WO2020217804A1

WO2020217804A1 - Probe pin, inspection jig, and inspection unit

Info

Publication number: WO2020217804A1
Application number: PCT/JP2020/012488
Authority: WO
Inventors: 直哉笹野; 宏真寺西; 貴浩酒井
Original assignee: オムロン株式会社
Priority date: 2019-04-25
Filing date: 2020-03-19
Publication date: 2020-10-29
Also published as: JP2020180888A; JP2023145556A; JP7318297B2; KR102648231B1; TW202041866A; TWI756653B; CN113631932A; KR20210129706A

Abstract

This probe pin comprises an elastic part capable of elastically deforming along a first direction, a first contact part provided at one first-direction end of the elastic part, and a second contact part provided at the other first-direction end of the elastic part. The first contact part is disposed so as to be removed from the center line of the elastic part in a second direction intersecting the first direction and comprises a plurality of contact-point parts that are disposed at an interval along the second direction. Each of the plurality of contact-point parts becomes farther from the elastic part in the first direction as the contact-point part becomes farther from the center line in the second direction.

Description

Probe pin, inspection jig and inspection unit

This disclosure relates to probe pins, inspection jigs and inspection units.

In electronic component modules such as cameras or liquid crystal panels, continuity inspection, operating characteristic inspection, etc. are generally performed in the manufacturing process. These inspections are performed by connecting the terminals for connecting to the main body board installed in the electronic component module and the terminals of the inspection device using probe pins.

As such a probe pin, there is one described in Patent Document 1. This probe pin includes a pair of contacts that can contact the electrode terminals of the electronic component and the electrode terminals of the connected electronic component, respectively, and a meandering portion that connects the pair of contacts by interposing between the pair of contacts. There is.

JP-A-2002-134202

In the probe pin, each contact is configured to make contact with the electrode terminal at one point. Therefore, for example, when a non-conductive foreign substance adheres to the tip of each contact, the foreign substance causes the probe pin to come into contact with the probe pin. Poor continuity with the electrode terminals may occur, reducing contact reliability.

It is an object of the present disclosure to provide a probe pin having high contact reliability, an inspection jig equipped with this probe pin, and an inspection unit equipped with this inspection jig.

The probe pin of the example of the present disclosure is
An elastic part that can be elastically deformed along the first direction,
A first contact portion provided at one end of the elastic portion in the first direction,
A second contact portion provided at the other end of the elastic portion in the first direction is provided.
The first contact portion
The elastic portions are arranged so as to pass through the center of the elastic portion in the second direction intersecting with the first direction and away from the center line extending in the first direction, and are arranged at intervals along the second direction. It has multiple contacts and
Each of the plurality of contact portions is arranged so as to move away from the elastic portion in the first direction as the distance from the center line increases in the second direction.

Further, the inspection jig of the example of the present disclosure is
With the probe pin
A housing in which the probe pin is housed is provided.
The probe pin
The elastic portion is elastically deformed so that the first contact portion and the second contact portion approach each other in the first direction, and the plurality of contacts with respect to the connection terminal of the inspection object or the inspection device extending in the second direction. Each part is housed in a state where it can be contacted at the same time.

In addition, the inspection unit of the example of the present disclosure is
At least one of the inspection jigs is provided.

According to the probe pin, an elastic portion that can be elastically deformed along the first direction, a first contact portion provided at one end of the elastic portion in the first direction, and an elastic portion provided at the other end of the elastic portion in the first direction. It is provided with a second contact portion. A plurality of first contact portions that pass through the center of the second direction intersecting the first direction of the elastic portion, are separated from the center line extending in the first direction, and are spaced apart from each other along the second direction. It has a contact part of. Each contact portion is arranged so as to be separated from the elastic portion in the first direction as it is separated from the center line in the second direction. With such a configuration, for example, when the probe pin is compressed so that the first contact portion and the second contact portion approach in the first direction, the contact object (for example, the inspection object or the inspection device) is subjected to the compression. Each contact can be brought into contact at the same time. That is, even if a non-conductive foreign substance adheres to any of the plurality of contact portions, it is possible to avoid the occurrence of poor continuity between the probe pin and the contact object. As a result, a probe pin with high contact reliability can be realized.

According to the inspection jig, the probe pin can realize an inspection jig with high contact reliability.

According to the inspection unit, the inspection jig can realize an inspection unit with high contact reliability.

The perspective view which shows the probe pin of one Embodiment of this disclosure. FIG. 3 is a cross-sectional view of an inspection jig provided with the probe pin of FIG. An enlarged plan view showing a first contact portion of the probe pin of FIG. FIG. 2 is a cross-sectional view of the inspection jig of FIG. 2 for explaining the operation of the probe pin of FIG. The plan view which shows the 1st modification of the probe pin of FIG. The plan view which shows the 2nd modification of the probe pin of FIG. The plan view which shows the 3rd modification of the probe pin of FIG. The plan view which shows the 4th modification of the probe pin of FIG. The plan view which shows the 5th modification of the probe pin of FIG. The plan view which shows the 6th modification of the probe pin of FIG.

Hereinafter, an example of the present disclosure will be described with reference to the attached drawings. In the following description, terms indicating a specific direction or position (for example, terms including "top", "bottom", "right", and "left") are used as necessary, but the use of these terms is used. Is for facilitating the understanding of the present disclosure with reference to the drawings, and the meaning of those terms does not limit the technical scope of the present disclosure. In addition, the following description is merely an example and is not intended to limit the present disclosure, its application, or its use. Furthermore, the drawings are schematic, and the ratio of each dimension does not always match the actual one.

As an example, the probe pin of one embodiment of the present disclosure is used in a state of being housed in an insulating housing 100, as shown in FIG. 1, having an elongated thin plate shape and having conductivity, and as shown in FIG. The inspection jig 2 is formed together with the housing 100. As an example, the inspection jig 2 houses a plurality of probe pins 10.

Further, the inspection jig 2 can form a part of the inspection unit 1. For example, as shown in FIG. 2, when the inspection unit 1 is composed of a pair of inspection jigs 2, in each inspection jig 2, each contact portion of the probe pin 10 described later has a probe pin 10 extending. It is arranged so as to be adjacent to the second direction Y which intersects (for example, orthogonally) the one direction X.

As shown in FIG. 2, each housing 100 has a plurality of accommodating portions 101 (only one is shown in FIG. 2) inside the housing 100. Each accommodating portion 101 has a slit shape, and each accommodating portion 101 is configured to be electrically independently accommodating and holding one probe pin 10. Further, the accommodating portions 101 are arranged in a line and at equal intervals along a direction intersecting the first direction X and the second direction Y (that is, the paper surface penetrating direction in FIG. 2).

As shown in FIGS. 1 and 2, each probe pin 10 has an elastic portion 20 that can be elastically deformed along the first direction X and a first elastic portion 20 provided at both ends of the elastic portion 20 in the first direction X. It includes a contact portion 30 and a second contact portion 50. Each probe pin 10 is formed by an electroforming method as an example, and the elastic portion 20, the first contact portion 30, and the second contact portion 50 are arranged in series along the first direction X and integrally configured. ing.

As shown in FIG. 2, the elastic portion 20 is composed of a plurality of strip-shaped elastic pieces (in this embodiment, two strip-shaped elastic pieces) 21 and 22 arranged with a gap 23 between them, as an example. .. The band-shaped

elastic pieces

21 and 22 are formed by a first horizontal band portion 24 and a second horizontal band portion 26 extending in the second direction Y, respectively, and one curved band portion 25 connected to the

band portions

24 and 26. It is configured.

Each of the first horizontal band portion 24 and the second horizontal band portion 26 is arranged with a gap 27 in the first direction X. One end of the first horizontal band portion 24 in the extending direction is connected to the first contact portion 30, and the other end in the extending direction is connected to the curved band portion 25. One end of the second horizontal band portion 26 in the extending direction is connected to the second contact portion 50, and the other end in the extending direction is connected to the curved band portion 25. Of the band-shaped

elastic pieces

21 and 22, the outermost band-shaped elastic piece (that is, the band-shaped elastic piece having the longest distance in the first direction X between the first horizontal band portion 24 and the second horizontal band portion 26). The second horizontal band portion 26 of 21) is provided with a contact surface 211 extending in the second direction Y. The contact surface 211 is configured to come into contact with the inner surface of the housing 100 constituting the housing 100 when the probe pin 10 is housed in the housing 100. The

band portions

24 and 26 are arranged on the same side in the second direction Y with respect to each of the first contact portion 30 and the second contact portion 50.

As shown in FIG. 2, the curved band portion 25 is on the opposite side of the main body portion 31 of the first contact portion 30 with respect to the center line CL extending through the center of the elastic portion 20 in the second direction Y and extending in the first direction X. It is connected to the first horizontal band portion 24 and the second horizontal band portion 26. In this embodiment, the center of the maximum distance L1 in the second direction Y of the portion where the first horizontal band portion 24 and the curved band portion 25 are combined is set as the center of the elastic portion 20 in the second direction Y.

As shown in FIG. 2, a plurality of first contact portions 30 are arranged apart from the center line CL of the elastic portion 20 in the second direction Y and are arranged at intervals along the second direction Y. It has

contact portions

41 and 42.

Specifically, as shown in FIG. 3, the first contact portion 30 includes a main body portion 31 and a plurality of protrusions extending from the main body portion 31 in the first direction X and in a direction away from the main body portion 31 (in this embodiment, the first contact portion 30 It has two protrusions 32, 33).

The main body 31 is arranged away from the center line CL, and is viewed from the plate thickness direction (that is, the paper surface penetrating direction in FIG. 3), the pair of side surfaces 311 and 312 facing the first direction X and the second direction. It has a pair of side surfaces 313 and 314 facing Y. Of the pair of side surfaces 313 and 314 facing the second direction Y of the main body portion 31, one end of the first horizontal band portion 24 of the elastic portion 20 in the extending direction is connected to the side surface 313 close to the center line CL. There is.

Of the pair of side surfaces 311 and 312 facing the first direction X of the main body portion 31, the side surface 311 facing the second horizontal band portion 26 is in the first direction X as it is separated from the center line CL in the second direction Y. Moreover, it is inclined in a direction away from the second horizontal band portion 26. That is, the main body portion 31 faces the second horizontal band portion 26 in the first direction X, and as it moves away from the center line CL in the second direction Y, it is in the first direction X and away from the second horizontal band portion 26. It has an inclined surface 311 that inclines toward. The inclined surface 311 is formed when the elastic portion 20 is elastically deformed so that the first contact portion 30 and the second contact portion 50 approach each other in the first direction X (that is, when the elastic portion 20 is compressed in the first direction X). ), The second horizontal band portion 26 and the second contact portion 50 of the elastic portion 20 are configured so as not to come into contact with each other.

Of the pair of side surfaces 311 and 312 facing the first direction X of the main body 31, the

protrusions

32 and 33 are provided at substantially the center of the second direction Y of the side surface 312 on the opposite side of the inclined surface 311. .. As shown in FIG. 2, the edges around the

protrusions

32 and 33 of the side surface 312 are provided with respect to the inner surface of the housing 100 constituting the housing 100 when the probe pin 10 is housed in the housing 100. It is configured to come into contact with each other.

The

protrusions

32 and 33 are arranged with a gap 36 in the second direction Y, and the amount of protrusion from the main body 31 in the first direction X is different from each other. In the second direction Y, the protrusion 32 far from the center line CL of the elastic portion 20 is referred to as the first protrusion 32, and the protrusion 33 closer to the center line CL than the first protrusion 32 is referred to as the second protrusion 33. Assuming that the end portion of the

protrusions

32, 33 in the first direction X and farther from the main body 31 is the tip portion, the tip portions of the

protrusions

32, 33 are curved, respectively, and the main body portion 31 to the third. The maximum distance L2 in the first direction X to the tip of the 1 protrusion 32 is larger than the maximum distance L3 from the main body 31 to the tip of the second protrusion 33.

The tips of the

protrusions

32 and 33 form the contact points 41 and 42. That is, the

contact portions

41 and 42 are arranged so as to be separated from the elastic portion 20 in the first direction X as they are separated from the center line CL in the second direction Y.

As shown in FIG. 2, the second contact portion 50 has a substantially rectangular shape extending in the first direction X. The tip portion of the second contact portion 50 in the first direction X and far from the elastic portion 20 has a curved tapered shape and constitutes the contact portion 51.

The operation of the probe pin 10 of the inspection jig 2 will be described with reference to FIGS. 2 to 4.

As shown in FIG. 2, a contact object having

contact surfaces

113 and 114 extending in the second direction Y at both ends of the probe pin 10 housed in the housing portion 101 of the housing 100 in the first direction X (for example, inspection).

Connection terminals

111 and 112 of the object or inspection device) are arranged. In the state before the elastic portion 20 shown in FIG. 2 is compressed, only the contact portion 41 of the first protrusion 32 of the first contact portion 30 is in contact with the connection terminal 111. From this state, when the connection terminal 111 arranged on the first contact portion 30 side is brought closer to the connection terminal 112 on the second contact portion 50 side, the first contact portion 30 is pushed into the accommodating portion 101. It rotates around the curved band portion 25, and the contact portion 42 of the second protrusion 33 gradually approaches the connection terminal 111. At this time, as shown in FIG. 3, the tip portion of the first protrusion 32 rotates while wiping the contact surface 113 of the connection terminal 111. Further, when the connection terminal 111 arranged on the first contact portion 30 side is brought closer to the connection terminal 112 on the second contact portion 50 side, as shown in FIG. 4, the

contact portions

41 and 42 are connected terminals. It contacts 111 at the same time.

As described above, in the probe pin 10, the elastic portion 20 that can be elastically deformed along the first direction X, the first contact portion 30 provided at one end of the elastic portion 20 in the first direction X, and the elastic portion 20. It is provided with a second contact portion 50 provided at the other end of the first direction X. The first contact portion 30 passes through the center of the second direction Y intersecting the first direction X of the elastic portion 20 and is separated from the center line CL extending in the first direction X, and is spaced along the second direction Y. It has a plurality of

contact portions

41 and 42 arranged apart from each other. The

contact portions

41 and 42 are arranged so as to be separated from the elastic portion 20 in the first direction X as they are separated from the center line CL in the second direction Y. With such a configuration, for example, when the probe pin 10 is compressed so that the first contact portion 30 and the second contact portion 50 approach the first direction X, each contact portion 41 with respect to the contact object, 42 can be brought into contact at the same time. That is, even if a non-conductive foreign substance adheres to any of the plurality of

contact portions

41 and 42, it is possible to prevent a conduction failure from occurring between the probe pin 10 and the contact object. As a result, the probe pin 10 with high contact reliability can be realized.

Further, the first contact portion 30 is arranged away from the center line CL and is arranged with a main body portion 31 to which one end of the elastic portion 20 is connected and a main body portion 31 with a gap 36 in the second direction Y. It has a plurality of

protrusions

32 and 33 extending from the first direction X and in a direction away from the main body 31. The tip portions of the plurality of

protrusions

32, 33 in the first direction X and separated from the main body 31 constitute each of the plurality of

contact portions

41, 42. With such a configuration, the probe pin 10 having high contact reliability can be realized more easily.

Further, the elastic portion 20 has a gap 27 in the first direction X with respect to the first horizontal band portion 24 extending in the second direction Y from the main body portion 31 of the first contact portion 30 and the first horizontal band portion 24. It has a second horizontal band portion 26 arranged, and a curved band portion 25 connected to the first horizontal band portion 24 and the second horizontal band portion 26 on the opposite side of the main body portion 31 with respect to the center line CL. The main body portion 31 faces the second horizontal band portion 26 in the first direction X, and is inclined in the direction away from the second horizontal band portion 26 in the first direction X as it moves away from the center line CL in the second direction Y. It has an inclined surface 311 to be used. With such a configuration, when the elastic portion 20 is compressed in the first direction X, contact between the main body portion 31 and the second horizontal band portion 26 and the second contact portion 50 of the elastic portion 20 can be avoided. ..

With such a probe pin 10, an inspection jig 2 with high contact reliability can be realized. Further, the inspection jig 2 provided with such a probe pin 10 can realize the inspection unit 1 having high contact reliability.

The contact portion of the first contact portion 30 is not limited to the case where the contact portion is composed of two

contact portions

41 and 42. For example, as shown in FIG. 5, the contact portion of the first contact portion 30 may be composed of three

contact portions

41, 42, 43, or as shown in FIG. 6, four

contact portions

41, 42. , 43, 44 may be composed.

In the probe pin 10 of FIG. 5, the first contact portion 30 has three

protrusions

32, 33, 34 extending from the main body 31 in the first direction X and in a direction away from the main body 31, and each protrusion 32. , 33, 34

form contact portions

41, 42, 43, respectively. The

contact portions

41, 42, and 43 are arranged so as to be separated from the elastic portion 20 in the first direction X as they are separated from the center line CL in the second direction Y.

In the probe pin 10 of FIG. 6, the first contact portion 30 has four

protrusions

32, 33, 34, 35 extending from the main body portion 31 in the first direction X and in a direction away from the main body portion 31, and each protrusion. The tip portions of the

portions

32, 33, 34, and 35

form contact portions

41, 42, 43, and 44, respectively. The

contact portions

41, 42, 43, and 44 are arranged so as to be separated from the elastic portion 20 in the first direction X as they are separated from the center line CL in the second direction Y.

The tips of the

protrusions

32 and 33 are not limited to curved ones. For example, as shown in FIG. 6, the tips of the

protrusions

32, 33, 34, and 35 may be triangular, or as shown in FIG. 7, the

protrusions

32, 33 may have a triangular shape. Either tip may be square. That is, the tip portions of the plurality of protrusions of the first contact portion 30 can adopt any shape capable of forming a plurality of contact portions capable of simultaneously contacting the connection terminals of the contact object.

The contact portion of the second contact portion 50 is not limited to the case where it is composed of one contact portion 51. The contact portion of the second contact portion 50 may be composed of two

contact portions

51 and 52, for example, as shown in FIG. In the probe pin 10 of FIG. 8, the second contact portion 50 has a groove 53 extending along the first direction X from the tip portion toward the elastic portion 20. The tip portions on both sides of the second direction Y partitioned by the groove 53 of the second contact portion 50 form the

contact portions

51 and 52, respectively. Further, the contact portion of the second contact portion 50 and the contact portion of the first contact portion 30 (for example, the

contact portions

41, 42, 43, 44 shown in FIGS. 2, 5 and 6) may be configured in the same manner. ..

The elastic portion 20 is not limited to the case where it is composed of two strip-shaped

elastic pieces

21 and 22. For example, as shown in FIG. 9, it may be composed of one strip-shaped elastic piece 121, or as shown in FIG. 10, it may be composed of three strip-shaped

elastic pieces

121, 122, 123.

Further, the elastic portion 20 is not limited to the case where the elastic portion 20 is composed of the first horizontal band portion 24, the second horizontal band portion 26, and the curved band portion 25. For example, in the elastic portion 20, as shown in FIG. 10, six

band portions

24, 26, 124, 125, 126, 127 and five curved band portions 25 are alternately connected along the first direction X. It may have a meandering shape. Also in the probe pin 10 of FIG. 10, the portion where the first horizontal band portion 24 and the curved band portion 25 connected to the first contact portion 30 pass through the center of the maximum distance L1 in the second direction Y and The straight line extending in the first direction X is defined as the center line CL of the elastic portion 20.

In the probe pin 10 of FIG. 10, the main body 31 of the first contact portion 30 does not have an inclined surface 311 (that is, the inclined surface 311 can be omitted). Further, when the probe pin 10 of FIG. 10 is housed in the housing portion 101 of the housing 100, the first horizontal band portion 24 and the second contact are connected to the first contact portion 30 of the outermost strip-shaped elastic piece 123. The band portion 127 connected to the portion 50 is configured to come into contact with the inner surface of the housing 100.

The various embodiments in the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure will be described. In the following description, a reference reference numeral is also provided as an example.

The probe pin 10 of the first aspect of the present disclosure is
An elastic portion 20 that can be elastically deformed along the first direction X,
A first contact portion 30 provided at one end of the elastic portion 20 in the first direction X,
A second contact portion 50 provided at the other end of the first direction X of the elastic portion 20 is provided.
The first contact portion 30
The elastic portion 20 is arranged so as to pass through the center of the second direction Y intersecting the first direction X and away from the center line CL extending in the first direction X, and to be spaced along the second direction Y. It has a plurality of

contact portions

41 and 42 arranged apart from each other.
Each of the plurality of

contact portions

41, 42 is arranged so as to be separated from the elastic portion 20 in the first direction X as it is separated from the center line CL in the second direction Y.

According to the probe pin 10 of the first aspect, for example, when the probe pin 10 is compressed so that the first contact portion 30 and the second contact portion 50 approach the first direction X, the contact object is contacted. The

contact portions

41 and 42 can be brought into contact with each other at the same time. That is, even if a non-conductive foreign substance adheres to any of the plurality of

contact portions

The probe pin 10 of the second aspect of the present disclosure is
The first contact portion 30
A main body 31 that is arranged away from the center line CL and to which one end of the elastic portion 20 is connected.
Each of them is arranged with a gap 36 in the second direction Y, and has a plurality of

protrusions

32, 33 extending from the main body 31 in the first direction X and in a direction away from the main body 31.
The tip portions of the plurality of

protrusions

32, 33 in the first direction X and away from the main body 31 constitute each of the plurality of

contact portions

41, 42.

According to the probe pin 10 of the second aspect, the probe pin 10 having high contact reliability can be realized more easily.

The probe pin 10 of the third aspect of the present disclosure is
The elastic portion 20
A first horizontal band portion 24 extending from the main body portion 31 of the first contact portion 30 in the second direction Y,
A second horizontal band portion 26 arranged with a gap 27 in the first direction X with respect to the first horizontal band portion 24,
It has a first horizontal band portion 24 and a curved band portion 25 connected to the second horizontal band portion 26 on the opposite side of the main body portion 31 with respect to the center line CL.
The main body 31
In the first direction X, it faces the second horizontal band portion 26, and as it moves away from the center line CL in the second direction Y, it is in the first direction X and in a direction away from the second horizontal band portion 26. It has an inclined surface 311 that is inclined.

According to the probe pin 10 of the third aspect, when the elastic portion 20 is compressed in the first direction X, the main body portion 31 is brought into contact with the second horizontal band portion 26 and the second contact portion 50 of the elastic portion 20. It can be avoided.

The inspection jig 2 of the fourth aspect of the present disclosure is
With the probe pin 10
A housing 100 in which the probe pin 10 is housed is provided.
The probe pin 10
The elastic portion 20 is elastically deformed so that the first contact portion 30 and the second contact portion 50 approach each other in the first direction X, and the connection terminal 111 of the inspection object or the inspection device extending in the second direction Y is formed. On the other hand, each of the plurality of

contact portions

41 and 42 is housed in a state where they can be contacted at the same time.

According to the inspection jig 2 of the fourth aspect, the inspection jig 2 having high contact reliability can be realized by the probe pin 10.

The inspection unit 1 of the fifth aspect of the present disclosure is
At least one of the inspection jigs 2 is provided.

According to the inspection unit 1 of the fifth aspect, the inspection jig 2 can realize the inspection unit 1 with high contact reliability.

It should be noted that, by appropriately combining any of the various embodiments or modifications, the effects of each can be achieved. In addition, combinations of embodiments or examples or combinations of embodiments and examples are possible, and features in different embodiments or examples are also possible.

Although the present disclosure is fully described in relation to preferred embodiments with reference to the accompanying drawings, various modifications and modifications are obvious to those skilled in the art. It should be understood that such modifications and amendments are included within the scope of this disclosure by the appended claims.

The probe pins of the present disclosure can be applied to inspection jigs used for inspection of semiconductors such as camera devices, USB devices, HDMI devices, or QFN devices and SON devices.

The inspection jig of the present disclosure can be applied to an inspection unit used for inspection of semiconductors such as a camera device, a USB device, an HDMI device, or a QFN device and a SON device.

The inspection unit of the present disclosure can be applied to, for example, an inspection device used for inspection of semiconductors such as a camera device, a USB device, an HDMI device, or a QFN device and a SON device.

1 Inspection unit 2 Inspection jig 10 Probe pin 20

Elastic parts

21, 22, 121, 122, 123 Band-shaped elastic pieces 23 Gap 24 1st horizontal band 25 Curved band 26 2nd horizontal band 27

Gap

124, 125, 126 127 Band 30 First contact 31 Main body 311

Inclined surface

312, 313, 314

Side surface

32, 33, 34, 35 Protrusion 36

Gap

41, 42, 43, 44 Contact 50

Second contact

51, 52 Contact Part 53 Groove 100 Housing 101

Housing part

111, 112

Connection terminal

113, 114 Contact surface

Claims

An elastic part that can be elastically deformed along the first direction,
A first contact portion provided at one end of the elastic portion in the first direction,
A second contact portion provided at the other end of the elastic portion in the first direction is provided.
The first contact portion
The elastic portions are arranged so as to pass through the center of the elastic portion in the second direction intersecting with the first direction and away from the center line extending in the first direction, and are arranged at intervals along the second direction. It has multiple contacts and
A probe pin in which each of the plurality of contact portions is arranged so as to move away from the elastic portion in the first direction as the distance from the center line in the second direction increases.
The first contact portion
A main body portion that is arranged away from the center line and is connected to the one end of the elastic portion.
Each of them is arranged with a gap in the second direction, and has a plurality of protrusions extending from the main body portion in the first direction and in a direction away from the main body portion.
The probe pin according to claim 1, wherein the tip portions of the plurality of protrusions in the first direction and away from the main body form each of the plurality of contact portions.
The elastic part
A first horizontal band portion extending in the second direction from the main body portion of the first contact portion,
A second horizontal band portion arranged with a gap in the first direction with respect to the first horizontal band portion,
It has a first horizontal band portion and a curved band portion connected to the second horizontal band portion on the opposite side of the main body portion with respect to the center line.
The main body
It has an inclined surface that faces the second horizontal band portion in the first direction and is inclined in the first direction and in a direction away from the second horizontal band portion as it moves away from the center line in the second direction. The probe pin of claim 2.
With any one of the probe pins of claims 1 to 3,
A housing in which the probe pin is housed is provided.
The probe pin
The elastic portion is elastically deformed so that the first contact portion and the second contact portion approach each other in the first direction, and the plurality of inspection objects or connection terminals of the inspection device extending in the second direction. An inspection jig in which each of the contact parts is housed so that they can be contacted at the same time.
An inspection unit provided with at least one inspection jig according to claim 4.