TW202009494A - Probe unit - Google Patents

Probe unit Download PDF

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Publication number
TW202009494A
TW202009494A TW108127381A TW108127381A TW202009494A TW 202009494 A TW202009494 A TW 202009494A TW 108127381 A TW108127381 A TW 108127381A TW 108127381 A TW108127381 A TW 108127381A TW 202009494 A TW202009494 A TW 202009494A
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TW
Taiwan
Prior art keywords
probe
contact portion
housing
probe unit
contact
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TW108127381A
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Chinese (zh)
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TWI718610B (en
Inventor
笹野直哉
寺西宏真
酒井貴浩
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日商歐姆龍股份有限公司
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Priority claimed from JP2018150409A external-priority patent/JP7110817B2/en
Priority claimed from JP2019132581A external-priority patent/JP7371374B2/en
Application filed by 日商歐姆龍股份有限公司 filed Critical 日商歐姆龍股份有限公司
Publication of TW202009494A publication Critical patent/TW202009494A/en
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Publication of TWI718610B publication Critical patent/TWI718610B/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

A probe unit comprises a plate-like probe pin that has, on both ends thereof in a first direction, a first contact portion and a second contact portion, a housing capable of accommodating the probe pin in the interior thereof, with the first contact portion being disposed outside of the housing through an opening portion of an open surface, a swing member that is supported in a swingable manner along the first direction and an extending direction of the open surface with respect to the housing and has an accommodating hole capable of accommodating the first contact portion, and an urging portion that urges the swing member toward an initial position in the first direction with respect to the housing and urges the swing member, with respect to the housing, toward a center of a swing range of the swing member in the extending direction of the open surface.

Description

探針單元Probe unit

本揭示是有關於一種探針單元。The present disclosure relates to a probe unit.

於相機或液晶面板等電子零件模組中,一般而言,在其製造步驟中進行導通檢查及動作特性檢查等。該些檢查藉由使用探針(probe pin)將用於和設置於電子零件模組的本體基板連接的端子與檢查裝置的端子加以連接來進行檢查。In electronic component modules such as cameras and liquid crystal panels, in general, continuity inspection and operation characteristic inspection are performed in the manufacturing steps thereof. These inspections are performed by using probe pins to connect the terminals for connecting to the main body substrate provided in the electronic component module and the terminals of the inspection device.

作為這種探針,有專利文獻1中記載的彈簧針式(pogo pin type)的探針。該探針包括:柱塞(plunger)部,具有接觸端子及與接觸端子同軸設置的柱塞本體部;以及筒(barrel)部,設置於柱塞部的外周側。 [現有技術文獻] [專利文獻]As such a probe, there is a pogo pin type probe described in Patent Document 1. The probe includes: a plunger portion having a contact terminal and a plunger body portion coaxially disposed with the contact terminal; and a barrel portion provided on the outer peripheral side of the plunger portion. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開2016-142644號公報[Patent Document 1] Japanese Patent Laid-Open No. 2016-142644

[發明所欲解決之課題][Problems to be solved by the invention]

近年來,電子零件模組的小型化已取得進展,且要求用於檢查電子零件模組的檢查具亦應對小型化。一般而言,如所述探針般的彈簧針式的探針越小型化,剛性越低,越容易損傷。因此,使用所述探針的檢查具會有無法應對小型化的疑慮。In recent years, progress has been made in miniaturization of electronic component modules, and inspection tools for inspecting electronic component modules are also required to be miniaturized. In general, the smaller the pogo pin-type probe like the above-mentioned probe is, the lower the rigidity is, and the easier it is to damage. Therefore, there is a concern that the inspection tool using the probe cannot cope with miniaturization.

本揭示的課題在於提供一種能夠應對小型化的探針單元。 [解決課題之手段]An object of the present disclosure is to provide a probe unit capable of coping with miniaturization. [Means to solve the problem]

本揭示的一例的探針單元包括: 板狀的探針,於第一方向的兩端分別具有第一觸點部及第二觸點部; 殼體,具有與所述第一方向交叉的開口面,且能夠於所述第一觸點部經由所述開口面的開口部配置於外部的狀態下,將所述探針收容於內部; 擺動構件,以能夠沿著所述第一方向及所述開口面的延伸方向擺動的狀態支撐於所述殼體,並且具有於所述第一方向上貫通且能夠收容所述第一觸點部的收容孔;以及 施力部,配置於所述殼體的內部,並且於所述第一方向上朝向最遠離所述開口面的初始位置將所述擺動構件施力至所述殼體,於所述開口面的延伸方向上朝向所述擺動構件的擺動範圍的中心將所述擺動構件施力至所述殼體。 [發明的效果]An example probe unit of the present disclosure includes: The plate-shaped probe has a first contact portion and a second contact portion at both ends in the first direction; The case has an opening surface that intersects the first direction, and the probe can be housed inside in a state where the first contact portion is arranged outside via the opening portion of the opening surface; The swinging member is supported by the housing in a state capable of swinging in the first direction and the extending direction of the opening surface, and has a penetration in the first direction and can accommodate the first contact portion Containment hole; and The urging portion is arranged inside the casing, and urges the swing member to the casing in the first direction toward the initial position farthest from the opening surface, on the opening surface The swinging member is biased toward the housing toward the center of the swinging range of the swinging member in the extending direction. [Effect of invention]

根據所述探針單元,包括板狀的探針及擺動構件,所述擺動構件具有能夠收容探針的第一觸點部的收容孔。藉由這種構成,可以容易地實現能夠應對小型化的探針單元。According to the probe unit, it includes a plate-shaped probe and a swing member, and the swing member has a receiving hole capable of receiving the first contact portion of the probe. With this configuration, it is possible to easily realize a probe unit capable of coping with miniaturization.

以下,根據隨附圖式對本揭示的一例進行說明。再者,在以下的說明中,視需要使用表示特定方向或位置的用語(例如包含「上」、「下」、「右」、「左」的用語),但該些用語的使用是為了容易理解參照了圖式的本揭示,且本揭示的技術範圍不受該些用語的含義的限制。另外,以下的說明本質上僅為例示,並不意圖限制本揭示、其應用或其用途。進而,圖式是示意性的,各尺寸的比率等未必與實際一致。Hereinafter, an example of the present disclosure will be described based on the accompanying drawings. In addition, in the following description, terms indicating a specific direction or position are used as necessary (for example, terms including "upper", "lower", "right", and "left"), but the use of these terms is for ease of use Understand this disclosure with reference to the drawings, and the technical scope of this disclosure is not limited by the meaning of these terms. In addition, the following description is merely illustrative in nature, and is not intended to limit the present disclosure, its applications, or its uses. Furthermore, the drawings are schematic, and the ratios and the like of the dimensions do not necessarily coincide with the actual ones.

如圖1所示,本揭示的一實施形態的探針單元1包括:殼體10;板狀的探針20,收容於該殼體10的內部;以及擺動構件30,能夠擺動地支撐於殼體10。於該實施形態中,作為一例,多個探針20收容於殼體10的內部。如圖2及圖3所示,各探針20於第一方向X的兩端分別具有第一觸點部21及第二觸點部22,且於與第一方向X交叉(例如,正交)的板厚方向Z上空開間隔而配置。即,各探針20以板面彼此相互相向的狀態排列成一行而配置。As shown in FIG. 1, a probe unit 1 according to an embodiment of the present disclosure includes: a housing 10; a plate-shaped probe 20 housed inside the housing 10; and a swing member 30 that is swingably supported by the housing体10。 10. In this embodiment, as an example, a plurality of probes 20 are housed inside the housing 10. As shown in FIGS. 2 and 3, each probe 20 has a first contact portion 21 and a second contact portion 22 at both ends in the first direction X, and crosses the first direction X (for example, orthogonal ) Are arranged at intervals in the plate thickness direction Z. That is, the probes 20 are arranged in a row with the plate surfaces facing each other.

作為一例,如圖1所示,殼體10具有大致長方體形狀的基底殼體11及收容於該基底殼體11的內部的芯殼體12。As an example, as shown in FIG. 1, the case 10 includes a base case 11 having a substantially rectangular parallelepiped shape and a core case 12 housed inside the base case 11.

作為一例,如圖2所示,基底殼體11具有與第一方向X交叉的一對開口面111、112(以下稱為第一開口面111及第二開口面112)。於第一開口面111及第二開口面112的長邊方向(即板厚方向Z)的大致中央分別設置有大致矩形形狀的開口部113、開口部114。於基底殼體11的內部設置有收容芯殼體12的殼體收容部13。各開口部113、開口部114分別與該殼體收容部13連接。探針20的第一觸點部21及第二觸點部22分別經由各開口部113、開口部114配置於基底殼體11的外部。於該實施形態中,如圖1所示,基底殼體11包含於第一方向X上積層的三個大致矩形的板構件116、117、118。各板構件116、板構件117、板構件118藉由銷構件17而一體化。As an example, as shown in FIG. 2, the base case 11 has a pair of opening surfaces 111 and 112 (hereinafter referred to as a first opening surface 111 and a second opening surface 112) crossing the first direction X. A substantially rectangular opening 113 and an opening 114 are provided at the approximate center of the first opening surface 111 and the second opening surface 112 in the longitudinal direction (that is, the plate thickness direction Z). Inside the base housing 11, a housing accommodating portion 13 accommodating the core housing 12 is provided. The opening 113 and the opening 114 are respectively connected to the housing accommodating portion 13. The first contact portion 21 and the second contact portion 22 of the probe 20 are arranged outside the base case 11 via the opening 113 and the opening 114, respectively. In this embodiment, as shown in FIG. 1, the base case 11 includes three substantially rectangular plate members 116, 117, and 118 stacked in the first direction X. The plate member 116, the plate member 117, and the plate member 118 are integrated by the pin member 17.

於基底殼體11的芯殼體12周圍設置有收容槽115。收容槽115分別設置於基底殼體11的芯殼體12的板厚方向Z的兩側。各收容槽115於基底殼體11的內部,於板厚方向Z且遠離芯殼體12的方向上延伸。於各收容槽115的內部分別收容有後述的擺動構件30的支撐部32及盤簧50(施力部的一例),所述盤簧50對該支撐部32向第一方向X且從第二開口面112朝向第一開口面111的方向施力。A receiving groove 115 is provided around the core case 12 of the base case 11. The accommodating grooves 115 are provided on both sides in the thickness direction Z of the core case 12 of the base case 11. Each receiving groove 115 extends inside the base case 11 in the plate thickness direction Z and away from the core case 12. A support portion 32 of a swing member 30 and a coil spring 50 (an example of an urging portion), which will be described later, are accommodated in each of the housing grooves 115. The coil spring 50 faces the support portion 32 in the first direction X and from the second The opening surface 112 urges toward the first opening surface 111.

作為一例,如圖3所示,芯殼體12具有第一芯殼體121及第二芯殼體122,所述第一芯殼體121及所述第二芯殼體122分別於內部設置有能夠收容探針20的多個探針收容部123。各芯殼體121、芯殼體122中,探針收容部123彼此於與第一方向X及板厚方向Z交叉(例如,正交)的第二方向Y上鄰接而配置,且藉由基底殼體11相互獨立地定位並一體地保持。如圖2所示,各探針收容部123於板厚方向Z上空開間隔而排列成一行而配置。於各探針收容部123,一個探針20以相對於其他探針20電性獨立的狀態,並且以第一方向X的兩端的各觸點部21、觸點部22位於各芯殼體121、芯殼體122的外部的狀態被收容。As an example, as shown in FIG. 3, the core case 12 has a first core case 121 and a second core case 122, the first core case 121 and the second core case 122 are respectively provided inside A plurality of probe housing portions 123 capable of housing the probe 20. In each of the core case 121 and the core case 122, the probe accommodating portions 123 are arranged adjacent to each other in the second direction Y crossing (eg, orthogonal) to the first direction X and the plate thickness direction Z, and by the base The housing 11 is positioned independently of each other and held integrally. As shown in FIG. 2, the probe housing portions 123 are arranged in a row at intervals in the plate thickness direction Z. In each probe accommodating portion 123, one probe 20 is electrically independent of the other probes 20, and each contact portion 21 and contact portion 22 at both ends of the first direction X are located in each core housing 121 1. The state outside the core case 122 is accommodated.

另外,如圖1所示,探針單元1包括配置在殼體10的外部的擺動構件30。擺動構件30具有:擺動板部31,配置成與第一開口面111相向;以及一對支撐部32,分別從該擺動板部31的板厚方向Z的兩端向第一方向X延伸。擺動板部31經由一對支撐部32以能夠擺動的狀態支撐於殼體10。In addition, as shown in FIG. 1, the probe unit 1 includes a swing member 30 arranged outside the housing 10. The swing member 30 includes: a swing plate portion 31 arranged to face the first opening surface 111; and a pair of support portions 32 extending from both ends of the swing plate portion 31 in the thickness direction Z in the first direction X, respectively. The swing plate portion 31 is supported by the housing 10 via a pair of support portions 32 in a swingable state.

如圖3所示,擺動板部31具有:凹部33,於第一方向X上設置於與和第一開口面111相向的面為相反一側的面;以及多個收容孔34,設置於該凹部33的底面。凹部33例如構成為當使作為接觸對象物的一例的檢查對象物或檢查裝置的連接器與探針單元1接觸時,收容連接器的一部分而確定連接器相對於擺動構件30的位置。各收容孔34於第一方向X上貫通擺動板部31,且收容探針20的第一觸點部21。於該實施形態中,設置有與所收容的探針20對應的數量的收容孔34。As shown in FIG. 3, the swing plate portion 31 has a recess 33 provided in the first direction X on a surface opposite to the surface facing the first opening surface 111; and a plurality of receiving holes 34 provided in the The bottom surface of the recess 33. The recess 33 is configured, for example, when a connector of an inspection object or an inspection device as an example of a contact object is brought into contact with the probe unit 1, a part of the connector is accommodated, and the position of the connector relative to the swing member 30 is determined. Each receiving hole 34 penetrates the swinging plate portion 31 in the first direction X, and receives the first contact portion 21 of the probe 20. In this embodiment, a number of storage holes 34 corresponding to the stored probes 20 are provided.

如圖2所示,各支撐部32中,第一方向X上的遠離擺動板部31的前端部收容於基底殼體11的收容槽115。於各支撐部32的前端部設置有凸緣部38,所述凸緣部38於相互遠離各支撐部32的方向上延伸。各凸緣部38配置為於第一方向X上,能夠與構成收容槽115的基底殼體11的內表面接觸,且藉由盤簧50被施力至基底殼體11。As shown in FIG. 2, in each support portion 32, the front end portion away from the swing plate portion 31 in the first direction X is accommodated in the accommodation groove 115 of the base case 11. A flange portion 38 is provided at the front end of each support portion 32, and the flange portion 38 extends in a direction away from each support portion 32. Each flange portion 38 is arranged in the first direction X so as to be able to contact the inner surface of the base case 11 constituting the receiving groove 115 and is urged to the base case 11 by the coil spring 50.

如圖4及圖5所示,於所述探針單元1中,各凸緣部38藉由四個盤簧50被施力至基底殼體11。詳細地說,各凸緣部38具有於沿著第一方向X觀看的俯視下,第二方向Y成為長邊的大致矩形形狀,且於各凸緣部38的第二方向Y的兩端分別配置有盤簧50。換句話說,各盤簧50配置為於沿著第一方向X觀看的俯視下,分別位於圍繞探針20的四邊形的各頂點。As shown in FIGS. 4 and 5, in the probe unit 1, each flange portion 38 is biased to the base housing 11 by four coil springs 50. In detail, each flange portion 38 has a substantially rectangular shape in which the second direction Y becomes a long side in a plan view when viewed along the first direction X, and the two ends of each flange portion 38 in the second direction Y are respectively Coil spring 50 is provided. In other words, each coil spring 50 is configured to be located at each vertex of the quadrilateral surrounding the probe 20 in a plan view viewed along the first direction X.

另外,如圖5所示,於沿著第一方向X觀看的俯視下,擺動構件30的重心GP位於四邊形的內部,該四邊形將穿過於第一方向X及第二方向Y上鄰接的兩個盤簧50的任意點(例如,中心)的四條假想直線L1~直線L4分別作為一邊。換句話說,各盤簧50配置成擺動構件30的重心GP位於以各盤簧50為頂點的多邊形的內部。In addition, as shown in FIG. 5, in a plan view viewed along the first direction X, the center of gravity GP of the swing member 30 is located inside the quadrangle, and the quadrangle will pass through two adjacent ones in the first direction X and the second direction Y The four imaginary straight lines L1 to L4 at any point (for example, the center) of the coil spring 50 serve as one side, respectively. In other words, each coil spring 50 is arranged such that the center of gravity GP of the swing member 30 is located inside the polygon with each coil spring 50 as the apex.

如圖2及圖3所示,擺動構件30的向第一方向X的移動由凸緣部38及收容槽115限制於初始位置P1與動作位置P2之間。初始位置P1是擺動構件30能夠移動的第一方向X的位置中最遠離第一開口面111的位置。於未施加第一方向X的外力的狀態下,擺動構件30藉由盤簧50所施加的力被保持於初始位置P1。動作位置P2是擺動構件30能夠移動的第一方向X的位置中最接近第一開口面111的位置。As shown in FIGS. 2 and 3, the movement of the swing member 30 in the first direction X is restricted between the initial position P1 and the operating position P2 by the flange portion 38 and the receiving groove 115. The initial position P1 is the position farthest from the first opening surface 111 among the positions in the first direction X in which the swing member 30 can move. In a state where no external force in the first direction X is applied, the swing member 30 is held at the initial position P1 by the force applied by the coil spring 50. The operation position P2 is the position closest to the first opening surface 111 among the positions in the first direction X in which the swing member 30 can move.

另外,如圖6所示,於沿著第一方向X觀看的俯視下,於擺動構件30的各支撐部32與收容槽115之間設置有第二方向Y的間隙35及板厚方向Z的間隙36。再者,於圖6中,僅示出了一個支撐部32。擺動構件30的向第二方向Y及板厚方向Z的移動被限制於間隙35、間隙36的範圍內。當將於第一開口面111的延伸方向(即,包含第二方向Y及板厚方向Z在內的平面的延伸方向)上,與收容槽115之間形成間隙35、間隙36的位置設為擺動範圍的中心時,擺動構件30於第一開口面111的延伸方向上藉由四個盤簧50被朝向擺動範圍的中心施力。In addition, as shown in FIG. 6, in a plan view viewed along the first direction X, a gap 35 in the second direction Y and a plate thickness direction Z are provided between each support portion 32 of the swing member 30 and the receiving groove 115. Clearance 36. Furthermore, in FIG. 6, only one support portion 32 is shown. The movement of the swing member 30 in the second direction Y and the plate thickness direction Z is restricted to the range of the gap 35 and the gap 36. When the extending direction of the first opening surface 111 (that is, the extending direction of the plane including the second direction Y and the thickness direction Z), the position where the gap 35 and the gap 36 are formed between the receiving groove 115 is set as At the center of the swing range, the swing member 30 is urged toward the center of the swing range by the four coil springs 50 in the extending direction of the first opening surface 111.

作為一例,如圖7所示,各探針20為於第一方向X上細長的薄板狀,且具有導電性。各探針20包括:彈性部201,能夠沿著第一方向X彈性變形;第一接觸部202,連接彈性部201的第一方向X的一端且設置有第一觸點部21;以及第二接觸部203,連接彈性部201的第一方向X的另一端且設置有第二觸點部22。各探針20例如藉由電鑄法形成,且彈性部201、第一接觸部202及第二接觸部203沿著第一方向X串聯地配置且一體地構成。As an example, as shown in FIG. 7, each probe 20 has a thin plate shape elongated in the first direction X and has electrical conductivity. Each probe 20 includes: an elastic portion 201 capable of elastic deformation along the first direction X; a first contact portion 202 connected to one end of the elastic portion 201 in the first direction X and provided with a first contact portion 21; and a second The contact portion 203 is connected to the other end of the elastic portion 201 in the first direction X and is provided with a second contact portion 22. Each probe 20 is formed by, for example, an electroforming method, and the elastic portion 201, the first contact portion 202, and the second contact portion 203 are arranged in series along the first direction X and are integrally formed.

作為一例,彈性部201包含相互空開間隙而配置的多個帶狀彈性片。各帶狀彈性片為細長的帶狀,且具有大致相同的剖面形狀。As an example, the elastic portion 201 includes a plurality of band-shaped elastic pieces arranged with a gap therebetween. Each band-shaped elastic sheet has an elongated band shape and has substantially the same cross-sectional shape.

作為一例,第一接觸部202具有:本體部23,從與第一方向X交叉的方向連接彈性部201;以及一對腳部24、25,從該本體部23向第一方向X且遠離彈性部201的方向延伸。As an example, the first contact portion 202 includes: a body portion 23 that connects the elastic portion 201 from a direction crossing the first direction X; and a pair of leg portions 24, 25 from the body portion 23 toward the first direction X and away from the elasticity The direction of the portion 201 extends.

本體部23具有抵接部231,所述抵接部231設置於在第一方向X上靠近彈性部201的端部,且於第二方向Y上延伸。The body portion 23 has an abutment portion 231 that is disposed near the end of the elastic portion 201 in the first direction X and extends in the second direction Y.

各腳部24、腳部25於第二方向Y上空開間隙26而配置,且構成為能夠於第二方向Y上彈性變形。於各腳部24、腳部25的前端分別設置有第一觸點部21。各第一觸點部21構成為能夠從第一方向X與接觸對象物(例如,檢查對象物的凸觸點)接觸。另外,各腳部24、腳部25具有突起部241、突起部251,所述突起部241、突起部251設置於在第二方向Y上相向的側面。各突起部241、突起部251以堵住一對腳部24、腳部25之間的間隙26的方式突出,而防止接觸對象物過量插入間隙26。The leg portions 24 and 25 are arranged with a gap 26 in the second direction Y, and are configured to be elastically deformable in the second direction Y. The first contact portions 21 are provided at the front ends of the leg portions 24 and 25, respectively. Each first contact portion 21 is configured to be able to contact a contact object (for example, a convex contact of an inspection object) from the first direction X. In addition, each of the leg portions 24 and 25 has a protrusion portion 241 and a protrusion portion 251 provided on the side facing each other in the second direction Y. The protrusions 241 and the protrusions 251 protrude so as to close the gap 26 between the pair of leg portions 24 and 25, thereby preventing the contact object from being excessively inserted into the gap 26.

再者,如圖2及圖3所示,各第一觸點部21收容於對應的擺動構件30的收容孔34,且於擺動構件30位於初始位置P1的狀態下,各第一觸點部21的一部分從凹部33的底面突出。Furthermore, as shown in FIGS. 2 and 3, each first contact portion 21 is accommodated in the corresponding accommodation hole 34 of the swing member 30, and when the swing member 30 is at the initial position P1, each first contact portion A part of 21 protrudes from the bottom surface of the recess 33.

作為一例,第二接觸部203具有本體部27,所述本體部27從第二方向Y連接彈性部201。本體部27具有抵接部271,所述抵接部271從所述第一方向X上的彈性部201側的端部向第二方向Y延伸。本體部27的第一方向X的前端具有大致三角形形狀,所述大致三角形形狀於第一方向X且隨著遠離彈性部201而前端變細,且構成第二觸點部22。As an example, the second contact portion 203 has a body portion 27 that is connected to the elastic portion 201 from the second direction Y. The body portion 27 has a contact portion 271 that extends from the end portion on the elastic portion 201 side in the first direction X in the second direction Y. The front end of the main body portion 27 in the first direction X has a substantially triangular shape that is thinner in the first direction X as it moves away from the elastic portion 201 and constitutes the second contact portion 22.

第一接觸部202及第二接觸部203分別配置於穿過第一接觸部202的一對腳部24、25的第二方向Y的中心並且於第一方向X上延伸的假想直線L5上。彈性部201及各抵接部231、抵接部271分別相對於假想直線L5而配置於第二方向Y上的相同側。The first contact portion 202 and the second contact portion 203 are respectively arranged on an imaginary straight line L5 passing through the center of the pair of leg portions 24 and 25 of the first contact portion 202 in the second direction Y and extending in the first direction X. The elastic portion 201, each contact portion 231, and the contact portion 271 are respectively disposed on the same side in the second direction Y with respect to the virtual straight line L5.

如圖3所示,於將探針20收容於芯殼體12的各探針收容部123的狀態下,第一接觸部202的抵接部231及第二接觸部203的抵接部271分別構成為於第一方向X上與構成各探針收容部123的第一芯殼體121及第二芯殼體122的內表面抵接。即,藉由各抵接部231、抵接部271確定第一方向X上的探針20的各觸點部21、觸點部22的位置。As shown in FIG. 3, in a state where the probe 20 is accommodated in each probe accommodating portion 123 of the core housing 12, the contact portion 231 of the first contact portion 202 and the contact portion 271 of the second contact portion 203 are respectively It is configured to contact the inner surfaces of the first core case 121 and the second core case 122 constituting each probe accommodating portion 123 in the first direction X. That is, the positions of the contact portions 21 and the contact portions 22 of the probe 20 in the first direction X are determined by the contact portions 231 and the contact portions 271.

再者,彈性部201相對於第一接觸部202的本體部23的寬度方向(即第二方向Y)的一端232以及第二接觸部203的本體部27的寬度方向的一端272配置於一側。再者,於該實施形態中,第一接觸部202的本體部23的一端232與第二接觸部203的本體部27的一端272配置於與假想直線L5平行的直線上。In addition, the elastic portion 201 is disposed on one side with respect to the end 232 in the width direction (ie, the second direction Y) of the body portion 23 of the first contact portion 202 and the end 272 in the width direction of the body portion 27 of the second contact portion 203 . Furthermore, in this embodiment, one end 232 of the main body portion 23 of the first contact portion 202 and one end 272 of the main body portion 27 of the second contact portion 203 are arranged on a straight line parallel to the virtual straight line L5.

探針單元1用於例如包括相機模組等企業對企業(Business-to-Business,B to B)連接器作為連接媒體的模組,以及小外形封裝(Small Outline Package,SOP)、四面扁平封裝(Quad Flat Package,QFP)、球柵陣列(Ball grid array,BGA)等半導體封裝的導通檢查或者動作特性檢查等。於這種檢查中,各探針20一般而言頻繁地反覆進行對於接觸對象物的一例的檢查對象物或者檢查裝置的接觸及解除接觸,因此要求耐久性。當將探針20小型化時,該耐久性的要求進一步增強。The probe unit 1 is used for, for example, a business-to-business (B to B) connector including a camera module as a module for connecting media, as well as a small outline package (SOP), a four-sided flat package (Quad Flat Package, QFP), ball grid array (Ball grid array, BGA) and other semiconductor packages for continuity inspection or operating characteristic inspection. In this type of inspection, each probe 20 generally makes frequent contact with and release of contact with an inspection object or inspection device, which is an example of the contact object, and therefore requires durability. When the probe 20 is miniaturized, the durability requirement is further enhanced.

另外,檢查對象物的對於第一觸點部21的接觸及解除接觸的反覆頻率高於檢查裝置的對於第二觸點部22的接觸及解除接觸的反覆頻率。因此,於將探針單元1小型化方面確保第一觸點部21的耐久性成為重要的要素。In addition, the repetition frequency of the object to be inspected with respect to the contact and release of contact with the first contact portion 21 is higher than that of the inspection device with respect to the contact and disengagement of the second contact portion 22. Therefore, ensuring the durability of the first contact portion 21 in miniaturizing the probe unit 1 becomes an important element.

此外,作為確保探針20的耐久性的方法之一,可以考慮變更探針20的材料。當由鎳合金或者鈦合金等硬度高的材料形成探針20時,有可能會損傷接觸對象物。相反,當由鈹鋼或者磷青銅等硬度低的材料形成探針20時,有時探針20無法具備充分的耐久性,且因藉由反覆進行對於接觸對象物的接觸及解除接觸導致的滑動的磨損,觸點部會劣化。因此,藉由變更材料來確保探針20的耐久性並不容易。In addition, as one of the methods for ensuring the durability of the probe 20, it may be considered to change the material of the probe 20. When the probe 20 is formed of a high-hardness material such as nickel alloy or titanium alloy, the object to be contacted may be damaged. Conversely, when the probe 20 is formed of a low-hardness material such as beryllium steel or phosphor bronze, the probe 20 may not have sufficient durability, and sliding due to repeated contact and release of contact with the contact object Wear, the contact part will deteriorate. Therefore, it is not easy to ensure the durability of the probe 20 by changing the material.

根據探針單元1,包括板狀的探針20及擺動構件30,該擺動構件30具有能夠收容探針20的第一觸點部21的收容孔34。探針20具有板狀,因此,例如,與彈簧針式的探針相比,即使小型化,亦可以抑制探針20的剛性下降而確保耐久性。另外,將探針20的第一觸點部21收容於擺動構件30的收容孔34,因此即使於將探針20小型化的情況下,亦可以減少第一觸點部21的損傷的產生。即,藉由這種構成,可以容易地實現能夠應對小型化的探針單元1。According to the probe unit 1, it includes a plate-shaped probe 20 and a swing member 30 that has a receiving hole 34 that can receive the first contact portion 21 of the probe 20. Since the probe 20 has a plate shape, for example, compared with the pogo pin type probe, even if it is miniaturized, the rigidity of the probe 20 can be suppressed from decreasing and the durability can be ensured. In addition, since the first contact portion 21 of the probe 20 is accommodated in the accommodating hole 34 of the swing member 30, even when the probe 20 is miniaturized, the occurrence of damage to the first contact portion 21 can be reduced. That is, with such a configuration, it is possible to easily realize the probe unit 1 capable of coping with miniaturization.

另外,擺動構件30藉由盤簧50以能夠沿著第一方向X及第一開口面111的延伸方向(即,包含第二方向Y及板厚方向Z在內的平面的延伸方向)擺動的狀態支撐於殼體10。藉由這種構成,即使探針單元1相對於接觸對象物的位置偏移,亦可以根據接觸對象物更準確地對探針20定位。In addition, the swing member 30 is swingable by the coil spring 50 in the first direction X and the extending direction of the first opening surface 111 (that is, the extending direction of the plane including the second direction Y and the thickness direction Z) The state is supported by the housing 10. With this configuration, even if the position of the probe unit 1 with respect to the contact object is shifted, the probe 20 can be more accurately positioned according to the contact object.

另外,施力部包含至少三個盤簧50,且於沿著第一方向X觀看的俯視下,擺動構件30的重心位於以各盤簧50為頂點的多邊形的內部。藉由這樣構成,可以不僅沿著第一方向X而且沿著包含第二方向Y及板厚方向Z在內的平面更可靠地使擺動構件30擺動。In addition, the urging portion includes at least three coil springs 50, and the center of gravity of the swing member 30 is located inside the polygon with each coil spring 50 as the apex in a plan view viewed along the first direction X. With such a configuration, it is possible to more reliably swing the swing member 30 along not only the first direction X but also the plane including the second direction Y and the plate thickness direction Z.

另外,施力部具有四個盤簧50,所述四個盤簧50配置於在沿著第一方向X觀看的俯視下,圍繞探針20的四邊形的各頂點。藉由這種構成,可以不僅沿著第一方向X而且沿著包含第二方向Y及板厚方向Z在內的平面更可靠地使擺動構件30擺動。In addition, the urging portion has four coil springs 50 that are arranged at each vertex of the quadrilateral of the probe 20 in a plan view viewed along the first direction X. With this configuration, the swing member 30 can be swung more reliably along not only the first direction X but also the plane including the second direction Y and the plate thickness direction Z.

另外,探針20包括:彈性部201,能夠沿著第一方向X彈性變形;第一接觸部202,連接彈性部201的第一方向X的一端且設置有第一觸點部21;以及第二接觸部203,連接彈性部201的第一方向X的另一端且設置有第二觸點部22。第一接觸部202及第二接觸部203具有抵接部231、抵接部271,所述抵接部231、所述抵接部271分別沿著第二方向Y延伸,並且於第一方向X上與殼體10的內表面抵接而限制探針20的向第一方向X的移動。藉由這種構成,可以更容易地實現能夠應對小型化的探針單元1。In addition, the probe 20 includes: an elastic portion 201 capable of elastically deforming in the first direction X; a first contact portion 202 connected to an end of the elastic portion 201 in the first direction X and provided with a first contact portion 21; and a first The second contact portion 203 is connected to the other end of the elastic portion 201 in the first direction X and is provided with a second contact portion 22. The first contact portion 202 and the second contact portion 203 have a contact portion 231 and a contact portion 271, the contact portion 231 and the contact portion 271 respectively extend along the second direction Y and are in the first direction X The upper portion abuts on the inner surface of the housing 10 to restrict the movement of the probe 20 in the first direction X. With this configuration, it is possible to more easily realize the probe unit 1 capable of coping with miniaturization.

另外,殼體10具有:第一芯殼體121及第二芯殼體122,分別具有能夠收容保持探針20的探針收容部123;以及基底殼體11,於各芯殼體121、芯殼體122的探針收容部123於第二方向Y上鄰接而配置的狀態下,將各芯殼體121、芯殼體122相互獨立地定位並一體地保持。藉由這種構成,例如,可以將基底殼體11及芯殼體12通用化而構成為能夠相對於一個基底殼體11對預先決定的不同的多個種類的芯殼體12相互獨立地定位並一體地保持,藉此提高探針單元1的生產率。In addition, the case 10 includes a first core case 121 and a second core case 122, each having a probe accommodating portion 123 capable of accommodating and holding the probe 20, and a base case 11, each core case 121, core The probe housing portion 123 of the housing 122 is positioned adjacent to each other in the second direction Y, and positions the core housing 121 and the core housing 122 independently of each other and integrally holds them. With such a configuration, for example, the base case 11 and the core case 12 can be generalized to be configured to be able to independently position a plurality of predetermined different types of core cases 12 with respect to one base case 11. And hold it integrally, thereby improving the productivity of the probe unit 1.

再者,施力部不限於包含四個盤簧50的情況,只要包含至少三個盤簧50即可。例如,於由三個盤簧50構成施力部的情況下,只要於其中一個凸緣部38的第二方向Y的中央配置一個盤簧50,於另一個凸緣部38的第二方向的兩端分別各配置一個盤簧50即可。Furthermore, the urging portion is not limited to the case including four coil springs 50, as long as it includes at least three coil springs 50. For example, in a case where three coil springs 50 constitute an urging portion, as long as one coil spring 50 is disposed in the center of one of the flange portions 38 in the second direction Y, and the other flange portion 38 in the second direction A coil spring 50 may be arranged at each end.

另外,探針單元1例如亦能夠以如圖8~圖12所示般構成。於圖8~圖12所示的探針單元1中,擺動構件30配置於殼體10的內部,而不是殼體10的外部。如圖9及圖10所示,除了芯殼體12之外,基底殼體11的殼體收容部13經由第一方向X而圍繞擺動構件30且以能夠於第一方向X上擺動的狀態收容擺動構件30。於基底殼體11的第一開口面111設置有槽部18,所述槽部18於第二方向Y上延伸並與開口部113及基底殼體11的外部連通。In addition, the probe unit 1 can also be configured as shown in FIGS. 8 to 12, for example. In the probe unit 1 shown in FIGS. 8 to 12, the swing member 30 is arranged inside the housing 10 instead of outside the housing 10. As shown in FIGS. 9 and 10, in addition to the core housing 12, the housing housing portion 13 of the base housing 11 surrounds the swing member 30 via the first direction X and is housed in a state capable of swinging in the first direction X Swing member 30. The first opening surface 111 of the base housing 11 is provided with a groove portion 18 that extends in the second direction Y and communicates with the opening portion 113 and the outside of the base housing 11.

如圖9及圖10所示,擺動構件30配置於開口部113,所述開口部113於基底殼體11的第一開口面111開口。如圖11所示,於沿著第一方向X觀看的俯視下,於擺動構件30的擺動板部31與開口部113之間設置有第二方向Y的間隙35及板厚方向Z的間隙36。As shown in FIGS. 9 and 10, the swing member 30 is disposed in the opening 113 that opens to the first opening surface 111 of the base case 11. As shown in FIG. 11, in a plan view viewed along the first direction X, a gap 35 in the second direction Y and a gap 36 in the plate thickness direction Z are provided between the swing plate portion 31 of the swing member 30 and the opening 113. .

如此,於圖8~圖12所示的探針單元1中,於初始狀態P1處,第一觸點部21的大致整體被殼體10及擺動構件30覆蓋。因此,可以進一步減少第一觸點部21的損傷的產生,因此可以更容易地實現能夠應對小型化的探針單元1。In this way, in the probe unit 1 shown in FIGS. 8 to 12, in the initial state P1, substantially the entire first contact portion 21 is covered by the housing 10 and the swing member 30. Therefore, the occurrence of damage to the first contact portion 21 can be further reduced, and thus the probe unit 1 capable of coping with miniaturization can be realized more easily.

另外,如圖8所示,於擺動板部31的凹部33周圍設置有平坦部37,所述平坦部37於第一方向X上配置於第一開口面111與槽部18的底面之間。In addition, as shown in FIG. 8, a flat portion 37 is provided around the concave portion 33 of the swing plate portion 31, and the flat portion 37 is arranged between the first opening surface 111 and the bottom surface of the groove portion 18 in the first direction X.

如圖9所示,將基底殼體11的各板構件116、板構件117、板構件118一體化的銷構件17從第二開口面112向第一方向X突出,且銷構件17的一部分位於殼體10的外部。As shown in FIG. 9, the pin member 17 integrating the plate member 116, the plate member 117, and the plate member 118 of the base case 11 protrudes from the second opening surface 112 in the first direction X, and a part of the pin member 17 is located The exterior of the housing 10.

如圖12所示,彈性部201包含相互空開間隙而配置的多個彈性片(於本實施形態中為兩個帶狀的彈性片)。各彈性片具有包含四個延伸部及三個彎曲部的曲折形狀,所述四個延伸部分別於第二方向Y上延伸,所述三個彎曲部分別與鄰接的延伸部連接。配置於第一方向X的兩端的延伸部分別構成抵接部204、抵接部205。如圖10所示,各抵接部204、抵接部205構成為於收容於芯殼體12的狀態下,於第一方向X上與構成各探針收容部123的第一芯殼體121及第二芯殼體122的內表面抵接。As shown in FIG. 12, the elastic portion 201 includes a plurality of elastic pieces (two strip-shaped elastic pieces in this embodiment) arranged with a gap therebetween. Each elastic piece has a zigzag shape including four extension portions and three bent portions, the four extension portions each extend in the second direction Y, and the three bent portions are respectively connected to adjacent extension portions. The extending portions arranged at both ends of the first direction X constitute the contact portion 204 and the contact portion 205, respectively. As shown in FIG. 10, each abutting portion 204 and abutting portion 205 are configured to be in the first direction X with the first core housing 121 constituting each probe housing portion 123 in the state of being accommodated in the core housing 12 And the inner surface of the second core case 122 abuts.

即,殼體10不限於所述實施形態,只要具有與第一方向X交叉的開口面111,且能夠於第一觸點部21經由開口面111的開口部113配置於外部的狀態下,將探針20收容於內部即可。That is, the housing 10 is not limited to the above-mentioned embodiment, as long as it has an opening surface 111 crossing the first direction X, and can be arranged in the state where the first contact portion 21 is arranged outside through the opening 113 of the opening surface 111, The probe 20 may be stored inside.

另外,探針20不限於所述實施形態,只要是在第一方向X的兩端分別具有第一觸點部21及第二觸點部22的板狀即可。例如,可以將圖12的探針20用於圖1的探針單元1,亦可以將圖7的探針20用於圖8的探針單元1。In addition, the probe 20 is not limited to the above embodiment, as long as it has a plate shape having the first contact portion 21 and the second contact portion 22 at both ends in the first direction X, respectively. For example, the probe 20 of FIG. 12 can be used for the probe unit 1 of FIG. 1, and the probe 20 of FIG. 7 can also be used for the probe unit 1 of FIG. 8.

再者,關於抵接部204、抵接部205,既可以僅於第一方向X的兩端的任一者設置抵接部204、抵接部205,亦可以兩者都省略。於此情況下,亦可以設置從第一接觸部202或第二接觸部203向第二方向Y延伸的抵接部231、抵接部271,來代替於彈性部201設置抵接部204、抵接部205。In addition, as for the contact portion 204 and the contact portion 205, the contact portion 204 and the contact portion 205 may be provided only at either end of the first direction X, or both may be omitted. In this case, instead of providing the contact portion 204, the contact portion 231 and the contact portion 271 extending from the first contact portion 202 or the second contact portion 203 in the second direction Y接部205.

另外,施力部不限於盤簧50,可以採用任何能夠於第一方向X上朝向初始位置P1且於開口面111的延伸方向上朝向擺動範圍的中心對擺動構件30施力的構成。In addition, the urging portion is not limited to the coil spring 50, and any configuration that can urge the swing member 30 toward the initial position P1 in the first direction X and toward the center of the swing range in the extending direction of the opening surface 111 can be adopted.

以上,參照圖式對本揭示的各種實施形態進行了詳細說明,最後,對本揭示的各種態樣進行說明。再者,於以下的說明中,作為一例,亦附上參照符號加以記載。In the above, various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure will be described. In addition, in the following description, as an example, the reference symbol is attached and described.

本揭示的第一態樣的探針單元1包括: 板狀的探針20,於第一方向X的兩端分別具有第一觸點部21及第二觸點部22; 殼體10,具有與所述第一方向X交叉的開口面111,且於所述第一觸點部21經由所述開口面111的開口部113配置於外部的狀態下,能夠將所述探針20收容於內部; 擺動構件30,以能夠沿著所述第一方向X及所述開口面111的延伸方向擺動的狀態支撐於所述殼體10,並且具有於所述第一方向X上貫通且能夠收容所述第一觸點部21的收容孔34;以及 施力部50,配置於所述殼體10的內部,並且於所述第一方向X上朝向最遠離所述開口面111的初始位置P1將所述擺動構件30施力至所述殼體10,於所述開口面111的延伸方向上朝向所述擺動構件30的擺動範圍的中心將所述擺動構件30施力至所述殼體10。The probe unit 1 of the first aspect of the present disclosure includes: The plate-shaped probe 20 has a first contact portion 21 and a second contact portion 22 at both ends in the first direction X; The case 10 has an opening surface 111 that intersects the first direction X, and the first contact portion 21 can be arranged in the state where the first contact portion 21 is arranged outside via the opening 113 of the opening surface 111. The needle 20 is housed inside; The swing member 30 is supported by the housing 10 in a state capable of swinging along the first direction X and the extending direction of the opening surface 111, and has a penetration in the first direction X and can accommodate the The receiving hole 34 of the first contact portion 21; and The urging portion 50 is disposed inside the housing 10 and urges the swing member 30 to the housing 10 in the first direction X toward the initial position P1 farthest from the opening surface 111 In the extending direction of the opening surface 111, the swing member 30 is urged to the housing 10 toward the center of the swing range of the swing member 30.

根據第一態樣的探針單元1,包括板狀的探針20及擺動構件30,該擺動構件30具有能夠收容探針20的第一觸點部21的收容孔34。藉由這種構成,可以容易地實現能夠應對小型化的探針單元1。The probe unit 1 according to the first aspect includes a plate-shaped probe 20 and a swing member 30 having a receiving hole 34 that can receive the first contact portion 21 of the probe 20. With this configuration, the probe unit 1 capable of coping with miniaturization can be easily realized.

本揭示的第二態樣的探針單元1中, 所述施力部包含至少三個盤簧50, 於沿著所述第一方向觀看的俯視下,所述擺動構件30的重心位於以各所述盤簧50為頂點的多邊形的內部。In the probe unit 1 of the second aspect of the present disclosure, The urging part includes at least three coil springs 50, In a plan view viewed along the first direction, the center of gravity of the swing member 30 is located inside the polygon with each coil spring 50 as the apex.

根據第二態樣的探針單元1,能夠以可更可靠地於第一方向X及開口面111的延伸方向上擺動的狀態支撐擺動構件30。其結果,即使探針單元1相對於接觸對象物的位置偏移,亦可以根據接觸對象物更準確地對探針20定位。According to the probe unit 1 of the second aspect, it is possible to support the swing member 30 in a state that it can swing more reliably in the first direction X and the extending direction of the opening surface 111. As a result, even if the position of the probe unit 1 with respect to the contact object is shifted, the probe 20 can be more accurately positioned according to the contact object.

本揭示的第三態樣的探針單元1中, 所述施力部具有四個所述盤簧50,所述四個所述盤簧50配置於在沿著所述第一方向X觀看的俯視下,圍繞所述探針20的四邊形的各頂點。In the probe unit 1 of the third aspect of the present disclosure, The urging portion has four coil springs 50, and the four coil springs 50 are arranged at each vertex of the quadrilateral of the probe 20 in a plan view viewed along the first direction X .

根據第三態樣的探針單元1,能夠以可更可靠地於第一方向X及開口面111的延伸方向上擺動的狀態支撐擺動構件30。即使探針單元1相對於接觸對象物的位置產生了偏移,亦可以根據接觸對象物更準確地對探針20定位。According to the probe unit 1 of the third aspect, the swing member 30 can be supported in a state in which it can swing more reliably in the first direction X and the extending direction of the opening surface 111. Even if the position of the probe unit 1 is shifted relative to the position of the contact object, the probe 20 can be positioned more accurately according to the contact object.

本揭示的第四態樣的探針單元1中, 所述探針20包括: 彈性部201,能夠沿著所述第一方向X彈性變形; 第一接觸部202,連接所述彈性部201的所述第一方向X的一端且設置有所述第一觸點部21;以及 第二接觸部203,連接所述彈性部201的所述第一方向X的另一端且設置有所述第二觸點部22;且 所述彈性部201具有第一抵接部204,所述第一抵接部204沿著與所述第一方向X及所述探針20的板厚方向Z交叉的第二方向Y延伸,並且構成所述彈性部201的所述第一方向X的一端及所述彈性部201的所述第一方向X的另一端的至少一者, 所述第一抵接部204於所述第一方向X上與所述殼體10的內表面抵接,而限制所述探針20的向所述第一方向X的移動。In the probe unit 1 of the fourth aspect of the present disclosure, The probe 20 includes: The elastic portion 201 can elastically deform along the first direction X; A first contact portion 202 connected to an end of the elastic portion 201 in the first direction X and provided with the first contact portion 21; and A second contact portion 203 connected to the other end of the elastic portion 201 in the first direction X and provided with the second contact portion 22; and The elastic portion 201 has a first contact portion 204 that extends in a second direction Y that intersects the first direction X and the thickness direction Z of the probe 20, and At least one of one end of the elastic portion 201 in the first direction X and the other end of the elastic portion 201 in the first direction X, The first abutment portion 204 abuts on the inner surface of the housing 10 in the first direction X, thereby restricting the movement of the probe 20 in the first direction X.

根據第四態樣的探針單元1,可以更容易地實現能夠應對小型化的探針單元1。According to the probe unit 1 of the fourth aspect, the probe unit 1 capable of coping with miniaturization can be realized more easily.

本揭示的第五態樣的探針單元1中, 所述探針20包括: 彈性部201,能夠沿著所述第一方向X彈性變形; 第一接觸部202,連接所述彈性部201的所述第一方向X的一端且設置有所述第一觸點部21;以及 第二接觸部203,連接所述彈性部201的所述第一方向X的另一端且設置有所述第二觸點部22;且 所述第一接觸部202及所述第二接觸部203的至少一者具有第二抵接部231、第二抵接部271,所述第二抵接部231、第二抵接部271沿著與所述第一方向X及所述探針20的板厚方向Z交叉的第二方向Y延伸,並且於所述第一方向X上與所述殼體10的內表面抵接,而限制所述探針20的向所述第一方向X的移動。In the probe unit 1 of the fifth aspect of the present disclosure, The probe 20 includes: The elastic portion 201 can elastically deform along the first direction X; A first contact portion 202 connected to an end of the elastic portion 201 in the first direction X and provided with the first contact portion 21; and A second contact portion 203 connected to the other end of the elastic portion 201 in the first direction X and provided with the second contact portion 22; and At least one of the first contact portion 202 and the second contact portion 203 has a second contact portion 231, a second contact portion 271, the second contact portion 231, the second contact portion 271 along It extends in a second direction Y that intersects the first direction X and the thickness direction Z of the probe 20, and is in contact with the inner surface of the housing 10 in the first direction X to restrict The movement of the probe 20 in the first direction X.

根據第五態樣的探針單元1,可以更容易地實現能夠應對小型化的探針單元1。According to the probe unit 1 of the fifth aspect, the probe unit 1 capable of coping with miniaturization can be realized more easily.

本揭示的第六態樣的探針單元1中, 所述殼體10包括: 第一芯殼體121及第二芯殼體122,分別具有能夠收容保持所述探針20的探針收容部123;以及 基底殼體11,於所述第一芯殼體121的所述探針收容部123及所述第二芯殼體122的所述探針收容部123於所述第二方向上鄰接而配置的狀態下,將所述第一芯殼體121及所述第二芯殼體122相互獨立地定位並一體地保持。In the probe unit 1 of the sixth aspect of the present disclosure, The housing 10 includes: The first core case 121 and the second core case 122 each have a probe accommodating portion 123 capable of accommodating and holding the probe 20; and The base housing 11 is disposed adjacent to the probe housing portion 123 of the first core housing 121 and the probe housing portion 123 of the second core housing 122 in the second direction In this state, the first core case 121 and the second core case 122 are positioned independently of each other and held integrally.

根據第六態樣的探針單元1,例如,可以將基底殼體11及芯殼體12通用化,且構成為能夠相對於一個基底殼體11對預先決定的不同的多個種類的芯殼體12相互獨立地定位並一體地保持,藉此提高探針單元1的生產率。According to the probe unit 1 of the sixth aspect, for example, the base case 11 and the core case 12 can be generalized, and the plurality of types of core cases determined in advance with respect to one base case 11 can be configured. The bodies 12 are positioned independently of each other and held integrally, thereby improving the productivity of the probe unit 1.

本揭示的第七態樣的探針單元1中, 所述基底殼體11具有殼體收容部13,所述殼體收容部13於能夠於所述第一方向X上擺動的狀態下收容所述擺動構件30,且經由所述第一方向X而圍繞所述擺動構件30。In the probe unit 1 of the seventh aspect of the present disclosure, The base housing 11 has a housing accommodating portion 13 that accommodates the swing member 30 in a state capable of swinging in the first direction X and passes through the first direction X Surround the swing member 30.

根據第七態樣的探針單元1,可以進一步減少第一觸點部21的損傷的產生,因此可以更容易地實現能夠應對小型化的探針單元1。According to the probe unit 1 of the seventh aspect, the occurrence of damage to the first contact portion 21 can be further reduced, and therefore the probe unit 1 capable of coping with miniaturization can be realized more easily.

再者,藉由將所述各種實施形態或變形例中的任意的實施形態或變形例適當組合,而可獲得各自具有的效果。另外,實施形態彼此的組合或實施例彼此的組合或實施形態與實施例的組合是可能的,並且不同的實施形態或實施例中的特徵彼此的組合亦是可能的。In addition, by appropriately combining any of the above-mentioned various embodiments or modifications, each of the effects can be obtained. In addition, combinations of embodiments or embodiments and combinations of embodiments and embodiments are possible, and combinations of features in different embodiments or embodiments are also possible.

本揭示的探針單元可以用於例如包括相機模組等B to B(Business-to-Business)連接器作為連接媒體的模組,以及SOP(Small Outline Package)、QFP(Quad Flat Package)、BGA(Ball grid array)等半導體封裝的檢查等。The probe unit of the present disclosure can be used for modules including B to B (Business-to-Business) connectors such as camera modules as connection media, as well as SOP (Small Outline Package), QFP (Quad Flat Package), BGA (Ball grid array) inspection of semiconductor packages, etc.

1‧‧‧探針單元 10‧‧‧殼體 11‧‧‧基底殼體 12‧‧‧芯殼體 13‧‧‧殼體收容部 17‧‧‧銷構件 18‧‧‧槽部 20‧‧‧探針 21‧‧‧第一觸點部(觸點部) 22‧‧‧第二觸點部(觸點部) 23、27‧‧‧本體部 24、25‧‧‧腳部 26‧‧‧間隙 30‧‧‧擺動構件 31‧‧‧擺動板部 32‧‧‧支撐部 33‧‧‧凹部 34‧‧‧收容孔 35、36‧‧‧間隙 37‧‧‧平坦部 38‧‧‧凸緣部 50‧‧‧盤簧(施力部) 111‧‧‧第一開口面(開口面) 112‧‧‧第二開口面(開口面) 113、114‧‧‧開口部 115‧‧‧收容槽 116、117、118‧‧‧板構件 121‧‧‧第一芯殼體(芯殼體) 122‧‧‧第二芯殼體(芯殼體) 123‧‧‧探針收容部 201‧‧‧彈性部 202‧‧‧第一接觸部 203‧‧‧第二接觸部 204‧‧‧抵接部(第一抵接部) 205‧‧‧抵接部 231、271‧‧‧抵接部(第二抵接部) 232、272‧‧‧一端 241、251‧‧‧突起部 GP‧‧‧重心 L1~L5‧‧‧假想直線 P1‧‧‧初始位置 P2‧‧‧動作位置 X‧‧‧第一方向 Y‧‧‧第二方向 Z‧‧‧板厚方向1‧‧‧ Probe unit 10‧‧‧Housing 11‧‧‧Base shell 12‧‧‧Core shell 13‧‧‧Housing housing 17‧‧‧pin component 18‧‧‧Slot 20‧‧‧probe 21‧‧‧First contact part (contact part) 22‧‧‧Second contact part (contact part) 23, 27‧‧‧Body 24, 25‧‧‧ feet 26‧‧‧ Clearance 30‧‧‧ Swing member 31‧‧‧ Swing board 32‧‧‧Support 33‧‧‧recess 34‧‧‧ containment hole 35, 36‧‧‧ gap 37‧‧‧flat 38‧‧‧Flange 50‧‧‧Coil Spring (Forcing Department) 111‧‧‧First opening surface (opening surface) 112‧‧‧Second opening surface (opening surface) 113, 114‧‧‧ opening 115‧‧‧ containment tank 116, 117, 118 ‧‧‧ plate members 121‧‧‧The first core shell (core shell) 122‧‧‧Second core shell (core shell) 123‧‧‧Probe containment department 201‧‧‧Elastic Department 202‧‧‧First Contact Department 203‧‧‧The second contact 204‧‧‧ Abutment Department (First Abutment Department) 205‧‧‧Abutment Department 231, 271‧‧‧ abutment (second abutment) 232, 272‧‧‧ one end 241, 251‧‧‧ protrusion GP‧‧‧Center of gravity L1~L5‧‧‧Imaginary straight line P1‧‧‧Initial position P2‧‧‧Motion position X‧‧‧First direction Y‧‧‧Second direction Z‧‧‧Board thickness direction

圖1是表示本揭示一實施形態的探針單元的立體圖。 圖2是沿著圖1的II-II線的剖面圖。 圖3是沿著圖1的III-III線的剖面圖。 圖4是表示圖1的探針單元的擺動構件的立體圖。 圖5是圖4的擺動構件的平面圖。 圖6是圖1的探針單元的放大平面圖。 圖7是表示圖1的探針單元的探針的立體圖。 圖8是表示圖1的探針單元的變形例的立體圖。 圖9是沿著圖8的IX-IX線的剖面圖。 圖10是沿著圖8的VIII-VIII線的剖面圖。 圖11是圖8的探針單元的放大平面圖。 圖12是表示圖8的探針單元的探針的立體圖。FIG. 1 is a perspective view showing a probe unit according to an embodiment of the present disclosure. Fig. 2 is a cross-sectional view taken along line II-II of Fig. 1. Fig. 3 is a cross-sectional view taken along line III-III of Fig. 1. 4 is a perspective view showing a swing member of the probe unit of FIG. 1. Fig. 5 is a plan view of the swing member of Fig. 4. 6 is an enlarged plan view of the probe unit of FIG. 1. 7 is a perspective view showing a probe of the probe unit of FIG. 1. 8 is a perspective view showing a modification of the probe unit of FIG. 1. 9 is a cross-sectional view taken along line IX-IX of FIG. 8. FIG. 10 is a cross-sectional view taken along line VIII-VIII of FIG. 8. 11 is an enlarged plan view of the probe unit of FIG. 8. 12 is a perspective view showing the probe of the probe unit of FIG. 8.

1‧‧‧探針單元 1‧‧‧ Probe unit

10‧‧‧殼體 10‧‧‧Housing

11‧‧‧基底殼體 11‧‧‧Base shell

12‧‧‧芯殼體 12‧‧‧Core shell

17‧‧‧銷構件 17‧‧‧pin component

20‧‧‧探針 20‧‧‧probe

30‧‧‧擺動構件 30‧‧‧ Swing member

31‧‧‧擺動板部 31‧‧‧ Swing board

32‧‧‧支撐部 32‧‧‧Support

111‧‧‧第一開口面(開口面) 111‧‧‧First opening surface (opening surface)

113‧‧‧開口部 113‧‧‧ opening

115‧‧‧收容槽 115‧‧‧ containment tank

116、117、118‧‧‧板構件 116, 117, 118 ‧‧‧ plate members

X‧‧‧第一方向 X‧‧‧First direction

Y‧‧‧第二方向 Y‧‧‧Second direction

Z‧‧‧板厚方向 Z‧‧‧Board thickness direction

Claims (7)

一種探針單元,包括: 板狀的探針,於第一方向的兩端分別具有第一觸點部及第二觸點部; 殼體,具有與所述第一方向交叉的開口面,且能夠於所述第一觸點部經由所述開口面的開口部配置於外部的狀態下,將所述探針收容於內部; 擺動構件,以能夠沿著所述第一方向及所述開口面的延伸方向擺動的狀態支撐於所述殼體,並且具有於所述第一方向上貫通且能夠收容所述第一觸點部的收容孔;以及 施力部,配置於所述殼體的內部,並且於所述第一方向上朝向最遠離所述開口面的初始位置將所述擺動構件施力至所述殼體,於所述開口面的延伸方向上朝向所述擺動構件的擺動範圍的中心將所述擺動構件施力至所述殼體。A probe unit, including: The plate-shaped probe has a first contact portion and a second contact portion at both ends in the first direction; The case has an opening surface that intersects the first direction, and the probe can be housed inside in a state where the first contact portion is arranged outside via the opening portion of the opening surface; The swinging member is supported by the housing in a state capable of swinging in the first direction and the extending direction of the opening surface, and has a penetration in the first direction and can accommodate the first contact portion Containment hole; and The urging portion is arranged inside the casing, and urges the swing member to the casing in the first direction toward the initial position farthest from the opening surface, on the opening surface The swinging member is biased toward the housing toward the center of the swinging range of the swinging member in the extending direction. 如申請專利範圍第1項所述的探針單元,其中 所述施力部具有至少三個盤簧, 於沿著所述第一方向觀看的俯視下,所述擺動構件的重心位於以各所述盤簧為頂點的多邊形的內部。The probe unit according to item 1 of the patent application scope, in which The urging part has at least three coil springs, In a plan view viewed along the first direction, the center of gravity of the swing member is located inside the polygon with each coil spring as the apex. 如申請專利範圍第2項所述的探針單元,其中 所述施力部具有四個所述盤簧,四個所述盤簧配置於在沿著所述第一方向觀看的俯視下圍繞所述探針的四邊形的各頂點。The probe unit according to item 2 of the patent application scope, in which The urging portion has four coil springs, and the four coil springs are arranged at each vertex of the quadrilateral surrounding the probe in a plan view viewed in the first direction. 如申請專利範圍第1項至第3項中任一項所述的探針單元,其中 所述探針包括: 彈性部,能夠沿著所述第一方向彈性變形; 第一接觸部,連接所述彈性部的所述第一方向的一端且設置有所述第一觸點部;以及 第二接觸部,連接所述彈性部的所述第一方向的另一端且設置有所述第二觸點部;且 所述彈性部具有: 第一抵接部,沿著與所述第一方向及所述探針的板厚方向交叉的第二方向延伸,並且構成所述彈性部的所述第一方向的一端及所述彈性部的所述第一方向的另一端的至少一者, 所述第一抵接部於所述第一方向上與所述殼體的內表面抵接,而限制所述探針的向所述第一方向的移動。The probe unit according to any one of items 1 to 3 of the patent application scope, wherein The probe includes: The elastic portion can be elastically deformed along the first direction; A first contact portion connected to an end of the elastic portion in the first direction and provided with the first contact portion; and A second contact portion connected to the other end of the elastic portion in the first direction and provided with the second contact portion; and The elastic portion has: The first contact portion extends in a second direction that intersects the first direction and the thickness direction of the probe, and constitutes one end of the elastic portion in the first direction and the At least one of the other ends of the first direction, The first abutting portion abuts against the inner surface of the housing in the first direction, thereby restricting movement of the probe in the first direction. 如申請專利範圍第1項至第3項中任一項所述的探針單元,其中 所述探針包括: 彈性部,能夠沿著所述第一方向彈性變形; 第一接觸部,連接所述彈性部的所述第一方向的一端且設置有所述第一觸點部;以及 第二接觸部,連接所述彈性部的所述第一方向的另一端且設置有所述第二觸點部;且 所述第一接觸部及所述第二接觸部的至少一者具有第二抵接部,所述第二抵接部沿著與所述第一方向及所述探針的板厚方向交叉的第二方向延伸,並且於所述第一方向上與所述殼體的內表面抵接,而限制所述探針的向所述第一方向的移動。The probe unit according to any one of items 1 to 3 of the patent application scope, wherein The probe includes: The elastic portion can be elastically deformed along the first direction; A first contact portion connected to an end of the elastic portion in the first direction and provided with the first contact portion; and A second contact portion connected to the other end of the elastic portion in the first direction and provided with the second contact portion; and At least one of the first contact portion and the second contact portion has a second abutting portion that intersects the first direction and the thickness direction of the probe The second direction extends and abuts the inner surface of the housing in the first direction, thereby restricting movement of the probe in the first direction. 如申請專利範圍第1項至第5項中任一項所述的探針單元,其中 所述殼體包括: 第一芯殼體及第二芯殼體,分別具有能夠收容保持所述探針的探針收容部;以及 基底殼體,於所述第一芯殼體的所述探針收容部與所述第二芯殼體的所述探針收容部於和所述第一方向及所述探針的板厚方向交叉的第二方向上鄰接而配置的狀態下,將所述第一芯殼體及所述第二芯殼體相互獨立地定位並一體地保持。The probe unit according to any one of items 1 to 5 of the patent application scope, wherein The housing includes: The first core case and the second core case each have a probe accommodating portion capable of accommodating and holding the probe; and A base case, the probe accommodating part of the first core case and the probe accommodating part of the second core case in the first direction and the thickness direction of the probe In a state where they are arranged adjacent to each other in the crossing second direction, the first core case and the second core case are positioned independently and held integrally. 如申請專利範圍第6項所述的探針單元,其中 所述基底殼體具有殼體收容部,所述殼體收容部於能夠於所述第一方向上擺動的狀態下收容所述擺動構件,且經由所述第一方向而圍繞所述擺動構件。The probe unit as described in item 6 of the patent application scope, in which The base case has a case accommodating portion that accommodates the swing member in a state capable of swinging in the first direction and surrounds the swing member via the first direction.
TW108127381A 2018-08-09 2019-08-01 Probe unit TWI718610B (en)

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JP2018-150409 2018-08-09
JP2018150409A JP7110817B2 (en) 2018-08-09 2018-08-09 Inspection tools, inspection units and inspection equipment
JP2019-132581 2019-07-18
JP2019132581A JP7371374B2 (en) 2019-07-18 2019-07-18 probe unit

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KR20210022670A (en) 2021-03-03
WO2020032273A1 (en) 2020-02-13

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