TWI781412B - Probes, Inspection Fixtures, and Inspection Units - Google Patents

Abstract

The probe includes: a plate-shaped body portion; a first contact portion disposed at one end of the body portion in the first direction; and a pair of second contact portions disposed at one end of the body portion in the first direction, at Both sides of the first contact part in the second direction are respectively arranged at a distance from the first contact part, and respectively extend to positions farther from the main body part than the first contact part. Each second contact part has a guide surface, which is disposed opposite to each other in the second direction, and guides a contact object approaching the first contact part along the first direction toward the first contact part.

Description

Probes, Inspection Fixtures, and Inspection Units

The disclosure relates to a probe, an inspection fixture and an inspection unit.

In electronic component modules such as cameras and liquid crystal panels, conduction inspections and operational characteristic inspections are usually performed during the manufacturing process. These inspections are performed by connecting a terminal for connecting to a main body substrate provided in the electronic component module with a terminal of an inspection device using a probe.

As such a probe, there is a probe described in Patent Document 1. The probe includes an upper plunger, a lower plunger, and a coil spring disposed between the upper plunger and the lower plunger, and a front end clamping portion is formed on the upper side of the upper plunger, and the front end clamps The part has a slit structure that sandwiches solder balls. The front clamping portion has a plurality of elastic members arranged at intervals on the circumference, and is configured to receive and hold solder balls therebetween by expanding the elastic members radially. [Prior art literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2001-318119

[Problem to be Solved by the Invention]

In the probe, solder balls that can be held by the tip holding portion are predetermined. Therefore, for example, it may be difficult to reliably bring the probes into contact with a solder ball smaller than a predetermined solder ball.

An object of the present disclosure is to provide a probe capable of more reliably contacting a plurality of contact objects of different sizes, an inspection jig including the probe, and an inspection unit including the inspection jig. [Means to solve the problem]

Probes as an example of the present disclosure include: plate-shaped body portion; a first contact portion disposed at one end of the body portion in a first direction and extending from the one end along the first direction; and A pair of second contact parts, provided at the one end of the body part, on both sides of the first contact part in the second direction, respectively spaced apart from the first contact part configuration, the second direction intersects with the first direction and the thickness direction of the body part, and extends from the one end along the first direction to be farther away from the first contact part than the first contact part. the position of the body part, Each of the pair of second contact portions has: The guide surfaces are arranged to face each other in the second direction, and guide a contact object approaching the first contact part along the first direction toward the first contact part.

In addition, the inspection jig as an example of the present disclosure includes: the probe; and The sleeve can accommodate the probe in a state where each of the first contact portion and the pair of second contact portions is exposed to the outside.

In addition, an inspection unit as an example of the present disclosure includes: At least one inspection fixture. [Effect of the invention]

According to the probe, it includes: a plate-shaped body portion; a first contact portion disposed at one end of the body portion in the first direction; and a pair of second contact portions disposed on the second of the first contact portion. Both sides in the direction are respectively arranged with a gap with respect to the first contact portion. Each second contact part extends from one end of the body part along the first direction to a position farther away from the body part than the first contact part, and is disposed opposite to each other in the second direction, and will approach the second contact part along the first direction. The contact object of the first contact part guides the guide surface toward the first contact part. With such a configuration, it is possible to realize a probe capable of more reliably contacting a plurality of contact objects of different sizes.

According to the inspection jig, an inspection jig applicable to inspection of a plurality of inspection objects of different sizes can be realized by using the probe.

According to the inspection unit, an inspection unit applicable to inspection of a plurality of inspection objects having different sizes can be realized by using the inspection jig.

Hereinafter, an example of the present disclosure will be described with reference to the accompanying drawings. Furthermore, in the following description, terms indicating specific directions or positions (for example, terms including "up", "down", "right", and "left") are used as needed, but these terms are used for The understanding of the present disclosure with reference to the drawings is made easy, and the technical scope of the present disclosure is not limited by the meanings of the terms. In addition, the following description is merely an illustration in nature, and is not intended to limit this disclosure, its application, or its use. Furthermore, the drawings are schematic diagrams, and ratios of dimensions and the like do not necessarily correspond to actual ones.

The probe 3 according to one embodiment of the present disclosure is, for example, as shown in FIG. 1 , is in the shape of a thin plate elongated in the first direction X, and has conductivity. As an example, as shown in FIG. 2 , the probe 3 is used in a state of being accommodated in an insulating sleeve 20 , and together with the sleeve 20 constitutes an inspection jig 2 . As an example, a plurality of probes 3 are accommodated in the inspection jig 2 .

In addition, as shown in FIG. 2 , the inspection jig 2 constitutes a part of the inspection unit 1 . In this embodiment, the inspection unit 1 has a pair of inspection jigs 2 . Each inspection jig 2 is arranged so that it can be used with the first contact part 32 , the second contact part 33 and the third contact part 38 of the probe 3 described later to be exposed to the outside from the sleeve 20 . The direction X and the plate thickness direction Z of the probe 3 are adjacent to each other in a second direction Y that intersects (for example, is perpendicular to).

As shown in FIG. 2 , the inspection unit 1 includes: a housing 10 for accommodating each inspection jig 2 ;

As shown in FIG. 2 , the housing 10 has, for example, a substantially rectangular parallelepiped shape, and has a substantially rectangular opening surface 101 constituting one outer surface thereof. A recess 13 having an opening 14 opening in the opening surface 101 is provided substantially at the center in the longitudinal direction of the opening surface 101 of the housing 10 . A substantially rectangular parallelepiped sleeve 20 is accommodated inside the concave portion 13 .

The swing member 40 is insulative, and is configured to be connectable to a contact object (for example, an inspection object or an inspection device) 100 (see FIG. 4 ). The rocking member 40 has a plate portion 41 and a pair of wall portions 42 as shown in FIG. 2 , and is configured to be rockable in the first direction X. As shown in FIG. The plate portion 41 has a substantially rectangular plate shape and extends along the opening surface 101 . Each wall portion 42 extends in a direction intersecting (eg, perpendicular to) the second direction Y from edges of a pair of plate surfaces of the plate portion 41 that face each other in the second direction Y.

The plate portion 41 has a housing hole 43 that penetrates the plate portion 41 of the rocking member 40 in its rocking direction (that is, the first direction X), and can accommodate the first contact portion 32 and the probe 3 described later. The second contact part 33 . Each storage hole 43 includes a recessed portion 431 opened on the outer surface 411 side of the plate portion 41 and a plurality of through holes 432 opened on the bottom surface of the recessed portion 431 . One end of each probe 3 in the first direction X (that is, the first contact portion 36 of the probe 3 to be described later) is accommodated in the recess 431 of the housing hole 43 via each through hole 432 , and each probe 3 is restricted. One end in the first direction X moves to the second direction Y and the plate thickness direction Z of the probe 3 .

The front end portion of each wall portion 42 in the first direction X is housed in the housing groove 15 provided around the concave portion 13 of the opening surface 101 . Flange portions 47 extending from the respective wall portions 42 in directions away from each other are provided at the front ends of the respective wall portions 42 . Each flange portion 47 is disposed so as to be movable in the first direction X between the return position P1 and the operating position P2 by the inner surface of the housing 10 constituting the storage groove 15 . That is, the swinging range of the swinging member 40 is determined by the moving range of each flange portion 47 in the first direction X. As shown in FIG. Furthermore, the return position P1 is the position of the rocking member 40 in a state where no external force is applied, and the operating position P2 is the position of the rocking member 40 in a state where an external force is applied from the first direction X toward the casing 10, and is in the first direction X. A position closer to the sleeve 20 than the return position P1 in the direction X.

A coil spring 50 is provided inside the storage groove 15 . The coil spring 50 is disposed on the inner surface of the casing 10 constituting the bottom surface of the storage groove 15 , and biases each flange portion 47 in the first direction X toward the opening surface 101 .

As shown in FIG. 2 , each sleeve 20 has a plurality of storage portions 21 inside (only one is shown in FIG. 2 ). Each housing portion 21 has a slit shape, and is configured to be able to house and hold one probe 3 electrically and independently. In addition, the storage portions 21 are arranged in a row at equal intervals along a direction intersecting the first direction X and the second direction Y (that is, the direction through the sheet of FIG. 2 ).

Each probe 3 includes, as shown in FIG. 3 , a plate-shaped body portion 31 and a first contact portion 32 and a second contact portion 33 provided at one end of the body portion 31 in the first direction X. As an example, each probe 3 is formed by electroforming.

As an example, the body part 31 has an elastic part 35 that expands and contracts along the first direction X, a first contact part 36 provided at one end of the elastic part 35 in the first direction X, and a first contact part 36 provided in the elastic part 35. The second contact portion 37 at the other end in one direction X. The elastic portion 35 , the first contact portion 36 , and the second contact portion 37 are arranged in series along the first direction X and formed integrally.

The elastic portion 35 has a plurality of elastic pieces (in this embodiment, four elastic pieces) 61 , 62 , 63 , and 64 arranged with a gap 65 , a gap 66 , and a gap 67 . As an example, each elastic piece 61 , 62 , 63 , 64 is in the shape of an elongated belt, and includes two linear portions 71 , 72 and a curved portion 73 connecting the linear portions 71 , 72 . In addition, as an example, each elastic piece 61, 62, 63, 64 has substantially the same cross-sectional shape.

The first contact portion 36 has a contact portion body 361 extending along the first direction X and an abutting portion 362 extending from the contact portion body 361 along the second direction Y. A first contact part 32 and a second contact part 33 are disposed on the end of the contact part body 361 away from the elastic part 35 in the first direction X. In addition, one end of the elastic portion 35 in the first direction X is connected to an end portion of the contact portion body 361 close to the elastic portion 35 in the first direction X. The contact portion 362 is disposed at an end portion of the contact portion body 361 on the side of the elastic portion 35 in the first direction X.

The second contact portion 37 has a contact portion body 371 extending along the first direction X and an abutting portion 372 extending from the contact portion body 371 along the second direction Y. A third contact portion 38 is disposed on an end portion of the contact portion body 371 away from the elastic portion 35 in the first direction X. In addition, the other end of the elastic portion 35 in the first direction X is connected to the end portion of the contact portion body 371 close to the elastic portion 35 in the first direction X. The abutting portion 372 is disposed at an end portion of the contact portion body 371 on the side of the elastic portion 35 in the first direction X.

As shown in FIG. 3 , each of the contact body 361 of the first contact 36 and the contact body 371 of the second contact 37 is arranged in the second direction Y passing through the contact body 361 of the first contact 36 on the virtual straight line L extending along the first direction X. In addition, the elastic portion 35 and the contact portions 362 and 372 are arranged on the same side in the second direction Y with respect to the virtual straight line L. As shown in FIG. That is, the elastic portion 35 is arranged between the contact portions 362 and 372 in the first direction X. As shown in FIG.

As shown in FIG. 2 , in a state where the probe 3 is housed in each housing portion 21 of the sleeve 20 , each of the contact portion 362 of the first contact portion 36 and the contact portion 372 of the second contact portion 37 is configured as follows: It abuts against the inner surface of the sleeve 20 constituting the receiving portion 21 in the first direction X. That is, the positions of the first contact part 32 , the second contact part 33 and the third contact part 38 of the probe 3 in the first direction X are determined by the contact parts 362 and 372 .

Next, the first contact portion 32 and the second contact portion 33 will be described in more detail with reference to FIG. 4 .

The first contact portion 32 is disposed at one end in the first direction X of the contact portion body 361 of the first contact portion 36 (that is, one end of the body portion 31 in the first direction X), and extends from the contact portion body 361 One end in the first direction X extends along the first direction X. Specifically, the first contact portion 32 includes a pair of protrusions 34 arranged at intervals in the second direction Y. As shown in FIG. Each protrusion 34 is arranged symmetrically with respect to a center line (ie, a virtual straight line L) passing through the center in the second direction Y of one end of the contact body 361 in the first direction X and extending along the first direction.

Furthermore, in the inspection unit 1 in which the rocking member 40 is located at the return position P1, the first contact portion 32 of the probe 3 is arranged closer to the outer surface 411 of the plate portion 41 of the rocking member 40 in the first direction X. A position close to the sleeve 20 (or the opening surface 101 of the housing 10 ). That is, when the rocking member 40 is located at the return position P1, the first contact portion 32 of the probe 3 is arranged inside the storage hole 43 so as to be less likely to be damaged by an external force.

The second contact portion 33 is disposed at one end of the contact portion body 361 in the first direction X, and is respectively disposed on both sides of the first contact portion 32 in the second direction Y, forming a pair. Each of the pair of second contact portions 33 is arranged symmetrically with respect to the imaginary straight line L at a distance from the first contact portion 32 . Each second contact portion 33 extends from one end of the contact portion body 361 in the first direction X along the first direction X to a position farther from the body portion 31 than the first contact portion 32 .

The second contact parts 33 have guide surfaces 331 disposed facing each other in the second direction Y to guide the contact object 100 approaching the first contact part 32 along the first direction X toward the first contact part 32 . As an example, each guide surface 331 includes a curved surface slightly concave toward the elastic portion 35 in the first direction X.

Assume that the contact object 100 is a convex contact 110 having a dimension in the second direction Y (that is, a width dimension) that can simultaneously contact both of the pair of protrusions 34 constituting the first contact portion 32 from the first direction X. . At this time, even when the probe 3 approaches the bump 110 (or when the bump 110 approaches the probe 3), the position of the probe 3 in the second direction Y relative to the bump 110 deviates, However, as long as the bumps 110 can contact the guiding surfaces 331 , the probe 3 will still be guided toward the bumps 110 . As a result, each of the pair of protrusions 34 comes into contact with the front end surface 103 of the male contact 110 at the same time.

In addition, it is assumed that the contact object 100 is a bump 120 having a width dimension that cannot contact both of the pair of protrusions 34 from the first direction X at the same time. At this time, as long as the width dimension of the convex contact 120 is smaller than the width dimension of the first contact portion 36, each of the pair of second contact portions 33 will be opposite to the two front end angles of the convex contact 120 in the second direction Y. The parts 104 make contact at the same time.

Thus, according to the probe 3, it includes: a plate-shaped body portion 31; a first contact portion 32 provided at one end of the body portion 31 in the first direction X; and a pair of second contact portions 33 at the first end. Both sides in the second direction Y of the contact portion 32 are arranged at intervals with respect to the first contact portion 32 . Each second contact portion 33 extends from one end of the body portion 31 along the first direction X to a position farther from the body portion 31 than the first contact portion 32, and is disposed opposite to each other in the second direction Y. The contact object 100 approaching the first contact part 32 along the first direction X guides the guide surface 331 toward the first contact part 32 . With such a configuration, the probe 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes can be realized.

In addition, the first contact portion 32 includes a pair of protrusions 34 arranged at intervals in the second direction Y. As shown in FIG. With such a configuration, the probe 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes can be realized.

Each of the pair of protrusions 34 is arranged symmetrically with respect to the center line L, and each of the pair of second contact portions 33 is arranged symmetrically with respect to the center line L. As shown in FIG. With such a configuration, the probe 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes can be realized.

The inspection jig 2 applicable to the inspection of a plurality of inspection objects of different sizes can be realized by the probe 3 . In addition, the inspection unit 1 applicable to the inspection of a plurality of inspection objects having different sizes can be realized by the inspection jig 2 having the probes 3 .

In addition, the inspection unit 1 further includes a rocking member 40 supported in a rockable state relative to the sleeve 20 . With such a configuration, the occurrence of damage to the first contact portion 32 and each second contact portion 33 of the probe 3 can be reduced.

Furthermore, the body portion 31 is not limited to having the elastic portion 35 , the first contact portion 36 and the second contact portion 37 .

For example, the elastic portion 35 may be in a serpentine shape capable of stretching and contracting in the first direction X. As shown in FIG. In addition, the first contact portion 32 of the first contact portion 36 is not limited to include a pair of protrusions 34 , and may include one protrusion or more than three protrusions 34 .

In addition, for example, the first contact portion 36 may have a pair of leg portions 81 and 82 as shown in FIGS. 5 to 7 . A pair of foot portions 81, 82 are provided at one end of the first contact portion 36 in the first direction X (that is, one end of the body portion 31 in the first direction X), extend along the first direction X and extend in the second direction. Y is arranged with a gap 83 therein. Each leg part 81,82 has the protruding part 84 which protrudes in the direction which mutually approach|closes to the opposing surface 811 and the opposing surface 821 provided in the 2nd direction Y, respectively. Each protrusion 34 is provided on each protruding portion 84 to constitute the first contact portion 32 . In addition, the front ends in the first direction X of the respective leg portions 81 and 82 constitute the respective second contact portions 33 .

After the first contact portion 36 contacts the contact object 100 , the probe 3 is further moved toward the contact object 100 along the first direction X. Then, in the state where the first contact portion 32 is in contact with the contact object 100 , each leg portion 81 , 82 elastically deforms in a direction away from each other in the second direction Y, and the first contact portion 32 contacts the contact object 100 . friction between them. That is, according to the probe 3 in FIGS. 5 to 7 , the foreign matter adhering to the first contact portion 32 and the surface of the contact object 100 is wiped off, and the contact reliability of the probe 3 to the contact object 100 can be improved.

In the respective leg portions 81 , 82 , the positions of the front ends constituting the second contact portion 33 in the first direction X are different from each other. In other words, the second contact portion 33 of one leg portion 81 is disposed farther from the elastic portion 35 than the second contact portion 33 of the other leg portion 82 in the first direction X. As shown in FIG. With such a configuration, the probe 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes can be realized.

The second contact portion 37 may be provided with a contact portion having the same structure as the first contact portion 36 , or the third contact portion 38 may include a plurality of protrusions.

As above, various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally various aspects of the present disclosure will be described. In addition, in the following description, as an example, reference signs are also added and described.

The probe 3 of the first form disclosed herein includes: plate-shaped body part 31; The first contact part 32 is disposed at one end of the body part 31 in the first direction X, and extends from the one end along the first direction X; and A pair of second contact portions 33 are provided at the one end of the body portion 31 , at a portion of the first contact portion 32 intersecting the first direction X and the thickness direction of the body portion 31 . The two sides in the second direction Y are respectively arranged at intervals with respect to the first contact part 32, and extend from the one end along the first direction X to a distance longer than the first contact part. 32 away from the position of the body part 31, Each of the pair of second contact portions 33 has: The guide surfaces 331 are disposed facing each other in the second direction Y, and guide the contact object 100 approaching the first contact part 32 along the first direction X toward the first contact part 32 .

According to the probe 3 of the first aspect, the probe 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes can be realized.

In the probe 3 of the second aspect of the present disclosure, The first contact portion 32 includes a pair of protrusions 34 arranged at intervals in the second direction Y. As shown in FIG.

According to the probe 3 of the second aspect, the probe 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes can be realized.

In the probe 3 of the third aspect of the present disclosure, Each of the pair of protrusions 34 is arranged symmetrically with respect to a center line L passing through a center in the second direction Y in the one end of the body portion 31 and extending in the first direction X, and Each of the pair of second contact portions 33 is arranged symmetrically with respect to the center line L. As shown in FIG.

According to the probe 3 of the third aspect, the probe 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes can be realized.

In the probe 3 of the fourth aspect of the present disclosure, The body part 31 has: A pair of leg portions 81, 82 are provided at the one end of the body portion 31, extend along the first direction X, and are arranged with a gap 83 in the second direction Y, Each of the pair of feet 81, 82 has: The protruding portion 84 is provided on the facing surfaces 811 and 821 facing each other in the second direction Y, and protrudes toward directions approaching each other, Each of the pair of protrusions 34 is provided on the protruding portion 84 of each of the pair of leg portions 81 , 82 to constitute the first contact portion 32 , Front ends in the first direction X of each of the pair of leg portions 81 and 82 constitute each of the pair of second contact portions 33 .

According to the probe 3 of the fourth aspect, for example, after the first contact portion 36 comes into contact with the object 100 to be touched, the probe 3 is moved toward the object 100 to be touched along the first direction X. Then, in the state where the first contact portion 32 is in contact with the contact object 100 , each leg portion 81 , 82 elastically deforms in a direction away from each other in the second direction Y, and the first contact portion 32 contacts the contact object 100 . friction between them. As a result, foreign matter adhering to the first contact portion 32 and the surface of the contact object 100 is wiped off, and the contact reliability of the probe 3 to the contact object 100 can be improved.

In the probe 3 of the fifth form disclosed herein, The positions of the front ends of the pair of leg portions 81 , 82 in the first direction X are different from each other.

According to the probe 3 of the fifth aspect, the probe 3 capable of more reliably contacting a plurality of contact objects 100 having different sizes can be realized.

The inspection jig 2 of the sixth form disclosed in this disclosure includes: Probe 3 of the described form; and The sleeve 20 can accommodate the probe 3 in a state where each of the first contact portion 32 and the pair of second contact portions 33 is exposed to the outside.

According to the inspection jig 2 of the sixth aspect, the inspection jig 2 applicable to the inspection of a plurality of inspection objects having different sizes can be realized by using the probe 3 .

The inspection unit 1 of the seventh aspect of the present disclosure includes At least one inspection jig 2 .

According to the inspection unit 1 of the seventh aspect, the inspection unit 1 applicable to the inspection of a plurality of inspection objects having different sizes can be realized by the inspection jig 2 .

The inspection unit 1 of the eighth aspect disclosed in this disclosure further includes: The swing member 40 is supported in a swingable state relative to the sleeve 20, The rocking member 40 has: The receiving hole 43 penetrates the rocking member 40 in its rocking direction, and can accommodate the first contact portion 32 and the pair of second contact portions 33 of the probe 3, and the rocking member 40 It is configured to be able to swing between a return position P1 and an operating position P2 closer to the sleeve 20 than the return position P1 in the first direction X.

According to the inspection unit 1 of the eighth aspect, the occurrence of damage to the first contact portion 32 and each second contact portion 33 of the probe 3 can be reduced.

In addition, by appropriately combining any of the above-described various embodiments or modifications, respective effects can be exhibited. In addition, a combination of embodiments, a combination of examples, or a combination of embodiments and examples is possible, and a combination of features in different embodiments or examples is also possible.

Although the present disclosure has been fully described in relation to preferred embodiments with reference to the accompanying drawings, various modifications and corrections will be apparent to those skilled in the art. Such changes and corrections should be understood as being included therein as long as they do not deviate from the scope of the present disclosure defined by the appended patent claims. [Industrial availability]

The disclosed probe can be applied, for example, to camera modules and other modules with business-to-business (Business-to-Business, BtoB) connectors as connection media, and small-outline packages (Small Outline Package, SOP), four-sided flat Inspection jigs used in the inspection of semiconductor packages such as Quad Flat Package (QFP) and Ball Grid Array (BGA).

The inspection jig disclosed herein can be applied to, for example, modules such as camera modules having BtoB connectors as connection media, and inspection units used for inspection of semiconductor packages such as SOP, QFP, and BGA.

The inspection unit of the present disclosure can be used, for example, for inspection of modules having BtoB connectors as connection media such as camera modules, and semiconductor packages such as SOP, QFP, and BGA.

1: Check unit 10: shell 101: Open face 103: front face 104: front corner 13: Concave 14: Opening 15: storage slot 2: Check the jig 20: Sleeve 21: storage department 3: Probe 31: Body Department 32: The first contact part 33: The second contact part 331: guide surface 34:Protrusion 35: elastic part 36: first contact part 361: contact part body 362: contact part 37: Second contact part 371: contact part body 372: contact part 38: The third contact part 40: shake component 41: Board 411: outer surface 42: Wall 43: storage hole 431: Concave 432: Through hole 47: Flange 50: coil spring 61, 62, 63, 64: elastic sheet 65, 66, 67: Clearance 71, 72: straight line 73: bending part 81, 82: feet 811, 821: opposite sides 83: Gap 84: protrusion 100: touch object 110, 120: convex contact L: virtual straight line (center line) P1: return position P2: action position X: first direction Y: the second direction Z: plate thickness direction

FIG. 1 is a perspective view showing a probe according to one embodiment of the present disclosure. FIG. 2 is a cross-sectional view of the inspection unit 1 having the probe of FIG. 1 . FIG. 3 is a plan view of the probe of FIG. 1 . 4 is an enlarged plan view showing a first contact portion and a second contact portion of the probe of FIG. 1 . Fig. 5 is a perspective view showing a modified example of the probe shown in Fig. 1 . FIG. 6 is a plan view of the probe of FIG. 5 . 7 is an enlarged plan view showing a first contact portion and a second contact portion of the probe of FIG. 5 .

103: front face

104: front corner

3: Probe

31: Body Department

32: The first contact part

33: The second contact part

331: guide surface

34:Protrusion

36: first contact part

361: contact part body

110, 120: convex contact

L: virtual straight line (center line)

X: first direction

Y: the second direction

Claims (4)

A probe, comprising: a plate-shaped body portion; a first contact portion disposed at one end of the body portion in a first direction and extending from the one end along the first direction; and a pair of first The two contact parts are arranged at the one end of the body part, and are respectively arranged at the two sides of the first contact part in the second direction with a gap with respect to the first contact part, so that The second direction intersects with the first direction and the thickness direction of the body part, and extends from the one end along the first direction to a point farther away from the body part than the first contact part. Each of the pair of second contact parts has a guide surface arranged to face each other in the second direction, and guides a contact object approaching the first contact part along the first direction toward Guided by the first contact part, the first contact part includes a pair of protrusions arranged at intervals in the second direction, the body part has a pair of legs provided on the body part The one end of the pair extends along the first direction and is arranged with a gap in the second direction, and each of the pair of legs has a protruding part disposed on opposite sides of the second direction. facing each other, and protrude in a direction approaching each other, and each of the pair of protrusions is provided on the protruding portion of each of the pair of legs. each of which constitutes the first contact portion, the front end of each of the pair of leg portions in the first direction constitutes each of the pair of second contact portions, and each of the pair of leg portions The positions of the front ends in the first direction are different from each other, the first contact portion of one of the pair of legs and the first contact portion of the other of the pair of legs The contact part and the guide surface of either one of the pair of second contact parts are disposed so as to be capable of simultaneously contacting the object to be contacted. An inspection jig comprising: the probe according to Claim 1; and a sleeve capable of accommodating the first contact part and the pair of second contact parts in a state where each of the pair of second contact parts is exposed to the outside. probe. An inspection unit, comprising at least one inspection jig as described in Claim 2. The inspection unit according to claim 3, further comprising: a rocking member supported in a rockable state relative to the sleeve, the rocking member having a receiving hole for moving the rocking member in its rocking direction The first contact part and the pair of second contact parts of the probe can be accommodated therethrough, and the swing member is configured to be able to compare the return position and the return position in the first direction. position closer to the action position of the sleeve rocks between.

Images