CN111239447B

CN111239447B - Probe, inspection tool, inspection unit, and inspection apparatus

Info

Publication number: CN111239447B
Application number: CN202010200587.6A
Authority: CN
Inventors: 笹野直哉; 寺西宏真; 酒井贵浩; 崔时薰
Original assignee: Omron Corp
Current assignee: Omron Corp
Priority date: 2018-01-11
Filing date: 2018-01-11
Publication date: 2022-07-08
Anticipated expiration: 2038-01-11
Also published as: KR101903319B1; JPWO2019138505A1; KR102103370B1; KR20190141116A; WO2019138505A1; KR102058152B1; KR20190085830A; CN111033272B; CN111239447A; JP6908133B2; CN111033272A

Abstract

A probe, an inspection tool, an inspection unit, and an inspection apparatus. The probe has: an elastic portion that extends and contracts in the longitudinal direction; a plate-shaped first contact portion 1 connected to one end portion in the longitudinal direction of the elastic portion; and a plate-shaped 2 nd contact portion arranged in series with the 1 st contact portion and connected to the other end portion in the longitudinal direction of the elastic portion, the elastic portion being arranged so as to be arranged along an imaginary straight line extending in the longitudinal direction from the 2 nd contact portion and on the same side as the imaginary straight line, or arranged along the imaginary straight line with a part of the elastic portion positioned on the imaginary straight line, the elastic portion having a plurality of strip-shaped elastic pieces arranged with gaps therebetween, each of the plurality of strip-shaped elastic pieces having a linear portion extending in a direction intersecting the longitudinal direction, and one end portion in the extending direction of the linear portion being connected to the 2 nd contact portion, the linear portion being configured so as to be capable of coming into contact with the inside of the socket in the longitudinal direction when the probe is housed in the socket.

Description

Probe, inspection tool, inspection unit, and inspection apparatus

The present application is a divisional application of an invention patent application (application date: 2018, 1/11, entitled probe, inspection tool, inspection unit, and inspection apparatus) with a parent application number of 201880051883.5.

Technical Field

The present invention relates to a probe, an inspection tool having the probe, an inspection unit having the inspection tool, and an inspection apparatus having the inspection unit.

Background

In electronic component modules such as cameras and liquid crystal panels, conduction inspection, operation characteristic inspection, and the like are generally performed in the manufacturing process thereof. These inspections are performed by connecting electrode portions such as FPC contact electrodes for connection to a main substrate provided in an electronic component module or a mounted substrate-to-substrate connector to an inspection apparatus using probes.

As such a probe, for example, there is a probe described in patent document 1. The probe has a pair of contacts which can be brought into contact with electrode terminals of an electronic component and electrode terminals of a connected electronic component, respectively, and a meandering portion which is interposed between the pair of contacts and connects the pair of contacts. In the probe, the contact pressure between each contact and the electrode terminal of the electronic component and the electrode terminal of the connected electronic component is ensured by the meandering part, and the contact reliability of the electrode terminal of the electronic component and the electrode terminal of the connected electronic component is improved.

Documents of the prior art

Patent literature

Patent document 1: japanese patent laid-open publication No. 2002-134202

Disclosure of Invention

Problems to be solved by the invention

In recent years, with an increase in the amount of information transmitted and received between electronic component modules, it has been required that probes used for inspection of the electronic component modules also cope with signals in a high frequency region.

However, the probe of patent document 1 cannot necessarily sufficiently cope with a signal in a high frequency range, and a loss of a signal flowing through the high frequency range of the probe may be large at the time of inspection of an electronic component module.

An object of the present invention is to provide a probe capable of reducing loss of a signal in a high frequency region while securing contact reliability with respect to an inspection object and an inspection apparatus, an inspection tool having the probe, an inspection unit having the inspection tool, and an inspection apparatus having the inspection unit.

Means for solving the problems

A probe according to an embodiment of the present invention includes: an elastic portion that extends and contracts in the longitudinal direction; a plate-shaped 1 st contact portion connected to a 1 st end portion in the longitudinal direction of the elastic portion; and a plate-shaped 2 nd contact portion arranged in series with respect to the 1 st contact portion and connected to a 2 nd end portion in the longitudinal direction of the elastic portion, the elastic portion including: a 1 st straight line portion extending in a direction intersecting the longitudinal direction, and one end portion in the extending direction of the 1 st straight line portion being connected to the 1 st contact portion; a curved portion extending in an arc shape, the arc shape protruding in a direction intersecting the longitudinal direction and away from the 1 st contact portion, and one end portion in an extending direction of the curved portion being connected to the other end portion in the extending direction of the 1 st linear portion; and a 2 nd linear portion extending in a direction intersecting the longitudinal direction, one end portion in the extending direction of the 2 nd linear portion being connected to the other end portion in the extending direction of the bent portion, and a central angle of the bent portion being greater than 90 degrees and smaller than 180 degrees.

An inspection tool according to an example of the present invention includes: the probe; and a housing having a housing portion capable of housing the probe, the probe being housed in the housing portion such that a central angle of the bending portion is larger than 90 degrees and smaller than 180 degrees.

The inspection unit according to an example of the present invention includes at least one inspection tool.

The inspection apparatus according to an example of the present invention includes at least one inspection unit.

Effects of the invention

According to the probe, the elastic part has: a 1 st straight line part extending in a direction intersecting with a longitudinal direction of the probe, one end part in the extending direction being connected to the 1 st contact part; a curved portion extending in an arc shape, the arc shape protruding in a direction intersecting with a longitudinal direction of the probe and away from the 1 st contact portion, one end portion in an extending direction being connected to the other end portion in the extending direction of the 1 st straight portion; and a 2 nd straight portion extending in a direction intersecting the longitudinal direction of the probe, one end portion in the extending direction being connected to the other end portion in the extending direction of the bent portion, and the central angle of the bent portion being greater than 90 degrees and less than 180 degrees. Accordingly, since a distance can be provided in the longitudinal direction of the probe between the 1 st and 2 nd linear portions, for example, interference of a signal flowing through the 1 st linear portion in a high-frequency region with a signal flowing through the 2 nd linear portion in a high-frequency region can be reduced. As a result, a probe capable of reducing signal loss in a high-frequency region while ensuring contact reliability between the inspection object and the inspection apparatus can be realized.

Further, according to the inspection tool, the probe has high contact reliability with respect to the inspection object and the inspection device, and the inspection tool with less loss of signals in a high frequency range when connected to the inspection object and the inspection device can be realized.

Further, according to the inspection unit, the inspection tool has high contact reliability with respect to the inspection object and the inspection apparatus, and the inspection unit having less loss of signals in a high frequency range when connected to the inspection object and the inspection apparatus can be realized.

Further, according to the inspection apparatus, the inspection unit has high reliability of contact between the inspection object and the inspection apparatus, and the inspection apparatus with less loss of signals in a high frequency range when connected to the inspection object and the inspection apparatus can be realized.

Drawings

Fig. 1 is a sectional perspective view showing an inspection unit of an embodiment of the present invention.

Fig. 2 is a sectional view taken along line II-II of fig. 1.

Fig. 3 is a perspective view showing a probe according to an embodiment of the present invention.

Fig. 4 is a plan view of the probe of fig. 3.

Fig. 5 is an enlarged plan view of the spring portion of the probe of fig. 3.

Fig. 6 is a graph showing measurement results of insertion loss and return loss using a probe of a comparative example.

Fig. 7 is a graph showing measurement results of insertion loss and return loss using the probe of the example.

Fig. 8 is an enlarged plan view showing the elastic portion of the 1 st modification of the probe of fig. 3.

Fig. 9 is a plan view showing a 2 nd modification of the probe of fig. 3.

Description of the reference symbols

1 inspection Unit

2 inspection tool

3 socket

4 basic shell

5 the 1 st housing

6 nd 2 casing

7 receiving part

10 Probe

11 elastic part

111 st end part 1

112 2 nd end

12 st contact part

121 st contact part

13 nd contact part 2

131 nd 2 nd contact part

132 through hole portion

133. 134 foot

21. 22, 24, 25 strip-shaped elastic sheet

211. 221 st end part

212. 222 nd end part 2

23 gap

31. 32 1 st straight line part

41. 42 st bend

51. 52 nd 2 nd straight line part

61. 62 nd 2 bent part

71. 72 No. 3 straight line part

81. 82 3 rd bend

91. 92 th straight line part

100 substrate

110 inspection object

120 terminal

Central angle theta 1, theta 2, theta 3

L1, L2 straight line

W1, W2 Width

W3 shortest distance

Detailed Description

An example of the present invention will be described below with reference to the drawings. In the following description, terms indicating specific directions or positions (for example, terms including "up", "down", "right" and "left") are used as necessary, but these terms are used for the purpose of facilitating understanding of the present invention with reference to the drawings, and the technical scope of the present invention is not limited by the meaning of these terms. The following description is merely exemplary in nature and is not intended to limit the present invention, the application of the present invention, or the use of the present invention. Further, the drawings are schematic, and ratios of the respective dimensions and the like do not necessarily coincide with actual cases.

The probe 10 according to one embodiment of the present invention has conductivity, and is used in a state of being housed in the socket 3 as shown in fig. 1 and 2, for example, and constitutes the inspection tool 2 together with the socket 3. As an example, a plurality of elongated thin plate-like probes 10 are housed in the inspection tool 2.

Furthermore, the inspection tool 2 forms part of the inspection unit 1. As shown in fig. 1, the inspection unit 1 includes a substantially rectangular parallelepiped base housing 4 in which a plurality of inspection tools 2 are incorporated, as an example. The base case 4 is composed of a 1 st case 5 having a substantially rectangular plate shape, and a 2 nd case 6 stacked in the plate thickness direction of the 1 st case 5.

As shown in fig. 2, the socket 3 has a plurality of receiving portions 7 capable of receiving the probes 10, and is held by the 1 st case 5 and the 2 nd case 6. Each of the housing portions 7 is configured to be surrounded by the socket 3 and the 2 nd case 6 of the base case 4, and can house each of the probes 10 in a state where the 1 st contact portion 121 and the 2 nd contact portion 131, which will be described later, are exposed to the outside of the socket 3 and the base case 4, respectively.

As shown in fig. 2, the 1 st contact portion 121 is configured to be contactable with a terminal of a substrate (for example, a PCB pad) 100 provided in the inspection apparatus, as an example. In addition, the 2 nd contact 131 is configured to be able to contact the terminal 120 of the inspection object (for example, a substrate-to-substrate (BtoB) connector) 110, as an example.

As shown in fig. 3, each probe 10 has: an elastic portion 11 that extends and contracts along the longitudinal direction of the probe 10 (i.e., the vertical direction in fig. 3); a plate-shaped 1 st contact portion 12 connected to the 1 st end 111 in the longitudinal direction of the elastic portion 11; and a plate-shaped 2 nd contact portion 13 connected to the 2 nd end portion 112 in the longitudinal direction of the elastic portion 11. In the probe 10, the elastic portion 11, the 1 st contact portion 12, and the 2 nd contact portion 13 are integrally formed by, for example, electroforming.

As shown in fig. 4, the elastic portion 11 has a meandering shape as viewed in the plate thickness direction of the 1 st contact portion 12 (i.e., the direction in which the sheet of fig. 4 penetrates), and has a plurality of band-shaped elastic pieces (2 band-shaped elastic pieces in this embodiment) 21, 22 arranged with a gap 23 therebetween. Each of the elastic band-shaped

pieces

21 and 22 has an elongated band shape, and is connected to the 1 st contact portion 12 at the 1 st end portion 211 which is one end portion in the longitudinal direction of the probe 10, and is connected to the 2 nd contact portion 13 at the 2 nd end portion 212 which is the other end portion in the longitudinal direction of the probe 10.

Specifically, as shown in fig. 5, each of the band-shaped

elastic pieces

21 and 22 has 4 band-shaped linear portions (i.e., the 1 st

linear portions

31 and 32, the 2 nd

linear portions

51 and 52, the 3 rd

linear portions

71 and 72, and the 4 th linear portions 91 and 92) and 3 band-shaped curved portions (i.e., the 1 st

curved portions

41 and 42, the 2 nd curved

portions

61 and 62, and the 3 rd curved portions 81 and 82).

The 1 st

linear portions

31 and 32 extend in a direction (for example, a vertical direction) intersecting the longitudinal direction of the probe 10, and one end portion in the extending direction thereof is connected to the 1 st contact portion 12, thereby constituting the 1

st end portions

211 and 221. The 1 st

linear portions

31 and 32 are connected to the 1 st contact portion 12 from a direction (e.g., a direction perpendicular) intersecting the longitudinal direction of the probe 10.

The 1 st

bent portions

41 and 42 protrude in a direction intersecting the longitudinal direction of the probe 10 and in a direction away from the 1 st contact portion 12, and extend along an arc for a center angle θ 1 greater than 90 degrees and less than 180 degrees. Further, one end portions in the extending direction of the 1 st

bent portions

41 and 42 are connected to the other end portions in the extending direction of the 1 st

straight portions

31 and 32.

The 2 nd

linear portions

51 and 52 extend in a direction intersecting the longitudinal direction of the probe 10, and one end portion in the extending direction thereof is connected to the other end portion in the extending direction of the 1 st

bent portions

41 and 42. The 2 nd

linear portions

51 and 52 extend from one end portion in the extending direction thereof toward the other end portion (i.e., away from the 1 st bent portions 41 and 42) in a direction away from the 1 st

linear portions

31 and 32 in the longitudinal direction of the probe 10.

The 2 nd bent

portions

61 and 62 protrude in a direction intersecting the longitudinal direction of the probe 10 and in a direction approaching the 1 st contact portion 12, and extend along an arc for a central angle θ 2 greater than 90 degrees and less than 180 degrees. Further, one end portions in the extending direction of the 2 nd bent

portions

61 and 62 are connected to the other end portions in the extending direction of the 2 nd

linear portions

51 and 52.

The 3 rd

linear portions

71, 72 extend in a direction intersecting the longitudinal direction of the probe 10, and one end portion in the extending direction thereof is connected to the other end portion in the extending direction of the 2 nd bent

portions

61, 62. The 3 rd

linear portions

71 and 72 extend from one end portion in the extending direction thereof toward the other end portion (i.e., away from the 2 nd bent portions 61 and 62), and extend in a direction away from the 2 nd

linear portions

51 and 52 in the longitudinal direction of the probe 10.

The 3 rd bent

portions

81 and 82 protrude in a direction crossing the longitudinal direction of the probe 10 and away from the 1 st contact portion 12, and extend along an arc for a central angle θ 3 greater than 90 degrees and less than 180 degrees. Further, one end portions in the extending direction of the 3 rd bent

portions

81 and 82 are connected to the other end portions in the extending direction of the 3 rd

linear portions

71 and 72.

The 4 th

linear portions

91 and 92 extend in a direction (for example, a vertical direction) intersecting the longitudinal direction of the probe 10, and one end portions in the extending direction thereof are connected to the other end portions in the extending direction of the 3 rd bent

portions

81 and 82. The 4 th

linear portions

91 and 92 extend in a direction away from the 3 rd

linear portions

71 and 72 in the longitudinal direction of the probe 10 as they extend from one end portion to the other end portion (i.e., as they extend away from the 3 rd bent portions 81 and 82). Further, the other end portions in the extending direction of the 4 th

linear portions

91 and 92 are connected to the 2 nd contact portion 13 to constitute the 2

nd end portions

212 and 222. The 4 th

linear portions

91 and 92 are connected to the 2 nd contact portion 13 from the longitudinal direction of the probe 10.

In the probe 10, the 1 st

linear portions

31 and 32 and the 4 th

linear portions

91 and 92 are arranged symmetrically with respect to a straight line L1 passing through the centers of curvature of the 2 nd bent

portions

61 and 62 and extending in a direction perpendicular to the longitudinal direction of the probe 10. The 2 nd

linear portions

51 and 52 and the 3 rd

linear portions

71 and 72 are symmetrically arranged with respect to the line L1, and the 1 st

bent portions

41 and 42 and the 3 rd bent

portions

81 and 82 are symmetrically arranged with respect to the line L1.

The widths W1, W2 of the belt-shaped elastic pieces 21, 22 (i.e., the lengths of the belt-shaped

elastic pieces

21, 22 in the width direction perpendicular to the extending direction of the path between the 1

st end portions

211, 221 and the 2 nd end portions 212, 222) are configured to be smaller than the shortest distance W3 between the adjacent belt-shaped

elastic pieces

21, 22. In fig. 5, a straight distance between the 1 st

bent portions

41 and 42 is represented as a shortest distance W5, for example.

As shown in fig. 4, the 1 st contact portion 12 extends along the longitudinal direction of the probe 10, and one end portion in the extending direction thereof is connected to the 1 st end portion 111 of the elastic portion 11. The 1 st contact portion 121 is provided at the other end portion in the extending direction of the 1 st contact portion 12. As shown in fig. 4, the 2 nd contact portion 13 extends along the longitudinal direction of the probe 10, and one end portion in the extending direction thereof is connected to the 2 nd end portion 112 of the elastic portion 11. The 2 nd contact portion 131 is provided at the other end portion in the extending direction of the 2 nd contact portion 13.

The 1 st contact 12 and the 2 nd contact 13 are arranged in series along a virtual straight line L2, and the virtual straight line L2 extends in the longitudinal direction of the probe 10. That is, as shown in fig. 5, the

linear portions

31, 32, 51, 52, 71, 72, 91, 92, the 1 st

bent portions

41, 42, and the 3 rd bent

portions

81, 82 of the elastic portion 11 are arranged on the same side (i.e., on one side in the width direction of the 1 st contact portion 12) as the virtual straight line L2, and the 2 nd bent

portions

61, 62 are arranged in series along the virtual straight line L2 between the 1 st contact portion 12 and the 2 nd contact portion 13.

As shown in fig. 4, a support portion 122 is provided on one side in the width direction of the intermediate portion in the extending direction of the 1 st contact portion 12. The support portion 122 protrudes from the 1 st contact portion 12 toward the 1 st

straight portions

31 and 32 with respect to the virtual straight line L2 in a direction (for example, a vertical direction) intersecting the longitudinal direction of the probe 10 as viewed from the plate thickness direction of the 1 st contact portion 12.

As shown in fig. 2, when the probe 10 is housed in the housing portion 7 of the socket 3, the support portion 122 of the 1 st contact portion 12 is configured such that the surface of the 1 st contact portion 121 side in the longitudinal direction of the probe 10 abuts against the surface of the 2 nd housing 6 facing the 1 st housing 5 constituting the housing portion 7. The probe 10 is configured such that the surface of the probe in the longitudinal direction on the 2 nd contact 131 side, that is, the 4 th straight portion 91 of the elastic band-like piece 21 abuts against the surface of the socket 3 constituting the housing portion 7 facing the 2 nd housing 6. That is, the probe 10 is supported inside the housing 7 by the support portion 122 of the 1 st contact portion 12 and the 4 th linear portion 91 of the elastic band-like piece 21.

The central angles θ 1, θ 2, and θ 3 of the respective

bent portions

41, 42, 61, 62, 81, and 82 are also configured to be larger than 90 degrees and smaller than 180 degrees in a state of being accommodated in the accommodating portion 7 of the receptacle 3.

The support portion 122 of the 1 st contact portion 12 may be omitted, and the 1 st linear portion 31 of the belt-like elastic piece 21 may be configured to abut against the surface of the 2 nd housing 6 facing the 1 st housing 5. That is, the probe 10 may be supported inside the housing 7 by the 1 st linear portion 31 and the 4 th linear portion 91 of the belt-like elastic piece 21.

As shown in fig. 4, a through hole 132 penetrating the 2 nd contact portion 13 in the plate thickness direction is provided in the end portion of the 2 nd contact portion 13 on the elastic portion 11 side in the longitudinal direction of the probe 10. The through hole 132 extends in the longitudinal direction of the probe 10 and is connected to the gap 23 between the belt-like

elastic pieces

21 and 22. The stress generated in the 2 nd contact portion 13 is dispersed by the through hole portion 132.

However, when the central angle θ 1 of the 1

st bending portions

41 and 42 is 90 degrees or less, the 1 st contact portion 12 and the 2 nd contact portion 13 cannot be arranged in series, and it is difficult to obtain the elastic portion 11 having an elastic force capable of securing contact reliability with respect to the inspection object and the inspection apparatus.

Further, when the center angle θ 1 of the 1 st

bent portions

41, 42 is 180 degrees or more, a sufficient distance cannot be provided between the 1 st

straight portions

31, 32 and the 2 nd

straight portions

51, 52, and therefore, for example, a signal flowing through the 1 st

straight portions

31, 32 in a high frequency range and a signal flowing through the 2 nd

straight portions

51, 52 interfere with each other, and it is difficult to reduce loss of the signal in the high frequency range.

In contrast, in the probe 10, the elastic portion 11 includes: 1 st

linear portions

31 and 32 extending in a direction intersecting the longitudinal direction of the probe 10, one end 111 in the extending direction being connected to the 1 st contact portion 12; 1 st

bent portions

41 and 42 extending in an arc shape protruding in a direction intersecting the longitudinal direction of the probe 10 and away from the 1 st contact portion 12, one end portion in the extending direction being connected to the other end portion in the extending direction of the 1 st

straight portions

31 and 32; and 2 nd

linear portions

51 and 52 extending in a direction intersecting the longitudinal direction of the probe 10, one end portion in the extending direction being connected to the other end portion in the extending direction of the 1 st

bent portions

41 and 42, and a central angle θ 1 of the 1 st

bent portions

41 and 42 being greater than 90 degrees and smaller than 180 degrees. Accordingly, since the distance can be provided in the longitudinal direction of the probe 10 between the 1 st

linear parts

31 and 32 and the 2 nd

linear parts

51 and 52, for example, interference of the signal flowing through the 1 st

linear parts

31 and 32 in the high frequency region with the signal flowing through the 2 nd

linear parts

51 and 52 in the high frequency region can be reduced. As a result, the probe 10 can be realized that can ensure contact reliability with respect to the inspection object and the inspection apparatus and can reduce signal loss in a high frequency region.

Here, the insertion loss and the return loss were measured for the probe 10 in which all of the center angles θ 1, θ 2, and θ 3 of the

respective bending portions

41, 42, 61, 62, 81, and 82 were 180 degrees (hereinafter referred to as a probe of a comparative example) and the probe 10 in which all of the center angles θ 1, θ 2, and θ 3 of the

respective bending portions

41, 42, 61, 62, 81, and 82 were 150 degrees (hereinafter referred to as a probe of an example).

As shown in FIG. 6, in the probe of the comparative example, an insertion loss of-1 dB was generated with respect to a signal at 14.28Gbps, and a return loss of-10 dB was generated with respect to a signal at 13.40 Gbps. On the other hand, as shown in FIG. 7, in the probe of the embodiment, an insertion loss of-1 dB is generated with respect to a signal of 30.60Gbps, and a return loss of-10 dB is generated with respect to a signal of 30.24 Gbps. That is, by configuring the probe 10 such that the central angle θ 1 of the 1 st

bent portions

41 and 42 is larger than 90 degrees and smaller than 180 degrees, the loss of the signal in the high frequency region can be reduced.

Further, according to the probe pin 10, the elastic portion 11 is formed of a plurality of belt-like elastic pieces arranged with the gap 23 therebetween, and the widths W1, W2 of the respective belt-like

elastic pieces

21, 22 are configured to be smaller than the shortest distance W3 between the adjacent belt-like

elastic pieces

21, 22. Thus, for example, even when the 1 st contact portion 121 and the 2 nd contact portion 131 come into contact with the inspection object and the inspection device, respectively, and the respective strip-shaped

elastic pieces

21 and 22 are compressed in the longitudinal direction of the probe 10, the contact between the respective strip-shaped

elastic pieces

21 and 22 can be prevented, and the probe 10 that can ensure high contact reliability can be realized.

Further, according to the inspection tool 2, the probe 10 has high contact reliability with respect to the inspection object and the inspection device, and the inspection tool 2 with less loss of signals in a high frequency range when connected to the inspection object and the inspection device can be realized.

Further, according to the inspection unit 1, the inspection tool 2 has high contact reliability with respect to the inspection object and the inspection apparatus, and the inspection unit 1 having less loss of signals in a high frequency range when connected to the inspection object and the inspection apparatus can be realized.

In addition, the inspection unit 1 can constitute a part of an inspection apparatus. According to this inspection apparatus, the inspection unit 1 has high contact reliability with respect to the inspection object and the inspection apparatus, and can realize an inspection apparatus with less loss of signals in a high frequency range when connected to the inspection object and the inspection apparatus.

The elastic portion 11 includes the 1 st

linear portions

31 and 32, the 1 st

bent portions

41 and 42, and the 2 nd

linear portions

51 and 52, and the central angle of the 1 st

bent portions

41 and 42 may be larger than 90 degrees and smaller than 180 degrees.

For example, as shown in fig. 8, the elastic portion 11 may be formed only of the 1 st

linear portions

31 and 32, the 1 st

bent portions

41 and 42, and the 2 nd

linear portions

51 and 52.

The elastic portion 11 is not limited to the case of having 2 band-shaped

elastic pieces

21 and 22 arranged with the gap 23 therebetween. For example, as shown in fig. 9, the elastic portion 11 may have 4 band-shaped

elastic pieces

21, 22, 24, and 25 arranged with a gap therebetween, and although not shown, may have 1 band-shaped elastic piece.

The widths W1, W2 of the belt-shaped

elastic pieces

21, 22 are not limited to be smaller than the shortest distance W3 between the adjacent belt-shaped

elastic pieces

21, 22, and may be larger than the shortest distance W3.

The 1 st contact portion 12 and the 2 nd contact portion 13 can be appropriately changed in shape or the like according to the design or the like of the probe 10. For example, as shown in fig. 9, the 2 nd contact part 13 may be provided at the distal end parts of a pair of

leg parts

133 and 134 extending in the longitudinal direction of the probe 10. That is, the 1 st contact portion 121 and the 2 nd contact portion 131 can be appropriately changed in shape, position, and the like according to various forms of the inspection apparatus or the inspection object.

The structure of the inspection tool 2 and the base housing 4 can be appropriately changed according to various types of inspection devices and inspection objects. That is, the inspection tool 2 and the base housing 4 are made common, and the productivity of the inspection unit 1 (or the inspection apparatus) can be improved.

Various embodiments of the present invention have been described in detail with reference to the drawings, but various embodiments of the present invention will be described last. In the following description, reference numerals are added to the description as an example.

The probe 10 according to embodiment 1 of the present invention includes: an elastic portion 11 that extends and contracts in the longitudinal direction; a plate-shaped 1 st contact portion 12 connected to the 1 st end 111 in the longitudinal direction of the elastic portion 11; and a plate-shaped 2 nd contact portion 13 arranged in series with respect to the 1 st contact portion 12 and connected to the 2 nd end portion 112 in the longitudinal direction of the elastic portion 11, the elastic portion 11 including: a 1 st straight line portion 31 extending in a direction intersecting the longitudinal direction, and one end portion in the extending direction of the 1 st straight line portion 31 being connected to the 1 st contact portion; a curved portion 41 extending in an arc shape protruding in a direction intersecting the longitudinal direction and away from the 1 st contact portion 12, and having one end in the extending direction of the curved portion 41 connected to the other end in the extending direction of the 1 st straight portion 31; and a 2 nd straight portion 51 extending in a direction intersecting the longitudinal direction, one end portion in the extending direction of the 2 nd straight portion 51 being connected to the other end portion in the extending direction of the bent portion 41, and a central angle θ 1 of the bent portion 41 being greater than 90 degrees and smaller than 180 degrees.

The probe 10 according to the first aspect. Since a distance can be provided in the longitudinal direction of the probe 10 between the 1 st linear portion 31 and the 2 nd linear portion 51, for example, interference of a signal flowing through the 1 st linear portion 31 in a high frequency region with a signal flowing through the 2 nd linear portion 51 in a high frequency region can be reduced. As a result, the probe 10 can be realized that can ensure contact reliability with respect to the inspection object and the inspection apparatus and can reduce signal loss in a high frequency region.

In the probe 10 according to the 2 nd aspect of the present invention, the elastic portion 11 is formed of a plurality of belt-shaped

elastic pieces

21 and 22 arranged with a gap 23 therebetween, and the widths W1 and W2 of the plurality of belt-shaped

elastic pieces

21 and 22 are smaller than the shortest distance W3 between the plurality of adjacent belt-shaped

elastic pieces

21 and 22.

According to the probe 10 of the second aspect, for example, even when the 1 st contact point 121 and the 2 nd contact point 131 come into contact with the inspection object and the inspection device, respectively, and the strip-shaped

elastic pieces

21 and 22 are compressed in the longitudinal direction of the probe 10, the contact between the strip-shaped

elastic pieces

21 and 22 can be prevented, and the probe 10 capable of ensuring high contact reliability can be realized.

An inspection tool 2 according to embodiment 3 of the present invention includes: the probe 10; and a socket 3 having a housing 7 capable of housing the probe 10, wherein the probe 10 is housed in the housing 7 such that a central angle of the bending portion 41 is larger than 90 degrees and smaller than 180 degrees.

According to the inspection tool 2 of the embodiment 3, the probe 10 has high contact reliability with respect to the inspection object and the inspection device, and the inspection tool 2 with less loss of signals in a high frequency range when connected to the inspection object and the inspection device can be realized.

The inspection unit 1 according to claim 4 of the present invention includes at least one inspection tool.

According to the inspection unit 1 of the 4 th aspect, the inspection tool 2 has high reliability of contact between the inspection object and the inspection apparatus, and the inspection unit 1 with less loss of signals in a high frequency range when connected to the inspection object and the inspection apparatus can be realized.

The inspection apparatus according to claim 5 of the present invention includes at least one inspection unit 1.

According to the inspection apparatus of the 5 th aspect, the inspection unit 1 has high contact reliability with respect to the inspection object and the inspection apparatus, and can realize an inspection apparatus with less loss of signals in a high frequency range when connected to the inspection object and the inspection apparatus.

In addition, any of the various embodiments or modifications described above can be appropriately combined to exhibit the respective effects. Further, combinations of the embodiments or examples or combinations of the embodiments and examples can be made, and combinations of features in different embodiments or examples can also be made.

Industrial applicability

The probe of the present invention can be applied to an inspection tool used for inspecting a liquid crystal panel, for example.

The inspection tool of the present invention can be applied to an inspection unit used for inspecting a liquid crystal panel, for example.

The inspection unit of the present invention can be applied to, for example, an inspection device for a liquid crystal panel.

The inspection apparatus of the present invention can be used for inspecting a liquid crystal panel, for example.

Claims

1. A probe, the probe having:

an elastic portion that extends and contracts in the longitudinal direction;

a plate-shaped first contact portion 1 connected to one end portion of the elastic portion in the longitudinal direction; and

a plate-shaped 2 nd contact portion arranged in series with the 1 st contact portion and connected to the other end portion in the longitudinal direction of the elastic portion,

the elastic part has a plurality of band-shaped elastic pieces arranged with a gap therebetween,

the plurality of belt-like elastic pieces each have:

a 1 st straight line portion extending in a direction intersecting the longitudinal direction, and one end portion in the extending direction of the 1 st straight line portion being connected to the 1 st contact portion;

a 2 nd linear portion extending in a direction intersecting the longitudinal direction, and one end portion in an extending direction of the 2 nd linear portion being connected to the 2 nd contact portion; and

a curved portion located between the 1 st linear portion and the 2 nd linear portion in the longitudinal direction,

the 1 st contact portion and the 2 nd contact portion are provided on the same side of the 1 st straight line portion and the 2 nd straight line portion in a direction intersecting the longitudinal direction,

the 2 nd straight line portion closest to the 2 nd contact portion among the 2 nd straight line portions is configured to be capable of abutting against an inside of the socket in the longitudinal direction when the probe is housed in the socket,

the 1 st straight line portion closest to the 1 st contact portion among the 1 st straight line portions is configured to be capable of abutting against an inside of the socket in the longitudinal direction when the probe is accommodated in the socket,

the width of each of the plurality of strip-shaped elastic pieces is configured to be smaller than the shortest distance between adjacent strip-shaped elastic pieces, and when the probe is compressed in the longitudinal direction in a state where the probe is accommodated in the socket and the 1 st linear portion and the 2 nd linear portion are in contact with the inside of the socket in the longitudinal direction, the plurality of strip-shaped elastic pieces do not contact each other.

2. The probe according to claim 1, wherein,

one end in the extending direction of the 2 nd linear portion is connected to the 2 nd contact portion in a curved manner from the longitudinal direction.

3. The probe according to claim 1, wherein,

the 1 st straight line portion is connected to the 1 st contact portion from a direction intersecting the longitudinal direction.

4. An inspection tool, comprising:

the probe of any one of claims 1 to 3; and

a socket having a receiving portion capable of receiving the probe,

the inspection tool is configured such that, when the probe is housed in the socket, the 2 nd straight line portion closest to the 2 nd contact portion among the 2 nd straight line portions abuts against an inner surface of the socket in the longitudinal direction.

5. The inspection tool of claim 4,

the width of each of the 2 nd straight portions is configured to be smaller than the shortest distance between the adjacent 2 nd straight portions in a state where the 1 st straight portion and the 2 nd straight portion are in contact with the inside of the socket in the longitudinal direction, and the plurality of belt-like elastic pieces are not in contact with each other when the probe is compressed in the longitudinal direction.

6. An inspection unit having at least one inspection tool as claimed in claim 5.

7. An inspection apparatus having at least one inspection unit as claimed in claim 6.