TWI705248B - Probe driving method and device - Google Patents

Abstract

The present invention provides a probe driving method and device. The driving method is to provide a first seat frame on which a micro-motion mechanism is provided, the micro-motion mechanism is provided with a fixing member fixed on the first seat frame, and a first spring One end of the plate and a second reed is fixed to the fixing member, the micro-movement mechanism is provided with a coupling member which is fixed at the other end of the first reed and the second reed; a probe mechanism is provided, the probe mechanism A probe is provided on a probe base and is linked by the connecting member; the connecting member is driven to link the displacement of the probe of the probe mechanism; thereby, high-frequency inspection operations can be performed.

Description

Probe driving method and device

The present invention relates to a driving method and device, in particular to a probe driving method and device for driving a probe that is electrically contacted by an electronic component when the electronic component is tested or sorted.

Press, generally to test electronic components such as LED light-emitting diodes, often use probes to contact the positive and negative electrodes of the electronic components to conduct electrical conduction to determine whether the electronic components are transported in the correct direction, or used for current Conduction is used to measure the physical properties of the electronic component, such as the spectrum. This type of test is based on the need for efficiency and is often required to be carried out with high-speed transport and high-frequency reciprocating probe contact; the prior art is driving the probe It is often used to connect one end of a lever with a probe, and the other end of the lever is pivotally fixed as a fulcrum, and an electromagnet drives the lever to move in one direction, and an elastic member is used to rebound in the reverse direction, so as to reciprocate The driving of the probe is continuously carried out, so that the probe will continuously make up and down reciprocating contact or loosen the electrode of the electronic component to achieve the purpose of testing.

Although this prior art is a commonly used probe driving method, its response sensitivity is still insufficient to achieve the high-speed and high-frequency operation currently required due to the simple electromagnet driving the lever. The reason is that the probe is linked to the end of the lever. , The other end is pivoted as a fulcrum. The pivoting degree of freedom caused by the pivoting of one end of the lever makes the probe weight carried by the other end and the weight of the lever itself become the load when the electromagnet is driven, allowing the electromagnet to drive up Due to the heavy load, it is unable to make a sensitive response. Especially in response to the diverse attributes of the product, the types of probes have also become diverse. When the volume and weight of the probe are large, the load that the electromagnet bears when driving makes the probe unable to make a sensitive response. Therefore, when the probe is required to operate at a higher speed and high frequency, the prior art is maintained. The lack of driving methods can increase the space for high-speed and high-frequency operation.

The purpose of the present invention is to provide a probe driving method that can increase the sensitivity of probe driving.

Another object of the present invention is to provide a probe driving device that can increase the sensitivity of probe driving

Another object of the present invention is to provide a device using the probe driving method.

The probe driving method according to the object of the present invention includes: providing a first seat frame on which a micro-motion mechanism is provided, the micro-motion mechanism is provided with a fixing member fixed to the first frame, a first reed and a second One end of the two reeds is fixed to the fixing member, the micro-movement mechanism is provided with a coupling member which is fixed at the other end of the first reed and the second reed; a probe mechanism is provided, and the probe mechanism is provided with a probe On a probe base and linked by the connecting member; the connecting member is driven to link the displacement of the probe of the probe mechanism.

According to another object of the present invention, a probe driving device includes: a frame with a first frame and a second frame; a micro-motion mechanism with a first reed and a second reed; the first A first fixing portion at one end of the reed and a second fixing portion at the corresponding end of the second reed are respectively fixed on the upper and lower ends of a fixing member; a first at the other end of the first reed A second micro-movement portion corresponding to the other end of the second reed and the micro-movement portion are respectively fixed on the upper and lower ends of a connecting member; the micro-movement mechanism is fixed on the first seat frame with the fixing member; A driving mechanism is arranged on the second seat frame, the driving mechanism is provided with an electromagnet, and a shaft is provided in the electromagnet, and the shaft can be acted by the electromagnet to link the coupling member of the micro-motion mechanism; The needle mechanism is provided with a probe base linked with the connecting member of the micro-motion mechanism, and a plurality of probes are provided on the probe base.

用以執行如所述探針驅動方法的裝置，該裝置包括：供該微動機構固設的該第一座架、設有與該微動機構連動之該探針座的該探針機構。 A probe driving device according to another object of the present invention includes

The device used for implementing the probe driving method includes: the first mount for fixing the micro-motion mechanism, and the probe mechanism provided with the probe holder linked with the micro-motion mechanism.

In the probe driving method and device of the embodiment of the present invention, since the connecting member is fixed at one end of the first reed and the second reed of the fixing member, and the connecting member is fixed by the driving mechanism Drive, and make the probe of the probe mechanism on the probe holder, be linked by the connecting member of the micro-motion mechanism fixed on the first holder by the fixing member; thereby the probe and the probe The moment of the weight of the needle holder and the connecting member added to the second reed is balanced by the pulling moment formed by the first reed, and the drive mechanism can be free of excessive burden on the probe, probe holder, and Under the weight of the connecting piece, the connecting piece can be driven to move the probe holder and the probe up and down with only a slight force, so that high-frequency inspection operations can be performed.

A: Workbench

A1: Conveying channel

B: First carrier

B1: loading slot

B2: limit piece

C: Feeding station

D: Measurement workstation

E: Transfer workstation

F: The first discharge station

G: second carrier

G1: loading slot

G2: limit piece

H: The second discharge station

K: Probe drive

K1: seat frame

K11: The first frame

K111: Side seat frame

K1111: The first rib

K1112: Second rib

K112: Lying frame

K1121: Operation side

K1122: Probe displacement interval

K1123: Stop

K12: second seat frame

K121: fixed frame

K1211: The second slot

K1212: The third slot

K122: Upper fixing frame

K1221: Fixed part

K1222: Clamping part

K1223: The third rib

K123: Lower fixing frame

K1231: The second fine-tuning piece

K124: The first fine-tuning piece

K13: Inching interval

K2: Micro-motion mechanism

K21: The first reed

K211: The first fixed part

K212: The first micro-movement part

K213: The first cutout

K22: second reed

K221: The second fixed part

K222: The second micro-movement part

K223: second cutout

K23: fixed parts

K231: First grip

K232: first pitch

K233: first positioning

K234: second positioning

K235: The first slot

K24: coupling

K241: Second grip arm

K242: second pitch

K243: Linkage Department

K244: Blocking Department

K2441: Top surface

K2442: cushion

K245: third pitch

K246: Fourth pitch

K247: The first link

K248: The second link

K25: Operating range

K26: Elastic parts

K27: Enclosure

K3: drive mechanism

K31: Electromagnet

K32: shaft

K321: pivot end

K322: Linked terminal

K33: Magnetic part

K34: cushion

K35: Inching pitch

K4: Probe mechanism

K41: Probe holder

K42: Connector

K421: Upper limit spacing

K422: Support seat

K423: Cutaway

K43: Drill seat

K431: pivot end

K432: hollow hole

K433: Groove

K434: Drill block

K435: Pinhole

K44: Probe

K441: Needle

K5: Sensor

K51: Sensor

K6: Probe mechanism

K61: Probe holder

K611: Rail seat

K62: Probe

K621: Probe rod

K622: Probe sheet

K623: Needle

K63: Rod holder

K631: Probe fine adjustment

K64: Drill block

K641: Needle groove

K642: The first drill

K643: The second drill

K65: Sensor

K66: Sensor

W: electronic components

d1: first gauge

d2: second gauge

d3: third gauge

L1: first axis

L2: second axis

FIG. 1 is a three-dimensional schematic diagram of part of the mechanism of the sorting machine in the first embodiment of the probe driving device.

FIG. 2 is a perspective view of the probe driving device in the first embodiment of the probe driving device.

3 is a schematic diagram of a side view of the probe driving device in the first embodiment of the probe driving device.

4 is a schematic diagram of another side of the probe driving device in the first embodiment of the probe driving device.

5 is a schematic diagram of a side view of the micro-motion mechanism in the first embodiment of the probe driving device.

6 is an exploded perspective view of the assembly of the micro-motion mechanism, the second mount and the side frame of the first mount in the first embodiment of the probe driving device.

FIG. 7 is a three-dimensional exploded schematic diagram of the first reed and other components of the micro-motion mechanism in the first embodiment of the probe driving device.

FIG. 8 is a schematic diagram of the driving device in the first embodiment of the probe driving device installed under the carrier plate.

FIG. 9 is a perspective view of the probe driving device in the second embodiment of the probe driving device.

10 is a schematic diagram of a side view of the probe driving device in the second embodiment of the probe driving device.

11 is a schematic diagram of another side of the probe driving device in the second embodiment of the probe driving device.

Please refer to Figure 1. The embodiment of the present invention takes an electronic component sorting machine for LED light-emitting diodes as shown in the figure as an example. The sorting machine is provided with: a workbench A with a conveying channel A1 conveying by A vibrating feeder (not shown) transports the electronic component under test W in a row; a first carrier plate B is set on the worktable A, and the test object W is transported by a first intermittent rotating flow path , The first carrier disk B is circumferentially arranged at equal intervals and is provided with hollow carrier grooves B1 that open outwards, and the circumferentially arranged carrier groove B1 is provided with a limiting member B2 on the outer periphery to prevent being rotated and transported to be tested The object W is thrown out by centrifugal force; the first carrier plate B forms a clockwise first intermittent rotating flow path and receives the test object W input from the conveying channel A1, and the first intermittent rotating flow path rotates There are a feeding station C, a measuring station D, a transfer station E, and a first discharging station F in sequence in the direction; a second carrier G is set on the work table A, and a second It is transported by intermittent rotating flow path. The second carrier G is arranged circumferentially with equally spaced hollow carrier grooves G1 that open outwards. The carrier groove B1 arranged in the annular row is provided with a limiting member G2 on the outer periphery. Prevent the electronic components being rotated and transported from being thrown out by centrifugal force; the second carrier G is adjacent to the first carrier B, and forms a clockwise second intermittent rotating flow path for the transport of the test object W; the second The intermittent rotating flow path is provided with a plurality of second discharging workstations H corresponding to each carrying tank G1 (in the embodiment of the present invention, there are twenty second discharging workstations H corresponding to twenty carrying tanks G1, the drawing only Take a second discharging workstation H); the first tray B and the second tray G are connected by the transfer station E to form a transport flow path, which can be a channel or transfer to be transported by adsorption The measured object W is in the loading slot B1 of the first loading plate B and the The transfer mechanism between the carrier groove G1 of the second carrier G; the first intermittent rotating flow path is divided into a front section and a rear section by the transfer station E as a boundary, and the first discharge station F is set in the first intermittent rotation In the back section of the flow path, the interference of the workstations on the front section of the first intermittent rotating flow path can be avoided; the first intermittent rotating flow path of the first carrier B forms two phase divisions at the transfer station E The flow path of the fork, when the object to be measured W is measured by the measurement workstation D and the result is the object to be measured W with a higher falling frequency, the object to be measured W is transported to the transfer workstation E , The first intermittent rotating flow path of the first carrier plate B is discharged from the horizontal and radial direction, and through the transfer station E, it enters the second intermittent rotating flow path of the second carrier plate G in a horizontal radial direction The carrier G1 is transported, and the second discharging station H preset by the carrier G1 discharges the second intermittent rotating flow path of the second carrier G according to the measurement result; when the electronic component passes the quantity When the measurement result of the measurement workstation D is the object W with lower blanking frequency, when the object W is transported to the transfer station E, it will continue to follow the first carrier disk B. The intermittent rotating flow path is transported past the transfer station E to the first discharging station F, and the first intermittent rotating flow path of the first tray B is discharged from the first discharging station F.

Please refer to Figures 1 and 2. The probe driving device K of the embodiment of the present invention is set at the measurement workstation D and located below the loading slot B1 of the first loading disk B for the The test object W is tested.

Please refer to Figures 2 and 3, the first embodiment of the probe driving device K is provided with: a frame K1, provided with a first frame K11 and a second frame K12 that can move up and down relative to each other. The first frame K11 is provided with a side frame K111 standing on the Y-axis and a horizontal frame K112 on the horizontal X-axis. Both of them are fixed in a "﹁" shape with their corresponding ends. The horizontal seat frame K112 is recessed with a hollow probe displacement interval K1122 to one side relative to the other operating end K1121 fixed to the side seat frame K111; the second seat frame K12 has a Y axis standing upright The fixing frame K121 and an upper fixing frame K122 that is relatively located at the top and is horizontal X-axis, is relatively located at the bottom and is water The lower fixing frame K123 in the horizontal X axis; the upper fixing frame K122 is in the shape of a "﹁" and is provided with a fixing part K1221 standing in the Y axis and a pressing part K1222 in the horizontal X axis. The fixing portion K1221 is arranged on one side of the fixing frame K121 so as to be slidable up and down, and the lower fixing frame K123 is fixed on the lower end of the fixing frame K121 on one side; the second seat frame K12 is integrated with the fixing frame K121. Fixed on the side seat frame K111 side of the first seat frame K11, the upper fixing frame K122 of the second seat frame K12 and the horizontal seat frame K112 of the first seat frame K11 maintain a distance and form a Micro-movement section K13; a micro-movement mechanism K2 arranged on the side frame K111 of the first seat frame K11 of the micro-movement section K13; the micro-movement mechanism K2 is provided with a first reed that is arranged horizontally and spaced apart and parallel to each other K21 and a second reed K22; a first fixing portion K211 at one end of the first reed K21 and a second fixing portion K221 at an end corresponding to the second reed K22 are respectively fixed to a fixing piece K23 Upper and lower ends; a first micro-movement portion K212 at the other end of the first reed K21 and a second micro-movement portion K222 corresponding to the other end of the second reed K22 are respectively fixed on a connecting member K24 , The lower two ends, the first reed K21, the second reed K22, the fixing piece K23, and the connecting piece K24 enclose a rectangular operation section K25; the fixing piece K23 faces the side of the operation section K25 The connecting member K24 extends horizontally with a first grip arm K231 located relatively above. A first distance K232 is maintained between the upper part of the first grip arm K231 and the first reed K21, and the connecting member K24 is separated from the operating area K25. A second gripping arm K241 located below the first gripping arm K231 is horizontally extended toward the fixing member K23, and a second distance K242 is maintained below the second gripping arm K241 and the second spring K22; the operation section K25 is provided with an elastic member K26 composed of a spring, and the elastic member K26 is supported between the first grip arm K231 and the second grip arm K241 in the Y-axis direction; the coupling member K24 is opposite to the other of the operation zone K25 A linkage portion K243 extends horizontally on the side; the connecting member K24 extends horizontally from one side of the operating section K25 toward the fixing member K23 with a resisting portion K244 located below the first reed K21, the resisting portion K244 The top surface K2441 and the first reed K21 maintain a third distance K245, A stop portion K1123 is provided below the horizontal seat frame K112, the stop portion K1123 extends downward through the first leaf spring K21 and its bottom end maintains a fourth distance K246 from the top surface K2441 of the blocking portion K244; wherein, The first pitch K232, the second pitch K242, and the third pitch K245 are used to prevent the first reed K21 or the second reed K22 from colliding to provide the first micro-movement of the first reed K21 or the second reed K22 The space where the part K212 or the second micro-movement part K222 is elastically moved up and down; the fourth distance K246 is used to block the blocking part K244 to prevent the coupling K24 from being pushed up excessively when it fails; a driving mechanism K3, The upper fixing frame K122 is arranged on the second seat frame K12 between the pressing portion K1222 and the lower fixing frame K123, and is fixed on the pressing portion K1222. In the embodiment of the present invention, the driving mechanism K3 An electromagnet K31 is provided. The electromagnet K31 is provided with a Z-axis shaft K32. The shaft K32 is provided with a disc-shaped disk that can be electromagnetically attracted by the electromagnet K31 to move upward and link the displacement of the shaft K32. The magnetic portion K33, the shaft K32 is located close to a pivot end K321 of the magnetic portion K33, and passes downward through the lower fixing frame K123, the shaft K32 is located at the other linkage end opposite to the magnetic portion K33 K322 passes upwards through the pressing portion K1222 of the upper fixing frame K122, and at the same time passes through the second spring K22 of the micro-movement mechanism K2, and the upper top touches the lower bottom of the second grip arm K241, and the The second holding arm K241 and the connecting member K24 are linked up and down; a cushion K34 composed of a flexible body is arranged between the magnetic moving part K33 and the lower fixing frame K123, which can lower the magnetic moving part K33 and the lower fixing frame K123 There is a fine movement distance K35 between the magnetic part K33 and the bottom of the electromagnet K31 of the driving mechanism K3, and the fine movement distance K35 is screwed between the fixing part K1221 of the upper fixing frame K122 and the fixing frame K121 A first fine adjustment member K124 is provided to adjust the pressing degree of the pressing portion K1222 for fine adjustment; a probe mechanism K4 is provided with a level of fixed linkage with the linkage portion K241 of the linkage K24 of the micro-motion mechanism K2 A probe seat K41 is provided, the operating end K1121 of the horizontal seat frame K112 is provided with a connecting piece K42 downward in the Z-axis direction. The bottom end of the connecting piece K42 and the probe seat K41 side maintain an upper limit distance K421, The connecting piece K42 is provided with a supporting seat K422 toward one side of the connecting piece K24. The supporting seat K422 is provided with a plurality of slits K423 with a groove on one side; a drill seat K43 is arranged above the horizontal seat frame K112 of the first seat frame K11, and a pivot end K431 of the drill seat K43 extends And is suspended above the probe displacement zone K1122, the pivot end K431 is recessed upward from the bottom side, and is provided with a hollow hole K432, and the hollow hole K432 is provided with a groove K433 that is recessed from top to bottom , The bottom of the groove K433 communicates with the hollow hole K432, a drill block K434 is provided in the groove K433, and the drill block K434 is provided with a plurality of pinholes K435 communicating with the hollow hole K432; a plurality of probes K44 Set in the probe base K41, each probe K44 pivots through the cutout K423 on the supporting base K422 with its needle portion K441, and extends through the probe K44 displacement interval K1122 to pivot on the drill block K434 Respectively corresponding to the pinholes K435; the upper limit distance K421 limits the upper stroke of the probe holder K41 on which a plurality of the probes K44 are placed.

Please refer to FIGS. 3 and 4, the lower end of the connecting piece K24 fixed with the second micro-movement portion K222 of the second reed K22 is also fixed with a sheet-shaped sensing element K5, the sensing element K5 and the connecting element In conjunction with K24, the up and down displacement of the sensing element K5 is sensed by a sensor K51 to transmit a control signal for executing the next process according to the information sensed by the up and down displacement of the probe K44.

Please refer to FIG. 5, the first reed K21 of the micro-motion mechanism K2 is in the shape of a rectangular sheet, made of metal and elastic, and its sheet-like surface is provided with two sides in the X-axis direction separated by a first distance The first fixed portion K211 and the first micro-moving portion K212 of d1; the second reed K22, in the shape of a rectangular sheet, is made of metal and has elasticity, and its sheet-like surface is provided on both sides of the X-axis. The second fixed portion K221 and the second micro-movement portion K222 separated by a second distance d2; the first distance d1 of the first reed K21 is approximately equal to the second distance d2 of the second reed K22; The thickness, material, and elastic coefficient of the first reed K21 and the second reed K22 are the same; the fixing member K23 is provided with a first positioning K233 that is spaced up and down by a third distance d3 in the Z-axis. And a second position K234 located below, the first reed K21 is fixed to the first position K233 of the fixing member K23 by the first fixing portion K211, and the second reed K22 is fixed by the second fixing portion K221 solid The second positioning K234 is arranged on the fixing piece K23, the first reed K21 and the second reed K22 fixed on the fixing piece K23 are parallel to each other; the connecting piece K24 is arranged in the Z axis, A first connecting portion K247 and a second connecting portion K248 are spaced apart by a fourth distance d4. The first reed K21 is connected and fixed by the first micro-moving portion K212 and the first connecting portion K247 of the connecting piece K24 , The second reed K22 is connected and fixed by the second micro-moving portion A2122 and the second coupling portion K248 of the coupling member K24, and the first axis formed by the first positioning K233 of the fixing member K23 and a second positioning K234 is connected L1 and the second axis L2 formed by the first connecting portion K247 and the second connecting portion K248 on the connecting piece K24 are parallel to each other; the third distance d3 of the fixing piece K23 and the first connecting piece K24 are The four distances d4 are approximately equal; the first reed K21 and the second reed K22 are perpendicular to the first axis L1 and the second axis L2; the first reed K21, the second reed K22, and the fixing member K23, The connecting piece K24 is surrounded to form a rectangular frame; the frame has a fixing piece K23 as a fixed side, and the other side formed by the connecting piece K24 is formed by the elasticity of the first reed K21 and the second reed K22. It can move up and down after being stressed.

3 and 6, the first reed K21 of the micro-movement mechanism K2 is provided with a first hollow K213 at the top surface K2441 of the blocking portion K244, and the first hollow K213 is used for the stop portion K1123 The second reed K22 is provided with a second hole K223 at the bottom surface of the second grip arm K241, the second hole K223 for the shaft K32 of the driving mechanism K3 to pass through; the second seat frame One side of the side frame K111 of K12 is provided with a first rib K1111 located above in a Z-axis elongated convex shape, and a second rib K1112 located below and spaced apart from the first rib K1111; The fixing member K23 of the micro-movement mechanism K2 is provided with a first groove K235 in a Z-axis elongated concave shape. The first groove K235 is provided in the micro-movement mechanism K2 with the fixing member K23 and the side seat K111 When fixed, the first rib K1111 is embedded in it for positioning; the second seat frame K12 is provided with a Z-axis elongated concave-shaped second groove K1211 on the side of the fixing frame K121. When the second seat frame K12 is fixed by the fixing frame K121 and the side seat frame K111, the embedding groove K1211 allows the second rib K1112 to be embedded therein for positioning; The fixing frame K121 is used to fix the upper fixing frame K122 on one side with a Z-axis elongated concave third groove K1212, the fixing portion K1221 of the upper fixing frame K122 and the third groove K1212 A third protruding rib K1223 is provided at the corresponding position. The second seat frame K12 is provided with a fine adjustment member K1231 at one end of the fixing frame K123, which is screwed toward the bottom of the side seat frame K111. The fine adjustment member 1231 finely adjusts the entire second seat frame K12 to move up and down.

Please refer to Figures 5 and 7, the micro-motion mechanism K2 is provided for the outer periphery of the first positioning K233 of the fixing member K23 fixed by the first fixing portion K211 of the first reed K21, and for the second reed K22 The outer periphery of the second positioning K234 of the fixing member K23 fixed by the second fixing portion K221, and the first connecting portion K247 of the connecting member K24 for fixing the first micro-moving portion K212 of the first reed K21 The periphery, the outer periphery of the second coupling portion K248 of the coupling member K24 for fixing the second micro-movement portion K222 of the second reed K22, etc., respectively receive a protruding from the first reed K21 or the second The reed K22 is surrounded by a horizontal base K27.

Please refer to Figures 4 and 8, in the embodiment of the present invention, when the probe driving device K is installed, the drill base K43 is correspondingly set under the first carrier plate B of the measurement workstation D. When performing inspection, The first carrier plate B is intermittently stopped, so that the pinholes K435 in the drill block K434 on the pivot end K431 of the drill seat K43 are located below the carrier groove B1 for the The object to be tested W is detected; during detection, the electromagnet K31 of the driving mechanism K3 in the second mount K12 attracts the magnetic part K33 by electromagnetic induction to link the shaft K32 against the micro-motion mechanism K2 The second gripping arm K241 extending from the connecting piece K24 is used to link the connecting piece K24 and the linkage portion K243. The shaft K32 of the electromagnet K31 forces the first micro-movement portion K212 of the first reed K21 And the second micro-movement portion K222 of the second reed K22 bends upwards against elasticity and accumulates the restoring force, and the elastic member K26 is compressed and also accumulates the restoring force at the same time, and at the same time the probe mechanism K4 The probe holder K41 is linked to place a plurality of probes K44 on top simultaneously, and each needle portion K441 is pivoted through each corresponding needle hole K435 in the drill block K434 to align the holes in the loading slot B1. DUT W proceed Detection; the upper limit distance K421 defines the stroke length of the top of the probe K44, the probe K44 completes the detection when the probe holder K41 moves up and touches the connecting piece K42, at this time the sensing piece K5 is simultaneously subjected to the The sensor K51 induces and transmits a signal to cause the electromagnetic induction of the electromagnet K31 of the driving mechanism K3 to cancel the adsorption of the magnetic moving part K33, so that the shaft K32 is attracted by the first micro-moving part K212 of the first reed K21 And the restoring force accumulated by the second micro-movement portion K222 of the second reed K22 and the elastic member K26 accumulating the restoring force to move downward, the reverse force of the shaft K32 of the electromagnet K31 will cause the The connecting piece K24 and the linking portion K243 move the probe holder K41 of the probe mechanism K4 downward, so that the probe K44 is away from contact with the object to be measured W, and the sensor K5 receives the sensor again. When K51 is inducted, a signal is transmitted to cause the electromagnetic induction of the electromagnet K31 of the driving mechanism K3 to attract the magnetic part K33 again; the detection operation is performed by the repeated progress.

Before testing, the probe holder K41 must maintain a certain level of horizontal positioning. The horizontal positioning can be adjusted by adjusting the depth of the fine adjustment member K1231 on the bottom of the side holder K111 to make the second holder K12 work as a whole. Displace up and down, and the shaft K32 in the driving mechanism K3 is linked to abut the second grip arm K241, so that the connecting piece K24 is linked and the horizontal positioning of the linkage portion K243 and the probe holder K41 is adjusted. .

In the probe driving method and device according to the embodiment of the present invention, the connecting member K24 is fixed to one end of the first reed K21 and the second reed K22 of the fixing member, and is fixed by the connecting member K24. The drive mechanism K3 is driven, and the probe K44 of the probe mechanism K4 is on the probe holder K41, and the fixing member K23 is fixed on the first holder K11 of the micro-movement mechanism K2. The connecting member is linked; whereby the probe K44, the probe holder K41, and the moment of the connecting member K24 added to the weight of the second reed K22 are balanced by the pulling moment formed by the first reed K21, the The driving mechanism K3 can drive the connecting member K24 to link the probe base K41 and the probe K44 with only a slight force without having to bear the weight of the probe K44, the probe base K41, and the connecting piece K24 excessively. The up and down displacement enables high-frequency inspection operations to be performed.

Please refer to Figures 9 and 10 of the second embodiment of the probe driving device of the present invention. The parts that are the same as those of the first embodiment are not repeated here. The second embodiment of the probe driving device of the present invention can be used as shown in the figure As shown in another form of probe mechanism K6, a probe holder K61 of the probe mechanism K6 is directly fixedly connected with the coupling member K24 of the micro-motion mechanism K2 and is linked by it. The probe mechanism K6 The needle K62 includes a probe rod K621 with a rectangular cross section and a sheet-shaped probe sheet K622 located at the upper end of the probe rod K621; the probe rod K621 is indirectly arranged on the probe base K61 by a rod holder K63; the rod The holder K63 can be moved left and right on the horizontal rail holder K611 on the probe holder K61 and positioned. The bottom end of the rod holder K63 is provided with a probe fine adjustment member K631, which can finely adjust the position of the probe rod K621 from the bottom of the probe rod K621. The height; the top end of the probe sheet K622 is provided with a needle portion K623 that extends obliquely from both sides to the center in a vertical standing shape, and cooperates with the probe sheet K622 to make a rectangular cross section of the needle portion K623 top The drill block K64 consists of a first drill part K642 provided with a plurality of rectangular recessed needle grooves K641 on one side, and a second drill part K642 leaning against the side opening of the needle groove K641 of the first drill part K642 A flexible cushion K2442 can be provided at the top surface K2441 of the blocking portion K244 below the stop portion K1123 corresponding to the stop portion K1123 to reduce wear and noise.

Please refer to Figures 10 and 11, a sensing element K65 that transmits a control signal for executing the next procedure according to the information sensed by the up and down displacement of the probe K62 is provided on the back of the probe holder K61, and the sensing element K65 and The connecting element K24 is linked, and the up and down displacement of the sensing element K65 is sensed by a sensor K66.

However, the foregoing are only preferred embodiments of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the description of the invention, All are still within the scope of the invention patent.

K1123: Stop

K124: The first fine-tuning piece

K2: Micro-motion mechanism

K21: The first reed

K211: The first fixed part

K212: The first micro-movement part

K22: second reed

K221: The second fixed part

K222: The second micro-movement part

K23: fixed parts

K231: First grip

K232: first pitch

K24: coupling

K241: Second grip arm

K242: second pitch

K243: Linkage Department

K244: Blocking Department

K2441: Top surface

K245: third pitch

K246: Fourth pitch

K25: Operating range

K26: Elastic parts

K3: drive mechanism

K31: Electromagnet

K32: shaft

K321: pivot end

K322: Linked terminal

K33: Magnetic part

K34: cushion

K35: Inching pitch

K421: Upper limit spacing

K432: hollow hole

K433: Groove

Claims (20)

A method for driving a probe includes: providing a first seat frame on which a micro-motion mechanism is provided, the micro-motion mechanism is provided with a fixing member fixed to the first seat frame, a first reed and one end of a second reed Fixed to the fixing member, the micro-movement mechanism is provided with a connecting member fixed by the other end of the first reed and a second reed; a probe mechanism is provided, and the probe mechanism is provided with a probe and a probe The connecting member is driven to link the displacement of the probe of the probe mechanism. For example, the driving method described in item 1 of the scope of patent application, wherein the coupling member is driven by a driving mechanism with an electromagnetic action of an electromagnet to drive a shaft to provide force to the coupling member. According to the driving method described in item 1 of the scope of patent application, wherein the first reed and the second reed of the micro-motion mechanism provide a reverse force formed by an elastic member against the electromagnet. A probe driving device includes: a frame with a first frame and a second frame; a micro-movement mechanism with a first reed and a second reed; a first reed at one end of the first reed A fixing portion and a second fixing portion at one end corresponding to the second reed are respectively fixed on the upper and lower ends of a fixing member; a first micro-moving portion and the second at the other end of the first reed A second micro-moving portion corresponding to the other end of the reed is respectively fixed on the upper and lower ends of a connecting member; the micro-movement mechanism is fixed on the first frame with the fixing member; a driving mechanism is arranged on On the second seat frame, the driving mechanism is provided with an electromagnet, and a shaft is provided in the electromagnet. The shaft can be actuated by the electromagnet to link the connecting member of the micro-motion mechanism; a probe mechanism is provided with The probe base linked by the connecting member of the micro-motion mechanism, and a plurality of probes are arranged on the probe base. For example, the probe driving device described in item 4 of the scope of patent application, wherein the second seat frame is provided with an upright fixing frame and an upper fixing frame which is located relatively above and is horizontal, and is relatively water-oriented below. The lower fixed frame is flat; the second seat frame is fixed on the side frame side of the first seat frame by the fixing frame. For example, the probe driving device described in item 5 of the scope of patent application, wherein the upper fixing frame is provided with a fixed part standing upright and a clamp part located horizontally, and the fixed part is arranged on the fixed part so as to be slidable up and down. On one side of the frame, the lower fixing frame is fixed on the lower end of the fixing frame on one side. For example, the probe driving device described in item 4 of the scope of patent application, wherein the connecting member is provided with a blocking portion, and the top surface of the blocking portion maintains a third distance from the first spring; the first seat frame is provided with A stop part is provided, and a fourth distance is maintained between the stop part and the blocking part. For example, the probe driving device described in item 7 of the scope of patent application, wherein the first reed of the micro-movement mechanism is provided with a first hollow on the top surface of the blocking portion, and the first hollow is for the stop Threading through the moving part. For example, the probe driving device described in item 4 of the scope of patent application, wherein an operating section is enclosed between the first reed, the second reed, the fixing member, and the connecting member; the fixing member is defined by one side of the operation section A first grip arm is extended toward the connecting member, and a second grip arm is extended from one side of the operating area toward the fixing member. An elastic member is provided on the first grip arm and the second grip arm Between; a linkage end of the shaft of the drive mechanism touches the second grip arm portion, and is linked up and down with the second grip arm and the connecting member. For example, the probe driving device according to claim 9, wherein a first distance is maintained between the upper part of the first holding arm and the first reed, and the lower part of the second holding arm is maintained at a first distance from the second reed. Two spacing. For example, the probe driving device described in item 9 of the scope of patent application, wherein the second reed is provided with a second hollow on the bottom surface of the second grip arm, and the second hollow is used for the shaft of the driving mechanism Draw through. For example, the probe driving device described in item 4 of the scope of patent application, wherein the connecting member is extended with a linkage part, and the probe base of the probe mechanism is fixedly linked with the linkage part. For example, the probe driving device described in item 4 of the scope of patent application, wherein the first fixing portion and the first micro-moving portion of the first reed of the micro-movement mechanism are separated by a first distance; The second fixing part and the second micro-moving part are separated by a second distance; the first distance of the first reed is approximately equal to the second distance of the second reed. For example, the probe driving device described in item 4 of the scope of patent application, wherein the fixing member is provided with a first positioning located above and a second positioning located at a third distance between the upper and the bottom; the connecting member There is a first connecting portion and a second connecting portion separated by a fourth distance up and down; the first axis formed by the first positioning and the second positioning of the fixing member is connected with the first axis on the connecting member The second axis formed by a connecting part and a second connecting part are parallel to each other; the third distance of the fixing part is approximately equal to the fourth distance of the connecting part. For example, the probe driving device described in item 4 of the scope of patent application, wherein the first seat frame is provided with a side seat frame standing upright and a horizontal seat frame, which is fixed relative to the side seat frame. The other operating end is recessed to one side with a hollow probe displacement interval. For the probe driving device described in item 15 of the scope of patent application, the operating end of the horizontal seat frame is provided with a connecting piece downward, and the bottom end of the connecting piece maintains an upper limit distance from one side of the probe seat. For example, the probe driving device described in item 16 of the scope of patent application, the connecting member is provided with a supporting seat facing the connecting member, and the supporting seat is provided with a plurality of slits with a groove on one side. The needle pivots through the slit on the supporting seat. For the probe driving device described in item 16 of the scope of patent application, a drill seat is arranged above the horizontal seat frame of the first seat frame, a drill block is arranged at a pivot end of the drill seat, and a pin hole is provided on the drill block , The probe is pivoted in the pinhole. For the probe driving device described in item 18 of the scope of patent application, the drill base is correspondingly arranged under a first carrier plate of a measuring station of a sorting machine, and the needle in the drill block on the pivot end The hole is located below a loading slot for detecting the object to be tested in the loading slot. A probe driving device, comprising a device for executing the probe driving method as described in any one of items 1 to 3 in the scope of the patent application, the device comprising: the first mount for fixing the micro-motion mechanism, and The probe mechanism of the probe holder linked with the micro-motion mechanism.

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