JP2010066003A - Electric-resistance measuring electrode sheet and method of manufacturing the same, electric-resistance measuring connector, and device of measuring electric resistance of circuit board - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electric-resistance measuring electrode sheet and a method for manufacturing the same which can surely establish required electrical connection to a circuit board whose electric resistance is measured even if the circuit board has a large area and a large number of small-sized electrodes to be inspected, and to provide an electric-resistance measuring connector equipped with the electric-resistance measuring electrode sheet, and a device for measuring the electric resistance of the circuit board. <P>SOLUTION: The electric-resistance measuring electrode sheet has: an insulating sheet; a plurality of pairs of inspecting electrodes including current supplying electrodes and voltage measuring electrodes formed on the surface of the insulating sheet corresponding to electrodes to be inspected on the circuit board to be inspected while being separated from each other; and repeating electrodes formed on the rear face of the insulating sheet, and connected electrically to either the current supplying electrodes or the voltage measuring electrodes. In the insulating sheet, slits are formed in regions between the current supplying electrodes and the voltage measuring electrodes. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an electrode sheet for measuring electrical resistance for measuring the electrical resistance of wiring between electrodes on a circuit board, a method for manufacturing the same, a connector for measuring electrical resistance, and an apparatus for measuring electrical resistance of a circuit board.

In recent years, in response to a demand for high-speed signal transmission in electronic components and electronic devices incorporating them, circuit boards constituting LSI packages such as BGA and CSP, and circuit boards on which these semiconductor devices are mounted, There is a demand for wiring having low electrical resistance. Therefore, in such an electrical inspection of a circuit board, it is extremely important to measure the electrical resistance of the wiring between the electrodes with high accuracy.
Conventionally, in the measurement of the electric resistance of a circuit board, for example, as shown in FIG. 29, for supplying each of two electrodes 91 and 92 to be inspected electrically connected to each other on a circuit board 90 to be inspected. The probes PA and PD and the voltage measurement probes PB and PC are pressed and brought into contact with each other. In this state, current is supplied from the power supply device 93 between the current supply probes PA and PD. At this time, the voltage measurement probe PB is supplied. A four-terminal method is employed in which the voltage signal detected by the PC is processed in the electric signal processing device 94 to obtain the magnitude of the electric resistance between the electrodes 91 and 92 to be inspected.

  However, in the above method, it is necessary to bring the current supply probes PA and PD and the voltage measurement probes PB and PC into contact with the electrodes 91 and 92 to be inspected with a considerably large pressing force. Since the probe is made of metal and has a pointed tip, the surface of the electrodes 91 and 92 to be inspected is damaged when the probe is pressed, and the circuit board can be used. There is a risk of becoming impossible. Under such circumstances, the measurement of electrical resistance cannot be performed for all circuit boards that are products, and it must be a so-called sampling inspection, so that the yield of products cannot be increased after all.

In order to solve such a problem, conventionally, an electrical resistance measuring device in which a connecting member that contacts an electrode to be inspected is made of a conductive elastomer has been proposed.
For example, Patent Document 1 discloses an electrical resistance measurement device in which elastic connection members made of conductive rubber having conductive particles bound by an elastomer are individually arranged for a current supply electrode and a voltage measurement electrode. Patent Document 2 discloses a common elasticity made of an anisotropic conductive elastomer provided so as to be in contact with both surfaces of a current supply electrode and a voltage measurement electrode that are electrically connected to the same electrode to be inspected. An electrical resistance measuring device having a connecting member is disclosed.
According to such an electrical resistance measurement device, the current supply electrode and the voltage measurement electrode are brought into contact with the inspected electrode of the circuit board whose electrical resistance is to be measured via the elastic connection member. Since electrical connection is achieved, the electrical resistance of the circuit board can be measured without damaging the electrode to be inspected.

However, when measuring the electrical resistance of the wiring between the electrodes using the electrical resistance measuring apparatus having the above configuration, there are the following problems.
In recent years, in a circuit board, in order to obtain a high degree of integration, the size and pitch of electrodes or the distance between electrodes tend to be small. Thus, in the electrical resistance measuring apparatus having the above-described configuration, both the current supply electrode and the voltage measuring electrode are provided to each of the electrodes to be inspected on the circuit board whose electrical resistance is to be measured via the elastic connection member. It is necessary to connect them electrically at the same time. Therefore, in an electrical resistance measurement apparatus for measuring electrical resistance of a circuit board in which small-sized electrodes to be inspected are arranged at a high density, corresponding to each of the small-sized electrodes to be inspected, Forming a current supply electrode and a voltage measurement electrode in a state of being separated from each other in a region having an area equal to or smaller than a region occupied by the electrode, that is, a current supply electrode having a size smaller than that of the electrode to be inspected In addition, it is necessary to form the voltage measurement electrodes in a state of being separated by a very small distance.
In addition, as a method for manufacturing a circuit board, in order to improve productivity, a circuit board connected body in which a plurality of circuit boards are connected with one board material is manufactured, and in that state, the circuit board connected body A method of manufacturing a plurality of separated circuit boards by collectively performing electrical inspection on each circuit board and then cutting the circuit board connector is adopted.

However, the circuit board assembly to be inspected has a considerably large area and the number of electrodes to be inspected is extremely large. In particular, when manufacturing a multilayer circuit board, the number of steps in the manufacturing process is large. In many cases, the thermal history due to the heat treatment is frequently received, and thus the electrode to be inspected is often formed in a state of being displaced from the intended arrangement position. As described above, the circuit board formed with a large area, a large number of electrodes to be inspected, and a state in which the electrodes to be inspected are displaced from the intended arrangement positions is electrically When measuring resistance, it is extremely difficult to electrically connect both the current supply electrode and the voltage measurement electrode simultaneously to each of the electrodes to be inspected.
A specific example will be described below. As shown in FIG. 30, when measuring the electrical resistance of the electrode T to be inspected having a diameter L of 300 μm, the current electrically connected to the electrode T to be inspected The separation distance D between the supply electrode A and the voltage measurement electrode V is about 150 μm. However, as shown in FIGS. 31A and 31B, in the alignment of the circuit board to be inspected, the current supply electrode A and When the position of the electrode T to be inspected with respect to the voltage measuring electrode V is shifted by 75 μm in the direction in which the current supplying electrode A and the voltage measuring electrode V are arranged from the intended position shown in FIG. 30, the current supplying electrode A and the voltage The electrical connection between any one of the measurement electrodes V and the electrode T to be inspected is not achieved, and the required electrical resistance measurement cannot be performed.
As a means for solving such a problem, it is conceivable to reduce the distance D between the current supply electrode A and the voltage measurement electrode V. However, it is actually extremely difficult to produce such an electrical resistance measurement device. Have difficulty.
In addition, when the size of the electrode T to be inspected is extremely small, for example, the diameter L is 100 μm or less, the distance between the current supply electrode A and the voltage measurement electrode V needs to be considerably smaller than 100 μm. Therefore, it is very difficult to form the current supply electrode A and the voltage measurement electrode V.

JP-A-9-26446 JP 2000-74965 A

  The present invention has been made based on the above circumstances, and its purpose is that a circuit board whose electrical resistance is to be measured has a large number of electrodes to be inspected having a large area and a small size. However, the electrical resistance measurement electrode sheet that can reliably achieve the required electrical connection to the circuit board and the manufacturing method thereof, the electrical resistance measurement connector including the electrical resistance measurement electrode sheet, and the circuit board The object is to provide an electrical resistance measuring device.

The electrode sheet for electrical resistance measurement of the present invention includes an insulating sheet, and a current supply electrode formed on the surface of the insulating sheet corresponding to the electrode to be inspected on the circuit board whose electrical resistance is to be measured. A plurality of test electrode pairs in which voltage measurement electrodes are spaced apart from each other, and formed on the back surface of the insulating sheet, and either the current supply electrode or the voltage measurement electrode in the test electrode pair is electrically connected And connected relay electrodes,
The insulating sheet is characterized in that a slit is formed in a region located between the current supply electrode and the voltage measurement electrode in each of the inspection electrode pairs.

  In the electrode sheet for measuring electrical resistance according to the present invention, it is preferable that an anisotropic conductive elastomer layer showing conductivity in the thickness direction is integrally formed on the surface of the insulating sheet.

The method for producing an electrode sheet for measuring electrical resistance according to the present invention is a method for producing the above electrode sheet for measuring electrical resistance,
On the surface of the insulating sheet, a plurality of test electrode pair forming pads are formed according to a pattern corresponding to the electrode to be inspected on the circuit board whose electrical resistance is to be measured,
By performing laser processing on the insulating sheet on which the test electrode pair forming pads are formed, the test electrode pair forming pads are cut in two to form current supply electrodes and voltage measurement electrodes. And a step of forming a slit in a region located between the current supply electrode and the voltage measurement electrode in the insulating sheet.

The electrical resistance measurement connector of the present invention comprises the above-described electrical resistance measurement electrode sheet,
According to the pattern corresponding to the relay electrode of the electrode sheet for electrical resistance measurement, disposed on the back surface of the anisotropic conductive elastomer sheet, and the anisotropic conductive elastomer sheet disposed on the back surface of the electrode sheet for electrical resistance measurement Insulating support sheet in which a plurality of through-holes each extending in the thickness direction are formed, and a movable electrode sheet having a plurality of movable electrodes provided in each of the through-holes of the insulating support sheet so as to be movable in the thickness direction It is characterized by comprising.

The circuit board electrical resistance measuring device of the present invention is an electrical resistance measuring device for a circuit board for measuring electrical resistance of a circuit board having electrodes on at least one surface,
The electrical resistance measuring connector is provided on one surface side of the circuit board to be inspected for measuring electrical resistance.

  According to the present invention, by applying laser processing to the insulating sheet on which the test electrode pair forming pad is formed, the test electrode pair forming pad is cut into two, and the current supply electrode and voltage measurement are performed. Therefore, an inspection electrode pair in which a current supply electrode and a voltage measurement electrode are arranged at a very small distance is obtained, and such an inspection electrode pair is displaced from the inspected electrode. Therefore, even if a circuit board whose electrical resistance is to be measured has a large area and a large number of small electrodes to be inspected, the required electrical connection to the circuit board to be inspected is ensured. Can be achieved.

Hereinafter, embodiments of the present invention will be described in detail.
<Electrode sheet for electrical resistance measurement>
FIG. 1 is a cross-sectional view for explaining the structure of an example of an electrode sheet for measuring electrical resistance according to the present invention, and FIG. 2 is a plan view showing an enlarged main part of the electrode sheet for measuring electrical resistance shown in FIG. FIG. 3 is an explanatory cross-sectional view showing an enlarged configuration of a main part of the electrode sheet for measuring electrical resistance shown in FIG.
This electrical resistance measurement electrode sheet (hereinafter also referred to as “measurement electrode sheet”) 10 has an insulating sheet 11 made of a flexible resin, and the surface of the insulating sheet 11 measures electrical resistance. A plurality of current supply electrodes 13 and voltage measurement electrodes 14 that are spaced apart from each other in accordance with a pattern corresponding to the pattern of the electrode to be inspected on the circuit board to be tested (hereinafter referred to as “circuit board to be inspected”). The inspection electrode pair 12 is formed. In the insulating sheet 11, a slit 11 </ b> S is formed in a region located between the current supply electrode 13 and the voltage measurement electrode 14 in each of the inspection electrode pairs 12.
A plurality of relay electrodes 15 are formed on the back surface of the insulating sheet 11 according to an appropriate pattern. In the illustrated example, each of the relay electrodes 15 is disposed at a position that does not overlap the inspection electrode pair 12 when the measurement electrode sheet 10 is seen through in the thickness direction. Each of the relay electrodes 15 includes a short circuit portion 16 extending from the relay electrode 15 through the insulating sheet 11 in the thickness direction, and a wiring formed on the surface of the insulating sheet 11 and connected to the short circuit portion 16. The electrode 17 is electrically connected to either the current supply electrode 13 or the voltage measurement electrode 14 in the inspection electrode pair 12 via the part 17.

As a material constituting the insulating sheet 11, it is preferable to use a resin material having a high mechanical strength, and specific examples thereof include a liquid crystal polymer and polyimide.
In addition, as a material constituting the current supply electrode 13, the voltage measurement electrode 14, the relay electrode 15, the short-circuit portion 16, and the wiring portion 17, copper, nickel, gold, or a laminate of these metals can be used. .
Although the thickness of the insulating sheet 11 will not be specifically limited if the said insulating sheet 11 has a softness | flexibility, For example, it is preferable that it is 5-50 micrometers, More preferably, it is 8-30 micrometers.
The distance between the current supply electrode 13 and the voltage measurement electrode 14 in the inspection electrode pair 12, that is, the width of the slit 11S of the insulating sheet 11, is preferably, for example, 3 to 25 μm, and more preferably 5 to 15 μm.

Such an electrode sheet for measurement 10 can be manufactured as follows.
First, as shown in FIG. 4, a laminated material 10A in which a metal layer 17A is formed on the surface of the insulating sheet 11 is prepared, and the insulating sheet 11 and the metal are added to the laminated material 10A as shown in FIG. A plurality of through-holes 10H penetrating each of the layers 17A in the thickness direction are formed according to the pattern of the short-circuit portions 16 of the measurement electrode sheet 10 to be formed. Next, by performing photolithography and plating on the laminated material 10A in which the through-hole 10H is formed, as shown in FIG. 6, the relay electrode 15 is formed on the back surface of the insulating sheet 11, and the relay electrode 15 and the metal layer 17 </ b> A are electrically connected, and the short-circuit portion 16 extending in the thickness direction of the insulating sheet 11 is formed. Thereafter, the metal layer 17A is subjected to photolithography and etching to remove a part thereof, so that the surface of the insulating sheet 11 is inspected on the circuit board to be inspected as shown in FIGS. A plurality of test electrode pair forming pads 12A arranged according to a pattern corresponding to the electrodes are formed, and a wiring portion 17 that electrically connects the test electrode pair forming pads 12A and the short-circuit portion 17 is formed. Here, each of the test electrode pair forming pads 12A is electrically connected to the two relay electrodes 15 via the wiring portion 17 and the short-circuit portion 16, respectively. Then, by performing laser processing on the insulating sheet 11, the test electrode pair forming pad 12 </ b> A is cut into two, and the current supply electrode 13 and the voltage measurement electrode 14 are arranged apart from each other. The inspection electrode pair 12 is formed, and a slit 11S is formed in a region located between the current supply electrode 13 and the voltage measurement electrode 14 in the insulating sheet 11, so that the measurement electrode shown in FIGS. The electrode sheet 10 is obtained.
In the above, an ultraviolet laser processing machine, an excimer laser processing machine, etc. can be used as a laser processing machine.

  According to such a measurement electrode sheet 10, the test electrode pair forming pad 12 </ b> A is cut into two by performing laser processing on the insulating sheet 11 on which the test electrode pair forming pad 12 </ b> A is formed. Thus, the current supply electrode 13 and the voltage measurement electrode 14 can be formed, so that a test electrode pair 12 in which the current supply electrode 13 and the voltage measurement electrode 14 are arranged at an extremely small distance is obtained. Such a pair of inspection electrodes 12 has a large tolerance for displacement with respect to the electrodes to be inspected. Therefore, even if the circuit board to be inspected has a large area and a large number of inspected electrodes having a small size, The required electrical connection to the circuit board can be reliably achieved.

FIG. 9 is an explanatory cross-sectional view showing an enlarged configuration of a main part in another example of the electrode sheet for measuring electrical resistance according to the present invention.
The measurement electrode sheet 10 is formed in such a manner that an anisotropic conductive elastomer layer 18 showing conductivity in the thickness direction is formed on the surface of the insulating sheet 11 in a state where the anisotropic conductive elastomer layer 18 is in close contact or bonded together. -It is the structure similar to the electrode sheet 10 for a measurement shown in FIG.

As shown in an enlarged view in FIG. 10, the anisotropic conductive elastomer layer 18 has a chain formed by orienting conductive particles P exhibiting magnetism in an insulating elastic polymer material so as to be aligned in the thickness direction. And the chain of the conductive particles P is contained in a dispersed state in the plane direction. The anisotropic conductive elastomer layer 18 has a slit 18S formed in a region located between the current supply electrode 13 and the voltage measurement electrode 14 in each of the inspection electrode pairs 12. The anisotropic conductive elastomer layer As the elastic polymer substance forming 18, a polymer substance having a crosslinked structure is preferable. Various materials can be used as the curable polymer substance-forming material that can be used to obtain such an elastic polymer substance. Specific examples thereof include polybutadiene rubber, natural rubber, and polyisoprene rubber. , Conjugated diene rubbers such as styrene-butadiene copolymer rubber and acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof, blocks such as styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer, etc. Examples include copolymer rubber and hydrogenated products thereof, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, and ethylene-propylene-diene copolymer rubber. In these, it is preferable to use a silicone rubber from a viewpoint of durability, a moldability, and an electrical property.

As the conductive particles P contained in the anisotropic conductive elastomer layer 18, conductive particles exhibiting magnetism are used because the particles can be easily aligned in the thickness direction by a method described later. Specific examples of such conductive particles include particles of metal having magnetism such as iron, cobalt, nickel, particles of these alloys, particles containing these metals, or these particles as core particles, The core particles are formed by plating the surface of the core particles with a metal having good conductivity such as gold, silver, palladium, rhodium, or non-magnetic metal particles or inorganic particles such as glass beads or polymer particles. The surface of the particles may be plated with a conductive magnetic metal such as nickel or cobalt.
Among these, it is preferable to use nickel particles as core particles and the surfaces thereof plated with gold having good conductivity.
The means for coating the surface of the core particles with the conductive metal is not particularly limited, and for example, chemical plating or electrolytic plating, sputtering, vapor deposition or the like is used.

When the conductive particles P used are those in which the surface of the core particles is coated with a conductive metal, good conductivity can be obtained. Therefore, the coverage of the conductive metal on the particle surface (the surface area of the core particles) The ratio of the covering area of the conductive metal with respect to is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%.
Further, the coating amount of the conductive metal is preferably 0.5 to 50% by mass of the core particle, more preferably 2 to 30% by mass, further preferably 3 to 25% by mass, and particularly preferably 4 to 20%. % By mass. When the conductive metal to be coated is gold, the coating amount is preferably 0.5 to 30% by mass of the core particles, more preferably 2 to 20% by mass, and further preferably 3 to 15%. % By mass.

Moreover, it is preferable that the number average particle diameter of the electroconductive particle P is 3-20 micrometers, More preferably, it is 5-15 micrometers. When this number average particle diameter is too small, it may be difficult to orient the conductive particles P in the thickness direction in the production method described later. On the other hand, when the number average particle diameter is excessive, it may be difficult to obtain the anisotropic conductive elastomer layer 18 having high resolution.
The particle size distribution (Dw / Dn) of the conductive particles P is preferably 1 to 10, more preferably 1.01 to 7, still more preferably 1.05 to 5, particularly preferably 1.1. ~ 4.
Further, the shape of the conductive particles P is not particularly limited, but spherical particles, star-shaped particles, or agglomerated particles 2 can be easily dispersed in the polymer substance-forming material. Secondary particles are preferred.
Further, as the conductive particles P, those whose surfaces are treated with a coupling agent such as a silane coupling agent or a lubricant can be appropriately used. By treating the particle surface with a coupling agent or a lubricant, the durability of the resulting anisotropic conductive elastomer sheet is improved.

  Such conductive particles P are preferably contained in the anisotropic conductive elastomer layer 18 at a volume fraction of 10 to 40%, particularly 15 to 35%. If this ratio is too small, the anisotropic conductive elastomer layer 18 having sufficiently high conductivity in the thickness direction may not be obtained. On the other hand, if this ratio is excessive, the resulting anisotropic conductive elastomer layer 18 tends to be fragile and the necessary elasticity may not be obtained.

  Moreover, it is preferable that the thickness of the 1st anisotropically conductive elastomer layer 18 is 10-100 micrometers, More preferably, it is 15-70 micrometers. When this thickness is too small, sufficient unevenness absorbing ability may not be obtained. On the other hand, if this thickness is excessive, high resolution may not be obtained.

Such an electrode sheet for measurement 10 can be manufactured as follows.
First, the relay electrode 15 is formed on the back surface of the insulating sheet 11 in the same manner as the manufacturing method of the measurement electrode sheet 10 shown in FIGS. 1 to 3, and the relay electrode 15 is formed on the surface of the insulating sheet 11. A test electrode pair forming pad 12A electrically connected via the short-circuit portion 16 and the wiring portion 17 is formed (see FIGS. 3 to 7).

Next, as shown in FIG. 11, a conductive elastomer material layer 18 </ b> A in which conductive particles are contained in a liquid polymer substance-forming material that is cured to become an elastic polymer substance on the surface of the insulating sheet 11. Form.
After that, for example, a pair of electromagnets are arranged on the surface of the conductive elastomer material layer 18A and the back surface of the insulating sheet 11, and the electromagnet is operated to generate a parallel magnetic field in the thickness direction of the conductive elastomer material layer 18A. Make it work. As a result, in the conductive elastomer material layer 18A, the conductive particles dispersed in the conductive elastomer material layer 18A are aligned in the thickness direction while maintaining the state of being dispersed in the plane direction. Thus, a chain of a plurality of conductive particles each extending in the thickness direction is formed in a state dispersed in the plane direction.
In this state, the conductive elastomer material layer 18A is cured, so that the conductive particles are aligned in the thickness direction in the elastic polymer substance as shown in FIG. 12, and An anisotropic conductive elastomer layer 18 containing a chain of conductive particles dispersed in a plane direction is integrally formed on the surface of the insulating sheet 11.

In the above, the curing process of the conductive elastomer material layer 18A can be performed with the parallel magnetic field applied, but can also be performed after the parallel magnetic field is stopped.
The magnitude of the parallel magnetic field applied to the conductive elastomer material layer 18A is preferably 0.02 to 2.5 Tesla on average.
The curing treatment of the conductive elastomer material layer 18A is appropriately selected depending on the material to be used, but is usually performed by heat treatment. The specific heating temperature and heating time are appropriately selected in consideration of the type of polymer material constituting the conductive elastomer material layer 18A, the time required to move the conductive particles P, and the like.

  Thereafter, the insulating sheet 11 on which the anisotropic conductive elastomer layer 18 is formed is subjected to laser processing to form slits 18S in the anisotropic conductive elastomer layer 18, and further, a test electrode pair forming pad. 12A is cut into two to form a test electrode pair 12 composed of a current supply electrode 13 and a voltage measurement electrode 14 which are spaced apart from each other, and the current supply electrode 13 and voltage measurement in the insulating sheet 11 are formed. Slit 11S is formed in the area | region located between the electrodes 14 for a measurement, and, thereby, the measurement electrode sheet 10 shown in FIG. 9 is obtained.

According to such a measurement electrode sheet 10, the test electrode pair forming pad 12 </ b> A is cut into two by performing laser processing on the insulating sheet 11 on which the test electrode pair forming pad 12 </ b> A is formed. Thus, the current supply electrode 13 and the voltage measurement electrode 14 can be formed, so that a test electrode pair 12 in which the current supply electrode 13 and the voltage measurement electrode 14 are arranged at an extremely small distance is obtained. Such a pair of inspection electrodes 12 has a large tolerance for displacement with respect to the electrodes to be inspected. Therefore, even if the circuit board to be inspected has a large area and a large number of inspected electrodes having a small size, The required electrical connection to the circuit board can be reliably achieved.
Moreover, since the anisotropic conductive elastomer layer 18 is integrally formed on the surface of the insulating sheet 11, it is possible to prevent the anisotropic conductive elastomer layer 18 from being wrinkled during use. Even when it is used repeatedly, the required electrical connection to the circuit board to be inspected can be reliably achieved.

<Electrical resistance measurement connector>
FIG. 13 is an explanatory cross-sectional view showing the configuration of an example of the electrical resistance measurement connector according to the present invention. The electrical resistance measurement connector 1 is used to measure electrical resistance between electrodes on a circuit board, and includes a measurement electrode sheet 10 having a configuration shown in FIG. 9 and a back surface of the measurement electrode sheet 10. The anisotropic conductive elastomer sheet 19 is disposed on the back surface of the anisotropic conductive elastomer sheet 19 and the movable electrode sheet 20 is disposed on the back surface of the anisotropic conductive elastomer sheet 19.

As shown in FIG. 14, the anisotropically conductive elastomer sheet 19 is formed in a state in which conductive particles P exhibiting magnetism are aligned in the thickness direction in an insulating elastic polymer material to form a chain. And the chain | strand by the said electroconductive particle P is contained in the state disperse | distributed to the surface direction.
As the elastic polymer substance and the conductive particles P constituting the anisotropic conductive elastomer sheet 19, the elastic polymer substance and the conductive particles constituting the anisotropic conductive elastomer layer 18 in the measurement electrode sheet 10 shown in FIG. The same thing as P can be illustrated.

The anisotropic conductive elastomer sheet 19 can be manufactured as follows.
First, as shown in FIG. 15, each of the sheet-like one side molding member 30 and the other side molding member 31, and an opening 32 </ b> K having a shape that matches the planar shape of the target anisotropic conductive elastomer sheet 19. A frame-shaped spacer 32 having a thickness corresponding to the thickness of the anisotropic conductive elastomer sheet 19 is prepared, and conductive particles are contained in a liquid polymer substance-forming material that is cured to become an elastic polymer substance. A conductive elastomer material is prepared.
Then, as shown in FIG. 16, a spacer 32 is disposed on the molding surface (upper surface in FIG. 16) of the other surface side molding member 31, and in the opening 32 </ b> K of the spacer 32 on the molding surface of the other surface side molding member 31. Then, the prepared conductive elastomer material 19B is applied, and then the one-surface side molded member 30 is arranged on the conductive elastomer material 19B so that the molding surface (the lower surface in FIG. 16) is in contact with the conductive elastomer material 19B. To do.
In the above, as the one side molding member 30 and the other side molding member 31, a resin sheet made of polyimide resin, polyester resin, acrylic resin, or the like can be used.
Moreover, it is preferable that the thickness of the resin sheet which comprises the one surface side molded member 30 and the other surface side molded member 31 is 50-500 micrometers, More preferably, it is 75-300 micrometers. If this thickness is less than 50 μm, the strength required for the molded member may not be obtained. On the other hand, when the thickness exceeds 500 μm, it may be difficult to apply a magnetic field having a required strength to the conductive elastomer material layer described later.

Next, as shown in FIG. 17, the pressure-sensitive roll device 35 including the pressure roll 33 and the support roll 34 is used to sandwich the conductive elastomer material 19 </ b> B by the one-surface-side molded member 30 and the other-surface-side molded member 31. Thus, the conductive elastomer material layer 19 </ b> A having a required thickness is formed between the one side molding member 30 and the other side molding member 31. .
Thereafter, for example, a pair of electromagnets are disposed on the back surface of the one-surface-side molded member 30 and the back surface of the other-surface-side molded member 31, and the electromagnets are operated, thereby generating a parallel magnetic field in the thickness direction of the conductive elastomer material layer 19A. Make it work. As a result, in the conductive elastomer material layer 19A, the conductive particles dispersed in the conductive elastomer material layer 19A are aligned in the thickness direction while maintaining the state of being dispersed in the plane direction. Thus, a chain of a plurality of conductive particles each extending in the thickness direction is formed in a state dispersed in the plane direction. In this state, the conductive elastomer material layer 19A is cured, so that the conductive particles are aligned in the thickness direction in the elastic polymer substance, and the chain of the conductive particles is formed. An anisotropic conductive elastomer sheet 19 that is contained in a state of being dispersed in the plane direction is manufactured.
In the above, the curing process of the conductive elastomer material layer 19A can be performed with the parallel magnetic field applied, but can also be performed after the parallel magnetic field is stopped.
The magnitude of the parallel magnetic field applied to the conductive elastomer material layer 19A is preferably 0.02 to 2.5 Tesla on average.
The curing process of the conductive elastomer material layer 19A is appropriately selected depending on the material to be used, but is usually performed by a heating process. The specific heating temperature and heating time are appropriately selected in consideration of the type of the polymer material constituting the conductive elastomer material layer 19A, the time required to move the conductive particles, and the like.

  As shown in an enlarged view in FIG. 18, the movable electrode sheet 20 includes an insulating support sheet 21 in which a plurality of through holes 22 are formed according to a pattern corresponding to the pattern of the relay electrode 15 in the measurement electrode sheet 10; Each of the through holes 22 of the insulating support sheet 21 includes a movable electrode 25 provided so as to protrude from each of both surfaces of the insulating support sheet 21. Each of the movable electrodes 25 includes a cylindrical body portion 25a inserted through the through hole 22 of the insulating support sheet 21, and an insulating support sheet formed integrally connected to each of both ends of the body portion 25a. And a terminal portion 25 b exposed on the surface of 21. The length of the body part 25a in the movable electrode 25 is larger than the thickness of the insulating support sheet 21, and the diameter of the body part 25a is smaller than the diameter of the through hole 22 of the insulating support sheet 21. Thus, the movable electrode 25 is movable in the thickness direction of the insulating support sheet 21. Further, the diameter of the terminal portion 25 b in the movable electrode 25 is made larger than the diameter of the through hole 22 of the insulating support sheet 21.

As a material constituting the insulating support sheet 21, resin materials such as liquid crystal polymer, polyimide resin, polyester resin, polyaramid resin, polyamide resin, glass fiber reinforced epoxy resin, glass fiber reinforced polyester resin, glass fiber reinforced polyimide A fiber reinforced resin material such as a resin, a composite resin material containing an inorganic material such as alumina or poron nitride as a filler in an epoxy resin or the like can be used.
Moreover, it is preferable that the thickness of the insulating support sheet 21 is 10-200 micrometers, More preferably, it is 15-100 micrometers.
Moreover, it is preferable that the diameter of the through-hole 22 of the insulating support sheet 21 is 20-80 micrometers, More preferably, it is 30-60 micrometers.

As the material constituting the movable electrode 25, a metal material having rigidity can be suitably used, and in particular, a material that is less likely to be etched than the thin metal layer formed on the insulating support sheet 21 is used in the manufacturing method described later. It is preferable. Specific examples of such a metal material include simple metals such as nickel, cobalt, gold, and aluminum, or alloys thereof.
The diameter r2 of the body portion 25a in the movable electrode 25 is preferably 18 μm or more, and more preferably 25 μm or more. If this diameter is too small, the required strength of the movable electrode 25 may not be obtained. Further, the difference between the diameter of the through hole 22 of the insulating support sheet 21 and the diameter of the body portion 25a in each of the movable electrodes 25 is preferably 1 μm or more, more preferably 2 μm or more. When this difference is too small, it may be difficult to move the movable electrode 25 with respect to the thickness direction of the insulating support sheet 21.
The diameter of the terminal portion 25 b in the movable electrode 25 is preferably 70 to 150% of the diameter of the relay electrode 15. Further, the difference between the diameter of the terminal portion 25b in the movable electrode 25 and the diameter of the through hole 22 of the insulating support sheet 21 is preferably 5 μm or more, more preferably 10 μm or more. If this difference is too small, the movable electrode 25 may fall off the insulating support sheet 21.
The movable distance of the movable electrode 25 in the thickness direction of the insulating support sheet 21, that is, the difference between the length of the body portion 25 a in the movable electrode 25 and the thickness of the insulating support sheet 21 is preferably 5 to 50 μm. Preferably it is 8-40 micrometers. If these movable distances are too small, it may be difficult to obtain sufficient irregularity absorbing ability. On the other hand, when these movable distances are excessive, the length of the body portion 25a of the movable electrode 25 exposed from the through hole 22 of the insulating support sheet 21 becomes large, and when the movable electrode 25 is used for inspection, the movable electrode There is a possibility that the body portion 25a of the 25 is buckled or damaged.

Said movable electrode sheet 20 can be manufactured as follows, for example.
First, as shown in FIG. 19, a laminate material 20B is prepared in which an easily-etchable metal layer 23A is integrally laminated on one surface of an insulating support sheet 21, and the metal layer 23A in the laminate material 20B is prepared. By performing an etching process and removing a part thereof, as shown in FIG. 20, a plurality of openings 23K are formed in accordance with the pattern of the movable electrode to be formed in the metal layer 23A. Next, as shown in FIG. 21, through holes 22 that extend in the thickness direction are formed in the insulating support sheet 21 in the laminated material 20 </ b> B, each communicating with the opening 23 </ b> K of the metal layer 23 </ b> A. Then, as shown in FIG. 22, an easily etchable cylindrical metal thin layer 23 </ b> B is formed so as to cover the inner wall surface of the through hole 22 of the insulating support sheet 21 and the opening edge of the metal layer 23 </ b> A. Thus, the insulating support sheet 21 formed with a plurality of through holes 22 extending in the thickness direction, respectively, and the through holes 22 of the insulating support sheet 21 laminated on one surface of the insulating support sheet 21. An easily etchable metal layer 23A having a plurality of communicating openings 23K, and an easily etchable metal thin layer 23B formed so as to cover the inner wall surface of the through hole 22 of the insulating support sheet 21 and the opening edge of the metal layer 23A. A composite laminate material 20A is manufactured. In the above, as a method of forming the through hole 22 of the insulating support sheet 21, a laser processing method, a drill processing method, an etching processing method, or the like can be used.
Copper, nickel, or the like can be used as an easily etchable metal material constituting the metal layer 23A and the metal thin layer 23B.
The thickness of the metal layer 23A is set in consideration of the movable distance of the movable electrode 25 to be formed, and is specifically preferably 5 to 50 μm, more preferably 8 to 40 μm.
The thickness of the metal thin layer 23B is set in consideration of the diameter of the through hole 22 of the insulating support sheet 21 and the diameter of the body portion 25a in each of the movable electrodes 25 to be formed.
Further, as a method of forming the metal thin layer 23B, an electroless plating method or the like can be used.

Then, the movable electrode 25 is formed in each of the through holes 22 of the insulating support sheet 21 by subjecting the composite laminated material 20 </ b> A to a photoplating process. Specifically, as shown in FIG. 23, the terminals of the movable electrode 25 to be formed on the surface of the metal layer 23A formed on one surface of the insulating support sheet 21 and the other surface of the insulating support sheet 21, respectively. According to a pattern corresponding to the pattern of the portion 25b, a resist film 24 in which a plurality of pattern holes 24K communicating with the through holes 22 of the insulating support sheet 21 is formed. Next, electrolytic plating is performed using the metal layer 23A as a common electrode to deposit metal on the exposed portion of the metal layer 23A and the surface of the metal thin layer 23B, and in the through holes 22 of the insulating support sheet 21 and the resist film 24. By filling the pattern holes 24K with metal, movable electrodes 25 extending in the thickness direction of the insulating support sheet 21 are formed as shown in FIG.
After the movable electrode 25 is formed in this manner, the resist film 24 is removed from the surface of the metal layer 23A, thereby exposing the metal layer 23A as shown in FIG. Then, the movable electrode sheet 20 is obtained by removing the metal layer 23A from one surface of the insulating support sheet 21 by an etching process.

  According to the electrical resistance measurement connector 1 having the above-described configuration, by having the measurement electrode sheet 10 having the configuration shown in FIG. 9 in which the current supply electrode 13 and the voltage measurement electrode 14 are arranged at an extremely small distance. Since the tolerance of displacement with respect to the electrode to be inspected is large, even if the circuit board to be inspected has a large number of electrodes to be inspected having a large area and a small size, the required electrical Connection can be reliably achieved.

  In the present invention, the circuit board to be inspected whose electrical resistance is to be measured has only one surface-side inspection electrode 6 formed on one surface, as shown in FIG. Even in the circuit board 5 to be inspected having only the wiring pattern 8a formed on the surface, as shown in FIG. 26 (b), the one surface side inspected electrode 6 formed on one surface and the other surface formed on the other surface Even if the circuit board to be inspected has the side inspected electrode 7 and has only the wiring pattern 8b formed between the one side inspected electrode 6 and the other side inspected electrode 7, FIG. As shown in FIG. 1, the wiring pattern 8a and the one surface formed between the one surface side inspected electrodes 6 have the one surface side inspected electrode 6 formed on one surface and the other surface side inspected electrode 7 formed on the other surface. Wiring pattern formed between the side inspection electrode 6 and the other side inspection electrode 7 Both b may be the circuit board to be inspected 5 having.

<Circuit board electrical resistance measurement device>
FIG. 27 is an explanatory diagram showing a configuration of an example of an electrical resistance measurement device for a circuit board according to the present invention. This electrical resistance measuring apparatus is for performing an electrical resistance measurement test of each wiring pattern on a circuit board 5 to be inspected having one surface-side inspected electrode 6 on one surface and the other surface-side inspected electrode 7 on the other surface. In addition, the holder 2 for holding the circuit board 5 to be inspected in the inspection execution area E is provided, and in this holder 2, the circuit board 5 to be inspected is arranged at an appropriate position in the inspection execution area E. A positioning pin 3 is provided.
Above the inspection execution area E, the electrical resistance measuring connector 1 and the upper side inspection head 50a having the configuration shown in FIG. 13 are arranged in this order from the bottom. Further, above the upper side inspection head 50a, the upper side A support plate 56a is disposed, and the upper inspection head 50a is fixed to the upper support plate 56a by a support 54a. On the other hand, below the inspection execution area E, the electrical resistance measurement connector 40 and the lower side inspection head 50b are arranged in this order from the top, and further below the lower side inspection head 50b, there is a lower side support plate 56b. The lower inspection head 50b is fixed to the lower support plate 56b by a column 54b.

The electrical resistance measuring connector 40 is configured by integrally forming an anisotropic conductive elastomer layer 45 on an inspection circuit board 41.
On the surface of the inspection circuit board 41 (the upper surface in FIG. 27), an inspection electrode pair composed of a current supply electrode 42a and a voltage measurement electrode 42b that are arranged apart from each other is provided on the other surface side of the circuit board 5 to be inspected. They are arranged according to a pattern corresponding to the arrangement pattern of the electrodes 7 to be inspected. Terminal electrodes 43 are arranged in accordance with an appropriate pattern on the back surface of the circuit board 41 for inspection, and each of these terminal electrodes 43 is electrically connected to either the current supply electrode 42a or the voltage measurement electrode 42b. It is connected.
The separation distance between the current supply electrode 42a and the voltage measurement electrode 42b in the inspection circuit board 41 is preferably 10 μm or more. When the separation distance is less than 10 μm, the current flowing between the current supply electrode 42a and the voltage measurement electrode 42b through the anisotropic conductive elastomer layer 45 becomes large, so that the electric resistance can be increased with high accuracy. It may be difficult to measure.
On the other hand, the upper limit of the separation distance is determined by the size of each inspection electrode and the dimension and pitch of the related other surface side inspection electrode 7 and is usually 500 μm or less. When this separation distance is excessive, it may be difficult to appropriately dispose both inspection electrodes with respect to one of the other surface side inspection electrodes 7.

The anisotropic conductive elastomer layer 45 includes a plurality of conductive path forming portions 46 arranged according to a pattern corresponding to the pattern of the inspection electrode pair of the inspection circuit board 41, and an insulating portion 47 that insulates them from each other. The conductive path forming portion 46 is disposed so as to be in contact with the entire surfaces of both the current supply electrode 42 a and the voltage measurement electrode 42 b in the test electrode pair of the test circuit board 41.
The conductive path forming portion 46 in the anisotropic conductive elastomer layer 45 is formed by containing conductive particles exhibiting magnetism in an elastic polymer substance so as to be aligned in the thickness direction. On the other hand, the insulating portion 47 is made of an elastic polymer material and contains no or almost no conductive particles.
The conductive path forming portion 46 preferably has a higher conductivity in the thickness direction than a conductivity in a plane direction perpendicular to the thickness direction. Specifically, the electrical resistance value in the thickness direction with respect to the electrical resistance value in the plane direction. It is preferable to have electrical characteristics such that the ratio is 1 or less, particularly 0.5 or less. When this ratio exceeds 1, the current flowing between the current supply electrode 42a and the voltage measurement electrode 42b through the conductive path forming portion 46 becomes large, and therefore the electrical resistance can be measured with high accuracy. It can be difficult.
The elastic polymer substance and conductive particles constituting the anisotropic conductive elastomer layer 45 are the same as those exemplified as the elastic polymer substance and conductive particles constituting the anisotropic conductive elastomer sheet 17 of stage 1. Can be used.
Such an anisotropic conductive elastomer layer 45 can be formed by an appropriate method, for example, a method described in Japanese Patent Application Laid-Open No. 2000-74965.

The upper side inspection head 50a includes a plate-like inspection electrode device 51a and an anisotropic conductive sheet 55a having elasticity that is fixed and arranged on the lower surface of the inspection electrode device 51a. The inspection electrode device 51a has a plurality of electrode pins 52a arranged according to a pattern corresponding to the movable electrode 25 in the electrical resistance measuring connector 1, and each of these electrode pins 52a is connected to the upper support plate by an electric wire 53a. It is electrically connected to a connector 57a provided on 56a, and further electrically connected to an inspection circuit (not shown) of the tester via this connector 57a.
The lower inspection head 50b is composed of a plate-shaped inspection electrode device 51b and an anisotropic conductive sheet 55b having elasticity and fixed to the upper surface of the inspection electrode device 51b. The inspection electrode device 51b has a plurality of electrode pins 52b arranged according to a pattern corresponding to the pattern of the terminal electrodes 43 in the electrical resistance measurement connector 40, and each of these electrode pins 52b is connected to the lower side by an electric wire 53b. It is electrically connected to a connector 57b provided on the support plate 56b, and further electrically connected to an inspection circuit (not shown) of the tester via this connector 57b.

  The anisotropic conductive sheets 55a and 55b in the upper side inspection head 50a and the lower side inspection head 50b are each formed with a conductive path forming portion that forms a conductive path only in the thickness direction. As such anisotropically conductive sheets 55a and 55b, those in which the respective conductive path forming portions are formed so as to protrude in the thickness direction on at least one surface are preferable in terms of exhibiting high electrical contact stability.

In such a circuit board electrical resistance measurement device, the circuit board 5 to be inspected is held in the inspection execution region E by the holder 2, and in this state, each of the upper support plate 56a and the lower support plate 56b is inspected. By moving in the direction approaching the circuit board 5, the circuit board 5 to be inspected is pinched by the electrical resistance measurement connector 1 and the electrical resistance measurement connector 40.
In this state, each of the electrodes 6 to be inspected on one side of the circuit board 5 to be inspected is connected to both the current supply electrode 13 and the voltage measurement electrode 14 in the electrical resistance measurement connector 1, as shown in FIG. Each of the relay electrodes 15 in the electrical resistance measurement connector 1 is electrically connected to the electrode pin 52a of the inspection electrode device 51a through the anisotropic conductive sheet 55a. Connected. On the other hand, the inspected electrode 7 on the other surface side of the circuit board 5 to be inspected is provided on both the current supply electrode 42a and the voltage measuring electrode 42b in the inspection electrode pair of the inspection circuit board 41 of the electrical resistance measurement connector 40. Each of the terminal electrodes 43 of the electrical resistance measuring connector 40 is electrically connected to the electrode pin 52b of the inspection electrode device 51b via the anisotropic conductive sheet 55b. Connected.

  In this way, each of the electrodes 6 and 7 to be inspected of the circuit board 5 to be inspected has the inspection pin 52a of the inspection electrode device 51a in the upper inspection head 50a and the inspection pin 52b of the inspection electrode device 51b in the lower inspection head 50b. Are electrically connected to the test circuit of the tester. This state is a measurable state. In this measurable state, the current supply electrode 13 in the electrical resistance measurement connector 1 disposed on one surface side of the circuit board 5 to be inspected and the electrical resistance measurement disposed on the other surface side of the circuit board 5 to be tested. A constant current is supplied between the current supply electrode 42a of the connector 40 and the voltage measurement electrode 14 out of the voltage measurement electrodes 14 electrically connected to the inspected electrode 6 on one side. , And is electrically connected to the designated voltage measuring electrode 14 and the other surface side inspected electrode 7 corresponding to the one surface side inspected electrode 6 electrically connected to the voltage measuring electrode 14. The voltage between the measured voltage electrode 42b is measured, and based on the obtained voltage value, the one-surface-side inspected electrode 6 electrically connected to the designated voltage measuring electrode 14 and corresponding to this The other side inspected Electric resistance of the wiring patterns formed between the 7 is obtained. Then, the electrical resistances of all the wiring patterns are measured by sequentially changing the designated voltage measuring electrode 14.

  According to the circuit board electrical resistance test apparatus described above, since the electrical resistance measurement connector 1 having the configuration shown in FIG. 13 is provided, the circuit board 5 to be tested has a large area and a small number of one-side test electrodes 6 having a small size. Even if it has, the electrical connection with respect to the one surface side to-be-inspected electrode 6 can be achieved reliably, and the electrical resistance about the to-be-inspected circuit board 5 can be measured with high accuracy.

It is sectional drawing for description which shows the structure in an example of the electrode sheet for an electrical resistance measurement which concerns on this invention. It is a top view which expands and shows the principal part of the electrode sheet for an electrical resistance measurement shown in FIG. It is sectional drawing for description which expands and shows the structure of the principal part of the electrode sheet for electrical resistance measurement shown in FIG. It is sectional drawing for description which shows the laminated material for obtaining the electrode sheet for an electrical resistance measurement. It is sectional drawing for description which shows the state by which the through-hole was formed in the laminated material. It is sectional drawing for description which shows the state by which the relay electrode and the short circuit part were formed in the insulating sheet in a laminated material. It is sectional drawing for description which shows the state by which the test electrode pair formation pad and the wiring part were formed in the insulating sheet in a laminated material. It is a top view which shows the state by which the test electrode pair formation pad and wiring part were formed in the insulating sheet in a laminated material. It is sectional drawing for description which shows the structure of the principal part in the other example of the electrode sheet for electrical resistance measurement which concerns on this invention. It is sectional drawing for description which expands and shows the principal part of an anisotropic conductive elastomer layer. It is sectional drawing for description which shows the state in which the material layer for conductive elastomers was formed on the surface of the insulating sheet. It is sectional drawing for description which shows the state in which the anisotropic conductive elastomer layer was formed in the surface of an insulating sheet. It is sectional drawing for description which shows the structure in an example of the connector for an electrical resistance measurement which concerns on this invention. It is sectional drawing for description which expands and shows the principal part of an anisotropically conductive elastomer sheet. It is sectional drawing for description which shows the 1st surface side molded member, the other surface side molded member, and spacer for manufacturing an anisotropically conductive elastomer sheet. It is sectional drawing for description which shows the state by which the material for conductive elastomer was apply | coated to the surface of the other surface side molded member. It is sectional drawing for description which shows the state in which the conductive elastomer material layer was formed between the one surface side molded member and the other surface side molded member. It is sectional drawing for description which expands and shows the principal part of a movable electrode sheet. It is sectional drawing for description which shows the structure of the laminated material for manufacturing a movable electrode sheet. It is sectional drawing for description which shows the state by which the opening was formed in the metal layer in a laminated material. It is sectional drawing for description which shows the state by which the through-hole was formed in the insulating support sheet in a laminated material. It is sectional drawing for description which shows the structure of a composite laminated material. It is sectional drawing for description which shows the state by which the resist film was formed in the composite laminated material. It is sectional drawing for description which shows the state by which the movable electrode was formed in the through-hole of the insulating support sheet in a composite laminated material. It is sectional drawing for description which shows the state from which the resist film was removed from the composite laminated material. It is explanatory sectional drawing which shows the structure of a to-be-inspected circuit board. It is explanatory drawing which shows the structure in an example of the electrical resistance measuring apparatus of the circuit board concerning this invention with a to-be-tested circuit board. FIG. 28 is an explanatory cross-sectional view showing a state in which an electrode to be inspected on one surface side of the circuit board to be inspected is electrically connected to an electrode pin of the inspection electrode device in the circuit board electrical resistance measuring apparatus shown in FIG. 27. It is a schematic diagram of the apparatus which measures the electrical resistance between the electrodes in a circuit board with the probe for electric current supply, and the probe for voltage measurement. In the conventional electrical resistance measuring device of a circuit board, it is explanatory drawing which shows the state by which the electrode for electric current supply and the electrode for a voltage measurement are arrange | positioned appropriately on to-be-inspected electrode. FIG. 10 is an explanatory diagram showing a state in which a current supply electrode and a voltage measurement electrode are arranged in a misaligned state on an electrode to be inspected in a conventional circuit board electrical resistance measurement device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Connector for electrical resistance measurement 2 Holder 3 Positioning pin 5 Circuit board to be inspected 6 One surface side inspected electrode 7 Other side inspected electrode 8a, 8b Wiring pattern 10 Electrical resistance measuring electrode sheet 10A Laminated material 10H Through hole 11 Insulation Sheet 11S Slit 12 Inspection electrode pair 12A Inspection electrode pair forming pad 13 Current supply electrode 14 Voltage measurement electrode 15 Relay electrode 16 Short-circuit portion 17 Wiring portion 17A Metal layer 18 Anisotropic conductive elastomer layer 18S Slit 18A Anisotropic conductivity Material layer for elastomer 19 Anisotropic conductive elastomer sheet 19A Material layer for conductive elastomer 19B Material for conductive elastomer 20 Movable electrode sheet 20A Composite laminated material 20B Laminated material 21 Insulating support sheet 22 Through hole 23A Metal layer 23B Metal thin layer 23K Opening 24 Resist film 24K Turn hole 25 Movable electrode 25a Body portion 25b Terminal portion 30 One side molding member 31 Other side molding member 32 Spacer 32K Opening 33 Pressure roll 34 Support roll 35 Pressure roll device 40 Electrical resistance measuring connector 41 Inspection circuit board 42a Current supply electrode 42b Voltage measurement electrode 43 Terminal electrode 45 Anisotropic conductive elastomer layer 46 Conductive path forming portion 47 Insulating portion 50a Upper side inspection head 50b Lower side inspection head 51a, 51b Inspection electrode devices 52a, 52b Electrode pins 53a, 53b Electric wires 54a, 54b Struts 55a, 55b Anisotropic conductive sheet 56a Upper support plate 56b Lower support plates 57a, 57b Connector 90 Circuit board 91, 92 Test electrode 93 Power supply device 94 Electric signal processing device P Conductivity Particle PA, PD Current supply probe PB, PC Electric Measuring probe A current supply electrode V for voltage measurement electrode T to be inspected electrode

Claims (5)

An insulating sheet and a current measuring electrode and a voltage measuring electrode formed on the surface of the insulating sheet corresponding to the electrode to be inspected on the circuit board whose electrical resistance is to be measured are arranged separately from each other. A plurality of inspection electrode pairs, and a relay electrode formed on the back surface of the insulating sheet and electrically connected to one of the current supply electrode and the voltage measurement electrode in the inspection electrode pair. And
The electrode sheet for measuring electrical resistance, wherein the insulating sheet is formed with a slit in a region located between the current supply electrode and the voltage measurement electrode in each of the inspection electrode pairs.   2. The electrode sheet for measuring electrical resistance according to claim 1, wherein an anisotropic conductive elastomer layer having conductivity in the thickness direction is integrally formed on the surface of the insulating sheet. A method for producing the electrode sheet for measuring electrical resistance according to claim 1,
On the surface of the insulating sheet, a plurality of test electrode pair forming pads are formed according to a pattern corresponding to the electrode to be inspected on the circuit board whose electrical resistance is to be measured,
By performing laser processing on the insulating sheet on which the test electrode pair forming pads are formed, the test electrode pair forming pads are cut in two to form current supply electrodes and voltage measurement electrodes. And forming a slit in a region located between the current supply electrode and the voltage measurement electrode in the insulating sheet. The electrode sheet for electrical resistance measurement according to claim 1 or 2,
According to the pattern corresponding to the relay electrode of the electrode sheet for electrical resistance measurement, disposed on the back surface of the anisotropic conductive elastomer sheet, and the anisotropic conductive elastomer sheet disposed on the back surface of the electrode sheet for electrical resistance measurement Insulating support sheet in which a plurality of through-holes each extending in the thickness direction are formed, and a movable electrode sheet having a plurality of movable electrodes provided in each of the through-holes of the insulating support sheet so as to be movable in the thickness direction A connector for measuring electrical resistance, characterized by comprising: A circuit board electrical resistance measuring device for measuring electrical resistance of a circuit board having electrodes on at least one surface,
5. A circuit board electrical resistance measuring device comprising the electrical resistance measuring connector according to claim 4, which is disposed on one surface side of a circuit board to be inspected for measuring electrical resistance.

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