CN112534276A

CN112534276A - Probe unit

Info

Publication number: CN112534276A
Application number: CN201980052204.0A
Authority: CN
Inventors: 笹野直哉; 寺西宏真; 酒井贵浩
Original assignee: Omron Corp
Current assignee: Omron Corp
Priority date: 2018-08-09
Filing date: 2019-08-09
Publication date: 2021-03-19
Also published as: CN210690651U; TW202009494A; KR102499677B1; TWI718610B; KR20210022670A; WO2020032273A1

Abstract

The probe unit has: a plate-shaped probe having a 1 st contact portion and a 2 nd contact portion at both ends in a 1 st direction, respectively; a housing capable of accommodating the probe therein in a state where the 1 st contact portion is disposed outside through the opening portion of the opening surface; a swinging member which is supported in a state of being capable of swinging relative to the housing along the 1 st direction and the extending direction of the opening surface and has a receiving hole capable of receiving the 1 st contact part; and a biasing portion that biases the swing member with respect to the housing toward an initial position in the 1 st direction, and biases the swing member with respect to the housing toward a center of a swing range of the swing member in an extending direction of the opening surface.

Description

Probe unit

Technical Field

The present invention relates to a probe unit.

Background

In an electronic component module such as a camera or a liquid crystal panel, generally, a conduction test, an operation characteristic test, and the like are performed in a manufacturing process of the electronic component module. These inspections are performed by connecting terminals for connection to a main body substrate provided on the electronic component module and terminals of an inspection apparatus using probes (probe pins).

As such a probe, there is a Pogo Pin type probe described in patent document 1. The probe has: a needle shaft portion (Plunger) having a contact terminal and a needle shaft main body portion provided coaxially with the contact terminal; and a needle cylinder (barrel) provided on the outer peripheral side of the needle shaft.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2016-142644

Disclosure of Invention

Problems to be solved by the invention

In recent years, electronic component modules have been miniaturized, and inspection equipment for inspecting electronic component modules is also required to support miniaturization. In general, as the size of a Pogo Pin type probe such as the above probe is reduced, the rigidity is reduced and the probe is easily damaged. Therefore, an inspection instrument using the probe may not support miniaturization.

The invention provides a probe unit capable of supporting miniaturization.

Means for solving the problems

A probe unit according to an example of the present invention includes:

a plate-shaped probe having a 1 st contact portion and a 2 nd contact portion at both ends in a 1 st direction, respectively;

a housing having an opening surface intersecting the 1 st direction, the housing being capable of accommodating the probe in a state where the 1 st contact portion is disposed outside through the opening portion of the opening surface;

a swinging member supported in a state of being capable of swinging with respect to the housing along the 1 st direction and the extending direction of the opening surface, and having a receiving hole that penetrates in the 1 st direction and is capable of receiving the 1 st contact portion; and

and a biasing unit that is disposed inside the housing, and biases the swinging member with respect to the housing toward an initial position farthest from the opening surface in the 1 st direction, and biases the swinging member with respect to the housing toward a center of a swinging range of the swinging member in an extending direction of the opening surface.

Effects of the invention

According to the above probe unit, there is provided: a plate-shaped probe; and a swinging member having a receiving hole capable of receiving the 1 st contact portion of the probe. With such a configuration, a probe unit capable of supporting miniaturization can be easily realized.

Drawings

Fig. 1 is a perspective view showing a probe unit according to an embodiment of the present invention.

Fig. 2 is a sectional view taken along line II-II of fig. 1.

Fig. 3 is a sectional view taken along the line III-III of fig. 1.

Fig. 4 is a perspective view illustrating a swing member of the probe unit of fig. 1.

Fig. 5 is a plan view of the swing member of fig. 4.

Fig. 6 is an enlarged plan view of the probe unit of fig. 1.

Fig. 7 is a perspective view illustrating a probe of the probe unit of fig. 1.

Fig. 8 is a perspective view showing a modification of the probe unit of fig. 1.

Fig. 9 is a sectional view taken along line IX-IX of fig. 8.

Fig. 10 is a sectional view taken along line VIII-VIII of fig. 8.

Fig. 11 is an enlarged plan view of the probe unit of fig. 8.

Fig. 12 is a perspective view illustrating a probe of the probe unit of fig. 8.

Detailed Description

An example of the present invention will be described below with reference to the drawings. In the following description, terms indicating specific directions or positions (for example, terms including "up", "down", "right" and "left") are used as necessary, but these terms are used for ease of understanding the present invention with reference to the drawings, and the technical scope of the present invention is not limited by the meaning of these terms. The following description is merely exemplary in nature and is not intended to limit the present invention, the application of the present invention, or the use of the present invention. The drawings are schematic, and the ratio of the dimensions and the like do not necessarily match the actual ratio of the dimensions and the like.

As shown in fig. 1, a probe unit 1 according to an embodiment of the present invention includes: a housing 10; a plate-shaped probe 20 housed inside the case 10; and a swinging member 30 supported to be swingable with respect to the housing 10. In this embodiment, for example, a plurality of probes 20 are housed in the case 10. As shown in fig. 2 and 3, each probe 20 has a 1 st contact portion 21 and a 2 nd contact portion 22 at both ends in the 1 st direction X, and is disposed at an interval in the plate thickness direction Z intersecting (e.g., orthogonal to) the 1 st direction X. That is, the probes 20 are arranged in a row with their plate surfaces facing each other.

As an example, as shown in fig. 1, the housing 10 includes: a substantially rectangular parallelepiped base housing 11; and a core case 12 housed inside the base case 11.

As an example, as shown in fig. 2, the base housing 11 has a pair of opening surfaces 111 and 112 (hereinafter, referred to as a 1 st opening surface 111 and a 2 nd opening surface 112) intersecting the 1 st direction X.

Openings

113 and 114 having a substantially rectangular shape are provided at substantially the center in the longitudinal direction (i.e., the plate thickness direction Z) of the 1 st opening surface 111 and the 2 nd opening surface 112, respectively. A housing accommodating portion 13 that accommodates the core housing 12 is provided inside the base housing 11. The

openings

113 and 114 are connected to the housing accommodating portion 13. The 1 st contact portion 21 and the 2 nd contact portion 22 of the probe 20 are disposed outside the base housing 11 through the

openings

113 and 114, respectively. In this embodiment, as shown in fig. 1, the base housing 11 is composed of 3 substantially

rectangular plate members

116, 117, 118 stacked in the 1 st direction X. The

plate members

116, 117, and 118 are integrated by the pin member 17.

A receiving groove 115 is provided at a periphery of the core housing 12 of the base housing 11. The storage grooves 115 are provided on both sides of the base housing 11 in the plate thickness direction Z of the core housing 12. Each receiving groove 115 extends in the board thickness direction Z and in a direction away from the core case 12 inside the base case 11. The storage grooves 115 respectively store therein: a support portion 32 of the swinging member 30 described later; and a coil spring 50 (an example of a biasing portion) that biases the support portion 32 in the 1 st direction X in a direction from the 2 nd opening surface 112 toward the 1 st opening surface 111.

For example, as shown in fig. 3, the core case 12 includes a 1 st core case 121 and a 2 nd core case 122, and the 1 st core case 121 and the 2 nd core case 122 are respectively provided with a plurality of probe accommodating portions 123 capable of accommodating the probes 20 therein. The probe housings 123 of the

core cases

121 and 122 are disposed adjacent to each other in a 2 nd direction Y intersecting (e.g., orthogonal to) the 1 st direction X and the plate thickness direction Z, and are positioned and held integrally independently of each other by the base case 11. As shown in fig. 2, the probe accommodating portions 123 are arranged in a row at intervals in the plate thickness direction Z. In each probe housing section 123, 1 probe 20 is housed in a state electrically independent from the other probes 20 and in a state where each of the

contact sections

21 and 22 at both ends in the 1 st direction X is positioned outside each of the

core cases

121 and 122.

As shown in fig. 1, the probe unit 1 includes a swing member 30, and the swing member 30 is disposed outside the housing 10. The swing member 30 includes: a swing plate portion 31 disposed so as to face the 1 st opening surface 111; and a pair of support portions 32 extending in the 1 st direction X from both ends of the swing plate portion 31 in the plate thickness direction Z. The swing plate portion 31 is supported via a pair of support portions 32 in a state of being able to swing with respect to the housing 10.

As shown in fig. 3, the swinging plate portion 31 has: a recess 33 provided on a surface opposite to the 1 st opening surface 111 in the 1 st direction X; and a plurality of receiving holes 34 provided on the bottom surface of the recess 33. The recess 33 is configured to accommodate a part of a connector of an inspection object or an inspection apparatus, which is an example of a contact object, when the connector is brought into contact with the probe unit 1, and to determine a position of the connector with respect to the swinging member 30. Each receiving hole 34 penetrates the swinging plate portion 31 in the 1 st direction X, and receives the 1 st contact portion 21 of the probe 20. In this embodiment, the number of the receiving holes 34 corresponding to the number of the received probes 20 is set.

As shown in fig. 2, the distal end portion of each support portion 32, which is located farther from the swing plate portion 31 in the 1 st direction X, is accommodated in the accommodation groove 115 of the base housing 11. A flange portion 38 is provided at a distal end portion of each support portion 32, and the flange portions 38 extend in directions away from each other from each support portion 32. Each flange 38 is disposed so as to be able to contact the inner surface of the base housing 11 constituting the housing groove 115 in the 1 st direction X, and is biased with respect to the base housing 11 by the coil spring 50.

In the probe unit 1, as shown in fig. 4 and 5, each flange portion 38 is biased with respect to the base housing 11 by 4 coil springs 50. Specifically, each flange portion 38 has a substantially rectangular shape with the 2 nd direction Y being a long side in a plan view viewed along the 1 st direction X, and the coil springs 50 are disposed at both ends of each flange portion 38 in the 2 nd direction Y. In other words, the coil springs 50 are arranged so as to be positioned at the respective vertices of a quadrangle surrounding the probe 20 in a plan view viewed along the 1 st direction X.

As shown in fig. 5, in a plan view taken along the 1 st direction X, the center of gravity GP of the swing member 30 is located inside a quadrangle having 4 imaginary straight lines L1 to L4 as one side passing through an arbitrary point (for example, the center) of 2 coil springs 50 adjacent to each other in the 1 st direction X and the 2 nd direction Y. In other words, each coil spring 50 is disposed such that the center of gravity GP of the swing member 30 is located inside a polygon having each coil spring 50 as a vertex.

As shown in fig. 2 and 3, the movement of the swing member 30 in the 1 st direction X is restricted between the initial position P1 and the operating position P2 by the flange portion 38 and the storage groove 115. The initial position P1 is the position farthest from the 1 st opening surface 111 among the positions in the 1 st direction X in which the swing member 30 can move. The swing member 30 is held at the initial position P1 by the urging force of the coil spring 50 in a state where no external force in the 1 st direction X is applied. The operating position P2 is the position closest to the 1 st opening surface 111 among the positions in the 1 st direction X in which the swing member 30 can move.

As shown in fig. 6, in a plan view viewed along the 1 st direction X, a gap 35 in the 2 nd direction Y and a gap 36 in the plate thickness direction Z are provided between each support portion 32 of the rocking member 30 and the housing groove 115. Fig. 6 shows only one support portion 32. The movement of the swing member 30 in the 2 nd direction Y and the plate thickness direction Z is limited to the range of the

gaps

35 and 36. When the position provided in the extending direction of the 1 st opening surface 111 (i.e., the extending direction of the plane including the 2 nd direction Y and the plate thickness direction Z) and having the

gaps

35 and 36 with the housing groove 115 is the center of the swing range, the swing member 30 is biased toward the center of the swing range by the 4 coil springs 50 in the extending direction of the 1 st opening surface 111.

As an example, as shown in fig. 7, each probe 20 is thin and elongated in the 1 st direction X and has conductivity. Each probe 20 has: an elastic portion 201 elastically deformable in the 1 st direction X; a 1 st contact portion 202 connected to one end of the elastic portion 201 in the 1 st direction X and provided with a 1 st contact portion 21; and a 2 nd contact portion 203 connected to the other end of the elastic portion 201 in the 1 st direction X, and provided with a 2 nd contact portion 22. Each probe 20 is formed by, for example, electroforming, and the elastic portion 201, the 1 st contact portion 202, and the 2 nd contact portion 203 are arranged in series along the 1 st direction X and are integrally configured.

For example, the elastic portion 201 is formed of a plurality of band-shaped elastic pieces arranged with a gap therebetween. Each of the elastic band-like sheets has an elongated band-like shape and has substantially the same cross-sectional shape.

For example, the 1 st contact portion 202 includes: a main body 23 connected to the elastic portion 201 from a direction intersecting the 1 st direction X; and a pair of

legs

24 and 25 extending from the main body 23 in the 1 st direction X and in a direction away from the elastic portion 201.

The body portion 23 has a contact portion 231 provided near one end of the elastic portion 201 in the 1 st direction X and extending in the 2 nd direction Y.

The

legs

24 and 25 are disposed with a gap 26 therebetween in the 2 nd direction Y and are configured to be elastically deformable in the 2 nd direction Y. The 1 st contact portion 21 is provided at the end of each

leg

24, 25. Each of the 1 st contact portions 21 is configured to be able to contact a contact object (for example, a convex contact of an inspection object) from the 1 st direction X. Each

leg

24, 25 has a

projection

241, 251, and the

projections

241, 251 are provided on the side surfaces of the

legs

24, 25 facing each other in the 2 nd direction Y. The

protrusions

241 and 251 protrude so as to close the gap 26 between the pair of

legs

24 and 25, thereby preventing the contact object from being excessively inserted into the gap 26.

As shown in fig. 2 and 3, each 1 st contact portion 21 is accommodated in the accommodating hole 34 of the corresponding rocking member 30, and partially protrudes from the bottom surface of the concave portion 33 in a state where the rocking member 30 is located at the initial position P1.

For example, the 2 nd contact portion 203 includes a body portion 27, and the body portion 27 is connected to the elastic portion 201 from the 2 nd direction Y. The main body 27 has an abutting portion 271, and the abutting portion 271 extends in the 2 nd direction Y from an end of the main body 27 on the elastic portion 201 side in the 1 st direction X. The tip of the main body 27 in the 1 st direction X has a substantially triangular shape tapered in the 1 st direction X and away from the elastic portion 201, and constitutes the 2 nd contact portion 22.

The 1 st contact portion 202 and the 2 nd contact portion 203 are respectively arranged on a virtual straight line L5, and the virtual straight line L5 passes through the centers in the 2 nd direction Y of the pair of

legs

24 and 25 of the 1 st contact portion 202 and extends in the 1 st direction X. The elastic portion 201 and the

contact portions

231 and 271 are disposed on the same side in the 2 nd direction Y as the virtual straight line L5.

As shown in fig. 3, in a state where the probes 20 are housed in the probe housing portions 123 of the core housing 12, the abutting portion 231 of the 1 st contact portion 202 and the abutting portion 271 of the 2 nd contact portion 203 are configured to abut against the inner surfaces of the 1 st core housing 121 and the 2 nd core housing 122 constituting the probe housing portions 123 in the 1 st direction X, respectively. That is, the

contact portions

231 and 271 define the positions of the

contact portions

21 and 22 of the probe 20 in the 1 st direction X.

The elastic portion 201 is disposed on one side of one end 232 of the body portion 23 of the 1 st contact portion 202 in the width direction (i.e., the 2 nd direction Y) and one end 272 of the body portion 27 of the 2 nd contact portion 203 in the width direction. In this embodiment, the one end 232 of the body portion 23 of the 1 st contact portion 202 and the one end 272 of the body portion 27 of the 2 nd contact portion 203 are arranged on a straight line parallel to the virtual straight line L5.

The probe unit 1 can be used for, for example, a module having a BtoB (Business-to-Business) connector as a connection medium such as a camera module, or a semiconductor Package such as a SOP (Small Outline Package), a QFP (Quad Flat Package), a BGA (Ball grid array), or the like, and for a conduction test or an operation characteristic test. In such an inspection, generally, each probe 20 frequently repeats contact and release with an inspection object or an inspection apparatus, which is an example of a contact object, and thus durability is required. When the probe 20 is miniaturized, the requirement for durability is further improved.

The frequency of repetition of contact and release of the contact between the object to be inspected and the 1 st contact portion 21 is higher than the frequency of repetition of contact and release of the contact between the inspection apparatus and the 2 nd contact portion 22. Therefore, it is an important element to ensure the durability of the 1 st contact portion 21 by miniaturizing the probe unit 1.

However, as one method of securing the durability of the probe 20, it is conceivable to change the material of the probe 20. When the probe 20 is formed of a material having high hardness, such as a nickel alloy or a titanium alloy, the object to be contacted may be damaged. On the other hand, when the probe 20 is formed of a material having low hardness such as beryllium steel or phosphor bronze, the probe 20 cannot have sufficient durability, and the contact portion may be deteriorated due to wear of sliding caused by repetition of contact with and release from the object to be contacted. Therefore, it is not easy to ensure the durability of the probe 20 by changing the material.

According to the probe unit 1, there are: a plate-shaped probe 20; and a swinging member 30 having a receiving hole 34 capable of receiving the 1 st contact point portion 21 of the probe 20. Since the probe 20 has a plate shape, for example, even if the probe is miniaturized, the rigidity of the probe 20 can be suppressed from being lowered, and durability can be secured, as compared with a Pogo Pin type probe. Further, since the 1 st contact portion 21 of the probe 20 is accommodated in the accommodation hole 34 of the swing member 30, the occurrence of damage in the 1 st contact portion 21 can be reduced even when the probe 20 is downsized. That is, according to such a configuration, the probe unit 1 capable of supporting miniaturization can be easily realized.

The swing member 30 is supported by the coil spring 50 so as to be swingable with respect to the housing 10 in the 1 st direction X and the extending direction of the 1 st opening surface 111 (i.e., the extending direction of a plane including the 2 nd direction Y and the plate thickness direction Z). With this configuration, even if the position of the probe unit 1 is displaced from the object to be contacted, the probe 20 can be more accurately positioned according to the object to be contacted.

The urging portion is formed of at least 3 coil springs 50, and the center of gravity of the swing member 30 is located inside a polygon having each coil spring 50 as a vertex when viewed in a plan view along the 1 st direction X. With such a configuration, the swing member 30 can be swung more reliably not only in the 1 st direction X but also in the 2 nd direction Y and the plate thickness direction Z.

The biasing portion includes 4 coil springs 50, and the 4 coil springs 50 are located at respective vertices of a quadrangle surrounding the probe 20 in a plan view viewed along the 1 st direction X. With this configuration, the swing member 30 can be swung more reliably not only in the 1 st direction X but also in the 2 nd direction Y and the plate thickness direction Z.

Further, the probe 20 has: an elastic portion 201 elastically deformable in the 1 st direction X; a 1 st contact portion 202 connected to one end of the elastic portion 201 in the 1 st direction X and provided with a 1 st contact portion 21; and a 2 nd contact portion 203 connected to the other end of the elastic portion 201 in the 1 st direction X, and provided with a 2 nd contact portion 22. The 1 st contact portion 202 and the 2 nd contact portion 203 have

contact portions

231 and 271, respectively, and the

contact portions

231 and 271 extend in the 2 nd direction Y and abut against the inner surface of the housing 10 in the 1 st direction X to restrict the movement of the probe 20 in the 1 st direction X. With such a configuration, the probe unit 1 capable of supporting miniaturization can be more easily realized.

Further, the housing 10 has: a 1 st core case 121 and a 2 nd core case 122 each having a probe housing section 123 capable of housing and holding the probe 20; and a base housing 11 that positions and holds the

core housings

121 and 122 independently of each other in a state where the probe accommodating portions 123 of the

core housings

121 and 122 are arranged adjacent to each other in the 2 nd direction Y. According to such a configuration, for example, by configuring the base housing 11 and the core housing 12 to be common, it is possible to position and hold the plurality of types of core housings 12, which are different from each other and are determined in advance, independently of each other with respect to 1 base housing 11, and it is possible to improve the productivity of the probe unit 1.

The biasing portion is not limited to the case of being constituted by 4 coil springs 50, and may be constituted by at least 3 coil springs 50. For example, when the biasing portion is constituted by 3 coil springs 50, 1 coil spring 50 may be disposed at the center of one flange portion 38 in the 2 nd direction Y, and 1 coil spring 50 may be disposed at each of both ends of the other flange portion 38 in the 2 nd direction.

The probe unit 1 may be configured as shown in fig. 8 to 12, for example. In the probe unit 1 shown in fig. 8 to 12, the swinging member 30 is disposed inside the housing 10, but not outside the housing 10. As shown in fig. 9 and 10, the case housing portion 13 of the base case 11 houses the swing member 30 in a state of surrounding the swing member 30 around the 1 st direction X and allowing the swing member 30 to swing in the 1 st direction X, in addition to the core case 12. The groove 18 is provided on the 1 st opening surface 111 of the base housing 11, and the groove 18 extends in the 2 nd direction Y and communicates with the opening 113 and the outside of the base housing 11.

As shown in fig. 9 and 10, the swing member 30 is disposed in the opening 113, and the opening 113 is opened on the 1 st opening surface 111 of the base housing 11. As shown in fig. 11, a gap 35 in the 2 nd direction Y and a gap 36 in the plate thickness direction Z are provided between the swing plate portion 31 of the swing member 30 and the opening 113 in a plan view viewed along the 1 st direction X.

In this way, in the probe unit 1 shown in fig. 8 to 12, in the initial state P1, substantially the entire first contact point portion 21 is covered with the case 10 and the rocking member 30. Therefore, since the generation of damage in the 1 st contact portion 21 can be further reduced, the probe unit 1 capable of supporting miniaturization can be more easily realized.

As shown in fig. 8, a flat portion 37 is provided around the recess 33 of the swing plate portion 31, and the flat portion 37 is disposed between the 1 st opening surface 111 and the bottom surface of the groove portion 18 in the 1 st direction X.

As shown in fig. 9, the pin member 17, which is formed by integrating the

plate members

116, 117, 118 of the base housing 11, protrudes in the 1 st direction X from the 2 nd opening surface 112, and a part of the pin member 17 is located outside the housing 10.

As shown in fig. 12, the elastic portion 201 is composed of a plurality of elastic pieces (in this embodiment, 2 band-shaped elastic pieces) arranged with a gap therebetween. Each elastic piece has a meandering shape including 4 extending portions extending in the 2 nd direction Y and 3 bent portions connected to the adjacent extending portions. The extending portions disposed at both ends in the 1 st direction X constitute abutting

portions

204 and 205, respectively. As shown in fig. 10, the

contact portions

204 and 205 are configured to contact inner surfaces of the 1 st core case 121 and the 2 nd core case 122 configuring the probe accommodating portions 123 in the 1 st direction X in a state of being accommodated in the core case 12.

That is, the housing 10 is not limited to the above embodiment, and may be configured to have the opening surface 111 intersecting the 1 st direction X, and to be able to accommodate the probe 20 therein in a state where the 1 st contact portion 21 is disposed outside through the opening 113 of the opening surface 111.

The probe 20 is not limited to the above embodiment, and may be a plate having the 1 st contact portion 21 and the 2 nd contact portion 22 at both ends in the 1 st direction X. For example, the probe 20 of fig. 12 may be used in the probe unit 1 of fig. 1, or the probe 20 of fig. 7 may be used in the probe unit 1 of fig. 8.

The abutting

portions

204 and 205 may be provided only at one of both ends in the 1 st direction X, or both of them may be omitted. In this case, instead of providing the

contact portions

204 and 205 in the elastic portion 201,

contact portions

231 and 271 extending in the 2 nd direction Y from the 1 st contact portion 202 or the 2 nd contact portion 203 may be provided.

The biasing portion is not limited to the coil spring 50, and may be any structure capable of biasing the swing member 30 toward the initial position P1 in the 1 st direction X and toward the center of the swing range in the extending direction of the opening surface 111.

Although the various embodiments of the present invention have been described in detail with reference to the drawings, the various embodiments of the present invention will be described last. In the following description, reference numerals are given to the drawings as an example.

A probe unit 1 according to embodiment 1 of the present invention includes:

a plate-shaped probe 20 having a 1 st contact portion 21 and a 2 nd contact portion 22 at both ends in the 1 st direction X;

a housing 10 having an opening surface 111 intersecting the 1 st direction X, and capable of accommodating the probe 20 therein with the 1 st contact portion 21 disposed outside via an opening 113 of the opening surface 111;

a swinging member 30 which is supported in a state of being capable of swinging with respect to the housing 10 along the 1 st direction X and the extending direction of the opening surface 111, and which has a receiving hole 34 which penetrates in the 1 st direction X and is capable of receiving the 1 st contact portion 21; and

and a biasing portion 50 that is disposed inside the housing 10, biases the swing member 30 with respect to the housing 10 toward an initial position P1 that is farthest from the opening surface 111 in the 1 st direction X, and biases the swing member 30 with respect to the housing 10 toward the center of a swing range of the swing member 30 in the extending direction of the opening surface 111.

The probe unit 1 according to claim 1 includes: a plate-shaped probe 20; and a swinging member 30 having a receiving hole 34 capable of receiving the 1 st contact point portion 21 of the probe 20. With such a configuration, the probe unit 1 capable of supporting miniaturization can be easily realized.

In the probe unit 1 according to the 2 nd aspect of the present invention,

the force application portion is constituted by at least 3 coil springs 50,

the center of gravity of the swing member 30 is located inside a polygon having the coil springs 50 as vertexes thereof in a plan view viewed in the 1 st direction X.

According to the probe unit 1 of the 2 nd aspect, the swing member 30 can be supported in a state of being able to swing more reliably in the 1 st direction X and the extending direction of the opening surface 111. As a result, even if the position of the probe unit 1 is displaced from the object to be contacted, the probe 20 can be more accurately positioned according to the object to be contacted.

In the probe unit 1 according to the 3 rd aspect of the present invention,

the biasing portion includes 4 coil springs 50, and the 4 coil springs 50 are arranged at respective vertices of a quadrangle surrounding the probe 20 in a plan view viewed along the 1 st direction X.

According to the probe unit 1 of the 3 rd aspect, the swing member 30 can be supported in a state of being able to swing more reliably in the 1 st direction X and the extending direction of the opening surface 111. Even if the position of the probe unit 1 is displaced from the object to be contacted, the probe 20 can be more accurately positioned according to the object to be contacted.

In the probe unit 1 according to the 4 th aspect of the present invention,

the probe 20 has:

an elastic portion 201 elastically deformable in the 1 st direction X;

a 1 st contact portion 202 connected to one end of the elastic portion 201 in the 1 st direction X, and provided with the 1 st contact portion 21; and

a 2 nd contact portion 203 connected to the other end of the elastic portion 201 in the 1 st direction X and provided with the 2 nd contact portion 22,

the elastic portion 201 has a 1 st contact portion 204, the 1 st contact portion 204 extending in a 2 nd direction Y intersecting the 1 st direction X and the plate thickness direction Z of the probe 20, and constituting at least one of one end of the elastic portion 201 in the 1 st direction X and the other end of the elastic portion 201 in the 1 st direction X,

the 1 st contact portion 204 contacts an inner surface of the housing 10 in the 1 st direction X, and restricts movement of the probe 20 in the 1 st direction X.

According to the probe unit 1 of the 4 th aspect, the probe unit 1 capable of supporting miniaturization can be more easily realized.

In the probe unit 1 according to the 5 th aspect of the present invention,

the probe 20 has:

an elastic portion 201 elastically deformable in the 1 st direction X;

at least one of the 1 st contact portion 202 and the 2 nd contact portion 203 has a 2

nd contact portion

231, 271, and the 2

nd contact portion

231, 271 extends in a 2 nd direction Y intersecting the 1 st direction X and the plate thickness direction Z of the probe 20, and abuts against an inner surface of the housing 10 in the 1 st direction X to restrict movement of the probe 20 in the 1 st direction X.

According to the probe unit 1 of the 5 th aspect, the probe unit 1 capable of supporting miniaturization can be more easily realized.

In the probe unit 1 according to claim 6 of the present invention,

the housing 10 has:

a 1 st core case 121 and a 2 nd core case 122 each having a probe housing section 123 capable of housing and holding the probe 20; and

and a base housing 11 that positions and holds the 1 st core housing 121 and the 2 nd core housing 122 independently of each other in a state where the probe housing portion 123 of the 1 st core housing 121 and the probe housing portion 123 of the 2 nd core housing 122 are disposed adjacent to each other in the 2 nd direction Y.

According to the probe 1 of the 6 th aspect, for example, by configuring the base housing 11 and the core housing 12 to be common, it is possible to position and hold the plurality of types of core housings 12, which are different from each other and are determined in advance, independently of each other with respect to 1 base housing 11, and it is possible to improve the productivity of the probe unit 1.

In the probe unit 1 according to the 7 th aspect of the present invention,

the base housing 11 has a housing accommodating portion 13, and the housing accommodating portion 13 accommodates the swing member 30 in a state where the swing member 30 is swingable in the 1 st direction X, and surrounds the swing member 30 around the 1 st direction X.

According to the probe unit 1 of the 7 th aspect, since the occurrence of damage in the 1 st contact portion 21 can be further reduced, the probe unit 1 that can support miniaturization can be more easily realized.

In addition, any of the various embodiments or modifications described above can be appropriately combined to provide the respective effects. Furthermore, combinations of the embodiments with each other or with the embodiments, and combinations of the features in different embodiments or with each other can also be achieved.

The present invention has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, and various changes or modifications will be apparent to those skilled in the art. It is to be understood that such changes and modifications are encompassed within the present invention as long as they do not depart from the scope of the present invention as set forth in the appended claims.

Industrial applicability

The probe unit of the present invention can be used for inspection of a module having a BtoB (Business-to-Business) connector as a connection medium, such as a camera module, and a semiconductor Package such as an SOP (Small Outline Package), QFP (Quad Flat Package), and BGA (Ball grid array).

Description of the reference symbols

1: a probe unit; 10: a housing; 11: a base housing; 111: 1 st open face; 112: 2 nd opening surface; 113. 114: an opening part; 115: a receiving groove; 116. 117, 118: a plate member; 12: a core housing; 121: 1, a core shell; 122: 2 nd core shell; 123: a probe housing section; 13: a housing accommodating section; 17: a pin member; 18: a groove part; 20: a probe; 201: an elastic portion; 202: the 1 st contact part; 203: the 2 nd contact part; 204. 205: an abutting portion; 21: a 1 st contact portion; 22: a 2 nd contact portion; 23. 27: a main body portion; 231. 271: an abutting portion; 24. 25: a foot portion; 241. 251: a protrusion portion; 26: a gap; 30: a swinging member; 31: a swinging plate portion; 32: a support portion; 33: a recess; 34: a receiving hole; 35. 36: a gap; 37: a flat portion; 38: a flange portion; 50: a coil spring; p1: an initial position; p2: an action position; L1-L5: an imaginary straight line.

Claims

1. A probe unit, characterized in that it has:

2. The probe unit of claim 1,

the force application part is provided with at least 3 spiral springs,

the center of gravity of the swing member is located inside a polygon having the coil springs as vertexes thereof in a plan view viewed along the 1 st direction.

3. The probe unit of claim 2,

the biasing portion includes 4 coil springs, and the 4 coil springs are arranged at respective apexes of a quadrangle surrounding the probe in a plan view seen along the 1 st direction.

4. The probe unit according to any one of claims 1 to 3,

the probe has:

an elastic portion that is elastically deformable in the 1 st direction;

a 1 st contact portion connected to one end of the elastic portion in the 1 st direction and provided with the 1 st contact portion; and

a 2 nd contact portion connected to the other end of the elastic portion in the 1 st direction and provided with the 2 nd contact point portion,

the elastic portion has a 1 st abutting portion which extends in a 2 nd direction intersecting the 1 st direction and a plate thickness direction of the probe and which constitutes at least one of one end of the elastic portion in the 1 st direction and the other end of the elastic portion in the 1 st direction,

the 1 st abutting portion abuts against an inner surface of the housing in the 1 st direction, and restricts movement of the probe in the 1 st direction.

5. The probe unit according to any one of claims 1 to 3,

the probe has:

an elastic portion that is elastically deformable in the 1 st direction;

a 2 nd contact portion connected to the other end of the elastic portion in the 1 st direction and provided with the 2 nd contact portion,

at least one of the 1 st contact portion and the 2 nd contact portion has a 2 nd contact portion which extends in a 2 nd direction intersecting the 1 st direction and the plate thickness direction of the probe, and which abuts against an inner surface of the housing in the 1 st direction to restrict movement of the probe in the 1 st direction.

6. The probe unit according to any one of claims 1 to 5,

the housing has:

a 1 st core case and a 2 nd core case each having a probe housing portion capable of housing and holding the probe; and

and a base housing that positions and holds the 1 st core housing and the 2 nd core housing independently of each other in a state where the probe housing portion of the 1 st core housing and the probe housing portion of the 2 nd core housing are arranged adjacent to each other in a 2 nd direction intersecting the 1 st direction and the thickness direction of the probe.

7. The probe unit of claim 6,

the base housing has a housing accommodating portion that accommodates the swinging member in a state in which the swinging member is swingable in the 1 st direction, and surrounds the swinging member around the 1 st direction.