JP6531438B2 - Probe pin and probe unit provided with the same - Google Patents

Description

  The present invention relates to a probe pin and a probe unit provided with the probe pin.

  Conventionally, as a probe pin, there is one described in Patent Document 1. This conventional probe pin comprises a cylindrical sleeve, a connection terminal provided at one end of the sleeve, a contact pin slidingly moving in the sleeve, a shape memory alloy member for connecting the connection terminal and the contact pin, and a sleeve. And a coil spring disposed between the other end and the contact pin.

Unexamined-Japanese-Patent No. 2-150773

  By the way, the said conventional probe pin may be used as a probe unit with a receptacle. Among such conventional probe units, there is one in which the receptacle and the probe pin are fitted to ensure the conduction between the receptacle and the probe pin.

  However, in the probe unit, the inner peripheral surface of the receptacle may be scraped each time the probe pin is replaced, and a gap may be formed between the receptacle and the probe pin. In this case, there is a problem that the contact between the probe pin and the receptacle becomes unstable and the contact reliability is lowered.

  An object of the present invention is to provide a probe pin for receptacle having high contact reliability and a probe unit provided with the same in view of the above-mentioned problems.

  In order to solve the above-mentioned subject, a probe pin concerning the present invention expands and contracts along a center line, a 1st insertion part inserted along the center line from the end of the coil spring, and the above-mentioned coil A conductive first plunger having a first contact portion provided with a support portion for supporting a spring, and the other end of the coil spring being inserted along the center line from the other end of the coil spring, and sliding on the first insertion portion And a conductive second plunger having a second insertion portion movably connected and a second contact portion provided with a support portion for supporting the coil spring. An elastic spring portion protruding from the contact portion is provided in at least one of the first and second contact portions.

  According to the probe pin of the present invention, at least one of the first and second contact portions is provided with an elastic spring portion protruding from the contact portion. Therefore, for example, when the probe pin is inserted into the receptacle, the elastic spring portion presses the inner peripheral surface of the receptacle, so that rattle does not occur between the receptacle and the probe pin, and contact is always made with a predetermined contact pressure. be able to. This can enhance the contact stability between the receptacle and the probe pin.

  As an embodiment of the present invention, the elastic spring portion may be provided at the first and second contact portions.

  According to this embodiment, since the elastic spring portion is provided in each of the first and second contact portions, for example, when the probe pin is inserted into the receptacle, the elasticity of the first and second contact portions is obtained. The spring portion presses the inner circumferential surface of the receptacle. As a result, it is possible to reliably prevent rattling of the probe pin and to improve the contact stability between the receptacle and the probe pin.

  As an embodiment of the present invention, the first and second plungers may be formed by electroforming.

  According to this embodiment, the first and second plungers can be formed with high accuracy. For this reason, the contact stability between the receptacle and the probe pin can be enhanced.

  The probe unit according to the present invention includes the probe pin and a receptacle having a storage portion in which the probe pin is stored and in which the elastic spring portion is disposed.

  According to the probe unit of the present invention, the contact stability can be easily enhanced by the probe pin.

It is a side view of a probe unit provided with a probe pin of a 1st embodiment of the present invention. It is a perspective view of the probe pin of 1st Embodiment of this invention. It is an X arrow directional view of the probe pin of FIG. It is Y arrow directional view of the probe pin of FIG. It is Z arrow directional view of the probe pin of FIG. It is a disassembled perspective view of the probe pin of FIG. It is a longitudinal cross-sectional view of the probe unit of FIG. It is the elements on larger scale of the longitudinal cross-sectional view of FIG. It is a perspective view of the probe pin of 2nd Embodiment of this invention. It is an X arrow directional view of the probe pin of FIG. It is Y arrow directional view of the probe pin of FIG. It is Z arrow directional view of the probe pin of FIG. It is a disassembled perspective view of the probe pin of FIG. It is a perspective view of the probe pin of 3rd Embodiment of this invention. It is an X arrow directional view of the probe pin of FIG. It is Y arrow directional view of the probe pin of FIG. It is Z arrow directional view of the probe pin of FIG. It is a disassembled perspective view of the probe pin of FIG. It is a perspective view of the probe pin of 4th Embodiment of this invention. It is an X arrow directional view of the probe pin of FIG. It is Y arrow directional view of the probe pin of FIG. It is Z arrow directional view of the probe pin of FIG. It is a disassembled perspective view of the probe pin of FIG. It is a perspective view of the probe pin of 5th Embodiment of this invention. It is an X arrow directional view of the probe pin of FIG. It is Y arrow directional view of the probe pin of FIG. It is Z arrow directional view of the probe pin of FIG. It is a disassembled perspective view of the probe pin of FIG. It is a perspective view of the probe pin of 6th Embodiment of this invention. It is an X arrow directional view of the probe pin of FIG. It is Y arrow directional view of the probe pin of FIG. It is Z arrow directional view of the probe pin of FIG. It is a disassembled perspective view of the probe pin of FIG. It is a perspective view of the probe pin of 7th Embodiment of this invention. It is an X arrow line view of the probe pin of FIG. It is Y arrow directional view of the probe pin of FIG. It is Z arrow directional view of the probe pin of FIG. It is a disassembled perspective view of the probe pin of FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, in describing the configuration shown in the drawings, terms indicating directions such as "upper," "lower," "left," "right," etc. and other terms including those are used. However, the purpose of using these terms is to facilitate the understanding of the embodiments through the drawings. Therefore, those terms are not limited to those indicating the direction in which the embodiment of the present invention is actually used, and these terms limit interpretation of the technical scope of the invention described in the claims. It should not be done.

First Embodiment
The probe unit 100 provided with the probe pin according to the first embodiment of the present invention, as shown in FIG. 1, comprises a receptacle 1 and a probe pin 2 inserted in the receptacle 1.

  The probe pin 2 is comprised by the 1st plunger 10, the 2nd plunger 20, and the coiled spring 30, as shown in FIGS. The first and second plungers 10 and 20 each have conductivity, and are formed by, for example, electroforming.

  The first plunger 10 is, as shown in FIG. 6, a rectangular plate having substantially the same thickness, and a contact portion of the first inserted portion, which is an example of the first insertion portion, and an example of the first contact portion. And 12 are composed. In addition, let the surface orthogonal to the plate | board thickness direction of 1st plunger 10 be a main surface, and let the surface parallel to the plate | board thickness direction orthogonal to this main surface be a side surface.

  The to-be-held part 11 has a main surface view rectangular shape, and the guide groove 13 which penetrates the to-be-held part 11 is provided in the front end side (upper side of FIG. 6) of the main surface. The guide groove 13 has a rectangular shape extending in the longitudinal direction of the held portion 11 and has a width larger than the plate thickness of the second plunger 20.

  The contact portion 12 has a substantially rectangular shape in a main surface view having a width larger than that of the clamped portion 11, and has a base 14 of an example of a support portion continuous to the clamped portion 11 and a tip having a free end formed in an arc shape. It is comprised by the part 15 and the elastic spring part 16 provided between the base 14 and the front-end | tip part 15. As shown in FIG.

  The elastic spring portion 16 is composed of a central connecting portion 161 and an elastic curved portion 162 provided on both sides of the central connecting portion 161 with a gap. The central connection portion 161 has a rectangular shape in a main surface view, and is connected to the base portion 14 and the tip portion 15. The elastic curved portion 162 has an arc shape in a main surface view projecting from the side surface of the contact portion 12 and is connected to both ends in the width direction of the base 14 and the tip portion 15.

  The first plunger 10 is formed symmetrically with respect to the center line in the width direction of the main surface.

  As shown in FIG. 6, the second plunger 20 is a linearly extending plate having substantially the same thickness, and the contact portion 21 as an example of the second contact portion, and the proximal end of the contact portion 21 (see FIG. It is comprised by the 1st, 2nd elastic piece 22 and 23 of an example of the 2nd insertion part provided in the lower end of 6). In addition, let the surface orthogonal to the plate | board thickness direction of 2nd plunger 20 be a main surface, and let the surface parallel to the plate | board thickness direction orthogonal to this main surface be a side surface.

  The contact portion 21 has a substantially rectangular shape in a main surface view, and a contact portion 24 having a V-shaped main surface view is provided at the front end (the upper end in FIG. 6). The contact portion 24 has a width larger than that of the contact portion 21. In addition, a coil spring support 25 as an example of a support is provided at the base end (the lower end in FIG. 6) of the contact 21 so as to protrude from the side surface of the contact 21.

  The first and second elastic pieces 22 and 23 have a rectangular shape in a main surface view, and the contact portion 21 also has a small width. The first and second elastic pieces 22 and 23 are respectively disposed at both ends in the width direction of the proximal end of the contact portion 21 and extend substantially parallel to each other at an interval along the longitudinal direction of the contact portion 21. . A gap larger than the plate thickness of the first plunger 10 is formed between the first and second elastic pieces 22 and 23. That is, in the first and second elastic pieces 22 and 23, the distance between the inner side surfaces which are opposite side surfaces is larger than the thickness of the first plunger 10, and between the outer side surfaces which are the opposite side surfaces of the inner side surfaces. The distance is set to be substantially equal to the width of the contact portion 21. The first and second elastic pieces 22 and 23 have different lengths, and the first elastic piece 22 is shorter than the second elastic piece 23.

  A guide protrusion 26 is provided at the tip of the inner surface of the first elastic piece 22 so as to protrude toward the second elastic piece 23. Further, a contact protrusion 27 is provided at a tip of the inner side surface of the second elastic piece 23 so as to protrude toward the first elastic piece 22. The contact projection 27 is disposed so as to always contact the gripped portion 11 of the first plunger 10 in a state where the guide projection 26 of the first elastic piece 22 is fitted in the guide groove 13 of the first plunger 10 ing.

  The coil spring 30 is made of, for example, carbon steel or stainless steel, and is formed to expand and contract along its center line. The coil spring 30 has an inner diameter slightly larger than the width of the held portion 11 of the first plunger 10 and the width of the contact portion 21 of the second plunger 20, as shown in FIGS. . In addition, the coil spring 30 has an outer diameter substantially the same as the width of the contact portion 12 of the first plunger 10 and the width of the portion where the coil spring support 25 of the second plunger 20 is provided. .

  2 to 5, that is, in a state where the first plunger 10 and the second plunger 20 are combined with each other, both ends of the coil spring 30 are the base 14 of the first plunger 10, and The spring length is adjusted so as to be supported by the coil spring support portion 25 of the two plungers 20 and to be always compressed.

  The receptacle 1 is formed of a conductive material, and as shown in FIG. 7, is composed of first and second housings 41 and 42 having an elongated cylindrical shape. The first and second housings 41 and 42 have diameters of different sizes, respectively, and are arranged in line and integrated. Further, inside the first housing 41, a storage portion 43 capable of storing the probe pin 2 is provided. The housing portion 43 is provided with a circular opening 44 opened at one end of the receptacle 1 so that the elastic spring portion 16 of the probe pin 2 is disposed.

  The housing portion 43 has a diameter larger than the width of the held portion 11 of the first plunger 10 of the probe pin 2 and smaller than the width of the elastic spring portion 16.

  Next, an assembly process of the probe unit 100 provided with the probe pin 2 of the first embodiment will be described.

  First, assemble the probe pin 2. First, the first plunger 10 is inserted along the center line of the coil spring 30 from one end side of the coil spring 30, while the second plunger 20 is inserted along the center line of the coil spring 30 from the other end side of the coil spring 30 Do. At this time, the first plunger 10 is inserted into the inside of the coil spring 30 from the clamped portion 11 side, and the second plunger 20 is inserted into the inside of the coil spring 30 from the first and second elastic pieces 22 and 23 side. Ru. Further, as shown in FIG. 5, the first and second plungers 10 and 20 are inserted such that the main surface of the first plunger 10 and the main surface of the second plunger 20 are orthogonal to each other.

  When the second plunger 20 is inserted into the coil spring 30, the contact protrusion 27 of the second elastic piece 23 contacts the pinched portion 11 of the first plunger 10. Then, the second elastic piece 23 is elastically deformed in the direction orthogonal to the insertion direction of the probe pin 2, and the contact protrusion 27 of the second elastic piece 23 is inserted into the guide groove 13 of the first plunger 10.

  When the second plunger 20 is inserted into the inside of the coil spring 30 after the contact projection 27 of the second elastic piece 23 is inserted into the guide groove 13 of the first plunger 10, the guide projection of the first elastic piece 22 The contact 26 is in contact with the held portion 11 of the first plunger 10. Then, the first elastic piece 22 is elastically deformed in a direction orthogonal to the insertion direction of the probe pin 2, and the held portion 11 is held by the first elastic piece 22 and the second elastic piece 23.

  When the second plunger 20 is further inserted into the coil spring 30 after the held portion 11 is held between the first elastic piece 22 and the second elastic piece 23, the contact protrusion 27 of the second elastic piece 23 is formed. Contacts the end of the guide groove 13 (the lower end in FIG. 6). Then, the second elastic piece 23 elastically deforms in the direction orthogonal to the insertion direction of the probe pin 2 and the contact protrusion 27 contacts the base end side (the lower side of the guide groove 64 in FIG. 6) of the held portion 11. Further, the guide protrusion 26 of the first elastic piece 22 is inserted into the guide groove 13, and the first and second plungers 10 and 20 are connected. This completes the assembly of the probe pin 2.

  When the assembly of the probe pin 2 is completed, the probe pin 2 is inserted into the receptacle 1 from the first plunger 10 side. When the probe pin 2 is inserted into the receptacle 1, the elastic curved portion 162 of the elastic spring portion 16 of the probe pin 2 contacts the end face of the receptacle 1 on the opening 44 side and is pushed into the receptacle 1 while being elastically deformed. Be For this reason, as shown in FIG. 8, after the elastic spring portion 16 is inserted into the receptacle 1, the probe pin 2 is inserted into the receptacle while the elastic curved portion 162 presses the inner peripheral surface of the storage portion 43. Be done.

  Then, as shown in FIG. 7, the probe pin 2 is inserted into the receptacle 1 until the tip 15 of the first plunger 10 and the bottom surface 45 of the housing 43 come in contact, and the assembly process of the probe unit 100 is completed. .

  Subsequently, the operation of the probe pin 2 housed in the receptacle 1 will be described.

  As shown in FIG. 7, a portion of the probe pin 2 in the initial state housed in the receptacle 1, including the contact portion 24 of the second plunger 20, protrudes from the opening 44 of the receptacle 1.

  In the probe pin 2 in this initial state, the held portion 11 of the first plunger 10 and the contact protrusion 27 of the second plunger 20 are in contact with each other, and the elastic curved portion 162 of the elastic spring portion 16 of the first plunger 10 is , And the inner peripheral surface of the receptacle 1 is pressed. For this reason, the probe pin 2 is always in contact with the receptacle 1 without any rattling and is conducted to each other.

  When a force is applied to the contact portion 24 of the second plunger 20 of the probe pin 2 in the initial state, and the second plunger 20 is pushed into the receptacle 1, the guide projection 26 of the first elastic piece 22 of the second plunger 20 The slide movement is started along the guide groove 13 of the first plunger 10. At this time, the force applied to the second plunger 20 is transmitted through the coil spring support 25 of the second plunger 20 and the coil spring 30 is gradually compressed.

  When the second plunger 20 is further pushed into the receptacle 1, the contact portion 24 of the second plunger 10, 20 is completely pushed into the receptacle 1, and the sliding movement of the first and second plungers 10, 20 Stop.

  When the force applied to the contact portion 24 of the second plunger 10, 20 is released after the first and second plungers 10, 20 are stopped, the second plunger 20 is released as shown in FIG. Return to the initial state shown in.

  In the probe unit 100, the elastic curved portion 162 of the elastic spring portion 16 of the first plunger 10 presses the inner peripheral surface of the receptacle 1. Therefore, no rattling occurs between the receptacle 1 and the probe pin 2 and the contact is always made with a predetermined contact pressure. Therefore, the contact stability between the receptacle 1 and the probe pin 2 can be enhanced.

  Further, the receptacle 1 and the probe pin 2 are brought into contact with each other by pressing the inner peripheral surface of the receptacle 1 by the elastic spring portion 16. Therefore, even if the gap between the receptacle 1 and the probe pin 2 is enlarged by the replacement of the probe pin 2, the receptacle 1 and the probe pin 2 can be reliably brought into contact with each other.

  In the probe pin 2 of the first embodiment, the contact protrusion 27 of the second elastic piece 23 of the second plunger 20 is on the base end side of the gripped portion 11 of the first plunger 10 (lower side of the guide groove 64 in FIG. 6). Always in contact with For this reason, the contact stability between the first and second plungers 10 and 20 can be enhanced.

  Further, the guide projection 26 of the second plunger 20 slides along the guide groove 13 of the first plunger 10. Thereby, the contact position which the to-be-held part 11 of the 1st plunger 10 and the contact protrusion 27 of the 2nd plunger 20 contact can be detected correctly.

Second Embodiment
9 to 13 are views showing the probe pin 102 of the second embodiment. In the second embodiment, the same reference numerals as in the first embodiment denote the same parts, and a description thereof will be omitted, and only differences from the first embodiment will be described.

  The probe pin 102 according to the second embodiment, as shown in FIGS. 9 to 13, includes the contact portion 24 of the contact portion 21 of the second plunger 20 and the elastic spring portion 16 provided on the contact portion 12 of the first plunger 10. It differs from the probe pin 2 of the first embodiment in that an elastic spring portion 16 is provided also between the coil spring support portion 25 and the second embodiment.

  Thus, by providing the elastic spring portion not only in the first plunger but also in the second plunger, rattling of the probe pin when inserted into the receptacle can be reliably prevented, and the receptacle and the probe pin are surely in contact with each other. It can be done.

Third Embodiment
FIG. 14 to FIG. 18 are views showing a probe pin 202 of the third embodiment. In the third embodiment, the same reference numerals as in the first embodiment denote the same parts, and a description thereof will be omitted, and only differences from the first embodiment will be described.

  The probe pin 202 of the third embodiment, as shown in FIGS. 14 to 18, does not provide the elastic spring portion 16 in the contact portion 12 of the first plunger 10, and the contact portion 24 of the contact portion 21 of the second plunger 20 It differs from the probe pin 2 of the first embodiment in that an elastic spring portion 16 is provided between it and the coil spring support portion 25.

  Thus, the elastic spring portion may be provided on at least one of the first and second plungers. Thereby, the degree of freedom in design of the probe pin can be expanded.

Fourth Embodiment
FIGS. 19-23 is a figure which shows the probe pin 302 of 4th Embodiment. In the fourth embodiment, the same reference numerals as in the first embodiment denote the same parts, and a description thereof will be omitted, and only differences from the first embodiment will be described.

  The probe pin 302 according to the fourth embodiment, as shown in FIGS. 19-23, is characterized in that the contact portion 12 of the first plunger 10 is provided with an elastic spring portion 116 having a cantilevered elastic curved portion 163. It differs from the probe pin 2 of one embodiment.

  Thus, the shape of the elastic spring portion can be appropriately changed according to the design or the like of the probe pin, and the degree of freedom in design of the probe pin can be expanded.

Fifth Embodiment
24 to 28 are views showing the probe pin 402 of the fifth embodiment. In the fifth embodiment, the same reference numerals as in the first embodiment denote the same parts, and a description thereof will be omitted. A difference from the first embodiment will be described.

  In the probe pin 402 of the fifth embodiment, as shown in FIGS. 24 to 28, the contact portion 12 of the first plunger 10 is provided with an elastic spring portion 216 having an elastic curved portion 164, which is the same as that of the first embodiment. It is different from probe pin 2. The elastic curved portion 164 is provided with two protrusions 165 projecting from the lateral side of the contact portion 12 in the width direction. The protrusions 165 are arranged symmetrically with respect to a straight line connecting centers of the two elastic curved portions 164 in the longitudinal direction.

  Thus, by providing the projection on the elastic curved portion, it is possible to adjust the pressing force of the elastic spring portion on the inner circumferential surface of the receptacle. Thereby, the degree of freedom in design of the probe pin can be expanded.

Sixth Embodiment
29 to 33 are views showing a probe pin 502 of the sixth embodiment. In the sixth embodiment, the same reference numerals as in the first embodiment denote the same parts as in the first embodiment, and a description thereof will be omitted. Only differences from the first embodiment will be described.

  The probe pin 502 of the sixth embodiment is different from the probe pin 2 of the first embodiment in that an elastic spring portion 316 is provided on the contact portion 12 of the first plunger 10 as shown in FIGS. There is. The elastic spring portion 316 is a rectangular cut hole portion 166 formed at the center of the main surface of the contact portion 12 and an elastic arm connected to one short side of the cut hole portion 166 and bent and raised in the thickness direction And a section 167. Further, the tip of the elastic arm portion 167 is bent toward the main surface of the contact portion 12.

  As described above, the elastic spring portion can be provided not only when protruding from the side surface of the contact portion but also as protruding from the main surface of the contact portion. Thereby, the degree of freedom in design of the probe pin can be expanded.

Seventh Embodiment
34 to 38 illustrate the probe pin 602 according to the seventh embodiment. In the sixth embodiment, the same reference numerals as in the first embodiment denote the same parts as in the first embodiment, and a description thereof will be omitted. Only differences from the first embodiment will be described.

  The probe pin 602 of the seventh embodiment is characterized in that the contact portion 12 of the first plunger 10 is provided with an elastic spring portion 416 having a bellows-like elastic curved portion 168, as shown in FIGS. It differs from the probe pin 2 of the embodiment.

  Thus, the shape of the elastic spring portion can be appropriately changed according to the design or the like of the probe pin, and the degree of freedom in design of the probe pin can be expanded.

(Other embodiments)
The shape of the free end of the tip end portion 15 of the first plunger 10 is not limited to the arc shape, and may be appropriately selected according to the design of the probe pin, such as a triangle or a quadrangle.

  The guide protrusion 26 of the first elastic piece 22 of the second plunger 20 can be inserted into and fitted to the guide groove 13 of the first plunger 10 and can slide in the guide groove 13, and the shape, size, etc. Can be selected as appropriate.

  The contact protrusion 27 of the second elastic piece 23 of the second plunger 20 can be appropriately selected in shape, size, and the like according to the design. By changing the shape or the like of the contact protrusion 27, it is possible to adjust the biasing force of the second elastic piece 23 to the held portion 11 of the first plunger 10.

  The plate thicknesses of the first and second plungers 10 and 20 are not limited to the same case, but may have different plate thicknesses depending on parts.

  The first and second plungers 10 and 20 can also be subjected to surface treatment such as plating and coating depending on the design.

  The first and second plungers 10 and 20 are not limited to the electroforming method, and any method can be used as long as it can form the probe pins 2, 102, 202, 302, 402, 502 and 602 of the first to seventh embodiments. Can be selected.

  Although the to-be-held part 11 which has the guide groove 13 in the 1st plunger 10 is provided and the 1st, 2nd elastic pieces 22 and 23 are provided in the 2nd plunger 20, it does not restrict to this. For example, the first plunger may be provided with the first and second elastic pieces, and the second plunger may be provided with the pinched portion having the guide groove.

  When the first and second plungers 10 and 20 are inserted from both ends of the coil spring 30, respectively, any configuration can be adopted as long as they can slide and conduct each other.

  Of course, the components described in the first to seventh embodiments and the modification may be combined as appropriate, and may be selected, replaced, or deleted as appropriate.

  The probe pin and the probe unit according to the present invention can be applied to inspection units such as semiconductor integrated circuits and semiconductor devices, for example.

Reference Signs List 1 receptacle 2, 102, 202, 302, 402, 502, 602 probe pin 10 first plunger 11 gripped portion 12 contact portion 13 guide groove 14 base portion 15 tip portion 16 elastic spring portion 20 second plunger 21 contact portion 22 first Elastic piece 23 second elastic piece 24 contact point 25 coil spring support 26 guide projection 27 contact projection 30 coil spring 41 first housing 42 second housing 43 storage 44 opening 45 bottom 161 central connection 162, 163, 164, 168 elastic curved portion 165 protrusion 166 cut hole portion 167 elastic arm portion

Claims (4)

A coil spring that expands and contracts along the center line,
A first insertion portion inserted from one end of the coil spring along the center line and positioned inside the coil spring, and a support portion positioned outside the coil spring to support the coil spring A conductive first plunger having a first contact portion,
A second insertion portion inserted along the center line from the other end of the coil spring and slidably connected to the first insertion portion inside the coil spring, and to the outside of the coil spring A conductive second plunger having a second contact portion positioned to support the coil spring and provided with a support portion;
Equipped with
To at least one of the first and second of said contact portion, the intersecting said center line from the contact portion and to protrude in a direction away from said center line equal to or greater than the outer diameter of the coil spring intersects the center line And a probe pin provided with an elastic spring portion elastically deformable in a direction approaching the center line.   The probe pin according to claim 1, wherein the elastic spring portion is provided at each of the first and second contact portions.   The probe pin according to claim 1, wherein each of the first plunger and the second plunger is formed by electroforming. A probe pin according to any one of claims 1 to 3;
The probe pin is housed, and have a receiving portion into which the resilient spring portion is disposed, a probe unit having a receptacle for the inner peripheral surface of the receiving portion is pressed by the elastic spring part.

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