JPWO2007026663A1 - Circuit board inspection apparatus, circuit board inspection method, and anisotropic conductive connector - Google Patents

Abstract

A circuit board inspection apparatus and a circuit board inspection method capable of performing a highly reliable circuit board electrical inspection even for a circuit board having a small size and pitch or separation distance of electrodes to be inspected and obtaining high inspection efficiency An anisotropic conductive connector is also disclosed. The inspection apparatus measures an inspection target electrode (hereinafter referred to as an “inspected electrode”) on an inspection target circuit board (hereinafter referred to as an “inspected substrate”) and an inspection electrode formed so as to correspond to the inspection target electrode. Inspecting the substrate to be inspected by electrically connecting through an anisotropic conductive elastomer sheet (hereinafter referred to as “conductive sheet”) arranged so as to be in contact with the electrode to be inspected. An anisotropic conductive connector having a sheet supported on a long film-like support, a moving mechanism for moving the connector, and one of a plurality of conductive sheets constituting the connector as an electrode to be inspected and an inspection electrode To form a measurement state.

Description

  The present invention relates to a circuit board inspection apparatus, a circuit board inspection method, and an anisotropic conductive connector.

  Generally, circuit boards for configuring or mounting electronic components such as package LSIs such as BGA and CSP, MCM, and other integrated circuit devices are mounted before or after assembling the electronic components. Previously, it is necessary to confirm that the wiring pattern of the circuit board has the desired performance, and for that purpose, the electrical characteristics are inspected. As an inspection apparatus for inspecting such a circuit board, a plurality of test circuit boards and a plurality of test electrodes arranged so as to correspond to a plurality of test target electrodes of the circuit board to be inspected are measured in a measurement state. There has been known one having a configuration in which an anisotropic conductive elastomer sheet is interposed so as to be in contact with an inspection target electrode and an electrical inspection of the inspection target circuit board is performed (for example, see Patent Document 1).

  The anisotropic conductive elastomer sheet used in such a circuit board inspection apparatus is one that exhibits conductivity only in the thickness direction, or a pressure conduction that exhibits conductivity only in the thickness direction when pressed in the thickness direction. It has a conductive part and can achieve a compact electrical connection without using soldering or mechanical fitting, absorbs mechanical shocks and strains, and is soft. Since it has features such as being connectable, it uses these features to function as a connector for achieving electrical connection.

On the other hand, in recent years, in a circuit board, in order to obtain a high integration rate, the electrode size and pitch or the distance between electrodes tends to be small.
In such an inspection apparatus that uses a circuit board as an inspection target, in order to reliably electrically connect the inspection target electrode of the inspection target circuit board to the inspection electrode of the inspection circuit board corresponding to the inspection target electrode. In addition, the anisotropic conductive elastomer sheet achieves electrical connection to each of the electrodes in a state where necessary insulation is ensured between the adjacent electrodes even for a connection object having a small separation distance between the adjacent electrodes. There is a need for high performance, i.e. high resolution. Thus, the anisotropic conductive elastomer sheet has a small thickness in order to improve resolution.

  However, the anisotropic conductive elastomer sheet becomes less durable against repeated use as its thickness decreases, and as a result, in an inspection apparatus equipped with a thin anisotropic conductive elastomer sheet, it is frequently anisotropic. Replacement of the conductive elastomer sheet is required, and the replacement work of the anisotropic conductive elastomer sheet is provided on the surface so that the anisotropic conductive elastomer sheet to be replaced comes into contact with the inspection target electrode on the inspection target circuit board. The anisotropic conductive elastomer sheet is used as a component in addition to the anisotropic conductive elastomer sheet itself. For example, the adapter device is removed and the adapter device is incorporated into the inspection device. This anisotropic conductive elastomer is required because Since that would take a long time to replacement of over preparative, inspection efficiency of the circuit board is reduced, there is a problem in that.

JP-A-3-183974

The present invention has been made based on the above circumstances, and its purpose is to perform electrical inspection of a highly reliable circuit board even for a circuit board having a small size and pitch or separation distance of electrodes to be inspected. It is another object of the present invention to provide a circuit board inspection apparatus capable of performing the above-mentioned and obtaining high inspection efficiency.
Another object of the present invention is to enable highly reliable circuit board electrical inspection and obtain high inspection efficiency even for a circuit board having a small size and pitch or separation distance of electrodes to be inspected. It is to provide an inspection method.
Still another object of the present invention is to provide an anisotropic conductive connector used in the circuit board inspection apparatus described above.

The circuit board inspection apparatus according to the present invention includes a plurality of inspection target electrodes of a circuit board to be inspected and a plurality of inspection electrodes formed to correspond to each of the inspection target electrodes in a measurement state. In a circuit board inspection apparatus that performs an electrical inspection of the circuit board to be inspected by electrically connecting through an anisotropic conductive elastomer sheet arranged to contact the target electrode,
An anisotropic conductive connector having a structure in which a plurality of anisotropic conductive elastomer sheets are supported by a long film-like support, and a moving mechanism for moving the anisotropic conductive connector;
By interposing an anisotropic conductive elastomer sheet of any one of a plurality of anisotropic conductive elastomer sheets constituting the anisotropic conductive connector between the inspection target electrode and the inspection electrode of the inspection target circuit board A measurement state is formed.

  In the circuit board inspection apparatus of the present invention, the anisotropically conductive connector has a plurality of openings formed along the longitudinal direction of the long film-like support, each of the plurality of anisotropically conductive elastomer sheets. It is preferable that it is the structure of arrange | positioning so that it may block.

The circuit board inspection apparatus according to the present invention includes a plurality of inspection target electrodes of a circuit board to be inspected and a plurality of inspection electrodes formed to correspond to each of the inspection target electrodes in a measurement state. In a circuit board inspection apparatus that performs an electrical inspection of the circuit board to be inspected by electrically connecting through an anisotropic conductive elastomer sheet arranged to contact the target electrode,
A long anisotropic conductive elastomer sheet capable of forming a plurality of inspection execution regions corresponding to the inspection target electrode region in which a plurality of inspection target electrodes are disposed on each of the inspection target circuit boards is provided at each of both end portions thereof. Comprising an anisotropic conductive connector configured to be supported by a long film-like support, and a moving mechanism for moving the anisotropic conductive connector,
A measurement state is formed by interposing an anisotropic conductive elastomer sheet constituting an anisotropic conductive connector between an inspection object electrode and an inspection electrode of an inspection target circuit board.

  In the circuit board inspection apparatus of the present invention, it is preferable that the moving mechanism includes a rotatable winding shaft around which the anisotropic conductive connector is wound and a winding shaft rotated by a driving source.

The circuit board inspection method of the present invention uses the above-described circuit board inspection apparatus,
One anisotropic conductive elastomer sheet of a plurality of anisotropic conductive elastomer sheets constituting the anisotropic conductive connector is interposed between the inspection target electrode and the inspection electrode of the circuit board to be inspected and measured The circuit board is electrically inspected by forming a state.

The anisotropic conductive connector of the present invention is characterized by comprising a plurality of anisotropic conductive elastomer sheets and a long film-like support for supporting the plurality of anisotropic conductive elastomer sheets. .
This anisotropically conductive connector is preferably arranged so that each of the plurality of anisotropically conductive elastomer sheets closes a plurality of openings formed along the longitudinal direction of a long film-like support. .

  The anisotropically conductive connector of the present invention comprises a long film-like anisotropically conductive elastomer sheet and a support for supporting the anisotropically conductive elastomer sheet at each of both end portions thereof. Features.

  According to the circuit board inspection apparatus of the first aspect of the present invention, an anisotropic conductive connector having a plurality of anisotropic conductive elastomer sheets and a moving mechanism for moving the anisotropic conductive connector are provided. The anisotropic conductive elastomer sheet used for the measurement is moved by moving the anisotropic conductive connector by a moving mechanism, so that any one of a plurality of anisotropic conductive elastomer sheets constituting the anisotropic conductive connector is used. Since anisotropic conductive elastomer sheets can be selected, anisotropic conductive elastomer sheets are frequently replaced due to the small thickness of anisotropic conductive elastomer sheets that make up anisotropic conductive connectors. Even if it is necessary to perform this operation, the anisotropic conductive elastomer sheet is replaced by a moving mechanism. Since it can be performed in a short time by only an easy operation of moving the cutter, a high inspection efficiency can be obtained, and a highly reliable circuit for a circuit board having a small size and pitch or separation distance of the electrodes to be inspected An electrical inspection of the substrate can be performed.

  According to the inspection apparatus for a circuit board according to claim 3 of the present invention, the anisotropic conductive connector including a long anisotropic conductive elastomer sheet capable of forming a plurality of inspection execution regions, and the anisotropic A moving mechanism for moving the conductive connector is provided. By moving the anisotropic conductive connector by the moving mechanism, a part of the long anisotropic conductive elastomer sheet is selected as an inspection execution area for measurement. Since the anisotropic conductive elastomer sheet constituting the anisotropic conductive connector has a small thickness, the replacement work can be performed even if frequent replacement is necessary. When the anisotropic conductive connector is moved by, the part used for the measurement in the anisotropic conductive elastomer sheet is changed to another part. Since it can be carried out in a short time only by an easy operation, high inspection efficiency can be obtained, and a circuit board with a small size and pitch or separation distance of the electrode to be inspected can also be highly reliable. Inspection can be performed.

  According to the circuit board inspection method of the present invention, by using the circuit board inspection apparatus described above, a highly reliable circuit board electrical inspection is possible even for a circuit board having a small size and pitch or separation distance of electrodes to be inspected. Since the anisotropic conductive elastomer sheet can be replaced in a very short time, high inspection efficiency can be obtained.

  Since the anisotropically conductive connector of the present invention comprises a plurality of anisotropically conductive elastomer sheets or a long anisotropically conductive elastomer sheet, it is measured from among the plurality of anisotropically conductive elastomer sheets. One anisotropic conductive elastomer sheet used for the above can be selected, or a part of the long anisotropic conductive elastomer sheet can be selected and used for measurement. Can be used.

It is sectional drawing for description which shows the structure of the inspection apparatus of the circuit board which concerns on the 1st Embodiment of this invention with a circuit board to be examined. It is explanatory drawing which shows the structure of the anisotropically conductive connector which comprises the inspection apparatus of the circuit board of FIG. It is explanatory drawing which shows the cross section of the anisotropically conductive connector of FIG. It is sectional drawing for description which shows the 1st surface side molded member, 1 surface side spacer, support body, other surface side molded member, and other surface side spacer for manufacturing the anisotropically conductive connector of FIG. It is sectional drawing for description which shows the state by which the material for conductive elastomer was apply | coated to the surface of the other surface side molded member. It is sectional drawing for description which shows the state in which the conductive elastomer material layer was formed between the one surface side molded member and the other surface side molded member. It is sectional drawing for description which expands and shows the material layer for electroconductive elastomers shown in FIG. It is sectional drawing for description which shows the state which acted the magnetic field on the thickness direction with respect to the material layer for conductive elastomers shown in FIG. It is explanatory drawing which shows the anisotropically conductive connector which comprises the other example of the inspection apparatus of the circuit board of this invention. It is explanatory drawing which shows the cross section of the anisotropically conductive connector of FIG. It is sectional drawing for description which shows the structure of the inspection apparatus of the circuit board which concerns on the 3rd Embodiment of this invention with the circuit board to be examined. It is sectional drawing for description which expands and shows the upper side adapter apparatus in the inspection apparatus of the circuit board shown in FIG. It is sectional drawing for description which shows the structure of the laminated material for manufacturing a composite electrode sheet. It is sectional drawing for description which shows the state by which the opening was formed in the metal layer in a laminated material. It is sectional drawing for description which shows the state by which the through-hole was formed in the insulating sheet in a laminated material. It is sectional drawing for description which shows the structure of a composite laminated material. It is sectional drawing for description which shows the state by which the resist film was formed in the composite laminated material. It is sectional drawing for description which shows the state by which the rigid conductor was formed in the through-hole of the insulating sheet in a composite laminated material. It is sectional drawing for description which shows the state from which the resist film was removed from the composite laminated material. It is sectional drawing for description which shows the structure of the inspection apparatus of the circuit board which concerns on the 4th Embodiment of this invention with the circuit board to be examined. It is sectional drawing for description which expands and shows the upper side adapter apparatus in the inspection apparatus of the circuit board shown in FIG. It is a top view which expands and shows the principal part of the electrode sheet in the inspection apparatus of the circuit board shown in FIG. It is sectional drawing for description which shows the laminated material for obtaining an electrode sheet. It is sectional drawing for description which shows the state by which the through-hole was formed in the laminated material. It is sectional drawing for description which shows the state by which the relay electrode and the short circuit part were formed in the insulating sheet in a laminated material. It is sectional drawing for description which shows the state by which the ring-shaped electrode and the wiring part were formed in the insulating sheet in a laminated material. FIG. 22 is an explanatory cross-sectional view illustrating a state in which the upper surface inspection electrode of the circuit board to be inspected is electrically connected to the electrode pins of the inspection electrode apparatus in the circuit board inspection apparatus illustrated in FIG. 21. It is sectional drawing for description which shows the modification of the anisotropically conductive elastomer sheet in an anisotropically conductive cochter.

Explanation of symbols

1 Circuit board to be inspected (circuit board to be inspected)
2 Upper surface inspection target electrode (upper surface inspection electrode)
3 Lower surface inspection target electrode (lower surface inspection electrode)
18 Holder 19 Positioning Pin 21A Upper Side Adapter Device 21B Lower Side Adapter Device 22A Upper Side Inspection Head 22B Lower Side Inspection Head 23A, 23B Inspection Electrode Devices 24A, 24B Inspection Electrodes 25A, 25B Anisotropically Conductive Elastomer Sheets 26A, 26B 27A, 27B Column 28A Upper side support plate 28B Lower side support plate 29A, 29B Connector 31A, 31B Adapter body 32A, 32B Connection electrode 33A, 33B Terminal electrode 35A, 35B Anisotropic conductive elastomer sheet 36A, 36B Anisotropic conductivity Elastomer sheet 37 Conductive path forming portion 38 Insulating portions 40A, 40B Anisotropic conductive connector 41 Anisotropic conductive elastomer sheet 41a Conductive path forming portion 41b Insulating portion 42 Support body 43 Opening 44 Sprocket hole 46 Winding shaft 47 Scraping shaft 51A One side molding member 51B Other side molding member 52A One side spacer 52B Other side spacer 53A, 53B Opening 54 Pressure roll device 55 Pressure roll 56 Support roll 58 Conductive elastomer material layer 59 Conductive elastomer Material 61 Anisotropic conductive elastomer sheet 62 Support body 64 Sprocket holes 70A, 70B Composite electrode sheet 70a Composite laminated material 70b Laminated material 71 Insulating sheet 71H Through hole 72 Core electrode 72a Body 72b Terminal part 73A Metal layer 73B Metal thin Layer 73K Opening 74 Resist film 74H Pattern hole 80A, 80B Electrode sheet 80a Laminated material 80H Through hole 81 Insulating sheet 82 Through hole 83 Ring electrode 84 Relay electrode 85 Short circuit part 86 Wiring part 86a Metal layer 88 Anisotropic conductive elastomer sheet 89 Through hole 90A, 90B Composite electrode sheet 91 Insulating sheet 92 Through hole 95 Core electrode for inspection 95a Body part 95b Terminal part 96 Core electrode for connection 96a Body part 96b Terminal part P Conductive particle E Inspection execution area

Hereinafter, embodiments of the present invention will be described in detail.
<First Embodiment>
FIG. 1 is an explanatory cross-sectional view showing the configuration of a circuit board inspection apparatus according to a first embodiment of the present invention, together with a circuit board to be inspected.
This circuit board inspection apparatus has a plurality of upper surface inspection target electrodes (hereinafter also referred to as “upper surface inspection electrodes”) 2 on the upper surface and a plurality of lower surface inspection target electrodes (hereinafter referred to as “lower surface inspection electrodes”) on the lower surface. .) A circuit board to be inspected (hereinafter, also referred to as “circuit board to be inspected”) 1 such as a printed circuit board on which 3 is formed, which performs an electrical inspection such as an open shot test, The test target area 18 is held on the upper surface side of the circuit board 1 to be inspected, which is held in the test execution area E by the position 18 and arranged at an appropriate position in the test execution area E by the positioning pins 19 provided on the holder 18. Upper side inspection head 22A provided with inspection electrode device 23A having a plurality of inspection electrodes 24A formed in the same number so as to correspond to each of upper surface inspection electrodes 2 of circuit board 1 An inspection electrode device 23B having a plurality of inspection electrodes 24B formed on the lower surface side of the circuit board 1 to be inspected and formed in the same number so as to correspond to each of the lower surface inspection electrodes 3 of the circuit board 1 to be inspected. The lower inspection head 22B provided is arranged so as to face each other in the vertical direction, and the upper inspection head 22A is fixed to the upper support plate 28A disposed above by the support 27A, On the other hand, the lower inspection head 22B is fixed to a lower support plate 28B disposed below the support 27B.

Then, below the upper side inspection head 22A, in the measurement state, it is arranged so as to be in contact with the upper surface inspection electrode 2 and is in a state of being interposed between the upper surface inspection electrode 2 and the inspection electrode 24A. An upper-side adapter device 21A having a conductive elastomer sheet 41 (see FIGS. 2 and 3) is provided, while the lower-side inspection head 22B is in contact with the lower surface inspection electrode 3 in the measurement state. A lower-side adapter device 21B having an anisotropic conductive elastomer sheet 41 that is arranged so as to be interposed between the lower surface inspection electrode 3 and the inspection electrode 24B is provided.
Here, the “measurement state” means that, for example, the anisotropic conductive elastomer sheet 41 has a thickness obtained by clamping the circuit board 1 to be inspected between the upper adapter device 21A and the lower adapter device 21B. It means the state pressed in the direction.

  The upper adapter device 21A has a connection electrode in which a plurality of connection electrodes 32A are arranged on the surface (lower surface in FIG. 1) according to a specific pattern corresponding to the pattern of the upper surface inspection electrode 2 of the circuit board 1 to be inspected. An adapter main body 31A made of a multilayer wiring board in which a region is formed is provided. On the back surface (upper surface in FIG. 1) of this adapter main body 31A, for example, pitches are 0.2 mm, 0.3 mm, 0.45 mm, 0. A plurality of terminal electrodes 33A are arranged according to lattice point positions of 5 mm, 0.75 mm, 0.8 mm, 1.06 mm, 1.27 mm, 1.5 mm, 1.8 mm or 2.54 mm, and each of these terminal electrodes 33A Are electrically connected to the connection electrode 32A by an internal wiring portion (not shown).

The upper adapter device 21A has a different configuration in which a plurality of anisotropic conductive elastomer sheets 41 are supported by a long film-like support 42 (see FIGS. 2 and 3) together with the adapter main body 31A. An anisotropic conductive connector 40A and a moving mechanism for moving the anisotropic conductive connector 40A are provided.
In the measurement state, the upper-side adapter device 21A has any one of the anisotropically conductive elastomer sheets 41 constituting the anisotropically conductive connector 40A on the electrode region for connection on the surface of the adapter body 31A. In this state, the anisotropic conductive connector 40A is fixed to the adapter main body 31A by appropriate means (not shown).

  The lower adapter device 21B has a connection electrode in which a plurality of connection electrodes 32B are arranged on the surface (upper surface in FIG. 1) according to a specific pattern corresponding to the pattern of the lower surface inspection electrode 3 of the circuit board 1 to be inspected. An adapter main body 31B made of a multilayer wiring board in which regions are formed is provided. On the back surface (lower surface in FIG. 1) of this adapter main body 31B, for example, pitches are 0.2 mm, 0.3 mm, 0.45 mm,. A plurality of terminal electrodes 33B are arranged according to grid point positions of 5 mm, 0.75 mm, 0.8 mm, 1.06 mm, 1.27 mm, 1.5 mm, 1.8 mm or 2.54 mm, and each of these terminal electrodes 33B Are electrically connected to the connection electrode 32B by an internal wiring portion (not shown).

The lower-side adapter device 21B has a different configuration in which a plurality of anisotropic conductive elastomer sheets 41 are supported by a long film-like support body 42 (see FIGS. 2 and 3) together with the adapter main body 31B. An anisotropic conductive connector 40B and a moving mechanism for moving the anisotropic conductive connector 40B are provided.
In the lower adapter device 21B, in the measurement state, any one anisotropic conductive elastomer sheet 41 constituting the anisotropic conductive connector 40B is provided on the connection electrode region on the surface of the adapter main body 31B. In this state, the anisotropic conductive connector 40B is fixed to the adapter main body 31B by appropriate means (not shown).

As shown in FIGS. 2 and 3, the anisotropic conductive connectors 40A and 40B constituting the upper adapter device 21A and the upper adapter device 21B each have a plurality of openings 43 at equal intervals along the longitudinal direction thereof. The formed long film-like support body 42 and the anisotropic conductivity supported by being integrally bonded to the support body 42 are arranged so as to close the plurality of openings 43 of the support body 42. It has a configuration comprising an elastomer sheet 41.
In the example of the figure, the anisotropic conductive elastomer sheet 41 is arranged in a state of protruding from each of one surface (upper surface in FIG. 3) and the other surface (lower surface in FIG. 3) of the support body 42. Sprocket holes 44 made of circular holes arranged at equal intervals along the longitudinal direction are formed in both edge portions of 42.

  The opening 43 of the support 42 includes an electrode region to be inspected in which the upper surface inspected electrode 2 or the lower surface inspected electrode 3 in the circuit substrate 1 to be inspected, and connection electrode regions in each of the adapter bodies 31A and 31B. It is preferable that the size is larger than that of the connection electrode region.

As a material constituting the support 42, a metal material or a non-metal material can be used.
Specific examples of metal materials include invar-type alloys such as stainless steel and invar, Elinvar-type alloys such as Erinvar, magnetic metal alloys such as Super Invar, Kovar, and 42 alloys, or alloy steel, gold, silver, copper, iron, nickel , Cobalt, or alloys thereof.
Specific examples of non-metallic materials include resin materials such as liquid crystal polymers, polyimide resins, polyester resins, polyaramid resins, polyamide resins, glass fiber reinforced epoxy resins, glass fiber reinforced polyester resins, and glass fiber reinforced polyimide resins. Examples thereof include a fiber-reinforced resin material such as an epoxy resin, and a composite resin material containing an inorganic material such as alumina or poron nitride as a filler in an epoxy resin.
Moreover, it is preferable that the thickness of the support body 42 is 10-250 micrometers, More preferably, it is 15-200 micrometers.

  The anisotropic conductive elastomer sheet 41 is in a state in which conductive particles P (see FIG. 8) exhibiting magnetism are aligned in the thickness direction to form a chain in an insulating elastic polymer material, and The chain of the conductive particles P is contained in a state dispersed in the plane direction.

As the elastic polymer material forming the anisotropic conductive elastomer sheet 41, a polymer material having a crosslinked structure is preferable. Various materials can be used as the curable polymer substance-forming material that can be used to obtain such an elastic polymer substance. Specific examples thereof include polybutadiene rubber, natural rubber, and polyisoprene rubber. , Conjugated diene rubbers such as styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof, blocks such as styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer Examples include copolymer rubber and hydrogenated products thereof, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, and ethylene-propylene-diene copolymer rubber. In these, it is preferable to use a silicone rubber from a viewpoint of durability, a moldability, and an electrical property.
As the silicone rubber, those obtained by crosslinking or condensing liquid silicone rubber are preferable. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ⁻¹ sec, and may be any of a condensation type, an addition type, a vinyl group or a hydroxyl group. Good. Specific examples include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, methyl phenyl vinyl silicone raw rubber, and the like.
The silicone rubber preferably has a molecular weight Mw (referred to as a standard polystyrene-converted weight average molecular weight; the same shall apply hereinafter) of 10,000 to 40,000. Moreover, since favorable heat resistance is obtained in the anisotropically conductive elastomer sheet 41 obtained, the molecular weight distribution index (the value of the ratio Mw / Mn between the standard polystyrene equivalent weight average molecular weight Mw and the standard polystyrene equivalent number average molecular weight Mn) Is preferably 2 or less.

As the conductive particles P contained in the anisotropic conductive elastomer sheet 41, the conductive particles exhibiting magnetism are used because the particles can be easily aligned in the thickness direction by a method described later. Specific examples of such conductive particles include particles of metal having magnetism such as iron, cobalt, nickel, particles of these alloys, particles containing these metals, or these particles as core particles, The core particles are formed by plating the surface of the core particles with a metal having good conductivity such as gold, silver, palladium, rhodium, or non-magnetic metal particles or inorganic particles such as glass beads or polymer particles. The surface of the particles may be plated with a conductive magnetic metal such as nickel or cobalt.
Among these, it is preferable to use nickel particles as core particles and the surfaces thereof plated with gold having good conductivity.
The means for coating the surface of the core particles with the conductive metal is not particularly limited, and for example, chemical plating or electrolytic plating, sputtering, vapor deposition or the like is used.

When the conductive particles P used are those in which the surface of the core particles is coated with a conductive metal, good conductivity can be obtained. Therefore, the coverage of the conductive metal on the particle surface (the surface area of the core particles) The ratio of the covering area of the conductive metal with respect to is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%.
Further, the coating amount of the conductive metal is preferably 0.5 to 50% by mass of the core particle, more preferably 2 to 30% by mass, further preferably 3 to 25% by mass, and particularly preferably 4 to 20%. % By mass. When the conductive metal to be coated is gold, the coating amount is preferably 0.5 to 30% by mass of the core particles, more preferably 2 to 20% by mass, and further preferably 3 to 15%. % By mass.

Moreover, it is preferable that the number average particle diameter of the electroconductive particle P is 3-20 micrometers, More preferably, it is 5-15 micrometers. When this number average particle diameter is too small, it may be difficult to orient the conductive particles P in the thickness direction in the production method described later. On the other hand, when the number average particle diameter is excessive, it may be difficult to obtain an anisotropic conductive elastomer sheet with high resolution.
The particle size distribution (Dw / Dn) of the conductive particles P is preferably 1 to 10, more preferably 1.01 to 7, still more preferably 1.05 to 5, particularly preferably 1.1. ~ 4.
Further, the shape of the conductive particles P is not particularly limited, but spherical particles, star-shaped particles, or agglomerated particles 2 can be easily dispersed in the polymer substance-forming material. Secondary particles are preferred.
Further, as the conductive particles P, those whose surfaces are treated with a coupling agent such as a silane coupling agent or a lubricant can be appropriately used. By treating the particle surface with a coupling agent or a lubricant, the durability of the resulting anisotropic conductive elastomer sheet is improved.

  Such conductive particles P are preferably contained in the anisotropic conductive elastomer sheet 41 in a volume fraction of 10 to 40%, particularly 15 to 35%. When this ratio is too small, an anisotropic conductive elastomer sheet having sufficiently high conductivity in the thickness direction may not be obtained. On the other hand, if this ratio is excessive, the resulting anisotropic conductive elastomer sheet tends to be fragile, and the elasticity necessary for the anisotropic conductive elastomer sheet may not be obtained.

  Moreover, it is preferable that the thickness of the anisotropically conductive elastomer sheet 41 is 5-200 micrometers, More preferably, it is 10-100 micrometers. When this thickness is too small, sufficient unevenness absorbing ability may not be obtained. On the other hand, if this thickness is excessive, high resolution may not be obtained.

The anisotropic conductive connectors 40A and 40B can be manufactured as follows.
First, as shown in FIG. 4, a long film-like support body 42 in which a plurality of openings 43 are formed at equal intervals along the longitudinal direction thereof, and a sheet-like one-side molding member 51 </ b> A and the other-surface side, respectively. The anisotropically conductive elastomer sheet has openings 53A and 53B having shapes conforming to the planar shape of the anisotropically conductive elastomer sheet 41 according to the molding member 51B and the respective anisotropically conductive connectors 40A and 40B. 41. A frame-like one-side spacer 52A and other-side spacer 52B having a thickness corresponding to the protruding height of 41 from the support 42 are prepared, and a liquid polymer material is formed that is cured to become an elastic polymer material. A conductive elastomer material is prepared in which conductive particles are contained in the material.
Then, as shown in FIG. 5, the other side spacer 52B is disposed on the molding surface (the upper surface in FIG. 5) of the other side molding member 51B, and the support 42 is placed on the other side spacer 52B. The opening 53B of the surface side spacer 52B and the opening 43 of the support 42 are arranged so as to overlap each other, and the one surface side spacer 52A is arranged on the support 42, and the opening 43 of the support 42 and the opening 53A of the one surface side spacer 52A are arranged. The conductive elastomer prepared in a space formed by overlapping and having an opening 53B of the other side spacer 52B, an opening 43 of the support 42 and an opening 53A of the one side spacer 52A on the molding surface of the other side molding member 51B. The material 59 is applied, and then the one-surface side molded member 51A is electrically conductive on the conductive elastomer material 59 with its molding surface (lower surface in FIG. 5) conductive. Arranged so as to contact with the elastomeric material 59.
In the above, as the one-surface-side molded member 51A and the other-surface-side molded member 51B, resin sheets made of polyimide resin, polyester resin, acrylic resin, or the like can be used.
Moreover, it is preferable that the thickness of the resin sheet which comprises 51 A of 1 surface side shaping | molding members and the other surface side shaping | molding member 51B is 50-500 micrometers, More preferably, it is 75-300 micrometers. If this thickness is less than 50 μm, the strength required for the molded member may not be obtained. On the other hand, when the thickness exceeds 500 μm, it may be difficult to apply a magnetic field having a required strength to the conductive elastomer material layer.

Next, as shown in FIG. 6, using the pressure roll device 54 including the pressure roll 55 and the support roll 56, the conductive elastomer material 59 is pinched by the one side molding member 51 </ b> A and the other side molding member 51 </ b> B. Thus, the conductive elastomer material layer 58 having a required thickness is formed between the one-surface-side molded member 51A and the other-surface-side molded member 51B. In the conductive elastomer material layer 58, as shown in an enlarged view in FIG. 7, the conductive particles P are contained in a uniformly dispersed state.
After that, for example, a pair of electromagnets are arranged on the back surface (upper surface in FIG. 6) of the one-surface-side molded member 51A and the back surface (lower surface in FIG. 6) of the other-surface-side molded member 51B, and the electromagnets are operated to make the A parallel magnetic field is applied in the thickness direction of the elastomer material layer 58. As a result, in the conductive elastomer material layer 58, the conductive particles P dispersed in the conductive elastomer material layer 58 maintain a state of being dispersed in the plane direction as shown in FIG. However, a plurality of conductive particles P, which are aligned in the thickness direction, are formed so as to be dispersed in the plane direction.
In this state, the conductive elastomer material layer 58 is cured so that the conductive particles P are aligned in the thickness direction in the elastic polymer substance, and the conductive particles P are Anisotropic conductive connectors 40A and 40B having a plurality of anisotropically conductive elastomer sheets 41 that are contained in a state where the chain is dispersed in the plane direction are supported by the support 42 are manufactured.

In the above, the curing process of the conductive elastomer material layer 58 can be performed while the parallel magnetic field is applied, but can also be performed after the parallel magnetic field is stopped. The magnitude of the parallel magnetic field applied to the conductive elastomer material layer 58 is preferably 0.02 to 2.5 Tesla on average.
The curing process of the conductive elastomer material layer 58 is appropriately selected depending on the material to be used, but is usually performed by a heating process. The specific heating temperature and heating time are appropriately selected in consideration of the type of polymer material constituting the conductive elastomer material layer 58, the time required for the movement of the conductive particles P, and the like.

The moving mechanism includes a rotatable winding shaft 46 around which each of the anisotropically conductive connectors 40A and 40B is wound, and a winding shaft 47 rotated by a drive source. The anisotropically conductive connectors 40A and 40B are wound around the winding shaft. 46 and the winding shaft 47 are formed so as to extend along the surfaces of the adapter bodies 31A and 31B. The winding shaft 46 and the winding shaft 47 are connected to both ends of the adapter bodies 31A and 31B. It arrange | positions so that it may oppose through the main bodies 31A and 31B.
In this moving mechanism, the anisotropic conductive connectors 40A and 40B wound around the winding shaft 46 are rotated by driving the winding shaft 47, thereby winding the anisotropic conductive connector. 40A and 40B are moved along the movement path, and one anisotropic conductive elastomer sheet 41 of the plurality of anisotropic conductive elastomer sheets 41 is positioned immediately above the connection electrode region on the surface of the adapter main bodies 31A and 31B. In this state, the movement is stopped, whereby the one anisotropic conductive elastomer sheet 41 is arranged at a predetermined position.
In the example shown in the figure, the winding shaft 46 and the winding shaft 47 have sprocket holes at the same pitch as the sprocket holes 44 formed in the support 42 of the anisotropic conductive elastomer sheet 41 on both sides in the width direction. A conical sprocket (not shown) into which 44 is engaged is formed so as to protrude, and each of the winding shaft 46 and the winding shaft 47 has a sprocket hole in the support 42 in the anisotropic conductive elastomer sheet 41. The anisotropic conductive elastomer sheet 41 is wound by 44 engaging with the sprocket of the winding shaft 46 or the winding shaft 47.

The upper inspection head 22A is composed of a plate-shaped inspection electrode device 23A and an anisotropically conductive elastomer sheet 25A having elasticity that is fixed to the lower surface of the inspection electrode device 23A.
The inspection electrode device 23A has a plurality of pin-shaped inspection electrodes 24A arranged at lattice point positions having the same pitch as the terminal electrodes 33A of the upper adapter device 21A on the lower surface thereof. Each is electrically connected to a connector 29A provided on the upper support plate 28A by an electric wire 26A, and further electrically connected to an inspection circuit (not shown) of the tester via this connector 29A.
The anisotropic conductive elastomer sheet 25A is formed by forming a conductive path forming portion that forms a conductive path only in the thickness direction. As such an anisotropically conductive elastomer sheet 25A, one in which each conductive path forming portion is formed so as to protrude in the thickness direction on at least one surface is preferable in terms of exhibiting high electrical contact stability.

The lower inspection head 22B is composed of a plate-shaped inspection electrode device 23B and an anisotropically conductive elastomer sheet 25B having elasticity that is fixedly disposed on the upper surface of the inspection electrode device 23B.
The inspection electrode device 23B has a plurality of pin-like inspection electrodes 24B arranged on the upper surface thereof at lattice point positions having the same pitch as the terminal electrodes 33B of the lower adapter device 21B. Each is electrically connected to a connector 29B provided on the lower support plate 28B by an electric wire 26B, and further electrically connected to an inspection circuit (not shown) of the tester via this connector 29B.
The anisotropic conductive elastomer sheet 25B is formed by forming a conductive path forming portion that forms a conductive path only in the thickness direction, similarly to the anisotropic conductive elastomer sheet 25A related to the upper inspection head 22A. As such an anisotropically conductive elastomer sheet 25B, one in which each conductive path forming portion is formed so as to protrude in the thickness direction on at least one surface is preferable in terms of exhibiting high electrical contact stability.

In such a circuit board inspection apparatus, the circuit board 1 to be inspected is held in the inspection execution area E by the holder 18 and is different in each of the upper side adapter device 21A and the lower side adapter device 21B. Any one of anisotropic conductive elastomer sheets 41 constituting the directionally conductive connectors 40A and 40B is arranged and fixed so as to be in contact with the adapter main bodies 31A and 31B in the connection electrode region, and in this state, the upper side support plate Each of the 27A and the lower support plate 27B moves in a direction approaching the circuit board 1 to be inspected, whereby the circuit board 1 to be inspected is clamped by the upper inspection head 22A and the lower inspection head 22B.
In this state, the upper surface inspection electrode 2 of the circuit board 1 to be inspected is electrically connected to the connection electrode 32A in the upper-side adapter device 21A via the one anisotropic conductive elastomer sheet 41 in the anisotropic conductive connector 40A. The terminal electrode 33A of the upper adapter device 21A is electrically connected to the inspection electrode 24A of the inspection electrode device 23A via the anisotropic conductive elastomer sheet 25A. On the other hand, the lower surface inspection electrode 3 of the circuit board 1 to be inspected is electrically connected to the connection electrode 32B in the lower-side adapter device 21B through one anisotropic conductive elastomer sheet 41 in the anisotropic conductive connector 40B. The terminal electrode 33B of the lower adapter device 21B is electrically connected to the inspection electrode 24B of the inspection electrode device 23B through the anisotropic conductive elastomer sheet 25B.

  In this way, each of the upper surface inspection electrode 2 and the lower surface inspection electrode 3 of the circuit board 1 to be inspected has the inspection electrode 24A of the inspection electrode device 23A in the upper inspection head 22A and the inspection electrode in the lower inspection head 22B. By being electrically connected to each of the test electrodes 24B of the device 23B, a state of being electrically connected to the test circuit of the tester is achieved, and a required electrical test is performed in this state.

  In this circuit board inspection device, the electrical inspection of the circuit board is repeatedly performed, so that one difference in the anisotropic conductive connectors 40A and 40B constituting each of the upper adapter device 21A and the lower adapter device 21B is obtained. When the directionally conductive elastomer sheet 41 deteriorates, the anisotropically conductive connectors 40A and 40B wound around the winding shaft 46 are moved in the direction toward the winding shaft 47 by rotating the winding shaft 47. The used anisotropically conductive elastomer sheet 41 located on the connection electrode region on the surface of the adapter main body 31A, 31B according to each of the upper-side adapter device 21A and the lower-side adapter device 21B is wound around the winding shaft 47. The used anisotropic conductive elastomer sheet An unused anisotropically conductive elastomer sheet 41 adjacent to 41 is placed on the connection electrode region and fixed by an appropriate means, thereby performing an exchange operation of the anisotropically conductive elastomer sheet 41 used for measurement. be able to.

  Therefore, according to such a circuit board inspection apparatus, the anisotropic conductive elastomer sheet used for measurement is moved by moving the anisotropic conductive connectors 40A and 40B by the moving mechanism including the winding shaft 46 and the winding shaft 47. Since any one of the anisotropically conductive elastomer sheets 41 constituting the anisotropically conductive connectors 40A and 40B can be selected, the size of the electrode to be inspected and For the circuit board having a small pitch or separation distance, the anisotropic conductive elastomer sheet 41 constituting the anisotropic conductive connectors 40A and 40B is used for the purpose of performing highly reliable electrical inspection of the circuit board. Even if it is used, the thickness of the anisotropic conductive elastomer sheet 41 It is necessary to frequently replace the anisotropic conductive elastomer sheet 41 due to its small size, but this anisotropic conductive elastomer sheet 41 is exchanged only for the anisotropic conductive elastomer sheet itself. Rather, after removing the entire adapter device including the anisotropic conductive elastomer sheet as a component, removing the used anisotropic conductive elastomer sheet from the adapter device and replacing it with an unused anisotropic conductive elastomer sheet Therefore, the adapter device is incorporated into the inspection device, and the moving mechanism does not remove and assemble the adapter device, which is necessary for the replacement work of the anisotropic conductive elastomer sheet in the conventional circuit board inspection device. Move anisotropic conductive connectors 40A and 40B to move anisotropic conductive elastomer It is possible in a short time by a simple operation of replacing only Shito 41 itself, it is possible to obtain high inspection efficiency.

<Second Embodiment>
The circuit board inspection apparatus according to the second embodiment is the same as the anisotropic conductive connectors 40A and 40B having the configuration shown in FIGS. 2 and 3 in the circuit board inspection apparatus according to the first embodiment. Instead of this, a long anisotropic conductive material capable of forming a plurality of inspection execution regions corresponding to the inspection target electrode region in which the upper surface inspection electrode 2 or the lower surface inspection electrode 3 is disposed in the circuit substrate 1 to be inspected. 1 has the same configuration as that of the circuit board inspection apparatus according to FIG. 1 except that the anisotropic elastomer sheet includes an anisotropic conductive connector configured to be supported by a long film-like support at both ends. It is what you have.

  In this circuit board inspection apparatus, each of the upper-side adapter device and the lower-side adapter device is, in the measurement state, a long, different connector that forms an anisotropic conductive connector on the connection electrode region on the surface of the adapter body. A part of the directionally conductive elastomer sheet is disposed in contact with the adapter body, and in this state, the anisotropically conductive connector is fixed to the adapter body by an appropriate means.

For example, as shown in FIGS. 9 and 10, the anisotropic conductive connector constituting the circuit board inspection apparatus includes a long anisotropic conductive elastomer sheet 61 and an anisotropic conductive elastomer sheet 61. Each of the side end portions has a structure including long film-like supports 62 and 62 which are supported by being integrally bonded by an appropriate means.
In the example shown in this figure, the anisotropic conductive elastomer sheet 61 is supported by the supports 62 and 62 on the opposite surface of the surface contacting the adapter body constituting each of the upper adapter device and the lower adapter device, that is, in the measurement state. One surface (the right surface in FIG. 10) of each of the supports 62 and 62 is supported on a surface of the circuit board to be inspected that is in contact with the upper surface inspection electrode or the lower surface inspection electrode. Sprocket holes 64 made of circular holes arranged at equal intervals along the longitudinal direction are formed at both edges of the two-way conductive connector.

  The separation distance between the supports 62 and 62 is a direction perpendicular to the moving direction of the anisotropic conductive connector in the inspection target electrode region in which the upper surface inspection electrode or the lower surface inspection electrode on the circuit board to be inspected is arranged (see FIG. 1 in the direction perpendicular to the paper surface in FIG. 1 and the length in the direction perpendicular to the moving direction of the anisotropic conductive connector of the connection electrode region of the adapter body constituting each of the upper adapter device and the lower adapter device. It is preferable that the length of the inspection target electrode region and the connection electrode region is longer than the length of the anisotropic conductive connector in the direction perpendicular to the moving direction.

As the material constituting the support body 62, the material exemplified as the material constituting the support body 42 constituting the anisotropic conductive connectors 40A and 40B according to the circuit board inspection apparatus according to the first embodiment is used. Can do.
Moreover, it is preferable that the thickness of the support body 62 is 10-250 micrometers, More preferably, it is 15-200 micrometers.

The anisotropic conductive elastomer sheet 61 has the same configuration as the anisotropic conductive elastomer sheet 41 constituting the anisotropic conductive connectors 40A and 40B according to the circuit board inspection apparatus according to the first embodiment. Used.
Moreover, it is preferable that the thickness of the anisotropically conductive elastomer sheet 61 is 5-200 micrometers, More preferably, it is 10-100 micrometers. When this thickness is too small, sufficient unevenness absorbing ability may not be obtained. On the other hand, if this thickness is excessive, high resolution may not be obtained.

  An anisotropic conductive connector having such a structure includes, for example, a long film-shaped anisotropic conductive elastomer sheet member and a support member having the same overall length as the anisotropic conductive elastomer sheet member. Prepare a sheet body in which the support member is integrally bonded to each of both end portions on one surface of the anisotropic conductive elastomer sheet member by preparing and bonding them by appropriate means. It can manufacture by forming a through-hole at equal intervals in both edge parts of the obtained sheet | seat body.

  In such a circuit board inspection apparatus, in each of the upper adapter apparatus and the lower adapter apparatus, a part of the anisotropic conductive elastomer sheet 61 constituting the anisotropic conductive connector is connected to the adapter body as an inspection execution area. In this state, the circuit board to be inspected is clamped by the upper side inspection head and the lower side inspection head, and similarly, the anisotropic conductive elastomer sheet 61 is interposed therebetween. Each of the upper surface inspection electrode and the lower surface inspection electrode of the circuit board to be inspected is electrically connected to each of the inspection electrode of the inspection electrode device in the upper side inspection head and the inspection electrode of the inspection electrode device in the lower side inspection head Then, the required electrical inspection is performed.

  In this circuit board inspection apparatus, the anisotropic conductive elastomer sheet 61 in the anisotropic conductive connector constituting each of the upper adapter device and the lower adapter device is obtained by repeatedly performing electrical inspection of the circuit board. In the case where a part has deteriorated, by rotating the winding shaft, the anisotropic conductive connector wound around the winding shaft is moved in the direction toward the winding shaft, and the upper adapter device and the lower adapter device are moved. A portion of the used anisotropically conductive elastomer sheet located on the connection electrode region on the surface of the adapter body according to each of the above is wound around the take-up shaft, and this used anisotropically conductive elastomer sheet The other part of the unused anisotropically conductive elastomer sheet 61 that continues to a part of Is arranged in connection electrode region, by fixing by appropriate means, it is possible to perform the replacement of the anisotropically conductive elastomer sheet 61.

  Therefore, according to such a circuit board inspection apparatus, the anisotropic conductive connector is moved by a moving mechanism including a winding shaft and a winding shaft, thereby forming a long anisotropic member constituting the anisotropic conductive connector. Since a part of the conductive elastomer sheet can be selected as an inspection execution region and used for measurement, a highly reliable circuit board electrical inspection is performed even for a circuit board having a small size and pitch or separation distance of the electrodes to be inspected. Even when a thin anisotropic conductive elastomer sheet 61 constituting the anisotropic conductive connector is used for this purpose, the anisotropic conductive elastomer sheet 61 has a small thickness. Because of this, frequent replacement is necessary. Moving the over, it is possible in a short time only by a simple operation of changing a portion used for measurement of the anisotropically conductive elastomer sheet 61 to the other portion, it is possible to obtain high inspection efficiency.

<Third Embodiment>
FIG. 11 is a cross-sectional view for explaining the configuration of the circuit board inspection apparatus according to the third embodiment of the present invention, together with the circuit board to be inspected.
In this circuit board inspection device, each of the upper adapter device 21A and the lower adapter device 21B has a composite electrode sheet 70A on the surfaces of the adapter bodies 31A and 31B via anisotropic conductive elastomer sheets 35A and 35B. , 70B. Further, in this circuit board inspection apparatus, the circuit board 1 to be inspected has a protruding upper surface inspection electrode 2 and a lower surface inspection electrode 3 made of, for example, solder bumps on both surfaces thereof. Other specific configurations of the circuit board inspection apparatus are basically the same as those of the circuit board inspection apparatus according to the first embodiment.

  The anisotropic conductive elastomer sheet 35A in the upper-side adapter device 21A is a state in which the conductive particles P exhibiting magnetism are aligned in the thickness direction in the insulating elastic polymer material to form a chain. And the chain | strand by the said electroconductive particle P is contained in the state disperse | distributed to the surface direction. As the elastic polymer substance and the conductive particles constituting the anisotropic conductive elastomer sheet 35A, the same anisotropic conductive elastomer sheets as the anisotropic conductive connectors 40A and 40B can be used.

As shown in FIG. 12, the composite electrode sheet 70 </ b> A in the upper-side adapter device 21 </ b> A is formed with a plurality of through holes 71 </ b> H extending in the thickness direction according to a pattern corresponding to the pattern of the upper surface electrode 2 to be inspected 1 The insulating sheet 71 and a plurality of core electrodes 72 arranged so as to protrude from both surfaces of the insulating sheet 71 in the respective through holes 71H of the insulating sheet 71.
Each of the core electrodes 72 includes a cylindrical body 72a inserted through the through hole 71H of the insulating sheet 71, and an insulating sheet 71 formed integrally connected to both ends of the body 72a. It is comprised by the terminal part 72b exposed to both surfaces. The length of the trunk portion 72a in the core electrode 72 is larger than the thickness of the insulating sheet 71, and the diameter of the trunk portion 72a is smaller than the diameter of the through hole 71H of the insulating sheet 71. Thus, the core electrode 72 is movable in the thickness direction of the insulating sheet 71. Further, the diameter of the terminal portion 72 b in the core electrode 72 is larger than the diameter of the through hole 71 </ b> H of the insulating sheet 71.

As a material constituting the insulating sheet 71, resin materials such as liquid crystal polymer, polyimide resin, polyester resin, polyaramid resin, polyamide resin, glass fiber reinforced epoxy resin, glass fiber reinforced polyester resin, glass fiber reinforced polyimide resin For example, a fiber-reinforced resin material such as an epoxy resin or a composite resin material containing an inorganic material such as alumina or poron nitride as a filler can be used.
When the composite electrode sheet 70 is used in a high temperature environment, it is preferable to use the insulating sheet 71 having a linear thermal expansion coefficient of 3 × 10 ⁻⁵ / K or less, more preferably 1 × 10 6. ^{−6 to} 2 × 10 ⁻⁵ / K, particularly preferably 1 × 10 ^{−6 to} 6 × 10 ⁻⁶ / K. By using such an insulating sheet 11, it is possible to suppress misalignment of the core electrode 72 due to thermal expansion of the insulating sheet 11.
Moreover, it is preferable that the thickness d of the insulating sheet 71 is 10-200 micrometers, More preferably, it is 15-100 micrometers.
Moreover, it is preferable that the diameter of the through-hole 71H of the insulating sheet 71 is 20-300 micrometers, More preferably, it is 30-150 micrometers.

As a material constituting the core electrode 72, a metal material having rigidity can be preferably used, and in particular, a material that is less likely to be etched than a thin metal layer formed on an insulating sheet in a manufacturing method described later is used. preferable. Specific examples of such a metal material include simple metals such as nickel, cobalt, gold, and aluminum, or alloys thereof.
The diameter of the trunk portion 72a in the core electrode 72 is preferably 18 μm or more, and more preferably 25 μm or more. When this diameter is too small, the strength required for the core electrode 72 may not be obtained. Further, the difference between the diameter of the through hole 71H of the insulating sheet 71 and the diameter of the body 72a in the core electrode 72 is preferably 1 μm or more, more preferably 2 μm or more. If this difference is too small, it may be difficult to move the core electrode 72 with respect to the thickness direction of the insulating sheet 71.
The diameter of the terminal portion 72 b in the core electrode 72 is preferably 70 to 150% of the diameter of the upper surface inspection electrode 2. Further, the difference between the diameter of the terminal portion 72b in the core electrode 72 and the diameter of the through hole 71H of the insulating sheet 71 is preferably 5 μm or more, and more preferably 10 μm or more. If this difference is too small, the core electrode 72 may fall off the insulating sheet 71.
The thickness of the terminal portion 12b in the core electrode 72 is preferably 5 to 50 μm, more preferably 8 to 40 μm.
The movable distance of the core electrode 72 in the thickness direction of the insulating sheet 71, that is, the difference between the length of the trunk portion 72a in the core electrode 72 and the thickness of the insulating sheet 71 is preferably 3 to 150 μm, more preferably. It is 5-100 micrometers, More preferably, it is 10-50 micrometers. When the movable distance of the core electrode 72 is too small, it may be difficult to obtain sufficient unevenness absorbing ability. On the other hand, when the movable distance of the core electrode 72 is excessive, the length of the trunk portion 72a of the core electrode 72 exposed from the through hole 71H of the insulating sheet 71 becomes large, and when used for inspection, the core There is a possibility that the body 72a of the electrode 72 is buckled or damaged.

Such a composite electrode sheet 70A can be manufactured as follows, for example. First, as shown in FIG. 13, a laminate material 70b is prepared in which an easily-etchable metal layer 73A is integrally laminated on one surface of an insulating sheet 71, and etching is performed on the metal layer 73A in the laminate material 70b. By removing the part by performing the treatment, a plurality of openings 73K are formed in the metal layer 73A according to the pattern corresponding to the pattern of the upper surface inspection electrode 2 as shown in FIG. Next, as illustrated in FIG. 15, through holes 71 </ b> H that extend in the thickness direction are formed in the insulating sheet 71 in the laminated material 10 b and communicate with the openings 73 </ b> K of the metal layer 73 </ b> A. Then, as shown in FIG. 16, an easily etchable cylindrical metal thin layer 73B is formed so as to cover the inner wall surface of the through hole 71H of the insulating sheet 71 and the opening edge of the metal layer 73A. In this way, the insulating sheet 71 in which a plurality of through holes 71H extending in the thickness direction are formed, and the plurality of sheets that are laminated on one surface of the insulating sheet 71 and communicate with the through holes 71H of the insulating sheet 71, respectively. An easily-etchable metal layer 73A having an opening 73K, and an easily-etchable metal thin layer 73B formed so as to cover the inner wall surface of the through hole 71H of the insulating sheet 71 and the opening edge of the metal layer 73A. A composite laminated material 10a is manufactured.
In the above, as a method of forming the through hole 71H of the insulating sheet 71, a laser processing method, a drill processing method, an etching processing method, or the like can be used.
Copper or the like can be used as an easily-etchable metal material constituting the metal layer 73A and the metal thin layer 73B.
The thickness of the metal layer 73A is set in consideration of the target movable distance of the core electrode 72 and the like, specifically, preferably 3 to 75 μm, more preferably 5 to 50 μm, still more preferably. Is 8-25 μm.
Further, the thickness of the thin metal layer 73B is set in consideration of the diameter of the through hole 71H of the insulating sheet 71 and the diameter of the body portion 72a in the core electrode 72 to be formed.
Moreover, as a method of forming the metal thin layer 73B, an electroless plating method or the like can be used.

Then, a core electrode 72 is formed in each of the through holes 71H of the insulating sheet 71 by subjecting the composite laminated material 10a to a photoplating process. More specifically, as shown in FIG. 17, the terminal portion 72 b of the core electrode 72 to be formed on each of the surface of the metal layer 73 </ b> A formed on one surface of the insulating sheet 71 and the other surface of the insulating sheet 11. A resist film 74 in which a plurality of pattern holes 74 </ b> H communicating with the through holes 71 </ b> H of the insulating sheet 71 is formed is formed according to a pattern corresponding to the pattern. Next, an electrolytic plating process is performed using the metal layer 73A as a common electrode to deposit metal on the exposed portion of the metal layer 73A, and metal is deposited on the surface of the metal thin layer 73B to form the through hole 71H of the insulating sheet 71. By filling the inside and the pattern hole 74H of the resist film 74 with a metal, a core electrode 72 extending in the thickness direction of the insulating sheet 71 is formed as shown in FIG.
After forming the core electrode 72 in this manner, the resist film 74 is removed from the surface of the metal layer 73A, thereby exposing the metal layer 73A as shown in FIG. And the composite electrode sheet 70A shown in FIG. 11 is obtained by performing an etching process and removing the metal layer 73A and the metal thin layer 73B.

  The anisotropic conductive elastomer sheet 35B and the composite electrode sheet 70B in the lower side adapter device 21B have basically the same configuration as the anisotropic conductive elastomer sheet 35A and the composite electrode sheet 70A in the upper side adapter device 21A.

According to such a circuit board inspection apparatus, in addition to the same effects as those of the circuit board inspection apparatus according to the first embodiment, the following effects can be obtained.
That is, since each of the core electrodes 72 in the composite electrode sheets 70A and 70B is movable in the thickness direction with respect to the insulating sheet 71, the upper surface inspected electrode 2 and the lower surface inspected electrode 3 can move in the thickness direction. When pressurized, the anisotropic conductive elastomer sheet 41 in the anisotropic conductive connectors 40A and 40B and the anisotropic conductive elastomer sheets 35A and 35B disposed on the other surfaces of the composite electrode sheets 70A and 70B are core electrodes. 72 is compressed and deformed in conjunction with each other by moving, so that the sum of the uneven absorption capacity of both is expressed as the uneven absorption capacity of the upper side adapter device 21A and the lower side adapter device 21B. Obtainable.
Moreover, if thickness required in order to obtain a required uneven | corrugated absorbability is ensured with the total thickness of the anisotropically conductive elastomer sheet 41 and the anisotropically conductive elastomer sheets 35A and 35B in the anisotropically conductive connectors 40A and 40B. Well, as each anisotropically conductive elastomer sheet, one having a small thickness can be used, so that high resolution can be obtained.
Therefore, even for the circuit board 1 to be inspected having a small distance between the adjacent upper surface inspected electrodes 2 or between the adjacent lower surface inspected electrodes 3 and variations in the height level of the electrodes, necessary insulation is provided between the adjacent electrodes. The electrical connection to each of the electrodes can be reliably achieved in a state in which the property is ensured.

<Fourth embodiment>
FIG. 20 is an explanatory cross-sectional view showing the configuration of the circuit board inspection apparatus according to the fourth embodiment of the present invention, together with the circuit board to be inspected. This circuit board inspection apparatus is used to perform an electrical resistance measurement test of each wiring pattern on the circuit board 1 to be inspected.
In this circuit board inspection apparatus, each of the upper-side adapter device 21A and the lower-side adapter device 21B has an electrode sheet 80A, 80B, and a different material disposed on the back surface of the electrode sheets 80A, 80B, instead of the adapter body. The anisotropic conductive elastomer sheets 88A and 88B and the composite electrode sheets 90A and 90B disposed on the back surfaces of the anisotropic conductive elastomer sheets 88A and 88B are provided. Further, in this circuit board inspection apparatus, the circuit board 1 to be inspected has a protruding upper surface inspection electrode 2 and a lower surface inspection electrode 3 made of, for example, solder bumps on both surfaces thereof. Further, as shown in FIG. 21, the anisotropic conductive elastomer sheet 36A disposed between the upper adapter device 21A and the upper inspection head 22A has a plurality of conductive path forming portions 37 extending in the thickness direction as insulating portions. The anisotropic conductive elastomer sheet 36B disposed between the lower side adapter device 21B and the lower side inspection head 22B has a plurality of conductive path forming portions extending in the thickness direction. They are insulated from each other by an insulating part. Other specific configurations of the circuit board inspection apparatus are basically the same as those of the circuit board inspection apparatus according to the first embodiment.

  The electrode sheet 80A in the upper-side adapter device 21A has a flexible insulating sheet 81 in which a plurality of through holes 82 are formed according to a pattern corresponding to the pattern of the upper surface inspected electrode 2 in the circuit board 1 to be inspected. On the surface of the insulating sheet 81, as shown in FIG. 22, a plurality of ring electrodes 83 are formed so as to surround each of the through holes 82 of the insulating sheet 81. A plurality of relay electrodes 84 are formed on the back surface of the insulating sheet 81 according to an appropriate pattern. In the illustrated example, each of the relay electrodes 84 is disposed so as to be positioned between the through holes 82 of the insulating sheet 81. Each of the relay electrodes 84 is electrically connected to the ring-shaped electrode 83 via a short-circuit portion 85 extending through the insulating sheet 81 in the thickness direction and a wiring portion 86 formed on the surface of the insulating sheet 81. It is connected to the.

As the material constituting the insulating sheet 81, it is preferable to use a resin material having high mechanical strength, and specific examples thereof include liquid crystal polymer and polyimide.
Moreover, as a material which comprises the ring-shaped electrode 83, the relay electrode 84, the short circuit part 85, and the wiring part 86, copper, nickel, gold | metal | money, or the laminated body of these metals etc. can be used.
Although the thickness of the insulating sheet 81 will not be specifically limited if the said insulating sheet 81 has a softness | flexibility, For example, it is preferable that it is 5-50 micrometers, More preferably, it is 8-30 micrometers.
The diameter of the through-hole 82 of the insulating sheet 81 may be a size that allows the inspection core electrode 95 of the composite electrode sheet 90A described later to be movably inserted. It is 05 to 2 times, preferably 1.1 to 1.7 times.
The inner diameter of the ring-shaped electrode 83 is set according to the diameter of the electrode to be inspected that is electrically connected to the ring-shaped electrode 83, and the electrical connection to the electrode to be inspected can be reliably achieved. It is preferably 50 to 110% of the diameter of the inspection electrode, more preferably 70 to 100%.
Further, the inner diameter of the ring-shaped electrode 83 is 1.1 to 2 times the diameter of the core electrode for inspection 95 from the viewpoint of ensuring insulation with the core electrode for inspection 95 in the composite electrode sheet 90A described later. Preferably, it is 1.2 to 1.7 times.

Such an electrode sheet 80A can be manufactured as follows, for example.
First, as shown in FIG. 23, a laminated material 80a in which a metal layer 86a is formed on the surface of an insulating sheet 81 is prepared. As shown in FIG. A plurality of through holes 80H penetrating each of the layers 86a in the thickness direction are formed according to the pattern of the short-circuit portion 85 of the electrode sheet 80A to be formed. Next, by performing photolithography and plating on the laminated material 80a in which the through holes 80H are formed, a relay electrode 84 is formed on the back surface of the insulating sheet 81 as shown in FIG. 84 and the metal layer 86a are electrically connected, and a short-circuit portion 85 extending in the thickness direction of the insulating sheet 81 is formed. Thereafter, the metal layer 86a is subjected to photolithography and etching to remove a part thereof, thereby forming a ring-shaped electrode 83 and a wiring portion 86 on the surface of the insulating sheet 81 as shown in FIG. . Then, laser processing is performed on the insulating sheet 81 using the ring-shaped electrode 83 as a mask, thereby forming a through hole 82 in the insulating sheet 81, thereby obtaining the electrode sheet 80A.

The anisotropic conductive elastomer sheet 88A in the upper-side adapter device 21A is in a state where conductive particles P exhibiting magnetism are aligned in the thickness direction and formed in a chain in an insulating elastic polymer material. And the chain | strand by the said electroconductive particle P is contained in the state disperse | distributed to the surface direction. As the elastic polymer substance and the conductive particles constituting the anisotropic conductive elastomer sheet 88A, the same material as the anisotropic conductive elastomer sheet 41 in the anisotropic conductive connectors 40A and 40B can be used.
In the anisotropic conductive elastomer sheet 88A, a plurality of through holes 89 penetrating in the thickness direction are formed according to a pattern corresponding to the pattern of the upper surface inspected electrode 2 on the circuit board 1 to be inspected.
The diameter of the through hole 19 of the anisotropic conductive elastomer sheet 88A may be a size that allows the inspection core electrode 85 of the second electrode sheet 90A described later to be movably inserted. For example, the inspection core electrode 85 It is 1.1 to 2 times, preferably 1.2 to 1.7 times the diameter.
The through hole 89 of the anisotropic conductive elastomer sheet 88A can be formed by performing, for example, laser processing.

The composite electrode sheet 90A in the upper-side adapter device 21A includes a plurality of inspection core electrodes 95 arranged according to a pattern corresponding to the pattern of the upper surface inspection electrode 2 of the circuit board 1 to be inspected, and relay electrodes 84 in the electrode sheet 80A. It comprises a plurality of connecting core electrodes 96 arranged according to a pattern corresponding to the pattern, and an insulating sheet 91 that supports each of the inspection core electrode 95 and the connecting core electrode 96. Specifically, the insulating sheet 91 has a plurality of through-holes 92 extending in the thickness direction, corresponding to the pattern of the upper surface inspection electrode 2 of the circuit board 1 to be inspected and the relay electrode 84 of the electrode sheet 80A. Each of the inspection core electrode 95 and the connection core electrode 96 protrudes from each of both surfaces of the insulating sheet 91 in each through-hole 92 of the insulating sheet 91. Has been placed.
Each of the inspection core electrodes 95 is formed by integrally connecting a cylindrical body portion 95a inserted through the through hole 92 of the insulating sheet 91 and both ends of the body portion 95a. 91 and terminal portions 95b exposed on both surfaces. The length of the trunk portion 95a in the core electrode for inspection 95 is larger than the thickness of the insulating sheet 91, and the diameter of the trunk portion 95a is smaller than the diameter of the through hole 92 of the insulating sheet 91. Thereby, the inspection core electrode 95 is movable in the thickness direction of the insulating sheet 91. Further, the diameter of the terminal portion 95 b in the inspection core electrode 95 is larger than the diameter of the through hole 92 of the insulating sheet 91.
Each of the connecting core electrodes 96 includes a cylindrical body 96a inserted through the through-hole 92 of the insulating sheet 91, and an insulating sheet formed integrally connected to both ends of the body 96a. 21 and terminal portions 96b exposed on both surfaces. The length of the trunk portion 96 a in the connecting core electrode 96 is larger than the thickness of the insulating sheet 91, and the diameter of the trunk portion 96 a is smaller than the diameter of the through hole 92 of the insulating sheet 91. Thus, the connecting core electrode 96 is movable in the thickness direction of the insulating sheet 91. Further, the diameter of the terminal portion 96 b in the connecting core electrode 96 is larger than the diameter of the through hole 92 of the insulating sheet 91.

The material constituting the insulating sheet 91 in the composite electrode sheet 90A and the specific dimensions of the insulating sheet 91 and the through holes thereof are the insulating sheet in the composite electrode sheet of the circuit board inspection apparatus according to the third embodiment. It is the same.
Further, the material constituting the inspection core electrode 95 and the connection core electrode 96 in the composite electrode sheet 90A, and the dimensions of the inspection core electrode 95 and the connection core electrode 96 are the same as those of the circuit board according to the third embodiment. This is the same as the core electrode in the composite electrode sheet of the inspection apparatus.
The composite electrode sheet 90A can be manufactured by a method similar to the method for manufacturing the composite electrode sheet of the circuit board inspection apparatus according to the third embodiment.

  The electrode sheet 80B, the anisotropic conductive elastomer sheet 88B and the composite electrode sheet 90B in the lower adapter device 21B are basically the same as the electrode sheet 80A, the anisotropic conductive elastomer sheet 88A and the composite electrode sheet 90A in the upper adapter device 21A. It is the same composition.

In such a circuit board inspection apparatus, the circuit board 1 to be inspected is held in the inspection execution region E by the holder 18, and in this state, each of the upper side support plate 28A and the lower side support plate 28B is the circuit board to be inspected. 1, the circuit board 1 to be inspected is clamped by the upper adapter device 21A and the lower adapter device 21B0.
In this state, as shown in FIG. 27, each of the upper surface inspection electrodes 2 of the circuit board 1 to be inspected is an inspection core of the ring electrode 83 of the electrode sheet 80A and the composite electrode sheet 90A in the upper adapter device 21A. Both of the electrodes 95 are electrically connected via the anisotropic conductive elastomer sheet 41 of the anisotropic conductive connector 40A, and each of the inspection core electrode 95 and the connection core electrode 96 of the composite electrode sheet 90A is different from each other. It is electrically connected to the electrode pin 24A of the inspection electrode device 23A via the electrically conductive elastomer sheet 36A. In addition, each of the connecting core electrodes 96 of the electrode sheet 90A in the upper-side adapter device 21A is electrically connected to the relay electrode 84 of the electrode sheet 80A via an anisotropic conductive elastomer sheet 88A.
On the other hand, the lower surface inspection electrode 3 of the circuit board 1 to be inspected is different from the anisotropic conductive connector 40B in both the ring electrode of the electrode sheet 80B and the inspection core electrode of the composite electrode sheet 90B in the lower adapter device 90B. The inspection core electrode and the connection core electrode of the composite electrode sheet 90B are electrically connected via the anisotropic conductive elastomer sheet, and the electrode pins 24B of the inspection electrode device 23B are connected via the anisotropic conductive elastomer sheet 36B. Is electrically connected. In addition, each of the connecting core electrodes of the electrode sheet 90A in the lower-side adapter device 21B is electrically connected to the relay electrode of the electrode sheet 80B through the anisotropic conductive elastomer sheet 88B.
At this time, in the upper-side adapter device 21A, the ring-shaped electrode 83 of the electrode sheet 80A is formed so as to surround the through-hole 82 of the insulating sheet 81, so that the inspection that enters the through-hole 82 of the insulating sheet 81 Even when the center position of the inspection core electrode 95 is displaced from the center position of the upper surface inspection electrode 2, if the inspection core electrode 95 is electrically connected to the upper surface inspection electrode 2, the ring electrode The reference numeral 83 is always electrically connected to the upper surface inspection electrode 2. In the lower-side adapter device 21 </ b> B, if the inspection core electrode is electrically connected to the lower surface inspection electrode 3, the ring-shaped electrode is always electrically connected to the upper surface inspection electrode 3.

In this way, the upper surface inspection electrode 2 and the lower surface inspection electrode 3 of the circuit board 1 to be inspected are respectively connected to the inspection electrode device 24A of the inspection electrode device 23A in the upper inspection head 22A and the inspection electrode device in the lower inspection head 22B. By being electrically connected to each of the inspection electrodes 24B of 23B, a state of being electrically connected to the test circuit of the tester is achieved. This state is a measurable state.
In this measurable state, one upper surface inspection electrode 2 is designated out of the plurality of upper surface inspection electrodes 2 on the circuit board 1 to be inspected, and is electrically connected to the designated upper surface inspection electrode 2. In addition, one of the inspection core electrode 95 and the ring-shaped electrode 83 in the upper adapter device 21A is used as a current supply electrode and the other is used as a voltage measurement electrode, and corresponds to the designated top surface inspected electrode 2. By using one of the inspection core electrode and the ring-shaped electrode in the lower adapter device 21B electrically connected to the lower surface inspection electrode 3 as a current supply electrode and the other as a voltage measurement electrode, The inspection core electrode 95 or the ring-shaped electrode 83, which is the current supply electrode in the side adapter device 21A, and the lower side adapter device 21B A current is supplied between the inspection core electrode or the ring-shaped electrode which is the current supply electrode, and the inspection core electrode 25 or the ring-shaped electrode 13 which is the voltage measuring electrode in the upper-side adapter device 21A; The voltage between the inspection core electrode or the ring electrode, which is the voltage measurement electrode in the lower-side adapter device 21B, is measured, and based on the obtained voltage value, the designated upper surface inspected electrode 2 and Corresponding electrical resistance values of wiring patterns formed between the lower surface inspection electrodes 3 are obtained. Then, the electrical resistance of all the wiring patterns is measured by sequentially changing the designated upper surface inspection electrode 2.

According to such a circuit board inspection apparatus, in addition to the same effects as those of the circuit board inspection apparatus according to the first embodiment, the following effects can be obtained.
That is, the insulating sheet 81 in the electrode sheet 80A (80B) is formed with a through hole 82 into which the inspection core electrode 95 in the composite electrode sheet 90A enters, and the through hole 82 is formed around the through hole 82. Since the ring-shaped electrode 83 is formed so as to surround the upper surface, if the alignment is performed so that at least a part of the core electrode for inspection 95 is positioned on the upper surface inspection electrode 2 in the circuit substrate 1 to be inspected, the upper surface At least a part of the ring-shaped electrode 83 is positioned on the electrode 2 to be inspected. Accordingly, the circuit board 1 to be inspected has a large number of upper surface inspected electrodes 2 having a large area and a small size. In addition, the electrical connection of both the inspection core electrode 95 and the ring-shaped electrode 83 to the upper surface inspection electrode 2 can be reliably achieved. Moreover, since the inspection core electrode 95 and the ring-shaped electrode 83 are electrically independent from each other, one of the inspection core electrode 95 and the ring-shaped electrode 83 electrically connected to the upper surface inspection electrode 2 Is used as a current supply electrode, and the other is used as a voltage measurement electrode, whereby the electrical resistance of the circuit board 1 to be inspected can be measured with high accuracy.

Although the present invention has been specifically described above, the present invention is not limited to the above examples, and various modifications can be made.
For example, in the circuit board inspection apparatus of the present invention, as the anisotropic conductive elastomer sheet constituting the anisotropic conductive connector, a so-called distributed anisotropic conductive elastomer sheet constituting the inspection apparatus of FIG. 1 is suitable. Of course, it has a plurality of conductive path forming portions formed according to the pattern corresponding to the electrode, specifically, a plurality of conductive particles closely packed, each extending in the thickness direction. It is also possible to use a so-called unevenly-distributed anisotropically conductive elastomer sheet comprising a columnar conductive path forming part and an insulating part that insulates these conductive path forming parts from each other and has no or almost no conductive particles. .
In addition, as shown in FIG. 28, a plurality of conductive paths extending in the thickness direction, wherein the anisotropic conductive elastomer sheet in the anisotropic conductive connector contains conductive particles P exhibiting magnetism in an elastic polymer substance. It is possible to use a forming portion 41a and an insulating portion 41b made of an elastic polymer material that insulates the conductive path forming portions 41a from each other. As such an anisotropic conductive elastomer sheet 41, a conductive material can be used. What formed so that each of the path | route formation part 41a may protrude from the surface of the insulation part 41b can be used.

Claims (8)

A plurality of inspection target electrodes on the circuit board to be inspected and a plurality of inspection electrodes formed so as to correspond to each of the inspection target electrodes are arranged in contact with the plurality of inspection target electrodes in a measurement state. In a circuit board inspection apparatus that performs an electrical inspection of the circuit board to be inspected by electrically connecting via a conductive elastomer sheet,
An anisotropic conductive connector having a structure in which a plurality of anisotropic conductive elastomer sheets are supported by a long film-like support, and a moving mechanism for moving the anisotropic conductive connector;
By interposing an anisotropic conductive elastomer sheet of any one of a plurality of anisotropic conductive elastomer sheets constituting the anisotropic conductive connector between the inspection target electrode and the inspection electrode of the inspection target circuit board A circuit board inspection apparatus characterized in that a measurement state is formed.   The anisotropic conductive connector has a structure in which each of a plurality of anisotropic conductive elastomer sheets is arranged so as to close a plurality of openings formed along the longitudinal direction of a long film-like support. The circuit board inspection apparatus according to claim 1, wherein the circuit board inspection apparatus is provided. A plurality of inspection target electrodes on the circuit board to be inspected and a plurality of inspection electrodes formed so as to correspond to each of the inspection target electrodes are arranged in contact with the plurality of inspection target electrodes in a measurement state. In a circuit board inspection apparatus that performs an electrical inspection of the circuit board to be inspected by electrically connecting via a conductive elastomer sheet,
A long anisotropic conductive elastomer sheet capable of forming a plurality of inspection execution regions corresponding to the inspection target electrode region in which a plurality of inspection target electrodes are disposed on each of the inspection target circuit boards is provided at each of both end portions thereof. Comprising an anisotropic conductive connector configured to be supported by a long film-like support, and a moving mechanism for moving the anisotropic conductive connector,
Inspecting a circuit board, wherein a measurement state is formed by interposing an anisotropic conductive elastomer sheet constituting an anisotropic conductive connector between an inspection object electrode and an inspection electrode of an inspection circuit board apparatus.   4. The circuit according to claim 1, wherein the moving mechanism includes a rotatable winding shaft around which the anisotropic conductive connector is wound and a winding shaft rotated by a driving source. Board inspection equipment. Using the circuit board inspection apparatus according to claim 1,
Measurement is performed by interposing an anisotropic conductive elastomer sheet of any one of a plurality of anisotropic conductive elastomer sheets constituting the anisotropic conductive connector between the inspection target electrode and the inspection electrode of the circuit board to be inspected. An inspection method for a circuit board, wherein an electrical inspection of the circuit board is performed by forming a state.   An anisotropic conductive connector comprising a plurality of anisotropic conductive elastomer sheets and a long film-like support for supporting the plurality of anisotropic conductive elastomer sheets.   7. Each of the plurality of anisotropically conductive elastomer sheets is arranged so as to close a plurality of openings formed along a longitudinal direction of a long film-like support. Anisotropic conductive connector.   An anisotropic conductive connector comprising: a long film-shaped anisotropic conductive elastomer sheet; and a support for supporting the anisotropic conductive elastomer sheet at each of both end portions thereof.

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