WO2020250637A1 - Probe pin, testing jig, and testing unit - Google Patents

Probe pin, testing jig, and testing unit Download PDF

Info

Publication number
WO2020250637A1
WO2020250637A1 PCT/JP2020/020160 JP2020020160W WO2020250637A1 WO 2020250637 A1 WO2020250637 A1 WO 2020250637A1 JP 2020020160 W JP2020020160 W JP 2020020160W WO 2020250637 A1 WO2020250637 A1 WO 2020250637A1
Authority
WO
WIPO (PCT)
Prior art keywords
contact portion
contact
elastic
probe pin
socket
Prior art date
Application number
PCT/JP2020/020160
Other languages
French (fr)
Japanese (ja)
Inventor
直哉 笹野
宏真 寺西
貴浩 酒井
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to KR1020217039154A priority Critical patent/KR102710367B1/en
Priority to CN202080040779.3A priority patent/CN113924499A/en
Publication of WO2020250637A1 publication Critical patent/WO2020250637A1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/54—Testing for continuity

Definitions

  • This disclosure relates to probe pins, inspection jigs and inspection units.
  • continuity inspection, operating characteristic inspection, etc. are generally performed in the manufacturing process. These inspections are performed by connecting the terminals for connecting to the main body board installed in the electronic component module and the terminals of the inspection device using probe pins.
  • This probe pin includes a pair of contacts that can contact the electrode terminals of the electronic component and the electrode terminals of the connected electronic component, respectively, and a meandering portion that connects the pair of contacts by interposing between the pair of contacts. There is.
  • a pair of contacts are arranged at the center in the width direction perpendicular to the expansion / contraction direction of the meandering portion so that each contact does not fall in the width direction when the meandering portion is expanded / contracted. For this reason, when a plurality of the probe pins are arranged side by side in the width direction, it becomes difficult to narrow the arrangement interval of the adjacent contacts. For example, for a pair of terminals of the narrow pitched electronic component module, each of the probe pins is arranged. It may not be possible to bring the contacts into contact with each other at the same time, and it may not be possible to cope with the narrowing of the pitch of the electronic component module.
  • An object of the present disclosure is to provide a probe pin capable of narrowing the pitch of a contact object, an inspection jig equipped with the probe pin, and an inspection unit equipped with the inspection jig.
  • the probe pin of the example of the present disclosure is An elastic part that can be elastically deformed along the first direction, With the first contact portion to which one end of the elastic portion in the first direction is connected, A second contact portion to which the other end of the elastic portion in the first direction is connected is provided.
  • the elastic portion is a probe pin that can be accommodated in the socket in a state of being expandable and contractible in the first direction.
  • the elastic part A first contact portion extending from the first contact portion along a second direction intersecting the first direction to form one end of the elastic portion in the first direction.
  • a second that is arranged on the same side of the first contact portion and the second contact portion in the second direction and extends from the second contact portion along the second direction to form the other end of the elastic portion.
  • Each of the first contact portion and the second contact portion is configured to be able to contact the inside of the socket in the first direction while being housed in the socket.
  • the inspection jig of the example of the present disclosure is With the probe pin With the socket capable of accommodating the probe pin, When the probe pin is housed in the socket, each of the first contact portion and the second contact portion is configured to abut on the inner surface of the socket in the first direction.
  • the inspection unit of the example of the present disclosure is At least one of the inspection jigs is provided.
  • the elastic portion extends from the first contact portion along the second direction to form one end of the elastic portion, and the first contact portion and the second contact portion in the second direction. It has a second contact portion that is arranged on the same side with respect to the contact portion and extends from the second contact portion along the second direction to form the other end of the elastic portion.
  • Each of the first contact portion and the second contact portion is configured to be able to contact the inside of the socket in the first direction when housed in the socket.
  • the probe pin can realize an inspection jig capable of inspecting a narrow-pitched inspection object.
  • the inspection jig can realize an inspection unit capable of inspecting a narrow-pitch inspection object.
  • the perspective view which shows the probe pin of one Embodiment of this disclosure The plan view of the inspection jig provided with the probe pin of FIG. It is a figure for demonstrating the state of the elastic part when an external force is applied to the 1st contact part of the probe pin of FIG. The figure for demonstrating the state of the elastic part when an external force is applied to the 2nd contact part of the probe pin of FIG.
  • the plan view of the inspection jig provided with the probe pin of FIG. FIG. 5 is a diagram for explaining a state of an elastic portion when an external force is applied to the first contact portion and the second contact portion of the probe pin of FIG.
  • FIG. 5 is a diagram for explaining a state of an elastic portion when an external force is applied to the second contact portion of the probe pin of FIG.
  • the probe pin 10 of the embodiment of the present disclosure is, for example, as shown in FIG. 1, has an elongated thin plate shape in the first direction X and has conductivity.
  • the probe pin 10 is used in a state of being housed in an insulating socket 100 as shown in FIG. 2, and constitutes an inspection jig 2 together with the socket 100.
  • the inspection jig 2 houses a plurality of probe pins 10.
  • the inspection jig 2 constitutes a part of the inspection unit 1.
  • the inspection unit 1 has a pair of inspection jigs 2.
  • the first contact portions 321 and 331 and the second contact portion 41 of the probe pin 10 which will be described later, intersect (for example, orthogonally) in the first direction X in a state of being exposed to the outside from the socket 100. It is arranged so as to be adjacent to the second direction Y.
  • each socket 100 has a plurality of accommodating portions 101 (only one is shown in FIG. 2) inside the socket 100.
  • Each accommodating portion 101 has a slit shape, and each accommodating portion 101 is configured to be electrically independently accommodating and holding one probe pin 10. Further, the accommodating portions 101 are arranged in a line and at equal intervals along a direction intersecting the first direction X and the second direction Y (that is, the paper surface penetrating direction in FIG. 2).
  • each socket 100 is not limited to the case where the probe pin 10 is housed and a gap is formed between the inner surface of the first direction X and the probe pin 10. .
  • each socket 100 may be configured such that the probe pin 10 is accommodated in a state where the contact portions 201 and 202 at both ends thereof are in contact with the inner surface of the socket 100.
  • each probe pin 10 has an elastic portion 20 that can be elastically deformed along the first direction X and a first contact portion 30 in which both ends of the elastic portion 20 in the first direction X are connected. And a second contact portion 40.
  • Each probe pin 10 is formed by an electroforming method as an example, and the elastic portion 20, the first contact portion 30, and the second contact portion 40 are arranged in series and integrally formed along the first direction X. ing.
  • the elastic portion 20 includes a first contact portion 201 forming one end of the elastic portion 20 in the first direction X and a second contact portion 201 forming the other end of the elastic portion 20 in the first direction X. It has a contact portion 202.
  • the first contact portion 201 extends from the first contact portion 30 in the second direction Y.
  • the second contact portion 202 is arranged on the same side of the first contact portion 201 and the second contact portion 40 in the second direction Y, and extends from the second contact portion 40 along the second direction Y.
  • Each of the first contact portion 201 and the second contact portion 202 is configured to be able to contact the inside of the socket 100 constituting the accommodation portion 101 in the first direction X in a state of being housed in the socket 100. ..
  • the elastic portion 20 is composed of a plurality of elastic pieces (in this embodiment, two band-shaped elastic pieces) 21 and 22 arranged with a gap 23 between them, as an example. ing.
  • Each of the elastic pieces 21 and 22 has a meandering shape composed of a plurality of extending portions 24 extending in the second direction Y and a plurality of curved portions 25 connected to the adjacent extending portions 24, respectively.
  • the elastic portion 20 is composed of four extending portions 24 and three curved portions 25.
  • Each extending portion 24 is arranged with a gap 27 from each other in the first direction X.
  • Each extending portion 24 arranged at both ends of the first direction X constitutes the first contact portion 201 and the second contact portion 202, respectively.
  • the extending portion 24 constituting the first contact portion 201 one end in the second direction Y is connected to the first contact portion 30, and the other end in the second direction Y is connected to the curved portion 25.
  • the extending portion 24 constituting the second contact portion 202 one end of the second direction Y is connected to the second contact portion 40, and the other end of the second direction Y is connected to the curved portion 25.
  • One end of the extending portion 24 constituting the second contact portion 202 is connected to the second contact portion 40 in a state where the two elastic pieces 21 and 22 are connected by the connecting portion 26 and integrated. There is.
  • each curved portion 25 is arranged on one side of the second direction Y with respect to one end 301 of the first contact portion 30 in the second direction Y.
  • the first contact portion 30 includes, as an example, a main body portion 31 to which the elastic portion 20 is connected and a pair extending from the main body portion 31 in the first direction X and in a direction away from the elastic portion 20. It has legs 32 and 33.
  • the main body 31 has a through hole 311 provided at the end on the elastic portion 20 side in the first direction X.
  • the through hole 311 is connected to the gap 23 between the elastic pieces 21 and 22 of the elastic portion 20.
  • the legs 32 and 33 are arranged with a gap 34 in the second direction Y and are configured to be elastically deformable in the second direction Y, and have first contact portions 321 and 331 provided at the tips thereof. ing.
  • Each of the first contact portions 321 and 331 is configured to be able to contact the convex contact 50 of the inspection object, which is an example of the contact object, from the first direction X.
  • each of the leg portions 32 and 33 has protrusions 322 and 332 provided on the side surfaces facing the second direction Y. The protrusions 322 and 332 project so as to close the gap 34 between the pair of legs 32 and 33, and prevent the convex contact 50 from being excessively inserted into the gap 34.
  • the second contact portion 40 has a substantially rectangular shape extending in the first direction X as an example.
  • the tip of the second contact portion 40 in the first direction X and farther from the elastic portion 20 has a substantially triangular shape that tapers in the first direction X and away from the elastic portion 20, and the second contact portion 41 is formed. It is configured.
  • the second contact portion 41 is configured to be able to contact the terminal 60 of the inspection object, which is an example of the contact object, from the first direction X.
  • a notch 42 is provided on the side surface 401 of the pair of side surfaces facing each other in the second direction Y of the second contact portion 40 to which the elastic portion 20 is not connected. The notch 42 is provided at the end of the side surface 401 of the second contact 40 near the elastic portion 20 in the first direction X.
  • FIG. 3 shows the state of the elastic portion 20 when an external force in the X1 direction toward the inside of the socket 100 is applied to the second contact portion 41 of the second contact portion 40.
  • the elastic portion 20 elastically deforms without contacting the adjacent elastic pieces 21 and 22.
  • the elastic portion 20 is arranged on one side in the second direction Y with respect to the side surface 401 (see FIG. 2) to which the elastic portion 20 is not connected.
  • the second contact portion 41 contacts the surface of the terminal 60 and is on the other side (that is, the second direction) in the second direction Y with respect to the side surface 401 of the second contact portion 40.
  • the second contact portion 40 moves from the side surface 401 in the second direction Y to the side opposite to the side where the elastic portion 20 is arranged).
  • the film can be removed by the wiping operation of the second contact portion 41, so that the influence of the film formation on the contact reliability and the like can be reduced.
  • the elastic portion 20 is elastically deformed without contacting the adjacent elastic pieces 21 and 22, and the wiping operation similar to the case where only the external force in the X1 direction is applied by the second contact portion 41 is performed. Will be.
  • the first contact portions 321 and 331 move along the first direction X toward the inside of the socket 100 by an external force in the X2 direction.
  • the elastic portion 20 extends from the first contact portion 30 along the second direction Y to form one end of the elastic portion 20, and the first contact portion 201 and the second contact portion 201 in the second direction Y. It has a second contact portion 202 that is arranged on the same side of the first contact portion 201 and the second contact portion 40 and extends from the second contact portion 40 along the second direction Y to form the other end of the elastic portion 20. ..
  • Each of the first contact portion 201 and the second contact portion 202 is configured to be able to contact the inside of the socket 100 in the first direction X when housed in the socket 100.
  • the first contact portion 30 is provided at the end portion far from the elastic portion 20 in the first direction X, and the first contact portions 321 and 331 capable of contacting the contact object 50 from the first direction X.
  • the second contact portion 40 is provided at the end portion far from the elastic portion 20 in the first direction X, and has a second contact portion 41 capable of contacting the contact object 60 from the first direction X.
  • the elastic portions 20 extend along the second direction Y, and are connected to a plurality of extending portions 24, which are respectively arranged with a gap 27 in the first direction X, and adjacent extending portions 24. It has a curved portion 25 that has been formed.
  • Each of the extending portions 24 arranged at both ends of the first direction X constitutes the first contact portion 201 and the second contact portion 202, respectively.
  • the curved portion 25 is arranged on one side of the second direction Y with respect to one end of the first contact portion 30 in the second direction Y.
  • the elastic portion 20 has a plurality of elastic pieces 21 and 22 arranged so as to have a gap 23 between them. With such a configuration, the elastic portion 20 can be elastically deformed more smoothly, and the durability of the elastic portion 20 can be improved.
  • the inspection jig 2 capable of inspecting an inspection object having a narrow pitch. Further, the inspection jig 2 provided with the probe pin 10 can realize an inspection unit 1 capable of inspecting an inspection object having a narrow pitch.
  • each of the first contact portion 30 and the second contact portion 40 can adopt any shape and configuration as long as both ends of the elastic portion 20 in the first direction X can be connected to each other.
  • each of the first contact portion 30 and the second contact portion 40 may be provided with contact portions capable of contacting the contact object from the second direction Y.
  • the first contact portion 30 may be provided with a contact portion having the same configuration as the second contact portion 41, or the second contact portion 40 may be provided with a plurality of contact portions.
  • the elastic portion 20 can adopt any shape and configuration as long as it has the first contact portion 201 and the second contact portion 202.
  • the elastic portion 20 may have a shape other than the meandering shape, or may be composed of one elastic piece.
  • the elastic portion 20 may have at least two extending portions 24 and at least one curved portion 25. Further, for example, the elastic portion 20 may have a larger number of extending portions 24 and curved portions 25 than the probe pins 10 of FIG. 1, as shown in FIGS. 5 to 8.
  • the elastic portion 20 is provided in the extending portion 24 in the middle of the first direction X and has a rib 28 connecting the pair of elastic pieces 21 and 22. ..
  • FIGS. 7 and 8 even if an external force is applied to any of the first contact portions 321 and 331 and the second contact portion 41 by the rib 28, the elastic piece 21 adjacent to the elastic portion 20 , 22 are elastically deformed without contact.
  • FIG. 7 shows the state of the elastic portion 20 when external forces in the X1 and X2 directions are applied to the first contact portions 321 and 331 and the second contact portion 41, respectively.
  • the probe pin 10 of the first aspect of the present disclosure is An elastic portion 20 that can be elastically deformed along the first direction X, With the first contact portion 30 to which one end of the elastic portion 20 in the first direction X is connected, A second contact portion 40 to which the other end of the elastic portion 20 in the first direction X is connected is provided.
  • the elastic portion 20 is a probe pin 10 that can be accommodated in the socket 100 in a state of being expandable and contractible in the first direction X.
  • the elastic portion 20 A first contact portion 201 extending from the first contact portion 30 along a second direction Y intersecting the first direction X to form one end of the elastic portion 20 in the first direction.
  • the elastic portion 20 is arranged on the same side of the first contact portion 201 and the second contact portion 40 in the second direction Y and extends from the second contact portion 40 along the second direction Y. It has a second contact portion 202 that constitutes the other end, and has a second contact portion 202. Each of the first contact portion 201 and the second contact portion 202 is configured to be able to contact the inside of the socket 100 in the first direction X while being housed in the socket 100.
  • the probe pin 10 of the first aspect for example, when a plurality of probe pins 10 having contact portions 321, 331, and 41 in each of the first contact portion 30 and the second contact portion 40 are accommodated in the socket 100.
  • the arrangement interval of the contact portions 321, 331, 41 of the probe pin 10 adjacent to the second direction Y can be reduced. As a result, it is possible to realize a probe pin 10 capable of narrowing the pitch of the contact objects 50 and 60.
  • the probe pin 10 of the second aspect of the present disclosure is The first contact portion 321 is provided at an end portion of the first direction X far from the elastic portion 20 and is capable of contacting the contact object 50 from the first direction X.
  • the second contact portion 40 is provided at an end portion far from the elastic portion 20 in the first direction X, and a second contact portion 41 capable of contacting the contact object 60 from the first direction X is provided.
  • the probe pin 10 of the second aspect for example, when a plurality of probe pins 10 having contact portions 321, 331, and 41 in each of the first contact portion 30 and the second contact portion 40 are accommodated in the socket 100.
  • the arrangement interval of the contact portions 321, 331, and 41 of the probe pin 10 adjacent to the second direction Y can be more reliably reduced.
  • the probe pin 10 of the third aspect of the present disclosure is The elastic portion 20 is arranged on one side of the second direction Y with respect to one end 301 of the first contact portion 30 in the second direction Y.
  • the direction X1 in which at least one of the first contact portions 321 and 331 or the second contact portion 41 is in the first direction X and the first contact portions 321 and 331 and the second contact portion 41 approach each other.
  • X2 is configured to be movable toward the other side of the second direction Y when an external force is applied.
  • the contact object 60 is brought into contact with the second contact portion 41 from the first direction X, and the first contact portions 321 and 331 and the second contact portion 41 are brought into contact with each other. It is assumed that an external force in the X1 direction that approaches each other is applied. In this case, the second contact portion 41 moves to the other side in the second direction Y with respect to the side surface 401 of the second contact portion 40 in the second direction Y while contacting the surface of the terminal 60.
  • this wiping operation for example, even if a film is formed on the surface of the terminal 60, the film can be removed, so that the influence of the formation of the film on the contact reliability and the like can be reduced.
  • the probe pin 10 of the fourth aspect of the present disclosure is The elastic portion 20 A plurality of extending portions 24 extending along the second direction Y and arranged in the first direction X with a gap 27 from each other. It has a curved portion 25 connected to the extending portion 24 adjacent to the extending portion 24, and has a curved portion 25.
  • Each of the extending portions 24 arranged at both ends of the first direction X constitutes the first contact portion 201 and the second contact portion 202, respectively.
  • the curved portion 25 is arranged on one side of the second direction Y with respect to one end 301 of the first contact portion 30 in the second direction Y.
  • the probe pin 10 of the fourth aspect the probe pin 10 capable of narrowing the pitch of the contact objects 50 and 60 can be easily realized.
  • the probe pin 10 of the fifth aspect of the present disclosure is The elastic portion 20 It has a plurality of elastic pieces 21 and 22 arranged with a gap 23 between them.
  • the elastic portion 20 can be elastically deformed more smoothly, and the durability of the elastic portion 20 can be improved.
  • the inspection jig 2 of the sixth aspect of the present disclosure is The probe pin 10 of the above aspect and The socket 100 capable of accommodating the probe pin 10 is provided.
  • each of the first contact portion 201 and the second contact portion 202 abuts on the inner surface of the socket 100 in the first direction X. It is configured.
  • the inspection jig 2 of the sixth aspect it is possible to realize the inspection jig 2 capable of inspecting a narrow-pitched inspection object by the probe pin 10.
  • the inspection unit 1 of the seventh aspect of the present disclosure is At least one of the inspection jigs 2 is provided.
  • the inspection jig 2 can realize the inspection unit 1 capable of inspecting a narrow-pitched inspection object.
  • the probe pin of the present disclosure can be applied to an inspection jig used for inspection of semiconductors such as a camera device, a USB device, an HDMI (registered trademark) device, or a QFN device and a SON device.
  • the inspection jig of the present disclosure can be applied to an inspection unit used for inspection of semiconductors such as a camera device, a USB device, an HDMI (registered trademark) device, or a QFN device and a SON device.
  • an inspection unit used for inspection of semiconductors such as a camera device, a USB device, an HDMI (registered trademark) device, or a QFN device and a SON device.
  • the inspection unit of the present disclosure can be used for inspection of semiconductors such as camera devices, USB devices, HDMI (registered trademark) devices, or QFN devices and SON devices.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

This probe pin comprises: an elastic section that can be elastically deformed along a first direction; a first contact section to which one end of the elastic section, in the first direction thereof, is connected; and a second contact section to which the other end of the elastic section, in the first direction thereof, is connected. The elastic section comprises: a first abutting section extending from the first contact section in a second direction and constituting the one end of the elastic section; and a second abutting section disposed on the same side as the first abutting section and the second contact section in the second direction, extending along the second direction from the second contact section, and constituting the other end of the elastic section. The first abutting section and the second abutting section are configured so as to be able to abut the inside of a socket in the first direction in a state of being accommodated in the socket.

Description

プローブピン、検査治具および検査ユニットProbe pin, inspection jig and inspection unit
　本開示は、プローブピン、検査治具および検査ユニットに関する。 This disclosure relates to probe pins, inspection jigs and inspection units.
　カメラあるいは液晶パネル等の電子部品モジュールでは、一般に、その製造工程において、導通検査および動作特性検査等が行われる。これらの検査は、プローブピンを用いて、電子部品モジュールに設置されている本体基板に接続するための端子と、検査装置の端子とを接続することにより行われる。 In electronic component modules such as cameras or liquid crystal panels, continuity inspection, operating characteristic inspection, etc. are generally performed in the manufacturing process. These inspections are performed by connecting the terminals for connecting to the main body board installed in the electronic component module and the terminals of the inspection device using probe pins.
　このようなプローブピンとしては、特許文献１に記載されたものがある。このプローブピンは、電子部品の電極端子および被接続電子部品の電極端子に対してそれぞれ接触可能な一対のコンタクトと、一対のコンタクト間に介在して一対のコンタクトを接続する蛇行部とを備えている。 As such a probe pin, there is one described in Patent Document 1. This probe pin includes a pair of contacts that can contact the electrode terminals of the electronic component and the electrode terminals of the connected electronic component, respectively, and a meandering portion that connects the pair of contacts by interposing between the pair of contacts. There is.
特開２００２－１３４２０２号公報JP-A-2002-134202
　前記プローブピンでは、蛇行部の伸縮方向に直行する幅方向の中心に一対のコンタクトをそれぞれ配置して、蛇行部を伸縮させた際に各コンタクトが幅方向に倒れないようにしている。このため、複数の前記プローブピンを幅方向に並べて配置すると、隣接する各コンタクトの配置間隔を狭くすることが難しくなり、例えば、狭ピッチ化された電子部品モジュールの一対の端子に対して、各コンタクトを同時に接触させた状態にすることができず、電子部品モジュールの狭ピッチ化に対応することができない場合がある。 In the probe pin, a pair of contacts are arranged at the center in the width direction perpendicular to the expansion / contraction direction of the meandering portion so that each contact does not fall in the width direction when the meandering portion is expanded / contracted. For this reason, when a plurality of the probe pins are arranged side by side in the width direction, it becomes difficult to narrow the arrangement interval of the adjacent contacts. For example, for a pair of terminals of the narrow pitched electronic component module, each of the probe pins is arranged. It may not be possible to bring the contacts into contact with each other at the same time, and it may not be possible to cope with the narrowing of the pitch of the electronic component module.
　本開示は、接触対象物の狭ピッチ化に対応可能なプローブピン、このプローブピンを備えた検査治具、および、この検査治具を備えた検査ユニットを提供することを目的とする。 An object of the present disclosure is to provide a probe pin capable of narrowing the pitch of a contact object, an inspection jig equipped with the probe pin, and an inspection unit equipped with the inspection jig.
　本開示の一例のプローブピンは、
　第１方向に沿って弾性変形可能な弾性部と、
　前記弾性部の前記第１方向の一端が接続された第１接触部と、
　前記弾性部の前記第１方向の他端が接続された第２接触部と
を備え、
　前記弾性部が、前記第１方向に伸縮可能な状態でソケットに収容可能なプローブピンであって、
　前記弾性部が、
　前記第１接触部から前記第１方向に交差する第２方向に沿って延びて前記弾性部の前記第１方向の一端を構成する第１当接部と、
　前記第２方向において前記第１当接部と前記第２接触部に対する同じ側に配置され、前記第２接触部から前記第２方向に沿って延びて前記弾性部の前記他端を構成する第２当接部と
を有し、
　前記第１当接部および前記第２当接部の各々が、前記ソケットに収容された状態で前記第１方向において前記ソケットの内部に当接可能に構成されている。 The probe pin of the example of the present disclosure is
An elastic part that can be elastically deformed along the first direction,
With the first contact portion to which one end of the elastic portion in the first direction is connected,
A second contact portion to which the other end of the elastic portion in the first direction is connected is provided.
The elastic portion is a probe pin that can be accommodated in the socket in a state of being expandable and contractible in the first direction.
The elastic part
A first contact portion extending from the first contact portion along a second direction intersecting the first direction to form one end of the elastic portion in the first direction.
A second that is arranged on the same side of the first contact portion and the second contact portion in the second direction and extends from the second contact portion along the second direction to form the other end of the elastic portion. Has 2 contact points
Each of the first contact portion and the second contact portion is configured to be able to contact the inside of the socket in the first direction while being housed in the socket.
　また、本開示の一例の検査治具は、
　前記プローブピンと、
　前記プローブピンを収容可能な前記ソケットと
を備え、
　前記ソケットに前記プローブピンを収容したときに、前記第１当接部および前記第２当接部の各々が、前記第１方向において、前記ソケットの内面に当接するように構成されている。 Further, the inspection jig of the example of the present disclosure is
With the probe pin
With the socket capable of accommodating the probe pin,
When the probe pin is housed in the socket, each of the first contact portion and the second contact portion is configured to abut on the inner surface of the socket in the first direction.
　また、本開示の一例の検査ユニットは、
　前記検査治具を少なくとも１つ備える。 In addition, the inspection unit of the example of the present disclosure is
At least one of the inspection jigs is provided.
　前記プローブピンによれば、弾性部が、第１接触部から第２方向に沿って延びて弾性部の一端を構成する第１当接部と、第２方向において第１当接部と第２接触部に対する同じ側に配置され第２接触部から第２方向に沿って延びて弾性部の他端を構成する第２当接部とを有する。第１当接部および第２当接部の各々が、ソケットに収容されたときに第１方向においてソケットの内部に当接可能に構成されている。このような構成により、例えば、第１接触部および第２接触部の各々に接点部をそれぞれ設けたプローブピンをソケットに複数収容する場合、第２方向に隣接するプローブピンの接点部の配置間隔を小さくすることができる。その結果、接触対象物の狭ピッチ化に対応可能なプローブピンを実現できる。 According to the probe pin, the elastic portion extends from the first contact portion along the second direction to form one end of the elastic portion, and the first contact portion and the second contact portion in the second direction. It has a second contact portion that is arranged on the same side with respect to the contact portion and extends from the second contact portion along the second direction to form the other end of the elastic portion. Each of the first contact portion and the second contact portion is configured to be able to contact the inside of the socket in the first direction when housed in the socket. With such a configuration, for example, when a plurality of probe pins provided with contact portions for each of the first contact portion and the second contact portion are accommodated in the socket, the arrangement interval of the contact portions of the probe pins adjacent to each other in the second direction is provided. Can be made smaller. As a result, it is possible to realize a probe pin capable of narrowing the pitch of the contact object.
　前記検査治具によれば、前記プローブピンにより、狭ピッチ化された検査対象物を検査可能な検査治具を実現できる。 According to the inspection jig, the probe pin can realize an inspection jig capable of inspecting a narrow-pitched inspection object.
　前記検査ユニットによれば、前記検査治具により、狭ピッチ化された検査対象物を検査可能な検査ユニットを実現できる。 According to the inspection unit, the inspection jig can realize an inspection unit capable of inspecting a narrow-pitch inspection object.
本開示の一実施形態のプローブピンを示す斜視図。The perspective view which shows the probe pin of one Embodiment of this disclosure. 図１のプローブピンを備えた検査治具の平面図。The plan view of the inspection jig provided with the probe pin of FIG. 図１のプローブピンの第１接点部に対して外力を加えた場合の弾性部の状態を説明するための図。It is a figure for demonstrating the state of the elastic part when an external force is applied to the 1st contact part of the probe pin of FIG. 図１のプローブピンの第２接点部に対して外力を加えた場合の弾性部の状態を説明するための図。The figure for demonstrating the state of the elastic part when an external force is applied to the 2nd contact part of the probe pin of FIG. 図１のプローブピンの変形例を示す斜視図。The perspective view which shows the modification of the probe pin of FIG. 図５のプローブピンを備えた検査治具の平面図。The plan view of the inspection jig provided with the probe pin of FIG. 図５のプローブピンの第１接点部および第２接点部に対して外力を加えた場合の弾性部の状態を説明するための図。FIG. 5 is a diagram for explaining a state of an elastic portion when an external force is applied to the first contact portion and the second contact portion of the probe pin of FIG. 図５のプローブピンの第２接点部に対して外力を加えた場合の弾性部の状態を説明するための図。FIG. 5 is a diagram for explaining a state of an elastic portion when an external force is applied to the second contact portion of the probe pin of FIG.
　以下、本開示の一例を添付図面に従って説明する。なお、以下の説明では、必要に応じて特定の方向あるいは位置を示す用語（例えば、「上」、「下」、「右」、「左」を含む用語）を用いるが、それらの用語の使用は図面を参照した本開示の理解を容易にするためであって、それらの用語の意味によって本開示の技術的範囲が限定されるものではない。また、以下の説明は、本質的に例示に過ぎず、本開示、その適用物、あるいは、その用途を制限することを意図するものではない。さらに、図面は模式的なものであり、各寸法の比率等は現実のものとは必ずしも合致していない。 Hereinafter, an example of the present disclosure will be described with reference to the attached drawings. In the following description, terms indicating a specific direction or position (for example, terms including "top", "bottom", "right", and "left") are used as necessary, but the use of these terms is used. Is for facilitating the understanding of the present disclosure with reference to the drawings, and the meaning of those terms does not limit the technical scope of the present disclosure. In addition, the following description is merely an example and is not intended to limit the present disclosure, its application, or its use. Furthermore, the drawings are schematic, and the ratio of each dimension does not always match the actual one.
　本開示の一実施形態のプローブピン１０は、例えば、図１に示すように、第１方向Ｘに細長い薄板状で導電性を有している。このプローブピン１０は、一例として、図２に示すように、絶縁性のソケット１００に収容された状態で使用され、ソケット１００と共に検査治具２を構成する。検査治具２には、一例として、複数のプローブピン１０が収容されている。 The probe pin 10 of the embodiment of the present disclosure is, for example, as shown in FIG. 1, has an elongated thin plate shape in the first direction X and has conductivity. As an example, the probe pin 10 is used in a state of being housed in an insulating socket 100 as shown in FIG. 2, and constitutes an inspection jig 2 together with the socket 100. As an example, the inspection jig 2 houses a plurality of probe pins 10.
　また、図２に示すように、検査治具２は、検査ユニット１の一部を構成している。この実施形態では、検査ユニット１は、一対の検査治具２を有している。各検査治具２は、後述するプローブピン１０の第１接点部３２１、３３１および第２接点部４１が、ソケット１００から外部に露出した状態で、第１方向Ｘに交差（例えば、直交）する第２方向Ｙに隣接するように配置されている。 Further, as shown in FIG. 2, the inspection jig 2 constitutes a part of the inspection unit 1. In this embodiment, the inspection unit 1 has a pair of inspection jigs 2. In each inspection jig 2, the first contact portions 321 and 331 and the second contact portion 41 of the probe pin 10, which will be described later, intersect (for example, orthogonally) in the first direction X in a state of being exposed to the outside from the socket 100. It is arranged so as to be adjacent to the second direction Y.
　各ソケット１００は、図２に示すように、その内部に複数の収容部１０１（図２には、１つのみ示す）を有している。各収容部１０１は、スリット状を有し、それぞれ１つのプローブピン１０を電気的に独立して収容可能かつ保持可能に構成されている。また、各収容部１０１は、第１方向Ｘおよび第２方向Ｙに交差する方向（すなわち、図２の紙面貫通方向）に沿って一列に並んでかつ等間隔に配置されている。 As shown in FIG. 2, each socket 100 has a plurality of accommodating portions 101 (only one is shown in FIG. 2) inside the socket 100. Each accommodating portion 101 has a slit shape, and each accommodating portion 101 is configured to be electrically independently accommodating and holding one probe pin 10. Further, the accommodating portions 101 are arranged in a line and at equal intervals along a direction intersecting the first direction X and the second direction Y (that is, the paper surface penetrating direction in FIG. 2).
　なお、各ソケット１００は、図２に示すように、プローブピン１０を収容した状態で、第１方向Ｘの内面とプローブピン１０との間に隙間が形成されるように構成する場合に限らない。例えば、各ソケット１００は、プローブピン１０が、その両端の当接部２０１、２０２が共にソケット１００の内面に接触した状態で収容されるように構成してもよい。 As shown in FIG. 2, each socket 100 is not limited to the case where the probe pin 10 is housed and a gap is formed between the inner surface of the first direction X and the probe pin 10. .. For example, each socket 100 may be configured such that the probe pin 10 is accommodated in a state where the contact portions 201 and 202 at both ends thereof are in contact with the inner surface of the socket 100.
　各プローブピン１０は、図２に示すように、第１方向Ｘに沿って弾性変形可能な弾性部２０と、この弾性部２０の第１方向Ｘの両端がそれぞれ接続された第１接触部３０および第２接触部４０とを備えている。各プローブピン１０は、一例として、電鋳法で形成され、弾性部２０、第１接触部３０および第２接触部４０が、第１方向Ｘに沿って直列的に配置されかつ一体に構成されている。 As shown in FIG. 2, each probe pin 10 has an elastic portion 20 that can be elastically deformed along the first direction X and a first contact portion 30 in which both ends of the elastic portion 20 in the first direction X are connected. And a second contact portion 40. Each probe pin 10 is formed by an electroforming method as an example, and the elastic portion 20, the first contact portion 30, and the second contact portion 40 are arranged in series and integrally formed along the first direction X. ing.
　弾性部２０は、図２に示すように、弾性部２０の第１方向Ｘの一端を構成する第１当接部２０１と、弾性部２０の第１方向Ｘの他端を構成する第２当接部２０２とを有している。第１当接部２０１は、第１接触部３０から第２方向Ｙに延びている。第２当接部２０２は、第２方向Ｙにおいて第１当接部２０１と第２接触部４０に対する同じ側に配置されて、第２接触部４０から第２方向Ｙに沿って延びている。第１当接部２０１および第２当接部２０２の各々は、ソケット１００に収容された状態で、第１方向Ｘにおいて収容部１０１を構成するソケット１００の内部に当接可能に構成されている。 As shown in FIG. 2, the elastic portion 20 includes a first contact portion 201 forming one end of the elastic portion 20 in the first direction X and a second contact portion 201 forming the other end of the elastic portion 20 in the first direction X. It has a contact portion 202. The first contact portion 201 extends from the first contact portion 30 in the second direction Y. The second contact portion 202 is arranged on the same side of the first contact portion 201 and the second contact portion 40 in the second direction Y, and extends from the second contact portion 40 along the second direction Y. Each of the first contact portion 201 and the second contact portion 202 is configured to be able to contact the inside of the socket 100 constituting the accommodation portion 101 in the first direction X in a state of being housed in the socket 100. ..
　また、弾性部２０は、図２に示すように、一例として、相互に隙間２３を空けて配置された複数の弾性片（この実施形態では、２つの帯状の弾性片）２１、２２で構成されている。各弾性片２１、２２は、第２方向Ｙにそれぞれ延びた複数の延在部２４と、隣接する延在部２４にそれぞれ接続された複数の湾曲部２５とで構成された蛇行形状を有している。この実施形態では、弾性部２０は、４つの延在部２４と、３つの湾曲部２５とで構成されている。 Further, as shown in FIG. 2, the elastic portion 20 is composed of a plurality of elastic pieces (in this embodiment, two band-shaped elastic pieces) 21 and 22 arranged with a gap 23 between them, as an example. ing. Each of the elastic pieces 21 and 22 has a meandering shape composed of a plurality of extending portions 24 extending in the second direction Y and a plurality of curved portions 25 connected to the adjacent extending portions 24, respectively. ing. In this embodiment, the elastic portion 20 is composed of four extending portions 24 and three curved portions 25.
　各延在部２４は、第１方向Ｘにおいて相互に隙間２７を空けて配置されている。第１方向Ｘの両端に配置された各延在部２４が、第１当接部２０１および第２当接部２０２をそれぞれ構成している。第１当接部２０１を構成する延在部２４は、第２方向Ｙの一端が第１接触部３０に接続され、第２方向Ｙの他端が湾曲部２５に接続されている。第２当接部２０２を構成する延在部２４は、第２方向Ｙの一端が第２接触部４０に接続され、第２方向Ｙの他端が湾曲部２５に接続されている。なお、第２当接部２０２を構成する延在部２４の一端は、２つの弾性片２１、２２が接続部２６により接続されて一体化された状態で、第２接触部４０に接続されている。 Each extending portion 24 is arranged with a gap 27 from each other in the first direction X. Each extending portion 24 arranged at both ends of the first direction X constitutes the first contact portion 201 and the second contact portion 202, respectively. In the extending portion 24 constituting the first contact portion 201, one end in the second direction Y is connected to the first contact portion 30, and the other end in the second direction Y is connected to the curved portion 25. In the extending portion 24 constituting the second contact portion 202, one end of the second direction Y is connected to the second contact portion 40, and the other end of the second direction Y is connected to the curved portion 25. One end of the extending portion 24 constituting the second contact portion 202 is connected to the second contact portion 40 in a state where the two elastic pieces 21 and 22 are connected by the connecting portion 26 and integrated. There is.
　各湾曲部２５は、一例として、第１接触部３０の第２方向Ｙの一端３０１に対して、第２方向Ｙの一方側に配置されている。 As an example, each curved portion 25 is arranged on one side of the second direction Y with respect to one end 301 of the first contact portion 30 in the second direction Y.
　第１接触部３０は、図２に示すように、一例として、弾性部２０が接続された本体部３１と、この本体部３１から第１方向Ｘでかつ弾性部２０から離れる方向に延びる一対の脚部３２、３３とを有している。 As shown in FIG. 2, the first contact portion 30 includes, as an example, a main body portion 31 to which the elastic portion 20 is connected and a pair extending from the main body portion 31 in the first direction X and in a direction away from the elastic portion 20. It has legs 32 and 33.
　本体部３１は、第１方向Ｘの弾性部２０側の端部に設けられた貫通孔３１１を有している。この貫通孔３１１は、弾性部２０の弾性片２１、２２間の隙間２３に接続されている。 The main body 31 has a through hole 311 provided at the end on the elastic portion 20 side in the first direction X. The through hole 311 is connected to the gap 23 between the elastic pieces 21 and 22 of the elastic portion 20.
　各脚部３２、３３は、第２方向Ｙに隙間３４を空けて配置され第２方向Ｙに弾性変形可能に構成されており、その先端に設けられた第１接点部３２１、３３１を有している。第１接点部３２１、３３１の各々は、接触対象物の一例である検査対象物の凸接点５０に第１方向Ｘから接触可能に構成されている。また、各脚部３２、３３は、第２方向Ｙに対向する側面に設けられた突起部３２２、３３２を有している。各突起部３２２、３３２は、一対の脚部３２、３３の間の隙間３４を塞ぐように突出しており、凸接点５０の隙間３４への過剰挿入を防止している。 The legs 32 and 33 are arranged with a gap 34 in the second direction Y and are configured to be elastically deformable in the second direction Y, and have first contact portions 321 and 331 provided at the tips thereof. ing. Each of the first contact portions 321 and 331 is configured to be able to contact the convex contact 50 of the inspection object, which is an example of the contact object, from the first direction X. Further, each of the leg portions 32 and 33 has protrusions 322 and 332 provided on the side surfaces facing the second direction Y. The protrusions 322 and 332 project so as to close the gap 34 between the pair of legs 32 and 33, and prevent the convex contact 50 from being excessively inserted into the gap 34.
　第２接触部４０は、図２に示すように、一例として、第１方向Ｘに延びる略矩形状を有している。第２接触部４０の第１方向Ｘでかつ弾性部２０から遠い方の先端は、第１方向Ｘでかつ弾性部２０から離れるに従って先細りとなる略三角形状を有し、第２接点部４１を構成している。第２接点部４１は、接触対象物の一例である検査対象物の端子６０に第１方向Ｘから接触可能に構成されている。また、第２接触部４０の第２方向Ｙにおいて対向する一対の側面のうちの弾性部２０が接続されてない側面４０１には、切欠部４２が設けられている。この切欠部４２は、第２接触部４０の側面４０１における第１方向Ｘの弾性部２０に近い端に設けられている。 As shown in FIG. 2, the second contact portion 40 has a substantially rectangular shape extending in the first direction X as an example. The tip of the second contact portion 40 in the first direction X and farther from the elastic portion 20 has a substantially triangular shape that tapers in the first direction X and away from the elastic portion 20, and the second contact portion 41 is formed. It is configured. The second contact portion 41 is configured to be able to contact the terminal 60 of the inspection object, which is an example of the contact object, from the first direction X. Further, a notch 42 is provided on the side surface 401 of the pair of side surfaces facing each other in the second direction Y of the second contact portion 40 to which the elastic portion 20 is not connected. The notch 42 is provided at the end of the side surface 401 of the second contact 40 near the elastic portion 20 in the first direction X.
　図３に、第２接触部４０の第２接点部４１に対して、ソケット１００の内部に向かうＸ１方向の外力を加えた場合の弾性部２０の状態を示す。図３に示すように、第２接点部４１に対してＸ１方向の外力が加えられると、弾性部２０は、隣接する弾性片２１、２２が接触することなく弾性変形する。また、弾性部２０が、第１接触部３０の第２方向Ｙの一端３０１（図２参照）に対して、あるいは、第２接触部４０の第２方向Ｙにおいて対向する一対の側面のうちの弾性部２０が接続されてない側面４０１（図２参照）に対して、第２方向Ｙにおける一方側に配置されている。このため、第２接点部４１は、Ｘ１方向の外力が加えられると、端子６０の表面に接触しながら、第２接触部４０の側面４０１に対する第２方向Ｙにおける他方側（すなわち、第２方向Ｙにおいて、第２接触部４０の第２方向Ｙの側面４０１から、弾性部２０が配置されている側とは反対側に向かう方向）に移動する。例えば、端子６０の表面上に被膜が形成されたとしても、第２接点部４１のワイピング動作により、この被膜を除去することができるので、被膜の形成による接触信頼性などに対する影響を軽減できる。 FIG. 3 shows the state of the elastic portion 20 when an external force in the X1 direction toward the inside of the socket 100 is applied to the second contact portion 41 of the second contact portion 40. As shown in FIG. 3, when an external force in the X1 direction is applied to the second contact portion 41, the elastic portion 20 elastically deforms without contacting the adjacent elastic pieces 21 and 22. Further, among a pair of side surfaces in which the elastic portion 20 faces one end 301 (see FIG. 2) of the first contact portion 30 in the second direction Y, or in the second direction Y of the second contact portion 40. The elastic portion 20 is arranged on one side in the second direction Y with respect to the side surface 401 (see FIG. 2) to which the elastic portion 20 is not connected. Therefore, when an external force in the X1 direction is applied, the second contact portion 41 contacts the surface of the terminal 60 and is on the other side (that is, the second direction) in the second direction Y with respect to the side surface 401 of the second contact portion 40. In Y, the second contact portion 40 moves from the side surface 401 in the second direction Y to the side opposite to the side where the elastic portion 20 is arranged). For example, even if a film is formed on the surface of the terminal 60, the film can be removed by the wiping operation of the second contact portion 41, so that the influence of the film formation on the contact reliability and the like can be reduced.
　また、図４に、Ｘ１方向の外力に加えて、第１接触部３０の第１接点部３２１、３３１に対して、ソケット１００の内部に向かうＸ２方向の外力を加えた場合の弾性部２０の状態を示す。この場合においても、弾性部２０は、隣接する弾性片２１、２２が接触することなく弾性変形し、第２接点部４１によって、Ｘ１方向の外力のみが加えられた場合と同様のワイピング動作が行われる。第１接点部３２１、３３１は、Ｘ２方向の外力によって、ソケット１００の内部に向かって第１方向Ｘに沿って移動する。 Further, in FIG. 4, in addition to the external force in the X1 direction, the elastic portion 20 of the elastic portion 20 when an external force in the X2 direction toward the inside of the socket 100 is applied to the first contact portions 321 and 331 of the first contact portion 30. Indicates the state. Even in this case, the elastic portion 20 is elastically deformed without contacting the adjacent elastic pieces 21 and 22, and the wiping operation similar to the case where only the external force in the X1 direction is applied by the second contact portion 41 is performed. Will be. The first contact portions 321 and 331 move along the first direction X toward the inside of the socket 100 by an external force in the X2 direction.
　前記プローブピン１０によれば、弾性部２０が、第１接触部３０から第２方向Ｙに沿って延びて弾性部２０の一端を構成する第１当接部２０１と、第２方向Ｙにおいて第１当接部２０１と第２接触部４０に対する同じ側に配置され第２接触部４０から第２方向Ｙに沿って延びて弾性部２０の他端を構成する第２当接部２０２とを有する。第１当接部２０１および第２当接部２０２の各々が、ソケット１００に収容されたときに第１方向Ｘにおいてソケット１００の内部に当接可能に構成されている。このような構成により、例えば、第１接触部３０および第２接触部４０の各々に第１接点部３２１、３３１および第２接点部４１をそれぞれ設けたプローブピン１０をソケット１００に複数収容する場合、第２方向Ｙに隣接するプローブピン１０の第１接点部３２１、３３１および第２接点部４１の配置間隔を小さくすることができる。その結果、接触対象物５０、６０の狭ピッチ化に対応可能なプローブピン１０を実現できる。 According to the probe pin 10, the elastic portion 20 extends from the first contact portion 30 along the second direction Y to form one end of the elastic portion 20, and the first contact portion 201 and the second contact portion 201 in the second direction Y. It has a second contact portion 202 that is arranged on the same side of the first contact portion 201 and the second contact portion 40 and extends from the second contact portion 40 along the second direction Y to form the other end of the elastic portion 20. .. Each of the first contact portion 201 and the second contact portion 202 is configured to be able to contact the inside of the socket 100 in the first direction X when housed in the socket 100. With such a configuration, for example, when a plurality of probe pins 10 having first contact portions 321 and 331 and second contact portions 41 provided in each of the first contact portion 30 and the second contact portion 40 are accommodated in the socket 100. , The arrangement interval of the first contact portions 321 and 331 and the second contact portion 41 of the probe pin 10 adjacent to the second direction Y can be reduced. As a result, it is possible to realize a probe pin 10 capable of narrowing the pitch of the contact objects 50 and 60.
　また、第１接触部３０が、第１方向Ｘにおける弾性部２０から遠い方の端部に設けられ、接触対象物５０に対して第１方向Ｘから接触可能な第１接点部３２１、３３１を有し、第２接触部４０が、第１方向Ｘにおける弾性部２０から遠い方の端部に設けられ、接触対象物６０に対して第１方向Ｘから接触可能な第２接点部４１を有している。このような構成により、例えば、第１接触部３０および第２接触部４０の各々に接点部３２１、３３１、４１をそれぞれ設けたプローブピン１０をソケット１００に複数収容する場合、第２方向Ｙに隣接するプローブピン１０の接点部３２１、３３１、４１の配置間隔をより確実に小さくすることができる。 Further, the first contact portion 30 is provided at the end portion far from the elastic portion 20 in the first direction X, and the first contact portions 321 and 331 capable of contacting the contact object 50 from the first direction X. The second contact portion 40 is provided at the end portion far from the elastic portion 20 in the first direction X, and has a second contact portion 41 capable of contacting the contact object 60 from the first direction X. doing. With such a configuration, for example, when a plurality of probe pins 10 having contact portions 321, 331, and 41 respectively provided in the first contact portion 30 and the second contact portion 40 are accommodated in the socket 100, the second direction Y The arrangement interval of the contact portions 321, 331, 41 of the adjacent probe pins 10 can be reduced more reliably.
　また、弾性部２０が、第２方向Ｙに沿ってそれぞれ延びると共に、第１方向Ｘに相互に隙間２７を空けてそれぞれ配置された複数の延在部２４と、隣接する延在部２４に接続された湾曲部２５とを有する。第１方向Ｘの両端に配置された延在部２４の各々が、第１当接部２０１および第２当接部２０２をそれぞれ構成する。湾曲部２５が、第１接触部３０の第２方向Ｙの一端に対して、第２方向Ｙの一方側に配置されている。このような構成により、接触対象物５０、６０の狭ピッチ化に対応可能なプローブピン１０を容易に実現できる。 Further, the elastic portions 20 extend along the second direction Y, and are connected to a plurality of extending portions 24, which are respectively arranged with a gap 27 in the first direction X, and adjacent extending portions 24. It has a curved portion 25 that has been formed. Each of the extending portions 24 arranged at both ends of the first direction X constitutes the first contact portion 201 and the second contact portion 202, respectively. The curved portion 25 is arranged on one side of the second direction Y with respect to one end of the first contact portion 30 in the second direction Y. With such a configuration, it is possible to easily realize the probe pin 10 capable of narrowing the pitch of the contact objects 50 and 60.
　また、弾性部２０が、相互に隙間２３を空けて配置された複数の弾性片２１、２２を有している。このような構成により、弾性部２０をより円滑に弾性変形させて、弾性部２０の耐久性を向上させることができる。 Further, the elastic portion 20 has a plurality of elastic pieces 21 and 22 arranged so as to have a gap 23 between them. With such a configuration, the elastic portion 20 can be elastically deformed more smoothly, and the durability of the elastic portion 20 can be improved.
　前記プローブピン１０により、狭ピッチ化された検査対象物を検査可能な検査治具２を実現できる。また、前記プローブピン１０を備えた検査治具２により、狭ピッチ化された検査対象物を検査可能な検査ユニット１を実現できる。 With the probe pin 10, it is possible to realize an inspection jig 2 capable of inspecting an inspection object having a narrow pitch. Further, the inspection jig 2 provided with the probe pin 10 can realize an inspection unit 1 capable of inspecting an inspection object having a narrow pitch.
　なお、第１接触部３０および第２接触部４０の各々は、弾性部２０の第１方向Ｘの両端がそれぞれ接続可能であれば、任意の形状および構成を採用することができる。例えば、第１接触部３０および第２接触部４０の各々に第２方向Ｙから接触対象物に接触可能な接点部を設けてもよい。また、例えば、第１接触部３０に第２接点部４１と同じ構成の接点部を設けてもよいし、第２接触部４０に複数の接点部を設けてもよい。 It should be noted that each of the first contact portion 30 and the second contact portion 40 can adopt any shape and configuration as long as both ends of the elastic portion 20 in the first direction X can be connected to each other. For example, each of the first contact portion 30 and the second contact portion 40 may be provided with contact portions capable of contacting the contact object from the second direction Y. Further, for example, the first contact portion 30 may be provided with a contact portion having the same configuration as the second contact portion 41, or the second contact portion 40 may be provided with a plurality of contact portions.
　弾性部２０は、第１当接部２０１および第２当接部２０２を有していれば、任意の形状および構成を採用することができる。例えば、弾性部２０は、蛇行形状以外の形状あってもよいし、１つの弾性片で構成されていてもよい。 The elastic portion 20 can adopt any shape and configuration as long as it has the first contact portion 201 and the second contact portion 202. For example, the elastic portion 20 may have a shape other than the meandering shape, or may be composed of one elastic piece.
　また、弾性部２０は、少なくとも２つの延在部２４と、少なくとも１つの湾曲部２５を有していればよい。また、例えば、弾性部２０は、図５～図８に示すように、図１のプローブピン１０よりも多い数の延在部２４および湾曲部２５を有することもできる。図５～図８のプローブピン１０では、弾性部２０は、その第１方向Ｘの中間の延在部２４に設けられて、一対の弾性片２１、２２を接続するリブ２８を有している。図７および図８に示すように、このリブ２８によって、第１接点部３２１、３３１および第２接点部４１のいずれに対して外力が加えられたとしても、弾性部２０の隣接する弾性片２１、２２は、接触することなく弾性変形する。なお、図７では、第１接点部３２１、３３１および第２接点部４１のそれぞれに対して、Ｘ１方向およびＸ２方向の外力を加えた場合の弾性部２０の状態を示している。 Further, the elastic portion 20 may have at least two extending portions 24 and at least one curved portion 25. Further, for example, the elastic portion 20 may have a larger number of extending portions 24 and curved portions 25 than the probe pins 10 of FIG. 1, as shown in FIGS. 5 to 8. In the probe pins 10 of FIGS. 5 to 8, the elastic portion 20 is provided in the extending portion 24 in the middle of the first direction X and has a rib 28 connecting the pair of elastic pieces 21 and 22. .. As shown in FIGS. 7 and 8, even if an external force is applied to any of the first contact portions 321 and 331 and the second contact portion 41 by the rib 28, the elastic piece 21 adjacent to the elastic portion 20 , 22 are elastically deformed without contact. Note that FIG. 7 shows the state of the elastic portion 20 when external forces in the X1 and X2 directions are applied to the first contact portions 321 and 331 and the second contact portion 41, respectively.
　以上、図面を参照して本開示における種々の実施形態を詳細に説明したが、最後に、本開示の種々の態様について説明する。なお、以下の説明では、一例として、参照符号も添えて記載する。 The various embodiments in the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure will be described. In the following description, a reference reference numeral is also provided as an example.
　本開示の第１態様のプローブピン１０は、
　第１方向Ｘに沿って弾性変形可能な弾性部２０と、
　前記弾性部２０の前記第１方向Ｘの一端が接続された第１接触部３０と、
　前記弾性部２０の前記第１方向Ｘの他端が接続された第２接触部４０と
を備え、
　前記弾性部２０が、前記第１方向Ｘに伸縮可能な状態でソケット１００に収容可能なプローブピン１０であって、
　前記弾性部２０が、
　前記第１接触部３０から前記第１方向Ｘに交差する第２方向Ｙに沿って延びて前記弾性部２０の前記第１方向の一端を構成する第１当接部２０１と、
　前記第２方向Ｙにおいて前記第１当接部２０１と前記第２接触部４０に対する同じ側に配置され、前記第２接触部４０から前記第２方向Ｙに沿って延びて前記弾性部２０の前記他端を構成する第２当接部２０２と
を有し、
　前記第１当接部２０１および前記第２当接部２０２の各々が、前記ソケット１００に収容された状態で前記第１方向Ｘにおいて前記ソケット１００の内部に当接可能に構成されている。 The probe pin 10 of the first aspect of the present disclosure is
An elastic portion 20 that can be elastically deformed along the first direction X,
With the first contact portion 30 to which one end of the elastic portion 20 in the first direction X is connected,
A second contact portion 40 to which the other end of the elastic portion 20 in the first direction X is connected is provided.
The elastic portion 20 is a probe pin 10 that can be accommodated in the socket 100 in a state of being expandable and contractible in the first direction X.
The elastic portion 20
A first contact portion 201 extending from the first contact portion 30 along a second direction Y intersecting the first direction X to form one end of the elastic portion 20 in the first direction.
The elastic portion 20 is arranged on the same side of the first contact portion 201 and the second contact portion 40 in the second direction Y and extends from the second contact portion 40 along the second direction Y. It has a second contact portion 202 that constitutes the other end, and has a second contact portion 202.
Each of the first contact portion 201 and the second contact portion 202 is configured to be able to contact the inside of the socket 100 in the first direction X while being housed in the socket 100.
　第１態様のプローブピン１０によれば、例えば、第１接触部３０および第２接触部４０の各々に接点部３２１、３３１、４１をそれぞれ設けたプローブピン１０をソケット１００に複数収容する場合、第２方向Ｙに隣接するプローブピン１０の接点部３２１、３３１、４１の配置間隔を小さくすることができる。その結果、接触対象物５０、６０の狭ピッチ化に対応可能なプローブピン１０を実現できる。 According to the probe pin 10 of the first aspect, for example, when a plurality of probe pins 10 having contact portions 321, 331, and 41 in each of the first contact portion 30 and the second contact portion 40 are accommodated in the socket 100. The arrangement interval of the contact portions 321, 331, 41 of the probe pin 10 adjacent to the second direction Y can be reduced. As a result, it is possible to realize a probe pin 10 capable of narrowing the pitch of the contact objects 50 and 60.
　本開示の第２態様のプローブピン１０は、
　前記第１接触部３０が、前記第１方向Ｘにおける前記弾性部２０から遠い方の端部に設けられ、接触対象物５０に対して前記第１方向Ｘから接触可能な第１接点部３２１、３３１を有し、
　前記第２接触部４０が、前記第１方向Ｘにおける前記弾性部２０から遠い方の端部に設けられ、接触対象物６０に対して前記第１方向Ｘから接触可能な第２接点部４１を有する。 The probe pin 10 of the second aspect of the present disclosure is
The first contact portion 321 is provided at an end portion of the first direction X far from the elastic portion 20 and is capable of contacting the contact object 50 from the first direction X. Has 331 and
The second contact portion 40 is provided at an end portion far from the elastic portion 20 in the first direction X, and a second contact portion 41 capable of contacting the contact object 60 from the first direction X is provided. Have.
　第２態様のプローブピン１０によれば、例えば、第１接触部３０および第２接触部４０の各々に接点部３２１、３３１、４１をそれぞれ設けたプローブピン１０をソケット１００に複数収容する場合、第２方向Ｙに隣接するプローブピン１０の接点部３２１、３３１、４１の配置間隔をより確実に小さくすることができる。 According to the probe pin 10 of the second aspect, for example, when a plurality of probe pins 10 having contact portions 321, 331, and 41 in each of the first contact portion 30 and the second contact portion 40 are accommodated in the socket 100. The arrangement interval of the contact portions 321, 331, and 41 of the probe pin 10 adjacent to the second direction Y can be more reliably reduced.
　本開示の第３態様のプローブピン１０は、
　前記弾性部２０が、前記第１接触部３０の前記第２方向Ｙの一端３０１に対して、前記第２方向Ｙの一方側に配置されており、
　前記第１接点部３２１、３３１または前記第２接点部４１の少なくともいずれかが、前記第１方向Ｘでかつ前記第１接点部３２１、３３１および前記第２接点部４１が相互に接近する方向Ｘ１、Ｘ２の外力を加えたときに、前記第２方向Ｙの他方側に向かって移動可能に構成されている。 The probe pin 10 of the third aspect of the present disclosure is
The elastic portion 20 is arranged on one side of the second direction Y with respect to one end 301 of the first contact portion 30 in the second direction Y.
The direction X1 in which at least one of the first contact portions 321 and 331 or the second contact portion 41 is in the first direction X and the first contact portions 321 and 331 and the second contact portion 41 approach each other. , X2 is configured to be movable toward the other side of the second direction Y when an external force is applied.
　第３態様のプローブピン１０によれば、例えば、第２接点部４１に対して、第１方向Ｘから接触対象物６０を接触させて、第１接点部３２１、３３１および第２接点部４１が相互に接近するＸ１方向の外力を加えるとする。この場合、第２接点部４１は、端子６０の表面に接触しながら、第２接触部４０の第２方向Ｙの側面４０１に対する第２方向Ｙにおける他方側に移動する。このワイピング動作により、例えば、端子６０の表面上に被膜が形成されたとしても、この被膜を除去することができるので、被膜の形成による接触信頼性などに対する影響を軽減できる。 According to the probe pin 10 of the third aspect, for example, the contact object 60 is brought into contact with the second contact portion 41 from the first direction X, and the first contact portions 321 and 331 and the second contact portion 41 are brought into contact with each other. It is assumed that an external force in the X1 direction that approaches each other is applied. In this case, the second contact portion 41 moves to the other side in the second direction Y with respect to the side surface 401 of the second contact portion 40 in the second direction Y while contacting the surface of the terminal 60. By this wiping operation, for example, even if a film is formed on the surface of the terminal 60, the film can be removed, so that the influence of the formation of the film on the contact reliability and the like can be reduced.
　本開示の第４態様のプローブピン１０は、
　前記弾性部２０が、
　前記第２方向Ｙに沿ってそれぞれ延びると共に、前記第１方向Ｘに相互に隙間２７を空けてそれぞれ配置された複数の延在部２４と、
　隣接する前記延在部２４に接続された湾曲部２５と
を有し、
　前記第１方向Ｘの両端に配置された前記延在部２４の各々が、前記第１当接部２０１および前記第２当接部２０２をそれぞれ構成し、
　前記湾曲部２５が、前記第１接触部３０の前記第２方向Ｙの一端３０１に対して、前記第２方向Ｙの一方側に配置されている。 The probe pin 10 of the fourth aspect of the present disclosure is
The elastic portion 20
A plurality of extending portions 24 extending along the second direction Y and arranged in the first direction X with a gap 27 from each other.
It has a curved portion 25 connected to the extending portion 24 adjacent to the extending portion 24, and has a curved portion 25.
Each of the extending portions 24 arranged at both ends of the first direction X constitutes the first contact portion 201 and the second contact portion 202, respectively.
The curved portion 25 is arranged on one side of the second direction Y with respect to one end 301 of the first contact portion 30 in the second direction Y.
　第４態様のプローブピン１０によれば、接触対象物５０、６０の狭ピッチ化に対応可能なプローブピン１０を容易に実現できる。 According to the probe pin 10 of the fourth aspect, the probe pin 10 capable of narrowing the pitch of the contact objects 50 and 60 can be easily realized.
　本開示の第５態様のプローブピン１０は、
　前記弾性部２０が、
　相互に隙間２３を空けて配置された複数の弾性片２１、２２を有している。 The probe pin 10 of the fifth aspect of the present disclosure is
The elastic portion 20
It has a plurality of elastic pieces 21 and 22 arranged with a gap 23 between them.
　第５態様のプローブピン１０によれば、弾性部２０をより円滑に弾性変形させて、弾性部２０の耐久性を向上させることができる。 According to the probe pin 10 of the fifth aspect, the elastic portion 20 can be elastically deformed more smoothly, and the durability of the elastic portion 20 can be improved.
　本開示の第６態様の検査治具２は、
　前記態様のプローブピン１０と、
　前記プローブピン１０を収容可能な前記ソケット１００と
を備え、
　前記ソケット１００に前記プローブピン１０を収容したときに、前記第１当接部２０１および前記第２当接部２０２の各々が、前記第１方向Ｘにおいて、前記ソケット１００の内面に当接するように構成されている。 The inspection jig 2 of the sixth aspect of the present disclosure is
The probe pin 10 of the above aspect and
The socket 100 capable of accommodating the probe pin 10 is provided.
When the probe pin 10 is housed in the socket 100, each of the first contact portion 201 and the second contact portion 202 abuts on the inner surface of the socket 100 in the first direction X. It is configured.
　第６態様の検査治具２によれば、前記プローブピン１０により、狭ピッチ化された検査対象物を検査可能な検査治具２を実現できる。 According to the inspection jig 2 of the sixth aspect, it is possible to realize the inspection jig 2 capable of inspecting a narrow-pitched inspection object by the probe pin 10.
　本開示の第７態様の検査ユニット１は、
　前記検査治具２を少なくとも１つ備える。 The inspection unit 1 of the seventh aspect of the present disclosure is
At least one of the inspection jigs 2 is provided.
　第７態様の検査ユニット１によれば、前記検査治具２により、狭ピッチ化された検査対象物を検査可能な検査ユニット１を実現できる。 According to the inspection unit 1 of the seventh aspect, the inspection jig 2 can realize the inspection unit 1 capable of inspecting a narrow-pitched inspection object.
　なお、前記様々な実施形態または変形例のうちの任意の実施形態または変形例を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。また、実施形態同士の組み合わせまたは実施例同士の組み合わせまたは実施形態と実施例との組み合わせが可能であると共に、異なる実施形態または実施例の中の特徴同士の組み合わせも可能である。 It should be noted that, by appropriately combining any of the various embodiments or modifications, the effects of each can be achieved. In addition, it is possible to combine embodiments or examples, or between embodiments and examples, and it is also possible to combine features in different embodiments or examples.
　本開示は、添付図面を参照しながら好ましい実施形態に関連して充分に記載されているが、この技術の熟練した人々にとっては種々の変形や修正は明白である。そのような変形や修正は、添付した請求の範囲による本開示の範囲から外れない限りにおいて、その中に含まれると理解されるべきである。 Although the present disclosure is fully described in relation to preferred embodiments with reference to the accompanying drawings, various modifications and modifications are obvious to those skilled in the art. It should be understood that such modifications and amendments are included within the scope of this disclosure by the appended claims.
　本開示のプローブピンは、例えば、カメラデバイス、ＵＳＢデバイス、ＨＤＭＩ（登録商標）デバイス、あるいは、ＱＦＮデバイスおよびＳＯＮデバイスなどの半導体の検査に用いる検査治具に適用できる。 The probe pin of the present disclosure can be applied to an inspection jig used for inspection of semiconductors such as a camera device, a USB device, an HDMI (registered trademark) device, or a QFN device and a SON device.
　本開示の検査治具は、例えば、カメラデバイス、ＵＳＢデバイス、ＨＤＭＩ（登録商標）デバイス、あるいは、ＱＦＮデバイスおよびＳＯＮデバイスなどの半導体の検査に用いる検査ユニットに適用できる。 The inspection jig of the present disclosure can be applied to an inspection unit used for inspection of semiconductors such as a camera device, a USB device, an HDMI (registered trademark) device, or a QFN device and a SON device.
　本開示の検査ユニットは、例えば、カメラデバイス、ＵＳＢデバイス、ＨＤＭＩ（登録商標）デバイス、あるいは、ＱＦＮデバイスおよびＳＯＮデバイスなどの半導体の検査に用いることができる。 The inspection unit of the present disclosure can be used for inspection of semiconductors such as camera devices, USB devices, HDMI (registered trademark) devices, or QFN devices and SON devices.
１　検査ユニット
２　検査治具
１０　プローブピン
２０　弾性部
２０１　第１当接部
２０２　第２当接部
２１、２２　弾性片
２３　隙間
２４　延在部
２５　湾曲部
２６　接続部
２７　隙間
２８　リブ
３０　第１接触部
３０１　一端
３１　本体部
３１１　貫通孔
３２、３３　脚部
３２１、３３１　第１接点部
３２２、３３２　突起部
３４　隙間
４０　第２接触部
４０１　側面
４１　第２接点部
４２　切欠部
５０　凸接点
６０　端子
１００　ソケット
１０１　収容部 1 Inspection unit 2 Inspection jig 10 Probe pin 20 Elastic part 201 First contact part 202 Second contact part 21, 22 Elastic piece 23 Gap 24 Extension part 25 Curved part 26 Connection part 27 Gap 28 Rib 30 First contact Part 301 One end 31 Main body part 311 Through hole 32, 33 Leg part 321 and 331 First contact part 322, 332 Protrusion part 34 Gap 40 Second contact part 401 Side surface 41 Second contact part 42 Notch part 50 Convex contact 60 Terminal 100 Socket 101 containment

Claims (7)

  1. 　第１方向に沿って弾性変形可能な弾性部と、
    　前記弾性部の前記第１方向の一端が接続された第１接触部と、
    　前記弾性部の前記第１方向の他端が接続された第２接触部と
    を備え、
    　前記弾性部が、前記第１方向に伸縮可能な状態でソケットに収容可能なプローブピンであって、
    　前記弾性部が、
    　前記第１接触部から前記第１方向に交差する第２方向に沿って延びて前記弾性部の前記第１方向の一端を構成する第１当接部と、
    　前記第２方向において前記第１当接部と前記第２接触部に対する同じ側に配置され、前記第２接触部から前記第２方向に沿って延びて前記弾性部の前記他端を構成する第２当接部と
    を有し、
    　前記第１当接部および前記第２当接部の各々が、前記ソケットに収容された状態で前記第１方向において前記ソケットの内部に当接可能に構成されている、プローブピン。     An elastic part that can be elastically deformed along the first direction,
    With the first contact portion to which one end of the elastic portion in the first direction is connected,
    A second contact portion to which the other end of the elastic portion in the first direction is connected is provided.
    The elastic portion is a probe pin that can be accommodated in the socket in a state of being expandable and contractible in the first direction.
    The elastic part
    A first contact portion extending from the first contact portion along a second direction intersecting the first direction to form one end of the elastic portion in the first direction.
    A second that is arranged on the same side of the first contact portion and the second contact portion in the second direction and extends from the second contact portion along the second direction to form the other end of the elastic portion. Has 2 contact points
    A probe pin in which each of the first contact portion and the second contact portion is configured to be able to contact the inside of the socket in the first direction while being housed in the socket.
  2. 　前記第１接触部が、前記第１方向における前記弾性部から遠い方の端部に設けられ、接触対象物に対して前記第１方向から接触可能な第１接点部を有し、
    　前記第２接触部が、前記第１方向における前記弾性部から遠い方の端部に設けられ、接触対象物に対して前記第１方向から接触可能な第２接点部を有する、請求項１のプローブピン。     The first contact portion is provided at an end portion far from the elastic portion in the first direction, and has a first contact portion capable of contacting an object to be contacted from the first direction.
    The first aspect of claim 1, wherein the second contact portion is provided at an end portion far from the elastic portion in the first direction, and has a second contact portion capable of contacting an object to be contacted from the first direction. Probe pin.
  3. 　前記弾性部が、前記第１接触部の前記第２方向の一端に対して、前記第２方向の一方側に配置されており、
    　前記第１接点部または前記第２接点部の少なくともいずれかが、前記第１方向でかつ前記第１接点部および前記第２接点部が相互に接近する方向の外力を加えたときに、前記第２方向の他方側に向かって移動可能に構成されている、請求項２のプローブピン。     The elastic portion is arranged on one side of the second direction with respect to one end of the first contact portion in the second direction.
    When at least one of the first contact portion or the second contact portion applies an external force in the first direction and in a direction in which the first contact portion and the second contact portion approach each other, the first contact portion is used. The probe pin according to claim 2, which is configured to be movable toward the other side in two directions.
  4. 　前記弾性部が、
    　前記第２方向に沿ってそれぞれ延びると共に、前記第１方向に相互に隙間を空けてそれぞれ配置された複数の延在部と、
    　隣接する前記延在部に接続された湾曲部と
    を有し、
    　前記第１方向の両端に配置された前記延在部の各々が、前記第１当接部および前記第２当接部をそれぞれ構成し、
    　前記湾曲部が、前記第１接触部の前記第２方向の一端に対して、前記第２方向の一方側に配置されている、請求項１から３のいずれか１つのプローブピン。     The elastic part
    A plurality of extending portions extending along the second direction and arranged with a gap from each other in the first direction.
    It has a curved portion connected to the adjacent extending portion and has a curved portion.
    Each of the extending portions arranged at both ends in the first direction constitutes the first contact portion and the second contact portion, respectively.
    The probe pin according to any one of claims 1 to 3, wherein the curved portion is arranged on one side of the second direction with respect to one end of the first contact portion in the second direction.
  5. 　前記弾性部が、
    　相互に隙間を空けて配置された複数の弾性片を有している、請求項１から４のいずれか１つのプローブピン。     The elastic part
    The probe pin according to any one of claims 1 to 4, which has a plurality of elastic pieces arranged so as to be spaced apart from each other.
  6. 　請求項１から５のいずれか１つのプローブピンと、
    　前記プローブピンを収容可能な前記ソケットと
    を備え、
    　前記ソケットに前記プローブピンを収容したときに、前記第１当接部および前記第２当接部の各々が、前記第１方向において、前記ソケットの内面に当接するように構成されている、検査治具。     With any one of the probe pins of claims 1 to 5,
    With the socket capable of accommodating the probe pin,
    Inspection that each of the first contact portion and the second contact portion is configured to contact the inner surface of the socket in the first direction when the probe pin is housed in the socket. jig.
  7. 　請求項６の検査治具を少なくとも１つ備える、検査ユニット。 An inspection unit provided with at least one inspection jig according to claim 6.
PCT/JP2020/020160 2019-06-11 2020-05-21 Probe pin, testing jig, and testing unit WO2020250637A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020217039154A KR102710367B1 (en) 2019-06-11 2020-05-21 Probe pins, inspection jigs and inspection units
CN202080040779.3A CN113924499A (en) 2019-06-11 2020-05-21 Probe, inspection tool, and inspection unit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-108955 2019-06-11
JP2019108955A JP7314633B2 (en) 2019-06-11 2019-06-11 Probe pins, inspection fixtures and inspection units

Publications (1)

Publication Number Publication Date
WO2020250637A1 true WO2020250637A1 (en) 2020-12-17

Family

ID=73742021

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2020/020160 WO2020250637A1 (en) 2019-06-11 2020-05-21 Probe pin, testing jig, and testing unit

Country Status (5)

Country Link
JP (1) JP7314633B2 (en)
KR (1) KR102710367B1 (en)
CN (1) CN113924499A (en)
TW (1) TWI743817B (en)
WO (1) WO2020250637A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI745182B (en) * 2020-11-30 2021-11-01 中華精測科技股份有限公司 Probe card device and dual-arm probe
JPWO2022249954A1 (en) * 2021-05-28 2022-12-01
CN115436675A (en) * 2021-06-04 2022-12-06 迪科特测试科技(苏州)有限公司 Testing device and probe assembly thereof

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07115110A (en) * 1993-08-24 1995-05-02 Nobuaki Suzuki Circuit substrate inspection/testing probe and its mounting structure
JP2002134202A (en) * 2000-10-27 2002-05-10 Otax Co Ltd Receptacle for electronic parts
JP2006226907A (en) * 2005-02-18 2006-08-31 Nhk Spring Co Ltd Conductive contact unit and conductive contact
WO2014167693A1 (en) * 2013-04-11 2014-10-16 ルネサスエレクトロニクス株式会社 Production method for semiconductor device
WO2016156002A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
CN107038983A (en) * 2016-02-03 2017-08-11 普罗-2000有限公司 Pin type plugboard
JP2017223628A (en) * 2016-06-17 2017-12-21 オムロン株式会社 Probe pin
KR101851519B1 (en) * 2017-12-14 2018-04-23 오므론 가부시키가이샤 Socket, inspection jig, inspection unit and inspection apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4907191B2 (en) * 2006-02-17 2012-03-28 日本発條株式会社 Conductive contact unit
CN107026337B (en) * 2016-02-01 2020-09-08 富士康(昆山)电脑接插件有限公司 Electric connector and conductive terminal thereof
JP6627655B2 (en) * 2016-06-17 2020-01-08 オムロン株式会社 socket
JP6763022B2 (en) * 2016-06-28 2020-09-30 株式会社日本マイクロニクス Electrical connection device and contact
CN108110450A (en) * 2016-11-24 2018-06-01 泰科电子(上海)有限公司 Terminal and connector
CN206975085U (en) * 2017-08-04 2018-02-06 健坤精密科技（深圳）有限公司 A kind of precision measurement probe
JP6908133B2 (en) * 2018-01-11 2021-07-21 オムロン株式会社 Probe pins, inspection jigs, inspection units and inspection equipment
WO2019138504A1 (en) * 2018-01-11 2019-07-18 オムロン株式会社 Probe pin, test jig, test unit, and test device
CN108572264B (en) * 2018-06-21 2023-12-01 武汉精测电子集团股份有限公司 Crimping shell fragment of single buffering passageway

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07115110A (en) * 1993-08-24 1995-05-02 Nobuaki Suzuki Circuit substrate inspection/testing probe and its mounting structure
JP2002134202A (en) * 2000-10-27 2002-05-10 Otax Co Ltd Receptacle for electronic parts
JP2006226907A (en) * 2005-02-18 2006-08-31 Nhk Spring Co Ltd Conductive contact unit and conductive contact
WO2014167693A1 (en) * 2013-04-11 2014-10-16 ルネサスエレクトロニクス株式会社 Production method for semiconductor device
WO2016156002A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
CN107038983A (en) * 2016-02-03 2017-08-11 普罗-2000有限公司 Pin type plugboard
JP2017223628A (en) * 2016-06-17 2017-12-21 オムロン株式会社 Probe pin
KR101851519B1 (en) * 2017-12-14 2018-04-23 오므론 가부시키가이샤 Socket, inspection jig, inspection unit and inspection apparatus

Also Published As

Publication number Publication date
TW202045933A (en) 2020-12-16
CN113924499A (en) 2022-01-11
TWI743817B (en) 2021-10-21
JP7314633B2 (en) 2023-07-26
KR20220003591A (en) 2022-01-10
JP2020201161A (en) 2020-12-17
KR102710367B1 (en) 2024-09-27

Similar Documents

Publication Publication Date Title
KR102088123B1 (en) Probe pin
JP6737002B2 (en) Probe pin
WO2020250637A1 (en) Probe pin, testing jig, and testing unit
JP2019138709A (en) Probe pin, inspection jig, inspection unit, and inspection device
JPWO2019138507A1 (en) Probe pins, inspection jigs, inspection units and inspection equipment
JP7533707B2 (en) Probe pins, inspection jigs and inspection units
WO2018055961A1 (en) Probe pin and inspection unit
JP2017036959A (en) Probe pin, and inspection jig provided with the same
JP6583582B2 (en) Probe pin
JP6658952B2 (en) Probe pin
CN210690650U (en) Probe, inspection jig, and inspection unit
JP2019207245A (en) Probe pin
KR102253399B1 (en) Probe pin, inspection jig and inspection unit
WO2020217804A1 (en) Probe pin, inspection jig, and inspection unit
JP6881354B2 (en) Inspection unit and inspection equipment
JP2020076664A (en) Probe pin, inspection jig, inspection unit, and inspection device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20821854

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20217039154

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20821854

Country of ref document: EP

Kind code of ref document: A1