JP2009128218A - Electric contact and inspection tool having it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electric contact that is brought into contact with a contact object at a predetermined contact pressure and has deflection amount of a predetermined amount or more. <P>SOLUTION: This electric contact 2 integrally formed of a thin plate having conductivity and spring property comprises a first contact section 2c having one end section, a second contact section 2d having the other end section, and a deforming section 2e for connecting the first contact part 2c to the second contact section 2d and deforming the electric contact 2 in the longitudinal direction of the electric contact 2. The deforming section 2e has a first deforming section 2j connected to the first contact section 2c, a second deforming section 2k connected to the second contact section 2d, and a third deforming section 2m arranged between the first deforming section 2j and the second deforming section 2k. The spring constant of the third deforming section 2m is smaller than that of the first deforming section 2j and that of the second deforming section 2k. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an electrical contact for inspecting electrical characteristics of a circuit board, an electronic component, and the like, and an inspection jig including the electrical contact.

  In general, an inspection jig having a plurality of electrical contacts that contact an object to be inspected is used for an electrical inspection to detect an abnormality such as a short circuit or disconnection of a circuit board wiring pattern or an integrated circuit such as an IC. Yes. In this type of inspection jig, generally, a contact pin formed in a linear shape is used as an electric contact. Further, an inspection jig using a leaf spring as an electrical contact is also known (see, for example, Patent Documents 1 and 2).

  The electric contacts described in Patent Documents 1 and 2 are composed of two plate bodies and a belt-like object connecting the plate bodies. In this electrical contact, when the end of one plate contacts the inspection object, and the one plate contacts the inspection object, the belt-like object is elastically deformed. In addition, the strip | belt-shaped object of patent document 1 and 2 is formed in the sine curve shape, for example.

JP 2004-170360 A JP 2004-144663 A

  In an inspection jig for performing electrical inspection of an inspection object, it is difficult to properly connect the inspection object and the main body side of the inspection apparatus unless the electrical contact is brought into contact with the inspection object with a predetermined contact pressure. It is. Moreover, unless the amount of bending of the electrical contact is greater than or equal to a predetermined amount, it is difficult to reliably contact each of the plurality of electrical contacts with the inspection object.

  However, in the electrical contacts described in Patent Documents 1 and 2, the strip is formed in a sine curve, for example, and the spring constant of the strip portion is relatively large. For this reason, it is possible to bring the electrical contact described in Patent Documents 1 and 2 into contact with the inspection object with a predetermined contact pressure, but it is difficult to set the amount of deflection of the electrical contact to a predetermined amount or more.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an electrical contact that can be brought into contact with an object to be contacted with a predetermined contact pressure and that can be deflected to a predetermined amount or more, and an inspection jig equipped with the electrical contact. Is to provide.

  In order to solve the above-mentioned problems, the present invention provides a first contact that constitutes one end and contacts a predetermined first contact object in an electric contact formed integrally by a thin plate having conductivity and spring property. And the second contact portion that constitutes the other end portion and contacts the predetermined second contacted object, and connects the first contact portion and the second contact portion, and the electric contactor in the longitudinal direction of the electric contactor A deformable portion for deforming, the deformable portion between the first deformable portion connected to the first contact portion, the second deformable portion connected to the second contact portion, and the first deformable portion and the second deformable portion. And a spring constant of the third deformation portion is smaller than a spring constant of the first deformation portion and a spring constant of the second deformation portion.

  In the electric contact according to the present invention, the deforming portion connecting the first contact portion and the second contact portion includes the first deforming portion, the second deforming portion, the spring constant of the first deforming portion, and the spring of the second deforming portion. A third deforming portion having a spring constant smaller than the constant. Therefore, when the first contact portion comes into contact with the first contact object and the second contact portion comes into contact with the second contact object, the third deformation portion having a relatively small spring constant is mainly deformed, and then the comparison is performed. The first deformable portion and the second deformable portion having a large static spring constant are deformed. As a result, in the present invention, the deformation of the third deforming portion having a small spring constant enables the amount of bending of the electric contactor to be equal to or greater than a predetermined amount, and the first deforming portion and the second having a large spring constant. Due to the deformation of the deformation portion, the electric contact can be brought into contact with the first contact object and the second contact object with a predetermined contact pressure.

  In the electrical contact according to the present invention, the first deformable portion that has a relatively large spring constant and is difficult to deform is connected to the first contact portion, and the second deformable portion that is also difficult to deform is connected to the second contact portion. Therefore, it is possible to improve the mechanical strength of the boundary portion between the first contact portion and the first deformable portion and the boundary portion between the second contact portion and the second deformable portion where stress tends to concentrate when the electric contact is deformed. As a result, in the present invention, it is possible to suppress the destruction of the electrical contact.

  In the present invention, the deformation portion is formed in a substantially zigzag shape, and the first deformation portion and the second deformation portion are formed in a curved surface shape that is deformed in a direction substantially parallel to a first plane parallel to the longitudinal direction, The third deforming portion includes a plurality of plane portions and a connecting curved surface portion that connects the plurality of plane portions and has a larger curvature than the first deforming portion and the second deforming portion and deforms in a direction substantially parallel to the first plane. It is preferable to provide. If comprised in this way, it will become possible to form easily the deformation | transformation part provided with the 1st deformation part and 2nd deformation part with a comparatively large spring constant, and the 3rd deformation part with a comparatively small spring constant.

  In this invention, it is preferable that a 3rd deformation part is provided with the projection part which protrudes from a plane part toward a longitudinal direction. If comprised in this way, the excessive deformation | transformation of the 3rd deformation | transformation part which has a comparatively small spring constant and is easy to deform | transform can be suppressed, and destruction of a 3rd deformation | transformation part can be suppressed.

  In this invention, it is preferable that the projection part is the edge part side of a plane part, Comprising: It forms between the some connection curved surface parts in a longitudinal direction. If comprised in this way, even if it is a case where a 3rd deformation | transformation part is formed in zigzag shape, it will become possible to short-circuit the edge part sides of a plane part via a projection part at the time of a deformation | transformation of an electric contactor. . Therefore, it becomes possible to reduce the electrical resistance value in the third deformed portion. Moreover, it becomes possible to reduce the inductance of a 3rd deformation part, and it becomes possible to improve the high frequency characteristic of an electrical contactor.

  In this invention, it is preferable that the thickness of the deformation | transformation part in the direction orthogonal to a 1st plane is larger than the width | variety of a deformation | transformation part. If comprised in this way, the setting of the spring constant in a deformation | transformation part will become easy.

  In the present invention, it is preferable that one end of the third deformation portion is connected to the first deformation portion, and the other end of the third deformation portion is connected to the second deformation portion. If comprised in this way, the structure of an electrical contact can be simplified.

  In the present invention, it is preferable that the spring constant of the first deformable portion and the spring constant of the second deformable portion are substantially equal. When the spring constant of the first deformable portion is different from the spring constant of the second deformable portion, the amount of deformation with the smaller spring constant increases when the electric contactor is deformed. Alternatively, the second deformable portion is likely to be broken, but if configured in this way, the first deformable portion and the second deformable portion can be deformed substantially uniformly, and the first deformable portion and the second deformable portion. Can be prevented from breaking.

  The electric contact of the present invention can be used for an inspection jig including an electrode as a second contacted object and an arrangement member in which a plurality of arrangement holes in which electric contacts are arranged are formed. In this inspection jig, the amount of bending of the electric contact can be made a predetermined amount or more, and the electric contact can be brought into contact with the first contact object and the second contact object with a predetermined contact pressure. It becomes possible. Moreover, destruction of the electrical contact can be suppressed.

  As described above, in the electrical contact and the inspection jig of the present invention, the electrical contact can be brought into contact with the contacted object with a predetermined contact pressure, and the deflection amount of the electrical contact is set to a predetermined amount or more. It becomes possible.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Configuration of inspection jig)
FIG. 1 is a front view showing an inspection jig 1 according to an embodiment of the present invention. FIG. 2 is a diagram illustrating the inspection jig 1 from the EE direction in FIG. 1. FIG. 3 is an enlarged cross-sectional view for explaining the internal structure of the inspection jig 1 shown in FIG. FIG. 4 is an enlarged view showing the electric contact 2 and the arrangement member 4 from the FF direction of FIG. 3. In FIG. 2, only some of the electric contacts 2 and the arrangement holes 4a are denoted by reference numerals.

  The inspection jig 1 of this embodiment is used for an electrical inspection for inspecting an electrical characteristic of an inspection object (not shown) such as a circuit board or an IC to find an abnormality such as a short circuit or a disconnection of the inspection object. Used. In particular, the inspection jig 1 of this embodiment is suitable for inspection of an inspection object having a narrow arrangement pitch of inspection terminals formed on the inspection object.

  As shown in FIGS. 1 to 3, the inspection jig 1 has a plurality of electrical contacts 2 (hereinafter referred to as “contacts 2”) having tip portions 2 a that come into contact with the inspection terminals of the inspection object. A plurality of electrodes 3 with which each of the rear end portions 2b of the contactor 2 contacts, an arrangement member 4 having a plurality of arrangement holes 4a in which a plurality of contactors 2 are arranged one by one, and an electrode 3 The electrode holding member 5 to hold | maintain, and the wiring part 6 for electrically connecting the main-body part of the test | inspection apparatus (illustration omitted) in which the test | inspection jig 1 is mounted, and the test | inspection jig 1 are provided. The wiring part 6 is comprised by the some conducting wire 7 (refer FIG. 3).

  The contact 2 is integrally formed of a thin plate having conductivity and spring properties. For example, the contact 2 is formed of a thin plate such as a nickel alloy. The contact 2 is very thin and very small. The detailed configuration of the contact 2 will be described later.

  The arrangement member 4 is formed in a block shape from an insulating material. The arrangement member 4 is formed with a plurality of arrangement holes 4a as described above. Specifically, the arrangement member 4 has a plurality of arrangement holes 4a penetrating in the vertical direction in FIG. In FIG. 2, for the sake of convenience, the arrangement member 4 in which the arrangement holes 4a are uniformly formed at a predetermined pitch in the vertical direction and the horizontal direction is illustrated. However, in practice, the arrangement of the inspection terminals of the inspection object is illustrated. A plurality of arrangement holes 4 a are formed in the arrangement member 4 so as to correspond.

  The arrangement hole 4a is formed in a substantially round hole shape. Specifically, the arrangement hole 4a includes a small-diameter hole 4b formed at an end (the lower end in FIG. 3) and a large-diameter hole 4c having a larger inner diameter than the small-diameter hole 4b. A step portion 4d is formed at a boundary portion between the small diameter portion 4b and the large diameter hole 4c.

  Similarly to the arrangement member 4, the electrode holding member 5 is formed in a block shape from an insulating material. The electrode holding member 5 is fixed to the arrangement member 4 by fixing means such as screws.

  In this embodiment, the tip portions of the plurality of conducting wires 7 constituting the wiring portion 6 are the electrodes 3. Specifically, as shown in FIG. 3, the tip portion of the conductive wire 7 is bonded and fixed to the electrode holding member 5, and the portion bonded and fixed to the electrode holding member 5 is the electrode 3. The electrode 3 is held by the electrode holding member 5 so that the radial center position of the arrangement hole 4a and the radial center position of the electrode 3 substantially coincide. The rear end portion 2b of one contact 2 is in contact with the electrode 3.

  The conducting wire 7 is, for example, an enameled wire in which an insulating film (not shown) serving as an insulating layer is formed around a copper wire. A predetermined plating layer is formed on the leading end of the conductive wire 7 (the lower end surface of the electrode 3 in FIG. 3, that is, the contact surface of the rear end portion 2b of the contact 2).

(Configuration of electrical contact)
FIG. 5 is a perspective view of the contact 2 shown in FIG. 6 is an enlarged view in which a part of the contact 2 shown in FIG. 3 is enlarged, (A) is an enlarged view of a G portion in FIG. 3, (B) is an enlarged view of an H portion in FIG. ) Is an enlarged view of a portion J in FIG. In the following description, the left-right direction in FIG. 3 is the X direction, the up-down direction is the Y direction, and the vertical direction on the drawing is the Z direction. A plane formed by the X direction and the Y direction is an XY plane, and a plane formed by the Z direction and the X direction is a ZX plane.

  As shown in FIG. 5 and the like, the contact 2 includes a front end side contact portion 2c as a first contact portion including the front end portion 2a, and a rear end side contact portion 2d as a second contact portion including the rear end portion 2b. And a deforming portion 2e for deforming the contact 2 in the Y direction which is the longitudinal direction of the contact 2. The deformable portion 2e connects the front end side contact portion 2c and the rear end side contact portion 2d. The front end side contact portion 2 c constitutes one end portion of the contact 2, and the rear end side contact portion 2 d constitutes the other end portion of the contact 2. In this embodiment, the inspection object is a first contact object that is in contact with the front end side contact portion 2c, and the electrode 3 is a second contact object that is in contact with the rear end side contact portion 2d.

  In this embodiment, the Z direction is the thickness direction of the contact 2. As shown in FIG. 4, the thickness of the contact 2 is smaller than the diameter of the small diameter hole 4b. Moreover, as shown in FIG. 5, the thickness of the contact 2 is substantially uniform. In addition, the length of the contact 2 is about 2-4 mm, for example.

  The front end side contact portion 2c includes a narrow portion 2f including the front end portion 2a and a wide portion 2g having a width in the X direction wider than the narrow portion 2f. The width of the narrow part 2f is smaller than the diameter of the small diameter hole 4b, and is set so that the narrow part 2f can be inserted into the small diameter hole 4b. Moreover, the width | variety of the front end side part of the narrow part 2f becomes narrow as it goes to the front-end | tip part 2a. The width of the wide portion 2g is larger than the small diameter hole 4b and smaller than the diameter of the large diameter hole 4c, and is set so that the wide portion 2g cannot be inserted into the small diameter hole 4b but can be inserted into the large diameter hole 4c. ing.

  As shown in FIG. 3, the narrow portion 2f is disposed in the small diameter hole 4b. The length of the narrow portion 2f (the length in the Y direction) is longer than the length of the small diameter hole 4b. Therefore, the distal end side of the contact 2 that is arranged in the arrangement hole 4 a and the rear end 2 b is in contact with the electrode 3 protrudes from the end surface 4 e of the arrangement member 4. That is, as shown in FIG. 3, the front end side of the narrow portion 2f protrudes from the end face 4e. For example, the amount of protrusion on the tip side of the narrow portion 2f from the end face 4e is 100 μm.

  The rear end side contact portion 2d is disposed in the large diameter hole 4c. The width of the rear end side contact portion 2d is substantially equal to the width of the wide portion 2g of the front end side contact portion 2c. Further, the width of the rear end side portion of the rear end contact portion 2d becomes narrower toward the rear end portion 2b.

  The deformation part 2e is disposed between the first deformation part 2j connected to the front end side contact part 2c, the second deformation part 2k connected to the rear end side contact part 2d, and the first deformation part 2j and the second deformation part 2k. The third deformed portion 2m is disposed in the large-diameter hole 4c. The deformed portion 2e is formed in a substantially zigzag shape as a whole. In this embodiment, one end of the third deformation portion 2m is directly connected to the first deformation portion 2j, and the other end of the third deformation portion 2m is directly connected to the second deformation portion 2k.

  The first deformation portion 2j is formed in a substantially zigzag shape. Specifically, the first deformation portion 2j is formed in a curved surface shape that deforms in a direction substantially parallel to the XY plane. In this embodiment, as shown in FIG. 6 (A), the first deformable portion 2j is formed in a curved shape connecting a plurality of partial curved surface portions 2n formed in a substantially semi-cylindrical shape. The width H1 of the partial curved surface portion 2n is substantially uniform. The first deforming portion 2j may be formed in a substantially sinusoidal curved surface.

  As shown in FIG. 6C, the width H4 of the boundary portion 2p between the first deformable portion 2j and the tip side contact portion 2c is wider than the width H1 of the partial curved surface portion 2n. In addition, as shown in FIG. 6C, the outside of the boundary portion 2p is formed in a curved surface in order to avoid stress concentration. The boundary portion 2p connects the partial curved surface portion 2n and the distal end side contact portion 2c at a substantially center position of the distal end side contact portion 2c in the X direction.

  The second deformation portion 2k is formed in the same manner as the first deformation portion 2j. That is, the second deforming portion 2k is formed in a substantially zigzag shape and a curved shape that deforms in a direction substantially parallel to the XY plane. Specifically, the 2nd deformation part 2k is formed in the curved surface shape which connected several partial curved surface parts 2n formed in the substantially semi-cylindrical shape. Further, the boundary portion 2v of the second deformable portion 2k with the rear end side contact portion 2d is formed in the same manner as the boundary portion 2p, and is substantially at the center position of the rear end side contact portion 2d in the X direction. The rear end side contact portion 2d is connected.

  The third deformation portion 2m is formed in a substantially zigzag shape. Specifically, as shown in FIG. 6 (B), the third deforming portion 2m connects the plurality of plane portions 2q substantially parallel to the ZX plane and the plurality of plane portions 2q, and is a direction substantially parallel to the XY plane. The connecting curved surface portion 2r is deformed. The connection curved surface portion 2r is formed in a substantially semi-cylindrical shape. Further, the curvature of the connection curved surface portion 2r is larger than the curvature of the partial curved surface portion 2n. For example, the curvature of the connection curved surface portion 2r is about three times the curvature of the partial curved surface portion 2n.

  The width H2 of the flat surface portion 2q and the width H3 of the connecting curved surface portion 2r (see FIG. 6B) are substantially uniform. In this embodiment, the widths H2 and H3 are substantially equal to the width H1 of the partial curved surface portion 2n. Further, the distance D1 between the outer circumferences of the connection curved surface portion 2r in the X direction (see FIG. 6B) is substantially equal to the outer diameter of the partial curved surface portion 2n (that is, the distance D2 between the outer circumferences of the partial curved surface portion 2n in the X direction). It has become. For example, the distance D1 between the outer peripheries is about 100 μm.

  The third deforming portion 2m includes a protruding portion 2s that protrudes from the flat surface portion 2q in the Y direction. The projecting portion 2s is formed so that the shape viewed from the Z direction is rectangular, and is formed at the end portion in the X direction of the flat surface portion 2q (that is, the boundary portion with the connecting curved surface portion 2r). Specifically, as shown in FIG. 6B, the protrusion 2s is formed between the plurality of connection curved surfaces 2r in the Y direction. That is, the protrusion 2s is formed on the outer peripheral side of the connection curved surface portion 2r at the boundary between the flat surface portion 2q and the connection curved surface portion 2r, and on the inner peripheral side of the connection curved surface portion 2r at the boundary with the connection curved surface portion 2r. Is not formed. Further, the protrusion 2s formed at the end in the X direction of the flat portion 2q is opposed in the Y direction via a predetermined gap t1. The gap t1 is 4 μm, for example, and is about half of the widths H1 to H3.

  As shown in FIG. 5, in this embodiment, the thickness of the deformable portion 2e is larger than the width H1 of the partially curved surface portion 2n, the width H2 of the flat surface portion 2q, and the width H3 of the connecting curved surface portion 2r. That is, the thickness of the deformed portion 2e is larger than the widths H1 to H3 of the deformed portion 2e excluding the boundary portions 2p and 2v. For example, the thickness of the deformed portion 2e is 50 μm to 100 μm, and the widths H1 to H3 are 5 μm to 15 μm. In this embodiment, the thickness of the deformed portion 2e is about 6 times the widths H1 to H3, and the aspect ratio of the deformed portion 2e is high.

  As described above, the third deformation portion 2m is formed by the plurality of flat surface portions 2q and the plurality of connection curved surface portions 2r having a larger curvature than the partial curved surface portion 2n. Therefore, the spring constant of the third deformation portion 2m is smaller than the spring constant of the first deformation portion 2j and the spring constant of the second deformation portion 2k. Further, as described above, the second deformation portion 2k is formed in the same manner as the first deformation portion 2j, and the spring constant of the first deformation portion 2j and the spring constant of the second deformation portion 2k are substantially equal. Yes.

  In this embodiment, when the tip 2a contacts the inspection terminal during inspection of the inspection object, the contact 2 is deformed (bent) mainly in the Y direction. Specifically, first, the third deforming portion 2m is mainly deformed until the opposing protruding portions 2s come into contact with each other. At this time, the spring pressure of the contact 2 gradually increases with respect to the deflection amount of the contact 2. Thereafter, the first deformation portion 2j and the second deformation portion 2k are deformed. At this time, the spring pressure of the contact 2 rapidly increases with respect to the amount of deflection of the contact 2.

(Method for manufacturing electrical contacts)
FIG. 7 is a perspective view for explaining the first half of the manufacturing process of the contact 2 shown in FIG. FIG. 8 is a perspective view for explaining the latter half of the manufacturing process of the contact 2 shown in FIG.

  The contact 2 configured as described above is manufactured by combining a photolithography technique and a metal plating technique. Specifically, the contact 2 is manufactured as follows.

  First, as shown in FIG. 7A, a photoresist 12 which is a photosensitive polymer material is formed (film formation) on a substrate 11. Thereafter, as shown in FIG. 7B, the surface of the photoresist 12 is covered with a mask 13 in which a hole 13a having a shape corresponding to the shape of the contact 2 is formed, and from the surface of the mask 13 (upper surface in FIG. 7). Irradiate (expose) ultraviolet rays or X-rays. Further, after irradiating with ultraviolet rays or X-rays and then immersing (developing) in a desired alkaline solution or the like, holes corresponding to the shape of the contact 2 are formed in the photoresist 12 (mold formation).

  Thereafter, electroplating is performed to form a thick plated body 14 that becomes the contact 2 in the hole formed in the photoresist 12 as shown in FIG. Thereafter, as shown in FIG. 8B, the photoresist 12 is removed. Further, the plated body 14 is peeled from the substrate 11. When the plated body 14 is peeled from the substrate 11, the contact 2 is completed. In this embodiment, the plated body 14 is formed by the electroplating technique, but the plated body 14 may be formed by the electroless plating technique.

(Main effects of this form)
As described above, in this embodiment, the deformable portion 2e that connects the front end side contact portion 2c and the rear end side contact portion 2d includes the first deformable portion 2j, the second deformable portion 2k, the first deformable portion 2j, and And a third deforming portion 2m having a smaller spring constant than the second deforming portion 2k. Therefore, as described above, when the tip 2a comes into contact with the inspection terminal, first, the third deformable portion 2m is mainly deformed, and then the first deformable portion 2j and the second deformable portion 2k are deformed. Therefore, in this embodiment, the third deformation portion 2m having a small spring constant can be deformed to make the deflection amount of the contactor 2 equal to or larger than a predetermined amount. In the present embodiment, the contact 2 can be brought into contact with the inspection object with a predetermined contact pressure by the deformation of the first deformation portion 2j and the second deformation portion 2k having a large spring constant.

  In this embodiment, the first deformation portion 2j that has a relatively large spring constant and is difficult to deform is connected to the front end side contact portion 2c, and the second deformation portion 2k that is also difficult to deform is connected to the rear end side contact portion 2d. . Therefore, the mechanical strength of the boundary portion 2p between the front-end-side contact portion 2c and the first deformation portion 2j and the boundary portion 2v between the rear-end-side contact portion 2d and the second deformation portion 2k where stress tends to concentrate when the contact 2 is deformed. Can be improved. As a result, destruction of the contact 2 can be suppressed.

  In this embodiment, the deformable portion 2e is formed in a substantially zigzag shape. The first deformable portion 2j and the second deformable portion 2k are formed in a curved shape that deforms in a direction substantially parallel to the XY plane, and the third deformable portion includes a plurality of plane portions 2q and a plurality of plane portions 2q. The connecting curved surface portion 2r is connected and deformed in a direction substantially parallel to the XY plane. Therefore, the deformable portion 2e including the first deformable portion 2j, the second deformable portion 2k having a relatively large spring constant and the third deformable portion 2m having a relatively small spring constant is compared by combining the photolithography technique and the metal plating technique. Can be formed easily. In the present embodiment, the thickness of the deformable portion 2e is larger than the widths H1 to H3 of the deformable portion 2e. Therefore, it becomes easy to set the spring constant in the deforming portion 2e.

  In the present embodiment, the third deforming portion 2m includes a protruding portion 2s protruding from the flat surface portion 2q toward the Y direction. Therefore, excessive deformation of the third deformable portion 2m, which has a relatively small spring constant and is easily deformed, can be suppressed, and destruction of the third deformable portion 2m can be suppressed.

  In particular, in this embodiment, the projecting portion 2s is formed on the end side of the flat surface portion 2q and between the connection curved surface portions 2r in the Y direction. Therefore, as described above, when the contact 2 is deformed, the protruding portions 2s facing each other come into contact with each other. Therefore, even when the third deforming portion 2m is formed in a zigzag shape, the planar portions 2q can be short-circuited via the protruding portions 2s when the contact 2 is deformed. Specifically, the outer peripheral sides of the boundary portion between the flat surface portion 2q and the connection curved surface portion 2r can be short-circuited. As a result, when inspecting the inspection object, the electrical resistance value of the third deforming portion 2m can be reduced, and the inspection object can be inspected appropriately.

  Further, when the contact 2 is deformed, the projecting portions 2s facing each other come into contact with each other, so that the inductance of the third deforming portion 2m can be reduced. As a result, the high frequency characteristics of the electrical contact 2 can be improved.

  In this embodiment, one end of the third deformation portion 2m is connected to the first deformation portion 2j, and the other end is connected to the second deformation portion 2k. Therefore, the configuration of the contact 2 can be simplified.

  In this embodiment, the spring constant of the first deformable portion 2j and the spring constant of the second deformable portion 2k are substantially equal. Therefore, the deformation amount of the first deformation portion 2j and the deformation amount of the second deformation portion 2k at the time of inspection of the inspection object can be made substantially equal, and the first deformation portion 2j and the second deformation portion 2k are destroyed. Can be suppressed.

(Other embodiments)
In the embodiment described above, one end of the third deformation portion 2m is directly connected to the first deformation portion 2j. In addition to this, for example, a fourth deformation having a spring constant different from the spring constant of the third deformation portion 2m and the spring constant of the first deformation portion 2j between one end of the third deformation portion 2m and the first deformation portion 2j. The part may be arranged. That is, one end of the third deformable portion 2m may be connected to one end of the fourth deformable portion, and the other end of the fourth deformable portion may be connected to the first deformable portion 2j. In this case, the spring constant of the fourth deforming part may be smaller than the spring constant of the third deforming part 2m or larger than the spring constant of the first deforming part 2j. In order to suppress, it is preferable that the spring constant of the fourth deforming portion is larger than the spring constant of the third deforming portion 2m and smaller than the spring constant of the first deforming portion 2j.

  Further, in addition to the fourth deformation portion, one or more partial deformation portions having different spring constants may be arranged between one end of the third deformation portion 2m and the first deformation portion 2j. Similarly, one or more partial deformation portions having different spring constants such as a fourth deformation portion may be arranged between the other end of the third deformation portion 2m and the second deformation portion 2k.

  In the form mentioned above, the spring constant of the 1st deformation | transformation part 2j and the spring constant of the 2nd deformation | transformation part 2k are substantially equal. In addition, for example, the spring constant of the first deformable portion 2j and the spring constant of the second deformable portion 2k may be different.

  In the form mentioned above, the 1st deformation | transformation part 2j and the 2nd deformation | transformation part 2k are formed in the curved surface shape deform | transformed in the direction substantially parallel to XY plane. In addition to this, for example, the first deforming portion 2j and / or the second deforming portion 2k is connected to the plurality of plane portions and the plurality of plane portions and is substantially parallel to the XY plane, like the third deforming portion 2m. It may be formed by a connecting curved surface portion that deforms.

  In the form mentioned above, the plane part 2q of the 3rd deformation | transformation part 2m is substantially parallel to the ZX plane. In addition, for example, the plane portion 2q may be inclined with respect to the ZX plane. Further, the third deforming portion 2m may be formed in a curved surface shape that deforms in a direction substantially parallel to the XY plane, similarly to the first deforming portion 2j and the second deforming portion 2k.

  In the embodiment described above, the thickness of the deformable portion 2e is substantially uniform, and the thickness of the first deformable portion 2j, the thickness of the second deformable portion 2k, and the thickness of the third deformable portion 2m are substantially equal. Yes. In addition, for example, the thickness of the first deformable portion 2j and the second deformable portion 2k may be different from the thickness of the third deformable portion 2m. In the embodiment described above, the width H1 of the partial curved surface portion 2n, the width H2 of the flat surface portion 2q, and the width H3 of the connection curved surface portion 2r are substantially uniform. In addition, for example, the width H2 and the width H3 and the width H1 may be different. Moreover, the spring constant of the 3rd deformation | transformation part 2m may be set smaller than the spring constant of the 1st deformation | transformation part 2j and the 2nd deformation | transformation part 2k because thickness and width H1-H3 differ.

  In the embodiment described above, the thickness of the deformable portion 2e is larger than the width H1 of the partially curved surface portion 2n, the width H3 of the flat surface portion 2q, and the width H4 of the connecting curved surface portion 2r. In addition, for example, the thickness of the deformable portion 2e may be the same as the widths H1 to H3, or may be smaller than the widths H1 to H3.

  In the embodiment described above, the protrusion 2s is formed at the end of the flat portion 2q in the X direction, but the protrusion 2s may be formed at the center of the flat portion 2q in the X direction. Further, in the above-described form, the tip portion of the conducting wire 7 is the electrode 3, and this electrode 3 is held by the electrode holding member 5. However, the electrode 3 may be formed on the printed board. In this case, the printed circuit board on which the electrode 3 is formed is fixed to the arrangement member 4.

It is a front view which shows the inspection jig concerning Embodiment 1 of this invention. It is a figure which shows an inspection jig from the EE direction of FIG. It is an expanded sectional view for demonstrating the internal structure of the inspection jig shown in FIG. It is an enlarged view which shows an electrical contact and an arrangement | positioning member from the FF direction of FIG. It is a perspective view of the contact shown in FIG. It is the enlarged view to which a part of contactor shown in FIG. 3 was expanded, (A) is an enlarged view of the G section of FIG. 3, (B) is an enlarged view of the H section of FIG. 3, (C) is FIG. It is an enlarged view of J section. It is a perspective view for demonstrating the first half of the manufacturing process of the contactor shown in FIG. It is a perspective view for demonstrating the second half of the manufacturing process of the contactor shown in FIG.

Explanation of symbols

1 Inspection jig 2 Contact (electric contact)
2c Tip side contact part (first contact part)
2d Rear end side contact portion (second contact portion)
2e Deformation part 2j 1st deformation part 2k 2nd deformation part 2m 3rd deformation part 2q Plane part 2r Connection curved surface part 2s Protrusion part 3 Electrode (2nd to-be-contacted object)
4 Arrangement member 4a Arrangement hole

Claims (8)

In an electrical contact formed integrally by a thin plate having electrical conductivity and spring property,
A first contact portion that constitutes one end portion and contacts a predetermined first contacted object, a second contact portion that constitutes the other end portion and contacts a predetermined second contacted object, and the first contact portion And a deforming part for deforming the electric contact in the longitudinal direction of the electric contact and connecting the second contact part and the second contact part,
The deformation portion is disposed between the first deformation portion connected to the first contact portion, the second deformation portion connected to the second contact portion, and the first deformation portion and the second deformation portion. 3 deformation parts,
The electrical contact according to claim 3, wherein a spring constant of the third deformable portion is smaller than a spring constant of the first deformable portion and a spring constant of the second deformable portion. The deformation portion is formed in a substantially zigzag shape,
The first deformation portion and the second deformation portion are formed in a curved surface shape that deforms in a direction substantially parallel to a first plane parallel to the longitudinal direction,
The third deforming portion connects the plurality of plane portions and the plurality of plane portions, and has a larger curvature than the first deforming portion and the second deforming portion and deforms in a direction substantially parallel to the first plane. The electrical contact according to claim 1, further comprising a connecting curved surface portion.   The electrical contact according to claim 2, wherein the third deformable portion includes a protrusion that protrudes from the planar portion in the longitudinal direction.   The electrical contact according to claim 3, wherein the protruding portion is formed between the plurality of connecting curved surface portions in the longitudinal direction on the end side of the planar portion.   5. The electrical contact according to claim 2, wherein a thickness of the deforming portion in a direction orthogonal to the first plane is larger than a width of the deforming portion.   6. The electricity according to claim 1, wherein one end of the third deformable portion is connected to the first deformable portion, and the other end of the third deformable portion is connected to the second deformable portion. Contactor.   The electric contact according to any one of claims 1 to 6, wherein a spring constant of the first deformable portion and a spring constant of the second deformable portion are substantially equal.   An electrical contact according to any one of claims 1 to 7, an electrode as the second contact object, and an arrangement member in which a plurality of arrangement holes in which the electric contact is arranged are formed. Inspection jig to do.

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