JP2020076664A - Probe pin, inspection jig, inspection unit, and inspection device - Google Patents

Abstract

To provide a probe pin that can be brought into contact with an inspection object from a direction different from the direction of contact with an inspection device.SOLUTION: The probe pin comprises: a first elastic part that is elastically deformable along a first direction; a first contact part provided at one end of the first elastic part in the first direction and capable of moving to the first elastic part in a second direction; and a second contact part provided at the other end of the first elastic part in the first direction. The first contact part includes a first arm part extending along the first direction from the one end of the first elastic part and having a contact in the second direction, and a second arm part extending along the second direction from the first arm part and arranged on the same side of the first arm part as the contact. When an external force is applied to the second arm part, the first arm part rotates about a connecting portion with the first elastic part as a fulcrum and moves in the second direction toward the elastic part.SELECTED DRAWING: Figure 4

Description

  The present disclosure relates to a probe pin, an inspection jig, an inspection unit, and an inspection device.

  In an electronic component module such as a camera or a liquid crystal panel, a continuity test and an operation characteristic test are generally performed in the manufacturing process. These inspections are performed by connecting the terminals for connecting to the main body substrate installed in the electronic component module and the terminals of the inspection device using the probe pins.

  As such a probe pin, there is one described in Patent Document 1. This probe pin is provided with a pair of contacts capable of contacting the electrode terminal of the electronic component and the electrode terminal of the connected electronic component, respectively, and a meandering portion interposed between the pair of contacts to connect the pair of contacts. There is. In the probe pin, the meandering portion expands and contracts along the arrangement direction in which a pair of contacts are connected, and each contact reciprocates along the arrangement direction, so that each contact causes an electrode terminal of an electromagnetic component and a connected electronic component. It is configured to be in contact with the electrode terminal in the arrangement direction.

JP, 2002-134202, A

  However, in the case of a so-called linear probe pin in which each contact reciprocates along the same direction like the probe pin, it is often difficult to cope with the recent diversification of the inspection device and the inspection object. ing.

  For example, when the terminal of the inspection object can be contacted only from the direction orthogonal to the contact direction with respect to the terminal of the inspection device, the probe pin may not connect the inspection device and the inspection object. is there.

  The present disclosure provides a probe pin capable of contacting an inspection target from a direction different from a contact direction with respect to an inspection device, an inspection jig including the probe pin, an inspection unit including the inspection jig, and the inspection unit. It is an object of the present invention to provide an inspection device provided with the inspection device.

An example probe pin of the present disclosure is
A first elastic portion that is elastically deformable along a first direction;
A first contact portion provided at one end of the first elastic portion in the first direction and movable in a second direction intersecting the first elastic portion in the first direction;
A second contact portion provided at the other end of the first elastic portion in the first direction,
The first contact portion,
A first arm portion extending from the one end of the first elastic portion along the first direction and having a contact portion in the second direction;
While extending along the second direction from the first arm portion, and having a second arm portion arranged on the same side as the contact portion with respect to the first arm portion,
By applying an external force to the second arm portion, the first arm portion rotates about the connecting portion with the first elastic portion as a fulcrum and moves in the second direction with respect to the elastic portion.

Further, the inspection jig of the example of the present disclosure is
The probe pin,
And a housing in which the probe pin is housed so that the contact portion of the first arm portion is exposed to the outside when an external force is applied to the second arm portion.

Further, the inspection unit of the example of the present disclosure is
Equipped with a pair of the inspection jig,
Each of the inspection jigs
The contact portions face each other and are arranged with a gap in the second direction, and the projecting portions are arranged in the gap, respectively.

In addition, the inspection device of an example of the present disclosure is
At least one inspection unit is provided.

  According to the probe pin, the probe pin includes the first elastic portion that is elastically deformable along the first direction, and the first contact portion and the second contact portion that are provided at both ends of the first elastic portion in the first direction. There is. The first contact portion extends in the first direction and has a contact portion that is contactable from the second direction, and the first arm portion extends in the second direction and the first arm portion. And a second arm portion arranged on the same side as the contact portion, and by applying an external force to the second arm portion, the first arm portion rotates about the connection portion with the first elastic portion as a fulcrum. Then, it moves in the second direction with respect to the first elastic portion. With such a configuration, it is possible to realize a probe pin that can contact the inspection target from a direction different from the contact direction with the inspection device.

  According to the inspection jig, even if the inspection object has only the connection terminals that can be contacted from different directions with respect to the contact direction of the connection terminal of the inspection device by the probe pin, It is possible to realize an inspection jig capable of connecting the connection terminal of an object and the connection terminal of the inspection device.

  According to the inspection unit, even if the inspection object has only the connection terminals that can be contacted from different directions with respect to the contact direction of the connection terminals of the inspection device, the inspection object is inspected by the inspection jig. It is possible to realize an inspection unit capable of connecting a connection terminal of an object and a connection terminal of an inspection device.

  According to the inspection apparatus, the inspection unit can realize an inspection apparatus that can inspect even an inspection object having only a connection terminal that can be contacted from different directions with respect to the contact direction of the connection terminal of the inspection apparatus.

The perspective view of the inspection unit of one embodiment of this indication. Sectional drawing which followed the II-II line of FIG. FIG. 3 is a perspective view of a probe pin according to an embodiment of the present disclosure. The top view of the probe pin of FIG. FIG. 3 is a first cross-sectional view for explaining the operation of the inspection unit of FIG. 1. The 2nd sectional view for explaining operation of the inspection unit of Drawing 1. The perspective view which shows the modification of the inspection unit of FIG. The perspective view which shows the 1st modification of the probe pin of FIG. The perspective view which shows the 2nd modification of the probe pin of FIG. The perspective view which shows the 3rd modification of the probe pin of FIG. The perspective view which shows the 4th modification of the probe pin of FIG. The perspective view which shows the 5th modification of the probe pin of FIG. The perspective view which shows the 6th modification of the probe pin of FIG. The perspective view which shows the 7th modification of the probe pin of FIG. The perspective view which shows the 8th modification of the probe pin of FIG. The perspective view which shows the 9th modification of the probe pin of FIG.

  Hereinafter, an example of the present disclosure will be described with reference to the accompanying drawings. In the following description, terms indicating a specific direction or position (for example, terms including “upper”, “lower”, “right”, and “left”) are used as necessary, but use of those terms Is for facilitating the understanding of the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meanings of the terms. In addition, the following description is merely exemplary in nature and is not intended to limit the present disclosure, the application thereof, or the application thereof. Furthermore, the drawings are schematic, and the ratios of the respective dimensions and the like do not always match the actual ones.

  The probe pin 10 according to an embodiment of the present disclosure is used in a state of being housed in a housing 50, for example, as shown in FIGS. 1 and 2, and constitutes the inspection jig 2 together with the housing 50. As an example, the inspection jig 2 accommodates a plurality of elongated thin plate-shaped conductive probe pins 10.

  The inspection jig 2 constitutes a part of the inspection unit 1. In this embodiment, the inspection unit 1 has a pair of inspection jigs 2. The inspection jigs 2 are arranged with a gap 3 so that first contact portions 33 of probe pins 10 described later face each other. The inspection object 100 is placed in the gap 3 and a continuity inspection, an operation characteristic inspection and the like are performed. As shown in FIG. 1, the inspection object 100 has a substantially rectangular parallelepiped shape and has a connection terminal 110 on a side surface 101 facing each inspection jig 2.

  As shown in FIG. 1, each housing 50 has a substantially rectangular parallelepiped shape. As shown in FIG. 2, the housing 50 is provided with a plurality of housing portions 51 each capable of housing one probe pin 10. Each accommodating portion 51 has a slit shape and is capable of accommodating and retaining each probe pin 10 electrically independently of each other, and from the direction in which each inspection jig 2 faces (that is, the X direction). The housings 50 are arranged in a line along the longitudinal direction of the housing 50 (that is, the Y direction) when viewed, and are arranged at equal intervals.

  As shown in FIG. 2, both ends in the Z direction orthogonal to the X direction and the Y direction in each accommodation portion 51 are connected to the first opening 52 and the second opening 53, respectively. The first opening 52 is provided in a part of the bottom surface of each housing 50 (that is, a part of the surface of each housing 50 on the lower side in the Z direction of FIG. 2). Further, the second opening 53 extends from a part of the upper surfaces of the side surfaces of the respective housings 50 facing each other to a part of the upper surface (that is, one side surface of each housing 50 in the X direction of FIG. 2). It is provided from a part on the upper side in the Z direction to a part of a surface on the upper side in the Z direction). A second contact portion 41 of the probe pin 10, which will be described later, projects downward from the first opening portion 52 in the Z direction and is arranged so as to be able to come into contact with a connection terminal of an inspection device (not shown). Further, from the second opening 53, a protrusion 322 of the probe pin 10, which will be described later, protrudes upward in the Z direction, and the bottom surface 102 of the inspection object 100 intersects each side surface 101 where the connection terminal 110 is provided. It is arranged to be accessible.

  As shown in FIG. 3, each probe pin 10 is plate-shaped, and has a first elastic portion 20 that is elastically deformable along the Z direction (an example of the first direction) and a Z direction of the first elastic portion 20. It is provided with a first contact portion 30 and a second contact portion 40 which are provided at both ends. Each probe pin is formed by, for example, an electroforming method, and the first elastic portion 20, the first contact portion 30, and the second contact portion 40 are arranged in series along the Z direction and are integrally configured. ..

  As shown in FIG. 4, the first elastic portion 20 is composed of, for example, a plurality of strip-shaped elastic pieces (two strip-shaped elastic pieces in this embodiment) 21 and 22 arranged with a gap 23 therebetween. ing. Each of the strip-shaped elastic pieces 21 and 22 includes a plurality of linear strips 24 (six linear strips 24 in this embodiment) extending in the X direction (an example of the second direction) and at least connected to the linear strips 24. One curved strip portion 25 (five curved strip portions 25 in this embodiment) has a meandering shape that is alternately connected along the Z direction. The linear strip portions 24 on both ends in the Z direction of the strip-shaped elastic pieces 21 and 22 are connected to the first contact portion 30 and the second contact portion 40, respectively.

  In the probe pin 10 of this embodiment, the linear strip portion 24 connected to the first contact portion 30 and the linear strip portion 24 connected to the second contact portion 40 are attached to the first arm portion 31 described later. On the other hand, it is arranged on the side different from the second arm portion 32, but is not limited to this. The linear strip portion 24 connected to the first contact portion 30 and the linear strip portion 24 connected to the second contact portion 40 are arranged on the same side as the second arm portion 32 with respect to the first arm portion 31. (See FIG. 5 and FIG. 6).

  As shown in FIG. 4, the first contact portion 30 is provided at one end of the first elastic portion 20 in the Z direction and is configured to be movable in the X direction with respect to the first elastic portion 20. Specifically, as shown in FIG. 4, the first contact portion 30 includes a first arm portion 31 extending from one end of the first elastic portion 20 along the Z direction, and a first arm portion 31 extending in the X direction. And the second arm portion 32 that is open.

  The first arm portion 31 is a second elastic portion that is elastically deformable in the second direction X and is provided at a connection portion between the first contact portion 33 that can contact in the X direction and the second arm portion 32 in the extending direction thereof. 34 and. A curved portion 35 that protrudes in a direction away from the Z-direction center line CL of the first elastic portion 20 in the X direction is provided at a distal end portion of the first arm portion 31 that is farther from the first elastic portion 20 in the Z direction. The first contact portion 33 is arranged near the apex of the curved portion 35. The second elastic portion 34 is composed of two strip-shaped elastic pieces 341 and 342 which are arranged with a gap 343 therebetween.

  The second arm portion 32 is arranged on the same side as the first contact portion 33 with respect to the first arm portion 31, and extends from the first arm portion 31 in the X direction, and the main body portion 321 extends from the main body portion 321 in the X direction. Further, it has a protrusion 322 protruding in a direction away from the first elastic portion 20. As shown in FIG. 2, the protrusion 322 has a tip 323 located outside the housing 50 in the Z direction and farther from the first elastic portion 20. An inclined surface 324 is provided on a surface of the tip end 323 of the protruding portion 322 facing the first arm portion 31 so as to incline away from the first elastic portion 20 in the Z direction.

  The first contact portion 30 applies the downward Z-direction external force F to the protruding portion 322 of the second arm portion 32, so that the first arm portion 31 rotates about the connection portion 36 with the first elastic portion 20 as a fulcrum. , And moves in the X direction (the left side in the X direction in FIG. 4) with respect to the first elastic portion 20.

  The second contact portion 40 is provided at one end of the first elastic portion 20 in the Z direction, as shown in FIG. The second contact portion 40 extends from the first elastic portion 20 in the Z direction (downward in the Z direction in FIG. 4), and has a second end at a distal end portion far from the first elastic portion 20 in the extending direction. A contact portion 41 is provided. The second contact portion 40 is provided with a through hole 42 that penetrates the second contact portion 40 in the Y direction (that is, the paper surface penetrating direction in FIG. 4) and is configured to be elastically deformable in the Z direction.

  Next, with reference to FIG. 5 and FIG. 6, the operation when the inspection target 100 is connected to the inspection unit 1 will be described. In addition, in the inspection unit 1 shown in FIGS. 5 and 6, the linear strip portion 24 connected to the first contact portion 30 and the linear strip portion 24 connected to the second contact portion 40 are provided in the first arm portion 31. On the other hand, the probe pin 10 arranged on the same side as the second arm portion 32 is used.

  As shown in FIG. 5, the inspection jigs 2 are arranged with a gap 3 so that the first contact portions 33 of the probe pins 10 face each other. The first contact portion 33 is located inside the housing 50. Further, a protrusion 322 that protrudes upward from the housing 50 in the Z direction is arranged in the gap 3. That is, when the inspection object 100 is inserted into the gap 3 between the pair of inspection jigs 2 from the upper side in the Z direction, first, the bottom surface 102 of the inspection object 100 comes into contact with each protrusion 322.

  When the inspection object 100 is inserted into the gap 3 from the upper side in the Z direction, the inspection object 100 applies an external force downward in the Z direction to each of the protrusions 322. As a result, the first elastic portion 20 of each probe pin 10 is elastically deformed and contracted in the Z direction, while the first arm portion 31 of the first contact portion 30 is in the X direction and is close to the facing inspection jig 2. Then, as shown in FIG. 6, the first contact portion 33 of the first arm portion 31 contacts the connection terminal 110 of the inspection object 100.

  As described above, according to the probe pin 10, the first elastic portion 20 that is elastically deformable along the Z direction, and the first contact portion 30 and the second contact portion 30 that are provided at both ends of the first elastic portion 20 in the Z direction, respectively. The contact portion 40 is provided. Then, the first contact portion 30 extends in the Z direction and has a first contact portion 33 having a first contact portion 33 that is contactable from the X direction, and extends from the first arm portion 31 in the X direction and The first arm portion 31 has a second arm portion 32 arranged on the same side as the first contact portion 33 with respect to the first arm portion 31, and by applying an external force to the second arm portion 32, It rotates about the connecting portion 36 with the elastic portion 20 as a fulcrum and moves in the X direction with respect to the first elastic portion 20. With such a configuration, the probe pin 10 that can contact the inspection target 100 from a direction different from the contact direction with the inspection device can be realized.

  In addition, the first arm portion 31 has a second elastic portion 34 which is provided at the connecting portion of the second arm portion 32 and is elastically deformable in the X direction. With the second elastic portion 34, for example, the contact pressure when the first contact portion 33 comes into contact with the connection terminal 110 of the inspection object 100 due to the movement of the first arm portion 31 can be adjusted.

  In addition, the first elastic portion 20 has a meandering shape composed of the linear strip portion 24 and the curved strip portion 25, and is connected to the linear strip portion 24 connected to the first contact portion 30 and the second contact portion 40. The straight band portion 24 is arranged on the same side as or on the side different from the second arm portion 32 with respect to the first arm portion 31. For example, the linear strip portion 24 connected to the first contact portion 30 and the linear strip portion 24 connected to the second contact portion 40 are arranged on the side different from the second arm portion 32 with respect to the first arm portion 31. By using the probe pin 10 (see FIG. 2), the gap 3 between the inspection jigs 2 in the X direction can be increased. Further, the linear strip portion 24 connected to the first contact portion 30 and the linear strip portion 24 connected to the second contact portion 40 are arranged on the same side as the second arm portion 32 with respect to the first arm portion 31. The probe pin 10 (see FIGS. 5 and 6) provided can be used, and the space around the outer side of each inspection jig 2 in the X direction can be saved. That is, with such a configuration, it is possible to increase the degree of freedom in designing the probe pin 10, and by extension, the inspection jig 2 and the inspection unit 1 including the probe pin 10.

  Further, according to the inspection jig 2, for example, the probe pin 10 causes the inspection target 100 to come into contact with the connection terminal of the inspection device from a different direction (for example, the X direction) from a contact direction (for example, the Z direction). Even when only the possible connection terminals 110 are provided, the inspection jig 2 that can connect the connection terminals 110 of the inspection object 100 and the connection terminals of the inspection apparatus can be realized.

  Further, according to the inspection jig 2, the second arm portion 32 extends from the first arm portion 31 in the X direction, and the second arm portion 32 extends in the Z direction from the main body portion 321 and away from the first elastic portion 20. And a distal end 323 in the Z direction and far from the first elastic portion 20 has a protruding portion 322 arranged outside the housing 50. With such a configuration, an external force can be more reliably applied to the second arm portion 32.

  Further, according to the inspection unit 1, for example, the inspection jig 2 causes the inspection target 100 to come in contact with the connection terminal of the inspection device from a different direction (for example, the X direction) from the contact direction (for example, the Z direction). Even if only the possible connection terminals 110 are provided, it is possible to realize the inspection unit 1 that can connect the connection terminals 110 of the inspection object 100 and the connection terminals of the inspection apparatus.

  Further, the inspection device including at least one inspection unit 1 has only the connection terminals 110 that can be contacted from different directions (for example, the X direction) with respect to the contact direction (for example, the Z direction) with respect to the connection terminals of the inspection device. Even the inspection object 100 can be inspected.

  The inspection unit 1 is not limited to the case where the inspection unit 1 includes the pair of inspection jigs 2 arranged with the gap 3 in the X direction. For example, as shown in FIG. 7, when inspecting an inspection object 100 having connection terminals 110 on all four side surfaces extending in the Z direction, the inspection unit 1 performs inspection on each side surface 101 of the inspection object 100. Two pairs of inspection jigs 2 may be provided so as to face each other. Although not shown, the inspection unit 1 includes a pair of inspection treatments, one of which is arranged along the X direction and the other of which is arranged along the Y direction so as to face the adjacent side surfaces 101 of the inspection object 100. The tool 2 may be provided.

  The probe pin 10 includes a first elastic portion that is elastically deformable along the first direction, and a first contact portion and a second contact portion that are provided at both ends of the first elastic portion in the first direction. A contact portion extending in the first direction and having a contact portion contactable from the second direction; and a contact portion extending from the first arm portion in the second direction and contacting the first arm portion. A second arm portion disposed on the same side as the first arm portion, and by applying an external force to the second arm portion, the first arm portion rotates by using a connecting portion with the first elastic portion as a fulcrum, It may be configured to move in the second direction with respect to the elastic portion.

  For example, the first contact portion 30 can be configured as shown in FIGS. In the probe pin 10 of FIG. 8, the first arm portion 31 has a linear portion 311 extending along the Z direction, and a second arm portion 32 of the second arm portion 32 in a direction intersecting the linear portion 311 in the Z direction and further away from the linear portion 311. It is composed of an inclined portion 312 extending in a direction approaching the protruding portion 322. Further, the first contact portion 33 is provided at the end portion of the inclined portion 312 opposite to the end portion connected to the straight portion 311.

  In the probe pin 10 of FIG. 9, the first arm portion 31 has the linear portion 311 extending along the Z direction, and the end of the linear portion 311 remote from the first elastic portion 20 in the Z direction and the first elastic portion 20. And a curved portion 313 projecting in a direction away from. The first contact portion 33 is provided at the end of the curved portion 313 opposite to the end connected to the straight portion 311. Further, the main body portion 321 and the protruding portion 322 of the second arm portion 32 are integrated, and the second arm portion 32 as a whole has a curved shape protruding in the Z direction and in the direction approaching the first elastic portion 20. ing.

  In the probe pin 10 of FIG. 10, the first arm portion 31 extends linearly along the Z direction. In the probe pin 10 of FIG. 11, the main body portion 321 and the protruding portion 322 of the second arm portion 32 are integrated, and the second arm portion 32 as a whole protrudes in the Z direction and in the direction approaching the first elastic portion 20. It has a curved shape.

  In the probe pin 10 of FIG. 12, the meandering portion 314 is provided at the middle portion of the first arm portion 31 in the Z direction. As an example, the meandering portion 314 has a meandering shape in which four linear strips 315 extending in the X direction and three curved strips 316 connected to the adjacent linear strips 315 are alternately connected along the Z direction. have.

  In the probe pin 10 of FIG. 13, the first arm portion 31 extends in the Z direction, and the second arm portion 32 extends in a direction intersecting the Z direction from the straight portion 311 and moves away from the straight portion 311. And an inclined portion 317 extending in a direction away from the protruding portion 322.

  In the probe pin 10 of FIG. 14, the first contact portion 33 is composed of a plurality of protrusions 331.

  Further, for example, the first elastic portion 20 can be configured as shown in FIGS. 15 and 16. In the probe pin 10 of FIG. 15, the first elastic portion 20 has a curved shape that projects to the side different from the second arm portion 32 with respect to the first arm portion 31 in the X direction. Further, in the probe pin 10 of FIG. 16, the first elastic portion 20 includes two curved curved portions 201 and 202 that project to the side different from the second arm portion 32 with respect to the first arm portion 31 in the X direction. The curved portions 201 and 202 are arranged side by side in the Z direction. Each curved portion 201 is composed of two strip-shaped elastic pieces 203 and 204 arranged with a gap 205 therebetween.

  The second elastic portion 34 of the first arm portion 31 can be omitted.

  Although various embodiments of the present disclosure have been described above in detail with reference to the drawings, finally, various aspects of the present disclosure will be described. Note that, in the following description, reference numerals are also attached as an example.

The probe pin 10 of the first aspect of the present disclosure is
A first elastic portion 20 that is elastically deformable along a first direction;
A first contact part 30 provided at one end of the first elastic part 20 in the first direction and movable in a second direction intersecting the first elastic part 20 in the first direction;
A second contact portion 40 provided at the other end of the first elastic portion 20 in the first direction,
The first contact portion 30 is
A first arm portion 31 having a contact portion 33 extending from the one end of the first elastic portion 20 along the first direction and contactable from the second direction;
While extending in the second direction from the first arm portion 31, a second arm portion 32 arranged on the same side as the contact portion 33 with respect to the first arm portion 31,
By applying an external force to the second arm portion 32, the first arm portion 31 rotates about the connecting portion 36 connecting to the first elastic portion 20 as a fulcrum, and the second elastic portion 20 moves to the second elastic portion 20. Move in the direction.

  According to the probe pin 10 of the first aspect, the first elastic portion 20 that is elastically deformable along the first direction, the first contact portions 30 provided at both ends of the first elastic portion 20 in the first direction, and The second contact portion 40 is provided. The first contact portion 30 extends in the first direction and has a contact portion 33 that is contactable from the second direction, and extends from the first arm portion 31 in the second direction. The first arm portion 31 has a second arm portion 32 arranged on the same side as the contact portion 33 with respect to the first arm portion 31, and by applying an external force to the second arm portion 32, the first arm portion 31 has the first elasticity. It rotates about the connecting portion 36 with the portion 20 as a fulcrum and moves in the second direction with respect to the first elastic portion 20. With such a configuration, the probe pin 10 that can contact the inspection target 100 from a direction different from the contact direction with the inspection device can be realized.

The probe pin 10 of the second aspect of the present disclosure is
The first arm portion 31 has a second elastic portion 34 which is provided at a connecting portion of the second arm portion 32 and is elastically deformable in the second direction.

  According to the probe pin 10 of the second aspect, by the second elastic portion 34, for example, the contact pressure when the first contact portion 33 comes into contact with the connection terminal 110 of the inspection object 100 due to the movement of the first arm portion 31, Can be adjusted.

The probe pin 10 of the third aspect of the present disclosure is
The first elastic portion 20 is
A meandering shape composed of a plurality of straight strips 24 extending in the second direction and spaced from each other in the first direction, and at least one curved strip 25 connected to the adjacent straight strips 24. Have
The linear strip portion 24 connected to the first contact portion 30 and the linear strip portion 24 connected to the second contact portion 40 have the second arm portion 32 with respect to the first arm portion 31. It is located on the same side as.

  According to the probe pin 10 of the third aspect, the degree of freedom in designing the probe pin 10, and by extension, the inspection jig 2 and the inspection unit 1 provided with the probe pin 10 can be increased.

The probe pin 10 of the fourth aspect of the present disclosure is
The first elastic portion 20 is
A plurality of linear strips 24 extending in the second direction and at least one curved strip 25 connected to the adjacent linear strips 24 have a meandering shape alternately connected in the first direction. ,
The linear strip portion 24 connected to the first contact portion 30 and the linear strip portion 24 connected to the second contact portion 40 have the second arm portion 32 with respect to the first arm portion 31. And is located on a different side.

  According to the probe pin 10 of the fourth aspect, the degree of freedom in designing the probe pin 10, and by extension, the inspection jig 2 and the inspection unit 1 including the probe pin 10 can be increased.

The inspection jig 2 of the fifth aspect of the present disclosure is
A probe pin 10 of the above aspect,
When an external force is applied to the second arm portion 32, the first arm portion 31 moves in the second direction so that the contact portion 33 of the first arm portion 31 is exposed to the outside. 10 is included in the housing 50.

  According to the inspection jig 2 of the fifth aspect, in the case where the inspection object 100 has only the connection terminals 110 that can be contacted from different directions with respect to the contact direction of the connection terminals of the inspection device by the probe pin 10, for example. Even if there is, the inspection jig 2 that can connect the connection terminal 110 of the inspection object 100 and the connection terminal of the inspection device can be realized.

The inspection jig 2 of the sixth aspect of the present disclosure is
The second arm 32 is
A body portion 321 extending from the first arm portion 31 in the second direction,
The tip protruding from the main body portion 321 in the first direction and away from the first elastic portion 20 and having a tip in the first direction and far from the first elastic portion 20 is outside the housing 50. And a protruding portion 322 that is arranged.

  According to the inspection jig 2 of the sixth aspect, the external force can be more reliably applied to the second arm portion 32.

The inspection unit 1 according to the seventh aspect of the present disclosure is
A pair of inspection jigs 2 of the above aspect are provided,
Each of the inspection jigs 2
The contact portions 33 face each other and are arranged with a gap 3 in the second direction, and the protrusions 322 are arranged in the gap 3, respectively.

  According to the inspection unit 1 of the seventh aspect, by the inspection jig 2, for example, the inspection object 100 has only the connection terminals 110 that can be contacted from different directions with respect to the contact direction of the connection terminals of the inspection device. Even if there is, the inspection unit 1 capable of connecting the connection terminal 110 of the inspection object 100 and the connection terminal of the inspection device can be realized.

An inspection device according to an eighth aspect of the present disclosure is
At least one inspection unit 1 according to claim 7 is provided.

  According to the inspection apparatus of the eighth aspect, the inspection unit 1 can inspect even the inspection object 100 having only the connection terminals 110 that can be contacted from different directions with respect to the contact direction of the connection terminals of the inspection apparatus. The device can be realized.

  By properly combining the arbitrary embodiments or modifications of the various embodiments or modifications, the effects possessed by them can be produced. Further, a combination of the embodiments or a combination of the examples or a combination of the embodiment and the example is possible, and a combination of features in different embodiments or examples is also possible.

  The probe pin of the present disclosure can be applied to, for example, an inspection jig used for inspecting a semiconductor such as a camera device, a USB device, a QFN device and a SON device.

  The inspection jig of the present disclosure can be applied to, for example, an inspection unit used for inspecting a semiconductor such as a camera device, a USB device, or a QFN device and a SON device.

  The inspection unit of the present disclosure can be applied to, for example, an inspection apparatus used for inspecting a semiconductor such as a camera device, a USB device, or a QFN device and a SON device.

  The inspection apparatus of the present disclosure can be used for inspection of semiconductors such as camera devices, USB devices, or QFN devices and SON devices.

DESCRIPTION OF SYMBOLS 1 Inspection unit 2 Inspection jig 3 Gap 10 Probe pin 20 1st elastic part 201, 202 Bending part 203, 204 Band-shaped elastic piece 205 Gap 21, 22 Band-shaped elastic piece 23 Gap 24 Straight band 25 Curved band part 30 1st contact Part 31 1st arm part 311 Straight part 312 Inclined part 313 Curved part 314 Meandering part 315 Straight band part 316 Curved band part 317 Inclined part 32 2nd arm part 321 Body part 322 Projection part 323 Tip 324 Inclined surface 33 1st contact part 331 Protrusion 34 Second elastic portions 341, 342 Band-shaped elastic piece 343 Gap 35 Curved portion 36 Connecting portion 40 Second contact portion 41 Second contact portion 42 Through hole 50 Housing 51 Housing portion 52 First opening portion 53 Second opening portion 100 Inspection object 101 Side 102 Bottom 110 Connection terminal

Claims (8)

A first elastic portion that is elastically deformable along a first direction;
A first contact portion provided at one end of the first elastic portion in the first direction and movable in a second direction intersecting the first elastic portion in the first direction;
A second contact portion provided at the other end of the first elastic portion in the first direction,
The first contact portion,
A first arm portion having a contact portion that extends from the one end of the first elastic portion along the first direction and is contactable from the second direction;
While extending from the first arm portion in the second direction, a second arm portion arranged on the same side as the contact portion with respect to the first arm portion,
By applying an external force to the second arm portion, the first arm portion rotates about a connection portion with the first elastic portion as a fulcrum and moves in the second direction with respect to the first elastic portion, Probe pin.   The probe pin according to claim 1, wherein the first arm portion has a second elastic portion that is provided at a connecting portion of the second arm portion and is elastically deformable in the second direction. The first elastic portion,
It has a meandering shape composed of a plurality of linear strips extending in the second direction and spaced from each other in the first direction, and at least one curved strip connected to the adjacent linear strips. ,
The linear strip portion connected to the first contact portion and the linear strip portion connected to the second contact portion are arranged on the same side as the second arm portion with respect to the first arm portion. The probe pin according to claim 1 or 2, wherein The first elastic portion,
A plurality of linear strips extending in the second direction and at least one curved strip connected to the adjacent linear strips have a meandering shape alternately connected along the first direction,
The linear strip portion connected to the first contact portion and the linear strip portion connected to the second contact portion are arranged on a side different from the second arm portion with respect to the first arm portion. The probe pin according to claim 1 or 2, wherein A probe pin according to any one of claims 1 to 4,
When the external force is applied to the second arm portion, the probe pin is housed inside so that the first arm portion moves in the second direction and the contact portion of the first arm portion is exposed to the outside. Inspection jig, which is provided with The second arm is
A body portion extending from the first arm portion in the second direction,
A tip protruding from the main body portion in the first direction and away from the first elastic portion, and a tip in the first direction and far from the first elastic portion is arranged outside the housing. The inspection jig according to claim 5, further comprising a protrusion. A pair of inspection jigs according to claim 6,
Each of the inspection jigs
An inspection unit in which the contact portions are arranged to face each other and are arranged with a gap in the second direction, and the projecting portions are arranged in the gap.   An inspection apparatus comprising at least one inspection unit according to claim 7.

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