CN111856090B - Probe, inspection jig, and inspection module - Google Patents

Probe, inspection jig, and inspection module Download PDF

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Publication number
CN111856090B
CN111856090B CN202010150221.2A CN202010150221A CN111856090B CN 111856090 B CN111856090 B CN 111856090B CN 202010150221 A CN202010150221 A CN 202010150221A CN 111856090 B CN111856090 B CN 111856090B
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CN
China
Prior art keywords
contact portion
probe
contact
inspection
elastic
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Active
Application number
CN202010150221.2A
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Chinese (zh)
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CN111856090A (en
Inventor
笹野直哉
寺西宏真
酒井贵浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
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Omron Corp
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Filing date
Publication date
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Publication of CN111856090A publication Critical patent/CN111856090A/en
Application granted granted Critical
Publication of CN111856090B publication Critical patent/CN111856090B/en
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0425—Test clips, e.g. for IC's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Connecting Device With Holders (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention provides a probe, an inspection jig and an inspection assembly, wherein the probe contact reliability is high, the inspection jig is provided with the probe, and the inspection assembly is provided with the inspection jig. The probe is provided with: an elastic portion elastically deformable along a first direction; a first contact portion provided at one end of the elastic portion in a first direction; and a second contact portion provided at the other end of the elastic portion in the first direction. The elastic portion has a plurality of lateral belt portions and at least one curved belt portion. The first contact portion and the second contact portion are each disposed on the same side with respect to a first center line passing through a center of the elastic portion in the second direction and extending along the first direction. At least the side surface of the first contact portion has an asymmetric shape with respect to a second center line passing through the center of the third direction and extending along the first direction, as viewed from the second direction.

Description

Probe, inspection jig, and inspection module
Technical Field
The invention relates to a probe, an inspection jig and an inspection assembly.
Background
In general, in an electronic component module such as a camera or a liquid crystal panel, a conduction test, an operation characteristic test, and the like are generally performed in a manufacturing process thereof. These inspections are performed by connecting terminals for connection with a main body substrate provided in the electronic component module and terminals of an inspection device using probes.
As such a probe, patent document 1 describes a probe. The probe includes a pair of contacts capable of contacting electrode terminals of the electronic component and electrode terminals of the electronic component to be connected, respectively, and a bent portion interposed between the pair of contacts and connecting the pair of contacts.
Patent literature
Patent document 1: japanese patent laid-open No. 2002-134202
Problems to be solved by the invention
In the probe, each contact is configured to be in contact with the electrode terminal at one point, and therefore, for example, when a non-conductive foreign matter adheres to the tip of each contact, conduction failure may occur between the probe and the electrode terminal due to the foreign matter, and contact reliability may be reduced.
Disclosure of Invention
The invention aims to provide a probe with high contact reliability, an inspection fixture with the probe and an inspection assembly with the inspection fixture.
Technical scheme for solving problems
A probe according to an example of the present invention comprises: an elastic portion elastically deformable in a first direction; a first contact portion provided at one end of the elastic portion in the first direction; a second contact portion provided at the other end of the elastic portion in the first direction, the elastic portion having: the first contact portion and the second contact portion are each disposed on the same side with respect to a first center line extending in the first direction through a center of the elastic portion in the second direction, and each of the first contact portion and the second contact portion has a pair of plate surfaces facing each other in a third direction intersecting the first direction and the second direction and side surfaces intersecting the pair of plate surfaces, and at least the side surfaces of the first contact portion have an asymmetric shape with respect to a second center line extending in the first direction through the center of the third direction when viewed in the second direction.
An inspection jig according to an example of the present invention includes: the probe; and a housing in which the probe is housed.
The inspection unit according to an example of the present invention includes at least one of the inspection jigs.
Effects of the invention
According to the probe, the first contact portion and the second contact portion are each disposed on the same side with respect to a first center line passing through a center of the elastic portion in the second direction and extending along the first direction. In addition, at least the side surface of the first contact portion has an asymmetric shape with respect to a second center line passing through the center of the third direction and extending along the first direction, as viewed from the second direction. With this configuration, for example, when the connection terminal of the inspection object or the inspection device is moved toward the second contact portion along the first direction in a state of being in contact with the first contact portion, the first contact portion is rotated with respect to the second contact portion on the first plane including the first direction and the second direction while being rotated with respect to the second contact portion on the second plane intersecting the first plane including the first direction and the third direction in a state of being in contact with the connection terminal of the inspection object or the inspection device. That is, the wiping operation in two different directions can be performed simultaneously on the inspection object or the connection terminal of the inspection apparatus. As a result, for example, even if a non-conductive foreign matter adheres to a portion of the first contact portion that contacts the connection terminal, the foreign matter can be easily removed, and thus, a probe with high contact reliability can be realized.
According to the inspection jig, the inspection jig with high contact reliability can be realized by the probe.
According to the inspection module, the inspection module with high contact reliability can be realized by using the inspection jig.
Drawings
FIG. 1 is a perspective view showing a probe according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view of an inspection jig provided with the probe of fig. 1.
Fig. 3 is an enlarged side view showing a first contact portion of the probe of fig. 1.
Fig. 4 is an enlarged side view showing a first modification of the probe of fig. 1.
Fig. 5 is an enlarged side view showing a second modification of the probe of fig. 1.
Fig. 6 is an enlarged side view showing a third modification of the probe of fig. 1.
Description of the reference numerals
1. Inspection assembly
2. Inspection jig
10. Probe with a probe tip
20. Elastic part
21. 22 band-shaped elastic sheet
23. Gap of
24. Transverse belt portion
241. Contact surface
242. Ribs
25. Curved belt portion
30. A first contact part
31. Contact portion
32. Through hole
33. 34 plate surface
35. Side surface
351. Vertex point
40. A second contact part
41. Main body part
411. Contact surface
42. Connecting part
43. Contact portion
100. Shell body
101. Storage part
110. Connection terminal
Detailed Description
An example of the present invention will be described below with reference to the drawings. Further, in the following description, terms (e.g., terms including "upper", "lower", "right", "left") indicating a specific direction or position will be used as needed, but these terms are used to facilitate understanding of the present invention with reference to the drawings, and the technical scope of the present invention is not limited by the meanings of these terms. The following description is merely an example, and is not intended to limit the present invention, its application, or uses. Further, the drawings are merely schematic, and the ratio of the dimensions and the like do not necessarily coincide with the actual dimensions.
As an example, as shown in fig. 1, a probe according to an embodiment of the present invention has a thin and long plate shape and has conductivity. As shown in fig. 2, the probe 10 is used in a state of being housed in an insulating case 100, and constitutes an inspection jig 2 together with the case 100. As an example, a plurality of probes 10 are accommodated in the inspection jig 2.
In addition, the inspection jig 2 can constitute a part of the inspection assembly 1. For example, as shown in fig. 2, in the case where the inspection unit 1 is configured by a pair of inspection jigs 2, each inspection jig 2 is disposed such that each contact portion of the probe 10 described later is adjacent in a second direction Y intersecting (for example, orthogonal to) a first direction X in which the probe 10 extends.
As shown in fig. 2, each housing 100 has a plurality of storage portions 101 (only one is shown in fig. 2) inside. Each of the housing portions 101 has a slit shape, and is configured to be capable of housing and holding one probe 10 electrically independently. The storage portions 101 are arranged in a row at equal intervals along a third direction Z (shown in fig. 3) intersecting (e.g., orthogonal to) the first direction X and the second direction Y.
As shown in fig. 1 and 2, each probe 10 includes an elastic portion 20 elastically deformable along a first direction X, and a first contact portion 30 and a second contact portion 40 provided at both ends of the elastic portion 20 in the first direction X. As an example, each probe 10 is formed by electroforming, and the elastic portion 20, the first contact portion 30, and the second contact portion 40 are integrally formed and arranged in series along the first direction X.
As shown in fig. 2, the elastic portion 20 is constituted by a plurality of belt-like elastic pieces (two belt-like elastic pieces in this embodiment) 21, 22 disposed apart from each other by a gap 23, as an example. Each of the belt-like elastic sheets 21 and 22 has a meandering shape in which a plurality of lateral belt portions 24 (seven lateral belt portions 24 in this embodiment) extending along the second direction Y and arranged at intervals in the first direction X and at least one curved belt portion 25 (six curved belt portions 25 in this embodiment) having both ends connected to the adjacent lateral belt portions 24 are alternately connected along the first direction X. The lateral belt portions 24 at both ends of the respective belt-like elastic pieces 21, 22 in the first direction X are connected to the first contact portion 30 and the second contact portion 40, respectively.
The lateral belt portion 24 of the belt-like elastic sheet 21 connected to the first contact portion 30, which is distant from the second contact portion 40 in the first direction X, is provided with a contact surface 241. The contact surface 241 is configured to contact the inner surface of the housing 100 constituting the housing 101 when the probe 10 is housed in the housing 101 of the housing 100. The lateral belt portion 24 connected to the first contact portion 30 is provided with a rib 242 connecting the respective belt-like elastic pieces 21, 22, so as to avoid contact between the respective belt-like elastic pieces 21, 22.
As shown in fig. 2, the first contact portion 30 and the second contact portion 40 are disposed on the same side with respect to the first center line CL1 in the second direction Y of the elastic portion 20. In this embodiment, as shown in fig. 2, a straight line extending along the first direction X and passing through the center of the maximum distance L in the second direction Y of the portion formed by combining the lateral belt portion 24 connected to the first contact portion 30 and the curved belt portion 25 connected to the lateral belt portion 24 is defined as the first center line CL1 in the second direction Y of the elastic portion 20.
As an example, the first contact portion 30 has a substantially rectangular plate shape extending along the first direction X, and is disposed at an end of the elastic portion 20 in the second direction Y. The end of the first contact portion 30 in the first direction X away from the elastic portion 20 is in a substantially right triangle shape having an apex at a position farthest from the first center line CL1 of the elastic portion 20 in the second direction Y, and the apex thereof constitutes a contact point portion 31 that can be brought into contact with the connection terminal 110 of a contact object (for example, an inspection object or an inspection device). A through hole 32 is provided at an end portion of the first contact portion 30 in the first direction X, which is close to the elastic portion 20. The through hole 32 is connected to the gap 23 between the respective band-shaped elastic pieces 21, 22.
As shown in fig. 3, the side surface 35 of the first contact portion 30 intersecting the pair of plate surfaces 33, 34 opposing in the third direction Z has an asymmetric shape with respect to the second center line CL2 passing through the center of the third direction Z and extending along the first direction X, as viewed from the second direction Y. In detail, the side surface 35 of the first contact portion 30 is linearly inclined away from the elastic portion 20 in the first direction X as going from the one plate surface 33 toward the other plate surface 34 in the third direction Z. Fig. 3 is a side view of the first contact portion 30 as seen from the arrow a direction in fig. 2.
As an example, the second contact portion 40 has a main body portion 41 extending along the second direction Y, a connection portion 42 provided at one end of the main body portion 41 in the second direction Y, and a contact portion 43 provided at the other end of the main body portion 41 in the second direction Y. The main body 41 has a contact surface 411 that contacts the inner surface of the housing 100 constituting the housing 101 when the probe 10 is housed in the housing 101 of the housing 100. The connecting portion 42 extends from the main body portion 41 toward the first contact portion 30 in the first direction X, and is connected to the lateral belt portion 24 of the elastic portion 20. The contact portion 43 extends from the main body portion 41 in the first direction X in a direction away from the first contact portion 30, and is configured to be capable of contacting the connection terminal 110 of the contact object.
Further, although not shown, the side surface of the second contact portion 40 is also the same as the side surface of the first contact portion 30, and is inclined linearly away from the elastic portion 20 in the first direction X as going from one plate surface toward the other plate surface in the third direction Z.
Next, the operation of the probe 10 when the connection terminal 110 of the contact object is moved toward the second contact portion 40 in the first direction X (i.e., in the arrow B direction in fig. 2 and 3) in a state of being brought into contact with the contact portion 31 of the first contact portion 30 will be described.
When the connection terminal 110 is moved in the direction of arrow B in a state of being in contact with the contact portion 31 of the first contact portion 30, the elastic portion 20 is compressed via the first contact portion 30. At this time, the first contact portion 30 and the second contact portion 40 are each disposed on the same side with respect to the first center line CL1 of the elastic portion 20 (i.e., not disposed on the first center line CL1 of the elastic portion 20), and therefore, in a state of being in contact with the connection terminal 110 of the contact object, rotate in the arrow C direction of fig. 2 with respect to the second contact portion 40 on a first plane (i.e., XY plane shown in fig. 2) including the first direction X and the second direction Y. Further, since the side surface 35 of the first contact portion 30 is inclined linearly, it also rotates in the direction of arrow D in fig. 3 with respect to the second contact portion 40 on a second plane (i.e., XZ plane shown in fig. 3) intersecting the first plane including the first direction X and the third direction Z. That is, the connection terminal 110 of the contact object can simultaneously perform the wiping operations in two different directions.
In this way, in the probe 10, the first contact portion 30 and the second contact portion 40 are each disposed on the same side with respect to the first center line CL1 extending along the first direction and passing through the center of the elastic portion in the second direction. In addition, at least the side face 35 of the first contact portion 30 has an asymmetric shape with respect to a second center line CL2 passing through the center of the third direction Z and extending along the first direction X, as viewed from the second direction Y. With this configuration, the connection terminal 110 of the contact object can simultaneously perform two wiping operations in different directions. As a result, for example, even if a non-conductive foreign matter adheres to a portion of the first contact portion 30 (i.e., the contact portion 31) that contacts the connection terminal 110, the foreign matter can be easily removed, and thus, the probe 10 with high contact reliability can be realized.
The first contact portion 30 and the second contact portion 40 are disposed at the end of the elastic portion 20 in the second direction Y. With this structure, for example, the amount of rotation of the first contact portion 30 with respect to the second contact portion 40 on the first plane can be increased, and the wiping performance can be improved.
With such a probe 10, the inspection jig 2 with high contact reliability can be realized. In addition, by the inspection jig 2 including such a probe 10, the inspection module 1 having high contact reliability can be realized.
The side surface 35 of the first contact portion 30 may have an asymmetric shape with respect to the second center line CL2 extending along the first direction X and passing through the center of the third direction Z, as viewed in the second direction Y, and is not limited to being inclined straight. For example, as shown in fig. 4, the side surface 35 of the first contact portion 30 may have a triangular shape as viewed from the second direction Y (i.e., the paper surface penetrating direction of fig. 4). In this case, the triangular-shaped apex 351 is disposed at a position distant from the second center line CL2 in the third direction Z (a position closer to the plate surface 34 than the second center line CL2 in fig. 4).
For example, as shown in fig. 5, the side surface 35 of the first contact portion 30 may have a concave curved shape when viewed in the second direction Y (i.e., the direction of penetration of the paper surface in fig. 5).
For example, as shown in fig. 5 and 6, the corners 36 of the pair of plate surfaces 33 and 34 formed with the side surfaces 35 may be chamfered when viewed in the second direction Y.
In this way, the shape of the side surface 35 of the first contact portion 30 can be changed according to the design of the probe 10 or the like. That is, the probe 10 having a high degree of freedom in design can be realized.
At least the side surface 35 of the first contact portion 30 may have an asymmetric shape with respect to the second center line CL2 as viewed from the second direction Y. That is, the side surface of the second contact portion 40 may have a symmetrical shape with respect to the second center line CL2 as viewed from the second direction Y.
The first contact portion 30 and the second contact portion 40 may be disposed on the same side with respect to the first center line CL1 of the elastic portion 20. That is, the first contact portion 30 and the second contact portion 40 are not limited to the case of being disposed at the end portion of the elastic portion 20 in the second direction, and may be disposed, for example, at the middle between the center line CL1 of the elastic portion 20 and the end portion of the elastic portion in the second direction.
The elastic portion 20 is not limited to the case of being constituted by a plurality of belt-like elastic pieces 21, 22, and may be constituted by one belt-like elastic piece.
The contact portions of the first contact portion 30 and the second contact portion 40 are not limited to one, and may be provided in plural. That is, the contact portions of the first contact portion 30 and the contact portions of the second contact portion 40 are not limited to contact with the connection terminal 110 of the contact object at one point, and may contact with the connection terminal 110 of the contact object at two or more points.
Various embodiments of the present invention have been described in detail above with reference to the drawings, but finally, various aspects of the present invention are described. In the following description, reference numerals are also added as examples.
The probe 10 according to the first aspect of the present invention includes:
an elastic portion 20 elastically deformable along a first direction X;
a first contact portion 30 provided at one end of the elastic portion 20 in the first direction X;
a second contact portion 40 provided at the other end of the elastic portion 20 in the first direction X,
the elastic portion 20 includes: a plurality of lateral belt portions 24 extending in a second direction Y intersecting the first direction X and arranged at intervals in the first direction X, at least one curved belt portion 25 connected to the adjacent lateral belt portions 24,
the first contact portion 30 and the second contact portion 40 are each disposed on the same side with respect to a first center line CL1 passing through a center of the second direction Y of the elastic portion 20 and extending along the first direction X, and have a pair of plate surfaces 33, 34 facing each other in a third direction Z intersecting the first direction X and the second direction Y, and a side surface 35 intersecting the pair of plate surfaces 33, 34,
at least the side face 35 of the first contact portion 30 has an asymmetric shape with respect to a second center line CL2 passing through the center of the third direction Z and extending along the first direction X, as viewed from the second direction Y.
According to the probe 10 of the first aspect, the wiping operation in two different directions can be simultaneously performed on the connection terminal 110 of the contact object. As a result, for example, even if a non-conductive foreign matter adheres to a portion of the first contact portion 30 (i.e., the contact portion 31) that contacts the connection terminal 110, the foreign matter can be easily removed, and thus, the probe 10 with high contact reliability can be realized.
In the probe 10 of the second aspect of the present invention,
the first contact portion 30 and the second contact portion 40 are each disposed at an end of the elastic portion 20 in the second direction Y.
According to the probe 10 of the second aspect, for example, the amount of rotation of the first contact portion 30 relative to the second contact portion 40 on the first plane can be increased, and the wiping performance can be improved.
In the probe 10 of the third aspect of the present invention,
the side surface 35 has a triangular shape as viewed from the second direction Y.
According to the probe 10 of the third aspect, the probe 10 having a high degree of freedom in design can be realized.
In the probe 10 of the fourth aspect of the present invention,
the corners 36 of the pair of plate surfaces 33, 34 formed with the side surfaces 35 are chamfered as viewed from the second direction Y.
According to the probe 10 of the fourth aspect, the probe 10 having a high degree of freedom in design can be realized.
In the probe 10 of the fifth aspect of the present invention,
the side surface 35 has a concave curved shape as viewed from the second direction Y.
According to the probe 10 of the fifth aspect, the probe 10 having a high degree of freedom in design can be realized.
An inspection jig 2 according to a sixth aspect of the present invention includes:
the probe 10;
and a housing 100 in which the probe 10 is housed.
According to the inspection jig 2 of the sixth aspect, the inspection jig 2 with high contact reliability can be realized with the probe 10.
The inspection assembly 1 of the seventh aspect of the present invention is provided with at least one of the inspection jigs 2.
According to the inspection assembly 1 of the seventh aspect, the inspection assembly 1 with high contact reliability can be realized with the inspection jig 2.
Further, the effects of each of the above-described various embodiments or modifications can be achieved by appropriately combining any of the embodiments or modifications. In addition, embodiments may be combined with each other or embodiments may be combined with the embodiments, and features in different embodiments or embodiments may be combined with each other.
Industrial applicability
The probe according to the present invention can be applied to, for example, an inspection jig for inspecting semiconductors such as camera devices, USB devices, HDMI devices, QFN devices, and SON devices.
The inspection jig of the present invention can be applied to, for example, an inspection module for inspecting semiconductors such as camera devices, USB devices, HDMI devices, QFN devices, and SON devices.
The inspection module of the present invention can be applied to an inspection apparatus for inspecting semiconductors such as camera devices, USB devices, HDMI devices, QFN devices, and SON devices, for example.

Claims (7)

1. A probe is characterized by comprising:
an elastic portion elastically deformable in a first direction;
a first contact portion provided at one end of the elastic portion in the first direction;
a second contact portion provided at the other end of the elastic portion in the first direction,
the elastic portion has: a plurality of lateral belt portions extending in a second direction intersecting the first direction and arranged at intervals in the first direction, at least one curved belt portion connected to the adjacent lateral belt portions,
the first contact portion, the second contact portion, the connection portion of the first contact portion and the elastic portion, and the connection portion of the second contact portion and the elastic portion are disposed on the same side with respect to a first center line passing through a center of the second direction of the elastic portion and extending along the first direction,
the first contact portion and the second contact portion each have a pair of plate surfaces opposing in a third direction intersecting the first direction and the second direction and side surfaces intersecting the pair of plate surfaces,
at least the side surface of the first contact portion has an asymmetric shape with respect to a second center line passing through a center of the third direction and extending along the first direction, as viewed from the second direction.
2. The probe of claim 1, wherein the probe comprises a probe body,
the first contact portion and the second contact portion are each disposed at an end portion of the elastic portion in the second direction.
3. The probe according to claim 1 or 2, wherein,
the side surface has a triangular shape as viewed from the second direction.
4. The probe according to claim 1 or 2, wherein,
the corners of the pair of plate surfaces, each formed with the side surface, are chamfered as viewed from the second direction.
5. The probe according to claim 1 or 2, wherein,
the side surface has a concave curved shape as viewed from the second direction.
6. An inspection jig comprising:
the probe according to any one of claims 1 to 5;
and a housing in which the probe is housed.
7. An inspection assembly comprising at least one inspection jig according to claim 6.
CN202010150221.2A 2019-04-25 2020-03-06 Probe, inspection jig, and inspection module Active CN111856090B (en)

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Application Number Priority Date Filing Date Title
JP2019084572A JP2020180889A (en) 2019-04-25 2019-04-25 Probe pin, inspection jig, and inspection unit
JP2019-084572 2019-04-25

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CN111856090A CN111856090A (en) 2020-10-30
CN111856090B true CN111856090B (en) 2024-02-06

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