TWI743817B - Probe, inspection jig and inspection unit - Google Patents

Abstract

The probe includes: an elastic part that can be elastically deformed along a first direction; a first contact part connected to one end of the elastic part in the first direction; and a second contact part connected to another end in the first direction of the elastic part One end. The elastic portion has: a first contact portion extending from the first contact portion in the second direction to constitute one end of the elastic portion; and a second contact portion arranged opposite to the first contact portion in the second direction It is on the same side of the second contact portion and extends from the second contact portion along the second direction to form the other end of the elastic portion. The first abutting portion and the second abutting portion are each configured to be able to abut against the inside of the sleeve in the first direction in a state of being housed in the sleeve.

Description

Probe, inspection jig and inspection unit

This disclosure relates to a probe, an inspection jig and an inspection unit.

In electronic component modules such as cameras or liquid crystal panels, continuity inspections and operational characteristics inspections are usually performed in the manufacturing steps. These inspections are performed by using a probe to connect the terminals for connecting to the main body substrate provided in the electronic component module and the terminals of the inspection device.

As such a probe, there is a probe described in Patent Document 1. The probe includes: a pair of connectors, which can respectively contact the electrode terminals of the electronic component and the electrode terminals of the connected electronic component; and a serpentine part, which is interposed between the pair of connectors and connects the pair of connectors. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2002-134202

[The problem to be solved by the invention]

In the probe, a pair of joints are respectively arranged at the center of the width direction orthogonal to the expansion and contraction direction of the serpentine portion so that each joint does not fall in the width direction when the serpentine portion is expanded or contracted. Therefore, if a plurality of the probes are arranged side by side in the width direction, it is difficult to narrow the arrangement interval of the adjacent terminals. For example, it is impossible to realize the simultaneous contact of each terminal with a pair of terminals of a narrow-pitch electronic component module. It is unable to cope with the situation of narrowing the pitch of electronic component modules.

An object of the present disclosure is to provide a probe that can cope with the narrowing of a contact object, an inspection jig having the probe, and an inspection unit having the inspection jig. [Means to solve the problem]

The probe as an example of this disclosure includes: The elastic part can be elastically deformed along the first direction; The first contact part is connected with one end of the elastic part in the first direction; and The second contact part is connected with the other end of the elastic part in the first direction, The elastic portion is a probe that can be housed in a socket in a state capable of being stretched in the first direction, and The elastic part has: A first contact portion extending from the first contact portion in a second direction crossing the first direction to constitute one end of the elastic portion in the first direction; and The second abutting portion, in the second direction, is arranged on the same side as the first abutting portion with respect to the second contact portion, and extends from the second contact portion along the second contact portion. Extending in the direction to form the other end of the elastic portion, The first abutting portion and the second abutting portion are each configured to be able to abut against the inside of the sleeve in the first direction in a state of being housed in the sleeve.

In addition, the inspection jig as an example of this disclosure includes: The probe; and The sleeve can accommodate the probe, and When the probe is housed in the sleeve, the first abutting portion and the second abutting portion each abut against the inner surface of the sleeve in the first direction .

In addition, the inspection unit as an example of the present disclosure includes: At least one of the inspection fixtures. [Effects of the invention]

According to the probe, the elastic part has: a first contact part extending from the first contact part in the second direction to constitute one end of the elastic part; An abutting portion is arranged on the same side with respect to the second contact portion, and extends from the second contact portion along the second direction to form the other end of the elastic portion. The first abutting portion and the second abutting portion are each configured to be able to abut against the inside of the sleeve in the first direction when stored in the sleeve. With this configuration, for example, when a plurality of probes having contact points provided in each of the first contact portion and the second contact portion are housed in the sleeve, the number of probes adjacent in the second direction can be reduced. The arrangement interval of the contact part. As a result, it is possible to realize a probe that can cope with the narrowing of the contact object.

According to the inspection jig, with the probe, it is possible to realize an inspection jig capable of inspecting an inspection target whose pitch has been narrowed.

According to the inspection unit, with the inspection jig, it is possible to realize an inspection unit capable of inspecting an inspection target whose pitch has been narrowed.

Hereinafter, an example of the present disclosure will be described in accordance with the accompanying drawings. Furthermore, in the following description, terms that indicate specific directions or positions (for example, terms including "up", "down", "right", and "left") are used as necessary, but these terms are used for To facilitate the understanding of the present disclosure with reference to the drawings, the technical scope of the present disclosure is not limited by the meaning of these terms. In addition, the following description is merely an illustration in nature, and is not intended to limit the present disclosure, its application, or its use. Furthermore, the drawing is a schematic drawing, and the ratio of each size, etc., does not necessarily match the actual one.

The probe 10 of an embodiment of the present disclosure is, for example, as shown in FIG. As an example, the probe 10 is used in a state of being housed in an insulating sleeve 100 as shown in FIG. 2, and forms the inspection jig 2 together with the sleeve 100. As an example, a plurality of probes 10 are housed in the inspection jig 2.

In addition, as shown in FIG. 2, the inspection jig 2 constitutes a part of the inspection unit 1. In this embodiment, the inspection unit 1 has a pair of inspection jigs 2. Each inspection jig 2 is arranged such that the first contact portion 321, the first contact portion 331, and the second contact portion 41 of the probe 10, which will be described later, are exposed to the outside from the sleeve 100, and are in contact with the first The direction X intersects (for example, orthogonally) in the second direction Y adjacent to each other.

As shown in FIG. 2, each sleeve 100 has a plurality of storage portions 101 (only one is shown in FIG. 2) inside. Each accommodating part 101 has a slit shape, and each is configured to be capable of electrically and independently accommodating and holding one probe 10. In addition, the accommodating portions 101 are arranged in a row at equal intervals along a direction intersecting the first direction X and the second direction Y (that is, the paper penetration direction in FIG. 2 ).

In addition, each sleeve 100 is not limited to the case of being configured to form a gap between the inner surface in the first direction X and the probe 10 in a state where the probe 10 is housed as shown in FIG. 2 . For example, each sleeve 100 can also be configured in such a way that the probe 10 is housed in a state in which the abutting portions 201 and the abutting portions 202 at both ends thereof are in contact with the inner surface of the sleeve 100.

As shown in FIG. 2, each probe 10 includes an elastic portion 20 that can be elastically deformed along a first direction X, and a first contact portion 30 and a second contact portion 30 respectively connected to both ends of the elastic portion 20 in the first direction X. Contact part 40. As an example, each probe 10 is formed by an electroforming method, and the elastic portion 20, the first contact portion 30, and the second contact portion 40 are arranged in series along the first direction X and are integrally formed.

As shown in FIG. 2, the elastic portion 20 has a first contact portion 201 constituting one end of the elastic portion 20 in the first direction X, and a second contact portion constituting the other end of the elastic portion 20 in the first direction X 202. The first abutting portion 201 extends from the first contact portion 30 in the second direction Y. The second abutting portion 202 and the first abutting portion 201 are arranged on the same side relative to the second contact portion 40 in the second direction Y, and extend from the second contact portion 40 along the second direction Y. The first abutting portion 201 and the second abutting portion 202 are each configured to be able to abut against the inside of the sleeve 100 constituting the housing portion 101 in the first direction X in a state of being housed in the sleeve 100.

In addition, as shown in FIG. 2, the elastic portion 20 includes, as an example, a plurality of elastic pieces (in this embodiment, two band-shaped elastic pieces) 21 and 22 arranged with a gap 23 therebetween. Each elastic piece 21, 22 has a serpentine shape including a plurality of extension portions 24 respectively extending in the second direction Y and a plurality of bending portions 25 connected to the connected extension portions 24, respectively. In this embodiment, the elastic portion 20 includes four extension portions 24 and three bending portions 25.

The extension portions 24 are arranged in the first direction X with a gap 27 therebetween. The extension portions 24 arranged at both ends in the first direction X respectively constitute a first abutting portion 201 and a second abutting portion 202. One end in the second direction Y of the extension portion 24 constituting the first abutting portion 201 is connected to the first contact portion 30, and the other end in the second direction Y is connected to the bending portion 25. One end in the second direction Y of the extension portion 24 constituting the second abutting portion 202 is connected to the second contact portion 40, and the other end in the second direction Y is connected to the bending portion 25. Furthermore, one end of the extension portion 24 constituting the second contact portion 202 is connected to the second contact portion 40 in a state where the two elastic pieces 21 and 22 are connected by the connection portion 26 to be integrated.

As an example, each bent portion 25 is arranged on one side of the second direction Y with respect to the end 301 in the second direction Y of the first contact portion 30.

As shown in FIG. 2, the first contact portion 30 has, as an example, a body portion 31 to which the elastic portion 20 is connected, and a pair of leg portions 32 extending from the body portion 31 in the first direction X and away from the elastic portion 20 , 33.

The main body portion 31 has a through hole 311 provided at an end portion on the elastic portion 20 side in the first direction X. The through hole 311 is connected to the elastic piece 21 of the elastic portion 20 and the gap 23 between the elastic piece 22.

Each leg portion 32, 33 is arranged with a gap 34 in the second direction Y, is configured to be elastically deformable in the second direction Y, and has a first contact portion 321 and a first contact portion 331 provided at the front ends thereof . The first contact portion 321 and the first contact portion 331 are each configured to be able to contact the convex contact 50 of the inspection target as an example of the contact target from the first direction X. In addition, each of the leg portions 32 and 33 has a protrusion portion 322 and a protrusion portion 332 provided on the side surfaces facing each other in the second direction Y. The protrusions 322 and 332 protrude so as to block the gap 34 between the pair of leg portions 32 and 33 to prevent excessive insertion of the convex contact 50 into the gap 34.

As shown in FIG. 2, the second contact portion 40 has a substantially rectangular shape extending in the first direction X as an example. The front end of the second contact portion 40 in the first direction X and away from the elastic portion 20 has a substantially triangular shape that becomes thinner as it moves away from the elastic portion 20 in the first direction X, and constitutes the second contact portion 41. The second contact portion 41 is configured to be able to contact the terminal 60 of the inspection target as an example of the contact target from the first direction X. In addition, the side surface 401 to which the elastic portion 20 is not connected among the pair of side surfaces of the second contact portion 40 facing each other in the second direction Y is provided with a cutout portion 42. The cut-out portion 42 is provided on an end of the side surface 401 of the second contact portion 40 that is close to the elastic portion 20 in the first direction X.

FIG. 3 shows the state of the elastic portion 20 when an external force in the X1 direction toward the inside of the sleeve 100 is applied to the second contact portion 41 of the second contact portion 40. As shown in FIG. 3, when an external force in the X1 direction is applied to the second contact portion 41, the elastic portion 20 elastically deforms without contacting the adjacent elastic pieces 21 and 22. In addition, the elastic portion 20 is opposite to one end 301 of the first contact portion 30 in the second direction Y (refer to FIG. 2), or opposite to a pair of side surfaces of the second contact portion 40 that face each other in the second direction Y. The side surface 401 (refer to FIG. 2) connecting the elastic portion 20 is arranged on one side in the second direction Y. Therefore, when an external force in the X1 direction is applied to the second contact portion 41, one side contacts the surface of the terminal 60 and the other faces the other side in the second direction Y relative to the side surface 401 of the second contact portion 40 (ie, the first In the two directions Y, the second contact portion 40 moves from the side surface 401 in the second direction Y toward the side opposite to the side where the elastic portion 20 is arranged). For example, even if a film is formed on the surface of the terminal 60, the film can be removed by the rubbing action of the second contact portion 41, so the influence of the film formation on contact reliability and the like can be reduced.

In addition, FIG. 4 shows the elastic portion when an external force in the X2 direction is applied to the first contact portion 321 and the first contact portion 331 of the first contact portion 30 in addition to the external force in the X1 direction. 20 status. In this case, the elastic portion 20 is also elastically deformed when the adjacent elastic pieces 21 and 22 are not in contact, and the second contact portion 41 performs the same frictional action as when only the external force in the X1 direction is applied. The first contact portion 321 and the first contact portion 331 move toward the inside of the sleeve 100 and along the first direction X by the external force in the X2 direction.

According to the probe 10, the elastic portion 20 has: a first contact portion 201 extending from the first contact portion 30 in the second direction Y to constitute one end of the elastic portion 20; In the two directions Y, the first contact portion 201 is arranged on the same side relative to the second contact portion 40 and extends from the second contact portion 40 along the second direction Y to constitute the other end of the elastic portion 20. The first abutting portion 201 and the second abutting portion 202 are each configured to be able to abut against the inside of the sleeve 100 in the first direction X when they are housed in the sleeve 100. With this configuration, for example, when a plurality of first contact portions 30 and second contact portions 40 are provided with a first contact portion 321, a first contact portion 331 and a second contact portion 41 respectively. When the needle 10 is stored in the sleeve 100, the arrangement interval of the first contact portion 321, the first contact portion 331, and the second contact portion 41 of the probe 10 adjacent in the second direction Y can be reduced. As a result, the probe 10 which can cope with the narrowing of the contact object 50 and the contact object 60 can be realized.

In addition, the first contact portion 30 has an end located away from the elastic portion 20 in the first direction X, a first contact portion 321 and a first contact portion that can be contacted from the first direction X with respect to the contact object 50 331. The second contact portion 40 has an end that is disposed away from the elastic portion 20 in the first direction X, and is capable of making contact with the contact object 60 from the first direction X to the second contact portion 41. With this configuration, for example, when a plurality of probes 10 having a contact portion 321, a contact portion 331, and a contact portion 41 are provided in each of the first contact portion 30 and the second contact portion 40, the probe 10 is housed in the sleeve. In the case of 100, the arrangement interval of the contact point portion 321, the contact point portion 331, and the contact point portion 41 of the probe 10 adjacent in the second direction Y can be more reliably reduced.

In addition, the elastic portion 20 has: a plurality of extension portions 24 that respectively extend along the second direction Y and are respectively arranged with a gap 27 in the first direction X; and a curved portion 25 connected to the adjacent extension portion twenty four. The extension portions 24 arranged at both ends in the first direction X respectively constitute a first abutting portion 201 and a second abutting portion 202. The bent portion 25 is disposed on one side of the second direction Y with respect to one end of the first contact portion 30 in the second direction Y. With this configuration, it is possible to easily realize the probe 10 capable of coping with the narrowing of the contact object 50 and the contact object 60.

In addition, the elastic portion 20 has a plurality of elastic pieces 21 and 22 arranged with a gap 23 therebetween. With this configuration, the elastic portion 20 can be elastically deformed more smoothly, and the durability of the elastic portion 20 can be improved.

With the probe 10, it is possible to realize an inspection jig 2 capable of inspecting an inspection target whose pitch has been narrowed. In addition, with the inspection jig 2 having the probe 10, an inspection unit 1 capable of inspecting an inspection target whose pitch has been narrowed can be realized.

Furthermore, each of the first contact portion 30 and the second contact portion 40 may have any shape and structure as long as they can respectively connect the two ends of the elastic portion 20 in the first direction X. For example, each of the first contact portion 30 and the second contact portion 40 may be provided with a contact portion capable of contacting the contact object from the second direction Y. In addition, for example, a contact part having the same configuration as that of the second contact part 41 may be provided to the first contact part 30, or a plurality of contact parts may be provided to the second contact part 40.

As long as the elastic portion 20 has the first abutting portion 201 and the second abutting portion 202, any shape and structure can be adopted. For example, the elastic portion 20 may have a shape other than a meandering shape, or may be composed of one elastic piece.

In addition, the elastic portion 20 may have at least two extension portions 24 and at least one bending portion 25. In addition, for example, as shown in FIGS. 5 to 8, the elastic portion 20 may have a larger number of extension portions 24 and bending portions 25 than the probe 10 of FIG. 1. In the probe 10 of FIGS. 5 to 8, the elastic portion 20 has an extension portion 24 provided in the middle in the first direction X, and a rib 28 connecting a pair of elastic pieces 21 and 22. As shown in Figs. 7 and 8, with the rib 28, even if an external force is applied to any one of the first contact portion 321, the first contact portion 331, and the second contact portion 41, the elastic portion 20 is adjacent to The elastic sheet 21 and the elastic sheet 22 are also elastically deformed without contact. In addition, FIG. 7 shows the state of the elastic portion 20 when external forces in the X1 direction and the X2 direction are applied to the first contact portion 321, the first contact portion 331, and the second contact portion 41, respectively.

Above, various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally, various forms of the present disclosure have been described. In addition, in the following description, as an example, reference signs are also added for description.

The probe 10 of the first form of the present disclosure includes: The elastic portion 20 can be elastically deformed along the first direction X; The first contact portion 30 is connected to one end of the elastic portion 20 in the first direction X; and The second contact portion 40 is connected to the other end of the elastic portion 20 in the first direction X, The elastic portion 20 is a probe 10 that can be housed in the sleeve 100 in a state capable of being stretched and contracted in the first direction X, The elastic part 20 has: The first abutting portion 201 extends from the first contact portion 30 along a second direction Y intersecting the first direction X to constitute one end of the elastic portion 20 in the first direction; and The second abutting portion 202 is arranged on the same side of the second contact portion 40 as the first abutting portion 201 in the second direction Y and extends from the second contact portion 40 Extends in the second direction Y to form the other end of the elastic portion 20, The first abutting portion 201 and the second abutting portion 202 are each configured to be capable of abutting against the sleeve 100 in the first direction X in a state of being housed in the sleeve 100 internal.

According to the probe 10 of the first aspect, for example, when a plurality of probes 10 having a contact portion 321, a contact portion 331, and a contact portion 41 are provided in each of the first contact portion 30 and the second contact portion 40, respectively When in the sleeve 100, the arrangement interval of the contact point portion 321, the contact point portion 331, and the contact point portion 41 of the probe 10 adjacent in the second direction Y can be reduced. As a result, the probe 10 which can cope with the narrowing of the contact object 50 and the contact object 60 can be realized.

In the probe 10 of the second aspect of the present disclosure, The first contact portion 30 has an end located away from the elastic portion 20 in the first direction X, and a first contact portion capable of making contact with the contact object 50 from the first direction X 321. The first contact portion 331, The second contact portion 40 has an end located away from the elastic portion 20 in the first direction X, and is capable of making contact with the contact object 60 from the first direction X. 41.

With the probe 10 of the second form, for example, when a plurality of probes 10 are provided with a contact portion 321, a contact portion 331, and a contact portion 41 in each of the first contact portion 30 and the second contact portion 40, respectively When stored in the sleeve 100, the arrangement interval of the contact point portion 321, the contact point portion 331, and the contact point portion 41 of the probe 10 adjacent in the second direction Y can be more reliably reduced.

In the probe 10 of the third aspect of the present disclosure, The elastic portion 20 is disposed on one side of the second direction Y relative to one end 301 of the first contact portion 30 in the second direction Y, At least any one of the first contact portion 321, the first contact portion 331, or the second contact portion 41 is configured to be applied in the first direction X and the first contact portion 321 , The first contact part 331 and the second contact part 41 can move toward the other side in the second direction Y under the external force in the direction X1 and the direction X2 in which the first contact part 331 and the second contact part 41 approach each other.

According to the probe 10 of the third aspect, for example, the contact object 60 is brought into contact with the second contact portion 41 from the first direction X, and the first contact portion 321, the first contact portion 331, and the second contact portion 41 are applied. External force in the X1 direction that are close to each other. At this time, the second contact portion 41 contacts the surface of the terminal 60 on one side, and moves on the other side in the second direction Y relative to the side surface 401 in the second direction Y of the second contact portion 40. By this rubbing operation, for example, even if a film is formed on the surface of the terminal 60, the film can be removed, so the influence of the film formation on contact reliability and the like can be reduced.

In the probe 10 of the fourth aspect of the present disclosure, The elastic part 20 has: The plurality of extension portions 24 respectively extend along the second direction Y, and are respectively arranged with a gap 27 in the first direction X; and The bent portion 25 is connected to the adjacent extension portion 24, The extension portions 24 arranged at both ends in the first direction X respectively constitute the first abutting portion 201 and the second abutting portion 202, The curved portion 25 is disposed on one side of the second direction Y with respect to one end 301 of the first contact portion 30 in the second direction Y.

According to the probe 10 of the fourth aspect, the probe 10 that can cope with the narrowing of the contact object 50 and the contact object 60 can be easily realized.

In the probe 10 of the fifth aspect of the present disclosure, The elastic portion 20 has a plurality of elastic pieces 21 and 22 arranged with a gap 23 therebetween.

According to the probe 10 of the fifth aspect, the elastic portion 20 can be elastically deformed more smoothly, and the durability of the elastic portion 20 can be improved.

The inspection fixture 2 of the sixth form of this disclosure includes: The probe 10 of said morphology; and The sleeve 100 can accommodate the probe 10, and It is configured that when the probe 10 is stored in the sleeve 100, the first abutting portion 201 and the second abutting portion 202 each abut against the The inner surface of the sleeve 100.

According to the inspection jig 2 of the sixth aspect, with the probe 10, it is possible to realize the inspection jig 2 capable of inspecting an inspection target whose pitch has been narrowed.

The inspection unit 1 of the seventh form of the present disclosure includes: At least one inspection fixture 2.

According to the inspection unit 1 of the seventh aspect, with the inspection jig 2, it is possible to realize the inspection unit 1 capable of inspecting an inspection target whose pitch has been reduced.

In addition, by appropriately combining any of the various embodiments or modifications described above, the respective effects can be exerted. In addition, a combination of embodiments, a combination of embodiments, or a combination of embodiments and examples can be performed, and a combination of features in different embodiments or examples can also be performed.

The present disclosure is fully described in association with the preferred embodiments with reference to the accompanying drawings, but for those who are familiar with this technology, various modifications or corrections are obvious. Such deformations or corrections should be understood to be included therein as long as they do not deviate from the scope of the present disclosure defined by the scope of the attached patent application. [Industrial availability]

The probe of the present disclosure can be applied to, for example, camera components, Universal Serial Bus (USB) components, High Definition Multimedia Interface (HDMI) (registered trademark) components, or square flat unleaded components. Inspection jigs used in the inspection of semiconductors such as Quad Flat No-lead Package (QFN) components and Small Outline No-lead Package (SON) components.

The inspection jig of the present disclosure can be applied to inspection units used for inspection of semiconductors such as camera components, USB components, HDMI (registered trademark) components, QFN components, and SON components, for example.

The inspection unit of the present disclosure can be used for inspection of semiconductors such as camera components, USB components, HDMI (registered trademark) components, QFN components, and SON components, for example.

1: Inspection unit 2: Check the fixture 10: Probe 20: Elastic part 201: The first abutment part 202: The second abutment part 21, 22: elastic sheet 23: gap 24: Extension 25: Bend 26: Connection part 27: Clearance 28: rib 30: The first contact 301: one end 31: body part 311: Through hole 32, 33: feet 321, 331: first contact part 322, 332: Protruding part 34: Clearance 40: second contact 401: side 41: The second contact part 42: Notch 50: convex contact 60: Terminal 100: sleeve 101: Storage Department X: first direction Y: second direction X1, X2: The direction in which the contact parts approach each other (the direction toward the inside of the sleeve)

Fig. 1 is a perspective view showing a probe according to an embodiment of the present disclosure. Fig. 2 is a plan view of an inspection jig having the probe of Fig. 1. Fig. 3 is a diagram for explaining the state of the elastic portion when an external force is applied to the first contact portion of the probe of Fig. 1. Fig. 4 is a diagram for explaining the state of the elastic portion when an external force is applied to the second contact portion of the probe of Fig. 1. Fig. 5 is a perspective view showing a modification of the probe of Fig. 1. Fig. 6 is a plan view of an inspection jig having the probe of Fig. 5. Fig. 7 is a diagram for explaining the state of the elastic portion when an external force is applied to the first contact portion and the second contact portion of the probe of Fig. 5. Fig. 8 is a diagram for explaining the state of the elastic portion when an external force is applied to the second contact portion of the probe of Fig. 5.

10: Probe

20: Elastic part

30: The first contact

40: second contact

X: first direction

Y: second direction

Claims (5)

A probe includes: an elastic part that can be elastically deformed along a first direction; a first contact part connected to an end of the elastic part in the first direction; and a second contact part connected to the elastic part The other end in the first direction of the portion, the elastic portion is a probe that can be housed in a sleeve in a state that can be stretched in the first direction, and the elastic portion has: a first abutting portion , Extending from the first contact portion in a second direction intersecting the first direction to form one end of the elastic portion in the first direction; and a second contact portion on the second In the direction, the first contact portion is arranged on the same side with respect to the second contact portion, and extends from the second contact portion along the second direction to form the elastic portion. At the other end, the first abutting portion and the second abutting portion are each configured to be able to abut against the inside of the sleeve in the first direction in a state of being housed in the sleeve, The first contact portion has an end portion that is located away from the elastic portion in the first direction and is capable of making contact with a contact object from the first direction, and the second contact portion The contact portion has an end portion disposed away from the elastic portion in the first direction, and a second contact portion capable of making contact with the contact object from the first direction, The elastic portion is disposed on one side of the second direction relative to one end of the first contact portion in the second direction, and the first contact portion or the second contact portion At least any one of them is configured to be able to face the direction in the second direction when an external force in the direction in which the first contact portion and the second contact portion approach each other is applied Move on the other side. The probe according to claim 1, wherein the elastic portion has: a plurality of extension portions that respectively extend along the second direction and are respectively arranged with a gap in the first direction; and A bending portion connected to the adjacent extension portion, the extension portions disposed at both ends in the first direction each constitute the first abutting portion and the second abutting portion, the bending portion Relative to one end of the first contact portion in the second direction, it is arranged on one side of the second direction. The probe according to claim 1, wherein the elastic portion has a plurality of elastic pieces arranged with a gap therebetween. An inspection jig, comprising: the probe according to any one of claim 1 to claim 3; and the sleeve capable of accommodating the probe, and is configured to store the probe in the When in the sleeve, the first abutting portion and the second abutting portion each abut against the inner surface of the sleeve in the first direction. An inspection unit includes at least one inspection jig as described in claim 4.

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