CN113631932A

CN113631932A - Probe, inspection tool, and inspection unit

Info

Publication number: CN113631932A
Application number: CN202080025778.1A
Authority: CN
Inventors: 笹野直哉; 寺西宏真; 酒井贵浩
Original assignee: Omron Corp
Current assignee: Omron Corp
Priority date: 2019-04-25
Filing date: 2020-03-19
Publication date: 2021-11-09
Anticipated expiration: 2040-03-19
Also published as: JP2020180888A; WO2020217804A1; KR102648231B1; JP7318297B2; KR20210129706A; TW202041866A; CN113631932B; TWI756653B; JP2023145556A

Abstract

The probe has: an elastic portion capable of elastic deformation along the 1 st direction; a 1 st contact portion provided at one end of the elastic portion in a 1 st direction; and a 2 nd contact portion provided at the other end of the elastic portion in the 1 st direction. The 1 st contact portion has a plurality of contact portions which are arranged apart from a center line of the elastic portion in a 2 nd direction intersecting the 1 st direction and are arranged at intervals along the 2 nd direction. The plurality of contact portions are respectively arranged to be distant from the elastic portion in the 1 st direction as being distant from the center line in the 2 nd direction.

Description

Probe, inspection tool, and inspection unit

Technical Field

The invention relates to a probe, an inspection tool and an inspection unit.

Background

In an electronic component module such as a camera or a liquid crystal panel, a conduction test, an operation characteristic test, and the like are generally performed in a manufacturing process thereof. These inspections are performed by connecting terminals for connection to a main body substrate provided in an electronic component module and terminals of an inspection apparatus using probes.

As such a probe, there is a probe described in patent document 1. The probe has: a pair of contacts which can be brought into contact with the electrode terminals of the electronic component and the electrode terminals of the connected electronic component, respectively; and a meandering portion which is interposed between the pair of contacts and connects the pair of contacts.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2002-134202

Disclosure of Invention

Problems to be solved by the invention

In the probe described above, each contact is configured to contact the electrode terminal at 1 point, and therefore, for example, when a nonconductive foreign substance adheres to the tip of each contact, a conduction failure occurs between the probe and the electrode terminal due to the foreign substance, and the contact reliability may be reduced.

The invention aims to provide a probe with high contact reliability, an inspection tool with the probe and an inspection unit with the inspection tool.

Means for solving the problems

A probe according to an embodiment of the present invention includes: an elastic portion capable of elastic deformation along the 1 st direction; a 1 st contact portion provided at one end of the elastic portion in the 1 st direction; and a 2 nd contact portion provided at the other end of the elastic portion in the 1 st direction, the 1 st contact portion having a plurality of contact portions arranged separately from a center line passing through a center of the elastic portion in the 2 nd direction and extending in the 1 st direction and arranged at intervals along a 2 nd direction intersecting the 1 st direction, the plurality of contact portions being arranged so as to be apart from the elastic portion in the 1 st direction as being apart from the center line in the 2 nd direction.

An inspection tool according to an example of the present invention includes: the probe; and a housing that houses the probe therein, the probe being housed in a state that: the elastic portion is elastically deformed so that the 1 st contact portion and the 2 nd contact portion approach each other in the 1 st direction, and each of the plurality of contact portions is capable of simultaneously contacting an inspection object extending in the 2 nd direction or a connection terminal of an inspection apparatus.

In addition, an inspection unit according to an example of the present invention includes at least 1 inspection tool.

Effects of the invention

According to the probe, it has: an elastic portion capable of elastic deformation along the 1 st direction; a 1 st contact portion provided at one end of the elastic portion in a 1 st direction; and a 2 nd contact portion provided at the other end of the elastic portion in the 1 st direction. The 1 st contact portion has a plurality of contact portions arranged apart from a center line passing through a center of the elastic portion in the 2 nd direction and extending in the 1 st direction, and arranged at intervals in the 2 nd direction intersecting the 1 st direction. Each of the contact portions is disposed so as to be apart from the elastic portion in the 1 st direction as being apart from the center line in the 2 nd direction. According to this configuration, for example, when the probe is compressed so that the 1 st contact portion and the 2 nd contact portion approach each other in the 1 st direction, each contact portion can be simultaneously brought into contact with a contact object (for example, an inspection object or an inspection apparatus). That is, even if a nonconductive foreign substance adheres to any one of the plurality of contact portions, it is possible to avoid a conduction failure between the probe and the object to be contacted. As a result, a probe having high contact reliability can be realized.

According to the inspection tool, the probe can realize an inspection tool with high contact reliability.

According to the inspection unit, the inspection tool can realize an inspection unit with high contact reliability.

Drawings

Fig. 1 is a perspective view showing a probe according to an embodiment of the present invention.

Fig. 2 is a cross-sectional view of an inspection tool having the probe of fig. 1.

Fig. 3 is an enlarged plan view illustrating a 1 st contact portion of the probe of fig. 1.

Fig. 4 is a cross-sectional view of the inspection tool of fig. 2 for explaining the operation of the probe of fig. 1.

Fig. 5 is a plan view showing a 1 st modification of the probe of fig. 1.

Fig. 6 is a plan view showing a 2 nd modification of the probe of fig. 1.

Fig. 7 is a plan view showing a 3 rd modification of the probe of fig. 1.

Fig. 8 is a plan view showing a 4 th modification of the probe of fig. 1.

Fig. 9 is a plan view showing a 5 th modification of the probe of fig. 1.

Fig. 10 is a plan view showing a 6 th modification of the probe of fig. 1.

Detailed Description

An example of the present invention will be described below with reference to the drawings. In the following description, terms indicating specific directions or positions (for example, terms including "up", "down", "right" and "left") are used as necessary, but these terms are used for the purpose of facilitating understanding of the present invention with reference to the drawings, and the technical scope of the present invention is not limited by the meanings of these terms. The following description is merely exemplary in nature and is not intended to limit the present invention, its applications, or uses. Further, the drawings are schematic, and the ratio of the dimensions and the like do not necessarily match the actual situation.

As an example, as shown in fig. 1, the probe according to one embodiment of the present invention is in the form of an elongated thin plate, has conductivity, and is used in a state of being housed in an insulating housing 100 as shown in fig. 2, and constitutes an inspection tool 2 together with the housing 100. As an example, a plurality of probes 10 are housed in the inspection tool 2.

Furthermore, the inspection tool 2 can form part of the inspection unit 1. For example, as shown in fig. 2, when the inspection unit 1 is configured by a pair of inspection tools 2, each inspection tool 2 is disposed so that each contact portion of a probe 10 described later is adjacent to the 2 nd direction Y intersecting (e.g., orthogonal to) the 1 st direction X in which the probe 10 extends.

As shown in fig. 2, each housing 100 has a plurality of receiving portions 101 (only 1 shown in fig. 2) therein. Each of the receiving portions 101 has a slit shape, and is configured to be able to electrically and independently receive and hold 1 probe 10. The storage units 101 are arranged in a line along a direction intersecting the 1 st direction X and the 2 nd direction Y (i.e., a paper surface penetrating direction in fig. 2), and are arranged at equal intervals.

As shown in fig. 1 and 2, each probe 10 includes: an elastic portion 20 elastically deformable in the 1 st direction X; and a 1 st contact portion 30 and a 2 nd contact portion 50 respectively provided at both ends of the elastic portion 20 in the 1 st direction X. For example, each probe 10 is formed by electroforming, and the elastic portion 20, the 1 st contact portion 30, and the 2 nd contact portion 50 are integrally arranged in series along the 1 st direction X.

As shown in fig. 2, the elastic portion 20 is composed of a plurality of band-shaped elastic pieces (2 band-shaped elastic pieces in this embodiment) 21 and 22 arranged with a gap 23 therebetween, for example. Each of the belt-like

elastic pieces

21 and 22 is composed of a 1 st horizontal belt portion 24 and a 2 nd horizontal belt portion 26 extending in the 2 nd direction Y, respectively, and 1 curved belt portion 25 connected to each of the

belt portions

24 and 26.

The 1 st horizontal band portion 24 and the 2 nd horizontal band portion 26 are arranged with a gap 27 therebetween in the 1 st direction X. One end in the extending direction of the 1 st horizontal band portion 24 is connected to the 1 st contact portion 30, and the other end in the extending direction thereof is connected to the bent band portion 25. One end in the extending direction of the 2 nd horizontal band portion 26 is connected to the 2 nd contact portion 50, and the other end in the extending direction thereof is connected to the bent band portion 25. The 2 nd transverse band 26 of the outermost one of the respective band-shaped elastic pieces 21, 22 (i.e., the band-shaped elastic piece 21 having the farthest distance in the 1 st direction X between the 1 st transverse band 24 and the 2 nd transverse band 26) is provided with a contact surface 211 extending in the 2 nd direction Y. The contact surface 211 is configured to contact the inner surface of the housing 100 constituting the housing 101 when the probe 10 is housed in the housing 101 of the housing 100. The

belt portions

24 and 26 are disposed on the same side in the 2 nd direction Y as the 1 st contact portion 30 and the 2 nd contact portion 50, respectively.

As shown in fig. 2, the curved band portion 25 is connected to the 1 st and 2 nd

horizontal band portions

24 and 26 on the opposite side of the body portion 31 of the 1 st contact portion 30 with respect to a center line CL that passes through the center of the elastic portion 20 in the 2 nd direction Y and extends in the 1 st direction X. In this embodiment, the center of the maximum distance L1 in the 2 nd direction Y of the combined 1 st horizontal band portion 24 and the bent band portion 25 is set to the center of the elastic portion 20 in the 2 nd direction Y.

As shown in fig. 2, the 1 st contact portion 30 includes a plurality of

contact portions

41 and 42, and the plurality of

contact portions

41 and 42 are arranged apart from the center line CL of the elastic portion 20 in the 2 nd direction Y and are arranged at intervals along the 2 nd direction Y.

Specifically, as shown in fig. 3, the 1 st contact portion 30 includes a main body portion 31, and a plurality of protruding portions (2

protruding portions

32 and 33 in this embodiment) extending from the main body portion 31 in a direction away from the main body portion 31 in the 1 st direction X.

The body 31 is disposed apart from the center line CL, and has a pair of side surfaces 311 and 312 facing in the 1 st direction X and a pair of side surfaces 313 and 314 facing in the 2 nd direction Y, as viewed in the plate thickness direction (i.e., the paper surface penetrating direction in fig. 3). One end of the 1 st horizontal band portion 24 of the elastic portion 20 in the extending direction is connected to a side surface 313, which is close to the center line CL, of a pair of side surfaces 313 and 314 of the body portion 31 facing each other in the 2 nd direction Y.

Of the pair of side surfaces 311, 312 of the body 31 facing in the 1 st direction X, the side surface 311 facing the 2 nd horizontal band portion 26 is inclined in a direction away from the 2 nd horizontal band portion 26 in the 1 st direction X as it is away from the center line CL in the 2 nd direction Y. That is, the main body 31 has an inclined surface 311, and the inclined surface 311 faces the 2 nd horizontal band portion 26 in the 1 st direction X, and is inclined in a direction away from the 2 nd horizontal band portion 26 in the 1 st direction X as it is away from the center line CL in the 2 nd direction Y. The inclined surface 311 is configured such that the main body 31 does not contact the 2 nd horizontal band portion 26 and the 2 nd contact portion 50 of the elastic portion 20 when the elastic portion 20 is elastically deformed so that the 1 st contact portion 30 and the 2 nd contact portion 50 approach each other in the 1 st direction X (i.e., when the elastic portion 20 is compressed in the 1 st direction X).

The

protrusions

32 and 33 are provided substantially at the center in the 2 nd direction Y of the side surface 312 opposite to the inclined surface 311 out of the pair of side surfaces 311 and 312 facing each other in the 1 st direction X of the body 31. The edge portions around the

respective protrusions

32 and 33 of the side surface 312 are configured to contact the inner surface of the case 100 constituting the housing portion 101 when the probe 10 is housed in the housing portion 101 of the case 100, as shown in fig. 2.

The

protrusions

32 and 33 are disposed with a gap 36 therebetween in the 2 nd direction Y, and the

protrusions

32 and 33 protrude from the body 31 in the 1 st direction X by different amounts. In the 2 nd direction Y, the projection 32 distant from the center line CL of the elastic portion 20 is referred to as a 1 st projection 32, and the projection 33 closer to the center line CL than the 1 st projection 32 is referred to as a 2 nd projection 33. When the end portions of the

respective protrusions

32 and 33 distant from the body portion 31 in the 1 st direction X are defined as the tip portions, the tip portions of the

respective protrusions

32 and 33 are bent, and the maximum distance L2 in the 1 st direction X from the body portion 31 to the tip portion of the 1 st protrusion 32 is greater than the maximum distance L3 from the body portion 31 to the tip portion of the 2 nd protrusion 33.

The distal end portions of the

respective protrusions

32, 33 constitute the

respective contact portions

41, 42. That is, each of the

contact portions

41 and 42 is disposed so as to be apart from the elastic portion 20 in the 1 st direction X as being apart from the center line CL in the 2 nd direction Y.

As shown in fig. 2, the 2 nd contact portion 50 has a substantially rectangular shape extending in the 1 st direction X. The 2 nd contact portion 50 has a tapered shape curved at a distal end portion thereof distant from the elastic portion 20 in the 1 st direction X, and constitutes a contact portion 51.

The operation of the probe 10 of the inspection tool 2 will be described with reference to fig. 2 to 4.

As shown in fig. 2,

connection terminals

111 and 112 of contact objects (for example, inspection objects or inspection devices) having

contact surfaces

113 and 114 extending in the 2 nd direction Y are disposed at both ends of the probe 10 in the 1 st direction X in the housing 101 of the housing 100. In a state before the elastic portion 20 is compressed as shown in fig. 2, only the contact point portion 41 of the 1 st protruding portion 32 of the 1 st contact portion 30 is in contact with the connection terminal 111. When the connection terminal 111 disposed on the 1 st contact portion 30 side is brought close to the connection terminal 112 on the 2 nd contact portion 50 side from this state, the 1 st contact portion 30 is pushed into the housing portion 101 and rotated around the curved band portion 25, and the contact point portion 42 of the 2 nd protrusion portion 33 comes close to the connection terminal 111 gradually. At this time, as shown in fig. 3, the tip end portion of the 1 st projecting portion 32 rotates while sliding (wiping) on the contact surface 113 of the connection terminal 111. When the connection terminal 111 disposed on the 1 st contact portion 30 side is further brought close to the connection terminal 112 on the 2 nd contact portion 50 side, the

contact portions

41 and 42 are simultaneously brought into contact with the connection terminal 111 as shown in fig. 4.

As described above, the probe 10 includes: an elastic portion 20 elastically deformable in the 1 st direction X; a 1 st contact portion 30 provided at one end of the elastic portion 20 in the 1 st direction X; and a 2 nd contact portion 50 provided at the other end of the elastic portion 20 in the 1 st direction X. The 1 st contact portion 30 includes a plurality of

contact portions

41 and 42, and the plurality of

contact portions

41 and 42 are spaced apart from a center line CL extending in the 1 st direction X through the center of the elastic portion 20 in the 2 nd direction Y and are arranged at intervals in the 2 nd direction Y intersecting the 1 st direction X. Each of the

contact portions

41 and 42 is disposed so as to be apart from the elastic portion 20 in the 1 st direction X as it is apart from the center line CL in the 2 nd direction Y. With this configuration, for example, when the probe 10 is compressed so that the 1 st contact portion 30 and the 2 nd contact portion 50 approach each other in the 1 st direction X, the

contact portions

41 and 42 can be simultaneously brought into contact with the object to be contacted. That is, even if a nonconductive foreign substance adheres to any one of the

contact portions

41 and 42, it is possible to avoid a conduction failure between the probe 10 and the object to be contacted. As a result, the probe 10 having high contact reliability can be realized.

Further, the 1 st contact portion 30 has: a main body 31 disposed apart from the center line CL and to which one end of the elastic portion 20 is connected; and a plurality of

protrusions

32, 33 that are arranged with a gap 36 therebetween in the 2 nd direction Y and extend from the body 31 in a direction away from the body 31 in the 1 st direction X. Of the plurality of

projections

32 and 33, distal end portions distant from the main body 31 in the 1 st direction X constitute a plurality of

contact portions

41 and 42, respectively. With this configuration, the probe 10 having high contact reliability can be realized more easily.

Further, the elastic portion 20 has: a 1 st horizontal band portion 24 extending in the 2 nd direction Y from the body portion 31 of the 1 st contact portion 30; a 2 nd horizontal band portion 26 disposed at a gap 27 in the 1 st direction X with respect to the 1 st horizontal band portion 24; and a curved band portion 25 which is located on the opposite side of the body portion 31 with respect to the center line CL and is connected to the 1 st and 2 nd

horizontal band portions

24 and 26. The main body 31 has an inclined surface 311, and the inclined surface 311 faces the 2 nd horizontal band portion 26 in the 1 st direction X, and is inclined in a direction away from the 2 nd horizontal band portion 26 in the 1 st direction X as it is away from the center line CL in the 2 nd direction Y. With this configuration, when the elastic portion 20 is compressed in the 1 st direction X, the main body portion 31 can be prevented from contacting the 2 nd horizontal band portion 26 and the 2 nd contact portion 50 of the elastic portion 20.

By such a probe 10, the inspection tool 2 having high contact reliability can be realized. Further, by the inspection tool 2 having such a probe 10, the inspection unit 1 having high contact reliability can be realized.

The contact portion of the 1 st contact portion 30 is not limited to the case where the contact portion is constituted by 2

contact portions

41 and 42. The contact portion of the 1 st contact portion 30 may be constituted by 3

contact portions

41, 42, 43 as shown in fig. 5, or 4

contact portions

41, 42, 43, 44 as shown in fig. 6, for example.

In the probe 10 of fig. 5, the 1 st contact portion 30 has 3 protruding

portions

32, 33, 34 extending from the main body portion 31 in a direction away from the main body portion 31 in the 1 st direction X, and tip end portions of the protruding

portions

32, 33, 34 respectively constitute

contact portions

41, 42, 43. Each of the

contact portions

41, 42, and 43 is arranged to be distant from the elastic portion 20 in the 1 st direction X as being distant from the center line CL in the 2 nd direction Y.

In the probe 10 of fig. 6, the 1 st contact portion 30 has 4 protruding

portions

32, 33, 34, 35 extending from the main body portion 31 in a direction away from the main body portion 31 in the 1 st direction X, and tip portions of the protruding

portions

32, 33, 34, 35 constitute

contact portions

41, 42, 43, 44, respectively. Each of the

contact portions

41, 42, 43, and 44 is arranged to be distant from the elastic portion 20 in the 1 st direction X as being distant from the center line CL in the 2 nd direction Y.

The distal end portions of the

respective protrusions

32 and 33 are not limited to being bent. For example, as shown in fig. 6, the distal end portions of the

respective protrusions

32, 33, 34, and 35 may be triangular, and as shown in fig. 7, the distal end portion of one of the

respective protrusions

32 and 33 may be quadrangular. That is, the tip end portions of the plurality of projecting portions of the 1 st contact portion 30 may have any shape capable of constituting a plurality of contact portions capable of simultaneously contacting the connection terminals of the contact object.

The contact portion of the 2 nd contact portion 50 is not limited to the case where it is constituted by 1 contact portion 51. The contact portion of the 2 nd contact portion 50 may be constituted by 2

contact portions

51 and 52, as shown in fig. 8, for example. In the probe 10 of fig. 8, the 2 nd contact portion 50 has a groove 53 extending from the distal end portion toward the elastic portion 20 along the 1 st direction X. The 2 nd contact portion 50 has end portions on both sides in the 2 nd direction Y partitioned by the groove 53, which constitute

contact portions

51 and 52, respectively. The configuration may be the same as that of the contact portion of the 2 nd contact portion 50 and that of the 1 st contact portion 30 (for example, the

contact portions

41, 42, 43, and 44 shown in fig. 2, 5, and 6).

The elastic portion 20 is not limited to the case of being constituted by 2 band-like

elastic pieces

21, 22. For example, as shown in fig. 9, the elastic band may be constituted by 1 band-like elastic piece 121, and as shown in fig. 10, the elastic band may be constituted by 3 band-like

elastic pieces

121, 122, 123.

The elastic portion 20 is not limited to the case where it is composed of the 1 st horizontal band portion 24, the 2 nd horizontal band portion 26, and the bent band portion 25. For example, as shown in fig. 10, the elastic portion 20 may have a serpentine shape in which 6

band portions

24, 26, 124, 125, 126, 127 and 5 bent band portions 25 are alternately connected along the 1 st direction X. In the probe 10 of fig. 10, a straight line passing through the center of the maximum distance L1 in the 2 nd direction Y of the portion combining the 1 st horizontal tape portion 24 and the curved tape portion 25 connected to the 1 st contact portion 30 and extending in the 1 st direction X is taken as the center line CL of the elastic portion 20.

In the probe 10 of fig. 10, the main body 31 of the 1 st contact portion 30 does not have the inclined surface 311 (that is, the inclined surface 311 can be omitted). In the probe 10 of fig. 10, when the probe is accommodated in the accommodating portion 101 of the case 100, the 1 st horizontal tape portion 24 connected to the 1 st contact portion 30 and the tape portion 127 connected to the 2 nd contact portion 50 of the outermost band-shaped elastic piece 123 are configured to contact the inner surface of the case 100.

Various embodiments of the present invention have been described in detail with reference to the drawings, but finally, various embodiments of the present invention will be described. In the following description, reference numerals are given to the drawings as an example.

The probe 10 according to embodiment 1 of the present invention includes: an elastic portion 20 elastically deformable in the 1 st direction X; a 1 st contact portion 30 provided at one end of the elastic portion 20 in the 1 st direction X; and a 2 nd contact portion 50 provided at the other end of the elastic portion 20 in the 1 st direction X, the 1 st contact portion 30 having a plurality of

contact portions

41, 42, the plurality of

contact portions

41, 42 being disposed apart from a center line CL that passes through a center of the elastic portion 20 in the 2 nd direction Y and extends in the 1 st direction X, and being disposed at intervals along a 2 nd direction Y intersecting the 1 st direction X, the plurality of

contact portions

41, 42 being disposed so as to be apart from the elastic portion 20 in the 1 st direction X as being apart from the center line CL in the 2 nd direction Y.

According to the probe 10 of the first aspect, for example, when the probe 10 is compressed so that the 1 st contact portion 30 and the 2 nd contact portion 50 approach each other in the 1 st direction X, the

contact portions

In the probe 10 according to claim 2 of the present invention, the 1 st contact portion 30 includes: a body 31 disposed apart from the center line CL and to which the one end of the elastic portion 20 is connected; and a plurality of

protrusions

32, 33 arranged with a gap 36 in the 2 nd direction Y, respectively, and extending from the main body 31 in a direction away from the main body 31 in the 1 st direction X, wherein distal end portions of the plurality of

protrusions

32, 33 in the 1 st direction X away from the main body 31 constitute the plurality of

contact portions

41, 42, respectively.

According to the probe 10 of the second aspect, the probe 10 having high contact reliability can be realized more easily.

In the probe 10 according to claim 3 of the present invention, the elastic portion 20 includes: a 1 st horizontal band portion 24 extending from the body portion 31 of the 1 st contact portion 30 in the 2 nd direction Y; a 2 nd horizontal band portion 26 arranged with a gap 27 in the 1 st direction X with respect to the 1 st horizontal band portion 24; and a curved band portion 25 which is located on the opposite side of the body portion 31 with respect to the center line CL and is connected to the 1 st and 2 nd

horizontal band portions

24 and 26,

the main body 31 has an inclined surface 311, and the inclined surface 311 faces the 2 nd horizontal band portion 26 in the 1 st direction X, and is inclined in a direction away from the 2 nd horizontal band portion 26 in the 1 st direction X as it is away from the center line CL in the 2 nd direction Y.

According to the probe 10 of the 3 rd aspect, when the elastic portion 20 is compressed in the 1 st direction X, the body portion 31 can be prevented from contacting the 2 nd lateral band portion 26 and the 2 nd contact portion 50 of the elastic portion 20.

An inspection tool 2 according to claim 4 of the present invention includes: the probe 10; and a case 100 in which the probe 10 is housed, the probe 10 being housed in a state in which: the elastic portion 20 is elastically deformed so that the 1 st contact portion 30 and the 2 nd contact portion 50 approach each other in the 1 st direction X, and the plurality of

contact portions

41 and 42 can simultaneously contact the inspection object or the connection terminal 111 of the inspection apparatus extending in the 2 nd direction Y.

According to the inspection tool 2 of the 4 th aspect, the probe 10 can realize the inspection tool 2 having high contact reliability.

The inspection unit 1 according to claim 5 of the present invention includes at least 1 inspection tool 2.

According to the inspection unit 1 of the 5 th aspect, the inspection unit 1 having high contact reliability can be realized by the inspection tool 2.

In addition, any of the various embodiments or modifications described above can be appropriately combined to exhibit the respective effects. Further, combinations of the embodiments or examples or combinations of the embodiments and examples can be made, and combinations of features in different embodiments or examples can also be made.

The present invention has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, but various modifications and alterations will be apparent to those skilled in the art. It is to be understood that such changes and modifications are intended to be included within the scope of the present invention as set forth in the appended claims.

Industrial applicability

The probe of the present invention can be applied to an inspection tool used for inspecting semiconductors such as a camera device, a USB device, an HDMI device, or a QFN device and a SON device, for example.

The inspection tool of the present invention can be applied to an inspection unit used for inspecting a semiconductor such as a camera device, a USB device, an HDMI device, or a QFN device or a SON device, for example.

The inspection unit of the present invention can be applied to an inspection apparatus used for inspecting a semiconductor such as a camera device, a USB device, an HDMI device, or a QFN device or a SON device, for example.

Description of the reference symbols

1 inspection Unit

2 inspection tool

10 Probe

20 elastic part

21. 22, 121, 122, 123 strip-shaped elastic sheet

23 gap

24 st transverse band part

25 curved band portion

26 nd 2 nd horizontal band part

27 gap

124. 125, 126, 127 band parts

30 st contact part

31 main body part

311 inclined plane

312. 313, 314 sides

32. 33, 34, 35 protrusions

36 gap

41. 42, 43, 44 contact part

50 nd 2 nd contact part

51. 52 contact part

53 groove

100 case

101 receiving part

111. 112 connecting terminal

113. 114 contact surface.

Claims

1. A probe, having:

an elastic portion capable of elastic deformation along the 1 st direction;

a 1 st contact portion provided at one end of the elastic portion in the 1 st direction; and

a 2 nd contact portion provided at the other end of the elastic portion in the 1 st direction,

the 1 st contact portion has a plurality of contact portions that are arranged apart from a center line that passes through a center of the elastic portion in the 2 nd direction and extends in the 1 st direction, and that are arranged at intervals in the 2 nd direction that intersects the 1 st direction,

the plurality of contact portions are respectively configured to be distant from the elastic portion in the 1 st direction as distant from the center line in the 2 nd direction.

2. The probe according to claim 1, wherein,

the 1 st contact part comprises:

a body portion disposed apart from the center line and to which the one end of the elastic portion is connected; and

a plurality of protrusions arranged with gaps in the 2 nd direction and extending from the main body in a direction away from the main body in the 1 st direction,

distal end portions of the plurality of projecting portions, which are distant from the main body portion in the 1 st direction, constitute the plurality of contact portions, respectively.

3. The probe according to claim 2, wherein,

the elastic part has:

a 1 st horizontal band portion extending from the body portion of the 1 st contact portion in the 2 nd direction;

a 2 nd horizontal band portion arranged with a gap in the 1 st direction with respect to the 1 st horizontal band portion; and

a curved band portion that is located on the opposite side of the body portion with respect to the center line and is connected to the 1 st and 2 nd horizontal band portions,

the main body portion has an inclined surface that faces the 2 nd horizontal band portion in the 1 st direction and that inclines in a direction away from the 2 nd horizontal band portion in the 1 st direction as the inclined surface moves away from the center line in the 2 nd direction.

4. An inspection tool having:

the probe according to any one of claims 1 to 3; and

a housing in which the probe is housed,

the probe is housed in the following state: the elastic portion is elastically deformed so that the 1 st contact portion and the 2 nd contact portion approach each other in the 1 st direction, and each of the plurality of contact portions is capable of simultaneously contacting an inspection object extending in the 2 nd direction or a connection terminal of an inspection apparatus.

5. An inspection unit having at least 1 inspection tool as claimed in claim 4.