WO2006088131A1

WO2006088131A1 - Conductive terminal unit and conductive terminal

Info

Publication number: WO2006088131A1
Application number: PCT/JP2006/302829
Authority: WO
Inventors: Koji Ishikawa; Jun Tominaga
Original assignee: Nhk Spring Co., Ltd.
Priority date: 2005-02-18
Filing date: 2006-02-17
Publication date: 2006-08-24
Also published as: KR20070105362A; TWI298789B; TW200641358A; CN101120257B; KR100950789B1; CN101120257A; JP4905872B2; JP2006226907A

Abstract

A conductive terminal unit wherein arrangement intervals can be narrowed and conductive terminals are held without deteriorating characteristics of the conductive terminals having extendable/retractable elastic sections. The conductive terminal unit is provided with a plurality of conductive terminals (1), which are used for electrical connection between a plurality of circuit structures, are extendable/retractable structures in a longitudinal direction and are formed in board-shapes; and first guide member (2a) and a second guide member (2b), which have a function of holding the conductive terminals (1) and are arranged on the conductive terminals (1) at both ends in a width direction. Since guide grooves extending in an extending/retracting direction of the conductive terminals (1) are formed on the first guide member (2a) and the second guide member (2b), respectively, and the end sections of the conductive terminals (1) in a width direction are held by being fitted in the guide grooves, displacements of the conductive terminals (1) in the extending/retracting direction and the vertical direction generated while the conductive terminals are extending/retracting, namely, buckling and distortion, are eliminated.

Description

Specification

Conductive contact unit and conductive contact

Technical field

The present invention relates to a conductive contact unit for electrically connecting a first circuit structure having a plurality of first connection terminals and a second circuit structure having a plurality of second connection terminals, and The present invention relates to a conductive contact constituting a conductive contact unit. Background art

Conventionally, in the technical field relating to inspection of electrical characteristics of an inspection target of a semiconductor integrated circuit or the like, a plurality of conductive contacts are arranged corresponding to the connection terminals of the semiconductor integrated circuit, and the conductive contacts are connected to the connection terminals. A technique related to a conductive contact unit having a function of ensuring electrical continuity by being brought into physical contact with the contact is known. The powerful conductive contact mute has a structure including at least a plurality of conductive contacts and a holding portion for holding the conductive contacts. In response to the narrowing of the arrangement interval of the connection terminals due to the trend toward miniaturization of the semiconductor integrated circuit to be inspected, the arrangement interval of the plurality of conductive contacts is reduced even in the conductive contact unit! Various configurations have been proposed for the configuration of the conductive contact unit that includes the conductive contact and the conductive contact that can be realized and that can reduce the arrangement interval.

[0003] For example, as a conductive contact that realizes a narrow array interval, a contact portion that comes into contact with an object to be inspected and an elastic portion that urges and urges against the contact portion are integrated by a plate-like conductive member. Proposed structures have been proposed. For example, it is theoretically possible to arrange a large number of conductive contacts in a narrow area by arranging plate-shaped conductive contacts in the plate thickness direction, which reduces the arrangement interval of connection terminals provided for inspection objects. A corresponding conductive contact can be realized (for example, see Patent Document 1).

[0004] Patent Document 1: Japanese Patent Laid-Open No. 2001-343397

Disclosure of the invention

Problems to be solved by the invention

However, in the conventional conductive contact unit, the conductive contact has the above-described configuration. Nevertheless, there is a problem that it is difficult to cope with the narrowing of the arrangement interval of the connection terminals to be inspected. Hereinafter, a detailed problem will be described.

[0006] As is apparent from FIG. 8 of Patent Document 1, in the conventional conductive contact unit, a guide hole is formed in the holding portion (insulating substrate 61 in Patent Document 1), and the guide hole is covered. A structure that accommodates conductive contacts is adopted. Therefore, in the conventional conductive contact unit, the arrangement interval of the conductive contacts is defined by the arrangement interval of the guide holes corresponding to the number of the conductive contacts with respect to the holding portion. In such a through hole, the minimum value of the formation interval is limited by the physical strength of the object to be formed (holding portion). For this reason, the conventional conductive contact unit is not sufficiently devised with respect to the structure of the holding portion even though the conductive contact itself can sufficiently reduce the arrangement interval. In addition, it is difficult to reduce the arrangement interval of the conductive contacts.

[0007] Further, when the conductive contact has a plate-like structure, it is necessary to prevent the occurrence of buckling and twisting during the expansion and contraction operation in the elastic portion. That is, since the conductive contact formed in a plate shape is plate-shaped, the length (plate thickness) in the plate thickness direction (the direction perpendicular to the paper surface in FIG. 2 of Patent Document 1) is longer than the length in the other direction. There is a problem that the physical strength is extremely small and low. For this reason, especially when an external force is applied in the direction in which the elastic portion contracts, the conductive contact may be buckled or twisted due to the contraction of the elastic portion. There is a problem that the panel characteristics of the part deteriorate. In the conductive contact unit described in Patent Document 1, the guide hole has a possibility of alleviating buckling to some extent. However, depending on the guide hole whose cross-sectional shape seems to be circular, the length of the conductive contact is long. It is extremely difficult to mitigate torsion that can occur in the circumferential direction of the direction center axis.

[0008] The present invention has been made in view of the above, and can cope with the narrowing of the arrangement interval, and can be made conductive without impairing the characteristics of the conductive contact provided with a stretchable elastic portion. The purpose is to realize a conductive contact unit and a conductive contact holding the contact.

Means for solving the problem

[0009] In order to solve the above-described problems and achieve the object, the conductive contact cover according to claim 1 is provided. The knit is a conductive contact unit that is electrically connected to a circuit structure having a plurality of connection terminals by physically contacting the connection terminals. A plurality of first contact portions that are in contact with each other, a plurality of second contact portions that are electrically connected to the first contact portion, and a length formed between the first contact portion and the second contact portion. A plurality of conductive contacts formed elastically with an elastic portion which is elastically movable in a direction and is urged against the first contact portion and the second contact portion; and expansion and contraction of the elastic portion And a plurality of guide grooves into which a part of the conductive contact is slidably fitted in the expansion / contraction direction, and a part of the conductive contact is formed in the guide groove. And a holding portion that holds the conductive contact in a fitted state.

[0010] According to the invention of claim 1, a part of the conductive contact is held in a state of being fitted in the guide groove formed in the holding portion, and the guide groove is fitted in the expansion / contraction direction of the conductive contact. Since a part of the contact is formed so as to be slidable, when the elastic part constituting the conductive contact contracts, a part of the conductive contact fitted in the guide groove is expanded and contracted. Since the other part formed integrally with the forceful part also moves only in the expansion / contraction direction, deformation such as buckling or twisting that is partially displaced in the direction perpendicular to the expansion / contraction direction is conducted. It can be avoided that it occurs in the sexual contact.

[0011] In the conductive contact unit according to claim 2, in the above invention, the conductive contact is formed in a plate shape, and the holding portion is an end portion in a direction perpendicular to the expansion and contraction direction. One of the first guide member formed with a guide groove that is slidably fitted in the expansion / contraction direction, and the other end in a direction perpendicular to the expansion / contraction direction is slidably fitted in the expansion / contraction direction. And a second guide member in which a guide groove is formed.

[0012] In the conductive contact unit according to claim 3, in the above invention, the conductive contact penetrates in a direction perpendicular to the expansion / contraction direction, and has a width in a direction parallel to the expansion / contraction direction. An opening defined in correspondence with the expansion / contraction length of the elastic part is formed, and the holding part has one end of a part of the plurality of conductive contacts perpendicular to the expansion / contraction direction in the expansion / contraction direction. A first guide member formed with a guide groove that is slidably fitted in the other end of the plurality of conductive contacts, and the other end of the conductive contact in a direction perpendicular to the expansion / contraction direction is slidable in the expansion / contraction direction. A second guide member formed with a guide groove to be fitted in, and a plurality of The conductive contact is formed by a rod-like member that penetrates the opening formed in each of the conductive contacts, and a portion of the conductive contact that forms an extension of the opening is slidable in the expansion and contraction direction. And a third guide member formed with a guide groove to be fitted in.

[0013] Further, in the conductive contact unit according to claim 4, in the above invention, the conductive contact penetrates in a direction perpendicular to the expansion / contraction direction and has a length in a direction parallel to the expansion / contraction direction. An opening corresponding to the expansion / contraction length of the elastic part is formed, and the holding part is formed by a rod-shaped member that extends in a direction in which the plurality of conductive contacts are arranged and penetrates the opening. The guide groove is formed such that a portion of the conductive contact that forms the outer edge of the opening is fitted.

[0014] Further, the conductive contact unit according to claim 5 includes, in the above invention, a terminal that physically contacts the second contact portion provided in the conductive contact, and the conductive contact unit is provided via the terminal. And a signal output circuit for outputting a predetermined electrical signal to the sexual contact.

[0015] Further, the conductive contact according to claim 6 is a conductive contact that electrically connects a plurality of circuit structures to one of the plurality of circuit structures in use. A first contact portion that physically contacts, a second contact portion that is electrically connected to the first contact portion and physically contacts the other of the plurality of circuit structures in use; and An elastic part that supplies an elastic force to the first contact part and the second contact part, and a holding part that is rotatable about a predetermined axis during use when being used. A first connecting portion connected to the first contact portion and the elastic portion in a region that is symmetrical to each other; and a holding portion that is rotatable around a predetermined axis when used; The second contact portion and the elastic portion in a region that is symmetrical with respect to the center of rotation. Characterized in that a second connecting portion that is connected to.

[0016] According to the invention of claim 6, the first connecting portion has a structure in which the first contact portion and the elastic portion are in contact with each other in a region symmetrical to the predetermined rotation center. (1) The contact part and the elastic part move in opposite directions in conjunction with each other in the longitudinal direction. When the elastic part deforms in the contraction direction, the first contact part protrudes in the extension direction of the elastic part. It becomes. The relationship between the second contact portion and the elastic portion is the same, and as a result, the elastic portion is elastic in the direction in which it contacts the circuit structure with respect to the first contact portion and the second contact portion when extended. Since a force is supplied, it is possible to avoid deformations such as buckling and torsion accompanying the contraction of the elastic portion from occurring in the conductive contact.

The invention's effect

[0017] The conductive contact unit according to the present invention is held in a state in which a part of the conductive contact is fitted in a guide groove formed in the holding portion, and the guide groove extends and contracts in the extending direction of the conductive contact. Part of the conductive contact fitted in the guide groove is expanded and contracted when the elastic part of the conductive contact shrinks. It moves only in the direction, and other parts formed integrally with the forceful part also move only in the expansion / contraction direction, so deformation such as buckling and twisting that are partially displaced in the direction perpendicular to the expansion / contraction direction Can be prevented from occurring in the conductive contact.

[0018] In the conductive contact according to the present invention, the first connection portion has a structure in which the first contact portion and the elastic portion are in contact with each other in a region symmetrical to the predetermined rotation center. The first contact part and the elastic part move in opposite directions in conjunction with each other in the longitudinal direction, and when the elastic part deforms in the contraction direction, the first contact part protrudes in the extension direction of the elastic part. It becomes. The relationship between the second contact portion and the elastic portion is the same. As a result, when the elastic portion is stretched, the elastic force is applied in the direction in which the first contact portion and the second contact portion come into contact with the circuit structure. As a result, it is possible to avoid the occurrence of deformations such as buckling and twisting due to the contraction of the elastic portion in the conductive contact.

Brief Description of Drawings

FIG. 1 is a schematic diagram showing an overall configuration of a conductive contact unit according to a first embodiment.

FIG. 2 is a schematic diagram showing a structure of a conductive contact constituting a conductive contact unit.

FIG. 3 is a schematic view showing a structure of a holding portion constituting the conductive contact unit.

[FIG. 4] FIG. 4 is a schematic view showing a manner of holding a conductive contact by a holding portion.

FIG. 5 is a schematic diagram for explaining the operation of the conductive contact. [Fig. 6] Fig. 6 is a graph showing the measurement results regarding the characteristics of the conductive contact.

FIG. 7 is a graph showing measurement results regarding the characteristics of the conductive contact.

FIG. 8 is a graph showing measurement results regarding the characteristics of the conductive contact.

FIG. 9 is a schematic diagram showing a configuration of a conductive contact unit according to the second embodiment.

FIG. 10 is a schematic diagram showing a configuration of a conductive contact constituting a conductive contact unit.

FIG. 11 is a schematic diagram showing a configuration of a third guide member constituting the holding portion.

FIG. 12 is a schematic diagram showing how the conductive contact is held by the first, second and third guide members constituting the holding portion.

FIG. 13 is a schematic diagram showing a structure of a conductive contact constituting the conductive contact unit according to the third embodiment.

FIG. 14 is a schematic diagram showing an overall configuration of a conductive contact unit.

FIG. 15 is a schematic diagram for explaining the operation of the conductive contact.

FIG. 16 is a schematic diagram showing a modification of the third embodiment.

Explanation of symbols

1, 5, 8 Conductive contact

la, 8a First contact

lb, 8b Second contact

LC, 8c elastic part

ld, le, 5a, 5c connection

2, 6, 9 Holding part

2a, 6a First guide member

2b, 6b Second guide member

2c ゝ 2d Holding plate

2e, 6e guide groove

3 Signal output circuit

3a terminal 5b, 5d opening

6c Third guide member

6d pin member

8d 1st connection

8e Second connection

8f, 8g fulcrum

8h, 8i spacing member

9a, 9b Rotating shaft

11 Circuit structure

11a connection terminal

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the best mode for carrying out a conductive contact unit and a conductive contact according to the present invention (hereinafter referred to as “embodiment”) will be described in detail with reference to the drawings. To do. Note that the drawings are schematic, and it should be noted that the relationship between the thickness and width of each part, the ratio of the thickness of each part, and the like are different from the actual ones. Of course, parts with different dimensional relationships and ratios are included!

[0022] (Embodiment 1)

First, the conductive contact unit according to the first embodiment will be described. FIG. 1 is a schematic diagram showing the appearance of the conductive contact unit according to the first embodiment. As shown in FIG. 1, the conductive contact unit according to the first embodiment has a plurality of conductive contacts 1 displayed only at the end in FIG. 1, and a plurality of conductive contacts 1. A holding unit 2 and a signal output circuit 3 electrically connected to the conductive contact 1 and capable of outputting a predetermined electrical signal to the conductive contact 1 are provided.

[0023] The signal output circuit 3 is for outputting a predetermined electric signal to a circuit structure (for example, an inspection target in an electrical characteristic inspection) to be connected via the conductive contact 1. As a specific configuration of the signal output circuit 3, an electric signal generation function may be provided, an electric signal generated by another device is input, and the input electric signal is conducted. It is good also as a structure output with respect to the sex contact 1.

The conductive contact 1 is for electrically connecting a circuit structure (for example, a semiconductor integrated circuit) to be inspected and the signal output circuit 3. Specifically, in the conductive contact 1, a contact portion that contacts the circuit structure and the signal output circuit 3 and an elastic portion that urges and urges against the contact portion are integrally formed by a plate-like conductive member. Has a structured

FIG. 2 is a schematic diagram showing the structure of the conductive contact 1. As shown in FIG. 2, the conductive contact 1 has a first contact portion la for physically contacting a predetermined circuit structure at both ends in the longitudinal direction, and a first contact portion physically contacting the signal output circuit 3. 2 contact parts lb are formed, and the first contact part la and the second contact part lb can be extended and contracted in the longitudinal direction, with respect to the first contact part la and the second contact part lb. It is equipped with an elastic part lc that has the function of urging and energizing. The conductive contact 1 is disposed between the first contact portion la and the elastic portion lc, and has a connection portion Id that connects the first contact portion la and the elastic portion lc, and a second contact portion lb. And the connecting portion le connecting the second contact portion lb and the elastic portion lc. Formed to be. In the following description, for ease of understanding, the horizontal direction in FIG. 2 is referred to as the “contracting direction of the conductive contact 1”, and the vertical direction in FIG. The direction perpendicular to the paper surface in FIG. 2 is referred to as “the thickness direction of the conductive contact 1”.

Next, the holding unit 2 will be described. As shown in FIG. 1, the holding portion 2 is formed with predetermined guide grooves (not shown in FIG. 1), and the first guide member 2a disposed at both ends in the width direction with respect to the conductive contact 1 And a second guide member 2b, and holding plates 2c and 2d which are disposed at both ends in the expansion / contraction direction with respect to the conductive contact 1 and hold the conductive contact 1 inside. Note that the first guide member 2a, the second guide member 2b, and the holding plates 2c, 2d constituting the holding portion 2 are electrically connected to the conductive contact 1 to prevent a short circuit from occurring. The insulating material is preferably used, but for example, only a portion of the surface that can come into contact with the conductive contact 1 (for example, a guide groove 2e described later) may be coated with an insulating coating.

[0027] Each of the holding plates 2c and 2d has the conductive contact 1 held by the holding portion 2 extended by the elastic portion lc. This is to prevent a positional shift in the contraction direction (longitudinal direction). Specifically, the holding plates 2c and 2d are arranged at positions where they contact the elastic portions lc of the connecting portions ld and le of the conductive contact 1 held by the holding portion 2 and the ends in the expansion / contraction direction, respectively. It has a structure in which an opening for projecting the first contact portion la and the second contact portion lb is formed.

[0028] The first guide member 2a and the second guide member 2b have a function of positioning the plurality of conductive contacts 1 with respect to an in-plane direction perpendicular to the expansion / contraction direction, and the expansion / contraction operation of the conductive contact 1 It has a function to guide the conductive contact 1 at the time. FIG. 3 is a schematic diagram for explaining the structure of the first guide member 2a. In the first embodiment, since the second guide member 2b has substantially the same structure as the first guide member 2a, the following explanation regarding the first guide member 2a is also applicable to the second guide member 2b in principle. Applicable.

As shown in FIG. 3, the number of guide grooves 2e equal to the number of conductive contacts 1 held by the holding portion 2 is formed in the first guide member 2a. The guide groove 2e has a shape in which the cross-sectional shape can be fitted in the direction perpendicular to the expansion / contraction direction of the conductive contact 1, more specifically, the end of the conductive contact 1 in the width direction. However, the groove having a strong cross-sectional shape extends in the direction of expansion and contraction of the conductive contact 1. In the first embodiment, since the conductive contact 1 is formed in a plate shape, the cross-sectional shape of the guide groove 2e is formed so that at least the width is substantially equal to the plate thickness of the conductive contact 1. Has been. Further, the guide groove 2e is formed so as to reduce the sliding resistance with the end portion of the inserted conductive contact 1, and the conductive contact 1 is fitted slidably in the expansion / contraction direction. It will be.

[0030] Since the second guide member 2b has the same structure as the first guide member 2a as described above, the guide groove 2e is formed in the second guide member 2b in the same manner. Therefore, as shown in FIG. 4, the conductive contact 1 has both end portions in the width direction on the first guide member 2a and the second guide member 2b, respectively, over the entire expansion / contraction direction of the conductive contact 1. It is held by the holding part 2 in a state where it is always fitted in the formed guide groove 2e.

[0031] The first guide member 2a and the second guide member 2b are formed by, for example, low thermal expansion grease, and the guide groove 2e is formed by, for example, dicing. In addition, the first guide member 2a and the second guide member 2b are configured by forming a base material with an insulating material other than grease, for example, ceramics such as Al 2 O and SiO, Si, etc., etching, etc. By The guide groove 2e may be formed.

Next, the operation of the guide groove 2e formed in the first guide member 2a and the second guide member 2b will be described. FIG. 5 is a schematic diagram for explaining the operation of the guide groove 2e. In FIG. 5, the description will be given as appropriate with the center of gravity of the conductive contact 1 as the origin, the width direction as the X axis, the thickness direction as the y axis, and the expansion / contraction direction as the z axis.

[0033] As described above, both ends of the conductive contact 1 in the width direction (x-axis direction) are fitted into the guide groove 2e, and the conductive contact 1 is expanded and contracted (z-axis direction). Since it has a stretched structure, the fitted portion is held in a state in which it can slide in the expansion and contraction direction. That is, as shown in FIG. 5, both ends in the width direction of the conductive contact 1 (shown by hatching) are fitted into the guide groove 2e, while the degree of freedom in the z-axis direction is secured. The freedom of movement in the X-axis and y-axis directions will be lost.

[0034] Further, as described above, since the conductive contact 1 is integrally formed, the influence of the movement restriction at both ends by the guide groove 2e is also applied to other portions of the conductive contact 1. It reaches. Therefore, as with both ends in the width direction, the entire conductive contact 1 can move in the z-axis direction, but loses freedom of movement in the X-axis direction and the y-axis direction. For this reason, the conductive contact 1 only undergoes a change in shape (ie, contraction or extension) due to displacement in the z-axis direction when an external force is applied, and the X-axis direction and the y-axis direction. It will expand and contract without causing any change in shape due to displacement.

Next, advantages of the conductive contact unit according to the first embodiment will be described. In the conductive contact unit according to the first embodiment, since the conductive contact 1 is held in a state where a part is fitted in the guide groove 2e extending in the expansion / contraction direction, an external force is not applied during use. Even if given, it is possible to prevent buckling and twisting from occurring. As described with reference to FIG. 5, the conductive contact 1 according to the first embodiment is formed by holding both ends in the X-axis direction in the state of being fitted into the guide groove 2e. Any part of 1 will not be displaced in the X-axis and y-axis directions, but only in the z-axis direction. Buckling and torsion that can occur remarkably in a plate-shaped conductive contact is a change in shape with displacement in the X-axis direction or displacement in the Z- and y-axis directions for part or all of the conductive contact 1 Therefore, the conductive contact 1 is held using the guide groove 2e. Thus, the first embodiment has an advantage that it is possible to prevent the conductive contact 1 from being buckled and twisted during use.

In Embodiment 1, since the conductive contact 1 is held using the guide groove 2e having a groove structure, the conductive contact 1, the first guide member 2a, and the second guide member There is also an advantage that the contact area with 2b can be reduced and the sliding resistance generated between the first guide member 2a and the like can be reduced. For example, when the conductive contact 1 is accommodated in the through hole as in the prior art, the outer surface of the conductive contact and the inner surface of the through hole are in contact over the entire circumference. The contact area between the outer surface of the conductive contact and the inner surface of the through hole increases, and it is difficult to reduce the sliding resistance. On the other hand, in the first embodiment, since the conductive contact 1 is in contact with the first guide member 2a and the second guide member 2b only at the end in the width direction, the contact area is greatly increased. Therefore, the expansion and contraction of the conductive contact 1 can be performed smoothly.

[0037] Figs. 6 to 8 show that the conductive contact 1 constituting the conductive contact unit according to the first embodiment does not cause buckling or the like and the sliding resistance is reduced. It is a graph that quantitatively shows the resulting advantages. 6 shows the relationship between the load applied to the conductive contact 1 held by the guide groove 2e and the expansion / contraction length of the conductive contact 1, and FIG. 7 shows the relationship between the expansion / contraction length and the electrical resistance. FIG. 8 shows the relationship between the load applied to the conductive contact 1 and the electrical resistance.

[0038] First, the graph shown in FIG. 6 will be described. In Fig. 6, curve 1 is the conductive contact 1

1

Shows the measurement results when the wire contracts.Curve 1 shows when the conductive contact 1 is extended.

2

Curve 1 shows the conductive contact 1 at the design stage.

3 is a curve showing theoretical characteristics when a single conductive contact element expands and contracts without causing buckling and twisting. As can be seen from the graph in Figure 6, curves 1-1 are all high.

13

It is shown that the conductive contact 1 in the first embodiment can realize the characteristics almost as designed values. In particular, in the past, the panel characteristics at the time of contraction deviated from the design value force due to the effects of buckling, torsion, etc., but in this Embodiment 1, the panel characteristics at the time of contraction are rather stretched. Because the guide groove 2e functions more effectively than the panel value at the time, and the guide groove 2e functions effectively, the occurrence of buckling and torsion is effective. It is clear that it is prevented.

The graph shown in FIG. 6 also shows that the frictional force between the conductive contact 1 and the first guide member 2a and the second guide member 2b becomes a small value. The design value shown in curve 1 is

Three

This shows the characteristics of the conductive contact when the conductive contact 1 operates alone, that is, when it is not held by the holding portion 2. For curve 1, which shows the characteristic,

3 Curves 1 and 1 showing the characteristics when the end is fitted in the guide groove 2e match with high accuracy.

twenty three

Therefore, it is clear that the sliding friction caused by the first guide member 2a and the second guide member 2b with respect to the expansion and contraction operation of the conductive contact 1 is suppressed to a level that can be almost ignored.

Next, the graph shown in FIG. 7 will be described. The graph shown in FIG. 7 is a graph showing the relationship between the expansion / contraction length of the conductive contact 1 and the electrical resistance between the signal output circuit 3 electrically connected via the conductive contact 1 and the circuit structure. is there. As described above, the conductive contact 1 is electrically connected by the physical contact of the first contact portion la and the second contact portion lb with the connection terminal provided in the circuit structure and the terminal provided in the signal output circuit, respectively. To realize. For this reason, the electrical resistance value shown in the graph includes the electrical resistance between the first contact portion la and the second contact portion lb in the conductive contact 1, and the connection terminal of the circuit structure and the signal output circuit terminal. The value is represented by the sum of the electrical contact resistance at the contact portion. Note that curve 1 in FIG. 7 is a curve showing the result when the conductive contact 1 contracts, and curve 1 is

4 5 is a curve showing the result when the conductive contact 1 is extended.

[0041] As shown in FIG. 7, the conductive contact 1 according to the first embodiment has a case where the amount of expansion / contraction from the natural length is almost zero, even if it is displaced at the time of contraction and expansion. It is shown that a stable electric resistance value can be obtained. Similarly to the case of Fig. 6, in the graph shown in Fig. 7, the value at the time of contraction and the value at the time of expansion are almost the same, effectively preventing the phenomenon of buckling and twisting that can occur significantly during contraction. It is clear that it is made.

[0042] Finally, the graph shown in FIG. 8 will be described. The graph shown in FIG. 8 shows the relationship between the external force applied to the conductive contact 1 and the electrical resistance. The electrical resistance in Fig. 8 is defined in the same way as in Fig. 7.Curve 1 shows the result when conductive contact 1 contracts.

6

Curve 1 is a curve showing the result when the conductive contact 1 is extended. Shown in Figure 8 As can be seen, the conductive contact 1 in the first embodiment also shows almost the same characteristics when extended and contracted in terms of the relationship between the external force and the electric resistance. It is shown to achieve resistance.

As described above with reference to FIGS. 6 to 8, in the first embodiment, since the conductive contact 1 is formed in a plate shape, the physical strength in the plate thickness direction is inferior alone. Nevertheless, the use of the guide groove 2e has the advantage that excellent characteristics can be realized. Specifically, in the first embodiment, the occurrence of buckling and twisting in the conductive contact 1 is suppressed by providing the first guide member 2a and the second guide member 2b having the guide groove 2e. Therefore, since the sliding friction associated with the expansion and contraction of the conductive contact 1 can be reduced, the conductive contact 1 has an advantage that it can realize excellent panel characteristics and electrical characteristics.

Further, the conductive contact unit according to the first embodiment has an advantage that the arrangement interval of the conductive contacts 1 can be easily reduced. That is, in the first embodiment, the width of the guide groove 2e having a function of holding the conductive contact 1 (the width in the y-axis direction in FIG. 5) is approximately the same as the plate thickness of the conductive contact 1. The distance between the guide grooves 2e adjacent to each other can be set to any small value as long as the insulation between the adjacent conductive contacts 1 can be sufficiently secured. Therefore, the conductive contact unit according to the first embodiment can reduce the arrangement interval of the conductive contacts 1 by stacking the plurality of conductive contacts 1 in the plate thickness direction. Therefore, it is possible to sufficiently cope with the narrowing of the arrangement interval of the connection terminals provided in the circuit structure to be connected.

[0045] Further, in the first embodiment, it is possible to effectively suppress the occurrence of buckling or twisting when the conductive contact 1 formed in a plate shape as described above expands and contracts. . Therefore, it is not necessary to consider the deformation of the conductive contact 1 caused by buckling or twisting when deriving the arrangement interval of the conductive contacts 1 sufficient to ensure the insulation between adjacent ones. Therefore, in the conductive contact unit according to the first embodiment, when determining the arrangement interval, each conductive contact 1 has a guide groove 2e in the thickness direction (y-axis direction in FIG. 5). It is possible to design the structure on the assumption that it is always located in the area defined by the width of the. That is, in the first embodiment, even in the case where a twist or the like occurs, a margin is provided in the arrangement interval in order to ensure insulation between the adjacent conductive contacts 1. Therefore, it is possible to reduce the arrangement interval by the amount that is necessary.

Furthermore, in the first embodiment, it is possible to reduce the arrangement interval due to the conductive contacts 1 being held not by the through holes but by the guide grooves 2e. That is, when the conductive contact 1 is held by the through-hole as in the prior art, the interval between the adjacent through-holes is secured to some extent in order to maintain the physical strength of the substrate or the like forming the through-hole. It is necessary to keep. On the other hand, when the groove is formed in the plate-shaped member, the influence on the physical strength of the base material is low compared to the case where the through hole is formed. Even so, the decrease in physical strength of the first guide member 6a and the second guide member 6b can be almost ignored. Therefore, in the first embodiment, since the restriction on the holding portion 2 side regarding the formation of the guide groove 2e is lower than in the case of forming the through hole, the guide groove 2e with a narrower interval can be formed. Has the advantage.

[0047] Further, the conductive contact unit according to the first embodiment has an advantage that it is easy to manufacture. As described above, the first embodiment has a structure using the guide groove 2e that is easier to manufacture than the through-hole that does not require the formation of the through-hole. Therefore, the first guide member 6a and the second guide member 6b constituting the holding part 2 can be easily manufactured. In the assembly process, the process of housing the conductive contact 1 in the holding part 2 is completed by fitting the end part into the guide groove 2e. Therefore, when the conductive contact unit according to the first embodiment is assembled, if the conductive contact is inserted into the minute through hole, it can be easily assembled without having to go through a complicated process. It is. From the above, the conductive contact unit according to the first embodiment is easy to manufacture because it employs a configuration in which the conductive contact 1 is held by the guide groove 2e, and the manufacturing cost can be reduced. Will have advantages.

[0048] (Embodiment 2)

Next, the conductive contact unit according to the second embodiment will be described. The conductive contact unit according to the second embodiment has the same basic structure as that of the first embodiment, but has a configuration in which the conductive contact is held differently from that of the first embodiment. In the following description, components having the same reference numerals as those in the first embodiment have the same functions as those in the first embodiment unless otherwise specified. FIG. 9 is a schematic diagram showing a configuration of the conductive contact unit according to the second embodiment. As shown in FIG. 9, the conductive contact unit according to the second embodiment includes a conductive contact 5 whose one end is in contact with a circuit structure such as an inspection target, and a holding unit 6 that holds the conductive contact 5. And a signal output circuit 3 that outputs a predetermined electrical signal to the circuit structure via the conductive contact 5.

The conductive contact 5 has the same structure as the conductive contact 1 in Embodiment 1 as a basic structure, and specifically has the structure shown in FIG. As shown in FIG. 10, the conductive contact 5 includes the first contact portion la, the second contact portion lb, and the elastic portion lc, as in the case of the conductive contact 1 of the first embodiment. An opening 5b is formed in the connecting part 5a that connects the contact part la and the elastic part lc, and an opening 5d is formed in the connecting part 5c that connects the second contact part lb and the elastic part lc. The connection parts 5a and 5c have the same structure as the connection parts ld and le in the first embodiment except that the opening is formed.

[0051] The opening 5b is for penetrating a pin member 6d to be described later when held by the holding portion 6. Further, the opening 5d is for inserting a third guide member 6c, which will be described later, and the third guide member 6c is penetrated both when the conductive contact 5 is most expanded and contracted. The opening 5d is formed to have a width corresponding to the expansion / contraction length with respect to the expansion / contraction direction of the conductive contact 5 so as to maintain the above state.

[0052] Similar to the holding unit 2 in the first embodiment, the holding unit 6 is for holding the conductive contact 5 in a slidable state in the expansion and contraction direction. Specifically, the holding portion 6 is formed in each of the first guide member 6a and the second guide member 6b disposed at both ends in the width direction with respect to the conductive contact 5 and the plurality of conductive contacts 5. A third guide member 6c inserted through the opening 5d, and a pin member 6d inserted through the opening 5b formed in each of the conductive contacts 5. These components are fixed to each other by a predetermined fixing member (not shown). This is the same when the conductive contact 5 expands or contracts.

[0053] The first guide member 6a and the second guide member 6b are each formed with a guide groove 2e in which the widthwise end of the conductive contact 5 is slidably fitted in the expansion / contraction direction, as in the first embodiment. On the other hand, the arrangement interval of the guide grooves 2e is approximately twice the arrangement interval of the conductive contacts 5, and is formed in the guide grooves 2e and the second guide member 6b formed in the first guide member 6a. The guide grooves 2e are formed so as to be alternately positioned in the plate thickness direction (the direction in which the conductive contacts 5 are arranged, the y-axis direction in FIG. 5).

[0054] The third guide member 6c is formed by a rod-like member so as to be inserted through the opening 5d formed in the conductive contact 5. The third guide member 6c has a predetermined guide groove 6e formed in the same manner as the first guide member 6a and the second guide member 6b, and a part of the conductive contact 5 is fitted in the guide groove 6e. By holding in a state, it has a function of holding the conductive contact 5 in a state in which it can slide in the expansion and contraction direction.

FIG. 11 is a schematic diagram showing the structure of the third guide member 6c. As shown in FIG. 11, a guide groove 6e extending in a direction parallel to the expansion / contraction direction of the conductive contact 5 is formed on the side surface of the third guide member 6c formed in a rod shape as a whole. . As schematically shown in FIG. 11, the portion of the conductive contact 5 that forms the outer edge of the opening 5d is fitted in the guide groove 6e, and the forceful portion is fitted. The conductive contact 5 is held in a state in which it can slide in a telescopic direction.

[0056] The pin member 6d is formed of a rod-like member so as to be inserted through the opening 5b formed in the conductive contact 5. Unlike the third guide member 6c, the pin member 6d has a structure in which the outer diameter is substantially equal to the diameter of the opening 5b, and the conductive contact 5 is fixed in the expansion / contraction direction and the width direction by the pin member 6d. Become. Note that the pin member 6d that functions is a substitute for the holding plates 2c and 2d in the first embodiment, and is at least theoretically essential for the conductive contact unit according to the second embodiment. is not.

[0057] Fig. 12 is a schematic diagram showing a state of holding the conductive contact 5 by the first guide member 6a, the second guide member 6b, and the third guide member 6c, and the conductive contact according to the second embodiment. It is the schematic diagram which looked at the child unit from the circuit structure side such as the inspection object. As shown in FIG. 12, the plurality of conductive contacts 5 arranged in the plate thickness direction are each formed by the third guide member 6c and the first guide member 6a or the second guide member 6b at the opening 5d. Retained. That is, in the second embodiment, the plurality of conductive contacts 5 to be held are expanded and contracted by the guide grooves 6e and 2e partially formed in the third guide member 6c and the first guide member 6a, respectively. While being slidably held, the remaining portion is slidably held in the expansion / contraction direction by the guide grooves 6e and 2e formed in the third guide member 6c and the second guide member 6b, respectively. To do.

[0058] It should be noted that regarding the conductive contact 5, the one held by the first guide member 6a and the third guide member 6c and the one held by the second guide member 6b and the third guide member 6c may be different. However, in the first embodiment, the same structure is used. As shown in FIG. 10, the conductive contact 5 has the openings 5b and 5d formed at positions decentered in advance in the width direction. Therefore, by appropriately setting the distance between the third guide member 6c and the first guide member 6a and the second guide member 6b, the conductive contact 5 held by the first guide member 6a. On the other hand, the conductive contact 5 held by the second guide member 6b is rotated by 180 ° about the axis of the expansion / contraction direction passing through the openings 5b and 5d, so that the same structure is obtained. Despite being used, it is held by the second guide member 6b and the third guide member 6c. In other words, by arranging the eccentric openings 5b and 5c in the plate thickness direction in an inverted state, for example, the conductive contacts 5 positioned at odd numbers in the plate thickness direction can be connected to the first guide member 6a and the third guide member 6a. The even-numbered conductive contacts 5 held by the guide member 6c are held by the second guide member 6b and the third guide member 6c.

Next, advantages of the conductive contact unit according to the second embodiment will be described. First, the conductive contact unit according to the second embodiment is configured to hold the conductive contact 5 in the holding portion 6 in a state where the conductive contact 5 is fitted in the guide grooves 2e and 6e, as in the first embodiment. Since it is adopted, the conductive contact 5 can be expanded and contracted with reduced sliding friction that does not cause twisting and buckling. In addition, since the conductive contact 5 is held by being fitted in the guide grooves 2e and 6e, the conductive contact 5 is compared with the case where the conductive contact is held by the through hole. It is possible to reduce the arrangement interval.

In addition, the conductive contact unit according to the second embodiment can further reduce the arrangement interval of the conductive contacts 5. As described in the first embodiment, when the conductive contact 5 is held by the guide groove 2 e or the like, it is held by the through hole. It is possible to narrow the arrangement interval of the conductive contacts 5 than in the case. However, even when the guide groove 2e is used, the arrangement interval can be made infinitely narrow, which means that the minimum value of the arrangement interval of the conductive contacts 5 is defined by the limit of the formation interval of the guide groove 2e. .

In contrast to this, in the second embodiment, the first guide member 6a and the second guide member 6b are provided with guide grooves 2e corresponding to only a part and the remaining part of the plurality of conductive contacts 5 to be held respectively. Compared with the case where the guide grooves 2e are formed corresponding to all of the conductive contacts 5, the distance between the adjacent guide grooves 2e is increased in the case of the same arrangement interval. Is possible. By adopting a powerful configuration, for example, when the guide grooves 2e are alternately formed in the arrangement direction of the conductive contacts 5 as shown in FIG. 12, each of the first guide member 6a and the second guide member 6b The distance between the guide grooves 2e formed in the first and second guide members 2a and 2b in the first embodiment can be set to a value almost twice that of the first guide member 2a and the second guide member 2b. Therefore, the conductive contact unit according to the second embodiment has an advantage that the arrangement interval of the conductive contacts 5 can be further reduced as compared with the conductive contact unit of the first embodiment. The third guide member 6c is formed with guide grooves 6e having an arrangement interval equal to the arrangement interval of the conductive contacts 5, but the third guide member 6c formed by a rod-like member is guided by injection molding, for example. Since it is possible to realize a shape including the groove 6e, it can be easily narrowed as compared with the guide groove 2e formed by etching or the like on the plate-like body, so that there is substantially no problem.

Furthermore, in the conductive contact unit according to the second embodiment, the first guide member 6a and the second guide member 6b include guide grooves 2e that are wider than the arrangement interval of the conductive contacts 5. Thus, there is an advantage that the holding portion 6 can be easily manufactured. In other words, when the conductive contacts 5 are arranged at the same interval, it is sufficient to form the guide grooves 2e at, for example, twice the interval in the second embodiment. If the pattern can be easily formed, the holding part 6 can be easily manufactured.

[0063] In addition, the conductive contact unit according to the second embodiment can reduce the overlapping area in the arrangement direction by arranging the adjacent conductive contacts 5 so as to be reversed. For this reason, it is arranged so that parasitic capacitance is generated between adjacent conductive contacts 5. Even when the row spacing is small, there is an advantage that the capacitance value can be reduced because the overlapping area is small.

[Embodiment 3]

Next, the conductive contact unit according to the third embodiment will be described. The conductive contact unit according to Embodiment 3 has a configuration in which twisting and buckling of the conductive contact during use is suppressed by devising the structure of the conductive contact itself. .

FIG. 13 is a schematic diagram showing a configuration of a conductive contact constituting the conductive contact unit according to the third embodiment. As shown in FIG. 13, the conductive contact 8 constituting the conductive contact unit is a first contact portion that is in contact with a connection terminal provided in a circuit structure such as an inspection object, as in the first and second embodiments. 8a, a second contact portion 8b for electrical connection with the signal output circuit 3, and the first contact portion 8a and the second contact portion 8b formed in the same manner as in the first and second embodiments. And a first contact portion 8a and a second contact portion 8b. The conductive contact 8 includes a first connection portion 8d that connects the first contact portion 8a and the elastic portion 8c, and a second connection portion that connects the second contact portion 8b and the elastic portion 8c. 8e, each part is integrally formed and has a plate-like shape as a whole.

[0066] The first connection portions 8d and 8e are the connection portions in the first and second embodiments in that they connect the first contact portion 8a and the elastic portion 8c, and the second contact portion 8b and the elastic portion 8c, respectively. Although it has the same configuration as ld and le, the connection mode is different from that of the first and second embodiments. Specifically, the first connecting portion 8d is in a direction non-parallel to the expansion / contraction direction of the elastic portion 8c, for example, a direction perpendicular to the expansion / contraction direction in the natural state (the length of the elastic portion 8c is a natural length) ( In addition to having a structure extending a predetermined distance in the width direction in FIG. 13, it is formed so as to be rotatable around a predetermined rotation axis when held by a holding portion 9 described later.

[0067] Specifically, the first connection portion 8d has a fulcrum portion 8f that is an arc-shaped notch structure for coming into contact with a side surface of a rotating shaft 9a (described later) constituting the holding portion 9 when held. Thus, the fulcrum part 8f is held by the holding part 9 so as to be rotatable with respect to the center of the rotating shaft 9a in a state where the fulcrum part 8f is in contact with the side surface of the rotating shaft 9a. Then, the first connecting portion 8d includes the elastic portion 8c and the elastic portion 8c in a region that is mutually symmetrical with respect to the rotation center in the portion extended by a predetermined distance. It has a structure connected to the first contact portion 8a. By having a structure connected to both in a region that is symmetric with respect to the center of rotation, for example, when the first connecting portion 8d rotates in the clockwise direction, the elastic portion 8c expands to the right in FIG. Thus, the first contact portion 8a moves in the left direction. This is because, for example, when a pressing force is applied to the first contact portion 8a in the left direction in the drawing, the first connection portion 8d moves in the clockwise direction with respect to the rotation center, and the elastic portion 8c moves in the right direction in the drawing. Means to stretch. Further, when the elastic portion 8c is stretched more than the natural length, the first connecting portion 8d is counteracted by the elastic force in the contracting direction (left direction in the drawing) of the elastic portion 8c being applied to the first connecting portion 8d. It means that the first contact portion 8a receives pressure in the protruding direction (right direction in the drawing) based on the couple force in the clockwise direction.

[0068] This structure is the same for the second connection portion 8e. That is, the second connection portion 8e has a structure that is not parallel to the expansion / contraction direction of the elastic portion 8c, for example, a predetermined length in a direction perpendicular to the elastic portion 8c, and has a predetermined rotation shaft 9b ( It has a structure in which a fulcrum portion 8g, which is an arc-shaped notch structure that comes into contact with the side surface portion of the rotating shaft 9b, is formed so as to be rotatable with respect to the center of the shaft (described later). The second connection portion 8e has a structure connected to each of the elastic portion 8c and the second contact portion 8b in a region symmetric with respect to the rotation center, and the expansion / contraction direction (that is, the width of the conductive contact 8). The direction of deformation of the elastic portion 8c and the direction of displacement of the second contact portion 8b are opposite to each other in the direction perpendicular to the direction and the plate thickness direction (lateral direction in FIG. 13).

[0069] The conductive contact 8 has a structure in which spacing members 8h and 8i having a predetermined thickness in the thickness direction are arranged in the vicinity of the fulcrum portions 8f and 8g. The interval holding members 8h and 8i are for holding the interval between the adjacent conductive contacts 8 when the plurality of conductive contacts 8 are held by the holding portion 9. That is, in the conductive contact unit according to the third embodiment, a plurality of conductive contacts 8 are stacked in the plate thickness direction (substantially perpendicular to the paper surface of FIG. 13) as in the first and second embodiments. However, the distance between adjacent conductive contacts 8 must be set to a predetermined value corresponding to the distance between the connection terminals formed in the circuit structure to be inspected. There is. In the third embodiment, in order to define the interval between the adjacent conductive contacts 8, for example, an interval holding portion configured by an insulating member. A structure in which the materials 8h and 8i are arranged near the fulcrum parts 8f and 8g is adopted.

Next, the overall configuration of the conductive contact unit according to the third embodiment including the conductive contact 8 shown in FIG. 13 will be described. FIG. 14 is a schematic diagram illustrating an overall configuration of the conductive contact unit according to the third embodiment. As shown in FIG. 14, the conductive contact unit according to the third embodiment employs a configuration in which a plurality of the conductive contacts 8 shown in FIG. Specifically, the conductive contact unit according to the third embodiment includes a plurality of conductive contacts 8 arranged in the plate thickness direction, and fulcrum portions 8f formed on the respective conductive contacts 8. The rotating shaft 9a is in contact with the outer edge of the notch structure, and the holding portion 9 is provided with the rotating shaft 9b in contact with the outer edge of the notch structure as the fulcrum portion 8g. Note that FIG. 14 shows an example in which the holding unit 9 is configured by only the rotating shafts 9a and 9b in order to simplify the structure, but in addition to the rotating shafts 9a and 9b, a plurality of conductive contacts 8 are provided inside. It is good also as providing the predetermined exterior structure etc. which are accommodated in. In addition, although not shown in FIG. 14, the third embodiment also includes a signal output circuit 3 electrically connected to the conductive contact 8 as in the first and second embodiments.

The rotating shafts 9a and 9b have a function of holding the plurality of conductive contacts 8 in a state where the first connecting portions 8d and 8e are rotatable. Specifically, each of the rotating shafts 9a and 9b is formed by a cylindrical member having a longitudinal direction in the plate thickness direction of the conductive contact, and slides with each of the fulcrum portions 8f and 8g on the side surface. It has a mechanism to hold the conductive contact 8 in a freely contacted state. For this reason, the conductive contact 8 is held by the holding portion 9 with the first connecting portions 8d and 8e being rotatable around the rotation shafts 9a and 9b, respectively. Note that the rotational shafts 9a and 9b are fixed to each other by a fixing member (not shown), and the applied positional relationship is maintained regardless of whether or not the conductive contact 8 is operated.

Next, the operation of the conductive contact unit according to the third embodiment will be described. As described above, the conductive contact unit has an electrical connection to the circuit structure by the physical contact of the conductive contact 8 with the connection terminals formed on the circuit structure to be inspected. It is realized. In order to achieve a good electrical connection to the connection terminal of the circuit structure, the first contact portion 8a provided in the conductive contact 8 is a predetermined push. It is necessary to reduce electrical contact resistance by contacting the connection terminals with pressure.

In addition, a structure for supplying a strong pressing force is required for the conductive contact 8. In the third embodiment, the principle of supplying a pressing force is different from that in the first and second embodiments.

FIG. 15 is a schematic diagram for explaining the operation of the conductive contact unit. As shown in FIG. 15, when the conductive contact unit is used, the conductive contact 8 physically contacts the connection terminal 11a provided in the circuit structure 11 at the first contact portion 8a, and (2) Physical contact with terminal 3a of signal output circuit 3 at contact portion 8b. Since a pressing force is applied to the first contact portion 8a and the second contact portion 8b from each of the connection terminal 11a and the terminal 3a, the first connection portions 8d and 8e are respectively connected to the clock as shown in FIG. It rotates by a predetermined angle in the direction of rotation and counterclockwise. For this reason, the length of the elastic portion 8c is longer than the natural length, and the elastic portion 8c generates an elastic force in the compression direction when the length in the longitudinal direction is extended.

[0074] For this reason, the first connection portions 8d and 8e receive couple forces in the counterclockwise direction and the clockwise direction, respectively, based on the elastic force from the elastic portion 8c at the connection portion with the elastic portion 8c. . The coupled force is transmitted to the first contact portion 8a and the second contact portion 8b via the first connection portions 8d and 8e. The first contact portion 8a and the second contact portion 8b are connected to the connection terminals l la, A pressing force is applied in the direction approaching terminal 3a. For this reason, physical contact is made with a predetermined pressing force applied to the contact terminals l la and 3a, and the electrical contact resistance to the connection terminals l la and 3a is reduced. Will be electrically connected.

As described above, in the third embodiment, the conductive contact 8 differs from the first and second embodiments in that the first contact portion 8a and the second contact portion 8a are contacted with the connection terminal lla and the terminal 3a. When the contact portion 8b is displaced, the elastic portion 8c expands, and the elastic force generated when the elastic portion 8c tries to return to the natural length causes the first contact portion 8a and the second contact portion 8b to It has a structure for energizing. The advantages of the conductive contact unit according to the third embodiment resulting from the difference in operation will be described below.

In the first place, buckling, twisting, and the like, which have been regarded as problems in the past, are caused when an external force acts so that the length in the longitudinal direction contracts. For example, in a conductive contact formed in a plate shape, It can not be absorbed only by the deformation of the direction, but also deforms in the plate thickness direction etc. This is what happens. Accordingly, buckling or the like is a phenomenon that can occur when the elastic portion as a component of the conductive contact is contracted. On the other hand, in the third embodiment, as shown in FIG. 15, since the elastic portion 8c is in an extended state when used, the precondition for buckling is eliminated in the first place. . Therefore, the first contact portions 8d, 8e are held in a rotatable state, and the first contact portion 8a, the second contact portion 8b, and the elastic portion 8c are arranged so as to be symmetrical with respect to the rotation center. Thus, the conductive contact 8 can avoid the elastic portion 8c from contracting during use, and can suppress or prevent the occurrence of buckling, torsion, etc. that can occur as the elastic portion 8c contracts. It will have the advantage.

[0077] Further, in the third embodiment, the conductive contact 8 itself is unlikely to buckle and the like, and the structure makes it possible to form the conductive contact unit with a simple structure. Have That is, in the first and second embodiments, a configuration in which the guide groove 2e or the like is formed so as not to cause buckling or twisting of the conductive contact is necessary. However, in the third embodiment, the conductive contact is not required. The holding unit 9 can be realized by physically holding the contact 8 and arranging the rotation shafts 9a and 9b at a minimum so that the first connection units 8d and 8e can rotate. Therefore, it is possible to form the holding portion 9 with a simple configuration, and it has an advantage that a conductive contact unit having a simple structure as a whole can be realized.

It should be noted that the third embodiment does not deny the form using the guide groove as the holding mode of the conductive contact 8. For example, when holding the conductive contact 8, the third embodiment is shown in the first and second embodiments. A structure using the holding part is also useful. For example, while the spacing members 8h and 8i are omitted from the conductive contact 8, the third guide member used in Embodiment 2 is used for each of the fulcrum portions 8f and 8g instead of the rotating shafts 9a and 9b. It is also effective to use the unit in contact with it. As described in the second embodiment, the third guide member is formed by a rod-like member extending in the arrangement direction of the conductive contacts, and a guide groove extending in the extension direction of the conductive contacts is formed on the side surface. It is possible to hold the conductive contact while maintaining a slidable state by fitting a part of the conductive contact into the guide groove having a formed structure. By applying this principle, a guide groove extending in the rotation direction of the fulcrum portions 8f and 8g is provided, and the conductive contact 8 is held in a state where the fulcrum portions 8f and 8g are fitted into the powerful guide groove. As a result, the guide groove can be used while enjoying the advantages described above. It is also possible to enjoy the advantages of the above.

[0079] Further, as shown in the second embodiment, it is also effective to hold the conductive contacts 8 adjacent to each other in an inverted state. FIG. 16 is a schematic diagram illustrating a configuration of a modified example of the conductive contact unit according to the third embodiment. For example, with respect to the structure of the conductive contact 8, the fulcrum portions 8 f and 8 g are formed at positions shifted from the central axis in the longitudinal direction, so that the adjacent conductive contacts 8 can be connected to each other by the fulcrum portions 8 f and 8 g. It is possible to realize the conductive contact unit shown in FIG. 16 by being held in a state where they are rotated by 180 ° with respect to a straight line passing through. By adopting a powerful structure, as described in the second embodiment, for example, an effect of reducing the value of the parasitic capacitance that can be generated between the adjacent conductive contacts 8 can be expected.

[0080] Although the present invention has been described in the first to third embodiments, the present invention should not be construed as being limited to the first to third embodiments. Examples and modifications can be conceived. For example, in Embodiments 1 to 3, the conductive contact is formed by a plate-like member. However, such a structure is usually buckled by itself. For this reason, the present invention may be applied to, for example, a cylindrical conductive contact. Further, in Embodiment 1, for example, both ends in the width direction of the conductive contact 1 are fitted into the guide groove 2e throughout, but a simpler structure, for example, the outer surface of the conductive contact It is also possible to form a protrusion on the top and fit the protrusion into the guide groove. That is, the above-described advantages can be enjoyed even when the conductive contact is a part that is fitted into the guide groove. Industrial applicability

As described above, the conductive contact unit and the conductive contact according to the present invention are useful for inspection of electrical characteristics of an inspection target of a semiconductor integrated circuit or the like, and in particular, the semiconductor integrated circuit or the like to be inspected. It is suitable for conducting electrical property inspections corresponding to the narrowing of the arrangement interval of connection terminals due to the trend toward miniaturization.

Claims

The scope of the claims

[1] A conductive contact unit that is electrically connected to a circuit structure having a plurality of connection terminals by physically contacting the connection terminals,

A plurality of first contact portions that come into contact with the connection terminal in use; a plurality of second contact portions electrically connected to the first contact portion; the first contact portion and the second contact portion; A plurality of electrically conductive layers formed between the first contact portion and the elastic portion that urges and urges against the second contact portion. A contact,

A plurality of guide grooves having a structure extending in the expansion / contraction direction of the elastic portion and in which a part of the conductive contact is slidably fitted in the expansion / contraction direction is formed, and the conductive contact is formed in the guide groove A holding part that holds the conductive contact in a state in which a part of the conductive contact is fitted, and a conductive contact unit.

[2] The conductive contact is formed in a plate shape,

The holding portion includes a first guide member formed with a guide groove in which one end in a direction perpendicular to the expansion / contraction direction is slidably fitted in the expansion / contraction direction, and an end in a direction perpendicular to the expansion / contraction direction 2. The conductive contact unit according to claim 1, further comprising: a second guide member having a guide groove that is slidably fitted in the expansion and contraction direction.

[3] The conductive contact is formed with an opening penetrating in a direction perpendicular to the expansion / contraction direction, an opening having a width in a direction parallel to the expansion / contraction direction corresponding to the expansion / contraction length of the elastic portion, The holding part

A first guide member formed with a guide groove in which one end of a part of the plurality of conductive contacts in a direction perpendicular to the expansion / contraction direction is slidably fitted in the expansion / contraction direction;

A second guide member having a guide groove in which the other ends of the plurality of conductive contacts are slidably fitted in the expansion / contraction direction and the other end in the direction perpendicular to the expansion / contraction direction; A guide groove formed by a rod-shaped member penetrating the opening formed in each of the contacts, and a portion of the conductive contact that forms the extension of the opening is slidably fitted in the expansion / contraction direction A third guide member formed with The conductive contact unit according to claim 1, further comprising:

[4] The conductive contact penetrates in a direction perpendicular to the expansion / contraction direction, and an opening having a length in a direction parallel to the expansion / contraction direction corresponding to the expansion / contraction length of the elastic portion is formed.

The holding portion is formed by a rod-like member extending in a direction in which the plurality of conductive contacts are arranged and penetrating the opening, and the guide groove is formed on the opening of the conductive contact. 2. The conductive contact unit according to claim 1, wherein a portion forming an outer edge is fitted.

[5] A signal output circuit that includes a terminal that physically contacts the second contact portion of the conductive contact, and that outputs a predetermined electrical signal to the conductive contact through the terminal. The conductive contact unit according to claim 1, further comprising:

[6] A conductive contact for electrically connecting a plurality of circuit structures,

A first contact portion that physically contacts one of the plurality of circuit structures during use; and a physical contact with the other of the plurality of circuit structures that is electrically connected to the first contact portion during use. A second contact portion in contact with the

An elastic part that supplies elastic force to the first contact part and the second contact part, and is held by a holding part so as to be rotatable about a predetermined axis when used, and with respect to the rotation center A first connection portion connected to the first contact portion and the elastic portion in a region that is symmetrical to each other,

In use, it is held by the holding portion so as to be rotatable about a predetermined axis as a rotation center, and is connected to the second contact portion and the elastic portion in a region that is symmetrical with respect to the rotation center. A second connection,

A conductive contact comprising: