CN101120257B - Conductive contactor unit and conductive contactor - Google Patents
Conductive contactor unit and conductive contactor Download PDFInfo
- Publication number
- CN101120257B CN101120257B CN2006800052828A CN200680005282A CN101120257B CN 101120257 B CN101120257 B CN 101120257B CN 2006800052828 A CN2006800052828 A CN 2006800052828A CN 200680005282 A CN200680005282 A CN 200680005282A CN 101120257 B CN101120257 B CN 101120257B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- conductive contact
- contact
- conductive
- guide member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
Abstract
A conductive terminal unit wherein arrangement intervals can be narrowed and conductive terminals are held without deteriorating characteristics of the conductive terminals having extendable/retractable elastic sections. The conductive terminal unit is provided with a plurality of conductive terminals (1), which are used for electrical connection between a plurality of circuit structures, are extendable/retractable structures in a longitudinal direction and are formed in board-shapes; and first guide member (2a) and a second guide member (2b), which have a function of holding the conductive terminals (1) and are arranged on the conductive terminals (1) at both ends in a width direction. Since guide grooves extending in an extending/retracting direction of the conductive terminals (1) are formed on the first guide member (2a) and the second guide member (2b), respectively, and the end sections of the conductive terminals (1) in a width direction are held by being fitted in the guide grooves, displacements of the conductive terminals (1) in the extending/retracting direction and the vertical direction generated while the conductive terminals are extending/retracting, namely, buckling and distortion, are eliminated.
Description
Technical field
The present invention relates to possess the 1st circuit structure of a plurality of the 1st splicing ears and possess the conductive contact unit that is electrically connected between the 2nd circuit structure of a plurality of the 2nd splicing ears and the conductive contact that is used to constitute conductive contact unit.
Background technology
In the past, electrical specification at inspection objects such as SIC (semiconductor integrated circuit) is checked in the relevant technical field, known have a relevant technology of conductive contact unit, and this conductive contact unit has by setting a plurality of conductive contacts accordingly with the splicing ear of SIC (semiconductor integrated circuit) and conductive contact being contacted with the splicing ear physical property to make and conducts the function of being guaranteed.This conductive contact unit is the structure that has a plurality of conductive contacts at least and be used to keep the maintaining part of conductive contact.Corresponding to as the miniaturization tendency of the SIC (semiconductor integrated circuit) of checking object etc. and narrow and smallization of splicing ear arrangement pitch, in conductive contact unit, also need narrow and smallization of arrangement pitch with a plurality of conductive contacts, therefore, at the conductive contact that can realize narrow and smallization of arrangement pitch and possess the formation of the conductive contact unit of conductive contact, various schemes have been proposed.
For example, as the conductive contact of realizing narrow and smallization of arrangement pitch, proposed will with check contact site that object etc. contact, reach the scheme of the structure that the elastic of giving bouncing force to contact site forms as one by tabular electroconductive component.For example, thereby tabular conductive contact can be arranged at a plurality of conductive contacts of narrow and small area configurations in the thickness of slab direction in theory, and the pairing conductive contact of narrow and smallization of arrangement pitch (for example, with reference to patent documentation 1) of the splicing ear that can realize checking that object possesses.
[patent documentation 1] TOHKEMY 2001-343397 communique
But although conductive contact has above-mentioned formation, still there is the problem that is difficult to tackle at splicing ear narrow and smallization of arrangement pitch of checking object in conductive contact unit in the past.Below, relevant issues are described in detail.
Fig. 8 with reference to patent documentation 1 can learn, in the conductive contact unit in the past, adopts in maintaining part (being insulated substrate 61 at patent documentation 1) to form bullport and accommodated the structure of conductive contact by relevant bullport.Thereby, in the conductive contact unit in the past, for maintaining part, arrangement pitch according to the pairing bullport of conductive contact number, the arrangement pitch of regulation conductive contact, but the through hole as bullport waits the minimum value that limits the formation interval according to the physical property intensity that forms object (maintaining part).Therefore, conductive contact unit in the past has following problem, although with regard to conductive contact itself, can with abundant narrow and smallization of arrangement pitch, but, therefore be difficult to narrow and smallization of arrangement pitch with conductive contact because the countermeasure that the structure of maintaining part is correlated with is insufficient.
And, have at conductive contact under the situation of tabular structure, when elastic is in expanding-contracting action, must prevents to produce and buckle (buckling) and twist.That is it is tabular forming tabular conductive contact, thereby the length (thickness of slab) of thickness of slab direction (the paper vertical direction of Fig. 2 of patent documentation 1) is more much smaller than the length of other directions, has the low problem of physical property intensity thus.For this reason, especially when external force acts on the direction that elastic shrinks, conductive contact exist produce along with the contraction of elastic buckle, the anxiety of distortion etc., and have to buckle etc. and make the problems such as spring performance deterioration of elastic because of this.In addition, in the conductive contact unit that patent documentation 1 is put down in writing, bullport is to have to do the parts that relax to a certain degree with buckling, but be considered to circular bullport by section shape, relaxing conductive contact is extremely difficult in the issuable distortion of the Zhou Fangxiang of length direction central shaft.
Summary of the invention
The present invention makes in view of the above problems, and its purpose is to realize not only can to tackle narrow and smallization of arrangement pitch and keeps the conductive contact unit and the conductive contact of conductive contact under the state that the characteristic of the conductive contact that possesses retractile elastic is not damaged.
In order to address the above problem and to reach purpose, the conductive contact unit that claim 1 is relevant, the circuit structure that possesses a plurality of splicing ears relatively, by contacting and be electrically connected with it with above-mentioned splicing ear physical property, it is characterized in that, this conductive contact unit possesses: a plurality of conductive contacts, a plurality of the 1st contact sites that contact with above-mentioned splicing ear when wherein using, a plurality of the 2nd contact sites that are electrically connected with above-mentioned the 1st contact site, and be formed between above-mentioned the 1st contact site and above-mentioned the 2nd contact site not only can be along long side direction capable of expansion and contractionly and to the elastic that above-mentioned the 1st contact site and above-mentioned the 2nd contact site are given bouncing force, be formed one; Maintaining part, has the structure that extends in the flexible direction of above-mentioned elastic, and be formed with a plurality of guide grooves that the part that can make above-mentioned conductive contact embeds sliding freely along above-mentioned flexible direction, and in this guide groove, embed under the state of the part that above-mentioned conductive contact is arranged and keep above-mentioned conductive contact.
According to the 1 described invention of this claim, the part of conductive contact is embedded under the state of the guide groove that is formed at maintaining part and is held, and the part that guide groove embeds in flexible direction according to conductive contact slidably freely mode forms, therefore when the elastic that constitutes conductive contact is shunk, a part that is embedded in the conductive contact of guide groove only moves in flexible direction, and also only move in flexible direction with integrally formed other parts of this part, therefore can avoid the locality displacement of the directional correlation vertical promptly to buckle with flexible direction, distortion such as distortion produce in conductive contact.
Have again, the conductive contact unit that claim 2 is relevant, be in above-mentioned invention, it is characterized in that, above-mentioned conductive contact forms tabular, above-mentioned maintaining part possesses: the 1st guide member, and it is formed with guide groove, and a square end portion of the direction vertical with above-mentioned flexible direction is embedded sliding freely along above-mentioned flexible direction; And the 2nd guide member, it is formed with guide groove, and the opposing party end of the direction vertical with above-mentioned flexible direction is embedded sliding freely along above-mentioned flexible direction.
Have again, the conductive contact unit that claim 3 is relevant, be in above-mentioned invention, it is characterized in that, above-mentioned conductive contact is formed with opening portion, it runs through in the direction vertical with above-mentioned flexible direction, and the width of the direction parallel with above-mentioned flexible direction is set according to the collapsing length of above-mentioned elastic, above-mentioned maintaining part possesses: the 1st guide member, it is formed with guide groove, and a square end portion of direction in the part of a plurality of above-mentioned conductive contacts, vertical with above-mentioned flexible direction is embedded sliding freely along above-mentioned flexible direction; The 2nd guide member, it is formed with guide groove, and the opposing party end of direction in the remainder of a plurality of above-mentioned conductive contacts, vertical with above-mentioned flexible direction is embedded sliding freely along above-mentioned flexible direction; And the 3rd guide member, constitute by the bar-like member that is applied in the above-mentioned opening portion that forms respectively on a plurality of above-mentioned conductive contacts, and, be formed with the guide groove that extends along the direction parallel in the side of above-mentioned the 3rd guide member, embed the portion that is used to form above-mentioned opening portion outer rim in the above-mentioned conductive contact by freely the mode of sliding along above-mentioned flexible direction at this guide groove with above-mentioned flexible direction
Have again, the conductive contact unit that claim 4 is relevant, be in above-mentioned invention, it is characterized in that, above-mentioned conductive contact is formed with opening portion, it runs through and the vertical direction of above-mentioned flexible direction, and the length of the direction parallel with above-mentioned flexible direction is corresponding to the collapsing length of above-mentioned elastic; Above-mentioned maintaining part is formed by bar-like member, the direction that this bar-like member is arranged along a plurality of above-mentioned conductive contacts is extended and is run through above-mentioned opening portion, and above-mentioned guide groove is formed: can make to be used to form being partially submerged into of above-mentioned opening portion outer rim in the above-mentioned conductive contact.
Have again, the conductive contact unit that claim 5 is relevant, be in above-mentioned invention, it is characterized in that, possesses the terminal that contacts with the 2nd contact site physical property that above-mentioned conductive contact is had, also possess signal output apparatus, nationality is exported predetermined electric signal by this terminal to above-mentioned conductive contact.
Have, the conductive contact that claim 6 is relevant makes between a plurality of circuit structures to be electrically connected, and it is characterized in that this conductive contact possesses again: the 1st contact site, carry out physical property with a side of a plurality of circuit structures in use and contact; The 2nd contact site is electrically connected with above-mentioned the 1st contact site, and carries out physical property with the opposing party of a plurality of circuit structures in use and contact; Elastic provides elastic force to above-mentioned the 1st contact site and above-mentioned the 2nd contact site; The 1st connecting portion according to being that the rotatable mode freely of rotation center is kept by maintaining part with predetermined axle in use, is in the zone of mutual symmetry at above-mentioned relatively rotation center, is connected with above-mentioned elastic with above-mentioned the 1st contact site; And the 2nd connecting portion, according to being that the rotatable mode freely of rotation center is kept by maintaining part with predetermined axle in use, be in the zone of mutual symmetry at above-mentioned relatively rotation center, be connected with above-mentioned elastic with above-mentioned the 2nd contact site.
Invention according to this claim 6, the 1st connecting portion has at relative regulation rotation center and is in the structure that the zone of mutual symmetry and above-mentioned the 1st contact site are connected with above-mentioned elastic, therefore the 1st contact site and the mutual interlock of the relative long side direction of elastic and move in opposite directions, when elastic was out of shape at shrinkage direction, the 1st contact site just extension direction along elastic was outstanding.Relation between the 2nd contact site and the elastic is also same, the result, elastic provides elastic force to the 1st contact site and the 2nd contact site along the direction that contacts with circuit structure when upholding, and can avoid along with distortion such as the buckling of the contraction of elastic, distortion produce in conductive contact.
Conductive contact unit of the present invention, the part of conductive contact is embedded under the state of the guide groove that is formed at maintaining part and is held, and the part that guide groove embeds in flexible direction according to conductive contact slidably freely mode forms, therefore when the elastic that constitutes conductive contact is shunk, a part that is embedded in the conductive contact of guide groove only moves at shrinkage direction, and also only move in flexible direction with integrally formed other parts of this part, therefore play the locality displacement of the directional correlation that can avoid vertical promptly to buckle with flexible direction, the effect that distortion such as distortion produce in conductive contact.
And, conductive contact of the present invention, the 1st connecting portion has at relative regulation rotation center and is in the structure that the zone of mutual symmetry and above-mentioned the 1st contact site are connected with above-mentioned elastic, therefore the 1st contact site and the mutual interlock of the relative long side direction of elastic and move in opposite directions, when elastic was out of shape at shrinkage direction, the 1st contact site just extension direction along elastic was outstanding.Relation between the 2nd contact site and the elastic is also same, the result, elastic provides elastic force to the 1st contact site and the 2nd contact site along the direction that contacts with circuit structure when upholding, and plays and can avoid the effect that produces along with distortion such as the buckling of the contraction of elastic, distortions in conductive contact.
Description of drawings
Fig. 1 is the whole synoptic diagram that constitutes of the conductive contact unit of expression embodiment 1.
Fig. 2 is the synoptic diagram of the structure of the expression conductive contact that constitutes conductive contact unit.
Fig. 3 is the synoptic diagram of the structure of the expression maintaining part that constitutes conductive contact unit.
Fig. 4 is the synoptic diagram that the conductive contact of expression maintaining part keeps situation.
Fig. 5 is used for the synoptic diagram that the action to conductive contact describes.
Fig. 6 is the curve map of the relevant measurement result of the characteristic of expression conductive contact.
Fig. 7 is the curve map of the relevant measurement result of the characteristic of expression conductive contact.
Fig. 8 is the curve map of the relevant measurement result of the characteristic of expression conductive contact.
Fig. 9 is the synoptic diagram of the formation of the relevant conductive contact unit of expression embodiment 2.
Figure 10 is the synoptic diagram of the formation of the expression conductive contact that constitutes conductive contact unit.
Figure 11 is the synoptic diagram of the formation of expression the 3rd guide member that constitutes maintaining part.
Figure 12 is the synoptic diagram of the maintenance situation of expression the 1st, the 2nd and the 3rd caused conductive contact of guide member that constitutes maintaining part.
Figure 13 is the synoptic diagram of the structure of the expression conductive contact that constitutes the relevant conductive contact unit of embodiment 3.
Figure 14 is the whole synoptic diagram that constitutes of expression conductive contact unit.
Figure 15 is used for the synoptic diagram that the action to conductive contact describes.
Figure 16 is the synoptic diagram of the variation of expression embodiment 3.
Among the figure: 1,5, the 8-conductive contact, 1a, 8a-the 1st contact site, 1b, 8b-the 2nd contact site, 1c, 8c-elastic, 1d, 1e, 5a, 5c-connecting portion, 2,6, the 9-maintaining part, 2a, 6a-the 1st guide member, 2b, 6b-the 2nd guide member, 2c, 2d-holding plate, 2e, 6e-guide groove, 3-signal output apparatus, the 3a-terminal, 5b, 5d-opening portion, 6c-the 3rd guide member, 6d-sells parts, 8d-the 1st connecting portion, 8e-the 2nd connecting portion, 8f, 8g-be holding member at interval, 9a, 9b-turning axle, the 11-circuit structure, the 11a-splicing ear.
Embodiment
Below, at the best mode that is used to implement conductive contact unit of the present invention and conductive contact (hereinafter referred to as " embodiment "), be described in detail with reference to the accompanying drawings.In addition, accompanying drawing is a synoptic diagram, notes that the thickness ratio etc. of the relation of the thickness of each several part and width, part separately is different with reality, and accompanying drawing also comprises the different part of mutual size relationship or ratio each other certainly.
(embodiment 1)
The conductive contact unit of embodiment 1 at first, is described.Fig. 1 is the synoptic diagram of the conductive contact unit outward appearance of expression present embodiment 1.As shown in Figure 1, the conductive contact unit of present embodiment 1 possesses: a plurality of conductive contacts 1 of only expressing the end in Fig. 1; Be used to keep the maintaining part 2 of a plurality of conductive contacts 1; And it is that be electrically connected with conductive contact 1 and can be to the signal output apparatus 3 of conductive contact 1 output predetermined electric signal.
Conductive contact 1 is to be used for the device that is electrically connected between circuit structures (for example, SIC (semiconductor integrated circuit)) such as inspection object and the signal output apparatus 3.Particularly, conductive contact 1 has following structure: contact site that contacts with each circuit structure, signal output apparatus 3 and the elastic of giving bouncing force to contact site respectively are formed one by tabular conductive component.
Fig. 2 is the synoptic diagram of the structure of expression conductive contact 1.As shown in Figure 2, conductive contact 1 is formed with: carry out the 1st contact site 1a that physical property contacts at the long side direction two ends with the circuit structure of being scheduled to; With the 2nd contact site 1b that contacts with signal output apparatus 3 physical properties, and possess elastic 1c, can be capable of expansion and contraction between the 1st contact site 1a and the 2nd contact site 1b along long side direction, and have the function of giving bouncing force to the 1st contact site 1a and the 2nd contact site 1b.In addition, conductive contact 1 also possesses: connecting portion 1d is configured between the 1st contact site 1a and the elastic 1c and will connects between the 1st contact site 1a and the elastic 1c; And connecting portion 1e, be configured between the 2nd contact site 1b and the elastic 1c and will connect between the 2nd contact site 1b and the elastic 1c, and above inscape not only is formed one but also integral body forms tabular.In addition, below in the explanation, for easy understanding, transverse direction among Fig. 2 is called " the flexible direction of conductive contact 1 ", longitudinal direction among Fig. 2 is called " Width of conductive contact 1 ", the roughly paper vertical direction among Fig. 2 is called " the thickness of slab direction of conductive contact 1 ".
Then, maintaining part 2 is described.As shown in Figure 1, maintaining part 2 possesses: the 1st guide member 2a and the 2nd guide member 2b, be formed with predetermined guide groove (omitting diagram among Fig. 1) respectively, and be configured in the Width two ends with respect to conductive contact 1; And holding plate 2c, 2d, be configured in flexible direction two ends with respect to conductive contact 1, be used for conductive contact 1 is remained on inside.In addition, be used to constitute the 1st guide member 2a, the 2nd guide member 2b and holding plate 2c, the 2d of maintaining part 2, from preventing to be electrically connected and produce the viewpoint of short circuit with conductive contact 1, preferably form by insulating material, but also can adopt its structure to apply insulation coating etc. for the part (for example, guide groove 2e described later) that for example only in the surface, can contact with conductive contact 1.
The 1st guide member 2a and the 2nd guide member 2b have a plurality of conductive contacts 1 function that direction positions in the face vertical with flexible direction, and have the function of guiding conductive contact 1 when conductive contact 1 expanding-contracting action.Fig. 3 is the synoptic diagram that is used to illustrate the structure of the 1st guide member 2a.In addition, in the present embodiment 1, the 2nd guide member 2b has the roughly the same structure with the 1st guide member 2a, and therefore the explanation of following relevant the 1st guide member 2a also is suitable for the 2nd guide member 2b in principle.
As shown in Figure 3, the 1st guide member 2a is formed with guide groove 2e, and its quantity equals the number by the conductive contact 1 of maintaining part 2 maintenances.Guide groove 2e has following structure: its section shape is in the direction vertical with the flexible direction of electrical contactor 1, more specifically make the embeddable shape in end of the Width of conductive contact 1, and the flexible direction of the bank conductive contact 1 of this section shape is extended.In the present embodiment 1, conductive contact 1 is to form tabularly, so the section shape of guide groove 2e forms according to the thickness of slab of width and the conductive contact 1 at least mode for about equally value.And, form guide groove 2e to such an extent that the sliding resistance between itself and conductive contact 1 end that is embedded into is less, and conductive contact 1 is slidably embedded freely in flexible direction.
And as mentioned above, the 2nd guide member 2b has the same structure with the 1st guide member 2a, so guide groove 2e also forms with the same manner in the 2nd guide member 2b.Therefore, conductive contact 1 both ends of its Width is as shown in Figure 4 kept by maintaining part 2 in the flexible direction entire scope of conductive contact 1, be embedded under the state of the guide groove 2e that is formed at each the 1st guide member 2a and the 2nd guide member 2b respectively all the time.
In addition, the 1st guide member 2a and the 2nd guide member 2b are formed by the resin of for example low-thermal-expansion, and guide groove 2e for example forms by cutting (dieing).In addition, as the formation of the 1st guide member 2a and the 2nd guide member 2b, also can be by the Al for example of the insulativity material beyond the resin
2O
3, SiO
2Wait and form mother metal Deng pottery, Si, and form guide groove 2e by etching etc.
Then, the effect to the guide groove 2e that is formed on the 1st guide member 2a and the 2nd guide member 2b describes.Fig. 5 is the synoptic diagram that is used to illustrate the effect of guide groove 2e.In addition, among Fig. 5, be initial point with the centre of gravity place of conductive contact 1, be x axle, thickness of slab direction are that y axle, flexible direction are the z axle with the Width, carry out suitable explanation.
As mentioned above, owing to embed Width (x direction of principal axis) both ends that conductive contact 1 is arranged at guide groove 2e, and have the structure that the flexible direction (2 direction of principal axis) at conductive contact 1 is extended, therefore embedded part is held under the state that can slide along flexible direction freely.That is as shown in Figure 5, the cross direction both ends of conductive contact 1 (part shown in the oblique line) guaranteed the relevant degree of freedom of z direction of principal axis by being embedded in guide groove 2e, loses the relevant one-movement-freedom-degree of x direction of principal axis and y direction of principal axis on the other hand.
And as mentioned above, because conductive contact 1 is formed one, so the influence to the restriction of both ends action that produced of guide groove 2e also can feed through to other parts of conductive contact 1.Thereby same with the Width both ends, conductive contact 1 integral body can move along the z direction of principal axis, then loses on the other hand along x direction of principal axis and the axial one-movement-freedom-degree of y.Therefore, conductive contact 1, the mode that can not be created in the change of shape that x direction of principal axis and the displacement of y direction of principal axis caused according to only be created in the change of shape that the displacement of z direction of principal axis caused (that is, shrink or uphold) when applying external force is stretched.
The advantage of the conductive contact unit of present embodiment 1 then, is described.The conductive contact unit of present embodiment 1 keeps because conductive contact 1 is partly embedded at one under the state of the guide groove 2e that extends along flexible direction, even be applied in external force when therefore using, still can prevent to produce and buckle and twist.As described with reference to Figure 5, the conductive contact 1 of present embodiment 1, be embedded at the axial both ends of x under the state of guide groove 2e and keep, so the arbitrary portion of conductive contact 1 can be in x direction of principal axis and the displacement of y direction of principal axis, and only in the displacement of z direction of principal axis.What significantly produce in tabular conductive contact buckling and twisting, be a part or the whole change of shape of being followed in the axial displacement of x or the axial displacement of y of conductive contact 1, therefore, by utilizing guide groove 2e to keep conductive contact 1, in the present embodiment 1, just has the advantage that can prevent that conductive contact 1 generation in use from buckling and twisting.
And, in the present embodiment 1, owing to utilize guide groove 2e to keep conductive contact 1 with ditch structure, therefore also have the contact area that can reduce between conductive contact 1 and the 1st guide member 2a and the 2nd guide member 2b, and the advantage of the sliding resistance that is produced between minimizing and the 1st guide member 2a etc.For example, as existing technology, in through hole, accommodating under the situation of conductive contact 1, the outside surface of conductive contact is to contact across full week with the inside surface of through hole, so the contact area between the outside surface of conductive contact and the inside surface of through hole can increase, and is difficult to reduce sliding resistance.With respect to this, in the present embodiment 1, conductive contact 1 only contacts with the 1st guide member 2a, the 2nd guide member 2b in the Width end, therefore can reduce contact area significantly and reduce sliding resistance, thereby the expanding-contracting action of conductive contact 1 is carried out smoothly.
Fig. 6 to Fig. 8 just constitutes as the conductive contact 1 of the conductive contact unit of present embodiment 1, and expression does not produce and buckles etc. and the curve map of the minimizing advantage that sliding resistance brought quantitatively.Just, the load that Fig. 6 represents the conductive contact 1 under the state that is kept by guide groove 2e is given, with the relation of the collapsing length of conductive contact 1, Fig. 7 is the relation of expression collapsing length and resistance, and Fig. 8 represents the load that conductive contact 1 is given and the relation of resistance.
At first, illustrate about chart shown in Figure 6.Among Fig. 6, curve l
1Measurement result when expression conductive contact 1 shrinks, curve l
2Measurement result when expression conductive contact 1 is upheld, curve l
3Be the characteristic of the conductive contact 1 in the design phase, being expression conductive contact 1 monomer buckles and twists and the curve of theoretic characteristic when stretching not producing.Also can learn curve l from the curve map of Fig. 6
1To l
3All be consistent with high precision, the conductive contact 1 in the present embodiment 1 is expressed and can be realized the characteristic same with design load.Especially, in the past because of buckle, the tendency of spring performance vagus escape design load became remarkable when influence such as distortion made and shrinks, but in the present embodiment 1, it is clear: not equal to the spring performance of the spring performance when shrinking when upholding is more near design load, and bring into play function effectively by guide groove 2e, prevent from effectively to buckle and twist generation.
And curve map shown in Figure 6 represents that also the friction force between conductive contact 1 and the 1st guide member 2a and the 2nd guide member 2b becomes the situation of less value.Curve l
3Shown design load is the value of the characteristic of expression conductive contact 1 when moving with monomer, the conductive contact in the state that does not remain on maintaining part 2.The curve l that represents this characteristic relatively
3, owing to be illustrated in the curve l that the end is embedded in the characteristic under the guide groove 2e state
2, l
3For precision is well consistent, the caused sliding friction of expanding-contracting action of therefore clear the 1st guide member 2a and the relative conductive contact 1 of the 2nd guide member 2b is suppressed to almost negligible degree.
Then, curve map shown in Figure 7 is described.Curve map shown in Figure 7 be expression conductive contact 1 collapsing length, with signal output apparatus 3 that is electrically connected via conductive contact 1 and circuit structure between the curve map of relation of resistance.As mentioned above, the splicing ear that possessed by the 1st contact site 1a and the 2nd contact site 1b and circuit structure respectively of conductive contact 1 and terminal that signal output apparatus is possessed carry out physical property and contact and realize being electrically connected.Therefore, the resistance value shown in the curve map be in the conductive contact 1 the 1st contact site 1a and the resistance between the 2nd contact site 1b, add behind the electric contact impedance with the contact portion of the terminal of the splicing ear of circuit structure and signal output apparatus and represented value.In addition, the curve l among Fig. 7
4The curve of result when being 1 contraction of expression conductive contact, curve l
5The curve of result when being 1 extension of expression conductive contact.
As shown in Figure 7, the conductive contact 1 in the present embodiment 1 no matter when shrinking and when upholding, represents that all stroke except the distance natural length is roughly 0 the situation, can obtain the situation of stable resistance value.And, same with the situation of Fig. 6, because in the curve map shown in Figure 7, the value when value during contraction and extension also is roughly unanimity, therefore can know the so-called phenomenon of buckling, twisting that significantly produces in the time of effectively preventing to shrink.
At last, curve map shown in Figure 8 is described.The external force that graphical representation shown in Figure 8 is given conductive contact 1 and the relation of resistance.In addition, the resistance among Fig. 8 defines by the mode identical with Fig. 7, curve l
6The curve of result when being 1 contraction of expression conductive contact, curve l
7The curve of result when being 1 extension of expression conductive contact.As shown in Figure 8, about the relation of external force and resistance, the conductive contact 1 in the present embodiment 1 is also expressed roughly equal characteristic when upholding and when shrinking, and has represented to realize the resistance that relative external force is stable.
More than, as reference Fig. 6 to Fig. 8 is illustrated, in the present embodiment 1, because that conductive contact 1 is formed is tabular, although the therefore physical property intensity difference of the thickness of slab direction of monomer still has by utilizing guide groove 2e to realize the advantage of excellent characteristic.Particularly, in the present embodiment 1, comprise the 1st guide member 2a, the 2nd guide member 2b with guide groove 2e, thereby can suppress buckling and twist generation in the conductive contact 1, also can reduce the sliding friction that the expanding-contracting action of conductive contact 1 is followed, therefore having conductive contact 1 can realize the good spring performance and the advantage of electrical specification.
Have again, the conductive contact unit of present embodiment 1, the arrangement pitch with conductive contact 1 is easy to the advantage of narrow and smallization.That is, in the present embodiment 1, width (the axial width of y among Fig. 5) with guide groove 2e of the maintenance function that keeps conductive contact 1, for just enough with the value of the thickness of slab same degree of conductive contact 1, interval between guide groove 2e adjacent to each other then can be arbitrarily small value so long as can guarantee the value of insulativity of 1 of the conductive contact of adjacency fully.Thereby, the conductive contact unit of present embodiment, by a plurality of conductive contacts 1 are stacked in the thickness of slab direction, and narrow and small the changing into of the arrangement pitch that makes conductive contact 1 is possible, thereby, can do sufficient reply for narrow and smallization as the arrangement pitch of the splicing ear that circuit structure possessed of connecting object.
And, in the present embodiment 1, can effectively suppress to form tabular conductive contact 1 as described above and when flexible, produce and buckle or twist.Thereby, the insulativity each other of guaranteeing adjacency when fully the arrangement pitch of conductive contact 1 is derived, need not consider distortion because of buckling or twisting the conductive contact 1 that is produced.Therefore, the conductive contact unit of present embodiment 1, in decision during arrangement pitch, it is prerequisite and design structure that conductive contact 1 separately is positioned at zone by the wide defined of guide groove 2e all the time in thickness of slab direction (y direction of principal axis among Fig. 5).That is, in the present embodiment 1,, can make narrow and smallization of arrangement pitch with this amount in order also not need in arrangement pitch such necessity of allowing some leeway in the insulativity that produces 1 of conductive contact also guaranteeing adjacency when distortion waits.
Have again, in the present embodiment 1, and non-through hole but to keep conductive contact 1 caused narrow and smallization of arrangement pitch by guide groove 2e be possible.That is, as prior art, when keeping conductive contact 1 by through hole, in order to keep the physical property intensity of the substrate that forms through hole etc., must with between the through hole of adjacency every guaranteeing for to a certain degree.With respect to this, when plate-shaped member forms ditch, compare when forming through hole, low to the influence that the physical property intensity of mother metal is caused, even when forming guide groove 2e to high-density, the reduction of the physical property intensity of the 1st guide member 6a, the 2nd guide member 6b also can roughly be ignored.Thereby, in the present embodiment 1, compare with forming through hole, that be correlated with owing to the formation of guide groove 2e, lower to the restriction of maintaining part 2 sides, therefore have the advantage of the guide groove 2e that can form narrow and smallization of interval.
And the conductive contact unit of present embodiment 1 has makes easy advantage.As mentioned above, need not form through hole in the present embodiment 1, and have the structure of utilization than the guide groove 2e of the easier making of through hole.Thereby, can easily make the 1st guide member 6a, the 2nd guide member 6b that are used to constitute maintaining part 2.And in assembling procedure, conductive contact 1 is housed in the operation of maintaining part 2, the end is embedded guide groove 2e just can finish.Thereby, when the assembling of the relevant conductive contact unit of present embodiment 1, do not need can be easy to assemble via the complicated step of conductive contact being inserted fine through hole.In sum, the conductive contact unit of present embodiment 1 keeps the structure of conductive contact 1 to be easy to make because of adopting by guide groove 2e, can reduce manufacture cost and other advantages thereby have.
(embodiment 2)
Then, the conductive contact unit to embodiment 2 describes.The conductive contact unit of present embodiment 2, essential structure and embodiment 1 are common, have the different formation of the maintenance situation of conductive contact and embodiment 1 on the other hand.In addition, below in the explanation, the composed component of having given the symbol same with embodiment 1, title only otherwise mention especially is made as and has structure, the function same with embodiment 1.
Fig. 9 is the synoptic diagram of formation of the conductive contact unit of expression present embodiment 2.As shown in Figure 9, the conductive contact 5 that contact with circuit structures such as checking object by an end of the conductive contact unit of present embodiment 2, the maintaining part 6 that is used to keep conductive contact 5, and constitute via the signal output apparatus 3 that 5 pairs of circuit structures of conductive contact are exported predetermined electric signal.
Maintaining part 2 in maintaining part 6 and the embodiment 1 is same, is to be used for parts that conductive contact 5 is kept under the state that can slide along flexible direction freely.Particularly, maintaining part 6 possesses: conductive contact 5 is configured in the 1st guide member 6a, the 2nd guide member 6b at Width two ends relatively; In the opening portion 5d that a plurality of conductive contacts 5 form respectively, insert the 3rd logical guide member 6c; Reach and in the opening portion 5b that conductive contact 5 forms respectively, insert logical pin parts 6d.These inscapes are to fix mutual position relation by omitting illustrated pre-determined constant parts, and it is also same when conductive contact 5 is upheld or shunk.
The 1st guide member 6a and the 2nd guide member 6b are same with embodiment 1 respectively, the guide groove 2e of the Width end that formation makes conductive contact 5 embedding along flexible direction freely the mode of sliding, the arrangement pitch of guide groove 2e is for the arrangement pitch of conductive contact 5 roughly 2 times in addition, and the 1st guide member 6a goes up the guide groove 2e that forms and the 2nd guide member 6b and goes up the guide groove 2e that forms and form according to the mode in the mutual location of thickness of slab direction (the y direction of principal axis among conductive contact 5 orientations, Fig. 5).
The 3rd guide member 6c inserts logical mode according to the opening portion 5d that will be formed on conductive contact 5 and is formed by bar-like member.And, in the 3rd guide member 6c, similarly form predetermined guide groove 6e with the 1st guide member 6a and the 2nd guide member 6b, keep under the state that embeds guide groove 6e by a part, have the function that conductive contact 5 is kept thus under the state that can slide along flexible direction freely conductive contact 5.
Figure 11 is the synoptic diagram of the structure of expression the 3rd guide member 6c.As shown in figure 11, form the side of the 3rd bar-shaped guide member 6c, be formed with the guide groove 6e that extends in the direction parallel with the flexible direction of conductive contact 5 in integral body.As Figure 11 schematically illustrates, the part of the formation opening portion 5d outer rim in relevant guide groove 6e embedding conductive contact 5, by embedding relevant portion is arranged, conductive contact 5 slidably can kept under the state according to the flexible retractile mode of direction in edge thus.
Pin parts 6d is formed by bar-like member according to inserting the logical mode that is formed on the opening portion 5b of conductive contact 5.Parts 6d is different with the 3rd guide member 6c for pin, has the diameter structure about equally of external diameter and opening portion 5b, and conductive contact 5 is that flexible relatively direction and Width are fixed by pin parts 6d.In addition, these pin parts 6d is unessential in the conductive contact unit of present embodiment 2 at least in theory as the sub of holding plate 2c, 2d in the embodiment 1 and bring into play function.
Figure 12 is the synoptic diagram of the maintenance situation of the conductive contact 5 finished of expression the 1st guide member 6a, the 2nd guide member 6b and the 3rd guide member 6c, and is the synoptic diagram from the conductive contact unit of checking the present embodiment 2 that circuit structure sides such as object are watched.As shown in figure 12, a plurality of conductive contacts 5 of arranging in the thickness of slab direction are situated between respectively by opening portion 5d by the 3rd guide member 6c, the 1st guide member 6a or the 3rd guide member 6c, the 2nd guide member 6b maintenance.That is, in the present embodiment 2, the a plurality of conductive contacts 5 that kept have following structure: a part by the guide groove 6e, the 2e that are respectively formed at the 3rd guide member 6c and the 1st guide member 6a keeping along the mode that flexible direction is slided freely, in addition, remainder by the guide groove 6e, the 2e that are respectively formed at each the 3rd guide member 6c and the 2nd guide member 6b constituting along the mode that flexible direction is slided freely.
In addition, about conductive contact 5, in part that is kept by the 1st guide member 6a and the 3rd guide member 6c and the part that kept by the 2nd guide member 6b and the 3rd guide member 6c, can adopt absolute construction, utilize and present embodiment 1 isomorphic situation but be made as.Also as shown in figure 10, conductive contact 5 is with the eccentric position formation in advance of opening portion 5b, 5d relative width direction.Therefore, by the distance between the 3rd guide member 6c and the 1st guide member 6a, the 2nd guide member 6b is carried out suitable setting, the relative conductive contact 5 that keeps by the 1st guide member 6a, conductive contact 5 by the 2nd guide member 6b maintenance, with the axle of the flexible direction by opening portion 5b, 5d is that the center Rotate 180 ° disposes, even adopt same structure still can be kept by the 2nd guide member 6b and the 3rd guide member 6c.We can say, opening portion 5b, 5c about off-centre, state lower edge thickness of slab direction after overturning is mutually arranged, for example the conductive contact that is positioned at odd number 5 of thickness of slab direction is kept by the 1st guide member 6a and the 3rd guide member 6c, and the conductive contact 5 that is positioned at even number is kept by the 2nd guide member 6b and the 3rd guide member 6c.
Then, the advantage to the conductive contact unit of present embodiment 2 describes.At first, the conductive contact unit of present embodiment 2 and embodiment 1 are same, adopt conductive contact 5 under the state that embeds guide groove 2e, 6e by constituting that maintaining part 6 keeps, so conductive contact 5 in distortion and buckle do not produce and state that sliding friction reduces under stretch.And, because adopt the formation that keeps conductive contact 5 according to the mode that is embedded in guide groove 2e, 6e, therefore compare when keeping conductive contact by through hole, can make narrow and smallization of arrangement pitch of conductive contact 5.
And the conductive contact unit of present embodiment 2 can make further narrow and smallization of the arrangement pitch of conductive contact 5.Also as enforcement mode 1 is illustrated, when keeping conductive contact 5, compare when keeping by through hole by guide groove 2e etc., can make narrower and smallization of arrangement pitch of conductive contact 5.But, be not to make ad infinitum narrow and smallization of arrangement pitch when utilizing guide groove 2e yet, form the limit at interval according to guide groove 2e, the minimum value of the arrangement pitch of regulation conductive contact 5.
With respect to this, in the present embodiment 2, the 1st guide member 6a and the 2nd guide member 6b, has respectively the structure that only forms the guide groove 2e corresponding with the part of a plurality of conductive contacts 5 that kept and all the other parts, therefore compare when forming the guide groove 2e corresponding, when the arrangement pitch of same degree, can make between the guide groove 2e of adjacency every expansion with all conductive contacts 5.By adopting this formation, as shown in figure 12, when the orientation of conductive contact 5 alternatively forms guide groove 2e, between the guide groove 2e that each the 1st guide member 6a and the 2nd guide member 6b form respectively every, compare with the 1st guide member 2a and the 2nd guide member 2b in the embodiment 1, can be roughly 2 times value.Thereby the conductive contact unit of present embodiment 2 is compared with the conductive contact unit of embodiment 1, has the advantage of narrow and smallization of arrangement pitch that can further make conductive contact 5.In addition, it is the guide groove 6e that equates with the arrangement pitch of conductive contact 5 that the 3rd guide member 6c forms arrangement pitch, but the 3rd guide member 6c that forms by bar-like member, owing to for example can realize comprising the shape of guide groove 6e by injection molding forming, therefore than being easier to narrow and smallization, therefore there is not substantial problem by tabular body being carried out formed guide groove 2e such as etch processes.
Have, the conductive contact unit of present embodiment 2, the 1st guide member 6a and the 2nd guide member 6b possess wideer than the arrangement pitch of conductive contact 5 at interval guide groove 2e again, also have the advantage of easy making maintaining part 6 thus.That is when the arrangement pitch of conductive contact 5 was same degree, guide groove 2e for example formed at interval with 2 times and get final product in the present embodiment 2, so formation mask pattern easily during etch processes, had the advantage of easy making maintaining part 6 thus.
And, the conductive contact unit of present embodiment 2, the mode of mutually overturning each other according to the conductive contact 5 with adjacency disposes, and can reduce the overlapping area of orientation thus.Therefore, even in that 5 arrangement pitches of conductive contact of adjacency are little when producing the degree of parasitic electric weight to hypothesis, has an advantage that can lower capacitance value because the coincidence area is little.
(embodiment 3)
The conductive contact unit of embodiment 3 then, is described.The conductive contact unit of present embodiment 3 is by the structure of lead contactor itself being studied, being had the formation that conductive contact produces distortion and buckles when suppressing to use.
Figure 13 is the synoptic diagram of formation of the conductive contact of the expression conductive contact unit that constitutes present embodiment 3.As shown in figure 13, the conductive contact 8 that constitutes conductive contact unit possesses: similarly check the 1st contact site 8a that the splicing ear that circuit structure possessed such as object contacts respectively with embodiment 1,2 with each; Be used for the 2nd contact site 8b with signal output apparatus 3 electrical connections; And and embodiment 1,2 similarly be formed between the 1st contact site 8a and the 2nd contact site 8b, the 1st contact site 8a and the 2nd contact site 8b are provided the elastic 8c of bouncing force.And conductive contact 8 also possesses: the 1st connecting portion 8d is used for and will connects between the 1st contact site 8a and the elastic 8c; And the 2nd connecting portion 8c, being used for and will connecting between the 2nd contact site 8b and the elastic 8c, each one forms as one and integral body has tabular shape.
The 1st connecting portion 8d, 8e between respectively with the 1st contact site 8a and elastic 8c, between the 2nd contact site 8b and the elastic 8c, connect this respect have with embodiment 1,2 in the same formation of connecting portion 1d, 1e, but it is different with embodiment 1,2 to connect situation.Particularly, the 1st connecting portion 8d have along with the nonparallel direction of flexible direction of elastic 8c, for example only extend the structure of preset distance along the direction (Width among Figure 13) vertical during state of nature (length of elastic 8c is the state of natural length), and form to such an extent that when keeping, be that the center is freely rotatable with predetermined turning axle by maintaining part 9 described later with flexible direction.
Particularly, the 1st connecting portion 8d is formed with the circular-arc relief configuration fulcrum 8f that is used for when being held and constitutes turning axle 9a (aftermentioned) the side butt of maintaining part 9, under the state of fulcrum 8f and turning axle 9a side butt, under the rotatable state freely in the center of relative rotation axi 9a, keep by maintaining part 9.And the 1st connecting portion 8d has the structure that the symmetrical mutually zone of rotation center in the part of extending preset distance, relative is connected with elastic 8c and the 1st contact site 8a.By having the structure that is connected with both in the relative zone of rotation center symmetry, for example the 1st connecting portion 8d is when rotating clockwise, and elastic 8c is along the extension of the right among Figure 13, and the 1st contact site 8a along left to mobile.For example this means to the 1st contact site 8a along the accompanying drawing left when giving pushing force the 1st connecting portion 8d relative to rotation center along moving clockwise and elastic 8c upholds along the accompanying drawing right.And, mean when elastic 8c upholds longlyer than natural length, elastic 8c is endowed the 1st connecting portion 8d along convergent force to the elastic force of (accompanying drawing left to), the 1st connecting portion 8d is subjected to along anti-clockwise couple thus, according to this couple, the 1st contact site 8a receives pressure at projected direction (accompanying drawing right).
This is configured among the 2nd connecting portion 8e also same.That is, the 2nd connecting portion 8e have with the nonparallel for example vertical direction of the flexible direction of the elastic 8c structure of definite length extended only, and have when keeping mode that the center of predetermined turning axle 9b (aftermentioned) relatively is in rotatable state freely and form structure with the fulcrum 8g of the circular-arc relief configuration of turning axle 9b side surface part butt by maintaining part 9.And, the 2nd connecting portion 8e has the structure that is connected with elastic 8c and the 2nd contact site 8b in the zone of relative rotation center symmetry, and the flexible direction of conductive contact 8 (that is, with Width and the vertical direction of thickness of slab direction, transverse direction among Figure 13), performance makes the deformation direction of elastic 8c and the displacement direction of the 2nd contact site 8b become rightabout effect.
And, conductive contact 8 have near fulcrum 8f, 8g, dispose, have the interval holding member 8h of predetermined thickness, the structure of 8i in the thickness of slab direction.At interval holding member 8h, 8i are when being kept a plurality of conductive contact 8 by maintaining part 9, be used to keep between 8 of the conductive contacts of adjacency every.That is, the conductive contact unit of present embodiment 3 and embodiment 1,2 similarly adopt the formation that a plurality of conductive contacts 8 are kept under the stacked state of thickness of slab direction (direction that is approximately perpendicular to paper of Figure 13), but between 8 of the conductive contacts of adjacency every, must be corresponding be set at predetermined value at the arrangement pitch of checking the formed splicing ear of circuit structure such as object.In the present embodiment 3, between 8 of the conductive contacts of stipulating adjacency every, for example adopt and will be configured near the structure fulcrum 8f, the 8g by interval holding member 8h, the 8i that the insulativity parts constitute.
Then, to the conductive contact unit of the present embodiment 3 that comprises conductive contact shown in Figure 13 8 whole constitute describe.Figure 14 is the whole synoptic diagram that constitutes of the conductive contact unit of expression present embodiment 3.As shown in figure 14, the conductive contact unit of present embodiment 3 adopts arranges the formation that keeps under a plurality of states with conductive contact shown in Figure 13 8 in the thickness of slab direction, particularly, conductive contact unit as present embodiment 3 is formed by a plurality of conductive contacts 8 that are arranged in the thickness of slab direction and maintaining part 9, and this maintaining part 9 possesses: with the turning axle 9a of the outer rim butt of the formed relief configuration as fulcrum 8f of conductive contact 8, and and as the turning axle 9b of the outer rim butt of the relief configuration of fulcrum 8g.In addition, in order to make the structure simplification, illustration only constitutes maintaining part 9 by turning axle 9a, 9b among Figure 14, but except that turning axle 9a, 9b, also can possess a plurality of conductive contacts 8 are housed in inner predetermined outer assembling structure etc.And though omit accompanying drawing among Figure 14, present embodiment 3 is also same with embodiment 1,2, possesses the signal output apparatus 3 that is electrically connected with conductive contact 8.
Turning axle 9a, 9b have the function that makes the 1st connecting portion 8d, b 9e keep a plurality of conductive contacts 8 respectively under rotatable state freely.Particularly, turning axle 9a, 9b are formed by the columnar component that the thickness of slab direction at each conductive contact has long side direction, and have the mechanism that keeps conductive contact 8 under side and each fulcrum 8f, 8g state with the mode butt freely of sliding.Therefore, lead contactor 8 is the center with the axle of turning axle 9a, 9b, is kept by maintaining part 9 under the rotatable state freely of each the 1st connecting portion 8d, 8e.In addition, turning axle 9a, 9b fix the position relation by the fixed part that omits accompanying drawing mutually, no matter and this position relation conductive contact 8 have attonity all to be kept.
Then, the action to the conductive contact unit of present embodiment 3 describes.As mentioned above, conductive contact unit be by conductive contact 8 be formed on the splicing ear of checking circuit structures such as object and carry out physical property and contact, realize electrical connection to circuit structure.And, in order to realize good being electrically connected of splicing ear with circuit structure, must lower the 1st contact site 8a that conductive contact 8 possessed and be situated between and contact the electric contact impedance that is produced with splicing ear, the structure of the pushing force that need be used at conductive contact 8 to provide relevant by predetermined pushing force.In the present embodiment 3, the supply principle of relevant pushing force is different with embodiment 1,2.
Figure 15 is the synoptic diagram that is used to illustrate the action of conductive contact unit.As shown in figure 15, when using conductive contact unit, conductive contact 8 contacts with the splicing ear 11a physical property that circuit structure 11 is possessed by the 1st contact site 8a, and contacts with the terminal 3a physical property that signal output apparatus 3 is possessed by the 2nd contact site 8b.And, for the 1st contact site 8a and the 2nd contact site 8b being applied pushing force from each splicing ear 11a and terminal 3a, as shown in figure 15, the 1st connecting portion 8d, 8e respectively along clockwise, counterclockwise rotation predetermined angular.Therefore, elastic 8c is longer than natural length with the length of long side direction and upholds, and elastic 8c produces elastic force at compression direction by the length extension of long side direction.
Therefore, the 1st connecting portion 8d, 8e, in the part that is connected with elastic 8c based on from the elastic force of elastic 8c and receive respectively along counterclockwise, clockwise couple.This couple transmits to the 1st contact site 8a and the 2nd contact site 8b via the 1st connecting portion 8d, 8e, and the 1st contact site 8a and the 2nd contact site 8b connect auspicious sub-11a, terminal 3a respectively relatively and accept pushing force at direction of closing.Therefore, under the state that contact terminal 11a, auspicious sub-3a is applied predetermined pushing force, carry out the physical property contact, under the state of attenuating, be electrically connected thus the electric contact impedance of splicing ear 11a, terminal 3a.
So, in the present embodiment 3, conductive contact 8 is different with embodiment 1,2, have following structure: by with splicing ear 11a, contacting of terminal 3a when the 1st contact site 8a and the 2nd contact site 8b displacement elastic 8c uphold, and, provide bouncing force to the 1st contact site 8a and the 2nd contact site 8b by in order to make elastic 8c recover the bouncing force that natural length produced.The advantage of the conductive contact unit of the different caused present embodiment 3 of dependent interaction will make the following instructions.
Originally the buckling of prior art problem, distortion etc., under the situation that the length that makes long side direction because of the external force effect is shunk, be for example to form the external force of shrinkage direction in the tabular conductive contact can't be only to absorb and cause the also distortion such as thickness of slab direction of tabular body to be produced by the distortion of long side direction.Thereby original buckle etc. is that inscape at conductive contact is the phenomenon that elastic is produced when shrinking.With respect to this, in the present embodiment 3, also as shown in figure 15,, therefore eliminate original precondition of buckling etc. that produces because elastic 8c becomes stretched condition when using.Thereby, the 1st connecting portion 8d, 8e are held under rotatable state freely, by the 1st contact site 8a, the 2nd contact site 8b and elastic 8c are disposed in the mode that relative rotation center is in symmetric position, conductive contact 8 can be avoided the situation that elastic 8c in use shrinks thus, and has and suppress or prevent along with elastic 8c shrinks and the advantage of buckling of producing, distortion etc.
And, in the present embodiment 3, adopt by conductive contact 8 itself to be difficult for producing the structure of buckling and waiting, also having can be with the advantage of easy structure formation conductive contact unit.That is, in the embodiment 1,2, do not buckle in order not produce at conductive contact, distortion etc. and must be for being formed with the formation of guide groove 2e etc., but in the present embodiment 3, according to MIN turning axle 9a, 9b are disposed in maintenance of conductive contact 8 physical properties and the rotatable mode freely of the 1st connecting portion 8d, 8e, realize maintaining part 9.Thereby, can form maintaining part 9 by constituting easily, have the advantage of the conductive contact unit that can realize whole simple construction.
In addition, present embodiment 3 is not to negate to utilizing the situation of guide groove as the hold mode of conductive contact 8, and for example when keeping conductive contact 8, the structure of continuing to use the maintaining part shown in the embodiment 1,2 also is effective.For example, except omit at interval holding member 8h, 8i at conductive contact 8, replace turning axle 9a, 9b and also be effective using under the butt state respectively with fulcrum 8f, 8g with embodiment 2 employed the 3rd guide members.As implement mode 2 and narrated, the 3rd guide member is formed by the bar-like member that extends along the orientation of conductive contact, and have a structure that is formed with the guide groove that extends along the flexible direction of conductive contact on the side, and the part by embedding conductive contact at this guide groove can keep conductive contact keeping under the slip state freely.Use this principle, the guide groove that extends along the sense of rotation of fulcrum 8f, 8g is set, and embed maintenance conductive contact 8 under the state that fulcrum 8f, 8g are arranged at this guide groove, this can enjoy above-mentioned advantage and also enjoy the advantage of utilizing guide groove to bring thus.
And as shown in Embodiment 2, the conductive contact 8 of adjacency keeps also effective each other under the state of upset mutually.Figure 16 is the synoptic diagram of formation of the conductive contact unit variation of expression embodiment 3.For example, about the structure of conductive contact 8, by forming fulcrum 8f, 8g in the position of departing from the long side direction central shaft in advance, the conductive contact 8 of adjacency is to serve as axle and Rotate 180 mutually each other with the straight line by fulcrum 8f, 8g.State keep down, can realize conductive contact unit shown in Figure 16 thus.By adopting this structure,, can expect for example to reduce the effects such as parasitic capacitance value that produced between the conductive contact 8 of adjacency as described in the embodiment 2.
More than, by embodiment 1 to 3 explanation the present invention, but the present invention should not be interpreted as only being defined in above-mentioned embodiment 1 to 3, so long as various embodiment, variation that those skilled in the art can expect get final product.For example, via embodiment 1 to 3, conductive contact is to be formed by plate-shaped member, but this structure of illustration is to be easy to generate usually and to buckle, twist in order to enumerate monomer, for example the present invention is applied in columned conductive contact and also can.And for example embodiment 1 is the formation that the Width both ends integral body of conductive contact 1 is embedded in guide groove 2e, but more simple structure for example also can form projection on the conductive contact outside surface, again this projection is embedded in guide groove.That is, no matter be embedded in any part that the part of guide groove is a conductive contact, all can enjoy above-mentioned advantage.
Utilizability on the industry
As mentioned above, conductive contact unit of the present invention and conductive contact, electrical characteristic inspection for inspection objects such as semiconductor integrated circuit is useful, especially, be suitable for corresponding to as the miniaturization tendency of the semiconductor integrated circuit that checks object etc. and the electric checking that narrow and smallization of splicing ear arrangement pitch carried out.
Claims (4)
1. conductive contact unit possesses the circuit structure of a plurality of splicing ears relatively, by contacting and be electrically connected with it with above-mentioned splicing ear physical property,
This conductive contact unit possesses:
A plurality of conductive contacts, a plurality of the 1st contact sites that contact with above-mentioned splicing ear when wherein using, a plurality of the 2nd contact sites that are electrically connected with above-mentioned the 1st contact site and be formed on above-mentioned the 1st contact site and above-mentioned the 2nd contact site between not only can be along long side direction capable of expansion and contraction and elastic that give bouncing force to above-mentioned the 1st contact site and above-mentioned the 2nd contact site, be formed one
Maintaining part, has the structure that extends in the flexible direction of above-mentioned elastic, and be formed with a plurality of guide grooves that the part that can make above-mentioned conductive contact embeds sliding freely along above-mentioned flexible direction, and in this guide groove, embed under the state of the part that above-mentioned conductive contact is arranged and keep above-mentioned conductive contact
Above-mentioned conductive contact is formed with opening portion, and it runs through and the vertical direction of above-mentioned flexible direction, and the width of the direction parallel with above-mentioned flexible direction sets according to the collapsing length of above-mentioned elastic,
Above-mentioned maintaining part possesses:
The 1st guide member, it is formed with guide groove, and a square end portion of direction in the part of a plurality of above-mentioned conductive contacts, vertical with above-mentioned flexible direction is embedded sliding freely along above-mentioned flexible direction;
The 2nd guide member, it is formed with guide groove, and the opposing party end of direction in the remainder of a plurality of above-mentioned conductive contacts, vertical with above-mentioned flexible direction is embedded sliding freely along above-mentioned flexible direction; And
The 3rd guide member is made of the bar-like member that is applied in the above-mentioned opening portion that forms respectively on a plurality of above-mentioned conductive contacts,
And, be formed with the guide groove that extends along the direction parallel in the side of above-mentioned the 3rd guide member, embed the part that is used to form above-mentioned opening portion outer rim in the above-mentioned conductive contact by freely the mode of sliding along above-mentioned flexible direction at this guide groove with above-mentioned flexible direction.
2. conductive contact unit as claimed in claim 1 is characterized in that,
Above-mentioned conductive contact is formed with opening portion, and it runs through in the direction vertical with above-mentioned flexible direction, and the width of the direction parallel with above-mentioned flexible direction is corresponding to the collapsing length of above-mentioned elastic,
Above-mentioned maintaining part is formed by bar-like member, the direction that this bar-like member is arranged along a plurality of above-mentioned conductive contacts is extended and is run through above-mentioned opening portion, and the guide groove of above-mentioned the 3rd guide member is formed: can make to be used to form being partially submerged into of above-mentioned opening portion outer rim in the above-mentioned conductive contact.
3. conductive contact unit as claimed in claim 1 is characterized in that,
Also possess signal output apparatus, the terminal that the 2nd contact site physical property that it possesses with above-mentioned conductive contact is had contacts, and pass through this terminal to above-mentioned conductive contact output predetermined electric signal.
4. a conductive contact makes between a plurality of circuit structures to be electrically connected,
This conductive contact possesses:
The 1st contact site carries out physical property with a side of a plurality of circuit structures in use and contacts;
The 2nd contact site is electrically connected with above-mentioned the 1st contact site, and carries out physical property with the opposing party of a plurality of circuit structures in use and contact;
Elastic provides elastic force to above-mentioned the 1st contact site and above-mentioned the 2nd contact site;
The 1st connecting portion according to being that the rotatable mode freely of rotation center is kept by maintaining part with predetermined axle in use, is in the zone of mutual symmetry at above-mentioned relatively rotation center, is connected with above-mentioned elastic with above-mentioned the 1st contact site; And
The 2nd connecting portion according to being that the rotatable mode freely of rotation center is kept by maintaining part with predetermined axle in use, is in the zone of mutual symmetry at above-mentioned relatively rotation center, is connected with above-mentioned elastic with above-mentioned the 2nd contact site.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005042772A JP4905872B2 (en) | 2005-02-18 | 2005-02-18 | Conductive contact unit |
| JP042772/2005 | 2005-02-18 | ||
| PCT/JP2006/302829 WO2006088131A1 (en) | 2005-02-18 | 2006-02-17 | Conductive terminal unit and conductive terminal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101120257A CN101120257A (en) | 2008-02-06 |
| CN101120257B true CN101120257B (en) | 2010-05-19 |
Family
ID=36916528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800052828A Expired - Fee Related CN101120257B (en) | 2005-02-18 | 2006-02-17 | Conductive contactor unit and conductive contactor |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4905872B2 (en) |
| KR (1) | KR100950789B1 (en) |
| CN (1) | CN101120257B (en) |
| TW (1) | TWI298789B (en) |
| WO (1) | WO2006088131A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11855368B2 (en) | 2019-04-26 | 2023-12-26 | Sekisui Polymatech Co., Ltd. | Electrical connecting member, and glass plate structure with terminal |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007123150A1 (en) * | 2006-04-18 | 2007-11-01 | Tokyo Electron Limited | Probe card and glass substrate drilling method |
| JP4842733B2 (en) * | 2006-08-18 | 2011-12-21 | 日本発條株式会社 | Conductive contact and conductive contact unit |
| JP4781938B2 (en) * | 2006-08-18 | 2011-09-28 | 日本発條株式会社 | Conductive contact unit |
| JPWO2008133089A1 (en) * | 2007-04-20 | 2010-07-22 | 日本発條株式会社 | Conductive contact unit |
| JP5103566B2 (en) * | 2007-11-26 | 2012-12-19 | 株式会社コーヨーテクノス | Electrical contact and inspection jig having the same |
| TWI482975B (en) * | 2011-05-27 | 2015-05-01 | Mpi Corp | Spring-type micro-high-frequency probe |
| KR101813006B1 (en) * | 2016-01-04 | 2017-12-28 | 주식회사 아이에스시 | Contactor for semiconductor test |
| JP2018197714A (en) * | 2017-05-24 | 2018-12-13 | 山一電機株式会社 | Mems type probe, and electric inspection device using the same |
| WO2019116512A1 (en) * | 2017-12-14 | 2019-06-20 | オムロン株式会社 | Socket, inspection jig, inspection unit, and inspection device |
| JP7314633B2 (en) * | 2019-06-11 | 2023-07-26 | オムロン株式会社 | Probe pins, inspection fixtures and inspection units |
| JP7318297B2 (en) * | 2019-04-25 | 2023-08-01 | オムロン株式会社 | Probe pins, inspection fixtures and inspection units |
| JP2020180889A (en) * | 2019-04-25 | 2020-11-05 | オムロン株式会社 | Probe pin, inspection jig, and inspection unit |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1571627A (en) * | 2003-07-24 | 2005-01-26 | 台湾莫仕股份有限公司 | Method for solder planting of conducting terminal |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5634801A (en) * | 1991-01-09 | 1997-06-03 | Johnstech International Corporation | Electrical interconnect contact system |
| JPH07311240A (en) * | 1994-05-19 | 1995-11-28 | Sony Corp | Apparatus for measuring electric characteristic of electronic part |
| JPH11133060A (en) * | 1997-10-31 | 1999-05-21 | Tani Denki Kogyo Kk | Testing terminal |
| JP2003045594A (en) * | 2001-07-27 | 2003-02-14 | Yamaichi Electronics Co Ltd | Ic socket |
-
2005
- 2005-02-18 JP JP2005042772A patent/JP4905872B2/en not_active Expired - Fee Related
-
2006
- 2006-02-17 KR KR1020077021307A patent/KR100950789B1/en not_active IP Right Cessation
- 2006-02-17 TW TW95105370A patent/TWI298789B/en active
- 2006-02-17 CN CN2006800052828A patent/CN101120257B/en not_active Expired - Fee Related
- 2006-02-17 WO PCT/JP2006/302829 patent/WO2006088131A1/en active Application Filing
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1571627A (en) * | 2003-07-24 | 2005-01-26 | 台湾莫仕股份有限公司 | Method for solder planting of conducting terminal |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11855368B2 (en) | 2019-04-26 | 2023-12-26 | Sekisui Polymatech Co., Ltd. | Electrical connecting member, and glass plate structure with terminal |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006088131A1 (en) | 2006-08-24 |
| TWI298789B (en) | 2008-07-11 |
| TW200641358A (en) | 2006-12-01 |
| KR100950789B1 (en) | 2010-04-02 |
| KR20070105362A (en) | 2007-10-30 |
| JP4905872B2 (en) | 2012-03-28 |
| JP2006226907A (en) | 2006-08-31 |
| CN101120257A (en) | 2008-02-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101120257B (en) | Conductive contactor unit and conductive contactor | |
| US9147969B2 (en) | Connector with adjustable locking force | |
| US7845986B2 (en) | Torsionally-induced contact-force conductors for electrical connector systems | |
| US7278855B2 (en) | High speed, direct path, stair-step, electronic connectors with improved signal integrity characteristics and methods for their manufacture | |
| US7645644B2 (en) | Data line layout in semiconductor memory device and method of forming the same | |
| US10312613B2 (en) | Interposer assembly and method | |
| US8821178B2 (en) | Connector | |
| CN101384909A (en) | Electrically conductive contact and electrically conductive contact unit | |
| JP2006269148A (en) | Spiral contactor | |
| KR101936393B1 (en) | Semiconductor device and method for manufacturing the same | |
| JP5657750B2 (en) | Circuit board soldering connector and connector layout | |
| US6848936B2 (en) | Electronic assembly having a socket with features that ensure alignment in X- and Y-directions of a component held thereby | |
| JP5699757B2 (en) | Mechanical quantity sensor | |
| KR101101239B1 (en) | Probe card for testing semiconductor device | |
| JP5867636B2 (en) | Mechanical quantity sensor | |
| CN101517832B (en) | Electric connector | |
| JP2018147857A (en) | Connection device, electronic component, and method of manufacturing electronic component | |
| US20080251933A1 (en) | Metal interconnect structure | |
| KR20160110717A (en) | Elastic signal pin | |
| KR20210083064A (en) | Variable MEMS probe card and assembly method thereof | |
| KR100845806B1 (en) | Semiconductor device having probing pads, which improved integrated efficiency | |
| US7709962B2 (en) | Layout structure having a fill element arranged at an angle to a conducting line | |
| WO2020039550A1 (en) | Flexible substrate | |
| JP2006108367A (en) | Three-dimensional inter-substrate connection component and its mounting structure | |
| JP2018078471A (en) | Lowpass filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100519 Termination date: 20110217 |