnar portion is provided near a terminal end of the arm portion when a boundary between the arm portion and the connecting portion is a starting end. .

  The contact probe according to the present invention is characterized in that, in the above-mentioned invention, a plane passing through the tip of the columnar portion and parallel to a direction in which the arm portion extends passes through the elastic buckling portion.

  Moreover, the contact probe according to the present invention is characterized in that, in the above-mentioned invention, a plane passing through the tip of the columnar portion and parallel to a direction in which the arm portion extends passes through the connecting portion.

  Further, a probe unit according to the present invention includes a plurality of contact probes according to the above invention, a plurality of first insertion holes each through which the connection portion is inserted, and a plurality of holding portions each through which the columnar portion is inserted. A flat plate-shaped first holder having at least a surface made of an insulating material, and a plurality of holding portions each penetrating the first contact portion, and at least a surface having a flat plate-shaped first holder made of an insulating material. And 2 holders.

  Moreover, the probe unit according to the present invention is the above invention, wherein the surface of the first holder surface on which the arm portion is placed and the surface of the second holder facing the first holder. The distance is a distance between a plane passing through the tip of the first contact portion and parallel to the direction in which the arm portion extends and a plane passing through the tip of the columnar portion and parallel to the direction in which the arm portion extends. It is characterized by being larger than.

  According to the present invention, the width of the elastic buckling portion elastically buckled by the load is changed along the longitudinal direction of the elastic buckling portion, and the load of the first contact portion along the longitudinal direction of the elastic buckling portion. Since the plane passing through the point of action is offset so that it does not pass through the midpoint of the width at the location where the change in the width of the elastic buckling portion in a given direction is large, it follows the direction in which the width changes when a load is applied. Can be bent. In addition, an arm portion extending in a direction perpendicular to the direction in which the elastic buckling portion extends is provided, and a columnar portion protruding from the end portion of the arm portion is inserted into the first holder, so that the contact probe can be easily positioned. And can be easily attached to the probe holder. In addition, since it is not necessary to disassemble the probe holder when removing the contact probe, the removal is easy. Therefore, the direction in which the deflection is generated by the load can be controlled, the assembly when unitized can be easily performed, and the maintenance after the unitization can be performed efficiently.

FIG. 1 is a perspective view showing a configuration of a probe unit according to an embodiment of the present invention. FIG. 2 is a perspective view showing a configuration of a contact probe according to an embodiment of the present invention. FIG. 3 is a partial cross-sectional view showing the configuration of the main part of the probe unit according to the embodiment of the present invention. FIG. 4 is a plan view showing the configuration of the upper surface of the probe holder. FIG. 5 is a diagram showing a state at the time of inspection of the main part of the probe unit according to the embodiment of the present invention. FIG. 6 is a diagram showing a configuration of a contact probe according to a first modification of the embodiment of the present invention. FIG. 7 is a diagram showing a configuration of a contact probe according to a second modification of the embodiment of the present invention. FIG. 8 is a diagram showing a configuration of a contact probe according to a third modification of the embodiment of the present invention. FIG. 9 is a diagram showing a configuration of a contact probe according to a fourth modification of the embodiment of the present invention. FIG. 10 is a diagram showing a configuration of a contact probe according to a fifth modification of the embodiment of the present invention. FIG. 11 is a diagram showing a configuration of a contact probe according to a sixth modification of the embodiment of the present invention.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as “embodiments”) will be described with reference to the accompanying drawings. It should be noted that the drawings are schematic, and the relationship between the thickness and width of each part, the ratio of the thickness of each part, and the like may be different from the actual ones. Of course, there may be included portions having different dimensional relationships and ratios.

  FIG. 1 is a perspective view showing a configuration of a probe unit according to an embodiment of the present invention. The probe unit 1 shown in the figure performs a continuity test for inspecting the presence or absence of a short circuit or disconnection in a wiring pattern to be inspected such as a semiconductor integrated circuit or a liquid crystal panel, and an operation characteristic inspection when a signal is input to the inspection target. This is an apparatus for electrical connection between an inspection object and a signal processing apparatus that generates and outputs an inspection signal. Specifically, the probe unit 1 accommodates a plurality of conductive contact probes 2 that contact at both ends with electrodes or terminals provided on the inspection object side and the signal processing device side, respectively, and a plurality of contact probes 2. The probe holder 3 to hold | maintain is provided.

  FIG. 2 is a perspective view showing the configuration of the contact probe 2. FIG. 3 is a partial cross-sectional view showing configurations of main parts of the contact probe 2 and the probe holder 3. The contact probe 2 has a first contact portion 21 having a prismatic shape with one end sharpened, and a substantially prismatic shape along the z-axis direction that is the longitudinal direction of the first contact portion 21 from the other end of the first contact portion 21. The width in the x-axis direction, which is at least one of the directions orthogonal to the z-axis direction that extends, changes along the z-axis direction, while the width in the y-axis direction that is orthogonal to the x-axis direction. The width is constant along the extending direction, and is an elastic buckling portion 22 that is elastically buckled by a load from the outside of the contact probe 2, and an end portion in the z-axis direction in which the elastic buckling portion 22 extends and is the first. A connecting portion 23 extending in a prismatic shape along the z-axis direction from an end portion different from the end portion connected to the contact portion 21, and an arm portion 24 extending in a plate shape from the connecting portion 23 along the x-axis direction; The sharpened one of the first contact portions 21 of the end surface of the arm portion 24 The second contact portion 25 that protrudes in the direction orthogonal to the end surface (the positive direction of the z-axis) from the end surface that is farthest from the end surface, and the first contact portion 21 out of the end surfaces of the arm portion 24. And a columnar portion 26 that protrudes in a columnar shape in a direction orthogonal to the end surface (a negative z-axis direction) from an end surface that is closest to the sharpened one end.

The elastic buckling portion 22 has a shape in which the cross section including the width in the x-axis direction is recessed in an arc shape on the side where the arm portion 24 extends. As shown in FIG. 3, the smallest width of the elastic buckling portion 22 in the x-axis direction (the width having the largest difference from the maximum width R of the columnar portion of the first contact portion 21 in the x-axis direction). The plane P ₁ passing through the middle point M ₁ and parallel to the z axis is different from the plane P ₂ passing through the sharpened tip T- ₁ of the first contact portion 21 and parallel to the z axis. The plane P ₁ is located farther from the arm portion 24 than the plane P ₂ .

The columnar portion 26 is provided near the end of the arm portion 24 when the boundary between the arm portion 24 and the connection portion 23 is the start end. A plane H ₁ passing through the tip of the columnar part 26 and parallel to the direction in which the arm part 24 extends passes through the elastic buckling part 22.

  The contact probe 2 having the above configuration is formed by electroforming nickel alloy. Note that when the contact probe 2 is formed, it may be formed by etching, pressing, or a combination thereof. Alternatively, the contact probe 2 may be formed using copper, iron (stainless steel), tungsten, a beryllium-based alloy, or the like.

  The probe holder 3 is provided with a flat plate-like first holder 31 that passes through the connection portion 23 of the contact probe 2 and holds the arm portion 24, and is separated from the first holder 31, and the first contact portion of the contact probe 2. Plate-like 2nd holder 32 which holds 21 and two holder fixing members 33 and 34 which pinch and fix the 1st holder 31 and the 2nd holder 32, respectively. The surface of the first holder 31 and the surface of the second holder 32 are parallel to each other.

  FIG. 4 is a plan view of the probe holder 3 as viewed from above the first holder 31. The first holder 31 has a plurality of hollow cylindrical first insertion holes 311 that are each penetrated in the thickness direction and inserted through the connection portion 23, and a hollow that is penetrated in the thickness direction and holds the columnar portion 26. A plurality of cylindrical holding portions 312. The openings of the plurality of first insertion holes 311 are arranged in a line. The openings of the plurality of holding portions 312 are also arranged in a line. As shown in FIG. 4, the row formed by the openings of the plurality of first insertion holes 311 and the row formed by the openings of the plurality of holding portions 312 are parallel to each other.

  The second holder 32 has a plurality of hollow cylindrical second insertion holes 321 each penetrating in the thickness direction and passing through the first contact portion 21. The diameter of the second insertion hole 321 is equal to the diameter of the first insertion hole 311. The second insertion hole 321 has the same axis as the first insertion hole 311.

  The holder fixing members 33 and 34 sandwich the end surfaces of the first holder 31 and the second holder 32 in a direction orthogonal to the direction in which the first insertion holes 311 and the holding portions 321 are arranged in a row, and the sandwiched end surfaces Is fixed and supported.

The probe holder 3 having the above configuration is formed using an insulating material such as ceramics such as alumina (Al ₂ O ₃ ) or silicon nitride (Si ₃ N ₄ ), or a plastic resin. In addition, as a raw material of the probe holder 3, the surface of a conductive material such as metal may be coated with an insulating film.

As shown in FIG. 3, the distance a between the upper surface of the first holder 31 and the upper surface of the second holder 32 (the surface of the first holder 31 on which the arm portion 24 is placed and the surface of the second holder 32 The distance a) between the first holder 31 and the surface facing the first holder 31 passes through the tip T ₁ of the first contact portion 21 and is parallel to the plane H ₁ parallel to the direction in which the arm portion 24 extends (x-axis direction). The distance b is larger than the distance b from the plane H ₂ passing through the tip of the portion 26 and parallel to the direction in which the arm portion 24 extends (a> b). For this reason, when attaching the contact probe 2 to the probe holder 3, the first contact portion 21 is inserted into the first insertion hole 311, and the tip of the first contact portion 21 is brought closer to the second holder 32. Before the tip reaches the second holder 32, the tip of the columnar part 26 reaches the holding part 312. Therefore, when the front end of the columnar part 26 is aligned and inserted into the holding part 312, if the front end of the first contact part 21 is brought closer to the second holder 32, the front end of the first contact part 21 is second. It can be inserted into the insertion hole 321 almost automatically, and attachment becomes easy.

  The arrangement pattern of the contact probe 2 shown in FIGS. 1 and 4 is merely an example. That is, the wiring pattern of the probe holder 3 is determined according to the wiring pattern of the electrode or terminal to be inspected, and the design can be changed as appropriate.

  FIG. 5 is a diagram showing a state at the time of inspection using the probe unit 1 having the above configuration. As shown in FIG. 5, the first contact portion 21 is in contact with the electrode 101 of the semiconductor integrated circuit 100, while the second contact portion 25 is in contact with the electrode 201 of the wiring board 200 that establishes electrical connection with the signal processing circuit. Contact. The wiring substrate 200 has a large number of wirings and connection electrodes made of nickel or the like formed on one surface of a sheet-like base material made of polyimide or the like. The wiring board 200 is positioned so as to be in contact with the second contact portion 25, and is then sandwiched between the fixing member 300 made of the same material as the probe holder 3 and the first holder 31, and is fixed by screwing or the like. In addition, you may make it provide a spacer suitably between the wiring board 200 and the 1st holder 31. FIG.

The elastic buckling portion 22 is parallel to the z-axis direction and the plane P ₁ passing through the midpoint M ₁ of the minimum width in the x-axis direction is the x-axis at the tip (load application point) T ₁ of the first contact portion 21. Since it is located farther from the arm portion 24 than the plane P ₂ passing through the center of the direction, elastic buckling occurs due to the load received by the first contact portion 21, and the shape is further depressed in the negative x-axis direction. is doing. Thus, since the contact probe 2 has a property of bending only in one direction (the x-axis direction in FIG. 5), it is easy to align the deflection directions of the plurality of contact probes 2.

  In FIG. 5, the first contact portion 21 slides the electrode 101 of the semiconductor integrated circuit 100 in the x-axis direction as the elastic buckling portion 22 is deformed according to a load from the outside. Therefore, when the electrode 101 is covered with an oxide film or dirt is attached to the surface of the electrode 101, the oxide film or dirt can be scraped off.

  The contact probe 2 has a load-deflection characteristic in which a change in load decreases as the deflection increases. In the present embodiment, the shape or the like of the contact probe 2 is adjusted so that the inspection can be performed in a state where the load does not change greatly regardless of the deflection.

  According to the embodiment of the present invention described above, the width in a predetermined direction of the elastic buckling portion 22 that is elastically buckled by a load is changed along the longitudinal direction of the elastic buckling portion 22. The plane passing through the load application point T of the first contact portion 21 along the longitudinal direction is offset so as not to pass through the midpoint M of the width at the location where the change in the width in the predetermined direction of the elastic buckling portion 22 is large. Therefore, when a load is applied, it can be bent along the direction in which the width changes. Further, an arm portion 24 extending in a direction perpendicular to the direction in which the elastic buckling portion 22 extends is provided, and the columnar portion 26 protruding from the end portion of the arm portion 24 is inserted into the first holder 31. The probe 2 can be easily positioned and can be easily attached to the probe holder 3. In addition, since it is not necessary to disassemble the probe holder 3 when removing the contact probe 2, the removal is also easy. Therefore, the direction in which the deflection is generated by the load can be controlled, the assembly when unitized can be easily performed, and the maintenance after the unitization can be performed efficiently.

(Modification)
FIG. 6 is a diagram showing a configuration of a contact probe according to a first modification of the present embodiment. The contact probe 4 shown in the figure includes a first contact part 41, an elastic buckling part 42, a connection part 43, an arm part 44, a second contact part 45, and a columnar part 46. Among these, the 1st contact part 41, the elastic buckling part 42, the connection part 43, the arm part 44, and the 2nd contact part 45 are the 1st contact part 21 of the contact probe 2, the elastic buckling part 22, the connection part 23, Each of the arm portion 24 and the second contact portion 25 has the same shape. On the other hand, the columnar portion 46 extends from the end surface closest to the sharpened end of the first contact portion 41 among the end surfaces of the arm portion 44 to a direction orthogonal to the end surface (negative z-axis direction). Although protruding in a columnar shape, the protruding position is an intermediate portion in the direction in which the arm portion 44 extends.

A plane P ₃ passing through the middle point M _{2 of the} smallest width of the elastic buckling portion 42 in the x-axis direction and parallel to the z-axis passes through the sharpened tip T ₂ of the first contact portion 41. This is different from the plane P ₄ parallel to the z axis. Further, the plane P ₃ is located farther from the arm portion 44 than the plane P ₄ .

  In FIG. 6, a flat plate-like first holder 35 that passes through the connection portion 43 of the contact probe 4 and holds the arm portion 44 includes a plurality of first insertion holes 351 that pass through the connection portion 43, and a first insertion hole 351. And a plurality of holding portions 352 that hold the columnar portion 46.

FIG. 7 is a diagram showing a configuration of a contact probe according to a second modification of the present embodiment. The contact probe 5 shown in the figure includes a first contact part 51, an elastic buckling part 52, a connection part 53, an arm part 54, a second contact part 55, and a columnar part 56. Among these, the 1st contact part 51, the elastic buckling part 52, the connection part 53, the arm part 54, and the 2nd contact part 55 are the 1st contact part 21, the elastic buckling part 22, the connection part 23 of the contact probe 2, Each of the arm portion 24 and the second contact portion 25 has the same shape. On the other hand, the columnar portion 56 extends from the end surface closest to the sharpened one end of the first contact portion 51 among the end surfaces of the arm portion 54 to a direction orthogonal to the end surface (negative z-axis direction). Although protruding in a columnar shape, a plane H ₃ passing through the tip and parallel to the direction in which the arm portion 54 extends passes through the elastic buckling portion 52.

A plane P ₅ that passes through the middle point M _{3 of the} smallest width of the elastic buckling portion 52 in the x-axis direction and is parallel to the z-axis passes through the sharpened tip T ₃ of the first contact portion 51. This is different from the plane P ₆ parallel to the z axis. The plane P ₅ is located farther from the arm portion 54 than the plane P ₆ .

  In FIG. 7, the plate-like first holder 36 that passes through the connection portion 53 of the contact probe 5 and holds the arm portion 54 includes a plurality of first insertion holes 361 that pass through the connection portion 53, and a first insertion hole 361. And a holding portion 362 that holds the columnar portion 56.

  Also in this second modified example, the distance between the plane passing through the tip of the columnar part and parallel to the direction in which the arm extends is equal to the plane passing through the tip of the first contact part and parallel to the direction in which the arm extends. The distance between the surface of the first holder on which the arm portion is placed and the surface of the second holder facing the first holder can be made larger.

  FIG. 8 is a diagram showing a configuration of a contact probe according to a third modification of the present embodiment. The contact probe 6 shown in the figure includes a first contact part 61, an elastic buckling part 62, a connection part 63, an arm part 64, a second contact part 65, and a columnar part 66. Among these, the 1st contact part 61, the elastic buckling part 62, the connection part 63, the arm part 64, and the columnar part 66 are the 1st contact part 21, the elastic buckling part 22, the connection part 23, and the arm part of the contact probe 2. 24 and the columnar part 26 have the same shape. In contrast, the second contact portion 65 has a direction (z-axis positive direction) orthogonal to the end surface of the end surface of the arm portion 64 that is closest to the sharpened end of the first contact portion 61. ) Protrudes in a columnar shape, but the protruding position is an intermediate portion in the direction in which the arm portion 64 extends.

A plane P ₇ that passes through the middle point M _{4 of the} smallest width of the elastic buckling portion 62 in the x-axis direction and is parallel to the z-axis passes through the sharpened tip T ₄ of the first contact portion 61. This is different from the plane P ₈ parallel to the z axis. Further, the plane P ₇ is located farther from the arm portion 64 than the plane P ₈ .

  FIG. 9 is a diagram showing a configuration of a contact probe according to a fourth modification of the present embodiment. The contact probe 7 shown in the figure includes a first contact part 71, an elastic buckling part 72, a connection part 73, an arm part 74, a second contact part 75, and a columnar part 76. Among these, the 1st contact part 71, the connection part 73, the arm part 74, the 2nd contact part 75, and the columnar part 76 are the 1st contact part 21, the connection part 23, the arm part 24, and the 2nd contact part of the contact probe 2. 25 and the columnar part 26 have the same shape. On the other hand, the elastic buckling portion 72 has an arcuate recess on the side opposite to the side on which the arm portion 74 extends in the x-axis direction. Therefore, in the case of the contact probe 7, when a load is applied from the outside, the central portion in the longitudinal direction of the elastic buckling portion 72 is bent in the positive x-axis direction in FIG.

A plane P ₉ that passes through the middle point M _{5 of the} smallest width of the elastic buckling portion 72 in the x-axis direction and is parallel to the z-axis passes through the sharpened tip T ₅ of the first contact portion 71. This is different from the plane P ₁₀ parallel to the z axis. Further, the plane P ₉ is located closer to the arm portion 74 than the plane P ₁₀ .

  FIG. 10 is a diagram illustrating a configuration of a contact probe according to a fifth modification of the present embodiment. The contact probe 8 shown in the figure includes a first contact portion 81, an elastic buckling portion 82, a connection portion 83, an arm portion 84, a second contact portion 85, and a columnar portion 86. Among these, the 1st contact part 81, the connection part 83, the arm part 84, the 2nd contact part 85, and the columnar part 86 are the 1st contact part 21, the connection part 23, the arm part 24, and the 2nd contact part of the contact probe 2. 25 and the columnar part 26 have the same shape. On the other hand, the elastic buckling portion 82 is recessed on the side where the arm portion 84 extends in the x-axis direction, and has a uniform width in the vicinity of the central portion where the width is reduced in the x-axis direction. .

A plane P ₁₁ that passes through the middle point M _{7 of the} smallest width of the elastic buckling portion 82 in the x-axis direction and is parallel to the z-axis passes through the sharpened tip T ₇ of the first contact portion 81. This is different from the plane P ₁₂ parallel to the z axis. Further, the plane P ₁₁ is located farther from the arm portion 84 than the plane P ₁₂ .

  FIG. 11 is a diagram illustrating a configuration of a contact probe according to a sixth modification of the present embodiment. The contact probe 9 shown in the figure includes a first contact portion 91, an elastic buckling portion 92, a connection portion 93, an arm portion 94, a second contact portion 95, and a columnar portion 96. Among these, the 1st contact part 91, the connection part 93, the arm part 94, the 2nd contact part 95, and the columnar part 96 are the 1st contact part 21, the connection part 23, the arm part 24, and the 2nd contact part of the contact probe 2. 25 and the columnar part 26 have the same shape. On the other hand, the elastic buckling portion 92 is recessed on the side opposite to the side where the arm portion 94 extends in the x-axis direction, and has a uniform width near the central portion where the width is reduced in the x-axis direction. is doing.

A plane P ₁₃ that passes through the middle point M _{8 of the} smallest width of the elastic buckling portion 92 in the x-axis direction and is parallel to the z-axis passes through the sharpened tip T ₉ of the first contact portion 91. This is different from the plane P ₁₄ parallel to the z axis. Further, the plane P ₁₃ is located closer to the arm portion 94 than the plane P ₁₄ .

  According to the first to sixth modifications of the present embodiment described above, the direction in which the deflection is generated by the load applied from the outside of the contact probe can be controlled as in the case of the above-described embodiment. Can be easily assembled, and maintenance after unitization can be performed efficiently.

  Up to here, the mode for carrying out the present invention has been described, but the present invention should not be limited to the above-described embodiment. That is, the present invention can include various embodiments and the like not described herein, and various design changes and the like can be made without departing from the technical idea specified by the claims. Is possible.

  The present invention is useful when conducting a conduction state inspection or an operation characteristic inspection in an electronic component such as a semiconductor integrated circuit or a liquid crystal panel.

DESCRIPTION OF SYMBOLS 1 Probe unit 2, 4, 5, 6, 7 Contact probe 3 Probe holder 21, 41, 51, 61, 71, 81, 91 1st contact part 22, 42, 52, 62, 72, 82, 92 Elastic buckling Part 23, 43, 53, 63, 73, 83, 93 connection part 24, 44, 54, 64, 74, 84, 94 arm part 25, 45, 55, 65, 75, 85, 95 second contact part 26, 46, 56, 66, 76, 86, 96 Columnar part 31, 35, 36 First holder 32 Second holder 33, 34 Holder fixing member 100 Semiconductor integrated circuit 101, 201 Electrode 200 Wiring board 300 Fixing member 311, 351, 361 First insertion hole 312, 352, 362 Holding part 321 Second insertion hole

Claims (8)

In a conductive contact probe that contacts two different circuit structures at both ends and electrically connects the two circuit structures,
A first contact portion having a columnar shape with one end sharpened;
The first contact portion extends from the other end of the first contact portion in a substantially column shape along the longitudinal direction of the first contact portion, and the width of at least one direction orthogonal to the extending direction changes along the extending direction. On the other hand, the width in the direction orthogonal to the one direction is constant along the extending direction, and an elastic buckling portion that generates elastic buckling by a load;
A connecting portion extending in a column shape along the extending direction from an end portion in a direction in which the elastic buckling portion extends and different from an end portion connected to the first contact portion;
An arm portion extending in a plate shape along the one direction from the connection portion;
A second contact part that protrudes in a direction perpendicular to the end face from the end face located farthest from the sharpened one end of the first contact part among the end face of the arm part;
A columnar portion projecting in a columnar shape in a direction perpendicular to the end surface from the end surface closest to the sharpened one end of the first contact portion of the end surface of the arm portion;
With
A plane parallel to the extending direction passing through the sharpened one end of the first contact portion, and a maximum width of the first contact portion in the direction among the widths of the elastic buckling portions in the one direction. A contact probe characterized by being different from a plane parallel to the extending direction through a midpoint of the width having the largest difference. The elastic buckling portion is
The contact probe according to claim 1, wherein a cross section including a width in the one direction has a concave shape on a side where the arm portion extends. The elastic buckling portion is
The contact probe according to claim 1, wherein a cross section including a width in the one direction has a concave shape on a side opposite to a side on which the arm portion extends. The columnar part is
The contact probe according to claim 1, wherein the contact probe is provided in the vicinity of a terminal end of the arm portion when a boundary between the arm portion and the connection portion is a starting end.   5. The contact probe according to claim 1, wherein a plane passing through a tip of the columnar portion and parallel to a direction in which the arm portion extends passes through the elastic buckling portion.   5. The contact probe according to claim 1, wherein a plane passing through a tip of the columnar part and parallel to a direction in which the arm part extends passes through the connection part. A plurality of contact probes according to any one of claims 1 to 6;
A plurality of first insertion holes each through which the connection portion is inserted, a plurality of holding portions each through which the columnar portion is inserted, and at least a flat plate-like first holder made of an insulating material;
Each having a plurality of holding portions that pass through the first contact portion, and at least a surface of the second holder made of an insulating material;
A probe unit comprising:   The distance between the surface of the first holder surface on which the arm portion is placed and the surface of the second holder that faces the first holder passes through the tip of the first contact portion, 8. The probe according to claim 7, wherein a distance between a plane parallel to the direction in which the arm portion extends and a plane passing through the tip of the columnar portion and parallel to the direction in which the arm portion extends is larger. unit.

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