JP6988920B2 - Probe pins, inspection jigs, inspection units and inspection equipment - Google Patents

Probe pins, inspection jigs, inspection units and inspection equipment Download PDF

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Publication number
JP6988920B2
JP6988920B2 JP2019564211A JP2019564211A JP6988920B2 JP 6988920 B2 JP6988920 B2 JP 6988920B2 JP 2019564211 A JP2019564211 A JP 2019564211A JP 2019564211 A JP2019564211 A JP 2019564211A JP 6988920 B2 JP6988920 B2 JP 6988920B2
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contact portion
elastic
contact
probe pin
inspection
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JPWO2019138507A1 (en
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直哉 笹野
宏真 寺西
貴浩 酒井
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Omron Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)

Description

本開示は、プローブピン、このプローブピンを備えた検査治具、この検査治具を備えた検査ユニット、および、この検査ユニットを備えた検査装置に関する。 The present disclosure relates to a probe pin, an inspection jig provided with the probe pin, an inspection unit provided with the inspection jig, and an inspection device provided with the inspection unit.

カメラあるいは液晶パネル等の電子部品モジュールでは、一般に、その製造工程において、導通検査および動作特性検査等が行われる。これらの検査は、プローブピンを用いて、電子部品モジュールに設置されている本体基板と接続するためのＦＰＣ接触電極、あるいは、実装された基板対基板コネクタ等の電極部と検査装置とを接続することにより行われる。 In an electronic component module such as a camera or a liquid crystal panel, continuity inspection, operation characteristic inspection, and the like are generally performed in the manufacturing process. In these inspections, probe pins are used to connect the FPC contact electrode for connecting to the main board installed in the electronic component module, or the electrode part such as the mounted board-to-board connector to the inspection device. It is done by.

このようなプローブピンとしては、例えば、特許文献１に記載されたものがある。このプローブピンは、電子部品の電極端子および被接続電子部品の電極端子に対してそれぞれ接触可能な一対のコンタクトと、一対のコンタクト間に介在して一対のコンタクトを接続する蛇行部とを備えている。前記プローブピンでは、蛇行部により、各コンタクトと電子部品の電極端子および被接続電子部品の電極端子との間の接圧を確保して、電子部品の電極端子および被接続電子部品の電極端子に対する接触信頼性を高めている。 As such a probe pin, for example, there is one described in Patent Document 1. This probe pin includes a pair of contacts that can contact the electrode terminals of the electronic component and the electrode terminals of the connected electronic component, respectively, and a meandering portion that is interposed between the pair of contacts to connect the pair of contacts. There is. In the probe pin, the meandering portion secures the contact pressure between each contact and the electrode terminal of the electronic component and the electrode terminal of the connected electronic component, and the electrode terminal of the electronic component and the electrode terminal of the connected electronic component are pressed. Increases contact reliability.

特開２００２−１３４２０２号公報Japanese Unexamined Patent Publication No. 2002-134202

近年、検査対象物の多様化等に伴って、例えば、検査対象物の破損等を防ぐために、検査対象物および検査装置に対してそれぞれ異なる接触荷重で接触することがプローブピンに求められる場合がある。 In recent years, with the diversification of inspection objects, for example, in order to prevent damage to inspection objects, probe pins may be required to come into contact with inspection objects and inspection devices with different contact loads. be.

特許文献１のプローブピンでは、各コンタクトが、全体で１つの弾性部を構成する蛇行部の両端部にそれぞれ接続されているので、電子部品および被接続電子部品に対して、異なる接触荷重で接触することができない場合がある。 In the probe pin of Patent Document 1, since each contact is connected to both ends of the meandering portion constituting one elastic portion as a whole, the electronic component and the connected electronic component are contacted with different contact loads. You may not be able to do it.

本開示は、検査対象物および検査装置に対して異なる接触荷重で接触可能なプローブピン、このプローブピンを備えた検査治具、この検査治具を備えた検査ユニット、および、この検査ユニットを備えた検査装置を提供することを目的とする。 The present disclosure comprises a probe pin capable of contacting an inspection object and an inspection device with different contact loads, an inspection jig equipped with the probe pin, an inspection unit equipped with the inspection jig, and the inspection unit. The purpose is to provide an inspection device.

本開示の一例のプローブピンは、
板状の第１接触部および板状の第２接触部と、
前記第１接触部および前記第２接触部の間に配置された中間部と、
前記第１接触部および前記中間部に接続され、前記第１接触部および前記第２接触部を結んだ配列方向に沿って伸縮する第１弾性部と、
前記中間部および前記第２接触部に接続され、前記配列方向に沿って伸縮する第２弾性部と
を備え、
前記第１弾性部のばね常数が、前記第２弾性部のばね常数よりも小さくなるように構成されている。The probe pin of one example of the present disclosure is
The plate-shaped first contact part and the plate-shaped second contact part,
An intermediate portion arranged between the first contact portion and the second contact portion,
A first elastic portion that is connected to the first contact portion and the intermediate portion and expands and contracts along an arrangement direction connecting the first contact portion and the second contact portion.
It is provided with a second elastic portion that is connected to the intermediate portion and the second contact portion and expands and contracts along the arrangement direction.
The spring constant of the first elastic portion is configured to be smaller than the spring constant of the second elastic portion.

また、本開示の一例の検査治具は、
前記プローブピンと、
前記プローブピンを収容可能な収容部を有するソケットと
を備え、
前記ソケットが、
前記収容部に収容された前記プローブピンの前記中間部のその延在方向の両端部を、前記配列方向に沿って前記第２接触部から前記第１接触部に向かう方向において係止する係止部を有している。Further, the inspection jig of the example of the present disclosure is
With the probe pin
A socket having an accommodating portion capable of accommodating the probe pin is provided.
The socket
Locking that locks both ends of the intermediate portion of the probe pin housed in the housing portion in the extending direction from the second contact portion toward the first contact portion along the arrangement direction. Has a part.

また、本開示の一例の検査ユニットは、
前記検査治具を少なくとも１つ備えた。In addition, the inspection unit of the example of the present disclosure is
At least one of the inspection jigs was provided.

また、本開示の一例の検査装置は、
前記検査ユニットを少なくとも１つ備えた。Further, the inspection device of the example of the present disclosure is
At least one of the inspection units was provided.

前記プローブピンによれば、第１接触部および中間部に接続されかつ第１接触部および第２接触部を結んだ配列方向に沿って伸縮する第１弾性部のばね常数が、中間部および第２接触部に接続されかつ第１接触部および第２接触部を結んだ配列方向に沿って伸縮する第２弾性部のばね常数よりも小さくなるように構成されている。これにより、検査対象物および検査装置に対して異なる接触荷重で接触可能なプローブピンを実現できる。 According to the probe pin, the spring constants of the first elastic portion connected to the first contact portion and the intermediate portion and expanded and contracted along the arrangement direction connecting the first contact portion and the second contact portion are the intermediate portion and the first. It is configured to be smaller than the spring constant of the second elastic portion that is connected to the two contact portions and expands and contracts along the arrangement direction connecting the first contact portion and the second contact portion. This makes it possible to realize a probe pin capable of contacting an inspection object and an inspection device with different contact loads.

また、前記検査治具によれば、前記プローブピンにより、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査治具を実現できる。 Further, according to the inspection jig, it is possible to realize an inspection jig capable of contacting an inspection object and an inspection device having different required contact loads by the probe pin.

また、前記検査ユニットによれば、前記検査治具により、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査ユニットを実現できる。 Further, according to the inspection unit, the inspection jig can realize an inspection unit capable of contacting an inspection object and an inspection device having different required contact loads.

また、前記検査装置によれば、前記検査ユニットにより、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査装置を実現できる。 Further, according to the inspection device, the inspection unit can realize an inspection device capable of contacting an inspection object and an inspection device having different required contact loads.

本開示の一実施形態の検査ユニットを示す斜視図。The perspective view which shows the inspection unit of one Embodiment of this disclosure. 本開示の一実施形態の検査治具を示す斜視図。The perspective view which shows the inspection jig of one Embodiment of this disclosure. 図２のIII-III線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 本開示の一実施形態のプローブピンを示す斜視図。The perspective view which shows the probe pin of one Embodiment of this disclosure. 図４のプローブピンの平面図。Top view of the probe pin of FIG. 図４のプローブピンの第１弾性部、第２弾性部および中間部の拡大平面図。The enlarged plan view of the 1st elastic part, the 2nd elastic part and the intermediate part of the probe pin of FIG. 図４のプローブピンの第１の変形例を示す斜視図。The perspective view which shows the 1st modification of the probe pin of FIG. 図７のプローブピンを収容した検査治具の図２のIII-III線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 2 of the inspection jig accommodating the probe pin of FIG. 7. 図４のプローブピンの第２の変形例を示す斜視図。The perspective view which shows the 2nd modification of the probe pin of FIG. 図９のプローブピンを収容した検査治具の図２のIII-III線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 2 of the inspection jig accommodating the probe pin of FIG. 図４のプローブピンの第３の変形例を示す斜視図。The perspective view which shows the 3rd modification of the probe pin of FIG. 図１１のプローブピンを収容した検査治具の図２のIII-III線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 2 of the inspection jig accommodating the probe pin of FIG. 図４のプローブピンの第４の変形例を示す斜視図。The perspective view which shows the 4th modification of the probe pin of FIG. 図１３のプローブピンを収容した検査治具の図２のIII-III線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 2 of the inspection jig accommodating the probe pin of FIG. 図４のプローブピンの第５の変形例を示す斜視図。The perspective view which shows the 5th modification of the probe pin of FIG. 図１５のプローブピンを収容した検査治具の図２のIII-III線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 2 of the inspection jig accommodating the probe pin of FIG. 図４のプローブピンの第６の変形例を示す斜視図。The perspective view which shows the 6th modification of the probe pin of FIG. 図１７のプローブピンを収容した検査治具の図２のIII-III線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 2 of the inspection jig accommodating the probe pin of FIG. 図４のプローブピンの第７の変形例を示す斜視図。The perspective view which shows the 7th modification of the probe pin of FIG. 図１９のプローブピンを収容した検査治具の図２のIII-III線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 2 of the inspection jig accommodating the probe pin of FIG. 図４のプローブピンの第８の変形例を示す斜視図。The perspective view which shows the 8th modification of the probe pin of FIG. 図２１のプローブピンを収容した検査治具の図２のIII-III線に沿った断面図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 2 of the inspection jig accommodating the probe pin of FIG. 21. 図２１のプローブピンを収容した検査治具の図２２のXXIII-XXIII線に沿った断面図。FIG. 22 is a cross-sectional view taken along the line XXIII-XXIII of FIG. 22 of the inspection jig accommodating the probe pin of FIG. 21.

以下、本開示の一例を添付図面に従って説明する。なお、以下の説明では、必要に応じて特定の方向あるいは位置を示す用語（例えば、「上」、「下」、「右」、「左」を含む用語）を用いるが、それらの用語の使用は図面を参照した本開示の理解を容易にするためであって、それらの用語の意味によって本開示の技術的範囲が限定されるものではない。また、以下の説明は、本質的に例示に過ぎず、本開示、その適用物、あるいは、その用途を制限することを意図するものではない。さらに、図面は模式的なものであり、各寸法の比率等は現実のものとは必ずしも合致していない。 Hereinafter, an example of the present disclosure will be described with reference to the accompanying drawings. In the following description, terms indicating a specific direction or position (for example, terms including "top", "bottom", "right", and "left") are used as necessary, but the use of these terms is used. Is for facilitating the understanding of the present disclosure with reference to the drawings, and the meaning of those terms does not limit the technical scope of the present disclosure. Further, the following description is merely an example and is not intended to limit the present disclosure, its application, or its use. Furthermore, the drawings are schematic, and the ratios of each dimension do not always match the actual ones.

本開示の一実施形態のプローブピン１０は、導電性を有し、例えば、図１および図２に示すように、ソケット３に収容された状態で使用され、ソケット３と共に検査治具２を構成する。この検査治具２には、一例として、複数の細長い薄板状のプローブピン１０が収容されている。 The probe pin 10 of the embodiment of the present disclosure has conductivity and is used in a state of being housed in the socket 3 as shown in FIGS. 1 and 2, for example, and constitutes an inspection jig 2 together with the socket 3. do. As an example, the inspection jig 2 houses a plurality of elongated thin plate-shaped probe pins 10.

また、検査治具２は、検査ユニット１の一部を構成している。検査ユニット１は、図１に示すように、少なくとも１つの検査治具２が組み込まれた略直方体状のベースハウジング４を備えている。このベースハウジング４は、略矩形板状の第１ハウジング５と、この第１ハウジング５の板厚方向に積み重ねられた第２ハウジング６とで構成されている。 Further, the inspection jig 2 constitutes a part of the inspection unit 1. As shown in FIG. 1, the inspection unit 1 includes a substantially rectangular parallelepiped base housing 4 in which at least one inspection jig 2 is incorporated. The base housing 4 is composed of a first housing 5 having a substantially rectangular plate shape, and a second housing 6 stacked in the plate thickness direction of the first housing 5.

ソケット３は、図３に示すように、第１開口面５１と、第１開口面５１に対向する第２開口面５２と、第１開口面５１および第２開口面５２に直交する方向にそれぞれ延びる複数の収容部７とを有する、略直方体状のハウジング５０を備えている。すなわち、第１開口面５１および第２開口面５２は、それぞれ略直方体状のハウジング５０の一面を構成している。 As shown in FIG. 3, the socket 3 has a first opening surface 51, a second opening surface 52 facing the first opening surface 51, and a direction orthogonal to the first opening surface 51 and the second opening surface 52, respectively. It comprises a substantially rectangular parallelepiped housing 50 having a plurality of extending accommodating portions 7. That is, the first opening surface 51 and the second opening surface 52 each form one surface of a substantially rectangular parallelepiped housing 50.

図２に示すように、第１開口面５１および第２開口面５２は、その長手方向に沿って一列に並んでかつ等間隔で配置された複数の開口部５３、５４をそれぞれ有している（図２には、第１開口面５１の開口部５３のみ示す）。各収容部７には、それぞれ第１開口面５１の開口部５３および第２開口面５２の開口部５４が１組ずつ接続されている。 As shown in FIG. 2, the first opening surface 51 and the second opening surface 52 have a plurality of openings 53, 54 arranged in a row and at equal intervals along the longitudinal direction thereof, respectively. (FIG. 2 shows only the opening 53 of the first opening surface 51). A set of an opening 53 of the first opening surface 51 and an opening 54 of the second opening surface 52 are connected to each accommodating portion 7.

各収容部７は、スリット状を有し、各プローブピン１０を相互に電気的に独立して収容可能かつ保持可能であると共に、収容したプローブピン１０の板面同士が相互に対向するように並んで隣接して配置されている。図３に示すように、各収容部７には、第１開口面５１の開口部５３を介して、後述する第１接点部１１１がソケット３の外部に露出し、第２開口面５２の開口部５４を介して、後述する第３接点部１２１がソケット３の外部に露出するように、各プローブピン１０が収容されている。 Each accommodating portion 7 has a slit shape, and each probe pin 10 can be electrically and independently accommodated and held, and the plate surfaces of the accommodating probe pins 10 face each other. They are arranged side by side and adjacent to each other. As shown in FIG. 3, in each accommodating portion 7, the first contact portion 111, which will be described later, is exposed to the outside of the socket 3 via the opening 53 of the first opening surface 51, and the opening of the second opening surface 52. Each probe pin 10 is accommodated so that the third contact portion 121, which will be described later, is exposed to the outside of the socket 3 via the portion 54.

図３に示すように、各収容部７の配列方向（すなわち、図３の紙面貫通方向）から見て、各収容部７を構成するハウジング５０の内面のうちの第１開口面５１および第２開口面５２に直交する一対の内側面に、それぞれ段部５５（係止部の一例）が設けられている。各段部５５は、第１開口面５１および第２開口面５２の中間部に相互に対向するように配置されている。なお、段部５５を境界にして、各収容部７の第１開口面５１側の幅（すなわち、各収容部７の配列方向から見て、各収容部７における第１開口面５１および第２開口面５２に平行な方向の長さ）Ｗ１が、第２開口面５２側の幅Ｗ２よりも小さくなっている。 As shown in FIG. 3, when viewed from the arrangement direction of each accommodating portion 7 (that is, the paper surface penetrating direction in FIG. 3), the first opening surface 51 and the second opening surface 51 of the inner surfaces of the housing 50 constituting each accommodating portion 7. A step portion 55 (an example of a locking portion) is provided on each of the pair of inner side surfaces orthogonal to the opening surface 52. The step portions 55 are arranged so as to face each other in the intermediate portion between the first opening surface 51 and the second opening surface 52. It should be noted that the width of each accommodating portion 7 on the first opening surface 51 side (that is, the first opening surface 51 and the second opening surface 51 in each accommodating portion 7 when viewed from the arrangement direction of each accommodating portion 7) with the step portion 55 as a boundary. The length W1 in the direction parallel to the opening surface 52 is smaller than the width W2 on the second opening surface 52 side.

各プローブピン１０は、図４に示すように、板状の第１接触部１１および板状の第２接触部１２と、第１接触部１１および第２接触部１２の間に配置された板状の中間部１３と、第１接触部１１および中間部１３に接続された第１弾性部１４と、中間部１３および第２接触部１２に接続された第２弾性部１５とを備えている。このプローブピン１０では、例えば、電鋳法で形成され、第１接触部１１、第２接触部１２、中間部１３、第１弾性部１４および第２弾性部１５が一体に構成されている。 As shown in FIG. 4, each probe pin 10 is a plate arranged between the plate-shaped first contact portion 11 and the plate-shaped second contact portion 12 and the first contact portion 11 and the second contact portion 12. It is provided with an intermediate portion 13 having a shape, a first elastic portion 14 connected to the first contact portion 11 and the intermediate portion 13, and a second elastic portion 15 connected to the intermediate portion 13 and the second contact portion 12. .. The probe pin 10 is formed by, for example, an electric casting method, and has a first contact portion 11, a second contact portion 12, an intermediate portion 13, a first elastic portion 14, and a second elastic portion 15 integrally configured.

第１接触部１１および第２接触部１２は、図５に示すように、プローブピン１０の長手方向に延びる仮想直線Ｌ３に沿って相互に直列的に配置されている。 As shown in FIG. 5, the first contact portion 11 and the second contact portion 12 are arranged in series with each other along a virtual straight line L3 extending in the longitudinal direction of the probe pin 10.

第１接触部１１は、図５に示すように、直線Ｌ３に沿って延びており、その延在方向の一端部（すなわち、第１接触部１１の延在方向における中間部１３から遠い方の端部）に第１接点部１１１が設けられ、その延在方向の他端部（すなわち、第１接触部１１の延在方向における中間部に近い方の端部）に第１弾性部１４が接続されている。 As shown in FIG. 5, the first contact portion 11 extends along the straight line L3, and one end portion in the extending direction thereof (that is, the one farther from the intermediate portion 13 in the extending direction of the first contact portion 11). The first contact portion 111 is provided at the end portion), and the first elastic portion 14 is provided at the other end portion in the extending direction thereof (that is, the end portion closer to the intermediate portion in the extending direction of the first contact portion 11). It is connected.

第２接触部１２は、図５に示すように、直線Ｌ３に沿って延びており、その延在方向の一端部（すなわち、第２接触部１２の延在方向における中間部１３から遠い方の端部）に第２接点部１２１が設けられている。 As shown in FIG. 5, the second contact portion 12 extends along the straight line L3, and one end portion in the extending direction thereof (that is, the portion farther from the intermediate portion 13 in the extending direction of the second contact portion 12). A second contact portion 121 is provided at the end portion).

なお、各収容部７に収容された状態では、各プローブピン１０の第１接点部１１１および第２接点部１２１は、図２に示すように、各収容部７の配列方向に平行な仮想直線Ｌ１、Ｌ２上にそれぞれ配置されている。 In the state of being accommodated in each accommodating portion 7, the first contact portion 111 and the second contact portion 121 of each probe pin 10 are virtual straight lines parallel to the arrangement direction of each accommodating portion 7, as shown in FIG. They are arranged on L1 and L2, respectively.

中間部１３は、図５に示すように、第１接触部１１および第２接触部１２を結んだ配列方向（すなわち、直線Ｌ３の延在方向）に交差する方向（例えば、直交方向）に延びる略矩形板状を有している。この中間部１３は、その長手方向の長さＷ３が、プローブピン１０の幅（すなわち、プローブピン１０の板厚方向（すなわち、図５の紙面貫通方向）から見て直線Ｌ３の延在方向に直交する方向の長さ）の最大値となるように、構成されている。 As shown in FIG. 5, the intermediate portion 13 extends in a direction (for example, an orthogonal direction) intersecting the arrangement direction connecting the first contact portion 11 and the second contact portion 12 (that is, the extending direction of the straight line L3). It has a substantially rectangular plate shape. The length W3 in the longitudinal direction of the intermediate portion 13 is in the extending direction of the straight line L3 when viewed from the width of the probe pin 10 (that is, the plate thickness direction of the probe pin 10 (that is, the paper penetration direction in FIG. 5)). It is configured to be the maximum value of the length in the orthogonal direction).

第１弾性部１４は、図５に示すように、細長い帯状を有し、第１接触部１１および第２接触部１２を結んだ配列方向に伸縮するように構成されている。 As shown in FIG. 5, the first elastic portion 14 has an elongated strip shape, and is configured to expand and contract in the arrangement direction connecting the first contact portion 11 and the second contact portion 12.

詳しくは、図６に示すように、第１弾性部１４は、複数の直線帯部１６１および複数の湾曲帯部１６２（この実施形態では、一例として、５つの直線帯部１６１および６つの湾曲帯部１６２）が直線Ｌ３の延在方向に沿って交互に接続された蛇行形状を有している。各直線帯部１６１は、直線Ｌ３の延在方向に直交する方向に延びていると共に、少なくともその延在方向の端部の一方が湾曲帯部１６２に接続されている。各湾曲帯部１６２は、直線Ｌ３の延在方向に直交する方向に沿って直線Ｌ３から離れる方向に突出した円弧状に延びていると共に、少なくともその延在方向の端部の一方が直線帯部１６１に接続されている。また、各湾曲帯部１６２は、その突出方向が直線Ｌ３の延在方向に沿って交互に反転するように配置されている。 Specifically, as shown in FIG. 6, the first elastic portion 14 includes a plurality of straight band portions 161 and a plurality of curved band portions 162 (in this embodiment, as an example, five straight band portions 161 and six curved bands). The portions 162) have a meandering shape in which the portions 162) are alternately connected along the extending direction of the straight line L3. Each straight band portion 161 extends in a direction orthogonal to the extending direction of the straight line L3, and at least one of the ends in the extending direction thereof is connected to the curved band portion 162. Each curved band portion 162 extends in an arc shape protruding in a direction away from the straight line L3 along a direction orthogonal to the extending direction of the straight line L3, and at least one of the ends in the extending direction thereof is a straight band portion. It is connected to 161. Further, each curved band portion 162 is arranged so that its protruding direction is alternately inverted along the extending direction of the straight line L3.

直線Ｌ３の延在方向において中間部１３から最も離れて配置された湾曲帯部１６２のその延在方向の一端部（すなわち、直線帯部１６１の延在方向における湾曲帯部１６２が接続されている端部の反対側の端部）が、第１接触部１１に接続されている。また、直線Ｌ３の延在方向において中間部１３に最も接近して配置された湾曲帯部１６２の一端部（すなわち、湾曲帯部１６２の延在方向における直線帯部１６１が接続されている端部の反対側の端部）が、中間部１３の延在方向における一端側（すなわち、図６の右側）で中間部１３に接続されている。 One end of the curved band portion 162 located farthest from the intermediate portion 13 in the extending direction of the straight line L3 in the extending direction (that is, the curved band portion 162 in the extending direction of the straight band portion 161 is connected. The opposite end) is connected to the first contact portion 11. Further, one end of the curved band portion 162 arranged closest to the intermediate portion 13 in the extending direction of the straight line L3 (that is, the end portion to which the straight band portion 161 in the extending direction of the curved band portion 162 is connected). The opposite end) is connected to the intermediate 13 on one end side (ie, the right side of FIG. 6) of the intermediate 13 in the extending direction.

第２弾性部１５は、図５に示すように、相互に隙間１５３を空けて配置された複数の帯状弾性片（この実施形態では、２つの帯状弾性片）１５１、１５２を有し、第１接触部１１および第２接触部１２を結んだ配列方向に伸縮するように構成されている。 As shown in FIG. 5, the second elastic portion 15 has a plurality of strip-shaped elastic pieces (in this embodiment, two strip-shaped elastic pieces) 151 and 152 arranged with a gap 153 between them, and the first elastic portion 15. It is configured to expand and contract in the arrangement direction connecting the contact portion 11 and the second contact portion 12.

図６に示すように、各帯状弾性片１５１、１５２は、細長い帯状を有し、複数の直線帯部１７１および複数の湾曲帯部１７２（この実施形態では、一例として、３つの直線帯部１７１および３つの湾曲帯部１７２）が直線Ｌ３の延在方向に沿って交互に接続された蛇行形状を有している。各直線帯部１７１は、第１弾性部１４の直線帯部１６１と同様に、直線Ｌ３の延在方向に直交する方向に延びていると共に、少なくともその延在方向の端部の一方が湾曲帯部１７２に接続されている。各湾曲帯部１７２は、第１弾性部１４の湾曲帯部１６２と同様に、直線Ｌ３の延在方向に直交する方向に沿って直線Ｌ３から離れる方向に突出した円弧状に延びていると共に、少なくともその延在方向の端部の一方が直線帯部１７１に接続されている。また、各湾曲帯部１７２は、その突出方向が直線Ｌ３の延在方向に沿って交互に反転するように配置されている。 As shown in FIG. 6, each band-shaped elastic piece 151, 152 has an elongated band shape, and a plurality of straight band portions 171 and a plurality of curved band portions 172 (in this embodiment, as an example, three straight band portions 171). And three curved strips 172) have a meandering shape that is alternately connected along the extending direction of the straight line L3. Like the straight band portion 161 of the first elastic portion 14, each straight band portion 171 extends in a direction orthogonal to the extending direction of the straight line L3, and at least one of the ends in the extending direction thereof is a curved band. It is connected to the unit 172. Like the curved band portion 162 of the first elastic portion 14, each curved band portion 172 extends in an arc shape protruding in a direction away from the straight line L3 along a direction orthogonal to the extending direction of the straight line L3. At least one of its extending ends is connected to the straight band portion 171. Further, each curved band portion 172 is arranged so that its protruding direction is alternately inverted along the extending direction of the straight line L3.

直線Ｌ３の延在方向において中間部１３から最も離れて配置された直線帯部１７１の延在方向の他端部（すなわち、直線帯部１７１の延在方向における湾曲帯部１７２が接続されている端部の反対側の端部）が、第２接触部１２に接続されている。また、直線Ｌ３の延在方向において中間部１３に最も接近して配置された湾曲帯部１７２の他端部（すなわち、湾曲帯部１７２の延在方向における直線帯部１７１が接続されている端部の反対側の端部）が、中間部１３の延在方向における一端側で中間部１３に接続されている。 The other end of the straight band portion 171 arranged farthest from the intermediate portion 13 in the extending direction of the straight line L3 in the extending direction (that is, the curved band portion 172 in the extending direction of the straight band portion 171 is connected. The opposite end) is connected to the second contact portion 12. Further, the other end of the curved band portion 172 arranged closest to the intermediate portion 13 in the extending direction of the straight line L3 (that is, the end to which the straight band portion 171 in the extending direction of the curved band portion 172 is connected is connected. The opposite end of the portion) is connected to the intermediate portion 13 at one end side in the extending direction of the intermediate portion 13.

すなわち、前記プローブピン１０では、第１弾性部１４の中間部１３および第１接触部１１間の第１経路６１の長さ（すなわち、各直線帯部１６１および各湾曲帯部１６２のその延在方向の長さの合計）と、第２弾性部１５の中間部１３および第２接触部１２間の第２経路６２の長さ（すなわち、各直線帯部１７１および各湾曲帯部１７２のその延在方向の長さの合計の平均）とが異なっている。 That is, in the probe pin 10, the length of the first path 61 between the intermediate portion 13 of the first elastic portion 14 and the first contact portion 11 (that is, the extension of each linear band portion 161 and each curved band portion 162). The total length in the direction) and the length of the second path 62 between the intermediate portion 13 and the second contact portion 12 of the second elastic portion 15 (that is, the extension of each straight band portion 171 and each curved band portion 172). It is different from the average of the total lengths in the direction).

また、第２弾性部１５の各帯状弾性片１５１、１５２は、その幅（すなわち、各帯状弾性片１５１、１５２の第２接触部１２および中間部１３間の経路の延在方向に直交する幅方向の長さ）Ｗ５、Ｗ６の合計が、第１弾性部１４の幅（すなわち、第１弾性部１４の第１接触部１１および中間部１３間の経路の延在方向に直交する幅方向の長さ）Ｗ４よりも大きくなるように構成されている。 Further, each band-shaped elastic piece 151, 152 of the second elastic portion 15 has a width thereof (that is, a width orthogonal to the extending direction of the path between the second contact portion 12 and the intermediate portion 13 of each band-shaped elastic piece 151, 152. Directional length) The sum of W5 and W6 is in the width direction orthogonal to the width of the first elastic portion 14 (that is, the extending direction of the path between the first contact portion 11 and the intermediate portion 13 of the first elastic portion 14). Length) It is configured to be larger than W4.

すなわち、前記プローブピン１０では、第１経路６１の幅（すなわち、第１弾性部１４の幅Ｗ４）と、第２経路６２の幅（すなわち、各帯状弾性片１５１、１５２の幅Ｗ５、Ｗ６の合計）とが異なっている。 That is, in the probe pin 10, the width of the first path 61 (that is, the width W4 of the first elastic portion 14) and the width of the second path 62 (that is, the widths W5 and W6 of the strip-shaped elastic pieces 151 and 152). Total) is different.

その結果、第１弾性部１４のばね常数と、第２弾性部１５のばね常数とが異なっている。具体的には、第１弾性部１４のばね常数が、第２弾性部１５のばね常数よりも小さくなるように構成されている。これにより、第１接点部１１１の検査対象物または検査装置に対する接圧を第２接点部１２１の検査対象物または検査装置に対する接圧よりも小さくすることができる。すなわち、検査対象物および検査装置に対して異なる接触荷重で接触可能なプローブピン１０を実現できる。 As a result, the spring constant of the first elastic portion 14 and the spring constant of the second elastic portion 15 are different. Specifically, the spring constant of the first elastic portion 14 is configured to be smaller than the spring constant of the second elastic portion 15. As a result, the contact pressure of the first contact portion 111 with respect to the inspection object or the inspection device can be made smaller than the contact pressure of the second contact portion 121 with respect to the inspection object or the inspection device. That is, it is possible to realize a probe pin 10 capable of contacting an inspection object and an inspection device with different contact loads.

なお、前記プローブピン１０では、各弾性部１４、１５の蛇行形状の折り返しの数（すなわち、湾曲帯部１６２、１７２の数）を異ならせることにより第１弾性部１４の第１経路６１の長さと第２弾性部１５の第２経路６２の長さとを異ならせ、さらに、第１経路６１の幅と第２経路６２の幅とを異ならせて、第１弾性部１４のばね常数と第２弾性部１５のばね常数とを異ならせているが、これに限らない。第１弾性部１４のばね常数と第２弾性部１５のばね常数とが異なる構成であれば、任意の構成を採用することができる。例えば、プローブピン１０が同一の導電性の材料で構成されている場合、経路６１、６２の長さ、経路６１、６２の幅、経路６１、６２の板厚、および、各弾性部１４、１５の湾曲帯部１６２、１７２の数の少なくともいずれか１つが異なるように、第１弾性部１４および第２弾性部１５を構成してもよい。すなわち、設計の自由度が高いプローブピン１０を実現できる。 In the probe pin 10, the length of the first path 61 of the first elastic portion 14 is increased by making the number of serpentine folds of the elastic portions 14 and 15 (that is, the number of the curved band portions 162 and 172) different. The length of the second path 62 of the second elastic portion 15 is made different from that of the second path 62, and the width of the first path 61 and the width of the second path 62 are made different from each other. It is different from the spring constant of the elastic portion 15, but is not limited to this. Any configuration can be adopted as long as the spring constants of the first elastic portion 14 and the spring constants of the second elastic portion 15 are different. For example, when the probe pin 10 is made of the same conductive material, the length of the paths 61 and 62, the width of the paths 61 and 62, the plate thickness of the paths 61 and 62, and the elastic portions 14, 15 respectively. The first elastic portion 14 and the second elastic portion 15 may be configured so that at least one of the numbers of the curved band portions 162 and 172 of the above is different. That is, it is possible to realize the probe pin 10 having a high degree of freedom in design.

また、前記プローブピン１０によれば、第１弾性部１４および第２弾性部１５の各々が、第１接触部１１および第２接触部１２の配列方向に交差する直線帯部１６１、１７１と、直線帯部１６１、１７１に接続された湾曲帯部１６２、１７２とが交互に連続する蛇行形状を有している。これにより、検査対象物および検査装置に対して異なる接触荷重で接触可能なプローブピン１０を容易に実現できる。 Further, according to the probe pin 10, each of the first elastic portion 14 and the second elastic portion 15 intersects with the linear band portions 161 and 171 in the arrangement direction of the first contact portion 11 and the second contact portion 12. The curved band portions 162 and 172 connected to the straight band portions 161 and 171 have a meandering shape that is alternately continuous. This makes it possible to easily realize a probe pin 10 capable of contacting an inspection object and an inspection device with different contact loads.

また、前記検査治具２によれば、プローブピン１０により、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査治具２を実現できる。 Further, according to the inspection jig 2, the probe pin 10 can realize an inspection jig 2 capable of contacting an inspection object and an inspection device having different required contact loads.

なお、図３に示すように、前記検査治具２では、プローブピン１０は、中間部１３のその延在方向に両端部が、ソケット３のハウジング５０の内側面に設けられた段部５５に接触した状態で、収容部７に収容されている。すなわち、プローブピン１０は、係止部の一例の段部５５によって、第１接触部１１および第２接触部１２の配列方向に沿って、ばね定数が大きい第２弾性部１５に接続された第２接触部１２から、ばね定数が小さい第１弾性部１４に接続された第１接触部１１に向かう方向において、支持されつつ係止されている。これにより、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査治具２を確実に実現できる。 As shown in FIG. 3, in the inspection jig 2, the probe pin 10 has both ends of the intermediate portion 13 in the extending direction on the stepped portion 55 provided on the inner side surface of the housing 50 of the socket 3. It is accommodated in the accommodating portion 7 in a state of contact. That is, the probe pin 10 is connected to the second elastic portion 15 having a large spring constant along the arrangement direction of the first contact portion 11 and the second contact portion 12 by the step portion 55 of an example of the locking portion. 2 The contact portion 12 is supported and locked in the direction toward the first contact portion 11 connected to the first elastic portion 14 having a small spring constant. As a result, it is possible to reliably realize the inspection jig 2 capable of contacting the inspection object and the inspection device having different required contact loads.

また、前記検査ユニット１によれば、前記検査治具２により、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査ユニット１を実現できる。 Further, according to the inspection unit 1, the inspection jig 2 can realize an inspection unit 1 capable of contacting an inspection object and an inspection device having different required contact loads.

なお、前記検査ユニット１は、検査装置の一部を構成することができる。このような検査装置によれば、検査ユニット１により、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査装置を実現できる。 The inspection unit 1 can form a part of the inspection device. According to such an inspection device, the inspection unit 1 can realize an inspection device capable of contacting an inspection object and an inspection device having different required contact loads.

また、検査治具２に収容されたプローブピン１０は、第１弾性部１４の第１接触部１１に最も近い位置に配置された直線帯部１６１が、収容部７を構成するハウジング５０の第２開口面５２に対向する内面５０３に当接し、第２弾性部１５の第２接触部１２に最も近い位置に配置された直線帯部１７１が、ベースハウジング４の第１ハウジング５に当接している。すなわち、前記検査ユニット１では、プローブピン１０は、第１弾性部１４の直線帯部１６１および第２弾性部１５の直線帯部１７１がソケット３およびベースハウジング４に支持されて、収容部７に保持されている。 Further, in the probe pin 10 housed in the inspection jig 2, the linear band portion 161 arranged at the position closest to the first contact portion 11 of the first elastic portion 14 is the second housing 50 constituting the accommodating portion 7. 2 The straight band portion 171 that is in contact with the inner surface 503 facing the opening surface 52 and is arranged at the position closest to the second contact portion 12 of the second elastic portion 15 is in contact with the first housing 5 of the base housing 4. There is. That is, in the inspection unit 1, the probe pin 10 has a linear band portion 161 of the first elastic portion 14 and a linear band portion 171 of the second elastic portion 15 supported by the socket 3 and the base housing 4, and is accommodated in the accommodating portion 7. It is being held.

第１接触部１１および第２接触部１２は、プローブピン１０の設計等に応じて、その形状等を適宜変更できる。例えば、第１接点部１１１および第２接点部１２１の各々は、検査装置あるいは検査対象物の様々な態様に応じて、形状および位置などを適宜変更することができる。 The shapes and the like of the first contact portion 11 and the second contact portion 12 can be appropriately changed according to the design and the like of the probe pin 10. For example, each of the first contact portion 111 and the second contact portion 121 can appropriately change its shape, position, and the like according to various aspects of the inspection device or the inspection object.

各弾性部１４、１５は、第１接触部１１および第２接触部１２の配列方向に伸縮し、かつ、ばね常数が相互に異なるように構成されていればよい。 The elastic portions 14 and 15 may be configured to expand and contract in the arrangement direction of the first contact portion 11 and the second contact portion 12 and have different spring constants from each other.

例えば、図７〜図１０に示すように、第１弾性部１４を相互に隙間を空けて配置された複数の帯状弾性片で構成してもよいし、第２弾性部１５を単一の帯状弾性片で構成してもよい。 For example, as shown in FIGS. 7 to 10, the first elastic portion 14 may be composed of a plurality of strip-shaped elastic pieces arranged with a gap between them, or the second elastic portion 15 may be composed of a single strip-shaped elastic portion 15. It may be composed of elastic pieces.

詳しくは、図７および図８に示すプローブピン１０は、第２弾性部１５が単一の帯状弾性片１５４で構成されている。図７および図８のプローブピン１０の第２弾性部１５の帯状弾性片１５４は、３つの直線帯部１７１および３つの湾曲帯部１７２がプローブピン１０の延在方向に沿って交互に接続された蛇行形状を有し、その幅Ｗ７が、図６に示す各帯状弾性片１５１、１５２の幅Ｗ５、Ｗ６よりも大きくなるように構成されている。 Specifically, in the probe pin 10 shown in FIGS. 7 and 8, the second elastic portion 15 is composed of a single band-shaped elastic piece 154. In the strip-shaped elastic piece 154 of the second elastic portion 15 of the probe pin 10 of FIGS. 7 and 8, three straight strip portions 171 and three curved strip portions 172 are alternately connected along the extending direction of the probe pin 10. It has a meandering shape, and its width W7 is configured to be larger than the widths W5 and W6 of the band-shaped elastic pieces 151 and 152 shown in FIG.

図９および図１０に示すプローブピン１０は、第１弾性部１４が、相互に隙間１４３を空けて配置された２つの帯状弾性片１４１、１４２で構成され、第２弾性部１５が、単一の帯状弾性片１５４で構成されている。図９および図１０のプローブピン１０の第１弾性部１４の各帯状弾性片１４１、１４２は、３つの直線帯部１６１と、４つの湾曲帯部１６２がプローブピン１０の延在方向に沿って交互に接続された蛇行形状をそれぞれ有している。また、図９および図１０のプローブピン１０の第２弾性部１５の帯状弾性片１５４は、４つの直線帯部１７１と、４つの湾曲帯部１７２がプローブピン１０の延在方向に沿って交互に接続された蛇行形状を有し、その幅Ｗ８が、図７および図８のプローブピン１０における第２弾性部１５の帯状弾性片１５４の幅Ｗ７よりも大きくなるように構成されている。 In the probe pin 10 shown in FIGS. 9 and 10, the first elastic portion 14 is composed of two strip-shaped elastic pieces 141 and 142 arranged with a gap 143 from each other, and the second elastic portion 15 is single. It is composed of a band-shaped elastic piece 154. In the strip-shaped elastic pieces 141 and 142 of the first elastic portion 14 of the probe pin 10 of FIGS. 9 and 10, three straight strip portions 161 and four curved strip portions 162 are formed along the extending direction of the probe pin 10. Each has a meandering shape that is connected alternately. Further, in the band-shaped elastic piece 154 of the second elastic portion 15 of the probe pin 10 of FIGS. 9 and 10, four straight band portions 171 and four curved band portions 172 alternate along the extending direction of the probe pin 10. It has a meandering shape connected to, and its width W8 is configured to be larger than the width W7 of the strip-shaped elastic piece 154 of the second elastic portion 15 in the probe pins 10 of FIGS. 7 and 8.

図９および図１０に示すプローブピン１０の中間部１３には、中間部１３の延在方向の両端部から、中間部１３の延在方向に沿って相互に反対方向に突出する突起部１９０がそれぞれ設けられている。図９および図１０に示すプローブピン１０は、中間部１３の突起部１９０を介して、ソケット３のハウジング５０の内側面５０１を押圧した状態で、収容部７に収容されている。また、図１０に示すように、プローブピン１０がハウジング５０の収容部７に収容された状態において、第１弾性部１４の第１接触部１１に最も近い位置に配置された帯状弾性片１４１の直線帯部１６１が、収容部７を構成するハウジング５０の第２開口面５２に対向する内面５０３に当接している。すなわち、プローブピン１０は、係止部の一例のハウジング５０の内側面５０１および第２開口面５２に対向する内面５０３によって、第１接触部１１および第２接触部１２の配列方向に沿って、ばね定数が大きい第２弾性部１５に接続された第２接触部１２から、ばね定数が小さい第１弾性部１４に接続された第１接触部１１に向かう方向において、係止されている。 In the intermediate portion 13 of the probe pins 10 shown in FIGS. 9 and 10, protrusions 190 projecting from both ends of the intermediate portion 13 in the extending direction along the extending direction of the intermediate portion 13 in opposite directions are provided. Each is provided. The probe pins 10 shown in FIGS. 9 and 10 are housed in the housing portion 7 in a state where the inner side surface 501 of the housing 50 of the socket 3 is pressed via the protrusion 190 of the intermediate portion 13. Further, as shown in FIG. 10, in a state where the probe pin 10 is housed in the housing portion 7 of the housing 50, the strip-shaped elastic piece 141 arranged at the position closest to the first contact portion 11 of the first elastic portion 14. The straight band portion 161 is in contact with the inner surface 503 facing the second opening surface 52 of the housing 50 constituting the accommodating portion 7. That is, the probe pin 10 is provided along the arrangement direction of the first contact portion 11 and the second contact portion 12 by the inner surface 501 facing the inner surface 501 and the second opening surface 52 of the housing 50 of the example of the locking portion. It is locked in the direction from the second contact portion 12 connected to the second elastic portion 15 having a large spring constant toward the first contact portion 11 connected to the first elastic portion 14 having a small spring constant.

なお、図１０に示すソケット３のハウジング５０には、ハウジング５０の内側面５０１および第２開口面５２に対向する内面５０３によってプローブピン１０が係止されているため、段部５５を設けていないが、段部５５を有するハウジング５０を用いても構わない。 The housing 50 of the socket 3 shown in FIG. 10 is not provided with a step portion 55 because the probe pin 10 is locked by the inner surface 501 facing the inner surface 501 of the housing 50 and the inner surface 503 facing the second opening surface 52. However, a housing 50 having a stepped portion 55 may be used.

また、例えば、図１１および図１２に示すように、第２弾性部１５をプローブピン１０の延在方向沿いに直列的に連結された２つの弾性ユニット１５５で構成してもよい。 Further, for example, as shown in FIGS. 11 and 12, the second elastic portion 15 may be composed of two elastic units 155 connected in series along the extending direction of the probe pin 10.

詳しくは、図１２に示すように、各弾性ユニット１５５は、プローブピン１０の延在方向に延びている連結帯部１８０と、プローブピン１０の延在方向に直交する幅方向に延びると共にプローブピン１０の延在方向に隙間を空けて配置された一対の直線帯部１８１と、各直線帯部１８１の連結帯部１８０に対して同じ側に配置された端部をそれぞれ接続する湾曲帯部１８２とで構成されている。湾曲帯部１８２は、プローブピン１０の延在方向の直交方向でかつ連結帯部１８０から離れる方向に突出した円弧状に延びている。 Specifically, as shown in FIG. 12, each elastic unit 155 extends in the width direction orthogonal to the extending direction of the probe pin 10 and the connecting band portion 180 extending in the extending direction of the probe pin 10, and the probe pin. A pair of straight band portions 181 arranged with a gap in the extending direction of 10 and a curved band portion 182 connecting ends arranged on the same side with respect to the connecting band portion 180 of each straight band portion 181. It is composed of and. The curved band portion 182 extends in an arc shape protruding in a direction orthogonal to the extending direction of the probe pin 10 and in a direction away from the connecting band portion 180.

プローブピン１０の延在方向における第１接触部１１側の弾性ユニット１５５（以下、第１弾性ユニット１５５という）の連結帯部１８０は、中間部１３のその延在方向の略中央部と、第１弾性ユニット１５５の第１接触部１１側の直線帯部１８１の略中央部とに接続されている。また、プローブピン１０の延在方向における第２接触部１２側の弾性ユニット１５５（以下、第２弾性ユニット１５５という）の連結帯部１８０は、第１弾性ユニット１５５の第２接触部１２側の直線帯部１８１の略中央部と、第２弾性ユニット１５５の第１接触部１１側の直線帯部１８１とに接続されている。また、第２弾性ユニット１５５の第２接触部１２側の直線帯部１８１の略中央部には、第２接触部１２が接続されている。 The connecting band portion 180 of the elastic unit 155 (hereinafter referred to as the first elastic unit 155) on the first contact portion 11 side in the extending direction of the probe pin 10 is a substantially central portion of the intermediate portion 13 in the extending direction and the first. 1 The elastic unit 155 is connected to a substantially central portion of a straight band portion 181 on the first contact portion 11 side. Further, the connecting band portion 180 of the elastic unit 155 (hereinafter referred to as the second elastic unit 155) on the second contact portion 12 side in the extending direction of the probe pin 10 is on the second contact portion 12 side of the first elastic unit 155. It is connected to a substantially central portion of the straight band portion 181 and a straight band portion 181 on the first contact portion 11 side of the second elastic unit 155. Further, the second contact portion 12 is connected to the substantially central portion of the linear band portion 181 on the second contact portion 12 side of the second elastic unit 155.

すなわち、各弾性部１４、１５は、直線帯部１６１、１７１および湾曲帯部１６２、１７２で構成された蛇行形状に限らず、各接点部１１１、１２１と検査装置あるいは検査対象物との間の接圧を確保可能な他の構成を採用することもできる。 That is, the elastic portions 14 and 15 are not limited to the meandering shape composed of the straight band portions 161 and 171 and the curved band portions 162 and 172, but are between the contact portions 111 and 121 and the inspection device or the inspection object. Other configurations that can secure contact pressure can also be adopted.

なお、第２弾性部１５は、２つの弾性ユニット１５５を連結して構成する場合に限らず、１つ弾性ユニット１５５のみで構成してもよいし、３つ以上の弾性ユニット１５５を連結して構成してもよい。また、第１弾性部１４を複数の弾性ユニット１５５で構成してもよい。 The second elastic portion 15 is not limited to the case where two elastic units 155 are connected to each other, and may be composed of only one elastic unit 155 or three or more elastic units 155 connected to each other. It may be configured. Further, the first elastic portion 14 may be composed of a plurality of elastic units 155.

また、例えば、図１３および図１４に示すように、プローブピン１０の板厚方向から見て、プローブピン１０の延在方向に直交する方向において第２接触部１２が直線Ｌ３から離れて配置されるように（すなわち、第１接点部１１１および第２接点部１２１がオフセットするように）、第２弾性部１５を構成してもよい。 Further, for example, as shown in FIGS. 13 and 14, the second contact portion 12 is arranged away from the straight line L3 in the direction orthogonal to the extending direction of the probe pin 10 when viewed from the plate thickness direction of the probe pin 10. The second elastic portion 15 may be configured so as to (that is, the first contact portion 111 and the second contact portion 121 are offset).

詳しくは、図１３および図１４のプローブピン１０は、第２接触部１２が単一の帯状弾性片１５６で構成されている。図１３および図１４のプローブピン１０の第２弾性部１５の帯状弾性片１５６は、２つの直線帯部１７１および３つの湾曲帯部１７２がプローブピン１０の延在方向に沿って交互に接続された蛇行形状で、第１弾性部１４の幅Ｗ４と略同一の幅を有している。 Specifically, in the probe pins 10 of FIGS. 13 and 14, the second contact portion 12 is composed of a single band-shaped elastic piece 156. In the strip-shaped elastic piece 156 of the second elastic portion 15 of the probe pin 10 of FIGS. 13 and 14, two straight strip portions 171 and three curved strip portions 172 are alternately connected along the extending direction of the probe pin 10. It has a meandering shape and has substantially the same width as the width W4 of the first elastic portion 14.

図１３および図１４のプローブピン１０を収容するソケット３は、直線Ｌ３に直交する方向において直線Ｌ３から遠い方のハウジング５０の側壁５０２に開口部５６が設けられている。この開口部５６は、直線Ｌ３の延在方向において、段部５５から第２開口面５２まで延びて、収容部７および第２開口面５２の開口部５４に接続されている。図１３および図１４に示すプローブピン１０は、第２接触部１２が、第２開口面５２の開口部５４およびハウジング５０の側壁５０２の開口部５６からハウジング５０の外部に露出した状態で、収容部７に収容されている。 The socket 3 accommodating the probe pins 10 of FIGS. 13 and 14 is provided with an opening 56 in the side wall 502 of the housing 50 farther from the straight line L3 in the direction orthogonal to the straight line L3. The opening 56 extends from the step portion 55 to the second opening surface 52 in the extending direction of the straight line L3, and is connected to the opening portion 54 of the accommodating portion 7 and the second opening surface 52. The probe pins 10 shown in FIGS. 13 and 14 are housed in a state where the second contact portion 12 is exposed to the outside of the housing 50 from the opening 54 of the second opening surface 52 and the opening 56 of the side wall 502 of the housing 50. It is housed in part 7.

なお、第２弾性部１５に代えて、第１弾性部１４を第１接点部１１１および第２接点部１２１がオフセットするように構成してもよい。 Instead of the second elastic portion 15, the first elastic portion 14 may be configured so that the first contact portion 111 and the second contact portion 121 are offset.

中間部１３は、第１接触部１１および第２接触部１２を結んだ配列方向に交差する方向に延びる板状である場合に限らない。例えば、図１５および図１６に示すように、中間部１３は、第１接触部１１および第２接触部１２の配列方向の直交方向に延びる板状の本体部１３０と、本体部１３０のその延在方向の両端部にそれぞれ設けられた第１腕部１３１および第２腕部１３２とで構成することができる。第１腕部１３１は、中間部１３のその延在方向の一端部（すなわち、図１６の右端部）における第１接触部１１側の面からプローブピン１０の延在方向に沿って第１接触部１１に向かって延びている。また、第２腕部１３２は、中間部のその延在方向の他端部（すなわち、図１６の左端部）における第２接触部１２側の面からプローブピン１０の延在方向に沿って第２接触部１２に向かって延びている。 The intermediate portion 13 is not limited to the case where the intermediate portion 13 has a plate shape extending in a direction intersecting the arrangement direction connecting the first contact portion 11 and the second contact portion 12. For example, as shown in FIGS. 15 and 16, the intermediate portion 13 has a plate-shaped main body portion 130 extending in a direction orthogonal to the arrangement direction of the first contact portion 11 and the second contact portion 12, and an extension thereof of the main body portion 130. It can be composed of a first arm portion 131 and a second arm portion 132 provided at both ends in the existing direction, respectively. The first arm portion 131 is first contacted along the extending direction of the probe pin 10 from the surface on the first contact portion 11 side at one end of the intermediate portion 13 in the extending direction (that is, the right end portion in FIG. 16). It extends toward the portion 11. Further, the second arm portion 132 is formed along the extending direction of the probe pin 10 from the surface on the second contact portion 12 side at the other end of the intermediate portion in the extending direction (that is, the left end portion in FIG. 16). 2 Extends toward the contact portion 12.

図１６に示すように、プローブピン１０がハウジング５０の収容部７に収容された状態において、第１腕部１３１の先端部１３３は、ハウジング５０の収容部７を構成するハウジング５０の第２開口面５２に対向する内面５０３に当接し、第２腕部１３２の先端部１３４は、ベースハウジング４の第１ハウジング５に当接する。すなわち、ハウジング５０の収容部７を構成するハウジング５０の第２開口面５２に対向する内面５０３が、収容部７に収容されたプローブピン１０の中間部１３を配列方向に沿って第２接触部１２から第１接触部１１に向かう方向において係止する係止部を構成している。また、図１５および図１６に示すプローブピン１０は、中間部１３の第１腕部１３１および第２腕部１３２がソケット３およびベースハウジング４に支持されて、収容部７に保持されるように構成されている。 As shown in FIG. 16, in a state where the probe pin 10 is accommodated in the accommodating portion 7 of the housing 50, the tip portion 133 of the first arm portion 131 is the second opening of the housing 50 constituting the accommodating portion 7 of the housing 50. It abuts on the inner surface 503 facing the surface 52, and the tip 134 of the second arm 132 abuts on the first housing 5 of the base housing 4. That is, the inner surface 503 facing the second opening surface 52 of the housing 50 constituting the accommodating portion 7 of the housing 50 has a second contact portion along the arrangement direction of the intermediate portion 13 of the probe pins 10 accommodated in the accommodating portion 7. It constitutes a locking portion that locks in the direction from the 12 to the first contact portion 11. Further, in the probe pin 10 shown in FIGS. 15 and 16, the first arm portion 131 and the second arm portion 132 of the intermediate portion 13 are supported by the socket 3 and the base housing 4, and are held by the accommodating portion 7. It is configured.

なお、図１６に示すソケット３のハウジング５０には、ハウジング５０の第２開口面５２に対向する内面５０３によってプローブピン１０が係止されているため、段部５５を設けていないが、段部５５を有するハウジング５０を用いても構わない。 Since the probe pin 10 is locked to the housing 50 of the socket 3 shown in FIG. 16 by the inner surface 503 facing the second opening surface 52 of the housing 50, the step portion 55 is not provided, but the step portion is provided. A housing 50 having 55 may be used.

また、例えば、図１７および図１８に示すように、中間部１３は、第１接触部１１および第２接触部１２の配列方向の直交方向に延びる板状の本体部１３０と、本体部１３０のその延在方向の一端部に設けられ、プローブピン１０の延在方向に沿って中間部１３に対して反対方向に延びる第３腕部１３５および第４腕部１３６とで構成することができる。第３腕部１３５は、中間部１３のその延在方向の一端部（すなわち、図１８の右端部）における第１接触部１１側からプローブピン１０の延在方向に沿って第１接触部１１に向かって延びている。また、第３腕部１３５の先端部には、第３腕部１３５から第１接触部１１に向かって本体部１３０と略平行に延びる当接部１３７が設けられている。また、第４腕部１３６は、中間部１３のその延在方向の一端部（すなわち、図１８の右端部）における第２接触部１２側からプローブピン１０の延在方向に沿って第２接触部１２に向かって延びている。また、第４腕部１３６の先端部には、第４腕部１３６から第２接触部１２に向かって本体部１３０と略平行に延びる当接部１３８が設けられている。なお、第１弾性部１４および第２弾性部１５と中間部１３とは、本体部１３０のその延在方向の他端部（すなわち、図１８の左端部）で接続されている。 Further, for example, as shown in FIGS. 17 and 18, the intermediate portion 13 is a plate-shaped main body portion 130 extending in a direction orthogonal to the arrangement direction of the first contact portion 11 and the second contact portion 12, and the main body portion 130. It can be composed of a third arm portion 135 and a fourth arm portion 136 which are provided at one end in the extending direction and extend in the direction opposite to the intermediate portion 13 along the extending direction of the probe pin 10. The third arm portion 135 is a first contact portion 11 along the extending direction of the probe pin 10 from the first contact portion 11 side at one end of the intermediate portion 13 in the extending direction (that is, the right end portion in FIG. 18). Extends towards. Further, the tip portion of the third arm portion 135 is provided with a contact portion 137 extending substantially parallel to the main body portion 130 from the third arm portion 135 toward the first contact portion 11. Further, the fourth arm portion 136 is in second contact along the extending direction of the probe pin 10 from the second contact portion 12 side at one end of the intermediate portion 13 in the extending direction (that is, the right end portion in FIG. 18). It extends toward the portion 12. Further, the tip portion of the fourth arm portion 136 is provided with a contact portion 138 extending substantially parallel to the main body portion 130 from the fourth arm portion 136 toward the second contact portion 12. The first elastic portion 14, the second elastic portion 15, and the intermediate portion 13 are connected by the other end portion (that is, the left end portion in FIG. 18) of the main body portion 130 in the extending direction.

図１８に示すように、プローブピン１０がハウジング５０の収容部７に収容された状態において、第３腕部１３５の当接部１３７は、ハウジング５０の収容部７を構成するハウジング５０の第２開口面５２に対向する内面５０３に当接し、第４腕部１３６の当接部１３８は、ベースハウジング４の第１ハウジング５に当接する。すなわち、ハウジング５０の収容部７を構成するハウジング５０の第２開口面５２に対向する内面５０３が、収容部７に収容されたプローブピン１０の中間部１３を配列方向に沿って第２接触部１２から第１接触部１１に向かう方向において係止する係止部を構成している。また、図１７および図１８に示すプローブピン１０は、中間部１３の第３腕部１３５の当接部１３７および第４腕部１３６の当接部１３８がソケット３およびベースハウジング４に支持されて、収容部７に保持されるように構成されている。 As shown in FIG. 18, in a state where the probe pin 10 is accommodated in the accommodating portion 7 of the housing 50, the contact portion 137 of the third arm portion 135 is the second of the housing 50 constituting the accommodating portion 7 of the housing 50. It abuts on the inner surface 503 facing the opening surface 52, and the abutting portion 138 of the fourth arm portion 136 abuts on the first housing 5 of the base housing 4. That is, the inner surface 503 facing the second opening surface 52 of the housing 50 constituting the accommodating portion 7 of the housing 50 has a second contact portion along the arrangement direction of the intermediate portion 13 of the probe pins 10 accommodated in the accommodating portion 7. It constitutes a locking portion that locks in the direction from the 12 to the first contact portion 11. Further, in the probe pin 10 shown in FIGS. 17 and 18, the contact portion 137 of the third arm portion 135 of the intermediate portion 13 and the contact portion 138 of the fourth arm portion 136 are supported by the socket 3 and the base housing 4. , It is configured to be held in the accommodating portion 7.

なお、図１８に示すソケット３のハウジング５０には、ハウジング５０の第２開口面５２に対向する内面５０３によってプローブピン１０が係止されているため、段部５５を設けていないが、段部５５を有するハウジング５０を用いても構わない。 Since the probe pin 10 is locked to the housing 50 of the socket 3 shown in FIG. 18 by the inner surface 503 facing the second opening surface 52 of the housing 50, the step portion 55 is not provided, but the step portion is provided. A housing 50 having 55 may be used.

また、第２弾性部１５は、２つの帯状弾性片１５１、１５２で構成されている場合に限らず、例えば、図１９および図２０に示すように、４つの帯状弾性片１９１、１９２、１９３、１９４で構成してもよい。なお、第２弾性部１５は、単一の帯状弾性片で構成してもよいし、３つの帯状弾性片で構成してもよいし、５以上の帯状弾性片で構成してもよい。 Further, the second elastic portion 15 is not limited to the case where it is composed of two strip-shaped elastic pieces 151, 152, and for example, as shown in FIGS. 19 and 20, the four strip-shaped elastic pieces 191, 192, 193, It may be composed of 194. The second elastic portion 15 may be composed of a single band-shaped elastic piece, may be composed of three band-shaped elastic pieces, or may be composed of five or more band-shaped elastic pieces.

また、例えば、図２１および図２２に示すように、中間部１３に、その板厚方向に貫通する貫通孔部１３９を設けてもよい。図２１および図２２に示すプローブピン１０では、中間部１３は、略矩形状を有し、その中央部に略円形状の貫通孔部１３９が設けられている。なお、図２２に示すように、中間部１３のプローブピン１０の延在方向における第１接触部１１側の面でかつプローブピン１０の延在方向の直交方向における一端部（すなわち、図２２の右端部）に、第１弾性部１４が接続され、中間部１３のプローブピン１０の延在方向の直交方向における一端部側の面でかつプローブピン１０の延在方向における第２接触部１２側に、第２弾性部１５が接続されている。 Further, for example, as shown in FIGS. 21 and 22, the intermediate portion 13 may be provided with a through hole portion 139 penetrating in the plate thickness direction thereof. In the probe pins 10 shown in FIGS. 21 and 22, the intermediate portion 13 has a substantially rectangular shape, and a substantially circular through hole portion 139 is provided in the central portion thereof. As shown in FIG. 22, one end of the intermediate portion 13 on the surface on the first contact portion 11 side in the extending direction of the probe pin 10 and in the direction orthogonal to the extending direction of the probe pin 10 (that is, in FIG. 22). The first elastic portion 14 is connected to the right end portion), and is the surface of the intermediate portion 13 on the one end side in the direction orthogonal to the extending direction of the probe pin 10 and the second contact portion 12 side in the extending direction of the probe pin 10. The second elastic portion 15 is connected to.

図２２に示すように、プローブピン１０がハウジング５０の収容部７に収容された状態において、第１弾性部１４の第１接触部１１に最も近い位置に配置された直線帯部１６１が、収容部７を構成するハウジング５０の第２開口面５２に対向する内面５０３に当接し、第２弾性部１５の直線帯部１７１が、ベースハウジング４の第１ハウジング５に当接している。すなわち、図２１および図２２に示すプローブピン１０は、第１弾性部１４の直線帯部１６１および第２弾性部１５の直線帯部１７１がソケット３およびベースハウジング４に支持されて、収容部７に保持されるように構成されている。 As shown in FIG. 22, in a state where the probe pin 10 is accommodated in the accommodating portion 7 of the housing 50, the linear band portion 161 arranged at the position closest to the first contact portion 11 of the first elastic portion 14 accommodates the probe pin 10. The linear band portion 171 of the second elastic portion 15 abuts on the inner surface 503 facing the second opening surface 52 of the housing 50 constituting the portion 7, and abuts on the first housing 5 of the base housing 4. That is, in the probe pin 10 shown in FIGS. 21 and 22, the linear band portion 161 of the first elastic portion 14 and the linear band portion 171 of the second elastic portion 15 are supported by the socket 3 and the base housing 4, and the accommodating portion 7 is provided. It is configured to be held in.

図２１および図２２に示すプローブピン１０を収容するソケット３のハウジング５０は、図１４に示すソケット３と同様に、プローブピン１０の板厚方向から見て、直線Ｌ３に直交する方向において直線Ｌ３から遠い方のハウジング５０の側壁５０２に開口部５６が設けられている。このソケット３のハウジング５０には、各収容部７の配列方向（すなわち、図２２の紙面貫通方向）に延びて、各収容部７を連通する連結用孔部５０４が設けられている。 Similar to the socket 3 shown in FIG. 14, the housing 50 of the socket 3 accommodating the probe pin 10 shown in FIGS. 21 and 22 has a straight line L3 in a direction orthogonal to the straight line L3 when viewed from the plate thickness direction of the probe pin 10. An opening 56 is provided in the side wall 502 of the housing 50 farther from the housing 50. The housing 50 of the socket 3 is provided with a connecting hole 504 extending in the arrangement direction of each accommodating portion 7 (that is, the paper penetrating direction in FIG. 22) and communicating with each accommodating portion 7.

また、図２３に示すように、ハウジング５０の各収容部７の配列方向の両端部には、第２開口面５２から第１開口面５１に向かって収容部７の配列方向の幅が狭くなる段部５７が設けられている。各プローブピン１０は、中間部１３の貫通孔部１３９に配置された略円柱形状の連結棒部５８によって一体化され、対応する収容部７に収容される。連結棒部５８は、連結用孔部５０４に配置され、その延在方向の両端部がハウジング５０の段部５７により係止されている。すなわち、ハウジング５０の収容部７を構成するハウジング５０の第２開口面５２に対向する内面５０３と、連結棒部５８を係止する段部５７とが、収容部７に収容されたプローブピン１０の中間部１３を配列方向に沿って第２接触部１２から第１接触部１１に向かう方向において係止する係止部を構成している。 Further, as shown in FIG. 23, the width of the housing portions 7 in the arrangement direction becomes narrower from the second opening surface 52 toward the first opening surface 51 at both ends of the housing 50 in the arrangement direction. A step portion 57 is provided. Each probe pin 10 is integrated by a substantially cylindrical connecting rod portion 58 arranged in the through hole portion 139 of the intermediate portion 13 and is accommodated in the corresponding accommodating portion 7. The connecting rod portion 58 is arranged in the connecting hole portion 504, and both ends thereof in the extending direction are locked by the stepped portion 57 of the housing 50. That is, the probe pin 10 in which the inner surface 503 facing the second opening surface 52 of the housing 50 constituting the accommodating portion 7 of the housing 50 and the step portion 57 for locking the connecting rod portion 58 are accommodated in the accommodating portion 7. A locking portion is formed which locks the intermediate portion 13 of the above in the direction from the second contact portion 12 to the first contact portion 11 along the arrangement direction.

検査治具２およびベースハウジング４は、検査装置あるいは検査対象物の様々な態様に応じて、その構成を適宜変更することができる。すなわち、検査治具２およびベースハウジング４を汎用化して、検査ユニット１（ひいては検査装置）の生産性を向上させることができる。 The configurations of the inspection jig 2 and the base housing 4 can be appropriately changed according to various aspects of the inspection device or the inspection target. That is, the inspection jig 2 and the base housing 4 can be generalized to improve the productivity of the inspection unit 1 (and thus the inspection device).

以上、図面を参照して本開示における種々の実施形態を詳細に説明したが、最後に、本開示の種々の態様について説明する。なお、以下の説明では、一例として、参照符号も添えて記載する。 The various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure will be described. In the following description, a reference reference numeral is also described as an example.

本開示の第１態様のプローブピン１０は、
板状の第１接触部１１および板状の第２接触部１２と、
前記第１接触部１１および前記第２接触部１２の間に配置された中間部１３と、
前記第１接触部１１および前記中間部１３に接続され、前記第１接触部１１および前記第２接触部１２を結んだ配列方向に沿って伸縮する第１弾性部１４と、
前記中間部１３および前記第２接触部１２に接続され、前記配列方向に沿って伸縮する第２弾性部１５と
を備え、
前記第１弾性部１４のばね常数が、前記第２弾性部１５のばね常数よりも小さくなるように構成されている。The probe pin 10 of the first aspect of the present disclosure is
The plate-shaped first contact portion 11 and the plate-shaped second contact portion 12 and
An intermediate portion 13 arranged between the first contact portion 11 and the second contact portion 12 and
A first elastic portion 14 that is connected to the first contact portion 11 and the intermediate portion 13 and expands and contracts along an arrangement direction connecting the first contact portion 11 and the second contact portion 12.
A second elastic portion 15 that is connected to the intermediate portion 13 and the second contact portion 12 and expands and contracts along the arrangement direction is provided.
The spring constant of the first elastic portion 14 is configured to be smaller than the spring constant of the second elastic portion 15.

第１態様のプローブピン１０によれば、第１接触部１１および中間部１３に接続されかつ第１接触部１１および第２接触部１２を結んだ配列方向に沿って伸縮する第１弾性部１４のばね常数が、中間部１３および第２接触部１２に接続されかつ第１接触部１１および第２接触部１２を結んだ配列方向に沿って伸縮する第２弾性部１５のばね常数よりも小さくなるように構成されている。これにより、検査対象物および検査装置に対して異なる接触荷重で接触可能なプローブピン１０を実現できる。 According to the probe pin 10 of the first aspect, the first elastic portion 14 which is connected to the first contact portion 11 and the intermediate portion 13 and expands and contracts along the arrangement direction connecting the first contact portion 11 and the second contact portion 12. Is smaller than the spring constant of the second elastic portion 15, which is connected to the intermediate portion 13 and the second contact portion 12 and expands and contracts along the arrangement direction connecting the first contact portion 11 and the second contact portion 12. It is configured to be. This makes it possible to realize a probe pin 10 capable of contacting an inspection object and an inspection device with different contact loads.

本開示の第２態様のプローブピン１０は、
前記第１弾性部１４の前記中間部１３および前記第１接触部１１間の第１経路６１の長さと、前記第２弾性部１５の前記中間部１３および前記第２接触部１２間の第２経路６２の長さとが異なっているか、あるいは、前記第１経路６１のその延在方向に直交する幅方向の長さである第１幅と、前記第２経路６２のその延在方向に直交する幅方向の長さである第２幅とが異なっているか、あるいは、前記第１経路６１の長さと前記第２経路６２の長さが異なっておりかつ前記第１幅と前記第２幅とが異なっている。The probe pin 10 of the second aspect of the present disclosure is
The length of the first path 61 between the intermediate portion 13 and the first contact portion 11 of the first elastic portion 14, and the second between the intermediate portion 13 and the second contact portion 12 of the second elastic portion 15. The length of the path 62 is different, or the first width, which is the length in the width direction orthogonal to the extending direction of the first path 61, is orthogonal to the extending direction of the second path 62. The second width, which is the length in the width direction, is different, or the length of the first path 61 and the length of the second path 62 are different, and the first width and the second width are different. It's different.

第２態様のプローブピン１０によれば、設計の自由度が高いプローブピン１０を実現できる。 According to the probe pin 10 of the second aspect, the probe pin 10 having a high degree of freedom in design can be realized.

本開示の第３態様のプローブピン１０は、
前記第１弾性部１４および前記第２弾性部１５の各々が、前記配列方向に交差する直線帯部１６１、１７１と、前記直線帯部１６１、１７１に接続された湾曲帯部１６２、１７２とが交互に連続する蛇行形状を有している。The probe pin 10 of the third aspect of the present disclosure is
The first elastic portion 14 and the second elastic portion 15 each have a straight band portion 161 and 171 intersecting in the arrangement direction and a curved band portion 162 and 172 connected to the straight band portion 161 and 171. It has an alternately continuous meandering shape.

第３態様のプローブピン１０によれば、検査対象物および検査装置に対して異なる接触荷重で接触可能なプローブピン１０を容易に実現できる。 According to the probe pin 10 of the third aspect, it is possible to easily realize the probe pin 10 capable of contacting the inspection object and the inspection device with different contact loads.

本開示の第４態様のプローブピン１０は、
前記第１弾性部１４の前記湾曲帯部１６２の数が、前記第２弾性部１５の前記湾曲帯部１７２の数よりも多くなるように構成されている。The probe pin 10 of the fourth aspect of the present disclosure is
The number of the curved band portions 162 of the first elastic portion 14 is configured to be larger than the number of the curved band portions 172 of the second elastic portion 15.

第４態様のプローブピン１０によれば、設計の自由度が高いプローブピン１０を実現できる。 According to the probe pin 10 of the fourth aspect, the probe pin 10 having a high degree of freedom in design can be realized.

本開示の第５態様の検査治具２は、
請求項１から４のいずれか１つプローブピン１０と、
前記プローブピンを収容可能な収容部を有するソケット３と
を備え、
前記ソケット３が、
前記収容部７に収容された前記プローブピン１０の前記中間部１３を、前記配列方向に沿って前記第２接触部１２から前記第１接触部１１に向かう方向において係止する係止部５５、５０１、５０３、５７を有している。The inspection jig 2 of the fifth aspect of the present disclosure is
The probe pin 10 according to any one of claims 1 to 4 and
A socket 3 having an accommodating portion capable of accommodating the probe pin is provided.
The socket 3
The locking portion 55, which locks the intermediate portion 13 of the probe pin 10 housed in the accommodating portion 7 in the direction from the second contact portion 12 toward the first contact portion 11 along the arrangement direction. It has 501, 503, 57.

第５態様の検査治具２によれば、プローブピン１０により、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査治具２を実現できる。 According to the inspection jig 2 of the fifth aspect, the probe pin 10 can realize the inspection jig 2 capable of contacting an inspection object and an inspection device having different required contact loads.

本開示の第６態様の検査ユニット１は、
前記検査治具を少なくとも１つ備えた。The inspection unit 1 of the sixth aspect of the present disclosure is
At least one of the inspection jigs was provided.

第６態様の検査ユニット１によれば、検査治具２により、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査ユニット１を実現できる。 According to the inspection unit 1 of the sixth aspect, the inspection jig 2 can realize the inspection unit 1 capable of contacting an inspection object and an inspection device having different required contact loads.

本開示の第７態様の検査装置は、
前記検査ユニット１を少なくとも１つ備えた。The inspection device of the seventh aspect of the present disclosure is
At least one of the inspection units 1 was provided.

第７態様の検査装置によれば、要求される接触荷重が異なる検査対象物および検査装置に接触可能な検査装置を実現できる。 According to the inspection device of the seventh aspect, it is possible to realize an inspection device capable of contacting an inspection object and an inspection device having different required contact loads.

なお、前記様々な実施形態または変形例のうちの任意の実施形態または変形例を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。また、実施形態同士の組み合わせまたは実施例同士の組み合わせまたは実施形態と実施例との組み合わせが可能であると共に、異なる実施形態または実施例の中の特徴同士の組み合わせも可能である。 By appropriately combining any of the various embodiments or modifications thereof, the effects of each can be achieved. Further, a combination of embodiments, a combination of examples, or a combination of an embodiment and an embodiment is possible, and a combination of features in different embodiments or examples is also possible.

本開示のプローブピンは、例えば、液晶パネルの検査に用いる検査治具に適用できる。 The probe pin of the present disclosure can be applied to, for example, an inspection jig used for inspecting a liquid crystal panel.

本開示の検査治具は、例えば、液晶パネルの検査に用いる検査ユニットに適用できる。 The inspection jig of the present disclosure can be applied to, for example, an inspection unit used for inspecting a liquid crystal panel.

本開示の検査ユニットは、例えば、液晶パネルの検査装置に適用できる。 The inspection unit of the present disclosure can be applied to, for example, an inspection device for a liquid crystal panel.

本開示の検査装置は、例えば、液晶パネルの検査に用いることができる。 The inspection device of the present disclosure can be used, for example, for inspecting a liquid crystal panel.

１ 検査ユニット
２ 検査治具
３ ソケット
４ ベースハウジング
５ 第１ハウジング
６ 第２ハウジング
７ 収容部
１０ プローブピン
１１ 第１接触部
１１１ 第１接点部
１２ 第２接触部
１２１ 第２接点部
１３ 中間部
１３０ 本体部
１３１、１３２、１３５、１３６ 腕部
１３３、１３４ 先端部
１３７、１３８ 当接部
１３９ 貫通孔部
１４ 第１弾性部
１４１、１４２ 帯状弾性片
１４３ 隙間
１５ 第２弾性部
１５１、１５２、１５４、１５６、１９１、１９２、１９３、１９４ 帯状弾性片
１５３ 隙間
１５５ 弾性ユニット
１６１、１７１、１８１ 直線帯部
１６２、１７２、１８２ 湾曲帯部
１８０ 連結帯部
１９０ 突起部
５０ ハウジング
５０１ 内側面
５０２ 側壁
５０３ 内面
５０４ 連結用孔部
５１ 第１開口面
５２ 第２開口面
５３、５４、５６ 開口部
５５、５７ 段部
５８ 連結棒部
６１ 第１経路
６２ 第２経路
Ｌ１〜Ｌ３ 直線
Ｗ１〜Ｗ８ 幅1 Inspection unit 2 Inspection jig 3 Socket 4 Base housing 5 1st housing 6 2nd housing 7 Housing part 10 Probe pin 11 1st contact part 111 1st contact part 12 2nd contact part 121 2nd contact part 13 Intermediate part 130 Main body 131, 132, 135, 136 Arm 133, 134 Tip 137, 138 Abutment 139 Through hole 14 First elastic part 141, 142 Band-shaped elastic piece 143 Gap 15 Second elastic part 151, 152, 154, 156, 191, 192, 193, 194 Band-shaped elastic piece 153 Gap 155 Elastic unit 161, 171, 181 Straight band part 162, 172, 182 Curved band part 180 Connecting band part 190 Protrusion part 50 Housing 501 Inner side surface 502 Side wall 503 Inner surface 504 Connection hole 51 First opening surface 52 Second opening surface 53, 54, 56 Opening 55, 57 Stepped portion 58 Connecting rod 61 First path 62 Second path L1 to L3 Straight line W1 to W8 width

Claims (9)

第１接触部および第２接触部と、前記第１接触部および前記第２接触部の間に配置された中間部と、前記第１接触部および前記中間部に接続され、前記第１接触部および前記第２接触部を結んだ配列方向に沿って伸縮する第１弾性部と、前記中間部および前記第２接触部に接続され、前記配列方向に沿って伸縮する第２弾性部とを含み、前記第１接触部が、前記配列方向に沿って延びる板状で、前記配列方向における前記中間部から遠い方の端部に設けられた第１接点部を有し、前記第２接触部が、前記配列方向に沿って延びる板状で、前記配列方向における前記中間部から遠い方の端部に設けられた第２接点部を有し、前記第１弾性部のばね常数が、前記第２弾性部のばね常数よりも小さくなるように構成されている、プローブピンと、
前記プローブピンを収容可能な収容部を有するソケットと
を備え、
前記ソケットが、
前記収容部に収容された前記プローブピンの前記中間部を、前記配列方向に沿って前記第２接触部から前記第１接触部に向かう方向において係止する係止部を有している、検査治具。 The first contact portion and the second contact portion, the intermediate portion arranged between the first contact portion and the second contact portion, and the first contact portion and the intermediate portion are connected to the first contact portion. includes and a first elastic portion which expands and contracts along the second arrangement direction connecting the contact portion, which is connected to the intermediate portion and the second contact portion, and a second elastic portion which expands and contracts along the arrangement direction The first contact portion has a plate-like shape extending along the arrangement direction, and has a first contact portion provided at an end portion far from the intermediate portion in the arrangement direction, and the second contact portion has the second contact portion. It has a plate-like shape extending along the arrangement direction and has a second contact portion provided at an end portion far from the intermediate portion in the arrangement direction, and the spring normal number of the first elastic portion is the second. The probe pin, which is configured to be smaller than the spring constant of the elastic part ,
With a socket having an accommodating portion capable of accommodating the probe pin
Equipped with
The socket
An inspection having a locking portion for locking the intermediate portion of the probe pin housed in the housing portion in the direction from the second contact portion to the first contact portion along the arrangement direction. Jig . 前記第１弾性部の前記中間部および前記第１接触部間の第１経路の長さと、前記第２弾性部の前記中間部および前記第２接触部間の第２経路の長さとが異なっているか、あるいは、前記第１経路のその延在方向に直交する幅方向の長さである第１幅と、前記第２経路のその延在方向に直交する幅方向の長さである第２幅とが異なっているか、あるいは、前記第１経路の長さと前記第２経路の長さが異なっておりかつ前記第１幅と前記第２幅とが異なっている、請求項１の検査治具。 The length of the first path between the intermediate portion and the first contact portion of the first elastic portion is different from the length of the second path between the intermediate portion and the second contact portion of the second elastic portion. Or, the first width, which is the length in the width direction orthogonal to the extending direction of the first path, and the second width, which is the length in the width direction orthogonal to the extending direction of the second path. The inspection jig according to claim 1, wherein the length of the first path and the length of the second path are different, and the first width and the second width are different. 前記第１弾性部および前記第２弾性部の各々が、前記配列方向に交差する直線帯部と、前記直線帯部に接続された湾曲帯部とが交互に連続する蛇行形状を有している、請求項１または２の検査治具。 Each of the first elastic portion and the second elastic portion has a meandering shape in which a straight band portion intersecting in the arrangement direction and a curved band portion connected to the straight band portion are alternately continuous. , The inspection jig of claim 1 or 2. 前記第１弾性部の前記湾曲帯部の数が、前記第２弾性部の前記湾曲帯部の数よりも多くなるように構成されている、請求項３の検査治具。 The inspection jig according to claim 3, wherein the number of the curved band portions of the first elastic portion is larger than the number of the curved band portions of the second elastic portion. 板状の第１接触部および板状の第２接触部と、前記第１接触部および前記第２接触部の間に配置された中間部と、前記第１接触部および前記中間部に接続され、前記第１接触部および前記第２接触部を結んだ配列方向に沿って伸縮する第１弾性部と、前記中間部および前記第２接触部に接続され、前記配列方向に沿って伸縮する第２弾性部とを含み、前記第１弾性部のばね常数が、前記第２弾性部のばね常数よりも小さくなるように構成され、前記第１弾性部および前記第２弾性部の各々が、前記配列方向に交差する直線帯部と前記直線帯部に接続された湾曲帯部とが交互に連続する蛇行形状を有し、前記第１弾性部の前記湾曲帯部の数が、前記第２弾性部の前記湾曲帯部の数よりも多くなるように構成されている、プローブピンと、
前記プローブピンを収容可能な収容部を有するソケットと
を備え、
前記ソケットが、
前記収容部に収容された前記プローブピンの前記中間部を、前記配列方向に沿って前記第２接触部から前記第１接触部に向かう方向において係止する係止部を有している、検査治具。 It is connected to a plate-shaped first contact portion and a plate-shaped second contact portion, an intermediate portion arranged between the first contact portion and the second contact portion, and the first contact portion and the intermediate portion. A first elastic portion that expands and contracts along the arrangement direction connecting the first contact portion and the second contact portion, and a second elastic portion that is connected to the intermediate portion and the second contact portion and expands and contracts along the arrangement direction. The first elastic portion includes two elastic portions, and the spring normal number of the first elastic portion is configured to be smaller than the spring normal number of the second elastic portion, and each of the first elastic portion and the second elastic portion is described. has a winding shape and a curved strip portion which is connected to the front Symbol straight belt part straight belt portions intersecting the arrangement direction are continuous alternately, the number of the curved belt portions of the first elastic portion, said second A probe pin and a probe pin configured to be greater than the number of elastic strips.
With a socket having an accommodating portion capable of accommodating the probe pin
Equipped with
The socket
An inspection having a locking portion for locking the intermediate portion of the probe pin housed in the housing portion in the direction from the second contact portion to the first contact portion along the arrangement direction. Jig . 前記第１弾性部の前記中間部および前記第１接触部間の第１経路の長さと、前記第２弾性部の前記中間部および前記第２接触部間の第２経路の長さとが異なっているか、あるいは、前記第１経路のその延在方向に直交する幅方向の長さである第１幅と、前記第２経路のその延在方向に直交する幅方向の長さである第２幅とが異なっているか、あるいは、前記第１経路の長さと前記第２経路の長さが異なっておりかつ前記第１幅と前記第２幅とが異なっている、請求項５の検査治具。 The length of the first path between the intermediate portion and the first contact portion of the first elastic portion is different from the length of the second path between the intermediate portion and the second contact portion of the second elastic portion. Or, the first width, which is the length in the width direction orthogonal to the extending direction of the first path, and the second width, which is the length in the width direction orthogonal to the extending direction of the second path. The inspection jig according to claim 5, wherein the length of the first path and the length of the second path are different, and the first width and the second width are different. 板状の第１接触部および板状の第２接触部と、前記第１接触部および前記第２接触部の間に配置された中間部と、前記第１接触部および前記中間部に接続され、前記第１接触部および前記第２接触部を結んだ配列方向に沿って伸縮する第１弾性部と、前記中間部および前記第２接触部に接続され、前記配列方向に沿って伸縮する第２弾性部とを備え、前記第１弾性部のばね常数が、前記第２弾性部のばね常数よりも小さくなるように構成されている、プローブピンと、
前記プローブピンを収容可能な収容部を有するソケットと
を備え、
前記ソケットが、
前記収容部に収容された前記プローブピンの前記中間部を、前記配列方向に沿って前記第２接触部から前記第１接触部に向かう方向において係止する係止部を有している、検査治具。 It is connected to the plate-shaped first contact portion and the plate-shaped second contact portion, the intermediate portion arranged between the first contact portion and the second contact portion, and the first contact portion and the intermediate portion. A first elastic portion that expands and contracts along the arrangement direction connecting the first contact portion and the second contact portion, and a second elastic portion that is connected to the intermediate portion and the second contact portion and expands and contracts along the arrangement direction. A probe pin having two elastic portions and configured such that the spring constant of the first elastic portion is smaller than the spring constant of the second elastic portion.
A socket having an accommodating portion capable of accommodating the probe pin is provided.
The socket
An inspection having a locking portion for locking the intermediate portion of the probe pin housed in the housing portion in the direction from the second contact portion to the first contact portion along the arrangement direction. jig. 請求項１から７のいずれか１つの検査治具を少なくとも１つ備えた、検査ユニット。 An inspection unit provided with at least one inspection jig according to any one of claims 1 to 7. 請求項８の検査ユニットを少なくとも１つ備えた検査装置。 An inspection device including at least one inspection unit according to claim 8.
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