JP2017036959A - Probe pin, and inspection jig provided with the same - Google Patents

Probe pin, and inspection jig provided with the same Download PDF

Info

Publication number
JP2017036959A
JP2017036959A JP2015157295A JP2015157295A JP2017036959A JP 2017036959 A JP2017036959 A JP 2017036959A JP 2015157295 A JP2015157295 A JP 2015157295A JP 2015157295 A JP2015157295 A JP 2015157295A JP 2017036959 A JP2017036959 A JP 2017036959A
Authority
JP
Japan
Prior art keywords
center line
portions
contact
probe pin
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015157295A
Other languages
Japanese (ja)
Other versions
JP6641772B2 (en
Inventor
宏真 寺西
Hirosane Teranishi
宏真 寺西
貴浩 酒井
Takahiro Sakai
貴浩 酒井
近藤　誠
Makoto Kondo
近藤　　誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP2015157295A priority Critical patent/JP6641772B2/en
Priority to TW105121339A priority patent/TW201706609A/en
Priority to PCT/JP2016/072398 priority patent/WO2017026304A1/en
Priority to CN201680028141.1A priority patent/CN107615077B/en
Publication of JP2017036959A publication Critical patent/JP2017036959A/en
Application granted granted Critical
Publication of JP6641772B2 publication Critical patent/JP6641772B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes

Abstract

PROBLEM TO BE SOLVED: To provide a probe pin with which it is possible to secure a desired magnitude of displacement, and also to secure good electrical continuity.SOLUTION: The probe pin comprises an elastic part having a plurality of elastic units (31) connected along a center line (CL2) and expanding/contracting along the center line (CL2), and contacts (41, 51) provided at both ends of the elastic part, respectively. The elastic units (31) have a pair of electrical continuity parts (32, 33) contactably and separably arranged along the center line (CL2) facing each other, and a pair of elastic support parts (34, 35) provided symmetrically to the center line (CL2) and connecting between the pair of electrical continuity parts (32, 33). The pair of electrical continuity parts (32, 33) have internal contacts (322, 332), respectively, that are arranged so as to contact each other when the elastic part is tightened along the center line (CL2).SELECTED DRAWING: Figure 9

Description

本発明は、プローブピン、および、このプローブピンを備えた検査治具に関する。   The present invention relates to a probe pin and an inspection jig provided with the probe pin.

従来、プローブピンとしては、特許文献１に記載されたものがある。このプローブピンは、ジグザグ状に形成された変位部と、この変位部の両端に各々設けられた接触部とを備えている。   Conventionally, there is a probe pin described in Patent Document 1. The probe pin includes a displacement portion formed in a zigzag shape and contact portions provided at both ends of the displacement portion.

特開２００９−１２８２１８号公報JP 2009-128218 A

しかし、前記プローブピンでは、変位部が蛇腹形状に形成されているので、接触部を中心線に沿って平行に変位させることが困難であった。このため、所望の変位量を正確に確保することができない場合があった。   However, in the probe pin, since the displacement portion is formed in a bellows shape, it is difficult to displace the contact portion in parallel along the center line. For this reason, the desired amount of displacement may not be ensured accurately.

また、蛇腹形状の変位部は電気抵抗が大きいので、電気が流れ難かった。このため、良好な導通性を確保することが困難であった。   In addition, since the bellows-shaped displacement portion has a large electric resistance, it is difficult for electricity to flow. For this reason, it was difficult to ensure good electrical conductivity.

そこで、本発明は、所望の変位量を正確に確保できると共に良好な導通性を確保できるプローブピン、および、このプローブピンを備えた検査治具を提供することを課題とする。   Therefore, an object of the present invention is to provide a probe pin that can ensure a desired amount of displacement accurately and ensure good electrical conductivity, and an inspection jig including the probe pin.

本発明に係るプローブピンは、前記課題を解決すべく、中心線に沿って連結された複数の弾性ユニットを有し、前記中心線に沿って伸縮する弾性部と、前記弾性部の両端にそれぞれ設けられた接点部と、を備え、前記弾性ユニットが、前記中心線に沿って接触可能かつ開離可能に対向配置された一対の導通部と、前記中心線に対して対称に設けられ、前記一対の導通部間を連結する弾性支持部と、を有し、前記一対の導通部が、前記弾性部を前記中心線に沿って縮めたときに、相互に接触するように配置された内部接触部をそれぞれ有している。   The probe pin according to the present invention has a plurality of elastic units connected along a center line to solve the above-mentioned problem, and an elastic part that expands and contracts along the center line, and both ends of the elastic part, respectively. Provided with a contact portion, and the elastic unit is provided symmetrically with respect to the center line, and a pair of conducting portions disposed so as to be capable of contacting and separating along the center line, An internal support disposed between the pair of conductive portions so as to contact each other when the elastic portions are contracted along the center line. Each part.

本発明のプローブピンによれば、中心線に沿って連結された複数の弾性ユニットを有し、中心線に沿って伸縮する弾性部と、弾性部の両端にそれぞれ設けられた接点部とを備えている。これにより、接点部を中心線に沿って伸縮させることができるので、所望の変位量を正確に確保できる。   According to the probe pin of the present invention, the probe pin includes a plurality of elastic units connected along the center line, and includes elastic portions that expand and contract along the center line, and contact portions provided at both ends of the elastic portion, respectively. ing. Thereby, since a contact part can be expanded-contracted along a centerline, a desired displacement amount can be ensured correctly.

また、弾性ユニットが、中心線に沿って接触可能かつ開離可能に対向配置された一対の導通部と、中心線に対して対称に設けられ、一対の導通部間を連結する一対の弾性支持部と、を有し、一対の導通部が、弾性部を中心線に沿って縮めたときに、相互に接触するように配置された内部接触部とをそれぞれ有している。これにより、中心線に沿って導通経路を確保できるので、良好な導通性を確保できる。   In addition, the elastic unit is provided in a symmetric manner with respect to the center line, and a pair of elastic supports that connect the pair of conductive parts so as to be opposed to each other along the center line so as to be separated from each other. And the pair of conducting portions each have an internal contact portion arranged so as to contact each other when the elastic portion is contracted along the center line. Thereby, since a conduction | electrical_connection path can be ensured along a centerline, favorable electroconductivity can be ensured.

本発明の実施形態としては、前記内部接触部が面であってもよい。   As an embodiment of the present invention, the internal contact portion may be a surface.

本実施形態によれば、一対の導通部の接触抵抗を抑制でき、良好な導通性を確保できる。   According to this embodiment, the contact resistance of a pair of conduction | electrical_connection part can be suppressed, and favorable electroconductivity can be ensured.

本発明の実施形態としては、前記内部接触部が、相互に押圧し合うように配置されている構成としてもよい。   As embodiment of this invention, it is good also as a structure by which the said internal contact part is arrange | positioned so that it may mutually press.

本実施形態によれば、高い接触信頼性を確保できる。   According to this embodiment, high contact reliability can be ensured.

本発明の実施形態としては、前記接点部の少なくともいずれか一方が、前記中心線に対して非対称な形状を有している構成としてもよい。   As an embodiment of the present invention, at least one of the contact portions may have an asymmetric shape with respect to the center line.

本実施形態によれば、プローブピンの設計等に応じて、接点部の形状を適宜変更できる。このため、プローブピンの設計の自由度を広げることができる。   According to the present embodiment, the shape of the contact portion can be appropriately changed according to the design of the probe pin and the like. For this reason, the freedom degree of design of a probe pin can be expanded.

本発明の検査治具によれば、ハウジングと、前記接点部が露出し、かつ、前記一対の導通部が開離した状態で前記ハウジング内に収納された、前記プローブピンと、を備える。   According to the inspection jig of the present invention, it includes a housing and the probe pin housed in the housing in a state where the contact portion is exposed and the pair of conductive portions are separated.

本発明の検査治具によれば、所望の変位量を確保できると共に、良好な導通性を確保できるプローブピンを備えた検査治具を提供できる。   According to the inspection jig of the present invention, it is possible to provide an inspection jig provided with a probe pin that can secure a desired displacement amount and ensure good conductivity.

本発明の第１実施形態のプローブピンを備えた検査治具の斜視図である。It is a perspective view of an inspection jig provided with a probe pin of a 1st embodiment of the present invention. 図１の検査治具のII矢視図である。It is II arrow directional view of the inspection jig of FIG. 図１の検査治具のIII矢視図である。FIG. 3 is a III arrow view of the inspection jig of FIG. 1. 図２のIV-IV線に沿った断面図である。FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 2. 図３のV-V線に沿った断面図である。FIG. 5 is a cross-sectional view taken along line VV in FIG. 3. 本発明の第１実施形態のプローブピンの斜視図である。It is a perspective view of the probe pin of a 1st embodiment of the present invention. 図６のプローブピンのVII矢視図である。It is a VII arrow directional view of the probe pin of FIG. 図６のプローブピンのVIII矢視図である。It is a VIII arrow line view of the probe pin of FIG. 図８の部分拡大図である。It is the elements on larger scale of FIG. 図６のプローブピンの動作を説明するための部分拡大図である。It is the elements on larger scale for demonstrating operation | movement of the probe pin of FIG. 図１０に続く、図６のプローブピンの動作を説明するための部分拡大図である。FIG. 11 is a partial enlarged view for explaining the operation of the probe pin of FIG. 6 following FIG. 10. 図１１に続く、図６のプローブピンの動作を説明するための部分拡大図である。FIG. 12 is a partial enlarged view for explaining the operation of the probe pin of FIG. 6 following FIG. 11. 本発明の第２実施形態のプローブピンの平面図である。It is a top view of the probe pin of a 2nd embodiment of the present invention. 図１３のプローブピンの部分拡大図である。It is the elements on larger scale of the probe pin of FIG. 本発明の第３実施形態のプローブピンの平面図である。It is a top view of the probe pin of a 3rd embodiment of the present invention. 図１３のプローブピンの部分拡大図である。It is the elements on larger scale of the probe pin of FIG. 本発明の第４実施形態のプローブピンの平面図である。It is a top view of the probe pin of a 4th embodiment of the present invention. 図１３のプローブピンの部分拡大図である。It is the elements on larger scale of the probe pin of FIG. 本発明の第５実施形態のプローブピンの平面図である。It is a top view of the probe pin of a 5th embodiment of the present invention. 図１３のプローブピンの部分拡大図である。It is the elements on larger scale of the probe pin of FIG.

以下、添付図面を参照して本発明の実施形態を説明する。なお、以下の説明では、図面に表された構成を説明するうえで、「上」、「下」、「左」、「右」等の方向を示す用語、及びそれらを含む別の用語を使用するが、それらの用語を使用する目的は図面を通じて実施形態の理解を容易にするためである。したがって、それらの用語は本発明の実施形態が実際に使用されるときの方向を示すものとは限らないし、それらの用語によって特許請求の範囲に記載された発明の技術的範囲が限定的に解釈されるべきでない。   Embodiments of the present invention will be described below with reference to the accompanying drawings. In the following explanation, in describing the configuration shown in the drawings, terms indicating directions such as “up”, “down”, “left”, “right”, and other terms including them are used. However, the purpose of using these terms is to facilitate understanding of the embodiments through the drawings. Therefore, these terms do not necessarily indicate the direction in which the embodiments of the present invention are actually used, and the technical scope of the invention described in the claims is limitedly interpreted by these terms. Should not be done.

（第１実施形態）
図１に示すように、検査治具１は、略角筒形状のハウジング２と、このハウジング２の内部に収納された複数のプローブピン３とで構成されている。この検査治具１では、プローブピン３は、板厚方向（Ｙ方向）に重ねられ、それぞれが独立して伸縮可能に収納されている。なお、Ｘ方向は、Ｙ方向に直交する方向であり、Ｚ方向はＸ，Ｙ方向に直交する方向である。 (First embodiment)
As shown in FIG. 1, the inspection jig 1 includes a substantially rectangular tube-shaped housing 2 and a plurality of probe pins 3 housed in the housing 2. In this inspection jig 1, the probe pins 3 are stacked in the plate thickness direction (Y direction), and each is independently retractable. The X direction is a direction orthogonal to the Y direction, and the Z direction is a direction orthogonal to the X and Y directions.

ハウジング２は、図２，図３に示すように、同一の外形の上部ハウジング１０と下部ハウジング２０とを有し、上部ハウジング１０と下部ハウジング２０とを直列に接続した状態で一体化されている。   As shown in FIGS. 2 and 3, the housing 2 has an upper housing 10 and a lower housing 20 having the same outer shape, and is integrated with the upper housing 10 and the lower housing 20 connected in series. .

上部ハウジング１０は、図４，図５に示すように、その内部に設けられた収納部１１と、Ｚ方向の下側の面に設けられた第１開口部１５と、Ｚ方向の上側の面に設けられた第２開口部１６とを有している。   4 and 5, the upper housing 10 includes a storage portion 11 provided therein, a first opening 15 provided on a lower surface in the Z direction, and an upper surface in the Z direction. And a second opening 16 provided in the.

収納部１１は、ハウジング２のＺ方向に延びる中心線ＣＬ１に沿って、かつ、Ｘ方向において中心線ＣＬ１に対して対称に、設けられている。この収納部１１は、第１開口部１５に連通する本体側収納部１２と、第２開口部１６に連通する接点側収納部１３とで構成されている。本体側収納部１２は、図４に示すように、接点側収納部１３よりも大きいＸ方向の幅とＺ方向の長さとを有している。また、本体側収納部１２と接点側収納部１３との接続部分には、段部１４が形成されている。   The storage portion 11 is provided along the center line CL1 extending in the Z direction of the housing 2 and symmetrically with respect to the center line CL1 in the X direction. The storage portion 11 includes a main body side storage portion 12 that communicates with the first opening 15 and a contact side storage portion 13 that communicates with the second opening 16. As shown in FIG. 4, the main body side storage portion 12 has a width in the X direction and a length in the Z direction that are larger than those of the contact side storage portion 13. Further, a stepped portion 14 is formed at a connection portion between the main body side storage portion 12 and the contact side storage portion 13.

下部ハウジング２０は、上部ハウジング１０と同様の構成を有している。すなわち、下部ハウジング２０は、図４，図５に示すように、その内部に設けられた収納部２１と、Ｚ方向の上側の面に設けられた第１開口部２５と、Ｚ方向の下側の面に設けられた第２開口部２６とを有している。   The lower housing 20 has the same configuration as the upper housing 10. That is, as shown in FIG. 4 and FIG. 5, the lower housing 20 includes a storage portion 21 provided therein, a first opening portion 25 provided on an upper surface in the Z direction, and a lower side in the Z direction. And a second opening 26 provided on the surface.

収納部２１は、中心線ＣＬ１に沿って、かつ、Ｘ方向において中心線ＣＬ１に対して対称に、設けられている。この収納部２１は、第１開口部２５に連通する本体側収納部２２と、第２開口部２６に連通する接点側収納部２３とで構成されている。本体側収納部２２は、図４に示すように、接点側収納部２３よりも大きいＸ方向の幅とＺ方向の長さとを有している。また、本体側収納部２２と接点側収納部２３との接続部分には、段部２４が形成されている。   The storage unit 21 is provided along the center line CL1 and symmetrically with respect to the center line CL1 in the X direction. The storage portion 21 includes a main body side storage portion 22 that communicates with the first opening 25 and a contact side storage portion 23 that communicates with the second opening 26. As shown in FIG. 4, the main body side storage portion 22 has a width in the X direction and a length in the Z direction that are larger than those of the contact side storage portion 23. Further, a stepped portion 24 is formed at a connection portion between the main body side storage portion 22 and the contact side storage portion 23.

上部ハウジング１０と下部ハウジング２０とは、同一のＸ方向の幅Ｌ７を有している。また、上部ハウジング１０の第１開口部１５と下部ハウジング２０の第１開口部２５とが向き合い、上部ハウジング１０の本体側収納部１２を構成する内壁と下部ハウジング２０の本体側収納部２２を構成する内壁とが同一平面に位置するように、接続されている。   The upper housing 10 and the lower housing 20 have the same width L7 in the X direction. Further, the first opening 15 of the upper housing 10 and the first opening 25 of the lower housing 20 face each other, and the inner wall constituting the main body side storage portion 12 of the upper housing 10 and the main body side storage portion 22 of the lower housing 20 are configured. The inner walls are connected so that they are on the same plane.

プローブピン３は、図６に示すように、略同一の板厚（Ｙ方向の厚さ）を有する板形状で、弾性部３０と、弾性部３０の両端にそれぞれ設けられた第１，第２接触部４０，５０とで構成されている。弾性部３０および第１，第２接触部４０，５０は、図７，図８に示すように、プローブピン３のＺ方向に延びる中心線ＣＬ２に沿って配置されている。なお、このプローブピン３は、電鋳法を用いて、ばね性を有する材料で形成されており、さらに、導電性を有している。   As shown in FIG. 6, the probe pin 3 has a plate shape having substantially the same plate thickness (Y direction thickness), and the elastic portion 30 and first and second portions provided at both ends of the elastic portion 30, respectively. It is comprised with the contact parts 40 and 50. FIG. As shown in FIGS. 7 and 8, the elastic portion 30 and the first and second contact portions 40 and 50 are disposed along the center line CL <b> 2 extending in the Z direction of the probe pin 3. In addition, this probe pin 3 is formed with the material which has a spring property using the electroforming method, and also has electroconductivity.

弾性部３０は、図７に示すように、中心線ＣＬ２に沿って接触可能かつ開離可能に対向配置された一対の導通部３２，３３と、この一対の導通部３２，３３間を連結する一対の弾性支持部３４，３５とを有する複数の弾性ユニット３１で構成されている。この複数の弾性ユニット３１は、一対の導通部３２が中心線ＣＬ２に沿って並び、かつ、所望の変位量が得られるように一定の間隔で連結されている。   As shown in FIG. 7, the elastic portion 30 connects the pair of conductive portions 32 and 33 that are arranged to face each other along the center line CL <b> 2 and can be separated from each other, and the pair of conductive portions 32 and 33. It comprises a plurality of elastic units 31 having a pair of elastic support portions 34 and 35. The plurality of elastic units 31 have a pair of conducting portions 32 arranged along the center line CL2 and connected at a constant interval so that a desired amount of displacement can be obtained.

導通部３２，３３は、図９に示すように、丸面取りされた頂点部３２１，３３１と、内部接触部の一例の斜面部３２２，３３２とで構成された略２等辺三角形状を有している。この導通部３２，３３は、各々が中心線ＣＬ２に沿って延び、かつ、相互に接触しないように配置されている。一対の導通部３２，３３のうち、Ｚ方向の上側の導通部３２（以下第１導通部３２という）は、その頂点部３２１が、中心線ＣＬ２からＸ方向の左側に僅かに離れた位置に配置されている。また、Ｚ方向の下側の導通部３３（以下、かど部３３という）は、その頂点部３３１が、中心線ＣＬ２からＸ方向の右側に僅かに離れた位置に配置されている。   As shown in FIG. 9, the conducting portions 32 and 33 have a substantially isosceles triangular shape composed of rounded chamfered apex portions 321 and 331 and inclined surface portions 322 and 332 which are examples of internal contact portions. Yes. The conduction portions 32 and 33 are arranged so as to extend along the center line CL2 and not to contact each other. Of the pair of conducting portions 32 and 33, the conducting portion 32 on the upper side in the Z direction (hereinafter referred to as the first conducting portion 32) has a vertex portion 321 at a position slightly away from the center line CL2 to the left in the X direction. Has been placed. Further, the lower conduction portion 33 (hereinafter referred to as the corner portion 33) of the Z direction is arranged at a position where the apex portion 331 is slightly separated from the center line CL2 on the right side in the X direction.

弾性支持部３４，３５は、図９に示すように、Ｘ方向において中心線ＣＬ２に対して対称に設けられている。また、この弾性支持部３４，３５は、Ｚ方向において弾性支持部３４，３５の中間点３４１，３５１を通る直線ＭＬに対して対称に設けられている。一対の弾性支持部３４，３５のうち、Ｘ方向の右側の弾性支持部３４は、第１，第２導通部３２，３３のＸ方向の右側に連結されている連結部３４２，３４３と、この連結部３４２，３４３を繋ぐ円弧部３４４とで構成されている。また、Ｘ方向の左側の弾性支持部３５は、第１，第２導通部３２，３３のＸ方向の左側に連結されている連結部３５２，３５３と、この連結部３５２，３５３を繋ぐ円弧部３５４とで構成されている。   As shown in FIG. 9, the elastic support portions 34 and 35 are provided symmetrically with respect to the center line CL2 in the X direction. The elastic support portions 34 and 35 are provided symmetrically with respect to a straight line ML passing through the intermediate points 341 and 351 of the elastic support portions 34 and 35 in the Z direction. Of the pair of elastic support portions 34, 35, the right elastic support portion 34 in the X direction includes connection portions 342, 343 connected to the right side of the first and second conducting portions 32, 33 in the X direction, It is comprised with the circular arc part 344 which connects the connection parts 342 and 343. FIG. The elastic support portion 35 on the left side in the X direction includes connecting portions 352 and 353 connected to the left side in the X direction of the first and second conducting portions 32 and 33, and arc portions connecting the connecting portions 352 and 353. 354.

連結部３４２，３４３，３５２，３５３の各々は、直線ＭＬから離れる方向に湾曲して延びている。これにより、弾性力を確保しつつ、導通部３２，３３と弾性支持部３４，３５との接合部分にかかる応力を分散している。また、円弧部３４４，３５４の各々は、略半円環形状を有している。   Each of the connecting portions 342, 343, 352, and 353 is curved and extends in a direction away from the straight line ML. Thereby, the stress applied to the joint portion between the conduction portions 32 and 33 and the elastic support portions 34 and 35 is dispersed while securing the elastic force. Each of the arc portions 344 and 354 has a substantially semi-annular shape.

第１接触部４０は、図７に示すように、中心線ＣＬ２に沿って延びており、自由端部（Ｚ方向の上側の端部）に設けられた接点部４１と、弾性部３０が連結されている基端部（Ｚ方向の下側の端部）に設けられた一対の支持突部４２と、自由端部側に設けられた貫通孔４３とで構成されている。   As shown in FIG. 7, the first contact portion 40 extends along the center line CL <b> 2, and the contact portion 41 provided at the free end (upper end in the Z direction) and the elastic portion 30 are connected to each other. It is comprised by a pair of support protrusion 42 provided in the base end part (lower end part of the Z direction) currently provided, and the through-hole 43 provided in the free end part side.

接点部４１は、Ｘ方向において中心線ＣＬ２に対して非対称な波状を有している。支持突部４２は、基端部からＸ方向に向かって突出しており、中心線ＣＬ２から先端４２１までの距離Ｌ１が、中心線ＣＬ２から弾性支持部３４，３５の中間点３４１，３５１までの距離Ｌ２よりも大きくなるように、設けられている。また、貫通孔４３は、略矩形状を有し、自由端部側の一辺が接点部４１に沿って波状に形成されている。   The contact portion 41 has an asymmetric wave shape with respect to the center line CL2 in the X direction. The support protrusion 42 protrudes in the X direction from the base end, and the distance L1 from the center line CL2 to the tip 421 is the distance from the center line CL2 to the midpoints 341, 351 of the elastic support portions 34, 35. It is provided so as to be larger than L2. Further, the through hole 43 has a substantially rectangular shape, and one side of the free end portion side is formed in a wave shape along the contact portion 41.

第２接触部５０は、図７に示すように、中心線ＣＬ２に沿って延びており、自由端部（Ｚ方向の下側の端部）に設けられた接点部５１と、弾性部３０が連結されている基端部（Ｚ方向の上側の端部）に設けられた一対の支持突部５２とで構成されている。   As shown in FIG. 7, the second contact portion 50 extends along the center line CL <b> 2, and the contact portion 51 provided at the free end (lower end in the Z direction) and the elastic portion 30 are provided. It is comprised with a pair of support protrusion 52 provided in the base end part (end part of the upper side of Z direction) connected.

接点部５１は、半円形状を有している。また、支持突部５２は、基端部からＸ方向に向かって突出しており、第１接触部４０の支持突部４２と同じ形状および大きさを有している。すなわち、支持突部５２は、中心線ＣＬ２から先端５２１までの距離Ｌ１が、中心線ＣＬ２から弾性支持部３４，３５の中間点３４１，３５１までの距離Ｌ２よりも大きくなるように、設けられている。   The contact part 51 has a semicircular shape. In addition, the support protrusion 52 protrudes from the base end portion in the X direction, and has the same shape and size as the support protrusion 42 of the first contact portion 40. That is, the support protrusion 52 is provided such that the distance L1 from the center line CL2 to the tip 521 is larger than the distance L2 from the center line CL2 to the midpoints 341 and 351 of the elastic support portions 34 and 35. Yes.

なお、図４に示すように、第１接触部４０は、一対の支持突部４２が設けられている基端部を除くＸ方向の幅Ｌ３（図７に示す）が、上部ハウジング１０の接点側収納部１３のＸ方向の幅Ｌ６よりも小さくなるように設けられている。一方、第１接触部４０の基端部は、一対の支持突部４２の先端４２１間の距離Ｌ４（図７に示す）が、上部ハウジング１０の本体側収納部１２のＸ方向の幅Ｌ７に略等しくなるように設けられている。   As shown in FIG. 4, the first contact portion 40 has a width L3 (shown in FIG. 7) in the X direction excluding the base end portion on which the pair of support protrusions 42 are provided. It is provided so as to be smaller than the width L6 of the side storage portion 13 in the X direction. On the other hand, the base end portion of the first contact portion 40 has a distance L4 (shown in FIG. 7) between the tip ends 421 of the pair of support protrusions 42 equal to the width L7 in the X direction of the main body side storage portion 12 of the upper housing 10. It is provided so as to be substantially equal.

また、第２接触部５０は、一対の支持突部５２が設けられている基端部を除くＸ方向の幅Ｌ５（図７に示す）が、下部ハウジング２０の接点側収納部２３のＸ方向の幅Ｌ８よりも小さくなるように設けられている。一方、第２接触部５０の基端部は、一対の支持突部５２の先端５２１間の距離Ｌ４が、下部ハウジング２０の本体側収納部２２のＸ方向の幅Ｌ７に略等しくなるように設けられている。   Further, the second contact portion 50 has a width L5 (shown in FIG. 7) in the X direction excluding the base end portion on which the pair of support protrusions 52 are provided, in the X direction of the contact side storage portion 23 of the lower housing 20. It is provided to be smaller than the width L8. On the other hand, the base end portion of the second contact portion 50 is provided so that the distance L4 between the tip ends 521 of the pair of support protrusions 52 is substantially equal to the width L7 in the X direction of the main body side storage portion 22 of the lower housing 20. It has been.

さらに、第１，第２接触部４０，５０は、支持突部４２のＺ方向の上側面と、支持突部５２のＺ方向の下側面との間の距離Ｌ９が、上部ハウジング１０の段部１４と下部ハウジング２０の段部２４との間の距離Ｌ１０よりも短くなるように設けられている。   Further, the first and second contact portions 40 and 50 are such that the distance L9 between the upper side surface of the support projection 42 in the Z direction and the lower side surface of the support projection 52 in the Z direction is the stepped portion of the upper housing 10. 14 and the step portion 24 of the lower housing 20 are provided so as to be shorter than the distance L10.

次に、検査治具１の複数のプローブピン３の動作について説明する。この検査治具１では、高電流に対応するため、図１に示すように、複数のプローブピン３を板厚方向の両面を交互に反転させて、板厚方向（Ｙ方向）に重ねている。また、この検査治具１では、複数のプローブピン３の各々が独立して伸縮可能になっている。   Next, the operation of the plurality of probe pins 3 of the inspection jig 1 will be described. In this inspection jig 1, in order to cope with a high current, as shown in FIG. 1, a plurality of probe pins 3 are alternately reversed on both sides in the plate thickness direction and overlapped in the plate thickness direction (Y direction). . Further, in the inspection jig 1, each of the plurality of probe pins 3 can be extended and contracted independently.

ハウジング２の内部に収納された初期状態のプローブピン３は、図４に示すように、第１，第２接触部４０，５０の接点部４１，５１が露出し、図１０に示すように、第１，第２導通部３２，３３が開離している。   As shown in FIG. 4, the probe pins 3 in the initial state housed in the housing 2 are exposed at the contact portions 41 and 51 of the first and second contact portions 40 and 50, and as shown in FIG. The first and second conducting portions 32 and 33 are separated.

この初期状態では、弾性部３０がＺ方向に圧縮され、図４に示すように、第１接触部４０の支持突部４２が上部ハウジング１０の段部１４を押圧し、第２接触部５０の支持突部５２が下部ハウジング２０の段部２４を押圧している。このため、プローブピン３は、がたつくことなく、ハウジング２の内部に収納されている。   In this initial state, the elastic portion 30 is compressed in the Z direction, and the support protrusion 42 of the first contact portion 40 presses the step 14 of the upper housing 10 as shown in FIG. The support protrusion 52 presses the step 24 of the lower housing 20. For this reason, the probe pin 3 is accommodated in the housing 2 without rattling.

初期状態のプローブピン３の接点部４１，５１に力を加え、第１，第２接触部４０，５０をハウジング２の内部に押し込んでいくと、各弾性ユニット３１の第１，第２導通部３２，３３が中心線ＣＬ２に沿って相互に接近し、図１１に示すように、フルストロークに達する前に頂点部３２１，３３１同士が接触する。その結果、中心線ＣＬ２に沿った導通経路が形成される。   When a force is applied to the contact portions 41 and 51 of the probe pin 3 in the initial state and the first and second contact portions 40 and 50 are pushed into the housing 2, the first and second conducting portions of the elastic units 31. 32 and 33 approach each other along the center line CL2, and as shown in FIG. 11, the vertex portions 321 and 331 contact each other before reaching the full stroke. As a result, a conduction path along the center line CL2 is formed.

このとき、頂点部３２１，３３１は正対しておらず、Ｘ方向に僅かにずれた状態で接触する。また、第１，第２接触部４０，５０がハウジング２の内部に押し込まれていくにつれて、弾性支持部３４，３５が次第にＺ方向に圧縮される。   At this time, the vertex portions 321 and 331 are not directly facing each other, and are in contact with each other with a slight shift in the X direction. Further, as the first and second contact portions 40 and 50 are pushed into the housing 2, the elastic support portions 34 and 35 are gradually compressed in the Z direction.

第１，第２接触部４０，５０をハウジング２の内部に押し込んでいくと、図１２に示すように、第１導通部３２が、第２導通部３３によって中心線ＣＬ２からＸ方向の左側へ押し込まれる。これと同時に、第２導通部３３が、第１導通部３２によって中心線ＣＬ２からＸ方向の右側へ押し込まれる。すなわち、第１導通部３２のＸ方向の右側の斜面部３２２と、第２導通部３３のＸ方向の左側の斜面部３３２とが、相互に面接触した状態でスライドする。このため、高い接触信頼性を確保できる。   When the first and second contact portions 40 and 50 are pushed into the housing 2, the first conductive portion 32 is moved from the center line CL2 to the left in the X direction by the second conductive portion 33 as shown in FIG. Pushed in. At the same time, the second conduction portion 33 is pushed from the center line CL2 to the right in the X direction by the first conduction portion 32. In other words, the slope portion 322 on the right side in the X direction of the first conduction portion 32 and the slope portion 332 on the left side in the X direction of the second conduction portion 33 slide in a state of surface contact with each other. For this reason, high contact reliability is securable.

さらに、第１，第２接触部４０，５０をハウジング２の内部に押し込んでいくと、頂点部３２１，３３１が弾性支持部３４，３５に接触する、あるいは、接点部４１，５１がハウジング２の内部に完全に収納される。これにより、第１，第２接触部４０，５０の移動が停止する。   Further, when the first and second contact portions 40 and 50 are pushed into the housing 2, the apex portions 321 and 331 come into contact with the elastic support portions 34 and 35, or the contact portions 41 and 51 are connected to the housing 2. Fully housed inside. Thereby, the movement of the 1st, 2nd contact parts 40 and 50 stops.

第１，第２接触部４０，５０の移動が停止した後、接点部４１，５１に加えられている力を解放すると、各弾性ユニット３１の弾性支持部３４，３５の復帰力により、プローブピン３は、図１０に示す初期状態に復帰し、第１，第２導通部３２，３３が再び開離する。   After the movement of the first and second contact portions 40 and 50 is stopped, when the force applied to the contact portions 41 and 51 is released, the return force of the elastic support portions 34 and 35 of each elastic unit 31 causes the probe pin 3 returns to the initial state shown in FIG. 10, and the first and second conducting portions 32 and 33 are separated again.

このように、前記構成のプローブピン３は、中心線ＣＬ２に沿って連結された複数の弾性ユニット３１を有し、中心線ＣＬ２に沿って伸縮する弾性部３０と、弾性部３０の両端にそれぞれ設けられた接点部４１，５１とを備えている。これにより、接点部４１，５１を中心線ＣＬ２に沿って伸縮させることができるので、所望の変位量を正確に確保できる。   As described above, the probe pin 3 having the above-described configuration includes the plurality of elastic units 31 connected along the center line CL2, and the elastic portion 30 that expands and contracts along the center line CL2, and the both ends of the elastic portion 30, respectively. Provided contact portions 41 and 51 are provided. Thereby, since the contact parts 41 and 51 can be expanded-contracted along the centerline CL2, a desired displacement amount can be ensured correctly.

また、弾性ユニット３１が、中心線ＣＬ２に沿って接触可能かつ開離可能に対向配置された第１，第２導通部３２，３３と、中心線ＣＬ２に対して対称に設けられ、第１，第２導通部３２，３３間を連結する一対の弾性支持部３４，３５と、を有している。そして、第１，第２導通部３２，３３が、弾性部３０を中心線ＣＬ２に沿って縮めたときに、相互に接触するように配置された斜面部３２２，３３２をそれぞれ有している。これにより、中心線ＣＬ２に沿って導通経路を確保できるので、良好な導通性を確保できる。   The elastic unit 31 is provided symmetrically with respect to the center line CL2 and the first and second conducting portions 32 and 33 disposed so as to be capable of contacting and separating along the center line CL2. And a pair of elastic support portions 34 and 35 for connecting the second conducting portions 32 and 33. And the 1st, 2nd conduction | electrical_connection parts 32 and 33 each have the slope parts 322 and 332 arrange | positioned so that it may mutually contact, when the elastic part 30 is shrunk along the centerline CL2. Thereby, since a conduction | electrical_connection path can be ensured along the centerline CL2, favorable electroconductivity can be ensured.

また、第１導通部３２の斜面部３２２と第２導通部３３の斜面部３３２とが面接触する。これにより、第１，第２導通部３２，３３の接触抵抗を抑制でき、良好な導通性を確保できる。   Further, the slope portion 322 of the first conduction portion 32 and the slope portion 332 of the second conduction portion 33 are in surface contact. Thereby, the contact resistance of the 1st, 2nd conduction | electrical_connection parts 32 and 33 can be suppressed, and favorable electroconductivity can be ensured.

また、第１接触部４０の接点部４１が、中心線ＣＬ２に対して非対称な形状を有している。このように、プローブピン３の設計等に応じて、接点部４１の形状を適宜変更できるので、プローブピン３の設計の自由度を広げることができる。   Further, the contact part 41 of the first contact part 40 has an asymmetric shape with respect to the center line CL2. Thus, since the shape of the contact part 41 can be changed as appropriate according to the design of the probe pin 3 or the like, the degree of freedom in designing the probe pin 3 can be expanded.

なお、前記構成の検査治具１では、複数のプローブピン３がそれぞれ独立して伸縮可能である。このため、例えば、被試験デバイスが傾いていたとしても、この傾きに柔軟に対応して、複数のプローブピン３の接点部４１，５１のそれぞれが被試験デバイスに接触することができる。これにより、高い接触安定性を有する検査治具１を得ることができる。   In the inspection jig 1 having the above-described configuration, the plurality of probe pins 3 can be extended and contracted independently. Therefore, for example, even if the device under test is tilted, each of the contact portions 41 and 51 of the plurality of probe pins 3 can contact the device under test flexibly corresponding to the tilt. Thereby, the inspection jig 1 having high contact stability can be obtained.

（第２実施形態）
図１３，図１４は、第２実施形態のプローブピン１０３を示す図である。この第２実施形態では、第１実施形態と同一部分に同一参照番号を付して説明を省略し、第１実施形態と異なる点について説明する。 (Second Embodiment)
13 and 14 are diagrams showing the probe pin 103 of the second embodiment. In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Differences from the first embodiment will be described.

第２実施形態のプローブピン１０３は、図１３，図１４に示すように、略正三角形状を有する第１，第２導通部６２，６３を設けている点で、第１実施形態と異なっている。   As shown in FIGS. 13 and 14, the probe pin 103 of the second embodiment is different from the first embodiment in that first and second conductive portions 62 and 63 having a substantially equilateral triangular shape are provided. Yes.

第１，第２導通部６２，６３は、その形状が異なる点を除いては、第１実施形態のプローブピン３の第１，第２導通部３２，３３と同じ構成を有し、第１実施形態のプローブピン３と同様に動作する。   The first and second conducting parts 62 and 63 have the same configuration as the first and second conducting parts 32 and 33 of the probe pin 3 of the first embodiment except that their shapes are different. It operates similarly to the probe pin 3 of the embodiment.

（第３実施形態）
図１５，図１６は、第３実施形態のプローブピン２０３を示す図である。この第３実施形態では、第１実施形態と同一部分に同一参照番号を付して説明を省略し、第１実施形態と異なる点について説明する。 (Third embodiment)
15 and 16 are diagrams showing a probe pin 203 of the third embodiment. In the third embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Differences from the first embodiment will be described.

第３実施形態のプローブピン２０３は、図１５，図１６に示すように、中心線ＣＬ２に沿って延びる旗状を有する第１導通部７２と、中心線ＣＬ２に沿って延びる略矩形状を有する第２導通部７３とを設けている点で、第１実施形態と異なっている。   As shown in FIGS. 15 and 16, the probe pin 203 of the third embodiment has a first conducting portion 72 having a flag shape extending along the center line CL2, and a substantially rectangular shape extending along the center line CL2. The second embodiment is different from the first embodiment in that the second conductive portion 73 is provided.

第１導通部７２は、図１６に示すように、矩形状の基部７４と、この基部７４よりもＸ方向の幅が広い先端部７５とで構成されている。この先端部７５には、第２導通部７３に対向するよう配置された斜面部７６が設けられている。第２導通部７３は、第１導通部７２の斜面部７６に対向するように配置された斜面部７７を有している。   As shown in FIG. 16, the first conduction portion 72 includes a rectangular base portion 74 and a distal end portion 75 that is wider than the base portion 74 in the X direction. The distal end portion 75 is provided with a slope portion 76 disposed so as to face the second conducting portion 73. The second conduction portion 73 has a slope portion 77 disposed so as to face the slope portion 76 of the first conduction portion 72.

また、図１６に示すように、第１導通部７２の先端部７５は、中心線ＣＬ２からＸ方向の右側に突出しており、第２導通部７３は、その一方の側面が中心線ＣＬ２上に位置している。   As shown in FIG. 16, the tip 75 of the first conduction portion 72 protrudes from the center line CL2 to the right in the X direction, and the second conduction portion 73 has one side surface on the center line CL2. positioned.

すなわち、斜面部７６，７７は、相互に対応するように配置され、プローブピン２０３をハウジング２の内部に収納し、接点部４１，５１に力を加えたときに、相互に面接触するように配置されている。   That is, the slope portions 76 and 77 are arranged so as to correspond to each other so that when the probe pin 203 is accommodated in the housing 2 and a force is applied to the contact portions 41 and 51, the surface portions contact each other. Has been placed.

第３実施形態のプローブピン２０３をハウジング２の内部に収納し、接点部４１，５１に力を加えて、第１，第２接触部４０，５０をハウジング２の内部に押し込んでいく。すると、各弾性ユニット３１の第１，第２導通部７２，７３が中心線ＣＬ２に沿って相互に接近し、フルストロークに達する前に斜面部７６，７７同士が接触し、導通する。その結果、中心線ＣＬ２に沿った導通経路が形成される。   The probe pin 203 of the third embodiment is housed inside the housing 2, a force is applied to the contact portions 41 and 51, and the first and second contact portions 40 and 50 are pushed into the housing 2. Then, the 1st, 2nd conduction | electrical_connection parts 72 and 73 of each elastic unit 31 approach mutually along the centerline CL2, and before reaching a full stroke, slope part 76,77 will contact and it will conduct | electrically_connect. As a result, a conduction path along the center line CL2 is formed.

第１，第２接触部４０，５０をハウジング２の内部に押し込んでいくと、第１導通部７２の先端部７５が、第２導通部７３によって中心線ＣＬ２からＸ方向の左側へ押し込まれる。同時に、第２導通部７３が、第１導通部７２の先端部７５によって中心線ＣＬ２からＸ方向の右側へ押し込まれる。すなわち、第１導通部７２の斜面部７６と、第２導通部７３の斜面部７７とが、相互に面接触した状態でスライドする。さらに、第１，第２接触部４０，５０をハウジング２の内部に押し込んでいくと、第１導通部７２の先端部７５のＸ方向の右側の端部７８と、第２導通部７３のＸ方向の左側の側面７９とが、相互に接触した状態でスライドする。このため、高い接触信頼性を確保できる。   When the first and second contact portions 40 and 50 are pushed into the housing 2, the leading end portion 75 of the first conduction portion 72 is pushed from the center line CL <b> 2 to the left in the X direction by the second conduction portion 73. At the same time, the second conducting portion 73 is pushed to the right in the X direction from the center line CL2 by the tip 75 of the first conducting portion 72. That is, the slope part 76 of the first conduction part 72 and the slope part 77 of the second conduction part 73 slide in a state of surface contact with each other. Further, when the first and second contact portions 40 and 50 are pushed into the housing 2, the right end portion 78 in the X direction of the distal end portion 75 of the first conduction portion 72 and the X of the second conduction portion 73. The side surface 79 on the left side of the direction slides in contact with each other. For this reason, high contact reliability is securable.

なお、第１導通部７２の斜面部７６および端部７８と、第２導通部７３の斜面部７７および側面７９とは、内部接触部の一例である。   In addition, the slope part 76 and the edge part 78 of the 1st conduction | electrical_connection part 72 and the slope part 77 and the side surface 79 of the 2nd conduction | electrical_connection part 73 are examples of an internal contact part.

（第４実施形態）
図１７，図１８は、第４実施形態のプローブピン３０３を示す図である。この第４実施形態では、第１実施形態と同一部分に同一参照番号を付して説明を省略し、第１実施形態と異なる点について説明する。 (Fourth embodiment)
17 and 18 are diagrams showing a probe pin 303 of the fourth embodiment. In the fourth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Differences from the first embodiment will be described.

第４実施形態のプローブピン３０３は、図１７，図１８に示すように、中心線ＣＬ２に沿って延びる略矩形状を有する第１導通部８２と、中心線ＣＬ２に沿って平行に延びる一対の弾性腕部８４を有する第２導通部８３とを設けている点で、第１実施形態と異なっている。   As shown in FIGS. 17 and 18, the probe pin 303 of the fourth embodiment includes a first conducting portion 82 having a substantially rectangular shape extending along the center line CL2 and a pair of parallel extending along the center line CL2. The second embodiment is different from the first embodiment in that a second conducting portion 83 having an elastic arm portion 84 is provided.

第２導通部８３の弾性腕部８４は、図１８に示すように、Ｘ方向において中心線ＣＬ２に対して対称に配置され、その先端に中心線ＣＬ２に向かって突出する突起部８５を有している。この突起部８５は、対向する突起部８５との間の距離が、第１導通部８２のＸ方向の幅よりも狭くなるように配置されている。   As shown in FIG. 18, the elastic arm portion 84 of the second conducting portion 83 is disposed symmetrically with respect to the center line CL2 in the X direction, and has a protrusion 85 that protrudes toward the center line CL2 at the tip thereof. ing. The protrusions 85 are arranged such that the distance between the protrusions 85 facing each other is narrower than the width of the first conduction part 82 in the X direction.

第４実施形態のプローブピン３０３をハウジング２の内部に収納し、接点部４１，５１に力を加えて、第１，第２接触部４０，５０をハウジング２の内部に押し込んでいく。すると、各弾性ユニット３１の第１，第２導通部８２，８３が中心線ＣＬ２に沿って相互に接近し、フルストロークに達する前に、第１導通部８２の先端の角部８６と、第２導通部８３の突起部８５とが接触する。その結果、中心線ＣＬ２に沿った導通経路が形成される。   The probe pin 303 according to the fourth embodiment is housed inside the housing 2 and a force is applied to the contact portions 41 and 51 to push the first and second contact portions 40 and 50 into the housing 2. Then, the first and second conducting parts 82 and 83 of each elastic unit 31 approach each other along the center line CL2, and before reaching the full stroke, the corner 86 at the tip of the first conducting part 82, The projecting portion 85 of the two conducting portion 83 comes into contact. As a result, a conduction path along the center line CL2 is formed.

第１，第２接触部４０，５０をハウジング２の内部に押し込んでいくと、第１導通部８２が、第２導通部８３の弾性腕部８４の間に押し込まれる。これにより、一対の弾性腕部８４の突起部８５が、第１導通部８２のＸ方向の側面８７によって、それぞれ中心線ＣＬ２から離れる方向に押し広げられる。すなわち、第１導通部８２は、第２導通部８３の弾性腕部８４により挟持された状態でスライドする。このため、高い接触信頼性を確保できる。   When the first and second contact portions 40 and 50 are pushed into the housing 2, the first conduction portion 82 is pushed between the elastic arm portions 84 of the second conduction portion 83. As a result, the protrusions 85 of the pair of elastic arm portions 84 are pushed apart in the direction away from the center line CL2 by the side surfaces 87 of the first conduction portion 82 in the X direction. That is, the first conduction portion 82 slides while being sandwiched between the elastic arm portions 84 of the second conduction portion 83. For this reason, high contact reliability is securable.

なお、第１導通部８２の角部８６および側面８７と、第２導通部８３の突起部８５とは、内部接触部の一例である。   In addition, the corner | angular part 86 and the side surface 87 of the 1st conduction | electrical_connection part 82 and the projection part 85 of the 2nd conduction | electrical_connection part 83 are examples of an internal contact part.

（第５実施形態）
図１９，図２０は、第５実施形態のプローブピン４０３を示す図である。この第５実施形態では、第１実施形態と同一部分に同一参照番号を付して説明を省略し、第１実施形態と異なる点について説明する。 (Fifth embodiment)
19 and 20 are diagrams showing a probe pin 403 of the fifth embodiment. In the fifth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Differences from the first embodiment will be described.

第５実施形態のプローブピン４０３は、図１９，図２０に示すように、略半円環状の第１，第２導通部９２，９３を設けた点で、第１実施形態と異なっている。   As shown in FIGS. 19 and 20, the probe pin 403 of the fifth embodiment is different from that of the first embodiment in that substantially semicircular annular first and second conducting portions 92 and 93 are provided.

第１，第２導通部９２，９３は、図２０に示すように、Ｘ方向において中心線ＣＬ２に対して対称、かつ、Ｚ方向において直線ＭＬに対して対称に配置されている。   As shown in FIG. 20, the first and second conducting portions 92 and 93 are arranged symmetrically with respect to the center line CL2 in the X direction and symmetrically with respect to the straight line ML in the Z direction.

第５実施形態のプローブピン４０３をハウジング２の内部に収納し、接点部４１，５１に力を加えて、第１，第２接触部４０，５０をハウジング２の内部に押し込んでいく。すると、各弾性ユニット３１の第１，第２導通部３２，３３が中心線ＣＬ２に沿って相互に接近し、フルストロークに達する前に第１，第２導通部９２，９３の頂点９４，９５同士が接触する。その結果、中心線ＣＬ２に沿った導通経路が形成される。   The probe pin 403 of the fifth embodiment is housed in the housing 2, and a force is applied to the contact portions 41 and 51 to push the first and second contact portions 40 and 50 into the housing 2. Then, the first and second conducting portions 32 and 33 of each elastic unit 31 approach each other along the center line CL2, and before reaching the full stroke, the apexes 94 and 95 of the first and second conducting portions 92 and 93 are reached. Contact each other. As a result, a conduction path along the center line CL2 is formed.

第１，第２接触部４０，５０をハウジング２の内部に押し込んでいくと、第１，第２導通部９２，９３は、次第に弾性変形し、その弾性力により相互に押圧し合う。これにより、高い接触信頼性を確保できる。   When the first and second contact portions 40 and 50 are pushed into the housing 2, the first and second conducting portions 92 and 93 are gradually elastically deformed and pressed against each other by the elastic force. Thereby, high contact reliability is securable.

なお、頂点９４，９５は、内部接触部の一例である。   The vertices 94 and 95 are examples of internal contact portions.

第１〜第５実施形態に示すように、一対の導通部は、プローブピンの中心線ＣＬ２に沿って接触可能かつ開離可能に対向配置されていればよく、プローブピンの設計等に応じて、その形状を適宜変更できる。すなわち、設計の自由度の高いプローブピンを提供できる。   As shown in the first to fifth embodiments, the pair of conducting portions may be arranged so as to be capable of contacting and separating along the center line CL2 of the probe pin, depending on the design of the probe pin and the like. The shape can be changed as appropriate. That is, a probe pin with a high degree of design freedom can be provided.

（その他の実施形態）
接点部４１，５１は、いずれも中心線ＣＬ２に対して対称な形状を有していてもよいし、いずれも中心線ＣＬ２に対して非対称な形状を有していてもよい。接点部の形状は、プローブピンの設計等に応じて、適宜変更できる。 (Other embodiments)
The contact portions 41 and 51 may both have a symmetric shape with respect to the center line CL2, or both may have an asymmetric shape with respect to the center line CL2. The shape of the contact portion can be appropriately changed according to the design of the probe pin and the like.

前記実施形態のプローブピンは、電鋳法に限らず、可能ならば、他の任意の方法で製造してもよい。   The probe pin of the embodiment is not limited to the electroforming method, and may be manufactured by any other method if possible.

ハウジング２の形状は、略角筒形状に限らず、検査治具の設計等に応じて、適宜変更できる。   The shape of the housing 2 is not limited to a substantially rectangular tube shape, and can be appropriately changed according to the design of the inspection jig.

前記実施形態で述べた構成要素は、適宜、組み合わせてもよく、また、適宜、選択、置換、あるいは、削除してもよいことは、勿論である。   It goes without saying that the constituent elements described in the above embodiments may be combined as appropriate, and may be selected, replaced, or deleted as appropriate.

本発明のプローブピンおよび検査治具は、例えば、半導体集積回路および半導体デバイス等の検査に用いることができる。   The probe pin and the inspection jig of the present invention can be used, for example, for inspection of semiconductor integrated circuits and semiconductor devices.

１ 検査治具
２ ハウジング
３，１０３，２０３，３０３，４０３ プローブピン
１０ 上部ハウジング
１１ 収納部
１２ 本体側収納部
１３ 接点側収納部
１４ 段部
１５ 第１開口部
１６ 第２開口部
２０ 下部ハウジング
２１ 収納部
２２ 本体側収納部
２３ 接点側収納部
２４ 段部
２５ 第１開口部
２６ 第２開口部
３０ 弾性部
３１ 弾性ユニット
３２，６２ 第１導通部
３２１ 頂点部
３２２ 斜面部
３３，６３ 第２導通部
３３１ 頂点部
３３２ 斜面部
３４，３５ 弾性支持部
３４１，３５１ 中間点
３４２，３４３，３５２，３５３ 連結部
３４４，３５４ 円弧部
４０ 第１接触部
４１ 接点部
４２ 支持突部
４２１ 先端
４３ 貫通孔
５０ 第２接触部
５１ 接点部
５２ 支持突部
５２１ 先端 DESCRIPTION OF SYMBOLS 1 Inspection jig 2 Housing 3,103,203,303,403 Probe pin 10 Upper housing 11 Storage part 12 Main body side storage part 13 Contact side storage part 14 Step part 15 First opening part 16 Second opening part 20 Lower housing 21 Storage part 22 Main body side storage part 23 Contact side storage part 24 Step part 25 First opening part 26 Second opening part 30 Elastic part 31 Elastic unit 32, 62 First conduction part 321 Vertex part 322 Slope part 33, 63 Second conduction Part 331 Vertex part 332 Slope part 34, 35 Elastic support part 341, 351 Intermediate point 342, 343, 352, 353 Connection part 344, 354 Arc part 40 First contact part 41 Contact part 42 Support projection part 421 Tip 43 Through hole 50 Second contact portion 51 Contact portion 52 Support protrusion 521 Tip

Claims (5)

中心線に沿って連結された複数の弾性ユニットを有し、前記中心線に沿って伸縮する弾性部と、
前記弾性部の両端にそれぞれ設けられた接点部と、
を備え、
前記弾性ユニットが、
前記中心線に沿って接触可能かつ開離可能に対向配置された一対の導通部と、前記中心線に対して対称に設けられ、前記一対の導通部間を連結する一対の弾性支持部と、
を有し、
前記一対の導通部が、
前記弾性部を前記中心線に沿って縮めたときに、相互に接触するように配置された内部接触部をそれぞれ有している、プローブピン。 An elastic part having a plurality of elastic units connected along a center line, and extending and contracting along the center line;
Contact portions respectively provided at both ends of the elastic portion;
With
The elastic unit is
A pair of conductive portions disposed opposite to each other so as to be contactable and separable along the center line, a pair of elastic support portions provided symmetrically with respect to the center line, and connecting between the pair of conductive portions;
Have
The pair of conductive portions are
Probe pins each having an internal contact portion disposed so as to come into contact with each other when the elastic portions are contracted along the center line. 前記内部接触部が面である、請求項１に記載のプローブピン。   The probe pin according to claim 1, wherein the internal contact portion is a surface. 前記内部接触部が、相互に押圧し合うように配置されている、請求項１または２に記載のプローブピン。   The probe pin according to claim 1, wherein the internal contact portions are arranged so as to press each other. 前記接点部の少なくともいずれか一方が、前記中心線に対して非対称な形状を有している、請求項１から３のいずれか１つに記載のプローブピン。   The probe pin according to claim 1, wherein at least one of the contact portions has an asymmetric shape with respect to the center line. ハウジングと、
前記接点部が露出し、かつ、前記一対の導通部が開離した状態で前記ハウジング内に収納された、請求項１から４のいずれか１項に記載のプローブピンと、
を備える検査治具。 A housing;
The probe pin according to any one of claims 1 to 4, wherein the probe pin is housed in the housing in a state in which the contact portion is exposed and the pair of conductive portions are separated from each other.
Inspection jig equipped with.
JP2015157295A 2015-08-07 2015-08-07 Probe pin and inspection jig equipped with this Active JP6641772B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015157295A JP6641772B2 (en) 2015-08-07 2015-08-07 Probe pin and inspection jig equipped with this
TW105121339A TW201706609A (en) 2015-08-07 2016-07-06 Probe pin and inspection jig provided with same
PCT/JP2016/072398 WO2017026304A1 (en) 2015-08-07 2016-07-29 Probe pin and inspection jig provided with same
CN201680028141.1A CN107615077B (en) 2015-08-07 2016-07-29 Probe and inspection jig provided with probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015157295A JP6641772B2 (en) 2015-08-07 2015-08-07 Probe pin and inspection jig equipped with this

Publications (2)

Publication Number Publication Date
JP2017036959A true JP2017036959A (en) 2017-02-16
JP6641772B2 JP6641772B2 (en) 2020-02-05

Family

ID=57983481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015157295A Active JP6641772B2 (en) 2015-08-07 2015-08-07 Probe pin and inspection jig equipped with this

Country Status (4)

Country Link
JP (1) JP6641772B2 (en)
CN (1) CN107615077B (en)
TW (1) TW201706609A (en)
WO (1) WO2017026304A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018216273A1 (en) * 2017-05-24 2018-11-29 山一電機株式会社 Mems-type probe and electrical inspection device using same
KR102183326B1 (en) * 2019-05-30 2020-11-26 리노공업주식회사 Contact And Test Socket Using Same
KR20230076514A (en) * 2021-11-24 2023-05-31 (주)티에스이 Probe card

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020034352A (en) * 2018-08-28 2020-03-05 オムロン株式会社 Housing for probe pin, inspection jig, inspection unit, and inspection device
JP7354534B2 (en) * 2018-11-08 2023-10-03 オムロン株式会社 Probe pins and inspection fixtures
JP2020180889A (en) * 2019-04-25 2020-11-05 オムロン株式会社 Probe pin, inspection jig, and inspection unit
CN111579837B (en) * 2020-05-18 2022-09-20 武汉精毅通电子技术有限公司 Probe and connector suitable for high-current high-speed signal test
TWI801901B (en) * 2021-06-15 2023-05-11 美商全球連接器科技有限公司 Electrical testing element and electrical testing device
US20230314473A1 (en) * 2022-03-29 2023-10-05 Choon Leong Lou Probe and elastic structure thereof
WO2023188165A1 (en) * 2022-03-30 2023-10-05 日本電子材料株式会社 Probe card

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62157086U (en) * 1986-03-26 1987-10-06
JP2001237040A (en) * 2000-02-25 2001-08-31 Enplas Corp Socket for electric parts
JP2006236950A (en) * 2005-02-28 2006-09-07 Sensata Technologies Japan Ltd Contact assembly and socket for semiconductor package using it
JP2008197086A (en) * 2007-02-09 2008-08-28 Korea Inst Of Machinery & Materials Amf probe with variable stiffness
JP2009128218A (en) * 2007-11-26 2009-06-11 Koyo Technos:Kk Electric contact and inspection tool having it
JP2010139344A (en) * 2008-12-11 2010-06-24 Yokowo Co Ltd Contact pin and contact probe
JP2010188516A (en) * 2009-02-18 2010-09-02 Winmems Technologies Co Ltd Micro-electro-mechanical-system interconnection pin, and method for forming the interconnection pin
JP2011502339A (en) * 2007-10-29 2011-01-20 アーデント コンセプツ、インコーポレイテッド Compliant contacts and assemblies
JP2015076325A (en) * 2013-10-10 2015-04-20 オムロン株式会社 Contactor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5694672B2 (en) * 2010-02-25 2015-04-01 スリーエム イノベイティブ プロパティズ カンパニー Contacts and electrical connectors

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62157086U (en) * 1986-03-26 1987-10-06
JP2001237040A (en) * 2000-02-25 2001-08-31 Enplas Corp Socket for electric parts
JP2006236950A (en) * 2005-02-28 2006-09-07 Sensata Technologies Japan Ltd Contact assembly and socket for semiconductor package using it
JP2008197086A (en) * 2007-02-09 2008-08-28 Korea Inst Of Machinery & Materials Amf probe with variable stiffness
JP2011502339A (en) * 2007-10-29 2011-01-20 アーデント コンセプツ、インコーポレイテッド Compliant contacts and assemblies
JP2009128218A (en) * 2007-11-26 2009-06-11 Koyo Technos:Kk Electric contact and inspection tool having it
JP2010139344A (en) * 2008-12-11 2010-06-24 Yokowo Co Ltd Contact pin and contact probe
JP2010188516A (en) * 2009-02-18 2010-09-02 Winmems Technologies Co Ltd Micro-electro-mechanical-system interconnection pin, and method for forming the interconnection pin
JP2015076325A (en) * 2013-10-10 2015-04-20 オムロン株式会社 Contactor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018216273A1 (en) * 2017-05-24 2018-11-29 山一電機株式会社 Mems-type probe and electrical inspection device using same
KR102183326B1 (en) * 2019-05-30 2020-11-26 리노공업주식회사 Contact And Test Socket Using Same
WO2020242216A1 (en) * 2019-05-30 2020-12-03 리노공업주식회사 Contact and test socket using same
KR20230076514A (en) * 2021-11-24 2023-05-31 (주)티에스이 Probe card
WO2023096242A1 (en) * 2021-11-24 2023-06-01 주식회사 티에스이 Probe card
KR102614928B1 (en) 2021-11-24 2023-12-19 (주)티에스이 Probe card

Also Published As

Publication number Publication date
JP6641772B2 (en) 2020-02-05
CN107615077B (en) 2020-06-12
WO2017026304A1 (en) 2017-02-16
CN107615077A (en) 2018-01-19
TW201706609A (en) 2017-02-16

Similar Documents

Publication Publication Date Title
JP2017036959A (en) Probe pin, and inspection jig provided with the same
JP6515877B2 (en) Probe pin
JP6988920B2 (en) Probe pins, inspection jigs, inspection units and inspection equipment
WO2019138505A1 (en) Probe pin, test jig, test unit, and test device
US9759744B2 (en) Contact inspection device
JP2019138709A (en) Probe pin, inspection jig, inspection unit, and inspection device
WO2017141564A1 (en) Probe pin and inspection device using same
WO2018055961A1 (en) Probe pin and inspection unit
WO2020250637A1 (en) Probe pin, testing jig, and testing unit
JP6658952B2 (en) Probe pin
JP2019109263A (en) Probe pin
KR20190001735A (en) Probe member for pogo pin, the method of manufacturing the same and pogo pin comprising the same
JP5793705B2 (en) Wiring duct connection device
KR102253399B1 (en) Probe pin, inspection jig and inspection unit
CN210690650U (en) Probe, inspection jig, and inspection unit
JP2012252804A (en) Wiring duct connection device
WO2018168136A1 (en) Probe pin and inspection unit
KR102429358B1 (en) Probe pin and apparatus for inspecting circuit having the same
JP7318297B2 (en) Probe pins, inspection fixtures and inspection units
JP2018105785A (en) Electric contact pin and electric component-purpose socket
JP7226441B2 (en) Probe pin
JP6841505B2 (en) Spring structure
WO2019171797A1 (en) Inspection unit and inspection device
JP2020076664A (en) Probe pin, inspection jig, inspection unit, and inspection device

Legal Events

Date Code Title Description
RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20171130

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180608

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190514

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190711

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20191001

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191119

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20191203

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20191216

R150 Certificate of patent or registration of utility model

Ref document number: 6641772

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150