JP4905872B2 - Conductive contact unit - Google Patents

Description

  The present invention relates to a conductive contact unit and a conductive contact for electrically connecting a first circuit structure having a plurality of first connection terminals and a second circuit structure having a plurality of second connection terminals. The present invention relates to a conductive contact constituting a child unit.

  2. Description of the Related Art Conventionally, in the technical field related to inspection of electrical characteristics of an inspection target such as a semiconductor integrated circuit, a plurality of conductive contacts are provided corresponding to connection terminals of the semiconductor integrated circuit, and the conductive contacts are physically connected to the connection terminals. A technique relating to a conductive contact unit having a function of ensuring electrical continuity by contacting is known. Such a conductive contact unit has a structure including at least a plurality of conductive contacts and a holding portion that holds the conductive contacts. Corresponding to the narrowing of the arrangement interval of the connection terminals accompanying the trend toward miniaturization of the semiconductor integrated circuit to be inspected, it is necessary to reduce the arrangement interval of the plurality of conductive contacts in the conductive contact unit, Various configurations have been proposed for the configuration of the conductive contact unit and the conductive contact unit including the conductive contact that can realize a narrow array interval.

  For example, as a conductive contact that realizes a narrow array interval, a contact portion that comes into contact with an object to be inspected and an elastic portion that elastically urges against the contact portion are integrally formed by a plate-like conductive member. A structure has been proposed. For example, it is theoretically possible to arrange a large number of conductive contacts in a narrow area by arranging plate-shaped conductive contacts in the plate thickness direction, which corresponds to the narrowing of the arrangement interval of connection terminals provided for inspection objects. It is possible to realize the conductive contact made (see, for example, Patent Document 1).

JP 2001-343397 A

  However, the conventional conductive contact unit has a problem that it is difficult to cope with the narrowing of the arrangement interval of the connection terminals to be inspected, even though the conductive contact has the above-described configuration. Hereinafter, this problem will be described in detail.

  As apparent from FIG. 8 of Patent Document 1, in the conventional conductive contact unit, a guide hole is formed in the holding portion (the insulating substrate 61 in Patent Document 1), and the conductive contact is formed in the guide hole. Adopting a structure that accommodates Therefore, in the conventional conductive contact unit, the arrangement interval of the conductive contacts is defined by the arrangement interval of the guide holes corresponding to the number of the conductive contacts with respect to the holding portion. In such a through hole, the minimum value of the formation interval is limited by the physical strength of the object to be formed (holding part). For this reason, in the conventional conductive contact unit, although it is possible to reduce the arrangement interval with respect to the conductive contact itself, the device for the structure of the holding portion is not sufficient. There is a problem that it is difficult to narrow the arrangement interval of the conductive contacts.

  Further, when the conductive contact has a plate-like structure, it is necessary to prevent the occurrence of buckling and torsion during the expansion / contraction operation in the elastic portion. That is, since the conductive contact formed in a plate shape is plate-shaped, the length (plate thickness) in the plate thickness direction (perpendicular to the paper surface in FIG. 2 of Patent Document 1) is longer than the length in other directions. It has the problem of being extremely small and having low physical strength. For this reason, particularly when an external force is applied in the direction in which the elastic portion contracts, the conductive contact may be buckled or twisted due to the contraction of the elastic portion. There are problems such as deterioration of spring characteristics. In the conductive contact unit described in Patent Document 1, although the guide hole has a possibility of alleviating buckling to some extent, depending on the guide hole whose cross-sectional shape seems to be circular, the longitudinal direction of the conductive contact It is extremely difficult to mitigate the torsion that can occur in the circumferential direction of the central axis.

  The present invention has been made in view of the above, and can cope with the narrowing of the arrangement interval, and the conductive contact can be obtained without impairing the characteristics of the conductive contact having an elastic part that can be expanded and contracted. An object is to realize a held conductive contact unit and a conductive contact.

In order to solve the above-described problems and achieve the object, the conductive contact unit according to the present invention is configured to electrically connect a circuit structure having a plurality of connection terminals by physically contacting the connection terminals. A plurality of first contact portions that are in contact with the connection terminal in use, and a plurality of second contact portions that are electrically connected to the first contact portion. And an elastic part formed between the first contact part and the second contact part, and is elastic in a longitudinal direction and elastically urges the first contact part and the second contact part. A plurality of integrally formed conductive contacts and a plurality of guides having a structure extending in the expansion / contraction direction of the elastic portion and in which a part of the conductive contact is slidably fitted in the expansion / contraction direction A groove is formed, and a part of the conductive contact is fitted into the guide groove. Characterized by comprising a holding portion for holding the conductive contacts in it state.

According to the present invention, a part of the conductive contact is held in a state of being fitted in a guide groove formed in the holding portion, and the guide groove is partially slid in the expansion / contraction direction of the conductive contact. Since it is formed to be free, when the elastic portion constituting the conductive contact contracts, a part of the conductive contact fitted in the guide groove moves only in the expansion and contraction direction. Since the other part formed integrally with the part also moves only in the expansion / contraction direction, it is possible to avoid the occurrence of deformations such as buckling and twisting, which are partially displaced in the direction perpendicular to the expansion / contraction direction, in the conductive contact.

In the conductive contact unit according to the present invention , in the above invention, the conductive contact is formed in a plate shape, and the holding portion has one end in a direction perpendicular to the expansion / contraction direction. A first guide member having a guide groove that is slidably fitted in the expansion / contraction direction and a guide groove in which the other end in a direction perpendicular to the expansion / contraction direction is slidably fitted in the expansion / contraction direction are formed. And a second guide member.

In the conductive contact unit according to the present invention , in the above invention, the conductive contact penetrates in a direction perpendicular to the expansion / contraction direction, and a width in a direction parallel to the expansion / contraction direction is the elastic portion. An opening defined in accordance with the expansion / contraction length is formed, and one of the end portions in a direction perpendicular to the expansion / contraction direction of a part of the plurality of conductive contacts is slidable in the expansion / contraction direction. A first guide member in which a guide groove to be fitted is formed, and a guide groove in which the other ends of the plurality of conductive contacts are fitted slidably in the extension / contraction direction in the direction perpendicular to the extension / contraction direction. A portion that is formed by the formed second guide member and a rod-like member that penetrates the opening formed in each of the plurality of conductive contacts, and that forms the outer edge of the opening in the conductive contact slide but in the stretch direction Further comprising a third guide member guide groove to be fitted to the standing is formed, characterized in.

Further, the conductive contact unit according to the present invention is the above-described invention, wherein the conductive contact penetrates in a direction perpendicular to the expansion / contraction direction, and a length in a direction parallel to the expansion / contraction direction is the elastic portion. An opening corresponding to the expansion / contraction length is formed, and the holding portion is formed by a rod-shaped member extending in a direction in which the plurality of conductive contacts are arranged and penetrating the opening, and the guide groove is The conductive contact is formed so that a portion forming an outer edge of the opening is fitted.

Moreover, the conductive contact unit according to the present invention includes, in the above invention, a terminal that physically contacts a second contact portion provided in the conductive contact, and the conductive contact is provided to the conductive contact through the terminal. A signal output circuit for outputting a predetermined electrical signal is further provided.

The conductive contact according to the present invention is a conductive contact that electrically connects a plurality of circuit structures, and physically contacts one of the plurality of circuit structures in use. A first contact portion; a second contact portion that is electrically connected to the first contact portion and physically contacts the other of the plurality of circuit structures in use; the first contact portion and the first contact portion; An elastic portion that supplies elastic force to the two contact portions, and a region that is held by the holding portion so as to be rotatable about a predetermined axis when used, and is symmetric with respect to the rotation center. A first connection portion connected to the first contact portion and the elastic portion, and a holding portion so as to be rotatable around a predetermined axis when used, and to each other with respect to the rotation center With respect to the second contact portion and the elastic portion in a symmetric region Characterized in that a second connecting portion continued to.

According to the present invention, since the first connecting portion has a structure in which the first contact portion and the elastic portion are in contact with each other in a region symmetrical to the predetermined rotation center, the first contact portion and the elastic portion are long. When the elastic part is deformed in the contraction direction, the first contact part protrudes in the extension direction of the elastic part. The relationship between the second contact portion and the elastic portion is the same. As a result, when the elastic portion is stretched, the elastic force is applied in the direction of contacting the circuit structure with respect to the first contact portion and the second contact portion. Therefore, it is possible to avoid the occurrence of deformations such as buckling and torsion accompanying the contraction of the elastic portion in the conductive contact.

  The conductive contact unit according to the present invention is held in a state in which a part of the conductive contact is fitted in a guide groove formed in the holding portion, and the guide groove is fitted in the expansion / contraction direction of the conductive contact. Since a part is formed to be slidable, when the elastic part constituting the conductive contact contracts, a part of the conductive contact fitted in the guide groove moves only in the expansion / contraction direction. In other words, the other part formed integrally with the part also moves only in the expansion / contraction direction, so that deformation such as buckling or twisting, which is partially displaced in the direction perpendicular to the expansion / contraction direction, occurs in the conductive contact. There is an effect that can be avoided.

  In the conductive contact according to the present invention, the first contact portion has a structure in which the first contact portion and the elastic portion are in contact with each other in a region symmetrical to each other with respect to the predetermined rotation center. The part and the elastic part move in opposite directions in conjunction with each other in the longitudinal direction, and when the elastic part is deformed in the contraction direction, the first contact part protrudes in the extending direction of the elastic part. The relationship between the second contact portion and the elastic portion is the same. As a result, when the elastic portion is stretched, the elastic force is applied in the direction of contacting the circuit structure with respect to the first contact portion and the second contact portion. Therefore, it is possible to avoid the occurrence of deformations such as buckling and torsion accompanying the contraction of the elastic portion in the conductive contact.

  The best mode for carrying out a conductive contact unit and a conductive contact according to the present invention (hereinafter referred to as “embodiment”) will be described in detail below with reference to the drawings. Note that the drawings are schematic, and it should be noted that the relationship between the thickness and width of each part, the ratio of the thickness of each part, and the like are different from the actual ones. Of course, the part from which the relationship and ratio of a mutual dimension differ is contained.

(Embodiment 1)
First, the conductive contact unit according to the first embodiment will be described. FIG. 1 is a schematic diagram showing an appearance of the conductive contact unit according to the first embodiment. As shown in FIG. 1, the conductive contact unit according to the first embodiment includes a plurality of conductive contacts 1 displayed only at the end in FIG. 1, and a holding that holds the plurality of conductive contacts 1. And a signal output circuit 3 electrically connected to the conductive contact 1 and capable of outputting a predetermined electrical signal to the conductive contact 1.

  The signal output circuit 3 is for outputting a predetermined electrical signal to a circuit structure (for example, an inspection target in an electrical characteristic inspection) to be connected via the conductive contact 1. As a specific configuration of the signal output circuit 3, an electric signal generation function may be provided, an electric signal generated by another device is input, and the input electric signal is input to the conductive contact 1. It may be configured to output.

  The conductive contact 1 is for electrically connecting a circuit structure (for example, a semiconductor integrated circuit) such as an inspection target and the signal output circuit 3. Specifically, in the conductive contact 1, a contact portion that contacts each of the circuit structure and the signal output circuit 3 and an elastic portion that elastically urges the contact portion are integrally formed by a plate-like conductive member. Has a structured.

  FIG. 2 is a schematic diagram showing the structure of the conductive contact 1. As shown in FIG. 2, the conductive contact 1 has a first contact portion 1 a for physically contacting a predetermined circuit structure at both ends in the longitudinal direction, and a second contact physically contacting the signal output circuit 3. A contact portion 1b is formed, and is extendable in the longitudinal direction between the first contact portion 1a and the second contact portion 1b, and is elastic with respect to the first contact portion 1a and the second contact portion 1b. The elastic part 1c provided with the function to urge is provided. The conductive contact 1 is disposed between the first contact portion 1a and the elastic portion 1c, and the connection portion 1d that connects the first contact portion 1a and the elastic portion 1c, and the second contact portion 1b. And a connecting portion 1e that is connected between the second contact portion 1b and the elastic portion 1c, and the above-described components are integrally formed and have a plate shape as a whole. Formed to be. In the following description, in order to facilitate understanding, the horizontal direction in FIG. 2 is referred to as “the expansion / contraction direction of the conductive contact 1”, and the vertical direction in FIG. 2 is referred to as “the width direction of the conductive contact 1”. The direction perpendicular to the paper surface in FIG. 2 is referred to as the “plate thickness direction of the conductive contact 1”.

  Next, the holding unit 2 will be described. As shown in FIG. 1, the holding portion 2 is formed with predetermined guide grooves (not shown in FIG. 1), and the first guide members 2 a disposed at both ends in the width direction with respect to the conductive contact 1 and A second guide member 2b is provided at both ends of the conductive contact 1 in the expansion / contraction direction, and holding plates 2c and 2d for holding the conductive contact 1 inside. The first guide member 2a, the second guide member 2b, and the holding plates 2c, 2d constituting the holding portion 2 are electrically insulated from the viewpoint of being electrically connected to the conductive contact 1 and preventing a short circuit from occurring. Although it is preferable to use a material, for example, only a portion (for example, a guide groove 2e to be described later) of the surface that can contact the conductive contact 1 may be subjected to insulation coating.

  The holding plates 2c and 2d are for preventing the conductive contact 1 held by the holding part 2 from being displaced in the expansion / contraction direction (longitudinal direction) of the elastic part 1c. Specifically, the holding plates 2c and 2d are arranged at positions where they contact the elastic portions 1c of the connecting portions 1d and 1e of the conductive contact 1 held by the holding portion 2 and the ends in the expansion / contraction direction, respectively. It has a structure in which an opening for projecting the first contact portion 1a and the second contact portion 1b is formed.

  The first guide member 2a and the second guide member 2b have a function of positioning the plurality of conductive contacts 1 with respect to the in-plane direction perpendicular to the expansion / contraction direction, and are electrically conductive during the expansion / contraction operation of the conductive contact 1. Has a function of guiding the sexual contact 1. FIG. 3 is a schematic diagram for explaining the structure of the first guide member 2a. In the first embodiment, since the second guide member 2b has substantially the same structure as the first guide member 2a, the following explanation regarding the first guide member 2a is also applicable to the second guide member 2b in principle. Applicable.

  As shown in FIG. 3, the number of guide grooves 2e equal to the number of conductive contacts 1 held by the holding portion 2 is formed in the first guide member 2a. The guide groove 2e has a shape in which a cross-sectional shape can be fitted in a direction perpendicular to the expansion / contraction direction of the conductive contact 1, more specifically, an end of the conductive contact 1 in the width direction. The groove having such a cross-sectional shape has a structure in which the conductive contact 1 extends in the expansion / contraction direction. In the first embodiment, since the conductive contact 1 is formed in a plate shape, the cross-sectional shape of the guide groove 2e is formed so that at least the width is substantially equal to the plate thickness of the conductive contact 1. ing. Further, the guide groove 2e is formed so that the sliding resistance between the end of the inserted conductive contact 1 is reduced, and the conductive contact 1 is fitted slidably in the expansion / contraction direction. It will be.

  Further, since the second guide member 2b has the same structure as the first guide member 2a as described above, the guide groove 2e is similarly formed in the second guide member 2b. For this reason, as shown in FIG. 4, the conductive contact 1 has both ends in the width direction formed on the first guide member 2 a and the second guide member 2 b respectively over the entire expansion and contraction direction of the conductive contact 1. The holding portion 2 is held in a state where it is always fitted in the guide groove 2e.

The first guide member 2a and the second guide member 2b are formed of, for example, a low thermal expansion resin, and the guide groove 2e is formed of, for example, dicing. In addition, the first guide member 2a and the second guide member 2b are configured by forming a base material with an insulating material other than resin, for example, ceramics such as Al ₂ O ₃ and SiO ₂ , Si, etc., etching, etc. Alternatively, the guide groove 2e may be formed.

  Next, the operation of the guide groove 2e formed in the first guide member 2a and the second guide member 2b will be described. FIG. 5 is a schematic diagram for explaining the operation of the guide groove 2e. In FIG. 5, description will be made as appropriate with the center of gravity of the conductive contact 1 as the origin, the width direction as the x axis, the plate thickness direction as the y axis, and the expansion / contraction direction as the z axis.

  As described above, both ends of the conductive contact 1 in the width direction (x-axis direction) are fitted in the guide groove 2e, and the guide contact 2e extends in the expansion / contraction direction (z-axis direction) of the conductive contact 1. For this reason, the fitted portion is held in a slidable state in the expansion / contraction direction. That is, as shown in FIG. 5, both end portions in the width direction of the conductive contact 1 (parts indicated by hatching) are fitted into the guide groove 2 e, thereby ensuring the degree of freedom in the z-axis direction, while x The freedom of movement in the axial direction and the y-axis direction is lost.

  Moreover, since the conductive contact 1 is integrally formed as described above, the influence of the restriction of the movement of both ends by the guide groove 2e extends to other portions of the conductive contact 1 as well. Therefore, as with both ends in the width direction, the entire conductive contact 1 can move in the z-axis direction, but loses freedom of movement in the x-axis direction and the y-axis direction. For this reason, the conductive contact 1 only undergoes a change in shape (that is, contraction or expansion) due to displacement in the z-axis direction when an external force is applied, and in the x-axis direction and the y-axis direction. It will expand and contract without causing a shape change due to displacement.

  Next, advantages of the conductive contact unit according to the first embodiment will be described. In the conductive contact unit according to the first embodiment, since the conductive contact 1 is held in a state in which a part is fitted in the guide groove 2e extending in the expansion / contraction direction, an external force is applied during use. It is possible to prevent buckling and twisting from occurring. As described with reference to FIG. 5, the conductive contact 1 according to the first embodiment holds the both ends in the x-axis direction in a state of being fitted in the guide groove 2 e, thereby providing the conductive contact 1. An arbitrary portion of 1 is not displaced in the x-axis direction and the y-axis direction, and is displaced only in the z-axis direction. The buckling and torsion that can occur remarkably in the plate-like conductive contact is a change in shape accompanied by displacement in the x-axis direction and / or displacement in the y-axis direction with respect to a part or the whole of the conductive contact 1. Thus, by holding the conductive contact 1 using the guide groove 2e, the first embodiment has an advantage that the conductive contact 1 can be prevented from buckling and twisting during use. .

  In the first embodiment, since the conductive contact 1 is held using the guide groove 2e having a groove structure, the conductive contact 1, the first guide member 2a, and the second guide member 2b There is also an advantage that the sliding area generated between the first guide member 2a and the like can be reduced. For example, when the conductive contact 1 is accommodated in the through hole as in the prior art, the outer surface of the conductive contact and the inner surface of the through hole are in contact with each other over the entire circumference. The contact area between the outer surface of the conductive contact and the inner surface of the through hole increases, and it is difficult to reduce the sliding resistance. On the other hand, in this Embodiment 1, since the conductive contact 1 contacts with respect to the 1st guide member 2a and the 2nd guide member 2b only in the width direction edge part, a contact area is significantly increased. By reducing the sliding resistance, it is possible to smoothly extend and contract the conductive contact 1.

  6 to 8 show advantages of the conductive contact 1 constituting the conductive contact unit according to the first embodiment due to the absence of buckling or the like and the reduction of sliding resistance. It is a graph shown quantitatively. 6 shows the relationship between the load applied to the conductive contact 1 held by the guide groove 2e and the expansion / contraction length of the conductive contact 1, and FIG. 7 shows the relationship between the expansion / contraction length and the electrical resistance. FIG. 8 shows the relationship between the load applied to the conductive contact 1 and the electrical resistance.

First, the graph shown in FIG. 6 will be described. In FIG. 6, the curve l ₁ shows the measurement result when the conductive contact 1 contracts, the curve l ₂ shows the measurement result when the conductive contact 1 expands, and the curve l ₃ shows the conductivity at the design stage. This is a characteristic curve of the conductive contact 1 and shows a theoretical characteristic when the conductive contact 1 itself expands and contracts without causing buckling and twisting. As is clear from the graph of FIG. 6, the curves l _{1 to} l ₃ all coincide with each other with high accuracy, and the conductive contact 1 in the first embodiment can realize characteristics almost as designed. Is shown. In particular, in the past, the tendency of the spring characteristics during contraction to deviate from the design value due to the influence of buckling, torsion and the like was remarkable. However, in the first embodiment, the spring characteristic during contraction is rather the spring during extension. It is clear that the occurrence of buckling and twisting is effectively prevented by being closer to the design value than the characteristic and effectively functioning the guide groove 2e.

The graph shown in FIG. 6 also shows that the frictional force between the conductive contact 1 and the first guide member 2a and the second guide member 2b becomes a small value. The design value indicated by the curve l ₃ indicates the characteristics of the conductive contact when the conductive contact 1 operates alone, that is, when it is not held by the holding portion 2. Against the curve l ₃ showing such properties, since the curve l _2, l ₃ showing the characteristics of a state where the end portion is fitted in the guide groove 2e accurately matched, for expansion and contraction of the conductive contact 1 It is clear that the sliding friction caused by the first guide member 2a and the second guide member 2b is suppressed to a level that can be substantially ignored.

Next, the graph shown in FIG. 7 will be described. The graph shown in FIG. 7 is a graph showing the relationship between the expansion / contraction length of the conductive contact 1 and the electrical resistance between the signal output circuit 3 electrically connected via the conductive contact 1 and the circuit structure. is there. As described above, the conductive contact 1 is electrically connected by the physical contact of the first contact portion 1a and the second contact portion 1b with the connection terminal provided in the circuit structure and the terminal provided in the signal output circuit, respectively. Realize. For this reason, the electrical resistance value shown in the graph includes the electrical resistance between the first contact portion 1a and the second contact portion 1b in the conductive contact 1, and the connection terminal of the circuit structure and the signal output circuit terminal. The value is represented by the sum of the electrical contact resistance at the contact portion. A curve l ₄ in FIG. 7 is a curve showing the results when the conductive contact 1 contraction curve l ₅ is a curve showing the results upon stretching of the conductive contact 1.

  As shown in FIG. 7, the conductive contact 1 according to the first embodiment has a stable electrical resistance value except when the amount of expansion / contraction from the natural length is almost zero both during contraction and expansion. Is obtained. Similarly to the case of FIG. 6, since the value at the time of contraction and the value at the time of expansion also substantially coincide in the graph shown in FIG. 7, the phenomenon such as buckling and twist that can be noticeably generated at the time of contraction is effectively prevented. It is clear that it is made.

Finally, the graph shown in FIG. 8 will be described. The graph shown in FIG. 8 shows the relationship between the external force applied to the conductive contact 1 and the electrical resistance. The electric resistance in FIG. 8 is defined in the same way as in FIG. 7, the curve l ₆ is a curve showing the result when the conductive contact 1 is contracted, and the curve l ₇ is when the conductive contact 1 is expanded. It is a curve which shows a result. As shown in FIG. 8, even in the relationship between external force and electrical resistance, the conductive contact 1 according to the first embodiment exhibits substantially the same characteristics when extended and contracted, and is stable against external force. It is shown to achieve the electrical resistance.

  As described above with reference to FIGS. 6 to 8, in the first embodiment, since the conductive contact 1 is formed in a plate shape, the physical strength in the plate thickness direction alone is inferior although it is inferior. In addition, the use of the guide groove 2e has an advantage that excellent characteristics can be realized. Specifically, in the first embodiment, by providing the first guide member 2a and the second guide member 2b provided with the guide groove 2e, the occurrence of buckling and twisting in the conductive contact 1 is suppressed, Since the sliding friction accompanying the expansion / contraction operation of the conductive contact 1 can also be reduced, the conductive contact 1 has an advantage that it can realize excellent spring characteristics and electrical characteristics.

  Further, the conductive contact unit according to the first embodiment has an advantage that the arrangement interval of the conductive contacts 1 can be easily reduced. That is, in the first embodiment, the width of the guide groove 2e having the holding function of the conductive contact 1 (the width in the y-axis direction in FIG. 5) is a value approximately equal to the plate thickness of the conductive contact 1. The interval between the guide grooves 2e adjacent to each other can be set to any small value as long as the insulation between the adjacent conductive contacts 1 can be sufficiently ensured. Therefore, the conductive contact unit according to the first embodiment can reduce the arrangement interval of the conductive contacts 1 by laminating the plurality of conductive contacts 1 in the plate thickness direction. It is possible to sufficiently cope with the narrowing of the arrangement interval of the connection terminals provided in the circuit structure to be connected.

  Further, in the first embodiment, it is possible to effectively suppress the occurrence of buckling or twisting when the conductive contact 1 formed in a plate shape expands and contracts as described above. Therefore, when deriving the arrangement interval of the conductive contacts 1 sufficient to ensure insulation between adjacent ones, it is not necessary to consider the deformation of the conductive contacts 1 caused by buckling or twisting. For this reason, in the conductive contact unit according to the first embodiment, when determining the arrangement interval, each conductive contact 1 has a width of the guide groove 2e in the plate thickness direction (y-axis direction in FIG. 5). It is possible to design the structure on the assumption that it is always located in the region defined by That is, in the first embodiment, it is not necessary to provide a margin for the arrangement interval in order to ensure insulation between the adjacent conductive contacts 1 even when twisting or the like occurs, and the arrangement interval is narrowed accordingly. It is possible to

  Further, in the first embodiment, it is possible to reduce the arrangement interval due to the conductive contact 1 being held by the guide groove 2e instead of the through hole. That is, when the conductive contact 1 is held by a through hole as in the prior art, a certain interval between adjacent through holes is secured in order to maintain the physical strength of the substrate or the like forming the through hole. There is a need. On the other hand, when the groove is formed in the plate-like member, the influence on the physical strength of the base material is low compared with the case where the through hole is formed, and the guide groove 2e is formed at a high density. Even if it exists, the fall of the physical strength of the 1st guide member 6a and the 2nd guide member 6b can be almost disregarded. Accordingly, in the first embodiment, since the restriction on the holding portion 2 side regarding the formation of the guide groove 2e is lower than in the case of forming the through hole, it is possible to form the guide groove 2e with a narrower interval. Have advantages.

  Moreover, the conductive contact unit according to the first embodiment has an advantage that it is easy to manufacture. As described above, the first embodiment does not need to form a through hole and has a structure using the guide groove 2e that is easier to manufacture than the through hole. Therefore, the first guide member 6a and the second guide member 6b constituting the holding unit 2 can be easily manufactured. Moreover, the process of accommodating the electroconductive contactor 1 in the holding | maintenance part 2 among assembly processes is completed by inserting an edge part in the guide groove 2e. Therefore, when assembling the conductive contact unit according to the first embodiment, it is not necessary to go through a complicated process of inserting the conductive contact into a fine through hole, and it can be easily assembled. . From the above, the conductive contact unit according to the first embodiment is easy to manufacture because it employs the configuration in which the conductive contact 1 is held by the guide groove 2e, and has the advantage that the manufacturing cost can be reduced. It will have.

(Embodiment 2)
Next, the conductive contact unit according to the second embodiment will be described. The conductive contact unit according to the second embodiment has a basic structure common to that of the first embodiment, but has a configuration in which the conductive contact holding mode is different from that of the first embodiment. In the following description, components having the same reference numerals and names as in the first embodiment have the same structure and function as in the first embodiment unless otherwise specified.

  FIG. 9 is a schematic diagram illustrating a configuration of the conductive contact unit according to the second embodiment. As shown in FIG. 9, the conductive contact unit according to the second embodiment includes a conductive contact 5 whose one end is in contact with a circuit structure such as an inspection target, and a holding unit 6 that holds the conductive contact 5. And a signal output circuit 3 that outputs a predetermined electrical signal to the circuit structure via the conductive contact 5.

  The conductive contact 5 has the same structure as the conductive contact 1 in the first embodiment as a basic structure, and specifically has the structure shown in FIG. As shown in FIG. 10, the conductive contact 5 includes the first contact portion 1a, the second contact portion 1b, and the elastic portion 1c, similarly to the conductive contact 1 of the first embodiment, while the first contact. An opening 5b is formed in the connecting portion 5a that connects the portion 1a and the elastic portion 1c, and an opening 5d is formed in the connecting portion 5c that connects the second contact portion 1b and the elastic portion 1c. The connection parts 5a and 5c have the same structure as the connection parts 1d and 1e in the first embodiment except that the openings are formed.

  The opening 5b is for penetrating a pin member 6d described later when held by the holding portion 6. The opening 5d is for inserting a third guide member 6c, which will be described later, and the third guide member 6c is inserted both when the conductive contact 5 is most expanded and contracted. The opening 5d is formed to have a width corresponding to the expansion / contraction length with respect to the expansion / contraction direction of the conductive contact 5 so as to maintain this state.

  The holding part 6 is for holding the conductive contact 5 in a slidable state in the expansion / contraction direction, similarly to the holding part 2 in the first embodiment. Specifically, the holding portion 6 is formed on each of the first guide member 6 a and the second guide member 6 b disposed at both ends in the width direction with respect to the conductive contact 5 and the plurality of conductive contacts 5. A third guide member 6c inserted through the opening 5d and a pin member 6d inserted through the opening 5b formed in each of the conductive contacts 5. These components are fixed to each other by a predetermined fixing member (not shown), and this is the same when the conductive contact 5 expands or contracts.

  While the first guide member 6a and the second guide member 6b are respectively formed with guide grooves 2e into which the widthwise end portions of the conductive contacts 5 are slidably fitted in the expansion / contraction direction as in the first embodiment. The arrangement interval of the guide grooves 2e is almost twice the arrangement interval of the conductive contacts 5, and the guide grooves 2e formed in the first guide member 6a and the guide grooves 2e formed in the second guide member 6b. Are alternately positioned in the plate thickness direction (the direction in which the conductive contacts 5 are arranged, the y-axis direction in FIG. 5).

  The third guide member 6 c is formed by a rod-shaped member so as to pass through the opening 5 d formed in the conductive contact 5. The third guide member 6c is formed with a predetermined guide groove 6e similarly to the first guide member 6a and the second guide member 6b, and a part of the conductive contact 5 is fitted in the guide groove 6e. By holding the conductive contact 5 in a state of being slidable in the expansion and contraction direction.

FIG. 11 is a schematic diagram showing the structure of the third guide member 6c. As shown in FIG. 11, a guide groove 6e extending in a direction parallel to the expansion / contraction direction of the conductive contact 5 is formed on the side surface of the third guide member 6c formed in a rod shape as a whole. As schematically shown in FIG. 11, a portion of the conductive contact 5 that forms the outer edge of the opening 5 d is fitted into the guide groove 6 e, and the conductive contact 5 is formed by fitting the portion. Is held in a state in which it can slide in a telescopic direction.

  The pin member 6d is formed of a rod-shaped member so as to pass through the opening 5b formed in the conductive contact 5. Unlike the third guide member 6c, the pin member 6d has a structure in which the outer diameter is substantially equal to the diameter of the opening 5b, and the conductive contact 5 is fixed in the expansion / contraction direction and the width direction by the pin member 6d. Become. The pin member 6d functions as an alternative to the holding plates 2c and 2d in the first embodiment, and at least theoretically is not essential for the conductive contact unit according to the second embodiment.

  FIG. 12 is a schematic diagram showing how the conductive contact 5 is held by the first guide member 6a, the second guide member 6b, and the third guide member 6c. The conductive contact unit according to the second embodiment is shown in FIG. It is the schematic diagram seen from the circuit structure side, such as inspection object. As shown in FIG. 12, the plurality of conductive contacts 5 arranged in the plate thickness direction are each formed by the third guide member 6c and the first guide member 6a or the second guide member 6b at the opening 5d. Retained. That is, in the second embodiment, the plurality of conductive contacts 5 to be held are expanded and contracted by the guide grooves 6e and 2e partially formed in the third guide member 6c and the first guide member 6a, respectively. While being slidably held, the remaining portion is configured to be slidable in the expansion / contraction direction by guide grooves 6e and 2e formed in the third guide member 6c and the second guide member 6b, respectively.

  In addition, regarding the conductive contact 5, the conductive contact 5 has a different structure between the one held by the first guide member 6 a and the third guide member 6 c and the one held by the second guide member 6 b and the third guide member 6 c. Although it may be adopted, the first embodiment uses the same structure. As shown in FIG. 10, the conductive contact 5 has the openings 5 b and 5 d formed at positions eccentric in advance in the width direction. Therefore, by appropriately setting the distance between the third guide member 6c and the first guide member 6a and the second guide member 6b, the conductive contact 5 held by the first guide member 6a On the other hand, the conductive contact 5 held by the second guide member 6b has the same structure by being rotated by 180 ° about the axis of the expansion / contraction direction passing through the openings 5b and 5d. Nevertheless, it is held by the second guide member 6b and the third guide member 6c. In other words, by arranging the eccentric openings 5b and 5c in the plate thickness direction so as to be reversed with respect to each other, for example, the conductive contacts 5 positioned at odd numbers in the plate thickness direction can be connected to the first guide member 6a and the third guide. The even-numbered conductive contacts 5 held by the member 6c are held by the second guide member 6b and the third guide member 6c.

  Next, advantages of the conductive contact unit according to the second embodiment will be described. First, the conductive contact unit according to the second embodiment adopts a configuration in which the conductive contact 5 is held in the holding portion 6 in a state of being fitted in the guide grooves 2e and 6e, as in the first embodiment. Therefore, the conductive contact 5 does not cause twisting and buckling, and can expand and contract in a state where sliding friction is reduced. Moreover, since the structure which hold | maintains the electroconductive contactor 5 by being engage | inserted in the guide grooves 2e and 6e is employ | adopted, compared with the case where the electroconductive contactor is hold | maintained by the through-hole, the arrangement | positioning space | interval of the electroconductive contactor 5 Can be narrowed.

  Further, the conductive contact unit according to the second embodiment can further reduce the arrangement interval of the conductive contacts 5. As described in the first embodiment, when the conductive contacts 5 are held by the guide grooves 2e and the like, the arrangement interval of the conductive contacts 5 is made narrower than when held by the through holes. It is possible. However, even when the guide groove 2e is used, the arrangement interval cannot be reduced infinitely, but the minimum value of the arrangement interval of the conductive contacts 5 is defined by the limit of the formation interval of the guide groove 2e. .

  On the other hand, in the second embodiment, the first guide member 6a and the second guide member 6b are formed with guide grooves 2e corresponding to only a part and the remaining part of the plurality of conductive contacts 5 to be held, respectively. Since it has a structure, it is possible to increase the interval between the adjacent guide grooves 2e in the case of the same arrangement interval as compared with the case where the guide grooves 2e are formed corresponding to all of the conductive contacts 5. is there. By adopting such a configuration, for example, when the guide grooves 2e are alternately formed in the arrangement direction of the conductive contacts 5 as shown in FIG. 12, each of the first guide member 6a and the second guide member 6b is provided. The interval between the formed guide grooves 2e can be almost doubled compared to the first guide member 2a and the second guide member 2b in the first embodiment. Therefore, the conductive contact unit according to the second embodiment has an advantage that the arrangement interval of the conductive contacts 5 can be further reduced as compared with the conductive contact unit of the first embodiment. The third guide member 6c is formed with guide grooves 6e having an arrangement interval equal to the arrangement interval of the conductive contacts 5, but the third guide member 6c formed by a rod-like member is formed by, for example, injection molding. Since it is possible to realize a shape including 6e, it is easy to be narrowed as compared with the guide groove 2e formed by etching or the like on the plate-like body, so that there is substantially no problem.

  Furthermore, in the conductive contact unit according to the second embodiment, the first guide member 6a and the second guide member 6b are provided with guide grooves 2e that are wider than the arrangement interval of the conductive contacts 5, There is also an advantage that the holding portion 6 can be easily manufactured. That is, when the arrangement intervals of the conductive contacts 5 are approximately the same, it is sufficient in the second embodiment to form the guide grooves 2e at a double interval, for example. Since the formation of the holding portion 6 becomes easy, the holding portion 6 can be easily manufactured.

  Moreover, the conductive contact unit according to the second embodiment can reduce the overlapping area in the arrangement direction by arranging the adjacent conductive contacts 5 so that the adjacent conductive contacts 5 are reversed. For this reason, even when the arrangement interval is small enough to cause parasitic capacitance between adjacent conductive contacts 5, there is an advantage that the capacitance value can be reduced because the overlapping area is small.

(Embodiment 3)
Next, the conductive contact unit according to the third embodiment will be described. The conductive contact unit according to the third embodiment has a configuration in which twisting and buckling of the conductive contact during use is suppressed by devising the structure of the conductive contact itself.

  FIG. 13 is a schematic diagram illustrating a configuration of a conductive contact constituting the conductive contact unit according to the third embodiment. As shown in FIG. 13, the conductive contact 8 constituting the conductive contact unit is in contact with a connection terminal provided in a circuit structure such as an inspection object, respectively, in the same manner as in the first and second embodiments. And the second contact portion 8b for electrical connection with the signal output circuit 3, and the first contact portion 8a and the second contact portion 8b, as in the first and second embodiments, And an elastic portion 8c that elastically urges the contact portion 8a and the second contact portion 8b. The conductive contact 8 includes a first connection portion 8d that connects the first contact portion 8a and the elastic portion 8c, and a second connection portion that connects the second contact portion 8b and the elastic portion 8c. 8e, each part is integrally formed and has a plate-like shape as a whole.

  The first connection portions 8d and 8e are connected to the first contact portion 8a and the elastic portion 8c, and the second contact portion 8b and the elastic portion 8c are connected to the connection portions 1d and 1e in the first and second embodiments, respectively. The connection mode is different from that of the first and second embodiments. Specifically, the first connecting portion 8d is in a direction that is non-parallel to the expansion / contraction direction of the elastic portion 8c, for example, a direction perpendicular to the expansion / contraction direction in the natural state (the length of the elastic portion 8c is a natural length). 13 has a structure extending a predetermined distance in the width direction), and is formed so as to be rotatable about a predetermined rotation axis when held by a holding portion 9 described later.

  Specifically, the first connecting portion 8d is formed with a fulcrum portion 8f that is an arc-shaped notch structure for coming into contact with a side surface of a rotating shaft 9a (described later) constituting the holding portion 9 when held. When the fulcrum portion 8f is in contact with the side surface of the rotary shaft 9a, the fulcrum portion 8f is held by the holding portion 9 so as to be rotatable with respect to the center of the rotary shaft 9a. And the 1st connection part 8d has the structure connected with respect to the elastic part 8c and the 1st contact part 8a in the area | region which is mutually symmetrical with respect to the rotation center among the parts extended | stretched only predetermined distance. By having a structure connected to both in a region that is symmetric with respect to the center of rotation, for example, when the first connecting portion 8d rotates in the clockwise direction, the elastic portion 8c expands to the right in FIG. The first contact portion 8a moves in the left direction. For example, when a pressing force is applied to the first contact portion 8a in the left direction in the drawing, the first connection portion 8d moves in the clockwise direction with respect to the rotation center, and the elastic portion 8c moves in the right direction in the drawing. Means to stretch. Further, when the elastic portion 8c extends beyond the natural length, the first connecting portion 8d is counterclockwise by applying an elastic force to the first connecting portion 8d in the contraction direction (left direction in the drawing) of the elastic portion 8c. It means that the first contact portion 8a receives a couple of forces in the rotating direction and receives pressure in the protruding direction (right direction in the drawing) based on the couple.

  This structure is the same for the second connection portion 8e. In other words, the second connecting portion 8e has a structure that is not parallel to the expansion / contraction direction of the elastic portion 8c, for example, a predetermined length in a direction perpendicular to the elastic portion 8c, and has a predetermined rotating shaft 9b (described later) when held by the holding portion 9. ), A fulcrum portion 8g, which is an arc-shaped cutout structure that comes into contact with the side surface portion of the rotating shaft 9b, is formed. The second connection portion 8e has a structure connected to each of the elastic portion 8c and the second contact portion 8b in a region symmetric with respect to the rotation center, and the expansion / contraction direction (that is, the width) of the conductive contact 8 The deformation direction of the elastic portion 8c and the displacement direction of the second contact portion 8b are opposite to each other in the direction perpendicular to the direction and the plate thickness direction (lateral direction in FIG. 13).

  The conductive contact 8 has a structure in which spacing members 8h and 8i having a predetermined thickness in the thickness direction are arranged in the vicinity of the fulcrum portions 8f and 8g. The interval holding members 8 h and 8 i are for holding the interval between the adjacent conductive contacts 8 when the plurality of conductive contacts 8 are held by the holding portion 9. That is, in the conductive contact unit according to the third embodiment, a plurality of conductive contacts 8 are stacked in the thickness direction (substantially perpendicular to the paper surface of FIG. 13) as in the first and second embodiments. However, the interval between the adjacent conductive contacts 8 needs to be a predetermined value corresponding to the arrangement interval of the connection terminals formed in the circuit structure such as the inspection object. In this Embodiment 3, in order to prescribe | regulate the space | interval between the adjacent conductive contacts 8, the structure which arrange | positioned the space | interval holding members 8h and 8i comprised, for example by the insulating member in the fulcrum part 8f and 8g vicinity is employ | adopted. .

Next, the overall configuration of the conductive contact unit according to the third embodiment including the conductive contact 8 shown in FIG. 13 will be described. FIG. 14 is a schematic diagram illustrating an overall configuration of the conductive contact unit according to the third embodiment. As shown in FIG. 14, the conductive contact unit according to the third embodiment employs a configuration in which a plurality of the conductive contacts 8 shown in FIG. Specifically, the conductive contact unit according to the third embodiment includes a plurality of conductive contacts 8 arranged in the plate thickness direction, and notches serving as fulcrum portions 8f formed on the respective conductive contacts 8. a rotation shaft 9a which abuts the outer edge of the structure, formed by the holder 9 with the outer edge of the fulcrum portion 8g serving notch structure abutting under rotary shaft 9b. 14 shows an example in which the holding portion 9 is configured only by the rotating shafts 9a and 9b in order to simplify the structure. It is good also as providing the predetermined exterior structure etc. to accommodate. Although not shown in FIG. 14, the third embodiment also includes a signal output circuit 3 electrically connected to the conductive contact 8 as in the first and second embodiments.

  The rotating shafts 9a and 9b have a function of holding the plurality of conductive contacts 8 in a state where the first connecting portions 8d and 8e are rotatable. Specifically, each of the rotating shafts 9a and 9b is formed by a cylindrical member having a longitudinal direction in the plate thickness direction of the conductive contact, and is slidable with each of the fulcrum portions 8f and 8g on the side surface. And a mechanism for holding the conductive contact 8 in a state of being in contact with the contact. Therefore, the conductive contact 8 is held by the holding portion 9 with the first connecting portions 8d and 8e being rotatable about the axes of the rotation shafts 9a and 9b, respectively. The rotational shafts 9a and 9b are fixed in positional relation by a fixing member (not shown), and the positional relation is maintained regardless of whether the conductive contact 8 is operated.

  Next, the operation of the conductive contact unit according to the third embodiment will be described. As described above, the conductive contact unit realizes an electrical connection to the circuit structure by the physical contact of the conductive contact 8 with the connection terminal formed in the circuit structure such as an inspection object. Is. And in order to implement | achieve favorable electrical connection with respect to the connection terminal of a circuit structure, the 1st contact part 8a with which the electroconductive contactor 8 is equipped contacts with a connection terminal by predetermined | prescribed pressing force, and is electrically It is necessary to reduce the contact resistance, and a structure for supplying such a pressing force is required for the conductive contact 8. In the third embodiment, the pressing force supply principle is different from that in the first and second embodiments.

  FIG. 15 is a schematic diagram for explaining the operation of the conductive contact unit. As shown in FIG. 15, when the conductive contact unit is used, the conductive contact 8 physically contacts the connection terminal 11a provided in the circuit structure 11 at the first contact portion 8a, and the second contact The contact portion 8b makes physical contact with the terminal 3a provided in the signal output circuit 3. Since pressing force is applied to the first contact portion 8a and the second contact portion 8b from each of the connection terminal 11a and the terminal 3a, the first connection portions 8d and 8e are respectively connected to the timepiece as shown in FIG. It rotates by a predetermined angle in the direction of rotation and counterclockwise. For this reason, the length of the elastic portion 8c is longer than the natural length, and the elastic portion 8c generates an elastic force in the compression direction when the length in the longitudinal direction is extended.

  For this reason, the first connection portions 8d and 8e receive a couple of forces in the counterclockwise direction and the clockwise direction based on the elastic force from the elastic portion 8c at the connection portion with the elastic portion 8c, respectively. The couple is transmitted to the first contact portion 8a and the second contact portion 8b via the first connection portions 8d and 8e, and the first contact portion 8a and the second contact portion 8b are connected to the connection terminal 11a and the terminal 3a, respectively. On the other hand, it receives a pressing force in the direction of approaching. For this reason, physical contact is made with a predetermined pressing force applied to the contact terminals 11a and 3a, and electrical contact resistance with respect to the connection terminals 11a and 3a is reduced. Will be connected.

  As described above, in the third embodiment, the conductive contact 8 differs from the first and second embodiments in that the first contact portion 8a and the second contact portion 8b are displaced by the contact with the connection terminal 11a and the terminal 3a. In this case, the elastic portion 8c expands and the elastic portion 8c elastically urges the first contact portion 8a and the second contact portion 8b by the elastic force generated when the elastic portion 8c tries to return to the natural length. The advantages of the conductive contact unit according to the third embodiment resulting from the difference in action will be described below.

  In the first place, buckling, torsion, etc., which have been regarded as problems in the past, are applied when an external force is applied so that the length in the longitudinal direction contracts. This is caused by deformation in the thickness direction of the plate-like body without being absorbed only by the film. Therefore, buckling or the like is a phenomenon that can occur when the elastic portion as a constituent element of the conductive contact is contracted. On the other hand, in the third embodiment, as shown in FIG. 15, since the elastic portion 8c is in an extended state when used, the precondition that the buckling or the like occurs is eliminated in the first place. . Accordingly, the first contact portions 8d and 8e are held in a rotatable state, and the first contact portion 8a, the second contact portion 8b, and the elastic portion 8c are arranged so as to be symmetrical with respect to the rotation center. Thus, the conductive contact 8 can avoid the elastic portion 8c from contracting during use, and can suppress or prevent the occurrence of buckling, torsion, etc. that can occur as the elastic portion 8c contracts. Will have advantages.

  Further, the third embodiment also has an advantage that the conductive contact unit can be formed with a simple structure because the conductive contact 8 itself has a structure in which buckling or the like hardly occurs. That is, in the first and second embodiments, a configuration in which the guide groove 2e or the like is formed so as not to cause buckling, twisting, or the like in the conductive contact is necessary. However, in the third embodiment, the conductive contact is not required. The holding portion 9 can be realized by physically holding the child 8 and arranging the rotation shafts 9a and 9b at a minimum so that the first connection portions 8d and 8e can rotate freely. Therefore, it is possible to form the holding portion 9 with a simple name configuration, and there is an advantage that a conductive contact unit having a simple structure as a whole can be realized.

  In addition, this Embodiment 3 does not deny the form using a guide groove as a holding mode of the conductive contact 8; for example, the holding shown in Embodiments 1 and 2 for holding the conductive contact 8 A structure using part is also useful. For example, while the spacing members 8h and 8i are omitted from the conductive contact 8, the third guide member used in the second embodiment is used for each of the fulcrum portions 8f and 8g instead of the rotating shafts 9a and 9b. It is also effective to use it in a state where it abuts against it. As described in the second embodiment, the third guide member is formed by a rod-shaped member extending in the arrangement direction of the conductive contacts, and a guide groove extending in the expansion / contraction direction of the conductive contact is formed on the side surface. It is possible to hold the conductive contact while maintaining a slidable state by fitting a part of the conductive contact into the guide groove. By applying this principle, a guide groove extending in the rotation direction of the fulcrum portions 8f and 8g is provided, and the conductive contact 8 is held in a state where the fulcrum portions 8f and 8g are fitted into the guide groove. Accordingly, it is possible to enjoy the advantages of using the guide groove while enjoying the advantages described above.

  In addition, as shown in the second embodiment, it is also effective to hold the adjacent conductive contacts 8 in a state where they are reversed with respect to each other. FIG. 16 is a schematic diagram illustrating a configuration of a modified example of the conductive contact unit according to the third embodiment. For example, with respect to the structure of the conductive contact 8, the fulcrum portions 8 f and 8 g are formed at positions shifted from the central axis in the longitudinal direction, so that the adjacent conductive contacts 8 pass through the fulcrum portions 8 f and 8 g. It is possible to realize the conductive contact unit shown in FIG. 16 by being held in a state where they are rotated by 180 ° with respect to a straight line as an axis. By adopting such a structure, as described in the second embodiment, for example, it is possible to expect an effect that the value of the parasitic capacitance that can be generated between the adjacent conductive contacts 8 can be reduced.

  As mentioned above, although this invention was demonstrated over Embodiment 1-3, this invention should not be limited and limited only to said Embodiment 1-3, those skilled in the art will recognize various examples, Variations can be conceived. For example, the conductive contactor is formed of a plate-like member through the first to third embodiments, but this structure is used because an example in which a single member is likely to be normally buckled or twisted is taken as an example. For example, the present invention may be applied to a cylindrical conductive contact. Further, in Embodiment 1, for example, both ends in the width direction of the conductive contact 1 are fitted into the guide groove 2e over the whole. However, as a simpler structure, for example, the outer surface of the conductive contact It is good also as a structure which forms a processus | protrusion on the top and inserts this processus | protrusion in a guide groove. That is, the above-described advantages can be enjoyed as any part of the conductive contact as the part fitted in the guide groove.

It is a schematic diagram which shows the whole structure of the electroconductive contactor unit concerning Embodiment 1. FIG. It is a schematic diagram which shows the structure of the electroconductive contactor which comprises an electroconductive contactor unit. It is a schematic diagram which shows the structure of the holding part which comprises an electroconductive contactor unit. It is a schematic diagram which shows the holding | maintenance aspect of the electroconductive contactor by a holding | maintenance part. It is a schematic diagram for demonstrating operation | movement of an electroconductive contactor. It is a graph which shows the measurement result regarding the characteristic of an electroconductive contactor. It is a graph which shows the measurement result regarding the characteristic of an electroconductive contactor. It is a graph which shows the measurement result regarding the characteristic of an electroconductive contactor. It is a schematic diagram which shows the structure of the electroconductive contactor unit concerning Embodiment 2. FIG. It is a schematic diagram which shows the structure of the electroconductive contactor which comprises an electroconductive contactor unit. It is a schematic diagram which shows the structure of the 3rd guide member which comprises a holding | maintenance part. It is a schematic diagram which shows the holding | maintenance aspect of the electroconductive contactor by the 1st, 2nd and 3rd guide member which comprises a holding | maintenance part. It is a schematic diagram which shows the structure of the electroconductive contactor which comprises the electroconductive contactor unit concerning Embodiment 3. FIG. It is a schematic diagram which shows the whole structure of an electroconductive contactor unit. It is a schematic diagram for demonstrating operation | movement of an electroconductive contactor. FIG. 11 is a schematic diagram showing a modification of the third embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Conductive contact 1a 1st contact part 1b 2nd contact part 1c Elastic part 1d, 1e Connection part 2 Holding part 2a 1st guide member 2b 2nd guide member 2c, 2d Holding plate 2e Guide groove 3 Signal output circuit 3a Terminal DESCRIPTION OF SYMBOLS 5 Conductive contactor 5a Connection part 5b Opening part 5c Connection part 5d Opening part 6 Holding | maintenance part 6a 1st guide member 6b 2nd guide member 6c 3rd guide member 6d Pin member 6e Guide groove 8 Conductive contactor 8a 1st contact Part 8b Second contact part 8c Elastic part 8d First connection part 8e Second connection part 8f, 8g Support point part 8h, 8i Interval holding member 9 Holding part 9a, 9b Rotating shaft 11 Circuit structure 11a Connection terminal

Claims (4)

A conductive contact unit that is electrically connected by physically contacting the connection terminal with respect to a circuit structure including a plurality of connection terminals,
A plurality of first contact portions that come into contact with the connection terminal in use, a plurality of second contact portions electrically connected to the first contact portion, the first contact portion, and the second contact portion; A plurality of conductive materials forming a plate shape that are formed between and elastically elastically urging and energizing the first contact portion and the second contact portion. Sex contacts,
A first guide member having a structure extending in a stretching direction of the elastic portion, and having a guide groove in which one end in a direction perpendicular to the stretching direction is slidably fitted in the stretching direction; A second guide member formed with a guide groove in which the other end in the direction perpendicular to the expansion / contraction direction is slidably fitted in the expansion / contraction direction, and is formed in each of the first and second guide members. A holding portion for holding the conductive contact in a state where both ends in the width direction of the conductive contact are fitted in the guide groove ;
A conductive contact unit comprising: The conductive contact penetrates in a direction perpendicular to the expansion / contraction direction, and an opening is formed in which a width in a direction parallel to the expansion / contraction direction is determined corresponding to the expansion / contraction length of the elastic portion,
The holding part is
Said plurality of said formed in each conductive contact is formed by a rod-like member extending through the opening, slidably in part the expansion and contraction direction that forms an outer edge of the opening of the conductive contact The conductive contact unit according to claim 1, further comprising a third guide member in which a guide groove to be fitted is formed. A terminal that physically contacts the second contact portion of the conductive contact; and a signal output circuit that outputs a predetermined electrical signal to the conductive contact via the terminal. The conductive contact unit according to claim 1 or 2 , characterized in that A conductive contact unit that is electrically connected by physically contacting the connection terminal with respect to a circuit structure including a plurality of connection terminals,
A plurality of first contact portions that come into contact with the connection terminal in use, a plurality of second contact portions electrically connected to the first contact portion, the first contact portion, and the second contact portion; A plurality of conductive contacts formed integrally between the first contact portion and the elastic portion that elastically urges the second contact portion. ,
A plurality of guide grooves having a structure extending in the expansion / contraction direction of the elastic portion and in which a part of the conductive contact is slidably fitted in the expansion / contraction direction are formed, and the conductive contact is formed in the guide groove Holding part for holding the conductive contact in a state in which a part of
With
The conductive contact penetrates in a direction perpendicular to the expansion / contraction direction, and an opening is formed in which a width in a direction parallel to the expansion / contraction direction is determined corresponding to the expansion / contraction length of the elastic portion,
The holding part is
A first guide member formed with a guide groove in which one of end portions in a direction perpendicular to the expansion / contraction direction of each of the plurality of conductive contacts is slidably fitted in the expansion / contraction direction;
A second guide member formed with a guide groove in which the other end in the direction perpendicular to the expansion / contraction direction of each of the plurality of conductive contacts is slidably fitted in the expansion / contraction direction;
Formed by rod-like members that penetrate the openings formed in the plurality of conductive contacts, respectively, and portions of the conductive contacts that form the outer edges of the openings are slidably fitted in the expansion / contraction direction A third guide member having a guide groove formed thereon;
A conductive contact unit comprising:

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