JP4380373B2 - Electrical resistance measurement connector, electrical resistance measurement connector device and manufacturing method thereof, and circuit board electrical resistance measurement device and measurement method - Google Patents

Description

  The present invention relates to an electrical resistance measurement connector, an electrical resistance measurement connector device and a method for manufacturing the same, a circuit board electrical resistance measurement device, and a circuit device electrical resistance measurement method.

In recent years, in response to a demand for high-speed signal transmission in electronic components and electronic devices incorporating them, circuit boards constituting LSI packages such as BGA and CSP, and circuit boards on which these semiconductor devices are mounted, There is a demand for wiring having low electrical resistance. Therefore, in such an electrical inspection of a circuit board, it is extremely important to measure the electrical resistance of the wiring between the electrodes with high accuracy.
Conventionally, in the measurement of the electrical resistance of a circuit board, for example, as shown in FIG. 37, current is supplied to each of two inspected electrodes 91 and 92 electrically connected to each other of the inspected circuit board 90. The probes PA and PD and the voltage measurement probes PB and PC are pressed and brought into contact with each other. In this state, current is supplied from the power supply device 93 between the current supply probes PA and PD. At this time, the voltage measurement probe PB is supplied. A four-terminal method is employed in which the voltage signal detected by the PC is processed in the electric signal processing device 94 to obtain the magnitude of the electric resistance between the electrodes 91 and 92 to be inspected.

  However, in the above method, it is necessary to bring the current supply probes PA and PD and the voltage measurement probes PB and PC into contact with the electrodes 91 and 92 to be inspected with a considerably large pressing force. Since the probe is made of metal and has a pointed tip, the surface of the electrodes 91 and 92 to be inspected is damaged when the probe is pressed, and the circuit board cannot be used. It will become something. Under such circumstances, the measurement of electrical resistance cannot be performed on all circuit boards that are products, and it must be a so-called sampling inspection. Therefore, the yield of products cannot be increased after all.

In order to solve such problems, conventionally, an electrical resistance measuring device in which a connecting member that contacts an electrode to be inspected is made of a conductive elastomer has been proposed. Specifically, (i) a conductive material is made of an elastomer. An electrical resistance measuring device (see Patent Document 1), in which an elastic connecting member made of conductive rubber having particles bound thereto is arranged separately for a current supply electrode and a voltage measuring electrode; An electrical resistance measuring device having a common elastic connecting member made of anisotropic conductive elastomer, which is provided in contact with both surfaces of a current supply electrode and a voltage measurement electrode electrically connected to the inspection electrode (patent) (Iii), (iii) an inspection circuit board having a plurality of inspection electrodes formed on the surface, and an elastic connection member made of a conductive elastomer provided on the surface of the inspection circuit board. In a state where the electrode to be inspected is electrically connected to the plurality of inspection electrodes via the connection member, two of the inspection electrodes are selected, one of which is used as a current supply electrode, and the other is used for voltage measurement. As an electrode, an electrical resistance measuring device (see Patent Document 3) that measures electrical resistance is known.
According to such an electrical resistance measurement device, the current supply electrode and the voltage measurement electrode are brought into contact with the electrode to be inspected of the circuit board to be inspected via the elastic connection member, thereby making electrical connection. Thus, the electrical resistance can be measured without damaging the electrode to be inspected.

However, when measuring the electrical resistance between the electrodes by the electrical resistance measuring device having the configuration of (i) and (ii), there are the following problems.
In recent years, in a circuit board, in order to obtain a high degree of integration, the size and pitch of electrodes or the distance between electrodes tend to be small. Thus, in the electrical resistance measuring apparatus having the configurations of (i) and (ii), a current is supplied to each of the electrodes to be inspected on the circuit board to be inspected whose electrical resistance is to be measured via the elastic connection member. Both the electrode for voltage and the electrode for voltage measurement need to be electrically connected simultaneously. Therefore, in the electrical resistance measuring device for measuring the electrical resistance of the circuit board to be inspected in which the small size inspected electrodes are arranged at high density, Forming a current supply electrode and a voltage measurement electrode in a state of being separated from each other in a region having an area equal to or smaller than the region occupied by the electrode to be inspected, that is, supplying a current having a smaller size than the electrode to be inspected It is necessary to form the working electrode and the voltage measuring electrode in a state of being separated by a very small distance.
In addition, as a method for manufacturing a circuit board, in order to improve productivity, a circuit board connected body in which a plurality of circuit boards are connected with one board material is manufactured, and in that state, the circuit board connected body A method of manufacturing a plurality of separated circuit boards by collectively performing electrical inspection on each circuit board and then cutting the circuit board connector is adopted.

However, the circuit board assembly to be inspected has a considerably large area and the number of electrodes to be inspected is extremely large. In particular, when manufacturing a multilayer circuit board, the number of steps in the manufacturing process is large. In many cases, the thermal history due to the heat treatment is frequently received, and thus the electrode to be inspected is often formed in a state of being displaced from the intended arrangement position. As described above, the circuit board to be inspected having a large area, a large number of electrodes to be inspected, and the electrodes to be inspected formed in a state shifted from the intended arrangement position is the above (i) and (ii) When measuring the electrical resistance with the electrical resistance measuring device having the configuration of), it is extremely difficult to electrically connect both the current supply electrode and the voltage measurement electrode to each of the electrodes to be inspected simultaneously. .
To explain with a specific example, as shown in FIG. 38, when measuring the electrical resistance of the electrode T to be inspected having a diameter L of 300 μm, the current electrically connected to the electrode T to be inspected The separation distance D between the supply electrode A and the voltage measurement electrode V is about 150 μm. However, as shown in FIGS. 39A and 39B, in the alignment of the circuit board to be inspected, the current supply electrode A and When the position of the electrode T to be inspected with respect to the voltage measuring electrode V deviates by 75 μm from the intended position shown in FIG. 38 in the direction in which the current supply electrode A and the voltage measuring electrode V are aligned (left and right in the figure), The electrical connection between one of the supply electrode A and the voltage measurement electrode V and the electrode T to be inspected is not achieved, and the required electrical resistance measurement cannot be performed.

On the other hand, according to the electrical resistance measuring apparatus of (iii) above, it is not necessary to form a current supply electrode and a voltage measurement electrode corresponding to each of the electrodes to be inspected. Even if the circuit board to be inspected has a large area, a large number of electrodes to be inspected, and a small size of the electrodes to be inspected arranged at high density, tolerance of displacement with respect to the electrodes to be inspected is allowed. The electrical resistance measuring device is easy to manufacture.
However, since such an electric resistance measuring device is a measuring device based on the pseudo four-terminal method, it has a large measurement error range. Therefore, the measurement of the electric resistance of a circuit board having a low electric resistance between the electrodes is performed. Is difficult to perform with high accuracy.

JP-A-9-26446 JP 2000-74965 A JP 2000-241485 A

The present invention has been made on the basis of the above circumstances, and a first object thereof is to provide a large number of small electrodes to be inspected with a large circuit board to be inspected for measuring electric resistance. Even if it has, it is possible to reliably achieve the required electrical connection to the circuit board to be inspected, and furthermore, the electrical resistance measurement that can reliably perform the intended electrical resistance measurement with high accuracy Is to provide a connector.
The second object of the present invention is to provide the required electric power to the circuit board to be inspected even if the circuit board to be inspected has a large number of electrodes to be inspected having a large area and a small size. Connection can be achieved reliably, and the expected electrical resistance can be measured with high accuracy and with good electrical resistance against environmental changes such as thermal history due to temperature changes. It is an object of the present invention to provide an electrical resistance measurement connector device in which the electrical connection is stably maintained.
A third object of the present invention is to provide a method by which the above-described electrical resistance measuring connector device can be advantageously manufactured.
A fourth object of the present invention is to provide required electric power to a circuit board to be inspected even if the circuit board to be inspected has a large number of electrodes to be inspected having a large area and a small size. Another object of the present invention is to provide a circuit board electrical resistance measurement apparatus that can reliably achieve a desired connection and that can reliably perform intended electrical resistance measurement with high accuracy.
A fifth object of the present invention is to provide required electric power for a circuit board to be inspected even when the circuit board to be inspected has a large number of electrodes to be inspected having a large area and a small size. Another object of the present invention is to provide a circuit board electrical resistance measurement method capable of reliably achieving a desired connection and capable of reliably performing a desired electrical resistance measurement with high accuracy.

The electrical resistance measurement connector of the present invention includes an insulating substrate and a plurality of electrodes arranged on the surface of the insulating substrate according to a pattern corresponding to a pattern of a plurality of electrodes to be inspected on a circuit board to be inspected. A connection electrode set,
Each of the connection electrode sets is characterized in that three electrodes, ie, a voltage measurement electrode, a current supply electrode, and a voltage measurement electrode, are arranged apart from each other so as to be arranged in this order.

The electrical resistance measuring connector of the present invention is arranged in accordance with a pattern corresponding to a pattern of a plurality of electrodes to be inspected on an insulating substrate and a circuit board to be inspected whose electrical resistance is to be measured on the surface of the insulating substrate. Comprising a plurality of connection electrode sets,
Each of the connection electrode sets is characterized in that three electrodes of a current supply electrode, a voltage measurement electrode, and a current supply electrode are arranged so as to be spaced apart from each other in this order.

  In the electrical resistance measurement connector having the connection electrode set in which the above three electrodes are arranged, each of the current supply electrode and the voltage measurement electrode in the connection electrode set is in the direction in which these electrodes are arranged. It is preferable to have a long shape in a perpendicular direction.

In the electrical resistance measurement connector of the present invention, it is preferable that a plurality of relay electrodes electrically connected to either the current supply electrode or the voltage measurement electrode are disposed on the back surface of the insulating substrate. .
Such an electrical resistance measurement connector preferably has a relay electrode electrically connected to the plurality of current supply electrodes.

  An electrical resistance measurement connector device according to the present invention comprises the electrical resistance measurement connector having the above-described configuration, and an anisotropic conductive elastomer layer integrally laminated on the surface of the electrical resistance measurement connector. Features.

In the electrical resistance measurement connector device according to the present invention, the anisotropic conductive elastomer layer is disposed on the surface of each of the current supply electrode and the voltage measurement electrode, and a plurality of conductive path forming portions extending in the thickness direction. And an insulating part that insulates these conductive path forming parts from each other.
The conductive path forming part is preferably contained in a state where conductive particles exhibiting magnetism are aligned in the thickness direction.

A method of manufacturing an electrical resistance measurement connector device according to the present invention is a method of manufacturing an electrical resistance measurement connector device having the above-described configuration,
An elastomer material layer is formed on the surface of the electrical resistance measurement connector by forming a liquid polymer substance-forming material that is cured to become an elastic polymer substance and containing conductive particles exhibiting magnetism. For the elastomer layer, a magnetic field having a strength greater than that of the other portion is applied in the thickness direction at the portion located on the surface of the region where the electrode set for connecting the electrical resistance measurement connector is formed. The material layer is cured so that the conductive particles exhibiting magnetism are aligned in the thickness direction on the surface of the electrical resistance measurement connector on the surface of the region where the connection electrode set is formed. Forming an elastomer layer contained in the state,
In the part containing the conductive particles in the elastomer layer, a part located on the surface of the region between the electrodes in the connection electrode set is removed to form a hole, and then the hole is cured to the hole. And filling a liquid polymer substance-forming material to be an elastic polymer substance and curing the polymer substance-forming material.

The circuit board electrical resistance measuring device of the present invention is an electrical resistance measuring device for a circuit board for measuring electrical resistance of a circuit board having electrodes on at least one surface,
An electrical resistance measurement connector having the above-described configuration is provided on one surface side of a circuit board to be inspected for measuring electrical resistance.

The circuit board electrical resistance measuring device of the present invention is an electrical resistance measuring device for a circuit board for measuring electrical resistance of a circuit board having electrodes on at least one surface,
An electrical resistance measurement connector having a relay electrode on the back surface, disposed on one surface side of the circuit board to be inspected for electrical resistance measurement,
For inspection on one side, which has an inspection electrode disposed on the back surface of the electrical resistance measurement connector via an anisotropic conductive sheet and disposed on the surface according to a pattern corresponding to the pattern of the relay electrode in the electrical resistance measurement connector And a circuit board.

In the circuit board electrical resistance measuring apparatus described above, when the circuit board to be inspected to be measured has electrodes on both sides, the circuit board is disposed on the other side of the circuit board to be measured for electrical resistance. A circuit board for inspection on the other side,
The other surface side inspection circuit boards are arranged on the same surface on the same other surface side inspected electrodes, which are arranged to be spaced apart from each other corresponding to the other surface side inspected electrodes of the circuit board to be inspected. An electrically connected test electrode for current supply and a test electrode for voltage measurement may be formed.

The circuit board electrical resistance measuring device of the present invention is an electrical resistance measuring device for a circuit board for measuring electrical resistance of a circuit board having electrodes on both sides,
An electrical resistance measurement connector having the above-described configuration, which is disposed on one surface side of a circuit board to be inspected for measuring electrical resistance,
The electrical resistance measurement connector having the above-described configuration is provided on the other surface side of the circuit board to be inspected.

The circuit board electrical resistance measuring device of the present invention is an electrical resistance measuring device for a circuit board for measuring electrical resistance of a circuit board having electrodes on both sides,
An electrical resistance measurement connector having the above-described configuration, which is disposed on one surface side of a circuit board to be inspected for measuring electrical resistance,
For inspection on one surface side, which has an inspection electrode arranged on the back surface of the electrical resistance measurement connector via an anisotropic conductive sheet and arranged on the front surface according to a pattern corresponding to the pattern of the relay electrode in the electrical resistance measurement connector A circuit board;
An electrical resistance measurement connector having the above-described configuration, disposed on the other surface side of the circuit board to be inspected,
The other side inspection having the inspection electrode arranged on the front surface according to the pattern corresponding to the pattern of the relay electrode in the electric resistance measurement connector arranged on the back surface of the electric resistance measurement connector via an anisotropic conductive sheet And a circuit board for use.

In the method for measuring electrical resistance of a circuit board according to the present invention, the electrical resistance measuring connector is disposed on one surface of a circuit board to be measured whose electrical resistance is to be measured.
At least one current supply electrode and at least one voltage measurement electrode in the connection electrode set of the electrical resistance measurement connector are simultaneously electrically connected to each of the electrodes to be inspected on one side of the circuit board to be inspected. The measurement state,
In this measurement state, a current is supplied to the circuit board to be inspected via a current supply electrode in the electrical resistance measurement connector, and one of the voltage measurement electrodes electrically connected to the one surface side inspected electrode. One voltage measuring electrode is designated, and the electrical resistance of the one-surface-side inspected electrode electrically connected to the designated one voltage measuring electrode is measured.

According to the electrical resistance measurement connector of the present invention, the three electrodes of the voltage measurement electrode, the current supply electrode, and the voltage measurement electrode in the connection electrode set are arranged in this order, or By arranging the three electrodes of the supply electrode, the voltage measurement electrode, and the current supply electrode in this order, the inspected electrode is displaced in the direction in which the electrodes in the connection electrode set are aligned. Even if it exists, the said to-be-inspected electrode will be electrically connected simultaneously to both at least 1 electrode for current supply and at least 1 electrode for voltage measurement. Further, in such a configuration, each of the current supply electrode and the voltage measurement electrode is elongated in a direction perpendicular to the direction in which these electrodes are arranged, so that the electrode to be inspected is connected. Even when the electrodes in the electrode set are displaced in a direction perpendicular to the direction in which the electrodes are arranged, the electrode to be inspected is electrically connected to both the current supply electrode and the voltage measurement electrode simultaneously. Become.
Therefore, according to the electrical resistance measurement connector of the present invention, even if the circuit board to be inspected to measure the electrical resistance has a large area and a large number of small electrodes to be inspected, The required electrical connection to the substrate can be reliably achieved, and the intended electrical resistance can be reliably measured with high accuracy.

According to the electrical resistance measurement connector device of the present invention, since the electrical resistance measurement connector is provided, the circuit board to be inspected for measuring electrical resistance has a large area and a large number of small electrodes to be inspected. Even if it is, the required electrical connection to the circuit board to be inspected can be reliably achieved, and the intended electrical resistance can be reliably measured with high accuracy. Good electrical connection can be stably maintained against environmental changes such as heat history.
According to the method for manufacturing the electrical resistance measuring connector device of the present invention, the electrical resistance measuring connector device can be advantageously manufactured.
According to the electrical resistance measuring apparatus for a circuit device of the present invention, since the electrical resistance measuring connector is provided, the circuit board to be inspected for measuring electrical resistance has a large area and a large number of small electrodes to be inspected. Even if it has, the required electrical connection to the circuit board to be inspected can be reliably achieved, and the intended electrical resistance can be reliably measured with high accuracy.
According to the electrical resistance measurement method for a circuit device of the present invention, since the electrical resistance measurement connector is used, a circuit board to be inspected for measuring electrical resistance has a large area and a large number of small electrodes to be inspected. Even if it has, the required electrical connection to the circuit board to be inspected can be reliably achieved, and the intended electrical resistance can be reliably measured with high accuracy.

Hereinafter, embodiments of the present invention will be described in detail.
<Electrical resistance measurement connector>
FIG. 1 is a plan view showing a first example of an electrical resistance measurement connector according to the present invention, and FIG. 2 is an explanatory sectional view showing the configuration of the electrical resistance measurement connector of the first example.
The electrical resistance measuring connector 10 of the first example has an insulating substrate 11, and a plurality of connection electrode sets 12 are provided on the surface of the insulating substrate 11 of a circuit board whose electrical resistance is to be measured. It arrange | positions according to the pattern corresponding to the pattern of the one surface side to-be-tested electrode 2 (it shows with a dashed-dotted line) formed in one surface. As shown in FIG. 1, each of the connection electrode sets 12 includes a total of four electrodes, ie, two rectangular current supply electrodes 13 and two rectangular voltage measurement electrodes 14, and these four electrodes are Each of the current supply electrodes 13 is positioned at a diagonal vertex position in the rectangle, and each of the voltage measurement electrodes 14 is positioned at another diagonal position in the rectangle. They are spaced apart from each other.
Further, as shown in FIG. 2, a plurality of relay electrodes 15 are arranged on the back surface of the insulating substrate 11 according to an appropriate pattern. Each of the relay electrodes 15 has a wiring formed on the insulating substrate 11. Either one of the current supply electrode 13 and the voltage measurement electrode 14 is electrically connected by the unit 16.

As a material constituting the insulating substrate 11, polyimide resin, glass fiber reinforced polyimide resin, glass fiber reinforced epoxy resin, glass fiber reinforced bismaleimide triazine resin, or the like can be used. The insulating substrate 11 may have a single layer structure or a multilayer structure.
The thickness of the insulating substrate 11 is preferably, for example, 50 to 1000 μm, and more preferably 100 to 500 μm.

As a material constituting the current supply electrode 13, the voltage measurement electrode 14, the relay electrode 15, and the wiring portion 16, copper, nickel, gold, or a laminate of these metals can be used.
Further, the current supply electrode 13, the voltage measurement electrode 14, the relay electrode 15 and the wiring portion 16 can be formed by a method generally used for manufacturing a printed wiring board.

  The separation distance between the current supply electrode 13 and the voltage measurement electrode 14 in the connection electrode set 12 is preferably 20 to 100 μm, more preferably 30 to 80 μm. If the separation distance is too small, it may be difficult to ensure the necessary insulation between the current supply electrode 13 and the voltage measurement electrode 14, and the electrical resistance measurement connector 10 may be difficult to manufacture. On the other hand, when the separation distance is excessive, the tolerance of displacement with respect to the electrode to be inspected is reduced, and both the current supply electrode 13 and the voltage measuring electrode 14 are reliably electrically connected to the electrode to be inspected. May be difficult to do.

In the electrical resistance measurement connector 10, as shown in FIG. 3, the electrical resistance measurement connector 10 is disposed on one surface of the circuit board 1 to be measured, for example, via an anisotropic conductive sheet 5. Each of the connection electrode sets 12 is arranged on each one-surface-side inspected electrode 2 of the circuit board 1 to be inspected, and is pressed by an appropriate means, whereby one surface-side inspecting of the circuit board 10 to be inspected is performed. The electrode 2 is electrically connected to the electrode in the connection electrode set 12 in the electrical resistance measurement connector 10 via the anisotropic conductive sheet 5.
In such a state, a constant current is supplied between the electrodes to be inspected of the circuit board 1 to be inspected via the current supply electrodes 13 and is electrically connected to the electrode 2 to be inspected in the circuit board 10 to be inspected. One voltage measurement electrode 14 is designated out of the measured voltage measurement electrodes 14, and the electrical resistance of the one-surface-side inspected electrode 2 electrically connected to the designated voltage measurement electrode 14 is measured. . Then, by sequentially changing the voltage measuring electrode 14 to be designated, the electrical resistance of all the one-surface-side inspected electrodes 2 is measured.

According to the electrical resistance measurement connector 10 of the first example, each connection electrode set 12 has two current supply electrodes 13 positioned at the apex positions of the rectangles opposite to each other and two voltages. Since the measurement electrode 14 is positioned at another vertex position opposite to each other in the rectangle, the one-surface-side inspected electrode 2 is displaced in the side direction (the horizontal direction and the vertical direction in FIG. 1) in the rectangle. Even in this case, the one-surface-side inspected electrode 2 is electrically connected to both at least one current supply electrode 13 and at least one voltage measurement electrode 14 at the same time.
Explaining with a specific example, as shown in FIG. 4 (a), the center position of the one-surface-side inspected electrode 2 is shifted to the right in the drawing from the center position of the connection electrode set 12. In this case, both the current supply electrode 13 and the voltage measurement electrode 14 positioned on the right side in the drawing are electrically connected simultaneously.
Further, as shown in FIG. 4B, when the center position of the one-surface-side inspected electrode 2 is shifted to the left in the figure from the center position of the connection electrode set 12, the left side in the figure respectively. Are simultaneously electrically connected to both the current supply electrode 13 and the voltage measurement electrode 14.
Further, as shown in FIG. 4 (c), when the center position of the one-surface-side inspected electrode 2 is shifted upward in the figure from the center position of the connection electrode set 12, the upper side in the figure respectively. Both the current supply electrode 13 and the voltage measurement electrode 14 are electrically connected simultaneously.
Further, as shown in FIG. 4 (d), when the center position of the one-surface-side inspected electrode 2 is shifted downward in the figure from the center position of the connection electrode set 12, the lower side in the figure respectively. Are simultaneously electrically connected to both the current supply electrode 13 and the voltage measurement electrode 14.

  Therefore, according to the electrical resistance measuring connector 10 of the first example, since the tolerance for displacement with respect to the one-surface-side inspected electrode 2 is large in the electrical connection work with the inspected circuit board 1, Even if 1 has a large number of single-surface-side electrodes 2 to be inspected 2 having a large area, the electrical connection of both the current supply electrode 13 and the voltage measuring electrode 14 to the single-surface-side electrode 2 is ensured. Can be achieved. Moreover, since the current supply electrode 13 and the voltage measurement electrode 14 are electrically insulated from each other, the electrical resistance of the circuit board 1 to be inspected can be measured with high accuracy.

  In the present invention, the circuit board to be inspected 1 whose electrical resistance is to be measured has only one surface side inspected electrode 2 formed on one surface as shown in FIG. 2 having only the circuit 4a formed between the two electrodes, as shown in FIG. 5 (b), having the one-surface-side inspected electrode 2 formed on one surface and the other-surface-side inspected electrode 3 formed on the other surface. And having only the circuit 4b formed between the one-surface-side inspected electrode 2 and the other-surface-side inspected electrode 3, as shown in FIG. 5 (c), the one-surface-side inspected electrode formed on one surface 2 and the other surface side inspected electrode 3 formed on the other surface, the circuit 4a formed between the one surface side inspected electrode 2, and between the one surface side inspected electrode 2 and the other surface side inspected electrode 3 Any of those having both of the circuits 4b formed in the above may be used.

FIG. 6 is a plan view showing a second example of the electrical resistance measurement connector according to the present invention, and FIG. 7 is an explanatory sectional view showing the configuration of the electrical resistance measurement connector of the second example.
In the electrical resistance measuring connector 10 of the second example, a plurality of connection electrode sets 12 are formed on the surface of the insulating substrate 11 on one side of the circuit board on which electrical resistance is to be measured. It arrange | positions according to the pattern corresponding to the pattern of the test | inspection electrode 2 (it shows with a dashed-dotted line). As shown in FIG. 6, each of the connection electrode sets 12 includes a total of three electrodes, one rectangular current supply electrode 13 and two rectangular voltage measurement electrodes 14, and these three electrodes are The electrode 14 for voltage measurement, the electrode 13 for current supply, and the electrode 14 for voltage measurement are arranged so as to be spaced apart from each other.
Further, as shown in FIG. 7, a plurality of relay electrodes 15 are arranged on the back surface of the insulating substrate 11 in accordance with an appropriate pattern, and each of the relay electrodes 15 has a wiring formed on the insulating substrate 11. Either one of the current supply electrode 13 and the voltage measurement electrode 14 is electrically connected by the unit 16.
In the above, the material of the insulating substrate 11 and the material of each electrode in the connection electrode set 12 are the same as those of the electrical resistance measurement connector of the first example described above.

According to the electrical resistance measurement connector 10 of the second example, the connection electrode set 12 includes three electrodes, a voltage measurement electrode 14, a current supply electrode 13, and a voltage measurement electrode 14, arranged in this order. Therefore, even if the one-surface-side inspected electrode 2 is displaced in the direction in which the electrodes in the connection electrode set 12 are aligned (left-right direction in FIG. 6), the one-surface-side inspected electrode 2 is electrically connected to both the current supply electrode 13 and the at least one voltage measurement electrode 14 simultaneously.
Specifically, as shown in FIG. 8 (a), when the center position of the one-surface-side inspected electrode 2 is shifted to the right in the drawing from the center position of the connection electrode set 12, Both the current supply electrode 13 located in the center and the voltage measurement electrode 14 located on the right side in the figure are electrically connected simultaneously.
Further, as shown in FIG. 8 (b), when the center position of the one-surface-side inspected electrode 2 is shifted to the left in the drawing from the center position of the connection electrode set 12, it is positioned at the center. The current supply electrode 13 and the voltage measurement electrode 14 positioned on the left side in the figure are both electrically connected simultaneously.
In addition, each of the current supply electrode 13 and the voltage measurement electrode 14 has a rectangular shape that is long in a direction perpendicular to the direction in which they are arranged. Even when the position of the electrodes in the connection electrode set 12 is shifted from the center position of the connection electrode set 12 in a direction (vertical direction in FIG. 6) perpendicular to the direction in which the electrodes are arranged, The current supply electrode 13 and the voltage measurement electrode 14 are both electrically connected at the same time.

  Therefore, according to the electrical resistance measuring connector 10 of the second example, since the tolerance for displacement with respect to the one-surface-side inspected electrode 2 is large in the electrical connection work with the inspected circuit board 1, the circuit board to be inspected. Even if 1 has a large number of single-surface-side electrodes 2 to be inspected 2 having a large area, the electrical connection of both the current supply electrode 13 and the voltage measuring electrode 14 to the single-surface-side electrode 2 is ensured. Can be achieved. Moreover, since the current supply electrode 13 and the voltage measurement electrode 14 are electrically insulated from each other, the electrical resistance of the circuit board 1 to be inspected can be measured with high accuracy.

FIG. 9 is a plan view showing a third example of the electrical resistance measurement connector according to the present invention, and FIG. 10 is an explanatory sectional view showing the configuration of the electrical resistance measurement connector of the third example.
In the electrical resistance measurement connector 10 of the third example, a plurality of connection electrode sets 12 are formed on the surface of the insulating substrate 11 on one side of the circuit board on which electrical resistance is to be measured. It arrange | positions according to the pattern corresponding to the pattern of the test | inspection electrode 2 (it shows with a dashed-dotted line). As shown in FIG. 9, each of the connection electrode sets 12 includes a total of three electrodes, that is, two rectangular current supply electrodes 13 and one rectangular voltage measurement electrode 14, and these three electrodes are The current supply electrode 13, the voltage measurement electrode 14, and the current supply electrode 13 are arranged apart from each other so as to be arranged in this order.
Further, as shown in FIG. 10, a plurality of relay electrodes 15 are arranged on the back surface of the insulating substrate 11 according to an appropriate pattern, and each of the relay electrodes 15 has a wiring formed on the insulating substrate 11. Either one of the current supply electrode 13 and the voltage measurement electrode 14 is electrically connected by the unit 16.
In the above, the material of the insulating substrate 11 and the material of each electrode in the connection electrode set 12 are the same as those of the electrical resistance measurement connector of the first example described above.

According to the electrical resistance measurement connector 10 of the third example, the connection electrode set 12 includes three electrodes, a current supply electrode 13, a voltage measurement electrode 14, and a current supply electrode 13, arranged in this order. Therefore, even if the one-surface-side inspected electrode 2 is displaced in the direction in which the electrodes in the connection electrode set 12 are arranged (left-right direction in FIG. 9), the one-surface-side inspected electrode 2 Are electrically connected to both at least one of the current supply electrode 13 and the voltage measurement electrode 14 simultaneously.
In addition, each of the current supply electrode 13 and the voltage measurement electrode 14 has a rectangular shape that is long in a direction perpendicular to the direction in which they are arranged. Even when the position of the electrodes in the connection electrode set 12 is shifted from the center position of the connection electrode set 12 in a direction (vertical direction in FIG. 9) perpendicular to the direction in which the electrodes are arranged, The current supply electrode 13 and the voltage measurement electrode 14 are both electrically connected at the same time.

  Therefore, according to the electrical resistance measuring connector 10 of the third example, since the tolerance for displacement with respect to the one-surface-side inspected electrode 2 is large in the electrical connection work with the inspected circuit board 1, Even if 1 has a large number of single-surface-side electrodes 2 to be inspected 2 having a large area, the electrical connection of both the current supply electrode 13 and the voltage measuring electrode 14 to the single-surface-side electrode 2 is ensured. Can be achieved. Moreover, since the current supply electrode 13 and the voltage measurement electrode 14 are electrically insulated from each other, the electrical resistance of the circuit board 1 to be inspected can be measured with high accuracy.

FIG. 11 is an explanatory cross-sectional view showing the configuration of a fourth example of the electrical resistance measuring connector according to the present invention.
In the electrical resistance measurement connector 10 of the fourth example, a connection electrode set 12 having the same configuration as that of the electrical resistance measurement connector of the first example is formed on the surface of the insulating substrate 11 (FIG. 1). reference). A plurality of relay electrodes 15 are arranged according to an appropriate pattern on the back surface of the insulating substrate 11, and each of the relay electrodes 15 is provided with a current supply electrode 13 by a wiring portion 16 formed on the insulating substrate 11. And one of the voltage measurement electrodes 14 are electrically connected, and a plurality of current supply electrodes 13 are electrically connected to some of the relay electrodes 15 among the relay electrodes 15. .
In the above, the material of the insulating substrate 11 and the material of each electrode in the connection electrode set 12 are the same as those of the electrical resistance measurement connector of the first example described above.

According to the electrical resistance measurement connector 10 of the fourth example, since the tolerance of displacement with respect to the electrode to be inspected is large in the electrical connection work with the circuit board to be inspected, the circuit board to be inspected has a large area and a size. Even with a large number of small electrodes to be inspected, it is possible to reliably achieve electrical connection of both the current supply electrode 13 and the voltage measuring electrode 14 to the electrode to be inspected. Moreover, since the current supply electrode 13 and the voltage measurement electrode 14 are electrically insulated from each other, the electrical resistance of the circuit board to be inspected can be measured with high accuracy.
Further, since the relay electrode 15 is electrically connected to the plurality of current supply electrodes 13, the number of inspection electrodes on the inspection circuit board to which the electrical resistance measurement connector 10 is electrically connected is reduced. As a result, the manufacture of the inspection circuit board is facilitated, and the manufacturing cost of the inspection circuit board can be reduced.

The electrical resistance measurement connector of the present invention is not limited to the above example, and various modifications can be made.
For example, the number of all electrodes may be five or more as long as the connection electrode set has at least one of each of the current supply electrode and the voltage measurement electrode.
The shapes of the current supply electrode and the voltage measurement electrode are not limited to a rectangle, but may be a circle or other shapes.
Further, the arrangement pattern of the electrodes in the connection electrode set can be appropriately set according to the number and shape of the electrodes, the shape of the electrode to be inspected, and the like.
In addition, a plurality of voltage measurement electrodes may be electrically connected to one relay electrode.

<Connector device for electrical resistance measurement>
FIG. 12 is an explanatory cross-sectional view showing the configuration of the first example of the electrical resistance measuring connector device according to the present invention. This electrical resistance measurement connector device 25 is an anisotropic conductive elastomer integrally formed on the electrical resistance measurement connector 10 of the first example and on the surface (lower surface in the figure) of the electrical resistance measurement connector 10. And the layer 20.
As shown in FIG. 13, the anisotropic conductive elastomer layer 20 includes a plurality of layers extending in the thickness direction arranged according to patterns corresponding to the patterns of the current supply electrode 13 and the voltage measurement electrode 14 in each connection electrode set 12. The conductive path forming portion 21 and an insulating portion 22 that is interposed between the conductive path forming portions 21 and insulates them from each other. Further, in the illustrated example, the surface of the anisotropic conductive elastomer layer 20 includes the surfaces of the four conductive path forming portions 21 corresponding to the respective electrodes of one connection electrode set 12 and the insulation interposed therebetween. The protruding portion 23 is formed so that the surface of the portion 22 protrudes from the surface of the other insulating portion 22.
The conductive path forming portion 21 is configured to be densely contained in the elastic polymer material constituting the base material of the anisotropic conductive elastomer layer 20 in a state where the conductive particles P exhibiting magnetism are aligned in the thickness direction. The conductive path is formed by the chain of the conductive particles P. On the other hand, the insulating part 22 contains no or almost no conductive particles P.

As the conductive particles P constituting the conductive path forming portion 21, for example, metal particles exhibiting magnetism such as nickel, iron, cobalt or the like, particles of these alloys, particles containing these metals, or these particles as core particles And the surface of the core particle is plated with a metal having good conductivity such as gold, silver, palladium, rhodium, or inorganic particles or polymer particles such as non-magnetic metal particles or glass beads as the core particles, Examples include those obtained by plating the surface of the core particles with a conductive magnetic material such as nickel or cobalt.
Among these, it is preferable to use nickel particles as core particles and the surfaces thereof plated with a metal having good conductivity such as gold or silver.
In addition, the particle size of the conductive particles P facilitates the pressure deformation of the obtained conductive path forming portion 21, and sufficient electrical contact is obtained between the conductive particles P in the conductive path forming portion 21. It is preferable that it is 3-200 micrometers, and it is especially preferable that it is 10-100 micrometers.

  The moisture content of the conductive particles P is preferably 5% or less, more preferably 3% or less, still more preferably 2% or less, and particularly preferably 1% or less. By satisfying such conditions, the formation of bubbles in the first anisotropic conductive sheet 20 is prevented or suppressed when the first upper anisotropic conductive sheet 20 is formed.

  The ratio of the conductive particles P in the conductive path forming part 21 is preferably 5 to 60%, more preferably 7 to 50%, and particularly preferably 10 to 40% in terms of volume fraction. When this ratio is less than 5%, it may be difficult to form a conductive path having a sufficiently small electric resistance value. On the other hand, when this ratio exceeds 60%, the obtained conductive path forming part 21 becomes fragile, and the necessary elasticity as the conductive path forming part may not be obtained.

As the insulating elastic polymer material constituting the base material of the anisotropic conductive elastomer layer 20, those having a crosslinked structure are preferable. Various materials can be used as the polymer material that can be used to obtain a polymer material having a crosslinked structure. Specific examples thereof include polybutadiene rubber, natural rubber, polyisoprene rubber, styrene- Conjugated diene rubbers such as butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, and hydrogenated products thereof, block copolymer rubbers such as styrene-butadiene block copolymer rubber, and hydrogenated products thereof, silicone rubber , Fluoro rubber, silicone-modified fluoro rubber, ethylene-propylene copolymer rubber, urethane rubber, polyester rubber, chloroprene rubber, epichlorohydrin rubber and the like.
In the above, silicone rubber and silicone-modified fluororubber are preferably used because of high moldability and electrical insulation characteristics.

According to the electrical resistance measurement connector device 25 of the first example as described above, since the electrical resistance measurement connector of the first example is provided, in the electrical connection work with the circuit board to be inspected, the electrical resistance is to be measured. Since the tolerance of displacement with respect to the electrode to be inspected is large, even if the circuit board to be inspected has a large number of single-surface inspected electrodes having a large area and a small size, the current supply electrode 13 for the electrode to be inspected And electrical connection of both the voltage measuring electrode 14 can be reliably achieved. Moreover, since the current supply electrode 13 and the voltage measurement electrode 14 are electrically insulated from each other, the electrical resistance of the circuit board 1 to be inspected can be measured with high accuracy.
In addition, since the anisotropic conductive elastomer layer 20 is integrally formed on the surface of the electrical resistance measuring connector 10, stable electrical connection can be achieved against environmental changes such as thermal history due to temperature changes. Can be maintained.
The anisotropic conductive elastomer layer 20 is provided with the conductive path forming portion 21 corresponding to the current supply electrode 13 and the voltage measurement electrode 14 in the electrical resistance measurement connector 10. As a result, the electrical resistance of the circuit board to be inspected can be measured with higher accuracy.

The electrical resistance measurement connector device of the first example can be manufactured as follows, for example.
FIG. 14 is a cross-sectional view illustrating the configuration of an example of a mold for obtaining the anisotropic conductive elastomer layer 20. This mold is configured such that an upper mold 30 and a lower mold 35 paired therewith are arranged so as to face each other.
In the upper mold 30, the ferromagnetic layer 32 is formed on the surface (lower surface in the drawing) of the ferromagnetic substrate 31 according to a pattern opposite to the pattern of the region where the connection electrode set 12 in the electrical resistance measuring connector 10 is formed. The nonmagnetic layer 33 is formed in a region other than the region where the ferromagnetic layer 32 is formed. The nonmagnetic layer 33 has a thickness larger than the thickness of the ferromagnetic layer 32, and a step is formed between the ferromagnetic layer 32 and the nonmagnetic layer 33, so that the molding surface of the upper mold 30 is formed. A recess for forming the protrusion 23 in the anisotropic conductive elastomer layer 20 is formed.
In the lower mold 35, the ferromagnetic layer 37 is formed on the surface of the ferromagnetic substrate 36 (upper surface in the drawing) according to the same pattern as the pattern of the region where the connection electrode set 12 in the electrical resistance measurement connector 10 is formed. In a region other than the region where the ferromagnetic layer 37 is formed, a nonmagnetic layer 38 having substantially the same thickness as the ferromagnetic layer 37 is formed.

Ferromagnetic metals such as iron, iron-nickel alloy, iron-cobalt alloy, nickel, and cobalt can be used as materials constituting the ferromagnetic substrates 31 and 36 in each of the upper mold 30 and the lower mold 35. . The ferromagnetic substrates 31 and 36 preferably have a thickness of 0.1 to 50 mm, have a smooth surface, are chemically degreased, and are mechanically polished. preferable.
In addition, as a material constituting the ferromagnetic layers 32 and 37 in each of the upper mold 30 and the lower mold 35, a ferromagnetic metal such as iron, iron-nickel alloy, iron-cobalt alloy, nickel, cobalt, or the like is used. Can do. The ferromagnetic layers 32 and 37 preferably have a thickness of 10 μm or more. When this thickness is less than 10 μm, it becomes difficult to apply a magnetic field having a sufficient strength distribution to the elastomer material layer described later, and a portion to be a conductive path forming portion in the elastomer material layer It is difficult to collect conductive particles at a high density, and a conductive path forming part having high conductivity may not be obtained.
In addition, as the material constituting the nonmagnetic layers 33 and 38 in each of the upper mold 30 and the lower mold 35, a nonmagnetic metal such as copper, a heat-resistant polymer substance, or the like can be used. It is preferable to use a polymer substance cured by radiation in that the nonmagnetic layers 33 and 38 can be easily formed by a lithography technique. Examples of the material include acrylic dry film resists and epoxy. A photoresist such as a liquid resist or a polyimide liquid resist can be used.

Using the above mold, for example, a connector device for measuring electrical resistance is manufactured as follows.
First, the electrical resistance measuring connector 10 of the first example shown in FIG. 1 is manufactured, and conductive particles exhibiting magnetism are contained in a liquid polymer material forming material that is cured to become an elastic polymer material. An elastomer material is prepared.
Next, as shown in FIG. 15, an elastomer material is applied to the surface of the electrical resistance measurement connector 10 to form an elastomer material layer 20A having a required thickness, and the surface of the elastomer material layer 20A ( The upper mold 30 and the lower mold 35 are arranged on the upper surface in the drawing and the back surface of the electrical resistance measuring connector 10.

  Then, for example, by placing an electromagnet on the lower surface of the upper die 30 and the lower surface of the lower die 35 and operating the electromagnet, the ferromagnetic material layer 32 of the upper die 30 and the lower die 35 of the material layer for elastomer 20A are operated. Positioned on the surface of the portion located between the ferromagnetic layer 37, that is, the region where the connection electrode set 12 of the electrical resistance measurement connector 10 is formed (hereinafter also referred to as “connection electrode set region”). A magnetic field having a strength greater than that of the other portions is applied in the thickness direction in the portion to be applied. As a result, as shown in FIG. 16, the conductive particles P dispersed in the elastomer material layer 20A are gathered in a portion located on the surface of the connection electrode assembly region and aligned in the thickness direction. To do. In this state, the elastomer material layer 20A is cured, so that the surface of the electrical resistance measurement connector 10 is positioned on the surface of the connection electrode assembly region as shown in FIG. The elastomer layer 20 </ b> B containing the conductive particles exhibiting magnetism aligned in the thickness direction is formed.

In the above, the viscosity of the elastomer material is preferably in the range of 100,000 to 1,000,000 cp at a temperature of 25 ° C.
The method for applying the elastomer material is not particularly limited, and for example, a printing method such as a roll coating method, a blade coating method, or screen printing can be used.
The intensity of the magnetic field applied to the elastomer material layer 20A is preferably 20 to 2000 mT on average.
As means for applying a magnetic field, a permanent magnet can be used instead of an electromagnet. As such a permanent magnet, one made of alnico (Fe—Al—Ni—Co alloy), ferrite, or the like is preferable in that the strength of the magnetic field in the above range can be obtained.
The curing process of the elastomer material layer 20A can be performed while the magnetic field is applied, but can also be performed after the magnetic field is stopped.
The conditions for the curing treatment of the elastomer material layer 20A are appropriately selected depending on the material used, but are usually performed by heat treatment. The specific heating temperature and heating time are appropriately selected in consideration of the type of the polymer material forming material of the elastomer material layer 20A, the time required to move the conductive particles, and the like. For example, when the polymer material-forming material is room temperature curable silicone rubber, the elastomer material layer is cured at room temperature for about 24 hours, at 40 ° C. for about 2 hours, and at 80 ° C. for about 30 minutes. .

  Thus, with respect to the elastomer layer 20B formed on the surface of the electrical resistance measuring connector 10, as shown in FIG. 18, in the portion where the conductive particles P are contained, each electrode ( By removing a portion located on the surface of the region between the current supply electrode 13 and the voltage measurement electrode 14), a cross-shaped hole K is formed. Next, as shown in FIG. 19, the hole K is filled with a liquid polymer substance forming material 23A that is cured to become an elastic polymer substance, and then the polymer substance forming material 23A is cured. Thus, the anisotropic conductive elastomer layer 20 in which the insulating portion 22 is formed between the adjacent conductive path forming portions 21 is formed, and thus the electrical resistance measuring connector device 25 shown in FIGS. 12 and 13 is manufactured. The

In the above, as a method of forming the hole K in the elastomer layer 20B, it is preferable to use a laser processing method using a carbon dioxide laser or the like.
The polymer substance forming material filled in the hole K may be of the same type or different type as the polymer substance forming material used for the aforementioned elastomer material.

  According to such a method, the elastomer layer 20B having a portion containing the conductive particles P is formed on the surface of the connection electrode assembly region of the electrical resistance measurement connector 10, and the elastomer layer 20B A hole K is formed between portions that should be conductive path forming portions located on the surface of the current supply electrode 13 or the voltage measurement electrode 14 in the portion containing the conductive particles P. Since the insulating portion 22 is formed in K, the anisotropic conductive elastomer layer 20 in which required insulation is ensured between the adjacent conductive path forming portions 21 can be reliably formed.

FIG. 20 is an explanatory cross-sectional view showing the configuration of the second example of the electrical resistance measuring connector device according to the present invention. This electrical resistance measurement connector device 25 is an anisotropic conductive elastomer integrally formed on the electrical resistance measurement connector 10 of the first example and on the surface (lower surface in the figure) of the electrical resistance measurement connector 10. And the layer 20.
As shown in FIG. 21, the anisotropically conductive elastomer layer 20 includes a plurality of layers extending in the thickness direction arranged according to patterns corresponding to the patterns of the current supply electrode 13 and the voltage measurement electrode 14 in each connection electrode set 12. The conductive path forming portion 21 and an insulating portion 22 that is interposed between the conductive path forming portions 21 and insulates them from each other. Further, in the illustrated example, the anisotropic conductive elastomer layer 20 is formed with a protruding portion 23 so that the surface of the conductive path forming portion 21 protrudes from the surface of the insulating portion 22.
The conductive path forming portion 21 is configured to be densely contained in the elastic polymer material constituting the base material of the anisotropic conductive elastomer layer 20 in a state where the conductive particles P exhibiting magnetism are aligned in the thickness direction. The conductive path is formed by the chain of the conductive particles P. On the other hand, the insulating part 22 does not contain the conductive particles P at all.
The elastic polymer material constituting the base material of the anisotropic conductive elastomer layer 20 and the conductive particles constituting the conductive path forming portion 21 are anisotropic conductive materials in the electrical resistance measurement connector device of the first example described above. The thing similar to the elastomer layer 20 can be used.

According to the electrical resistance measurement connector device 25 of the second example as described above, since the electrical resistance measurement connector of the first example is provided, in the electrical connection work with the circuit board to be inspected whose electrical resistance is to be measured. Since the tolerance of displacement with respect to the electrode to be inspected is large, even if the circuit board to be inspected has a large number of single-surface inspected electrodes having a large area and a small size, the current supply electrode 13 for the electrode to be inspected And electrical connection of both the voltage measuring electrode 14 can be reliably achieved. Moreover, since the current supply electrode 13 and the voltage measurement electrode 14 are electrically insulated from each other, the electrical resistance of the circuit board 1 to be inspected can be measured with high accuracy.
In addition, since the anisotropic conductive elastomer layer 20 is integrally formed on the surface of the electrical resistance measuring connector 10, stable electrical connection can be achieved against environmental changes such as thermal history due to temperature changes. Can be maintained.
The anisotropic conductive elastomer layer 20 is provided with the conductive path forming portion 21 corresponding to the current supply electrode 13 and the voltage measurement electrode 14 in the electrical resistance measurement connector 10. As a result, the electrical resistance of the circuit board to be inspected can be measured with higher accuracy.

The electrical resistance measurement connector device of the second example can be manufactured as follows, for example.
First, as shown in FIG. 22, an appropriate releasable support plate 26 is prepared, and the conductive particles P are aligned in the thickness direction in the elastic polymer material on the surface of the releasable support plate 26. The conductive elastomer layer 21 </ b> A contained in a state is formed in a state where it is releasably supported on the releasable support plate 26. This conductive elastomer layer 21A has a thickness equivalent to the thickness of the conductive path forming portion to be formed.
In the above, as a material constituting the releasable support plate 26, metals, ceramics, resins, composite materials thereof, and the like can be used.
As a method of forming the conductive elastomer layer 21A, (1) the conductive particles P are contained in an elastic polymer material, which is manufactured in advance by an appropriate method, in an aligned state in the thickness direction. A method of adhering a conductive elastomer sheet to the surface of the releasable support plate 26 so as to be peelable; (2) conductive particles exhibiting magnetism in a liquid polymer material forming material which is cured to become an elastic polymer material; A conductive elastomer material that is dispersed is prepared, and the conductive elastomer material is applied onto the releasable support plate 15 to form a conductive elastomer material layer. The conductive elastomer material By applying a magnetic field to the layer in the thickness direction, the conductive particles P in the conductive elastomer material layer are aligned in the thickness direction. Method of performing hardening treatment Sutoma material layer, or the like may be used.
In the above method (1), as a means for adhering the conductive elastomer sheet to the surface of the releasable support plate 26 in a peelable manner, a method of adhering using the adhesive property of the conductive elastomer sheet itself, A method of adhering with an agent can be used.
In the method (2), as specific means for applying the conductive elastomer material, a printing method such as screen printing, a roll coating method, a blade coating method, or the like can be used.
As a means for applying a magnetic field to the conductive elastomer material layer, an electromagnet, a permanent magnet, or the like can be used.
The strength of the magnetic field applied to the conductive elastomer material layer is preferably 0.2 to 2.5 Tesla.
The curing treatment of the conductive elastomer material layer is usually performed by heat treatment. The specific heating temperature and heating time are appropriately set in consideration of the type of polymer substance forming material constituting the conductive elastomer material layer, the time required to move the conductive particles, and the like.

  As shown in FIG. 23, a thin metal layer 27 for the plating electrode is formed on the surface of the conductive elastomer layer 21A formed on the releasable support plate 26 in this way. Next, as shown in FIG. 24, a conductive path forming portion pattern to be formed on the thin metal layer 27 by photolithography, that is, the current supply electrode and the voltage measurement electrode in the electrical resistance measurement connector. A resist layer 28 having a plurality of openings 28a is formed in accordance with the corresponding pattern. Thereafter, as shown in FIG. 25, by using the metal thin layer 27 as a plating electrode, a portion of the metal thin layer 27 exposed through the opening 28a of the resist layer 28 is subjected to an electrolytic plating process, whereby the resist layer 28 A metal mask 29 is formed in the opening 28a. In this state, by applying laser processing to the conductive elastomer layer 21A, the metal thin layer 27, and the resist layer 28, a part of the resist layer 28, the metal thin layer 27, and the conductive elastomer layer 21A is removed. As a result, as shown in FIG. 26, a plurality of conductive path forming portions 21 arranged according to a pattern corresponding to the current supply electrode and the voltage measurement electrode in the electrical resistance measurement connector are formed on the releasable support plate 26. It is formed in a supported state. Thereafter, the remaining thin metal layer 27 and metal mask 29 are peeled off from the surface of the conductive path forming portion 21.

In the above, as a method of forming the metal thin layer 27 on the surface of the conductive elastomer layer 21A, an electroless plating method, a sputtering method, or the like can be used.
As a material constituting the metal thin layer 27, copper, gold, aluminum, rhodium, or the like can be used.
The thickness of the thin metal layer 27 is preferably 0.05 to 2 μm, more preferably 0.1 to 1 μm. When this thickness is too small, a uniform thin layer is not formed, which may be inappropriate as a plating electrode. On the other hand, if this thickness is excessive, it may be difficult to remove by laser processing.
The thickness of the resist layer 28 is set according to the thickness of the metal mask 29 to be formed.
As a material for forming the metal mask 29, copper, iron, aluminum unime, gold, rhodium, or the like can be used.
The thickness of the metal mask 29 is preferably 2 μm or more, more preferably 5 to 20 μm. If this thickness is too small, it may be unsuitable as a mask for the laser.
The laser processing is preferably performed using a carbon dioxide laser, whereby the conductive path forming portion 21 having a desired form can be reliably formed.

On the other hand, as shown in FIG. 27, by applying a liquid polymer substance forming material that is cured to become an insulating elastic polymer substance on the surface of the electrical resistance measurement connector 10, an insulating material layer 22A is applied. Form. Next, as shown in FIG. 28, the releasable support plate 26 in which the plurality of conductive path forming portions 21 are formed is superimposed on the releasable support plate 26 in which the insulating portion material layer 22A is formed. Each of the current supply electrode 13 and the voltage measurement electrode 14 in the electrical resistance measurement connector 10 is brought into contact with the corresponding conductive path forming portion 21. Thereby, the insulating material layer 22A is formed between the adjacent conductive path forming portions 21. Thereafter, in this state, the insulating portion material layer 22A is subjected to the curing process, so that the insulating portions 12 that insulate them from each other between the adjacent conductive path forming portions 21 are formed as shown in FIG. It is formed integrally with the forming portion 11 and the electrical resistance measuring connector 10.
Then, by separating from the releasable support plate 26, an adapter device having the structure shown in FIG. 20 is obtained, in which the anisotropic conductive elastomer layer 20 is integrally formed on the surface of the electrical resistance measuring connector 10. It is done.

In the above, a printing method such as screen printing, a roll coating method, a blade coating method, or the like can be used as means for applying the polymer substance forming material.
The thickness of the insulating part material layer 22A is set according to the thickness of the insulating part 22 to be formed.
The curing process of the insulating part material layer 22A is usually performed by heat treatment. The specific heating temperature and heating time are appropriately set in consideration of the type of elastomer material constituting the insulating part material layer 22A.

According to such a manufacturing method, the conductive elastomer layer 21A, in which the conductive particles P are aligned so as to be aligned in the thickness direction, is laser-processed to remove a part thereof, thereby achieving a desired form. In order to form the conductive path forming portion 21, the anisotropic conductive elastomer 20 having the desired conductive path forming portion 21 filled with a predetermined amount of the conductive particles P is reliably obtained. Can do.
In addition, a plurality of conductive path forming portions 21 arranged in accordance with the pattern of the current supply electrode 13 and the voltage measuring electrode 14 are formed on the releasable support plate 26, and between these conductive path forming portions 21. By forming the insulating portion material layer 22A and curing the insulating portion 22, the insulating portion 22 is formed, so that the anisotropic conductive elastomer layer 20 having the insulating portion 22 in which the conductive particles P are not present is reliably obtained. be able to.
Moreover, in order to form the anisotropic conductive elastomer layer, it is not necessary to use an expensive mold in which a large number of ferromagnetic parts are arranged.
Further, since the formation process of the conductive path forming portion 21 by laser processing is performed on the releasable support plate 26, the surface of the electrical resistance measuring connector 10 is damaged in the formation of the anisotropic conductive elastomer layer 20. There is nothing.

The electrical resistance measuring connector device of the present invention is not limited to the above example, and various modifications can be made.
For example, as shown in FIG. 30, the electrical resistance measuring connector 10 may be the second example shown in FIGS. 6 and 7, and the third example shown in FIGS. 9 and 10. 11 or the fourth example shown in FIG. 11, or another electrical resistance measuring connector according to the present invention.
Further, the anisotropic conductive elastomer layer 20 may be formed so that the conductive path forming portion covers all the electrodes in the connection electrode set, and the conductive particles are contained in the elastic polymer substance. It may be a so-called dispersion type that is aligned so as to be aligned in the thickness direction and that is contained in a state where the chain of the conductive particles is dispersed in the plane direction.

<Circuit board electrical resistance measurement device>
FIG. 31 is an explanatory diagram showing the configuration of the first example of the circuit board electrical resistance measuring apparatus according to the present invention, and FIG. 32 is an enlarged view of the main part of the circuit board electrical resistance measuring apparatus shown in FIG. It is explanatory drawing shown.
The circuit board electrical resistance measuring apparatus according to the first example includes an upper adapter 40 disposed on one surface (upper surface in FIG. 31) of the circuit board 1 to be measured, and the circuit board 1 to be tested. The lower side adapter 50 arrange | positioned at the other surface (lower surface in FIG. 31) side is comprised so that it may mutually oppose up and down.

  The upper adapter 40 is provided with an electrical resistance measurement connector device 25 having a configuration shown in FIG. 12, for example, which is arranged on one surface side (upper side in FIG. 31) of the circuit board 1 to be inspected. On the back surface (upper surface in FIG. 31) of the electrical resistance measurement connector 10 in the device 25, the one-surface-side inspection circuit board 41 is disposed via the first upper-side anisotropic conductive sheet 44. A plurality of inspection electrodes 42 are arranged on the front surface (lower surface in FIG. 31) of the one-surface-side inspection circuit board 41 according to a pattern corresponding to the pattern of the relay electrode 15 in the electrical resistance measuring connector device 25. Terminal electrodes 43 are arranged on the back surface (upper surface in FIG. 31) of the inspection circuit board 41 in accordance with a pattern corresponding to an array pattern of standard array electrodes 49 of an electrode plate 48 to be described later. The inspection electrode 42 is electrically connected.

  An electrode plate 48 is provided on the back surface of the one-surface-side inspection circuit board 41 via a second upper-side anisotropic conductive sheet 45. The electrode plate 48 has a plurality of standard array electrodes 49 arranged on a standard lattice point having a pitch of 2.54 mm, 1.8 mm, or 1.27 mm, for example, on the surface (the lower surface in FIG. 31). Each of the standard array electrodes 49 is electrically connected to the terminal electrode 43 of the one-surface-side inspection circuit board 41 through the second upper-side anisotropic conductive sheet 45 and the internal wiring ( It is electrically connected to the tester 59 via a not-shown).

The first upper-side anisotropic conductive sheet 44 in this example is a so-called unevenly-distributed anisotropic conductive sheet, and is disposed in a thickness direction according to a pattern corresponding to the pattern of the relay electrode 15 of the electrical resistance measurement connector 10. And a plurality of conductive path forming portions (not shown) extending between the conductive path forming portions and an insulating portion (not shown) interposed between these conductive path forming portions to insulate them from each other. The conductive elastic particles are contained in a state in which the conductive particles are aligned in the thickness direction, and the insulating portion is made of an insulating elastic polymer material containing no or almost no conductive particles. .
The second upper side anisotropic conductive sheet 45 is a so-called dispersive anisotropic conductive sheet, in which the conductive particles are aligned in the thickness direction to form a chain in the elastic polymer material. In this state, a chain of conductive particles is contained in a state dispersed in the plane direction.
The elastic polymer substance and the conductive particles constituting the first upper side anisotropic conductive sheet 44 and the second upper side anisotropic conductive sheet 45 are anisotropic conductive materials in the electrical resistance measuring connector device 25. The elastic elastomer layer 20 constituting the conductive elastomer layer 20 and those exemplified as the conductive particles can be appropriately selected and used.

  The lower-side adapter 50 is provided with an other-surface-side inspection circuit board 51, and the other-surface-side inspection circuit board 51 has a surface (upper surface in FIG. 31) on the other-surface-side inspection target circuit board 1. According to a pattern corresponding to the arrangement pattern of the electrodes 3, an inspection electrode pair composed of a current supply inspection electrode 52 a and a voltage measurement inspection electrode 52 b which are disposed apart from each other on the other-surface-side inspection electrode 3. The other surface side inspected electrode 3 is disposed so as to be located in a region having the same area as the region occupied by the other surface side inspection electrode 3. A current supply terminal electrode 53a and a voltage measurement terminal electrode 53b are arranged on the back surface of the circuit board 51 for inspecting the other surface in accordance with a pattern corresponding to the arrangement pattern of the standard arrangement electrodes 61 of the electrode plate 60 described later. Each of the current supply terminal electrode 53a and the voltage measurement terminal electrode 53b is electrically connected to the corresponding current supply test electrode 52a and voltage measurement test electrode 52b.

  An anisotropic conductive elastomer layer 55 is integrally formed on the surface of the other surface side inspection circuit board 51. The anisotropic conductive elastomer layer 55 has a common conductive path forming portion in contact with both surfaces (upper surface in FIG. 31) of the current supply test electrode 52a and the voltage measurement test electrode 52b constituting each of the test electrode pairs. 56 is formed, and an insulating portion 57 is formed between adjacent conductive path forming portions 56 to insulate them from each other. The conductive path forming portion 56 is contained in an insulating elastic polymer substance in a state in which the conductive particles are aligned in the thickness direction, and the insulating portion 57 contains no or almost no conductive particles. It consists of an insulating elastic polymer material. Further, in the anisotropic conductive elastomer layer 55 of this example, the surface of the conductive path forming portion 56 (upper surface in FIG. 31) is formed in a state of protruding from the surface of the insulating portion 57.

An electrode plate 60 is provided on the back surface (the lower surface in FIG. 31) of the other surface side inspection circuit board 51 via the lower side anisotropic conductive sheet 62.
The electrode plate 60 and the lower-side anisotropic conductive sheet 62 correspond to the electrode plate 48 and the second upper-side anisotropic conductive sheet 45 in the upper-side adapter 40, and the electrode plate 60 has its surface (see FIG. 31 has a plurality of standard array electrodes 61 arranged on standard grid points having a pitch of 2.54 mm, 1.8 mm, or 1.27 mm, for example. It is electrically connected to the current supply terminal electrode 53a or the voltage measurement terminal electrode 53b of the other surface side inspection circuit board 51 via the side anisotropic conductive sheet 62, and the internal wiring of the electrode plate 60 (not shown). )) And is electrically connected to the tester 59. The lower side anisotropic conductive sheet 62 is a so-called dispersive anisotropic conductive sheet, in a state where conductive particles are aligned in the thickness direction in the elastic polymer substance to form a chain, and The chain of the conductive particles is contained in a state dispersed in the plane direction.

The conductive path forming portion 56 in the anisotropic conductive elastomer layer 55 is preferably higher in conductivity in the thickness direction than in the plane direction perpendicular to the thickness direction. Specifically, the electrical resistance value in the plane direction It is preferable that the ratio of the electrical resistance value in the thickness direction with respect to the thickness is 1 or less, particularly 0.5 or less.
When this ratio exceeds 1, the current flowing between the current supply test electrode 52a and the voltage measurement test electrode 52b via the conductive path forming portion 56 becomes large, so that the electrical resistance is measured with high accuracy. Can be difficult.
From such a viewpoint, it is preferable that the filling rate of the conductive particles in the conductive path forming portion 56 is 5 to 50% by volume.
Such an anisotropic conductive elastomer layer 55 can be formed by an appropriate method, for example, a method described in Japanese Patent Application Laid-Open No. 2000-74965.
Further, the anisotropic conductive elastomer layer 20 in the electrical resistance measuring connector device 25 is used as the elastic polymer material and the conductive particles constituting the anisotropic conductive elastomer layer 55 and the lower side anisotropic conductive sheet 62. It can be appropriately selected from those exemplified as the elastic polymer substance and the conductive particles.

The separation distance between the current supply inspection electrode 52a and the voltage measurement inspection electrode 52b on the other surface side inspection circuit board 51 is preferably 10 μm or more. When the separation distance is less than 10 μm, the current flowing between the current supply test electrode 52a and the voltage measurement test electrode 52b via the conductive path forming portion 56 becomes large, so that the electric resistance can be increased with high accuracy. It may be difficult to measure.
On the other hand, the upper limit of the separation distance is determined by the size of each inspection electrode and the size and pitch of the related other surface side inspection electrode 3 and is usually 500 μm or less. If this separation distance is excessive, it may be difficult to properly dispose both inspection electrodes with respect to one of the other surface side inspection electrodes 3.

In the circuit board electrical resistance measuring apparatus as described above, the electric current between any one of the test electrodes 2 on the circuit board 1 to be tested and the corresponding test electrode 3 on the other side as follows. Resistance is measured.
The circuit board 1 to be inspected is placed at a required position between the upper adapter 40 and the lower adapter 50. In this state, the upper adapter 40 is lowered and the lower adapter 50 is raised, The anisotropic conductive elastomer layer 20 in the electrical resistance measuring connector device 25 is pressed against one surface of the test circuit board 1 and the other surface of the circuit board 1 to be tested is placed on the surface of the test circuit board 51 on the other side. The anisotropic conductive elastomer layer 55 formed in the state is pressed. This state is a measurement state.

In this measurement state, a constant current is supplied between the current supply electrode 12 in the electrical resistance measurement connector 10 and the current supply inspection electrode 52a in the other surface side inspection circuit board 51, and One of the voltage measurement electrodes 14 electrically connected to the inspection electrode 2 is designated, and the one specified voltage measurement electrode 14 and the voltage measurement electrode 14 are electrically connected. The voltage obtained by measuring the voltage between the inspection electrode 52b for voltage measurement in the inspection electrode pair electrically connected to the other-surface-side inspected electrode 3 corresponding to the one-surface-side inspected electrode 2 connected to Based on the value, an electrical resistance value between the one-surface-side inspected electrode 2 electrically connected to the designated voltage measuring electrode 14 and the corresponding other-surface-side inspected electrode 3 is acquired. .
Then, by sequentially changing the designated voltage measuring electrode 14, it is possible to measure the electrical resistance between all the one-surface-side inspected electrodes 2 and the corresponding other-surface-side inspected electrodes 3.

  In the above, when two voltage measurement electrodes 14 in the connection electrode set 12 of the electrical resistance measurement connector 10 are electrically connected to one single-surface-side inspection electrode 2 in the circuit board 1 to be inspected, As shown in FIG. 33, two voltage measuring circuits C1 and C2 are formed between the one-surface-side inspected electrode 2 and the other-surface-side inspected electrode 3 corresponding thereto. In such a case, the higher one of the electrical resistance value by the voltage measuring circuit C1 and the voltage value by the voltage measuring circuit C2 is adopted, and the one-side inspection electrode 2 and this The electrical resistance value with respect to the other surface side inspected electrode 3 corresponding to is acquired.

  According to the circuit board electrical resistance measuring apparatus having the above-described configuration, the upper-side adapter 40 is provided with the electrical resistance measuring connector 10 having the configuration shown in FIGS. 1 has a large tolerance for positional deviation with respect to the one-surface-side inspected electrode 2, the circuit board 1 to be inspected has a large number of one-surface-side inspected electrodes 2 having a large area and a small size. However, the electrical connection of both the current supply electrode 13 and the voltage measurement electrode 14 to the one-surface-side inspected electrode 2 can be reliably achieved. Moreover, since the current supply electrode 13 and the voltage measurement electrode 14 are electrically insulated from each other, the electrical resistance of the circuit board 1 to be inspected can be measured with high accuracy.

FIG. 34 is an explanatory view showing the configuration of the second example of the circuit board electrical resistance measuring apparatus according to the present invention, and FIG. 35 is an enlarged view of the main part of the circuit board electrical resistance measuring apparatus shown in FIG. It is explanatory drawing shown.
The circuit board electrical resistance measuring apparatus of the second example includes an upper adapter 40 disposed on one surface (the upper surface in FIG. 34) side of the circuit board 1 to be measured, and the circuit board 1 to be tested. The lower adapter 50 arranged on the other surface (the lower surface in FIG. 34) is arranged so as to face each other vertically, and the upper adapter 40 is the electrical resistance measuring device of the first example. This is the same configuration as the upper-side adapter in FIG.

The lower-side adapter 50 is provided with an electrical resistance measurement connector device 25 having a configuration shown in FIG. 12, for example, which is disposed on the other surface side (lower side in FIG. 34) of the circuit board 1 to be inspected. On the back surface (lower surface in FIG. 34) of the electrical resistance measurement connector 10 in the connector device 25 for the other side, the circuit board 51 for inspection on the other surface side is disposed via the first lower side anisotropic conductive sheet 64. An electrode plate 60 is provided on the back surface of the other surface side inspection circuit board 51 via a second lower side anisotropic conductive sheet 65. The electrode plate 60 has the same configuration as the electrode plate in the lower adapter of the electrical resistance measuring apparatus of the first example.
A plurality of inspection electrodes 52 are arranged on the surface (upper surface in FIG. 34) of the other surface side inspection circuit board 51 in accordance with a pattern corresponding to the pattern of the relay electrode 15 in the electrical resistance measuring connector device 25. Terminal electrodes 53 are arranged on the rear surface (lower surface in FIG. 34) of the side inspection circuit board 51 in accordance with a pattern corresponding to the arrangement pattern of the standard arrangement electrodes 61 of the electrode plate 60. Each of the terminal electrodes 53 corresponds. The test electrode 52 is electrically connected.

The first lower-side anisotropic conductive sheet 64 in this example is a so-called unevenly-distributed anisotropic conductive sheet, and is disposed in a thickness direction according to a pattern corresponding to the pattern of the relay electrode 15 of the electrical resistance measurement connector 10. And a plurality of conductive path forming portions (not shown) extending between the conductive path forming portions and an insulating portion (not shown) interposed between these conductive path forming portions to insulate them from each other. The conductive elastic particles are contained in a state in which the conductive particles are aligned in the thickness direction, and the insulating portion is made of an insulating elastic polymer material containing no or almost no conductive particles. .
The second lower-side anisotropic conductive sheet 65 is a so-called dispersion-type anisotropic conductive sheet, and in the elastic polymer material, conductive particles are aligned in the thickness direction to form a chain. In this state, a chain of conductive particles is contained in a state dispersed in the plane direction.
The elastic polymer substance and the conductive particles constituting the first lower-side anisotropic conductive sheet 64 and the second lower-side anisotropic conductive sheet 65 are anisotropic conductive materials in the electrical resistance measuring connector device 25. The elastic elastomer layer 20 constituting the conductive elastomer layer 20 and those exemplified as the conductive particles can be appropriately selected and used.

In the circuit board electrical resistance measuring apparatus as described above, the electric current between any one of the test electrodes 2 on the circuit board 1 to be tested and the corresponding test electrode 3 on the other side as follows. Resistance is measured.
The circuit board 1 to be inspected is placed at a required position between the upper adapter 40 and the lower adapter 50. In this state, the upper adapter 40 is lowered and the lower adapter 50 is raised, The anisotropic conductive elastomer layer 20 in the electrical resistance measurement connector device 25 of the upper adapter 40 is pressed against one surface of the test circuit board 1 and the lower adapter 50 is electrically connected to the other surface of the circuit board 1 to be tested. The anisotropic conductive elastomer layer 20 in the resistance measuring connector device 25 is in a pressure contact state. This state is a measurement state.

In this measurement state, a constant current is applied between the current supply electrode 12 in the electrical resistance measurement connector 10 of the upper adapter 40 and the current supply electrode 12 in the electrical resistance measurement connector 10 of the lower adapter 50. And supplying one voltage measurement electrode 14 among the voltage measurement electrodes 14 electrically connected to the one-surface-side inspected electrode, the designated one voltage measurement electrode 14, and the voltage measurement The voltage between the voltage measuring electrode 14 electrically connected to the other surface side inspected electrode 3 corresponding to the one surface side inspected electrode 2 electrically connected to the electrode for measuring 14 was obtained. Based on the voltage value, an electrical resistance value between the one-surface-side inspected electrode 2 electrically connected to the designated voltage measuring electrode 14 and the corresponding other-surface-side inspected electrode 3 is acquired. The
Then, by sequentially changing the designated voltage measuring electrode 14, it is possible to measure the electrical resistance between all the one-surface-side inspected electrodes 2 and the corresponding other-surface-side inspected electrodes 3.

  In the above, two voltage measurement electrodes 14 in the connection electrode set 12 of the electrical resistance measurement connector 10 are electrically connected to one single-surface-side inspection electrode 2 in the circuit board 1 to be inspected, and the circuit to be inspected. When two voltage measurement electrodes 14 in the connection electrode set 12 of the electrical resistance measurement connector 10 are electrically connected to one other-surface-side inspected electrode 3 in the substrate 1, as shown in FIG. In addition, four voltage measuring circuits C1, C2, C3, and C4 are formed between the one-surface-side inspected electrode 2 and the other-surface-side inspected electrode 3 corresponding thereto. In such a case, the voltage value of the voltage measurement circuit C1, the voltage measurement circuit C2, the voltage measurement circuit C3, and the voltage measurement circuit C4 that has the highest value is adopted. Based on the above, the electrical resistance value between the one-surface-side inspected electrode 2 and the other-surface-side inspected electrode 3 corresponding thereto is acquired.

  According to the circuit board electrical resistance measuring apparatus having the above-described configuration, the electrical resistance measuring connector 10 having the configuration shown in FIGS. 1 and 2 is provided in each of the upper adapter 40 and the lower adapter 50. As a result, in the electrical connection work with the circuit board 1 to be inspected, since the tolerance of displacement with respect to the one-surface-side inspected electrode 2 and the other-surface-side inspected electrode 3 is large, the circuit board 1 to be inspected has a large area and size. Current supply electrode 13 for each of the one-surface-side inspected electrode 2 and the other-surface-side inspected electrode 3 and the other-surface-side inspected electrode 3 and Both electrical connections of the voltage measuring electrode 14 can be reliably achieved. Moreover, since the current supply electrode 13 and the voltage measurement electrode 14 are electrically insulated from each other, the electrical resistance of the circuit board 1 to be inspected can be measured with high accuracy.

The electrical resistance measuring device of the circuit device of the present invention is not limited to the above example, and various modifications as described below can be added.
For example, in the first example, the other-surface-side inspection circuit board 51 of the lower adapter 50 has a current-supply inspection electrode 52 and a voltage that constitute an inspection electrode pair with respect to one other-surface-side inspection electrode 3. Any device can be used as long as it can achieve a state in which the measurement inspection electrode 53 is electrically connected.
Further, as the anisotropic conductive elastomer layer 55, a layer in which a conductive path forming portion is formed corresponding to each of the current supply inspection electrode 52 and the voltage measurement inspection electrode 53 can be used.
Moreover, it is also possible to use a test electrode provided with a conductive elastomer at each tip, and, if permitted, a probe pin as a test electrode.
Further, when the circuit board to be inspected is a single-sided printed circuit board, it is not necessary to provide a lower adapter.

Hereinafter, specific examples of the present invention will be described, but the present invention is not limited thereto.
In the following examples, a single-sided printed circuit board having the following specifications was used as a circuit board to be inspected.
A total of four electrode groups are formed, each having a vertical and horizontal dimension of 3 cm × 3 cm, and 600 electrodes to be inspected having a diameter of 100 μm arranged at a pitch of 0.2 mm on one side (the total number of electrodes to be inspected). 2400), two of the 600 electrodes to be inspected in each electrode group were electrically connected to each other via internal wiring to form a circuit (300 circuits in each electrode group, total The number of circuits is 1200) single-sided printed circuit board.

<Example 1>
[Connector for electrical resistance measurement]
According to the configuration shown in FIGS. 1 and 2, an electrical resistance measurement connector was produced according to the following specifications.
Insulating substrate (11):
Material: Glass fiber reinforced epoxy resin, dimensions of insulating substrate (11): 100 mm × 100 mm × 0.5 mm,
Connecting electrode set (12):
Dimensions of current supply electrode (13) and voltage measurement electrode (14): 50 μm × 50 μm, separation distance between current supply electrode (13) and voltage measurement electrode (14); 30 μm, connection electrode set ( 12) pitch; 200 μm, number of connection electrode sets (12); 600,
Relay electrode (15):
Dimensions of relay electrode (15); diameter 120 μm (circular), pitch of relay electrode (15); 350 μm, number of relay electrodes (15); 1200

[Connector device for electrical resistance measurement]
An anisotropic conductive elastomer layer was formed on the surface of the electrical resistance measurement connector as described below to produce an electrical resistance measurement connector device.
(1) Mold:
According to the configuration shown in FIG. 14, a mold for obtaining an anisotropic conductive elastomer layer was produced according to the following specifications.
That is, in each of the upper mold (30) and the lower mold (35), the material of the ferromagnetic substrate (31, 36) is iron, and the thickness thereof is 10 mm. The material of the ferromagnetic layers (32, 37) is nickel, its planar shape is circular, and its dimensions are 300 μm in diameter and 100 μm in thickness. The material of the non-magnetic layer (33) of the upper mold (30) is obtained by curing a dry film resist and has a thickness of 150 μm. The material of the non-magnetic layer (38) of the lower mold (35) is obtained by curing a dry film resist and has a thickness of 100 μm.

(2) Material for elastomer:
An elastomer material was prepared by adding and mixing 15 parts by weight of conductive particles having an average particle diameter of 10 μm to 100 parts by weight of addition-type liquid silicone rubber, followed by defoaming treatment under reduced pressure. In the above, as the conductive particles, those obtained by subjecting core particles made of nickel to gold plating (average coating amount: 4% by weight of the weight of the core particles) were used. The viscosity of the elastomer material was 4800 P at a temperature of 25 ° C.

(3) Anisotropic conductive elastomer layer:
The elastomer material layer (20A) is formed on the surface of the electrical resistance measurement connector (10) by applying the prepared elastomer material by screen printing, and the surface of the elastomer material layer (20A) is formed. The upper mold (30) and the lower mold (35) are arranged on the back surface of the electrical resistance measuring connector 10. Then, by placing an electromagnet on the lower surface of the upper die (30) and the lower surface of the lower die (35) and operating it, the ferromagnetic material of the upper die (30) with respect to the elastomer material layer (20A). For elastomers under the conditions of 125 ° C. and 2 hours while applying a 2T magnetic field to the portion located between the layer (32) and the ferromagnetic layer (37) of the lower die (35). By conducting the curing process of the material layer (20A), the conductive particles exhibiting magnetism are arranged in the thickness direction on the surface of the electrical resistance measurement connector (10) on the surface of the connection electrode assembly region. The elastomer layer (20B) contained in such an oriented state was formed.
By subjecting the obtained elastomer layer (20B) to laser processing using a carbon dioxide gas laser, in the portion containing conductive particles, on the surface of the region between the electrodes in the connection electrode set (12) The cross-shaped hole (K) was formed by removing the part located in. Next, the addition type liquid silicone rubber is filled in the hole (K), and the addition type liquid silicone rubber is cured under the conditions of 125 ° C. and 2 hours, whereby the anisotropic conductive elastomer layer (20 Thus, the electrical resistance measuring connector device (25) was manufactured.

(4) Electrical resistance measuring device for circuit device:
Using the electrical resistance measurement connector device described above, an electrical resistance measurement device including an upper-side adapter and a tester shown in FIG. 31 was produced.

<Comparative Example 1>
In accordance with the configuration disclosed in Japanese Patent Laid-Open No. 2000-74965, an inspection circuit board having a current supply electrode and a voltage measurement electrode formed on the surface corresponding to the electrode to be inspected, and the surface of the inspection circuit board An electrical resistance measuring device having a connecting member and a holding member made of a conductive elastomer provided on the substrate was manufactured.
The vertical and horizontal dimensions of the current supply electrode and the voltage measurement electrode in the circuit board for inspection are 120 μm × 40 μm, the separation distance between the current supply electrode and the voltage measurement electrode is 40 μm, and the thickness of the connecting member is 0 At 0.06 mm, silicone rubber was used as the elastic polymer material constituting the connecting member, and gold-plated nickel particles with an average particle diameter of 10 μm were used as the conductive particles.

[Evaluation]
A total of 200 circuit boards to be inspected having the above-mentioned specifications are prepared, and the electrical resistance of each circuit on these circuit boards to be inspected is measured by the electrical resistance measuring apparatus according to Example 1 and Comparative Example 1, and the circuit When the measured value of the electrical resistance was 1Ω or more, it was determined that the connection was poor, and the number was measured.
As a result, in the electrical resistance measuring apparatus according to Example 1, the number of circuit boards having a circuit whose measured value of electrical resistance is 1Ω or more out of 100 circuit boards (1200 circuits × 100) is 0. In the electrical resistance device according to Comparative Example 1, out of 100 circuit boards (1200 circuits × 100), the number of circuit boards having a circuit having a measured electrical resistance value of 1Ω or more was 25.

It is a top view which shows the 1st example of the connector for electrical resistance measurement which concerns on this invention. It is sectional drawing for description which shows the structure of the connector for electrical resistance measurement of a 1st example. It is sectional drawing for description which shows the state by which the connector for an electrical resistance measurement shown in FIG. 1 is arrange | positioned through the anisotropic conductive sheet on one surface of a to-be-inspected circuit board. It is explanatory drawing which shows the state which the position shift produced between the electrode set for a connection and the to-be-tested electrode in the electrical resistance measurement connector of a 1st example. It is sectional drawing for description which shows the structure of a to-be-inspected circuit board. It is a top view which shows the 2nd example of the connector for an electrical resistance measurement which concerns on this invention. It is sectional drawing for description which shows the structure of the connector for an electrical resistance measurement of a 2nd example. It is explanatory drawing which shows the state which the position shift produced between the electrode group for a connection in the electrical resistance measurement connector of a 2nd example, and a to-be-tested electrode. It is a top view which shows the 3rd example of the connector for an electrical resistance measurement which concerns on this invention. It is sectional drawing for description which shows the structure of the connector for an electrical resistance measurement of the 3rd example. It is sectional drawing for description which shows the structure in the 4th example of the connector for electrical resistance measurement which concerns on this invention. It is sectional drawing for description which shows the structure in the 1st example of the connector apparatus for an electrical resistance measurement which concerns on this invention. It is a top view which fractures | ruptures a part of the anisotropic conductive elastomer layer, and shows the connector apparatus for electrical resistance measurement shown in FIG. It is sectional drawing for description which shows the structure in an example of the metal mold | die for obtaining an anisotropic conductive elastomer layer. It is sectional drawing for description which shows the state in which the elastomer material layer was formed in the surface of the connector for electrical resistance measurement. It is sectional drawing for description which shows the state to which the magnetic field which has intensity distribution was acted on the thickness direction of the material layer for elastomers. It is sectional drawing for description which shows the state in which the elastomer layer was formed in the surface of the connector for electrical resistance measurement. It is sectional drawing for description which shows the state in which the hole part was formed in the elastomer layer. It is sectional drawing for description which shows the state by which the polymer substance forming material was filled into the hole part formed in the elastomer layer. It is sectional drawing for description which shows the structure in the 2nd example of the connector apparatus for an electrical resistance measurement which concerns on this invention. FIG. 21 is a plan view showing the electrical resistance measurement connector device shown in FIG. 20 with a part of its anisotropically conductive elastomer layer cut away. It is sectional drawing for description which shows the state in which the electroconductive elastomer layer was formed on the releasable support plate. It is sectional drawing for description which shows the state by which the metal thin layer was formed on the conductive elastomer layer. It is sectional drawing for description which shows the state in which the resist layer which has an opening was formed on the metal thin layer. It is sectional drawing for description which shows the state in which the metal mask was formed in opening of a resist layer. It is sectional drawing for description which shows the state in which the some conductive path formation part was formed on the releasable support plate. It is sectional drawing for description which shows the state by which the insulating part material layer was formed in the surface of the connector for electrical resistance measurement. It is sectional drawing for description which shows the state with which the releaseable support plate in which the conductive path formation part was formed was piled up on the electrical resistance measurement connector in which the insulating part material layer was formed. It is sectional drawing for description which shows the state by which the insulating part was formed between the adjacent conductive path formation parts. It is sectional drawing for description which shows the structure in the other example of the connector apparatus for an electrical resistance measurement which concerns on this invention. It is sectional drawing for description which shows the outline of the structure in the 1st example of the electrical resistance measuring apparatus of the circuit board based on this invention with a to-be-inspected circuit board. It is sectional drawing for description which expands and shows the principal part of the electrical resistance measuring apparatus of the circuit board of a 1st example. It is explanatory drawing which shows typically the circuit for a voltage measurement formed with the electrical resistance measuring apparatus of the circuit board of a 1st example. It is sectional drawing for description which shows the outline of the structure in the 2nd example of the electrical resistance measuring apparatus of the circuit board based on this invention with a to-be-inspected circuit board. It is sectional drawing for description which expands and shows the principal part of the electrical resistance measuring apparatus of the circuit board of a 2nd example. It is explanatory drawing which shows typically the circuit for a voltage measurement formed with the electrical resistance measuring apparatus of the circuit board of a 2nd example. It is a schematic diagram of the apparatus which measures the electrical resistance between the electrodes in a circuit board with the probe for electric current supply, and the probe for voltage measurement. In the conventional electrical resistance measuring device of a circuit board, it is explanatory drawing which shows the state by which the electrode for electric current supply and the electrode for a voltage measurement are arrange | positioned appropriately on to-be-inspected electrode. FIG. 10 is an explanatory diagram showing a state in which a current supply electrode and a voltage measurement electrode are arranged in a misaligned state on an electrode to be inspected in a conventional circuit board electrical resistance measurement device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Circuit board to be inspected 2 Electrode to be inspected on one side 3 Electrodes to be inspected on the other side 4a, 4b Circuit 5 Anisotropic conductive sheet 10 Connector for electrical resistance measurement 11 Insulating substrate 12 Electrode set for connection 13 Electrode for current supply 14 Voltage Measurement electrode 15 Relay electrode 16 Wiring part 20 Anisotropic conductive elastomer layer 20A Elastomer material layer 20B Elastomer layer 21 Conductive path forming part 21A Conductive elastomer layer 22 Insulating part 22A Insulating part material layer 23 Projecting part 23A Polymer substance Forming material 25 Connector device 26 for measuring electric resistance 26 Releasable support plate 27 Metal thin layer 28 Resist layer 28a Opening 29 Metal mask 30 Upper mold 31 Ferromagnetic substrate 32 Ferromagnetic layer 33 Nonmagnetic layer 35 Lower mold 36 Strong Magnetic substrate 37 Ferromagnetic layer 38 Nonmagnetic layer 40 Upper side adapter 41 One side inspection circuit board 42 Inspection electrode 43 Terminal electrode 44 First upper side anisotropic conductive sheet 45 Second upper side anisotropic conductive sheet 48 Electrode plate 49 Standard array electrode 50 Lower side adapter 51 Circuit board 52 for inspection on the other side Inspection electrode 53 Terminal electrode 52a Current supply test electrode 52b Voltage measurement test electrode 53a Current supply terminal electrode 53b Voltage measurement terminal electrode 55 Anisotropic conductive elastomer layer 56 Conductive path forming part 57 Insulation part 59 Tester 60 Electrode plate 61 Standard array electrode 62 Lower-side anisotropic conductive sheet 64 First lower-side anisotropic conductive sheet 65 Second lower-side anisotropic conductive sheet 90 Circuit boards 91 and 92 to be inspected 93 Power supply 94 Electric signal processor PA , PD Current supply probe PB, PC Voltage measurement probe A Current supply electrode V Voltage measurement electrode T Inspected electrode P Conductive particle Holes C1, C2, C3, C4 voltage measurement circuit

Claims (15)

Comprising an insulating substrate and a plurality of connection electrode sets arranged in accordance with a pattern corresponding to a pattern of a plurality of electrodes to be inspected on a circuit board to be inspected on the surface of the insulating substrate,
Each of the connection electrode sets is composed of three electrodes, ie, a voltage measurement electrode, a current supply electrode, and a voltage measurement electrode, which are spaced apart from each other so as to be arranged in this order . connector. Comprising an insulating substrate and a plurality of connection electrode sets arranged in accordance with a pattern corresponding to a pattern of a plurality of electrodes to be inspected on a circuit board to be inspected on the surface of the insulating substrate,
Each of the connection electrode sets is composed of three electrodes, that is, a current supply electrode, a voltage measurement electrode, and a current supply electrode, which are arranged apart from each other in this order . connector. Each of the current supply electrode and the voltage measurement electrode in the connection electrode set has an elongated shape in a direction perpendicular to the direction in which these electrodes are arranged. The connector for electrical resistance measurement as described . 4. The relay electrode according to claim 1, wherein a plurality of relay electrodes electrically connected to either the current supply electrode or the voltage measurement electrode are disposed on the back surface of the insulating substrate. for measurement of electric resistance connector of crab described. The electrical resistance measuring connector according to claim 4, further comprising a relay electrode electrically connected to the plurality of current supply electrodes . A connector for measuring electrical resistance according to any one of claims 1 to 5, and an anisotropic conductive elastomer layer integrally laminated on a surface of the connector for measuring electrical resistance. Connector device for electrical resistance measurement. The anisotropic conductive elastomer layer is disposed on the surface of each of the current supply electrode and the voltage measurement electrode, and a plurality of conductive path forming portions extending in the thickness direction, and the conductive path forming portions are insulated from each other. The electrical resistance measuring connector device according to claim 6, further comprising an insulating portion. 8. The electrical resistance measuring connector device according to claim 7, wherein the conductive path forming portion in the anisotropic conductive elastomer layer is contained in a state in which the conductive particles exhibiting magnetism are aligned in the thickness direction. . A method of manufacturing the electrical resistance measuring connector device according to claim 8,
6. Conductive particles exhibiting magnetism are contained in a liquid polymer material-forming material that is cured to become an elastic polymer material on the surface of the electrical resistance measurement connector according to claim 1. Forming an elastomer material layer, and against this elastomer material layer, a magnetic field having a strength greater than that of the other portions in the portion located on the surface of the region where the connection electrode set of the electrical resistance measurement connector is formed In the thickness direction, the elastomer material layer is cured to magnetize the portion of the electrical resistance measurement connector located on the surface of the region where the connection electrode set is formed. Forming an elastomer layer contained in an oriented state so that the conductive particles shown are aligned in the thickness direction;
In the part containing the conductive particles in the elastomer layer, a part located on the surface of the region between the electrodes in the connection electrode set is removed to form a hole, and then the hole is cured to the hole. A method of manufacturing a connector device for measuring electrical resistance, comprising: filling a liquid polymer substance-forming material that becomes an elastic polymer substance and curing the polymer substance-forming material. A circuit board electrical resistance measuring device for measuring electrical resistance of a circuit board having electrodes on at least one surface,
The electrical resistance of a circuit board comprising the electrical resistance measuring connector according to any one of claims 1 to 5, wherein the electrical resistance measuring connector is disposed on one surface side of a circuit board to be inspected. measuring device. A circuit board electrical resistance measuring device for measuring electrical resistance of a circuit board having electrodes on at least one surface,
The electrical resistance measurement connector according to claim 4 or 5, wherein the electrical resistance measurement connector is disposed on one side of the circuit board to be inspected to measure electrical resistance.
For inspection on one surface side, which has an inspection electrode arranged on the back surface of the electrical resistance measurement connector via an anisotropic conductive sheet and arranged on the front surface according to a pattern corresponding to the pattern of the relay electrode in the electrical resistance measurement connector A circuit board electrical resistance measuring device comprising a circuit board. A circuit board electrical resistance measuring device for measuring electrical resistance of a circuit board having electrodes on both sides,
A circuit board for inspecting the other side arranged on the other side of the circuit board to be inspected for measuring electrical resistance;
The other surface side inspection circuit boards are arranged on the same surface on the same other surface side inspected electrodes, which are arranged to be spaced apart from each other corresponding to the other surface side inspected electrodes of the circuit board to be inspected. 12. The circuit board electrical resistance measurement device according to claim 10, wherein a current supply test electrode and a voltage measurement test electrode are formed to be electrically connected. A circuit board electrical resistance measuring device for measuring electrical resistance of a circuit board having electrodes on both sides,
The electrical resistance measurement connector according to any one of claims 1 to 5, wherein the electrical resistance measurement connector is disposed on one surface side of a circuit board to be inspected to measure electrical resistance.
6. The electrical resistance measuring connector according to claim 1, which is disposed on the other surface side of the circuit board to be inspected.
An electrical resistance measuring device for a circuit board, comprising: A circuit board electrical resistance measuring device for measuring electrical resistance of a circuit board having electrodes on both sides,
The electrical resistance measurement connector according to claim 4 or 5, wherein the electrical resistance measurement connector is disposed on one side of the circuit board to be inspected to measure electrical resistance.
For inspection on one side, which has inspection electrodes arranged on the front surface according to a pattern corresponding to the pattern of the relay electrode in the electric resistance measurement connector, arranged on the back surface of the electrical resistance measurement connector via an anisotropic conductive sheet A circuit board;
The electrical resistance measurement connector according to claim 4 or 5, which is disposed on the other surface side of the circuit board to be inspected;
The other side inspection having the inspection electrode arranged on the front surface according to the pattern corresponding to the pattern of the relay electrode in the electric resistance measurement connector arranged on the back surface of the electric resistance measurement connector via an anisotropic conductive sheet Circuit board and
An electrical resistance measuring device for a circuit board, comprising: The electrical resistance measuring connector according to any one of claims 1 to 5 is disposed on one surface of a circuit board to be inspected for measuring electrical resistance,
At least one current supply electrode and at least one voltage measurement electrode in the connection electrode set of the electrical resistance measurement connector are simultaneously electrically connected to each of the electrodes to be inspected on one side of the circuit board to be inspected. The measurement state,
In this measurement state, a current is supplied to the circuit board to be inspected via a current supply electrode in the electrical resistance measurement connector, and one of the voltage measurement electrodes electrically connected to the one surface side inspected electrode. An electrical resistance of a circuit board characterized by designating two voltage measuring electrodes and measuring the electrical resistance of the one-surface-side inspected electrode electrically connected to the designated one voltage measuring electrode Measuring method.

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