TWI718610B - Probe unit - Google Patents

Abstract

The present invention provides a probe unit that can cope with miniaturization. The probe unit of the present invention includes: a plate-shaped probe having a first contact portion and a second contact portion at both ends in the first direction, respectively; and a housing capable of passing through the opening of the opening surface at the first contact portion The probe is housed in the state in which the part is arranged on the outside; the swing member is supported by the housing in a state capable of swinging along the first direction and the extending direction of the opening surface, and has a housing capable of accommodating the first contact part. Hole; and an urging part for urging the swinging member to the housing in the first direction toward the initial position, and urging the swinging member to the housing in the extending direction of the opening surface toward the center of the swinging range of the swinging member body.

Description

Probe unit

This disclosure relates to a probe unit.

In electronic component modules such as cameras and liquid crystal panels, in general, continuity inspections and operating characteristics inspections are performed in the manufacturing steps. These inspections are performed by connecting a terminal for connecting to a main body substrate provided in an electronic component module with a terminal of an inspection device using a probe pin.

As such a probe, there is a pogo pin type probe described in Patent Document 1. The probe includes: a plunger part having a contact terminal and a plunger body part coaxially arranged with the contact terminal; and a barrel part arranged on the outer peripheral side of the plunger part.

[Prior Art Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2016-142644

In recent years, progress has been made in the miniaturization of electronic component modules, and inspection tools for inspecting electronic component modules are required to also respond to the miniaturization. Generally speaking, the smaller the size of the pogo pin probe such as the probe, the lower the rigidity and the easier it is to damage. because Therefore, the inspection tool using the probe may not be able to cope with miniaturization.

The subject of the present disclosure is to provide a probe unit that can cope with miniaturization.

The probe unit of an example of the present disclosure includes: a plate-shaped probe having a first contact part and a second contact part at both ends in a first direction, respectively; and a housing having an opening that crosses the first direction The probe can be housed inside in a state in which the first contact portion is arranged outside through the opening of the opening surface; the swing member can be moved along the first direction and The opening surface is supported by the housing in a state of swinging in the extending direction, and has a receiving hole penetrating in the first direction and capable of housing the first contact portion; and an urging portion disposed on the housing The inside of the body, and in the first direction toward the initial position farthest from the opening surface, the swing member is forced to the housing, and the swing member is directed toward the swing member in the extending direction of the opening surface The center of the swing range urges the swing member to the housing.

According to the probe unit, a plate-shaped probe and a swing member are provided, and the swing member has a receiving hole capable of receiving the first contact portion of the probe. With this configuration, it is possible to easily realize a probe unit that can cope with miniaturization.

1: Probe unit

10: Shell

11: Base shell

12: core shell

13: Shell housing

17: Pin member

18: Groove

20: Probe

21: The first contact part (contact part)

22: The second contact part (contact part)

23, 27: body part

24, 25: feet

26: gap

30: swing member

31: Swing plate

32: Support

33: recess

34: Containment hole

35, 36: gap

37: flat part

38: Flange

50: Coil spring (forcing part)

111: The first opening surface (opening surface)

112: The second opening surface (opening surface)

113, 114: opening

115: Containment Slot

116, 117, 118: plate members

121: The first core shell (core shell)

122: second core shell (core shell)

123: Probe Containment Department

201: Elastic part

202: first contact

203: second contact part

204: Abutment part (first abutment part)

205: contact part

231, 271: abutment part (second abutment part)

232, 272: one end

241, 251: Protruding part

GP: Center of gravity

L1~L5: imaginary straight line

P1: initial position

P2: Action position

X: first direction

Y: second direction

Z: Plate thickness direction

Fig. 1 is a perspective view showing a probe unit according to an embodiment of the present disclosure.

Fig. 2 is a cross-sectional view taken along the line II-II in Fig. 1.

Fig. 3 is a cross-sectional view taken along the line III-III of Fig. 1.

Fig. 4 is a perspective view showing a swing member of the probe unit of Fig. 1.

Fig. 5 is a plan view of the swing member of Fig. 4.

Fig. 6 is an enlarged plan view of the probe unit of Fig. 1.

Fig. 7 is a perspective view showing a probe of the probe unit of Fig. 1.

Fig. 8 is a perspective view showing a modification of the probe unit of Fig. 1.

Fig. 9 is a cross-sectional view taken along the line IX-IX of Fig. 8.

Fig. 10 is a cross-sectional view taken along the line VIII-VIII in Fig. 8.

Fig. 11 is an enlarged plan view of the probe unit of Fig. 8.

Fig. 12 is a perspective view showing a probe of the probe unit of Fig. 8.

Hereinafter, an example of the present disclosure will be described based on the accompanying drawings. Furthermore, in the following description, terms that indicate specific directions or positions are used as necessary (for example, terms including "up", "down", "right", and "left"), but these terms are used for ease It is understood that the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meaning of these terms. In addition, the following description is merely illustrative in nature, and is not intended to limit the present disclosure, its application, or its uses. Furthermore, the drawings are schematic, and the ratios of the dimensions, etc., do not necessarily agree with the actual ones.

As shown in FIG. 1, the probe unit 1 of an embodiment of the present disclosure includes: The housing 10; the plate-shaped probe 20 is housed in the housing 10; and the swing member 30 is swingably supported by the housing 10. In this embodiment, as an example, the plurality of probes 20 are housed in the housing 10. As shown in FIGS. 2 and 3, each probe 20 has a first contact portion 21 and a second contact portion 22 at both ends of the first direction X, and crosses (for example, orthogonally) to the first direction X. ) Are arranged at intervals in the thickness direction Z. That is, the probes 20 are arranged in a row in a state where the plate surfaces face each other.

As an example, as shown in FIG. 1, the housing 10 has a base housing 11 having a substantially rectangular parallelepiped shape and a core housing 12 housed in the base housing 11.

As an example, as shown in FIG. 2, the base case 11 has a pair of opening surfaces 111 and 112 (hereinafter referred to as a first opening surface 111 and a second opening surface 112) that cross the first direction X. A substantially rectangular opening 113 and an opening 114 are respectively provided in the approximate center of the first opening surface 111 and the second opening surface 112 in the longitudinal direction (that is, the plate thickness direction Z). A housing accommodating portion 13 for accommodating the core housing 12 is provided inside the base housing 11. The opening 113 and the opening 114 are respectively connected to the housing accommodating portion 13. The first contact part 21 and the second contact part 22 of the probe 20 are arranged outside the base housing 11 via the opening 113 and the opening 114, respectively. In this embodiment, as shown in FIG. 1, the base case 11 includes three substantially rectangular plate members 116, 117, and 118 stacked in the first direction X. The plate member 116, the plate member 117, and the plate member 118 are integrated by the pin member 17.

A receiving groove 115 is provided around the core housing 12 of the base housing 11. The accommodating grooves 115 are respectively provided on two sides of the plate thickness direction Z of the core housing 12 of the base housing 11 side. Each accommodating groove 115 is located inside the base housing 11 and extends in the thickness direction Z and away from the core housing 12. The support portion 32 of the swing member 30 described later and the coil spring 50 (an example of the urging portion) are respectively accommodated in the interior of each accommodating groove 115. The coil spring 50 faces the support portion 32 in the first direction X and from the second The opening surface 112 applies force toward the direction of the first opening surface 111.

As an example, as shown in FIG. 3, the core case 12 has a first core case 121 and a second core case 122, and the first core case 121 and the second core case 122 are respectively provided with A plurality of probe accommodating parts 123 capable of accommodating the probe 20. In each of the core housing 121 and the core housing 122, the probe accommodating portions 123 are arranged adjacent to each other in a second direction Y crossing (for example, orthogonal) to the first direction X and the plate thickness direction Z, and are arranged by the base The housings 11 are positioned independently of each other and held integrally. As shown in FIG. 2, the probe accommodating portions 123 are arranged in a row at intervals in the thickness direction Z. In each probe accommodating portion 123, one probe 20 is electrically independent from the other probes 20, and each contact portion 21 and contact portion 22 at both ends of the first direction X are located in each core housing 121 , The state of the outside of the core case 122 is accommodated.

In addition, as shown in FIG. 1, the probe unit 1 includes a swing member 30 arranged on the outside of the housing 10. The swing member 30 has a swing plate portion 31 that is arranged to face the first opening surface 111 and a pair of support portions 32 that respectively extend in the first direction X from both ends of the swing plate portion 31 in the thickness direction Z. The swing plate portion 31 is supported by the housing 10 via a pair of support portions 32 in a swingable state.

As shown in FIG. 3, the swing plate portion 31 has: a concave portion 33 provided in the first direction X on a surface opposite to the surface facing the first opening surface 111; and A plurality of receiving holes 34 are provided on the bottom surface of the recess 33. The recess 33 is configured to accommodate a part of the connector and determine the position of the connector relative to the swing member 30 when, for example, an inspection target object or a connector of an inspection device, which is an example of a contact object, is brought into contact with the probe unit 1. Each accommodating hole 34 penetrates the swing plate portion 31 in the first direction X and accommodates the first contact portion 21 of the probe 20. In this embodiment, the number of accommodating holes 34 corresponding to the number of probes 20 accommodated is provided.

As shown in FIG. 2, among the support portions 32, the front end portion away from the swing plate portion 31 in the first direction X is accommodated in the accommodating groove 115 of the base housing 11. A flange portion 38 is provided at the front end of each support portion 32, and the flange portion 38 extends in a direction away from each support portion 32. Each flange portion 38 is arranged in the first direction X so as to be able to contact the inner surface of the base housing 11 constituting the receiving groove 115 and be urged to the base housing 11 by the coil spring 50.

As shown in FIGS. 4 and 5, in the probe unit 1, each flange portion 38 is forced to the base housing 11 by four coil springs 50. In detail, each flange portion 38 has a substantially rectangular shape with a long side in the second direction Y when viewed in a plan view along the first direction X, and is located at both ends of each flange portion 38 in the second direction Y. Equipped with a coil spring 50. In other words, the coil springs 50 are arranged to be respectively located at the vertices of the quadrilateral surrounding the probe 20 in a plan view as viewed along the first direction X.

In addition, as shown in FIG. 5, in a plan view viewed along the first direction X, the center of gravity GP of the swing member 30 is located inside the quadrangle, which will pass through two adjacent ones in the first direction X and the second direction Y. The four imaginary straight lines L1 to L4 at an arbitrary point (for example, the center) of the coil spring 50 serve as one side, respectively. in other words, Each coil spring 50 is arranged so that the center of gravity GP of the swing member 30 is located inside a polygon with each coil spring 50 as an apex.

As shown in FIGS. 2 and 3, the movement of the swing member 30 in the first direction X is restricted between the initial position P1 and the operating position P2 by the flange portion 38 and the accommodating groove 115. The initial position P1 is the position farthest from the first opening surface 111 among the positions in the first direction X in which the swing member 30 can move. In a state where the external force in the first direction X is not applied, the swing member 30 is maintained at the initial position P1 by the force applied by the coil spring 50. The operating position P2 is the position closest to the first opening surface 111 among the positions in the first direction X in which the swing member 30 can move.

In addition, as shown in FIG. 6, in a plan view viewed along the first direction X, a gap 35 in the second direction Y and a gap 35 in the thickness direction Z are provided between each support portion 32 of the swing member 30 and the receiving groove 115. Gap 36. Furthermore, in FIG. 6, only one supporting portion 32 is shown. The movement of the swing member 30 in the second direction Y and the plate thickness direction Z is restricted within the range of the gap 35 and the gap 36. When the first opening surface 111 extends in the extending direction (ie, the extending direction of the plane including the second direction Y and the plate thickness direction Z), the positions where the gap 35 and the gap 36 are formed between the receiving groove 115 and In the center of the swing range, the swing member 30 is urged toward the center of the swing range by the four coil springs 50 in the extending direction of the first opening surface 111.

As an example, as shown in FIG. 7, each probe 20 has a thin plate shape elongated in the first direction X and has conductivity. Each probe 20 includes: an elastic portion 201 that can be elastically deformed along the first direction X; a first contact portion 202 connected to one end of the elastic portion 201 in the first direction X and provided with a first contact portion 21; and a second Contact 203. The other end of the elastic portion 201 in the first direction X is connected and a second contact portion 22 is provided. Each probe 20 is formed by, for example, an electroforming method, and the elastic portion 201, the first contact portion 202, and the second contact portion 203 are arranged in series along the first direction X and are integrally formed.

As an example, the elastic portion 201 includes a plurality of band-shaped elastic pieces arranged with a gap therebetween. Each belt-shaped elastic sheet is a slender belt-like shape, and has substantially the same cross-sectional shape.

As an example, the first contact portion 202 has: a main body 23 that connects the elastic portion 201 from a direction intersecting the first direction X; and a pair of leg portions 24 and 25 that extend from the main body 23 in the first direction X and away from the elastic The direction of the portion 201 extends.

The main body portion 23 has an abutting portion 231 which is disposed at an end close to the elastic portion 201 in the first direction X and extends in the second direction Y.

Each leg 24 and leg 25 are arranged with a gap 26 in the second direction Y, and are configured to be elastically deformable in the second direction Y. A first contact portion 21 is provided at the tip of each leg portion 24 and leg portion 25, respectively. Each first contact portion 21 is configured to be able to contact a contact object (for example, a convex contact of the inspection object) from the first direction X. In addition, each of the leg portion 24 and the leg portion 25 has a protrusion portion 241 and a protrusion portion 251 which are provided on the side surfaces facing each other in the second direction Y. The protrusions 241 and the protrusions 251 protrude so as to block the gap 26 between the pair of leg portions 24 and the leg portion 25, and prevent the contact object from being excessively inserted into the gap 26.

Furthermore, as shown in FIGS. 2 and 3, each first contact portion 21 is received in the corresponding accommodating hole 34 of the swing member 30, and when the swing member 30 is located at the initial position P1, each first contact portion A part of 21 protrudes from the bottom surface of the recess 33.

As an example, the second contact portion 203 has a body portion 27 that connects the elastic portion 201 from the second direction Y. The main body 27 has an abutting portion 271 that extends from an end on the elastic portion 201 side in the first direction X to the second direction Y. The front end of the main body portion 27 in the first direction X has a substantially triangular shape, and the substantially triangular shape is in the first direction X, and the front end becomes thinner as it moves away from the elastic portion 201, and constitutes the second contact portion 22.

The first contact portion 202 and the second contact portion 203 are respectively disposed on an imaginary straight line L5 passing through the center of the pair of legs 24 and 25 of the first contact portion 202 in the second direction Y and extending in the first direction X. The elastic portion 201, each abutting portion 231, and the abutting portion 271 are respectively arranged on the same side in the second direction Y with respect to the imaginary straight line L5.

As shown in FIG. 3, in a state where the probe 20 is housed in each probe accommodating portion 123 of the core housing 12, the abutting portion 231 of the first contact portion 202 and the abutting portion 271 of the second contact portion 203 are respectively It is configured to abut the inner surfaces of the first core case 121 and the second core case 122 that constitute each probe accommodating portion 123 in the first direction X. That is, the positions of the contact parts 21 and 22 of the probe 20 in the first direction X are determined by the contact parts 231 and the contact parts 271.

Furthermore, the elastic portion 201 is arranged on one side with respect to one end 232 of the body portion 23 of the first contact portion 202 in the width direction (ie, the second direction Y) and one end 272 of the body portion 27 of the second contact portion 203 in the width direction. . Furthermore, in this embodiment, the end 232 of the body portion 23 of the first contact portion 202 and the end 272 of the body portion 27 of the second contact portion 203 are arranged on a straight line parallel to the imaginary straight line L5.

The probe unit 1 is used for business-to-business including camera modules, for example (Business-to-Business, B to B) connectors are used as modules for connecting media, as well as small outline package (SOP), quad flat package (QFP), ball grid array (Ball grid array) , BGA) and other semiconductor package conduction inspection or operating characteristic inspection. In such inspections, each probe 20 generally frequently repeatedly contacts and releases contact with an inspection target or an inspection device, which is an example of a contact target, and therefore durability is required. When the probe 20 is miniaturized, this durability requirement is further enhanced.

In addition, the repetitive frequency of the contact and release of the contact with the first contact portion 21 of the inspection target is higher than the repetitive frequency of the contact and release of the contact with the second contact portion 22 of the inspection device. Therefore, ensuring the durability of the first contact portion 21 becomes an important element in reducing the size of the probe unit 1.

In addition, as one of the methods for ensuring the durability of the probe 20, it is possible to consider changing the material of the probe 20. When the probe 20 is formed of a material with high hardness such as a nickel alloy or a titanium alloy, there is a possibility that the contact object may be damaged. Conversely, when the probe 20 is formed of a low-hardness material such as beryllium steel or phosphor bronze, the probe 20 may not have sufficient durability, and the contact object may be repeatedly contacted and released due to sliding. Wear and tear, the contact part will be degraded. Therefore, it is not easy to ensure the durability of the probe 20 by changing the material.

According to the probe unit 1, the plate-shaped probe 20 and the swing member 30 are provided, and the swing member 30 has the receiving hole 34 that can receive the first contact portion 21 of the probe 20. Since the probe 20 has a plate shape, for example, compared with a pogo pin type probe, even if it is miniaturized, it is possible to suppress a decrease in the rigidity of the probe 20 and to ensure durability. In addition, The first contact portion 21 of the probe 20 is accommodated in the receiving hole 34 of the swing member 30. Therefore, even when the probe 20 is miniaturized, the occurrence of damage to the first contact portion 21 can be reduced. That is, with this configuration, it is possible to easily realize the probe unit 1 that can cope with miniaturization.

In addition, the swing member 30 can swing along the first direction X and the extension direction of the first opening surface 111 (that is, the extension direction of the plane including the second direction Y and the thickness direction Z) by the coil spring 50. The state is supported by the housing 10. With this configuration, even if the position of the probe unit 1 with respect to the contact object is shifted, the probe 20 can be positioned more accurately in accordance with the contact object.

In addition, the urging part includes at least three coil springs 50, and in a plan view viewed along the first direction X, the center of gravity of the swing member 30 is located inside a polygon with each coil spring 50 as an apex. With this configuration, it is possible to more reliably swing the swing member 30 along a plane including the second direction Y and the thickness direction Z not only in the first direction X but also in the plane including the second direction Y and the thickness direction Z.

In addition, the urging part has four coil springs 50 that are arranged to surround each vertex of the quadrilateral of the probe 20 in a plan view as viewed along the first direction X. With this configuration, it is possible to more reliably swing the swing member 30 along a plane including the second direction Y and the thickness direction Z not only in the first direction X but also in the plane including the second direction Y and the thickness direction Z.

In addition, the probe 20 includes: an elastic portion 201 capable of elastic deformation along the first direction X; a first contact portion 202 connected to one end of the elastic portion 201 in the first direction X and provided with a first contact portion 21; and The second contact portion 203 is connected to the other end of the elastic portion 201 in the first direction X and is provided with a second contact portion 22. First contact 202 And the second contact portion 203 has an abutting portion 231 and an abutting portion 271. The abutting portion 231 and the abutting portion 271 respectively extend along the second direction Y and are in contact with the housing 10 in the first direction X. The inner surface of the abutment restricts the movement of the probe 20 in the first direction X. With this configuration, the probe unit 1 that can cope with miniaturization can be realized more easily.

In addition, the housing 10 has: a first core housing 121 and a second core housing 122, each having a probe accommodating portion 123 capable of accommodating and holding the probe 20; In a state where the probe accommodating portion 123 of the housing 122 is adjacently arranged in the second direction Y, the core housing 121 and the core housing 122 are positioned independently of each other and are integrally held. With this configuration, for example, the base case 11 and the core case 12 can be used in common and configured to be able to independently position a plurality of different types of core cases 12 determined in advance with respect to one base case 11. It is held integrally, thereby improving the productivity of the probe unit 1.

Furthermore, the urging part is not limited to the case where four coil springs 50 are included, as long as it includes at least three coil springs 50. For example, in the case of three coil springs 50 constituting the urging part, only one coil spring 50 needs to be arranged at the center of one flange part 38 in the second direction Y, and the other flange part 38 is positioned at the center of the second direction Y. One coil spring 50 may be arranged at each end.

In addition, the probe unit 1 can also be configured as shown in FIGS. 8 to 12, for example. In the probe unit 1 shown in FIGS. 8 to 12, the swing member 30 is arranged inside the housing 10 instead of outside the housing 10. As shown in FIGS. 9 and 10, in addition to the core case 12, the case accommodating portion 13 of the base case 11 surrounds the swing member 30 via the first direction X and accommodates it in a state capable of swinging in the first direction X Swing member 30. A groove 18 is provided on the first opening surface 111 of the base housing 11, and the groove 18 extends in the second direction Y and communicates with the opening 113 and the outside of the base housing 11.

As shown in FIG. 9 and FIG. 10, the swing member 30 is disposed in the opening 113 which opens on the first opening surface 111 of the base housing 11. As shown in FIG. 11, in a plan view viewed along the first direction X, a gap 35 in the second direction Y and a gap 36 in the thickness direction Z are provided between the swing plate portion 31 and the opening portion 113 of the swing member 30. .

In this way, in the probe unit 1 shown in FIGS. 8 to 12, in the initial state P1, substantially the entire first contact portion 21 is covered by the housing 10 and the swing member 30. Therefore, the occurrence of damage to the first contact portion 21 can be further reduced, and therefore, the probe unit 1 that can cope with miniaturization can be realized more easily.

In addition, as shown in FIG. 8, a flat portion 37 is provided around the concave portion 33 of the swing plate portion 31, and the flat portion 37 is arranged between the first opening surface 111 and the bottom surface of the groove portion 18 in the first direction X.

As shown in FIG. 9, the pin member 17 that integrates the plate members 116, the plate member 117, and the plate member 118 of the base housing 11 protrudes in the first direction X from the second opening surface 112, and a part of the pin member 17 is located The exterior of the housing 10.

As shown in FIG. 12, the elastic portion 201 includes a plurality of elastic pieces (in this embodiment, two band-shaped elastic pieces) arranged with a gap therebetween. Each elastic piece has a zigzag shape including four extension portions and three bending portions, the four extension portions respectively extend in the second direction Y, and the three bending portions are respectively connected to adjacent extension portions Pick up. The extension portions arranged at both ends of the first direction X constitute the abutting portion 204 and the abutting portion 205, respectively. As shown in FIG. 10, each abutting portion 204 and abutting portion 205 are configured to be in a first direction X in a state of being accommodated in the core case 12 and to be in contact with the first core case 121 constituting each probe accommodating portion 123 It abuts against the inner surface of the second core shell 122.

That is, the housing 10 is not limited to the above-mentioned embodiment, as long as it has an opening surface 111 that intersects the first direction X, and can be placed outside the first contact portion 21 via the opening portion 113 of the opening surface 111. The probe 20 only needs to be accommodated inside.

In addition, the probe 20 is not limited to the above-mentioned embodiment, as long as it has a plate shape having a first contact portion 21 and a second contact portion 22 at both ends in the first direction X, respectively. For example, the probe 20 of FIG. 12 may be used for the probe unit 1 of FIG. 1, and the probe 20 of FIG. 7 may be used for the probe unit 1 of FIG. 8.

Furthermore, regarding the abutting portion 204 and the abutting portion 205, the abutting portion 204 and the abutting portion 205 may be provided only on either of the two ends in the first direction X, or both may be omitted. In this case, the abutting portion 231 and the abutting portion 271 extending from the first contact portion 202 or the second contact portion 203 in the second direction Y may also be provided instead of providing the abutting portion 204 and the abutting portion on the elastic portion 201.接部205。 接部205.

In addition, the urging part is not limited to the coil spring 50, and any configuration capable of urging the swing member 30 toward the initial position P1 in the first direction X and toward the center of the swing range in the extending direction of the opening surface 111 may be adopted.

Above, various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure have been described. In addition, in the following description, as an example, reference signs are also attached and described.

The probe unit 1 of the first aspect of the present disclosure includes: a plate-shaped probe 20 having a first contact portion 21 and a second contact portion 22 at both ends of the first direction X; the housing 10 has The opening surface 111 intersects the first direction X, and the probe 20 can be accommodated in the state in which the first contact portion 21 is arranged outside through the opening portion 113 of the opening surface 111 The swing member 30 is supported by the housing 10 in a state capable of swinging along the first direction X and the extending direction of the opening surface 111, and has a penetrating and accommodating place in the first direction X The accommodating hole 34 of the first contact portion 21; and the urging portion 50, which are disposed inside the housing 10, and face the initial position P1 furthest away from the opening surface 111 in the first direction X The swing member 30 is forced to the housing 10, and the swing member 30 is forced to the housing 10 toward the center of the swing range of the swing member 30 in the extending direction of the opening surface 111.

The probe unit 1 according to the first aspect includes a plate-shaped probe 20 and a swing member 30 having a receiving hole 34 that can receive the first contact portion 21 of the probe 20. With this configuration, the probe unit 1 that can cope with miniaturization can be easily realized.

In the probe unit 1 of the second aspect of the present disclosure, the force application portion includes at least three coil springs 50, and in a plan view viewed along the first direction, the center of gravity of the swing member 30 is located at each The coil spring 50 is the inside of the polygon with the vertex.

According to the probe unit 1 of the second aspect, it is possible to support the swing member 30 in a state where it can swing in the first direction X and the extending direction of the opening surface 111 more reliably. As a result, even if the position of the probe unit 1 with respect to the contact object is shifted, the probe 20 can be positioned more accurately according to the contact object.

In the probe unit 1 of the third aspect of the present disclosure, the urging part has four coil springs 50, and the four coil springs 50 are arranged in a view along the first direction X. In a plan view, each vertex of the quadrilateral surrounding the probe 20 is surrounded.

According to the probe unit 1 of the third aspect, it is possible to support the swing member 30 in a state capable of swinging in the first direction X and the extending direction of the opening surface 111 more reliably. Even if the position of the probe unit 1 relative to the contact object is shifted, the probe 20 can be positioned more accurately according to the contact object.

In the probe unit 1 of the fourth aspect of the present disclosure, the probe 20 includes: an elastic portion 201 capable of elastic deformation along the first direction X; a first contact portion 202 connected to the elastic portion 201 One end of the first direction X is provided with the first contact portion 21; and a second contact portion 203 connected to the other end of the elastic portion 201 in the first direction X and provided with the second Contact portion 22; and the elastic portion 201 has a first abutting portion 204, the first abutting portion 204 is along the first direction X and the thickness direction Z of the probe 20 crossing the first Extends in two directions Y, and constitutes one end of the elastic portion 201 in the first direction X and At least one of the other ends of the elastic portion 201 in the first direction X, and the first abutting portion 204 abuts against the inner surface of the housing 10 in the first direction X to restrict The movement of the probe 20 in the first direction X.

According to the probe unit 1 of the fourth aspect, the probe unit 1 that can cope with miniaturization can be realized more easily.

In the probe unit 1 of the fifth aspect of the present disclosure, the probe 20 includes: an elastic portion 201 capable of elastic deformation along the first direction X; a first contact portion 202 connected to the elastic portion 201 One end of the first direction X is provided with the first contact portion 21; and a second contact portion 203 connected to the other end of the elastic portion 201 in the first direction X and provided with the second Contact portion 22; and at least one of the first contact portion 202 and the second contact portion 203 has a second abutting portion 231, a second abutting portion 271, the second abutting portion 231, the first The two abutting portions 271 extend along the second direction Y intersecting the first direction X and the thickness direction Z of the probe 20, and are in contact with the inside of the housing 10 in the first direction X. The surface abuts and restricts the movement of the probe 20 in the first direction X.

According to the probe unit 1 of the fifth aspect, the probe unit 1 that can cope with miniaturization can be realized more easily.

In the probe unit 1 of the sixth aspect of the present disclosure, the housing 10 includes: a first core housing 121 and a second core housing 122, each of which is capable of accommodating and holding The probe housing portion 123 of the probe 20; and the base housing 11, the probe housing portion 123 of the first core housing 121 and the probe housing of the second core housing 122 In a state where the portions 123 are arranged adjacent to each other in the second direction, the first core case 121 and the second core case 122 are positioned independently of each other and integrally held.

According to the probe unit 1 of the sixth aspect, for example, the base housing 11 and the core housing 12 can be used in common, and it can be configured to be able to pair a plurality of different types of core housings determined in advance with respect to one base housing 11. The bodies 12 are positioned independently of each other and held integrally, thereby improving the productivity of the probe unit 1.

In the probe unit 1 of the seventh aspect of the present disclosure, the base housing 11 has a housing accommodating portion 13, and the housing accommodating portion 13 accommodates in a state capable of swinging in the first direction X The swing member 30 surrounds the swing member 30 via the first direction X.

According to the probe unit 1 of the seventh aspect, the occurrence of damage to the first contact portion 21 can be further reduced, and therefore, the probe unit 1 that can cope with miniaturization can be realized more easily.

Furthermore, by appropriately combining any of the aforementioned various embodiments or modifications, the effects possessed by each can be obtained. In addition, a combination of embodiments or a combination of embodiments or a combination of embodiments and embodiments is possible, and a combination of features in different embodiments or embodiments is also possible.

The probe unit of the present disclosure can be used for B to B including camera modules, etc. (Business-to-Business) connectors are used as modules for connecting media, and semiconductor packages such as SOP (Small Outline Package), QFP (Quad Flat Package), and BGA (Ball grid array) are inspected.

1‧‧‧Probe unit

10‧‧‧Shell

11‧‧‧Base shell

12‧‧‧Core shell

17‧‧‧Pin member

20‧‧‧Probe

30‧‧‧Swing member

31‧‧‧Swing plate

32‧‧‧Support

111‧‧‧First opening surface (opening surface)

113‧‧‧Opening

115‧‧‧Containment Slot

116、117、118‧‧‧Plate member

X‧‧‧First direction

Y‧‧‧Second direction

Z‧‧‧Plate thickness direction

Claims (6)

A probe unit includes: a plate-shaped probe having a first contact part and a second contact part at both ends in a first direction, respectively; a housing having an opening surface that crosses the first direction, and The probe can be housed in a state in which the first contact portion is disposed on the outside through the opening portion of the opening surface; a swing member can be moved along the first direction and the opening surface Is supported by the housing in a state of swing in the extending direction, and has a receiving hole penetrating in the first direction and capable of accommodating the first contact part; and an urging part, which is arranged inside the housing , And in the first direction toward the initial position furthest away from the opening surface, the swing member is forced to the housing, and toward the swing range of the swing member in the extending direction of the opening surface The center applies the swing member to the housing; and the housing includes: a first core housing and a second core housing, each having a probe accommodating portion capable of accommodating and holding the probe; and a base A housing, where the probe housing portion of the first core housing and the probe housing portion of the second core housing intersect the first direction and the thickness direction of the probe In the state of being arranged adjacent to each other in the second direction, the first core shell and the second core shell are positioned independently of each other and held integrally; and the urging portion urges the swing member To the base shell. The probe unit according to the first item of the patent application, wherein the force applying portion has at least three coil springs, and the center of gravity of the swing member is located at each position in a plan view viewed along the first direction. The coil spring is the inside of the polygon with the vertex. The probe unit according to claim 2, wherein the force applying portion has four coil springs, and the four coil springs are arranged to surround the coil springs when viewed in a plan view along the first direction. The vertices of the quadrilateral of the probe. The probe unit according to any one of items 1 to 3 in the scope of the patent application, wherein the probe includes: an elastic portion capable of elastic deformation along the first direction; a first contact portion connecting the One end of the elastic part in the first direction and provided with the first contact part; and a second contact part connected to the other end of the elastic part in the first direction and provided with the second contact Point portion; and the elastic portion has: a first abutting portion extending along a second direction crossing the first direction and the thickness direction of the probe, and constituting the first elastic portion At least one of one end in one direction and the other end in the first direction of the elastic portion, the first abutting portion abuts against the inner surface of the housing in the first direction to restrict The movement of the probe in the first direction. The probe list as described in any one of items 1 to 3 of the scope of patent application Element, wherein the probe includes: an elastic part that can be elastically deformed along the first direction; a first contact part that is connected to one end of the elastic part in the first direction and is provided with the first contact Portion; and a second contact portion, connected to the other end of the elastic portion in the first direction and provided with the second contact portion; and at least one of the first contact portion and the second contact portion The second abutting portion extends along a second direction that intersects the first direction and the thickness direction of the probe, and the second abutting portion extends in the first direction with the The inner surface of the housing abuts to restrict the movement of the probe in the first direction. The probe unit according to any one of claims 1 to 3, wherein the base housing has a housing accommodating portion, and the housing accommodating portion is capable of swinging in the first direction The swing member is housed in the state of, and surrounds the swing member via the first direction.

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