CN206975085U - A kind of precision measurement probe - Google Patents
A kind of precision measurement probe Download PDFInfo
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- CN206975085U CN206975085U CN201720979839.3U CN201720979839U CN206975085U CN 206975085 U CN206975085 U CN 206975085U CN 201720979839 U CN201720979839 U CN 201720979839U CN 206975085 U CN206975085 U CN 206975085U
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Abstract
Electronic Testing Technology field is the utility model is related to, especially a kind of precision measurement probe.The contact end that it includes the detection end formed after being continuously connected the elastic buffer portion formed in the second bending section of serpentine in the first bending section and/or longitudinal section shape of horizontal " u "-shaped by longitudinal section shape, bent upwards along the longitudinal direction by the top in elastic buffer portion and formed after being bent downwards along the longitudinal direction by the bottom in elastic buffer portion.The utility model uses integral telescopic structure, and the contact between its end face and testee can use face contact or Multi-contact, the hard contact for occurring strength between probe and testee can effectively be avoided, to ensure that testee is not damaged;Meanwhile probe can directly be assemblied in enterprising exercise of measurement jig and use, not only without cumbersome assembly manipulation, and also it is easy to process quick, the quantity of the building block of measurement jig is advantageously reduced, effectively reduces use and the maintenance cost of test probe.
Description
Technical field
Electronic Testing Technology field is the utility model is related to, it is especially a kind of to be applied to such as semiconductor packages detection and hand
The precision measurement probe in many Electronic Testing fields such as machine module detection.
Background technology
With the quick and development in pluralism of semiconductor packages manufacture craft and encapsulation technology, for semiconductor elements such as wafers
The specific demand that part is tested also increasingly increases.Exemplified by testing wafer, usually by tester table, measurement jig and quilt
Survey wafer and form test loop, the probe in probe jig is directly contacted with the signal pins in wafer, to draw chip letter
Number and this chip signal data is sent to tester table is analyzed and judged;So as to filter out the electrically core with dysfunction in advance
Piece, to reduce the fraction defective of product.
Traditional test probe is typically combined by three parts such as needle body, spring and needle tubings, wherein, needle body and spring are equal
It is installed within sleeve pipe, to form telescopic mechanism, the probe of this structure among using process all ask as follows by generally existing
Topic:
1st, the syringe needle of needle body is mostly spherical, tip-like or claw-like, and it is relatively small with the contact area of testee, very
Easily cause test result inaccurate because position skew occurs;Meanwhile the diameter of the contact head of probe bodies is relatively small, very
Easily stab testee.
2nd, be even less than 0.15mm for some directly small probes, the diameters at its syringe needle position, be easy to stab by
While surveying object, because syringe needle is meticulous, it is very easy to wear in test process, so as to occur to survey by mistake.
3rd, probe building block is excessive, and inside and outside contact position is on the high side between part, it is easy to increases connecing for probe bodies
Get an electric shock and hinder and reduce its electric conductivity.
4th, to probe bodies carry out cleaning when, generally require and carried out directly on tool, due to probe bodies compared with
Carefully, it is easy to the problems such as causing probe bodies that crooked, bending occurs because of the influence by external force or fractures, and thinner probe
Body, its crooked, bending of generation or risk the problems such as fracture are higher.
5th, probe is assembled or assembled when on tool in the part of itself, and operation is extremely cumbersome laborious, and respectively
Individual part can only first single-piece work, then assembled again, can undoubtedly increase the manufacturing cost of probe or tool and it will be reduced
Manufacture efficiency.
Utility model content
For above-mentioned the shortcomings of the prior art, the purpose of this utility model is to provide a kind of precision measurement probe.
To achieve these goals, the technical solution adopted in the utility model is:
A kind of precision measurement probe, it includes one by least one longitudinal section shape in the first curved of horizontal " u "-shaped
Pars convoluta and/or at least one longitudinal section shape in the second bending section of serpentine be continuously connected the elastic buffer portion formed, one by
The top of first bending section or the detection end formed after being bent upwards along the longitudinal direction by the top of the second bending section and
One bent downwards along the longitudinal direction by the bottom of the first bending section or the bottom of the second bending section after the contact end that is formed.
Preferably, the buffer bar hole portion that distribution is moved towards along the shape in elastic buffer portion is offered in the elastic buffer portion.
Preferably, the probe is tabular or sheet-like structure, the probe made of steel or alloy metal material
Outer surface be coated with Gold plated Layer.
Preferably, the end face of the contact end and/or the end face of detection end are recessed for smooth arc convex or arc
Face.
As a result of such scheme, the utility model uses integral telescopic structure, its end face and testee it
Between contact can use face contact or Multi-contact, the hardness that effectively can avoid occurring strength between probe and testee connect
Touch, to ensure that testee is not damaged;Meanwhile probe can directly be assemblied in measurement jig it is enterprising exercise use, not only without
Cumbersome assembly manipulation is needed, and it is easy to process quick, the quantity of the building block of measurement jig is advantageously reduced, is effectively reduced
Test use and the maintenance cost of probe;Its is simple in construction, test performance is superior, cost is cheap, has very strong practical value
And market popularization value.
Brief description of the drawings
Fig. 1 is the structural representation of the probe of the utility model embodiment;
Fig. 2 is the planar structure schematic diagram of the probe of the utility model embodiment;
Fig. 3 is the cross section structure schematic diagram of the utility model embodiment in specific application;
Fig. 4 is the structural decomposition diagram of the utility model embodiment in specific application;
Fig. 5 is the Standard schematic diagram of the utility model embodiment in specific application.
Embodiment
Embodiment of the present utility model is described in detail below in conjunction with accompanying drawing, but the utility model can be by right
It is required that the multitude of different ways for limiting and covering is implemented.
As depicted in figs. 1 and 2 and Fig. 3 to Fig. 5 is combined, a kind of precision measurement probe that the present embodiment provides, it includes one
It is in the first bending section a and/or at least one longitudinal section shape of horizontal " u "-shaped by least one longitudinal section shape
Second bending section b of serpentine is continuously connected the top or curved by second of the elastic buffer portion 11, one that forms by the first bending section a
Pars convoluta b top is (i.e.:The top in elastic buffer portion 11) bend upwards along the longitudinal direction after the detection end 12 that is formed and
One by the first bending section a bottom or the second bending section b bottom (i.e.:The bottom in elastic buffer portion 11) it is downward along the longitudinal direction
The contact end 13 formed after bending.Thus, by improving the structure of traditional test probe, continuously distributed first is utilized
Bending section a and/or the second bending section b can make whole probe form telescopic structure body, so as to make it have certain elastic energy
Power, when the hard contact that can effectively avoid occurring strength between the two when probe is contacted with testee using testing, with
Ensure that testee is not damaged;Meanwhile after changing traditional test probe needs and needle guard and/or elastomeric element cooperation
The mode that could be used on measurement jig is refilled, its independently constitutes the test component of single structure, you can directly
Enterprising exercise of measurement jig is assemblied in use, not only without cumbersome assembly manipulation, and also it is easy to process quick, advantageously reduce survey
The quantity of the building block of tool is tried, reduces use and the maintenance cost of test probe.
Certainly, it is necessary to which explanation is:The " u "-shaped or serpentine that the present embodiment is addressed not only are defined in the " u "-shaped of standard
Or serpentine, it only represents the general shape of relevant components part, also includes close or similar structure shape in the nature of things
Shape;Moreover, the elastic buffer portion 11 of the present embodiment can be according to actual settings such as length, stroke and the elastic dynamics of test probe
Demand selects the combining form between the first bending section a and the second bending section b, it can be understood as:When even number first is curved
When pars convoluta a be continuously connected that is, its elastic buffer portion 11 formed is curved by one or two or more individual second
Pars convoluta b carries out what continuous linking formed;When the first bending section of odd number a be continuously connected that is, what it was formed
Elastic buffer portion 11 is made up of a first bending section a or by least one first bending section a and at least one second bending
Portion b is continuously connected what is formed.
For the elastic telescopic performance of further lifting test probe, while reduce probe resistance in itself and to improve its conductive
Performance, the buffer bar hole portion 14 that distribution is moved towards along the shape in elastic buffer portion 11 is offered in elastic buffer portion 11.
To strengthen the electric conductivity of probe, while structure bar is provided to expand the contact area between probe and testee
Part, the probe of the present embodiment is preferably tabular or sheet-like structure made of steel or alloy metal material, and in probe
Outer surface be coated with Gold plated Layer (not shown).Can be the contact of probe using tabular or the structure type of sheet with this
Contact relation between end and testee provides architecture basics using face contact form, avoids traditional test probe substantially
The problem of contact area is small be present using needle body shape structure (predominantly point contact).Meanwhile the probe of tabular or laminated structure
Also there is enough resistance to warping, bend resistance or the anti-performance to fracture, be advantageous to improve the service life of probe.
It is effectively anti-while electric current conduction stability is ensured to be effectively increased the contact area of probe and testee
Only there is traditional test probe because of the problem of contact head easily stabs testee using structures such as needle-like, spherical or claw-likes
Occur, the end face of the contact end 13 of the present embodiment and/or the end face for detecting end 12 can be preferably flat according to actual conditions
Sliding arc-shaped concave or arc convex.With this, ensure the contact between the structure both ends of probe and contactant (such as testee)
Relation is contacted for face or Multi-contact, so that it is guaranteed that stability of the probe in test, while can also effectively improve probe tips
Wear resistance.
To absolutely prove the superiority of the probe of the present embodiment, probe can be made into practical application in the following way, with shape
Into a kind of precision measurement tool, as shown in Figures 1 to 5, it includes making the positioning dials relatively moved along the longitudinal direction each other
20 and test connector 30 and at least one set of test faller gill being distributed along the longitudinal direction through positioning dials 20, every group of test
Faller gill is formed by two test probes 10 relative to positioning 20 symmetrical distribution of dials, and test probe 10 is above-mentioned
A kind of precision measurement probe;Wherein, when position dials 20 drive test probe 10 close to test connector 30 when or test connection
When device 30 is close to test probe 10 (that is, after the contact end 13 of test probe 10 contacts with testee, test connection
With positioning dials 20, test probe 10 and testee relative position movement occurs for device 30 simultaneously when), test the inspection of probe 10
Survey end 12 to abut against with test connector 30, so that can be by testee and the letter of test connector 30 using probe 10 is tested
Number it is conducted, to realize the detection to testee.Based on this, carried using assembling of the positioning dials 20 as test probe 10
Body, the structure type of dials+probe is formed to replace the dials+needle guard and/or elastomeric element+probe in traditional test tool
Structure type, so as to effectively simplify the structure of measurement jig, and provide convenience, have for the quick assembling and maintenance of probe
Beneficial to the use cost and maintenance cost for reducing measurement jig;And existed based on test probe 10 design feature of itself, probe
Both ends are pressurized (i.e.:Detection end 12 and contact end 13 are in contact with test connector 30 and testee respectively) when, it can keep away
The appearance for the problems such as exempting from probe to bend in transverse direction, and then avoiding crooked probe, bending or fracture.
To ensure that positioning dials 20 can provide abundant enough and firm space to test the assembling of probe 10, ensure to survey
The stability of tool performance and the accuracy of measurement are tried, in the position that positioning dials 20 is interior and corresponding with every test probe 10
Offer the stroke limit chamber 21 in an elastic buffer portion 11 for being used for accommodating test probe 10, for being connect for testing probe 10
Contacting end portion 13 is through the contact jaw stroke passage 22 for being distributed and being connected with stroke limit chamber 21 and for for testing probe 10
Detection end 12 through being distributed and the test side stroke passage 23 that is connected with stroke limit chamber 21.Thus, limited using stroke
Position chamber 21 can will test the main part of probe 10 (i.e.:Elastic buffer portion 11) firmly it is defined to relatively closed cavity space
It is interior, after end 12 is detected or contact end 13 is pressurized, corresponding end can be made to be compressed into row along corresponding stroke passage
In journey limit chamber 21, there is enough elastic telescopic performances so as to ensure to test probe 10;Meanwhile utilize the knot for positioning dials 20
Configuration formula can avoid testing the generation for the problems such as probe 10 easily causes test result inaccuracy because position skew occurs.
For ease of to test probe 10 and measurement jig quickly dismount, safeguard and change, the present embodiment is determined
Position dials 20 includes assembled lower dials seat 24, upper dials seat 25 and the connector positioning seat 26 being integrated of order along the longitudinal direction,
Offered on the top surface of connector positioning seat 26 for for the chimeric stroke groove 27 of the contraposition of test connector 30, and stroke limit
Chamber 21 is then opened in lower dials seat 24 and upper dials seat 25, and contact jaw stroke passage 22 is opened in the bottom of lower dials seat 24
Interior, the top ends and connector positioning seat 26 of test side stroke passage 23 through upper dials seat 25 are distributed.Thus, by that will determine
The structure that position dials 20 is arranged to split pin-connected panel can provide structural condition to test the fast assembling-disassembling of probe 10, and position dials
20 each building block can form standard component in favor of the processing and manufacturing of part and disassemble assembling, so as to effectively
Reduce the production cost and use cost of tool.
To increase the testing efficiency of measurement jig to greatest extent, while by expanding detection end 12 and test connector
Contact area between 30 contact ensures the accuracy of test result, and the test connector 30 of the present embodiment includes main board portion
31 and at least one set of detection contact row corresponding with the quantity of test faller gill and position (arranged if multigroup test contact, then
It can be made to be distributed side by side in front and rear), every group of detection contact row is by two inspections relative to 31 symmetrical distribution of main board portion
Survey contact 32 to form, the end face of detection contact 32 is smooth arc convex, and the end face of the detection end 12 of test probe 10 is excellent
Elect as the chimeric smooth arc-shaped concave of the end contraposition of detection contact 32, preferably, due to the survey of the present embodiment
It is preferably sheet or platy structure form to sound out pin 10, therefore detects contact 32 and be preferably also tabular or laminated structure, thus, can be had
Contact area between effect increase detection contact 32 and detection end 12, the electric conductivity of enhancing tool in itself, so as to improve electricity
Flow the stability and accuracy of signal transmission.
Preferred embodiment of the present utility model is the foregoing is only, not thereby limits the scope of the claims of the present utility model,
Every equivalent structure made using the utility model specification and accompanying drawing content or equivalent flow conversion, or directly or indirectly fortune
Used in other related technical areas, similarly it is included in scope of patent protection of the present utility model.
Claims (4)
- A kind of 1. precision measurement probe, it is characterised in that:It is in horizontal " u "-shaped that it, which includes one by least one longitudinal section shape, The first bending section and/or at least one longitudinal section shape be continuously connected the elasticity formed in the second bending section of serpentine and delay Rush portion, one bent upwards along the longitudinal direction by the top of the first bending section or by the top of the second bending section after the detection that is formed End and one bent downwards along the longitudinal direction by the bottom of the first bending section or the bottom of the second bending section after formed connect Contacting end portion.
- A kind of 2. precision measurement probe as claimed in claim 1, it is characterised in that:Offered in the elastic buffer portion along bullet Property buffer part shape move towards distribution buffer bar hole portion.
- A kind of 3. precision measurement probe as claimed in claim 1, it is characterised in that:The probe is by steel or alloying metal Tabular made of material or sheet-like structure, the outer surface of the probe are coated with Gold plated Layer.
- A kind of 4. precision measurement probe as any one of claim 1-3, it is characterised in that:The end of the contact end Face and/or the end face for detecting end are smooth arc convex or arc-shaped concave.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201720979839.3U CN206975085U (en) | 2017-08-04 | 2017-08-04 | A kind of precision measurement probe |
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CN201720979839.3U CN206975085U (en) | 2017-08-04 | 2017-08-04 | A kind of precision measurement probe |
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CN206975085U true CN206975085U (en) | 2018-02-06 |
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CN201720979839.3U Active CN206975085U (en) | 2017-08-04 | 2017-08-04 | A kind of precision measurement probe |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108572264A (en) * | 2018-06-21 | 2018-09-25 | 武汉精测电子集团股份有限公司 | A kind of crimping shrapnel in single buffer channel |
CN108776400A (en) * | 2018-07-17 | 2018-11-09 | 武汉精测电子集团股份有限公司 | A kind of portable electronic screen test fixture of adjustable angle |
CN111044763A (en) * | 2019-12-24 | 2020-04-21 | 深圳市新富城电子有限公司 | Circuit board test probe and manufacturing method thereof |
CN111446568A (en) * | 2019-01-17 | 2020-07-24 | 钰达系统株式会社 | Multi-contact socket capable of preventing pins from being damaged |
CN111579833A (en) * | 2020-05-18 | 2020-08-25 | 武汉精毅通电子技术有限公司 | Probe and connector suitable for high-current high-speed signal test |
CN111579831A (en) * | 2020-05-18 | 2020-08-25 | 武汉精毅通电子技术有限公司 | Probe and connector suitable for high-current high-speed signal test |
CN111579834A (en) * | 2020-05-18 | 2020-08-25 | 武汉精毅通电子技术有限公司 | Probe and connector suitable for high-current high-speed signal test |
TWI718610B (en) * | 2018-08-09 | 2021-02-11 | 日商歐姆龍股份有限公司 | Probe unit |
CN113631932A (en) * | 2019-04-25 | 2021-11-09 | 欧姆龙株式会社 | Probe, inspection tool, and inspection unit |
CN113866465A (en) * | 2021-09-22 | 2021-12-31 | 深圳凯智通微电子技术有限公司 | Probe and integrated circuit test equipment |
CN115308456A (en) * | 2022-09-29 | 2022-11-08 | 深圳市道格特科技有限公司 | Vertical probe and probe card |
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CN108572264B (en) * | 2018-06-21 | 2023-12-01 | 武汉精测电子集团股份有限公司 | Crimping shell fragment of single buffering passageway |
CN108572264A (en) * | 2018-06-21 | 2018-09-25 | 武汉精测电子集团股份有限公司 | A kind of crimping shrapnel in single buffer channel |
CN108776400A (en) * | 2018-07-17 | 2018-11-09 | 武汉精测电子集团股份有限公司 | A kind of portable electronic screen test fixture of adjustable angle |
CN108776400B (en) * | 2018-07-17 | 2024-04-05 | 武汉精测电子集团股份有限公司 | Portable electronic screen test fixture of angularly adjustable |
TWI718610B (en) * | 2018-08-09 | 2021-02-11 | 日商歐姆龍股份有限公司 | Probe unit |
CN111446568A (en) * | 2019-01-17 | 2020-07-24 | 钰达系统株式会社 | Multi-contact socket capable of preventing pins from being damaged |
CN113631932A (en) * | 2019-04-25 | 2021-11-09 | 欧姆龙株式会社 | Probe, inspection tool, and inspection unit |
CN111044763A (en) * | 2019-12-24 | 2020-04-21 | 深圳市新富城电子有限公司 | Circuit board test probe and manufacturing method thereof |
CN111579834A (en) * | 2020-05-18 | 2020-08-25 | 武汉精毅通电子技术有限公司 | Probe and connector suitable for high-current high-speed signal test |
CN111579831B (en) * | 2020-05-18 | 2023-03-14 | 武汉精毅通电子技术有限公司 | Probe and connector suitable for high-current high-speed signal test |
CN111579831A (en) * | 2020-05-18 | 2020-08-25 | 武汉精毅通电子技术有限公司 | Probe and connector suitable for high-current high-speed signal test |
CN111579833A (en) * | 2020-05-18 | 2020-08-25 | 武汉精毅通电子技术有限公司 | Probe and connector suitable for high-current high-speed signal test |
CN113866465A (en) * | 2021-09-22 | 2021-12-31 | 深圳凯智通微电子技术有限公司 | Probe and integrated circuit test equipment |
CN115308456A (en) * | 2022-09-29 | 2022-11-08 | 深圳市道格特科技有限公司 | Vertical probe and probe card |
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TR01 | Transfer of patent right |
Effective date of registration: 20190709 Address after: 410000 Yongjia Road, Ningxiang Economic and Technological Development Zone, Ningxiang County, Changsha City, Hunan Province Patentee after: Hunan Jiankun Precision Technology Co., Ltd. Address before: 518000 First Floor, No. 12 South Second Road, Xinqiao New Industrial Zone, Shajing Street, Baoan District, Shenzhen City, Guangdong Province Patentee before: Jian Kun precision technology (Shenzhen) Co., Ltd. |
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TR01 | Transfer of patent right |