JP2022135106A - Probe pin, inspection jig, and inspection jig unit - Google Patents

Probe pin, inspection jig, and inspection jig unit Download PDF

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Publication number
JP2022135106A
JP2022135106A JP2021034701A JP2021034701A JP2022135106A JP 2022135106 A JP2022135106 A JP 2022135106A JP 2021034701 A JP2021034701 A JP 2021034701A JP 2021034701 A JP2021034701 A JP 2021034701A JP 2022135106 A JP2022135106 A JP 2022135106A
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Prior art keywords
contact
elastic piece
elastic
straight
curved
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Inventor
直哉 笹野
Naoya Sasano
宏真 寺西
Hirosane Teranishi
貴浩 酒井
Takahiro Sakai
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Omron Corp
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Omron Corp
Omron Tateisi Electronics Co
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Priority to JP2021034701A priority Critical patent/JP2022135106A/en
Priority to TW111103021A priority patent/TWI788203B/en
Priority to KR1020220015937A priority patent/KR20220125157A/en
Priority to CN202210141040.2A priority patent/CN115015602A/en
Publication of JP2022135106A publication Critical patent/JP2022135106A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Automation & Control Theory (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

To provide a probe pin capable of suppressing interference between adjacent linear parts when stretching an elastic part.SOLUTION: A probe pin comprises an elastic part, a first contact part disposed at one end of the elastic part, and a second contact part disposed at the other end of the elastic part. The elastic part includes: a first elastic piece and a second elastic piece; and a through hole provided between the first elastic piece and the second elastic piece. Each of the first elastic piece and the second elastic piece includes a plurality of linear parts and a curved part connected to any one of both ends of each of the adjacent linear parts. A first linear part disposed closest to the first contact part is connected from one end side in a second direction to the first contact part, and a second linear part disposed closest to the second contact part is connected from the same side as the first contact part to the second contact part. Intermediate parts of outer curved parts disposed away from a centerline of the elastic part of the curved part of the first elastic piece and the curved part of the second elastic piece have a greater width than a width of linear parts to which the outer curved parts are connected.SELECTED DRAWING: Figure 3

Description

本開示は、プローブピン、検査治具および検査治具ユニットに関する。 The present disclosure relates to probe pins, inspection jigs and inspection jig units.

カメラあるいは液晶パネル等の電子部品モジュールでは、一般に、その製造工程において、導通検査および動作特性検査等が行われる。これらの検査は、プローブピンを用いて、電子部品モジュールに設置されている本体基板に接続するための端子と、検査装置の端子とを接続することにより行われる。 2. Description of the Related Art Electronic component modules such as cameras and liquid crystal panels are generally subjected to continuity tests, operating characteristic tests, and the like in the manufacturing process. These inspections are performed by using probe pins to connect terminals for connection to the body board installed in the electronic component module and terminals of the inspection device.

このようなプローブピンとしては、特許文献１に記載されたものがある。特許文献１のプローブピンは、貫通孔が設けられた弾性部と、弾性部の長手方向の一端に配置された第１接触部と、弾性部の長手方向の他端に配置された第２接触部とを備えている。前記プローブピンの弾性部は、直線部および湾曲部が交互に連続する蛇行形状を有している。 As such a probe pin, there is one described in Patent Document 1. The probe pin of Patent Document 1 includes an elastic portion provided with a through hole, a first contact portion arranged at one end in the longitudinal direction of the elastic portion, and a second contact portion arranged at the other end in the longitudinal direction of the elastic portion. and The elastic portion of the probe pin has a meandering shape in which linear portions and curved portions are alternately continuous.

特開２０１７－２２３６２８号公報JP 2017-223628 A

前記プローブピンは、弾性部が伸縮する際の隣接する直線部間の干渉を抑制する点において、改善の余地がある。 The probe pin has room for improvement in terms of suppressing interference between adjacent linear portions when the elastic portion expands and contracts.

本開示は、弾性部が伸縮する際の隣接する直線部間の干渉を抑制可能なプローブピンを提供することを目的とする。 An object of the present disclosure is to provide a probe pin capable of suppressing interference between adjacent linear portions when an elastic portion expands and contracts.

本開示の一態様のプローブピンは、
第１方向に沿って伸縮する弾性部と、
前記弾性部の前記第１方向の一端に配置された第１接触部と、
前記弾性部の前記第１方向の他端に配置された第２接触部と
を備え、
前記弾性部が、
第１弾性片および第２弾性片と、
前記第１弾性片および前記第２弾性片の間に設けられた貫通孔と
を有し、
前記第１弾性片および前記第２弾性片の各々が、
前記第１方向に交差する第２方向に沿って延びる複数の直線部と、
隣接する前記直線部の各々における前記第２方向の両端のいずれかに接続された湾曲部と
を有し、
前記直線部および前記湾曲部が前記第１方向に沿って交互に配置され、
前記第１方向において前記第１接触部の最も近くに配置された前記直線部である第１直線部が、前記第１接触部に対して前記第２方向の一端側から接続され、
前記第１方向において前記第２接触部の最も近くに配置された前記直線部である第２直線部が、前記第２接触部に対して前記第２方向において前記第１接触部と同一側から接続され、
前記第１弾性片の前記湾曲部および前記第２弾性片の前記湾曲部のうち、前記弾性部の前記第２方向の中心を通る中心線から前記第２方向に離れて配置された外側湾曲部の中間部が、前記外側湾曲部が接続された前記直線部の幅よりも大きい幅を有している。 A probe pin according to one aspect of the present disclosure includes:
an elastic portion that expands and contracts along a first direction;
a first contact portion arranged at one end of the elastic portion in the first direction;
a second contact portion arranged at the other end of the elastic portion in the first direction;
The elastic portion is
a first elastic piece and a second elastic piece;
a through hole provided between the first elastic piece and the second elastic piece,
each of the first elastic piece and the second elastic piece,
a plurality of linear portions extending along a second direction intersecting the first direction;
a curved portion connected to either end in the second direction of each of the adjacent straight portions;
the straight portions and the curved portions are alternately arranged along the first direction;
a first straight portion, which is the straight portion arranged closest to the first contact portion in the first direction, is connected to the first contact portion from one end side in the second direction;
The second straight portion, which is the straight portion located closest to the second contact portion in the first direction, extends from the same side as the first contact portion in the second direction with respect to the second contact portion. connected and
Of the curved portion of the first elastic piece and the curved portion of the second elastic piece, the outer curved portion is arranged away in the second direction from a center line passing through the center of the elastic portion in the second direction. has a width greater than the width of the straight portion to which the outer curved portion is connected.

本開示の一態様の検査治具は、
前記態様のプローブピンと、
前記第１接触部の一部および前記第２接触部の一部が外部に露出した状態で前記プローブピンを収容する収容部を内部に有するハウジングと
を備え、
前記プローブピンが、
前記第１接触部および前記第１直線部を接続する接続部を有し、
前記第１直線部および前記接続部が、前記収容部を構成する前記ハウジングの内面に前記第１方向において接触した状態で、前記収容部に収容されている。 An inspection jig according to one aspect of the present disclosure includes:
the probe pin of the above aspect;
a housing having an accommodating portion inside which accommodates the probe pin with a portion of the first contact portion and a portion of the second contact portion exposed to the outside;
The probe pin is
Having a connecting portion that connects the first contact portion and the first linear portion,
The first linear portion and the connecting portion are accommodated in the accommodating portion while being in contact with the inner surface of the housing that constitutes the accommodating portion in the first direction.

本開示の一態様の検査治具ユニットは、
前記態様の検査治具を複数備える。 An inspection jig unit according to one aspect of the present disclosure includes:
A plurality of inspection jigs according to the aspect described above are provided.

前記プローブピンによれば、弾性部が伸縮する際の隣接する直線部間の干渉を抑制可能なプローブピンを実現できる。 According to the probe pin, it is possible to realize a probe pin capable of suppressing interference between adjacent linear portions when the elastic portion expands and contracts.

前記検査治具によれば、前記プローブピンが伸縮する際の弾性部の隣接する直線部間の干渉を抑制可能な検査治具を実現できる。 According to the inspection jig, it is possible to realize an inspection jig capable of suppressing interference between adjacent linear portions of the elastic portion when the probe pin expands and contracts.

前記検査治具ユニットによれば、前記検査治具により、プローブピンが伸縮する際の弾性部の隣接する直線部間の干渉を抑制可能な検査治具ユニットを実現できる。 According to the inspection jig unit, it is possible to realize an inspection jig unit capable of suppressing interference between adjacent linear portions of the elastic portion when the probe pin expands and contracts.

本開示の一実施形態の検査治具を示す斜視図。1 is a perspective view showing an inspection jig according to an embodiment of the present disclosure; FIG. 図１のII-II線に沿った断面図。Sectional drawing along the II-II line of FIG. 図１の検査治具に収容されているプローブピンの第１の部分平面図。FIG. 2 is a first partial plan view of probe pins housed in the inspection jig of FIG. 1; 図１の検査治具に収容されているプローブピンの第２の部分平面図。FIG. 2 is a second partial plan view of probe pins housed in the inspection jig of FIG. 1; 図１の検査治具を備えた検査治具ユニットの平面図。FIG. 2 is a plan view of an inspection jig unit provided with the inspection jig of FIG. 1; 図１の検査治具に収容されているプローブピンの変形例を示す部分平面図。FIG. 2 is a partial plan view showing a modified example of probe pins accommodated in the inspection jig of FIG. 1;

以下、本開示の一例を添付図面に従って説明する。なお、以下の説明では、必要に応じて特定の方向あるいは位置を示す用語（例えば、「上」、「下」、「右」、「左」を含む用語）を用いるが、それらの用語の使用は図面を参照した本開示の理解を容易にするためであって、それらの用語の意味によって本開示の技術的範囲が限定されるものではない。また、以下の説明は、本質的に例示に過ぎず、本開示、その適用物、あるいは、その用途を制限することを意図するものではない。さらに、図面は模式的なものであり、各寸法の比率等は現実のものとは必ずしも合致していない。 An example of the present disclosure will be described below with reference to the accompanying drawings. In the following description, terms indicating specific directions or positions (for example, terms including “upper”, “lower”, “right”, and “left”) are used as necessary, but the use of these terms is are intended to facilitate understanding of the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meanings of these terms. Also, the following description is merely exemplary in nature and is not intended to limit the present disclosure, its applications, or its uses. Furthermore, the drawings are schematic, and the ratio of each dimension does not necessarily match the actual one.

本開示の一実施形態の検査治具１０は、図１に示すように、ハウジング２０と、ハウジング２０の内部に収容されたプローブピン３０とを有している。本実施形態では、検査治具１０は、プローブピン３０を複数有している。各プローブピン３０は、例えば、導電性の材料を用いて電鋳法で形成された細長い薄板状で、第１方向（例えば、Ｙ方向）に沿って伸縮する。各プローブピン３０は、板厚方向（例えば、Ｚ方向）に間隔を空けて並んで配置され、相互に電気的に独立した状態で、ハウジング２０に収容されている。 An inspection jig 10 according to an embodiment of the present disclosure has a housing 20 and probe pins 30 housed inside the housing 20, as shown in FIG. In this embodiment, the inspection jig 10 has a plurality of probe pins 30 . Each probe pin 30 is, for example, an elongated thin plate formed by electroforming using a conductive material, and expands and contracts along a first direction (eg, Y direction). The probe pins 30 are arranged side by side at intervals in the plate thickness direction (for example, the Z direction) and housed in the housing 20 in a mutually electrically independent state.

ハウジング２０は、一例として、絶縁性の略直方体形状で、図１に示すように、ハウジング本体２１と、蓋部２２とを有している。 As an example, the housing 20 has an insulating, substantially rectangular parallelepiped shape, and includes a housing body 21 and a lid portion 22 as shown in FIG. 1 .

ハウジング本体２１は、図２に示すように、その内部に設けられプローブピン３０を収容する凹状の収容部２３と、第１方向Ｙの一端に設けられた第１開口部２４と、第１方向Ｙの他端に設けられた第２開口部２５とを有している。本実施形態では、ハウジング本体２１は、複数の収容部２３を有している。各収容部２３は、収容されているプローブピン３０の板厚方向Ｚに沿って見た場合に、その長手方向に延びる略矩形状を有し、第１開口部２４および第２開口部２５に接続されている。 As shown in FIG. 2, the housing body 21 has a recessed accommodating portion 23 provided therein for accommodating the probe pin 30, a first opening 24 provided at one end in the first direction Y, and a and a second opening 25 provided at the other end of Y. In this embodiment, the housing body 21 has a plurality of accommodating portions 23 . Each accommodating portion 23 has a substantially rectangular shape extending in the longitudinal direction when viewed along the plate thickness direction Z of the accommodated probe pin 30 , and has a first opening 24 and a second opening 25 . It is connected.

第１開口部２４は、後述するプローブピン３０の第１接触部３２のみを第１方向Ｙから挿入可能に構成されている。第１開口部２４は、収容部２３の底面２３１を構成するハウジング本体２１の壁部２１１を第１方向Ｙに貫通する貫通孔２１２に接続されている。貫通孔２１２の第１方向Ｙに交差する第２方向（例えば、Ｘ方向）の一端は、収容部２３の一方の側面２３２に接続されている。貫通孔２１２の第２方向Ｘの他端は、収容部２３の底面２３１に接続されている。貫通孔２１２および収容部２３の底面２３１が接続された角部２３３は、Ｃ面取りされている。これにより、プローブピン３０が伸縮する際にハウジング本体２１に接触して損傷するのを防止している。 The first opening 24 is configured so that only a first contact portion 32 of a probe pin 30, which will be described later, can be inserted from the first direction Y. As shown in FIG. The first opening portion 24 is connected to a through hole 212 that penetrates in the first direction Y through a wall portion 211 of the housing body 21 forming the bottom surface 231 of the accommodating portion 23 . One end of the through-hole 212 in a second direction (eg, X direction) intersecting the first direction Y is connected to one side surface 232 of the accommodating portion 23 . The other end of the through hole 212 in the second direction X is connected to the bottom surface 231 of the housing portion 23 . A corner portion 233 where the through hole 212 and the bottom surface 231 of the accommodating portion 23 are connected is chamfered. This prevents the probe pin 30 from contacting and damaging the housing body 21 when it expands and contracts.

第２開口部２５は、プローブピン３０全体を第１方向Ｙから挿入可能に構成されている。第２開口部２５の第２方向Ｘの一端は、収容部２３の第２方向Ｘにおける一方の側面２３２に接続され、第２開口部２５の第２方向Ｘの他端は、収容部２３の第２方向Ｘにおける他方の側面２３４に接続されている。 The second opening 25 is configured so that the entire probe pin 30 can be inserted from the first direction Y. As shown in FIG. One end of the second opening 25 in the second direction X is connected to one side surface 232 of the housing portion 23 in the second direction X, and the other end of the second opening 25 in the second direction X is connected to the housing portion 23 . It is connected to the other side surface 234 in the second direction X.

蓋部２２は、ハウジング本体２１の第２開口部２５側の端面に取り付けられて、第２開口部２５を覆っている。蓋部２２は、第２接触部３３のみを収容可能な貫通孔２６を有している。貫通孔２６は、蓋部２２がハウジング本体２１に取り付けられた状態で、第１開口部２４を通り第１方向Ｙに沿って延びる仮想直線Ｌ１上に配置されている。言い換えると、ハウジング本体２１の貫通孔２１２と、蓋部２２の貫通孔２６とは、仮想直線Ｌ１を軸とする同軸上に配置されている。本実施形態では、仮想直線Ｌ１は、第１接触部３２の本体部３２１の第２方向Ｘの中心と、第２接触部３３の第３接点部３３２とを通る。貫通孔２６の第２方向Ｘの一端は、収容部２３の第２方向Ｘにおける一方の側面２３２に接続されている。 The lid portion 22 is attached to the end face of the housing body 21 on the second opening 25 side to cover the second opening 25 . The lid portion 22 has a through hole 26 that can accommodate only the second contact portion 33 . The through-hole 26 is arranged on an imaginary straight line L1 extending along the first direction Y through the first opening 24 in a state where the lid portion 22 is attached to the housing body 21 . In other words, the through-hole 212 of the housing body 21 and the through-hole 26 of the lid portion 22 are coaxially arranged with the imaginary straight line L1 as an axis. In the present embodiment, the virtual straight line L1 passes through the center of the main body portion 321 of the first contact portion 32 in the second direction X and the third contact portion 332 of the second contact portion 33 . One end of the through-hole 26 in the second direction X is connected to one side surface 232 of the accommodating portion 23 in the second direction X. As shown in FIG.

収容部２３の収容されたプローブピン３０は、後述するプローブピン３０の弾性部３１を構成する第１直線部４１が、収容部２３の底面２３１を構成するハウジング本体２１の内面に接触している。第１開口部２４を介して、第１接触部３２の一部がハウジング２０の外部に露出している。また、収容部２３に収容されたプローブピン３０は、後述するプローブピン３０の弾性部３１を構成する第２直線部４５および接続部７０が、収容部２３を構成する蓋部２２のハウジング本体２１に対向する面２２１に接触している。第２開口部２５を介して、後述するプローブピン３０の第２接触部３３がハウジング２０の外部に露出している。 In the probe pin 30 housed in the housing portion 23 , the first linear portion 41 constituting the elastic portion 31 of the probe pin 30 described later is in contact with the inner surface of the housing body 21 constituting the bottom surface 231 of the housing portion 23 . . A portion of the first contact portion 32 is exposed to the outside of the housing 20 through the first opening 24 . Further, the probe pin 30 accommodated in the accommodating portion 23 is such that the second linear portion 45 and the connecting portion 70 constituting the elastic portion 31 of the probe pin 30 described later are connected to the housing body 21 of the lid portion 22 constituting the accommodating portion 23 . is in contact with the surface 221 facing the . A second contact portion 33 of the probe pin 30 , which will be described later, is exposed to the outside of the housing 20 through the second opening 25 .

プローブピン３０は、例えば、図２に示すように、第１方向Ｙに沿って伸縮する弾性部３１と、弾性部３１の第１方向Ｙの一端に配置された第１接触部３２と、弾性部３１の第１方向Ｙの他端に配置された第２接触部３３とを備えている。 For example, as shown in FIG. 2, the probe pin 30 includes an elastic portion 31 that expands and contracts along the first direction Y, a first contact portion 32 arranged at one end of the elastic portion 31 in the first direction Y, an elastic a second contact portion 33 arranged at the other end of the portion 31 in the first direction Y;

弾性部３１は、一例として、図２に示すように、全体として蛇行形状を有している。弾性部３１は、図３および図４に示すように、第１弾性片４０および第２弾性片５０と、第１弾性片４０および第２弾性片５０の間に設けられた貫通孔６０とを有している。 As an example, the elastic portion 31 has a meandering shape as a whole, as shown in FIG. As shown in FIGS. 3 and 4, the elastic portion 31 includes a first elastic piece 40, a second elastic piece 50, and a through hole 60 provided between the first elastic piece 40 and the second elastic piece 50. have.

第１弾性片４０および第２弾性片５０の各々は、複数の直線部と、少なくとも１つの湾曲部とを有し、直線部および湾曲部が第１方向Ｙに沿って交互に配置されている。各直線部は、第２方向Ｘに沿って延びている。湾曲部は、隣接する直線部の各々における第２方向Ｘの両端のいずれかに接続されている。 Each of the first elastic piece 40 and the second elastic piece 50 has a plurality of straight portions and at least one curved portion, and the straight portions and curved portions are alternately arranged along the first direction Y. . Each linear portion extends along the second direction X. As shown in FIG. The curved portion is connected to either end in the second direction X of each of the adjacent straight portions.

複数の直線部は、第１直線部４１と、第２直線部４５と、第３直線部４２、５１とを含む。第１直線部４１は、第１方向Ｙにおいて第１接触部３２の最も近くに配置されている。第２直線部４５は、第１方向Ｙにおいて第２接触部３３の最も近くに配置されている。第３直線部４２は、第１方向Ｙにおいて第１直線部４１および第２直線部４５の間に配置されている。本実施形態では、第１直線部４１および第２直線部４５は、いずれも第１弾性片４０の一部を構成している。第１直線部４１、第２直線部４５および第３直線部４２、５１は、略同一の幅Ｗ１（言い換えると、第１方向Ｙの長さ）を有している。 The plurality of straight portions include a first straight portion 41 , a second straight portion 45 and third straight portions 42 and 51 . The first linear portion 41 is arranged closest to the first contact portion 32 in the first direction Y. As shown in FIG. The second linear portion 45 is arranged closest to the second contact portion 33 in the first direction Y. As shown in FIG. The third straight portion 42 is arranged in the first direction Y between the first straight portion 41 and the second straight portion 45 . In the present embodiment, both the first linear portion 41 and the second linear portion 45 constitute part of the first elastic piece 40 . The first straight portion 41, the second straight portion 45, and the third straight portions 42, 51 have substantially the same width W1 (in other words, the length in the first direction Y).

図３に示すように、第１直線部４１は、第１接触部３２に対して第２方向Ｘの一端側（例えば、図３の左側）から接続されている。 As shown in FIG. 3, the first linear portion 41 is connected to the first contact portion 32 from one end side in the second direction X (for example, the left side in FIG. 3).

図４に示すように、第２直線部４５は、第２接触部３３に対して第２方向Ｘにおいて第１接触部３２と同一側（例えば、図４の左側）から接続されている。本実施形態では、第２直線部４５は、接続部７０を介して第２接触部３３に接続されている。接続部７０は、第１方向Ｙにおける第１弾性片４０の直線部の外端から第２弾性片５０の外端までの長さと略同一の幅（言い換えると、第１方向Ｙの長さ）を有し、貫通孔６０が設けられていない。 As shown in FIG. 4, the second linear portion 45 is connected to the second contact portion 33 from the same side as the first contact portion 32 in the second direction X (for example, the left side in FIG. 4). In this embodiment, the second linear portion 45 is connected to the second contact portion 33 via the connecting portion 70 . The connection portion 70 has a width that is substantially the same as the length from the outer end of the straight portion of the first elastic piece 40 to the outer end of the second elastic piece 50 in the first direction Y (in other words, the length in the first direction Y). and no through hole 60 is provided.

湾曲部は、外側湾曲部４３、５２と、内側湾曲部４４、５３とを含む。外側湾曲部４３、５２は、第１弾性片４０の湾曲部および第２弾性片５０の湾曲部のうち、弾性部３１の第２方向の中心を通る中心線ＣＬから第２方向Ｘに離れて配置された湾曲部を構成している。内側湾曲部４４、５３は、第１弾性片４０の湾曲部および第２弾性片５０の湾曲部のうち、第２方向Ｘにおいて中心線ＣＬの近くに配置された湾曲部を構成している。本実施形態では、内側湾曲部４４、５３の直線部が接続された両端部分を除く中間部は、外側湾曲部４３、５２の中間部の幅Ｗ２よりも小さい幅Ｗ３を有している。 The curved portions include outer curved portions 43 , 52 and inner curved portions 44 , 53 . The outer curved portions 43 and 52 are separated in the second direction X from the center line CL passing through the center of the elastic portion 31 in the second direction of the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50 . It constitutes an arranged curved portion. The inner curved portions 44 and 53 configure the curved portion located near the center line CL in the second direction X among the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50 . In this embodiment, the intermediate portions of the inner curved portions 44 and 53 excluding both end portions where the straight portions are connected have a width W3 that is smaller than the width W2 of the intermediate portions of the outer curved portions 43 and 52 .

図３に示すように、外側湾曲部４３、５２の中間部４３２、５２２は、外側湾曲部４３、５２が接続された直線部の幅Ｗ１よりも大きい幅Ｗ２（言い換えると、外側湾曲部４３、５２の曲率中心に対する径方向の長さ）を有している。つまり、外側湾曲部４３、５２は、中間部４３２、５２２の幅が、直線部が接続された端部４３１、５２１の幅よりも大きくなっている。本実施形態では、外側湾曲部４３、５２の幅Ｗ２は、中間部４３２、５２２のうち、第２方向Ｘにおいて中心線ＣＬから最も離れた部分の幅Ｗ２１が最も大きく、この部分から中心線ＣＬに接近するに従って次第に小さくなっている。 As shown in FIG. 3, intermediate portions 432, 522 of the outer curved portions 43, 52 have a width W2 (in other words, the outer curved portions 43, 52 radial lengths relative to the center of curvature). That is, in the outer curved portions 43, 52, the width of the intermediate portions 432, 522 is larger than the width of the end portions 431, 521 to which the straight portions are connected. In the present embodiment, the width W2 of the outer curved portions 43, 52 is the largest in the width W21 of the portion of the intermediate portions 432, 522 farthest from the center line CL in the second direction X. gradually becomes smaller as it approaches .

図４に示すように、内側湾曲部４４、５３の中間部４４２、５３２は、内側湾曲部４４、５３が接続された直線部の幅Ｗ１よりも大きい幅Ｗ３（言い換えると、内側湾曲部４４、５３の曲率中心に対する径方向の長さ）を有している。つまり、内側湾曲部４４、５３は、中間部４４２、５３２の幅が、直線部が接続された端部４４１、５３１の幅よりも大きくなっている。本実施形態では、内側湾曲部４４、５３の幅Ｗ３も外側湾曲部４３、５２と同様に、中間部４４２、５３２のうち、第２方向Ｘにおいて中心線ＣＬから最も離れた部分の幅Ｗ３１が最も大きく、この部分から中心線ＣＬに接近するに従って次第に小さくなっている。 As shown in FIG. 4, the intermediate portions 442, 532 of the inner curved portions 44, 53 have a width W3 (in other words, the inner curved portion 44, 53). That is, in the inner curved portions 44, 53, the width of the intermediate portions 442, 532 is larger than the width of the end portions 441, 531 to which the straight portions are connected. In the present embodiment, the width W3 of the inner curved portions 44 and 53 is also the same as the outer curved portions 43 and 52, and the width W31 of the portion of the intermediate portions 442 and 532 farthest from the center line CL in the second direction X is It is the largest and gradually becomes smaller as it approaches the center line CL from this portion.

貫通孔６０は、図２に示すように、弾性部３１の形状に沿って、弾性部３１が延びる方向における一端から他端まで連続して延びている。つまり、第１弾性片４０の直線部および第２弾性片５０の直線部の間の貫通孔６０と、第１弾性片４０の湾曲部および第２弾性片５０の湾曲部の間の貫通孔６０とは、相互に接続されている。本実施形態では、湾曲部における貫通孔６０が、直線部における貫通孔６０の幅Ｗ４以下の幅Ｗ５を有している。貫通孔６０の幅Ｗ４、Ｗ５は、例えば、第１弾性片４０および第２弾性片５０間の直線距離の長さである。 As shown in FIG. 2 , the through hole 60 extends continuously from one end to the other end in the direction in which the elastic portion 31 extends along the shape of the elastic portion 31 . That is, the through hole 60 between the straight portion of the first elastic piece 40 and the straight portion of the second elastic piece 50, and the through hole 60 between the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50. and are interconnected. In this embodiment, the through hole 60 in the curved portion has a width W5 that is less than or equal to the width W4 of the through hole 60 in the straight portion. Widths W4 and W5 of the through-hole 60 are, for example, lengths of linear distances between the first elastic piece 40 and the second elastic piece 50 .

第１接触部３２は、図２に示すように、弾性部３１の第１直線部４１が接続された本体部３２１と、本体部３２１から第１方向Ｙに沿って第１直線部４１から離れる方向にそれぞれ延びる第１脚部３２２および第２脚部３２３を有している。第１脚部３２２および第２脚部３２３は、第２方向Ｘに隙間３２４を空けてそれぞれ配置されている。 As shown in FIG. 2 , the first contact portion 32 includes a body portion 321 to which the first straight portion 41 of the elastic portion 31 is connected, and a body portion 321 that separates from the first straight portion 41 along the first direction Y. It has a first leg 322 and a second leg 323 extending in respective directions. The first leg portion 322 and the second leg portion 323 are arranged in the second direction X with a gap 324 therebetween.

第１脚部３２２は、第１方向Ｙにおける本体部３２１から遠い端に設けられ、第２方向Ｘにおいて間隔を空けて配置された一対の第１接点部３２５を有している。第１脚部３２２の第１方向Ｙにおける本体部３２１から遠い端には、第２方向Ｘにおいて第２脚部３２３に接近する方向に突出する突出部３２６が設けられている。各第１接点部３２５は、突出部３２６の第２方向Ｘの両端にそれぞれ配置されている。突出部３２６の一対の第１接点部３２５の間の部分は、第１方向Ｙに沿って本体部３２１に向かう方向に窪んでいる。 The first leg portion 322 has a pair of first contact portions 325 that are provided at an end in the first direction Y farther from the body portion 321 and spaced apart in the second direction X. As shown in FIG. A protruding portion 326 protruding in the second direction X toward the second leg portion 323 is provided at the end of the first leg portion 322 farther from the body portion 321 in the first direction Y. As shown in FIG. Each first contact portion 325 is arranged at both ends of the projecting portion 326 in the second direction X, respectively. A portion of the projecting portion 326 between the pair of first contact portions 325 is recessed along the first direction Y toward the main body portion 321 .

第２脚部３２３は、第１方向Ｙにおける本体部３２１から遠い端に設けられ、第２方向Ｘにおいて間隔を空けて配置された一対の第２接点部３２７を有している。第２脚部３２３の第１方向Ｙにおける本体部３２１から遠い端には、第２方向Ｘにおいて第１脚部３２２に接近する方向に突出する突出部３２８が設けられている。各第２接点部３２７は、突出部３２８の第２方向Ｘの両端にそれぞれ配置されている。突出部３２８の一対の第２接点部３２７の間の部分は、第１方向Ｙに沿って本体部３２１に向かう方向に窪んでいる。 The second leg portion 323 is provided at an end far from the body portion 321 in the first direction Y and has a pair of second contact portions 327 spaced apart in the second direction X. As shown in FIG. A protrusion 328 that protrudes in the second direction X toward the first leg 322 is provided at the end of the second leg 323 far from the main body 321 in the first direction Y. As shown in FIG. Each second contact portion 327 is arranged at both ends of the projecting portion 328 in the second direction X, respectively. A portion of the protruding portion 328 between the pair of second contact portions 327 is recessed along the first direction Y toward the main body portion 321 .

本実施形態では、一対の第１接点部３２５および一対の第２接点部３２７は、同一の第２方向Ｘに沿って延びる仮想直線Ｌ２上に配置されている。第１脚部３２２および第２脚部３２３間の隙間３２４は、突出部３２６、３２８が設けられている部分が、第２方向Ｘにおいて最も小さくなっている。 In this embodiment, the pair of first contact portions 325 and the pair of second contact portions 327 are arranged on the same imaginary straight line L2 extending along the second direction X. As shown in FIG. A gap 324 between the first leg portion 322 and the second leg portion 323 is the smallest in the second direction X at the portions where the projecting portions 326 and 328 are provided.

第２接触部３３は、図２に示すように、接続部７０が接続された本体部３３１と、本体部３３１に設けられた第３接点部３３２とを有している。本体部３３１は、例えば、第１方向Ｙに沿って延びる略矩形状を有している。第３接点部３３２は、本体部３３１の第１方向Ｙにおける弾性部３１から遠い端に設けられ、第１方向Ｙに沿って前記弾性部３１から離れる方向に突出する湾曲形状を有している。本体部３３１の第１方向Ｙにおける弾性部３１に近い端には、切欠３３３が設けられている。切欠３３３は、第２方向Ｘにおいて本体部３３１の接続部７０が接続されている端とは反対側の端に設けられている。 The second contact portion 33 has, as shown in FIG. The body portion 331 has a substantially rectangular shape extending along the first direction Y, for example. The third contact portion 332 is provided at the end of the body portion 331 far from the elastic portion 31 in the first direction Y, and has a curved shape protruding in the first direction Y in a direction away from the elastic portion 31 . . A notch 333 is provided at an end of the body portion 331 in the first direction Y near the elastic portion 31 . The notch 333 is provided at the end opposite to the end of the body portion 331 to which the connection portion 70 is connected in the second direction X. As shown in FIG.

プローブピン３０は、次のような効果を発揮できる。 The probe pin 30 can exhibit the following effects.

プローブピン３０が、第１方向に沿って伸縮する弾性部３１と、弾性部３１の第１方向の一端に配置された第１接触部３２と、弾性部３１の第１方向の他端に配置された第２接触部３３とを備える。弾性部３１が、第１弾性片４０および第２弾性片５０と、第１弾性片４０および第２弾性片５０の間に設けられた貫通孔６０とを有する。第１弾性片４０および第２弾性片５０の各々が、第２方向に沿って延びる複数の直線部と、隣接する直線部の各々における第２方向の両端のいずれかに接続された湾曲部とを有する。直線部および湾曲部が第１方向に沿って交互に配置されている。第１方向において第１接触部３２の最も近くに配置された第１直線部４１が、第１接触部３２に対して第２方向の一端側から接続されている。第１方向において第２接触部３３の最も近くに配置された第２直線部４５が、第２接触部３３に対して第２方向において第１接触部３２と同一側から接続されている。第１弾性片４０の湾曲部および第２弾性片５０の湾曲部のうち、中心線ＣＬから第２方向に離れて配置された外側湾曲部４３、５２の中間部４３２、５２２が、外側湾曲部４３、５２が接続された直線部の幅Ｗ１よりも大きい幅Ｗ２を有している。このような構成により、プローブピン３０が第１方向に沿って伸縮する際に、弾性部３１の隣接する直線部間の接触を回避することができる。その結果、弾性部３１が伸縮する際の隣接する直線部間の干渉を抑制可能なプローブピン３０を実現できる。また、プローブピン３０を圧縮した場合に弾性部３１に加えられる応力を全体として湾曲部から直線部に分散させて、プローブピン３０の耐久性を向上させることができる。 A probe pin 30 includes an elastic portion 31 that expands and contracts along a first direction, a first contact portion 32 arranged at one end of the elastic portion 31 in the first direction, and arranged at the other end of the elastic portion 31 in the first direction. and a second contact portion 33 . The elastic portion 31 has a first elastic piece 40 , a second elastic piece 50 , and a through hole 60 provided between the first elastic piece 40 and the second elastic piece 50 . Each of the first elastic piece 40 and the second elastic piece 50 has a plurality of linear portions extending along the second direction, and curved portions connected to either ends of the adjacent linear portions in the second direction. have Straight portions and curved portions are alternately arranged along the first direction. The first linear portion 41 arranged closest to the first contact portion 32 in the first direction is connected to the first contact portion 32 from one end side in the second direction. The second linear portion 45 arranged closest to the second contact portion 33 in the first direction is connected to the second contact portion 33 from the same side as the first contact portion 32 in the second direction. Of the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50, the intermediate portions 432, 522 of the outer curved portions 43, 52 arranged away from the center line CL in the second direction are the outer curved portions. It has a width W2 that is greater than the width W1 of the straight portion where 43 and 52 are connected. With such a configuration, contact between adjacent straight portions of the elastic portion 31 can be avoided when the probe pin 30 expands and contracts along the first direction. As a result, it is possible to realize the probe pin 30 capable of suppressing interference between adjacent linear portions when the elastic portion 31 expands and contracts. Further, the stress applied to the elastic portion 31 when the probe pin 30 is compressed can be dispersed from the curved portion to the straight portion as a whole, thereby improving the durability of the probe pin 30 .

湾曲部における貫通孔６０が、直線部における貫通孔６０の幅Ｗ４以下の幅Ｗ５を有している。このような構成により、プローブピン３０が第１方向に沿って伸縮する際に、弾性部３１の隣接する直線部間の接触をより確実に回避することができる。また、プローブピン３０を圧縮した場合に弾性部３１に加えられる応力をより確実に分散させることができる。 The through hole 60 in the curved portion has a width W5 that is less than or equal to the width W4 of the through hole 60 in the straight portion. Such a configuration can more reliably avoid contact between adjacent linear portions of the elastic portion 31 when the probe pin 30 expands and contracts along the first direction. Moreover, the stress applied to the elastic portion 31 when the probe pin 30 is compressed can be dispersed more reliably.

第１弾性片４０の湾曲部および第２弾性片５０の湾曲部のうち、第２方向において中心線ＣＬの近くに配置された内側湾曲部４４、５３の中間部４４２、５３２が、外側湾曲部４３、５２の中間部４３２、５２２の幅Ｗ２よりも小さい幅Ｗ３を有している。このような構成により、プローブピン３０を圧縮した場合に弾性部３１に加えられる応力をより確実に分散させることができる。 Of the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50, intermediate portions 442 and 532 of the inner curved portions 44 and 53 arranged near the center line CL in the second direction are the outer curved portions. It has a width W3 that is smaller than the width W2 of the intermediate portions 432,522 of 43,52. With such a configuration, the stress applied to the elastic portion 31 when the probe pin 30 is compressed can be dispersed more reliably.

第１弾性片４０の湾曲部および第２弾性片５０の湾曲部のうち、第２方向において中心線ＣＬの近くに配置された内側湾曲部４４、５３の中間部４４２、５３２が、内側湾曲部４４、５３が接続された直線部の幅Ｗ１よりも大きい幅Ｗ３を有している。このような構成により、プローブピン３０を圧縮した場合に弾性部３１に加えられる応力をより確実に分散させることができる。 Of the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50, intermediate portions 442 and 532 of the inner curved portions 44 and 53 arranged near the center line CL in the second direction are the inner curved portions. It has a width W3 that is greater than the width W1 of the straight portion where 44 and 53 are connected. With such a configuration, the stress applied to the elastic portion 31 when the probe pin 30 is compressed can be dispersed more reliably.

第１接触部３２が、第１直線部４１が接続された本体部３２１と、本体部３２１から第１方向に沿って第１直線部４１から離れる方向にそれぞれ延びると共に、第２方向に隙間３２４を空けてそれぞれ配置された第１脚部３２２および第２脚部３２３とを有する。第１脚部３２２が、第１方向における本体部３２１から遠い端に設けられ、第２方向において間隔を空けて配置された一対の第１接点部３２５を有する。第２脚部３２３が、第１方向における本体部３２１から遠い端に設けられ、第２方向において間隔を空けて配置された一対の第２接点部３２７を有する。このような構成により、一対の第１接点部３２５および一対の第２接点部３２７が、検査対象物または検査装置に対して第２方向に滑りながら接触（ワイピング）して、検査対象物または検査装置に付着した異物を取り除くことができる。また、ワイピングにより取り除かれた異物を第１脚部３２２および第２脚部３２３の隙間３２４から排出することができる。その結果、プローブピン３０の接触信頼性を高めることができる。 The first contact portion 32 extends from the main body portion 321 to which the first straight portion 41 is connected, and the main body portion 321 along the first direction in a direction away from the first straight portion 41, and a gap 324 extends in the second direction. It has a first leg portion 322 and a second leg portion 323 which are respectively arranged with a space between them. A first leg portion 322 is provided at an end farther from the body portion 321 in the first direction and has a pair of first contact portions 325 spaced apart in the second direction. A second leg portion 323 is provided at an end farther from the body portion 321 in the first direction and has a pair of second contact portions 327 spaced apart in the second direction. With such a configuration, the pair of first contact portions 325 and the pair of second contact portions 327 contact (wipe) the inspection object or the inspection device while sliding in the second direction, thereby wiping the inspection object or the inspection device. Foreign matter adhering to the device can be removed. Also, the foreign matter removed by wiping can be discharged from the gap 324 between the first leg portion 322 and the second leg portion 323 . As a result, the contact reliability of the probe pin 30 can be improved.

検査治具１０は、次のような効果を発揮できる。 The inspection jig 10 can exhibit the following effects.

検査治具１０が、プローブピン３０と、第１接触部３２の一部および第２接触部３３の一部が外部に露出した状態でプローブピン３０を収容する収容部２３を内部に有するハウジング２０とを備える。プローブピン３０が、第２接触部３３および第２直線部４５を接続する接続部７０を有し、第２直線部４５および接続部７０が、収容部２３を構成するハウジング２０の内面に第１方向において接触した状態で、収容部２３に収容されている。プローブピン３０が伸縮する際の弾性部３１の隣接する直線部間の干渉を抑制可能な検査治具１０を実現できる。また、弾性部３１のばね性を確保しつつ、プローブピン３０が第１接触部３２から第２接触部３３に向かって押圧された場合の検査治具１０の強度を確保することができる。 A housing 20 in which the inspection jig 10 has therein a probe pin 30 and an accommodating portion 23 that accommodates the probe pin 30 with a portion of the first contact portion 32 and a portion of the second contact portion 33 exposed to the outside. and The probe pin 30 has a connection portion 70 that connects the second contact portion 33 and the second linear portion 45 , and the second linear portion 45 and the connection portion 70 are formed on the inner surface of the housing 20 forming the housing portion 23 . They are housed in the housing portion 23 while being in contact with each other in the direction. It is possible to realize the inspection jig 10 capable of suppressing interference between adjacent linear portions of the elastic portion 31 when the probe pin 30 expands and contracts. Moreover, the strength of the inspection jig 10 when the probe pin 30 is pressed from the first contact portion 32 toward the second contact portion 33 can be ensured while ensuring the springiness of the elastic portion 31 .

収容されているプローブピン３０の外側湾曲部が、湾曲部の第２方向において中心線ＣＬから遠い外面から中心線ＣＬに接近する方向に延びる幅を有している。このような構成により、収容部２３のスペースに制約がある場合であっても、プローブピン３０を正常に動作させることができる。 The outer curved portion of the received probe pin 30 has a width extending in the second direction of the curved portion from an outer surface farther from the centerline CL toward the centerline CL. With such a configuration, the probe pin 30 can be operated normally even when the space of the housing portion 23 is restricted.

検査治具１０およびプローブピン３０は、次のように構成することもできる。 The inspection jig 10 and the probe pins 30 can also be configured as follows.

図５に示すように、複数の検査治具１０で検査治具ユニット１を構成することができる。検査治具ユニット１は、複数の検査治具１０を収容して位置決めするハウジングを備えていてもよい。 As shown in FIG. 5, a plurality of inspection jigs 10 can constitute an inspection jig unit 1 . The inspection jig unit 1 may include a housing that accommodates and positions a plurality of inspection jigs 10 .

前記実施形態では、プローブピン３０は、仮想直線Ｌ１の近くに配置された外側湾曲部（例えば、湾曲部５２）と、仮想直線Ｌ１から離れて配置されている外側湾曲部（例えば、湾曲部４３）とが略同一の形状し、第２方向Ｘにおいて中心線ＣＬから最も離れた部分の幅Ｗ２１が略同一の弾性部３１を備えているが、これに限らない。図６に示すように、プローブピン３０は、仮想直線Ｌ１の近くに配置された外側湾曲部（例えば、湾曲部５２）と、仮想直線Ｌ１から離れて配置されている外側湾曲部（例えば、湾曲部４３）とが異なる形状を有する弾性部３１を備えてもよい。図６のプローブピン３０では、湾曲部５２の第２方向Ｘにおいて中心線ＣＬから最も離れた部分の幅Ｗ２２が、湾曲部４３の第２方向Ｘにおいて中心線ＣＬから最も離れた部分の幅Ｗ２３よりも大きくなっている。湾曲部４３の中間部４３２の幅Ｗ２は、湾曲部４３が接続された直線部の幅Ｗ１よりも僅かに大きい幅Ｗ２を有している。このように構成することで、弾性部３１の伸縮を直線化して、第１接触部３２および第２接触部３３の横滑り（つまり、第２方向Ｘへの移動）を防止することができる。 In the above embodiment, the probe pin 30 has an outer curved portion (eg, curved portion 52) located near the imaginary straight line L1 and an outer curved portion (eg, curved portion 43) located away from the imaginary straight line L1. ) have substantially the same shape, and the width W21 of the portion farthest from the center line CL in the second direction X is substantially the same, but the present invention is not limited to this. As shown in FIG. 6, the probe pin 30 has an outer curved portion (eg, curved portion 52) located near the imaginary straight line L1 and an outer curved portion (eg, curved portion 52) located away from the imaginary straight line L1. The elastic portion 31 having a shape different from that of the portion 43) may be provided. In the probe pin 30 of FIG. 6, the width W22 of the portion of the curved portion 52 farthest from the center line CL in the second direction X is the width W23 of the portion of the curved portion 43 farthest from the center line CL in the second direction X. is larger than The width W2 of the intermediate portion 432 of the curved portion 43 has a width W2 slightly larger than the width W1 of the straight portion to which the curved portion 43 is connected. By configuring in this way, the expansion and contraction of the elastic portion 31 can be linearized to prevent the first contact portion 32 and the second contact portion 33 from sideways slipping (that is, movement in the second direction X).

弾性部３１の直線部は、複数設けられていればよい。弾性部３１の湾曲部は、少なくとも１つ設けられていればよい。 A plurality of linear portions of the elastic portion 31 may be provided. At least one curved portion of the elastic portion 31 may be provided.

第１接触部３２および第２接触部３３は、プローブピン３０の設計等に応じて任意の構成を採用できる。例えば、検査対象物または検査装置に応じて、任意の形状および構成の接点を第１接触部３２および第２接触部３３に設けることができる。つまり、第１接触部３２が、第１脚部３２２および第２脚部３２３を有する場合に限らず、第２接触部３３が、第１脚部３２２および第２脚部３２３を有していてもよい。第１接触部３２および第２接触部３３の両方が、第１脚部３２２および第２脚部３２３を有していてもよい。 The first contact portion 32 and the second contact portion 33 can adopt any configuration according to the design of the probe pin 30 or the like. For example, contacts of any shape and configuration can be provided on the first contact portion 32 and the second contact portion 33 depending on the inspection object or inspection device. That is, the first contact portion 32 is not limited to having the first leg portion 322 and the second leg portion 323, and the second contact portion 33 has the first leg portion 322 and the second leg portion 323. good too. Both the first contact portion 32 and the second contact portion 33 may have a first leg portion 322 and a second leg portion 323 .

ハウジング２０は、少なくとも１つのプローブピン３０を収容可能な任意の構成を採用できる。 Housing 20 may have any configuration capable of accommodating at least one probe pin 30 .

接続部７０は、第２直線部４５側ではなく、第１直線部４１側に設けてもよい。つまり、プローブピン３０は、第１直線部４１および接続部７０が、収容部２３を構成するハウジング２０の底面２３１に第１方向Ｙにおいて接触した状態で、収容部２３に収容されていてもよい。 The connecting portion 70 may be provided on the first straight portion 41 side instead of on the second straight portion 45 side. That is, the probe pin 30 may be housed in the housing portion 23 in a state in which the first linear portion 41 and the connection portion 70 are in contact with the bottom surface 231 of the housing 20 forming the housing portion 23 in the first direction Y. .

以上、図面を参照して本開示における種々の実施形態を詳細に説明したが、最後に、本開示の種々の態様について説明する。なお、以下の説明では、一例として、参照符号も添えて記載する。 Various embodiments of the present disclosure have been described in detail above with reference to the drawings. Finally, various aspects of the present disclosure will be described. In addition, in the following description, reference numerals are also attached as an example.

本開示の第１態様のプローブピン３０は、
第１方向に沿って伸縮する弾性部３１と、
前記弾性部３１の前記第１方向の一端に配置された第１接触部３２と、
前記弾性部３１の前記第１方向の他端に配置された第２接触部３３と
を備え、
前記弾性部３１が、
第１弾性片４０および第２弾性片５０と、
前記第１弾性片４０および前記第２弾性片５０の間に設けられた貫通孔６０と
を有し、
前記第１弾性片４０および前記第２弾性片５０の各々が、
前記第１方向に交差する第２方向に沿って延びる複数の直線部と、
隣接する前記直線部の各々における前記第２方向の両端のいずれかに接続された湾曲部と
を有し、
前記直線部および前記湾曲部が前記第１方向に沿って交互に配置され、
前記第１方向において前記第１接触部３２の最も近くに配置された前記直線部である第１直線部４１が、前記第１接触部３２に対して前記第２方向の一端側から接続され、
前記第１方向において前記第２接触部の最も近くに配置された前記直線部である第２直線部４５が、前記第２接触部３３に対して前記第２方向において前記第１接触部３２と同一側から接続され、
前記第１弾性片４０の前記湾曲部および前記第２弾性片５０の前記湾曲部のうち、前記弾性部３１の前記第２方向の中心を通る中心線ＣＬから前記第２方向に離れて配置された外側湾曲部の中間部が、前記外側湾曲部が接続された前記直線部の幅Ｗ１よりも大きい幅Ｗ２を有している。 The probe pin 30 of the first aspect of the present disclosure is
an elastic portion 31 that expands and contracts along the first direction;
a first contact portion 32 disposed at one end of the elastic portion 31 in the first direction;
and a second contact portion 33 arranged at the other end of the elastic portion 31 in the first direction,
The elastic portion 31 is
a first elastic piece 40 and a second elastic piece 50;
and a through hole 60 provided between the first elastic piece 40 and the second elastic piece 50,
Each of the first elastic piece 40 and the second elastic piece 50 is
a plurality of linear portions extending along a second direction intersecting the first direction;
a curved portion connected to either end in the second direction of each of the adjacent straight portions;
the straight portions and the curved portions are alternately arranged along the first direction;
The first straight portion 41, which is the straight portion arranged closest to the first contact portion 32 in the first direction, is connected to the first contact portion 32 from one end side in the second direction,
The second straight portion 45, which is the straight portion arranged closest to the second contact portion in the first direction, is located between the first contact portion 32 and the second contact portion 33 in the second direction. connected from the same side,
Among the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50, the curved portion is arranged away in the second direction from a center line CL passing through the center of the elastic portion 31 in the second direction. The intermediate portion of the outer curved portion has a width W2 that is greater than the width W1 of the straight portion to which the outer curved portion is connected.

本開示の第２態様のプローブピン３０は、
前記湾曲部における前記貫通孔６０が、前記直線部における前記貫通孔６０の幅Ｗ４以下の幅Ｗ５を有している。 The probe pin 30 of the second aspect of the present disclosure is
The through hole 60 in the curved portion has a width W5 that is less than or equal to the width W4 of the through hole 60 in the straight portion.

本開示の第３態様のプローブピン３０は、
前記第１弾性片４０の前記湾曲部および前記第２弾性片５０の前記湾曲部のうち、前記第２方向において前記中心線ＣＬの近くに配置された内側湾曲部の中間部が、前記外側湾曲部の幅Ｗ２よりも小さい幅Ｗ３を有している。 The probe pin 30 of the third aspect of the present disclosure is
Of the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50, an intermediate portion of the inner curved portion arranged near the center line CL in the second direction is the outer curved portion. It has a width W3 that is smaller than the width W2 of the portion.

本開示の第４態様のプローブピン３０は、
前記弾性部３１が、複数の前記外側湾曲部を有し、
複数の前記外側湾曲部のうち、前記第１接触部および前記第２接触部を通り前記第１方向に沿って延びる仮想直線Ｌ１の近くに配置された前記外側湾曲部の中間部が、前記仮想直線から離れて配置されている前記外側湾曲部の幅Ｗ２３よりも大きい幅Ｗ２２を有している。 The probe pin 30 of the fourth aspect of the present disclosure is
The elastic portion 31 has a plurality of the outer curved portions,
Among the plurality of outer curved portions, an intermediate portion of the outer curved portion disposed near an imaginary straight line L1 passing through the first contact portion and the second contact portion and extending along the first direction corresponds to the imaginary It has a width W22 which is greater than the width W23 of said outer curved portion which is spaced from a straight line.

本開示の第５態様のプローブピン３０は、
前記第１弾性片４０の前記湾曲部および前記第２弾性片５０の前記湾曲部のうち、前記第２方向において前記中心線ＣＬの近くに配置された内側湾曲部の中間部が、前記内側湾曲部が接続された前記直線部の幅Ｗ１よりも大きい幅Ｗ３を有している。 The probe pin 30 of the fifth aspect of the present disclosure is
Of the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50, an intermediate portion of the inner curved portion arranged near the center line CL in the second direction is the inner curved portion. It has a width W3 that is greater than the width W1 of the straight portion to which the portion is connected.

本開示の第６態様のプローブピン３０は、
前記第１接触部３２および前記第２接触部３３の少なくともいずれかが、
前記直線部が接続された本体部３２１と、
前記本体部３２１から前記第１方向に沿って前記直線部から離れる方向にそれぞれ延びると共に、前記第２方向に隙間３２４を空けてそれぞれ配置された第１脚部３２２および第２脚部３２３と
を有し、
前記第１脚部３２２が、前記第１方向における前記本体部３２１から遠い端に設けられ、前記第２方向において間隔を空けて配置された一対の第１接点部３２５を有し、
前記第２脚部３２３が、前記第１方向における前記本体部３２１から遠い端に設けられ、前記第２方向において間隔を空けて配置された一対の第２接点部３２７を有する。 The probe pin 30 of the sixth aspect of the present disclosure is
At least one of the first contact portion 32 and the second contact portion 33 is
a body portion 321 to which the linear portion is connected;
A first leg portion 322 and a second leg portion 323 extending from the main body portion 321 along the first direction in a direction away from the straight portion and arranged with a gap 324 in the second direction. have
The first leg portion 322 is provided at an end far from the body portion 321 in the first direction and has a pair of first contact portions 325 spaced apart in the second direction,
The second leg portion 323 is provided at an end far from the body portion 321 in the first direction and has a pair of second contact portions 327 spaced apart in the second direction.

本開示の第７態様の検査治具１０は、
前記態様のプローブピン３０と、
前記第１接触部３２の一部および前記第２接触部３３の一部が外部に露出した状態で前記プローブピン３０を収容する収容部２３を内部に有するハウジング２０と
を備え、
前記プローブピン３０が、
前記第１接触部３２および前記第１直線部４１または前記第２接触部３３および前記第２直線部４５を接続する接続部７０を有し、
前記第１直線部４１および前記接続部７０または前記第２直線部４５および前記接続部７０が、前記収容部２３を構成する前記ハウジング２０の内面に前記第１方向において接触した状態で、前記収容部２３に収容されている。 The inspection jig 10 of the seventh aspect of the present disclosure is
the probe pin 30 of the above aspect;
A housing 20 having an accommodating portion 23 inside which accommodates the probe pin 30 with a portion of the first contact portion 32 and a portion of the second contact portion 33 exposed to the outside,
The probe pin 30 is
Having a connection portion 70 that connects the first contact portion 32 and the first straight portion 41 or the second contact portion 33 and the second straight portion 45,
In a state in which the first straight portion 41 and the connection portion 70 or the second straight portion 45 and the connection portion 70 are in contact with the inner surface of the housing 20 forming the accommodating portion 23 in the first direction, the accommodating portion It is housed in section 23 .

本開示の第８態様の検査治具１０は、
前記外側湾曲部が、前記湾曲部の前記第２方向において前記中心線ＣＬから遠い外面から前記中心線ＣＬに接近する方向に延びる幅を有している。 The inspection jig 10 of the eighth aspect of the present disclosure is
The outer curved portion has a width extending in the second direction of the curved portion from an outer surface farther from the center line CL toward a direction closer to the center line CL.

本開示の第９態様の検査治具ユニット１は、
前記態様の検査治具１０を複数備える。 The inspection jig unit 1 of the ninth aspect of the present disclosure includes
A plurality of inspection jigs 10 of the above aspect are provided.

なお、前記様々な実施形態または変形例のうちの任意の実施形態または変形例を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。また、実施形態同士の組み合わせまたは実施例同士の組み合わせまたは実施形態と実施例との組み合わせが可能であると共に、異なる実施形態または実施例の中の特徴同士の組み合わせも可能である。 By appropriately combining any of the various embodiments or modifications described above, the respective effects can be obtained. In addition, combinations of embodiments, combinations of examples, or combinations of embodiments and examples are possible, as well as combinations of features in different embodiments or examples.

本開示は、添付図面を参照しながら好ましい実施形態に関連して充分に記載されているが、この技術の熟練した人々にとっては種々の変形や修正は明白である。そのような変形や修正は、添付した請求の範囲による本開示の範囲から外れない限りにおいて、その中に含まれると理解されるべきである。 Although the present disclosure has been fully described in connection with preferred embodiments and with reference to the accompanying drawings, various variations and modifications will become apparent to those skilled in the art. Such variations and modifications are to be understood as included therein insofar as they do not depart from the scope of the present disclosure by the appended claims.

本開示のソケットは、例えば、カメラモジュールなどのＢｔｏＢ（Business-to-Business）コネクタを接続媒体として備えるモジュール、および、ＳＯＰ（Small Outline Package）、ＱＦＰ（Quad Flat Package）、ＢＧＡ（Ball grid array）などの半導体パッケージの検査に用いる検査治具に適用できる。 The socket of the present disclosure is, for example, a module such as a camera module that includes a BtoB (Business-to-Business) connector as a connection medium, an SOP (Small Outline Package), a QFP (Quad Flat Package), and a BGA (Ball grid array). It can be applied to inspection jigs used for inspection of semiconductor packages such as

１ 検査治具ユニット
１０ 検査治具
２０ ハウジング
２１ ハウジング本体
２１１ 壁部
２１２ 貫通孔
２２ 蓋部
２２１ 面
２３ 収容部
２３１ 底面
２３２、２３４ 側面
２３３ 角部
２４ 第１開口部
２５ 第２開口部
２６ 貫通孔
３０ プローブピン
３１ 弾性部
３２ 第１接触部
３２１ 本体部
３２２ 第１脚部
３２３ 第２脚部
３２４ 隙間
３２５ 第１接点部
３２６、３２８ 突出部
３２７ 第２接点部
３３ 第２接触部
３３１ 本体部
３３２ 第３接点部
３３３ 切欠
４０ 第１弾性片
４１ 第１直線部
４２ 第３直線部
４３ 外側湾曲部
４３１ 端部
４３２ 中間部
４４ 内側湾曲部
４４１ 端部
４４２ 中間部
４５ 第２直線部
５０ 第２弾性片
５１ 第３直線部
５２ 外側湾曲部
５２１ 端部
５２２ 中間部
５３ 内側湾曲部
５３１ 端部
５３２ 中間部
６０ 貫通孔
７０ 接続部 1 inspection jig unit 10 inspection jig 20 housing 21 housing main body 211 wall portion 212 through hole 22 lid portion 221 surface 23 accommodating portion 231 bottom surface 232, 234 side surface 233 corner portion 24 first opening portion 25 second opening portion 26 through hole 30 probe pin 31 elastic portion 32 first contact portion 321 body portion 322 first leg portion 323 second leg portion 324 gap 325 first contact portions 326, 328 protrusion portion 327 second contact portion 33 second contact portion 331 body portion 332 Third contact portion 333 Notch 40 First elastic piece 41 First straight portion 42 Third straight portion 43 Outer curved portion 431 End portion 432 Intermediate portion 44 Inner curved portion 441 End portion 442 Intermediate portion 45 Second straight portion 50 Second elasticity Piece 51 Third straight portion 52 Outer curved portion 521 End 522 Intermediate portion 53 Inner curved portion 531 End 532 Intermediate portion 60 Through hole 70 Connecting portion

Claims (9)

第１方向に沿って伸縮する弾性部と、
前記弾性部の前記第１方向の一端に配置された第１接触部と、
前記弾性部の前記第１方向の他端に配置された第２接触部と
を備え、
前記弾性部が、
第１弾性片および第２弾性片と、
前記第１弾性片および前記第２弾性片の間に設けられた貫通孔と
を有し、
前記第１弾性片および前記第２弾性片の各々が、
前記第１方向に交差する第２方向に沿って延びる複数の直線部と、
隣接する前記直線部の各々における前記第２方向の両端のいずれかに接続された湾曲部と
を有し、
前記直線部および前記湾曲部が前記第１方向に沿って交互に配置され、
前記第１方向において前記第１接触部の最も近くに配置された前記直線部である第１直線部が、前記第１接触部に対して前記第２方向の一端側から接続され、
前記第１方向において前記第２接触部の最も近くに配置された前記直線部である第２直線部が、前記第２接触部に対して前記第２方向において前記第１接触部と同一側から接続され、
前記第１弾性片の前記湾曲部および前記第２弾性片の前記湾曲部のうち、前記弾性部の前記第２方向の中心を通る中心線から前記第２方向に離れて配置された外側湾曲部の中間部が、前記外側湾曲部が接続された前記直線部の幅よりも大きい幅を有している、プローブピン。 an elastic portion that expands and contracts along a first direction;
a first contact portion arranged at one end of the elastic portion in the first direction;
a second contact portion arranged at the other end of the elastic portion in the first direction;
The elastic portion is
a first elastic piece and a second elastic piece;
a through hole provided between the first elastic piece and the second elastic piece,
each of the first elastic piece and the second elastic piece,
a plurality of linear portions extending along a second direction intersecting the first direction;
a curved portion connected to either end in the second direction of each of the adjacent straight portions;
the straight portions and the curved portions are alternately arranged along the first direction;
a first straight portion, which is the straight portion arranged closest to the first contact portion in the first direction, is connected to the first contact portion from one end side in the second direction;
The second straight portion, which is the straight portion located closest to the second contact portion in the first direction, extends from the same side as the first contact portion in the second direction with respect to the second contact portion. connected and
Of the curved portion of the first elastic piece and the curved portion of the second elastic piece, the outer curved portion is arranged away in the second direction from a center line passing through the center of the elastic portion in the second direction. has a width greater than the width of said straight portion to which said outer curved portion is connected. 前記湾曲部における前記貫通孔が、前記直線部における前記貫通孔の幅以下の幅を有している、請求項１のプローブピン。 2. The probe pin according to claim 1, wherein said through hole in said curved portion has a width equal to or less than the width of said through hole in said straight portion. 前記第１弾性片の前記湾曲部および前記第２弾性片の前記湾曲部のうち、前記第２方向において前記中心線の近くに配置された内側湾曲部の中間部が、前記外側湾曲部の中間部の幅よりも小さい幅を有している、請求項１または２のプローブピン。 Of the curved portion of the first elastic piece and the curved portion of the second elastic piece, an intermediate portion of the inner curved portion arranged near the center line in the second direction is an intermediate portion of the outer curved portion. 3. A probe pin according to claim 1 or 2, having a width smaller than the width of the portion. 前記弾性部が、複数の前記外側湾曲部を有し、
複数の前記外側湾曲部のうち、前記第１接触部および前記第２接触部を通り前記第１方向に沿って延びる仮想直線の近くに配置された前記外側湾曲部の中間部が、前記仮想直線から離れて配置されている前記外側湾曲部の幅よりも大きい幅を有している、請求項１から３のいずれか１つのプローブピン。 The elastic portion has a plurality of the outer curved portions,
Among the plurality of outer curved portions, an intermediate portion of the outer curved portion disposed near an imaginary straight line extending along the first direction passing through the first contact portion and the second contact portion is aligned with the imaginary straight line. 4. A probe pin as claimed in any one of claims 1 to 3, having a width greater than the width of the outer curved portion spaced apart from. 前記第１弾性片の前記湾曲部および前記第２弾性片の前記湾曲部のうち、前記第２方向において前記中心線の近くに配置された内側湾曲部の中間部が、前記内側湾曲部が接続された前記直線部の幅よりも大きい幅を有している、請求項１から４のいずれか１つのプローブピン。 Of the curved portion of the first elastic piece and the curved portion of the second elastic piece, an intermediate portion of the inner curved portion disposed near the center line in the second direction is connected to the inner curved portion. 5. A probe pin as claimed in any one of claims 1 to 4, having a width greater than the width of said straight portion. 前記第１接触部および前記第２接触部の少なくともいずれかが、
前記直線部が接続された本体部と、
前記本体部から前記第１方向に沿って前記直線部から離れる方向にそれぞれ延びると共に、前記第２方向に隙間を空けてそれぞれ配置された第１脚部および第２脚部と
を有し、
前記第１脚部が、前記第１方向における前記本体部から遠い端に設けられ、前記第２方向において間隔を空けて配置された一対の第１接点部を有し、
前記第２脚部が、前記第１方向における前記本体部から遠い端に設けられ、前記第２方向において間隔を空けて配置された一対の第２接点部を有する、請求項１から５のいずれか１つのプローブピン。 At least one of the first contact portion and the second contact portion
a body portion to which the linear portion is connected;
a first leg and a second leg extending from the main body along the first direction in a direction away from the linear portion and arranged with a gap in the second direction;
the first leg is provided at an end far from the main body in the first direction and has a pair of first contact portions spaced apart in the second direction;
6. Any one of claims 1 to 5, wherein the second leg is provided at an end farther from the main body in the first direction and has a pair of second contact portions spaced apart in the second direction. or one probe pin. 請求項１から６のいずれか１つのプローブピンと、
前記第１接触部の一部および前記第２接触部の一部が外部に露出した状態で前記プローブピンを収容する収容部を内部に有するハウジングと
を備え、
前記プローブピンが、
前記第１接触部および前記第１直線部または前記第２接触部および前記第２直線部を接続する接続部を有し、
前記第１直線部および前記接続部または前記第２直線部および前記接続部が、前記収容部を構成する前記ハウジングの内面に前記第１方向において接触した状態で、前記収容部に収容されている、検査治具。 A probe pin according to any one of claims 1 to 6;
a housing having an accommodating portion inside which accommodates the probe pin with a portion of the first contact portion and a portion of the second contact portion exposed to the outside;
The probe pin is
Having a connection portion that connects the first contact portion and the first straight portion or the second contact portion and the second straight portion,
The first straight portion and the connection portion or the second straight portion and the connection portion are accommodated in the accommodation portion while being in contact with the inner surface of the housing that constitutes the accommodation portion in the first direction. , inspection jig. 前記外側湾曲部が、前記湾曲部の前記第２方向において前記中心線から遠い外面から前記中心線に接近する方向に延びる幅を有している、請求項７の検査治具。 8. The inspection jig of claim 7, wherein said outer curved portion has a width extending in said second direction of said curved portion from an outer surface remote from said centerline toward said centerline. 請求項７または８の検査治具を複数備える、検査治具ユニット。 An inspection jig unit comprising a plurality of inspection jigs according to claim 7 or 8.
JP2021034701A 2021-03-04 2021-03-04 Probe pin, inspection jig, and inspection jig unit Pending JP2022135106A (en)

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KR1020220015937A KR20220125157A (en) 2021-03-04 2022-02-08 Probe pin, inspection jig and inspection jig unit
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